JP2016196169A - Head and liquid jet device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a head and a liquid jet device which achieve high-quality liquid jetting by reducing a difference of pressure losses between nozzle arrays for jetting a plurality of liquids, and can reduce a discharge amount of the liquid during cleaning.SOLUTION: Nozzle arrays 21a for discharging ink of a same color are arranged in a position symmetrical around a reference line C extending in a first direction X. A liquid flow channel 500 includes an upstream flow channel 510 which is on an upstream side than a filter 245, and a downstream flow channel 520 which is formed for each nozzle array 21a on a downstream side than the filter 245. The upstream flow channel 510 includes a first horizontal flow channel 531 arranged between the first flow channel member 210 and a second flow channel member 220. The downstream flow channel 520 includes a second horizontal flow channel 532 arranged between a filter holding member 240 and a third flow channel member 230. The first horizontal flow channel 531 is branched and communicates with the respective downstream flow channel 520. The second horizontal flow channel 532 is shorter than the first horizontal flow channel 531.SELECTED DRAWING: Figure 10

Description

  The present invention relates to a head and a liquid ejecting apparatus, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as a liquid.

  The piezo ink jet system is an on-demand ink jet printing system that discharges ink droplets by applying a voltage to a piezo element to deform it (JIS Z8123-1: 2013).

  A permanent head (hereinafter referred to as a head) is a mechanical part or an electric part of a printer body that continuously or intermittently generates ink droplets (JIS Z8123-1: 2013).

  A head used in a piezo ink jet method includes a flow path forming substrate in which a pressure generation chamber communicating with a nozzle for ejecting droplets is formed, a piezo element provided on one side of the flow path forming substrate, and a flow path forming substrate. And a drive circuit board provided with a drive circuit for driving the piezo element. The piezo element is driven by the drive circuit to cause a pressure change in the liquid in the pressure generating chamber. Thus, droplets are ejected from the nozzle.

  As an example of the head, a head including a plurality of head main bodies provided with a nozzle array for discharging liquid and a flow path member for supplying liquid to each head main body from liquid storage means such as an ink cartridge is known. ing. Each head body includes a nozzle row in which nozzles for ejecting droplets are arranged in one direction, and the nozzle rows are arranged in a direction intersecting with one direction.

  For example, in a head having 8 nozzle rows, the center of 8 nozzle rows, that is, between the 4th and 5th rows, such as yellow, cyan, magenta, black, black, magenta, cyan, and yellow. A flow path member or the like is configured so that ink of the same color is supplied to a nozzle array that is symmetric about the center (see Patent Document 1, for example). An ink jet recording apparatus having such a head performs a recording operation while reciprocally moving the head relative to a recording medium. Thereby, the landing order of the inks of the respective colors with respect to the ejection medium can be made uniform in the forward path and the backward path, and high-quality printing can be performed.

  In addition, as a flow path member that supplies ink to a plurality of nozzle rows, there is one in which a flow path through which ink supplied from an ink cartridge that stores ink of each color flows is branched in the middle (for example, Patent Document 2). reference). Such a flow path member has a filter that removes foreign matters and bubbles from the ink supplied from the ink cartridge, and the ink is arranged in the nozzle rows arranged symmetrically by branching the flow path on the downstream side of the filter. Supply. Thereby, a kind of liquid can supply ink to a plurality of nozzle rows.

JP 2013-039762 A Japanese Patent Laying-Open No. 2015-033838

  However, the flow path member is provided with the flow paths of the inks of the respective colors. However, since the nozzle rows are symmetrically arranged for each color as described above, the length of the flow path corresponding to each color is set. The pressure loss between the nozzle arrays may be different. For example, since yellow is located on the outermost side of the nozzle row and black is located on the innermost side of the nozzle row, the flow path for supplying yellow ink is longer than the flow path for supplying black ink. In this way, the degree of pressure loss differs between the flow paths for supplying various inks, which affects the print quality of the ejected ink.

  In the head, cleaning is performed by sucking ink from the nozzle and discharging air bubbles from the flow path downstream of the filter together with the ink. On the other hand, in the flow path member described above, the flow path is branched downstream of the filter, and the flow path is configured according to the arrangement of each nozzle row, so the flow path length downstream of the filter is upstream. Longer than that. For this reason, at the time of cleaning, the amount of ink discharged from the flow path downstream from the filter increases.

  Note that such a problem is not limited to a head that ejects ink, but also exists in a head that ejects other liquids.

  In view of such circumstances, the present invention provides a head and a liquid ejecting apparatus that can realize high-quality liquid ejection by reducing the difference in pressure loss between nozzle arrays that eject a plurality of liquids. With the goal. Another object of the present invention is to provide a head and a liquid ejecting apparatus that can reduce the amount of liquid discharged during cleaning.

An aspect of the present invention that solves the above problems includes a head body having a nozzle array in which nozzle openings for ejecting liquid are arranged in parallel in a first direction, and a liquid flow path that supplies liquid from the liquid supply means to the head body. And a flow path member having a filter provided in the liquid flow path, and a head in which a plurality of the nozzle rows are arranged in parallel in a second direction crossing the first direction, The nozzle row to be ejected is disposed at a position that is symmetric about a reference line extending in the first direction, and the flow path member includes a first flow path member to which liquid from the liquid supply means is supplied; A second channel member joined to the first channel member, a filter holding member joined to the second channel member to hold the filter, and joined to the filter holding member to the head body. Third flow path for supplying liquid The liquid flow path includes an upstream flow path upstream of the filter and a downstream flow path formed for each of the nozzle rows downstream of the filter, and the upstream flow path includes the first flow path. Including a first horizontal flow path provided between one flow path member and the second flow path member, wherein the downstream flow path is provided between the second flow path member and the third flow path member. The first horizontal flow path branches and communicates with each of the downstream flow paths, and the second horizontal flow path is shorter than the first horizontal flow path. It is in the characteristic head.
In this aspect, since the second horizontal flow path is configured to be shorter than the first horizontal flow path, it is possible to supply the liquid corresponding to the symmetrical arrangement of the nozzle rows and to discharge bubbles during cleaning. Can be improved and the amount of discharged liquid can be reduced. In addition, even when a plurality of liquid flow paths are branched corresponding to the symmetrical arrangement of the nozzle rows, it is possible to suppress variations in the pressure of the liquid supplied to each nozzle row. As a result, a head capable of ejecting high-quality liquid is provided.

  Here, it is preferable that the width of the first horizontal flow path is formed so that a difference in pressure loss in a branch portion that is a flow path of a plurality of branched portions is within a predetermined range. According to this, even in the first horizontal channel on the upstream side, it is formed so as not to cause a difference in pressure loss at the branch portion. Accordingly, it is possible to more reliably suppress the liquid from being supplied at a pressure varying between the nozzle rows to which the same liquid is supplied from the first horizontal flow path, and to perform high-quality liquid injection. Can do.

  Moreover, it is preferable that the said downstream flow path is formed so that the difference of the pressure loss in the said some downstream flow path branched from the said common upstream flow path may become in a predetermined range. According to this, it can suppress more reliably that a liquid is supplied with the pressure which varied between the nozzle rows to which the same liquid is supplied from the several downstream flow path branched from the common upstream flow path. High quality liquid can be ejected.

According to another aspect of the invention, a liquid ejecting apparatus includes the head according to the above aspect.
In this aspect, it is possible to reduce the difference in pressure loss between the nozzle arrays that eject a plurality of liquids, to realize high-quality liquid ejection, and to reduce the amount of liquid discharged during cleaning. A liquid ejecting apparatus is provided.

It is a disassembled perspective view of a head main body. It is a top view of a head body. FIG. 3 is a cross-sectional view taken along line A-A ′ of FIG. 2. It is a disassembled perspective view of a head. It is a top view of the 2nd channel member. It is a top view of a filter holding member. It is a top view of the 3rd channel member. It is a top view of the head case which supported the drive circuit. It is a bottom view of a head. It is principal part sectional drawing of a head. 1 is a schematic view showing an ink jet recording apparatus.

<Embodiment 1>
Hereinafter, the present invention will be described in detail based on embodiments. In this embodiment, an ink jet recording head (hereinafter referred to as a head) that ejects ink will be described as an example of a permanent head.

  First, an example of a head body included in the head according to the present embodiment will be described. 1 is an exploded perspective view of the head body, FIG. 2 is a plan view of the head body, and FIG. 3 is a cross-sectional view of the head body taken along the line A-A ′.

  The head body 2 includes a plurality of members such as a flow path forming substrate 10, a communication plate 15, a nozzle plate 20, a protective substrate 30, a compliance substrate 45, a case member 40, and a wiring substrate 121.

For the flow path forming substrate 10, a metal such as stainless steel or Ni, a ceramic material typified by ZrO ₂ or Al ₂ O ₃ , a glass ceramic material, an oxide such as MgO, LaAlO ₃ , or the like can be used. In the present embodiment, the flow path forming substrate 10 is made of a silicon single crystal substrate. In the flow path forming substrate 10, the pressure generating chambers 12 partitioned by a plurality of partition walls are arranged in parallel along a direction in which a plurality of nozzle openings 21 for discharging ink are arranged in parallel. Such a pressure generating chamber is formed by anisotropic etching from one surface side of the flow path forming substrate 10.

  Hereinafter, the direction in which the pressure generating chambers 12 are arranged in parallel (also the direction in which the nozzle openings 21 are arranged in parallel) is referred to as the juxtaposed direction of the pressure generating chambers 12 or the first direction X. Further, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure generation chambers 12 are arranged in parallel in the first direction X, and in this embodiment, two rows. Hereinafter, a direction in which a plurality of rows of the pressure generating chambers 12 are arranged is referred to as a second direction Y. Furthermore, a direction that intersects the first direction X and the second direction Y is referred to as an ink droplet (droplet) ejection direction, or a third direction Z. The third direction is a direction in which the head body and the head substrate are stacked. The coordinate axes shown in each figure represent a first direction X, a second direction Y, and a third direction Z. The direction of the arrow is also referred to as a positive (+) direction, and the opposite direction is also referred to as a negative (-) direction. . In the present embodiment, the relationship in each direction (X, Y, Z) is orthogonal, but the arrangement relationship of each component is not necessarily limited to being orthogonal.

  The communication plate 15 and the nozzle plate 20 are stacked in the third direction Z on one side of the flow path forming substrate 10 (in the third direction Z, + Z direction side). That is, the head body 2 includes a communication plate 15 provided on one surface of the flow path forming substrate 10 and a nozzle plate 20 provided on the opposite surface side of the communication plate 15 from the flow path forming substrate 10.

  The communication plate 15 is provided with a nozzle communication path 16 that communicates the pressure generation chamber 12 and the nozzle opening 21. The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. By providing the communication plate 15 in this manner, the nozzle opening 21 of the nozzle plate 20 and the pressure generating chamber 12 can be separated from each other, so that the ink in the pressure generating chamber 12 is contained in the ink generated by the ink near the nozzle opening 21. Less susceptible to thickening due to moisture evaporation. Further, since the nozzle plate 20 only needs to cover the opening of the nozzle communication path 16 that communicates the pressure generating chamber 12 and the nozzle opening 21, the area of the nozzle plate 20 can be made relatively small, and the cost can be reduced. be able to.

  Further, the communication plate 15 is provided with a first manifold portion 17 that constitutes a part of the manifold 100 and a second manifold portion 18 (throttle channel, orifice channel).

  The first manifold portion 17 is provided through the communication plate 15 in the thickness direction (the stacking direction of the communication plate 15 and the flow path forming substrate 10 (third direction Z)). The second manifold portion 18 is provided to open to the nozzle plate 20 side of the communication plate 15 without penetrating the communication plate 15 in the thickness direction.

  Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end portion in the second direction Y of the pressure generation chamber 12 for each pressure generation chamber 12. The supply communication path 19 communicates the second manifold portion 18 and the pressure generation chamber 12.

  As the communication plate 15, a metal such as stainless steel or nickel (Ni), or a ceramic such as zirconium (Zr) can be used. The communication plate 15 is preferably made of a material having the same linear expansion coefficient as the flow path forming substrate 10. That is, when a material having a linear expansion coefficient significantly different from that of the flow path forming substrate 10 is used as the communication plate 15, the flow path forming substrate 10 and the communication plate 15 are warped by being heated or cooled. In this embodiment, by using the same material as the flow path forming substrate 10 as the communication plate 15, that is, a silicon single crystal substrate, it is possible to suppress the occurrence of warping due to heat, cracking due to heat, peeling, and the like.

  In the nozzle plate 20, nozzle openings 21 communicating with the pressure generation chambers 12 through the nozzle communication passages 16 are formed. Such nozzle openings 21 are arranged in parallel in the first direction X to form a nozzle row 21a. Two rows of nozzle rows 21 a arranged in parallel in the first direction X are formed in the second direction Y. Also, the surface of the nozzle plate 20 that ejects ink droplets, that is, the surface opposite to the pressure generation chamber 12 is referred to as a liquid ejection surface 20a.

  As such a nozzle plate 20, for example, a metal such as stainless steel (SUS), an organic material such as a polyimide resin, a silicon single crystal substrate, or the like can be used. In addition, by using a silicon single crystal substrate as the nozzle plate 20, the linear expansion coefficients of the nozzle plate 20 and the communication plate 15 are made equal, and the occurrence of warpage due to heating or cooling, cracks due to heat, peeling, and the like are suppressed. can do.

  On the other hand, a diaphragm 50 is formed on the surface of the flow path forming substrate 10 opposite to the communication plate 15. In the present embodiment, an elastic film 51 made of silicon oxide provided on the flow path forming substrate 10 side and an insulator film 52 made of zirconium oxide provided on the elastic film 51 are provided as the diaphragm 50. I made it. The liquid flow path such as the pressure generation chamber 12 is formed by anisotropically etching the flow path forming substrate 10 from one side (the side where the nozzle plate 20 is bonded). The other surface of the liquid flow path is defined by the elastic film 51.

  A piezoelectric actuator 130 having a first electrode 60, a piezoelectric layer 70, and a second electrode 80, which is an example of a pressure generating unit, is provided on the vibration plate 50 of the flow path forming substrate 10. Here, the piezoelectric actuator 130 refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. In general, one of the electrodes of the piezoelectric actuator 130 is used as a common electrode, and the other electrode is patterned for each pressure generating chamber 12. In the present embodiment, the first electrode 60 is continuously provided across the plurality of piezoelectric actuators 130 to be a common electrode, and the second electrode 80 is independently provided for each piezoelectric actuator 130 to be an individual electrode. Of course, there is no problem even if it is reversed for the convenience of the drive circuit and wiring. In the above-described example, the diaphragm 50 includes the elastic film 51 and the insulator film 52. However, the present invention is not limited to this. For example, the vibration film 50 includes the elastic film 51 and the insulating film. Any one of the body films 52 may be provided, and the elastic film 51 and the insulator film 52 are not provided as the vibration plate 50, and only the first electrode 60 acts as the vibration plate. Also good. Further, the piezoelectric actuator 130 itself may substantially double as a diaphragm.

The piezoelectric layer 70 is made of an oxide piezoelectric material having a polarization structure. For example, the piezoelectric layer 70 can be made of a perovskite oxide represented by the general formula ABO ₃ , and can be made of a lead-based piezoelectric material containing lead or non-lead. A lead-based piezoelectric material or the like can be used.

  Furthermore, each second electrode 80 that is an individual electrode of the piezoelectric actuator 130 is drawn from the vicinity of the end opposite to the supply communication path 19 and extended to the diaphragm 50. For example, One end portions of lead electrodes 90 made of gold (Au) or the like are connected to each other.

  Further, a wiring substrate 121 provided with a drive circuit 120 for driving the piezoelectric actuator 130 is connected to the other end of the lead electrode 90. As the wiring substrate 121, a flexible sheet-like substrate such as a COF substrate can be used.

  A second terminal 122 that is electrically connected to a first terminal 311 of the head substrate 300 described later is formed on one surface of the wiring substrate 121. Note that the driver circuit 120 is not necessarily provided on the wiring board 121. That is, the wiring board 121 is not limited to the COF board, and may be FFC, FPC, or the like.

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the piezoelectric actuator 130 side. The protective substrate 30 has a holding portion 31 that is a space for protecting the piezoelectric actuator 130. The holding part 31 has a concave shape that opens to the flow path forming substrate 10 side without penetrating the protective substrate 30 in the third direction Z that is the thickness direction. In addition, the holding unit 31 is provided independently for each column configured by the piezoelectric actuators 130 arranged in parallel in the first direction X. That is, the two holding portions 31 are juxtaposed in the second direction Y so as to accommodate the rows of the piezoelectric actuators 130 juxtaposed in the first direction X. Such a holding part 31 should just have the space of the grade which does not inhibit the motion of the piezoelectric actuator 130, and the said space may be sealed or may not be sealed.

  The protective substrate 30 has a through hole 32 penetrating in the third direction Z, which is the thickness direction. The through-hole 32 is provided across the first direction X, which is the direction in which the plurality of piezoelectric actuators 130 are arranged, between the two holding portions 31 arranged in parallel in the second direction Y. That is, the through hole 32 is an opening having long sides in the direction in which the plurality of piezoelectric actuators 130 are arranged. The other end of the lead electrode 90 extends so as to be exposed in the through hole 32, and the lead electrode 90 and the wiring substrate 121 are electrically connected in the through hole 32.

  As such a protective substrate 30, it is preferable to use substantially the same material as the coefficient of thermal expansion of the flow path forming substrate 10, for example, glass, ceramic material, etc. In this embodiment, the same material as the flow path forming substrate 10 is used. The silicon single crystal substrate was used. Moreover, the joining method of the flow path forming substrate 10 and the protective substrate 30 is not particularly limited. For example, in the present embodiment, the flow path forming substrate 10 and the protective substrate 30 are joined via an adhesive (not shown). Has been.

  The case member 40 has substantially the same shape as the communication plate 15 in a plan view, and is bonded to the protective substrate 30 and is also bonded to the communication plate 15. Specifically, the case member 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side. The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. Thus, the third manifold portion 42 is defined by the case member 40 on the outer peripheral portion of the flow path forming substrate 10.

  A manifold 100 is configured by the first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15 and the third manifold portion 42 defined by the case member 40. That is, the manifold 100 includes the first manifold portion 17, the second manifold portion 18, and the third manifold portion 42. Further, the manifold 100 of the present embodiment is disposed on both outer sides of the two rows of pressure generating chambers 12 in the second direction Y, and two manifolds provided on both outer sides of the two rows of pressure generating chambers 12. 100 are provided independently so as not to communicate with each other in the head main body 2. Of course, the two manifolds 100 may communicate with each other.

  The case member 40 has an introduction port 44 communicating with the manifold 100. That is, the introduction port 44 is an opening serving as an inlet for introducing the ink supplied to the head body 2 into the manifold 100.

  The case member 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring substrate 121 is inserted. The other end of the wiring board 121 extends in the through direction of the through hole 32 and the connection port 43, that is, in the third direction Z and opposite to the ink droplet ejection direction (−Z side). Has been.

  In addition, as a material of such a case member 40, resin, a metal, etc. can be used, for example. Incidentally, the case member 40 can be mass-produced at low cost by molding a resin material.

  The compliance substrate 45 is provided on the surface of the communication plate 15 where the first manifold portion 17 and the second manifold portion 18 are opened. The compliance substrate 45 has substantially the same size as the communication plate 15 in plan view, and is provided with a first opening 45a that exposes the nozzle plate 20. The opening on the liquid ejection surface 20a side of the first manifold portion 17 and the second manifold portion 18 is sealed while the compliance substrate 45 exposes the nozzle plate 20 through the first opening 45a. That is, the compliance substrate 45 defines a part of the manifold 100.

  Such a compliance substrate 45 includes a sealing film 46 and a fixed substrate 47. The sealing film 46 is made of a flexible film-like thin film (for example, a thin film having a thickness of 20 μm or less formed of polyphenylene sulfide (PPS) or the like), and the fixed substrate 47 is made of stainless steel (SUS) or the like. It is made of a hard material such as metal. Since the region of the fixed substrate 47 facing the manifold 100 is the second opening 48 that is completely removed in the thickness direction, only one surface of the manifold 100 is made of a flexible sealing film 46. It becomes the compliance part 49 which is the sealed flexible part. In the present embodiment, one compliance portion 49 is provided corresponding to one manifold 100. That is, in this embodiment, since the two manifolds 100 are provided, the two compliance portions 49 are provided on both sides in the second direction Y with the nozzle plate 20 interposed therebetween.

  In the head main body 2 having such a configuration, when ink is ejected, the ink is taken in via the introduction port 44, and the inside of the flow path is filled with ink from the manifold 100 to the nozzle opening 21. Thereafter, according to a signal from the drive circuit 120, a voltage is applied to each piezoelectric actuator 130 corresponding to the pressure generating chamber 12, so that the diaphragm 50 is flexibly deformed together with the piezoelectric actuator 130. As a result, the pressure in the pressure generating chamber 12 is increased and ink droplets are ejected from the predetermined nozzle openings 21.

  The head 1 having the head body 2 described above will be described in detail. 4 is an exploded perspective view of the head, FIG. 5 is a plan view of the second flow path member, FIG. 6 is a plan view of the filter holding member, and FIG. 7 is a plan view of the third flow path member. 8 is a plan view of the head case supporting the drive circuit, FIG. 9 is a bottom view of the head, and FIG. 10 is a cross-sectional view of the main part of the head. FIG. 10 shows a cross section taken along the line BB ′ for the first flow path member, the second flow path member, and the filter holding member in order to show the configuration of the liquid flow path. The section of the circuit and the head case is indicated by a CC ′ line cross section. Moreover, in FIG. 4, illustration of the sealing member is omitted. FIG. 5 also shows an enlarged view of the area surrounded by the alternate long and short dash line P. Similarly, FIG. 8 also shows an enlarged view of the area surrounded by the alternate long and short dash line Q.

  The head 1 of this embodiment ejects four colors, cyan, magenta, yellow, and black, as a plurality of types of ink. Of course, the number of types of ink is not limited to four, and the type of ink is not limited to these.

  As shown in FIGS. 4 to 10, the head 1 includes four head main bodies 2, a head case 250 that holds the head main body 2, and a head substrate 300 that is supported on the head case 250.

  The flow path member 200 is a member having a liquid flow path 500 for supplying a liquid from an ink supply means such as an ink cartridge to the head body 2 and a filter 245 provided in the liquid flow path 500. Specifically, the flow path member 200 includes a first flow path member 210, a second flow path member 220, a filter holding member 240, and a third flow path member 230.

  The first flow path member 210, the second flow path member 220, the filter holding member 240, and the third flow path member 230 are integrally formed by, for example, an adhesive or welding. The means for laminating and fixing these members is not particularly limited, and may be fixed with screws, clamps, or the like.

  The first flow path member 210 is a member constituting the upstream flow path 510 that is a part of the liquid flow path 500. Specifically, the first flow path member 210 is connected to a liquid supply means such as an ink tank or an ink cartridge in which ink is held on the side opposite to the second flow path member 220 (−Z direction side). A connecting portion 211. In the present embodiment, the connecting portion 211 protrudes in a needle shape. The first flow path member 210 is provided with a first upstream flow path 511 that opens to the top surface of the connection portion 211 and penetrates in the thickness direction (third direction Z) of the first flow path member 210. .

  Note that a liquid holding unit such as an ink cartridge may be directly connected to the connection unit 211, or a liquid holding unit such as an ink tank may be connected via a supply pipe such as a tube.

  The second flow path member 220 is a member constituting the upstream flow path 510 that is a part of the liquid flow path 500. Specifically, the first groove 225 is formed on the surface of the second flow path member 220 on the first flow path member 210 side (the −Z side in the third direction Z). By joining the second flow path member 220 to the first flow path member 210, a first horizontal flow path 531 in which the first groove 225 is sealed by the first flow path member 210 is formed.

  The second flow path member 220 is provided with a first filter chamber 221 on the surface on the filter holding member 240 side (+ Z direction side). The first filter chamber 221 is a recess formed so as to increase in diameter toward the filter holding member 240 side. The second flow path member 220 is formed with a second upstream flow path 512 that connects the first filter chamber 221 and the first horizontal flow path 531.

  The first flow path member 210 and the second flow path member 220 as described above form an upstream flow path 510 including a first upstream flow path 511, a first horizontal flow path 531 and a second upstream flow path 512.

  The upstream flow path 510 is a part from the connection part 211 to which a liquid is supplied from an ink supply means such as an ink cartridge in the liquid flow path 500 of the flow path member 200 to a filter 245 described later. In the upstream flow path 510, the first horizontal flow path 531 is branched into two on the way, and each reaches the filter 245. That is, in the liquid flow channel 500, the first horizontal flow channel 531 is branched into two in the upstream flow channel 510 that is upstream of the filter 245.

  The flow path member 200 of the present embodiment includes four upstream flow paths 510 corresponding to the four color inks, and each color ink is supplied to each upstream flow path 510.

  The filter holding member 240 is a member that has a part of the liquid channel 500 and holds the filter 245 provided in the liquid channel 500. Specifically, the second filter chamber 242 is formed on the surface of the filter holding member 240 on the second flow path member 220 side (the −Z side in the third direction Z). The second filter chamber 242 is a concave portion formed so as to increase in diameter toward the second flow path member 220 side. The filter holding member 240 is provided with a first downstream flow path 241 that communicates with the second filter chamber 242 and penetrates in the thickness direction (third direction Z).

  The second filter chamber 242 is provided so as to face the first filter chamber 221. In addition, the second flow path member 220 and the filter 245 are joined to form the filter chamber 260 including the first filter chamber 221 and the second filter chamber 242. The filter chamber 260 is a space constituting a part of the liquid flow path 500, and a filter 245 is provided so as to cross the space.

  The filter 245 removes bubbles and foreign matters contained in the ink. With the filter 245 arranged in this manner, the foreign matter and bubbles contained in the ink are trapped by the filter 245 and flow into the first downstream channel 241 from the ink supplied from the upstream channel 510.

  The third flow path member 230 is a member constituting the downstream flow path 520 that is a part of the liquid flow path 500. Specifically, the second groove 235 is formed on the surface of the third flow path member 230 on the filter holding member 240 side (the −Z side in the third direction Z). By joining the third flow path member 230 to the filter holding member 240, a second horizontal flow path 532 in which the second groove 235 is sealed with the filter holding member 240 is formed.

  The third flow path member 230 has a second downstream flow path 232 that communicates with the second horizontal flow path 532 and penetrates in the thickness direction (third direction Z).

  The filter holding member 240 and the third flow path member 230 form a downstream flow path 520 that includes a first downstream flow path 241, a second horizontal flow path 532, and a second downstream flow path 232.

  The downstream channel 520 is a portion from the filter 245 to the second downstream channel 232 in the liquid channel 500 of the channel member 200. The downstream flow path 520 is not branched in the middle, and is a single flow path from the filter 245 to the second downstream flow path 232.

  In the flow path member 200 of the present embodiment, four upstream flow paths 510 branch into two and communicate with the downstream flow path 520 corresponding to four color inks. Have. Details of the liquid channel 500 will be described later.

  The head case 250 is a member that holds the head body 2. The head case 250 is provided with a concave accommodating portion 254 on the surface (+ Z side) opposite to the flow path member 200. The accommodating portion 254 is large enough to accommodate the four head bodies 2 arranged so that the nozzle rows 21a are arranged in the second direction Y.

  The head case 250 has a plurality of protrusions 251 formed on the surface on the flow path member 200 side (−Z side). In the present embodiment, eight protrusions 251 are provided. Each protrusion 251 is arranged to face the eight downstream flow paths 520 branched from the liquid flow path 500 provided in the flow path member 200.

  Each protrusion 251 is provided with a first communication channel 253 that penetrates the head case 250 in the third direction Z. A first communication channel 253 is open on the top surface of each protrusion 251 (the surface facing the channel member 200). The protruding portion 251 side of each first communication channel 253 communicates with a second communication channel 271 of a seal member 270 described later. Further, the accommodating portion 254 side of each first communication channel 253 communicates with the introduction port 44 of the case member 40 of the head body 2.

  The head case 250 has a plurality of first insertion holes 252 through which the wiring board 121 of the head body 2 is inserted. Specifically, each first insertion hole 252 penetrates in the third direction Z and is formed to communicate with the second insertion hole 302 of the head substrate 300. In the present embodiment, four first insertion holes 252 are provided corresponding to the respective wiring boards 121 provided in the four head main bodies 2.

  The head case 250 is provided with a connector connection port 257 in which a wall portion 256 protruding toward the flow path member 200 (−Z side) is partially cut out.

  A head substrate 300 is supported on the surface of the head case 250 on the flow path member 200 side (−Z side). The head substrate 300 is a member to which a wiring substrate 121 is connected, and a circuit for controlling the ejection operation and the like of the head 1 and electrical components such as resistors are mounted via the wiring substrate 121.

  A first terminal 311 to which the second terminal 122 of the wiring substrate 121 is electrically connected is formed on the surface of the head substrate 300 on the flow path member 200 side. The head substrate 300 has a plurality of second insertion holes 302 through which the wiring substrate 121 electrically connected to the head body 2 is inserted. Specifically, each second insertion hole 302 is formed so as to penetrate in the third direction Z and communicate with the first insertion hole 252 of the head case 250. In the present embodiment, four second insertion holes 302 are provided corresponding to the respective wiring boards 121 of the four head main bodies 2.

  Further, the head substrate 300 is provided with a through hole 301 penetrating in the third direction Z. The protrusion 251 of the head case 250 is inserted through the through hole 301. In the present embodiment, a total of eight through holes 301 are provided so as to face the protrusions 251.

  The head substrate 300 is provided with connectors 320 on both end sides in the second direction Y. The connector 320 is exposed to the outside from a connector connection port 257 provided in the head case 250. The connector 320 is connected to a circuit or the like provided on the head substrate 300, and is connected to an external wiring (not shown). Control signals, power, and the like are supplied to the circuit of the head substrate 300 through the external wiring.

  The shape of each through hole 301 formed in the head substrate 300 is not limited to the above-described form. For example, the head substrate 300 may be formed with an insertion hole, a notch or the like so as not to hinder the protrusion 251 from connecting to the downstream flow path 520.

  The wiring substrate 121 connected to the head body 2 is inserted into the connection port 43 of the head body 2, the first insertion hole 252 of the head case 250, and the second insertion hole 302 of the head substrate 300, and the wiring substrate 121 is inserted into the head substrate 300. Is bent to the first terminal 311 side. The first terminal 311 of the head substrate 300 is electrically connected to the second terminal 122 provided on the wiring substrate 121. There is no particular limitation on the connection mode of the first terminal 311 and the second terminal 122. For example, welding such as solder connection, anisotropic conductive adhesive (ACP, ACF), non-conductive adhesive (NCP, Electrical connection can be achieved by crimping with NCF) or the like interposed.

  A seal member 270 for preventing ink leakage is provided between the head substrate 300 and the third flow path member 230. As a material of the seal member 270, a material (elastic material) that is liquid-resistant and elastically deformable with respect to a liquid such as ink used in the head 1, for example, rubber or elastomer can be used.

  Specifically, the seal member 270 is formed with a second communication channel 271 penetrating in the third direction Z. The seal member 270 is sandwiched between the third flow path member 230 and the protrusion 251 in a state where the downstream flow path 520 and the first communication flow path 253 communicate with each other via the second communication flow path 271. In the present embodiment, eight second communication channels 271 are formed corresponding to the downstream channels 520, and the eight downstream channels 520 communicate with the first communication channels 253 of the eight protrusions 251. Yes.

  The liquid channel 500 of the channel member 200 communicates with the introduction port 44 of the head body 2 via the first communication channel 253 of the head case 250 and the second communication channel 271 of the seal member 270. Yes.

  The cover head 400 is a member to which the head main body 2 is fixed and fixed to the head case 250, and an opening 401 that exposes the nozzle opening 21 is provided. In the present embodiment, the opening 401 has a size that exposes the nozzle plate 20, that is, substantially the same opening as the first opening 45 a of the compliance substrate 45.

  The cover head 400 is bonded to the opposite surface side (+ Z side) of the compliance substrate 45 to the communication plate 15 and seals the space of the compliance portion 49 on the opposite side to the manifold 100. By covering the compliance portion 49 with the cover head 400 in this manner, the compliance portion 49 can be prevented from being destroyed even when a recording medium such as paper comes into contact. Further, it is possible to suppress the ink from adhering to the compliance portion 49 and to wipe the ink adhering to the surface of the cover head 400 with, for example, a wiper blade. It is possible to suppress contamination. Although not particularly illustrated, the space between the cover head 400 and the compliance unit 49 is open to the atmosphere. Further, the cover head 400 may be provided independently for each head body 2.

  As described above, the head 1 is configured by stacking the head case 250 holding the head body 2, the head substrate 300, the seal member 270, and the flow path member 200. In the head 1 having such a configuration, when ink is ejected, the ink supplied from the connection portion 211 is supplied to the head main body 2 via the liquid channel 500. Then, an external control signal is transmitted to the head substrate 300, and ink is ejected by the head body 2 in accordance with the control signal as described above.

  Here, the liquid flow path 500 of the head 1 will be described in detail. First, as shown in FIG. 9, the head body 2 has two rows of nozzle rows 21 a, and the nozzle rows 21 a extending in the first direction X are arranged in parallel in the second direction Y. One head body 2 is fixed to the head case 250 and the cover head 400.

  In the present embodiment, four colors of ink are used, but the nozzle rows 21 a that eject the same color of ink are arranged so as to be symmetric with respect to a reference line C extending in the first direction X. Hereinafter, such an array of nozzle rows 21a is also referred to as a symmetric array.

  The symmetrical arrangement of the nozzle rows 21a means that the arrangement of the types of ink ejected from the nozzle rows 21a arranged on one side (for example, + Y side) of the reference line C is the other side (for example, -Y side) of the reference line C. This means that the arrangement of the types of ink ejected from the nozzle row 21a arranged in the reverse is opposite.

  The four nozzle rows 21a arranged on the + Y side of the reference line C are referred to as a nozzle group L, and the four nozzle rows 21a arranged on the −Y side of the reference line C are referred to as a nozzle group R. In the present embodiment, the arrangement of the types of ink ejected from the nozzle row 21a constituting the nozzle group L is black (K), magenta (M), cyan (C), yellow (Y ). The arrangement of the types of ink ejected from the nozzle row 21a constituting the nozzle group R is yellow (Y), cyan (C), magenta (M), and black (K) from -Y to + Y. .

  In addition, as described above, the arrangement in which the nozzle rows 21a that eject ink of the same color are arranged symmetrically about the reference line C is based on the arrangement of the types of ink ejected from the nozzle rows 21a. It only needs to be symmetrical about C. Therefore, it is not necessary that the nozzle rows 21a that eject ink of the same color are arranged at equal distances with the reference line C as the center.

  Further, in the present embodiment, the two nozzle rows 21a are provided in one head main body 2, but the relationship between the head main body 2 and the nozzle rows 21a is not limited to such a mode. All the nozzle rows 21 a may be provided in one head main body 2, or one nozzle row 21 a may be provided in one head main body 2.

  The liquid channel 500 that supplies ink to the head main body 2 having the nozzle rows 21a arranged in this way will be described in detail.

  First, the first horizontal channel 531 of the upstream channel 510 constituting the liquid channel 500 will be described. As shown in FIGS. 5 and 10, four first horizontal flow paths 531 (first grooves 225) are provided corresponding to four colors of ink, and are branched into two. In the present embodiment, the intermediate portion 531 a other than both ends of the first horizontal flow channel 531 communicates with the first upstream flow channel 511, and both end portions 531 b communicate with the second upstream flow channel 512. Note that Y, M, C, and K in FIG. 5 mean yellow, magenta, cyan, and black, which are the colors of ink flowing into the first horizontal flow path 531, respectively.

  The first upstream flow path 511 is arranged so as to overlap with the connection portion 211 serving as an inlet for the ink supplied from the liquid supply means in a plan view. On the other hand, the second upstream flow channel 512 is arranged so as to overlap with the filter chamber 260 to which ink is supplied from the second upstream flow channel 512 in a plan view.

  The first upstream flow path 511 and the second upstream flow path 512 are arranged so as to be shifted in a plan view of FIG. The first upstream flow path 511 and the second upstream flow path 512 communicate with each other through a first horizontal flow path 531. Therefore, even if the first upstream flow path 511 and the second upstream flow path 512 are shifted in plan view, ink can be supplied from the first upstream flow path 511 to the second upstream flow path 512.

  In other words, the liquid connected to the connecting portion 211 is formed by forming the first horizontal flow path 531 regardless of the position, size, range, and the like of the connecting portion 211 and the filter chamber 260. Ink can be supplied to the filter chamber 260 from the supply means.

  Next, the second horizontal channel 532 of the downstream channel 520 constituting the liquid channel 500 will be described. As shown in FIGS. 6, 7, and 9, eight second horizontal flow paths 532 (second grooves 235) are provided corresponding to the eight filter chambers 260 communicated with the branched second upstream flow path 512. It has been. In the present embodiment, the first end 532a that is one end of the second horizontal flow path 532 communicates with the first downstream flow path 241 and the second end 532b that is the other end is the second downstream flow. It communicates with the path 232. In FIG. 6, Y, M, C, and K mean yellow, magenta, cyan, and black, which are the colors of the ink flowing into the filter chamber 260, respectively. Similarly, Y, M, C, and K in FIG. 7 also mean the color of ink flowing into each second horizontal flow path 532.

  The first downstream flow path 241 is arranged so as to overlap the filter chamber 260 in plan view. On the other hand, the second downstream flow path 232 is arranged so as to overlap the introduction port 44 of the head body 2 to which ink is supplied in plan view.

  The first downstream flow path 241 and the second downstream flow path 232 are displaced from each other in plan view of FIG. The first downstream channel 241 and the second downstream channel 232 communicate with each other through a second horizontal channel 532. Therefore, even if the first downstream flow path 241 and the second downstream flow path 232 are shifted in plan view, ink can be supplied from the first downstream flow path 241 to the second downstream flow path 232.

  In other words, the second horizontal flow path 532 is formed from the filter chamber 260 regardless of the position, size, range, and the like of the filter chamber 260 and the inlet 44 of the head body 2. Ink can be supplied to the inlet 44 of the head body 2.

  The second horizontal flow path 532 configured as described above is shorter than the first horizontal flow path 531.

  The length of the first horizontal flow channel 531 in the present invention refers to the length from the inlet portion where the ink flows into the first horizontal flow channel 531 to the outlet portion where the ink flows out from the first horizontal flow channel 531. In the present embodiment, the length from the intermediate portion 531a that communicates with the first upstream channel 511 to the end portion 531b that communicates with the second upstream channel 512 is the length of the first horizontal channel.

  The length of the second horizontal flow path 532 in the present invention is the length from the inlet portion where the ink flows into the second horizontal flow path 532 to the outlet portion where the ink flows out from the second horizontal flow path 532. Say. In the present embodiment, the length from the first end 532a with which the first downstream channel 241 communicates to the second end 532b with which the second downstream channel 232 communicates is the length of the second horizontal channel.

  As described above, the first horizontal flow path 531 on the upstream side of the filter 245 is formed to be relatively long, and the second horizontal flow path 532 on the downstream side of the filter 245 is formed to be relatively short.

  Here, when the nozzle row 21a is arranged symmetrically, it is necessary to draw the liquid channel 500 in a plane (in the XY plane). For example, as shown in FIG. 9, yellow, cyan, and the like are arranged outside the nozzle row 21a. Corresponding to the arrangement of the nozzle rows 21a, the first horizontal flow path 531 is formed long in the XY plane as shown in FIG. That is, the first horizontal flow path 531 is formed so as to guide the ink to the position of the introduction port 44 of the head main body 2 to which the ink of each color is supplied or the vicinity thereof in the XY plane.

  Since the first horizontal flow path 531 is formed long so as to guide ink to the position of the introduction port 44 in the XY plane, as shown in FIG. 7, the second horizontal flow path 532 is formed of the introduction port 44 in the XY plane. The length required to lead to the position is shortened.

  In this way, by making the first horizontal flow path 531 upstream of the filter 245 longer, it is possible to guide ink to a position (introduction port 44) corresponding to each nozzle row 21a in the XY plane. Since the second horizontal flow path 532 on the downstream side of the filter 245 can be shortened, the length of the downstream flow path 520 on the downstream side of the filter 245 that requires strict bubble management can be shortened. .

  In the upstream flow path 510 upstream of the filter 245, even if bubbles are generated, they are captured by the filter 245, so that it is not necessary to manage the bubbles relatively strictly. On the other hand, in the downstream flow path 520 downstream of the filter 245, for example, when bubbles are generated by permeating the filter 245, there is a possibility that the bubbles are supplied to the head body 2 as they are. . In the head 1, as a countermeasure against such bubbles, in order to eliminate bubbles remaining in the downstream flow path 520, ink is sucked from the head body 2 side regularly or at an arbitrary timing, and the inside of the downstream flow path 520 A cleaning operation for discharging the bubbles together with the ink from the nozzle opening 21 is performed.

  In the head 1 according to the present embodiment, as described above, the time required for the cleaning operation is shortened by shortening the second horizontal flow path 532 in the downstream flow path 520 that requires strict bubble management. Can be reduced.

  In addition, the downstream flow path 520 on the downstream side of the filter 245 supplies ink to the head body 2 without branching. For this reason, by arranging the lengths of the respective downstream flow paths 520, it is possible to suppress the difference in the difference in pressure loss and to equalize the pressure of the ink supplied between the nozzle rows 21a. Thereby, it is possible to suppress the occurrence of variations in the ink pressure between the nozzle rows 21a and to perform high-quality ink ejection.

  The first horizontal flow path 531 branches into two corresponding to the symmetrical arrangement of the nozzle rows 21a. If the branched portions of the first horizontal flow path 531 are the branch portions 538 and 539, the lengths of the branch portions 538 and the branch portions 539 may be different. For this reason, a difference may arise also in a pressure loss from the difference in the length of the two branch part 538 and the branch part 539. FIG. However, the upstream flow path 510 is provided on the upstream side of the filter 245. For this reason, even if one upstream flow path 510 branches and a difference in pressure loss occurs, the influence on the downstream flow path 520 from the filter 245 is limited.

  As described above, according to the head 1 according to the present embodiment, the second horizontal flow path 532 is configured to be shorter than the first horizontal flow path 531, so that ink corresponding to the symmetrical arrangement of the nozzle rows 21 a can be obtained. In addition, it is possible to improve the bubble discharging property during cleaning and reduce the amount of ink discharged. Further, even when the plurality of liquid flow paths 500 are branched in correspondence with the symmetrical arrangement of the nozzle rows 21a, it is possible to suppress variations in the pressure of the ink supplied to the nozzle rows 21a. Thereby, the head 1 capable of ejecting high-quality ink is provided.

  Further, as shown in FIG. 5, the first horizontal flow path is set so that the difference in pressure loss is within a predetermined range at the branching section 538 and the branching section 539 which are the flow paths of the branched parts of the first horizontal flow path 531. 531 may be formed. The branching portion 538 and the branching portion 539 here are portions from the start point to the end point of branching of the first horizontal flow path 531. In the present embodiment, the first horizontal flow path 531 has two branches, and thus has two branch parts 538 and 539. Further, the branching start point of the first horizontal flow path 531 is an intermediate part 531a into which ink flows in, and the branching end point is an end part 531b through which ink flows out (a part communicating with the second upstream flow path 512).

  Since these branch part 538 and branch part 539 are formed corresponding to the symmetrical arrangement of the nozzle row 21a, they have different lengths. For this reason, each width | variety is formed so that the difference of pressure loss may become in the predetermined range. The difference in pressure loss within a predetermined range means that there is no difference in pressure loss between the branching portion 538 and the branching portion 539, or that it is almost negligible.

  As described above, the upstream first horizontal flow path 531 is also formed so as not to cause a difference in pressure loss between the branch portion 538 and the branch portion 539. Accordingly, it is possible to more reliably suppress the supply of ink with a varying pressure between the nozzle rows 21a to which ink of the same color is supplied from the first horizontal flow path 531, and ejecting high-quality ink. It can be performed.

  Although not particularly illustrated, the downstream flow path 520 may be formed so that the difference in pressure loss is within a predetermined range between the plurality of downstream flow paths 520 branched from the common upstream flow path 510. Specifically, the lengths and widths of the first downstream flow path 241, the second downstream flow path 232, and the second horizontal flow path 532 are formed so that the pressure loss difference is within a predetermined range. The difference in pressure loss within the predetermined range means that there is no difference in pressure loss between the downstream flow paths 520 or that it is almost negligible.

  As a result, it is possible to more reliably suppress ink from being supplied with a varying pressure between the nozzle rows 21a to which ink of the same color is supplied from a plurality of downstream channels 520 branched from the common upstream channel 510. And high-quality ink can be ejected.

<Embodiment 2>
The head 1 described in the first embodiment is mounted on the ink jet recording apparatus I. FIG. 11 is a schematic diagram illustrating an ink jet recording apparatus that is an example of a liquid ejecting apparatus.

  In the ink jet recording apparatus I shown in FIG. 11, an ink cartridge 110 as a liquid supply means is detachably attached to the head 1. A carriage 3 on which the head 1 is mounted is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be movable in the axial direction.

  Then, the driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the head 1 is mounted is moved along the carriage shaft 5. On the other hand, the apparatus main body 4 is provided with a conveyance roller 8 as a conveyance means, and a recording sheet S which is a recording medium such as paper is conveyed by the conveyance roller 8. Note that the conveyance means for conveying the recording sheet S is not limited to the conveyance roller, and may be a belt, a drum, or the like.

  In addition, the apparatus main body 4 is provided with suction means 9 that contacts the liquid ejection surface 20a of the head 1 on one side in the moving direction of the carriage 3 and sucks bubbles and foreign substances together with ink from the nozzle openings 21. By such suction means 9, a cleaning operation for sucking and cleaning ink in the vicinity of the nozzle openings 21 of the head 1, initial filling for filling the head 1 with ink, and the like are performed.

  In the above-described ink jet recording apparatus I, the head 1 is mounted on the carriage 3 and moves in the main scanning direction. However, the present invention is not particularly limited to this. For example, the head 1 is fixed, paper or the like The present invention can also be applied to a so-called line-type recording apparatus that performs printing only by moving the recording sheet S in the sub-scanning direction.

  Further, in the above-described example, the ink jet recording apparatus I has a configuration in which the ink cartridge 110 that is a liquid supply unit is mounted on the carriage 3, but is not particularly limited thereto, for example, a liquid storage unit such as an ink tank. May be fixed to the apparatus main body 4 and the liquid supply means and the head 1 may be connected via a supply pipe such as a tube. Further, the liquid supply means may not be mounted on the ink jet recording apparatus.

<Other embodiments>
As mentioned above, although one Embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above.

  For example, the head 1 according to the first embodiment has a head case 250 that holds the head body 2, and the flow path member 200 is configured to supply ink to the head body 2 via the head case 250 and the seal member 270. However, it is not limited to this. For example, the head body 2 may be held by the flow path member 200 and ink may be directly supplied from the flow path member 200 to the head main body 2.

  In addition, the first upstream flow path 511, the second upstream flow path 512, the first downstream flow path 241 and the second downstream flow path 232 of the liquid flow path 500 are along the third direction Z orthogonal to the liquid ejection surface 20a. However, the present invention is not limited to such an embodiment. These flow paths need only contain the third direction Z component, and may be inclined with respect to the third direction Z.

  Although the thin film type piezoelectric actuator 130 has been described as the pressure generating means for causing the pressure change in the pressure generating chamber 12, the present invention is not particularly limited thereto. For example, the thickness formed by a method such as attaching a green sheet. A film-type piezoelectric actuator, a longitudinal vibration-type piezoelectric actuator in which piezoelectric materials and electrode forming materials are alternately stacked to expand and contract in the axial direction can be used. Also, as a pressure generating means, a heating element is arranged in the pressure generating chamber, and droplets are discharged from the nozzle opening by bubbles generated by the heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode. Thus, a so-called electrostatic actuator that discharges liquid droplets from the nozzle openings by deforming the diaphragm by electrostatic force can be used.

  Furthermore, the present invention is intended for a wide range of liquid jet heads in general, for example, for manufacturing recording heads such as various ink jet recording heads used in image recording apparatuses such as printers, and color filters such as liquid crystal displays. The present invention can also be applied to a coloring material ejecting head, an organic EL display, an electrode material ejecting head used for forming electrodes such as an FED (field emission display), a bioorganic matter ejecting head used for biochip manufacturing, and the like.

I ink jet recording apparatus (liquid ejecting apparatus), 1 head, 2 head main body, 20 nozzle plate, 21 nozzle opening, 21a nozzle row, 200 flow path member, 210 first flow path member, 211 connecting portion, 220 second flow Road member, 230 third flow path member, 240 filter holding member, 245 filter, 250 head case, 270 seal member, 300 head substrate, 500 liquid flow path, 510 upstream flow path, 520 downstream flow path, 531 first horizontal flow Road, 532 Second horizontal flow path, 538, 539 Branch

Claims (4)

A head body having a nozzle array in which nozzle openings for ejecting liquid are arranged in parallel in the first direction, a liquid channel for supplying liquid from the liquid supply means to the head body, and a filter provided in the liquid channel A head having a plurality of nozzle rows arranged in a second direction intersecting with the first direction,
The nozzle rows that discharge the same liquid are arranged at symmetrical positions around a reference line extending in the first direction,
The flow path member is bonded to the first flow path member supplied with the liquid from the liquid supply means, the second flow path member bonded to the first flow path member, and the second flow path member. A filter holding member that holds the filter, and a third flow path member that is joined to the filter holding member and supplies liquid to the head body,
The liquid channel includes an upstream channel upstream of the filter, and a downstream channel formed for each nozzle row downstream of the filter,
The upstream flow path includes a first horizontal flow path provided between the first flow path member and the second flow path member,
The downstream flow path includes a second horizontal flow path provided between the filter holding member and the third flow path member,
The first horizontal flow path branches and communicates with each of the downstream flow paths,
The head, wherein the second horizontal flow path is shorter than the first horizontal flow path. The head according to claim 1,
The head is characterized in that the first horizontal flow path is formed with a width of the branch portion so that a difference in pressure loss in a branch portion which is a flow path of a plurality of branched portions is within a predetermined range. In the head according to claim 1 or claim 2,
The downstream flow path is formed so that the difference in pressure loss in the plurality of downstream flow paths branched from the common upstream flow path is within a predetermined range.   A liquid ejecting apparatus comprising the head according to claim 1.

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