JP2016161426A5

JP2016161426A5 -

Info

Publication number: JP2016161426A5
Application number: JP2015041004A
Authority: JP
Filing date: 2015-03-03
Publication date: 2018-04-12
Anticipated expiration: 2035-03-03

Description

本発明の一側面としての位置検出装置は、互いに周期が異なる複数の周期パターンが形成された光学スケールとともに用いられ、可動部材の移動に伴って光学スケールと相対移動する際に複数の周期パターンからの光を受光して該複数の周期パターンの周期に応じた周期でそれぞれ変化する複数の第１の検出信号を生成する光学式の第１の位置検出手段と、可動部材の移動に伴って変化する第２の検出信号を生成する非光学式の第２の位置検出手段と、複数の第１の検出信号を用いて第１の位置信号を生成するとともに、第２の検出信号を用いて第１の位置信号とは分解能が異なる第２の位置信号を生成し、第１の位置信号と第２の位置信号とに基づいて可動部材の絶対位置を示す信号を生成する演算手段とを有することを特徴とする。 The position detection device according to one aspect of the present invention is used with an optical scale in which a plurality of periodic patterns having different periods are formed, and the relative position of the plurality of periodic patterns is determined when the movable member moves relative to the optical scale as the movable member moves. Optical first position detecting means for receiving a plurality of light and generating a plurality of first detection signals that change at a period corresponding to the period of the plurality of periodic patterns, and changes with movement of the movable member A non-optical second position detection means for generating a second detection signal to be generated, and a plurality of first detection signals to generate the first position signal and the second detection signal to A second position signal having a resolution different from that of the first position signal, and a calculation means for generating a signal indicating the absolute position of the movable member based on the first position signal and the second position signal. It is characterized by.

ピッチ切り替え信号出力部１０７は、第１および第２の受光部１０３−２，１０３−３のそれぞれに設けられた複数の受光素子における受光ピッチ（検出ピッチ）を切り替えるためのピッチ切り替え信号を光学センサ１０３に出力する。光学センサ１０３は、ピッチ切り替え信号に応じて、受光ピッチを長周期の周期パターン２０１−１，２０２−１のピッチに対応した第１の受光ピッチと短周期の周期パターン２０１−２，２０２−２のピッチに対応した第２の受光ピッチとに切り替える。これにより、第１および第２の受光部１０３−２，１０３−３のそれぞれが２つずつの周期パターンを読み取ることができる。 The pitch switching signal output unit 107 outputs a pitch switching signal for switching the light receiving pitch (detection pitch) in the plurality of light receiving elements provided in each of the first and second light receiving units 103-2 and 103-3. To 103. In response to the pitch switching signal, the optical sensor 103 has a first light reception pitch corresponding to the pitch of the long- period periodic patterns 201-1 and 202-1 and a short- period periodic pattern 201-2 and 202-2. To the second light receiving pitch corresponding to the pitch. Thereby, each of the 1st and 2nd light-receiving parts 103-2 and 103-3 can read two periodic patterns.

図２（ｃ）には、サイン波およびコサイン波としての２相信号２０３，２０４を逆正接変換により０から２πにて変化する信号２０５に変換した結果を示している。縦軸は０から２πの角度（ラジアン）であり、横軸は光学センサ１０３に対するスケール１０１の位置を示す。 FIG. 2C shows the result of converting the two-phase signals 203 and 204 as sine waves and cosine waves into a signal 205 changing from 0 to 2π by arctangent transformation. The vertical axis represents an angle (radian) from 0 to 2π, and the horizontal axis represents the position of the scale 101 with respect to the optical sensor 103.

ＺｏｎｅＮ（θ２−２′）＝ＩＮＴ（（Ｚｏｎｅ（θ２−２′）＋１８０）／３６０）（１１）
次に、離散化されたゾーン信号ＺｏｎｅＮ（θ２−２′）と下位結合信号ａｂｓ−θ１を以下の式（１２）のように足し合わせることで、中位信号と下位信号とを結合した中位結合信号Ａｂｓ−（θ２−２′）を算出する。
Ａｂｓ−（θ２−２′）＝ＺｏｎｅＮ（θ２−２′）＋（ａｂｓ−θ１）（１２）
ここで、下位結合信号ａｂｓ−θ１は下位信号と最下位信号とが結合された信号であるので、中位結合信号Ａｂｓ−（θ２−２′）は中位信号、下位信号および最下位信号が結合された信号に相当する。
「上位信号と中位信号の結合処理（ステップＳ３１１）」
上位信号がスケール１０１上で１回の折り返しを有し、中位信号がスケール１０１上で１０回の折り返しを有するので、上位信号を１０（＝１０／１）倍すると中位信号と傾きが一致する。絶対位置演算部１０６は、以下の式（１３）に示すように、上位信号θ１−１′を１０倍することで得られた信号と中位信号θ２−θ２′との差分をとってゾーン信号を得る。
Ｚｏｎｅ（θ１−１′）＝（θ１−１′）×１０−（θ２−θ２′）（１３）
さらに、以下の式（１４）によりゾーン信号の離散化処理を行ってノイズを除去する。
ＺｏｎｅＮ（θ１−１′）＝ＩＮＴ（（Ｚｏｎｅ（θ１−１′）＋１８０）／３６０）（１４）
次に、離散化されたゾーン信号ＺｏｎｅＮ（θ１−１′）と中位結合信号Ａｂｓ−（θ２−２′）を以下の式（１５）のように足し合わせることで、上位信号と中位信号とを結合した上位結合信号Ａｂｓ−（θ１−１′）を算出する。
Ａｂｓ−（θ１−１′）＝ＺｏｎｅＮ（θ１−１′）＋（Ａｂｓ−（θ２−２′））（１５）
ここで、中位結合信号Ａｂｓ−（θ２−２′）は中位信号、下位信号および最下位信号を結合した信号であるので、上位結合信号Ａｂｓ−（θ１−１′）は上位信号、中位信号、下位信号および最下位信号が全て結合された信号に相当する。したがって、上位結合信号Ａｂｓ−（θ１−１′）は、最下位信号と同じ分解能と上位信号と同じスケールレンジとを併せ持った信号となる。 ZoneN (θ2-2 ′) = INT ((Zone (θ2-2 ′) + 180) / 360) (11)
Next, by adding the discretized zone signal ZoneN (θ2-2 ′) and the lower combined signal abs−θ1 as shown in the following equation (12), the intermediate signal obtained by combining the intermediate signal and the lower signal is combined. The combined signal Abs- (θ2-2 ′) is calculated.
Abs− (θ2-2 ′) = ZoneN (θ2-2 ′) + (abs−θ1) (12)
Here, since the lower combined signal abs-θ1 is a signal obtained by combining the lower signal and the lowest signal, the intermediate combined signal Abs- (θ2-2 ′) includes the intermediate signal, the lower signal, and the lowest signal. Corresponds to the combined signal.
“Combination processing of upper signal and middle signal (step S311)”
Since the upper signal has one turn on the scale 101 and the middle signal has ten turns on the scale 101, the slope of the upper signal is the same as the upper signal when multiplied by 10 (= 10/1) To do. The absolute position calculation unit 106 calculates the difference between the signal obtained by multiplying the high order signal θ1-1 ′ by 10 and the intermediate signal θ2-θ2 ′ as shown in the following equation (13), and outputs the zone signal. Get.
Zone (θ1-1 ′) = (θ1-1 ′) × 10− (θ2-θ2 ′) (13)
Further, the zone signal is discretized by the following equation (14) to remove noise.
ZoneN (θ1-1 ′) = INT ((Zone (θ1-1 ′) + 180) / 360) (14)
Next, by adding the discretized zone signal ZoneN (θ1-1 ′) and the intermediate coupling signal Abs− (θ2-2 ′) as shown in the following equation (15), the upper signal and the intermediate signal are added. And the upper combined signal Abs- (θ1-1 ′) is calculated.
Abs− (θ1-1 ′) = ZoneN (θ1-1 ′) + (Abs− (θ2-2 ′)) (15)
Here, since the middle combined signal Abs- (θ2-2 ′) is a signal obtained by combining the middle signal, the lower signal, and the lowest signal, the upper combined signal Abs- (θ 1 -1 ′) is the upper signal, The middle level signal, the lower level signal, and the lowest level signal all correspond to a combined signal. Therefore, the upper combined signal Abs- (θ1-1 ′) is a signal having both the same resolution as the lowest signal and the same scale range as the upper signal.

Claims

Used with an optical scale in which a plurality of periodic patterns having different periods are formed, and receives light from the plurality of periodic patterns when moving relative to the optical scale as the movable member moves. An optical first position detecting means for generating a plurality of first detection signals that respectively change at a period corresponding to the period of the pattern;
Non-optical second position detection means for generating a second detection signal that changes as the movable member moves;
A first position signal is generated using the plurality of first detection signals, and a second position signal having a resolution different from that of the first position signal is generated using the second detection signal, A position detection apparatus comprising: a calculation unit that generates a signal indicating an absolute position of the movable member based on the first position signal and the second position signal.

The position detection apparatus according to claim 1, wherein the second position signal has a lower resolution than the first position signal.

The first position signal is a signal having a plurality of turns;
3. The position detection device according to claim 1, wherein the second position signal is a signal having a resolution capable of specifying one of the plurality of aliases in the first position signal. 4.

4. The position detection device according to claim 1, wherein the second position detection unit is a variable resistor whose electric resistance value changes with the movement of the movable member. 5.

The computing means performs processing for normalizing the output range and scale range of the second position signal with respect to the output range and scale range of the first position signal, respectively, and then the first position signal and 5. The position detection apparatus according to claim 1 , wherein a signal indicating the absolute position is generated by performing an operation of combining the second position signal. 6.

The plurality of first detection signals are two-phase signals having phases different from each other by 90 °,
The first position signal has an output range obtained by performing an arctangent conversion on the two-phase signal and converting it to an angle of 0 to 360 °,
6. The position detection according to claim 5, wherein the calculation means normalizes an output range of the second position signal so as to correspond to an angle of 0 to 360 degrees of the first position signal. apparatus.

6. The calculation means normalizes a scale range of the second position signal by an accumulated angle in the first position signal when the movable member moves through its entire movement range. Or the position detection apparatus of 6.

Before SL first position signal, 'signal .theta.1 obtained by arctangent transformation of the two signals varies, .theta.1' different periods P1, P1 together with, a respective shorter period than the period P1, P1 ' Including signals θ2 and θ2 ′ obtained by arctangent transformation of two signals that change in different periods P2 and P2 ′,
The computing means is
A vernier operation is performed on the signals θ2 and θ2 ′ to generate an intermediate signal,
A subordinate signal is generated from the signal θ1;
A least significant signal is generated from the signal θ2,
2. The signal indicating the absolute position is generated by performing an operation of combining the second position signal, the middle signal, the lower signal, and the lowest signal as an upper signal. The position detection device according to claim 7.

The position detection device according to any one of claims 1 to 8,
And a movable member whose absolute position is detected by the position detection device.