JP2016088663A - Cylindrical supporting body of long film, and long film processing device equipped with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cylindrical supporting body of a film which can homogeneously and stably cooling or heating a carried long film.SOLUTION: A rotatable cylindrical supporting body around which a carried long film F is wound to be cooled or heated, is composed of a cylindrical member 2 provided with rows of gas discharge holes 6 bored in an extending direction of a rotary shaft portion 1 or gas discharge grooves provided in parallel with the extending direction over the entire circumference at equal intervals; a circular pipe 3 for a coolant or a heating medium wound around an outer peripheral surface 2a of the cylindrical member 2 at pitches keeping a generally fixed interval of 0.01 mm to 1.0 mm; an inner side porous layer 4 filled so as to bury recessed portions on the outer side in a radial direction of the cylindrical member 2 of projecting/recessed portions formed by the wound circular pipe 3; and a surface side porous layer 5 with a thickness of 0.2 mm-2.0 mm which is laminated on the inner side porous layer 4.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a cylindrical support for transporting a long film while being wound around an outer peripheral surface, and a processing apparatus for a long film provided with the same, and in particular, to release gas to the outer peripheral surface in order to efficiently heat or cool the long film. The present invention relates to a long film cylindrical support having a mechanism and a long film processing apparatus having the same.

  In the production process of long films made of film-like resin, metal foil, steel sheet, woven fabric, paper, etc. and their surface treatment process, for example, a long film conveyed by roll-to-roll is used as a conveyance roll or a guide roll. A technique is used in which a predetermined process is performed while being wound or contacted at high speed around the outer peripheral surface of a cylindrical support in a contact state or a non-contact state.

  For example, as a technique for winding and transporting a long substrate in contact with the outer peripheral surface of a roll, Patent Document 1 forms a film while winding a long film transported by roll-to-roll around the outer peripheral surface of a can roll and cooling it. Technology is disclosed. Since the outer surface of the can roll usually has micro unevenness, the can roll of Patent Document 1 is provided with a plurality of gas discharge holes all around the outer surface so that the outer surface is wound around the outer surface. A technique has been proposed in which a gas is introduced from a peripheral surface side into a local gap portion between a long substrate and the heat transfer efficiency is increased.

  On the other hand, as a technique for winding and transporting a long substrate around an outer peripheral surface in a non-contact state, in Patent Document 2, in a coating process of a long film (sometimes referred to as a web), it was processed by a coating roll. An apparatus provided with an air blowing roll for transferring a web in a non-contact manner, a heated air supply roll for drying and a heated air supply box is disclosed. The apparatus described in Patent Document 2 ejects air from a gas ejection hole formed on the surface of a roll or guide member, and forms an air layer between the roll or guide member and the long film. It is transported and dried in a non-contact state.

  In the apparatus described in Patent Document 2, it is possible to stabilize the running of the web by configuring the web to be held away from the coating roll by the air blowing roll immediately after coating to the web, thereby It is described that it is possible to prevent scattering of coating liquid and coating unevenness, to prevent a decrease in operation efficiency due to cutting of the web, and to make equipment layout compact.

JP 2012-132018 A Japanese Patent No. 3716223

  When releasing gas from the outer peripheral surface like the can roll of Patent Document 1, it is preferable to provide as many fine gas discharge holes as possible on the outer peripheral surface in order to perform uniform film formation. Drilling a large number of fine gas discharge holes in the outer peripheral thick portion is restricted from the viewpoint of processing technology and cost. For this reason, gas discharge holes with a certain large inner diameter must be arranged at a constant pitch, and there is a small temperature difference between the part located just above the gas discharge holes in the long film and the other parts. Wrinkles may occur.

  Moreover, since the apparatus of patent document 2 supplies both heated air from a heated air supply roll and a heated air supply box in order to dry the web immediately after coating, it is compatible with levitation and heating. Fluctuations in pressure due to gas compressibility are likely to occur when transported in the state of being floated by the film, resulting in film fluctuations and vibrations on the surface of the cylindrical support, resulting in unstable film levitation There was a thing. The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to provide a cylindrical support for a film that can uniformly or stably cool or heat a conveyed long film. .

  In order to achieve the above object, the present inventor conducted extensive research on the structure and manufacturing method of a cylindrical support that winds a long film to be conveyed around an outer peripheral surface and cools or heats it. A circular pipe is wound around the outer peripheral surface of a cylindrical member having a through-hole or groove that bears the outer peripheral wall at a pitch that maintains a substantially constant gap, and the irregularities formed by the wound circular pipe are porous. It is found that by forming a flat outer peripheral surface that becomes a long film conveyance path by being filled with a material, the long film wound around the outer peripheral surface conveyance path can be uniformly or stably cooled or heated. The invention has been completed.

  That is, the cylindrical support of the long film of the present invention is a rotatable cylindrical support that winds and cools or heats the transported long film, and extends along the extending direction of the rotating shaft portion. A cylindrical member in which a row of gas discharge hole groups formed or gas discharge grooves provided in parallel to the extending direction are provided at equal intervals over the entire circumference; and an abbreviation of 0.01 mm to 1.0 mm A circular pipe for circulating a coolant or a heat medium wound around the outer peripheral surface of the cylindrical member at a pitch that maintains a constant gap, and a radial direction of the cylindrical member among the uneven parts formed by the wound circular pipe It is characterized by comprising an inner porous layer filled so as to fill the outer concave portion, and a surface-side porous layer having a thickness of 0.2 to 2.0 mm laminated on the inner porous layer. .

  ADVANTAGE OF THE INVENTION According to this invention, it can cool or heat uniformly and stably, winding the elongate film conveyed around the rotating cylindrical support body.

It is a typical front view which shows one specific example of the processing apparatus of the long film in which the cylindrical support body of the long film of this invention is mounted suitably. It is a typical cross-sectional view which shows one specific example of the cylindrical support body of the elongate film of this invention. It is sectional drawing which cut | disconnected the cylindrical member which comprises the cylindrical support body of FIG. 2 by the surface perpendicular | vertical to the central axis.

  Hereinafter, a specific example of the long film cylindrical support of the present invention will be described in detail with reference to the drawings. In addition, the material of the long substrate in the following description is not limited, but a polyethylene terephthalate film, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, polyethylene A naphthalate film, a liquid crystal polymer film, etc. can be mentioned.

  First, a vacuum film forming apparatus 50 as a long film processing apparatus in which a long film cylindrical support of a specific example of the present invention is suitably used will be described with reference to FIG. This vacuum film forming apparatus 50 is also called a sputtering web coater, and is used for a long heat-resistant resin film (hereinafter referred to as a long film) F that is conveyed in a vacuum chamber 51 by a roll-to-roll method. Thus, the surface of the surface is subjected to a film forming process that requires a thermal load continuously by a sputtering method. The cylindrical support according to one specific example of the present invention is used as the can roll 56 in the vacuum film forming apparatus 50.

Specifically, the vacuum chamber 51, for sputtering, a dry pump (not shown), a turbo molecular pump has a pressure reducing device such as a cryogenic coil, thereby reaching the inside of the vacuum chamber 51 pressure ^10-4 After the pressure is reduced to about Pa, the pressure can be adjusted to about 0.1 to 10 Pa by introducing sputtering gas such as argon gas or oxygen gas added according to the purpose. The shape of the vacuum chamber 51 is not particularly limited as long as it can withstand the above reduced pressure state, and various shapes such as a rectangular parallelepiped and a cylindrical shape can be adopted.

  In the vacuum chamber 51, various rolls are provided that demarcate the conveyance path of the long film F from the unwind roll 52 to the take-up roll 64 through the can roll 56. That is, in the conveyance path from the unwinding roll 52 to the can roll 56, a free roll 53 that guides the long film F unwound from the unwinding roll 52 and a tension sensor roll that measures the tension of the long film F. 54, a motor-driven feed roll 55 for adjusting the peripheral speed of the can roll 56 with respect to the long film F fed from the tension sensor roll 54 so that the long film F is brought into close contact with the outer peripheral surface of the can roll 56. Are arranged in this order.

  Similarly to the above, the motor-driven feed roll 61 that adjusts the peripheral speed with respect to the peripheral speed of the can roll 56 and the tension that measures the tension of the long film F are also provided on the conveyance path from the can roll 56 to the take-up roll 64. A sensor roll 62 and a free roll 63 for guiding the long film F are arranged in this order. Each of the tension sensor rolls 54 and 62 includes a tension sensor such as a load cell that detects displacement in a direction perpendicular to the rotation axis.

  The motor-driven unwinding roll 52 and the winding roll 64 are torque-controlled by a powder clutch or the like, whereby the tension balance of the long film F is maintained. In addition, the motor-driven can roll 56 is provided with a refrigerant circulation path inside in order to cool the long film F heated by the sputtering process with a heat load. That is, in the cylindrical support of the present invention used as the can roll 56, heat exchange is performed between the object to be cooled (long film) and the refrigerant. The structure of the can roll 56 will be described in detail later.

  As a film forming means along the conveyance path of the long film F, the outer surface of the can roll 56 is opposed to a region in an angle range A (also referred to as a holding angle A) around which the long film F is wound. Four magnetron sputtering cathodes 57, 58, 59, 60 are provided in this order. Each of the magnetron sputtering cathodes 57 to 60 has a target (not shown) attached to the surface facing the outer peripheral surface of the can roll 56, and sputtered particles sputtered from these targets are formed on the long film F. A metal film is formed by depositing on the surface.

  When a plate-like target is used for the above-described magnetron sputtering cathode, nodules (foreign substance growth) may occur on the target. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency. Further, since the vacuum film forming apparatus 50 for the long film F in FIG. 1 assumes a sputtering process as a process that requires a thermal load, a magnetron sputtering cathode is illustrated, but a process that requires a thermal load is performed. In the case of other things such as CVD (chemical vapor deposition) and vacuum vapor deposition, those vacuum film forming means are provided in place of the plate target.

  Next, a specific example of the cylindrical support of the present invention mounted as the above-described can roll 56 will be described in detail with reference to FIG. The cylindrical support according to an embodiment of the present invention includes a cylindrical member 2 that is rotatable about a rotating shaft 1 and a cylindrical member that is spaced at a substantially constant interval so that a substantially constant gap is maintained. 2 and a circular tube 3 spirally wound around the outer peripheral surface 2a, and an inner porosity filled so as to fill a radially outer concave portion of the cylindrical member 2 among the concave and convex portions formed by the wound circular tube 3 And a surface-side porous layer 5 having a thickness of 0.2 to 2.0 mm laminated on the inner porous layer 4. And the outer peripheral surface 5a of this surface side porous layer 5 becomes a conveyance path | route in which the elongate film F is wound.

  The components of the cylindrical support will be described more specifically. The cylindrical member 2 is made of a metal such as stainless steel, and the thick portion thereof is equidistant along the extending direction of the rotary shaft portion 1 and is normal. A row of gas discharge hole groups 6 drilled so as to penetrate in the direction is provided at equal intervals over the entire circumference. Inside the cylindrical member 2, an inner cylindrical member 7 concentric with the cylindrical member 2 is provided apart from the inner peripheral surface 2 b of the cylindrical member 2. The annular space defined by the cylindrical member 2 and the inner cylindrical member 7 has one ventilation parallel to the extending direction of the rotating shaft 1 for each row of the gas discharge hole group 6 as shown in FIG. The plurality of partition plates 9 are partitioned in the circumferential direction of the cylindrical member 2 so that the path 8 communicates.

  A plurality of gas supply pipes 10 are connected to one side surface portion of the cylindrical member 2 at equal intervals in the circumferential direction, and the plurality of gas supply pipes 10 communicate with the plurality of ventilation paths 8, respectively. The other ends of the plurality of gas supply pipes 10 are connected to a gas rotary joint 12 via a valve 11 that functions as a flow rate control unit. The gas rotary joint 12 is composed of a rotating part that rotates together with the cylindrical member 2 and a fixed part that is fixed and does not rotate, and the rotating part communicates with the plurality of gas supply pipes 10 described above. Branch paths are provided at equal intervals in the circumferential direction. On the other hand, the fixed portion is provided with an annular gas supply path communicating with a gas supply source (not shown) outside the vacuum chamber 51. The terminal opening of each of the plurality of branch passages and the annular opening of the gas supply passage are opposed to each other on the sliding contact surface between the rotating portion and the fixed portion. Thereby, the gas from the gas supply source is distributed to the plurality of gas supply pipes 10.

  A valve 11 provided in each gas supply pipe 10 is automatically opened and closed by a signal from an angular position detecting means for detecting the angular position of each corresponding air passage 8. Accordingly, when the gas distributed to the plurality of air passages 8 by the gas rotary joint 12 is discharged from the gas discharge hole group 6 communicating with the air passages 8 to the outside of the cylindrical member 2, other than the holding angle A in FIG. 1. From the gas discharge hole group 6 of the air passage 8 located within the angle range, it is possible to stop the discharge of gas or reduce the discharge amount. As the angular position detection means, for example, as shown in FIG. 2, the cylindrical member 2 is made to correspond to each angular position of the plurality of ventilation paths 8 on the side surface opposite to the side surface on which the gas rotary joint 12 is provided. A plurality of reed switches 13 and a reed force, for example, a fan-shaped magnet disposed so as to be opposed to the reed switch 13 that is in an angle range other than the holding angle A of FIG. 14 and a rotating electrode 15 connected to the reed switch 13.

  As a result, the rotation electrode 15 detects the operation of the reed switch 13 corresponding to the ventilation path 8 located within an angle range other than the holding angle A as the cylindrical member 2 rotates, so that the ventilation path 8 is connected to the ventilation path 8. The valve 11 of the gas supply pipe 10 that communicates is closed. Therefore, no gas is released from the gas discharge hole group 6 communicating with the ventilation path 8. As a result, it is possible to prevent gas from being discharged from the gas discharge hole group 6 located in the region where the long film F is not wound on the outer peripheral surface of the can roll 56. If the valve 11 is a control valve instead of an on-off valve, the flow rate of the gas discharged from the gas discharge hole group 6 can be controlled according to the angular position of the air passage 8 communicating therewith. Further, if a mechanism for controlling the gas flow direction is added, the pressure can be switched to the ambient pressure, so that the gas from the valve 11 to the gas discharge hole group 6 can be prevented from being discharged from the gas discharge hole group 6. .

  Instead of the flow rate control by the valve 11 described above, a flow rate control means may be provided in the flow path of the gas rotary joint 12. For example, a fan-shaped metal baffle plate is attached to the annular opening of the fixed portion described above corresponding to an angle range other than the holding angle A, and the rotating portion is located within the angle range other than the holding angle A by a metal seal. Gas may not be supplied to the path. However, since this structure has a large number of sliding seal portions, wear of the sliding seal portions, dust generation, and gas leakage are likely to occur. Therefore, the flow rate control by the valve 11 shown in FIG. preferable.

  In the circular tube 3 wound around the outer peripheral surface 2a of the cylindrical member 2, the portions adjacent to each other in the direction of the outer peripheral surface 2a of the cylindrical member 2 are separated by a constant gap of 0.01 mm or more and 1.0 mm or less. An outward path 20 and a return path 21 extending in the axial direction are formed in the rotary shaft portion 1 of the cylindrical member 2, and both end portions of the circular tube 3 communicate with these flow paths. The forward path 20 and the return path 21 have a double tube structure at one end portion of the rotary shaft portion 1, and the tip end portion thereof is connected to a refrigerant cooling device (not shown) provided outside the vacuum chamber 51 via the liquid rotary joint 22. doing. As a result, the refrigerant is circulated between the refrigerant cooling device and the circular tube 3 to cool the long film F wound around the outer peripheral surface of the cylindrical support, that is, the outer peripheral surface of the can roll 56 and the above-described circle. It becomes possible to cool the gas passing through the gap in the tube 3.

  As shown in FIG. 2, (n−1) pieces formed by winding a circular tube 3 n times around the cylindrical member 2 in a cross-section obtained by cutting the cylindrical member 2 along a surface having the central axis of the rotating shaft portion 1. It is preferable that one gas discharge hole is disposed so as to open to each of the gaps. Further, the gas discharge hole group 6 is provided correspondingly only in the region in the width direction of the conveyance path around which the long substrate is wound, that is, not provided at both ends in the width direction on the outer peripheral surface of the cylindrical member 2. Is preferred. As a result, the gas released from the gas discharge hole group 6 of the cylindrical member 2 is efficiently cooled by the refrigerant circulating inside the circular tube 3 and then allowed to pass through the inner porous layer 4 and the surface-side porous layer 5. Can be ejected from the outer peripheral surface. In FIG. 2, the circular tube 3 is spirally wound around the outer peripheral surface 2a of the cylindrical member 2 n = 6 times, so that five gases corresponding to n-1 = 5 gaps formed thereby are formed. A discharge hole is formed.

  In the cylindrical support according to one specific example of the present invention, the above-described configuration causes the air passage 8 to serve as a gas pressure header, and the gas discharged from the gas discharge hole group 6 is first 1 mm or less. Gas is allowed to pass through the gaps of the circular tubes 3 wound at a pitch close to each other with a substantially constant gap, and then the inner porous layer 4 as the inner layer and the surface side porous layer 5 as the surface layer, After passing through, the outer peripheral surface 5a of the surface side porous layer 5 is ejected. Thereby, gas can be ejected uniformly and stably over the substantially whole outer peripheral surface of a cylindrical support body.

  That is, since a high pressure loss is required for the gas to pass through the gap between the circular pipes 3 that are wound close to each other with a gap of 1 mm or less, the gas from the gaps in the circular pipe 3 has a uniform flow rate. In addition, since a high pressure loss is required when passing through the inner porous layer 4 and the surface side porous layer 5, the gas should be uniformly dispersed throughout the porous layer. Can do. As a result, the gas ejected from the outer peripheral surface 5a of the surface-side porous layer 5 of the cylindrical support can ensure a uniform flow rate and a stable pressure over almost the entire surface. It is possible to stably wrap around the outer peripheral surface of the can roll 56 and cool it uniformly.

  By the way, the thermal resistance R between the long film and the refrigerant is R = R12 (thermal resistance from the back surface of the long film F to the surface of the surface side porous layer 5) + R2 (surface side porous layer 5 and inner porous layer). (Thermal resistance of the layer 4) + R23 (thermal resistance of the contact surface between the inner porous layer 4 and the circular tube 3) + R3 (thermal resistance from the outer surface of the circular tube 3 to the inner surface) + R34 (from the inner surface of the circular tube 3 to the refrigerant) Heat resistance). R12 is substantially determined by the thermal conductivity of the gas and the distance between the back surface of the long film F and the surface of the front-side porous layer 5.

  As described above, the gas ejected from the outer peripheral surface 5a of the surface-side porous layer 5 ensures a uniform flow rate and a stable pressure over almost the entire surface. It is possible to stably maintain a local narrow gap that can exist between the long film and the thermal resistance R12.

  R2 which is the thermal resistance of the porous layers 4 and 5 is difficult to make the thickness thinner than about 5 mm when using a bulk material such as a ceramic plate sintered in advance for the material of the porous layers 4 and 5. Thus, the thickness of the porous layer can be reduced to about 1 mm, and the thermal resistance R2 can be reduced. The thermal resistance R23 of the contact surface between the inner porous layer 4 and the circular tube 3 uses an adhesive when a bulk material such as a ceramic plate sintered on the inner porous layer 4 is used. There is a possibility that the thermal resistance R23 is increased by the thermal resistance. On the other hand, since it is not necessary to use an adhesive by forming the porous layer 4 with a coating film, the thermal resistance R23 can be easily reduced.

  Examples of such a coatable porous material include sintered ceramics, sintered metals, plated nickel-based metal films, sprayed ceramics, sprayed metals, and the like. However, in order to form a thin film having a particularly low porosity, a plating film or a sprayed film is preferable. In order to increase the pressure loss and to obtain a high pressure equalizing effect, the porous layer should be made as thin and thick as possible in order to eject gas more uniformly and stably over the entire outer peripheral surface of the cylindrical support. In this case, however, the thermal resistance may be excessively increased.

  Therefore, by forming the surface-side porous layer 5 thin with a thickness of 0.2 to 2.0 mm by a coating film having a lower porosity than the inner porous layer 4, formation of a fine porous layer and low heat It becomes possible to achieve both resistance. Further, since only the thin surface side porous layer 5 exists between the outer periphery of the cylindrical support around which the long film is wound and the circular tube 3, the surface temperature of the surface side porous layer 5 and the inside of the circular tube 3 The temperature difference from the temperature of the refrigerant can be reduced, and the heat transfer efficiency can be increased. In addition, if the thickness of the surface side porous layer 5 is less than 0.2 mm, it becomes difficult to obtain the above-described pressure equalizing effect, and if the thickness exceeds 2.0 mm, the thermal resistance may be excessively increased.

  A general plasma sprayed film has a porosity of 10 to 15%, but the porosity can be adjusted by selecting a sprayed material or the like. Thus, the kind of porous material and its porosity can be selected as appropriate. As a method for forming the inner porous layer 4 and the front side porous layer 5, for example, the plasma projection is applied to the concave portion on the radially outer side of the cylindrical member 2 among the convex and concave portions formed by the wound circular tube 3 to form the convex portions or more. The porous material is filled to a thickness, the surface is flattened by grinding, and then the porous material is plasma sprayed again on this surface, and the surface is flattened by grinding and the outer peripheral surface 2a of the cylindrical member 2 By forming a concentric circle, a coating film having a desired gas permeability and a smooth surface can be formed. The inner porous layer 4 made of a porous material is formed by plating and the surface thereof is flattened by grinding, and then the porous material is plasma sprayed and the surface is flattened by grinding to form a coating film. It may be formed.

  When forming the inner porous layer 4 described above, it is necessary to keep the pores and gaps provided in the base material serving as the foundation small so that the porous material does not flow down therethrough. For example, when the inner porous layer 4 is formed without the circular tube 3, it is necessary to make a hole having an inner diameter of 10 to 400 μm in a cylindrical support made of stainless steel and having a wall thickness of 15 mm. Requires special machining techniques such as electric discharge machining and laser machining, which increases the manufacturing cost.

  On the other hand, since the cylindrical support of the above-described specific example of the present invention winds the circular tube 3 so as to be close to each other with a gap of 1 mm or less, the porous material does not flow down. As a result, the inner diameter of the gas discharge hole group 6 can be increased, and can be drilled using a general processing tool such as a drill, and the cylindrical member 2 can be easily manufactured at a very low cost. Can do. Moreover, since the porous material is not filled between the outer peripheral surface 2a of the cylindrical member 2 and the circular pipe 3 wound therearound, the hollow portion sandwiched between these functions as a gas header in the same manner as the air passage 8. Can do.

  As described above, the gas discharge hole group 6 has a function of uniformly supplying the gas to the back side of the circular tube 3, and therefore may be configured by a groove instead of the through-hole group arranged in a line. That is, a plurality of gas introduction grooves extending substantially parallel to the central axis may be provided on the outer peripheral surface 2a of the cylindrical member 2 at substantially equal intervals in the circumferential direction on the entire circumference of the cylindrical member. In this case, in order to supply gas to each groove, the end of the gas supply pipe 10 described above may be communicated with at least one end of each groove.

  When the circular tube 3 is wound while being brought into contact with the outer peripheral surface 2a of the cylindrical member 2, the circular tube 3 is wound with a gap gauge having a predetermined thickness interposed between the circular tubes 3 so that a uniform pressure loss occurs in the gap. Alternatively, the surface of the cooling pipe material may be preliminarily roughened by sandblasting or the like and then wound in close contact with each other. Thereby, the clearance gap between the circular pipes 3 can be adjusted to a fixed value. In this way, the circular tubes 3 that are spaced apart from each other with a constant gap or in close contact with each other and wound at an equal pitch are porous so as to fill the inverted Mt. Fuji-like recesses when viewed from the cross section perpendicular to the extending direction. By filling the inner porous layer 4 made of a material, the inner porous layer 4 becomes a cell evenly divided by the circular tube 3, and the gas ejection flow rate can be made more uniform.

  Furthermore, since the circular pipe 3 has a circular cross section perpendicular to the extending direction, the distance between the flow paths that are dispersed from the gaps of the circular pipe 3 and reach the outer peripheral surface 5a of the surface-side porous layer 5 in each cell. Can be reduced compared to a pipe having a quadrangular cross section, the dispersion of the pressure loss of the gas flowing so as to be dispersed in the porous layers 4 and 5 is reduced, and the amount of gas ejection is more uniform over the entire surface. Can be. Further, since the gap between the circular tubes 3 is sufficiently narrow, the flow velocity of the gas passing through this portion can be increased to make turbulent flow, and the heat exchange efficiency between the refrigerant flowing in the circular tube 3 and the gas can be increased. become.

  In the above-described specific example, one circular tube 3 is wound around the outer peripheral surface 2a of the cylindrical member 2 around the rotating shaft 1 in a single spiral shape, but the present invention is not limited to this. A plurality of circular tubes connected in parallel with each other may be wound, or multiple tubes may be wound. Further, meandering on the outer peripheral surface 2a of the cylindrical member 2 is meandering so that a linear portion substantially parallel to the extending direction of the rotary shaft portion 1 and a folded portion that turns back 180 ° at the end in the width direction of the cylindrical member 2 are alternately repeated. The circular tube 3 may be wound in a shape.

  In the above-described cylindrical support of one specific example of the present invention, the application example to the can roll 56 mounted on the sputtering web coater has been described. However, the cylindrical support of the present invention is not limited to this. For example, if it is the said vacuum film-forming apparatus 50, it can also be used for the free roll 53 as a heating roll of a long film. In this case, not the refrigerant but the heat medium is circulated through the circular tube 3. Moreover, although the example of the resin-made film was shown here as a long film, metal foils, such as aluminum foil, may be sufficient, for example. Moreover, it can be applied not only to vacuum film formation and dry plating, but also to lamination and coating.

  A cylindrical support as shown in FIGS. 2 and 3 was prepared, and this was mounted as a can roll 56 on a sputtering web coater as shown in FIG. 1 to evaluate the cooling performance. Specifically, first, a thick cylindrical portion made of stainless steel having a diameter of 400 mm × width of 600 mm × thickness of 15 mm provided with a stainless steel rotating shaft portion 1 has an inner diameter of 3 mm penetrating in a normal direction by a drill. A plurality of through holes were drilled. These through-holes are arranged so that 12 rows of through-hole groups arranged at a pitch of 10 mm along the extending direction of the rotary shaft portion 1 are arranged at equal intervals in the circumferential direction around a portion where a circular tube to be described later is wound. I made it. At that time, the positions of the through holes in adjacent rows were shifted by 5 mm in the central axis direction to form a staggered arrangement.

  An inner cylindrical member 7 concentric with the inner peripheral surface 2b of the cylindrical member 2 is provided on the inner side of the cylindrical member 2, and further in the circumferential direction in an annular space formed by the cylindrical member 2 and the inner cylindrical member 7. Twelve partition plates 9 divided into 12 at equal intervals were provided. Thus, twelve ventilation paths 8 extending in the central axis direction and communicating with the above-described twelve rows of through-hole groups were provided. A copper circular tube 3 having a diameter of 3 mmφ was wound around the outer peripheral surface 2 a of the cylindrical member 2 while inserting a gap gauge so as to be separated from each other by a gap of about 0.1 mm. As the circular tube 3, a tube in which 10 circular tubes were connected in parallel was used in order to reduce the flow resistance.

  Next, a ceramic having a porosity of 15% as a main component and containing alumina as a main component is plasma sprayed so as to fill a concave portion on the radially outer side of the cylindrical member 2 among the concave and convex portions formed by the circular tube 3 wound around the cylindrical member 2. The inner porous layer was formed by grinding the surface and flattening it so as to be approximately at the same level as the outer convex portion of the circular tube 3. Next, a ceramic having a porosity of 15%, which is mainly composed of alumina as described above, is plasma sprayed onto the inner porous layer so that the thickness is about 1 mm and the surface is substantially circular in cross section. Surface polishing was performed to form the surface side porous layer 5.

  Next, a gas rotary joint 12 is provided at one end of the rotating shaft portion 1, and the above-described 12 air passages are provided through 12 branch passages provided at equal intervals in the circumferential direction through the gas supply pipe 10. Communication with Road 8 was made. Each gas supply pipe 10 is provided with a valve 11, which is opened and closed by twelve reed switches 13 and rotating electrodes 15 provided at equal intervals in the circumferential direction on one side of the cylindrical member 2. did. A liquid rotary joint 22 is further provided at one end of the rotating shaft 1, and both ends of the circular tube 3 are connected to the liquid rotary joint 22 via an outward path 20 and a return path 21 provided in the rotating shaft 1, respectively.

  The cylindrical support manufactured as described above is incorporated as a can roll 56 in a vacuum film forming apparatus as shown in FIG. 1, the gas rotary joint 12 is connected to a gas supply source, and the liquid rotary joint 22 is connected to a chiller unit. Connected to. Further, the conveyance path was adjusted so that the holding angle A of the can roll 56 was 200 °, and the sector magnet 14 having a central angle of 160 ° for operating the reed switch 13 was attached to a position facing the reed switch 13. An infrared heater for heating the long film is installed immediately before the can roll 56 in the long film conveyance path, and the outer peripheral surface and the long film are arranged at the center of the conveyance path on the outer peripheral surface of the can roll 56. A laser-type displacement meter for measuring the gap interval was installed, and an infrared thermometer for measuring the temperature of the long film was disposed immediately before the long film was separated from the outer peripheral surface of the can roll 56.

A polyimide film (Kapton 50EN) made by Toray DuPont and having a thickness of 12.5 μm and a width of 500 mm was used as the long film. Further, the temperature of the chiller unit was set so that the temperature of the cooling water supplied to the circular tube 3 was 20 ° C. The tension on the unwinding roll 52 side and the tension on the winding roll 64 side were both 100 N. The air in the vacuum chamber 51 was exhausted to 5 Pa using a plurality of dry pumps, and then exhausted to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil. Furthermore, argon gas was introduced and the sputtering atmosphere was set to a pressure of 0.2 Pa. Argon gas was supplied to the gas rotary joint 12 from a gas supply source.

  While heating the long film in this state, the film is transported at a speed of 0.2 m / min, and the gap between the outer peripheral surface and the long film at the center of the transport path on the outer peripheral surface of the can roll 56 and the can roll 56 While measuring the temperature of the long film immediately before leaving, the stability of the gap interval and the effect of cooling were confirmed. The temperature of the long film was measured by changing the pressure of the argon gas introduced into the gap interval. The film temperature without flowing argon gas was 90 ° C. and the gap interval was 0 μm. However, when argon gas was flowed so that the pressure in the pipe was 500 Pa, the temperature of the film decreased by 30 ° C. to 60 ° C. It became. Further, the gap interval at that time was 10 to 20 μm. From the above results, it can be confirmed that the cylindrical support of the present invention can stably maintain the gap interval between the outer peripheral surface and the long film wound around the outer periphery and has high heat transfer performance. It was.

DESCRIPTION OF SYMBOLS 1 Rotating shaft part 2 Cylindrical member 2a Outer peripheral surface 2b Inner peripheral surface 3 Circular tube 4 Inner porous layer 5 Surface side porous layer 6 Gas discharge hole group 7 Inner cylindrical member 8 Venting passage 9 Partition plate 10 Gas supply piping 11 Valve 12 Gas rotary joint 13 Reed switch 14 Magnet 15 Rotating electrode 20 Outward path 21 Return path 22 Liquid rotary joint 50 Vacuum film forming apparatus (sputtering web coater)
51 Vacuum chamber 52 Unwinding roll 53, 63 Free roll 54, 62 Tension sensor roll 55, 61 Feed roll 56 Can roll 57, 58, 59, 60 Magnetron sputtering cathode 64 Winding roll F Long film A Holding angle

Claims (9)

  A rotatable cylindrical support that winds and cools or heats a long film to be conveyed, and a row of gas discharge holes formed along the extending direction of the rotating shaft portion or the extending direction And a cylindrical member provided with gas discharge grooves provided at equal intervals over the entire circumference, and an outer peripheral surface of the cylindrical member at a pitch that maintains a substantially constant gap of 0.01 mm or more and 1.0 mm or less. A circular tube for circulating a refrigerant or a heat medium wound around the inner porous layer, and an inner porous layer filled so as to fill a radially outer concave portion of the cylindrical member among the concave and convex portions formed by the wound circular tube A long film cylindrical support comprising: a surface side porous layer having a thickness of 0.2 to 2.0 mm laminated on the inner porous layer.   2. The long film cylindrical support according to claim 1, wherein the porosity of the surface-side porous layer is lower than the porosity of the inner porous layer.   Each of the inner porous layer or the front side porous layer is a sintered porous ceramic, a sintered porous metal, a plated porous metal, a sprayed porous ceramic, and a sprayed porous 3. The long film cylindrical support according to claim 1 or 2, wherein the long film cylindrical support is any one of quality metals.   When the plurality of through holes are provided in the cylindrical member, a gas introduction path communicating with each through hole group arranged in the central axis direction on the inner peripheral surface side of the cylindrical member is provided in the central axis direction. The cylindrical support for a long film according to any one of claims 1 to 3, wherein the support is substantially parallel.   A flow rate control means is provided for each gas introduction path or groove, and each flow rate control means supplies or stops gas to the corresponding gas introduction path or groove and / or controls the gas flow rate. The cylindrical support body of the elongate film of any one of Claim 1 thru | or 4.   6. The long film cylindrical support according to claim 5, wherein the flow rate control means is a valve disposed on a side surface of the cylindrical support.   A surface treatment is performed on the long film while introducing gas from the outer peripheral surface between the outer peripheral surface of the cylindrical support according to any one of claims 1 to 6 and the long film wound therearound. An apparatus for processing a long film characterized by the above.   The long film processing apparatus according to claim 7, wherein the surface treatment is a vacuum film forming process.   Cooling or heating a long film, wherein the long film conveyed in a reduced-pressure atmosphere is cooled or heated while being wound around the outer peripheral surface of the cylindrical support according to any one of claims 1 to 6. Method.

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