JP2015195593A - crystal oscillator - Google Patents

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JP2015195593A
JP2015195593A JP2015125083A JP2015125083A JP2015195593A JP 2015195593 A JP2015195593 A JP 2015195593A JP 2015125083 A JP2015125083 A JP 2015125083A JP 2015125083 A JP2015125083 A JP 2015125083A JP 2015195593 A JP2015195593 A JP 2015195593A
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crystal
package
measurement substrate
connection
chip
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陽史 勝又
Harufumi Katsumata
陽史 勝又
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Seiko NPC Corp
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Seiko NPC Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a crystal oscillator where a frequency characteristic of a vibrator can be easily measured irrespective of thickness of the vibrator, a wide variable width can be achieved, the crystal oscillator is hardly influenced by ESD, and cost reduction is enabled.SOLUTION: A crystal oscillator includes an IC chip juxtaposed on a bottom face of a package 5, a measurement substrate 7 and a crystal vibrator 1 supported by the measurement substrate 7. Connection electrodes 73 and 74 are formed on the measurement substrate 7, where the connection electrode includes a bonding pad portion and a connection portion. Wires 31 and 32 connect the connection electrodes of the IC chip 2 to the bonding pad portions of the connection electrodes 73 and 74. In an assembly method, the connection electrodes of the IC chip are directly bonded to an electrode of the crystal vibrator, thereby, parasitic capacitance can be reduced. A crystal vibration test performed before package mounting reduces a frequency adjustment width to be performed after mounting, thereby, parameter change of the crystal vibrator is reduced and variations in a variable characteristic are reduced.

Description

本発明は、パッケージに収納された水晶発振器に関するものである。   The present invention relates to a crystal oscillator housed in a package.

水晶振動子などの圧電振動子を用いた発振器は、携帯電話などの通信機器や、コンピュータなどの電子機器の基準周波数発生源やフィルタなどに用いられる。この、例えば、水晶振動子をパッケージ内に集積回路(ICチップ)と共に気密封止した水晶発振器は、セラミックなどのパッケージ本体の底部に配置し、その上に水晶振動子を収納し、開口部を金属蓋等で密封して構成されている。
図6は、従来の電圧制御型水晶発振器の断面図である。
An oscillator using a piezoelectric vibrator such as a crystal vibrator is used for a reference frequency generation source or a filter of communication equipment such as a mobile phone or electronic equipment such as a computer. For example, a crystal oscillator in which a crystal resonator is hermetically sealed together with an integrated circuit (IC chip) in a package is disposed at the bottom of a package body such as ceramic, the crystal resonator is accommodated on the crystal oscillator, and an opening is formed. It is hermetically sealed with a metal lid or the like.
FIG. 6 is a cross-sectional view of a conventional voltage controlled crystal oscillator.

図に示す表面実装発振器は、容器本体101にICチップ102と水晶振動子103を収容し、カバー104を被せて密閉される。容器本体101は底壁101a、中間枠101b及び上壁101cを有する積層セラミックからなり、両端側に内壁段部を有して凹状になっている。容器本体101の内底面には例えば第1水晶端子や電源、出力、アース、スタンバイ端子とする回路端子105を有している。   The surface-mounted oscillator shown in the figure contains an IC chip 102 and a crystal resonator 103 in a container body 101, and is covered with a cover 104 and sealed. The container body 101 is made of a laminated ceramic having a bottom wall 101a, an intermediate frame 101b, and an upper wall 101c, and has a concave shape with inner wall step portions on both ends. On the inner bottom surface of the container main body 101, for example, a first crystal terminal and a circuit terminal 105 serving as a power source, an output, an earth, and a standby terminal are provided.

回路端子105のうちの第1水晶端子は、配線112を経て中間枠101が形成する内壁段部上の第2水晶端子106に接続し、これを除く他の回路端子105は、配線を介して容器本体101の底壁101aが形成する外底面の外部端子107に接続する。ICチップ102は、少なくとも発振回路を集積化し、回路機能面の図示しないIC端子が、バンプ108を用いた超音波熱圧着によって凹部の内底面にフリップチップボンディングする。水晶振動子103は、両主面に励振電極を有し、引出電極の延出した一端部両側が導電性接着剤111によって容器本体101の一端側の内壁段部に固着される。水晶振動子
103の他端部は、他端側の内壁段部の上方に位置して、衝撃時等における振幅の揺れ幅を小さくする。
The first crystal terminal among the circuit terminals 105 is connected to the second crystal terminal 106 on the inner wall step portion formed by the intermediate frame 101 via the wiring 112, and the other circuit terminals 105 other than this are connected via the wiring. It connects with the external terminal 107 of the outer bottom face which the bottom wall 101a of the container main body 101 forms. The IC chip 102 integrates at least an oscillation circuit, and an IC terminal (not shown) on the circuit function surface is flip-chip bonded to the inner bottom surface of the recess by ultrasonic thermocompression using the bump 108. The quartz crystal vibrator 103 has excitation electrodes on both main surfaces, and both ends of the extended end portion of the extraction electrode are fixed to the inner wall step on one end side of the container body 101 by the conductive adhesive 111. The other end portion of the crystal unit 103 is positioned above the inner wall step on the other end side to reduce the amplitude fluctuation width at the time of impact or the like.

従来の水晶発振器の組立方法は、図7に記載されている。まず、図6に示す多層配線及び接続電極が形成されたパッケージを用意する。多層配線の各配線は、積層された絶縁層上に電解メッキにより形成される。電解メッキを行うための電極112aは、多層配線を構成する配線112の一部として形成され、その端部はパッケージ101の側面に露出している。配線形成後は、電解メッキ用電極102aは不要であるが、そのまま製品出荷後も付けた儘にしている。次に、ICチップ102をパッケージ101に搭載し、その後、水晶振動子102を搭載し密閉する。その後、製品テストを行って良品を出荷し、不良品を廃棄する。   A conventional crystal oscillator assembly method is described in FIG. First, a package in which the multilayer wiring and connection electrodes shown in FIG. 6 are formed is prepared. Each wiring of the multilayer wiring is formed by electrolytic plating on the laminated insulating layer. The electrode 112 a for performing electrolytic plating is formed as a part of the wiring 112 constituting the multilayer wiring, and its end is exposed on the side surface of the package 101. After the wiring is formed, the electrode 102a for electroplating is not necessary, but is used as it is after the product is shipped. Next, the IC chip 102 is mounted on the package 101, and then the crystal resonator 102 is mounted and sealed. After that, a product test is performed, non-defective products are shipped, and defective products are discarded.

特許文献1、特許文献2及び特許文献3は、従来の発振器の一例である。
特許文献1には、パッケージ本体内に気密封止していない状態の水晶振動素子と回路部品を共に収納した状態でパッケージ本体を金属蓋により気密封止した構造の圧電発振器において、パッケージ本体の低背化と、低コスト化を図りながら、水晶振動素子に対するアニーリング工程、洗浄工程、周波数微調整の為の金属膜蒸着工程を実施することを可能にした圧電発振器が開示されている。この圧電発振器は、上面に凹陥部を有したパッケージ本体と、該凹陥部内底面の配線パターン上に搭載した回路部品と、該凹陥部の内底面よりも高い位置に形成した段差上に搭載した内パッケージと、該内パッケージ上の凹陥部内に搭載した圧電振動子と、パッケージ本体の外枠上面に固着されて凹陥部を封止する金属蓋とを備えている。
Patent Document 1, Patent Document 2 and Patent Document 3 are examples of conventional oscillators.
Patent Document 1 discloses a piezoelectric oscillator having a structure in which a package main body is hermetically sealed with a metal lid in a state in which a crystal resonator element and a circuit component that are not hermetically sealed are housed in the package main body. There has been disclosed a piezoelectric oscillator capable of performing an annealing process, a cleaning process, and a metal film deposition process for fine frequency adjustment on a crystal resonator element while reducing the height and cost. The piezoelectric oscillator includes a package body having a concave portion on the upper surface, a circuit component mounted on a wiring pattern on the inner bottom surface of the concave portion, and an inner portion mounted on a step formed at a position higher than the inner bottom surface of the concave portion. A package, a piezoelectric vibrator mounted in a recessed portion on the inner package, and a metal lid fixed to the upper surface of the outer frame of the package body and sealing the recessed portion.

特許文献2には、表面実装容器の無駄を排除して生産性を高め、耐衝撃性を良好とした面実装発振器及びその製造方法が開示されている。この発振器は、一対の引出電極が一端側に延出した水晶片の外周部を電気的・機械的に接続して特性検出端子を有する保持具一体化水晶片と、前記保持具一体化水晶片を収容する凹部を有して他端側に段部を有する表面実装用の容器本体とを具備し、前記保持具一体化水晶片の他端部は前記容器本体の段部に対面した構成となっている。また、製造方法は、保持具一体化水晶片の振動特性を測定した後、前記保持具一体化水晶片の他端部を前記容器本体の段部に対面して、前記保持具
一体化水晶片を前記容器本体に収容してカバーを封止するようにしている。
Patent Document 2 discloses a surface mount oscillator that eliminates waste of a surface mount container, improves productivity, and has good impact resistance, and a manufacturing method thereof. This oscillator includes a holder-integrated crystal piece having a characteristic detection terminal by electrically and mechanically connecting the outer peripheral portion of a crystal piece with a pair of extraction electrodes extending to one end side, and the holder-integrated crystal piece And a container body for surface mounting having a step portion on the other end side, and the other end portion of the holder-integrated crystal piece faces the step portion of the container body. It has become. In addition, the manufacturing method measures the vibration characteristics of the holder-integrated crystal piece, and then faces the other end of the holder-integrated crystal piece to the stepped portion of the container body, so that the holder-integrated crystal piece Is housed in the container body and the cover is sealed.

特許文献3には、ワイヤーボンディングによるICチップと水晶片と回路素子とを積層セラミックからなる凹状とした容器本体内に収容してなる表面実装用の水晶発振器において、前記容器本体は長手方向に沿う両辺側に対向した一対の内壁段部を有するとともに、前記一対の内壁段部は長手方向に沿って高さの異なる上段部と下段部とを有し、前記一対の内壁段部のうちの前記上段部の少なくとも一方には前記水晶片の長さ方向の一端部を保持して前記水晶片の長さ方向を前記容器本体の短手方向として、前記水晶片の少なくとも下面を含む前記容器本体の内底面には前記回路素子を配設し、前記一対の内壁段部のうちの前記下段部の間となる前記容器本体の内底面には前記ICチップを配置して前記ICチップからのボンディング線を前記下段部に接続した水晶発振器が開示されている。水晶片とICチップとを並設し、水晶片と回路素子を上下に配置する。したがって、三者(水晶片、ICチップ、回路素子)を並設した場合よりも、平面外形を小さくする。また、水晶片の下面に回路素子を配置するので、ワイヤーボンディングとしたICチップを下面に配置した場合よりも高さ寸法を小さくできる。そして、水晶片の長さ方向を容器本体の短手方向とするので、容器本体の長手方向を小さくする。この発振器は、特許文献1及び特許文献2に記載された発振器とは異なり、ICチップと水晶片とは並設されている。   Patent Document 3 discloses a surface-mount crystal oscillator in which an IC chip, a crystal piece, and a circuit element by wire bonding are housed in a concave container body made of a laminated ceramic, and the container body is along the longitudinal direction. While having a pair of inner wall stepped portions opposed to both sides, the pair of inner wall stepped portions have an upper stepped portion and a lower stepped portion having different heights along the longitudinal direction, and the one of the pair of inner wall stepped portions One end of the crystal piece in the length direction is held on at least one of the upper stage portions, and the length direction of the crystal piece is defined as the short direction of the container body, and the container main body includes at least the lower surface of the crystal piece. The circuit element is disposed on the inner bottom surface, and the IC chip is disposed on the inner bottom surface of the container body between the lower step portions of the pair of inner wall step portions. Before Crystal oscillator connected to the lower portion is disclosed. A crystal piece and an IC chip are juxtaposed, and the crystal piece and the circuit element are arranged vertically. Therefore, the planar outer shape is made smaller than the case where three parties (crystal piece, IC chip, circuit element) are arranged in parallel. Further, since the circuit element is arranged on the lower surface of the crystal piece, the height dimension can be made smaller than the case where the IC chip formed by wire bonding is arranged on the lower surface. And since the length direction of a crystal piece is made into the transversal direction of a container main body, the longitudinal direction of a container main body is made small. In this oscillator, unlike the oscillators described in Patent Document 1 and Patent Document 2, the IC chip and the crystal piece are arranged in parallel.

特開2000−134058号公報JP 2000-134058 A 特開2001−102868号公報JP 2001-102868 A 特許第4444740号公報Japanese Patent No. 4444740

従来の水晶などの圧電発振器は、特許文献1もしくは特許文献2に記載のものを含めて、ICチップを実装し、その後水晶振動子を実装後特性の確認(製品テスト)を行っていた。したがって、発振器特性が不良の場合、振動子だけでなく、パッケージも捨てなければならなかった。また、振動子単体での測定は、振動子自身が薄いため割れるなどの問題が生じるためその実施は困難であった。更に、図6に示されているように、水晶発振器は、外部回路と内部とを電気的に接続する端子と、水晶振動子やICチップとの間には多層配線などの配線が引き回されている。そして、特許文献3に記載されているように、ICチップと水晶片との間には配線により電気的に接続されている。
この様な配線は、寄生容量を大きくするものであり、これにより発振器が広い可変幅を取ることは難しかった。また、図6において、多層配線の形成時に使用したメッキ用電極がパッケージの外部に露出しているのでESDによる内部回路に対する影響が大きかった。
本発明は、このような事情によりなされたものであり、振動子の厚さに関係なく振動子の周波数特性を容易に測定でき、広い可変幅が実現可能であり、ESDに影響されることの少ない、コスト削減が可能な水晶発振器を提供する。
Conventional piezoelectric oscillators such as quartz, including those described in Patent Document 1 or Patent Document 2, are mounted with an IC chip, and thereafter, after the crystal resonator is mounted, characteristics are confirmed (product test). Therefore, when the oscillator characteristic is poor, not only the vibrator but also the package has to be discarded. In addition, measurement with a single vibrator is difficult to implement because problems such as cracking occur because the vibrator itself is thin. Furthermore, as shown in FIG. 6, in the crystal oscillator, wiring such as multilayer wiring is routed between a terminal that electrically connects an external circuit and the inside, and a crystal resonator or an IC chip. ing. As described in Patent Document 3, the IC chip and the crystal piece are electrically connected by wiring.
Such wiring increases the parasitic capacitance, which makes it difficult for the oscillator to take a wide variable width. Further, in FIG. 6, since the plating electrode used when forming the multilayer wiring is exposed to the outside of the package, the influence of the ESD on the internal circuit is large.
The present invention has been made under such circumstances. The frequency characteristics of the vibrator can be easily measured regardless of the thickness of the vibrator, a wide variable width can be realized, and it is affected by ESD. To provide a crystal oscillator that can reduce cost.

本発明の水晶発振器は、パッケージと、前記パッケージに固定された発振回路が形成されたICチップと、前記パッケージに前記ICチップと併置された測定用基板と、前記測定用基板に支持され、搭載された水晶振動子とを具備し、前記測定用基板は、一方の面は前記パッケージに接合され、他面には一対の接続電極が形成され、前記測定用基板の接続電極は、それぞれ、ボンディングワイヤが接合されるボンディングパッド部と前記水晶振動子の電極の1つが接続される接続部とを有し、前記ボンディングワイヤは、前記ICチップの接続電極と前記ボンディングパッド部とを接続し、前記測定用基板は、前記水晶振動子の搭載された状態と共に前記パッケージに接合される前の状態と前記パッケージに接合された状態において、前記水晶振動子の周波数調整を可能とするために、前記水晶振動子が露出すべくその搭載面側が開放されていることを特徴としている。
前記測定用基板の接続電極を構成する前記ボンディングパッド部と前記接続部とは所定の間隔で対向する部分を有しており、前記ボンディングパッド部と前記接続部とは前記両者の対向する部分の一部においてのみ接続されているようにしても良い。
The crystal oscillator according to the present invention includes a package, an IC chip on which an oscillation circuit fixed to the package is formed, a measurement substrate juxtaposed with the IC chip in the package, and supported by and mounted on the measurement substrate. The measurement substrate has one surface bonded to the package and the other surface formed with a pair of connection electrodes. The connection electrodes of the measurement substrate are bonded to each other, respectively. A bonding pad portion to which a wire is bonded and a connection portion to which one of the electrodes of the crystal resonator is connected; and the bonding wire connects the connection electrode of the IC chip and the bonding pad portion, The measurement substrate includes the water crystal in the state before being bonded to the package and the state before being bonded to the package together with the state where the crystal resonator is mounted. To enable frequency adjustment of the vibrator, it is characterized in that the mounting surface to expose said crystal oscillator is open.
The bonding pad portion and the connection portion constituting the connection electrode of the measurement substrate have a portion facing each other at a predetermined interval, and the bonding pad portion and the connection portion are portions of the portions facing each other. You may make it connect only in one part.

本発明の水晶発振器は、水晶振動子が測定用基板により支持されているので、振動子の厚さに関係なく水晶振動子の周波数等の特性を容易に測定できる。また、ICチップの接続電極(パッド)と水晶振動子の電極を直接ボンディングするので、寄生容量を小さくすることができるので、広い可変幅が実現可能になった。また、不要な金属がパッケージ側面に露出することがないので、ESDに影響されることが減少する。   In the crystal oscillator according to the present invention, since the crystal resonator is supported by the measurement substrate, characteristics such as the frequency of the crystal resonator can be easily measured regardless of the thickness of the resonator. In addition, since the connection electrode (pad) of the IC chip and the electrode of the crystal resonator are directly bonded, the parasitic capacitance can be reduced, so that a wide variable width can be realized. Further, since unnecessary metal is not exposed on the side of the package, the influence of ESD is reduced.

実施例1に係る蓋を外した状態の水晶発振器の断面図及び平面図。2 is a cross-sectional view and a plan view of a crystal oscillator in a state where a lid according to Embodiment 1 is removed. FIG. 図1の水晶発振器の組立方法を説明する工程断面図。FIG. 2 is a process cross-sectional view illustrating a method for assembling the crystal oscillator of FIG. 1. 図1の水晶発振器を製品出荷するまでの組立方法を説明するフロー図。FIG. 2 is a flowchart for explaining an assembly method until the crystal oscillator of FIG. 1 is shipped. 実施例2に係る水晶発振器の測定用基板に水晶振動子を取付ける工程を説明する断面図。Sectional drawing explaining the process of attaching a crystal oscillator to the measurement board | substrate of the crystal oscillator which concerns on Example 2. FIG. 実施例2に係る水晶発振器の測定用基板に水晶振動子を取付ける工程を説明する断面図。Sectional drawing explaining the process of attaching a crystal oscillator to the measurement board | substrate of the crystal oscillator which concerns on Example 2. FIG. 従来の水晶発振器の断面図。Sectional drawing of the conventional crystal oscillator. 従来の水晶発振器を製品出荷するまでの組立方法を説明するフロー図。The flowchart explaining the assembly method until product shipment of the conventional crystal oscillator.

以下、実施例を参照して発明の実施の形態を説明する。   Hereinafter, embodiments of the invention will be described with reference to examples.

図1乃至図3を参照して実施例1を説明する。
水晶発振器は、図1に示すように、セラミックからなるパッケージ5と、パッケージ5の底面に固定された発振回路が形成されたICチップ2と、パッケージ5の底面にICチップ2と併置された測定用基板7と、測定用基板7に支持され搭載された水晶振動子1とを備えている。測定用基板7は、一方の面はパッケージ5の底面に接合され、他面には一対の接続電極73、74が形成されている。測定用基板7の接続電極73、74は、それぞれ、ボンディングワイヤ31、32が接合されるボンディングパッド部と水晶振動子1の電極11、12がそれぞれ接続される接続部とからなる。ボンディングワイヤ31は、ICチップ2の接続電極21と測定用基板7の接続電極73のボンディングパッド部とを接続し、ボンディングワイヤ32は、ICチップ2の接続電極22と測定用基板7の接続電極74のボンディングパッド部とを接続する。パッケージ5の開口部は、例えば、金属蓋6などで覆い、シームリングなどを利用して密閉封止されている。パッケージ5の裏面には複数の発振器の端子8、9が形成されている。複数の端子8、9は、パッケージ5裏面に形成されたコンタクト(図示しない)を介して、ICチップ2と測定用基板7の接続電極73、74とに電気的に接続されている。
The first embodiment will be described with reference to FIGS.
As shown in FIG. 1, the crystal oscillator includes a package 5 made of ceramic, an IC chip 2 in which an oscillation circuit fixed to the bottom surface of the package 5 is formed, and a measurement in which the IC chip 2 is placed on the bottom surface of the package 5. And a crystal resonator 1 supported and mounted on the measurement substrate 7. One surface of the measurement substrate 7 is bonded to the bottom surface of the package 5, and a pair of connection electrodes 73 and 74 are formed on the other surface. The connection electrodes 73 and 74 of the measurement substrate 7 include a bonding pad portion to which the bonding wires 31 and 32 are bonded and a connection portion to which the electrodes 11 and 12 of the crystal resonator 1 are respectively connected. The bonding wire 31 connects the connection electrode 21 of the IC chip 2 and the bonding pad portion of the connection electrode 73 of the measurement substrate 7, and the bonding wire 32 connects the connection electrode 22 of the IC chip 2 and the connection electrode of the measurement substrate 7. 74 bonding pad portions are connected. The opening of the package 5 is covered with, for example, a metal lid 6 and hermetically sealed using a seam ring or the like. A plurality of oscillator terminals 8 and 9 are formed on the back surface of the package 5. The plurality of terminals 8 and 9 are electrically connected to the IC chip 2 and the connection electrodes 73 and 74 of the measurement substrate 7 through contacts (not shown) formed on the back surface of the package 5.

水晶振動子1は、主面電極11と裏面電極12とを有し、主面電極11は、主要部分が主面に形成され、一部の先端部分が主面を越え側面を介して裏面に形成される。この先端部分の裏面部が接続部分となる。裏面電極12は、主要部分が裏面に形成され、一部の先端部分が裏面を越え側面を介して主面に形成される。この主要部分が接続部分となる。主面電極11の裏面部は、導電性接着剤により測定用基板7の接続電極73に接合され、裏面電極12の裏面部は、導電性接着剤により測定用基板7の接続電極74に接合されている。
この実施例では、水晶振動子が測定用基板により支持されているので、振動子の厚さに関係なく水晶振動子の周波数等の特性を容易に測定でき、水晶振動子の良品不良品の選別ができる。また、ICチップの接続電極と水晶振動子の電極とを直接ボンディングするので、多層配線を介在させる必要はなく、寄生容量を小さくすることができる。したがって、周波数の広い可変幅が実現可能になった。また、多層配線を利用しないので、多層配線を形成するためのメッキ用電極が存在しないため不要な金属がパッケージ側面に露出することがなく、したがって、ESDに影響されることが減少する。
The crystal unit 1 includes a main surface electrode 11 and a back surface electrode 12. The main surface electrode 11 has a main portion formed on the main surface, and a part of the tip portion extends beyond the main surface and is formed on the back surface via the side surface. It is formed. The back surface portion of the tip portion becomes a connection portion. The main part of the back electrode 12 is formed on the back surface, and a part of the tip part is formed on the main surface through the side surface beyond the back surface. This main part becomes a connection part. The back surface portion of the main surface electrode 11 is bonded to the connection electrode 73 of the measurement substrate 7 with a conductive adhesive, and the back surface portion of the back electrode 12 is bonded to the connection electrode 74 of the measurement substrate 7 with a conductive adhesive. ing.
In this embodiment, since the crystal unit is supported by the measurement substrate, the characteristics such as the frequency of the crystal unit can be easily measured regardless of the thickness of the unit. Can do. Further, since the connection electrode of the IC chip and the electrode of the crystal resonator are directly bonded, it is not necessary to interpose multilayer wiring, and the parasitic capacitance can be reduced. Therefore, a variable width with a wide frequency can be realized. Further, since the multilayer wiring is not used, there is no plating electrode for forming the multilayer wiring, so that unnecessary metal is not exposed on the side surface of the package, and therefore, the influence of ESD is reduced.

次に、図2及び図3を参照して、水晶発振器の組立方法を説明する。
(1)まず、水晶振動子1の電極11、12を測定用基板7の接続電極73、74にそれぞれ導電性接着剤4を用いて接合する。次に、測定用基板7に取付けた水晶振動子1をテスト(周波数測定)して良品を選別する。所定の周波数値にない不良品は、廃棄もしくは周波数調整を行って良品とする。また、(2)ICチップ2をテストして所定の特性を持つ良品を用意する。(3)水晶振動子1を取付けた測定用基板7をパッケージ5に接着する(図2(a))。また、ICチップ2をパッケージ5に接着する(図2(b))。次に、ボンディングワイヤ(32)を用いてICチップ2の接続電極と測定用基板7の接続電極(74)とを接続する(図2(c))。次に、水晶発振器として必要とする周波数を得るように、周波数調整を行う(図2(d))。次に、金属蓋6を用いてパッケージ5を封止する(図2(e))。次に、(4)製品テストを行って良品を選別する。その後(5)良品を出荷する。
この実施例における水晶発振器の組立方法は、水晶振動子をパッケージ搭載前に特性測定するので、従来のように不良品の水晶振動子が搭載されていたパッケージを廃棄する必要はなく、省資源に資するものであり、且つコスト削減につながるものであり、可変特性のばらつきを減らすことができる。
Next, a method for assembling a crystal oscillator will be described with reference to FIGS.
(1) First, the electrodes 11 and 12 of the crystal unit 1 are bonded to the connection electrodes 73 and 74 of the measurement substrate 7 using the conductive adhesive 4 respectively. Next, the crystal resonator 1 attached to the measurement substrate 7 is tested (frequency measurement) to select non-defective products. A defective product that does not have a predetermined frequency value is discarded or frequency-adjusted to be a non-defective product. (2) The IC chip 2 is tested to prepare a non-defective product having predetermined characteristics. (3) The measurement substrate 7 to which the crystal unit 1 is attached is bonded to the package 5 (FIG. 2A). Further, the IC chip 2 is bonded to the package 5 (FIG. 2B). Next, the connection electrode of the IC chip 2 and the connection electrode (74) of the measurement substrate 7 are connected using the bonding wire (32) (FIG. 2 (c)). Next, frequency adjustment is performed so as to obtain a frequency required for the crystal oscillator (FIG. 2D). Next, the package 5 is sealed using the metal lid 6 (FIG. 2E). Next, (4) a product test is performed to select non-defective products. After that, (5) Ship good products.
The crystal oscillator assembly method in this embodiment measures the characteristics of the crystal unit before mounting the package, so there is no need to discard the package on which the defective crystal unit is mounted as in the past, saving resources. It contributes and leads to cost reduction, and variation in variable characteristics can be reduced.

次に、図4を参照して実施例2を説明する。
この実施例は、測定用基板の構造に特徴を有するものである。測定用基板及び水晶振動子は、パッケージ搭載前に接合される(図3参照)。ICチップと測定用基板とはパッケージに搭載後にボンディングされる(図2(c)参照)。
測定用基板27は、一方の面はパッケージの底面に接合されており、他面には一対の接続電極25、26が形成されている。接続電極25は、水晶振動子の電極の1つが接続される接続部251とボンディングワイヤが接続されるボンディングパッド部252と両部を結合する結合部253とからなり、接続電極26は、水晶振動子の電極の他の1つが接続される接続部261とボンディングワイヤが接続されるボンディングパッド部262と両部を結合する結合部263とからなる。接続電極25、26を構成する接続部251、261とボンディングパッド部252、262とは所定の間隔で対向する部分をそれぞれ有しており、ボンディングパッド部と接続部とは両者の対向する部分の一部(結合部253、263)においてのみ接続されている(図4(a))。
Next, Embodiment 2 will be described with reference to FIG.
This embodiment is characterized by the structure of the measurement substrate. The measurement substrate and the crystal resonator are joined before mounting the package (see FIG. 3). The IC chip and the measurement substrate are bonded to each other after being mounted on the package (see FIG. 2C).
One surface of the measurement substrate 27 is bonded to the bottom surface of the package, and a pair of connection electrodes 25 and 26 are formed on the other surface. The connection electrode 25 includes a connection portion 251 to which one of the electrodes of the crystal resonator is connected, a bonding pad portion 252 to which a bonding wire is connected, and a coupling portion 253 that couples both portions. It comprises a connection part 261 to which the other one of the child electrodes is connected, a bonding pad part 262 to which a bonding wire is connected, and a joint part 263 that joins both parts. The connection portions 251 and 261 constituting the connection electrodes 25 and 26 and the bonding pad portions 252 and 262 respectively have portions facing each other at a predetermined interval, and the bonding pad portion and the connection portion are portions of the portions facing each other. Connection is made only at a part (the coupling portions 253 and 263) (FIG. 4A).

水晶振動子28は、主面電極281と裏面電極282とを有し、主面電極281は、主要部分が主面に形成され、一部の先端部分が主面を越え側面を介して裏面に形成される。この先端部分の裏面部が測定用基板の接続電極との接続部分となる。裏面電極282は、主要部分が裏面に形成され、一部の先端部分が裏面を越え側面を介して主面に形成される。この主要部分が測定用基板の接続電極との接続部分となる(図4(c))。   The crystal unit 28 includes a main surface electrode 281 and a back surface electrode 282. The main surface electrode 281 has a main portion formed on the main surface, and a portion of the tip portion extends beyond the main surface and passes through the side surface to the back surface. It is formed. The back surface portion of the tip portion becomes a connection portion with the connection electrode of the measurement substrate. The main part of the back electrode 282 is formed on the back surface, and a part of the tip part is formed on the main surface through the side surface beyond the back surface. This main portion becomes a connection portion with the connection electrode of the measurement substrate (FIG. 4C).

次に、水晶振動子を測定用基板に接合する組立工程を説明する。
まず、測定用基板27の主面に接続電極25、26を形成する(図4(a))。次に、接続電極25、26の接続部251、261に導電性接着剤23、24を塗布し、その上に主面電極281及び裏面電極282を載せて水晶振動子28と測定用基板27とを接続する(図4(b))。後工程において、接続電極25、26のボンディングパッド部252、262には、ICチップに接続するボンディングワイヤがボンディングされる。その前工程において、水晶振動子のテストが行われる。テストにはボンディングパッド部252、262にプローブを当てて水晶振動子の周波数調整を行う(図3参照)。
以上、この実施例では、測定用基板の接続電極を接続部とボンディングパッド部とが所定の間隔で対向するように構成したので、導電性接着剤がボンディングパッド部に広がるのを抑えることができ、この部分を広く維持する事ができると共に、ボンディング及びテストが容易に行われる。また、実施例1と同じ作用効果を認める事ができる。なお、この実施例を実施例1の水晶発振器に適用することができる。
Next, an assembly process for bonding the crystal resonator to the measurement substrate will be described.
First, the connection electrodes 25 and 26 are formed on the main surface of the measurement substrate 27 (FIG. 4A). Next, the conductive adhesives 23 and 24 are applied to the connection portions 251 and 261 of the connection electrodes 25 and 26, and the main surface electrode 281 and the back surface electrode 282 are mounted thereon, and the crystal resonator 28, the measurement substrate 27, Are connected (FIG. 4B). In a subsequent process, bonding wires connected to the IC chip are bonded to the bonding pad portions 252 and 262 of the connection electrodes 25 and 26. In the previous process, a crystal resonator is tested. In the test, the probe is applied to the bonding pad portions 252 and 262 to adjust the frequency of the crystal resonator (see FIG. 3).
As described above, in this embodiment, since the connection electrode of the measurement substrate is configured so that the connection portion and the bonding pad portion face each other at a predetermined interval, it is possible to prevent the conductive adhesive from spreading to the bonding pad portion. This portion can be kept wide and bonding and testing can be easily performed. Moreover, the same effect as Example 1 can be recognized. This embodiment can be applied to the crystal oscillator of the first embodiment.

次に、図5を参照して実施例3を説明する。
測定用基板35の主面に接続電極を形成し、接続電極の接続部に導電性接着剤33を塗布し水晶振動子30の電極を載せて測定用基板35に接続する。この時、導電性接着剤33とは離れた位置にある測定用基板35の主面上に突起34を形成する。その素材は測定用基板35と同じであっても、異なっていても良い。
この突起34は、水晶振動子30を接着する時の支えとして用いられる。接着後は取り外すことも可能である。また、実施例1と同じ作用効果を認める事ができる。なお、この実施例を実施例1、実施例2の水晶発振器に適用することができる。
Next, Example 3 will be described with reference to FIG.
A connection electrode is formed on the main surface of the measurement substrate 35, a conductive adhesive 33 is applied to the connection portion of the connection electrode, and the electrode of the crystal unit 30 is placed on the connection surface of the measurement substrate 35. At this time, the protrusions 34 are formed on the main surface of the measurement substrate 35 located away from the conductive adhesive 33. The material may be the same as or different from the measurement substrate 35.
The protrusion 34 is used as a support when the crystal resonator 30 is bonded. It can also be removed after bonding. Moreover, the same effect as Example 1 can be recognized. This embodiment can be applied to the crystal oscillators of Embodiments 1 and 2.

1、28、30・・・水晶振動子
2・・・ICチップ
4、23、24、33・・・導電性接着剤
5・・・パッケージ
6・・・金属蓋
7、27、35・・・測定用基板
8、9・・・端子
11、12、281、282・・・水晶振動子の電極
21、22・・・ICチップの接続電極
25、26、73、74、・・・測定用基板の接続電極
31、32・・・ボンディングワイヤ
251、261・・・接続電極の接続部
252、262・・・接続電極のボンディングパッド部
253、263・・・接続電極の結合部


DESCRIPTION OF SYMBOLS 1, 28, 30 ... Crystal oscillator 2 ... IC chip 4, 23, 24, 33 ... Conductive adhesive 5 ... Package 6 ... Metal lid 7, 27, 35 ... Measurement substrate 8, 9 ... Terminal 11, 12, 281, 282 ... Crystal resonator electrode 21, 22 ... IC chip connection electrode 25, 26, 73, 74, ... Measurement substrate Connection electrodes 31, 32 ... Bonding wires 251, 261 ... Connection portions of connection electrodes 252, 262 ... Bonding portions of connection electrodes 253, 263 ... Connection portions of connection electrodes


Claims (2)

パッケージと、前記パッケージに固定された発振回路が形成されたICチップと、前記パッケージに前記ICチップと併置された測定用基板と、前記測定用基板に支持され、搭載された水晶振動子とを具備し、前記測定用基板は、一方の面は前記パッケージに接合され、他面には一対の接続電極が形成され、前記測定用基板の接続電極は、それぞれ、ボンディングワイヤが接合されるボンディングパッド部と前記水晶振動子の電極の1つが接続される接続部とを有し、前記ボンディングワイヤは、前記ICチップの接続電極と前記ボンディングパッド部とを接続し、前記測定用基板は、前記水晶振動子の搭載された状態と共に前記パッケージに接合される前の状態と前記パッケージに接合された状態において、前記水晶振動子の周波数調整を可能とするために、前記水晶振動子が露出すべくその搭載面側が開放されていることを特徴とする水晶発振器。 A package, an IC chip on which an oscillation circuit fixed to the package is formed, a measurement substrate disposed in parallel with the IC chip in the package, and a crystal resonator supported and mounted on the measurement substrate The measurement substrate includes a bonding pad to which one surface is bonded to the package and a pair of connection electrodes are formed on the other surface, and each of the connection electrodes of the measurement substrate is bonded to a bonding wire. And a connection part to which one of the electrodes of the crystal resonator is connected, the bonding wire connects the connection electrode of the IC chip and the bonding pad part, and the measurement substrate is the crystal In the state before being bonded to the package together with the state in which the resonator is mounted, and the state in which the resonator is bonded to the package, frequency adjustment of the crystal resonator is performed. To the ability crystal oscillator whose mounting surface to expose said crystal oscillator is characterized in that it is open. 前記測定用基板の接続電極を構成する前記ボンディングパッド部と前記接続部とは所定の間隔で対向する部分を有しており、前記ボンディングパッド部と前記接続部とは前記両者の対向する部分の一部においてのみ接続されていることを特徴とする請求項1に記載の水晶発振器。





The bonding pad portion and the connection portion constituting the connection electrode of the measurement substrate have a portion facing each other at a predetermined interval, and the bonding pad portion and the connection portion are portions of the portions facing each other. The crystal oscillator according to claim 1, wherein the crystal oscillator is connected only partially.





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