JP2014229705A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2014229705A JP2014229705A JP2013107255A JP2013107255A JP2014229705A JP 2014229705 A JP2014229705 A JP 2014229705A JP 2013107255 A JP2013107255 A JP 2013107255A JP 2013107255 A JP2013107255 A JP 2013107255A JP 2014229705 A JP2014229705 A JP 2014229705A
- Authority
- JP
- Japan
- Prior art keywords
- region
- semiconductor
- electrode
- layer
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 201
- 239000012535 impurity Substances 0.000 claims abstract description 16
- 239000010410 layer Substances 0.000 description 111
- 238000000605 extraction Methods 0.000 description 21
- 230000003071 parasitic effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000011084 recovery Methods 0.000 description 6
- 239000012141 concentrate Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum (Al) Chemical class 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0638—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layer, e.g. with channel stopper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
- H01L29/7804—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode
- H01L29/7805—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode in antiparallel, e.g. freewheel diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7815—Vertical DMOS transistors, i.e. VDMOS transistors with voltage or current sensing structure, e.g. emulator section, overcurrent sensing cell
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/42376—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the length or the sectional shape
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】実施形態の半導体装置において、第1領域は、第1半導体層と、第1半導体領域と、第2半導体領域と、第1半導体領域よりも不純物濃度が高い第3半導体領域と、第2半導体領域および第3半導体領域に電気的に接続された第1電極と、第1半導体層に電気的に接続された第2電極と、第2半導体領域の位置から第1半導体層の位置にまで達する第3電極と、第3電極に並び、絶縁膜を介して第1半導体層に接する第4電極と、を有する。第2領域は、第1半導体層の上側に第3電極に電気的に接続されたパッド電極を有する。第3領域は、第1半導体層と、第1半導体層の上に設けられた第1半導体領域と、第1半導体領域に接する第3半導体領域と、第3半導体領域に電気的に接続された第1電極と、第1半導体層に電気的に接続された第2電極と、第3半導体領域の位置から第1半導体層の位置にまで達する絶縁層と、を有する。
【選択図】図1
Description
図1(a)は、第1実施形態に係る半導体装置を表す模式的平面図であり、図1(b)は、図1(a)の矢印Aで示す領域を表す模式的平面図である。
図2には、図1(b)のX−Y線に沿った位置での断面が表されている。
活性領域1aにおいては、複数のMOSFETが設けられている。MOSFETは、所謂、上下電極構造のMOSFETである。
未使用領域1dにおける絶縁層32、ゲート電極30、およびフィールドプレート電極35のX−Z平面での断面構造は、活性領域1aにおける絶縁膜31、ゲート電極30、およびフィールドプレート電極35のX−Z平面での断面構造は同じである。これは、未使用領域1dにおける絶縁層32、ゲート電極30、およびフィールドプレート電極35と、活性領域1aにおける絶縁膜31、ゲート電極30、およびフィールドプレート電極35と、が同じ製造工程で形成されるためである。なお、未使用領域1dにおいてはフィールドプレート電極35、ゲート電極30とを適宜取り除いてもよい。
絶縁層32とソース電極50との間には、層間絶縁膜27が設けられている。絶縁層32によって取り囲まれたフィールドプレート電極35は、ソース電極50に電気的に接続されているか、あるいは、その電位が浮遊電位になっている。また、未使用領域1dにおけるゲート電極30は、例えば、ソース電極50もしくはパッド電極38に電気的に接続されているか、あるいは、その電位が浮遊電位になっている。
図4(a)は、第1実施形態に係る半導体装置の作用を表す模式的平面図であり、図4(b)は、図4(a)のX−Y線に沿った位置での模式的断面図である。
図5(a)は、第2実施形態に係る半導体装置を表す模式的平面図であり、図5(b)は、図5(a)のX−Y線に沿った位置での模式的断面図である。
絶縁層60は、活性領域および未使用領域以外の領域を取り囲んでもよい。
図6は、第3実施形態に係る半導体装置を表す模式的平面図である。
図7(a)は、第4実施形態に係る半導体装置を表す模式的平面図であり、図7(b)は、図7(a)のX−Y線に沿った位置での模式的断面図である。
なお、図7(b)には、ベース領域20が表示されているが、パッド電極38の下側においてはベース領域20を取り除いてもよい。この場合、図7(b)のベース領域20の部分はドリフト層11になる。このような場合でも、同じ効果が得られる。
図8は、第5実施形態に係る半導体装置を表す模式的平面図である。
図9は、第6実施形態に係る半導体装置を表す模式的平面図である。
Claims (6)
- 第1領域と、
第2領域と、
前記第1領域と前記第2領域との間に設けられた第3領域と、
を備え、
前記第1領域は、
第1導電形の第1半導体層と、
前記第1半導体層の上に設けられた第2導電形の第1半導体領域と、
前記第1半導体領域の上に設けられた第1導電形の第2半導体領域と、
前記第1半導体領域に接し、前記第1半導体領域よりも不純物濃度が高い第2導電形の第3半導体領域と、
前記第2半導体領域及び前記第3半導体領域に電気的に接続された第1電極と、
前記第1半導体層に電気的に接続された第2電極と、
前記第1半導体領域の表面から前記第1半導体層の内部にまで達する絶縁膜と、
前記絶縁膜を介して前記第1半導体領域に接する第3電極と、
前記絶縁膜を介して、前記第1半導体層及び前記第3電極に接する第4電極と、
を有し、
前記第2領域は、前記第1半導体層の上側において、前記第3電極に電気的に接続されたパッド電極を有し、
前記第3領域は、
前記第1半導体層と、
前記第1半導体層の上に設けられた前記第1半導体領域と、
前記第1半導体領域に接する前記第3半導体領域と、
前記第3半導体領域に電気的に接続された前記第1電極と、
前記第1半導体層に電気的に接続された前記第2電極と、
前記第3半導体領域の位置から前記第1半導体層の位置にまで達する第1絶縁層と、 を有し、
前記第1電極から前記第1半導体層にまで延在する第2絶縁層によって前記第1領域及び前記第3領域が取り囲まれている半導体装置。 - 第1領域と、
第2領域と、
前記第1領域と前記第2領域との間に設けられた第3領域と、
を備え、
前記第1領域は、
第1導電形の第1半導体層と、
前記第1半導体層の上に設けられた第2導電形の第1半導体領域と、
前記第1半導体領域の上に設けられた第1導電形の第2半導体領域と、
前記第1半導体領域に接し、前記第1半導体領域よりも不純物濃度が高い第2導電形の第3半導体領域と、
前記第2半導体領域及び前記第3半導体領域に電気的に接続された第1電極と、
前記第1半導体層に電気的に接続された第2電極と、
前記第1半導体領域の表面から前記第1半導体層の内部にまで達する絶縁膜と、
前記絶縁膜を介して前記第1半導体領域に接する第3電極と、
前記絶縁膜を介して、前記第1半導体層及び前記第3電極に接する第4電極と、
を有し、
前記第2領域は、前記第1半導体層の上側において、前記第3電極に電気的に接続されたパッド電極を有し、
前記第3領域は、
前記第1半導体層と、
前記第1半導体層の上に設けられた前記第1半導体領域と、
前記第1半導体領域に接する前記第3半導体領域と、
前記第3半導体領域に電気的に接続された前記第1電極と、
前記第1半導体層に電気的に接続された前記第2電極と、
前記第3半導体領域の位置から前記第1半導体層の位置にまで達する第1絶縁層と、 を有する半導体装置。 - 前記第1電極から前記第1半導体層にまで延在する第2絶縁層をさらに備え、
前記第1領域及び前記第3領域は、前記第2絶縁層によって取り囲まれている請求項2に記載の半導体装置。 - 前記第1電極の側から前記第1半導体層の側に延在する第3絶縁層をさらに備え、
前記第2領域は、前記第3絶縁層によって取り囲まれている請求項2または3に記載の半導体装置。 - 前記第2領域は、前記第2領域の下側において、前記第1半導体層の表面から前記第1半導体層の内部に達する複数の第4絶縁層をさらに有している請求項1〜4のいずれか1つに記載の半導体装置。
- 前記第4電極は、前記第1電極から前記第2電極に向かう第1方向に交差する第2方向において、前記第3電極に並んでいる請求項1〜5のいずれか1つに記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013107255A JP6271155B2 (ja) | 2013-05-21 | 2013-05-21 | 半導体装置 |
US14/015,145 US8872257B1 (en) | 2013-05-21 | 2013-08-30 | Semiconductor device |
US14/492,634 US9111771B2 (en) | 2013-05-21 | 2014-09-22 | Semiconductor device |
US14/799,280 US9401398B2 (en) | 2013-05-21 | 2015-07-14 | Semiconductor device including transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013107255A JP6271155B2 (ja) | 2013-05-21 | 2013-05-21 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014229705A true JP2014229705A (ja) | 2014-12-08 |
JP6271155B2 JP6271155B2 (ja) | 2018-01-31 |
Family
ID=51752722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013107255A Active JP6271155B2 (ja) | 2013-05-21 | 2013-05-21 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (3) | US8872257B1 (ja) |
JP (1) | JP6271155B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018046201A (ja) * | 2016-09-15 | 2018-03-22 | 株式会社東芝 | 半導体装置 |
JP2018513545A (ja) * | 2016-02-26 | 2018-05-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2019161190A (ja) * | 2018-03-16 | 2019-09-19 | 株式会社東芝 | 半導体装置 |
JP2022047378A (ja) * | 2020-09-11 | 2022-03-24 | 株式会社東芝 | 半導体装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6271155B2 (ja) * | 2013-05-21 | 2018-01-31 | 株式会社東芝 | 半導体装置 |
US11127822B2 (en) | 2016-02-26 | 2021-09-21 | Fuji Electric Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
JP6844228B2 (ja) * | 2016-12-02 | 2021-03-17 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
WO2020031551A1 (ja) * | 2018-08-10 | 2020-02-13 | 富士電機株式会社 | 半導体装置 |
JP6980626B2 (ja) | 2018-09-18 | 2021-12-15 | 株式会社東芝 | 半導体装置 |
JP7224979B2 (ja) | 2019-03-15 | 2023-02-20 | 株式会社東芝 | 半導体装置 |
JP7256770B2 (ja) * | 2020-03-16 | 2023-04-12 | 株式会社東芝 | 半導体装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004022644A (ja) * | 2002-06-13 | 2004-01-22 | Toyota Central Res & Dev Lab Inc | Mosfet |
JP2009004655A (ja) * | 2007-06-22 | 2009-01-08 | Toyota Motor Corp | 半導体装置 |
JP2011192822A (ja) * | 2010-03-15 | 2011-09-29 | Fuji Electric Co Ltd | 半導体装置 |
JP2013065749A (ja) * | 2011-09-20 | 2013-04-11 | Toshiba Corp | 半導体装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6472708B1 (en) * | 2000-08-31 | 2002-10-29 | General Semiconductor, Inc. | Trench MOSFET with structure having low gate charge |
US6710403B2 (en) * | 2002-07-30 | 2004-03-23 | Fairchild Semiconductor Corporation | Dual trench power MOSFET |
JP3764343B2 (ja) * | 2001-02-28 | 2006-04-05 | 株式会社東芝 | 半導体装置の製造方法 |
CN1265465C (zh) | 2001-04-04 | 2006-07-19 | 三菱电机株式会社 | 半导体器件 |
JP4171268B2 (ja) * | 2001-09-25 | 2008-10-22 | 三洋電機株式会社 | 半導体装置およびその製造方法 |
JP2009146994A (ja) | 2007-12-12 | 2009-07-02 | Toyota Industries Corp | トレンチゲート型半導体装置 |
US8564052B2 (en) * | 2009-11-20 | 2013-10-22 | Force Mos Technology Co., Ltd. | Trench MOSFET with trenched floating gates in termination |
JP2011254387A (ja) * | 2010-06-03 | 2011-12-15 | Rohm Co Ltd | 交流スイッチ |
JP2012064641A (ja) | 2010-09-14 | 2012-03-29 | Toshiba Corp | 半導体装置 |
JP6067957B2 (ja) | 2011-02-15 | 2017-01-25 | 三菱電機株式会社 | 半導体装置 |
JP2012182241A (ja) | 2011-02-28 | 2012-09-20 | Panasonic Corp | 連結導体及びこれを用いた半導体装置 |
US8796760B2 (en) * | 2012-03-14 | 2014-08-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Transistor and method of manufacturing the same |
JP2014216573A (ja) * | 2013-04-26 | 2014-11-17 | 株式会社東芝 | 半導体装置 |
JP6271155B2 (ja) * | 2013-05-21 | 2018-01-31 | 株式会社東芝 | 半導体装置 |
-
2013
- 2013-05-21 JP JP2013107255A patent/JP6271155B2/ja active Active
- 2013-08-30 US US14/015,145 patent/US8872257B1/en active Active
-
2014
- 2014-09-22 US US14/492,634 patent/US9111771B2/en active Active
-
2015
- 2015-07-14 US US14/799,280 patent/US9401398B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004022644A (ja) * | 2002-06-13 | 2004-01-22 | Toyota Central Res & Dev Lab Inc | Mosfet |
JP2009004655A (ja) * | 2007-06-22 | 2009-01-08 | Toyota Motor Corp | 半導体装置 |
JP2011192822A (ja) * | 2010-03-15 | 2011-09-29 | Fuji Electric Co Ltd | 半導体装置 |
JP2013065749A (ja) * | 2011-09-20 | 2013-04-11 | Toshiba Corp | 半導体装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018513545A (ja) * | 2016-02-26 | 2018-05-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2018046201A (ja) * | 2016-09-15 | 2018-03-22 | 株式会社東芝 | 半導体装置 |
JP2019161190A (ja) * | 2018-03-16 | 2019-09-19 | 株式会社東芝 | 半導体装置 |
JP2022047378A (ja) * | 2020-09-11 | 2022-03-24 | 株式会社東芝 | 半導体装置 |
JP7394038B2 (ja) | 2020-09-11 | 2023-12-07 | 株式会社東芝 | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
US20150008510A1 (en) | 2015-01-08 |
US8872257B1 (en) | 2014-10-28 |
JP6271155B2 (ja) | 2018-01-31 |
US9111771B2 (en) | 2015-08-18 |
US20150318392A1 (en) | 2015-11-05 |
US9401398B2 (en) | 2016-07-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6271155B2 (ja) | 半導体装置 | |
JP6197294B2 (ja) | 半導体素子 | |
JP6119577B2 (ja) | 半導体装置 | |
JP5098300B2 (ja) | 半導体装置およびその製造方法 | |
JP6801324B2 (ja) | 半導体装置 | |
JP2017147435A (ja) | 半導体装置 | |
JP5229288B2 (ja) | 半導体装置およびその制御方法 | |
JP2017022311A (ja) | 半導体装置 | |
JP6323556B2 (ja) | 半導体装置 | |
JP6597102B2 (ja) | 半導体装置 | |
JP6008054B2 (ja) | 半導体装置 | |
US9620595B2 (en) | Semiconductor device | |
JP6600491B2 (ja) | Esd素子を有する半導体装置 | |
JP2012204395A (ja) | 半導体装置およびその製造方法 | |
JP5537359B2 (ja) | 半導体装置 | |
TW201533901A (zh) | 半導體裝置 | |
JP2021052078A (ja) | 半導体装置及びその製造方法 | |
KR20150108291A (ko) | 반도체 장치 | |
JP6606364B2 (ja) | 半導体装置およびその製造方法 | |
CN113614883A (zh) | 半导体装置 | |
US9601481B2 (en) | Semiconductor device | |
JP2012204563A (ja) | 半導体素子及び半導体素子の製造方法 | |
JP2014225693A (ja) | 半導体装置およびその製造方法 | |
JP2007095874A (ja) | 半導体装置 | |
JP2009218307A (ja) | Mos型半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150811 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160809 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160818 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161017 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170323 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170417 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20170911 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20170912 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171031 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171205 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171227 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6271155 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |