JP2014151469A - Liquid discharge head and liquid discharge device - Google Patents

Liquid discharge head and liquid discharge device Download PDF

Info

Publication number
JP2014151469A
JP2014151469A JP2013020876A JP2013020876A JP2014151469A JP 2014151469 A JP2014151469 A JP 2014151469A JP 2013020876 A JP2013020876 A JP 2013020876A JP 2013020876 A JP2013020876 A JP 2013020876A JP 2014151469 A JP2014151469 A JP 2014151469A
Authority
JP
Japan
Prior art keywords
liquid
ink
head
nozzle plate
filler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013020876A
Other languages
Japanese (ja)
Other versions
JP6146558B2 (en
Inventor
Hironari Owaki
寛成 大脇
Original Assignee
Seiko Epson Corp
セイコーエプソン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, セイコーエプソン株式会社 filed Critical Seiko Epson Corp
Priority to JP2013020876A priority Critical patent/JP6146558B2/en
Priority claimed from US13/849,984 external-priority patent/US8820886B2/en
Publication of JP2014151469A publication Critical patent/JP2014151469A/en
Application granted granted Critical
Publication of JP6146558B2 publication Critical patent/JP6146558B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

PROBLEM TO BE SOLVED: To provide a liquid discharge head which improves wiping ability of an ink discharge surface and inhibits ink accumulation, and to provide a liquid discharge device.SOLUTION: A liquid discharge head includes: a liquid discharge head having a nozzle plate 111 where a nozzle for discharging a liquid toward a discharged object is formed; a cover provided at the outer peripheral side of the nozzle plate; and liquid repellent films (water repellent films) 116 provided on surfaces of the nozzle plate and the cover which face the discharged object. A filler 118 fills a recessed part defined by the cover, the nozzle plate, and the liquid repellent films.

Description

  The present invention relates to a liquid discharge head and a liquid discharge apparatus.

  2. Description of the Related Art Conventionally, a liquid discharge head that discharges liquid droplets from a nozzle by applying pressure to the liquid by a pressure generating means such as a piezoelectric actuator or a heating element is known. A typical example is an ink jet recording head that ejects ink droplets described in Patent Document 1, for example.

JP 2011-201170 A

  However, with the diversification of recording formats, the corresponding ink types are also increasing, and the liquid ejection head described in Patent Document 1 has a problem that the wiping property of the ink ejection surface may be poor in the head cleaning operation. there were. Specifically, for example, when ink having a higher viscosity than that of the conventional ink is used, ink accumulation easily occurs in a slight recess formed on the ink ejection surface of the nozzle plate, and the viscosity of the ink is increased. For this reason, there are cases where the ink pool cannot be easily eliminated even if the ink is wiped off by a conventional method. As a result, this ink reservoir is left unattended and the amount of reservoir increases, which causes further deterioration in wiping properties, and the ink solidifies on the ink ejection surface or nozzles. )There has occurred.

  Such a problem is not limited to ink, but also exists for other deposits that adhere to the ink ejection surface, and the same applies when liquids other than ink are ejected.

  In view of such circumstances, an object of the present invention is to provide a liquid discharge head and a liquid discharge apparatus capable of improving the wiping property of an ink discharge surface and suppressing ink accumulation.

  The liquid discharge head of the present invention includes a liquid discharge head having a nozzle plate in which nozzles for discharging liquid toward a discharge target are formed, a cover provided on the outer peripheral side of the nozzle plate, the nozzle plate, A liquid repellent film provided on a surface of the cover facing the target to be ejected, and a recess defined by the cover and the nozzle plate is filled with a filler.

  By filling the recess with the filler, it is possible to suppress a liquid pool generated in the recess when the liquid on the liquid discharge surface is wiped off. Therefore, for example, when the liquid discharge head is an ink jet recording head provided in an ink jet printer that uses ink as a liquid, an ink jet recording head and an ink jet printer with improved ink wiping on the ink discharge surface of the nozzle plate are provided. can do.

  It is preferable that the filler has an insulating property. Since the filler has an insulating property, it is possible to further suppress static electricity from reaching the liquid ejection head from the recess.

  It is preferable that the liquid-repellent film is not formed in the recess. By forming the liquid repellent film, the filler can be filled only in the recesses.

  As a preferred embodiment of the present invention, the nozzle plate and the cover are provided apart from each other, and the recess is formed by the end surface of the nozzle plate and the end surface of the cover facing each other, and a filler is provided in the recess. It is mentioned that it is filled.

  It is preferable that the filler does not extend closer to the discharge target side than the liquid repellent film provided on the cover. The wiping property can be improved because the filler does not extend to the discharge target side than the liquid repellent film provided on the cover.

  It is preferable that an insulating film is formed on the cover at least on a surface facing the discharge target.

  It is preferable that the filler is obtained by curing a liquid epoxy adhesive. When the filler is a liquid epoxy adhesive, the filler can easily spread in the recesses, and the openings of the recesses can be filled smoothly (slope shape). In addition, since the filler is a liquid epoxy adhesive, erosion of the filler by the liquid can be suppressed, so that the slope shape can be maintained. Thereby, deterioration of the liquid wiping property can be prevented.

  The liquid discharge apparatus of the present invention includes any one of the liquid discharge heads described above. By providing any of the above-described liquid discharge heads as the liquid discharge apparatus, it is possible to provide a liquid discharge apparatus with improved liquid wiping performance on the liquid discharge surface.

FIG. 2 is a schematic diagram illustrating a liquid ejection apparatus including the liquid ejection head according to the first embodiment. It is a conceptual cross-sectional view for explaining the operation of the head unit. (A), (b), (c) It is the schematic which shows the conventional liquid discharge head. 2A and 2B are cross-sectional views illustrating a liquid discharge head according to Embodiment 1. FIG. 6 is an exploded perspective view of a recording head according to Embodiment 2. FIG. 5 is a plan view of a recording head according to Embodiment 2. FIG. (A), (b) It is sectional drawing of the recording head which concerns on Embodiment 2. FIG. (1), (2) It is principal part sectional drawing of the recording head concerning Embodiment 2. FIG. It is the schematic which shows the conventional liquid discharge head. FIG. 6 is a cross-sectional view of a main part of a recording head according to a third embodiment. 6 is a cross-sectional view of a recording head according to Embodiment 4. FIG. FIG. 6 is a cross-sectional view of a main part of a recording head according to a fourth embodiment.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is a schematic diagram illustrating a liquid ejection apparatus II including a liquid ejection head I according to the first embodiment.

  The liquid ejection device II is an ink jet printer, and includes a CPU, a control IC (not shown), a head unit 1, a carriage 3, a device body 4, a carriage shaft 5, a drive motor 6, a timing belt 7, and the like.

  The head unit 1 includes a plurality of liquid discharge heads I. The head unit 1 is detachably provided with a plurality of ink cartridges 2 that constitute means for supplying ink as liquid. The carriage 3 on which the head unit 1 is mounted is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be axially movable. The head unit 1 ejects, for example, a black ink composition or a color ink composition contained in the ink cartridge 2.

  The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the head unit 1 is mounted is moved along the carriage shaft 5. On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S which is a recording medium such as paper fed by a paper feed roller (not shown) is conveyed onto the platen 8. It is like that.

  In the above-described liquid ejection apparatus II, the head unit 1 is mounted on the carriage 3 and moves in the main scanning direction. However, the present invention is not particularly limited to this. For example, the head unit 1 is fixed to the paper The present invention can also be applied to a so-called line type recording apparatus that performs printing only by moving a recording sheet S such as the one in the sub-scanning direction.

FIG. 2 is a conceptual cross-sectional view for explaining the operation of the liquid discharge head I.
The liquid discharge head I includes an ink supply path 113, a reservoir 114, a pressure generation chamber 129, a nozzle 148, a flow path forming substrate 110, a nozzle plate 111, a piezoelectric actuator 140, a case 117, and the like.

  The ink supplied from the ink cartridge 2 is supplied from an ink supply path 113 formed inside the case 117, a reservoir 114 formed inside the case 117, and a pressure generation chamber 129 formed inside the flow path forming substrate 110. Move to. On the other hand, the print signal sent from the CPU is transmitted to the control IC. Here, the print signal is converted into a control signal for the pressure generating chamber 129, and a drive signal for ejecting ink is transmitted to the piezoelectric actuator 140. The tip of the piezoelectric actuator 140 applies pressure to the pressure generation chamber 129 through the elastic plate 112 forming the vibration plate via the reinforcing island 141. The ink that has moved to the pressure generating chamber 129 receives pressure and is ejected as ink droplets onto the recording sheet S (FIG. 1) through the nozzles 148 formed on the nozzle plate 111.

  In FIG. 2, the example in which one nozzle 148 is provided on the nozzle plate 111 has been described. However, the liquid discharge head I includes a plurality of pressure generation chambers 129 and a plurality of nozzles 148 communicating with each of them. The nozzle plate 111 has a plurality of rows of nozzles 148 formed therein.

3A, 3B, and 3C are schematic views showing a conventional liquid discharge head.
FIG. 3A is a perspective view of the head unit 1 as viewed from the recording sheet S shown in FIG.

  The head unit 1 is configured such that a plurality (four in FIG. 3) of liquid ejection heads I are collected by a fixed plate 115 and fixed and held.

  FIG.3 (b) is an enlarged view of the A section in Fig.3 (a). A state of a fixed plate (cover) 115 that holds the nozzle plate 111 in a frame shape is shown in contact with the ejection surface (ink ejection surface 111s) of the nozzle plate 111 that constitutes the liquid ejection head I. Thus, in the present embodiment, the fixed plate 115 is provided on the outer peripheral side of the nozzle plate 111.

  The ink ejected from the nozzle 148 may remain attached around the nozzle 148. When this ink residue is cleaned by wiping the ink discharge surface 111s, there is a tendency for ink accumulation to occur in the concave portion formed by the step of the fixing plate 115 that contacts the ink discharge surface 111s in a frame shape.

  FIG. 3C is a cross-sectional view taken along the line BB in FIG. 3B and shows a state of this ink reservoir. An ink pool is generated in a recess formed by a step formed between the ink ejection surface 111s and the end of the fixed plate 115, and the amount of the accumulated ink is left to increase, so that the wiping property of the ink ejection surface 111s is increased. The ink is deteriorated and the ink is solidified on the ink discharge surface 111 s or the nozzle 148, and the flight of the discharge ink is deteriorated, the discharge is impossible (discharge deterioration).

  4A and 4B are cross-sectional views illustrating the head unit 1 according to the first embodiment.

  As shown in FIG. 4B, the head unit 1 includes a stepped portion (concave portion) formed by the end surface of the fixing plate 115 that contacts the ink discharge surface 111s, the end portion of the nozzle plate 111, and the water repellent film 116. A filler 118 for forming the stepped portion in a slope shape is attached. In addition, the ink discharge surface 111s (the inner ink discharge surface 111s surrounded by the filler 118) other than the region where the filler 118 is attached and the region covered with the fixing plate 115 on the ink discharge surface 111s is water-repellent. A film 116 is formed. The nozzle 148 is provided so as to penetrate the water repellent film 116 and the nozzle plate 111.

  The head unit 1 has the same configuration as the head unit 1 except that the ink ejection surface 111s is provided with the filler 118 and the water repellent film 116.

  FIG. 4A shows a state in which the water repellent film 116 is formed on the ink discharge surface 111 s and the fixing plate 115 prior to the attachment of the filler 118.

  In the manufacturing stage of the nozzle plate 111, the water repellent film 116 is selectively applied to the ink ejection surface 111s excluding the area where the fixing plate 115 abuts and the area where the filler 118 is attached by screen printing or photolithography. This is done by forming a water repellent material into a film. Also on the fixing plate 115, a water repellent material is formed in a film shape on the surface facing the discharge target, that is, on the outer surface of the liquid discharge head I and parallel to the ink discharge surface 111s. Yes. This film is a water repellent film (liquid repellent film) 116. Alternatively, the water repellent film 116 may be formed after the nozzle plate 111 assembled to the liquid discharge head I is fixed by the fixing plate 115.

  As the filler 118, a liquid epoxy adhesive is used as a preferred example. That is, the filler is obtained by curing an epoxy adhesive. After the water repellent film 116 is formed, the filler 118 is formed by applying an epoxy adhesive to a region where the water repellent film 116 is not formed at the step portion formed by the end portion of the fixing plate 115 and the ink discharge surface 111s. Attached by curing.

  As described above, according to the head unit 1 according to the present embodiment, the following effects can be obtained.

  Since the step formed between the nozzle plate 111 and the fixed plate 115 is formed in a slope shape, it is possible to suppress ink accumulation generated at the step when the ink on the ink discharge surface 111s is wiped off.

  Accordingly, it is possible to provide a liquid discharge head and a liquid discharge apparatus that improve the ink wiping property on the ink discharge surface.

  Further, since the ink discharge surface 111s repels (repells) the ink by the water repellent film 116, the wiping property of the ink discharge surface 111s is improved. Thereby, discharge deterioration can be suppressed.

  Since the filler 118 is a liquid epoxy adhesive, the filler 118 can easily spread at the stepped portion, and the spread of the filler 118 to the ink ejection surface 111s can be prevented at the stepped portion of the water repellent film 116. it can. Therefore, the slope can be easily formed. In addition, by solidifying the liquid epoxy adhesive, it is possible to suppress ink erosion, so that the slope shape can be maintained. Thereby, deterioration of ink wiping property can be prevented.

  Further, by using the head unit 1 as the liquid ejection device, it is possible to provide a liquid ejection device with improved ink wiping performance on the ink ejection surface.

(Embodiment 2)
This embodiment is different from the first embodiment in the structure of the liquid ejection head. Hereinafter, the configuration of the ink jet recording head will be described with reference to FIGS.

  FIG. 5 is an exploded perspective view of an ink jet recording head that is an example of a liquid discharge head according to Embodiment 2 of the present invention, and FIG. 6 is an ink jet type that is an example of a liquid discharge head according to Embodiment 2 of the present invention. FIG. 7 is a plan view of the recording head, and FIG. 7 is a cross-sectional view taken along the line AA ′ of the ink jet recording head of FIG. FIG. 8 is an enlarged cross-sectional view of the main part for explanation. FIG. 9 is a diagram for explaining the flow of static electricity in a conventional liquid discharge head.

  As shown in the drawing, an ink jet recording head I which is an example of a liquid discharge head according to the present embodiment includes a plurality of members such as a head main body 11 and a case member 40, and the plurality of members are joined by an adhesive or the like. Yes. In the present embodiment, the head body 11 includes a flow path forming substrate 10, a communication plate 15, a nozzle plate 20, a protective substrate 30, and a compliance substrate 45. In this embodiment, as will be described in detail later, the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, and the protective substrate 30 are formed of a silicon substrate (silicon single crystal substrate). That is, in this embodiment, the substrate in which the flow path including the nozzle opening 21 is formed and laminated with the adhesive is the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, and the protective substrate 30. .

  In this embodiment, the flow path forming substrate 10 constituting the head main body 11 is made of a silicon single crystal substrate. In this flow path forming substrate 10, a plurality of pressure generating chambers 12 are juxtaposed along a first direction X in a direction in which a plurality of nozzle openings 21 that discharge ink of the same color are juxtaposed (a side-by-side direction). ing. Further, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure generating chambers 12 are arranged in the juxtaposed direction in the second direction Y, and in this embodiment, two rows.

  As shown in FIG. 7, the communication plate 15 is bonded to one surface side of the flow path forming substrate 10 (the side opposite to the vibration plate 50 described later) via an adhesive 211. A nozzle plate 20 having a plurality of nozzle openings 21 communicating with each pressure generating chamber 12 is bonded to the communication plate 15 via an adhesive 212. The communication plate 15 is provided with a nozzle communication path 16 that connects the pressure generation chamber 12 and the nozzle opening 21. The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. Thus, cost reduction can be achieved by making the area of the nozzle plate 20 relatively small. In the present embodiment, a surface on which the nozzle openings 21 of the nozzle plate 20 are opened and ink droplets are ejected is referred to as a liquid ejection surface 20a.

  The communication plate 15 is provided with a first manifold portion 17 and a second manifold portion 18 that constitute a part of the manifold 100.

  The first manifold portion 17 is provided through the communication plate 15 in the thickness direction (the stacking direction of the communication plate 15 and the flow path forming substrate 10).

  Further, the second manifold portion 18 is provided to open to the liquid ejection surface 20a side of the communication plate 15 without penetrating the communication plate 15 in the thickness direction.

  Further, the communication plate 15 is provided with an ink supply path 19 that communicates with one end portion of the pressure generation chamber 12 in the second direction Y independently for each pressure generation chamber 12. The ink supply path 19 communicates the second manifold portion 18 and the pressure generation chamber 12.

  Such a communication plate 15 is preferably made of a material having a linear expansion coefficient equivalent to that of the flow path forming substrate 10. That is, when a material having a linear expansion coefficient that is significantly different from that of the flow path forming substrate 10 is used as the communication plate 15, warping due to a difference in linear expansion coefficient between the flow path forming substrate 10 and the communication plate 15 due to heating or cooling. Will occur. In the present embodiment, by using the same material as the flow path forming substrate 10 as the communication plate 15, that is, a silicon single crystal substrate, warpage due to heat can be suppressed.

  The nozzle plate 20 is formed of a silicon single crystal substrate. Thereby, the linear expansion coefficient of the nozzle plate 20 and the communication plate 15 can be made equal, and generation | occurrence | production of the curvature by heating or cooling can be suppressed. The nozzle plate may be a stainless steel (SUS) plate.

  In the nozzle plate 20, a plurality of rows in which the nozzle openings 21 are arranged in the first direction X is formed in a plurality of rows in the second direction Y, in this embodiment, two rows. Each nozzle opening 21 includes a cylindrical portion (straight portion) having a constant inner diameter, and a tapered portion whose inner diameter gradually increases from the liquid ejection surface 20a toward the pressure generation chamber 12 side.

  Further, a cover head (cover) 130 that is a fixing plate of the present embodiment is provided on the liquid ejection surface 20 a side of the head body 11. The cover head 130 is fixed to the side of the compliance substrate 45 opposite to the communication plate 15 with an adhesive or the like, and seals the space of the compliance portion 49 opposite to the flow path (manifold 100). The cover head 130 is provided with an exposure opening 131 that exposes the nozzle opening 21. The cover head 130 is provided with a bent end so as to cover the side surface of the head body 11. Thus, the cover head 130 is provided on the outer periphery of the nozzle plate 20 so as to be separated from the nozzle plate 20.

  In the present embodiment, the liquid ejection surface 20a of the nozzle plate 20 is opposed to a region on the outer surface of the cover head 130 and parallel to the liquid ejection surface 20a, that is, the ejection target of the nozzle plate 20 and the cover head 130. A liquid repellent film 24 having liquid repellency is provided on the surface to be treated (see FIG. 8). Here, the liquid repellency means a property of repelling the liquid ejected from the ink jet recording head I. In other words, the liquid solution (mainly solvent) ejected from the ink jet recording head means oil repellency for those whose main component is oil, and the liquid solution ejected from the ink jet recording head (mainly For a solvent whose main component is water, it means water repellency. The liquid repellent film 24 has a higher liquid repellency than the base material of the nozzle plate 20.

  The liquid repellent film 24 is not particularly limited as long as it has liquid repellency with respect to ink. For example, a metal film containing a fluorine-based polymer or a metal alkoxide molecular film having liquid repellency is used. Can do.

  The liquid repellent film made of a metal film containing a fluorine-based polymer can be formed, for example, by performing eutectoid plating directly on the liquid discharge surface 20a of the nozzle plate 20.

  In addition, the liquid repellent film made of a molecular film is formed, for example, by forming a metal alkoxide molecular film having liquid repellent properties, followed by drying treatment, annealing treatment, etc. ) Film). When a metal alkoxide molecular film is used as the liquid repellent film, it is thinner than a liquid repellent film made of a metal film containing a fluoropolymer formed by eutectoid plating, even if an underlayer is provided. In addition, there is an advantage that the liquid repellency is not deteriorated even when the liquid discharge surface is wiped by wiping when cleaning the liquid discharge surface, and the liquid repellency can be improved. Of course, “rubbing resistance” and “liquid repellency” are inferior, but a liquid repellent film made of a metal film containing a fluorine-based polymer can also be used.

  On the other hand, a diaphragm 50 is formed on the other side of the flow path forming substrate 10 (on the side opposite to the communication plate 15). The diaphragm 50 according to the present embodiment includes an elastic film 51 formed on the flow path forming substrate 10 and an insulator film 52 formed on the elastic film 51 (see FIG. 7B). ). The pressure generation chamber 12 is formed by anisotropic etching of the flow path forming substrate 10 from one surface, and the other surface of the pressure generation chamber 12 is configured by a diaphragm (elastic film 51).

  On the diaphragm 50, a piezoelectric actuator 300 including a first electrode 60, a piezoelectric layer 70, and a second electrode 80 is provided as pressure generating means of the present embodiment. Here, the piezoelectric actuator 300 refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. In general, one electrode of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In addition, here, a portion that is configured by any one of the patterned electrodes and the piezoelectric layer 70 and in which piezoelectric distortion is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In the present embodiment, the first electrode 60 is used as a common electrode for the piezoelectric actuator 300 and the second electrode 80 is used as an individual electrode for the piezoelectric actuator 300. However, there is no problem even if this is reversed for the convenience of the drive circuit and wiring. In the above-described example, the diaphragm 50 includes the elastic film 51 and the insulator film 52. However, the present invention is not limited to this. For example, the vibration film 50 includes the elastic film 51 and the insulating film. Any one of the body films 52 may be provided, and the elastic film 51 and the insulator film 52 are not provided as the vibration plate 50, and only the first electrode 60 acts as the vibration plate. Also good. Further, the piezoelectric actuator 300 itself may substantially serve as a diaphragm. However, when the first electrode 60 is provided directly on the flow path forming substrate 10, it is necessary to protect the first electrode 60 with an insulating film (protective film or the like) so that the first electrode 60 and the ink do not conduct. There is.

The piezoelectric layer 70 is made of a piezoelectric material of the oxide having a polarization structure formed on the first electrode 60, for example, may consist of a perovskite oxide represented by the general formula ABO 3, A is Pb B can contain at least one of zirconium and titanium. The B may further contain niobium, for example. Specifically, as the piezoelectric layer 70, for example, lead zirconate titanate (Pb (Zr, Ti) O 3 : PZT), lead zirconate titanate niobate containing silicon (Pb (Zr, Ti, Nb) ) O 3 : PZTNS) or the like can be used.

  Further, the piezoelectric layer 70 is a lead-free piezoelectric material that does not contain lead, for example, a composite oxide having a perovskite structure containing bismuth ferrate or bismuth ferrate manganate, barium titanate or potassium bismuth titanate, or the like. It is good.

  One end of each lead electrode 90 is connected to the second electrode 80. The other end of the lead electrode 90 is connected to a wiring board 121 provided with a drive circuit 120, such as COF.

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is provided on the surface of the flow path forming substrate 10 on the piezoelectric actuator 300 side. The protective substrate 30 has a holding portion 31 that is a space for protecting the piezoelectric actuator 300.

  The head main body 11 having such a configuration is provided with a case member 40 that defines a manifold 100 communicating with the plurality of pressure generating chambers 12 together with the head main body 11. The case member 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is fixed to the protective substrate 30 with an adhesive, and is also fixed to the communication plate 15 with an adhesive. Specifically, the case member 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side. The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. As a result, a third manifold portion 42 is defined by the case member 40 and the head body 11 on the outer peripheral portion of the flow path forming substrate 10. The first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15 and the third manifold portion 42 defined by the case member 40 and the flow path forming substrate 10 are used in the manifold 100 of the present embodiment. Is configured.

  In addition, as a material of case member 40, resin, a metal, etc. can be used, for example. Moreover, the material of the protective substrate 30 is preferably a material having a linear expansion coefficient equivalent to that of the flow path forming substrate 10 to which the protective substrate 30 is bonded. In this embodiment, a silicon single crystal substrate is used.

  A compliance substrate 45 is provided on the surface of the communication plate 15 on the liquid discharge surface 20a side where the first manifold portion 17 and the second manifold portion 18 open. The compliance substrate 45 seals the openings on the liquid discharge surface 20 a side of the first manifold portion 17 and the second manifold portion 18.

  In this embodiment, the compliance substrate 45 includes a sealing film 46 and a fixed substrate 47. The sealing film 46 is made of a flexible thin film (for example, a thin film having a thickness of 20 μm or less formed of polyphenylene sulfide (PPS) or stainless steel (SUS)), and the fixed substrate 47 is made of stainless steel ( It is formed of a hard material such as a metal such as SUS. Since the region of the fixed substrate 47 facing the manifold 100 is an opening 48 that is completely removed in the thickness direction, one surface of the manifold 100 is sealed only with a flexible sealing film 46. It is a compliance part that is a flexible part.

  The case member 40 is provided with an introduction path 44 that communicates with the manifold 100 and supplies ink to each manifold 100. The case member 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring substrate 121 is inserted.

  In the ink jet recording head I having such a configuration, when ink is ejected, the ink is taken in from the ink storing means such as a cartridge through the introduction path 44, and the inside of the flow path is extended from the manifold 100 to the nozzle opening 21. Fill with. Thereafter, a voltage is applied to each piezoelectric actuator 300 corresponding to the pressure generating chamber 12 in accordance with a signal from the drive circuit 120, so that the elastic film 51 and the insulator film 52 are deformed together with the piezoelectric actuator 300. As a result, the pressure in the pressure generating chamber 12 is increased and ink droplets are ejected from the predetermined nozzle openings 21.

  By the way, as described above, in the ink jet recording head I, the liquid repellent film 24 of the nozzle plate 20 and the cover head 130 is provided on the surface of the nozzle plate 20 and the cover head 130 facing the discharge target. . The surfaces on which the liquid repellent film 24 is provided are surfaces on which the wiper comes into contact with each other during cleaning. The nozzle plate 20 and the end surface of the liquid repellent film 24 provided on the nozzle plate 20, the cover head 130, and the cover If there is a recess 200 (see FIG. 8) between the end surface of the liquid repellent film 24 provided on the head 130, the wiper is caught at the outermost end of the liquid repellent film 24 of the nozzle plate 20 exposed in the recess 200. Therefore, it is necessary to prevent this because the wiping property is poor. Further, if the ink is accumulated in the concave portion 200 and the wiping property is further deteriorated, the ink accumulated in the concave portion 200 may be imprinted into the nozzle opening 21, which needs to be prevented.

  Therefore, in the present embodiment, the recess 200 between the nozzle plate 20 and the liquid repellent film 24 of the cover head 130 (note that the thickness of the liquid repellent film 24 is very thin as will be described later. Filler 201 is filled in the space between the cover heads 130 to prevent the wiper from being caught and to prevent ink from accumulating. The filler 201 can be the same as that described in the first embodiment. In this embodiment, a liquid epoxy adhesive is used, that is, the liquid epoxy adhesive is cured. The filler 201 is desirably repelled by the liquid repellent film 24. In this embodiment, the filler 201 is repelled by the liquid repellent film 24.

  In this case, since the liquid repellent film 24 is provided on the nozzle plate 20 and the cover head 130, the filler 201 is filled in the recess 200 and does not adhere to the surface of the liquid repellent film 24. That is, the filler 201 is filled only in the concave portion 200 that is repelled by the liquid repellent film 24 and is not formed with the liquid repellent film 24, and does not adhere to the surface of the liquid repellent film 24. Therefore, as shown in FIG. 8 (1), the filler 201 can embed the recess 200 in a slope shape. In the drawing, for the sake of illustration, the thickness of the liquid repellent film 24 is increased. However, in actuality, the thickness of the liquid repellent film 24 is much thinner than the size of the illustrated region such as the recess 200. The liquid repellency on the side surface of the liquid repellent film 24 is negligible.

  Further, when the amount of the filler 201 is large, the filler 201 protrudes from the concave portion 200 as shown in FIG. 8 (2). It is possible to suppress accumulation. Therefore, it is sufficient that the filler 201 is provided in such an amount that it does not extend outward (to the ejection target side) from the liquid repellent film 24 of the cover head 130 while burying the concave portion 200. Of course, in order to suppress the catch of the wiper, it is most preferable that the filler 201 embeds the concave portion 200 in a slope shape as shown in FIG.

  In addition, the filler 201 and the liquid repellent film 24 in this embodiment have insulating properties. As described above, since the concave portion 200 between the nozzle plate 20 and the cover head 130 is embedded by the insulating filler 201, static electricity can be prevented from reaching the piezoelectric actuator 300. That is, as shown in FIG. 9, when no filler is embedded in the recess 200, the static electricity (e) from the discharge target (recording sheet) S via the recess 200 is a compliance substrate 45, which is a conductor. It is also conceivable that the piezoelectric actuator 300 is reached via the communication plate 15 and the flow path forming substrate 10.

  On the other hand, in the present embodiment shown in FIG. 8, since the concave portion 200 where the conductor is exposed is embedded by the filler 201 that is an insulator, static electricity does not reach the piezoelectric actuator 300. In the present embodiment, there is a region where a part of the liquid repellent film 24 is not formed at a position close to the standing portion of the cover head 130, and static electricity from this region passes through the standing portion of the cover head 130 to the ground. It is configured to flow.

  As described above, in this embodiment, the recess 200 between the end portions of the liquid repellent film 24 of the nozzle plate 20 and the liquid repellent film 24 of the cover head 130 is embedded by the filler 201, It is possible to prevent the end portion from being caught by the wiper and the ink from being accumulated in the recess 200.

(Embodiment 3)
The present embodiment is different from the second embodiment in that an insulating film 202 is formed on the outer periphery of the cover head 130A in the second embodiment. This point will be described with reference to FIG. In the third embodiment, the same components as those in the second embodiment are denoted by the same reference numerals, and description thereof is omitted.

  Specifically, the insulating film 202 is formed on the surface facing the ejection target and the surface facing the nozzle plate 20A in the cover head 130A. By forming the insulating film in this way, it is possible to impart insulation to the surface of the cover head 130A. An example of such an insulating film is a plasma polymerization film (PPSi (Plasma Polymerization Silicone) film). Further, by providing the insulating film 202, the adhesion between the liquid repellent film 24A made of a molecular film and the nozzle plate 20A can be improved. The base film made of a plasma polymerized film can be formed, for example, by polymerizing silicone with argon plasma gas. Note that there is no limitation on the insulating film 202 as long as it can provide insulating properties.

  A liquid repellent film 24 </ b> A is formed on the surface of the insulating film 202 facing the discharge target. Thus, the liquid repellent film 24A exists on the surface of the cover head 130A, the insulating film 202 exists under the liquid repellent film 24A, and the base of the insulating film 202 is the main body of the cover head 130A. A filler 201A is embedded in a recess 200A defined by the nozzle plate 20A, the cover head 130A, and the end surface of the liquid repellent film 24A of the cover head 130A and the end surface of the liquid repellent film 24A of the nozzle plate 20A.

  In the present embodiment, static electricity does not reach the piezoelectric actuator 300 even when the liquid repellent film 24A does not have insulation. Further, since the insulating film 202 is formed on the surface of the cover head 130A facing the nozzle plate 20A, the amount of the filler 201A is small, and a part or all of the surface of the cover head 130A facing the nozzle plate 20A is partially or entirely. Even if it is exposed, static electricity does not reach the piezoelectric actuator 300.

  Also in the present embodiment, the nozzle plate 20A, the cover head 130A, and the liquid repellent film 24A of the nozzle plate 20A and the liquid repellent film 24A of the cover head 130 define the concave portion 200A (as described above, Since the thickness of the liquid film 24A is thin, it can be said that the recess 200A is defined by the nozzle plate 20A and the cover head 130A), and the recess 200A is embedded by the filler 201A, so that the end of the nozzle plate 20A Can be prevented from being caught by the wiper, and ink can be prevented from accumulating in the recess 200A.

(Embodiment 4)
In the present embodiment, since the configuration of the ink jet recording head IB is different from that described in the second embodiment, a description will be given with reference to FIGS. In addition, in FIG. 11, 12, the same referential mark is attached | subjected about the component same as Embodiment 2. FIG.

  As shown in FIG. 11, in the present embodiment, a through portion 203 is provided on the side surface of the case member 40B so as to communicate with the third manifold portion 42B, and a compliance substrate 45B is provided so as to close the through portion 203. It has been.

  The openings on the nozzle plate 20B side of the first manifold portion 17B and the second manifold portion 18B are sealed by the cover head 130B. The cover head 130B is provided on the outer periphery of the nozzle plate 20B so as to be separated from the cover head 130B.

  Also in such an ink jet recording head IB, as shown in FIG. 12, the end face of the nozzle plate 20B, the end face of the cover head 130B, the end of the liquid repellent film 24B of the cover head 130B, and the liquid repellent film of the nozzle plate 20B. A concave portion 200B constituted by the end face of 24B is defined. A filler 201B is embedded in the recess 200B.

  Even in such an ink jet recording head IB, since the concave portion 200B is embedded by the filler 201B, the end portion of the nozzle plate 20B is prevented from being caught by the wiper and the ink is prevented from accumulating in the concave portion 200B. be able to. Further, by embedding the recess 200B with the filler 201B, the piezoelectric actuator 300 can be protected from static electricity from the discharge target.

(Other embodiments)
The present invention is not limited to the embodiments described above. For example, if the nozzle plate 111 and the fixing plate in the first embodiment are provided apart from each other and a recess is formed between them, a filler may be provided so as to fill the recess. Moreover, it is also possible to combine each embodiment, such as providing the insulating film 202 with respect to the nozzle plate 20B in Embodiment 4. FIG.

  In each of the embodiments described above, the liquid repellent film is provided on the fixing plate or the cover head, but the present invention is not limited to this. A liquid repellent film may not be formed on a cover such as a fixed plate or a cover head.

  In Embodiment 1 described above, the water-repellent film is formed, but the present invention is not limited to this. A liquid repellent film as described in the second embodiment may be used. Further, the insulating film 202 may be formed on the nozzle plate 111 in the first embodiment.

  In each of the embodiments described above, the stepped portion and the recessed portions 200, 200A, and 200B are embedded with the filler so that the opening portion of the recessed portion 200 has a slope shape, but is not limited thereto. If the concave portion 200 is filled with a filler, at least the end of the nozzle plate 20 can be prevented from being caught by the wiper and ink can be accumulated in the concave portion 200 as compared with the case where there is no filler. .

  In the ink jet recording apparatus II described above, the recording head I is mounted on the carriage 3 and moves in the main scanning direction. However, the present invention is not particularly limited thereto. For example, the ink jet recording head I is fixed, The present invention can also be applied to a so-called line type recording apparatus that performs printing only by moving a recording sheet S such as paper in the sub-scanning direction.

  Further, in the above-described example, the ink jet recording apparatus II has a configuration in which the ink cartridge 2 that is a liquid storage unit is mounted on the carriage 3, but is not particularly limited thereto, for example, a liquid storage unit such as an ink tank. May be fixed to the apparatus main body 4 and the storage means and the ink jet recording head I may be connected via a supply pipe such as a tube. Further, the liquid storage means may not be mounted on the ink jet recording apparatus II.

  In the above embodiment, an ink jet recording head has been described as an example of a liquid ejecting head, and an ink jet recording apparatus has been described as an example of a liquid ejecting apparatus. The present invention is intended for the entire apparatus, and can of course be applied to a liquid discharge head and a liquid discharge apparatus that discharge liquid other than ink. Other liquid discharge heads include, for example, various recording heads used in image recording apparatuses such as printers, color material discharge heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include electrode material discharge heads used for electrode formation, bio-organic discharge heads used for biochip manufacturing, and the like, and can also be applied to liquid discharge devices equipped with such liquid discharge heads.

  I ink jet recording head (liquid ejection head), 3 carriage, 4 apparatus main body, 5 carriage shaft, 6 drive motor, 7 timing belt, 8 platen, 12 pressure generating chamber, 20 nozzle plate, 20a liquid ejection surface, 21 nozzle opening , 30 protective substrate, 40 case member, 43 connection port, 44 introduction path, 45 compliance substrate, 49 compliance section, 100 manifold, 130 cover head, 300 (140) piezoelectric actuator, 200 recess, 201 (118) filler

Claims (8)

  1. A liquid ejection head having a nozzle plate on which nozzles for ejecting liquid toward an ejection target are formed;
    A cover provided on the outer peripheral side of the nozzle plate;
    A liquid repellent film provided on a surface of the nozzle plate and the cover facing the discharge target;
    A liquid discharge head, wherein a concave portion defined by the cover and the nozzle plate is filled with a filler.
  2.   The liquid discharge head according to claim 1, wherein the filler has an insulating property.
  3.   The liquid discharge head according to claim 1, wherein the liquid repellent film is not formed in the concave portion.
  4. The nozzle plate and the cover are provided apart from each other,
    The liquid according to any one of claims 1 to 3, wherein the recess is formed by an end surface of the nozzle plate and an end surface of the cover facing each other, and the recess is filled with a filler. Discharge head.
  5.   4. The liquid discharge head according to claim 1, wherein the filler does not extend to the discharge target side with respect to the liquid repellent film provided on the cover. 5.
  6.   The liquid discharge head according to claim 1, wherein an insulating film is formed on the cover at least on a surface facing the discharge target.
  7.   The liquid discharge head according to claim 1, wherein the filler is obtained by curing a liquid epoxy adhesive.
  8.   A liquid discharge apparatus comprising the liquid discharge head according to claim 1.
JP2013020876A 2013-02-05 2013-02-05 Liquid discharge head and liquid discharge apparatus Active JP6146558B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013020876A JP6146558B2 (en) 2013-02-05 2013-02-05 Liquid discharge head and liquid discharge apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013020876A JP6146558B2 (en) 2013-02-05 2013-02-05 Liquid discharge head and liquid discharge apparatus
US13/849,984 US8820886B2 (en) 2012-06-21 2013-03-25 Liquid discharging head and liquid discharging apparatus with liquid repellant film

Publications (2)

Publication Number Publication Date
JP2014151469A true JP2014151469A (en) 2014-08-25
JP6146558B2 JP6146558B2 (en) 2017-06-14

Family

ID=51573832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013020876A Active JP6146558B2 (en) 2013-02-05 2013-02-05 Liquid discharge head and liquid discharge apparatus

Country Status (1)

Country Link
JP (1) JP6146558B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016159452A (en) * 2015-02-27 2016-09-05 ブラザー工業株式会社 Liquid discharge device

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05201000A (en) * 1992-01-28 1993-08-10 Seiko Epson Corp Ink jet recording head
JPH09234894A (en) * 1996-02-29 1997-09-09 Mitsubishi Electric Corp Recording device and recording method
JP2002160365A (en) * 2000-11-27 2002-06-04 Seiko Instruments Inc Head chip and its manufacturing method
US20050200660A1 (en) * 2004-03-15 2005-09-15 Laurer Jonathon H. Ink jet printer with extended nozzle plate and method
JP2005305982A (en) * 2004-04-26 2005-11-04 Brother Ind Ltd Ink-jet head
JP2008296533A (en) * 2007-06-04 2008-12-11 Sharp Corp Ink-jet head and manufacturing method of the same
JP2009034830A (en) * 2007-07-31 2009-02-19 Seiko Epson Corp Liquid jetting head unit and liquid jetting apparatus
JP2009039894A (en) * 2007-08-07 2009-02-26 Seiko Epson Corp Liquid jetting head
JP2009078451A (en) * 2007-09-26 2009-04-16 Sharp Corp Ink jet head unit
JP2009208314A (en) * 2008-03-03 2009-09-17 Brother Ind Ltd Inkjet recording device and its manufacturing method
JP2011000778A (en) * 2009-06-18 2011-01-06 Seiko Epson Corp Liquid ejection head, liquid ejector, and method for manufacturing liquid ejection head
JP2011156845A (en) * 2010-02-04 2011-08-18 Seiko Epson Corp Liquid jetting head and method for manufacturing liquid jetting head
JP2012161972A (en) * 2011-02-07 2012-08-30 Seiko Epson Corp Liquid jet head and liquid jetting apparatus
JP2012187799A (en) * 2011-03-10 2012-10-04 Ricoh Co Ltd Liquid ejection head, liquid ejection device, and image forming apparatus
JP2012196884A (en) * 2011-03-22 2012-10-18 Seiko Epson Corp Liquid ejecting head and liquid ejecting device

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05201000A (en) * 1992-01-28 1993-08-10 Seiko Epson Corp Ink jet recording head
JPH09234894A (en) * 1996-02-29 1997-09-09 Mitsubishi Electric Corp Recording device and recording method
JP2002160365A (en) * 2000-11-27 2002-06-04 Seiko Instruments Inc Head chip and its manufacturing method
US20050200660A1 (en) * 2004-03-15 2005-09-15 Laurer Jonathon H. Ink jet printer with extended nozzle plate and method
JP2005305982A (en) * 2004-04-26 2005-11-04 Brother Ind Ltd Ink-jet head
JP2008296533A (en) * 2007-06-04 2008-12-11 Sharp Corp Ink-jet head and manufacturing method of the same
JP2009034830A (en) * 2007-07-31 2009-02-19 Seiko Epson Corp Liquid jetting head unit and liquid jetting apparatus
JP2009039894A (en) * 2007-08-07 2009-02-26 Seiko Epson Corp Liquid jetting head
JP2009078451A (en) * 2007-09-26 2009-04-16 Sharp Corp Ink jet head unit
JP2009208314A (en) * 2008-03-03 2009-09-17 Brother Ind Ltd Inkjet recording device and its manufacturing method
JP2011000778A (en) * 2009-06-18 2011-01-06 Seiko Epson Corp Liquid ejection head, liquid ejector, and method for manufacturing liquid ejection head
JP2011156845A (en) * 2010-02-04 2011-08-18 Seiko Epson Corp Liquid jetting head and method for manufacturing liquid jetting head
JP2012161972A (en) * 2011-02-07 2012-08-30 Seiko Epson Corp Liquid jet head and liquid jetting apparatus
JP2012187799A (en) * 2011-03-10 2012-10-04 Ricoh Co Ltd Liquid ejection head, liquid ejection device, and image forming apparatus
JP2012196884A (en) * 2011-03-22 2012-10-18 Seiko Epson Corp Liquid ejecting head and liquid ejecting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016159452A (en) * 2015-02-27 2016-09-05 ブラザー工業株式会社 Liquid discharge device

Also Published As

Publication number Publication date
JP6146558B2 (en) 2017-06-14

Similar Documents

Publication Publication Date Title
JP5750753B2 (en) Liquid ejecting head and liquid ejecting apparatus
JP5278654B2 (en) Liquid ejecting head and liquid ejecting apparatus
US8777382B2 (en) Inkjet head and image forming device
US7997695B2 (en) Liquid ejecting head, liquid ejecting apparatus, and actuator
JP4258668B2 (en) Liquid ejecting head and liquid ejecting apparatus
US20050264617A1 (en) Electrostatic actuator formed by a semiconductor manufacturing process
JP5387096B2 (en) Liquid discharge head, image forming apparatus, and method of manufacturing liquid discharge head
JP5552825B2 (en) Actuator, droplet ejecting head, manufacturing method thereof, and droplet ejecting apparatus
JP2007266346A (en) Piezoelectric thin film, piezoelectric element, liquid droplet injection head, liquid droplet injection apparatus, and manufacturing method of the liquid droplet injection head
CN101049758B (en) Actuating apparatus, liquid injection head and liquid injection device
JP4450238B2 (en) Liquid ejecting head and liquid ejecting apparatus
JP4438822B2 (en) Liquid ejecting head and liquid ejecting apparatus
JP5007823B2 (en) Method for manufacturing liquid jet head
US8118412B2 (en) Liquid ejecting head, liquid ejecting apparatus, and actuator
US20110032311A1 (en) Inkjet print head and method of manufacture therefor
JP5776880B2 (en) Liquid ejecting head and liquid ejecting apparatus
JP5136752B2 (en) Liquid ejecting head and liquid ejecting apparatus
US7239070B2 (en) Liquid-jet head and liquid-jet apparatus
KR100731438B1 (en) Method for producing actuator device, and liquid-jet apparatus
US9050802B2 (en) Method for manufacturing liquid jetting apparatus, method for manufacturing nozzle plate, and liquid droplet jetting apparatus
JP5668482B2 (en) Liquid ejecting head and liquid ejecting apparatus
US20110234710A1 (en) Liquid ejecting head, method for manufacturing the same and liquid ejecting apparatus
EP3053744B1 (en) Liquid ejecting head and liquid ejecting apparatus
US8851631B2 (en) Liquid ejecting head and liquid ejecting apparatus
US8579417B2 (en) Liquid ejecting head, liquid ejecting apparatus, actuator device, and manufacturing method of liquid ejecting head

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20150422

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20151221

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160914

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160921

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161118

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170419

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170502

R150 Certificate of patent or registration of utility model

Ref document number: 6146558

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150