JP2014068000A - 積層セラミックキャパシタ及びその製造方法 - Google Patents
積層セラミックキャパシタ及びその製造方法 Download PDFInfo
- Publication number
- JP2014068000A JP2014068000A JP2013172079A JP2013172079A JP2014068000A JP 2014068000 A JP2014068000 A JP 2014068000A JP 2013172079 A JP2013172079 A JP 2013172079A JP 2013172079 A JP2013172079 A JP 2013172079A JP 2014068000 A JP2014068000 A JP 2014068000A
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- ceramic
- internal electrode
- electrodes
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- exposed
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- 239000003985 ceramic capacitor Substances 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000919 ceramics Substances 0.000 claims abstract description 86
- 238000007747 plating Methods 0.000 claims abstract description 24
- 229920000642 polymers Polymers 0.000 claims abstract description 10
- 239000002861 polymer material Substances 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 4
- 239000010410 layers Substances 0.000 abstract description 49
- 239000006072 pastes Substances 0.000 description 8
- 239000010950 nickel Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 4
- 239000000463 materials Substances 0.000 description 4
- 238000000034 methods Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000000843 powders Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229910052751 metals Inorganic materials 0.000 description 3
- 239000002184 metals Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000010933 palladium Substances 0.000 description 3
- 239000000126 substances Substances 0.000 description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N Barium titanate Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloys Inorganic materials 0.000 description 2
- 239000000956 alloys Substances 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 229910010293 ceramic materials Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010586 diagrams Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006011 modification reactions Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010944 silver (metal) Substances 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N Strontium titanate Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agents Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='138' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >C</text>
<path d='M 168.364,138 L 168.356,137.828 L 168.334,137.657 L 168.297,137.489 L 168.246,137.325 L 168.181,137.166 L 168.103,137.012 L 168.011,136.867 L 167.908,136.729 L 167.793,136.601 L 167.667,136.483 L 167.532,136.377 L 167.388,136.282 L 167.237,136.201 L 167.079,136.132 L 166.916,136.078 L 166.749,136.037 L 166.578,136.012 L 166.407,136 L 166.235,136.004 L 166.064,136.023 L 165.895,136.056 L 165.729,136.103 L 165.569,136.165 L 165.414,136.24 L 165.266,136.328 L 165.126,136.429 L 164.996,136.541 L 164.875,136.664 L 164.766,136.797 L 164.669,136.939 L 164.584,137.088 L 164.512,137.245 L 164.454,137.407 L 164.41,137.573 L 164.38,137.743 L 164.365,137.914 L 164.365,138.086 L 164.38,138.257 L 164.41,138.427 L 164.454,138.593 L 164.512,138.755 L 164.584,138.912 L 164.669,139.061 L 164.766,139.203 L 164.875,139.336 L 164.996,139.459 L 165.126,139.571 L 165.266,139.672 L 165.414,139.76 L 165.569,139.835 L 165.729,139.897 L 165.895,139.944 L 166.064,139.977 L 166.235,139.996 L 166.407,140 L 166.578,139.988 L 166.749,139.963 L 166.916,139.922 L 167.079,139.868 L 167.237,139.799 L 167.388,139.718 L 167.532,139.623 L 167.667,139.517 L 167.793,139.399 L 167.908,139.271 L 168.011,139.133 L 168.103,138.988 L 168.181,138.834 L 168.246,138.675 L 168.297,138.511 L 168.334,138.343 L 168.356,138.172 L 168.364,138 L 166.364,138 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 168.364,162 L 168.356,161.828 L 168.334,161.657 L 168.297,161.489 L 168.246,161.325 L 168.181,161.166 L 168.103,161.012 L 168.011,160.867 L 167.908,160.729 L 167.793,160.601 L 167.667,160.483 L 167.532,160.377 L 167.388,160.282 L 167.237,160.201 L 167.079,160.132 L 166.916,160.078 L 166.749,160.037 L 166.578,160.012 L 166.407,160 L 166.235,160.004 L 166.064,160.023 L 165.895,160.056 L 165.729,160.103 L 165.569,160.165 L 165.414,160.24 L 165.266,160.328 L 165.126,160.429 L 164.996,160.541 L 164.875,160.664 L 164.766,160.797 L 164.669,160.939 L 164.584,161.088 L 164.512,161.245 L 164.454,161.407 L 164.41,161.573 L 164.38,161.743 L 164.365,161.914 L 164.365,162.086 L 164.38,162.257 L 164.41,162.427 L 164.454,162.593 L 164.512,162.755 L 164.584,162.912 L 164.669,163.061 L 164.766,163.203 L 164.875,163.336 L 164.996,163.459 L 165.126,163.571 L 165.266,163.672 L 165.414,163.76 L 165.569,163.835 L 165.729,163.897 L 165.895,163.944 L 166.064,163.977 L 166.235,163.996 L 166.407,164 L 166.578,163.988 L 166.749,163.963 L 166.916,163.922 L 167.079,163.868 L 167.237,163.799 L 167.388,163.718 L 167.532,163.623 L 167.667,163.517 L 167.793,163.399 L 167.908,163.271 L 168.011,163.133 L 168.103,162.988 L 168.181,162.834 L 168.246,162.675 L 168.297,162.511 L 168.334,162.343 L 168.356,162.172 L 168.364,162 L 166.364,162 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 168.364,146 L 168.356,145.828 L 168.334,145.657 L 168.297,145.489 L 168.246,145.325 L 168.181,145.166 L 168.103,145.012 L 168.011,144.867 L 167.908,144.729 L 167.793,144.601 L 167.667,144.483 L 167.532,144.377 L 167.388,144.282 L 167.237,144.201 L 167.079,144.132 L 166.916,144.078 L 166.749,144.037 L 166.578,144.012 L 166.407,144 L 166.235,144.004 L 166.064,144.023 L 165.895,144.056 L 165.729,144.103 L 165.569,144.165 L 165.414,144.24 L 165.266,144.328 L 165.126,144.429 L 164.996,144.541 L 164.875,144.664 L 164.766,144.797 L 164.669,144.939 L 164.584,145.088 L 164.512,145.245 L 164.454,145.407 L 164.41,145.573 L 164.38,145.743 L 164.365,145.914 L 164.365,146.086 L 164.38,146.257 L 164.41,146.427 L 164.454,146.593 L 164.512,146.755 L 164.584,146.912 L 164.669,147.061 L 164.766,147.203 L 164.875,147.336 L 164.996,147.459 L 165.126,147.571 L 165.266,147.672 L 165.414,147.76 L 165.569,147.835 L 165.729,147.897 L 165.895,147.944 L 166.064,147.977 L 166.235,147.996 L 166.407,148 L 166.578,147.988 L 166.749,147.963 L 166.916,147.922 L 167.079,147.868 L 167.237,147.799 L 167.388,147.718 L 167.532,147.623 L 167.667,147.517 L 167.793,147.399 L 167.908,147.271 L 168.011,147.133 L 168.103,146.988 L 168.181,146.834 L 168.246,146.675 L 168.297,146.511 L 168.334,146.343 L 168.356,146.172 L 168.364,146 L 166.364,146 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 168.364,154 L 168.356,153.828 L 168.334,153.657 L 168.297,153.489 L 168.246,153.325 L 168.181,153.166 L 168.103,153.012 L 168.011,152.867 L 167.908,152.729 L 167.793,152.601 L 167.667,152.483 L 167.532,152.377 L 167.388,152.282 L 167.237,152.201 L 167.079,152.132 L 166.916,152.078 L 166.749,152.037 L 166.578,152.012 L 166.407,152 L 166.235,152.004 L 166.064,152.023 L 165.895,152.056 L 165.729,152.103 L 165.569,152.165 L 165.414,152.24 L 165.266,152.328 L 165.126,152.429 L 164.996,152.541 L 164.875,152.664 L 164.766,152.797 L 164.669,152.939 L 164.584,153.088 L 164.512,153.245 L 164.454,153.407 L 164.41,153.573 L 164.38,153.743 L 164.365,153.914 L 164.365,154.086 L 164.38,154.257 L 164.41,154.427 L 164.454,154.593 L 164.512,154.755 L 164.584,154.912 L 164.669,155.061 L 164.766,155.203 L 164.875,155.336 L 164.996,155.459 L 165.126,155.571 L 165.266,155.672 L 165.414,155.76 L 165.569,155.835 L 165.729,155.897 L 165.895,155.944 L 166.064,155.977 L 166.235,155.996 L 166.407,156 L 166.578,155.988 L 166.749,155.963 L 166.916,155.922 L 167.079,155.868 L 167.237,155.799 L 167.388,155.718 L 167.532,155.623 L 167.667,155.517 L 167.793,155.399 L 167.908,155.271 L 168.011,155.133 L 168.103,154.988 L 168.181,154.834 L 168.246,154.675 L 168.297,154.511 L 168.334,154.343 L 168.356,154.172 L 168.364,154 L 166.364,154 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='35.0455' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >C</text>
<path d='M 53.5909,35.0455 L 53.5866,34.9458 L 53.5738,34.8469 L 53.5525,34.7495 L 53.5229,34.6542 L 53.4852,34.5619 L 53.4398,34.4731 L 53.3868,34.3886 L 53.3268,34.3089 L 53.2602,34.2347 L 53.1874,34.1665 L 53.1091,34.1048 L 53.0257,34.0501 L 52.9379,34.0027 L 52.8464,33.9631 L 52.7518,33.9314 L 52.6549,33.908 L 52.5563,33.8931 L 52.4568,33.8866 L 52.357,33.8888 L 52.2579,33.8995 L 52.16,33.9187 L 52.0642,33.9462 L 51.971,33.9819 L 51.8813,34.0254 L 51.7957,34.0765 L 51.7147,34.1348 L 51.6391,34.1998 L 51.5693,34.2711 L 51.506,34.3481 L 51.4494,34.4303 L 51.4002,34.517 L 51.3586,34.6077 L 51.3249,34.7015 L 51.2995,34.798 L 51.2824,34.8962 L 51.2738,34.9956 L 51.2738,35.0953 L 51.2824,35.1947 L 51.2995,35.2929 L 51.3249,35.3894 L 51.3586,35.4833 L 51.4002,35.5739 L 51.4494,35.6606 L 51.506,35.7428 L 51.5693,35.8198 L 51.6391,35.8911 L 51.7147,35.9561 L 51.7957,36.0144 L 51.8813,36.0655 L 51.971,36.109 L 52.0642,36.1447 L 52.16,36.1722 L 52.2579,36.1914 L 52.357,36.2021 L 52.4568,36.2043 L 52.5563,36.1978 L 52.6549,36.1829 L 52.7518,36.1595 L 52.8464,36.1279 L 52.9379,36.0882 L 53.0257,36.0408 L 53.1091,35.9861 L 53.1874,35.9244 L 53.2602,35.8562 L 53.3268,35.782 L 53.3868,35.7023 L 53.4398,35.6178 L 53.4852,35.529 L 53.5229,35.4367 L 53.5525,35.3414 L 53.5738,35.244 L 53.5866,35.1451 L 53.5909,35.0455 L 52.4318,35.0455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 53.5909,48.9545 L 53.5866,48.8549 L 53.5738,48.756 L 53.5525,48.6586 L 53.5229,48.5633 L 53.4852,48.471 L 53.4398,48.3822 L 53.3868,48.2977 L 53.3268,48.218 L 53.2602,48.1438 L 53.1874,48.0756 L 53.1091,48.0139 L 53.0257,47.9592 L 52.9379,47.9118 L 52.8464,47.8721 L 52.7518,47.8405 L 52.6549,47.8171 L 52.5563,47.8022 L 52.4568,47.7957 L 52.357,47.7979 L 52.2579,47.8086 L 52.16,47.8278 L 52.0642,47.8553 L 51.971,47.891 L 51.8813,47.9345 L 51.7957,47.9856 L 51.7147,48.0439 L 51.6391,48.1089 L 51.5693,48.1802 L 51.506,48.2572 L 51.4494,48.3394 L 51.4002,48.4261 L 51.3586,48.5167 L 51.3249,48.6106 L 51.2995,48.7071 L 51.2824,48.8053 L 51.2738,48.9047 L 51.2738,49.0044 L 51.2824,49.1038 L 51.2995,49.202 L 51.3249,49.2985 L 51.3586,49.3923 L 51.4002,49.483 L 51.4494,49.5697 L 51.506,49.6519 L 51.5693,49.7289 L 51.6391,49.8002 L 51.7147,49.8652 L 51.7957,49.9235 L 51.8813,49.9746 L 51.971,50.0181 L 52.0642,50.0538 L 52.16,50.0813 L 52.2579,50.1005 L 52.357,50.1112 L 52.4568,50.1134 L 52.5563,50.1069 L 52.6549,50.092 L 52.7518,50.0686 L 52.8464,50.0369 L 52.9379,49.9973 L 53.0257,49.9499 L 53.1091,49.8952 L 53.1874,49.8335 L 53.2602,49.7653 L 53.3268,49.6911 L 53.3868,49.6114 L 53.4398,49.5269 L 53.4852,49.4381 L 53.5229,49.3458 L 53.5525,49.2505 L 53.5738,49.1531 L 53.5866,49.0542 L 53.5909,48.9545 L 52.4318,48.9545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 53.5909,39.6818 L 53.5866,39.5822 L 53.5738,39.4833 L 53.5525,39.3858 L 53.5229,39.2906 L 53.4852,39.1983 L 53.4398,39.1095 L 53.3868,39.025 L 53.3268,38.9453 L 53.2602,38.8711 L 53.1874,38.8029 L 53.1091,38.7412 L 53.0257,38.6864 L 52.9379,38.6391 L 52.8464,38.5994 L 52.7518,38.5678 L 52.6549,38.5444 L 52.5563,38.5294 L 52.4568,38.523 L 52.357,38.5251 L 52.2579,38.5359 L 52.16,38.555 L 52.0642,38.5826 L 51.971,38.6183 L 51.8813,38.6618 L 51.7957,38.7129 L 51.7147,38.7712 L 51.6391,38.8362 L 51.5693,38.9075 L 51.506,38.9845 L 51.4494,39.0667 L 51.4002,39.1534 L 51.3586,39.244 L 51.3249,39.3379 L 51.2995,39.4343 L 51.2824,39.5326 L 51.2738,39.632 L 51.2738,39.7317 L 51.2824,39.831 L 51.2995,39.9293 L 51.3249,40.0257 L 51.3586,40.1196 L 51.4002,40.2103 L 51.4494,40.297 L 51.506,40.3792 L 51.5693,40.4562 L 51.6391,40.5274 L 51.7147,40.5925 L 51.7957,40.6507 L 51.8813,40.7018 L 51.971,40.7454 L 52.0642,40.7811 L 52.16,40.8086 L 52.2579,40.8278 L 52.357,40.8385 L 52.4568,40.8406 L 52.5563,40.8342 L 52.6549,40.8192 L 52.7518,40.7959 L 52.8464,40.7642 L 52.9379,40.7246 L 53.0257,40.6772 L 53.1091,40.6225 L 53.1874,40.5608 L 53.2602,40.4926 L 53.3268,40.4183 L 53.3868,40.3387 L 53.4398,40.2541 L 53.4852,40.1654 L 53.5229,40.073 L 53.5525,39.9778 L 53.5738,39.8804 L 53.5866,39.7815 L 53.5909,39.6818 L 52.4318,39.6818 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 53.5909,44.3182 L 53.5866,44.2185 L 53.5738,44.1196 L 53.5525,44.0222 L 53.5229,43.927 L 53.4852,43.8346 L 53.4398,43.7459 L 53.3868,43.6613 L 53.3268,43.5817 L 53.2602,43.5074 L 53.1874,43.4392 L 53.1091,43.3775 L 53.0257,43.3228 L 52.9379,43.2754 L 52.8464,43.2358 L 52.7518,43.2041 L 52.6549,43.1808 L 52.5563,43.1658 L 52.4568,43.1594 L 52.357,43.1615 L 52.2579,43.1722 L 52.16,43.1914 L 52.0642,43.2189 L 51.971,43.2546 L 51.8813,43.2982 L 51.7957,43.3493 L 51.7147,43.4075 L 51.6391,43.4726 L 51.5693,43.5438 L 51.506,43.6208 L 51.4494,43.703 L 51.4002,43.7897 L 51.3586,43.8804 L 51.3249,43.9743 L 51.2995,44.0707 L 51.2824,44.169 L 51.2738,44.2683 L 51.2738,44.368 L 51.2824,44.4674 L 51.2995,44.5657 L 51.3249,44.6621 L 51.3586,44.756 L 51.4002,44.8466 L 51.4494,44.9333 L 51.506,45.0155 L 51.5693,45.0925 L 51.6391,45.1638 L 51.7147,45.2288 L 51.7957,45.2871 L 51.8813,45.3382 L 51.971,45.3817 L 52.0642,45.4174 L 52.16,45.445 L 52.2579,45.4641 L 52.357,45.4749 L 52.4568,45.477 L 52.5563,45.4706 L 52.6549,45.4556 L 52.7518,45.4322 L 52.8464,45.4006 L 52.9379,45.3609 L 53.0257,45.3136 L 53.1091,45.2588 L 53.1874,45.1971 L 53.2602,45.1289 L 53.3268,45.0547 L 53.3868,44.975 L 53.4398,44.8905 L 53.4852,44.8017 L 53.5229,44.7094 L 53.5525,44.6142 L 53.5738,44.5167 L 53.5866,44.4178 L 53.5909,44.3182 L 52.4318,44.3182 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002131 composite materials Substances 0.000 description 1
- 239000004020 conductors Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 239000003822 epoxy resins Substances 0.000 description 1
- 239000011521 glasses Substances 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 239000007769 metal materials Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000003960 organic solvents Substances 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nODVweCcgaGVpZ2h0PSc4NXB4JyB2aWV3Qm94PScwIDAgODUgODUnPgo8IS0tIEVORCBPRiBIRUFERVIgLS0+CjxyZWN0IHN0eWxlPSdvcGFjaXR5OjEuMDtmaWxsOiNGRkZGRkY7c3Ryb2tlOm5vbmUnIHdpZHRoPSc4NScgaGVpZ2h0PSc4NScgeD0nMCcgeT0nMCc+IDwvcmVjdD4KPHRleHQgeD0nMzUuMDQ1NScgeT0nNTMuNTkwOScgY2xhc3M9J2F0b20tMCcgc3R5bGU9J2ZvbnQtc2l6ZToyM3B4O2ZvbnQtc3R5bGU6bm9ybWFsO2ZvbnQtd2VpZ2h0Om5vcm1hbDtmaWxsLW9wYWNpdHk6MTtzdHJva2U6bm9uZTtmb250LWZhbWlseTpzYW5zLXNlcmlmO3RleHQtYW5jaG9yOnN0YXJ0O2ZpbGw6IzNCNDE0MycgPlA8L3RleHQ+Cjx0ZXh0IHg9JzUxLjA0MDknIHk9JzUzLjU5MDknIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6MjNweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID5kPC90ZXh0Pgo8L3N2Zz4K [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 229920000647 polyepoxides Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrates Substances 0.000 description 1
- 239000010409 thin films Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N tin hydride Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='138' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='165.6' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<path d='M 189.824,138 L 189.816,137.828 L 189.794,137.657 L 189.757,137.489 L 189.706,137.325 L 189.641,137.166 L 189.563,137.012 L 189.471,136.867 L 189.368,136.729 L 189.253,136.601 L 189.127,136.483 L 188.992,136.377 L 188.848,136.282 L 188.697,136.201 L 188.539,136.132 L 188.376,136.078 L 188.209,136.037 L 188.038,136.012 L 187.867,136 L 187.695,136.004 L 187.524,136.023 L 187.355,136.056 L 187.189,136.103 L 187.029,136.165 L 186.874,136.24 L 186.726,136.328 L 186.586,136.429 L 186.456,136.541 L 186.335,136.664 L 186.226,136.797 L 186.129,136.939 L 186.044,137.088 L 185.972,137.245 L 185.914,137.407 L 185.87,137.573 L 185.84,137.743 L 185.825,137.914 L 185.825,138.086 L 185.84,138.257 L 185.87,138.427 L 185.914,138.593 L 185.972,138.755 L 186.044,138.912 L 186.129,139.061 L 186.226,139.203 L 186.335,139.336 L 186.456,139.459 L 186.586,139.571 L 186.726,139.672 L 186.874,139.76 L 187.029,139.835 L 187.189,139.897 L 187.355,139.944 L 187.524,139.977 L 187.695,139.996 L 187.867,140 L 188.038,139.988 L 188.209,139.963 L 188.376,139.922 L 188.539,139.868 L 188.697,139.799 L 188.848,139.718 L 188.992,139.623 L 189.127,139.517 L 189.253,139.399 L 189.368,139.271 L 189.471,139.133 L 189.563,138.988 L 189.641,138.834 L 189.706,138.675 L 189.757,138.511 L 189.794,138.343 L 189.816,138.172 L 189.824,138 L 187.824,138 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 189.824,162 L 189.816,161.828 L 189.794,161.657 L 189.757,161.489 L 189.706,161.325 L 189.641,161.166 L 189.563,161.012 L 189.471,160.867 L 189.368,160.729 L 189.253,160.601 L 189.127,160.483 L 188.992,160.377 L 188.848,160.282 L 188.697,160.201 L 188.539,160.132 L 188.376,160.078 L 188.209,160.037 L 188.038,160.012 L 187.867,160 L 187.695,160.004 L 187.524,160.023 L 187.355,160.056 L 187.189,160.103 L 187.029,160.165 L 186.874,160.24 L 186.726,160.328 L 186.586,160.429 L 186.456,160.541 L 186.335,160.664 L 186.226,160.797 L 186.129,160.939 L 186.044,161.088 L 185.972,161.245 L 185.914,161.407 L 185.87,161.573 L 185.84,161.743 L 185.825,161.914 L 185.825,162.086 L 185.84,162.257 L 185.87,162.427 L 185.914,162.593 L 185.972,162.755 L 186.044,162.912 L 186.129,163.061 L 186.226,163.203 L 186.335,163.336 L 186.456,163.459 L 186.586,163.571 L 186.726,163.672 L 186.874,163.76 L 187.029,163.835 L 187.189,163.897 L 187.355,163.944 L 187.524,163.977 L 187.695,163.996 L 187.867,164 L 188.038,163.988 L 188.209,163.963 L 188.376,163.922 L 188.539,163.868 L 188.697,163.799 L 188.848,163.718 L 188.992,163.623 L 189.127,163.517 L 189.253,163.399 L 189.368,163.271 L 189.471,163.133 L 189.563,162.988 L 189.641,162.834 L 189.706,162.675 L 189.757,162.511 L 189.794,162.343 L 189.816,162.172 L 189.824,162 L 187.824,162 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 189.824,146 L 189.816,145.828 L 189.794,145.657 L 189.757,145.489 L 189.706,145.325 L 189.641,145.166 L 189.563,145.012 L 189.471,144.867 L 189.368,144.729 L 189.253,144.601 L 189.127,144.483 L 188.992,144.377 L 188.848,144.282 L 188.697,144.201 L 188.539,144.132 L 188.376,144.078 L 188.209,144.037 L 188.038,144.012 L 187.867,144 L 187.695,144.004 L 187.524,144.023 L 187.355,144.056 L 187.189,144.103 L 187.029,144.165 L 186.874,144.24 L 186.726,144.328 L 186.586,144.429 L 186.456,144.541 L 186.335,144.664 L 186.226,144.797 L 186.129,144.939 L 186.044,145.088 L 185.972,145.245 L 185.914,145.407 L 185.87,145.573 L 185.84,145.743 L 185.825,145.914 L 185.825,146.086 L 185.84,146.257 L 185.87,146.427 L 185.914,146.593 L 185.972,146.755 L 186.044,146.912 L 186.129,147.061 L 186.226,147.203 L 186.335,147.336 L 186.456,147.459 L 186.586,147.571 L 186.726,147.672 L 186.874,147.76 L 187.029,147.835 L 187.189,147.897 L 187.355,147.944 L 187.524,147.977 L 187.695,147.996 L 187.867,148 L 188.038,147.988 L 188.209,147.963 L 188.376,147.922 L 188.539,147.868 L 188.697,147.799 L 188.848,147.718 L 188.992,147.623 L 189.127,147.517 L 189.253,147.399 L 189.368,147.271 L 189.471,147.133 L 189.563,146.988 L 189.641,146.834 L 189.706,146.675 L 189.757,146.511 L 189.794,146.343 L 189.816,146.172 L 189.824,146 L 187.824,146 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 189.824,154 L 189.816,153.828 L 189.794,153.657 L 189.757,153.489 L 189.706,153.325 L 189.641,153.166 L 189.563,153.012 L 189.471,152.867 L 189.368,152.729 L 189.253,152.601 L 189.127,152.483 L 188.992,152.377 L 188.848,152.282 L 188.697,152.201 L 188.539,152.132 L 188.376,152.078 L 188.209,152.037 L 188.038,152.012 L 187.867,152 L 187.695,152.004 L 187.524,152.023 L 187.355,152.056 L 187.189,152.103 L 187.029,152.165 L 186.874,152.24 L 186.726,152.328 L 186.586,152.429 L 186.456,152.541 L 186.335,152.664 L 186.226,152.797 L 186.129,152.939 L 186.044,153.088 L 185.972,153.245 L 185.914,153.407 L 185.87,153.573 L 185.84,153.743 L 185.825,153.914 L 185.825,154.086 L 185.84,154.257 L 185.87,154.427 L 185.914,154.593 L 185.972,154.755 L 186.044,154.912 L 186.129,155.061 L 186.226,155.203 L 186.335,155.336 L 186.456,155.459 L 186.586,155.571 L 186.726,155.672 L 186.874,155.76 L 187.029,155.835 L 187.189,155.897 L 187.355,155.944 L 187.524,155.977 L 187.695,155.996 L 187.867,156 L 188.038,155.988 L 188.209,155.963 L 188.376,155.922 L 188.539,155.868 L 188.697,155.799 L 188.848,155.718 L 188.992,155.623 L 189.127,155.517 L 189.253,155.399 L 189.368,155.271 L 189.471,155.133 L 189.563,154.988 L 189.641,154.834 L 189.706,154.675 L 189.757,154.511 L 189.794,154.343 L 189.816,154.172 L 189.824,154 L 187.824,154 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='35.0455' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='51.0409' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<path d='M 67.2717,35.0455 L 67.2674,34.9458 L 67.2545,34.8469 L 67.2332,34.7495 L 67.2036,34.6542 L 67.166,34.5619 L 67.1205,34.4731 L 67.0676,34.3886 L 67.0076,34.3089 L 66.9409,34.2347 L 66.8682,34.1665 L 66.7898,34.1048 L 66.7065,34.0501 L 66.6187,34.0027 L 66.5272,33.9631 L 66.4326,33.9314 L 66.3356,33.908 L 66.237,33.8931 L 66.1375,33.8866 L 66.0378,33.8888 L 65.9386,33.8995 L 65.8408,33.9187 L 65.7449,33.9462 L 65.6518,33.9819 L 65.5621,34.0254 L 65.4764,34.0765 L 65.3955,34.1348 L 65.3198,34.1998 L 65.2501,34.2711 L 65.1867,34.3481 L 65.1302,34.4303 L 65.0809,34.517 L 65.0393,34.6077 L 65.0057,34.7015 L 64.9802,34.798 L 64.9631,34.8962 L 64.9545,34.9956 L 64.9545,35.0953 L 64.9631,35.1947 L 64.9802,35.2929 L 65.0057,35.3894 L 65.0393,35.4833 L 65.0809,35.5739 L 65.1302,35.6606 L 65.1867,35.7428 L 65.2501,35.8198 L 65.3198,35.8911 L 65.3955,35.9561 L 65.4764,36.0144 L 65.5621,36.0655 L 65.6518,36.109 L 65.7449,36.1447 L 65.8408,36.1722 L 65.9386,36.1914 L 66.0378,36.2021 L 66.1375,36.2043 L 66.237,36.1978 L 66.3356,36.1829 L 66.4326,36.1595 L 66.5272,36.1279 L 66.6187,36.0882 L 66.7065,36.0408 L 66.7898,35.9861 L 66.8682,35.9244 L 66.9409,35.8562 L 67.0076,35.782 L 67.0676,35.7023 L 67.1205,35.6178 L 67.166,35.529 L 67.2036,35.4367 L 67.2332,35.3414 L 67.2545,35.244 L 67.2674,35.1451 L 67.2717,35.0455 L 66.1126,35.0455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 67.2717,48.9545 L 67.2674,48.8549 L 67.2545,48.756 L 67.2332,48.6586 L 67.2036,48.5633 L 67.166,48.471 L 67.1205,48.3822 L 67.0676,48.2977 L 67.0076,48.218 L 66.9409,48.1438 L 66.8682,48.0756 L 66.7898,48.0139 L 66.7065,47.9592 L 66.6187,47.9118 L 66.5272,47.8721 L 66.4326,47.8405 L 66.3356,47.8171 L 66.237,47.8022 L 66.1375,47.7957 L 66.0378,47.7979 L 65.9386,47.8086 L 65.8408,47.8278 L 65.7449,47.8553 L 65.6518,47.891 L 65.5621,47.9345 L 65.4764,47.9856 L 65.3955,48.0439 L 65.3198,48.1089 L 65.2501,48.1802 L 65.1867,48.2572 L 65.1302,48.3394 L 65.0809,48.4261 L 65.0393,48.5167 L 65.0057,48.6106 L 64.9802,48.7071 L 64.9631,48.8053 L 64.9545,48.9047 L 64.9545,49.0044 L 64.9631,49.1038 L 64.9802,49.202 L 65.0057,49.2985 L 65.0393,49.3923 L 65.0809,49.483 L 65.1302,49.5697 L 65.1867,49.6519 L 65.2501,49.7289 L 65.3198,49.8002 L 65.3955,49.8652 L 65.4764,49.9235 L 65.5621,49.9746 L 65.6518,50.0181 L 65.7449,50.0538 L 65.8408,50.0813 L 65.9386,50.1005 L 66.0378,50.1112 L 66.1375,50.1134 L 66.237,50.1069 L 66.3356,50.092 L 66.4326,50.0686 L 66.5272,50.0369 L 66.6187,49.9973 L 66.7065,49.9499 L 66.7898,49.8952 L 66.8682,49.8335 L 66.9409,49.7653 L 67.0076,49.6911 L 67.0676,49.6114 L 67.1205,49.5269 L 67.166,49.4381 L 67.2036,49.3458 L 67.2332,49.2505 L 67.2545,49.1531 L 67.2674,49.0542 L 67.2717,48.9545 L 66.1126,48.9545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 67.2717,39.6818 L 67.2674,39.5822 L 67.2545,39.4833 L 67.2332,39.3858 L 67.2036,39.2906 L 67.166,39.1983 L 67.1205,39.1095 L 67.0676,39.025 L 67.0076,38.9453 L 66.9409,38.8711 L 66.8682,38.8029 L 66.7898,38.7412 L 66.7065,38.6864 L 66.6187,38.6391 L 66.5272,38.5994 L 66.4326,38.5678 L 66.3356,38.5444 L 66.237,38.5294 L 66.1375,38.523 L 66.0378,38.5251 L 65.9386,38.5359 L 65.8408,38.555 L 65.7449,38.5826 L 65.6518,38.6183 L 65.5621,38.6618 L 65.4764,38.7129 L 65.3955,38.7712 L 65.3198,38.8362 L 65.2501,38.9075 L 65.1867,38.9845 L 65.1302,39.0667 L 65.0809,39.1534 L 65.0393,39.244 L 65.0057,39.3379 L 64.9802,39.4343 L 64.9631,39.5326 L 64.9545,39.632 L 64.9545,39.7317 L 64.9631,39.831 L 64.9802,39.9293 L 65.0057,40.0257 L 65.0393,40.1196 L 65.0809,40.2103 L 65.1302,40.297 L 65.1867,40.3792 L 65.2501,40.4562 L 65.3198,40.5274 L 65.3955,40.5925 L 65.4764,40.6507 L 65.5621,40.7018 L 65.6518,40.7454 L 65.7449,40.7811 L 65.8408,40.8086 L 65.9386,40.8278 L 66.0378,40.8385 L 66.1375,40.8406 L 66.237,40.8342 L 66.3356,40.8192 L 66.4326,40.7959 L 66.5272,40.7642 L 66.6187,40.7246 L 66.7065,40.6772 L 66.7898,40.6225 L 66.8682,40.5608 L 66.9409,40.4926 L 67.0076,40.4183 L 67.0676,40.3387 L 67.1205,40.2541 L 67.166,40.1654 L 67.2036,40.073 L 67.2332,39.9778 L 67.2545,39.8804 L 67.2674,39.7815 L 67.2717,39.6818 L 66.1126,39.6818 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 67.2717,44.3182 L 67.2674,44.2185 L 67.2545,44.1196 L 67.2332,44.0222 L 67.2036,43.927 L 67.166,43.8346 L 67.1205,43.7459 L 67.0676,43.6613 L 67.0076,43.5817 L 66.9409,43.5074 L 66.8682,43.4392 L 66.7898,43.3775 L 66.7065,43.3228 L 66.6187,43.2754 L 66.5272,43.2358 L 66.4326,43.2041 L 66.3356,43.1808 L 66.237,43.1658 L 66.1375,43.1594 L 66.0378,43.1615 L 65.9386,43.1722 L 65.8408,43.1914 L 65.7449,43.2189 L 65.6518,43.2546 L 65.5621,43.2982 L 65.4764,43.3493 L 65.3955,43.4075 L 65.3198,43.4726 L 65.2501,43.5438 L 65.1867,43.6208 L 65.1302,43.703 L 65.0809,43.7897 L 65.0393,43.8804 L 65.0057,43.9743 L 64.9802,44.0707 L 64.9631,44.169 L 64.9545,44.2683 L 64.9545,44.368 L 64.9631,44.4674 L 64.9802,44.5657 L 65.0057,44.6621 L 65.0393,44.756 L 65.0809,44.8466 L 65.1302,44.9333 L 65.1867,45.0155 L 65.2501,45.0925 L 65.3198,45.1638 L 65.3955,45.2288 L 65.4764,45.2871 L 65.5621,45.3382 L 65.6518,45.3817 L 65.7449,45.4174 L 65.8408,45.445 L 65.9386,45.4641 L 66.0378,45.4749 L 66.1375,45.477 L 66.237,45.4706 L 66.3356,45.4556 L 66.4326,45.4322 L 66.5272,45.4006 L 66.6187,45.3609 L 66.7065,45.3136 L 66.7898,45.2588 L 66.8682,45.1971 L 66.9409,45.1289 L 67.0076,45.0547 L 67.0676,44.975 L 67.1205,44.8905 L 67.166,44.8017 L 67.2036,44.7094 L 67.2332,44.6142 L 67.2545,44.5167 L 67.2674,44.4178 L 67.2717,44.3182 L 66.1126,44.3182 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
Abstract
【解決手段】本発明の一実施形態による積層セラミックキャパシタは、対向する第1側面及び第2側面、上記第1側面及び第2側面を連結する第3端面及び第4端面を有するセラミック本体と、上記セラミック本体の内部に形成され、上記第1側面、第2側面及び第3端面、または第1側面、第2側面及び第4端面に一端が露出する第1及び第2内部電極と、上記セラミック本体の外側に形成され、上記第1及び第2内部電極と電気的に連結された第1及び第2外部電極と、上記第1及び第2外部電極の一部領域に形成されためっき層と、を含み、上記セラミック本体と上記第1及び第2外部電極の上部領域においてめっき層が形成されていない領域に高分子層がさらに形成されることができる。
【選択図】図2
Description
1 誘電体層
11 高分子層
21、22 第1及び第2内部電極
31、32 全ての外部電極
31a、32a 第1及び第2外部電極
31b、32b めっき層
Claims (7)
- 対向する第1側面及び第2側面、前記第1側面及び第2側面を連結する第3端面及び第4端面を有するセラミック本体と、
前記セラミック本体の内部に形成され、前記第1側面、第2側面及び第3端面、または第1側面、第2側面及び第4端面に一端が露出する第1及び第2内部電極と、
前記セラミック本体の外側に形成され、前記第1及び第2内部電極と電気的に連結された第1及び第2外部電極と、
前記第1及び第2外部電極の一部領域に形成されためっき層と、を含み、
前記セラミック本体と前記第1及び第2外部電極の上部領域においてめっき層が形成されていない領域に高分子層がさらに形成される、積層セラミックキャパシタ。 - 前記第1及び第2内部電極は、前記セラミック本体の第1側面及び第2側面の一部領域のみに露出する、請求項1に記載の積層セラミックキャパシタ。
- 前記第1及び第2内部電極は、前記セラミック本体の第1側面及び第2側面においてめっき層が形成された領域には露出しない、請求項1に記載の積層セラミックキャパシタ。
- 複数個のストライプ状の第1内部電極パターンが所定間隔を置いて形成された第1セラミックグリーンシート及び複数個のストライプ状の第2内部電極パターンが所定間隔を置いて形成された第2セラミックグリーンシートを用意する段階と、
前記ストライプ状の第1内部電極パターンと前記ストライプ状の第2内部電極パターンが交差するように前記第1セラミックグリーンシートと前記第2セラミックグリーンシートを積層してセラミックグリーンシート積層体を形成し、前記積層体の上面及び下面のうち少なくとも一面には複数個のセラミックグリーンシートを積層してカバー層を形成する段階と、
前記ストライプ状の第1内部電極パターン及び第2内部電極パターンを横切って第1内部電極及び第2内部電極が一定幅を有し、前記幅方向に前記第1内部電極及び第2内部電極の末端が露出した側面を有するように前記セラミックグリーンシート積層体を切断する段階と、
前記積層体の外側に導電性ペーストを塗布して第1及び第2外部電極を形成する段階と、
前記積層体と前記第1及び第2外部電極上部の一部領域に高分子物質をコーティングする段階と、を含む、積層セラミックキャパシタの製造方法。 - 前記高分子物質をコーティングする段階の後に、前記第1及び第2外部電極上部において高分子物質がコーティングされていない残りの領域にめっき層を形成する段階をさらに含む、請求項4に記載の積層セラミックキャパシタの製造方法。
- 前記第1及び第2内部電極は、前記積層体の幅方向においてめっき層が形成された領域には露出しない、請求項5に記載の積層セラミックキャパシタの製造方法。
- 前記第1及び第2内部電極は、前記積層体の幅方向の一部領域のみに露出する、請求項4に記載の積層セラミックキャパシタの製造方法。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016031992A (ja) * | 2014-07-28 | 2016-03-07 | 株式会社村田製作所 | セラミック電子部品およびその製造方法 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5924543B2 (ja) * | 2013-03-19 | 2016-05-25 | 株式会社村田製作所 | 積層セラミックコンデンサ |
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KR101891085B1 (ko) * | 2016-11-23 | 2018-08-23 | 삼성전기주식회사 | 커패시터 및 그의 제조방법 |
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KR102076149B1 (ko) * | 2018-06-19 | 2020-02-11 | 삼성전기주식회사 | 적층 세라믹 전자부품 및 그 실장 기판 |
KR102101932B1 (ko) * | 2018-10-02 | 2020-04-20 | 삼성전기주식회사 | 적층 세라믹 전자부품 |
KR102068804B1 (ko) * | 2018-11-16 | 2020-01-22 | 삼성전기주식회사 | 적층 세라믹 전자부품 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08162357A (ja) * | 1994-11-30 | 1996-06-21 | Murata Mfg Co Ltd | セラミック電子部品 |
JPH10208907A (ja) * | 1997-01-28 | 1998-08-07 | Matsushita Electric Ind Co Ltd | 電子部品とその製造方法 |
JPH11219847A (ja) * | 1998-01-29 | 1999-08-10 | Tdk Corp | セラミックコンデンサ |
JPH11340081A (ja) * | 1998-05-21 | 1999-12-10 | Murata Mfg Co Ltd | 積層セラミック電子部品及びその製造方法 |
JP2006179873A (ja) * | 2004-12-23 | 2006-07-06 | Samsung Electro Mech Co Ltd | 積層型チップキャパシタ及びその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61236110A (en) * | 1985-04-11 | 1986-10-21 | Murata Manufacturing Co | Laminate ceramic capacitor |
KR100255906B1 (ko) * | 1994-10-19 | 2000-05-01 | 모리시타 요이찌 | 전자부품과 그 제조방법 |
US6278065B1 (en) * | 1999-04-01 | 2001-08-21 | Harris Ireland Development Company, Ltd. | Apparatus and method for minimizing currents in electrical devices |
JP2000306765A (ja) * | 1999-04-20 | 2000-11-02 | Murata Mfg Co Ltd | 積層セラミック電子部品 |
JP2004128221A (ja) * | 2002-10-02 | 2004-04-22 | Murata Mfg Co Ltd | チップ型セラミック電子部品の製造方法 |
JP4093188B2 (ja) * | 2003-05-27 | 2008-06-04 | 株式会社村田製作所 | 積層セラミック電子部品とその実装構造および実装方法 |
US7292429B2 (en) * | 2006-01-18 | 2007-11-06 | Kemet Electronics Corporation | Low inductance capacitor |
JP2011003846A (ja) | 2009-06-22 | 2011-01-06 | Murata Mfg Co Ltd | セラミック電子部品の製造方法 |
JP5459487B2 (ja) * | 2010-02-05 | 2014-04-02 | 株式会社村田製作所 | 積層型電子部品およびその製造方法 |
JP2012174916A (ja) * | 2011-02-22 | 2012-09-10 | Taiyo Yuden Co Ltd | チップ状電子部品 |
KR101188032B1 (ko) * | 2011-03-09 | 2012-10-08 | 삼성전기주식회사 | 적층 세라믹 커패시터 및 그 제조방법 |
JP2013026392A (ja) * | 2011-07-20 | 2013-02-04 | Tdk Corp | 電子部品及び電子部品の製造方法 |
JP2013058558A (ja) * | 2011-09-07 | 2013-03-28 | Tdk Corp | 電子部品 |
-
2012
- 2012-09-26 KR KR1020120107393A patent/KR102004761B1/ko active IP Right Grant
-
2013
- 2013-08-22 JP JP2013172079A patent/JP2014068000A/ja active Pending
- 2013-08-23 US US13/974,795 patent/US9384898B2/en active Active
- 2013-09-09 CN CN201310407328.0A patent/CN103680947B/zh active IP Right Grant
-
2018
- 2018-05-09 JP JP2018090497A patent/JP2018139312A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08162357A (ja) * | 1994-11-30 | 1996-06-21 | Murata Mfg Co Ltd | セラミック電子部品 |
JPH10208907A (ja) * | 1997-01-28 | 1998-08-07 | Matsushita Electric Ind Co Ltd | 電子部品とその製造方法 |
JPH11219847A (ja) * | 1998-01-29 | 1999-08-10 | Tdk Corp | セラミックコンデンサ |
JPH11340081A (ja) * | 1998-05-21 | 1999-12-10 | Murata Mfg Co Ltd | 積層セラミック電子部品及びその製造方法 |
JP2006179873A (ja) * | 2004-12-23 | 2006-07-06 | Samsung Electro Mech Co Ltd | 積層型チップキャパシタ及びその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015029009A (ja) * | 2013-07-30 | 2015-02-12 | Tdk株式会社 | セラミック電子部品 |
JP2016031992A (ja) * | 2014-07-28 | 2016-03-07 | 株式会社村田製作所 | セラミック電子部品およびその製造方法 |
US9595391B2 (en) | 2014-07-28 | 2017-03-14 | Murata Manufacturing Co., Ltd. | Ceramic electronic component and manufacturing method therefor |
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US9384898B2 (en) | 2016-07-05 |
JP2018139312A (ja) | 2018-09-06 |
KR20140040547A (ko) | 2014-04-03 |
US20140085767A1 (en) | 2014-03-27 |
KR102004761B1 (ko) | 2019-07-29 |
CN103680947A (zh) | 2014-03-26 |
CN103680947B (zh) | 2018-08-03 |
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