JP2014067744A5 - - Google Patents

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Publication number
JP2014067744A5
JP2014067744A5 JP2012209825A JP2012209825A JP2014067744A5 JP 2014067744 A5 JP2014067744 A5 JP 2014067744A5 JP 2012209825 A JP2012209825 A JP 2012209825A JP 2012209825 A JP2012209825 A JP 2012209825A JP 2014067744 A5 JP2014067744 A5 JP 2014067744A5
Authority
JP
Japan
Prior art keywords
transported body
positioning
positioning pin
holding table
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012209825A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014067744A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012209825A priority Critical patent/JP2014067744A/ja
Priority claimed from JP2012209825A external-priority patent/JP2014067744A/ja
Priority to US14/028,640 priority patent/US20140086712A1/en
Priority to TW102133851A priority patent/TW201432839A/zh
Priority to KR1020130112777A priority patent/KR20140040652A/ko
Publication of JP2014067744A publication Critical patent/JP2014067744A/ja
Publication of JP2014067744A5 publication Critical patent/JP2014067744A5/ja
Pending legal-status Critical Current

Links

JP2012209825A 2012-09-24 2012-09-24 搬送装置及び処理装置 Pending JP2014067744A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012209825A JP2014067744A (ja) 2012-09-24 2012-09-24 搬送装置及び処理装置
US14/028,640 US20140086712A1 (en) 2012-09-24 2013-09-17 Transportng apparatus and processing apparatus
TW102133851A TW201432839A (zh) 2012-09-24 2013-09-18 運送裝置及處理裝置
KR1020130112777A KR20140040652A (ko) 2012-09-24 2013-09-23 반송 장치 및 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012209825A JP2014067744A (ja) 2012-09-24 2012-09-24 搬送装置及び処理装置

Publications (2)

Publication Number Publication Date
JP2014067744A JP2014067744A (ja) 2014-04-17
JP2014067744A5 true JP2014067744A5 (https=) 2015-04-02

Family

ID=50339012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012209825A Pending JP2014067744A (ja) 2012-09-24 2012-09-24 搬送装置及び処理装置

Country Status (4)

Country Link
US (1) US20140086712A1 (https=)
JP (1) JP2014067744A (https=)
KR (1) KR20140040652A (https=)
TW (1) TW201432839A (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6211938B2 (ja) * 2014-01-27 2017-10-11 東京エレクトロン株式会社 基板熱処理装置、基板熱処理装置の設置方法
US10807948B2 (en) * 2015-03-11 2020-10-20 Peloton Therapeutics, Inc. Aromatic compounds and uses thereof
JP6430870B2 (ja) * 2015-03-20 2018-11-28 東京エレクトロン株式会社 クランプ装置及びこれを用いた基板搬入出装置、並びに基板処理装置
JP6772498B2 (ja) * 2016-03-18 2020-10-21 株式会社Sumco 基板収納容器
JP6693356B2 (ja) * 2016-09-09 2020-05-13 株式会社ダイフク 物品搬送装置
US11295973B2 (en) * 2020-02-11 2022-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for automated wafer carrier handling
KR102372514B1 (ko) * 2021-05-10 2022-03-10 주식회사 위존 Fims 시스템의 풉 고정장치
KR102372513B1 (ko) * 2021-05-10 2022-03-10 주식회사 위존 Fims 시스템
CN115184374A (zh) * 2022-06-28 2022-10-14 西安奕斯伟材料科技有限公司 晶圆片盒检测方法及装置、片盒清洗机
US20250308963A1 (en) * 2024-04-01 2025-10-02 Nanya Technology Corporation Wafer container, top cover thereof, and method for managing wafer containers

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2583253Y2 (ja) * 1992-07-09 1998-10-22 神鋼電機株式会社 搬送装置の帯電静電気放電装置
KR100221983B1 (ko) * 1993-04-13 1999-09-15 히가시 데쓰로 처리장치
JP2000100924A (ja) * 1998-09-18 2000-04-07 Seiko Epson Corp ウェハカセット及びハンドラー
US6591162B1 (en) * 2000-08-15 2003-07-08 Asyst Technologies, Inc. Smart load port with integrated carrier monitoring and fab-wide carrier management system
JP3939101B2 (ja) * 2000-12-04 2007-07-04 株式会社荏原製作所 基板搬送方法および基板搬送容器
US6875282B2 (en) * 2001-05-17 2005-04-05 Ebara Corporation Substrate transport container
JP2003092328A (ja) * 2001-09-18 2003-03-28 Dainippon Screen Mfg Co Ltd ロードポート装置
KR100481307B1 (ko) * 2001-11-08 2005-04-07 삼성전자주식회사 반도체 제조 설비의 카세트 테이블
US20050056441A1 (en) * 2002-10-01 2005-03-17 Rider Gavin Charles Reduction of electric-field-induced damage in field-sensitive articles
JP3962705B2 (ja) * 2003-06-05 2007-08-22 東京エレクトロン株式会社 処理装置
JP2005101241A (ja) * 2003-09-25 2005-04-14 Sumitomo Mitsubishi Silicon Corp 位置決め部材および容器の支持台
US7316325B2 (en) * 2003-11-07 2008-01-08 Entegris, Inc. Substrate container
TWI267483B (en) * 2004-08-16 2006-12-01 Ind Tech Res Inst Clean container module
US7922485B2 (en) * 2007-02-14 2011-04-12 Tokyo Electron Limited Vertical type heat processing apparatus and vertical type heat processing method
JP5134495B2 (ja) * 2008-10-16 2013-01-30 東京エレクトロン株式会社 処理装置及び処理方法

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