JP2014051950A - Bellows pump - Google Patents

Bellows pump Download PDF

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Publication number
JP2014051950A
JP2014051950A JP2012198289A JP2012198289A JP2014051950A JP 2014051950 A JP2014051950 A JP 2014051950A JP 2012198289 A JP2012198289 A JP 2012198289A JP 2012198289 A JP2012198289 A JP 2012198289A JP 2014051950 A JP2014051950 A JP 2014051950A
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Japan
Prior art keywords
bellows
pump
pump chamber
plate
suction
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JP2012198289A
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Japanese (ja)
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JP2014051950A5 (en
Inventor
Tomohiro Adachi
智大 足立
Atsushi Nakano
篤 中野
Original Assignee
Nippon Pillar Packing Co Ltd
日本ピラー工業株式会社
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Priority to JP2012198289A priority Critical patent/JP2014051950A/en
Publication of JP2014051950A publication Critical patent/JP2014051950A/en
Publication of JP2014051950A5 publication Critical patent/JP2014051950A5/ja
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009Special features
    • F04B43/0036Special features the flexible member being formed as an O-ring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/08Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/084Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular member being deformed by stretching or distortion
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/08Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10Pumps having fluid drive
    • F04B43/113Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/1136Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/022Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in parallel

Abstract

The present invention provides a bellows pump capable of preventing a deformation of a bellows bottom wall due to a pressure fluctuation in a pump chamber and exhibiting a pump function in which a liquid feeding amount or a circulating fluid amount is stabilized.
SOLUTION: A plastic bellows (6) is expanded and contracted in the axial direction, thereby supplying liquid from a pump chamber (7) surrounded by the bellows (6) and supplying liquid to the pump chamber (7). In the bellows pump configured to alternately perform the suction step to be performed, the pump case (5) supports the metal operation plate (10) so as to be movable in the axial direction, and the operation plate (10) and the bellows (6 And the bottom wall (6a) of the bellows (6) at the center of the bottom wall (6a) and contacting the liquid in the pump chamber (7). Further, the opposing end surfaces (6g, 10c) of the actuator plate (10) and the operation plate (10) are in close contact with each other, and the intimate portions (6g, 10c) are sealed with an O-ring (15).
[Selection] Figure 1

Description

  The present invention is based on a chemical liquid (for example, a chemical liquid used in a manufacturing process of a semiconductor, liquid crystal, organic EL, etc.) or a slurry liquid containing a slurry component such as a solid component (for example, a CMP apparatus (CMP (Chemical Mechanical Polishing) method)). The present invention relates to a bellows pump for feeding and circulating a liquid such as a polishing liquid used in a semiconductor wafer surface polishing apparatus).

  As a bellows pump of this type, a plastic bottomed cylindrical bellows with an opening attached to a pump case is expanded and contracted in the axial direction, so that a pump chamber surrounded by the bellows can be used via a discharge-side check valve. It is well known that the discharge process for feeding the liquid into the discharge passage and the suction process for supplying the liquid from the suction passage to the pump chamber via the suction-side check valve are alternately performed (for example, Patent Documents). 1 of FIG. 1 or FIG. 2 of Patent Document 2).

  In such a bellows pump, the bottom wall of the plastic bellows is deformed, for example, when the pump chamber is pressurized in the discharge process and / or when the pump chamber is depressurized (negative pressure) in the suction process. There was a possibility of causing. For example, in the discharge process in which the bellows is contracted, the bottom wall of the bellows may be pressed by the pressure in the pump chamber and bend in a convex shape, and conversely, in the suction process in which the bellows expands, Since the pressure becomes negative, the bottom wall of the bellows may be sucked and bent into a concave shape. Alternatively, when the means for expanding and contracting the bellows is an air cylinder mechanism (see paragraph [0024]), the pressurized air to the supply / exhaust space may cause deformation such as the bottom wall of the plastic bellows being bent. There was this. For example, when the pressure in the supply / exhaust space is smaller than the pressure in the pump chamber in the discharge process in which the bellows is contracted, the bottom wall of the bellows is pressed by the pressurized air into the supply / exhaust space and bent into a concave shape in the pump chamber. There is a risk. Thus, when the bottom wall of the bellows is deformed in this way, the amount of liquid delivered (discharged fluid) or the amount of circulating fluid by the bellows pump is not stable, and variation cannot be achieved. .

JP 2002-174180 A JP2012-122380A

  In such a bellows pump, when the pump chamber is pressurized in the discharge process and / or the pump chamber is depressurized (negative pressure) in the suction process, the bottom wall of the plastic bellows is bent. There was a risk of deformation. For example, in the discharge process in which the bellows is contracted, the bottom wall of the bellows may be pressed by the pressure in the pump chamber and bend in a convex shape, and conversely, in the suction process in which the bellows expands, Since the pressure becomes negative, the bottom wall of the bellows may be sucked and bent into a concave shape. Thus, when the bottom wall of the bellows is deformed in this manner, the volume of the pump chamber is substantially changed, the amount of liquid fed (discharged fluid) or the amount of circulating fluid by the bellows pump is not stable, and variation occurs. The proper pump function cannot be demonstrated.

  By the way, in the bellows pump, as disclosed in FIG. 1 of the patent document and FIG. 2 of the patent document 2, as a means for guiding the axial movement (extension / contraction operation) of the bellows or in the double-acting bellows pump. As a means for synchronizing the expansion and contraction operations of both bellows, an operation plate supported by the pump case so as to be movable in the axial direction is connected to the bottom wall of the bellows. Therefore, by making this operation plate made of metal, it is possible to reinforce the bellows bottom wall that is easily deformed because it is made of plastic.

  However, as shown in FIG. 1 of Patent Document 1 or FIG. 2 of Patent Document 1, the connection between the bellows bottom wall and the actuating plate is performed only in these outer peripheral portions. About the part which is not connected with the action | operation board, the deformation | transformation by the pressure fluctuation of the pump chamber in the above-mentioned discharge process and / or suction process cannot prevent this. For example, when the pump chamber becomes negative pressure in the suction process, the central portion of the bellows bottom wall that is not fixed to the operating plate may bulge into the pump chamber (deform into a concave shape) due to the suction force due to the negative pressure. .

  The present invention has been made in view of the above points, and can reliably prevent deformation such as bending of the bellows bottom wall due to pressure fluctuations in the pump chamber in the discharge process and / or the suction process. It is an object of the present invention to provide a bellows pump capable of stably exhibiting an appropriate pump function without causing variations in the amount of fluid) or circulating fluid.

  In the present invention, a plastic bottomed cylindrical bellows having an opening attached to a pump case is expanded and contracted in the axial direction, so that a pump chamber surrounded by the bellows is connected to a discharge passage through a discharge check valve. In order to achieve the above-mentioned object, in the bellows pump configured to alternately perform the discharge process for feeding liquid and the suction process for supplying liquid from the suction passage to the pump chamber via the suction-side check valve, It is proposed to configure as (1) or (2).

  (1) A metal working plate supported by the pump case so as to be movable in the axial direction and a bottom wall of the bellows are connected and fixed at their outer peripheral portions, and the liquid in the pump chamber is the central portion of the bottom wall of the bellows. In addition, the liquid contact portion and the working plate that are in contact with each other are brought into close contact with each other and the close contact portion is sealed with an annular seal member.

  (2) A metal operating plate supported by the pump case so as to be movable in the axial direction and a bottom wall of the bellows are connected and fixed at their outer peripheral parts, and the liquid in the pump chamber is the central part of the bottom wall of the bellows. A seal space sealed by an annular seal member is formed between the opposed end surfaces of the wetted part and the working plate that are in contact with each other, and the seal space is filled with an incompressible fluid.

  In a preferred embodiment of such a bellows pump, the annular seal member is an O-ring, and the O-ring is engaged and held in an O-ring groove formed in a bottom wall or an operating plate of the bellows.

  In the bellows pump according to the present invention, when configured as in (1), the wetted part, which is the center part of the bellows bottom wall, is in close contact with the operating plate in a sealed state, so that the pressure in the pump chamber Regardless of the fluctuation, the wetted part and the working plate are always kept in close contact with each other so that they cannot be separated, and in the case of (2), the center of the bellows bottom wall Since the incompressible fluid is filled in the seal space formed between the wetted part and the working plate, and the seal space filled with the incompressible fluid functions as a kind of rigid body, the pump chamber Regardless of the pressure fluctuation, the wetted part, the seal space functioning as a rigid body, and the working plate are always kept in close contact with each other so as not to be separated from each other. Therefore, in either of the configurations (1) and (2), the liquid contact portion of the bellows bottom wall is reinforced by the metal working plate with respect to the pressure in the pump chamber, and the pressure in the pump chamber Deformation of the wetted part due to fluctuation is reliably prevented. Alternatively, in the bellows pump of the present invention, when the means for expanding and contracting the bellows is an air cylinder mechanism (see paragraph [0024]), the pressurized air to the supply / exhaust space for expanding and contracting the bellows is plastic. In order to prevent entry between the bottom wall of the metal bellows and the metal working plate, the plastic bellows bottom wall is reliably prevented from being deformed by the pressurized air into the air supply / exhaust space. For this reason, the volume of the pump chamber in the suction process and the discharge process does not change due to the deformation of the bellows bottom wall, and the amount of liquid fed (discharged liquid) or the amount of circulating fluid by the bellows pump is stable and appropriate. The pump function can be demonstrated. In addition, the bottom wall of the bellows itself does not need to have a strength that can prevent deformation due to pressure fluctuations in the pump chamber. Therefore, in the case of being configured as in (2), it is configured as in (1). Even in such a case, it can be made as thin as possible, and the bellows can be significantly reduced in weight.

FIG. 1 is a longitudinal side view showing an example of a bellows pump according to the present invention. FIG. 2 is a longitudinal front view of a main part taken along line II-II in FIG. FIG. 3 is a longitudinal side view showing a modification of the bellows pump according to the present invention. FIG. 4 is an enlarged view of a main part of FIG. FIG. 5 is a longitudinal front view taken along line VV in FIG. FIG. 6 is a longitudinal side view showing another modification of the bellows pump according to the present invention. FIG. 7 is an enlarged view of a main part of FIG. FIG. 8 is a longitudinal front view taken along line VIII-VIII in FIG.

  A mode for carrying out the present invention will be specifically described with reference to the drawings.

  FIG. 1 is a longitudinal side view showing an example of a bellows pump according to the present invention, and FIG. 2 is a longitudinal front view of an essential part taken along line II-II in FIG. In the following description, left and right mean the left and right in FIG.

  The bellows pump (hereinafter referred to as “first pump”) shown in FIG. 1 is a horizontal type used for feeding and circulating a liquid (for example, a chemical solution used in a manufacturing process of a semiconductor, liquid crystal, organic EL, etc.). A pump case 5 which is a double-acting bellows pump and includes a pump head 3 having a discharge passage 1 and a suction passage 2 and a pair of left and right cylinder cases 4 and 4 provided on both sides thereof, and each cylinder case 4 A pair of left and right bellows 6, 6 disposed in the pump head 3 so as to be extendable in the axial direction (horizontal direction), and a pair of left and right pump chambers 7, 7 surrounded by each bellows 6, A pair of left and right discharge-side check valves 8, 8 attached to the pump head 3 in a state of projecting into each pump chamber 7, and a left attached to the pump head 3 in a state of projecting into each pump chamber 7 A pair of suction-side check valves 9, 9 are provided, and both bellows 6, 6 are alternately expanded and contracted to discharge liquid from one pump chamber 7 via the discharge-side check valve 8. And a suction process for supplying the liquid from the suction passage 2 to the other pump chamber 7 via the suction-side check valve 9 at the same time. The cylinder cases 4 and 4, the bellows 6 and 6, the pump chambers 7 and 7, the discharge side check valves 8 and 8, and the suction side check valves 9 and 9, which constitute the bellows pump, Except for the symmetrical structure, it has the same structure.

  The pump head 3 has a disk shape in which a discharge passage 1 connected to a liquid supply line and a suction passage 2 connected to a liquid supply line are formed. As shown in FIG. The upstream end and the downstream end of the suction passage 2 are branched and opened.

  As shown in FIGS. 1 to 4, each cylinder case 4 has a bottomed cylindrical shape attached to the pump head 3, and the cylinder heads 4, 4 and the pump head 3 are internally left and right by the pump head 3. The pump case 5 is divided into two parts.

  As shown in FIGS. 1 and 2, each bellows 6 is a plastic bottomed cylindrical body having a peripheral wall 6a having a cross-sectional corrugated bellows structure. The bellows 6 expands and contracts in the axial direction (horizontal direction). The volume of the is expanded or reduced. Each bellows 6 has an open end 6b closely fixed to the pump head 3, and the inside of the bellows 6 is configured as a pump chamber 7 closed by the pump head 3. As the constituent material of each bellows 6, fluororesin (for example, polytetrafluoroethylene (PTFE), perfluoroalkoxy fluororesin (PFA)) or the like is used depending on the properties of the liquid. In this example, PTFE is used. Has been. In each bellows 6, the bottom wall 6 c is a disc-like one having a constant thickness (axial thickness), and the outer diameter thereof is equal to the outer diameter of the peripheral wall 6 a (outer diameter of the crest). An end 6d of the valley portion of the peripheral wall 6a is connected to the bottom wall 6c.

  As shown in FIG. 1, a disk-shaped operation plate 10 made of metal (for example, stainless steel) is connected and fixed to the bottom wall 6 c of each bellows 6. Each actuating plate 10 includes a thin disc-shaped main body portion 10a and a thick annular connecting portion 10b formed on the outer periphery of the main plate 10a. The actuating plate 10 collides with the bottom wall 6c of the bellows 6 against the main body portion 10a of the actuating plate 10. In this case, they are closely connected and fixed in a state of being fitted to the connecting portion 10b. That is, the thickness of the bottom wall 6c of the bellows 6 is set to be the same as or slightly thicker than the thickness (thickness in the axial direction) of the connecting portion 10b of the operating plate 10, and the mounting plate attached to the connecting portion 10b of the operating plate 10 11 and the outer peripheral portion of the bottom wall 6c of the bellows 6 (a portion on the outer peripheral side of the bottom wall 6c with respect to the end portion 6d of the valley portion of the peripheral wall 6a) 6e. By clamping, as shown in FIG. 1, the bottom wall 6c of the bellows 6 and the operation plate 10 are connected at the outer peripheral portion in a state where the bellows bottom wall 6c is in close contact with the main body portion 10a of the operation plate 10, It is integrated.

  The two bellows 6 and 6 are configured to extend and contract in the opposite direction synchronously by connecting the operation plates 10 and 10 with a plurality of (for example, four) connecting rods 12. That is, as illustrated in FIG. 1, when the one bellows 6 is in the most contracted state, the two bellows 6 and 6 are interlocked and connected so that the other bellows 6 is in the most extended state. When 6 is contracted, the other bellows 6 is extended in conjunction with this.

  The plurality of connecting rods 12 connect the connecting portions 10b and 10b, which are the outer peripheral portions of the two operating plates 10 and 10, at portions that are equally spaced in the circumferential direction. , 10 are connected at the same time, the bottom wall 6c of each bellows 6 and the operating plate 10 are connected. That is, each connecting rod 12 is disposed in the cylinder cases 4 and 4 and is inserted and held in the pump case 5 through the O-ring 13 so as to be movable in the axial direction. The connecting plate 10 and the connecting portion 10b of the operating plate 10 are connected to each other. By screwing and tightening the nut member 14 to the penetrating end screw 12a, both the operation plates 10 and 10 are connected and the bottom wall 6c of each bellows 6 and the operation plate 10 are connected and fixed. The wall thickness of the main body 10a of the working plate 10 is set so as to have a strength that is not deformed by at least the pressure of the pump chamber 7 in the suction process and the discharge process. It is preferable to set it thin.

  The operation means for expanding and contracting the bellows 6 is generally constituted by a piston / cylinder mechanism, a crank mechanism, an air cylinder mechanism, or the like. In this example, the operation means is constituted by an air cylinder mechanism. That is, the operating means supplies and discharges the pressurized air 4c from the supply / exhaust port 4a formed in the bottom wall of each cylinder case 4 to the supply / exhaust space 4b formed between the bellows 6 and the operation plate 10 and the cylinder case 4. By doing so, the bellows 6 is configured to expand and contract in the axial direction. The supply / exhaust from both the supply / exhaust ports 4a, 4a is performed alternately and synchronously, and the pressurized air 4c is supplied from the one supply / exhaust port 4a to the supply / exhaust space 4b, and at the same time the exhaust is performed from the other supply / exhaust port 4a. By doing so, the expansion / contraction operation of both bellows 6, 6, that is, the expansion / contraction operation of both pump chambers 7, 7 is performed synchronously in the reverse direction. That is, the suction process (or discharge process) in one pump chamber 7 and the discharge process (or suction process) in the other pump chamber 7 are performed in synchronization, and the discharge process (liquid is pumped) in both pump chambers 7 and 7. And a suction step (liquid is supplied from the suction passage 2 to the pump chamber 7 via the suction-side check valve 9). Are switched simultaneously. FIG. 1 shows an end state of the suction process in the left pump chamber 7 and the discharge process in the right pump chamber 7.

  As shown in FIG. 1, each discharge-side check valve 8 is configured such that the valve body 8 b is moved to the closed position by the urging force of the spring 8 a in the suction process in which the bellows 6 is extended (the volume of the pump chamber 7 is enlarged and changed). In the discharge process in which the bellows 6 is reduced and the volume of the pump chamber 7 is reduced, the valve body 8b is displaced to the valve opening position against the urging force of the spring 8a due to the pressure increase in the pump chamber 7. It is comprised so that. As shown in FIG. 1, each suction side check valve 9 holds the valve body 9 b in the closed position by the back pressure (pressure of the pump chamber 7) and the urging force of the spring 9 a in the discharging process in which the bellows 6 is contracted. In the suction process in which the bellows 6 is extended, the valve body 9b is displaced to the valve opening position against the urging force of the spring 9a due to the pressure drop in the pump chamber 7.

    In addition, for pump components such as the pump head and the bellows 6 that come into contact with the liquid, an appropriate material is selected according to the properties of the liquid, but in this example, the corrosion resistance and the chemical resistance are excellent. It is made of a fluorine resin plastic such as polytetrafluoroethylene.

  Thus, in the first pump, as shown in FIG. 1, a liquid contact portion that is in the center of the bottom wall 6 c of the bellows 6 and contacts the liquid in the pump chamber 7 (the peripheral wall 6 a of the bottom wall 6 c is in contact with the liquid). The portion 6f on the inner peripheral side of the connecting portion with the end portion 6d of the trough portion 6f and the opposed end surfaces 6g and 10c of the operating plate 10 are closely contacted, and the close contact portions 6g and 10c are sealed by the annular seal member 15. . In this example, an O-ring made of an incompressible elastic material (fluorine rubber or the like) is used as the annular seal member 15, and this O-ring 15 is engaged and held in an O-ring groove 15a formed in the bellows bottom wall 6c. ing.

  Therefore, the bellows bottom wall 6c is not deformed even when the pressure in the pump chamber 7 changes due to the expansion / contraction operation of the bellows 6 (change in expansion / contraction of the pump chamber volume), and the problem described at the beginning arises. Therefore, an appropriate pump function is exhibited.

  That is, in the pump chamber 7 (for example, the left pump chamber shown in FIG. 1) in the suction process, the pressure in the pump chamber 7 is reduced to a negative pressure due to the suction process by the expansion operation of the bellows 6. The bellows bottom wall 6c, in which only the portion 6e is connected to the operating plate 10, has a possibility that the liquid contact portion 6f, which is the central portion thereof, is pulled into the negative pressure pump chamber 7 to be bent and deformed in a concave shape. . However, the wetted part 6f of the bellows bottom wall 6c is in intimate contact with the main body part 10a of the operating plate 10, and the intimate parts 6g and 10c are sealed by the O-ring 15, so Is not separated from the main body 10a of the operating plate 10. That is, the liquid contact portion 6f of the bellows bottom wall 6c is held in a state of being inseparable from the main body portion 10a of the operation plate 10 so as not to be separated. Therefore, the suction force acting on the liquid contact portion 6f of the bellows bottom wall 6c is received by the main body portion 10a of the metal operation plate 10, and there is no possibility that the liquid contact portion 6f is deformed during the suction process.

  Further, in the pump chamber 7 (for example, the right pump chamber shown in FIG. 1) in the discharge process, the pressure in the pump chamber 7 is increased to a high pressure by the discharge process by the reduction operation of the bellows 6, so The bellows bottom wall 6c in which only 6e is connected to the operating plate 10 may be bent and deformed in a convex shape by a pressing force caused by the pressure of the pump chamber 7 at the liquid contact portion 6f that is the central portion thereof. However, since the liquid contact portion 6f of the bellows bottom wall 6c is in close contact with the main body portion 10a of the operation plate 10, the main body portion 10a of the metal operation plate 10 receives the pressing force acting on the liquid contact portion 6f. Therefore, there is no possibility that the liquid contact portion 6f is deformed during the discharge process.

  Thus, according to the first pump, the bellows bottom wall 6c is not deformed by the pressure in the pump chamber 7 in both the suction process and the discharge process, and the volume of the pump chamber is substantially changed. The liquid feeding amount (discharging fluid amount) or the circulating fluid amount is not stable, and problems such as variations do not occur, and an appropriate pump function can be exhibited.

  Further, in the first pump, since the liquid contact portion 6f of the bellows bottom wall 6c is reinforced by the operation plate 10 as described above, the bellows bottom wall 6c can counteract the pressure in the pump chamber 7. It does not need to be thick enough to have strength, and it must be thick enough to be connected to the operating plate 10 by the mounting plate 11, the end screw 12a of the connecting rod 12 and the nut member 14. It's enough. Therefore, the bellows bottom wall 6c can be made as thin as possible as compared with the conventional bellows pump described at the beginning, and the bellows 6 can be reduced in weight.

  By the way, the structure of the bellows pump according to the present invention is not limited to the above embodiment, and can be appropriately improved and changed without departing from the basic principle of the present invention.

  For example, in the first pump, as shown in FIG. 1, both operating plates 10, 10 are connected by a connecting rod 12 that is supported by the pump case 5 so as to be movable in the axial direction, and each operating plate 10 is connected via the connecting rod 12. The pump case 5 is supported so as to be movable in the axial direction, and the operation plates 10 and the bellows bottom wall 6c are connected via the attachment plate 11 by connecting the operation plates 10 and the connecting rods 12. However, the means for supporting each actuating plate 10 to the pump case 5 and the means for connecting each actuating plate 10 and the bellows bottom wall 6c are independent as shown in FIGS. You can also

  That is, FIG. 3 is a longitudinal side view showing a modified example of the bellows pump according to the present invention, FIG. 4 is an enlarged view of the main part of FIG. 3, and FIG. 5 is a longitudinal front view taken along the line V-V of FIG. The bellows pump shown in FIG. 3 (hereinafter referred to as “second pump”) is a horizontal double-acting bellows pump having the same configuration as the first pump except for the following points. In addition, about the structural member same as a 1st pump, the detailed description shall be abbreviate | omitted by attaching | subjecting the code | symbol same as FIG.1 and FIG.2 in FIGS.

  In the second pump, as shown in FIGS. 3 and 4, the bottom wall 6 c of each bellows 6 and the operation plate 10 have a disk shape with the same diameter with a constant thickness (thickness in the axial direction). In addition, the bellows bottom wall 6c and the operation plate 10 are connected in a close contact state by screwing and fastening a plurality of bolts 16 inserted through the outer peripheral portions 6e and 10e to the mounting plate 17. . In this example, as shown in FIG. 5, the outer peripheral portion 6e of the bellows bottom wall 6c and the outer peripheral portion 10e of the operating plate 10 are connected by eight bolts 16 arranged at equal intervals in the circumferential direction. . Further, the thickness of the working plate 10 is set so as to have a strength that is not deformed by the pressure of the pump chamber 7 at least in the suction process and the discharge process, and is set as thin as possible within the range having such a strength. It is preferable to keep it.

  At the center of each operating plate 10, an operating shaft 20 is integrally formed on the bottom wall of the cylinder case 4 so as to penetrate through the O-ring 18 and the bearing ring 19 so as to be movable in the axial direction. A disc-shaped connecting plate 21 is fixed to the end of each operating shaft 20 outside the cylinder case 4, and both connecting plates 21 and 21 are arranged outside the cylinder cases 4 and 4 to the pump case 5 in the axial direction. The connecting rods 12 and 12 are connected by an appropriate number (in this example, two) connecting rods 12 that are supported so as to be movable. Therefore, the two bellows 6 and 6 are synchronously expanded and contracted in the opposite direction since the two operation plates 10 and 10 are connected via the operation shafts 20 and 20, the connection plates 21 and 21 and the connection rods 12 and 12. It is supposed to be operated. That is, as illustrated in FIG. 3, when the one bellows 6 is in the most contracted state, the two bellows 6 and 6 are interlocked and connected so that the other bellows 6 is in the most extended state. When 6 is contracted, the other bellows 6 is extended in conjunction with this.

  The operating means for expanding and contracting the bellows 6 is provided between the bellows 6 and the operation plate 10 and the cylinder case 4 from an air supply / exhaust port (not shown) formed in the bottom wall of each cylinder case 4 as in the first pump. The bellows 6 is configured to expand and contract in the axial direction by supplying and discharging pressurized air to and from the formed air supply / exhaust space 4d. The supply / exhaust to both supply / exhaust spaces 4d, 4d is performed alternately in synchronism, whereby the expansion / contraction operations of both bellows 6, 6, that is, the expansion / contraction operations of both pump chambers 7, 7 are synchronized in the opposite direction. Done. That is, the suction process (or discharge process) in one pump chamber 7 and the discharge process (or suction process) in the other pump chamber 7 are performed in synchronization, and the discharge process (liquid is pumped) in both pump chambers 7 and 7. And a suction step (liquid is supplied from the suction passage 2 to the pump chamber 7 via the suction-side check valve 9). Are switched simultaneously. FIG. 3 shows the end state of the suction process in the left pump chamber 7 and the discharge process in the right pump chamber 7.

  Thus, in the second pump, as shown in FIGS. 3 and 4, as in the first pump, the liquid contact is in the central portion of the bottom wall 6 c of the bellows 6 and contacts the liquid in the pump chamber 7. A portion (a portion of the bottom wall 6c on the inner peripheral side of the connecting portion with the end portion 6d of the valley portion of the peripheral wall 6a) 6f and the facing end surfaces 6g and 10c of the operating plate 10 are in close contact with each other and the intimate portions 6g and 10c Is sealed with an annular seal member 15. In this example, an O-ring made of an incompressible elastic material (fluorine rubber or the like) is used as the annular seal member 15 as in the first pump, and the O-ring 15 is formed on the operating plate 10. The groove 15b is engaged and held. In addition, a circular positioning convex portion 6h that closely fits in a circular concave portion 10d formed in the central portion of the operating plate 10 is formed in the central portion of the liquid contact portion 6f of the bellows bottom wall 6c. 6c and the operation plate 10 are contrived so that they can collide concentrically.

  Therefore, even in the second pump, the bellows bottom wall 6c is made of metal even when the pressure in the pump chamber 7 changes due to the expansion / contraction operation of the bellows 6 (the expansion / contraction change of the pump chamber volume). The operation plate 10 is not reinforced and deformed, and the problem described at the beginning does not occur, and an appropriate pump function is exhibited. In the second pump, since the connecting rods 12 and 12 are disposed outside the cylinder cases 4 and 4, the volume of the air supply / exhaust space 4d is smaller than the air supply / exhaust space 4b of the first pump, and the bellows 6, The amount of pressurized air for expanding and contracting 6 can be reduced.

  Further, in the second pump, since the liquid contact portion 6f of the bellows bottom wall 6c is reinforced by the operation plate 10 as described above, the bellows bottom wall 6c can counteract the pressure in the pump chamber 7. It is not necessary to have a thick wall having strength, and it is sufficient to have a wall thickness that is necessary and sufficient to be connected to the operation plate 10 by the bolt 16 and the mounting plate 17. Therefore, the bellows bottom wall 6c can be made as thin as possible as compared with the conventional bellows pump described at the beginning, similarly to the first pump, and the bellows 6 can be reduced in weight. it can.

  In the first and second pumps, the liquid contact portion 6f of the bellows bottom wall 6c and the opposed end surfaces 6g and 10c of the operation plate 10 are closely contacted, and the contact portions 6g and 10c are annular sealing members (O-rings) 15. 6 to 8, a seal space 22 sealed by the annular seal member 15 is formed between the opposed end surfaces 6g and 10c, and an incompressible fluid is formed in the seal space 22. 23 may be filled.

  6 is a longitudinal side view showing another modified example of the bellows pump according to the present invention, FIG. 7 is an enlarged view of the main part of FIG. 6, and FIG. 8 is taken along the line VIII-VIII of FIG. Although it is a longitudinal sectional front view, the bellows pump (hereinafter referred to as “third pump”) shown in FIG. 6 is a horizontal double-acting bellows pump having the same configuration as the second pump except for the following points. In addition, about the structural member same as a 2nd pump, the detailed description shall be abbreviate | omitted by attaching | subjecting the code | symbol same as FIGS. 3-5 in FIGS.

  In the third pump, as shown in FIGS. 6 and 7, a circular recess is formed on the outer surface of the liquid contact portion 6f of the bottom wall 6c of each bellows 6, that is, a contact portion that is a central portion of the bellows bottom wall 6c. The thickness (axial thickness) of the liquid portion 6f is made thinner than the thickness of the outer peripheral portion 6e, and a space 22 is formed by the circular recess between the facing end surfaces 6g and 10c of the liquid contact portion 6f and the working plate 10. It is. The space 22 is formed as a seal space by the annular seal member 15 disposed between the outer peripheral portion 6e of the bellows bottom wall 6c and the operation plate 10. As the annular seal member 15, an O-ring is used as in the second pump, and this O-ring 15 is engaged and held in an O-ring groove 15 b formed in the operation plate 10.

  The seal space 22 is tightly filled with an incompressible fluid (for example, a liquid such as oil) 23.

  In the third pump, as shown in FIGS. 6 and 7, the operating shaft 20 is configured separately from the operating plate 10, and a screw portion 20 a formed at the tip of the operating shaft 20 is provided on the operating plate 10. The female screw recess 10f formed in the above is screwed together and the screwed portion is sealed by the O-ring 24, whereby the both 10 and 20 are integrally connected.

  Thus, in the third pump, in the pump chamber (for example, the left pump chamber shown in FIG. 6) 7 in the suction process, the pressure in the pump chamber 7 is reduced by the suction process by the expansion operation of the bellows 6. Therefore, the bottom wall 6c of the bellows 6 in which only the outer peripheral portion 6e is connected to the operating plate 10 by a plurality of bolts 16 is a pump whose negative portion is the wetted portion 6f that is the central portion thereof. There is a possibility that it is pulled into the chamber 7 to bend and deform in a concave shape. However, an incompressible fluid 23 such as oil is tightly filled in the seal space 22 formed between the opposed end surfaces 6g and 10c of the liquid contact portion 6f of the bellows bottom wall 6c and the operating plate 10, The seal space 22 filled with the compressive fluid 23 functions as a kind of rigid body. Therefore, even when the pump chamber 7 has a negative pressure, the liquid contact portion 6f of the bellows bottom wall 6c, the seal space 22 filled with the incompressible fluid 23 functioning as a rigid body, and the operation plate 10 cannot be separated from each other. The liquid contact portion 6f is not pulled into the pump chamber 7 and deformed into a concave shape, and the volume of the pump chamber 7 may change in the suction process. Absent.

  Further, in the pump chamber 7 (for example, the right pump chamber shown in FIG. 6) in the discharge process, the pressure in the pump chamber 7 is increased to a high pressure due to the discharge process by the reduction operation of the bellows 6, so The bottom wall 6c of the bellows 6 in which only 6e is connected to the operating plate 10 is deformed in a convex shape into the seal space 22 by the pressing force caused by the pressure of the pump chamber 7 at the liquid contact portion 6f which is the central portion thereof. There is a fear. However, since the seal space 22 functions as a kind of rigid body filled with the incompressible fluid 23 as described above, the pressing force due to the pressure of the pump chamber 7 acting on the liquid contact portion 6f of the bellows bottom wall 6c is a rigid body. The metal working plate 10 is received through the functioning seal space 22. Therefore, there is no possibility that the liquid contact portion 6f is deformed during the discharge process, and the volume of the pump chamber 7 does not change during the discharge process.

  Thus, according to the third pump, as in the first and second pumps, the bellows bottom wall 6c is not deformed by the pressure fluctuation of the pump chamber 7 in both the suction process and the discharge process, The volume of the pump chamber is substantially changed, the liquid supply amount (discharge liquid amount) or the circulating liquid amount is not stabilized, and problems such as variations do not occur and an appropriate pump function can be exhibited.

  Further, in the third pump, since the liquid contact portion 6f of the bellows bottom wall 6c is reinforced by the operation plate 10 through the seal space 22 as described above, the bellows bottom wall 6c has an outer peripheral portion 6e thereof. It is sufficient that the thickness is necessary and sufficient to be connected to the operation plate 10 by the bolt 16 and the mounting plate 17, and the liquid contact portion 6 f which is the central portion is much larger than the first and second pumps. The bellows 6 can be significantly reduced in weight.

  The present invention is applied to a double-action type bellows pump such as first to third pumps. The present invention can also be suitably applied to a single-acting bellows pump.

DESCRIPTION OF SYMBOLS 1 Discharge passage 2 Suction passage 3 Pump head 4 Cylinder case 4a Supply / exhaust port 4b Supply / exhaust space 4c Pressurized air 4d Supply / exhaust space 5 Pump case 6 Bellows 6a Perimeter wall 6b Open end 6c Bottom wall 6d End of trough 6e Outer periphery Part 6f Liquid contact part 6g Opposing end face 6h Positioning convex part 7 Pump chamber 8 Discharge side check valve 8a Spring 8b Valve body 9 Suction side check valve 9a Spring 9b Valve body 10 Actuating plate 10a Main body part 10b Connecting part 10c Opposing end face 10d Circular recess 10e Outer peripheral portion 10f Female thread recess 11 Mounting plate 12 Connecting rod 12a End screw 13 O-ring 14 Nut member 15 Annular seal member (O-ring)
15a O-ring groove 15b O-ring groove 16 bolt 17 mounting plate 18 O-ring 19 bearing ring 20 operating shaft 20a screw portion 21 connecting plate 22 seal space 23 incompressible fluid 24 O-ring

Claims (3)

  1. A plastic bottomed cylindrical bellows with an opening attached to the pump case is expanded and contracted in the axial direction to feed liquid from the pump chamber surrounded by the bellows to the discharge passage through the discharge check valve. In the bellows pump configured to alternately perform the discharge process and the suction process of supplying liquid from the suction passage to the pump chamber via the suction side check valve,
    The pump case is supported by a metal actuating plate so as to be movable in the axial direction, and the actuating plate and the bottom wall of the bellows are connected and fixed at their outer peripheral portions, and the liquid in the pump chamber is the central portion of the bottom wall of the bellows. A bellows pump characterized in that the liquid contact part that contacts with the working plate and the opposed end face of the working plate are in close contact with each other and the close contact part is sealed with an annular seal member.
  2. A plastic bottomed cylindrical bellows with an opening attached to the pump case is expanded and contracted in the axial direction to feed liquid from the pump chamber surrounded by the bellows to the discharge passage through the discharge check valve. In the bellows pump configured to alternately perform the discharge process and the suction process of supplying liquid from the suction passage to the pump chamber via the suction side check valve,
    The pump case is supported so that the metal operating plate is movable in the axial direction, and the operating plate and the bottom wall of the bellows are connected and fixed at the outer peripheral portion thereof, and the central portion of the bottom wall of the bellows is connected to the pump chamber. A bellows pump characterized in that a seal space sealed by an annular seal member is formed between opposing end surfaces of a bellows bottom wall portion facing the working plate and the seal space is filled with an incompressible fluid.
  3.   The annular seal member is an O-ring, and the O-ring is engaged and held in an O-ring groove formed in a bottom wall or an operation plate of the bellows. Bellows pump described in 1.
JP2012198289A 2012-09-10 2012-09-10 Bellows pump Pending JP2014051950A (en)

Priority Applications (1)

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JP2012198289A JP2014051950A (en) 2012-09-10 2012-09-10 Bellows pump

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JP2012198289A JP2014051950A (en) 2012-09-10 2012-09-10 Bellows pump
TW102128069A TW201410976A (en) 2012-09-10 2013-08-06 Bellows pump
KR1020130106575A KR20140034070A (en) 2012-09-10 2013-09-05 Bellows pump
CN201310403659.7A CN103671041A (en) 2012-09-10 2013-09-06 Bellows pump
EP20130004383 EP2706235A1 (en) 2012-09-10 2013-09-09 Bellows pump
US14/021,679 US20140072465A1 (en) 2012-09-10 2013-09-09 Bellows Pump

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JP2014051950A true JP2014051950A (en) 2014-03-20
JP2014051950A5 JP2014051950A5 (en) 2015-05-28

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JP2012198289A Pending JP2014051950A (en) 2012-09-10 2012-09-10 Bellows pump

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US (1) US20140072465A1 (en)
EP (1) EP2706235A1 (en)
JP (1) JP2014051950A (en)
KR (1) KR20140034070A (en)
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TW (1) TW201410976A (en)

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EP3179105B1 (en) * 2014-08-08 2019-05-29 Nippon Pillar Packing Co., Ltd. Bellows pump device
TWI626372B (en) * 2015-04-13 2018-06-11 徐郁輝 A kind of floatable water bags which have foldable layer structure
DE102015004868A1 (en) * 2015-04-13 2016-10-13 Bernd Niethammer Pump for an SCR system in vehicles
WO2018143422A1 (en) * 2017-02-03 2018-08-09 イーグル工業株式会社 Liquid supply system

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JP4644697B2 (en) * 2007-06-06 2011-03-02 日本ピラー工業株式会社 Reciprocating pump
JP4547451B2 (en) * 2007-11-22 2010-09-22 シグマテクノロジー有限会社 Bellows pump and operation method of bellows pump
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CN107429683A (en) * 2015-03-10 2017-12-01 株式会社岩城 Displacement pump
CN107429683B (en) * 2015-03-10 2019-10-15 株式会社岩城 Positive displacement pump
US10704547B2 (en) 2015-03-10 2020-07-07 Iwaki Co., Ltd. Volume pump including a bellows and a suction valve and a discharge valve wherein the valves comprise a valve seat and a valve body and wherein a fixed section of the valve body includes a communicating flow path

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US20140072465A1 (en) 2014-03-13
KR20140034070A (en) 2014-03-19
EP2706235A1 (en) 2014-03-12
CN103671041A (en) 2014-03-26

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