JP2013236018A5

JP2013236018A5 -

Info

Publication number: JP2013236018A5
Application number: JP2012108759A
Authority: JP
Filing date: 2012-05-10
Publication date: 2015-05-28
Anticipated expiration: 2032-05-10

Description

請求項４に係る発明は、請求項３に係る発明において、前記流体供給手段は、加工点近傍へ研削水を噴射する研削水ノズルであることを特徴とする。 The invention according to claim 4 is the invention according to claim 3 , wherein the fluid supply means is a grinding water nozzle for injecting grinding water to the vicinity of the machining point.

請求項５に係る発明は、請求項３又は４に係る発明において、前記一対の水平部は、前記ブレードへ冷却水を噴射する冷却水ノズルを備えていることを特徴とする。
The invention according to claim 5 is the invention according to claim 3 or 4 , wherein the pair of horizontal portions includes a cooling water nozzle that injects cooling water to the blade.

Claims

In a dicing apparatus that cuts a work placed on a work table via an elastic body along a processing line by a blade rotated by a spindle,
A dicing apparatus comprising: a workpiece vibration means for locally ultrasonically vibrating a workpiece portion located on both sides of the processing line in a vertical direction.

2. The dicing apparatus according to claim 1, wherein the workpiece portions located on both sides of the machining line are workpiece portions located on both sides of the cut line in the machining line.

The work vibration means is
An ultrasonic transducer fixed to the spindle;
A fixed portion fixed to the ultrasonic transducer, a pair of horizontal portions disposed on both sides of the blade with the blade interposed therebetween, and forming a gap between the workpiece portion, the fixed portion, and the A horn that resonates with ultrasonic waves generated by the ultrasonic vibrator, and a connecting portion that connects a pair of horizontal portions;
Fluid supply means for supplying a fluid that functions as a medium for transmitting the vibration of the horn resonated by the ultrasonic vibration generated by the ultrasonic vibrator to the work portion, to the gap;
The dicing apparatus according to claim 1 or 2, further comprising:

The dicing apparatus according to claim 3, wherein the fluid supply means is a grinding water nozzle that injects grinding water in the vicinity of a processing point.

The dicing apparatus according to claim 3 or 4 , wherein the pair of horizontal portions includes a cooling water nozzle that injects cooling water to the blade.

In a dicing method of cutting a work placed on a work table via an elastic body along a processing line by a blade rotated by a spindle,
A dicing method characterized by cutting the processing line while locally oscillating the work parts located on both sides of the processing line in the longitudinal direction.

The dicing method according to claim 6, wherein the workpiece portions located on both sides of the machining line are workpiece portions located on both sides of the cut line in the machining line.