JP2013163225A - Fixing nut attachment/detachment tool - Google Patents

Abstract

An object of the present invention is to prevent forgetting to remove a detaching jig from a fixing nut after a cutting blade is fixed to the tip of a rotary shaft by a fixing nut using a fixing nut attaching / detaching tool.
A fixed nut attaching / detaching tool includes a fixed nut engaging portion having a plurality of engaging protrusions, a rotating portion for rotating the fixed nut engaging portion, and a central portion of the fixed nut engaging portion. The fixed nut fastening means 20 having a rotational force transmission hole 202 that transmits the rotational force, and the insertion protrusion 210 inserted into the rotational force transmission hole 202 of the fixed nut fastening means 20 and the insertion protrusion 210 are rotated. When the torque wrench 21 is removed from the fixed nut fastening means 20, the torque wrench 21 including the lever portion 211 to be connected and the connecting means 22 for connecting the fixed nut fastening means 20 and the torque wrench 21 are provided. Never forget to remove the fastening means 20.
[Selection] Figure 3

Description

  The present invention relates to a fixing nut attaching / detaching tool used for attaching / detaching a fixing nut for fixing a cutting blade to a rotating shaft in the cutting apparatus.

  A wafer in which a plurality of devices such as IC, LSI, etc., are defined by dividing lines and formed on the surface is divided into individual devices by cutting the dividing lines vertically and horizontally by a cutting device, and various devices such as mobile phones and personal computers. Used in electrical equipment.

  The cutting apparatus includes a holding unit that holds a workpiece, and a cutting unit that includes a cutting blade that cuts the workpiece held by the holding unit. The cutting device holds the workpiece held by the holding unit. The cutting blade can cut with high accuracy.

  When the cutting edge formed on the outer periphery of the cutting blade is worn or damaged, it is necessary to replace it with a new cutting blade. (See, for example, Patent Document 1 below). As a fixing nut attaching / detaching tool for attaching / detaching the fixing nut to / from the tip of the rotating shaft, there is one provided with an attaching / detaching jig for rotating the fixing nut and a torque wrench for rotating the attaching / detaching jig (for example, below) Patent Document 2).

JP 2007-152531 A JP 2012-4414 A

  However, in the fixing nut attaching / detaching tool as described above, the operator forgets to remove the attaching / detaching jig from the fixing nut after the cutting blade is fixed to the tip of the rotating shaft by the fixing nut using the attaching / detaching jig. Sometimes. When the cutting device is operated with the fixing nut attached to the fixing nut, there is a problem that the cover means for supplying cutting water to the cutting blade is broken or the cutting blade is damaged.

  The present invention has been made in view of the above circumstances, and prevents forgetting to remove the attaching / detaching jig from the fixing nut after fixing the cutting blade to the tip of the rotating shaft with the fixing nut using the fixing nut attaching / detaching tool. There are issues to be solved.

  The present invention provides at least cutting means comprising holding means for holding a workpiece, and cutting means in which a cutting blade for cutting the workpiece held by the holding means is detachably attached to the tip of a rotary shaft by a fixing nut. A fixing nut attaching / detaching tool used for attaching / detaching a fixing nut in an apparatus, a fixing nut engaging portion having a plurality of engaging protrusions engaging with two or more engaging holes formed in the fixing nut, and a fixing nut engaging portion A fixed nut fastening means comprising at least a turning part to be turned and a rotational force transmission hole formed at a central part of the turning part for transmitting rotational force, and an insertion inserted into the rotational force transmission hole of the fixed nut fastening means A torque wrench having at least a protrusion and a lever for rotating the insertion protrusion; and a connecting means for connecting the fixing nut fastening means and the torque wrench.

  The connecting means includes a fixed nut connecting portion connected to the fixing nut fastening means, a torque wrench connecting portion connected to a torque wrench, and a telescopic spring-like connection connecting the fixed nut connecting portion and the torque wrench connecting portion. It is desirable to provide a string part.

  The fixing nut attaching / detaching tool according to the present invention includes connecting means for connecting the fixing nut fastening means and the torque wrench, so that the fixing means and the fixing means are fixed when the torque wrench is removed after the fixing nut is fixed to the rotating shaft. Since the nut fastening means is pulled, it is not forgotten to remove the fixing nut fastening means from the fixing nut. Accordingly, it is possible to prevent the cover means that covers the cutting blade from being damaged while the cutting water is supplied to the cutting blade, or the cutting blade is damaged.

It is a perspective view which shows an example of a cutting device. It is a perspective view which shows the structure of a cutting means. It is a disassembled perspective view which shows the structure of a cutting means and a fixed nut attachment / detachment tool. It is a perspective view which shows the side engaged with the fixed nut of a fixed nut fastening means. It is sectional drawing which shows a fixing nut fastening means. It is a front view which shows the operation example of a fixing nut attachment / detachment tool.

  A cutting apparatus 1 shown in FIG. 1 is a cutting apparatus that cuts a workpiece and divides the workpiece into individual devices. The cutting apparatus 1 has an apparatus base 1a, and a wafer cassette 3 for accommodating a plurality of workpieces is disposed at the front part.

  A protective tape T is attached to the back side of the wafer W shown in FIG. 1, and a ring-shaped frame F is attached to the outer peripheral surface of the protective tape T. In this way, the wafer W is supported by the frame F via the protective tape T. A plurality of wafers W supported by the frame F via the protective tape T are accommodated in the wafer cassette 3.

  On the rear side of the wafer cassette 3, loading / unloading means 4 is provided for unloading the wafer W before processing from the wafer cassette 3 and loading the processed wafer W into the wafer cassette 3. The carry-in / out means 4 is movable in the Y-axis direction, and a temporary placement area 5 on which the wafer W is temporarily placed is provided in the movable area.

  A chuck table 7 that is movable in the X-axis direction with the expansion and contraction of the bellows 6 is disposed at the front of the apparatus. Further, in the vicinity of the temporary placement area 5, first transport means 8 a for transporting the wafer W between the temporary placement area 5 and the chuck table 7 is disposed.

  Above the movement path of the chuck table 7, an alignment unit 9 that detects a position to be cut of the wafer W held on the chuck table 7 is disposed. Further, on the extension of the alignment means 9 in the X-axis direction, a cutting means 10 for cutting the wafer W is disposed. The cutting means 10 is provided with a rotatable cutting blade 102.

  A cleaning means 2 for cleaning the wafer after cutting is disposed on the rear side of the apparatus, and a second transport means 8b for transporting the wafer between the chuck table 7 and the cleaning means 2 is disposed above the cleaning means 2. It is arranged.

  In the cutting apparatus 1 configured as described above, after the wafer W taken out from the wafer cassette 3 by the carry-in / out means 4 is placed and aligned in the temporary placement region 5, the wafer is moved by the first transfer means 8a. W is conveyed and held on the chuck table 7. Then, after the chuck table 7 moves in the X-axis direction and the position to be cut of the wafer W is detected by the alignment means 9, the chuck table 7 further moves in the same direction, so that the action of the rotating cutting blade 102 is achieved. In response, the wafer W is cut.

  The wafer W thus cut and divided is transferred to the cleaning means 2 by the second transfer means 8b and cleaned, and then stored in the wafer cassette 3 by the loading / unloading means 4.

  As shown in FIG. 2, the cutting means 10 includes a housing 100, a rotating shaft 101 that is rotatably supported by the housing 100, a cutting blade 102 that is attached to the tip of the rotating shaft 101, and the attached cutting blade 102. And a cover means 104 that covers the cutting blade 102 and supplies cutting water to the cutting blade 102. As shown in FIG. 3, a cutting blade portion 102 a containing abrasive grains such as diamond abrasive grains is formed at the outer peripheral edge portion of the cutting blade 102, and a through-hole for allowing the rotary shaft 101 to pass through the center portion. A hole 102b is formed.

  The cutting means 10 shown in FIG. 3 shows a state before the cutting blade 102 is fixed to the rotating shaft 101 shown in FIG. On the outer peripheral surface of the rotating shaft 101, a male screw portion 101b to which the fixing nut 103 is screwed is formed. Further, the fixing nut 103 is formed with a plurality of engaging holes 103a penetrating in the thickness direction.

  The cover means 104 includes a fixed block 104b fixed to the housing 100, and a movable block 104a that can approach and leave the fixed block 104b in the X-axis direction.

  A pair of pistons 105 are connected to the rear part of the movable block 104a. The pair of pistons 105 are driven by an air cylinder provided inside the fixed block 104b and can advance and retreat in the X-axis direction, and supply air to an air supply port 106 provided on the side of the fixed block 104b. Accordingly, the movable block 104a can be moved back and forth in the X-axis direction, and the movable block 104a can be moved away from and approach the fixed block 104b.

  Two cutting water nozzles 107 for discharging cutting water to the cutting blade 102 are disposed at the lower end of the movable block 104a. The two cutting water nozzles 107 are formed with a plurality of discharge ports 107a for discharging cutting water so as to face each other. The two cutting water nozzles 107 communicate with two cutting water supply ports 108 disposed at the upper end of the movable block 104a. When cutting water flows into the cutting water supply port 108, the cutting water is discharged from the discharge port 107a. Released.

  As shown in FIG. 3, two cleaning water nozzles 109 that discharge cleaning water to the cutting blade 102 are disposed at the lower end of the fixed block 104b. The tip of the cleaning water nozzle 109 opens toward the lower end of the cutting blade 102. The two cleaning water nozzles 109 communicate with two cleaning water supply ports 110 arranged at the upper end of the fixed block 104b. When the cleaning water flows into the cleaning water supply port 110, the two cleaning water nozzles 109 Wash water is released.

  The fixing nut attaching / detaching tool 2 is a tool used for attaching / detaching the fixing nut 103 to / from the rotating shaft 101 when attaching / detaching the cutting blade 102 to / from the rotating shaft 101. As shown in FIG. 3, the fixed nut attaching / detaching tool 2 includes a fixed nut fastening means 20 for fastening the fixed nut 103 to the rotating shaft 101, a torque wrench 21 for transmitting a rotational force to the fixed nut fastening means 20, and a fixed nut fastening. A connecting means 22 for connecting the means 20 and the torque wrench 21 is provided.

  The fixed nut fastening means 20 includes a fixed nut engaging portion 200 and a rotating portion 201 that rotates the fixed nut engaging portion 200. The rotating part 201 is formed to have a larger diameter than the fixed nut engaging part 200, and the outer peripheral surface 201 b of the rotating part 201 is uneven. In addition, a hexagonal rotational force transmission hole 202 penetrating in the thickness direction is formed in the central portion of the rotating portion 201.

  As shown in FIG. 4, the fixed nut engaging portion 200 includes a circular recess 203 on the side facing the nut 103. The inner diameter of the recess 203 is slightly larger than the outer diameter of the fixing nut 103 shown in FIG. When an elastic member such as rubber is laid on the inner peripheral surface of the recess 203, the inner diameter thereof may be formed slightly smaller than the outer diameter of the fixing nut 103.

  An accommodation hole 203b for accommodating the tip of the rotating shaft 101 is formed at the center of the bottom surface 203a of the recess 203. In addition, four engagement protrusions 204 that are engaged with a plurality of engagement holes 103 a formed in the fixing nut 103 are disposed on the bottom surface 203 a in a state of protruding toward the fixing nut 103 side. The engagement protrusion 204 is formed in a shape that engages with the engagement hole 103a formed in the fixing nut 103. For example, when the cross-sectional shape of the engagement hole 103a is circular, the cross-sectional shape of the engagement protrusion 204 is Also, the outer diameter of the engaging protrusion 204 is slightly smaller than the inner diameter of the engaging hole 103a.

  In addition, as shown in FIG. 5, it is good also as a structure which connected the spring 204a to the base of the engagement protrusion 204 embedded in the bottom face 203a of the recessed part 203. FIG. By adopting such a configuration, the engagement protrusion 204 can protrude and retract in a direction perpendicular to the bottom surface 203a by expansion and contraction of the spring 204a, and the engagement protrusion 204 can be easily inserted into the engagement hole 103a.

  As shown in FIG. 3, an insertion protrusion 210 that is inserted into the rotational force transmission hole 202 is formed at one end of the torque wrench 21. The insertion protrusion 210 is formed in a hexagonal shape corresponding to the shape of the rotational force transmission hole 202.

  A lever 211 is connected to the insertion protrusion 210. The lever portion 211 is composed of a rotation center portion 212 formed in a columnar shape having a larger diameter than the insertion protrusion 210 and a plurality of handle portions 213 protruding in the normal direction from the outer peripheral surface of the rotation center portion 212. . The lever portion 211 can turn the insertion protrusion 210 in both forward and reverse directions by rotating the handle portion 213.

  The connecting means 22 connects the fixed nut connecting part 220 connected to the fixed nut fastening means 20, the torque wrench connecting part 221 connected to the torque wrench 21, and the fixed nut connecting part 220 and the torque wrench connecting part 221. An elastic spring-like string portion 222 is provided. When the torque wrench 21 is moved or transported, the string portion 222 is extended, and the fixed nut connecting portion 220 and the torque wrench connecting portion 221 are connected to each other. The state connected by the part 222 is always maintained.

  As shown in FIG. 3, a rotation mechanism 205 that rotates the fixed nut coupling portion 220 in the circumferential direction of the rotation portion 201 is provided on the end surface 201 a of the rotation portion 201. A rotation mechanism 215 that rotates the torque wrench connecting portion 221 along the outer peripheral surface is provided on the outer peripheral surface of the rotation center portion 212 of the torque wrench 21.

  Below, the procedure when an operator detaches the cutting blade 102 from the rotating shaft 101 of the cutting means 10 using the fixed nut attaching / detaching tool 2 will be described with reference to FIGS. 3 to 6.

  First, by supplying air to the air supply port 106 shown in FIG. 3 and moving the piston 105 in the X-axis direction, the movable block 104a is moved away from the fixed block 104b, and the cutting means 10 is attached to and detached from the cutting blade 102. Open as possible.

  When attaching the cutting blade 102 to the rotary shaft 101, the operator holds the cutting blade 102 in his / her hand and inserts the rotary shaft 101 into the through hole 102b. Then, the operator holds the nut 103 in his / her hand and engages the male screw portion 101b formed on the rotating shaft 101 with the fixing nut 103 being rotated.

  Next, the fixing nut 103 is fastened to the rotating shaft 101 using the fixing nut attaching / detaching tool 2. Specifically, the nut 103 is rotated while rotating the fixing nut engaging portion 200 so that the engaging protrusion 204 of the fixing nut engaging portion 200 shown in FIG. 4 engages with the engaging hole 103a of the fixing nut 103. Press towards. When the engaging protrusion 204 is inserted into the engaging hole 103a and engaged, the rotating portion 201 is further rotated to screw the fixing nut 103 onto the male screw portion 101b.

  Next, with the engagement protrusion 204 inserted into the engagement hole 103a and engaged, the insertion protrusion 210 of the torque wrench 21 shown in FIG. 3 is inserted into the rotational force transmission hole 202, and FIG. As shown, when a force is applied to the handle portion 213 and the lever portion 211 is rotated in the direction of arrow A, the rotational force is transmitted to the fixed nut engaging portion 200 shown in FIG. The fastening means 20 can be rotated in the direction of arrow A. In this way, the fixing nut 103 is fastened and fixed to the male screw portion 101b of the rotating shaft 101 shown in FIG. As a result, the cutting blade 102 is fixed to the tip of the rotating shaft 101 with a predetermined torque by the fastened fixing nut 103.

  When the fixing nut 103 is fastened, if the rotating part 201 rotates in the arrow A direction, the rotating mechanism 205 causes the fixing nut connecting part 220 to rotate in the opposite direction relative to the arrow A direction, and the rotating mechanism. Since the torque wrench connecting portion 221 rotates in the opposite direction relative to the arrow A direction by the action of 215, the string portion 222 can be prevented from being twisted.

  On the other hand, when removing the cutting blade 102 attached to the rotating shaft 101, the engaging protrusion 204 of the fixing nut engaging portion 200 is engaged with the engaging hole 103a of the fixing nut 103 fixed to the rotating shaft 101, and The insertion protrusion 210 of the torque wrench 21 is inserted into the rotational force transmission hole 202, and in this state, the lever part 211 is rotated in the direction in which the nut 103 is loosened (arrow B direction) as shown in FIG. If it does so, a rotational force will be transmitted to the fixed nut engaging part 200 via the rotational force transmission hole 202, and the nut 103 can be rotated in the arrow B direction.

  When loosening the fixing nut 103, when the rotating portion 201 rotates in the direction of arrow B, the rotating mechanism 205 causes the fixing nut connecting portion 220 to rotate in the opposite direction relative to the arrow B direction, and the rotating mechanism. Since the torque wrench connecting portion 221 rotates in the opposite direction relative to the arrow B direction by the action of 215, the string portion 222 can be prevented from being twisted.

  In this way, the fixing nut 103 fixed to the male screw portion 101b of the rotating shaft 101 is loosened by the rotating fixing nut fastening means 20. Then, the operator removes the fixing nut 103 by turning the turning portion 201 in the same direction, and then removes the cutting blade 102 from the rotating shaft 101.

  When the nut 103 is attached to and detached from the rotary shaft 101 in this way, the fixing nut fastening means 20 must be removed from the fixing nut 103. However, the operator forgets to remove the fixing nut fastening means 20 from the fixing nut 103, and the cutting means. 10 may be operated.

  However, since the fixed nut fastening means 20 is connected to the torque wrench 21 by the connecting means 22, when the torque wrench 21 is removed from the fixed nut fastening means 20, the fixed nut fastening means 20 is also pulled and detached from the fixed nut 103. . Therefore, the operator does not forget to remove the fixing nut fastening means 20 from the fixing nut 103, and the cutting means 10 is operated while the fixing nut fastening means 20 is attached to the fixing nut 103, and the cover means 104 is damaged. It is possible to prevent the cutting blade 102 from being damaged.

  The fixed nut attaching / detaching tool 2 shown in the present embodiment is not only used in the cutting device 1 but also used in other devices that fasten the fixed nut to the rotating shaft when the tool is fixed to the rotating shaft. Can do.

1: Cutting device 1a: Device base 10: Cutting means 100: Housing 101: Rotating shaft 101b: Male thread portion 102: Cutting blade 102a: Cutting blade 102b: Through hole 103: Fixing nut 103a: Engagement hole 104: Cover means 104a: Movable block 104b: fixed block 105: piston 106: air supply port 107: cutting water nozzle 107a: discharge port 108: cutting water supply port 109: cleaning water nozzle 110: cleaning water supply port 2: fixing nut attaching / detaching tool 20: fixing nut Fastening means 200: Fixed nut engaging portion 201: Rotating portion 201a: End surface 201b: Outer peripheral surface 202: Rotational force transmission hole 203: Recessed portion 203a: Bottom surface 203b: Housing hole 204: Engaging protrusion 205: Rotating mechanism 21: Torque wrench 210: Insertion protrusion 211: Lever part 212: Rotation center part 213 Handle part 215: Rotating mechanism 22: Connecting means 220: Fixed nut connecting part 221: Torque wrench connecting part 222: String part 2 Cleaning means 3: Wafer cassette 4: Temporary placing area 5: Loading / unloading means 6: Bellows 7: Chuck table 8a: First transport unit 8b: Second transport unit 9: Alignment unit

Claims (2)

A cutting apparatus comprising at least holding means for holding a workpiece, and cutting means in which a cutting blade for cutting the workpiece held by the holding means is detachably attached to a tip of a rotating shaft by a fixing nut. A fixing nut attaching / detaching tool used for attaching / detaching the fixing nut,
A fixing nut engaging portion having a plurality of engaging protrusions that engage with two or more engaging holes formed in the fixing nut; a rotating portion that rotates the fixing nut engaging portion; and A fixing nut fastening means comprising at least a rotational force transmission hole formed in the central portion for transmitting rotational force;
A torque wrench comprising at least an insertion protrusion inserted into the rotational force transmission hole of the fixing nut fastening means, and a lever for rotating the insertion protrusion;
Connecting means for connecting the fixing nut fastening means and the torque wrench;
A fixing nut attaching / detaching tool. The connecting means includes
A fixing nut connecting portion connected to the fixing nut fastening means;
A torque wrench coupling portion coupled to the torque wrench;
The fixed nut attaching / detaching tool according to claim 1, further comprising an elastic spring-like string portion that connects the fixed nut connecting portion and the torque wrench connecting portion.

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