JP2013088654A - Method for manufacturing optical lens, optical lens, method for manufacturing optical waveguide with lens, and optical waveguide with lens - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical lens that can efficiently condense a light signal or efficiently convert the light into parallel beams, in a simple process, and to provide a method for manufacturing an optical waveguide with a lens and an optical waveguide with a lens.SOLUTION: The method for manufacturing an optical lens includes successive steps of: disposing bumps 6 on one surface of a transparent resin substrate 1; laminating a transparent resin layer 2 on an opposite surface of the transparent resin substrate 1 to the surface where the bumps 6 are disposed; and forming a projection 7 in a lens shape functioning as a lens between the bumps 6 by pressurizing in a direction toward the bumps 6. The method for manufacturing an optical waveguide comprises using the optical lens above obtained, and successively depositing a lower clad layer 2, a core layer 3 and an upper clad layer 4 on the opposite surface of the transparent resin substrate 1 to the surface where the bumps 6 are disposed, followed by forming a mirror part 5.

Description

  The present invention relates to an optical waveguide with a lens, and in particular, an optical lens manufacturing method and an optical lens capable of efficiently condensing or collimating an optical signal by a simple process, a manufacturing method of an optical waveguide with a lens using the optical lens, and a lens The present invention relates to an attached optical waveguide.

With the increase in information capacity, development of optical interconnection technology that uses optical signals not only for communication fields such as trunk lines and access systems but also for information processing in routers and servers is underway. Specifically, since light is used for short-distance signal transmission between boards in a router or server device, the optical transmission path has a higher degree of freedom of wiring and higher density than optical fibers. Possible optical waveguides are used.
As this optical waveguide, there is one having a mirror part for converting an optical path, and it is desired to efficiently collect or parallelize an optical signal.
For example, Patent Document 1 describes that a hole is formed in a metal foil, and a liquid clad is applied and cured thereon to form a lens to collect light, but it is formed into an arbitrary shape. Also, depending on the shape of the lens, it could not be condensed.
Further, Patent Document 2 describes that a lens is manufactured by applying a lens material after etching a cladding layer. However, the manufacturing process is complicated and a further improvement in the degree of light collection is desired. It was.

Japanese Patent No. 4714195 Japanese Patent Laid-Open No. 11-248953

  The present invention has been made to solve the above-described problems, and an optical lens manufacturing method and an optical lens capable of efficiently condensing or collimating an optical signal by a simple process, and a light with a lens using the optical lens. An object of the present invention is to provide a method for manufacturing a waveguide and an optical waveguide with a lens.

  As a result of intensive studies, the present inventors have provided bumps on the transparent resin base material, and applied pressure from the opposite surface of the bump to the transparent resin base material during the formation of the optical waveguide to the transparent resin base material between the bumps. It has been found that the above-mentioned problems can be solved by forming a lens-shaped convex portion that functions as a lens, and the present invention has been achieved.

That is, the present invention provides the following inventions.
(1) A step of installing bumps on one surface of the transparent resin base material, a transparent resin layer is laminated on the surface opposite to the bump placement surface of the transparent resin base material, and a lens shape is formed between the bumps by applying pressure in the bump direction. The manufacturing method of the optical lens which has the process of forming the convex part of this in order.
(2) An optical lens formed by the manufacturing method according to (1).
(3) A bump is placed on one surface of the transparent resin substrate, and a lower clad layer, a core layer, and an upper clad layer are sequentially laminated on the surface opposite to the bump placement surface of the transparent resin substrate. A method of manufacturing an optical waveguide to be formed, wherein when a lower clad layer, a core layer, or an upper clad layer is laminated or after lamination, pressure is applied in the bump direction to function as a lens between the bumps. A method of manufacturing an optical waveguide with a lens, wherein a convex portion is formed, and the light reflected by the mirror portion is coincident with the optical axis of the lens.
(4) In the optical waveguide with a lens according to (3), when a lower clad layer is laminated on the transparent resin substrate or after lamination, pressure is applied in the bump direction to form a lens-shaped convex portion between the bumps. Production method.
(5) The method for manufacturing an optical waveguide with a lens according to (3) or (4), wherein the pressure is a pressure when the lower clad layer, the core layer, or the upper clad layer is laminated.
(6) The manufacturing method of the optical waveguide with a lens according to any one of (3) to (5), wherein a material of the bump is a material having a higher elastic modulus than the transparent resin base material.
(7) The method for manufacturing an optical waveguide with a lens according to (6), wherein a material of the bump is a metal.
(8) The manufacturing method of the optical waveguide with a lens according to (6) or (7), wherein a material of the bump is copper.
(9) The method for manufacturing an optical waveguide with a lens according to any one of (3) to (8), wherein a planar shape between the bumps is a circle.
(10) The method for manufacturing an optical waveguide with a lens according to (9), wherein a diameter of the lens-shaped convex portion is 50 to 200 μm.
(11) The method for manufacturing an optical waveguide with a lens according to any one of (3) to (10), wherein a thickness of the lens-shaped convex portion is 5 to 50 μm.
(12) A lower clad layer, a core layer, and an upper clad layer are sequentially laminated on the transparent resin base material, and at least the core layer is provided with a mirror portion, and the transparent resin base material is used as a lens on the opposite surface of the lower clad layer. An optical waveguide with a lens, which has a lens-shaped convex portion that functions, and the light reflected by the mirror portion and the optical axis of the lens coincide.
(13) The optical waveguide with a lens according to (12), wherein a bump is provided around a lens-shaped convex portion on the transparent resin substrate.
(14) The optical waveguide with a lens according to (12) or (13), wherein a planar shape between the bumps is a circle.
(15) The optical waveguide with lens according to (14), wherein the lens-shaped convex portion has a diameter of 50 to 200 μm.
(16) The lens-attached optical waveguide according to any one of (12) to (15), wherein a thickness of the lens-shaped convex portion is 5 to 50 μm.

  According to the manufacturing method of the present invention, it is possible to obtain an optical lens and an optical waveguide with a lens capable of efficiently condensing or collimating the reflected light from the mirror portion with a simple process.

It is a figure which shows the manufacturing method of the optical lens of this invention, and an optical waveguide with a lens. It is a perspective view of the manufacturing process in FIG.1 (b). It is a perspective view of the manufacturing process in FIG.1 (d).

As shown in FIGS. 1A to 1C, the optical lens manufacturing method of the present invention includes a step of installing bumps 6 on one surface of the transparent resin substrate 1, and the bumps 6 of the transparent resin substrate 1. In this manufacturing method, the transparent resin layer 2 is laminated on the surface opposite to the installation surface, and pressure is applied in the direction of the bump 6 to form a lens-shaped convex portion 7 that functions as a lens between the bumps 6.
Moreover, the manufacturing method of the optical waveguide with a lens of this invention installs the bump 6 in one surface of the transparent resin base material 1, as shown to FIG. A method of manufacturing an optical waveguide in which a lower clad layer 2, a core layer 3, and an upper clad layer 4 are sequentially laminated on a surface opposite to a bump 6 installation surface, and then a mirror portion 5 is formed. The lower clad layer 2, the core layer 3 or when the upper clad layer 4 is laminated or after lamination, pressure is applied in the direction of the bump 6 to form a lens-shaped convex portion 7 that functions as a lens between the bumps 6 and is reflected by the mirror portion 5. This is a method of manufacturing an optical waveguide in which the optical axis of the light and the lens 7 coincide.
Thereby, the optical signal output from the mirror unit 5 in the lens direction or the optical signal input from the lens direction to the mirror unit 5 can be efficiently condensed or collimated.

In the present invention, the timing for forming the lens-shaped convex portion 7 between the bumps 6 by applying pressure in the direction of the bump 6 may be before the mirror portion 5 is formed. After or after laminating the core layer 3 or after laminating, or when laminating or laminating the upper clad layer 4, the lower clad layer 2 is laminated from the viewpoint of easy formation of a desired lens shape. It is preferable to be close.
In addition, the method of applying pressure is not particularly limited. However, when the pressure is applied when laminating the lower clad layer, the core layer, or the upper clad layer, for example, the pressure by lamination or pressing, a separate step of applying pressure is not necessary. Therefore, it is preferable.
The pressure is not particularly limited because it depends on the thickness of the layer to which pressure is applied, the size of the desired lens shape, and the pressurization time. 8 MPa and 30 to 90 seconds. Moreover, when the transparent resin base material 1 has high elasticity and is formed by pressing, it is usually 1 MPa to 6 MPa and 1 minute to 180 minutes.

The thickness of the bump 6 necessary for forming the convex portion 7 is not particularly limited as long as the convex portion 7 can be formed, but if the bump thickness is 10 μm or more and 100 μm or less, the mirror portion Since it is possible to form a convex shape that efficiently condenses or collimates an optical signal output from the lens 5 to the lens direction or an optical signal input from the lens direction to the mirror unit 5, 10 to 100 μm Preferably, 15 μm to 75 μm is more preferable.
Further, the planar shape between the bumps 6 is not particularly limited as long as it is a planar shape capable of forming the lens-shaped convex portion 7, but an optical signal output from the mirror unit 5 to the lens direction or from the lens direction to the mirror unit 5. A circular shape is preferable from the viewpoint of efficiently condensing or collimating the input optical signal.
In the present invention, the space between the bumps is a space surrounded by the bumps 6 and the transparent resin substrate 1.
The planar shape between the bumps is a shape when the space between the bumps is viewed from a direction perpendicular to the bump 6 installation surface of the transparent resin substrate 1.

The material of the bump 6 is not particularly limited as long as it does not deform due to the pressure in the process of forming the convex shape, but is preferably a material having a higher elastic modulus than the transparent resin substrate 1.
The bump 6 may also serve as a metal wiring when the optical waveguide of the present invention is used as an electric wiring board. As the metal, copper, silver, gold, nickel, cobalt, palladium, and these metals are used. Examples include alloys and laminates, with copper being particularly preferred.
The position of the bump 6 is not particularly limited as long as the lens-shaped convex portion 7 can be produced, and may be installed at a position surrounding the lens-shaped convex portion 7 as shown in FIG. Alternatively, the bumps 7 may be formed by installing two or more bumps.

The shape of the lens-shaped convex part 7 has a convex part shape that condenses or parallelizes the optical signal output from the mirror part 5 in the lens direction or the optical signal input from the lens direction to the mirror part 5. If it does, it will not specifically limit, What kind of shape, such as a spherical lens and a cylindrical lens, may be sufficient.
The thickness and diameter of the lens-shaped convex portion 7 can be set to a desired size by a pressure during manufacturing, but if the thickness is 5 μm or more, the lens portion 7 is output in the lens direction. An optical signal or an optical signal input to the mirror unit 5 from the lens direction can be condensed or collimated, and if it is 50 μm or less, the light can be efficiently condensed or collimated. From this, the thickness of the convex shape 7 is preferably 5 to 50 μm, and more preferably 10 to 30 μm.
Further, when the planar shape between the bumps 6 is circular, and the diameter is 50 μm or more, the optical signal output from the mirror unit 5 to the lens direction or the optical signal input from the lens direction to the mirror unit 5 is collected. If the diameter is 200 μm or less, the optical signal output from the mirror unit 5 to the lens direction or the optical signal input from the lens direction to the mirror unit 5 is condensed or It is possible to make it parallel. For this reason, the diameter of the lens-shaped convex portion 7 is preferably 50 to 200 μm, and more preferably 70 to 150 μm.
Note that the thickness of the convex portion is the maximum thickness in the lens shape, and the diameter of the convex portion is the maximum diameter in the lens shape.
The optical waveguide with a lens of the present invention collects an optical signal output from the mirror unit 5 in the lens direction or an optical signal input from the lens direction to the mirror unit 5 with a lens formed of the lens-shaped convex portion 7. Parallelization can reduce optical loss.

As a specific example of the manufacturing method of the optical lens of the present invention, a description will be given using the examples of FIGS. Hereinafter, an example using a negative clad layer forming resin will be described.
On the transparent resin substrate 1, bumps 6 are installed around the lens and a transparent resin layer 2 is laminated on the opposite surface [step (b)]. The lens-shaped convex portion 7 that functions as a lens is formed by the pressure at this time [step (c)]. Thereafter, the transparent resin layer 2 is exposed and cured.

Moreover, as a specific example of the manufacturing method of the optical waveguide with a lens of this invention, it demonstrates using the example of Fig.1 (a)-(f). Hereinafter, an example using a negative clad layer forming resin and a core layer forming resin will be described.
On the transparent resin substrate 1, bumps 6 are installed around the lens, and the lower clad layer 2 is laminated on the opposite surface [step (b)]. The lens-shaped convex portion 7 that functions as a lens is formed by the pressure at this time [step (c)]. Thereafter, the lower clad layer 2 is exposed and cured, and the core layer 3 is laminated on the lower clad 2 to be exposed, developed and cured [Step (d)], and then the upper clad layer 4 is laminated and exposed and cured [ Step (e)], a groove is formed on the core layer 3 as the mirror portion 5 by laser ablation or dicing so that the light reflected by the mirror portion 5 and the optical axis of the lens 7 coincide with each other [Step (f)]. .

The optical lens of the present invention manufactured as described above has a transparent resin layer 2 laminated on a transparent resin base material 1 as shown in FIG. The lens-shaped convex part 7 which functions as a lens is provided on the opposite surface.
The optical lens of the present invention may be provided with bumps 6 required in the manufacturing process around the lens-shaped convex portion 7 on the transparent resin substrate 1.

In addition, the optical waveguide with a lens of the present invention manufactured as described above has a lower clad layer 2, a core layer 3, and an upper clad layer 4 on a transparent resin substrate 1, as shown in FIG. 1 (f). The mirror portion 5 is provided at least in the core layer 3, and the transparent resin base material 1 has a lens-shaped convex portion 7 that functions as a lens on the opposite surface of the lower cladding layer 2, and is reflected by the mirror portion 5. The optical axis of the light and the lens match.
In the optical waveguide with a lens of the present invention, bumps 6 required in the manufacturing process may be provided around the lens-shaped convex portion 7 on the transparent resin substrate 1.

Hereinafter, each layer constituting the optical waveguide of the present invention will be described.
(Transparent resin layer)
In the present invention, the resin material used for the transparent resin layer is not particularly limited as long as it is a resin composition that is cured by light or heat, and a thermosetting resin composition or a photosensitive resin composition is preferably used. it can. For this reason, the same resin material as the material used for the lower clad layer 2, the core layer 3, or the upper clad layer 4 may be used, and a plurality of these resin materials may be laminated.
In the present invention, the term “transparent” means that the wavelength of light to be used can be transmitted.

(Clad layer forming resin and clad layer forming resin film)
Hereinafter, the lower cladding layer 2 and the upper cladding layer 4 used in the present invention will be described.
As the lower clad layer and the upper clad layer, a clad layer forming resin or a clad layer forming resin film can be used.
The clad layer forming resin material for forming the lower clad layer 2 and the upper clad layer 4 is not particularly limited as long as it has a refractive index lower than that of the core layer 3 and is cured by light or heat. A thermosetting resin composition or a photosensitive resin composition can be suitably used. The resin composition used for the clad layer forming resin for forming the lower clad layer and the upper clad layer may have the same or different components in the resin composition in the lower clad layer and the upper clad layer. The refractive index of the resin composition may be the same or different.
In the present invention, the method for forming the clad layer is not particularly limited. For example, the clad layer may be formed by applying a clad layer forming resin or laminating a clad layer forming resin film.

  Regarding the thickness of the lower cladding layer and the upper cladding layer, the thickness after drying is preferably in the range of 5 to 500 μm. When the thickness is 5 μm or more, a clad thickness necessary for light confinement can be secured, and when the thickness is 500 μm or less, it is easy to control the film thickness uniformly. From the above viewpoint, the thickness of the lower cladding layer and the upper cladding layer is more preferably in the range of 10 to 100 μm.

(Core layer forming resin and core layer forming resin film)
Hereinafter, the core layer 3 used in the present invention will be described.
As the core layer, a core layer forming resin or a core layer forming resin film can be used.
The core layer forming resin is designed to have a higher refractive index than the lower clad layer and the upper clad layer, and a thermosetting resin composition or a photosensitive resin composition can be suitably used.
In the present invention, the method for forming the core layer is not particularly limited. For example, the core layer may be formed by applying a core layer forming resin or laminating a core layer forming resin film.

The thickness of the resin film for forming the core layer is not particularly limited, and the thickness of the core layer after drying is usually adjusted to be 10 to 100 μm. When the thickness of the film is 10 μm or more, there is an advantage that the alignment tolerance can be increased in the coupling with the light emitting / receiving element or the optical fiber after the optical waveguide is formed. There is an advantage that coupling efficiency is improved in coupling with a light emitting element or an optical fiber. From the above viewpoint, the thickness of the film is preferably in the range of 30 to 70 μm.
The clad layer forming resin film and the core layer forming resin film are preferably formed on a carrier film. Examples of the carrier film include flexible and tough carrier films such as polyethylene terephthalate, polybutylene terephthalate, polyethylene naphthalate, and the like, polyethylene, polypropylene, polyamide, polycarbonate, polyphenylene ether, polyether sulfide, poly Preferable examples include arylate, liquid crystal polymer, polysulfone, polyethersulfone, polyetheretherketone, polyetherimide, polyamideimide, and polyimide. The thickness of the carrier film is preferably 5 to 200 μm. When it is 5 μm or more, there is an advantage that the strength as a carrier film is easily obtained, and when it is 200 μm or less, there is an advantage that a gap with the mask at the time of pattern formation becomes small and a finer pattern can be formed. From the above viewpoint, the thickness of the carrier film is more preferably in the range of 10 to 100 μm, and particularly preferably 15 to 50 μm.

(Transparent resin base material)
In the present invention, as the base material, it is necessary to use a transparent resin base material because the lens-shaped convex portion 7 functions as a transparent lens and the lens-shaped convex portion 7 is easily formed.
The resin is not particularly limited as long as it can be easily deformed by pressure and transmits an optical signal output from the mirror unit 5 in the lens direction or an optical signal input from the lens direction to the mirror unit 5.
The thickness of the base material is not particularly limited because it depends on the thickness of the convex portion 7 having a desired lens shape, but the convex portion 7 can be produced if it is 5 μm or more, and the mirror portion 5 if it is 50 μm or less. It is possible to suppress an increase in optical loss due to the spread of the optical signal output from the lens to the lens direction or the optical signal input from the lens direction to the mirror unit 5. From this, the thickness of the base material is preferably 5 to 50 μm, more preferably 10 μm to 30 μm.
In the present invention, the term “transparent” means that the wavelength of light to be used can be transmitted.

Moreover, when there is no adhesiveness between the transparent resin substrate 1 and the lower clad layer 2, an adhesive layer may be provided between them.
The material used for the adhesive layer has adhesiveness with the material used for the transparent resin base material 1 and the lower clad layer 2, and is an optical signal output from the mirror unit 5 in the lens direction or input from the lens direction to the mirror unit 5. There is no particular limitation as long as it transmits an optical signal.
The thickness of the adhesive layer is not particularly limited as long as the transparent resin substrate 1 and the lower clad layer 2 can be bonded to each other, but if the thickness of the adhesive layer is 5 μm or more, the transparent resin substrate 1 and the lower portion The clad layer 2 can be bonded, and if the thickness of the adhesive layer is 30 μm or less, an optical signal output from the mirror unit 5 to the lens direction or light input from the lens direction to the mirror unit 5 An increase in optical loss due to signal spread can be suppressed. From this, the thickness of the adhesive layer is preferably 5 to 30 μm, and more preferably 10 to 20 μm.

(Mirror part)
In the present invention, the mirror part is not particularly limited as long as the light propagating through the core layer in the direction parallel to the substrate is optically path-converted in the direction perpendicular to the substrate, and an air reflecting mirror having a notch formed at 45 °, Alternatively, it may be a metal reflecting mirror in which a reflective metal layer is formed in the notch.

  EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is not limited to a following example, unless the summary is exceeded.

Example 1
(Preparation of transparent resin substrate forming resin film)
[Preparation of resin varnish for forming transparent resin substrate]
(A) As a (meth) acrylic polymer, cyclohexanone solution of epoxy group-containing acrylic rubber (HTR-860P-3 manufactured by Nagase ChemteX Corporation, weight average molecular weight 800,000, solid content 12% by mass) 500 parts by mass (solid content 60 Parts by mass), (B) urethane (meth) acrylate, NK Oligo UA-160TM, manufactured by Shin-Nakamura Chemical Co., Ltd., 20 parts by mass, (C) (meth) acrylate, NK Oligo A-9300-3CL, Shin-Nakamura Chemical Co., Ltd., 20 parts by mass, (D) As radical photopolymerization initiator, 1 part by mass of bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide (Irgacure 819, manufactured by Ciba Specialty Chemicals Co., Ltd.) 1- [4- (2-hydroxyethoxy) phenyl] -2-hydroxy-2-methyl -1-propan-1-one After mixed with stirring (manufactured by Ciba Specialty Chemicals Irgacure 2959) 1 part by mass, vacuum defoamed to obtain a transparent resin substrate forming resin varnish.

[Preparation of resin film for forming transparent resin substrate]
The resin varnish for forming a transparent resin base material obtained above was coated on a non-treated surface of a surface release-treated PET film (A4100 manufactured by Toyobo Co., Ltd., thickness 50 μm) (Multicoater TM- manufactured by Hirano Techseed Co., Ltd.). MC) and dried at 100 ° C. for 20 minutes, and then a surface release treatment PET film (A31 manufactured by Teijin DuPont Films Co., Ltd., thickness 25 μm) is pasted as a protective film, and a resin film for forming a transparent resin base material is applied. Obtained. At this time, the thickness of the resin layer can be arbitrarily adjusted by adjusting the gap of the coating machine, and in this embodiment, the thickness of the transparent resin substrate used is described in the embodiment. The film thickness of the resin film for forming a transparent resin substrate described in the examples is the film thickness after drying.

[Preparation of resin film for forming clad layer]
[Production of (A) Base Polymer and (Meth) acrylic Polymer (A-1) Solution]
46 parts by mass of propylene glycol monomethyl ether acetate and 23 parts by mass of methyl lactate are weighed in a flask equipped with a stirrer, a cooling pipe, a gas introduction pipe, a dropping funnel and a thermometer, and stirred while introducing nitrogen gas into the flask. It was. The liquid temperature was raised to 65 ° C., 47 parts by weight of methyl methacrylate, 33 parts by weight of butyl acrylate, 16 parts by weight of 2-hydroxyethyl methacrylate, 14 parts by weight of methacrylic acid, 2,2′-azobis (2,4-dimethylvaleronitrile ) A mixture of 3 parts by mass, 46 parts by mass of propylene glycol monomethyl ether acetate and 23 parts by mass of methyl lactate was added dropwise over 3 hours, followed by stirring at 65 ° C. for 3 hours and further stirring at 95 ° C. for 1 hour. ) Acrylic polymer (A-1) solution (solid content 45% by mass) was obtained.

[Preparation of resin varnish for forming clad layer]
(A) As a base polymer, (A-1) 84 parts by mass (solid content: 45% by mass) (solid content: 38% by mass), (B) urethane (meth) acrylate having a polyester skeleton as a photocuring component ( Product name: 33 parts by mass of U-200AX, manufactured by Shin-Nakamura Chemical Co., Ltd., and 15 parts by mass of urethane (meth) acrylate having a polypropylene glycol skeleton (trade name: UA-4200, manufactured by Shin-Nakamura Chemical Co., Ltd.) (C) Polyfunctional block isocyanate solution (solid content 75% by mass) obtained by protecting isocyanurate type trimer of hexamethylene diisocyanate with methyl ethyl ketone oxime as a thermosetting component (trade name: Sumidur BL3175, Sumika Bayer Urethane Co., Ltd.) (Made by company) 20 parts by mass (solid content 15 parts by mass), (D) as a photopolymerization initiator 1- [4- (2-hydroxyethoxy) phenyl] -2-hydroxy-2-methyl-1-propan-1-one (trade name: Irgacure 2959, manufactured by Ciba Japan Co., Ltd.) 1 part by mass, bis (2 , 4,6-trimethylbenzoyl) phenylphosphine oxide (trade name: Irgacure 819, manufactured by Ciba Japan Co., Ltd.) and 23 parts by mass of propylene glycol monomethyl ether acetate as an organic solvent for dilution were mixed. . After pressure filtration using a polyflon filter (trade name: PF020, manufactured by Advantech Toyo Co., Ltd.) having a pore diameter of 2 μm, degassing was performed under reduced pressure to obtain a resin varnish for forming a cladding layer.

  The clad layer forming resin varnish obtained above was applied onto the non-treated surface of a PET film (trade name: Cosmo Shine A4100, manufactured by Toyobo Co., Ltd., thickness: 50 μm) using the coating machine. After drying at 100 ° C. for 20 minutes, a surface release treatment PET film (trade name: Purex A31, manufactured by Teijin DuPont Films, Inc., thickness: 25 μm) is pasted as a protective film, and a resin film for forming a clad layer is applied. Obtained. The thickness of the resin film at this time can be arbitrarily adjusted by adjusting the gap of the coating machine. In this embodiment, the thickness of the clad used is described in the embodiment. The film thickness of the clad layer forming resin film described in the examples is the film thickness after coating.

[Production of optical lens]
First, the resin film for forming a transparent resin substrate (tensile elastic modulus: 135 MPa) having a thickness of 25 μm obtained as described above was irradiated with ultraviolet rays (wavelength: 365 nm) using an ultraviolet exposure machine (trade name: EV-800, manufactured by Hitachi Via Mechanics Co., Ltd.). Was irradiated with 4000 mJ / cm ² , the protective film was peeled off, and heated and dried at 170 ° C. for 1 hour to cure, thereby forming a transparent resin substrate (see FIG. 1A).
Next, on the SUS plate, as a bump 6, a polyimide film (trade name: Kapton EN, manufactured by Toray DuPont Co., Ltd., thickness: 25 μm, tensile elastic modulus 5.8 GPa) is drilled into a through hole having a diameter of 80 μm. The transparent resin base material 1 from which the support film has been peeled is placed thereon. Further, a 25 μm thick clad layer forming film obtained by peeling off the protective film of the clad layer forming resin film obtained above was placed thereon as the transparent resin layer 2 (see FIGS. 1B and 2), and a flat plate A vacuum pressure laminator (MVLP-500, manufactured by Meiki Seisakusho Co., Ltd.) is used as the type laminator. After vacuuming to 500 Pa or less, thermocompression bonding is performed under conditions of a pressure of 0.4 MPa, a temperature of 110 ° C., and a pressurization time of 30 seconds. did.
Thereafter, the support film was peeled off by irradiation with ultraviolet light (wavelength 365 nm) at 4000 mJ / cm ² with an ultraviolet exposure machine (trade name: EV-800, manufactured by Hitachi Via Mechanics Co., Ltd.) through the support film, and the support film was peeled off at 170 ° C. The transparent resin layer 2 was formed by heating and drying for a period of time to cure.
By pressurization during the formation of the transparent resin layer 2, lens-shaped convex portions 7 having a thickness of 18 μm and a diameter of 80 μm functioning as lenses were formed between the bumps 6 (see FIG. 1C). Thereby, an optical lens according to the present invention was produced.

Example 2
[Preparation of resin film for core layer formation]
(A) As a base polymer, 26 parts by mass of phenoxy resin (trade name: Phenototo YP-70, manufactured by Toto Kasei Co., Ltd.), (B) 9,9-bis [4- (2-acryloyl) as a photopolymerizable compound Oxyethoxy) phenyl] fluorene (trade name: A-BPEF, Shin-Nakamura Chemical Co., Ltd.) 36 parts by mass, and bisphenol A type epoxy acrylate (trade name: EA-1020, Shin-Nakamura Chemical Co., Ltd.) 36 mass Parts, (C) 1 part by mass of bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide (trade name: Irgacure 819, manufactured by Ciba Specialty Chemicals) as a photopolymerization initiator, and 1- [4 -(2-Hydroxyethoxy) phenyl] -2-hydroxy-2-methyl-1-propan-1-one (trade name: yl Cure 2959, manufactured by Ciba Specialty Chemicals) 1 part by weight, and using resin varnish B for forming a core layer under the same method and conditions as in the above production example, except that 40 parts by weight of propylene glycol monomethyl ether acetate was used as the organic solvent Prepared. Thereafter, pressure filtration and degassing under reduced pressure were performed under the same method and conditions as in the above production example.
The core layer-forming resin varnish B obtained above is applied to the non-treated surface of a PET film (trade name: Cosmo Shine A1517, manufactured by Toyobo Co., Ltd., thickness: 16 μm) in the same manner as in the above production example. After coating and drying, a release PET film (trade name: PUREX A31, Teijin DuPont Films Co., Ltd., thickness: 25 μm) is applied as a protective film so that the release surface is on the resin side, and a core layer forming resin A film was obtained. At this time, the thickness of the resin layer can be arbitrarily adjusted by adjusting the gap of the coating machine. The thickness of the resin film for forming the core layer used in this example is described in the examples. . The film thickness of the core layer forming resin film described in the examples is the film thickness after coating and drying.

[Production of optical waveguide with lens]
The transparent resin layer produced in [Production of optical lens] of Example 1 was used as the lower clad layer 2, and the core layer forming resin film having a thickness of 50 μm with the protective film peeled off on the lower clad layer 2 was rolled. Using a laminator (trade name: HLM-1500, manufactured by Nikka Engineering Co., Ltd.), lamination is performed under the conditions of a pressure of 0.5 MPa, a temperature of 50 degrees, and a laminating speed of 0.2 m / min, and then the above-described vacuum pressure type After vacuuming to 500 Pa or less using a laminator (trade name: MVLP-500, manufactured by Meiki Seisakusho Co., Ltd.), thermocompression bonding was performed under conditions of a pressure of 0.4 MPa, a temperature of 70 ° C., and a pressurization time of 30 seconds.
After that, through a negative photomask having a core pattern (pattern width 50 μm), ultraviolet rays are emitted from the core layer forming resin film side to 800 mJ / cm with the above-described ultraviolet exposure machine (trade name: EV-800, manufactured by Hitachi Via Mechanics Co., Ltd.). ² irradiation, and then heating at 80 ° C. for 5 minutes. Thereafter, the PET film of the core layer forming resin film was peeled off, and the core pattern was etched using a developer (propylene glycol monomethyl ether acetate / N, N-dimethylacetamide = 8/2, mass ratio). Then, it wash | cleaned using the washing | cleaning liquid (isopropanol), and was heat-dried at 100 degreeC for 10 minute (s), and the core layer 3 was formed (refer FIG.1 (d) and FIG. 3).

Subsequently, as the upper clad layer 4, a 64 μm thick clad layer forming film obtained by peeling off the protective film of the clad layer forming resin film obtained above is used as a flat plate laminator as a vacuum pressurizing laminator (Meiki Seisakusho Co., Ltd.). MVLP-500) was used, and after vacuuming to 500 Pa or less, thermocompression bonding was performed under conditions of a pressure of 0.4 MPa, a temperature of 120 ° C., and a pressurization time of 30 seconds.
Thereafter, ultraviolet light was irradiated on the entire surface of 4000 mJ / cm ² from the clad layer forming resin film side using an ultraviolet exposure machine (trade name: EV-800, manufactured by Hitachi Via Mechanics Co., Ltd.).
Next, the upper clad layer 4 was formed by peeling the PET film of the resin film for forming the clad layer, and heating and drying at 170 ° C. for 1 hour to cure (see FIG. 1 (e)).

  Next, by using a dicing saw (DAC552, manufactured by DISCO Corporation) from the side opposite to the transparent resin substrate 1 of the upper clad layer 4, a groove having an inclined surface is formed as the mirror portion 5. Such an optical waveguide with a lens was produced (see FIG. 1 (f)).

Example 3
In Example 2 [Production of optical waveguide with lens], when the lower cladding layer 2 is formed, it is thermocompression bonded under the conditions of a pressure of 0.35 MPa, a temperature of 110 ° C., and a pressurization time of 30 seconds to function as a lens. An optical waveguide with a lens was produced in the same manner except that the lens-shaped convex portion 7 having a thickness of 14 μm and a diameter of 80 μm was used.
Example 4
In Example 2 [Production of optical waveguide with lens], when the lower cladding layer 2 is formed, it is thermocompression bonded under the conditions of a pressure of 0.3 MPa, a temperature of 110 ° C., and a pressurization time of 30 seconds to function as a lens. An optical waveguide with a lens was produced in the same manner except that the lens-shaped convex part 7 having a thickness of 10 μm and a diameter of 80 μm was used.
Example 5
In Example 2 [Production of optical waveguide with lens], the thickness of the polyimide film used as the bump 6 is 50 μm, except that the convex portion 7 having a lens shape of 30 μm and a diameter of 80 μm that functions as a lens is used. Thus, an optical waveguide with a lens was produced.

Example 6
In Example 2 [Production of optical waveguide with lens], the polyimide film used as the bump 6 has an opening diameter of 150 μm, except that the lens-shaped convex part 7 having a thickness of 18 μm and a diameter of 150 μm that functions as a lens is used. Thus, an optical waveguide with a lens was produced.
Example 7
In Example 2 [Production of optical waveguide with lens], a circular copper wiring having a height of 25 μm and a width of 50 μm is etched by etching so that the planar shape between the bumps of the transparent resin substrate 1 and the bumps 6 becomes 100 μm. Upilex 75S (trade name; Ube Industries, Ltd., base material thickness: 75 μm, tensile elastic modulus: 6.9 GPa) formed on one side, a lens-shaped convex portion 7 having a thickness of 18 μm and a radius of 100 μm functioning as a lens; A lensed optical waveguide was produced in the same manner except that.
Example 8
In Example 2 [Production of optical waveguide with lens], a circular copper wiring having a height of 12 μm and a width of 50 μm is etched as the transparent resin substrate 1 and the bumps 6 so that the planar shape between the bumps becomes 100 μm in diameter. Iupilex 25S (trade name; Ube Industries, Ltd., base material thickness 25 μm, tensile elastic modulus 9.1 GPa) formed on one side by using a lens-shaped convex portion 7 having a thickness of 8 μm and a radius of 100 μm that functions as a lens. An optical waveguide with a lens was produced in the same manner except that.

Comparative Example 1
An optical waveguide manufacturing method was prepared in the same manner as in Example 2 [Production of optical waveguide with lens] except that bumps 6 were not provided. The lens-shaped convex part 7 was not formed.

[Measurement of optical loss]
Light having a wavelength of 850 nm is incident on the core layer 3 of the optical waveguide manufactured in Examples 2 to 8 and Comparative Example 1 using an optical fiber (GI50, NA = 0.2) and reflected by the mirror unit 5. The optical loss at the time of receiving light with an optical fiber (GI50, NA = 0.2) installed at a height of 40 μm from the upper surface of the transparent resin substrate 1 (excluding the convex portion 7) was measured.
The results are shown in Table 1.

As shown in Table 1, the lens-shaped convex portions 7 of Examples 2 to 8 functioned as lenses, and light loss was smaller than that of Comparative Example 1 having no lens-shaped convex portions.

  As described above in detail, according to the manufacturing method of the present invention, an optical signal output from the mirror unit 5 to the lens direction or an optical signal input from the lens direction to the mirror unit 5 is efficiently collected by a simple process. An optical lens that can be light or collimated and an optical waveguide with a lens are obtained. For this reason, the optical waveguide with a lens of the present invention is extremely practical as a high-performance optical waveguide with little optical loss.

1: Transparent resin base material 2: Lower clad layer (transparent resin layer)
3: Core layer 4: Upper clad layer 5: Mirror part 6: Bump 7: Lens-shaped convex part (lens)

Claims (16)

  A step of installing bumps on one surface of the transparent resin base material, a transparent resin layer is laminated on the surface opposite to the bump installation surface of the transparent resin base material, and pressure is applied in the bump direction to form lens-shaped convex portions between the bumps. The manufacturing method of the optical lens which has the process of forming in order.   An optical lens formed by the manufacturing method according to claim 1.   A bump is provided on one surface of the transparent resin base material, and a lower clad layer, a core layer, and an upper clad layer are laminated in this order on the surface opposite to the bump placement surface of the transparent resin base material, and then a light that forms a mirror part. A method of manufacturing a waveguide, wherein when a lower clad layer, a core layer, or an upper clad layer is laminated or after lamination, a lens-shaped convex portion that functions as a lens between the bumps by applying pressure in the bump direction. A method of manufacturing an optical waveguide with a lens, characterized in that the light formed and reflected by the mirror portion coincides with the optical axis of the lens.   The method of manufacturing an optical waveguide with a lens according to claim 3, wherein a lens-shaped convex portion is formed between the bumps by applying pressure in the bump direction when the lower clad layer is laminated on the transparent resin substrate or after the lamination.   The method for producing an optical waveguide with a lens according to claim 3 or 4, wherein the pressure is a pressure when a lower clad layer, a core layer, or an upper clad layer is laminated.   The method of manufacturing an optical waveguide with a lens according to any one of claims 3 to 5, wherein a material of the bump is a material having a higher elastic modulus than the transparent resin base material.   The method of manufacturing an optical waveguide with a lens according to claim 6, wherein a material of the bump is a metal.   The method for manufacturing an optical waveguide with a lens according to claim 6 or 7, wherein a material of the bump is copper.   The method of manufacturing an optical waveguide with a lens according to claim 3, wherein a planar shape between the bumps is a circle.   The method for manufacturing an optical waveguide with a lens according to claim 9, wherein the lens-shaped convex portion has a diameter of 50 to 200 μm.   The method of manufacturing an optical waveguide with a lens according to any one of claims 3 to 10, wherein a thickness of the lens-shaped convex portion is 5 to 50 µm.   A lens in which a lower clad layer, a core layer, and an upper clad layer are sequentially laminated on a transparent resin substrate, and at least the core layer is provided with a mirror portion, and the transparent resin substrate functions as a lens on the opposite surface of the lower clad layer An optical waveguide with a lens having a convex portion having a shape, wherein light reflected by the mirror portion and an optical axis of the lens coincide with each other.   The optical waveguide with a lens according to claim 12, wherein bumps are provided around a lens-shaped convex portion on a surface opposite to a surface on which the optical waveguide of the transparent resin base material is formed.   The optical waveguide with a lens according to claim 12 or 13, wherein a planar shape between the bumps is a circle.   The optical waveguide with a lens according to claim 14, wherein the lens-shaped convex portion has a diameter of 50 to 200 μm.   The optical waveguide with a lens according to claim 12, wherein a thickness of the lens-shaped convex portion is 5 to 50 μm.