JP2013015361A - Width measuring apparatus - Google Patents

Width measuring apparatus Download PDF

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Publication number
JP2013015361A
JP2013015361A JP2011147140A JP2011147140A JP2013015361A JP 2013015361 A JP2013015361 A JP 2013015361A JP 2011147140 A JP2011147140 A JP 2011147140A JP 2011147140 A JP2011147140 A JP 2011147140A JP 2013015361 A JP2013015361 A JP 2013015361A
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width
height
luminance distribution
dimensional imaging
coordinate
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Japanese (ja)
Inventor
Kohei Iba
公平 射場
Masayuki Sugiyama
昌之 杉山
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Toshiba Mitsubishi-Electric Industrial System Corp
東芝三菱電機産業システム株式会社
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Abstract

An object of the present invention is to provide a width measuring device which has an inexpensive and highly reliable width measuring function and can measure the width of an object to be measured with high accuracy.
A light source 2a that is disposed on the outer side of an object 1 to be measured and irradiates slit light on one side thereof, a one-sided two-dimensional imaging unit 4a that images the slit light, and an object 1 to be measured. One end width direction coordinate calculation unit 7a for calculating the width direction coordinate of the one end portion 28a, one end height direction coordinate calculation unit 8a, one end portion position calculation unit 9a, outside the upper side of the measured object 1, and A light source 2b that is arranged on the opposite side of the light source 2a and that irradiates slit-like light on the other side, the other-side two-dimensional imaging unit 4b that images the slit-like light, and the width direction coordinates of the other end 28b are calculated. Based on the spatial positions of the other end width direction coordinate calculating unit 7b, the other end height direction coordinate calculating unit 8b, the other end position calculating unit 9b, and the one end 28a and the other end 28b, A width calculation unit 10 that calculates the width of 1.
[Selection] Figure 1

Description

  The present invention relates to a width measuring device that measures the width of a moving object to be measured (a strip or a cuboid).

  As conventional width measuring devices for measuring the width of an object to be measured, for example, devices described in Patent Documents 1 and 2 are known. In this apparatus, a lower light source is provided below an object to be measured such as a steel plate or a plate material, and a two-dimensional measurement camera such as a CCD camera or a linear sensor is disposed on both upper sides, and the two-dimensional measurement camera serves as an edge position of the plate material. Is taken, and even if the measured object such as a steel plate or plate material moves up and down, the error is canceled and the width of the measured object is accurately measured.

  In addition, in a width measuring device that optically measures dimensions such as the width of a measurement object, a device that accurately detects the edge position of the measurement object regardless of the shape of the measurement object and the presence or absence of disturbances such as noise ( For example, see Patent Document 3).

JP 2004-257772 A JP 05-296729 A Japanese Patent Laid-Open No. 08-061921

  However, in the conventional width measuring devices described in Patent Documents 1 and 2, since the lower light source is disposed below the object to be measured, foreign objects fall on the lower light source when the object to be measured is transported. There is a problem that dust may accumulate, and this is a cause of disturbance and the end position of the object to be measured cannot be measured accurately.

  Moreover, in order to remove the fallen foreign matter and accumulated dust, the surface of the lower light source has to be frequently cleaned, which causes a problem that it takes time to maintain the performance of the width measuring device.

  In addition, since a machine such as a transport roll for transporting the object to be measured is disposed below the object to be measured, there is a problem that modification is necessary to secure a space for disposing the lower light source. there were.

  Further, the conventional width measuring device described in Patent Document 2 is configured such that a two-dimensional measuring camera such as a linear sensor images the same region of the measured object 1 from different positions above the measured object 1. Therefore, there is a problem that adjustment of the optical axis for imaging the same region is necessary and adjustment is difficult.

  In the conventional width measuring apparatus described in Patent Document 3, the width of the object to be measured is measured by detecting edges at both ends in the width direction of the object to be measured by a photoelectric converter. Is not mentioned.

  The present invention has been made to solve such problems, and has a width measurement function that is inexpensive and highly reliable, and can measure the width of an object to be measured with high accuracy. The purpose is to obtain.

  In order to solve the above-mentioned problem, a width measuring apparatus according to a first aspect of the present invention is arranged on the outer side above the object to be measured, and applies slit-like light parallel to the width direction of the object to be measured on one side in the width direction of the object to be measured. One side slit-like light source that irradiates the end, and one that images the slit-like light that is disposed above the object to be measured and that is irradiated on the surface of the object to be measured by the one-side slit light source A side two-dimensional imaging unit, and a one-end width direction coordinate calculation unit that calculates a width direction coordinate of the one side end in an image of slit-like light on the object to be measured imaged by the one side two-dimensional imaging unit; A one-end height direction coordinate calculation unit that calculates a height direction coordinate of the one-side end in the slit-shaped light image on the measurement object imaged by the one-side two-dimensional imaging unit; and the one end Width direction coordinate calculation part The spatial position of the one side end is calculated based on the calculated width direction coordinates of the one side end and the height direction coordinates of the one side end calculated by the one end height direction coordinate calculation unit. One end position calculation unit that is disposed on the outside of the measured object from above and on the opposite side of the measured object width direction with respect to the one-side slit light source, and parallel to the measured object width direction. The other side slit-like light source for irradiating the other side end portion, which is opposite to the one side end portion in the width direction of the object to be measured, above the object to be measured, The other-side two-dimensional imaging unit that images the slit-like light irradiated on the surface of the object to be measured by the other-side slit-like light source, and the object to be measured imaged by the other-side two-dimensional imaging unit Said in the image of slit light A second end width direction coordinate calculation unit that calculates a width direction coordinate of the side end, and the other end of the slit-like light image on the object to be measured captured by the other two-dimensional imaging unit. The other end portion height direction coordinate calculation unit for calculating the height direction coordinate, the other end portion width direction coordinate calculated by the other end width direction coordinate calculation unit, and the other end portion height direction coordinate calculation The other end position calculating unit that calculates the spatial position of the other end based on the height direction coordinate of the other end calculated by the unit, and the one side calculated by the one end position calculating unit A width calculating unit that calculates the width of the object to be measured based on the spatial position of the end and the spatial position of the other end calculated by the other end position calculating unit. To do.

  The width measuring device according to a second aspect of the present invention is the width measuring device, wherein the one end width direction coordinate calculation unit is a width of the one-side two-dimensional imaging result captured by the one-side two-dimensional imaging unit, respectively. One side width direction luminance distribution integrator that integrates the luminance distribution in the direction in the height direction, and one side width that differentially calculates the luminance distribution in the width direction obtained by the one side width direction luminance distribution integrator One-side width-direction luminance differential distribution centroid calculation that calculates the centroid of the width-direction luminance distribution from the width-direction luminance distribution differential value obtained by the one-side width-direction luminance distribution derivative calculator And calculating a width direction coordinate of the one side end portion in the slit light image on the object to be measured, and the one end height direction coordinate calculating portion is imaged by the one side two-dimensional imaging unit. Other side 2D imaging The one-side height direction luminance distribution integrator for integrating the luminance distribution in the height direction in the width direction, and the height from the luminance distribution in the height direction obtained by the one-side height direction luminance distribution integrator. A one-side height direction luminance distribution center-of-gravity calculator that calculates the center of gravity of the luminance distribution in the direction, while calculating the height direction coordinate of the one side end in the slit-shaped light image on the measured object, The other end width direction coordinate calculation unit integrates the luminance distribution in the width direction in the height direction in the other side two-dimensional image picked up by the other side two-dimensional image pickup unit. And the other side width direction luminance distribution differential calculator for differentiating the width direction luminance distribution obtained by the other side width direction luminance distribution integrator in the width direction, and the other side width direction luminance distribution derivative calculator Is the obtained luminance distribution differential value in the width direction? A second-side width-direction luminance differential distribution center-of-gravity calculator that calculates the center of gravity of the luminance distribution in the width direction, and calculates the width-direction coordinates of the other end of the slit-like light image on the object to be measured, The other-side height direction coordinate calculation unit integrates the luminance distribution in the height direction in the width direction in the other-side two-dimensional imaging result captured by the other-side two-dimensional imaging unit. And another one side height direction luminance distribution centroid calculator for calculating the center of gravity of the luminance distribution in the height direction from the luminance distribution in the height direction obtained by the luminance distribution integrator in the other side height direction. And calculating a height direction coordinate of the other side end of the slit-shaped light image on the object to be measured.

  Moreover, the width measuring apparatus according to the third invention further sets a partial region in the vicinity of the end portion of the slit-shaped light image on the object to be measured imaged by the one-side two-dimensional imaging unit as a calculation region. A one-side calculation region setting unit; and a second-side calculation region setting unit that sets a partial region in the vicinity of the end of the slit-like light image on the measurement object imaged by the other-side two-dimensional imaging unit as a calculation region; It is characterized by providing.

  In the width measuring device according to a fourth aspect of the present invention, in the width measuring device, the one-side calculation area setting unit may be configured so that in the one-side two-dimensional imaging result captured by the one-side two-dimensional imaging unit, A one-side width direction luminance distribution integrator that integrates the luminance distribution in the height direction, and a calculation area in the width direction based on the luminance distribution in the width direction obtained by the one-side width direction luminance distribution integrator, The one-side width direction calculation area setting unit set for the one-end width direction coordinate calculation unit, and the luminance distribution in the height direction in the one-side two-dimensional imaging result captured by the one-side two-dimensional imaging unit, One-side height direction luminance distribution accumulator that integrates in the width-direction calculation region set by the width direction calculation region setter, and the one-side height direction luminance distribution accumulator integrated by the one-side height direction luminance distribution integrator. Based on luminance distribution A one-side height direction calculation area setting device that sets a calculation area in the height direction with respect to the one end height direction coordinate calculation section, while the other side calculation area setting section is In the other side two-dimensional imaging result imaged by the two-dimensional imaging unit, the other side width direction luminance distribution accumulator that integrates the luminance distribution in the width direction in the height direction and the other side width direction luminance distribution accumulator are obtained. Based on the brightness distribution in the width direction, the other side width direction calculation area setting unit that sets the width direction calculation area for the other end width direction coordinate calculation unit and the other side two-dimensional imaging unit The other-side height direction luminance distribution accumulator that integrates the luminance distribution in the height direction in the other-side two-dimensional imaging result in the width-direction calculation region set by the other-side width direction calculation region setting device; Brightness on the other side Based on the luminance distribution in the height direction on the other side integrated by the distribution integrator, the height direction calculation region setting for setting the height direction calculation region to the other end portion height direction coordinate calculation unit And a vessel.

  In the width measuring apparatus according to a fifth aspect of the present invention, in the width measuring apparatus, the one-side calculation area setting unit is based on a result of one-side two-dimensional imaging captured by the one-side two-dimensional imaging unit. One-side two-dimensional image picked up by the one-side two-dimensional imaging unit based on the one-side width direction integration region designator that designates the integration region and the integration region designated by the one-side width direction integration region designator Based on the one-side height direction luminance distribution integrator that integrates the luminance distribution in the height direction in the imaging result, and the one-side height direction luminance distribution accumulated by the one-side height direction luminance distribution integrator, In the one-side two-dimensional imaging result imaged by the one-side two-dimensional imaging unit, and the one-side height-direction calculating region setting unit that sets the calculation region in the height direction with respect to the one-end height direction coordinate calculating unit Brightness in the width direction One side width direction luminance distribution integrator for integrating the distribution in the height direction calculation region set by the one side height direction calculation region setter, and the one side width direction luminance distribution integrator obtained by the one side width direction luminance distribution integrator On the other hand, the one-side width direction calculation area setting device for setting the calculation area in the width direction based on the luminance distribution in the width direction for the one end width direction coordinate calculation unit, Specified by the other-side width direction integration region designator that designates the integration region in the width direction based on the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit, and the other-side width direction integration region designator The other-side height direction luminance distribution accumulator that integrates the luminance distribution in the height direction in the other-side two-dimensional imaging result captured by the other-side two-dimensional imaging unit, and the other-side height Direction Based on the luminance distribution in the height direction on the other side accumulated by the luminance distribution accumulator, the other side height direction calculation region that sets the height direction calculation region to the other end portion height direction coordinate calculation unit The luminance distribution in the width direction in the other-side two-dimensional imaging result imaged by the setting device and the other-side two-dimensional imaging unit is calculated in the height-direction calculation region set by the other-side height direction calculation region setting device. The other-side width direction coordinate calculation is performed on the other-side width direction luminance distribution accumulator and the width direction calculation area based on the width direction luminance distribution obtained by the other side width direction luminance distribution accumulator. The other side width direction calculation area setting device set with respect to a part is provided.

  The width measuring device according to a sixth aspect of the present invention is the width measuring device, further comprising the one-sided two-dimensional imaging at a subsequent stage of the one-sided two-dimensional imaging unit or the other-side two-dimensional imaging unit. Or a coordinate converter that converts the width direction coordinates of the image of the slit-like light imaged by the other-side two-dimensional imaging unit.

  According to a seventh aspect of the present invention, in the width measurement apparatus, the one-side two-dimensional imaging unit and the other-side two-dimensional imaging unit are mounted upside down.

  A width measuring apparatus according to the present invention includes a slit light source that irradiates slit-like light parallel to the width direction of the object to be measured on one end in the width direction of the object to be measured, and a surface of the object to be measured. Since it does not have a lower light source, foreign objects may fall on the lower light source or dust may accumulate, which may cause disturbance and reduce the width of the object to be measured. There is no mismeasurement or inability to measure. Furthermore, since it is not necessary to clean the surface of the lower light source, it becomes easy to maintain the performance of the width measuring device. Further, there is no need for modification to secure a space for placing the lower light source. Further, the one-side two-dimensional imaging unit and the other-side two-dimensional imaging unit provided above the object to be measured are configured to image one side or the other side in the width direction of the object to be measured, so that the optical axis adjustment is performed. And the like, and the adjustment becomes easy, and the apparatus configuration is simplified and inexpensive.

It is a block diagram which shows the structural example of the whole width measuring apparatus of Embodiment 1 of this invention. (A), (b), the length direction side view and width direction side view which respectively show the arrangement | positioning relationship of the slit-shaped light source and the two-dimensional imaging part in the conveyance direction of the to-be-measured object in the width measuring apparatus of Embodiment 1. It is. (A), (b), an example of one side two-dimensional imaging result output from one side two-dimensional imaging part in the width measuring apparatus of Embodiment 1, respectively, the other side output from the other side two-dimensional imaging part It is explanatory drawing which shows an example of a two-dimensional imaging result. (A)-(d) is explanatory drawing for the spatial position calculation of the one end part of the to-be-measured object in the width | variety measuring apparatus of Embodiment 1, respectively. (A)-(d) is explanatory drawing for the spatial position calculation of the other end part of the to-be-measured object in the width | variety measuring apparatus of Embodiment 1, respectively. Detailed configuration examples of the one end width direction coordinate calculation unit and the other end width direction coordinate calculation unit, and the one end height direction coordinate calculation unit and the other end height direction coordinate calculation unit in the width measurement apparatus according to the second embodiment. FIG. It is a block diagram which shows the structural example of the whole width measuring apparatus of Embodiment 3 of this invention. FIG. 10 is an explanatory diagram illustrating an example of a calculation area set by a one-side calculation area setting unit and a second-side calculation area setting unit in the width measurement apparatus according to the third embodiment. FIGS. 4A to 4D are explanatory diagrams for calculating the spatial position of one end in the width measuring apparatus of the first embodiment shown in FIGS. 4A to 4D, respectively. It is explanatory drawing which shows an example which set the area | region. It is a block diagram which shows the detailed structural example of the one side calculation area | region setting part and the other side calculation area | region setting part among the structures of the width | variety measuring apparatus of Embodiment 4 of this invention. It is a block diagram which shows the detailed structural example of the one side calculation area | region setting part and the other side calculation area | region setting part among the structures of the width measurement apparatus of Embodiment 5 of this invention. It is a block diagram which shows the structural example of the whole width measuring apparatus of Embodiment 6 of this invention. (A), (b), respectively, the example of the coordinate conversion result of the one side two-dimensional image result coordinate-converted in the coordinate converter of Embodiment 6, and the other side two-dimensional image result 5b which has not performed coordinate conversion It is explanatory drawing which shows the example of. It is a block diagram which shows the structural example of the whole width measuring apparatus of Embodiment 7 of this invention.

Embodiment 1 FIG.
As shown in FIG. 1, the width measuring apparatus according to the first embodiment calculates the spatial position of one end portion (hereinafter referred to as one end portion) 28a with respect to the center of the measured object 1 in the width direction. At the same time, the spatial position of the other end (hereinafter referred to as the other end) 28b is calculated to measure the width of the object 1 to be measured.

  That is, the width measuring apparatus according to the first embodiment is first arranged on the outer side from the upper portion of the measured object 1, and slit-like light parallel to the width direction of the measured object 1 is applied to one end of the measured object 1 in the width direction. One side slit-like light source 2a that irradiates 28a and one side that is arranged above the object to be measured 1 and that images the slit-like light irradiated on the surface of the object 1 to be measured by the one side slit-like light source 2a A two-dimensional imaging unit 4a, a one-end width-direction coordinate calculation unit 7a that calculates a width-direction coordinate of the one-end part 12a in the slit-shaped optical image 11a on the measurement object 1 imaged by the one-side two-dimensional imaging unit 4a, One end height direction coordinate calculation unit 8a for calculating the height direction coordinate of the one end portion 12a in the slit light image 11a on the object 1 to be measured imaged by the one-side two-dimensional imaging unit 4a, and one end width direction coordinate Calculation unit 7a Based on the calculated width direction coordinate of the one end portion 28a and the height direction coordinate of the one end portion 28a calculated by the one end portion height direction coordinate calculating portion 8a, the spatial position of the one end portion 28a of the measured object 1 is calculated. And an end position calculation unit 9a.

  The width measuring apparatus according to the first embodiment is disposed outside the upper portion of the measured object 1 and on the opposite side of the measured object 1 in the width direction with respect to the one-side slit light source 2a. The other-side slit-like light source 2b for irradiating the other end portion 28b opposite to the one end portion 28a of the measured object 1 in the width direction of the measured object 1 in the width direction of the measured object 1, and the measured object 1 The other-side two-dimensional imaging unit 4b and the other-side two-dimensional imaging unit 4b pick up images of the slit-like light irradiated on the surface of the measured object 1 by the other-side slit-like light source 2b. The measured object 1 imaged by the other-end width direction coordinate calculation unit 7b for calculating the width direction coordinate of the other end portion 12b in the slit-shaped light image 11b on the measured object 1 and the other side two-dimensional imaging unit 4b. Upper slit light image 11 The other end portion height direction coordinate calculating portion 8b for calculating the height direction coordinates of the other end portion 12b, the other end portion width direction coordinate calculating portion 7b calculated by the other end portion width direction coordinate calculating portion 7b, and the other end portion. Based on the height direction coordinates of the other end portion 28b calculated by the height direction coordinate calculating portion 8b, the other end portion position calculating portion 9b for calculating the spatial position of the other end portion 28b, and the one end portion position calculating portion 9a And a width calculation unit 10 that calculates the width of the measured object 1 based on the calculated spatial position of the one end portion 28a and the spatial position of the other end portion 28b calculated by the other end portion position calculation unit 9b.

  Here, an outline of the operation of the width measuring apparatus according to the first embodiment shown in FIG. 1 will be described.

  First, as shown in FIG. 1, in the width measuring apparatus according to the first embodiment, the one-side slit light source 2 a is arranged outside the upper part of the measured object 1 and is parallel to the width direction of the measured object 1. The slit-shaped light is irradiated on the one end portion 28a in the width direction of the object 1 to be measured.

  The one-side two-dimensional imaging unit 4a is arranged above the object to be measured 1 and images the one-side imaging region 3a on the surface of the object to be measured 1, and the one-side imaging region from the one-side slit light source 2a. The slit-shaped light irradiated to 3a is imaged, and one side two-dimensional imaging result 5a is output.

  The one-sided two-dimensional imaging result 5a output from the one-sided two-dimensional imaging unit 4a is obtained by the one-end width direction coordinate calculation unit 7a, and the width-direction coordinates of the one-end part 12a in the slit-shaped light image 11a on the object 1 to be measured. The one-end height direction coordinate calculation unit 8a calculates the height-direction coordinates of the one end portion 12a in the slit-shaped light image 11a on the measured object 1, and the one-end position calculation unit 9a further calculates one end portion. From the width direction coordinate of the one end portion 28a of the measured object 1 calculated by the width direction coordinate calculation unit 7a and the height direction coordinate of the one end portion 28a of the measured object 1 calculated by the one end portion height direction coordinate calculation unit 8a. A spatial position of the one end portion 28a, for example, a spatial coordinate is calculated.

  On the other hand, the other side slit-like light source 2b is arranged outside the upper part of the object 1 to be measured, on the opposite side of the one-side slit light source 2a, and slit-like light parallel to the width direction of the object 1 to be measured. Irradiation is performed on the other end 28b on the opposite side of the one-side slit light source 2a.

  The other-side two-dimensional imaging unit 4b is arranged above the object to be measured 1 and images the other-side imaging area 3b on the surface opposite to the one-side imaging area 3a on the surface of the object to be measured 1, and the other side The slit-shaped light emitted from the slit-shaped light source 2b to the other-side imaging region 3b is imaged, and the other-side two-dimensional imaging result 5b is output.

  The other-side two-dimensional imaging result 5b output from the other-side two-dimensional imaging unit 4b is the other-end portion width direction coordinate calculator 7b, and the width direction of the other end portion 12b in the slit-shaped optical image 11b on the object 1 to be measured. The coordinates are calculated, and the other end height direction coordinate calculation unit 8b calculates the height direction coordinate of the other end 12b in the slit-shaped light image 11b on the object 1 to be measured. 9b, the width direction coordinate of the other end 28b of the measured object 1 calculated by the other end width direction coordinate calculator 7b, and the other end of the measured object 1 calculated by the other end height direction coordinate calculating unit 8b. The spatial position of the other end portion 28b, for example, the spatial coordinates is calculated from the height direction coordinates of the portion 28b.

  The width calculating unit 10 calculates the spatial position of the one end 28a of the measured object 1 calculated by the one end position calculating unit 9a and the other end of the measured object 1 calculated by the other end position calculating unit 9b on the opposite side. Based on the spatial position of the part 28b, the width of the measured object 1 is calculated.

  FIG. 2A is a side view in the length direction showing the positional relationship between the slit light source and the two-dimensional imaging unit in the conveyance direction of the object 1 to be measured in the width measuring apparatus according to Embodiment 1 of the present invention. FIG. 2B is a side view in the width direction showing the positional relationship between the slit light source and the two-dimensional imaging unit in the width direction of the object 1 to be measured in the width measuring apparatus according to Embodiment 1 of the present invention.

  As shown in FIG. 2 (b), the one-side slit light source 2 a is arranged on one side above the center of the measured object 1 and on the outer side in the width direction of the measured object 1. Irradiation is mainly performed on the one side imaging region 3a. As shown in FIG. 2A, the one-side two-dimensional imaging unit 4 a is arranged with a predetermined angle in the transport direction of the one-side slit light source 2 a and the object 1 to be measured. The slit light irradiated in the one side imaging region 3a is imaged.

  On the other hand, as shown in FIG. 2B, the other side slit-like light source 2b is located on the other side above the center of the measured object 1 and outside the measured object 1 in the width direction. It is arranged on the side opposite to the one-side slit-like light source 2a, and irradiates mainly on the other-side imaging region 3b of the measured object 1. As shown in FIG. 2A, the other-side two-dimensional imaging unit 4 b is disposed with a predetermined angle in the transport direction of the other-side slit light source 2 b and the object 1 to be measured. The slit light irradiated in the other side imaging region 3b is imaged.

  FIG. 3A is an explanatory diagram illustrating an example of the one-side two-dimensional imaging result 5a output from the one-side two-dimensional imaging unit 4a in the width measuring apparatus according to the first embodiment. FIG. 3B is an explanatory diagram illustrating an example of the other-side two-dimensional imaging result 5b output from the other-side two-dimensional imaging unit 4b in the width measuring apparatus according to the first embodiment.

  In the example of the one-side two-dimensional imaging result 5a in FIG. 3A, for example, m pixels are arranged in the horizontal axis direction and n pixels are arranged in the vertical axis direction. The arrangement of m pixels in the horizontal direction shows an example of the imaging result of the coordinate in the width direction of the measured object 1 in the one-side imaging region 3a on the measured object 1. Further, the arrangement of n pixels in the vertical direction shows an example of the imaging result of the height direction coordinates of the measured object 1.

As for the coordinates of the one-sided two-dimensional imaging result 5a shown in FIG. 3A, the lower-right corner coordinates (horizontal axis coordinates, vertical axis coordinates) of the one-sided two-dimensional imaging result 5a are (0, 0), The lower left corner coordinates on the coordinates of the imaging result 5a are (m, 0), the upper right corner coordinates on the coordinates of the one side two-dimensional imaging result 5a are (0, n), and the coordinates on the one side two-dimensional imaging result 5a are If the upper left coordinate of is (m, n),
(0,0) = (Wa0, Ha0)
(M, 0) = (− Wamax, Ha0)
(0, n) = (Wa0, Hamax)
(M, n) = (− Wamax, Hamax)
Indicated by

  These coordinates are the coordinates of the one-side two-dimensional imaging result 5a captured by the one-side two-dimensional imaging unit 4a in the one-side imaging region 3a.

  In FIG. 3A, 11a indicates an image of slit-like light (hereinafter referred to as a slit-like light image) irradiated on the object 1 by the one-side slit-like light source 2a. One end part of the slit-like light image 11a irradiated by the side slit-like light source 2a, that is, one end part 28a of the object 1 to be measured is shown. A broken line 11amax indicates a slit-shaped light image irradiated by the one-side slit-shaped light source 2a when the top surface of the measured object 1 is at Hamax in FIG. 2A, and a broken line 11a0 indicates the measured object. 1 shows a slit light image irradiated by the one-side slit light source 2a when the upper surface of 1 is at Ha0 in FIG.

  Here, the one end portion 12a of the slit-shaped light image 11a irradiated on the measured object 1 by the one-side slit-shaped light source 2a is in the horizontal direction in the one-side two-dimensional imaging result 5a, that is, in the width direction of the measured object 1. Coordinates -Wa will be indicated. Accordingly, the coordinates of the one end portion 12a of the slit-shaped optical image 11a, that is, the coordinates of the one end portion 28a of the measured object 1 are represented by (−Wa, Ha).

  In the example of the other-side two-dimensional imaging result 5b captured by the other-side two-dimensional imaging unit 4b shown in FIG. 3B, m pixels are arranged in the horizontal axis direction, and n pixels are arranged in the vertical axis direction. Shows an example in which is arranged. The arrangement of the m pixels in the horizontal direction is an example of the imaging result of the coordinate in the width direction of the measured object 1 in the other-side imaging region 3b on the measured object 1. The arrangement of n pixels in the vertical direction is an example of the imaging result of the height direction coordinates of the measured object 1.

The coordinates of the other-side two-dimensional imaging result 5b are the coordinates of the other-side two-dimensional imaging result 5b on the other-side two-dimensional imaging result 5b. The lower left corner coordinates are (m, 0), the upper right corner coordinates on the coordinates of the other side two-dimensional imaging result 5b are (0, n), and the upper left corner coordinates on the coordinates of the other side two-dimensional imaging result 5b are (m , N)
(0,0) = (+ Wbmax, Hb0)
(M, 0) = (Wb0, Hb0)
(0, n) = (+ Wbmax, Hbmax)
(M, n) = (Wb0, Hbmax)
Indicated by

  These coordinates are the coordinates of the other-side two-dimensional imaging result 5b captured by the other-side two-dimensional imaging unit 4b in the other-side imaging region 3b.

  In FIG. 3B, 11b shows a slit-like light image irradiated on the object 1 by the other-side slit light source 2b, and 12b shows a slit-like shape irradiated by the one-side slit light source 2a. The other end 28b of the optical image 11a is shown. A broken line 11bmax indicates a slit-like light image irradiated by the other slit-like light source 2b when the top surface of the measured object 1 is at Hbmax in FIG. 2A, and a broken line 11b0 indicates the measured object. 1 shows a slit light image irradiated by the one-side slit light source 2a when the upper surface of 1 is at Hb0 in FIG.

  Here, the other end 12b of the slit-shaped light image 11b irradiated on the measured object 1 by the other-side slit-shaped light source 2b is the horizontal direction in the other-side two-dimensional imaging result 5b, that is, the width direction of the measured object 1. Coordinates + Wb are indicated. Accordingly, the coordinates of the one end portion 12a of the image 11b are represented by (+ Wb, Hb).

  4A to 4D are explanatory diagrams for calculating the spatial position of the one end portion 28a of the object 1 to be measured in the width measuring apparatus according to the first embodiment.

  FIG. 4A is an example of the one-side two-dimensional imaging result 5a imaged by the one-side two-dimensional imaging unit 4a, and is the same as FIG.

  4A, in the example of the one-side two-dimensional imaging result 5a, m pixels are arranged in the horizontal axis direction and n pixels are arranged in the vertical axis direction. The array of m pixels in the horizontal direction of the one-side two-dimensional imaging result 5a becomes the width direction coordinate of the one-side two-dimensional imaging result 5a of the measured object 1 in the one-side imaging region 3a on the measured object 1. In addition, the arrangement of n pixels in the vertical direction of the one-side two-dimensional imaging result 5a is the height direction coordinate of the one-side two-dimensional imaging result 5a of the measured object 1.

The coordinates of the one-side two-dimensional imaging result 5a are the coordinates of the one-side two-dimensional imaging result 5a on the coordinates of the one-side two-dimensional imaging result 5a, with the lower right coordinates (horizontal axis coordinates, vertical axis coordinates) of the one-side two-dimensional imaging result 5a The lower left corner coordinates are (m, 0), the upper right corner coordinates on the coordinates of the one-side two-dimensional imaging result 5a are (0, n), and the upper left corner coordinates on the coordinates of the one-side two-dimensional imaging result 5a are (m , N), as described above,
(0,0) = (Wa0, Ha0)
(M, 0) = (− Wamax, Ha0)
(0, n) = (Wa0, Hamax)
(M, n) = (− Wamax, Hamax)
Indicated by

  4A, similarly to FIG. 3A, 11a indicates a slit-like light image irradiated on the object 1 by the one-side slit light source 2a, and 12a indicates one-side slit. One end part of the slit-like light image 11a irradiated by the optical light source 2a, that is, one end part 28a of the object 1 to be measured is shown. A broken line 11amax indicates a slit-shaped light image irradiated by the one-side slit-shaped light source 2a when the top surface of the measured object 1 is at Hamax in FIG. 2A, and a broken line 11a0 indicates the measured object. 1 shows a slit light image irradiated by the one-side slit light source 2a when the upper surface of 1 is at Ha0 in FIG. Accordingly, the coordinates of the one end portion 12a of the slit-shaped optical image 11a are indicated by (−Wa, Ha).

  FIG. 4B shows an example of the luminance level in the width direction of the one-sided two-dimensional imaging result 5a captured by the one-sided two-dimensional imaging unit 4a shown in FIG.

  That is, FIG. 4B shows an example in which the luminance distribution of the one-side two-dimensional imaging result 5a shown in FIG. 4A is integrated in the height direction. In FIG. 4B, the horizontal axis indicates the width direction coordinate, and the vertical axis indicates the luminance level.

  FIG. 4C illustrates an example of the luminance level in the height direction of the one-sided two-dimensional imaging result 5a captured by the one-sided two-dimensional imaging unit 4a illustrated in FIG.

  That is, FIG. 4C shows an example in which the luminance distribution of the one-side two-dimensional imaging result 5a shown in FIG. 4A is integrated in the width direction. In FIG.4 (c), a vertical axis | shaft shows a height direction coordinate and a horizontal axis shows a luminance level.

  FIG. 4D is an example in which the luminance level in the width direction of the one-sided two-dimensional imaging result 5a shown in FIG. 4B is differentiated in the horizontal axis direction.

  In FIG. 4D, the horizontal axis represents the width direction coordinate obtained by differentiating the luminance level in the width direction of the one-side two-dimensional imaging result 5a shown in FIG. 4B in the horizontal axis direction, and the vertical axis represents FIG. The luminance level in the width direction of the one-side two-dimensional imaging result 5a shown in FIG.

  FIGS. 5A to 5E are explanatory diagrams for calculating the spatial position of the other end portion 28b of the measured object 1 in the width measuring apparatus according to the first embodiment.

  In FIG. 5A, an example of the other-side two-dimensional imaging result 5b shows an example in which m pixels are arranged in the horizontal axis direction and n pixels are arranged in the vertical axis direction. The arrangement of m pixels in the horizontal direction of the other-side two-dimensional imaging result 5b becomes the width direction coordinate of the other-side two-dimensional imaging result 5b of the measured object 1 in the other-side imaging region on the measured object 1. In addition, the arrangement of n pixels in the vertical direction of the other-side two-dimensional imaging result 5b is the height direction coordinate of the other-side two-dimensional imaging result 5b of the measured object 1.

The coordinates of the other-side two-dimensional imaging result 5b are the coordinates of the other-side two-dimensional imaging result 5b on the other-side two-dimensional imaging result 5b. The lower left corner coordinates are (m, 0), the upper right corner coordinates on the coordinates of the other side two-dimensional imaging result 5b are (0, n), and the upper left corner coordinates on the coordinates of the other side two-dimensional imaging result 5b are (m , N), as described above,
(0,0) = (+ Wbmax, Hb0)
(M, 0) = (Wb0, Hb0)
(0, n) = (+ Wbmax, Hbmax)
(M, n) = (Wb0, Hbmax)
Indicated by

  As in FIG. 3B, in FIG. 5A, 11b shows a slit-like light image irradiated on the object 1 to be measured by the other-side slit-like light source 2b, and 12b shows the one-side slit. The other end portion 28b of the slit-shaped light image 11a irradiated by the shaped light source 2a is shown, and the broken line 11bmax is a one-side slit-shaped light source when the upper surface of the measured object 1 is at Hbmax in FIG. 2b shows the slit-shaped light image irradiated, and the broken line 11b0 indicates the slit-shaped light image 11b irradiated by the one-side slit-shaped light source 2b when the top surface of the measured object 1 is at Hb0 in FIG. Indicates. The coordinates of the other end 12b of the image 11b are indicated by (+ Wb, Hb).

  FIG. 5B illustrates an example of the luminance level in the width direction of the other-side two-dimensional imaging result 5b captured by the other-side two-dimensional imaging unit 4b illustrated in FIG.

  That is, FIG. 5B illustrates an example in which the other-side two-dimensional imaging unit 4b illustrated in FIG. 5A accumulates the luminance distribution of the other-side two-dimensional imaging result 5b in the height direction. In FIG. 5B, the horizontal axis represents the width direction coordinate, and the vertical axis represents the luminance level.

  FIG. 5C illustrates an example of the luminance level in the height direction of the other-side two-dimensional imaging result 5b captured by the other-side two-dimensional imaging unit 4b illustrated in FIG.

  That is, FIG. 5C shows an example in which the luminance distribution of the other-side two-dimensional imaging result 5b shown in FIG. 5A is integrated in the width direction. In FIG.5 (c), a vertical axis | shaft shows a height direction coordinate and a horizontal axis shows a luminance level.

  FIG. 5D is an example in which the luminance level in the width direction of the other-side two-dimensional imaging result 5b shown in FIG. 5B is differentiated in the horizontal axis direction.

  In FIG. 5D, the horizontal axis indicates the width direction coordinate obtained by differentiating the luminance level in the width direction of the other two-dimensional imaging result 5b shown in FIG. 5B in the horizontal axis direction, and the vertical axis indicates the width direction. The luminance level is differentiated in the horizontal axis direction.

  FIG. 5E shows a luminance inverter value of the width direction coordinate obtained by differentiating the luminance level in the width direction of the other-side two-dimensional imaging result 5b shown in FIG. This is an example in which the positive and negative polarities are inverted in the vertical direction.

<Detailed Operation of Width Measuring Device of Embodiment 1>
Next, a detailed operation of the width measuring apparatus according to the first embodiment will be described.

  First, when the measured object 1 moves in the transport direction, the measured object 1 is irradiated with slit-like light from the one-side slit-like light source 2a and the other-side slit-like light source 2b, respectively.

  When the measured object 1 is irradiated with slit-like light from the one-side slit-like light source 2a and the other-side slit-like light source 2b, the one-side two-dimensional imaging unit 4a and the other-side two-dimensional imaging unit 4b respectively The reflected light of the slit-shaped light irradiated on the measurement object 1 is imaged to obtain one side two-dimensional imaging result 5a and the other side two-dimensional imaging result 5b. The one-sided two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b are obtained every time the measured object 1 is conveyed by a predetermined distance, and the width measurement result is obtained through the processing of each arithmetic unit for each imaging result. .

  The one-sided two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b obtained in this way are slits irradiated on the object 1 to be measured by the one-side slit light source 2a in FIG. And the slit-like light image 11b irradiated on the object 1 to be measured by the other-side slit-like light source 2b in FIG. That is, one end portion 28a of the measured object 1 is represented by one end portion 12a of the slit-shaped light image 11a irradiated on the measured object 1 by the one side slit-shaped light source 2a, while the other end portion 28b is the other end portion 28b. The side slit-shaped light source 2b is represented by the other end 12b of the slit-shaped light image 11b irradiated on the object 1 to be measured.

  Here, the one-side two-dimensional imaging unit 4a and the other-side two-dimensional imaging unit 4b of the width measuring apparatus according to the first embodiment, as shown in FIG. As the dimensional imaging result 5b, only the slit light image on the surface of the measured object 1 is captured, and the slit image on the side surface of the measured object 1 is not captured.

  Further, as shown in FIGS. 2A and 2B, the one-side slit-like light source 2a and the other-side slit-like light source 2b are arranged on both outer sides from above the object to be measured 1, and from the outside. The one-dimensional two-dimensional imaging unit 4 a and the other-side two-dimensional imaging unit 4 b are arranged above the measured object 1 and irradiate the measured object 1 with slit-shaped light. It is provided at a position where no slit image is captured.

  Accordingly, the one end width direction coordinate calculation unit 7a, the one end portion height direction coordinate calculation unit 8a, the other end width direction coordinate calculation unit 7b, and the other end portion height direction coordinate calculation unit 8b are respectively shown in FIG. The slit-shaped light image 11a irradiated on the object 1 to be measured by the one-side slit-shaped light source 2a or the slit-shaped image irradiated on the object-to-be-measured 1 by the other side slit-shaped light source 2b in FIG. Without being influenced by the image of the side surface of the measured object 1 from the optical image 11b, the width direction coordinate and the height direction coordinate of the one end portion 12a of the slit-shaped optical image 11a, that is, the one end portion 28a of the measured object 1, the slit Since the width direction coordinate and the height direction coordinate of the other end portion 12b of the shaped light image 11b, that is, the other end portion 28b of the measured object 1 can be accurately detected, there is an effect that the reliability of the width measurement is improved.

<Example of Calculation Operation of One End Width Direction Coordinate Calculation Unit 7a>
Next, an operation in which the one-end width direction coordinate calculation unit 7a inputs the one-side two-dimensional imaging result 5a and calculates the width-direction coordinate -Wa of the one end portion 12a of the slit-like light image 11a on the object 1 to be measured. Will be described with reference to FIGS. 4 (a) and 4 (b).

  The one-end width direction coordinate calculation unit 7a is configured to, for example, one-side two-dimensional imaging of the one-end portion 12a of the slit-shaped optical image 11a on the object 1 to be measured, that is, the width-direction coordinates -Wa of the one end portion 28a of the object 1 Calculation is performed by integrating in the height direction of the measured object 1 of the result 5a.

  That is, the one-end width direction coordinate calculation unit 7a sets (m, 0) to (0, 0) in the width direction coordinates of the one-side two-dimensional imaging result 5a, 1) to (0, 1), the horizontal axis direction as the second row, (m, i) to (0, i), the horizontal axis direction as the i row, and (m, n) to ( 0, n) are integrated from 0 to the n-th line on the vertical axis, with the horizontal axis direction being the n-th line.

  Accordingly, the results from (m, (luminance integration from 0 to n)) to (0, (luminance integration from 0 to n)) by the one end width direction coordinate calculation unit 7a are as shown in FIG. become. 4B is a diagram illustrating an example in which the luminance distribution of the one-side two-dimensional imaging result 5a illustrated in FIG. 4A is integrated in the height direction as described above. In FIG. 4B, the horizontal axis represents the width direction coordinate, and the vertical axis represents the integrated value of the luminance level.

  Here, as one example of the width direction coordinate calculation method of the one end portion 28a of the object 1 to be measured, the one end width direction coordinate calculation portion 7a searches the horizontal axis direction in FIG. 4B from the left to the right. At this time, the intersection coordinates that have exceeded the predetermined threshold SLw for the first time are set as SLwp, and this SLwp is calculated as the coordinate -Wa of the one end portion 12a of the slit-shaped light image 11a irradiated by the one-side slit-shaped light source 2a.

  The one-end-width-direction-coordinate calculating section 7a uses such a calculation method to calculate the one-side portion 12a of the slit-like light image 11a irradiated by the one-side slit-like light source 2a, that is, the one-way portion 28a of the object 1 to be measured. Is calculated.

  Here, the one-end height direction coordinate calculation unit 8a obtains, for example, the maximum value of the luminance level obtained by integrating the luminance distribution of the one-side two-dimensional imaging result 5a in FIG. 4B in the height direction as the threshold SLw. Thus, for example, 50% of the maximum value is set as the threshold value SLw.

<Example of Calculation Operation of One End Height Direction Coordinate Calculation Unit 8a>
Next, the one-end height direction coordinate calculation unit 8a inputs the one-side two-dimensional imaging result 5a, and calculates the height-direction coordinate Ha of the one end portion 12a of the slit-shaped light image 11a on the measured object 1. The operation will be described with reference to FIGS. 4 (a) and 4 (c).

  The one-end height direction coordinate calculation unit 8a uses the one-dimensional portion Ha of the one-end portion 12a of the slit-shaped optical image 11a on the measured object 1, that is, the one-end portion 28a of the measured object 1, for example, one-dimensional two-dimensional. Calculation is performed by integrating the imaging result 5a in the width direction of the object 1 to be measured.

  That is, the one-end height direction coordinate calculation unit 8a sets (0,0) to (0, n) as the first column in the height direction coordinates of the one-side two-dimensional imaging result 5a, 1,0) to (1, n), the vertical axis direction is the second column, (j, 0) to (j, n) is the vertical axis direction is the jth column, and (m, 0) To (m, n), the vertical axis is the nth column, and the 0th to mth columns on the horizontal axis are integrated.

  Therefore, the results from ((luminance accumulation from 0 to m), 0) to ((luminance accumulation from 0 to m), n) by the one end height direction coordinate calculation unit 8a are shown in FIG. 4 (c). It becomes like this. 4C is a diagram illustrating an example in which the luminance distribution of the one-side two-dimensional imaging result 5a illustrated in FIG. 4A is integrated in the width direction as described above. In FIG. 4C, the vertical axis represents the height direction coordinate, and the horizontal axis represents the integrated value of the luminance level.

  Here, as one example of the height direction coordinate calculation unit 8a of the one end part 28a of the object 1 to be measured, the one end part height direction coordinate calculation part 8a searches in the vertical axis direction of FIG. The intersection coordinates exceeding the threshold value SLh are detected as SLhp1 and SLhp2, and the average value of SLhp1 and SLhp2 is used as the height coordinate Ha of the one end portion 12a of the slit-like light image 11a irradiated by the one-side slit-like light source 2a. Calculate.

  The one-end-height-direction-coordinate calculation unit 8a uses such a calculation method to measure the height of one end 12a of the slit-shaped light image 11a irradiated by the one-side slit-shaped light source 2a, that is, the one end 28a of the object 1 to be measured. Calculate the direction coordinates.

  Here, the threshold SLh is set by, for example, obtaining the maximum value of the luminance level obtained by integrating the luminance distribution of the one-dimensional two-dimensional imaging result 5a in FIG. 4C in the width direction, and for example 50% of the maximum value. Is set as the threshold value SLH.

<Example of Calculation Operation of One-End Position Calculator 9a>
Next, the one-end position calculator 9a calculates the width-direction coordinate -Wa of the one-end portion 12a of the slit-shaped light image 11a on the measured object 1 calculated by the one-end width-direction coordinate calculation unit 7a and the one-side height direction. The spatial position of the one end portion 28a of the measured object 1 is calculated from the height direction coordinate Ha of the one end portion 12a of the slit-shaped light image 11a on the measured object 1 calculated by the target calculator 8a.

  That is, the one end position calculator 9a calculates the object to be measured from the width direction coordinate -Wa obtained from the one end portion 12a of the slit-shaped light image 11a in the one-side two-dimensional imaging result 5a and the height direction coordinate Ha. The spatial position of one end portion 28a is obtained.

  In FIG. 2A, the height of the upper surface of the measurement object 1 irradiated with the one-side slit light source 2a varies depending on the thickness of the measurement object 1 and vibration during conveyance. This height variation varies from Ha0 to Hamax in FIG. In the one-sided two-dimensional imaging result 5a shown in FIG. 3A, the height fluctuation is obtained as a broken line 11a0 when the height is Ha0, and as the solid line 11a when the height fluctuation is the height Ha. It is obtained as a broken line 11amax when the height fluctuation height is the height Hamax. At this time, one end portion 12a of the slit-shaped light image 11a irradiated by the one-side slit-shaped light source 2a changes as shown in FIG.

  Therefore, the one-end position calculator 9a changes the height Ha0 to Hamax obtained from the one-end height direction coordinate calculation section 8a by using a predetermined change table to convert the slit-shaped optical image 11a on the object 1 to be measured. The width direction coordinate of the one end portion 12a is corrected.

  The other end width direction coordinate calculator 7b, the other end height direction coordinate calculator 8b, and the other end position calculator 9b are also one end width direction coordinate calculator 7a and one end height direction coordinate calculator 8a. Similarly to the one end position calculator 9a, the width direction coordinate of the other end 28b is corrected from the other side two-dimensional imaging result 5b.

  Then, the width calculation unit 10 calculates the width direction coordinates of the one end 28a of the measured object 1 calculated by the one end position calculating unit 9a and the measured object calculated by the other end position calculating unit 9b on the opposite side. The width of the object to be measured 1 is calculated from the width direction coordinates of the other end portion 28b.

  Therefore, according to the width measuring apparatus according to the first embodiment, the slit-like light image 11a irradiated on the object 1 by the one-side slit-like light source 2a in FIG. The one-side slit-like light source 2a is irradiated from the slit-like light image 11b irradiated on the measured object 1 by the other-side slit-like light source 2b without being affected by the side image of the measured object 1. Since the one end portion 12a of the slit-shaped light image 11a and the other end portion 12b of the slit-shaped light image 11b can be accurately detected, the measurement reliability of the width of the measured object 1 is improved.

  Further, the width measuring apparatus according to the first embodiment irradiates the slit-like light parallel to the width direction of the measured object 1 to the one end 28a and the other end 28b of the measured object 1 in the width direction. A slit-like light source 2a, the other-side slit-like light source 2b, and a one-side two-dimensional image pickup unit 4a and another-side two-dimensional image pickup unit 4b that pick up images of the slit-like light irradiated on the surface of the object 1 to be measured are provided. Since it does not have a lower light source, foreign matter may fall on the lower light source or dust may accumulate, and this may cause a disturbance and prevent measurement errors and inability to measure the width of the object 11 to be measured. can do.

  Further, in the width measuring apparatus according to the first embodiment, it is not necessary to clean the surface of the lower light source, so that it is easy to maintain the performance of the width measuring apparatus.

  Moreover, the width measuring apparatus according to Embodiment 1 does not need to be modified to secure a space for arranging the lower light source.

  In addition, the width measuring apparatus according to the first embodiment has two one-side two-dimensional imaging units 4a and the other two-dimensional imaging unit 4b arranged above the object 1 to be measured. Since one end portion 28a or the other end portion 28b in the width direction is imaged, it is not necessary to adjust the optical axis when imaging the same region, the adjustment becomes easy, and the apparatus configuration is simplified and inexpensive.

Embodiment 2. FIG.
The width measuring apparatus according to the second embodiment includes one end width direction coordinate calculating section 7a and the other end width direction coordinate calculating section 7b of FIG. 1 showing the configuration of the width measuring apparatus according to the first embodiment shown in FIG. And the structure of the one end part height direction coordinate calculation part 8a and the other end part height direction coordinate calculation part 8b was shown in detail.

  6 shows one end width direction coordinate calculation unit 7a and the other end width direction coordinate calculation unit 7b, one end height direction coordinate calculation unit 8a, and the other end height direction coordinate in the width measuring apparatus according to the second embodiment. It is a block diagram which shows the detailed structural example of the calculating part 8b.

  In FIG. 6, the one-end width direction coordinate calculation unit 7a in the width measurement apparatus of the second embodiment increases the luminance distribution in the width direction in the one-side two-dimensional imaging result 5a imaged by the one-side two-dimensional imaging unit 4a. One side width direction luminance distribution integrator 18a that integrates in the vertical direction, and one side width direction luminance distribution differential calculator that differentially calculates the widthwise luminance distribution obtained by the one side width direction luminance distribution integrator 18a. 19a and a one-side width direction luminance differential distribution centroid calculator 20a that calculates the centroid of the width direction luminance distribution from the width-direction luminance distribution differential value obtained by the one side width-direction luminance distribution derivative calculator 19a, The coordinate in the width direction of the one end portion 12a in the slit-shaped light image 11a on the measured object 1 is calculated. In addition, the one-end height direction coordinate calculation unit 8a integrates the luminance distribution in the height direction in the width direction in the other-side two-dimensional imaging result imaged by the one-side two-dimensional imaging unit 4a. A distribution integrator 21a, and a one-side height direction luminance distribution centroid calculator 22a that calculates the centroid of the luminance distribution in the height direction from the luminance distribution in the height direction obtained by the one-side height direction luminance distribution integrator 21a; The height direction coordinate of the one end part 12a in the slit-shaped light image 11a on the object 1 to be measured is calculated.

  Similarly, the other-end width direction coordinate calculation unit 7b in the width measurement apparatus of Embodiment 2 increases the luminance distribution in the width direction in the other-side two-dimensional imaging result 5b captured by the other-side two-dimensional imaging unit 4b. The other side width direction luminance distribution accumulator 18b that integrates in the vertical direction, and the other side width direction luminance distribution differential calculator that differentiates the widthwise luminance distribution obtained by the other side width direction luminance distribution accumulator 18b in the width direction. 19b and the other-end-direction luminance differential distribution centroid calculator 20b that calculates the centroid of the luminance distribution in the width direction from the luminance distribution differential value in the width direction obtained by the other-side width-direction luminance distribution derivative calculator 19b, The coordinate in the width direction of the other end 12b in the slit-shaped light image 11b on the object 1 to be measured is calculated. Further, the other-end height direction coordinate calculation unit 8b adds the luminance distribution in the height direction in the width direction in the other-side two-dimensional imaging result captured by the other-side two-dimensional imaging unit 4b. Luminance distribution integrator 21b and the other side height direction luminance distribution centroid calculator 22b for calculating the centroid of the luminance distribution in the height direction from the luminance distribution in the height direction obtained by the other side height direction luminance distribution integrator 21b. And a polarity converter 29b for converting the polarity of the center of gravity of the luminance distribution in the height direction obtained by the other side height direction luminance distribution centroid calculator 22b, and in the slit light image 11b on the object 1 to be measured. The height direction coordinate of the other end 12b is calculated.

<Operation of One End Width Direction Coordinate Calculation Unit 7a in the Width Measurement Device of Embodiment 2>
Next, the one end width direction coordinate calculation unit 7a in the width measurement apparatus of the second embodiment inputs, for example, one side two-dimensional imaging result 5a as shown in FIG. The operation of calculating the width direction coordinate -Wa of the one end portion 12a of the slit-shaped optical image 11a will be described with reference to FIGS. 4 (a), 4 (b), and 4 (d).

  For example, the one-side width direction luminance distribution accumulator 18a accumulates the luminance distribution in the width direction of the slit-shaped light image 11a included in the one-side two-dimensional imaging result 5a in the height direction.

  That is, the one-side width direction luminance distribution accumulator 18a sets (m, 1) from (m, 0) to (0,0) as the first line in the coordinates of the one-side two-dimensional imaging result 5a. ) To (0, 1), the horizontal axis direction as the second row, (m, i) to (0, i), the horizontal axis direction as the i row, and (m, n) to (0 , N) is integrated from the 0th to the nth row on the vertical axis, with the horizontal axis direction being the nth row.

  Accordingly, the results from (m, (luminance integration from 0 to n)) to (0, (luminance integration from 0 to n)) integrated by the one-side width direction luminance distribution integrator 18a are shown in FIG. ) As shown. FIG. 4A shows an example in which the luminance distribution in the width direction of the slit-shaped optical image 11a included in the one-side two-dimensional imaging result 5a is integrated in the height direction, as described above. In FIG. 4B, the horizontal axis represents the width direction coordinate, and the vertical axis represents the integrated value of the luminance level.

  Next, in the one-side width direction luminance distribution differential calculator 19a, the horizontal axis as shown in FIG. 4B is integrated by the one-side width direction luminance distribution integrator 18a, and the vertical axis is the luminance level. The integrated value is subjected to a differential calculation process in the width direction of the horizontal axis. FIG. 4D shows an example of the differential calculation result of the one-side width direction luminance distribution differential calculator 19a. In FIG. 4D, the horizontal axis is the width direction coordinate, and the vertical axis is the differential value of the luminance level integrated value.

  Next, the one-side width direction luminance differential distribution centroid calculator 20a calculates the centroid of the differential value in the width direction coordinate of the differential value of the luminance level integrated value calculated by the one-side width direction luminance distribution differential calculator 19a. Perform the operation.

  Here, the center-of-gravity calculation in the one-side width direction luminance differential distribution center-of-gravity calculator 20a is, for example, that i is an arbitrary coordinate from the horizontal axis m to 0, and the differential value of the luminance level integrated value at this arbitrary coordinate i is obtained. Assuming that Bi is the center-of-gravity coordinates at that time, Wa is calculated by the following equation (1).

Wa = (Σ (Bi × i)) / (ΣBi) (1)
<Operation of One End Height Direction Coordinate Calculation Unit 8a in the Width Measurement Device of Embodiment 2>
Next, the one-end height direction coordinate calculation unit 8a in the width measurement apparatus of the second embodiment inputs the one-side two-dimensional imaging result 5a as shown in FIG. The operation of calculating the height direction coordinate Ha of the one end portion 12a of the slit-shaped optical image 11a on the measured object 11 in the distribution integrator 21a and the one side height direction luminance distribution gravity center calculator 22a is shown in FIG. This will be described with reference to a) and FIG.

  For example, the one-side height direction luminance distribution integrator 21 a integrates the height-direction luminance distribution of the one end portion 28 a included in the one-side two-dimensional imaging result 5 a in the width direction of the measured object 11.

  That is, the one-side height direction luminance distribution integrator 21a sets (1, 0) to (0, n) in the coordinates of the one-side two-dimensional imaging result 5a, 0) to (1, n), the vertical axis direction as the second column, (j, 0) to (j, n), the vertical axis direction as the jth column, and (m, 0) to (m) m, n) are integrated from 0 to the m-th column on the horizontal axis, with the vertical axis being the n-th column.

  Accordingly, the result of ((luminance accumulation from 0 to m), 0) to ((luminance accumulation from 0 to m), n) is as shown in FIG. FIG. 4C is an example in which the luminance distribution of the one-side two-dimensional imaging result 5a shown in FIG. 4A is integrated in the width direction. In FIG. 4C, the vertical axis represents the height direction coordinate, and the horizontal axis represents the integrated value of the luminance level.

  Next, the one-side height direction luminance distribution centroid calculator 22a performs the centroid calculation of the luminance level integrated value in the horizontal axis direction and the height direction coordinate in the vertical axis direction.

  Here, the center of gravity calculation in the one-side height direction luminance distribution center-of-gravity calculator 22a is performed by using j as an arbitrary coordinate from the vertical axis n to 0, and Bj as a luminance level integrated value at the arbitrary coordinate j. When the barycentric coordinates of is assumed to be Ha, it is calculated by the following equation (2).

Ha = (Σ (Bj × j)) / (ΣBj) (2)
The other side width direction luminance distribution integrator 18b, the other side width direction luminance distribution differential calculator 19b, the other end direction luminance differential distribution centroid calculator 20b, and the other end height in the other end width direction coordinate calculation unit 7b. The other side height direction luminance distribution integrator 21b and the other side height direction luminance distribution centroid calculator 22b in the directional coordinate calculation unit 8b also input the other side two-dimensional imaging result 5b, and calculate one end width direction coordinate calculation. One side width direction luminance distribution integrator 18a, one side width direction luminance distribution differential calculator 19a, one side width direction luminance differential distribution centroid calculator 20a, and one side height direction coordinate calculation unit 8a in the part 7a. The calculation is performed in the same manner as the direction luminance distribution integrator 21a and the one-side height direction luminance distribution centroid calculator 22a.

  In the width measurement apparatus of the second embodiment, the polarity in the other-end height direction coordinate calculation unit 8b is different from the one-side two-dimensional imaging result 5a, as shown in FIG. 6, in the other-side two-dimensional imaging result 5b. FIG. 5E shows the polarity of the luminance distribution differential value luminance distribution fine value in the width direction, which is the calculation result of the other side width direction luminance distribution differential calculator 19b as shown in FIG. As shown, the polarity reversal calculation process is performed.

  Therefore, the width measuring apparatus according to the second embodiment can obtain the same effect as the width measuring apparatus according to the first embodiment, and further, as shown in FIG. Since the width direction coordinate calculation unit 7b includes the one side width direction luminance differential distribution centroid calculator 20a and the other side width direction luminance differential distribution centroid calculator 20b, respectively, the number of pixels in the width direction of the imaging result is higher than m. The width direction coordinate can be detected with resolution.

  Further, in the width measuring apparatus according to the second embodiment, as shown in FIG. 6, the one-side height direction luminance distribution is provided to the one end height direction coordinate calculation unit 8 a and the other end height direction coordinate calculation unit 8 b, respectively. Since the center-of-gravity calculator 22a and the other-side height direction luminance distribution center-of-gravity calculator 22b are provided, the height coordinate can be detected with a resolution higher than n in the number of pixels in the height direction of the imaging result.

  Therefore, according to the width measuring apparatus of the second embodiment, the width of the measured object 1 can be measured with higher accuracy than the width measuring apparatus of the first embodiment.

Embodiment 3 FIG.
FIG. 7 is a configuration diagram showing a configuration example of the entire width measuring apparatus according to the third embodiment of the present invention.

  As is apparent from FIG. 7, the width measurement device of the third embodiment is different from the configuration of the width measurement device of the first embodiment shown in FIG. 1 in that one side calculation region setting unit 6a and the other side calculation region setting unit. 6b is added.

  Here, the one-side calculation area setting unit 6a sets a partial area in the vicinity of the one end portion 12a of the slit-shaped optical image 11a on the measured object 1 imaged by the one-side two-dimensional imaging unit 4a as the calculation area. is there.

  The other-side calculation area setting unit 6b sets a partial area in the vicinity of the other end 12b of the slit-shaped optical image 11b on the measured object 1 imaged by the other-side two-dimensional imaging unit 4b as a calculation area. is there. Of the configurations of the width measuring apparatus according to the third embodiment shown in FIG. 7, the configurations other than the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b are the same as the width of the first embodiment shown in FIG. Since it is the same as the structure of a measuring apparatus, description is abbreviate | omitted.

  FIG. 8 is an explanatory diagram illustrating an example of a calculation area set by the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b in the width measuring apparatus according to the third embodiment.

  In FIG. 8A, reference numeral 13a denotes a calculation area set by the one-side calculation area setting unit 6a to the one-side two-dimensional imaging result 5a, and reference numeral 13b denotes the other-side calculation area setting unit 6b to the other-side two-dimensional imaging result 5b. This is the calculation area to be set.

  FIGS. 9A to 9D are explanatory diagrams for calculating the spatial position of the one end portion 28a of the measured object 1 in the width measuring apparatus according to the first embodiment shown in FIGS. 4A to 4D, respectively. It is explanatory drawing which shows an example which set the calculation area | region by this Embodiment 3 in explanatory drawing for space position calculation in FIG.

  9A to 9C, 16a is a width direction calculation area of the calculation area 13a set in the one-side two-dimensional imaging result 5a, and 17a is a calculation area 13a set in the one-side two-dimensional imaging result 5a. It is a height direction calculation area.

  That is, in the width measuring apparatus of the third embodiment, the one-side calculation area setting unit 6a calculates the width direction of the calculation area 13a in the one-side two-dimensional imaging result 5a as shown in FIGS. The region 16a is limited and output to the one-end width direction coordinate calculation unit 7a, while the one-side height direction coordinate calculation unit 8a is limited to the height direction calculation region 17a of the calculation region 13a in the one-side two-dimensional imaging result 5a. And the calculation area in the one end width direction coordinate calculation unit 7a and the one end height direction coordinate calculation unit 8a is limited.

  Although not shown, the other-side calculation area setting unit 6b is also configured with the other end part in which the calculation area in the width direction of the calculation area in the other-side two-dimensional imaging result 5b is limited in the same manner as the one-side calculation area setting unit 6a. While outputting to the width direction coordinate calculation part 7b, limiting the height direction calculation area of the calculation area in the other side two-dimensional imaging result, outputting to the other end part height direction coordinate calculation part 8b, and the other end part width direction The calculation area in the coordinate calculation part 7b and the other end part height direction coordinate calculation part 8b is limited.

  Therefore, the width measurement apparatus according to the third embodiment is further different from the configuration of the width measurement apparatus according to the first embodiment shown in FIG. 1 in the calculation area in the one-side two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b. Since the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b are provided, the same effects as those of the width measuring apparatus according to the first embodiment can be obtained, and the one-end width direction coordinate calculation unit 7a and It is possible to limit the calculation region of the one end height direction coordinate calculation unit 8a, and the calculation region of the other end portion width direction coordinate calculation unit 7b and the other end portion height direction coordinate calculation unit 8b. The width can be calculated at high speed.

  In particular, the object to be measured 11 moves in the transport direction, and the one-side two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b are obtained every time the measured object 11 is transported by a predetermined distance. When the speed is high, the processing of the one-side two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b needs to be processed at high speed and efficiently. In the width measuring apparatus according to the third embodiment, By setting the calculation area by the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b, the processing calculation area can be limited, and the one-side two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b. Each calculation processing time can be executed with high efficiency, which is effective when the object to be measured 11 is conveyed at high speed.

Embodiment 4 FIG.
The width measurement apparatus according to the fourth embodiment shows in detail the configuration of the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b in the width measurement apparatus according to the third embodiment.

  FIG. 10 is a configuration diagram showing a detailed configuration example of the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b in the configuration of the width measuring apparatus according to the fourth embodiment of the present invention.

  In FIG. 10, the one-side calculation area setting unit 6 a according to the fourth embodiment increases the luminance distribution in the width direction in the one-side two-dimensional imaging result 5 a that is an image captured by the one-side two-dimensional imaging unit 4 a. One side width direction luminance distribution accumulator 18a that integrates in the direction, and one end width direction coordinate calculation unit based on the width direction luminance distribution obtained by the one side width direction luminance distribution accumulator 18a The luminance distribution in the height direction in the image captured by the one-side two-dimensional imaging unit 4a is set by the one-side width direction calculation region setting unit 23a. Based on the one-side height direction luminance distribution integrator 21a integrated in the calculation region in the width direction and the one-side height direction luminance distribution integrated by the one-side height direction luminance distribution integrator 21a, And a side height direction calculation region setting unit 24a while set the direction of the calculation region relative to the one end portion height direction coordinate calculation unit 8a.

  Similarly, the other-side calculation area setting unit 6b adds the luminance distribution in the width direction to the height direction in the other-side two-dimensional imaging result 5b that is an image captured by the other-side two-dimensional imaging unit 4b. On the other hand, the width direction calculation region is set for the other end width direction coordinate calculation unit 7b based on the width direction luminance distribution obtained by the direction luminance distribution accumulator 18b and the other side width direction luminance distribution accumulator 18b. The luminance distribution in the height direction in the image captured by the side width direction calculation area setting unit 23b and the other side two-dimensional imaging unit 4b is calculated in the width direction calculation area set by the other side width direction calculation area setting unit 23b. Based on the other-side height direction luminance distribution integrator 21b to be integrated and the other-side height direction luminance distribution integrator 21b integrated with the other-side height direction luminance distribution, the other end of the height direction calculation region is determined. Part Comprising the the other side height direction calculation region setter 24b for setting to the direction coordinate computing unit 8b, a.

  In the width measuring apparatus according to the fourth embodiment, the configuration other than the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b is the same as that of the width measurement apparatus according to the third embodiment, and thus the description thereof is omitted. .

<Operation of Width Measuring Device of Embodiment 4>
Next, operations of the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b in the width measurement apparatus according to the fourth embodiment will be described.

  Here, the one-side calculation area setting unit 6a according to the fourth embodiment inputs the one-sided two-dimensional imaging result 5a shown in FIG. 9A, and one end 12a of the slit-shaped light image 11a on the object to be measured 11 is input. The operation for calculating the height direction calculation area including the width direction coordinate -Wa will be described with reference to FIGS. 9A, 9B, and 10. FIG. The operation in which the one-side calculation area setting unit 6a according to the fourth embodiment calculates the width-direction calculation area including the height direction coordinate Ha of the one end portion 12a of the slit-shaped light image 11a on the object to be measured 11 is shown in FIG. This will be described with reference to 9 (a), FIG. 9 (c), and FIG.

  First, in the one-side calculation area setting unit 6a, the one-side width direction luminance distribution integrator 18a changes (m, 0) to (0, 0) in the horizontal axis direction in the coordinates of the one-side two-dimensional imaging result 5a. As the first line, (m, 1) to (0, 1), the horizontal axis direction as the second line, (m, i) to (0, i), the horizontal axis direction as the i line, , (M, n) to (0, n), the horizontal axis direction is the n-th row, and the vertical axis from 0 to the n-th row is integrated.

  Therefore, the results from (m, (luminance accumulation from 0 to n)) to (0, (luminance accumulation from 0 to n)) are as shown in FIG. FIG. 9A is an example in which the luminance distribution of the one-side two-dimensional imaging result 5a is integrated in the height direction. In FIG. 9B, the horizontal axis represents the width direction coordinate, and the vertical axis represents the integrated value of the luminance level.

  Next, FIG. 9B shows an example in which the luminance distribution of the one-side two-dimensional imaging result 5a in FIG. 9A is integrated in the height direction. In FIG. 9B, the horizontal axis represents the width direction coordinate, and the vertical axis represents the integrated value of the luminance level.

  Here, an example of the width direction calculation area setting method of the one end part 28a of the measured object 1 in the width direction calculation area setting device 23a will be described.

  That is, the width direction calculation area setting unit 23a searches for the intersection coordinates that have exceeded a predetermined threshold SLw for the first time as SLwp when searching the horizontal axis direction of FIG. 9B from left to right. SLwp is calculated as the coordinate -Wa of the one end portion 12a of the slit-like light image 11a irradiated by the one-side slit-like light source 2a, that is, the one end portion 28a of the measured object 1.

  By using such a calculation method, the width direction calculation area setting unit 23a uses the width direction calculation area 16a (FIG. 9B) of the calculation area 13a as a predetermined area including the coordinates -Wa of the one end portion 28a of the object 1 to be measured. Set.

  For example, the width direction calculation area setting unit 23a sets the calculation area to include-(Wa + s) to-(Wa-t) including the coordinate -Wa, and sets the integration area in the height direction of the measured object 11 as an array. As shown in the following formula (3).

-(Wa + s) = u,-(Wa-t) = v (3)
For example, the width direction calculation area setting unit 23a obtains the maximum value of the luminance level obtained by integrating the luminance distribution of the one-side two-dimensional imaging result 5a in FIG. Thus, for example, 50% of the maximum value is set as the threshold value SLw.

  Next, the one-side height direction luminance distribution accumulator 21a includes the measured object 11 included in the one-side two-dimensional imaging result 5a in the width direction calculation region of the one end portion 28a set by the width direction calculation region setting unit 23a. Accumulate in the height direction. For example, the setting value of the calculation area is set to − (Wa + s) to − (Wa−t), and the integrated area in the height direction of the object to be measured 11 is set as the following expression (4).

-(Wa + s) = u,-(Wa-t) = v (4)
The one-side height direction luminance distribution integrator 21a sets (v, 0) to (v, n) and the vertical axis direction to the first column, from the first column to (u, 0) to (u, 0). n) is the (u−v) th column in the vertical axis direction, and (u−v) columns from v to u on the horizontal axis are integrated.

  Accordingly, the result of ((luminance integration from v to u), 0) to ((luminance integration from v to u), n) is as shown in FIG. 9 (c) described above. FIG. 9C shows an example in which the luminance distribution of the one-side two-dimensional imaging result 5a shown in FIG. 9A is integrated in the width direction. In FIG. 9C, the vertical axis represents the height direction coordinate, and the horizontal axis represents the integrated value of the luminance level.

  Next, the height direction calculation area setting unit 24a is, for example, a method of setting the width direction calculation area of the one end portion 28a of the object 1 to be measured. For example, the vertical axis in FIG. In the integrated value from − (Wa + s) to − (Wa−t), the luminance level is searched in the vertical axis direction of FIG. 9C, and the intersection point coordinates exceeding a predetermined threshold value SLh are defined as SLhp1. SLhp2 is calculated, and the average value of SLhp1 and SLhp2 is calculated as the height coordinate Ha of the one end portion 12a of the slit-shaped light image 11a irradiated by the one-side slit-shaped light source 2a.

  Then, the height direction calculation area setting unit 24a determines a predetermined area including the coordinate Ha of the one end portion 12a of the slit-shaped optical image 11a, that is, the one end portion 28a of the object 1 to be measured, as the height direction calculation area of the calculation area 13a. Set as 17a. That is, the height direction calculation area setting unit 24a sets, for example, (Ha−p) to (Ha + o) including the coordinate Ha as the height direction calculation area 17a of the calculation area 13a.

  Note that the height direction calculation area setting unit 24a obtains, for example, the maximum value of the luminance level obtained by integrating the luminance distribution of the one-side two-dimensional imaging result 5a in FIG. Thus, for example, 50% of the maximum value is set as the threshold value SLh.

  As described above, the one-side width direction luminance distribution integrator 18a, the width-direction calculation region setting unit 23a, the one-side height direction luminance distribution integrator 21a, and the height-direction calculation region setting unit 24a in the one-side calculation region setting unit 6a are as follows. The width direction calculation area 16a and the height direction calculation area 17a of the calculation area 13a are calculated as predetermined areas including the coordinates Ha of the one end 12a of the slit-shaped light image 11a, that is, the one end 28a of the object 1 to be measured. Each is output to one end width direction coordinate calculation unit 7a or one end height direction coordinate calculation unit 8a.

  The one-side width direction luminance distribution integrator 18ab, the width direction calculation region setting unit 23b, the height direction luminance distribution integrator 21b, and the height direction calculation region setting unit 24b in the other side calculation region setting unit 6b perform the same calculation. The predetermined area including the coordinate Hb of the other end 28b is calculated as the width direction calculation area 16b and the height direction calculation area 17b of the calculation area 13b, and the other end width direction coordinate calculator 7b or It outputs to the other end part height direction coordinate calculating part 8b8a.

  Therefore, the width measuring apparatus according to the fourth embodiment can be obtained in the same manner as the width measuring apparatus according to the third embodiment, and the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b are respectively provided on one side. The width direction luminance distribution integrator 18a, the other side width direction luminance distribution integrator 18b, the one side width direction calculation region setter 23a, the other side width direction calculation region setter 23b, the one side height direction luminance distribution integrator 21a, the other By providing the side height direction luminance distribution integrator 21b, the one side height direction calculation area setting unit 24a, and the other side height direction calculation area setting unit 24b, the calculation area can be limited, and as a result, the device under test is measured. The width of the object 1 can be measured at high speed.

  In particular, the measured object 11 moves in the conveyance direction, and the one-side two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b are obtained every predetermined distance from the measured object 11, so that the measured object 11 is conveyed. When the speed is high, the processing of the one-side two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b needs to be processed at high speed and efficiently. However, according to the width measuring apparatus according to the fourth embodiment, For example, by setting the calculation area and limiting the processing calculation area, the calculation processing time for each imaging result can be executed with high efficiency, and measurement is performed even when the measured object 11 is conveyed at high speed. be able to.

Embodiment 5 FIG.
The width measurement apparatus of the fifth embodiment shows in detail the configuration of the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b in the width measurement apparatus of the third embodiment.

  FIG. 11 is a configuration diagram showing a detailed configuration example of the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b in the configuration of the width measuring apparatus according to the fifth embodiment of the present invention.

  In FIG. 11, the one-side calculation area setting unit 6 a according to the fifth embodiment specifies a width-direction integration area based on the one-side two-dimensional result 5 a that is an image captured by the one-side two-dimensional imaging unit 4 a. Based on the integration region specified by the direction integration region specifying unit 25a and the integration region specified by the width direction integration region specifying unit 25a, the one-side height that integrates the luminance distribution in the height direction in the image captured by the one-side two-dimensional imaging unit 4a. Based on the luminance distribution in the height direction on one side accumulated by the height direction luminance distribution integrator 21a and the one side height direction luminance distribution integrator 21a, the height direction calculation region is calculated in one end height direction coordinate calculation. The luminance distribution in the width direction in the image captured by the one-side two-dimensional imaging unit 4a and the one-side height-direction calculation region setting unit 24a set for the unit 8a. Therefore, based on the one-side width direction luminance distribution integrator 18a integrated in the set height direction calculation region and the width direction luminance distribution obtained by the one-side width direction luminance distribution integrator 18a, the width direction calculation is performed. And a one-side width direction calculation region setting unit 23a that sets the region for the one end width direction coordinate calculation unit 7a.

  Similarly, the other-side calculation area setting unit 6b specifies a width-direction accumulation area designator 25a that designates a width-direction accumulation area based on the other-side two-dimensional result 5b that is an image captured by the other-side two-dimensional imaging unit 4b. And the other-side height-direction luminance distribution integrator that integrates the luminance distribution in the height direction in the image captured by the other-side two-dimensional imaging unit 4b based on the integration region specified by the width-direction integration region specifying unit 25a. Based on 21b and the other-side height direction luminance distribution integrator 21b, the height direction calculation region is set for the other-end height direction coordinate calculation unit 8b. The brightness distribution in the width direction in the image captured by the other side height direction calculation area setting unit 24b and the other side two-dimensional imaging unit 4b is set to the height set by the other side height direction calculation area setting unit 24b. Based on the other side width direction luminance distribution accumulator 18b and the other side width direction luminance distribution accumulator 18b, the width direction calculation area is set to the width of the other end. The other side width direction calculation area setting device 23b set for the direction coordinate calculation unit 7b is provided.

<Operation of Width Measuring Device of Embodiment 5>
Next, operations of the one-side calculation area setting unit 6a and the other-side calculation area setting unit 6b in the width measuring apparatus according to the fifth embodiment will be described.

  Here, the one-side calculation area setting unit 6a of the fifth embodiment inputs the one-sided two-dimensional imaging result 5a shown in FIG. 9A, and one end 12a of the slit-shaped light image 11a on the object to be measured 11 is input. The operation of calculating the height direction calculation area including the width direction coordinate -Wa will be described with reference to FIGS. 9A, 9B, and 11. FIG. The operation in which the one-side calculation area setting unit 6a according to the fifth embodiment calculates the width-direction calculation area including the height direction coordinate Ha of the one end part 12a of the slit-shaped optical image 11a on the measured object 11 is shown in FIG. This will be described with reference to 9 (a), FIG. 9 (c) and FIG.

  First, the width direction integration area designator 25a sets, for example, the setting value of the width direction designation calculation area from (Wa0 + x) to (Wa0 + y), and the integration area in the width direction of the object 11 to be measured is arranged as shown in the following equation (5). To do.

(Wa0 + x) = f, (Wa0 + y) = g (5)
Here, it is desirable that a slit-like image on the object to be measured 11 exists in the width direction designation region, and in general, x is desirably close to zero.

  The one-side height direction luminance distribution accumulator 21a, according to the width direction designation region of the width direction integration region designator 25a, has a height direction luminance distribution of the one end portion 28a of the measured object 11 included in the one-side two-dimensional imaging result 5a. Are integrated in the width direction. In other words, the one-side height direction luminance distribution integrator 21a sets (f, 0) to (f, n), the vertical axis direction as the first column, and from the column (g, 0) to (g, n). ), The (g−f) columns from the f to the g column on the horizontal axis are integrated with the vertical axis direction as the (g−f) column.

  Accordingly, the result of ((luminance integration from f to g), 0) to ((luminance integration from f to g), n) is as shown in FIG. FIG. 9C shows an example in which the luminance distribution of the one-side two-dimensional imaging result 5a of FIG. 9A is integrated in the width direction. In FIG. 9C, the vertical axis represents the height direction coordinate, and the horizontal axis represents the integrated value of the luminance level.

  Next, the height direction calculation area setting unit 24a is, for example, a method of setting the width direction calculation area of the one end portion 28a of the object 1 to be measured. For example, the vertical axis in FIG. As the luminance level, in the integrated value from (Wa0 + x) to (Wa0 + y), a search is performed in the vertical axis direction of FIG. And SLhp2 are calculated as the height coordinate Ha of the one end portion 12a of the slit-shaped light image 11a irradiated by the one-side slit-shaped light source 2a. Then, the height direction calculation area setting unit 24a calculates the width direction calculation area 16a and the height direction calculation area 17a of the calculation area 13a as predetermined areas including the coordinates Ha of the one end portion 28a of the measured object 1. , And output to one end height direction coordinate calculation unit 8a and one side width direction luminance distribution integrator 18a.

  For example, the height direction calculation area setting unit 24a outputs (Ha−p) to (Ha + o) including the coordinate Ha to the one end height direction coordinate calculation unit 8a and the one side width direction luminance distribution integrator 18a. And set.

  Note that the threshold SLh is set by, for example, obtaining the maximum value of the luminance level obtained by integrating the luminance distribution of the one-dimensional two-dimensional imaging result 5a in FIG. Set as threshold SLh.

  Next, the one-side width direction luminance distribution integrator 18a, for example, changes the setting value of the height direction calculation area from (Ha−p) to (Ha + o) in the calculation area set by the height direction calculation area setting unit 24a. And the integrated region in the height direction of the measured object 11 is an array of the following expression (6).

(Ha−p) = q, (Ha + o) = r (6)
Then, the one-side width direction luminance distribution accumulator 18a performs the luminance in the width direction of the measured object 11 included in the one-side two-dimensional imaging result 5a according to the calculation region setting value set by the height direction calculation region setting unit 24a. Accumulate the distribution in the height direction. That is, the one-side width direction luminance distribution accumulator 18a, for example, from (m, q) to (0, q) and the vertical axis direction as the first row, from this first row to (m, r) ( 0, r), the (rq) rows from the q on the horizontal axis to the r-th column are integrated, with the vertical axis direction being the (rq) row.

  Accordingly, the result from (m, (luminance accumulation from q to r)) to (0, (luminance accumulation from q to r)) is as shown in FIG. FIG. 9C shows an example in which the luminance distribution of the one-side two-dimensional imaging result 5a of FIG. 9A is integrated in the width direction. In FIG. 9C, the vertical axis represents the height direction coordinate, and the horizontal axis represents the integrated value of the luminance level.

  Next, FIG. 9B shows an example in which the luminance distribution of the one-side two-dimensional imaging result 5a in FIG. 9A is integrated in the height direction. In FIG. 9B, the horizontal axis represents the width direction coordinate, and the vertical axis represents the integrated value of the luminance level.

  Next, the one-side width direction calculation area setting unit 23a searches the horizontal axis direction in FIG. 9B from the left to the right as an example of the width direction calculation area setting method of the one end portion 28a of the object 1 to be measured. The intersection coordinates that have exceeded a predetermined threshold value SLw for the first time are set as SLwp, and this SLwp is calculated as the coordinate -Wa of the one end portion 12a of the slit-shaped light image 11a irradiated by the one-side slit-shaped light source 2a. .

  Here, the threshold SLw setting method in the one-side width direction calculation area setting unit 23a is, for example, the maximum value of the luminance level obtained by integrating the luminance distribution of the one-side two-dimensional imaging result 5a in FIG. 4B in the height direction. For example, 50% of the maximum value is set as the threshold value SLw.

  The one-side width direction calculation area setting unit 23a uses the above calculation method to determine the width direction calculation area 16a and the height direction of the calculation area 13a as predetermined areas including the coordinates -Wa of the one end portion 28a of the object 1 to be measured. The calculation area 17a is set.

  For example, the one-side width direction calculation area setting unit 23a changes the calculation area 13a from − (Wa + s) to − (Wa−t) including the coordinate −Wa and arranges the integration area in the height direction of the object to be measured 11. As the following formula (7).

-(Wa + s) = u,-(Wa-t) = v (7)
In addition, the width direction integration region designator 25b, the other side height direction luminance distribution integrator 21b, the height direction calculation region setting device 24b, the other side width direction luminance distribution integrator 18b, and the other side in the other side calculation region setting unit 6b. The width direction calculation area setting unit 23b also includes a width direction integration area specifying unit 25a, one side height direction luminance distribution integrator 21a, a height direction calculation area setting unit 24a, and one side width direction luminance in the one side calculation area setting unit 6a. Similar to the distribution integrator 18a and the one-side width direction calculation region setting unit 23a, the other-side two-dimensional imaging result 5b is input to perform calculation.

  Therefore, the width measuring apparatus according to the fifth embodiment can obtain the same effect as the width measuring apparatus according to the third embodiment, and the width of the one side calculation area setting unit 6a and the other side calculation area setting unit 6b is Direction integration region designator 25a, one side height direction luminance distribution integrator 21a, height direction calculation region setter 24a, one side width direction luminance distribution integrator 18a, one side width direction calculation region setter 23a, width direction integration By providing the area designator 25b, the other side height direction luminance distribution integrator 21b, the height direction calculation area setting unit 24b, the other side width direction luminance distribution integrator 18b, and the other side width direction calculation area setting unit 23b. The area can be limited, and the width of the measured object 1 can be measured at high speed by limiting the calculation area.

  In addition, since the width measurement apparatus according to Embodiment 5 can improve the setting accuracy of the calculation area, the calculation area can be more accurately limited to a narrow area.

  Further, in the width measuring apparatus according to the fifth embodiment, the measured object 11 moves in the transport direction, and the measured object 11 is transported by the one-side two-dimensional imaging result 5a and the other-side two-dimensional imaging result 5b every time a predetermined distance is transported. Is obtained. Therefore, when the conveyance speed of the object to be measured 11 is high, it is necessary to process and calculate the processing of the one-side two-dimensional imaging result 5a at high speed and efficiently.

  Further, the width measuring apparatus according to the fifth embodiment can execute the calculation processing time for each imaging result with high efficiency by limiting the processing calculation area by setting the calculation area. Measurement can also be performed when the measurement object 11 is conveyed at high speed.

Embodiment 6 FIG.
FIG. 12 is a configuration diagram showing a configuration example of the entire width measuring apparatus according to the sixth embodiment of the present invention.

  As shown in FIG. 12, the width measurement apparatus of the sixth embodiment is different from the width measurement apparatus of the first embodiment shown in FIG. 1 in that one end width direction coordinate calculation unit 7a and one end height direction coordinate calculation unit 8a. Is provided with a coordinate converter 15a for converting the coordinates of the one-side two-dimensional imaging result 5a, and the other configuration is the same as that of the width measuring apparatus according to the first embodiment shown in FIG. The same. Therefore, the same components as those of the width measuring apparatus according to the first embodiment shown in FIG.

  FIGS. 13A and 13B show examples of the coordinate conversion result of the one-side two-dimensional image result 5a converted by the coordinate converter 15a of the sixth embodiment, and the other side where the coordinate conversion is not performed. It is explanatory drawing which shows the example of the two-dimensional image result 5b.

  That is, the example of the one-sided two-dimensional image result 5a not subjected to the coordinate conversion shown in FIG. 3A and the one-sided two-dimensional image result 5a transformed by the coordinate converter 15a shown in FIG. As is clear from comparison with the example, the polarity of the coordinate in the width direction of the one-side two-dimensional image result 5a is switched by the coordinate converter 15a. Note that a coordinate converter 15a for converting the coordinates of the other-side two-dimensional imaging result 5b is not provided in the preceding stage of the other-end width direction coordinate calculation unit 7b and the other-end height direction coordinate calculation unit 8b. The other-side two-dimensional image result 5b shown in (b) is the same as FIG. 3 (b).

  In this way, when the coordinate converter 15a is provided, an example of the coordinate conversion result of the one-sided two-dimensional image result 5a subjected to coordinate conversion shown in FIGS. 13A and 13B, and the other where the coordinate conversion is not performed. The polarity is the same as that of the example of the side two-dimensional image result 5b, and other than that, it is the same as that of the width measuring apparatus of the first embodiment.

  Therefore, the same effect as that of the width measuring apparatus of the first embodiment can be obtained by the width measuring apparatus of the sixth embodiment.

Embodiment 7 FIG.
FIG. 14 is a configuration diagram showing a configuration example of the entire width measuring apparatus according to the seventh embodiment of the present invention.

  In the width measuring apparatus according to the sixth embodiment shown in FIG. 13, the coordinate conversion for converting the coordinates of the one-side two-dimensional imaging result 5a is performed upstream of the one end width direction coordinate calculation unit 7a and the one end height direction coordinate calculation unit 8a. In the width measuring apparatus of the seventh embodiment shown in FIG. 14, the coordinate converter 15 a is not provided. However, the device 15 a is provided to reverse the polarity of the coordinate in the width direction of the one-side two-dimensional image result 5 a. As shown in FIG. 14, the attachment part 14a of the one-side two-dimensional imaging unit 4a and the attachment part 14b of the other-side two-dimensional imaging part 4b are attached upside down, and the one-side two-dimensional image result 5a Reverse the polarity of the width coordinate.

  In this way, the width direction coordinates of the one-side two-dimensional image result 5a and the other-side two-dimensional image result 5b can be obtained by reversing the attachment positions of the one-side two-dimensional image pickup unit 4a and the other-side two-dimensional image pickup unit 4b. The polarities of the width direction coordinates are the same as in the sixth embodiment, and the other is the same as in the width measuring apparatus in the first embodiment.

  Therefore, the width measuring apparatus according to the seventh embodiment can obtain the same effects as those of the width measuring apparatus according to the first embodiment, similarly to the width measuring apparatus according to the sixth embodiment.

  As mentioned above, although some embodiment of this invention was described, these embodiment is shown as an example and does not limit the scope of the invention. The present invention can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Object to be measured 2a One side slit-like light source 2b The other side slit-like light source 3a One side imaging area 3b The other side imaging area 4a One side two-dimensional imaging part 4b The other side two-dimensional imaging part 5a One side two-dimensional imaging result 5b Other side two-dimensional imaging result 6a One side calculation region setting unit 6b Other side calculation region setting unit 7a One end width direction coordinate calculation unit 7b Other end width direction coordinate calculation unit 8a One end height direction coordinate calculation unit 8b Other end Height direction coordinate calculation unit 9a One end position calculation unit 9b Other end position calculation unit 10 Width calculation unit 18a One side width direction luminance distribution accumulator 18b The other side width direction luminance distribution accumulator 19a One side width direction luminance distribution differential calculation 19b The other side width direction luminance differential distribution centroid calculator 20a The other side width direction luminance differential distribution centroid calculator 21a The other side width direction luminance differential distribution centroid calculator 21a One side height direction Direction luminance distribution accumulator 21b The other side height direction luminance distribution accumulator 22a One side height direction luminance distribution centroid calculator 22b The other side height direction luminance distribution centroid calculator 23a One side width direction calculation area setting unit 23b The other side width Direction calculation area setter 24a One side height direction calculation area setter 24b The other side height direction calculation area setter 25a One side width direction integration area designator 25b The other side width direction integration area designator 29b Polarity reversal calculator

Claims (7)

  1. A one-side slit-like light source that is arranged outside the upper side of the object to be measured and irradiates one end in the width direction of the object to be measured with slit-like light parallel to the width direction of the object to be measured;
    A one-sided two-dimensional imaging unit that is disposed above the object to be measured and images the slit-like light irradiated on the surface of the object to be measured by the one-side slit-like light source;
    One end width direction coordinate calculation unit for calculating the width direction coordinate of the one side end in the image of the slit-like light on the object to be measured imaged by the one side two-dimensional imaging unit;
    One end height direction coordinate calculation unit for calculating the height direction coordinate of the one side end in the image of the slit-like light on the object to be measured imaged by the one side two-dimensional imaging unit;
    Based on the width direction coordinate of the one side end calculated by the one end width direction coordinate calculation unit and the height direction coordinate of the one side end calculated by the one end height direction coordinate calculation unit, One end position calculation unit for calculating the spatial position of one side end,
    The slit-shaped light that is arranged outside the upper side of the object to be measured and on the opposite side of the width direction of the object to be measured with respect to the one-side slit light source is parallel to the width direction of the object to be measured. The other-side slit-like light source that irradiates the other side end that is opposite to the one side end in the width direction of the measurement object;
    The other-side two-dimensional imaging unit that images the slit-shaped light that is disposed above the measured object and is irradiated on the surface of the measured object by the other-side slit-shaped light source;
    The other end width direction coordinate calculation unit for calculating the width direction coordinate of the other end in the image of the slit light on the measured object imaged by the other side two-dimensional imaging unit;
    The other-end height direction coordinate calculation unit that calculates the height direction coordinate of the other-side end portion in the image of the slit-shaped light on the object to be measured imaged by the other-side two-dimensional imaging unit;
    Based on the width direction coordinate of the other side end calculated by the other end width direction coordinate calculation unit and the height direction coordinate of the other side end calculated by the other end height direction coordinate calculation unit. , The other end position calculation unit for calculating the spatial position of the other end,
    The width of the object to be measured is calculated based on the spatial position of the one side end calculated by the one end position calculating unit and the spatial position of the other end calculated by the other end position calculating unit. A width calculator to
    A width measuring device comprising:
  2. The width measuring device according to claim 1,
    The one end width direction coordinate calculation unit is respectively
    In the one-side two-dimensional imaging result imaged by the one-side two-dimensional imaging unit, a one-side width direction luminance distribution integrator that integrates the luminance distribution in the width direction in the height direction;
    A one-side width direction luminance distribution differential calculator for differentiating the width-wise luminance distribution obtained by the one-side width direction luminance distribution accumulator in the width direction;
    A one-side width direction luminance differential distribution centroid calculator that calculates the centroid of the width direction luminance distribution from the width direction luminance distribution differential value obtained by the one side width direction luminance distribution derivative calculator;
    Calculate the width direction coordinate of the one side end in the slit-shaped light image on the object to be measured,
    The one end height direction coordinate calculation unit is
    In the other-side two-dimensional imaging result imaged by the one-side two-dimensional imaging unit, a one-side height direction luminance distribution integrator that integrates the luminance distribution in the height direction in the width direction;
    A one-side height direction luminance distribution centroid calculator that calculates the centroid of the luminance distribution in the height direction from the luminance distribution in the height direction obtained by the one-side height direction luminance distribution integrator,
    While calculating the height direction coordinate of the one side end in the slit-like light image on the object to be measured,
    The other end width direction coordinate calculation unit is
    In the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit, the other-side width direction luminance distribution integrator that integrates the luminance distribution in the width direction in the height direction;
    The other side width direction luminance distribution differential calculator for differentiating the width direction luminance distribution obtained by the other side width direction luminance distribution integrator in the width direction;
    The other side width direction luminance differential distribution centroid calculator that calculates the centroid of the width direction luminance distribution from the width direction luminance distribution differential value obtained by the other side width direction luminance distribution differential calculator,
    Compute the width direction coordinate of the other side end in the slit light image on the object to be measured,
    The other end height direction coordinate calculation unit is
    In the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit, the other-side height direction luminance distribution integrator that integrates the luminance distribution in the height direction in the width direction;
    The other side one side height direction luminance distribution centroid calculator for calculating the centroid of the height direction luminance distribution from the height direction luminance distribution obtained by the other side height direction luminance distribution integrator,
    Calculating the height direction coordinate of the other side end in the slit-shaped light image on the object to be measured;
    A width measuring device characterized by that.
  3. In the width measuring device according to claim 1 or 2,
    further,
    A one-side calculation region setting unit that sets a partial region in the vicinity of the end of the slit-shaped light image on the object to be measured imaged by the one-side two-dimensional imaging unit;
    An other-side calculation area setting unit that sets a partial area in the vicinity of the end of the slit-shaped light image on the object to be measured imaged by the other-side two-dimensional imaging unit;
    A width measuring device comprising:
  4. In the width measuring device according to claim 3,
    The one-side calculation area setting unit is
    In the one-side two-dimensional imaging result imaged by the one-side two-dimensional imaging unit, a one-side width direction luminance distribution integrator that integrates the luminance distribution in the width direction in the height direction;
    A one-side width direction calculation region setting unit that sets a calculation region in the width direction for the one-end width direction coordinate calculation unit based on the luminance distribution in the width direction obtained by the one-side width direction luminance distribution integrator. When,
    The one-side high that integrates the luminance distribution in the height direction in the one-side two-dimensional imaging result imaged by the one-side two-dimensional imaging unit in the calculation region in the width direction set by the one-side width direction calculation region setting device. A vertical luminance distribution integrator,
    One side for setting a calculation area in the height direction for the one-end height direction coordinate calculation unit based on the luminance distribution in the height direction on one side accumulated by the one-side height direction luminance distribution accumulator A height direction calculation area setting device,
    The other side calculation area setting unit is
    In the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit, the other-side width direction luminance distribution integrator that integrates the luminance distribution in the width direction in the height direction;
    The other side width direction calculation area setting for setting the width direction calculation area to the other end width direction coordinate calculation section based on the width direction luminance distribution obtained by the other side width direction luminance distribution integrator. And
    The other-side height that integrates the luminance distribution in the height direction in the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit in the calculation area in the width direction set by the other-side width direction calculation area setting device. A vertical luminance distribution integrator,
    On the other hand, a calculation area in the height direction is set for the coordinate calculation unit in the height direction on the other side based on the luminance distribution in the height direction on the other side accumulated by the luminance distribution integrator on the other side. A side height direction calculation area setting device,
    A width measuring device characterized by that.
  5. In the width measuring device according to claim 3,
    The one-side calculation area setting device is
    A one-side width direction integration region designator that designates an integration region in the width direction based on the one-side two-dimensional imaging result imaged by the one-side two-dimensional imaging unit;
    One-side height that integrates the luminance distribution in the height direction in the one-sided two-dimensional imaging result imaged by the one-sided two-dimensional imaging unit based on the integrating region specified by the one-side width direction integrating region designator Direction luminance distribution integrator,
    One side for setting a calculation area in the height direction for the one-end height direction coordinate calculation unit based on the luminance distribution in the height direction on one side accumulated by the one-side height direction luminance distribution accumulator A height direction calculation area setting device,
    One side that integrates the luminance distribution in the width direction in the one-sided two-dimensional imaging result imaged by the one-sided two-dimensional imaging unit in the calculation area in the height direction set by the one-side height direction calculation area setting device A width direction luminance distribution integrator;
    A one-side width direction calculation region setting unit that sets a calculation region in the width direction for the one-end width direction coordinate calculation unit based on the luminance distribution in the width direction obtained by the one-side width direction luminance distribution integrator. While comprising
    The other side calculation area setting device is:
    An other-side width direction integration region designator that designates an integration region in the width direction based on the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit;
    The other side height that integrates the luminance distribution in the height direction in the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit based on the integration region specified by the other-side width direction integration region designator Direction luminance distribution integrator,
    On the other hand, a calculation area in the height direction is set for the coordinate calculation unit in the height direction on the other side based on the luminance distribution in the height direction on the other side accumulated by the luminance distribution integrator on the other side. Side height direction calculation area setting device,
    The other side that integrates the luminance distribution in the width direction in the other-side two-dimensional imaging result imaged by the other-side two-dimensional imaging unit in the calculation area in the height direction set by the other-side height direction calculation area setting device. A width direction luminance distribution integrator;
    The other side width direction calculation area setting for setting the width direction calculation area to the other end width direction coordinate calculation section based on the width direction luminance distribution obtained by the other side width direction luminance distribution integrator. Equipped with
    A width measuring device characterized by that.
  6. In the width measuring device according to any one of claims 1 to 5,
    further,
    In the subsequent stage of either the one-side two-dimensional imaging unit or the other-side two-dimensional imaging unit,
    A coordinate converter that converts a width direction coordinate of the image of the slit-shaped light imaged by the one-side two-dimensional imaging unit or the other-side two-dimensional imaging unit;
    A width measuring device characterized by that.
  7. In the width measuring device according to any one of claims 1 to 5,
    The one side two-dimensional imaging unit and the other side two-dimensional imaging unit are mounted upside down.
    A width measuring device characterized by that.
JP2011147140A 2011-07-01 2011-07-01 Width measuring apparatus Pending JP2013015361A (en)

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Application Number Priority Date Filing Date Title
JP2011147140A JP2013015361A (en) 2011-07-01 2011-07-01 Width measuring apparatus

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02254303A (en) * 1989-03-29 1990-10-15 Mitsubishi Heavy Ind Ltd Detector for strip-shaped material
JPH0560518A (en) * 1991-09-05 1993-03-09 Matsushita Electric Ind Co Ltd Three-dimensional coordinate measurement device
JPH06307816A (en) * 1993-04-21 1994-11-04 Anritsu Corp Non-contact plate width measuring device
JP2001012920A (en) * 1999-07-01 2001-01-19 Nippon Steel Corp Shape detector
JP2002022413A (en) * 2000-07-10 2002-01-23 Toyota Motor Corp Apparatus and method of measuring rugged form
JP2004170363A (en) * 2002-11-22 2004-06-17 Sumitomo Metal Ind Ltd Edge position measuring method of long material and shape measuring method using the same, and edge position measuring device and shape measuring device using the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02254303A (en) * 1989-03-29 1990-10-15 Mitsubishi Heavy Ind Ltd Detector for strip-shaped material
JPH0560518A (en) * 1991-09-05 1993-03-09 Matsushita Electric Ind Co Ltd Three-dimensional coordinate measurement device
JPH06307816A (en) * 1993-04-21 1994-11-04 Anritsu Corp Non-contact plate width measuring device
JP2001012920A (en) * 1999-07-01 2001-01-19 Nippon Steel Corp Shape detector
JP2002022413A (en) * 2000-07-10 2002-01-23 Toyota Motor Corp Apparatus and method of measuring rugged form
JP2004170363A (en) * 2002-11-22 2004-06-17 Sumitomo Metal Ind Ltd Edge position measuring method of long material and shape measuring method using the same, and edge position measuring device and shape measuring device using the same

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