JP2012508456A - 微小位置決めシステムを備える急速熱処理チャンバ - Google Patents
微小位置決めシステムを備える急速熱処理チャンバ Download PDFInfo
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Abstract
Description
Claims (18)
- 平面基板を処理する急速熱処理装置であって、
熱源を含むチャンバと、
前記チャンバ内の前記基板を第1の位置で保持する第1の基板支持体と、
熱処理中に前記基板を保持し、前記基板を前記熱源へ近づけたり遠ざけたりする方向に可動である、第2の位置の第2の基板支持体と、
前記第2の基板支持体に対する前記基板の位置を感知し、アクチュエータと通信して前記第2の基板支持体の軸方向の位置に対する前記基板の位置を変化させるセンサとを備える装置。 - 前記センサが光検出器を含む、請求項1に記載の装置。
- 前記センサが、
前記基板の表面上へ光ビームを誘導する光源と、
前記基板から反射された光の強度を監視するように位置決めされた検出器とを備え、前記検出器と前記基板の一方または両方が、前記検出器と前記基板の間の相対的な運動を提供するように可動である、請求項2に記載の装置。 - 前記センサが、前記検出器と通信する電子制御装置をさらに備え、前記制御装置が、前記検出器によって検出された反射から複数の測定値を生成し、前記測定値のうちどれが前記基板の縁部に対応するかを判定することを含めて、反射が発生した前記基板表面上の場所を計算する、請求項3に記載の装置。
- 前記センサが、前記第2の基板支持体によって前記基板上に、または前記基板によって前記第2の基板支持体上に投じられる影を評価して、前記第2の基板支持体の位置に対する前記基板の位置を検出する、請求項2に記載の装置。
- 前記センサが、カメラと、照射システムと、前記第2の基板支持体および基板の中心を検出する視覚画像分析システムとを備える、請求項2に記載の装置。
- チャンバの蓋および少なくとも2つの位置センサをさらに備え、前記少なくとも2つの位置センサが前記チャンバの蓋の上に位置し、かつ、反射する光ビームを任意選択で前記少なくとも2つのセンサから前記チャンバの蓋を通って伝送することができる、請求項2に記載の装置。
- 前記基板を複数の軸方向に動かすように前記基板に隣接して位置決めされた液体または気体噴射をさらに備える、請求項1に記載の装置。
- 前記基板と同じ平面に向けた複数の位置決め棒をさらに備え、前記位置決め棒が、前記基板の縁部に接触して前記基板を前記基板の平面内で複数の方向に押すように適合されている、請求項1に記載の装置。
- 前記第2の基板支持体に結合された磁気的に浮上させたロータと、前記磁気的に浮上させたロータに結合された磁界生成デバイスとをさらに備え、前記磁界が、前記浮上させたロータを前記基板の平面内で複数の軸方向に動かすように変更可能である、請求項1に記載の装置。
- 前記センサから位置信号を取得し、1つまたは複数の電磁石へ信号を送って前記基板に対する前記第2の基板支持体の位置を調整するシステム制御装置をさらに備える、請求項10に記載の装置。
- 第2の基板支持体が、前記基板支持体の内側表面上に、前記基板上の対応する位置合せマークと位置合せすべき位置合せマークを含む縁部リングを備える、請求項1に記載の装置。
- 基板を処理する方法であって、
縁部を有する平面基板を処理チャンバ内の中間基板支持体上へ搬送するステップと、
前記基板の前記縁部の場所を判定するステップと、
第2の基板支持体に対する前記基板の位置を、前記基板と前記第2の基板支持体が実質上中心で位置決めされた向きになるように調整するステップと、
前記基板を前記第2の基板支持体へ搬送するステップと
前記基板を熱処理するステップとを含む、方法。 - 前記基板が、ロボットブレード上で前記処理チャンバ内へ搬送され、前記中間基板支持体がリフトピンを備え、前記第2の基板支持体に対する前記基板の相対的な位置が、前記基板を前記リフトピン上へ搬送する前に調整される、請求項13に記載の方法。
- 前記第2の基板支持体に対する前記基板の相対的な位置が、前記基板の場所、前記第2の基板支持体の場所、または前記中間基板支持体の場所の1つまたは複数を変化させることによって調整される、請求項13に記載の方法。
- 1つのセンサからの反射する光ビームを前記基板と前記基板支持体の間の空間を通って伝送して、前記基板を前記第2の基板支持体の中心位置上へ配置するシータ調整値を判定するステップをさらに含む、請求項13に記載の方法。
- 前記基板支持体に隣接する複数の磁石と通信する制御システムと通信する1つまたは複数のセンサが、センサによって取得された位置に応答して、前記基板支持体に隣接して1つまたは複数の磁界を印加することによって、前記第2の基板支持体の位置を調整する、請求項16に記載の方法。
- 前記シータ調整値が、前記第2の基板支持体と前記基板の間の少なくとも2つの位置XおよびYからの距離を測定することによって判定され、かつ、前記シータ調整のための前記少なくとも2つの位置XおよびYからの前記距離を判定するために、少なくとも2つのセンサが使用される、請求項17に記載の方法。
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US11200808P | 2008-11-06 | 2008-11-06 | |
US11201508P | 2008-11-06 | 2008-11-06 | |
US61/112,008 | 2008-11-06 | ||
US61/112,015 | 2008-11-06 | ||
US12/611,958 | 2009-11-04 | ||
US12/611,958 US8314371B2 (en) | 2008-11-06 | 2009-11-04 | Rapid thermal processing chamber with micro-positioning system |
PCT/US2009/063394 WO2010054076A2 (en) | 2008-11-06 | 2009-11-05 | Rapid thermal processing chamber with micro-positioning system |
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JP2012508456A true JP2012508456A (ja) | 2012-04-05 |
JP2012508456A5 JP2012508456A5 (ja) | 2012-12-20 |
JP6079980B2 JP6079980B2 (ja) | 2017-02-15 |
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US (4) | US8314371B2 (ja) |
JP (1) | JP6079980B2 (ja) |
KR (3) | KR101831360B1 (ja) |
CN (1) | CN102210017B (ja) |
DE (1) | DE112009002691T5 (ja) |
WO (1) | WO2010054076A2 (ja) |
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WO2023074876A1 (ja) * | 2021-11-01 | 2023-05-04 | 東京エレクトロン株式会社 | 測定方法及び測定システム |
JP7544850B2 (ja) | 2020-04-17 | 2024-09-03 | アプライド マテリアルズ インコーポレイテッド | 熱処理チャンバのエッジリング距離を測定する装置、システム、及び方法 |
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US20130043632A1 (en) | 2013-02-21 |
KR101613527B1 (ko) | 2016-04-19 |
US8900889B2 (en) | 2014-12-02 |
KR20110084524A (ko) | 2011-07-25 |
KR101958823B1 (ko) | 2019-03-15 |
WO2010054076A3 (en) | 2010-07-29 |
CN102210017A (zh) | 2011-10-05 |
KR20160030329A (ko) | 2016-03-16 |
US20150050118A1 (en) | 2015-02-19 |
KR101831360B1 (ko) | 2018-02-22 |
US8314371B2 (en) | 2012-11-20 |
JP6079980B2 (ja) | 2017-02-15 |
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WO2010054076A2 (en) | 2010-05-14 |
US20130043235A1 (en) | 2013-02-21 |
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US9390950B2 (en) | 2016-07-12 |
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