JP2012250417A - Adhesive, liquid discharge head, method for manufacturing liquid discharge head and liquid discharge device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adhesive for manufacturing a highly-reliable liquid droplet discharge head superior in solvent resistance and flexibility, and ensuring high-quality printing over a long period of time, and to provide a liquid droplet discharge head manufactured using the adhesive, and a method for manufacturing a liquid droplet discharge head using the adhesive, and a liquid droplet discharge device with the liquid droplet discharge head.SOLUTION: An ink jet recording head 1 includes a substrate 20, a nozzle plate 10, a vibration plate composed of a vibration film 30 and a support plate 40, and a piezoelectric element 50. The substrate 20 and the nozzle plate 10, the substrate 20 and the vibration film 30, and the vibration film 30 and the support plate 40 are bonded to each other through adhesive layers 15, 25, 35 formed of the adhesive, respectively. The adhesive mainly contains a copolymer of alkene and alkenylene dicarboxylic acid.

Description

  The present invention relates to an adhesive, a droplet discharge head, a method for manufacturing a droplet discharge head, and a droplet discharge apparatus.

For example, a droplet discharge device such as an ink jet printer is provided with a droplet discharge head for discharging droplets. As such a droplet discharge head, for example, an ink chamber (cavity) that communicates with a nozzle that discharges ink as droplets and stores ink, and a piezoelectric element for driving that deforms the wall surface of the ink chamber, What is provided with is known.
In such a droplet discharge head, a part of the ink chamber (vibrating plate) is displaced by expanding and contracting the driving piezoelectric element. Thereby, the volume of the ink chamber is changed and ink droplets are ejected from the nozzles.

By the way, this droplet discharge head has a nozzle plate on which nozzles are formed, a substrate on which ink chambers are formed, a vibration plate that changes the volume of the ink chambers, and a piezoelectric element that vibrates the vibration plate due to strain. They are assembled by joining them together.
Further, the diaphragm has a vibration film that vibrates due to distortion of the piezoelectric element and a support plate that propagates the distortion of the piezoelectric element to the vibration film, and is assembled by joining them together (for example, , See Patent Document 1).

For assembling (joining) such various members, various adhesives such as epoxy adhesives such as bisphenol and novolac, and urethane adhesives are used.
Here, for example, in the bonding between the ink chamber and the vibration plate or the bonding between the ink chamber and the nozzle plate, the adhesive is in contact with the ink stored in the ink chamber for a long time. It is required to have resistance (solvent resistance). Therefore, urethane-based adhesives generally have low solvent resistance and are easily swelled by contact with a solvent, and thus are not suitable for joining such members.

In addition, for example, in joining the vibration film and the support plate, it is necessary to propagate the distortion of the piezoelectric element to the vibration film, so that excellent flexibility is required. Therefore, epoxy adhesives such as bisphenol and novolac are generally highly rigid adhesives and are not suitable for joining such members.
Furthermore, in joining the various members, it is necessary to assemble the droplet discharge head without warping. Therefore, when using an epoxy adhesive such as bisphenol or novolac with high rigidity, it is necessary to cure the adhesive at a relatively low temperature in order to reduce residual stress. There is a problem that it takes a long time to complete the curing.
From the above, the adhesive used for assembling the droplet discharge head is required to be excellent in both solvent resistance and flexibility. However, epoxy adhesives such as bisphenol and novolac, urethane The system adhesive does not have both of these characteristics. Therefore, it is the actual situation that the types of adhesives are changed corresponding to the joining of the members.

JP-A-4-21448

  An object of the present invention is to use an adhesive capable of manufacturing in a short time a highly reliable droplet discharge head having excellent solvent resistance and flexibility and capable of high-quality printing over a long period of time. It is an object of the present invention to provide a liquid drop discharge head, a method of manufacturing a liquid drop discharge head that is manufactured in a short time using such an adhesive, and a liquid drop discharge apparatus including such a liquid drop discharge head.

Such an object is achieved by the present invention described below.
The adhesive of the present invention includes a substrate on which a discharge liquid storage chamber for storing discharge liquid is formed,
A nozzle plate that is provided on one surface of the substrate so as to cover the discharge liquid storage chamber and includes nozzle holes for discharging the discharge liquid as droplets;
A diaphragm provided on the other surface of the substrate so as to cover the discharge liquid storage chamber;
An adhesive used for assembling a droplet discharge head having vibration means for vibrating the diaphragm due to strain;
The diaphragm has a vibration film that vibrates due to distortion of the vibration means, and a support plate that propagates distortion of the vibration means to the vibration film,
At least one of the substrate and the nozzle plate, the substrate and the vibration film, and the vibration film and the support plate is interposed through an adhesive layer formed using the adhesive. Are joined together.
The adhesive is characterized by containing a copolymer of alkene and alkenylene dicarboxylic acid as a main material.
As a result, it is possible to provide an adhesive capable of producing a highly reliable droplet discharge head that is excellent in solvent resistance and flexibility and capable of high-quality printing over a long period of time.

In the adhesive of the present invention, it is preferable that the copolymer further contains a (meth) acrylic acid ester.
Thereby, since the solubility with respect to the water of a copolymer can be improved, it becomes possible to select water as a solvent used for an adhesive agent.
In the adhesive of the present invention, the alkenylene dicarboxylic acid is preferably (anhydrous) maleic acid.
Thereby, the adhesiveness with respect to each member of an adhesive agent can be improved.

In the adhesive of the present invention, the alkene is preferably ethylene.
Since the heat-resistant temperature of the adhesive mainly depends on the type of alkene, ethylene is selected as the alkene when the heat-resistant temperature of the droplet discharge head to be bonded is 100 ° C. or less.
In the adhesive of the present invention, the alkene is preferably propylene.
Since the heat-resistant temperature of the adhesive mainly depends on the type of alkene, propylene is selected as the alkene when a heat-resistant temperature of 100 ° C. or higher is required as a droplet discharge head to be bonded.

In the adhesive of the present invention, the adhesive preferably has a Young's modulus at the time of solidification of 1.0 GPa or less.
Thereby, it can suppress or prevent exactly that the residual stress after the adhesive solidifies becomes large. For this reason, the obtained droplet discharge head can be prevented from warping or having a moderately suppressed size.

The droplet discharge head of the present invention includes a substrate on which a discharge liquid storage chamber for storing discharge liquid is formed,
A nozzle plate that is provided on one surface of the substrate so as to cover the discharge liquid storage chamber and includes nozzle holes for discharging the discharge liquid as droplets;
A diaphragm provided on the other surface of the substrate so as to cover the discharge liquid storage chamber;
A droplet discharge head having vibration means for vibrating the vibration plate due to distortion,
The diaphragm has a vibration film that vibrates due to distortion of the vibration means, and a support plate that propagates distortion of the vibration means to the vibration film,
At least one of between the substrate and the nozzle plate, between the substrate and the vibration film, and between the vibration film and the support plate is interposed through an adhesive layer formed using an adhesive. Are joined,
The adhesive is characterized by containing a copolymer of alkene and alkenylene dicarboxylic acid as a main material.
As a result, it is possible to obtain a highly reliable droplet discharge head that is excellent in solvent resistance and flexibility and can perform high-quality printing over a long period of time.

In the droplet discharge head of the present invention, the vibration film in the form of a film and the support plate provided so as to correspond to a part of the vibration film are bonded via the adhesive layer,
It is preferable that the adhesive layer is formed on substantially the entire surface of the vibration film on the side where the support plate is joined.
Thus, even when the adhesive layer is formed on almost the entire surface of the vibration film, by setting the Young's modulus at the time of solidifying the adhesive to 1.0 GPa or less, the adhesive layer becomes excellent in flexibility. Therefore, it is possible to reliably prevent the flexibility of the diaphragm itself composed of the vibration film, the support plate, and the adhesive layer from being impaired.

A method for manufacturing a droplet discharge head according to the present invention is a method for manufacturing a droplet discharge head in which the droplet discharge head is assembled using the adhesive according to the present invention,
When forming the adhesive layer on at least one of the substrate and the nozzle plate, the substrate and the vibration film, and the vibration film and the support plate, The adhesive layer is formed by solidifying after heating to 140 ° C. or higher and melting.
Thereby, the adhesive layer can be brought into a molten state without deteriorating / deteriorating various members used for assembling the droplet discharge head and the formed adhesive layer itself.

In the method for manufacturing a droplet discharge head of the present invention, it is preferable that the time for heating the adhesive is 2 seconds or more and 100 seconds or less.
According to the present invention, the time for heating the adhesive and joining the members can be set within the above range, so that the time for forming the adhesive layer, and hence the manufacture of the droplet discharge head can be reduced. Therefore, it is possible to shorten the time required for this.
The droplet discharge device of the present invention includes the droplet discharge head of the present invention or the droplet discharge head manufactured by the method of manufacturing the droplet discharge head of the present invention.
Thereby, a highly reliable droplet discharge device can be obtained.

1 is a longitudinal sectional view showing an embodiment in which a droplet discharge head of the present invention is applied to an ink jet recording head. It is the schematic which shows embodiment of an inkjet printer provided with the inkjet recording head shown in FIG. It is a figure (longitudinal sectional drawing) for demonstrating the manufacturing method of an inkjet recording head. It is a figure (longitudinal sectional drawing) for demonstrating the manufacturing method of an inkjet recording head. It is a figure (longitudinal sectional drawing) for demonstrating the manufacturing method of an inkjet recording head.

Hereinafter, an adhesive, a droplet discharge head, a method for manufacturing a droplet discharge head, and a droplet discharge apparatus according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
<Inkjet recording head>
First, prior to describing the adhesive of the present invention, a droplet discharge head to which the adhesive of the present invention is applied (the droplet discharge head of the present invention) will be described.
Hereinafter, a case where the droplet discharge head of the present invention is applied to an ink jet recording head will be described as an example.

FIG. 1 is a longitudinal sectional view showing an embodiment in which the droplet discharge head of the present invention is applied to an ink jet recording head. FIG. 2 is a schematic view showing an embodiment of an ink jet printer including the ink jet recording head shown in FIG. It is. In the following description, the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.
An ink jet recording head 1 (hereinafter sometimes simply referred to as “head 1”) shown in FIG. 1 is mounted on an ink jet printer (droplet discharge device of the present invention) 9 as shown in FIG.

The ink jet printer 9 shown in FIG. 2 includes an apparatus main body 92, a tray 921 for installing the recording paper P in the upper rear, a paper discharge port 922 for discharging the recording paper P in the lower front, and an operation panel on the upper surface. 97.
The operation panel 97 is composed of, for example, a liquid crystal display, an organic EL display, an LED lamp, and the like. And.

Further, inside the apparatus main body 92, mainly a printing apparatus (printing means) 94 provided with a reciprocating head unit 93 and a paper feeding apparatus (paper feeding means) for feeding recording paper P to the printing apparatus 94 one by one. 95 and a control unit (control means) 96 for controlling the printing device 94 and the paper feeding device 95.
Under the control of the control unit 96, the paper feeding device 95 intermittently feeds the recording paper P one by one. The recording paper P passes near the lower part of the head unit 93. At this time, the head unit 93 reciprocates in a direction substantially orthogonal to the feeding direction of the recording paper P, and printing on the recording paper P is performed. That is, the reciprocating motion of the head unit 93 and the intermittent feeding of the recording paper P are the main scanning and sub-scanning in printing, and ink jet printing is performed.

The printing apparatus 94 includes a head unit 93, a carriage motor 941 that is a drive source of the head unit 93, and a reciprocating mechanism 942 that reciprocates the head unit 93 in response to the rotation of the carriage motor 941.
The head unit 93 includes a head 1 having a large number of nozzle holes 11, an ink cartridge 931 that supplies ink to the head 1, and a carriage 932 on which the head 1 and the ink cartridge 931 are mounted at the lower part thereof.
Ink cartridge 931 is filled with four color inks of yellow, cyan, magenta, and black (black), thereby enabling full color printing.

The reciprocating mechanism 942 includes a carriage guide shaft 943 whose both ends are supported by a frame (not shown), and a timing belt 944 extending in parallel with the carriage guide shaft 943.
The carriage 932 is supported by the carriage guide shaft 943 so as to be able to reciprocate and is fixed to a part of the timing belt 944.
When the timing belt 944 travels forward and backward via a pulley by the operation of the carriage motor 941, the head unit 93 reciprocates as guided by the carriage guide shaft 943. During this reciprocation, ink is appropriately discharged from the head 1 and printing on the recording paper P is performed.

The sheet feeding device 95 includes a sheet feeding motor 951 serving as a driving source thereof, and a sheet feeding roller 952 that is rotated by the operation of the sheet feeding motor 951.
The paper feed roller 952 includes a driven roller 952a and a drive roller 952b that are vertically opposed to each other with a recording paper P feeding path (recording paper P) interposed therebetween. The drive roller 952b is connected to the paper feed motor 951. As a result, the paper feed roller 952 can feed a large number of recording sheets P set on the tray 921 one by one toward the printing apparatus 94. Instead of the tray 921, a configuration in which a paper feed cassette that stores the recording paper P can be detachably mounted may be employed.

The control unit 96 performs printing by controlling the printing device 94, the paper feeding device 95, and the like based on print data input from a host computer such as a personal computer or a digital camera.
Although not shown, the control unit 96 mainly includes a memory that stores a control program for controlling each unit, a drive circuit that drives the printing device 94 (carriage motor 941), and a paper feeding device 95 (paper feeding motor 951). Drive circuit, a communication circuit for obtaining print data from a host computer, and a CPU that is electrically connected to these and performs various controls in each unit.

Further, for example, various sensors that can detect the remaining ink amount of the ink cartridge 931, the position of the head unit 93, and the like are electrically connected to the CPU.
The control unit 96 obtains print data via the communication circuit and stores it in the memory. The CPU processes the print data and outputs a drive signal to each drive circuit based on the process data and input data from various sensors. The printing device 94 and the paper feeding device 95 are operated by this drive signal. As a result, printing is performed on the recording paper P.

Hereinafter, the head 1 will be described in detail with reference to FIG.
As shown in FIG. 1, the head 1 includes a nozzle plate 10, a discharge liquid storage chamber forming substrate (substrate) 20 provided on the nozzle plate, and a vibration film 30 provided on the discharge liquid storage chamber forming substrate 20. A support plate 40 provided on the vibration film 30, and a piezoelectric element (vibration means) 50 and a case head 60 provided on the support plate 40. In the present embodiment, the head 1 constitutes a piezo jet head.

A plurality of discharge liquid storage chambers (pressure chambers) 21 for storing ink are formed on the discharge liquid storage chamber forming substrate 20 (hereinafter referred to as “substrate 20” for short). A discharge liquid supply chamber 22 that communicates with the discharge liquid storage chamber 21 and supplies ink to each discharge liquid storage chamber 21 is formed.
As shown in FIG. 1, each of the discharge liquid storage chambers 21 and the discharge liquid supply chambers 22 has a substantially rectangular shape in plan view, and the width (short side) of each of the discharge liquid storage chambers 21 is the discharge liquid supply. It is narrower than the width (short side) of the chamber 22.

Further, each discharge liquid storage chamber 21 is arranged so as to be substantially perpendicular to the discharge liquid supply chamber 22, and each discharge liquid storage chamber 21 and the discharge liquid supply chamber 22 are as a whole in plan view. It has a comb shape.
The material constituting the substrate 20 is not particularly limited. For example, silicon materials such as single crystal silicon, polycrystalline silicon, and amorphous silicon, metal materials such as stainless steel, glass materials such as quartz glass, alumina Ceramic materials such as graphite, carbon materials such as graphite, polyolefins, polyvinyl chloride, acrylonitrile-styrene copolymers (AS resins), resin materials such as silicone resins, etc., one or more of these Can be used in combination.

Moreover, the material which gave each process, such as an oxidation process (oxide film formation), a plating process, a passivation process, a nitriding process, to the above materials may be used.
Among these, the constituent material of the substrate 20 is preferably a silicon material or stainless steel. Since such a material is excellent in chemical resistance, even if it is exposed to ink for a long time, the substrate 20 can be reliably prevented from being deteriorated or deteriorated. Moreover, since these materials are excellent in workability, the substrate 20 with high dimensional accuracy can be obtained. For this reason, the accuracy of the volume of the discharge liquid storage chamber 21 and the discharge liquid supply chamber 22 is increased, and the head 1 capable of high-quality printing is obtained.
Further, the discharge liquid supply chamber 22 communicates with a discharge liquid supply path 61 provided in a case head 60 described later, and is a part of a reservoir 70 that functions as a common ink chamber that supplies ink to the plurality of discharge liquid storage chambers 21. Parts.

The nozzle plate 10 is bonded to the lower surface of the substrate 20 (the surface opposite to the vibration film 30; one surface) through the adhesive layer 15 so as to cover the discharge liquid storage chamber 21 and the discharge liquid supply chamber 22. Yes.
The adhesive layer 15 is formed using the adhesive of the present invention, and details thereof will be described later.

Nozzle holes 11 are formed (perforated) in the nozzle plate 10 so as to correspond to the respective discharge liquid storage chambers 21. By extruding the ink (discharge liquid) stored in the discharge liquid storage chamber 21 from the nozzle hole 11, the ink is discharged as droplets.
Further, the nozzle plate 10 constitutes the lower surface of the inner wall surface of each discharge liquid storage chamber 21 and the discharge liquid supply chamber 22. That is, the nozzle plate 10, the substrate 20, and the vibration film 30 define each discharge liquid storage chamber 21 and the discharge liquid supply chamber 22.

Examples of the material constituting the nozzle plate 10 include silicon materials, metal materials, glass materials, ceramic materials, carbon materials, resin materials, or one or more of these materials as described above. The composite material etc. which were combined are mentioned.
Among these, it is preferable that the constituent material of the nozzle plate 10 is a silicon material or stainless steel. Since such a material is excellent in chemical resistance, it is possible to reliably prevent the nozzle plate 10 from being altered or deteriorated even when exposed to ink for a long time. Moreover, since these materials are excellent in workability, the nozzle plate 10 with high dimensional accuracy can be obtained. For this reason, the highly reliable head 1 is obtained.

The constituent material of the nozzle plate 10 preferably has a linear expansion coefficient of 300 ° C. or less and about 2.5 to 4.5 [× 10 ⁻⁶ / ° C.].
The thickness of the nozzle plate 10 is not particularly limited, but is preferably about 0.01 to 1 mm.
Moreover, it is preferable to perform a liquid repellent treatment on the lower surface of the nozzle plate 10 as necessary. Thereby, it is possible to prevent ink droplets ejected from the nozzle holes from being ejected in unintended directions.

A vibration film 30 is bonded to the upper surface (the other surface) of the substrate 20 through the adhesive layer 25 so as to cover the discharge liquid storage chamber 21 and the discharge liquid supply chamber 22.
The adhesive layer 25 is also formed using the adhesive of the present invention, and details thereof will be described later.
The vibration film 30 constitutes the upper surface of the inner wall surface of each discharge liquid storage chamber 21 and the discharge liquid supply chamber 22. That is, each of the discharge liquid storage chambers 21 and the discharge liquid supply chamber 22 is defined by the vibration film 30, the substrate 20, and the nozzle plate 10. In addition, since the vibration film 30 is securely bonded to the substrate 20, the liquid tightness of each discharge liquid storage chamber 21 and the discharge liquid supply chamber 22 is ensured.

Furthermore, the vibration film 30 has a function of elastic deformation. Therefore, the volume of the discharge liquid storage chamber 21 can be changed by displacing (vibrating) the vibration film 30 via the support plate 40 due to the distortion generated in the piezoelectric element 50. As a result, ink is discharged. The
Examples of the material constituting the vibration film 30 include a silicon material, a metal material, a glass material, a ceramic material, a carbon material, a resin material, or a combination of one or more of these materials as described above. Materials and the like.

  Among these, the constituent material of the vibration film 30 is preferably a resin material such as polyphenylene sulfide (PPS) or an aramid resin, a silicon material, or stainless steel. Since such a material is excellent in chemical resistance, even if it is exposed to ink for a long time, the vibration film 30 can be reliably prevented from being altered or deteriorated. For this reason, ink can be stored in the discharge liquid storage chamber 21 and the discharge liquid supply chamber 22 for a long period of time. Furthermore, since these are materials that can be elastically deformed at high speed, the volume of the discharge liquid storage chamber 21 can be changed at high speed, and as a result, ink can be discharged with high accuracy.

A support plate 40 is bonded to the upper surface of the vibration film 30 via an adhesive layer 35 so as to correspond to a part of the vibration film 30.
The adhesive layer 35 is also formed using the adhesive of the present invention, and details thereof will be described later.
The support plate 40 has a function of propagating the distortion generated in the piezoelectric element 50 to the vibration film 30 through this. Accordingly, by generating distortion in the piezoelectric element 50, the vibration film 30 is displaced, and as a result, a volume change in each discharge liquid storage chamber 21 can be surely generated.

Examples of the material constituting the support plate 40 include a silicon material, a metal material, a glass material, a ceramic material, a carbon material, a resin material, or a combination of one or more of these materials as described above. Materials and the like.
Among these, it is preferable that the constituent material of the support plate 40 is a silicon material or stainless steel (SUS). Such a material has excellent strength. For this reason, the distortion generated in the piezoelectric element 50 is more reliably transmitted to the vibration film 30, so that the ink is ejected with higher accuracy.

In the present embodiment, the vibration plate (sealing plate) that covers the discharge liquid storage chamber 21 and the discharge liquid supply chamber 22 by the laminated body in which the vibration film 30 and the support plate 40 described above are bonded via the adhesive layer 35. ) Is configured.
A piezoelectric element (vibrating means) 50 is joined to a part of the upper surface of the support plate 40 (in FIG. 1, near the center of the upper surface of the support plate 40).

  The piezoelectric element 50 is constituted by a laminate of a piezoelectric layer 51 made of a piezoelectric material and an electrode film 52 that applies a voltage to the piezoelectric layer 51. In such a piezoelectric element 50, when a voltage is applied to the piezoelectric layer 51 through the electrode film 52, a distortion corresponding to the voltage is generated in the piezoelectric layer 51 (reverse piezoelectric effect). This distortion causes the vibration film 30 to bend (vibrate) via the support plate 40 and change the volume of the discharge liquid storage chamber 21. Since the piezoelectric element 50 having such a structure is reliably bonded to the support plate 40, the distortion generated in the piezoelectric element 50 can be reliably converted into the displacement of the vibration film 30 via the support plate 40. As a result, the volume of each discharge liquid storage chamber 21 is reliably changed.

  The lamination direction of the piezoelectric layer 51 and the electrode film 52 is not particularly limited, and may be a direction parallel to the support plate 40 or a direction orthogonal thereto. In addition, when the stacking direction of the piezoelectric layer 51 and the electrode film 52 is a direction orthogonal to the support plate 40 as shown in FIG. Say Layer Piezo). If the piezoelectric element 50 is MLP, the displacement amount of the support plate 40 can be increased, which has the advantage that the adjustment range of the ink ejection amount is large.

The surface of the piezoelectric element 50 adjacent to (in contact with) the support plate 40 differs depending on the arrangement method of the piezoelectric element 50, but the surface on which the piezoelectric layer is exposed, the surface on which the electrode film is exposed, or the piezoelectric layer and the electrode Either side of the membrane is exposed.
As a material constituting the piezoelectric layer 51 in the piezoelectric element 50, for example, barium titanate, lead zirconate, lead zirconate titanate, zinc oxide, aluminum nitride, lithium tantalate, lithium niobate, crystal, and the like are available. Can be mentioned.

On the other hand, as a material constituting the electrode film 52, for example, various metal materials such as Fe, Ni, Co, Zn, Pt, Au, Ag, Cu, Pd, Al, W, Ti, Mo, or an alloy containing them. Is mentioned.
Here, the support plate 40 described above has a recess 53 formed in an annular shape so as to surround a position corresponding to the piezoelectric element 50. That is, the support plate 40 is provided on the vibration film 30 so as to correspond to a part thereof, and at a position corresponding to the piezoelectric element 50, a part of the support plate 40 separates the annular recess 53. It is isolated like an island. By adopting a configuration in which the piezoelectric element 50 is joined to such an island-shaped portion, distortion generated in the piezoelectric element 50 can be more reliably propagated to the vibration film 30, so that the bending in the vibration film 30 is prevented. It will occur more reliably.

The electrode film 52 of the piezoelectric element 50 is electrically connected to a drive IC (not shown). Thereby, the operation of the piezoelectric element 50 can be controlled by the driving IC.
Further, the case head 60 is joined to a part of the upper surface of the support plate 40 (in FIG. 1, a portion surrounding the island-shaped portion with the recess 53 therebetween). In this way, the case head 60 and the support plate 40 are joined to reinforce a so-called cavity portion composed of a laminate of the nozzle plate 10, the substrate 20, the vibration film 30 and the support plate 40. The tee portion can be reliably prevented from being twisted or warped.

Examples of the material constituting the case head 60 include a silicon material, a metal material, a glass material, a ceramic material, a carbon material, a resin material, or a combination of one or more of these materials as described above. Materials and the like.
Among these, the constituent material of the case head 60 is preferably polyphenylene sulfide (PPS), a modified polyphenylene ether resin such as Zylon (“Zylon” is a registered trademark), or stainless steel. Since these materials have sufficient rigidity, they are suitable as constituent materials for the case head 60 that supports the head 1.

  The vibration film 30, the adhesive layer 35, and the support plate 40 have a through hole 23 at a position corresponding to the discharge liquid supply chamber 22. Through the through hole 23, the discharge liquid supply path 61 provided in the case head 60 and the discharge liquid supply chamber 22 communicate with each other. The discharge liquid supply path 61 and the discharge liquid supply chamber 22 constitute part of a reservoir 70 that functions as a common ink chamber that supplies ink to the plurality of discharge liquid storage chambers 21.

  In such a head 1, after taking ink from an external discharge liquid supply means (not shown) and filling the interior from the reservoir 70 to the nozzle hole 11 with the ink, each discharge liquid storage chamber 21 is received by a recording signal from the drive IC. Each piezoelectric element 50 corresponding to is operated. Accordingly, the vibration film 30 is bent (vibrated) via the support plate 40 due to the reverse piezoelectric effect of the piezoelectric element 50. As a result, for example, when the volume in each discharge liquid storage chamber 21 contracts, the pressure in each discharge liquid storage chamber 21 increases instantaneously, and ink is pushed out (discharged) from the nozzle hole 11 as a droplet.

In this way, in the head 1, a voltage is applied to the piezoelectric element 50 at a position to be printed via the driving IC, that is, an arbitrary character is printed as a figure or the like by sequentially inputting ejection signals. Can do.
The head 1 is not limited to the configuration described above, and may include, for example, an electrostatic actuator instead of the piezoelectric element 50 serving as a vibration unit.
However, as in the present embodiment, since the vibration means is configured by a piezoelectric element, the degree of bending that occurs in the vibration film 30 can be easily controlled. As a result, the size of the ink droplet can be easily controlled.

<Method for producing ink jet recording head>
The ink jet recording head 1 as described above is manufactured as follows using, for example, the base material 20 ′.
3 to 5 are views (longitudinal sectional views) for explaining a method of manufacturing the ink jet recording head. In the following description, the upper side in FIGS. 3 to 5 is referred to as “upper” and the lower side is referred to as “lower”.

  The method for manufacturing the head 1 according to the present embodiment includes a step of forming an adhesive layer 35 on the vibration film 30 and bonding the vibration film 30 and the support plate 40 via the adhesive layer 35 to obtain a vibration plate. A base material 20 ′ is prepared, the base material 20 ′ is processed to form the substrate 20, an adhesive layer 25 is formed on the substrate 20, and the substrate 20 is vibrated through the adhesive layer 25. The step of adhering the film 30 (vibrating plate), the through hole 23 is formed in a part of the adhesive layer 25, the vibrating film 30, the adhesive layer 35 and the support plate 40, and the recess 53 is formed in a part of the support plate 40 The step of forming, the step of bonding the piezoelectric element 50 on the support plate 40, the step of bonding the case head 60 on the support plate 40, and the adhesive layer 15 on the surface of the substrate 20 opposite to the vibration film 30. Through this adhesive layer 15 And a step of bonding the plate 20 and the nozzle plate 10.

Hereinafter, each process will be described sequentially.
[1] First, the support plate 40 and the vibration film 30 are prepared, and the support plate 40 and the vibration film 30 are bonded to each other through the adhesive layer 35 as shown in FIG. A diaphragm in which the plate 40, the adhesive layer 35, and the vibration film 30 are laminated in this order is obtained.
The adhesive of the present invention is used for forming the adhesive layer 35 that adheres the support plate 40 and the vibration film 30.

[2] Next, a flat base material 20 ′ is prepared as a base material for manufacturing the substrate 20 (see FIG. 3B).
Next, as shown in FIG. 3C, the base material 20 ′ is processed to form each discharge liquid storage chamber 21 and the discharge liquid supply chamber 22, thereby obtaining the substrate 20 from the base material 20 ′. .
The discharge liquid storage chamber 21 and the discharge liquid supply chamber 22 are formed by physical etching methods such as dry etching, reactive ion etching, beam etching, and optically assisted etching, and chemical etching methods such as wet etching. It can carry out using 1 type or in combination of 2 or more types.

[3] Next, as shown in FIG. 3 (d), the substrate 20 and the surface of the vibration plate on the vibration film 30 side are bonded to each other through the adhesive layer 25, so that the substrate 20 and the adhesive layer 25 are A laminated body in which the diaphragm is laminated in this order is obtained.
As in the case of the adhesive layer 35 described above, the adhesive of the present invention is used to form the adhesive layer 25 that bonds the substrate 20 and the vibration film 30.

[4] Next, as shown in FIG. 4A, a position corresponding to the discharge liquid supply chamber 22 of the substrate 20 among the vibration film 30, the adhesive layer 35 and the support plate 40, that is, the discharge liquid supply chamber. A through hole 23 is formed so as to communicate with 22. Furthermore, the recessed part 53 is formed in the cyclic | annular area | region surrounding the position where the piezoelectric element 50 is assembled among the support plates 40. FIG.
The through holes 23 and the recesses 53 are formed by using various etching methods similar to those described in the above-described formation of the discharge liquid storage chamber 21 and the discharge liquid supply chamber 22.
[5] Next, by preparing the piezoelectric element 50 and joining the piezoelectric element 50 to the island-shaped portion of the support plate 40, as shown in FIG. 4 (b), the substrate 20, the vibration film 30, The support plate 40 and the piezoelectric element 50 are joined together.

[6] Next, the case head 60 is prepared, and the case head 60 is joined to a portion surrounding the island-shaped portion of the support plate 40 with the recess 53 therebetween, as shown in FIG. The substrate 20, the vibration film 30, the support plate 40, the piezoelectric element 50, and the case head 60 are joined to each other.
At this time, the discharge liquid supply chamber 22 communicates with the vibration film 30, the through hole 23 formed in the adhesive layer 35 and the support plate 40, and the discharge liquid supply path 61 provided in the case head 60. A reservoir 70 is formed.

  Here, the vibration film 30, the support plate 40, the piezoelectric element 50, and the case head are applied to the substrate 20 on which the base material 20 ′ is previously processed to form the respective discharge liquid storage chambers 21 and the discharge liquid supply chambers 22. Although the case where 60 is joined was demonstrated, it is not limited to this, After joining the vibration film 30, the support plate 40, the piezoelectric element 50, and the case head 60 with respect to base material 20 ', processing to base material 20' is carried out. The substrate 20 may be obtained by forming each discharge liquid storage chamber 21 and the discharge liquid supply chamber 22.

[7] Next, the nozzle plate 10 is prepared, and the surface opposite to the vibration film 30 of the substrate 20 and the nozzle plate 10 are bonded via the adhesive layer 15 as shown in FIG. Thus, the substrate 1 and the nozzle plate 10 are joined to obtain the head 1.
For the formation of the adhesive layer 15 for adhering the substrate 20 and the nozzle plate 10, the adhesive of the present invention is used in the same manner as the adhesive layer 35 described above.

The head 1 is manufactured through the steps as described above. As described above, the adhesive of the present invention is used to form the adhesive layers 15, 25, and 35. Hereinafter, the adhesive of the present invention is used. Will be described.
The adhesive of the present invention contains a copolymer of alkene and alkenylene dicarboxylic acid as a main material.

Here, the copolymer of alkene and alkenylene dicarboxylic acid is a polyolefin-based thermoplastic material.
An adhesive containing such a copolymer as a main material has excellent solvent resistance, particularly due to the inclusion of alkene. Therefore, in this embodiment, in the head 1, the adhesive layers 15, 25, and 35 are in contact with ink as shown in FIG. 1, but the adhesive layers 15 and 25 resulting from the contact with the ink are used. , 35 can be prevented or suppressed accurately.

Furthermore, an adhesive containing such a copolymer as a main material is a thermoplastic adhesive. Therefore, when joining (adhering) each member using such an adhesive, each member is obtained by heating in a state in which the adhesive is interposed between the respective members to form a molten state and then cooling each member. They can be joined together. Since each member can be joined by such a relatively easy process of heating and cooling, it is necessary to manufacture the head 1 as compared with the case where each member is joined using a curable adhesive. Time can be shortened.
In such a copolymer, the alkene may be linear or cyclic, such as ethylene, propylene, 1-butene, 1-hexene, 1-pentene, Isoprene, cyclopentene, cyclohexene, methylenecyclohexane and the like can be mentioned, and one or more of these can be used in combination.

The heat-resistant temperature of the adhesive mainly depends on the type of alkene. Therefore, when the heat resistant temperature of the head 1 is 100 ° C. or lower, for example, ethylene, 1-butene or the like is selected, and when a heat resistant temperature of 100 ° C. or higher is required, for example, propylene, methylenecyclohexane, etc. Should be selected.
The alkenylene dicarboxylic acid is not particularly limited, and examples thereof include (anhydrous) maleic acid and fumaric acid. Among them, (anhydrous) maleic acid is preferable. By including maleic anhydride (alkenylene dicarboxylic acid) as the alkenylene dicarboxylic acid, it is possible to improve the adhesiveness of the adhesive to each member, so that the bonding strength of the formed adhesive layers 15, 25, and 35 to each member is improved. Figured.

  Furthermore, in such a copolymer, the content of alkene and alkenylene dicarboxylic acid is preferably about 700: 1 to 30: 1 by weight, more preferably about 100: 1 to 60: 1. . Here, the alkene is a material mainly contributing to the solvent resistance of the adhesive, and the alkenylene dicarboxylic acid is a material mainly contributing to the adhesion of the adhesive to each member. And, by setting these contents within the above range, the characteristics of each material are suitably exhibited, so that the resulting adhesive is excellent in both solvent resistance and adhesion characteristics. it can.

  The copolymer contained in such an adhesive may be a copolymer obtained from a material containing an alkene and an alkenylene dicarboxylic acid. For example, the alkene, the alkenylene dicarboxylic acid, and an olefin different from these. It may be a copolymer with a system compound. Examples of such olefinic compounds include aromatic vinyl compounds such as styrene, vinyltoluene, and vinylxylene, (meth) acrylic acid, (meth) acrylic acid esters, and the like. Two or more kinds can be used in combination. In addition, since the solubility with respect to the water of the copolymer obtained can be improved by using (meth) acrylic acid ester as an olefinic compound, it is possible to select water as a solvent used for an adhesive. It becomes.

  The copolymer of alkene and alkenylene dicarboxylic acid may be any of a random copolymer, an alternating copolymer, a block copolymer, and a graft copolymer, but a random copolymer or an alternating copolymer. A copolymer is preferred. Thereby, the adhesive layers 15, 25, and 35 formed using the adhesive mainly composed of such a copolymer can have a more uniform film quality.

  Furthermore, the adhesive containing such a copolymer as a main material has a Young's modulus at the time of solidification of 1. by appropriately selecting the content and type of alkene and alkenylene dicarboxylic acid contained in the copolymer. It is preferably set to 0 GPa or less, and more preferably set to a range of 0.1 GPa or more and 0.4 GPa or less. As a result, since the adhesive has excellent flexibility, the adhesive of the present invention is generated in the piezoelectric element 50 even when the adhesive of the present invention is applied to the bonding of the vibration film 30 and the support plate 40, that is, the adhesive layer 35. The distortion can be reliably transmitted from the support plate 40 to the vibration film 30. Furthermore, when the Young's modulus at the time of solidification is 1.0 GPa or less, it is possible to accurately suppress or prevent an increase in residual stress after the adhesive is solidified. For this reason, the obtained head 1 can be prevented from warping or having a moderately suppressed size.

  Note that when the adhesive layer 35 is formed on substantially the entire surface of the vibration film 30 on the side to which the support plate 40 is joined as in this embodiment, the Young's modulus at the time of solidifying the adhesive is within the above range. As described above, this adhesive is preferably used for joining the vibration film 30 and the support plate 40. Thus, even when the adhesive layer 35 is formed on almost the entire surface of the vibration film 30, the adhesive layer 35 is excellent in flexibility, and therefore the vibration plate composed of the vibration film 30, the support plate 40 and the adhesive layer 35. It is possible to reliably prevent the flexibility of the device itself from being lost.

  In addition, an adhesive containing such a copolymer as a main material is made liquid or semi-solid by dissolving or dispersing the copolymer in a solvent or dispersion medium. As the solvent or dispersion medium, There is no particular limitation, for example, inorganic solvents such as ammonia, water, hydrogen peroxide, alcohol solvents such as methanol, ethanol, isobutanol, ether solvents such as diethyl ether, diisopropyl ether, toluene, xylene, benzene, etc. Various organic solvents such as aromatic hydrocarbon solvents, aromatic heterocyclic compounds such as pyridine, pyrazine, furan, amide solvents such as N, N-dimethylformamide (DMF), or mixed solvents containing these solvents Etc. can be used.

Furthermore, formation of the adhesive layers 15, 25, and 35 using such an adhesive can be performed as follows, for example.
That is, the adhesive layers 15, 25, and 35 are formed by supplying an adhesive to at least one of the members to be joined by the adhesive layers 15, 25, and 35 and then drying them. Thereafter, in a state where the members are brought into contact with each other through the adhesive layers 15, 25, and 35, the adhesive layers 15, 25, and 35 are heated and melted, and then cooled and solidified. Thereby, each member is joined by the adhesive layers 15, 25, 35 in a solidified state.

Here, the heating temperature when melting the adhesive layers 15, 25, and 35 is preferably 140 ° C. or higher, and more preferably about 150 ° C. or higher and 200 ° C. or lower. Thereby, the adhesive layers 15, 25, and 35 can be melted without deteriorating and degrading various members used for assembling the head 1 and the formed adhesive layers 15, 25, and 35 themselves.
Further, when the Young's modulus of the adhesive at the time of solidification is set to 1.0 GPa or less, the residual stress in the adhesive layers 15, 25, and 35 becomes large even when heated at such a high temperature. Can be prevented or suppressed accurately. Therefore, it is possible to reduce the amount of warpage generated in the formed head 1.

Further, if heating is performed within such a temperature range, the time for heating the adhesive layers 15, 25, and 35 is slightly different depending on the type of copolymer contained in the adhesive, but preferably 2 seconds or more, 100 Since it can be set to 2 seconds or less, more preferably 2 seconds or more and 20 seconds or less, the time for forming the adhesive layers 15, 25, 35, and thus the time for manufacturing the head 1. Can be shortened.
The formed adhesive layers 15, 25, and 35 preferably have an average thickness of about 1 μm or more and 100 μm or less, and more preferably about 5 μm or more and 80 μm or less. By setting the film thickness within such a range, the members can be reliably bonded to each other.

Further, the adhesion of the adhesive layers 15, 25, and 35 to the surfaces to be bonded by the adhesive layers 15, 25, and 35, that is, the surfaces of the substrate 20, the nozzle plate 10, the vibration film 30, and the support plate 40 is improved. It is preferable that surface treatment is performed. Such surface treatment is not particularly limited, and examples thereof include surface treatment with a coupling agent having a functional group capable of forming a linking structure with a carboxyl group included in the copolymer. Examples of the coupling agent include amino silane and glycidyl ether silane.
In addition, although this embodiment demonstrated the case where the adhesive agent of this invention was applied to formation of each layer of the adhesive layers 15, 25, 35, it is not limited to such a case, Of the adhesive layers 15, 25, 35 The adhesive of this invention should just be used for formation of at least 1 layer.

As described above, the adhesive, the droplet discharge head, the manufacturing method of the droplet discharge head, and the droplet discharge apparatus have been described based on the illustrated embodiments, but the present invention is not limited to these.
For example, in the method of manufacturing the droplet discharge head of the present invention, the order of the steps may be changed without being limited to the configuration of the above embodiment. In addition, one or two or more arbitrary processes may be added, and unnecessary processes may be deleted.

Next, specific examples of the present invention will be described.
1. Preparation of adhesive (Example 1)
A copolymer of ethylene and maleic acid (ethylene content 99.5 wt%) was prepared, and dissolved in toluene so that the content of the copolymer was 20 wt%. An agent was prepared.
(Examples 2 to 4)
The adhesion of Examples 2 to 4 was the same as that of Example 1 except that the copolymer of ethylene and maleic acid used was one whose maleic acid content was as shown in Table 1. An agent was prepared.

(Example 5)
Prepare a copolymer of ethylene, maleic acid and methyl acrylate (ethylene content 99.0 wt%, maleic acid content 0.5 wt%, methyl acrylate content 0.5 wt%) in water The adhesive of Example 5 was prepared by dissolving the copolymer so that the content of the copolymer was 20 wt%.
(Comparative example)
Polyethylene was prepared and the adhesive of the comparative example was prepared by dissolving in toluene so that the polyethylene content would be 20 wt%.

2. 2. Production of evaluation member 2-1. Manufacture of head-like member <1> First, a nozzle plate made of stainless steel and a discharge liquid storage chamber forming substrate (cavity) made of single crystal silicon were prepared.
In addition, as a nozzle plate, the thing of the magnitude | size of length 1cm x width 3cm was used.
Further, as the cavity, one having a size of 1 cm in length × 3 cm in width and having 180 through holes (100 μm in length × 500 μm in width) formed in the vertical direction was used.

<2> Next, after applying the adhesives of each of the examples and comparative examples to the bonding surface of the cavity with the nozzle plate, the adhesive layer is heated by heating with the nozzle plate disposed on the cavity. Then, the cavity and the nozzle plate were bonded to obtain a head-like member.
The heating condition for forming the adhesive layer was 140 ° C. × 3 minutes.

2-2. Manufacture of Adhesive Layer Forming Substrate A flat substrate made of stainless steel (SUS316) is prepared, and after applying the adhesives of the examples and comparative examples on the substrate, the adhesive layer is formed by heating. An adhesive layer-formed substrate was obtained.

2-3. Production of Peel Strength Measuring Member First, two flat-plate substrates (length 1 cm × width 3 cm × thickness 80 μm) made of stainless steel (SUS316) are prepared, and each example and comparative example are provided on one substrate. Each of the adhesives was applied and then dried to form an adhesive layer on the substrate.
In addition, the application of the adhesive is performed by supplying the adhesive onto the substrate by using a spin coat method, and then increasing the number of rotations from 0 rpm to 1000 rpm over 50 seconds and holding the substrate for 10 seconds. It was. Furthermore, the conditions for drying the adhesive were 90 ° C. × 3 minutes.

Next, the other substrate is overlapped with one substrate so as to form a cross shape via the adhesive layer, that is, the bonding portion between the substrates is overlapped so as to form a square (vertical 1 cm × horizontal 1 cm). Then, by heating and then cooling to room temperature, a peel strength measuring member was obtained in which the substrates were bonded together via a bonding film.
In addition, the heating conditions at the time of joining base materials were 140 degreeC * 3 minutes.

3. Evaluation 3-1. Evaluation of Head-like Member The amount of warpage was measured for each head-like member produced using the adhesives of the examples and comparative examples.
The amount of warpage is the amount of warpage between the base material and the head-like member when it is placed on the base material so that the end of the head-like member causing warpage is on the lower side and the central part is on the upper side. A void is formed, which means the maximum height of this void.
The results are shown in Table 1.

3-2. Evaluation of Adhesive Layer Forming Substrate For each of the adhesive layer forming substrates produced using the adhesives of the examples and comparative examples, the shore strength and film thickness were measured.
And these adhesion layer formation board | substrates were immersed in the ink for inkjet printers (the Epson company make, "1CBK47") on the conditions of 80 degreeC for 5 days, and the film thickness of the adhesion layer was measured again after that.

The shore strength of the adhesive was measured using a Nanoindenter device (MTS, “SA2”).
Among the measured values, the Young's modulus (GPa) of the adhesive layer was determined from the film thickness before immersion and the shore strength. Further, the swelling ratio (%) of the adhesive layer was determined from the ratio of the film thickness before immersion and the film thickness after immersion.

3-3. Evaluation of Peel Strength Measuring Member About the peel strength measuring member manufactured using the adhesives of each Example and Comparative Example, in accordance with the peel strength test (specified in JIS-G3469), as follows, The peel strength with respect to the surface direction was measured.
That is, for the peel strength measurement members obtained in each of the examples and comparative examples, each has one end of one substrate, and the load when peeled off at a rate of 10 mm / min in the direction of 90 ° at room temperature, It measured using the 90 degree peel peeling test apparatus (the product made by Imada, "NX-500NE").
Furthermore, for the peel strength measurement member prepared using the adhesives of each Example and Comparative Example, which were separately prepared, the ink for inkjet printer ("1CBK47" manufactured by Epson Corporation) was used for 5 days under the condition of 80 ° C. After immersion, the peel strength was measured in the same manner as described above.
The results are shown in Table 1.

As is clear from Table 1, the adhesive layer formed using the adhesive of each example has excellent adhesion (peel strength) to the substrate regardless of before and after immersion of the ink. On the other hand, the adhesive layer formed using the adhesive of the comparative example had a result that the adhesion was lowered by immersion in ink.
Further, in the head-like member manufactured using the adhesive of each example, the Young's modulus at the time of solidifying the adhesive can be set to 1.0 GPa or less, and the result is that the warpage is reduced. It was.
Furthermore, the adhesive layer formed using the adhesive of each Example had a result that the swelling ratio by immersion in the ink was low even by the addition of maleic acid.

DESCRIPTION OF SYMBOLS 1 ... Inkjet recording head 10 ... Nozzle plate 11 ... Nozzle hole 15, 25, 35 ... Adhesive layer 20 ... Discharge liquid storage chamber forming substrate 20 '... Base material 21 ... Discharge liquid storage chamber 22 ... ... Discharge liquid supply chamber 23 ... Through hole 30 ... Vibrating film 40 ... Support plate 50 ... Piezoelectric element 51 ... Piezoelectric layer 52 ... Electrode film 53 ... Concavity 60 ... Case head 61 ... Discharge liquid Supply path 70 …… Reservoir 9 …… Inkjet printer 92 …… Device main body 921 …… Tray 922 …… Discharge port 93 …… Head unit 931 …… Ink cartridge 932 …… Carriage 94 …… Print device 941 …… Carriage motor 942 …… Reciprocating mechanism 943 …… Carriage guide shaft 944 …… Timing belt 95 …… Feeding device 951 ... feed motor 952 ...... feed roller 952a ...... driven roller 952b ...... driving roller 96 ...... controller 97 ...... operation panel P ...... recording paper

Claims (11)

A substrate on which a discharge liquid storage chamber for storing the discharge liquid is formed;
A nozzle plate that is provided on one surface of the substrate so as to cover the discharge liquid storage chamber and includes nozzle holes for discharging the discharge liquid as droplets;
A diaphragm provided on the other surface of the substrate so as to cover the discharge liquid storage chamber;
An adhesive used for assembling a droplet discharge head having vibration means for vibrating the diaphragm due to strain;
The diaphragm has a vibration film that vibrates due to distortion of the vibration means, and a support plate that propagates distortion of the vibration means to the vibration film,
At least one of the substrate and the nozzle plate, the substrate and the vibration film, and the vibration film and the support plate is interposed through an adhesive layer formed using the adhesive. Are joined together.
The adhesive comprises an alkene and alkenylene dicarboxylic acid copolymer as a main material.   The adhesive according to claim 1, wherein the copolymer further contains a (meth) acrylic acid ester.   The adhesive according to claim 1 or 2, wherein the alkenylene dicarboxylic acid is (anhydrous) maleic acid.   The adhesive according to any one of claims 1 to 3, wherein the alkene is ethylene.   The adhesive according to any one of claims 1 to 3, wherein the alkene is propylene.   The adhesive according to any one of claims 1 to 5, wherein the adhesive has a Young's modulus during solidification of 1.0 GPa or less. A substrate on which a discharge liquid storage chamber for storing the discharge liquid is formed;
A nozzle plate that is provided on one surface of the substrate so as to cover the discharge liquid storage chamber and includes nozzle holes for discharging the discharge liquid as droplets;
A diaphragm provided on the other surface of the substrate so as to cover the discharge liquid storage chamber;
A droplet discharge head having vibration means for vibrating the vibration plate due to distortion,
The diaphragm has a vibration film that vibrates due to distortion of the vibration means, and a support plate that propagates distortion of the vibration means to the vibration film,
At least one of between the substrate and the nozzle plate, between the substrate and the vibration film, and between the vibration film and the support plate is interposed through an adhesive layer formed using an adhesive. Are joined,
The droplet discharge head according to claim 1, wherein the adhesive contains a copolymer of alkene and alkenylene dicarboxylic acid as a main material. The vibration film in the form of a film and the support plate provided so as to correspond to a part of the vibration film are bonded via the adhesive layer,
The droplet discharge head according to claim 7, wherein the adhesive layer is formed on substantially the entire surface of the vibration film on a side where the support plate is bonded. A method for manufacturing a droplet discharge head, wherein the droplet discharge head is assembled using the adhesive according to any one of claims 1 to 6,
When forming the adhesive layer on at least one of the substrate and the nozzle plate, the substrate and the vibration film, and the vibration film and the support plate, A method of manufacturing a droplet discharge head, wherein the adhesive layer is formed by solidifying after heating to 140 ° C. or higher and melting.   The method for manufacturing a droplet discharge head according to claim 9, wherein the time for heating the adhesive is 2 seconds or more and 100 seconds or less.   A droplet discharge apparatus comprising the droplet discharge head according to claim 7 or 8, or the droplet discharge head manufactured by the method for manufacturing a droplet discharge head according to claim 9 or 10.

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