JP2012228544A5

JP2012228544A5 -

Info

Publication number: JP2012228544A5
Application number: JP2012162342A
Authority: JP
Filing date: 2012-07-23
Publication date: 2013-03-07
Anticipated expiration: 2029-07-28

Description

本発明は、つぎのように構成した光断層画像撮像装置及び光断層画像撮像装置の制御方法を提供するものである。
本発明の光断層画像撮像装置は、測定光を照射した被検査物からの戻り光と、該測定光に対応する参照光とを合波した光に基づいて前記被検査物の断層画像を取得する光断層画像撮像装置であって、
前記被検査物に対して前記測定光を走査する走査手段と、
前記測定光の光束径を変更する光束径変更手段と、
前記光束径変更手段により前記測定光の光束径を大きくした場合、前記走査手段の走査速度を遅くする制御手段と、
を有することを特徴とする。
また、本発明の光断層画像撮像装置の制御方法は、測定光を照射した被検査物からの戻り光と、該測定光に対応する参照光とを合波した光に基づいて前記被検査物の断層画像を取得する光断層画像撮像装置の制御方法であって、
前記被検査物に対して前記測定光を走査する走査工程と、
前記測定光の光束径を変更する光束径変更工程と、
前記光束径変更工程により前記測定光の光束径を大きくした場合、前記走査工程での走査速度を遅くする制御工程と、
を有することを特徴とする。 The present invention provides an optical tomographic imaging apparatus and an optical tomographic imaging apparatus control method configured as follows.
The optical tomographic imaging apparatus of the present invention acquires a tomographic image of the inspection object based on light obtained by combining return light from the inspection object irradiated with measurement light and reference light corresponding to the measurement light. An optical tomographic imaging apparatus that comprises:
Scanning means for scanning the measurement light with respect to the inspection object;
A beam diameter changing means for changing the beam diameter of the measurement light;
Control means for slowing down the scanning speed of the scanning means when the light beam diameter of the measurement light is increased by the light beam diameter changing means;
It is characterized by having.
Further, the control method of the optical tomographic imaging apparatus according to the present invention provides the inspection object based on the light obtained by combining the return light from the inspection object irradiated with the measurement light and the reference light corresponding to the measurement light. A method for controlling an optical tomographic imaging apparatus for acquiring a tomographic image of
A scanning step of scanning the measurement object with the measurement light;
A light beam diameter changing step for changing a light beam diameter of the measurement light;
When the light beam diameter of the measurement light is increased by the light beam diameter changing step, a control step of reducing the scanning speed in the scanning step;
It is characterized by having.

Claims

An optical tomographic imaging apparatus that acquires a tomographic image of the inspection object based on light obtained by combining return light from the inspection object irradiated with measurement light and reference light corresponding to the measurement light,
Scanning means for scanning the measurement light with respect to the inspection object;
A beam diameter changing means for changing the beam diameter of the measurement light;
Control means for slowing down the scanning speed of the scanning means when the light beam diameter of the measurement light is increased by the light beam diameter changing means;
An optical tomographic imaging apparatus characterized by comprising:

Condensing position changing means for changing the position where the measurement light is focused on the inspection object in the depth direction of the inspection object;
The optical tomographic imaging apparatus according to claim 1, wherein the focal position is moved in the depth direction by a distance shorter than a focal depth based on the light beam diameter by the condensing position changing unit.

By changing the position of the focused beam at different depth positions in said object to be inspected by prior Symbol condensing position changing means obtains a tomographic image of a plurality of different obtaining step was a tomographic image by joining these optical tomographic imaging apparatus according to claim 2, characterized in that to generate.

In conjunction to change the position of the focused beam, according to claim 2 or claim 3 characterized in that it has a reference mirror position changing means for changing the position of the reference mirror provided in the optical path of the reference light Optical tomographic imaging device.

A spectroscopic means for splitting the combined light;
Range changing means for changing the range for acquiring the tomographic image according to the light beam diameter changed by the light beam diameter changing means;
Detecting means for detecting light from the range changing means;
5. The optical tomographic imaging apparatus according to claim 1, comprising:

The optical tomographic imaging apparatus according to claim 5, wherein the range changing unit changes a ratio between the number of pixels used for acquiring the tomographic image in the detecting unit and a wavelength bandwidth of the measurement light.

If the beam diameter change means is to increase the beam diameter of the measuring beam, to any one of claims 1 to 6, characterized in that imaging the inspection object by reducing the number of read pixels in the detector The optical tomographic imaging apparatus described.

A plurality of the detection means;
The plurality of detection means have a configuration in which the ratio of the number of pixels of the detection means and the wavelength bandwidth of the measurement light is different from each other,
Based on the modified beam diameter by the beam diameter changing unit, in any one of claims 1 to 6, characterized in that it is configured to be capable to select one of said plurality of detecting means The optical tomographic imaging apparatus described.

The detection means includes an imaging means;
The imaging means is constituted by a zoom lens,
Based on the light beam diameter changed by the light beam diameter changing means, the wavelength width per pixel of the detecting means is changed by the zoom lens and imaged on the detecting means,
Wherein the data of the pixels of the imaged range allowed, the optical tomographic imaging apparatus according to any one of claims 1 to 6, characterized by forming the tomographic image.

The pixel data in the range imaged in at least one area divided by the detection means by the imaging means is configured to be readable independently from the other area divided areas. The optical tomographic imaging apparatus according to claim 9, which is characterized by:

A control method of an optical tomographic imaging apparatus that obtains a tomographic image of the inspection object based on light obtained by combining return light from the inspection object irradiated with measurement light and reference light corresponding to the measurement light There,
A scanning step of scanning the measurement object with the measurement light;
A light beam diameter changing step for changing a light beam diameter of the measurement light;
When the light beam diameter of the measurement light is increased by the light beam diameter changing step, a control step of reducing the scanning speed in the scanning step;
A method for controlling an optical tomographic imaging apparatus, comprising:

A condensing position changing step of changing the position at which the measurement light is focused on the inspection object in the depth direction of the inspection object;
12. The method of controlling an optical tomographic imaging apparatus according to claim 11, wherein in the condensing position changing step, the focal position is moved in the depth direction by a distance shorter than the focal depth based on the beam diameter.

In the condensing position changing step, the condensing position is changed to obtain tomographic images of a plurality of different inspected objects at different depth positions in the inspected object , and these are connected to generate a tomographic image. The method of controlling an optical tomographic imaging apparatus according to claim 12 .

14. The method for controlling an optical tomographic imaging apparatus according to claim 13 , further comprising a step of changing a position of a reference mirror provided in an optical path of the reference light in conjunction with the change of the focusing position. .

Spectroscopic analysis of the combined light;
In accordance with the light beam diameter changed in the light beam diameter changing step, a range changing step for changing the range for acquiring the tomographic image;
Detecting light from the range changing step;
The method for controlling an optical tomographic imaging apparatus according to claim 11, comprising:

If it increases the beam diameter of the measurement light, one of the claims 11 to 15, characterized in that imaging the inspection object by reducing the number of read pixels in the detection of light narrow range the irradiated A method for controlling the optical tomographic imaging apparatus according to claim 1.

A program causing a computer to execute each step of the control method for an optical tomographic imaging apparatus according to any one of claims 11 to 16 .