JP2012201009A - Piezoelectric actuator unit for liquid ejection head, liquid ejection head using the same, and recording apparatus - Google Patents

Piezoelectric actuator unit for liquid ejection head, liquid ejection head using the same, and recording apparatus Download PDF

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JP2012201009A
JP2012201009A JP2011068187A JP2011068187A JP2012201009A JP 2012201009 A JP2012201009 A JP 2012201009A JP 2011068187 A JP2011068187 A JP 2011068187A JP 2011068187 A JP2011068187 A JP 2011068187A JP 2012201009 A JP2012201009 A JP 2012201009A
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common electrode
liquid
piezoelectric actuator
actuator unit
electrode
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JP2011068187A
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Japanese (ja)
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Shuji Miyao
修二 宮尾
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Kyocera Corp
京セラ株式会社
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Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator unit for liquid ejection head, which has high reliability of electrical connection between a common electrode and a common electrode connection electrode and is less likely to bend; and to provide a liquid ejection head using the same, and a recording apparatus.SOLUTION: The piezoelectric actuator unit for liquid ejection head 21 has a laminate in which a plurality of piezoelectric ceramic layers 21a, b are laminated, a plurality of individual electrodes 35 formed in a first direction and in a direction different from the first direction on one principal surface of the laminate, the common electrode 34 formed inside the laminate, and the common electrode connection electrode 37 formed in a peripheral region of the one principal surface and electrically connected with the common electrode 34. The common electrode connection electrode 37 is connected with the common electrode 34 via a conductor in a through-hole 21c prepared in the piezoelectric ceramic layer 21b. A plane shape of the periphery of the through-hole 21c of the common electrode connection electrode 37 is in a cross shape.

Description

  The present invention relates to a piezoelectric actuator unit for a liquid discharge head that discharges droplets, a liquid discharge head using the same, and a recording apparatus.
  In recent years, printing apparatuses using inkjet recording methods such as inkjet printers and inkjet plotters are not only printers for general consumers, but also, for example, formation of electronic circuits, manufacture of color filters for liquid crystal displays, manufacture of organic EL displays It is also widely used for industrial applications.
  In such an ink jet printing apparatus, a liquid discharge head for discharging liquid is mounted as a print head. This type of print head includes a heater as a pressurizing unit in an ink flow path filled with ink, heats and boiles the ink with the heater, pressurizes the ink with bubbles generated in the ink flow path, A thermal head system that ejects ink as droplets from the ink ejection holes, and a part of the wall of the ink channel filled with ink is bent and displaced by a displacement element, and the ink in the ink channel is mechanically pressurized, and the ink A piezoelectric method for discharging liquid droplets from discharge holes is generally known.
  In addition, in such a liquid discharge head, a serial type that performs recording while moving the liquid discharge head in a direction (main scanning direction) orthogonal to the conveyance direction (sub-scanning direction) of the recording medium, and main scanning from the recording medium There is a line type in which recording is performed on a recording medium conveyed in the sub-scanning direction with a liquid discharge head that is long in the direction fixed. The line type has the advantage that high-speed recording is possible because there is no need to move the liquid discharge head as in the serial type.
  In order to print droplets at a high density in any of the serial type and line type liquid discharge heads, the density of the liquid discharge holes for discharging the droplets formed in the liquid discharge head must be increased. There is a need to.
  Accordingly, the liquid discharge head is connected to the manifold and the flow path member having the liquid discharge holes connecting the manifold via the plurality of liquid pressurization chambers, and the plurality of individual electrodes provided so as to cover the liquid pressurization chambers, respectively. And a piezoelectric actuator unit having a plurality of displacement elements including a common electrode facing a plurality of individual electrodes and a piezoelectric ceramic layer sandwiched between them are known (for example, (See Patent Document 1). In this liquid ejection head, the liquid pressurizing chambers connected to the plurality of liquid ejection holes are arranged in a matrix, and the displacement element of the actuator unit provided so as to cover it is displaced by deformation of the piezoelectric body, Ink is ejected from each liquid ejection hole, and printing is possible at a resolution of 600 dpi in the main scanning direction.
JP 2003-305852 A
In the piezoelectric actuator unit of the liquid discharge head as described in Patent Document 1, when the common electrode inside the piezoelectric actuator unit is to be connected to an external circuit, the common electrode connection electrode is formed on the surface of the piezoelectric actuator unit. It is conceivable that the common electrode and the common electrode connection electrode are electrically connected through a through hole provided in the piezoelectric ceramic layer. When creating a piezoelectric actuator unit having such a structure, if the common electrode connection electrode is enlarged so that the positions of the through hole and the common electrode connection electrode are aligned, there is a problem that the warpage of the piezoelectric actuator unit increases. It was.
  Accordingly, an object of the present invention is to provide a piezoelectric actuator unit for a liquid discharge head with high reliability in electrical connection between the common electrode and the connection electrode for the common electrode and a low warpage, and a liquid discharge head and a recording apparatus using the same. It is to provide.
  The piezoelectric actuator unit for a liquid discharge head according to the present invention includes a laminated body in which a plurality of piezoelectric ceramic layers are laminated, and a first surface of the laminated body in a direction different from the first direction and the first direction. A plurality of individual electrodes formed, a common electrode facing the plurality of individual electrodes formed in the laminated body, and a peripheral region of the one main surface, A piezoelectric actuator unit for a liquid discharge head having a common electrode connection electrode electrically connected to the common electrode, wherein the common electrode connection electrode is the piezoelectric in which the common electrode connection electrode is formed It is connected to the common electrode through a conductor in a through hole provided in the ceramic layer, and the planar shape around the through hole of the common electrode connection electrode is a cross shape. The features.
  When there are three or more through-holes provided with the conductor and when viewed in plan, the through-holes are arranged at positions that are not in a straight line, and the common electrode connection electrode is a distance among the through-holes. It is preferable that it is a planar shape with the area | region in which the said connection electrode for common electrodes is not formed on the straight line which connects the two said through-holes which are most separated.
  The common electrode connection electrode is formed by overlapping at least two electrodes having different planar shapes, and at least one of four cross-shaped convex portions around the through hole of the common electrode connection electrode. It is preferable that the convex portion is composed of only one of the two electrodes.
  One of the two electrodes is preferably one of the individual electrodes.
  In the liquid discharge head of the present invention, a plurality of liquid pressurization chambers are opened, and the plurality of liquid pressurization chambers are covered with a flow path member provided with a plurality of liquid discharge holes respectively connected to the plurality of liquid pressurization chambers. As described above, the piezoelectric actuator unit for the liquid discharge head is laminated.
  The recording apparatus of the present invention includes the liquid discharge head, a transport unit that transports a recording medium to the liquid discharge head, and a control unit that controls the piezoelectric actuator unit.
  According to the piezoelectric actuator unit for a liquid discharge head of the present invention, since the common electrode connection electrode has a cross shape, even if the positions of the common electrode connection electrode and the through hole are misaligned, the common electrode connection electrode And the common electrode are easily electrically connected. In addition, the liquid discharge head piezoelectric actuator unit is less likely to warp compared to the case where a circular common electrode connection electrode having a size similar to a cross shape is used.
1 is a schematic configuration diagram of a printer that is a recording apparatus according to an embodiment of the present invention. FIG. 2 is a plan view of a first flow path member and a piezoelectric actuator unit that constitute the liquid ejection head of FIG. 1. FIG. 3 is an enlarged view of a region surrounded by an alternate long and short dash line in FIG. FIG. 3 is an enlarged view of a region surrounded by an alternate long and short dash line in FIG. It is a longitudinal cross-sectional view along the VV line of FIG. It is a top view of the piezoelectric actuator unit which concerns on one Embodiment of this invention. It is a fragmentary longitudinal cross-sectional view of the piezoelectric actuator unit of FIG. (A) is the connection electrode for common electrodes shown in FIG. 6, and its enlarged view of the circumference | surroundings, (b)-(d) is the connection electrode for common electrodes which concerns on other embodiment of this invention. (A)-(c) is a top view for demonstrating the planar shape of the connection electrode for common electrodes.
  FIG. 1 is a schematic configuration diagram of a color ink jet printer which is a recording apparatus including a liquid discharge head according to an embodiment of the present invention. This color inkjet printer 1 (hereinafter referred to as printer 1) has four liquid ejection heads 2. These liquid discharge heads 2 are arranged along the conveyance direction of the printing paper P and are fixed to the printer 1. The liquid discharge head 2 has an elongated shape in a direction from the front to the back in FIG. This long direction is sometimes called the longitudinal direction.
  In the printer 1, a paper feed unit 114, a transport unit 120, and a paper receiver 116 are sequentially provided along the transport path of the printing paper P. In addition, the printer 1 is provided with a control unit 100 for controlling the operation of each unit of the printer 1 such as the liquid discharge head 2 and the paper feeding unit 114.
  The paper supply unit 114 includes a paper storage case 115 that can store a plurality of printing papers P, and a paper supply roller 145. The paper feed roller 145 can send out the uppermost print paper P among the print papers P stacked and stored in the paper storage case 115 one by one.
  Between the paper feed unit 114 and the transport unit 120, two pairs of feed rollers 118a and 118b and 119a and 119b are arranged along the transport path of the printing paper P. The printing paper P sent out from the paper supply unit 114 is guided by these feed rollers and further sent out to the transport unit 120.
  The transport unit 120 includes an endless transport belt 111 and two belt rollers 106 and 107. The conveyor belt 111 is wound around belt rollers 106 and 107. The conveyor belt 111 is adjusted to such a length that it is stretched with a predetermined tension when it is wound around two belt rollers. Thus, the conveyor belt 111 is stretched without slack along two parallel planes each including a common tangent line of the two belt rollers. Of these two planes, the plane closer to the liquid ejection head 2 is a transport surface 127 that transports the printing paper P.
  As shown in FIG. 1, a conveyance motor 174 is connected to the belt roller 106. The transport motor 174 can rotate the belt roller 106 in the direction of arrow A. The belt roller 107 can rotate in conjunction with the transport belt 111. Therefore, the conveyance belt 111 moves along the direction of arrow A by driving the conveyance motor 174 and rotating the belt roller 106.
  In the vicinity of the belt roller 107, a nip roller 138 and a nip receiving roller 139 are arranged so as to sandwich the conveyance belt 111. The nip roller 138 is urged downward by a spring (not shown). A nip receiving roller 139 below the nip roller 138 receives the nip roller 138 biased downward via the conveying belt 111. The two nip rollers are rotatably installed and rotate in conjunction with the conveyance belt 111.
  The printing paper P sent out from the paper supply unit 114 to the transport unit 120 is sandwiched between the nip roller 138 and the transport belt 111. As a result, the printing paper P is pressed against the transport surface 127 of the transport belt 111 and is fixed on the transport surface 127. The printing paper P is transported in the direction in which the liquid ejection head 2 is installed according to the rotation of the transport belt 111. The outer peripheral surface 113 of the conveyor belt 111 may be treated with adhesive silicon rubber. Thereby, the printing paper P can be securely fixed to the transport surface 127.
  The four liquid discharge heads 2 are arranged close to each other along the conveyance direction by the conveyance belt 111. Each liquid discharge head 2 has a head body 13 at the lower end. The lower surface of the head body 13 is a liquid discharge hole surface 4a provided with a large number of liquid discharge holes 8 for discharging liquid (see FIGS. 4, 5 and 6).
  Liquid droplets (ink) of the same color are ejected from the liquid ejection holes 8 provided in one liquid ejection head 2. Each liquid discharge head 2 is supplied with liquid from an external liquid tank (not shown). The liquid discharge hole 8 of each liquid discharge head 2 is opened in the liquid discharge hole surface 4a, and is in one direction (a direction parallel to the print paper P and perpendicular to the transport direction of the print paper P. (Direction) at equal intervals, it is possible to print without gaps in one direction. The colors of the liquid ejected from each liquid ejection head 2 are magenta (M), yellow (Y), cyan (C), and black (K), respectively. Each liquid ejection head 2 is disposed with a slight gap between the lower surface of the head body 13 and the transport surface 127 of the transport belt 111.
  The printing paper P transported by the transport belt 111 passes through the gap between the liquid ejection head 2 and the transport belt 111. At that time, droplets are ejected from the head main body 13 constituting the liquid ejection head 2 toward the upper surface of the printing paper P. As a result, a color image based on the image data stored by the control unit 100 is formed on the upper surface of the printing paper P.
  A separation plate 140 and two pairs of feed rollers 121a and 121b and 122a and 122b are arranged between the transport unit 120 and the paper receiver 116. The printing paper P on which the color image is printed is conveyed to the peeling plate 140 by the conveying belt 111. At this time, the printing paper P is peeled from the transport surface 127 by the right end of the peeling plate 140. Then, the printing paper P is sent out to the paper receiving unit 116 by the feed rollers 121a to 122b. In this way, the printed printing paper P is sequentially sent to the paper receiving unit 116 and stacked on the paper receiving unit 116.
  Note that a paper surface sensor 133 is installed between the liquid ejection head 2 and the nip roller 138 that are the most upstream in the transport direction of the printing paper P. The paper surface sensor 133 includes a light emitting element and a light receiving element, and can detect the leading end position of the printing paper P on the transport path. The detection result by the paper surface sensor 133 is sent to the control unit 100. The control unit 100 can control the liquid ejection head 2, the conveyance motor 174, and the like so that the conveyance of the printing paper P and the printing of the image are synchronized based on the detection result sent from the paper surface sensor 133.
  Next, the head main body 13 constituting the liquid discharge head of the present invention will be described. FIG. 2 is a top view showing the head main body 13 shown in FIG. FIG. 3 is an enlarged top view of a region surrounded by the alternate long and short dash line in FIG. 2 and is a part of the head main body 13. FIG. 4 is an enlarged perspective view of the same position as in FIG. 3, in which some of the flow paths are omitted so that the position of the liquid discharge holes 8 can be easily understood. 3 and 4, for easy understanding of the drawings, a liquid pressurizing chamber 10 (liquid pressurizing chamber group 9), a squeeze 12 and a liquid discharge hole which are to be drawn by broken lines below the piezoelectric actuator unit 21 are shown. 8 is drawn with a solid line. FIG. 5 is a longitudinal sectional view taken along line VV in FIG.
  The head main body 13 has a flat plate-like channel member 4 and a piezoelectric actuator unit 21 on the channel member 4. The piezoelectric actuator unit 21 has a trapezoidal shape, and is disposed on the upper surface of the flow path member 4 so that a pair of parallel opposing sides of the trapezoid is parallel to the longitudinal direction of the flow path member 4. Further, two piezoelectric actuator units 21 are arranged on the flow path member 4 as a whole in a zigzag manner, two along each of two virtual straight lines parallel to the longitudinal direction of the flow path member 4. Yes. The oblique sides of the piezoelectric actuator units 21 adjacent to each other on the flow path member 4 partially overlap in the short direction of the flow path member 4. In the area printed by driving the overlapping piezoelectric actuator unit 21, the droplets ejected by the two piezoelectric actuator units 21 are mixed and landed.
  A manifold 5 that is a part of the liquid flow path is formed inside the flow path member 4. The manifold 5 has an elongated shape extending along the longitudinal direction of the flow path member 4, and an opening 5 b of the manifold 5 is formed on the upper surface of the flow path member 4. A total of ten openings 5 b are formed along each of two straight lines (imaginary lines) parallel to the longitudinal direction of the flow path member 4. The opening 5b is formed at a position that avoids a region where the four piezoelectric actuator units 21 are disposed. The manifold 5 is supplied with liquid from a liquid tank (not shown) through the opening 5b.
  The manifold 5 formed in the flow path member 4 is branched into a plurality of branches (the manifold 5 at the branched portion may be referred to as a sub-manifold 5a). The manifold 5 connected to the opening 5 b extends along the oblique side of the piezoelectric actuator unit 21 and is disposed so as to intersect with the longitudinal direction of the flow path member 4. In a region sandwiched between two piezoelectric actuator units 21, one manifold 5 is shared by adjacent piezoelectric actuator units 21, and the sub-manifold 5 a branches off from both sides of the manifold 5. These sub-manifolds 5 a extend in the longitudinal direction of the head main body 13 adjacent to each other in regions facing the piezoelectric actuator units 21 inside the flow path member 4.
  The flow path member 4 has four liquid pressurizing chamber groups 9 in which a plurality of liquid pressurizing chambers 10 are formed in a matrix (that is, two-dimensionally and regularly). The liquid pressurizing chamber 10 is a hollow region having a substantially rhombic planar shape with rounded corners. The liquid pressurizing chamber 10 is formed so as to open on the upper surface of the flow path member 4. These liquid pressurizing chambers 10 are arranged over almost the entire surface of the upper surface of the flow path member 4 facing the piezoelectric actuator unit 21. Accordingly, each liquid pressurizing chamber group 9 formed by these liquid pressurizing chambers 10 occupies a region having almost the same size and shape as the piezoelectric actuator unit 21. Further, the opening of each liquid pressurizing chamber 10 is closed by adhering the piezoelectric actuator unit 21 to the upper surface of the flow path member 4.
In the present embodiment, as shown in FIG. 3, the manifold 5 branches into four rows of E1-E4 sub-manifolds 5a arranged in parallel with each other in the short direction of the flow path member 4, and each sub-manifold The liquid pressurizing chambers 10 connected to 5a constitute a row of liquid pressurizing chambers 10 arranged in the longitudinal direction of the flow path member 4 at equal intervals, and the four rows are arranged in parallel to each other in the short direction. Yes. Two rows of liquid pressurizing chambers 10 connected to the sub-manifold 5a are arranged on both sides of the sub-manifold 5a.
  As a whole, the liquid pressurizing chambers 10 connected from the manifold 5 constitute rows of the liquid pressurizing chambers 10 arranged in the longitudinal direction of the flow path member 4 at equal intervals, and the rows are 16 rows parallel to each other in the short direction. It is arranged. The number of liquid pressurizing chambers 10 included in each liquid pressurizing chamber row is arranged so as to gradually decrease from the long side toward the short side, corresponding to the outer shape of the displacement element 50 that is an actuator. ing. The liquid discharge holes 8 are also arranged in the same manner. As a result, it is possible to form an image with a resolution of 600 dpi in the longitudinal direction as a whole.
  That is, when the liquid discharge hole 8 is projected so as to be orthogonal to a virtual straight line parallel to the longitudinal direction of the flow path member 4, it is connected to each sub-manifold 5a in the range of R of the virtual straight line shown in FIG. Four liquid discharge holes 8, that is, a total of 16 liquid discharge holes 8 are equally spaced at 600 dpi. Moreover, the individual flow paths 32 are connected to the sub manifolds 5a at intervals corresponding to 150 dpi on average. This is because the individual flow paths 32 connected to the sub-manifolds 5a are not necessarily connected at equal intervals when the liquid ejection holes 8 for 600 dpi are divided and connected to the four sub-manifolds 5a. This means that the individual flow paths 32 are formed at intervals of an average of 170 μm (25.4 mm / 150 = 169 μm intervals if 150 dpi) in the extending direction of 5a, that is, the main scanning direction.
  Individual electrodes 35 to be described later are formed at positions facing the respective liquid pressurizing chambers 10 and a dummy liquid pressurizing chamber to be described later on the upper surface of the piezoelectric actuator unit 21. That is, the individual electrode 35 is formed on the upper surface of the piezoelectric actuator unit 21 in the first direction and in a direction different from the first direction. The individual electrode 35 is slightly smaller than the liquid pressurizing chamber 10, has a shape substantially similar to the liquid pressurizing chamber 10, and fits in a region facing the liquid pressurizing chamber 10 on the upper surface of the piezoelectric actuator unit 21. Is arranged.
  A large number of liquid discharge holes 8 are formed in the liquid discharge surface on the lower surface of the flow path member 4. These liquid discharge holes 8 are arranged at a position avoiding a region facing the sub-manifold 5 a arranged on the lower surface side of the flow path member 4. Further, these liquid discharge holes 8 are arranged in a region facing the piezoelectric actuator unit 21 on the lower surface side of the flow path member 4. These liquid discharge hole groups 7 occupy an area having almost the same size and shape as the piezoelectric actuator unit 21, and the liquid discharge holes 8 are made to drop liquid by displacing the displacement element 50 of the corresponding piezoelectric actuator unit 21. Can be discharged. The arrangement of the liquid discharge holes 8 will be described in detail later. The liquid discharge holes 8 in each region are arranged at equal intervals along a plurality of straight lines parallel to the longitudinal direction of the flow path member 4.
  The above-described flow channel is a flow channel that is directly related to the discharge of droplets, but the flow channel member 4 is provided with a dummy liquid pressurizing chamber that is omitted in the drawing. The dummy liquid pressurizing chambers are formed in a line around the trapezoidal region where the liquid pressurizing chamber 10 is provided. Because the dummy liquid pressurizing chamber makes the rigidity of the flow path member 4 around the liquid pressurizing chamber 10 on the outermost side of the liquid pressurizing chamber 10 close to the state of the other liquid pressurizing chambers 10, Variations in liquid ejection characteristics can be reduced. The shape of the dummy liquid pressurizing chamber is the same as that of the liquid pressurizing chamber, but they are isolated from each other and are not connected to other flow paths. The dummy liquid pressurizing chamber is arranged so as to extend the matrix-like arrangement of the liquid pressurizing chamber 10.
The flow path member 4 included in the head body 13 has a stacked structure in which a plurality of plates are stacked. These plates are, in order from the top surface of the flow path member 4, the cavity plate 22, the base plate 23, the aperture (squeezing) plate 24, the supply plates 25 and 26, the manifold plates 27, 28 and 29, the cover plate 30 and the nozzle plate 31.
It is. A number of holes are formed in these plates. Each plate is aligned and laminated so that these holes communicate with each other to form the individual flow path 32 and the sub-manifold 5a. As shown in FIG. 5, the head main body 13 has a liquid pressurizing chamber 10 on the upper surface of the flow path member 4, the sub-manifold 5a on the inner lower surface side, and the liquid discharge holes 8 on the lower surface. Each portion constituting the path 32 is disposed close to each other at different positions, and the sub manifold 5 a and the liquid discharge hole 8 are connected via the liquid pressurizing chamber 10.
  The holes formed in each plate will be described. These holes include the following. First, the liquid pressurizing chamber 10 formed in the cavity plate 22. Second, there is a communication hole that forms a flow path that connects from one end of the liquid pressurizing chamber 10 to the sub-manifold 5a. This communication hole is formed in each plate from the base plate 23 (specifically, the inlet of the liquid pressurizing chamber 10) to the supply plate 25 (specifically, the outlet of the sub manifold 5a). The communication hole includes the aperture 12 formed in the aperture plate 24 and the individual supply flow path 6 formed in the supply plates 25 and 26.
  Third, there is a communication hole that constitutes a flow channel that communicates from the other end of the liquid pressurizing chamber 10 to the liquid discharge hole 8, and this communication hole is referred to as a descender (partial flow channel) in the following description. . The descender is formed on each plate from the base plate 23 (specifically, the outlet of the liquid pressurizing chamber 10) to the nozzle plate 31 (specifically, the liquid discharge hole 8). Fourthly, there is a communication hole constituting the sub-manifold 5a. The communication holes are formed in the manifold plates 27 to 29.
  Such communication holes are connected to each other to form an individual flow path 32 from the liquid inflow port (the outlet of the submanifold 5a) from the submanifold 5a to the liquid discharge hole 8. The liquid supplied to the sub manifold 5a is discharged from the liquid discharge hole 8 through the following path. First, from the sub-manifold 5a, it passes through the individual supply flow path 6 and reaches one end of the aperture 12. Next, it proceeds horizontally along the extending direction of the aperture 12 and reaches the other end of the aperture 12. From there, it reaches one end of the liquid pressurizing chamber 10 upward. Further, the liquid pressurizing chamber 10 proceeds horizontally along the extending direction of the liquid pressurizing chamber 10 and reaches the other end of the liquid pressurizing chamber 10. While moving little by little in the horizontal direction from there, it proceeds mainly downward and proceeds to the liquid discharge hole 8 opened on the lower surface.
  As shown in FIG. 5, the piezoelectric actuator unit 21 has a laminated structure including two piezoelectric ceramic layers 21a and 21b. Each of these piezoelectric ceramic layers 21a and 21b has a thickness of about 20 μm, and the thickness of the laminated body of the piezoelectric ceramic layers 21a and 21b and the common electrode 34 of the piezoelectric actuator unit 21 is about 41 μm. The piezoelectric actuator unit 21 is laminated on the planar surface of the flow path member 4 where the liquid pressurizing chamber 10 is open, and each of the piezoelectric ceramic layers 21a and 21b includes a plurality of liquid pressurizing chambers 10. It extends so as to straddle (see FIG. 3). The piezoelectric ceramic layers 21a and 21b are made of a lead zirconate titanate (PZT) ceramic material having ferroelectricity.
  6 is a plan view of the piezoelectric actuator unit 21, and FIG. 7 is a partial longitudinal sectional view of the piezoelectric actuator unit 21 of FIG. FIG. 8A is an enlarged view of the connection electrode for the common electrode of the piezoelectric actuator unit 21 of FIG. 6 and its surroundings.
The piezoelectric actuator unit main body 21 includes a common electrode 34 made of a metal material such as Ag—Pd, an individual electrode 35 made of a metal material such as Au, and a metal such as Ag—Pd formed on the individual electrode 35. The individual electrode connection electrode 36 made of a material, the through hole 21c formed in the piezoelectric ceramic layer 21b on the common electrode 34 in the peripheral region of the piezoelectric actuator unit main body 21, and the common electrode 34 in the through hole 21c are formed. The connection electrode main body 37b for common electrodes which consists of metal materials, such as the Ag-Pd type | system | group used. More specifically, a dummy individual electrode 65 that is not opposed to the liquid pressurizing chamber 10 among the individual electrodes 35 is formed on the common electrode 34 on the bottom surface of the opening of the through hole 21c. A connection electrode main body 37b for common electrodes is formed. Note that a conductor may be embedded in the through hole 21 so as to fill the through hole 21, but the common electrode connection electrode body 37 b and the common electrode 34 are electrically connected as described above. The manufacturing process can be simplified by adopting a configuration in which the electrode connection electrode main body 37b or the dummy individual electrode 65 is formed via the conductor hanging in the through hole 21.
  The common electrode connection electrode 37 is composed of the common electrode connection electrode main body 37b and the dummy individual electrode 65 connected to the common electrode connection electrode main body 37b. Since the planar shape around the through-hole 21c of the common electrode connection electrode 37 is a cross shape, the reliability of connection with the common electrode 34 is improved and the warpage of the piezoelectric actuator unit 21 can be reduced. Details of the planar shape of the common electrode connection electrode 37 will be described later.
  Among the individual electrodes 35, those in the liquid pressurizing chamber facing region 80 are formed facing the liquid pressurizing chamber 10. The outside of the liquid pressurizing chamber facing region 80 is called a peripheral region 85, and the individual electrode 35 formed in the peripheral region 85 is a dummy individual electrode 65. Among the individual dummy electrodes 65, the individual electrodes in the columns A, B, and C are dummy liquid pressurizing chambers immediately below. Note that the dummy individual electrodes need not be formed in the peripheral region 85. In addition, the individual electrode 35 includes an individual electrode body 35 a disposed on the upper surface of the piezoelectric actuator unit 40 at a position facing the liquid pressurizing chamber 10 and the dummy liquid pressurizing chamber, and the individual electrode body 35 a to the liquid pressurizing chamber 10. The individual electrode connection electrode 36 is formed on the extraction electrode 35 b so as not to reduce the displacement of the displacement element 50. The thickness of the individual electrode 35 is 0.3 to 1 μm. The individual electrode connection electrode 36 and the common electrode connection electrode body 37b have a thickness of 1 to 10 μm. The common electrode 34 has a thickness of 1 to 2 μm.
  On the common electrode connection electrode body 37b and the individual electrode connection electrode 36, bumps are formed of a resin containing Ag (not shown), and the bumps are electrically connected to electrodes provided in an FPC (Flexible Printed Circuit). Be joined. Although details will be described later, a drive signal (drive voltage) is supplied to the individual electrode 35 from the control unit 100 through the FPC. The drive signal is supplied in a constant cycle in synchronization with the conveyance speed of the print medium P. Further, in the piezoelectric actuator unit 21, dummy individual electrode connection electrodes 68 are formed in a matrix at locations where the individual electrodes 35 are not formed. Bumps are also formed on the dummy individual electrode connection electrodes 68 to be connected to the FPC. Thus, the bumps on the individual electrode connection electrode 36 and the bumps on the dummy individual electrode connection electrode 68 are arranged more than the bumps on the individual electrode connection electrode 36 alone. Since the intervals of the matrix are arranged in a matrix, the connection becomes more stable.
  As shown in FIG. 5, the common electrode 34 and the individual electrode 35 are disposed so as to sandwich only the uppermost piezoelectric ceramic layer 21b. A region sandwiched between the individual electrode 35 and the common electrode 34 in the piezoelectric ceramic layer 21b is called an active portion, and the piezoelectric ceramic in that portion is polarized in the thickness direction. In the piezoelectric actuator unit 21 of the present embodiment, only the uppermost piezoelectric ceramic layer 21b includes an active portion, and the piezoelectric ceramic 21a does not include an active portion and functions as a diaphragm. The piezoelectric actuator unit 21 has a so-called unimorph type configuration.
As will be described later, when a predetermined drive signal is selectively supplied to the individual electrode 35, pressure is applied to the liquid in the liquid pressurizing chamber 10 corresponding to the individual electrode 35. As a result, droplets are discharged from the corresponding liquid discharge ports 8 through the individual flow paths 32. That is, the portion of the piezoelectric actuator unit 21 that faces each liquid pressurizing chamber 10 corresponds to an individual displacement element 50 (actuator) corresponding to each liquid pressurizing chamber 10 and the liquid discharge port 8. That is, in the laminate composed of two piezoelectric ceramic layers, the displacement element 50 having a unit structure as shown in FIG. 5 is provided immediately above the liquid pressurizing chamber 10 for each liquid pressurizing chamber 10. Are formed by a diaphragm 21a, a common electrode 34, a piezoelectric ceramic layer 21b, and individual electrodes 35, and the piezoelectric actuator unit 21 includes a plurality of displacement elements 50. In the present embodiment, the amount of liquid ejected from the liquid ejection port 8 by one ejection operation is about 5 to 7 pL (picoliter).
  An example of a driving method at the time of liquid ejection of the piezoelectric actuator unit 21 in the present embodiment will be described with respect to a driving voltage (drive signal) supplied to the individual electrode 35. When an electric field is applied to the piezoelectric ceramic layer 21b in the polarization direction by setting the individual electrode 35 to a potential different from that of the common electrode 34, the portion to which the electric field is applied functions as an active portion that is distorted by the piezoelectric effect. At this time, the piezoelectric ceramic layer 21b expands or contracts in the thickness direction, that is, the stacking direction, and tends to contract or extend in the direction perpendicular to the stacking direction, that is, the surface direction, due to the piezoelectric lateral effect. On the other hand, since the remaining piezoelectric ceramic layer 21a is an inactive layer that does not have a region sandwiched between the individual electrode 35 and the common electrode 34, it does not spontaneously deform. In other words, the piezoelectric actuator unit 21 uses the upper piezoelectric ceramic layer 21b (that is, the side away from the liquid pressurizing chamber 10) as a layer including the active portion and the lower side (that is, close to the liquid pressurizing chamber 10). This is a so-called unimorph type configuration in which the piezoelectric ceramic layer 21a on the side) is an inactive layer.
  In this configuration, when the individual electrode 35 is set to a predetermined positive or negative potential with respect to the common electrode 34 by the actuator controller so that the electric field and the polarization are in the same direction, a portion sandwiched between the electrodes of the piezoelectric ceramic layer 21b. (Active part) contracts in the surface direction. On the other hand, the piezoelectric ceramic layer 21a, which is an inactive layer, is not affected by an electric field, so that it does not spontaneously shrink and tries to restrict deformation of the active portion. As a result, there is a difference in strain in the polarization direction between the piezoelectric ceramic layer 21b and the piezoelectric ceramic layer 21a, and the piezoelectric ceramic layer 21b is deformed so as to protrude toward the liquid pressurizing chamber 10 (unimorph deformation). .
In an actual driving procedure in the present embodiment, the individual electrode 35 is set to a potential higher than the common electrode 34 (hereinafter referred to as a high potential) in advance, and the individual electrode 35 is temporarily set to the same potential as the common electrode 34 every time there is a discharge request. (Hereinafter referred to as a low potential), and then set to a high potential again at a predetermined timing. As a result, the piezoelectric ceramic layers 21a and 21b return to the original shape at the timing when the individual electrode 35 becomes low potential, and the volume of the liquid pressurizing chamber 10 is compared with the initial state (the state where the potentials of both electrodes are different). To increase. At this time, a negative pressure is applied to the liquid pressurizing chamber 10 and the liquid is sucked into the liquid pressurizing chamber 10 from the manifold 5 side. Thereafter, at the timing when the individual electrode 35 is set to a high potential again, the piezoelectric ceramic layers 21a and 21b are deformed so as to protrude toward the liquid pressurizing chamber 10, and the volume of the liquid pressurizing chamber 10 is reduced, so Becomes a positive pressure, the pressure on the liquid rises, and droplets are discharged. That is, a drive signal including a pulse based on a high potential is supplied to the individual electrode 35 in order to eject a droplet. The ideal pulse width is AL (Acoustic Length), which is the length of time during which the pressure wave propagates from the manifold 5 to the liquid discharge hole 8 in the liquid pressurizing chamber 10. According to this, when the inside of the liquid pressurizing chamber 10 is reversed from the negative pressure state to the positive pressure state, both pressures are combined, and the liquid droplet can be ejected with a stronger pressure.
Next, the shape of the common electrode connection electrode 37 composed of the common electrode connection electrode main body 37b and the dummy individual electrode 65 connected to the common electrode connection electrode main body 37b will be described in detail. When the thickness of the piezoelectric actuator unit 21 (more specifically, from the lower surface of the piezoelectric ceramic layer 21a excluding the surface electrode to the upper surface of the piezoelectric ceramic layer 21b) is thin, for example, 100 μm or less, the common electrode connection electrode Since 37b has a long planar shape as compared with the individual electrode 35, warping is likely to occur. The cause of warping is when the piezoelectric ceramic layers 21a, 21b and the common electrode connection electrode 37 are fired simultaneously, when the common electrode connection electrode 37 is baked on the fired piezoelectric actuator body, or formed by sputtering, etc. It occurs in either case. Causes of warping include differences in firing shrinkage behavior between the piezoelectric ceramic layers 21a, 21b and the common electrode connection electrode 37, differences in thermal expansion coefficients between the piezoelectric ceramic layers 21a, 21b and the common electrode connection electrode 37, and the like. When the process for forming the common electrode connection electrode 37 includes a process at a high temperature, it inevitably occurs. In any case, when the thickness of the piezoelectric actuator unit 21 is 50 μm or less, the warp becomes more remarkable, and the structure of the present invention is particularly useful. Further, when the thickness of the common electrode connection electrode 37 is 2% or more, particularly 5% or more of the thickness of the piezoelectric actuator unit 21, the warp becomes more prominent, and the structure of the present invention is particularly useful. .
  As shown in FIG. 7A, the planar shape around the through-hole 21c of the common electrode connection electrode 37 composed of the common electrode connection electrode main body 37b and the dummy individual electrode 65 is within a range indicated by 37a. It has a cross shape. Here, the cross shape is a shape in which the convex portions 37a-1 to 4 extend in four directions from the center, and the angle formed by the convex portions 37a-1 to 37 (the direction in which the convex portion extends and the convex portion are The angle formed by the extending direction is almost a right angle, and the specific angle range is 75 to 105 degrees. The cross shape is provided so that electrical connection can be made even when the positions of the through-hole 21c and the common electrode connection electrode 37 are shifted, and the convex portions 37a-1 to 4 can be further extended. It does not matter, but it is preferred that at least one is not connected to the other.
  The details of the cross shape will be further described with reference to FIGS. In each figure, the through-holes 521c, 621c, 721c and the common electrode connection electrodes 537, 637, 737 are connected, and FIG. 9 (a) is one of the structures of the present invention. FIGS. 9B and 9C are structures outside the scope of the present invention.
  In FIG. 9B, the periphery of the through hole 621c is circular so that the connection is made even if the through hole 621c and the common electrode connection electrode 637 are displaced. In FIG. 9C, the common electrode connection electrode 737 is thick so that the connection can be made even if the through hole 721 c and the common electrode connection electrode 737 are displaced. Such a structure increases the reliability of the connection when only considering the connection when the shift occurs. On the other hand, in both cases of FIGS. 9B and 9C, the common electrode connection electrodes 637 and 737 exist as large-area blocks (two-dimensional expansion), and therefore, the piezoelectric actuator unit of the portion is present. The warpage will increase. When the liquid discharge head 2 is manufactured by joining the piezoelectric actuator unit to the flow path member 4, first, a problem such as the piezoelectric actuator unit breaking at the time of joining occurs. Furthermore, since the piezoelectric actuator unit is deformed and joined when joining, the piezoelectric ceramic layer is joined in a strained state, and thus discharge characteristics vary. Therefore, the piezoelectric actuator unit for the liquid discharge head needs to have particularly little warpage, and discharge variation can be reduced by setting it to about 10 μm or less, particularly 5 μm or less.
In the warp caused by the difference in the firing shrinkage behavior or the difference in thermal expansion coefficient, the influence varies greatly depending on the shape of the common electrode connection electrode. When the size of the connection electrode for the common electrode is about 5 times x 5 times the thickness of the piezoelectric actuator unit, depending on the physical properties of each material, the size of the portion where the connection electrode for the common electrode is formed The warpage falls within about 10% of the thickness of the piezoelectric actuator unit. Further, when the length is increased by 5 times the width, the warpage is the same. This is considered to be because if the width is about 5 times the thickness, the difference in firing shrinkage behavior or the difference in thermal expansion coefficient is almost eliminated by warping in the width direction and does not accumulate in the length direction. In comparison, if the width is 7 times or more of the thickness, if the length is about 5 times the thickness, the warpage is 10 times.
The warpage exceeds 10% when the length is increased. Therefore, when it is intended to reduce the warp, it is preferable that the connection electrode for the common electrode is not formed in a shape that is two-dimensionally expanded. On the other hand, when the connection electrode for the common electrode is simply formed in an elongated shape, disconnection is likely to occur when a displacement occurs in the width direction.
  Therefore, as shown in FIG. 9A, the shape of the common electrode connection electrode 537 around the through-hole 521c is formed in a cross shape. By adopting such a shape, the same connectivity as shown in FIGS. 9B and 9C can be maintained with respect to the horizontal and vertical misalignments in FIG. Even if it exists, the width can be reduced to w or less. For example, if w is 5 times that of the piezoelectric actuator unit, r = 7.07... If the two-dimensional extension of the common electrode connection electrode 537 is expressed by a circular diameter. Is about 10%. In FIG. 9A, regarding the positional deviation in the oblique direction, the connectivity is lower than in FIGS. 9B and 9C, but such positional deviation is less likely to occur.
  From another viewpoint, the common electrode connection electrode 537 is cut out from four directions so that the planar shape of the common electrode connection electrode 537 around the through-hole 521c is a circle having a predetermined diameter. In other words, the remaining shape is a cross shape. Speaking from the above points, the planar shape of the common electrode connection electrode 537 around the through hole 521c should be less than or equal to a circle having a diameter seven times the thickness of the region in which the conductor is clogged. Is preferred.
  Returning to the description of FIG. Here, since the shape of the connection electrode main body 37b for the common electrode is a cross shape as shown in the region 37a, the certainty of connection with the common electrode 34 is increased. The cross shape is formed by overlapping the dummy individual electrode 65. Since the dummy individual electrode 65 is thinner than the common electrode connection electrode body 37b, the warp of the piezoelectric actuator unit 21 is reduced. Furthermore, since the dummy individual electrode 65 can be formed simultaneously with the individual electrode 35, it can be formed without increasing the number of steps. Furthermore, according to such a configuration, the individual electrodes 35 are uniformly formed over the entire surface of the piezoelectric actuator unit including the portion without avoiding the place where the common electrode connection electrode body 37b is formed. Therefore, the distribution of the individual electrodes 35 is uniform compared to the case where the individual electrodes 35 are formed so as to avoid the portion where the connection electrode main body 37b for the common electrode is formed. The warpage of the actuator unit can be reduced.
  By providing such common electrode connection electrodes 37 at any or all of the four corners of the piezoelectric actuator unit 21, the number of displacement elements 50 affected by warpage can be reduced. Further, the length of the common electrode connection electrode 37 is 1/5 or less of the length of the side on which the common electrode connection electrode 37 is formed, particularly 1/7 or less. The number of elements 50 can be reduced. Further, when the cross shape is provided at a plurality of portions, it is preferable that the directions in which the convex portions extend in the independent wiring are the same direction, and in the wiring connected in parallel, the direction in which the convex portions extend is 45. It is preferable that the direction is shifted. In the case of a cross shape, there is a slight possibility that connection will not be made when there is a displacement in an oblique direction. Since it is limited to the case where it deviates, poor connection is unlikely to occur. For wiring connected in parallel, if the direction is shifted by 45 degrees, even if one through-hole and the common electrode connecting body are obliquely displaced and become poorly connected, Since the other through-holes and the common electrode connection electric conductor are connected, connection failure is unlikely to occur.
Further, in order to increase the reliability of connection with the common electrode 34, the side surface of the through hole 21b is inclined with respect to the main surface of the piezoelectric actuator 21 so that the opening of the main surface of the piezoelectric actuator 21 is larger than the bottom surface. The angle of inclination is preferably 20 to 40 degrees. Thereby, even when the dummy individual electrode 65 or the common electrode connection electrode main body 37b is thin, the breakage occurs in the middle of the edge of the opening of the through hole 21c on the main surface of the piezoelectric actuator 21 or the side surface of the through hole 21 that is nearly perpendicular. It can be difficult.
  9B to 9D show common electrode connection electrodes 237, 337, and 437 according to another embodiment of the present invention. Any of these can be provided in the piezoelectric actuator unit 21 in the same manner as the common electrode connection electrode 37. In any of the common electrode connection electrodes 237, 337, and 437, the planar shape of the common electrode connection electrodes 237, 337, and 437 around the through holes 221c, 321c, and 421c is a cross shape, thereby ensuring connection reliability. Higher and less warped.
  The common electrode connection electrode 237 is composed of a single electrode. In this case, the dummy individual electrodes 65 around the common electrode connection electrode 237 are notched so as not to be connected to the common electrode connection electrode 237, or the arrangement thereof is shifted. For example, when the composition is such that the common electrode connection electrode 237 and the dummy individual electrode 65 react, it is preferable that the common electrode connection electrode 237 is constituted by a single electrode.
  The common electrode connection electrode 337 is composed of a single electrode. Three through-holes 321c are formed, but when they form three or more through-holes 321c that are not arranged on a straight line, they are not arranged on a straight line, and the distance among the through-holes 521c. By providing a region where the common electrode connection electrode 337 is not formed on the straight line L that connects the two through-holes that are farthest apart from each other, the common electrode connection electrode 337 does not have a long shape connected in one direction. Yes. The warpage of the piezoelectric actuator unit can be reduced because the electrodes are not continuous in one direction.
  The common electrode connection electrode 437 includes a common electrode connection electrode main body 437b and a dummy individual electrode 465 connected to the common electrode connection electrode main body 437b. The dummy individual electrode 465 is formed with the same composition and the same thickness as the individual electrode 35. The dummy individual electrode 465 is different in shape and arrangement from a dummy individual electrode (not shown but formed in the same manner as the piezoelectric actuator 21) that is not connected to the individual electrode 35 or the common electrode connection electrode body 437b. Since the distribution of the individual electrode 35 and the dummy individual electrode on the piezoelectric actuator 21 is averaged compared to the case where there is no dummy individual electrode 465 connected to the common electrode connection electrode body 437b, the piezoelectric actuator 21 Warpage can be reduced. Further, since the dummy individual electrode 465 is thin and has a cross shape in which the widths of the convex portions 437a-2 and 4 are constant, there is almost no increase in warpage due to the cross shape, and the common electrode connection electrode 437 is formed. It can be a cross shape.
  The liquid discharge head as described above can be manufactured as follows, for example. First, the piezoelectric material used for the piezoelectric ceramic layer is lead zirconate titanate (PZT), and a slurry is prepared by mixing PZT powder, a binder, and a solvent. From this slurry, a roll coater method is used as a molding method. Green sheets to be the piezoelectric ceramic layers 21a and 21b are produced.
  The Ag—Pd paste that becomes the common electrode 34 is printed on the green sheet that becomes the piezoelectric ceramic layer 21 a and dried. A through hole 21 is formed by punching out a green sheet to be the piezoelectric ceramic layer 21a. These green sheets are laminated by heating and pressing or the like and fired at a temperature of 1020 ° C., for example. After firing, Au paste is printed and fired to form individual electrodes 35. Further, the Ag-Pd paste is printed and fired to form the individual electrode connection electrode 36 and the common electrode connection electrode body 37b at the same time. These may be formed separately, but the manufacturing process can be simplified by performing them simultaneously. In this way, the piezoelectric actuator unit 21 can be manufactured.
  When the green sheets are stacked, the shape of the through hole 21c is almost the same as the shape when formed by pressing with a flat plate mold or the like. When laminating the green sheets, the side surface of the through-hole 21 c can be inclined with respect to the main surface of the piezoelectric actuator unit 21 by performing isostatic pressing.
  The hydrostatic press is performed as follows. First, two green sheets are temporarily laminated, then placed in a resin bag, air is discharged into the bag, and vacuum lamination is performed. Two green sheets that have been vacuum-laminated are placed in water at 60 to 90 ° C., and a water pressure of 25 to 75 MPa is applied for 1 to 2 minutes. At this time, in the green sheet laminate pressed through the deformable resin bag, the green sheet that becomes the piezoelectric ceramic layer 21b around the through hole 21c is deformed, and the side surface of the via hole 21c is crushed into an oblique shape. . The angle of the side surface of the through-hole 21c that is inclined during lamination can be adjusted by changing the lamination pressure and the ease of deformation of the resin bag. By increasing the laminating pressure or making the resin bag easily deformable, the side surface is more crushed and the angle becomes smaller. In order to easily deform the resin bag, the material may be softened or the thickness may be reduced. In addition, these shapes do not have a big change in baking, and are kept as it is.
  Next, the flow path member 4 is produced by laminating plates 22 to 31 obtained by a rolling method or the like. Holes to be the manifold 5, the individual supply flow path 6, the liquid pressurizing chamber 10, the descender, and the like are processed in the plates 22 to 31 into a predetermined shape by etching.
  These plates 22 to 31 are preferably formed of at least one metal selected from the group consisting of Fe—Cr, Fe—Ni, and WC—TiC, particularly when ink is used as a liquid. Since it is desired to be made of a material having excellent corrosion resistance against ink, Fe-Cr is more preferable.
  The piezoelectric actuator unit 21 and the flow path member 4 can be laminated and bonded via an adhesive layer, for example. As the adhesive layer, a well-known layer can be used, but in order not to affect the piezoelectric sintered body and the flow path member 4, an epoxy resin, phenol resin, polyphenylene having a thermosetting temperature of 100 to 150 ° C. It is preferable to use at least one thermosetting resin adhesive selected from the group of ether resins. By heating to the thermosetting temperature using such an adhesive layer, the piezoelectric actuator unit 21 and the flow path member 4 can be heat-bonded. In this way, the liquid discharge head 2 can be manufactured.
DESCRIPTION OF SYMBOLS 1 ... Printer 2 ... Liquid discharge head 4 ... Flow path member 4a ... Liquid discharge hole surface 5 ... Manifold 5a ... Sub-manifold 5b ... Manifold opening 6 ... Individual Supply flow path 8 ... Liquid discharge hole 9 ... Liquid pressurization chamber group 10 ... Liquid pressurization chamber 11a, b, c, d ... Liquid pressurization chamber row 12 ... Squeeze 13 ... Liquid discharge head main body 15a, b, c, d ... Liquid discharge hole row 16 ... Liquid discharge hole opening area 21 ... Piezoelectric actuator unit 21a ... Piezoelectric ceramic layer (vibrating plate)
21b: Piezoelectric ceramic layer 21c, 221c, 321c, 421c ... Through hole 22-31 ... Plate 32 ... Individual flow path 34 ... Common electrode 35 ... Individual electrode 35a ... Individual Electrode body 35b... Extraction electrode 36... Individual electrode connection electrode 37, 237, 337, 437... Common electrode connection electrode 37b, 437b... Common electrode connection electrode body 37a, 237a, 437a .. Cross shape of common electrode connection electrode 37a-1 to 4, 437a-1 to 4 ... Cross-shaped convex portion of connection electrode for common electrode 50 ... Displacement element 65 ... Dummy individual electrode 65a ..Dummy individual electrode for common electrode 68... Connection electrode for dummy individual electrode 80...

Claims (6)

  1.   A laminated body in which a plurality of piezoelectric ceramic layers are laminated; a plurality of individual electrodes formed on one main surface of the laminated body in a direction different from the first direction and the first direction; A common electrode facing the plurality of individual electrodes formed inside the multilayer body, and a common electrode formed in a peripheral region of the one main surface and electrically connected to the common electrode A piezoelectric actuator unit for a liquid discharge head, wherein the common electrode connection electrode is a conductor in a through-hole provided in the piezoelectric ceramic layer in which the common electrode connection electrode is formed. A piezoelectric actuator unit for a liquid discharge head, wherein the planar shape around the through hole of the connection electrode for the common electrode is a cross shape. .
  2.   When there are three or more through-holes provided with the conductor and when viewed in plan, the through-holes are arranged at positions that are not in a straight line, and the common electrode connection electrode is a distance among the through-holes. 2. The liquid discharge head piezoelectric element according to claim 1, wherein a region where the connection electrode for the common electrode is not formed is on a straight line connecting the two through-holes that are farthest apart from each other. Actuator unit.
  3.   The common electrode connection electrode is formed by overlapping at least two electrodes having different planar shapes, and at least one of four cross-shaped convex portions around the through hole of the common electrode connection electrode. 3. The piezoelectric actuator unit for a liquid discharge head according to claim 1, wherein a convex portion is formed of only one of the two electrodes.
  4.   4. The piezoelectric actuator unit for a liquid discharge head according to claim 3, wherein one of the two electrodes is one of the individual electrodes.
  5.   The plurality of liquid pressurization chambers are opened, and a flow path member including a plurality of liquid discharge holes respectively connected to the plurality of liquid pressurization chambers covers the plurality of liquid pressurization chambers. A liquid discharge head, comprising: the liquid discharge head piezoelectric actuator unit according to any one of the stacked layers.
  6.   6. A recording apparatus comprising: the liquid discharge head according to claim 5; a transport unit that transports a recording medium to the liquid discharge head; and a control unit that controls the piezoelectric actuator unit.
JP2011068187A 2011-03-25 2011-03-25 Piezoelectric actuator unit for liquid ejection head, liquid ejection head using the same, and recording apparatus Withdrawn JP2012201009A (en)

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JP2014177049A (en) * 2013-03-15 2014-09-25 Ricoh Co Ltd Liquid droplet discharge head, liquid discharge device, image formation device, polarization processing method of electromechanical conversion element, and method of manufacturing liquid droplet discharge head
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JPWO2015099046A1 (en) * 2013-12-25 2017-03-23 京セラ株式会社 Piezoelectric substrate, assembly using the same, liquid discharge head, and recording apparatus
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