JP2011080962A - Apparatus and method for measuring runout - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for measuring a runout which can accurately measure a runout amount of an object to be checked. <P>SOLUTION: The runout measuring apparatus (1) includes: a sensor holder (5) movable in a checking direction approximately parallel to a central axis of the object (10) to be checked; position sensors (7a, 7b), mounted on the sensor holder (5), for acquiring position information representing the position of the object to be checked on the plane orthogonal to the checking direction at a number of measuring positions along the checking direction; a drive part (6) for moving the sensor holder (5) along the checking direction; and a processing part (83) which derives the center position of the object (10) to be checked from the position information obtained at a number of the measuring positions, and then calculates the runout amount of the object (10) to be checked at least at one measuring position from position relationship between the center position and the central axis of the object (10) to be checked. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a shake measuring apparatus and a shake measuring method for measuring a shake amount with respect to a central axis of an inspection object at a predetermined position of the inspection object.

  Conventionally, in order to determine whether or not a rod-shaped inspection object is a non-defective product, a technique has been developed to measure the amount of deflection when the inspection object is fixed and rotated by the rotation shaft (for example, a patent) (Ref. 1 and 2).

  In such a technique for measuring the shake amount, the measurement light is irradiated to the side surface of the inspection object while rotating the inspection object. The light reflected or diffracted by the inspection object is received by the light receiving element, and the shake amount is calculated based on the luminance distribution of the received light.

JP 2006-250696 A JP 2008-224546 A

  In the above technique, in order to accurately measure the shake amount, the inspection target must be accurately attached to the holding portion of the inspection apparatus that measures the shake amount. For example, the rotation axis of the test object, the test object so that the rotation axis does not coincide in the holding portion of the inspection apparatus becomes attached to the holding portion, the measurement value of the shake amount is the deviation of the two rotational axis Will be included. In such a case, the inspection apparatus cannot accurately measure the shake amount. In addition, in order to ensure that the posture of the inspection object attached to the holding unit is always constant, the mechanism of the holding unit must be refined, and thus the mechanism of the holding unit is complicated and expensive. .

  Accordingly, an object of the present invention is to provide a shake measuring device and a shake measuring method capable of accurately measuring the shake amount of an inspection object.

According to the first aspect of the present invention, a shake measuring device is provided as one aspect of the present invention. The shake measuring device is attached to the sensor holding part (5) movable in the inspection direction substantially parallel to the central axis of the inspection object (10) and the sensor holding part (5), and has a plurality of along the inspection direction. At the measurement position, a position sensor (7a, 7b) that acquires position information indicating the position of the inspection object in a plane orthogonal to the inspection direction, and a drive unit (6) that moves the sensor holding unit (5) along the inspection direction. ) And position information acquired at a plurality of measurement positions, the center position of the inspection object (10) is obtained, and at least one measurement position is determined from the positional relationship between the center position and the center axis of the inspection object (10). And a processing unit (83) for calculating a shake amount of the inspection object (10).
By having such a configuration, the shake measuring apparatus can examine the positional relationship between the center position and the center axis of the inspection object at the measurement position without moving the inspection object, so that the posture of the inspection object is Even if the measurement is different, the amount of shake can be measured accurately.

According to the second aspect of the present invention, the processing unit (83) includes the center at the two measurement positions set on the component that is the measurement standard of the shape error of the inspection object (10) among the plurality of measurement positions. It is preferable to calculate a straight line passing through the position as the central axis of the inspection object (10).
Thus, every time the shake measuring device is held by the shake measuring device, the center axis can be accurately obtained even if the position of the inspection object and the direction of the center axis are different. For this reason, the shake measuring apparatus can accurately measure the shake amount even when the posture of the inspection object is different for each measurement.

According to the third aspect of the present invention, the position sensor (7a, 7b) outputs first parallel light having a width wider than the outer diameter of the inspection object (10) in a plane orthogonal to the inspection direction. A first light source, a first light receiver whose light-receiving surface is directed to face the light-emitting surface of the first light source across the inspection object (10), and receives the first parallel light; A second parallel having a width wider than the outer diameter of the inspection object (10) along a second direction orthogonal to the first direction irradiated with the first parallel light in a plane orthogonal to the direction. A second light source that outputs light and a second light receiving unit that receives the second parallel light with the light receiving surface directed so as to face the light emitting surface of the second light source across the inspection object (10). The position information includes the light intensity distribution in the second direction detected by the first light receiver and the second light reception. The light intensity distribution in the first direction detected by the processing unit (83) determines the first center of the light intensity area below a predetermined threshold from the light intensity distribution in the first direction. The center position of the inspection object (10) in the second direction is the center position of the inspection object (10) in the direction, and the center of the region of light intensity below a predetermined threshold is determined from the light intensity distribution in the second direction. It is preferable to set the position.
Thereby, this shake measuring device can measure the center position of the inspection object at the predetermined measurement position without contacting the inspection object. Therefore, this shake measuring apparatus can prevent the inspection object from moving during the measurement, or from scratching the surface of the inspection object.

  According to the description of claim 4, the processing unit (83), when the amount of deflection of all of the plurality of measurement positions are within a predetermined range, the inspection object (10) is judged to be good, whereas, a plurality of If any one of the measurement positions is out of the predetermined range, it is preferable that the inspection object (10) is determined as a defective product.

Furthermore, according to the description of claim 5, a shake measurement method is provided as another embodiment of the present invention. Such a shake measuring method includes a step of moving the position sensors (7a, 7b) along an inspection direction substantially parallel to the central axis of the fixed inspection object (10), and an inspection by the position sensors (7a, 7b). From a plurality of measurement positions along the direction, a step of acquiring position information indicating the position of the inspection object in a plane orthogonal to the inspection direction, and from the position information acquired at the plurality of measurement positions, the inspection object (10) And a step of calculating a shake amount of the inspection object (10) at at least one measurement position from a positional relationship between the center position and the central axis of the inspection object (10).
By including such a procedure, this shake measurement method can examine the positional relationship between the center position of the inspection object at the measurement position and the central axis without moving the inspection object, so that the posture of the inspection object is Even if the measurement is different, the amount of shake can be measured accurately.

  In addition, the code | symbol in the parenthesis attached | subjected to each said means is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a schematic block diagram of the shake measuring device by one Embodiment of this invention. It is a top view which shows the positional relationship in the horizontal surface of a position sensor and a test target object. It is a schematic block diagram of the control apparatus of a shake measuring device. It is a figure which shows an example of intensity distribution of the light received by the light receiver of the position sensor. It is a figure which shows the relationship between the center axis | shaft calculated from the center position of the test target object in each measurement position and datum point in one embodiment. It is an operation | movement flowchart of the shake measurement process performed by the shake measurement apparatus which concerns on one Embodiment of this invention.

Hereinafter, a shake measuring apparatus according to an embodiment of the present invention will be described.
In this embodiment, the inspection object is an assembly of a plurality of parts such as, for example, a sub-assembly of a pipe for direct injection, and the assembly includes a plurality of parts along the longitudinal direction (that is, the central axis direction). It is formed into a rod shape by welding or assembling. Therefore, in this inspection object, when other parts are attached to the reference part that is the measurement standard of the shape error by shifting from the position defined in the specification, the central axis determined by the reference part and the other parts The center position in the plane orthogonal to the central axis of the line does not match. Therefore, this shake measuring apparatus measures the amount of shake caused by the deviation between the center axis of the inspection object and the center position of each component.
This shake measuring device is set on the reference part of the inspection object by holding the inspection object fixedly and moving the position sensor along a direction substantially parallel to the central axis of the inspection object. The center coordinates of the inspection object are measured at a plurality of measurement positions including the datum point. And this shake measuring device obtains the central axis of the inspection object based on the center coordinates of the inspection object at the datum point, and based on the positional relationship between the central coordinates and the central axis at each measurement position, The shake amount at is calculated.

  FIG. 1 is a schematic configuration diagram showing an overall configuration of a shake measuring apparatus 1 according to one embodiment of the present invention. Shake the measuring apparatus 1 includes a test stand 2, a work holding portion 3, a guide member 4, a sensor holding portion 5, a drive unit 6, the position sensors 7a, and 7b, the control unit 8, and a display unit 9 Have. Then, the shake measuring device 1 measures the amount of shake from the central axis 10 a of the inspection object 10 at a predetermined measurement position of the inspection object 10 attached to the workpiece holding unit 3.

The inspection table 2 fixes the inspection object 10 so that the central axis 10a is substantially vertical. For this purpose, the inspection table 2 includes a substrate 2a to which the work holding unit 3 is attached, and a guide support member 2b attached to the substrate 2a perpendicularly.
The work holding unit 3 holds the inspection object 10 on the substrate 2a in a fixed manner so that the central axis 10a of the inspection object 10 faces in a substantially vertical direction. However, as will be described later, the direction of the central axis 10a is calculated based on the measured values of the position sensors 7a and 7b. Therefore, the inspection object 10 only needs to be fixed so as to be within the measurable range of the position sensors 7a and 7b, and the central axis 10a does not need to be strictly oriented in the vertical direction. The direction of the central axis 10a and the relative position with respect to the position sensors 7a and 7b may be different each time the holder 3 is attached.
The work holding unit 3 includes, for example, a chuck device such as a collet chuck, a scroll chuck, or a magnet chuck. The workpiece holding unit 3 may fix or open the inspection object 10 manually, or may fix or open the inspection object 10 by a control signal from the control device 8.

The guide member 4 is attached to the guide support member 2 b of the inspection table 2. The guide member 4 is a mechanism to which the sensor holding part 5 can be moved in the vertical direction, that is, the inspection direction in the present embodiment, and the position sensors 7a and 7b held by the sensor holding part 5 can be precisely positioned. For example, it has a linear motion guide or a ball screw. The guide member 4 is driven by the drive unit 6 to move the sensor holding unit 5 in the vertical direction.
The sensor holding part 5 is attached to the guide member 4 so as to be movable in the vertical direction. And the sensor holding | maintenance part 5 acquires position information 7a, 7b so that the position sensor 7a and the position sensor 7b can acquire the positional information which represents the position in two mutually orthogonal directions within the same horizontal surface of the test object 10, respectively. The substrate 2a is held so that the height from the upper surface is the same. Further, the sensor holding unit 5 is formed so that the position sensors 7 a and 7 b can be lowered along the side surface of the inspection object 10 held by the workpiece holding unit 3.
Therefore, the sensor holding unit 5 is formed below the support member 5a, a support member 5a formed in a ring shape or a mouth shape in a horizontal plane, an engagement member 5b for attaching the support member 5a to the guide member 4, and the like. And a plurality of protrusions to which the position sensors 7a and 7b are attached.

The drive unit 6 generates power for driving the guide member 4. Therefore, the drive part 6 has a servomotor, for example. The drive unit 6 is attached to the guide member 4 so that the power generated by the drive unit 6 can be transmitted to the guide member 4 directly or indirectly via a gear or the like. The drive unit 6 is electrically connected to the control device 8 and receives a control signal from the control device 8. And the drive part 6 drives the guide member 4 according to the control signal from the control apparatus 8, so that the position sensors 7a and 7b are at a predetermined position in the height direction with respect to the inspection object 10. Alternatively, the sensor holding unit 5 is moved in the vertical direction so that the position sensors 7a and 7b move in the vertical direction at a constant speed.
It should be noted that a rotary encoder is attached to the rotary shaft of the servomotor of the drive unit 6 so that the moving speed of the sensor holding unit 5 is accurately constant or the heights of the position sensors 7a and 7b are accurately obtained. It may be attached. Alternatively, a linear encoder may be attached to the sensor holding unit 5. These encoders are electrically connected to the control device 8, and measurement signals from the encoder are sent to the control device 8 as information for controlling the drive unit 6.

  Each of the position sensors 7a and 7b acquires position information indicating the horizontal position of the inspection object 10 at a plurality of predetermined measurement positions. The measurement position is set to, for example, a height corresponding to a datum point located on the reference part and a height corresponding to a position of a part other than the reference part. For example, each of the position sensors 7a and 7b includes a light source that outputs parallel light having a predetermined width in the horizontal direction and a light receiving element in which a plurality of light receiving elements (for example, CCD or C-MOS) are arranged in a line in the horizontal direction. With a bowl. The position sensors 7a and 7b output the intensity distribution in the horizontal direction of the light received by the light receiver to the control device 8 as position information.

FIG. 2 is a schematic plan view showing the positional relationship between the position sensors 7a and 7b and the inspection object 10 in the horizontal plane.
The light source 71a and the light receiver 72a are installed so that the light emitting surface of the light source 71a of the position sensor 7a and the light receiving surface of the light receiver 72a face each other with the inspection object 10 interposed therebetween. Similarly, the light source 71b and the light receiver 72b are installed so that the light emitting surface of the light source 71b of the position sensor 7b and the light receiving surface of the light receiver 72b are opposed to each other with the inspection object 10 interposed therebetween. Further, the light sources 71a and 71b are arranged so that the parallel light emitted from the light source 71a and the parallel light emitted from the light source 71b are orthogonal to each other. For convenience of explanation, the direction in which light is emitted from the light source 71a is taken as the Y axis, and the direction in which light is emitted from the light source 71b is taken as the X axis.

  The width of the parallel light emitted from the light source 71a is wider than the diameter of the inspection object 10, so that the light receiver 72a is blocked by the inspection object 10 out of the parallel light emitted from the light source 71a. Receiving the part that is not. Similarly, the width of the parallel light emitted from the light source 71b is wider than the diameter of the inspection object 10, and therefore the light receiver 72b includes the inspection object 10 out of the parallel light emitted from the light source 71b. The part that is not obstructed by the light is received. Therefore, the light receiver 72a, the intensity distribution in the horizontal direction of the light received by 72b is a low strength concave distribution of the region corresponding to the outer diameter of the test object 10. And according to the position of the test object 10, the position of the area | region where the intensity | strength of light is low is also determined. Therefore, this light intensity distribution represents the position of the inspection object 10. Especially in the case of this embodiment, the intensity distribution of light received by the photo detector 72a, because the light source 71a outputs a collimated light having a spread in the X direction represents the position of the test object 10 in the X direction. On the other hand, the intensity distribution of light received by the light receiver 72b, since the light source 71b to output parallel light having a spread in the Y-direction represents the position of the test object 10 in the Y direction.

The control device 8 is configured by a computer, for example. The control device 8 controls each part of the shake measuring device 1. Further, the control device 8 obtains a shake amount at a predetermined measurement position of the inspection object 10 based on the position information in the horizontal direction of the inspection object 10 acquired from the position sensors 7a and 7b.
FIG. 3 is a schematic configuration diagram of the control device 8. The control device 8 includes a communication interface unit 81, a storage unit 82, and a processing unit 83.

The communication interface unit 81 includes an interface circuit for connecting the control device 8 to the position sensors 7 a and 7 b and the driving unit 6. When the communication interface unit 81 receives position information of the inspection target 10 in the X direction and the Y direction from the position sensors 7 a and 7 b, the communication interface unit 81 passes the information to the processing unit 83. In addition, the communication interface unit 81 outputs a control signal for controlling the driving unit 6 received from the processing unit 83 to the driving unit 6, and receives a signal indicating the state of the driving unit 6 received from the driving unit 6. To pass.
The storage unit 82 includes a magnetic recording medium such as a hard disk, a random access memory (RAM), a semiconductor memory such as a flash memory, a readable / writable optical recording medium such as a CD-RW and a DVD-R / W, and its access. Having at least one of the devices.
The storage unit 82 stores programs used in the processing unit 83 and various data.
The storage unit 82 passes various programs and data to the processing unit 83 in response to a request from the processing unit 83.

The processing unit 83 includes one or a plurality of processors and their peripheral circuits. And the process part 83 calculates | requires the shake amount equivalent to twice the deviation | shift amount of the center position of the test object 10 in the horizontal surface in a predetermined measurement position, and the center axis | shaft 10a.
As illustrated in FIG. 3, the processing unit 83 includes a height control unit 831, a center position calculation unit 832, an inclination angle calculation unit 833, and a shake amount calculation unit 834 as functional modules executed by the processing unit 83. And a pass / fail judgment unit 835. Each of these functional modules included in the processing unit 83 is realized by software operating on a processor included in the processing unit 83, for example.

The height control unit 831 generates a control signal for the drive unit 6 so as to move the position sensors 7 a and 7 b to a height corresponding to a predetermined measurement position, and outputs the control signal to the communication interface unit 81.
Further, when the position sensors 7a and 7b reach a height corresponding to the measurement position, the height control unit 831 associates information representing the height with the position information obtained from the position sensors 7a and 7b. For example, the height control unit 831 acquires position information at each measurement position while the position sensors 7 a and 7 b are lowered from the upper end to the lower end of the inspection object 10. Alternatively, the height control unit 831 may acquire position information at each measurement position while raising the position sensors 7 a and 7 b from the lower end to the upper end of the inspection object 10.

For example, the height control unit 831 transmits the control signal to the drive unit 6 based on the length when the sensor holding unit 5 is lowered with reference to the time when the sensor holding unit 5 is located at the upper end of the moving range. The heights of the position sensors 7a and 7b can be determined by measuring the length of the position sensors 7a and 7b, and an output signal from an encoder attached to the drive unit 6 or the sensor holding unit 5. The height control unit 831 then determines the relative position of the position sensors 7a and 7b with respect to the inspection object 10 from the difference between the height of the lower end of the inspection object 10 held by the work holding unit 3 and the height of the position sensors 7a and 7b. Height can be determined.
The height control unit 831 passes a set of the position information obtained by the position sensors 7 a and 7 b and the height information indicating the measurement position of the inspection object to the center position calculation unit 832 and the inclination angle calculation unit 833.

  The center position calculation unit 832 calculates the center position of the inspection object 10 at the measurement position based on the set of position information received from the height control unit 831 and height information indicating the measurement position of the inspection object. To do.

FIG. 4 is a diagram illustrating an example of an intensity distribution of light received by the light receiver 72a of the position sensor 7a. In FIG. 4, the horizontal axis represents the coordinate value in the X direction, and the vertical axis represents the received light intensity. A graph 401 represents the intensity distribution of the light received by the light receiver 72a. The intensity at the position where the light is blocked by the inspection object 10 is low. On the other hand, since the light reaches the light receiver 72a on both sides of the inspection object 10, the intensity is high. Therefore, the intensity distribution of the light received by the light receiver 72 a is concave as shown in FIG. 4, and the width of the low intensity region corresponds to the outer diameter of the inspection object 10. Therefore, the center position calculation unit 832 determines the coordinate values x of both ends of the region where the light intensity is equal to or less than a predetermined threshold Th from the light intensity distribution in the X direction, which is position information received from the light receiver 72a of the position sensor 7a. _L, determine the x _R. Then, the center position calculation unit 832 sets the midpoint x _C of the coordinate values x _L and x _R at both ends as the center position of the inspection object 10 in the X direction. Note that the predetermined threshold is set in advance, for example, by an experiment or the like so that the width of the region where the light intensity is equal to or lower than the predetermined threshold matches the outer diameter of the inspection object 10.
Similarly, the center position calculation unit 832 obtains coordinate values at both ends of a region where the light intensity is equal to or less than a predetermined threshold from the light intensity distribution in the Y direction, which is position information received from the light receiver 72b of the position sensor 7b. Ask. Then, the center position calculation unit 832 sets the center point of the coordinate values at both ends as the center position of the inspection object 10 in the Y direction.
The center position calculation unit 832 is a three-dimensional coordinate of the center position of the inspection object 10 corresponding to two datum points (that is, a set of an X coordinate and a Y coordinate in the horizontal plane and a Z coordinate representing the height of the measurement position). Is sent to the inclination angle calculation unit 833. Further, the center position calculation unit 832 passes the three-dimensional coordinates of the center position of the inspection object 10 at the measurement position other than the datum point to the shake amount calculation unit 834.

傾き角算出部８３３は、算出した中心軸１０ａの傾き角θを振れ量算出部８３４へ通知する。 The inclination angle calculation unit 833 calculates the inclination angle of the central axis 10a of the inspection object 10 with respect to the vertical direction based on the three-dimensional coordinates of the two datum points of the inspection object 10.
FIG. 5 is a diagram showing the relationship between the center position of the inspection object 10 at each measurement position and the center axis 10a calculated from the datum point. As shown in FIG. 5, in this embodiment, when the inspection object 10 is held by the shake measuring device 1, the part located at the lower end of the inspection object 10 is a reference part, and the reference part is over the reference part. The set points A and B are datum points. Point A and point B are center points in the horizontal plane at different heights of the reference part, the horizontal coordinate of point A is represented by (x1, y1), and the horizontal coordinate of point B is (x2, y2 ). The vertical distance between points A and B is Z0.
In this case, since the central axis 10a of the inspection object 10 is defined by a straight line passing through the two datum points, the central axis 10a with respect to the vertical direction (that is, the direction in which the sensor holding unit 5 of the shake measuring device 1 moves). The inclination angle θ is calculated by the following equation.

The inclination angle calculation unit 833 notifies the shake amount calculation unit 834 of the calculated inclination angle θ of the central axis 10a.

ただし、(x3',y3')は、点Ｃ’の水平座標である。また、(x4',y4')は、点Ｄ’の水平座標であり、(x5',y5')は、点Ｅ’の水平座標である。 The shake amount calculation unit 834 calculates a shake amount corresponding to twice the amount of deviation between the center position of the inspection object 10 and the center axis 10a at each measurement position.
Referring to FIG. 5 again, for example, the positions at which the vertical distances from the lowest datum point A are Z1 to Z3 are the measurement positions, respectively, and the center point of the inspection object 10 at the measurement position is the center position. C, D, E. In this case, the shake amount calculation unit 834 performs horizontal operations at points C ′, D ′, and E ′ through which the central axis 10a passes in the horizontal plane corresponding to each measurement position where the vertical distance from the datum point A is Z1 to Z3. The coordinates are calculated according to the following formula with the horizontal coordinate (x1, y1) of the datum point A as a reference.

However, (x3 ′, y3 ′) is the horizontal coordinate of the point C ′. Further, (x4 ′, y4 ′) is the horizontal coordinate of the point D ′, and (x5 ′, y5 ′) is the horizontal coordinate of the point E ′.

振れ量算出部８３４は、各測定位置における振れ量を良否判定部８３５へ渡す。 The shake amount calculation unit 834 calculates the coordinates of the point through which the central axis passes at each measurement position, and based on the horizontal distance between the central point of the inspection object 10 at each measurement position and the point through which the central axis passes, The shake amount at the measurement position is calculated. For example, the shake amounts f3, f4, and f5 at each measurement position shown in FIG. 5 are calculated according to the following equations, respectively.

The shake amount calculation unit 834 passes the shake amount at each measurement position to the pass / fail determination unit 835.

The pass / fail determination unit 835 determines whether or not the inspection object 10 is a non-defective product based on the shake amount at each measurement position. For example, the pass / fail determination unit 835 determines that the inspection target 10 is a defective product even if the shake amount at any one of the measurement positions is out of a predetermined range. On the other hand, if the shake amounts at all measurement positions are included in the predetermined range, the pass / fail determination unit 835 determines the inspection object 10 as a non-defective product. Note that the predetermined range can be, for example, an allowable tolerance of the shake amount determined by the design specification of the inspection object 10. The predetermined range may be different for each measurement position.
The pass / fail judgment unit 835 outputs the pass / fail judgment result of the inspection object 10 and the shake amount at each measurement position to the display unit 9. Alternatively, the pass / fail determination unit 835 may output the pass / fail determination result of the inspection object 10 and the shake amount at each measurement position to an external device (not shown) connected to the control device 8 via the communication interface 81. Good.

The display unit 9 displays the measurement result of the shake amount and other predetermined information, and includes a liquid crystal display, for example. The display unit 9 receives the pass / fail determination result of the inspection object 10 and the shake amount of each measurement position from the control device 8, and displays the pass / fail determination result and the shake amount of each measurement position.
In addition, when the quality determination result of the inspection target 10 by the control device 8 and the shake amount of each measurement position are output to an external device, the display unit 9 may be omitted.

  Hereinafter, with reference to the flowchart shown in FIG. 6, a shake measurement process performed by the shake measurement apparatus 1 according to an embodiment of the present invention will be described. Note that the shake measurement process illustrated in FIG. 6 is controlled by the processing unit 83 of the control device 8.

  When the inspection object 10 is fixed by the workpiece holding unit 3 and the sensor holding unit 5 is moved to the upper end of the movable range and the measurement preparation is completed, the height control unit 831 of the processing unit 83 is moved to the driving unit. A control signal is transmitted to 6 to start the position sensors 7a and 7b to descend (step S101). The position sensors 7a and 7b transmit measurement signals representing received light intensity distributions in the X direction and the Y direction to the control device 8, respectively. The height control unit 831, a measurement signal obtained at a plurality of measurement positions, together with the information indicating the height of the measurement position passes the center position calculation unit 832 of the processor 83.

  The center position calculation unit 832 calculates the center position of the inspection object 10 for a plurality of measurement positions including two datum points (step S102). The center position calculation unit 832 transfers the three-dimensional coordinates of the center positions of the two datum point to the tilt angle calculator 833 and the shake amount calculation unit 834 of the processor 83. The center position calculation unit 832 passes the three-dimensional coordinates of the center position at the measurement position other than the datum point to the shake amount calculation unit 834.

  The inclination angle calculation unit 833 calculates the inclination angle of the central axis 10a of the inspection object 10 with respect to the vertical direction (that is, the direction in which the position sensors 7a and 7b move) based on the measured coordinate values of the center positions of the two datum points. Calculate (step S103). Then, the tilt angle calculation unit 833 passes the tilt angle of the central axis 10 a to the shake amount calculation unit 834.

  Shake amount calculation unit 834, based on the measured coordinate values of the center position of the two datum points, to calculate the horizontal coordinate of the point through which the central axis 10a of the horizontal plane at each measurement position (step S104). Then, the shake amount calculation unit 834 calculates the shake amount at each measurement position based on the measurement coordinate value of the center position at each measurement position, the coordinates of the point through which the center axis passes, and the tilt angle of the center axis (step S105). The shake amount calculation unit 834 passes the shake amount at each measurement position to the pass / fail determination unit 835 of the processing unit 83.

The pass / fail determination unit 835 determines whether or not the shake amount at each measurement position falls within a predetermined range (step S106). When the shake amount falls within the predetermined range at all measurement positions (step S106—Yes), the quality determination unit 835 determines that the inspection target 10 is a non-defective product (step S107). And the quality determination part 835 displays the determination result and the shake amount of each measurement position on the display part 9.
On the other hand, when the shake amount deviates from the predetermined range even at any one of the measurement positions (No at Step S106), the quality determination unit 835 determines that the inspection target 10 is a non-defective product (Step S108). And the quality determination part 835 displays the determination result and the shake amount of each measurement position on the display part 9.
After step S107 or S108, the control device 8 ends the shake measurement process.

  As described above, the shake measuring apparatus according to one embodiment of the present invention moves the position sensor that can be accurately positioned, instead of moving the inspection object, to coordinate the plurality of measurement positions of the inspection object. Can be measured. Further, the vibration measurement device be obliquely mounted on the inspection object can be determined inclination angle of the center axis of the test object from the center position coordinates of the datum point. Therefore, the vibration measurement device also position and orientation and attached to the testing station of the inspection object is different from each measurement, it is possible to determine the amount of deflection at each measuring position of the test object accurately.

In addition, this invention is not limited to said embodiment. For example, the shake measuring device may use, as a coordinate of the center position, an average value of measurement values obtained by measuring the center position of the inspection object a plurality of times for one measurement position. For example, the shake measurement device measures a single measurement position by a position sensor eight times within a range of ± 1.5 mm in the vertical direction centered on the measurement position during one descent operation of the sensor holding unit. Also good. Then, the control device sets the average value of the coordinates of the center position obtained for each of the eight measurements as the coordinates of the center position at the measurement position.
As described above, the shake measuring apparatus can accurately determine the center position by setting the statistical value of the measured value of the center position obtained by performing the measurement a plurality of times at one measurement position as the center position.
Further, the datum point may be set on a part other than the part held by the work holding unit. For example, even when the lower end of the inspection target is held by the work holding unit as in the above-described embodiment, the datum point may be set on a part positioned at the upper end of the inspection target.
The position sensor is not limited to the sensor used in the above embodiment. As the position sensor, another sensor that can measure the position of the inspection object in the horizontal plane without contacting the inspection object may be used. In this case, the center position calculation unit of the processing unit also calculates the center position in the horizontal plane of the inspection object according to the output signal of the sensor used as the position sensor.
Further, the shake measuring device may calculate the deviation amount between the center position and the center axis of the inspection object at each measurement position as an index for determining whether or not the inspection object is a non-defective product. In this case, the amount of deviation between the center position and the center axis of the inspection object at each measurement position is a value that is half of the shake amount described in the above embodiment.
As described above, those skilled in the art can make various modifications within the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Runout measuring apparatus 2 Inspection stand 3 Work holding part 4 Guide member 5 Sensor holding part 6 Drive part 7a, 7b Position sensor 8 Control apparatus 9 Display part 10 Inspection object 10a Center axis 81 Communication interface part 82 Storage part 83 Processing part 831 Height control unit 832 Center position calculation unit 833 Inclination angle calculation unit 834 Shake amount calculation unit 835 Pass / fail judgment unit

Claims (5)

A sensor holding part (5) movable in an inspection direction substantially parallel to the central axis of the inspection object (10);
Position sensors (7a, 7b) which are attached to the sensor holding part (5) and acquire position information indicating the position of the inspection object in a plane orthogonal to the inspection direction at a plurality of measurement positions along the inspection direction. )When,
A drive unit (6) for moving the sensor holding unit (5) along the inspection direction;
A center position of the inspection object (10) is obtained from position information acquired at the plurality of measurement positions, and the at least one measurement position is determined from a positional relationship between the center position and the center axis of the inspection object (10). A processing unit (83) for calculating a shake amount of the inspection object (10) in
A shake measuring device characterized by comprising:   Wherein the processing unit (83), the plurality of measurement positions, the inspection of the straight line passing through the center position in the metrics and two measuring positions set on components made of shape error of the test object (10) The shake measuring device according to claim 1, wherein the shake measuring device is calculated as a central axis of the object (10). The position sensor (7a, 7b) includes a first light source that outputs first parallel light having a width wider than an outer diameter of the inspection object (10) in the plane, and the inspection object (10 ) With a light receiving surface facing the light emitting surface of the first light source and receiving the first parallel light, and the first parallel light within the surface A second light source that outputs a second parallel light having a width wider than the outer diameter of the inspection object (10) along a second direction orthogonal to the first direction irradiated with A light receiving surface facing the light emitting surface of the second light source across the inspection object (10), and a second light receiver that receives the second parallel light;
The position information is a light intensity distribution in the second direction detected by the first light receiver and a light intensity distribution in the first direction detected by the second light receiver,
The processing unit (83) sets, from the light intensity distribution in the first direction, the center of the region of light intensity below a predetermined threshold as the center position of the inspection object (10) in the first direction. From the light intensity distribution in the second direction, the center of the region of light intensity below the predetermined threshold is set as the center position of the inspection object (10) in the second direction. 2. The shake measurement apparatus according to 2.   The processing unit (83) determines that the inspection object (10) is a non-defective product when the amount of shake at all of the plurality of measurement positions is within a predetermined range, while one of the plurality of measurement positions. one when the shake amount is out of the predetermined range, determines the test object (10) as defective, deflection measuring device according to any one of claims 1 to 3. Moving the position sensors (7a, 7b) along an inspection direction substantially parallel to the central axis of the fixed inspection object (10);
Obtaining position information representing the position of the inspection object in a plane orthogonal to the inspection direction at a plurality of measurement positions along the inspection direction by the position sensors (7a, 7b);
Obtaining the center position of the inspection object (10) from the position information acquired at the plurality of measurement positions;
Calculating a shake amount of the inspection object (10) at the at least one measurement position from a positional relationship between the center position and a central axis of the inspection object (10);
A run-out measurement method characterized by comprising:

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