JP2010503240A - トレーハンドリング機及びそれを用いた半導体素子検査方法 - Google Patents
トレーハンドリング機及びそれを用いた半導体素子検査方法 Download PDFInfo
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Abstract
【解決手段】ワークを収納したトレーを反転させる反転装置と、本体の上部を往復移動しながらワークを収納したトレーをピックアップして各部に移送する移載装置とを備えてトレーを移送及び反転させるトレーハンドリング機において、反転装置が移載装置の下端に一体に設けられていることを特徴とするトレーハンドリング機。
【選択図】図3
Description
したがって、半導体素子のマーキング及び全体的な外観を検査するためには、他の検査機で他の検査作業を進行する必要があるという不便さがあった。
本発明の一実施例を用いて当業者が容易に理解して再現できる程度まで、以下に詳細に説明する。
ここで、前述した各部の役割と作用は、既に公知であるので、これらに対する具体的な説明は省略する。
また、トレーピックアップ手段51は、トレーローディングユニット6の反転時に妨害になり得るため、反転時に妨害を与えないように上昇するように設計されているのが好ましい。
そうすると、このトレーは、上面が上部に向かうように下部スライディングカバー63にローディングされるが、このトレーをトレーピックアップ手段51を用いて上部スライディングカバー62にローディングするようになっている。
したがって、添付する特許請求の範囲に係る技術的内容は、本発明の真なる範囲に属する修正及び変更を含んでいる。
Claims (12)
- ワークを収納したトレーを反転させる反転装置と、本体の上部を往復移動しながらワークを収納したトレーをピックアップして各部に移送する移載装置とを備え、前記トレーを移送及び反転させるトレーハンドリング機において、
前記反転装置が、前記移載装置の下端に一体に設けられていることを特徴とするトレーハンドリング機。 - 前記移載装置が、前記ワークを収納したトレーに対応する空トレーと、前記ワークを収納したトレー及び空トレーを定着させるトレーローディングユニットとを備えているとともに、
前記反転装置が、前記トレーローディングユニットの片側または両側に設けられて、前記トレーローディングユニットを回転させてワークを収納したトレーに収納されたワークを空トレーに再び収納させることでワークの両面を反転させるように設計されていることを特徴とする請求項1に記載のトレーハンドリング機。 - 前記移載装置が、前記ワークを収納したトレーをピックアップしてトレーローディングユニットにローディングするトレーピックアップ手段と、前記トレーピックアップ手段を昇降させる第1昇降手段とをさらに備えていることを特徴とする請求項2に記載のトレーハンドリング機。
- 前記トレーローディングユニットが、メーンボディーと、該メーンボディーの上部に前方および後方に一対で設けられて前記空トレーをローディングさせる上部スライディングカバーと、前記メーンボディーの下部に前方および後方に一対で設けられて前記ワークを収納したトレーをローディングさせる下部スライディングカバーと、前記メーンボディーの内側に前後進自在に設けられて前記空トレー及びワークを収納したトレーを固定する固定部材とを備えていることを特徴とする請求項3に記載のトレーハンドリング機。
- 前記トレーローディングユニットが、前記メーンボディーの上端に設けられて前記空トレーのローディング可否を感知する空トレー感知センサーと、前記メーンボディーの下端に設けられて前記ワークを収納したトレーのローディング可否を感知するトレー感知センサーとをさらに備えていることを特徴とする請求項4に記載のトレーハンドリング機。
- 前記トレーローディングユニットが、前記下部スライディングカバーをクランピングするクランピング機構をさらに備えていることを特徴とする請求項4に記載のトレーハンドリング機。
- 前記移載装置が、前記トレーローディングユニットを昇降させて前記ワークを収納したトレーと空トレーとの結合を迅速にする第2昇降手段をさらに備えていることを特徴とする請求項2乃至請求項6のいずれかに記載のトレーハンドリング機。
- 前記ワークを収納したトレーをトレーローディングユニットにローディングさせるために昇降するエレベーターが、前記本体の後端にさらに設けられていることを特徴とする請求項5に記載のトレーハンドリング機。
- 空トレー、ワークを収納したトレーをローディングさせる下部スライディングカバー、前記空トレーをローディングさせる上部スライディングカバー、及び、前記ワークを収納したトレー及び空トレーを固定する固定部材を有するトレーローディングユニットと、トレーピックアップ手段と、前記トレーローディングユニットを回転させる反転装置とを有して本体の上部で往復移動しながらトレーを各コンベアに移送する移載装置を備えるトレーハンドリング機を用いて、検査を完了した半導体素子を検査結果に基づいて良品と不良品とに区分して仕分けするトレーハンドリング機を用いた半導体素子検査方法において、
前記ワークを収納したトレーを本体の後端に移送する工程(S20)と、
前記本体の後端に移送されたワークを収納したトレーを移載装置でピックアップして前記ワークを収納したトレーをトレーローディングユニットに設置された空トレーと結合させる工程(S40)と、
前記移載装置を後続するトレーコンベアに移送しながらトレーローディングユニットを回転させることでワークを収納したトレーに収納された半導体素子を空トレーに再び収納させて半導体素子を反転させる工程(S50)とを有していることを特徴とするトレーハンドリング機を用いた半導体素子検査方法。 - 前記ワークを収納したトレーをピックアップして空トレーと結合させる工程(S40)が、前記トレーピックアップ手段を下降させる工程(S414)と、前記ワークを収納したトレーをピックアップする工程(S412)と、該工程(S412)でピックアップされたトレーを上昇させて下部スライディングカバーにローディングする工程(S413)と、前記下部スライディングカバーをクランピングする工程(S414)とを有していることを特徴とする請求項9に記載のトレーハンドリング機を用いた半導体素子検査方法。
- 前記ワークを収納したトレーをピックアップして空トレーと結合させる工程(S40)が、前記トレーピックアップ手段とトレーローディングユニットとを同時に下降させて前記トレーとトレーローディングユニットとの間の距離を高速で狭める工程(S421)と、前記トレーピックアップ手段を用いてワークを収納したトレーをピックアップする工程(S422)と、該工程(S422)でピックアップされたトレーを上昇させて下部スライディングカバーにローディングする工程(S423)と、前記下部スライディングカバーをクランピングする工程(S424)とを有していることを特徴とする請求項9に記載のトレーハンドリング機を用いた半導体素子検査方法。
- 前記本体の後端に移送されたワークを収納したトレーをピックアップする前にワークを収納したトレーをエレベーターを用いて上昇させる工程(S30)をさらに有していることを特徴とする請求項9乃至請求項11のいずれかに記載のトレーハンドリング機を用いた半導体素子検査方法。
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KR10-2006-0088480 | 2006-09-13 | ||
KR1020060088480A KR100775054B1 (ko) | 2006-09-13 | 2006-09-13 | 트레이 핸들링 장치 및 그를 이용한 반도체 소자 검사 방법 |
PCT/KR2007/004399 WO2008032983A1 (en) | 2006-09-13 | 2007-09-12 | Tray handling apparatus and semiconductor device inspecting method using the same |
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JP4916551B2 (ja) | 2012-04-11 |
KR100775054B1 (ko) | 2007-11-08 |
US8056698B2 (en) | 2011-11-15 |
US20100032262A1 (en) | 2010-02-11 |
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