JP2010223953A - Capacitance type pressure-sensitive sensor and method of manufacturing the same - Google Patents

Capacitance type pressure-sensitive sensor and method of manufacturing the same Download PDF

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JP2010223953A
JP2010223953A JP2010037096A JP2010037096A JP2010223953A JP 2010223953 A JP2010223953 A JP 2010223953A JP 2010037096 A JP2010037096 A JP 2010037096A JP 2010037096 A JP2010037096 A JP 2010037096A JP 2010223953 A JP2010223953 A JP 2010223953A
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electrode
layer
positive electrode
negative electrode
column
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JP2010037096A
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JP5622405B2 (en
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Kazunobu Hashimoto
Tomonori Hayakawa
知範 早川
和信 橋本
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Tokai Rubber Ind Ltd
東海ゴム工業株式会社
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a capacitance type pressure-sensitive sensor having high detection accuracy on capacitance, less causing permanent compressive strain to remain therein after removing a load, allowing the spring constant of a dielectric layer in a compression direction to be easily controlled, and less hindering its expansion-contraction deformation in the surface direction, and a method of manufacturing the same. <P>SOLUTION: This capacitance type pressure-sensitive sensor 1 includes: a positive electrode-side electrode layer 20; a negative electrode-side electrode layer 21; and the dielectric layer 22 comprising a pressure-sensitive part 220 put between the electrode layers 20 and 21 while being formed in a position where the electrode layers 20 and 21 overlap with each other in a front-to-rear direction. A change in a load F1 is detected by this pressure-sensitive sensor 1 using a change in capacitance caused by a change in distance between the electrode layers 20 and 21 owing to the load F1 input from the exterior. The pressure-sensitive part 220 comprises pillars 221 made of elastomer or resin and made of a non-foaming body, and a space 222. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a capacitance-type pressure-sensitive sensor that is used for artificial skin of a robot, for example, and detects a load input from the outside, and a method for manufacturing the same.

  For example, Patent Document 1 introduces a capacitive sensor having a pair of electrode layers facing each other through a space. Patent Document 2 introduces a capacitive sensor in which electrode layers made of a conductive cloth are arranged on both surfaces of a sheet-like dielectric layer.

JP 2004-117042 A JP 2005-315831 A

The capacitance of the capacitor, which is the principle of load detection of the capacitance type sensor, is calculated from the equation (1).
In the formula (1), C is a capacitance, ε is a dielectric constant, S is an overlapping area of opposing electrodes, and d is a distance between the electrodes.

  According to the capacitive sensor of Patent Document 1, a space is interposed between a pair of electrode layers. The space, that is, the air layer functions as a dielectric layer. However, the dielectric constant ε when the dielectric layer is an air layer is relatively small. For this reason, according to the electrostatic capacitance type sensor of patent document 1, the absolute value of the electrostatic capacitance C becomes small. Therefore, the detection accuracy of the capacitance C is lowered.

  In this regard, according to the capacitive sensor of Patent Document 2, a dielectric layer made of a foam (urethane sheet) is interposed between a pair of electrode layers. When the dielectric layer is made of foam, the dielectric constant ε is relatively large. For this reason, according to the electrostatic capacitance type sensor of patent document 2, the absolute value of the electrostatic capacitance C becomes large. Therefore, the detection accuracy of the capacitance C is increased. However, a compression set tends to remain in the foam dielectric layer after the load is removed. That is, the dielectric layer made of foam is easy to sag. For this reason, durability is low. In addition, when the electrode layer and the dielectric layer are bonded to each other, the dielectric layer tends to hinder expansion and contraction in the sensor surface direction (direction perpendicular to the stacking direction).

  The capacitance-type pressure-sensitive sensor and the manufacturing method thereof according to the present invention have been completed in view of the above problems. Therefore, the present invention has a high capacitance detection accuracy, compression set hardly remains after the load is removed, can easily control the spring constant of the dielectric layer in the compression direction, and inhibits expansion and contraction in the surface direction. It is an object of the present invention to provide a capacitance-type pressure-sensitive sensor that is difficult to perform and a manufacturing method thereof.

  (1) In order to solve the above-mentioned problem, a capacitive pressure-sensitive sensor of the present invention is provided between a positive electrode layer, a negative electrode layer, and a positive electrode layer and a negative electrode layer. And a dielectric layer having a pressure-sensitive portion formed at a position where the positive electrode side electrode layer and the negative electrode side electrode layer overlap in the front and back direction, and the positive electrode side electrode layer by a load input from the outside A capacitance-type pressure sensitive sensor capable of detecting a change in the load by utilizing a change in capacitance based on a change in the distance between the negative electrode layer and the pressure-sensitive electrode layer, The portion is made of elastomer or resin and has a non-foamed column portion and a space portion (corresponding to claim 1).

  When viewed from the front side or the back side, the positive electrode layer and the negative electrode layer overlap. The pressure-sensitive part of the dielectric layer is disposed in the overlapping part. The pressure sensitive part has a pillar part and a space part. The column part is made of non-foamed material. For this reason, even after the externally input load is removed, the compression set hardly remains in the column portion.

  In addition, according to the capacitive pressure sensor of the present invention, the pressure-sensitive part has a column part and a space part. For this reason, as shown in the above formula (1), the dielectric constant ε of the pressure sensitive part is larger than that in the case where the pressure sensitive part is only a space part, that is, an air layer. Therefore, the absolute value of the capacitance C increases. That is, the detection accuracy of the capacitance C is increased.

  Further, according to the capacitance type pressure sensitive sensor of the present invention, the spring constant in the compression direction is small as compared with the case where the pressure sensitive part is only a column part, that is, a non-foamed body. For this reason, the amount of compressive strain of the pressure-sensitive portion with respect to the load increases. When the amount of compressive strain is large, the amount of change in the interelectrode distance d increases as shown in the above equation (1). For this reason, the amount of change in the capacitance C increases.

  Further, according to the capacitive pressure sensor of the present invention, by adjusting the size, shape, arrangement, and occupied area of the column part in the pressure-sensitive part, the pressure-sensitive part of the pressure-sensitive part is adjusted. The spring constant in the compression direction can be adjusted freely.

  By reducing the spring constant in the compression direction of the pressure sensitive part, it is possible to detect a small load close to a load that can be detected only when the pressure sensitive part is only an air layer. By increasing the spring constant in the compression direction of the pressure-sensitive portion, a large load close to a load that can be detected only when the pressure-sensitive portion is only a non-foamed material can be detected. That is, the load measurement range can be shifted by adjusting the spring constant in the compression direction of the pressure-sensitive portion.

  Further, according to the capacitive pressure sensor of the present invention, the dielectric layer has a space. For this reason, it is difficult to inhibit expansion and contraction in the surface direction.

  When the entire dielectric layer is solid, it is difficult to independently adjust the spring constant in the stacking direction and the spring constant in the plane direction. That is, if the spring constant in the stacking direction is increased, the spring constant in the plane direction is also increased. Further, when the spring constant in the stacking direction is reduced, the spring constant in the plane direction is also reduced. In this regard, according to the capacitive pressure sensor of the present invention, the dielectric layer has a space. For this reason, it is easy to independently adjust the spring constant in the stacking direction and the spring constant in the surface direction.

  (2) Preferably, in the configuration of (1) above, an elastomeric positive electrode side base layer on which the positive electrode side electrode layer is disposed; and an elastomer negative electrode side base layer on which the negative electrode side electrode layer is disposed; It is better to have a configuration (corresponding to claim 2).

  According to this configuration, the arrangement of the positive electrode side electrode layer and the negative electrode side electrode layer is less likely to shift due to a load input from the outside. Moreover, when manufacturing a capacitance-type pressure-sensitive sensor, it is easy to align the positive electrode layer and the negative electrode layer. That is, the pressure sensitive part can be arranged at a desired position.

  (2-1) Preferably, in the configuration of the above (2), the column part is preferably made of an elastomer. According to this configuration, the spring constant in the compression direction of the column part is small as compared with the case where the column part is made of resin. For this reason, when a load is input from the outside, the column portion and the space portion are compressed together. Therefore, the amount of change in capacitance increases.

  (2-2) Preferably, in the configuration of (2) above, the column portion is preferably made of resin. According to this configuration, since the column portion is made of resin, compression deformation of the elastomer-made positive electrode side base layer and negative electrode side base layer is more dominant than compression deformation of the column portion. Accordingly, the capacitance increases based on the decrease in the distance between the positive electrode layer and the negative electrode layer in the space.

  (3) Preferably, in the configuration of the above (2), the direction toward both sides of the stacking direction with the dielectric layer as the center is outward, the opposite direction is inward, and the outer side of the positive electrode side base layer and the negative electrode It is better to have a load transmission layer disposed on at least one of the outer sides of the side base layer and having a compressive elastic modulus smaller than that of the positive side base layer and the negative side base layer (corresponding to claim 3).

  When the load transmission layer is disposed outside the positive electrode side base layer, a load input from the outside is transmitted to the positive electrode side base layer through the soft load transmission layer. For this reason, the positive electrode layer easily enters the space of the pressure sensitive part. Therefore, the distance between the positive electrode side electrode layer and the negative electrode side electrode layer in the space tends to be short. Therefore, the capacitance tends to increase.

  Similarly, when the load transmission layer is disposed outside the negative electrode side base layer, a load input from the outside is transmitted to the negative electrode side base layer through the soft load transmission layer. For this reason, the negative electrode layer tends to enter the space of the pressure sensitive part. Therefore, the distance between the positive electrode side electrode layer and the negative electrode side electrode layer in the space tends to be short. Therefore, the capacitance tends to increase.

  (4) Preferably, in any one of the configurations (1) to (3), the area of the surface of the pressure-sensitive portion is 100%, and the area occupied by the pillar portion on the surface is 0.5% or more 51 % Or less (corresponding to claim 4).

  The reason why the occupation area of the pillar portion is 0.5% or more is that the area of the pillar portion becomes too small when it is less than 0.5%. In other words, the load on the column portion is increased, and the mechanical durability of the column portion is deteriorated. Further, if the area of the column portion is too small, it is easy to be subjected to shear deformation, and it is difficult to identify whether the change in capacitance is due to a compressive load or due to a shear load.

  On the other hand, the reason why the occupation area of the pillar portion is set to 51% or less is that the area of the pillar portion becomes too large when it exceeds 51%. That is, when a plurality of column portions are arranged, the respective column portions interfere with each other at the time of deformation, and it becomes difficult to function as independent column portions.

  (5) Preferably, in the configuration of (4), the occupation area is 45% or less (corresponding to claim 5).

  The reason why the occupation area of the pillar portion is set to 45% or less is that when it exceeds 45%, the area of the pillar portion becomes too large. That is, when a plurality of column portions are arranged, the respective column portions interfere with each other at the time of deformation, and it becomes difficult to function as independent column portions.

  (6) Preferably, in any one of the above configurations (1) to (5), a plurality of the pillar portions may be independently arranged (corresponding to claim 6). For example, according to the dielectric layer of the capacitive sensor described in Patent Document 2, when a load is applied to an arbitrary input point of the dielectric layer, not only the input point portion but also the input point peripheral portion It will be pulled and deformed. For this reason, the input load is likely to be dispersed.

  In this regard, according to the present configuration, the plurality of column portions are arranged independently of each other. For this reason, when a load is applied to an arbitrary input point of the dielectric layer, the column portion of the input point portion is easily deformed. On the other hand, the column portion around the input point is not easily deformed. Therefore, the input load tends to concentrate.

  (7) Preferably, in the configuration of the above (6), the plurality of column portions are arranged in a predetermined pattern so as to be distributed substantially uniformly over the entire dielectric layer. Good (corresponding to claim 7). According to this structure, it can suppress that the detection sensitivity of a load varies over the whole dielectric layer.

  (8) Preferably, in any one of the configurations (1) to (7), the positive electrode layer has a positive electrode facing surface that faces the negative electrode layer through the dielectric layer, The negative electrode layer has a negative electrode facing surface that faces the positive electrode layer through the dielectric layer, and further covers at least one of the positive electrode facing surface and the negative electrode facing surface. It is better to have a configuration (corresponding to claim 8).

  According to this configuration, the insulating layer is interposed between the positive electrode layer and the negative electrode layer. For this reason, even if it is a case where a dielectric layer is compressed greatly, it can suppress that a positive electrode side electrode layer and a negative electrode side electrode layer short-circuit.

  (9) Moreover, in order to solve the said subject, the manufacturing method of the capacitance-type pressure-sensitive sensor of this invention prints a wiring coating material and an electrode layer coating in random order on the base layer made from an elastomer, A laminate preparation step for producing a laminate having the base layer, the wiring, and the electrode layer, and printing the column part paint on the laminate so as to partially overlap the electrode layer in the front and back direction, A bonded body manufacturing step of manufacturing a bonded body having the laminated body and an elastomer or resin-made non-foamed column part, and another laminated body is attached to the tip of the column part of the bonded body. A dielectric layer disposing step of disposing a dielectric layer having the column portion and the space portion between the pair of electrode layers by bonding (corresponding to claim 9).

  That is, at least the wiring, the electrode layer, and the column part are produced by printing according to the method for producing the capacitive pressure sensor of the present invention. According to the method of manufacturing a capacitive pressure sensor of the present invention, the wiring, the electrode layer, and the column portion, that is, the dielectric layer can be easily integrated. Further, in the laminate manufacturing process, the wiring and the electrode layer can be reliably and easily arranged in a predetermined pattern. Further, in the bonded body manufacturing process, the pillar portions can be reliably and easily arranged in a predetermined pattern.

  (9-1) Preferably, in the configuration of (9) above, in the joined body manufacturing step, the column paint may be printed using a screen printer. According to this configuration, even if the arrangement pattern of the pillar portions is complicated, the pillar portions can be reliably and easily arranged in a predetermined pattern.

  (9-2) Preferably, in the configuration of the above (9), in the bonded body manufacturing step, the column paint may be printed using a dispenser device. According to this configuration, it is possible to form a long column portion without performing overcoating or even when the number of overcoating is small.

  (10) Preferably, in the configuration of (9) above, it is better to adjust the length of the column part by adjusting the printing thickness of the column part paint in the assembly manufacturing step. (Corresponding to claim 10).

  The column part is produced by printing. For this reason, for example, the length of a pillar part can be easily adjusted by adjusting the frequency | count of printing of a pillar part coating material. For example, when a screen printer is used, the length of the column portion can be easily adjusted by adjusting the thickness of the screen mask. For example, when using a dispenser device, the length of a pillar part can be easily adjusted by adjusting the discharge amount of the pillar part paint from a syringe.

  By adjusting the length of the column part, the inter-electrode distance d of the above-described formula (1) can be adjusted. That is, the absolute value of the output capacitance C can be adjusted. For example, when the length of the column portion is shortened, the inter-electrode distance d is shortened. For this reason, the absolute value of the capacitance C increases. Therefore, since a large change in the capacitance C can be induced with a slight change in the inter-electrode distance d with respect to the load, the detection accuracy of the capacitance C is increased. For example, when the length of the column portion is increased, the inter-electrode distance d is increased. For this reason, the room in which the distance d between the electrodes can change with respect to the load increases, and the dynamic range of the detected load can be expanded from a small load to a large load.

  (11) Preferably, in the configuration of (9) or (10), in the laminate manufacturing step, an insulating layer paint is further printed so as to cover the electrode layer, whereby the base layer, the wiring, and the wiring A structure in which the stacked body including an electrode layer and an insulating layer is manufactured is preferable (corresponding to claim 11).

  That is, in this configuration, the wiring, the electrode layer, the column portion, and the insulating layer are produced by printing. According to this configuration, the wiring, the electrode layer, and the insulating layer can be reliably and easily arranged in a predetermined pattern.

  (12) Preferably, in any one of the configurations (9) to (11), a plurality of the pillar portions are arranged independently in the joined body manufacturing step. Corresponding). The column part is produced by printing. For this reason, a some pillar part can be arrange | positioned in a short time. Moreover, it can suppress that the shape and length of a some pillar part vary.

  (13) Preferably, in the configuration of (12) above, in the joined body manufacturing step, the plurality of column portions are arranged in a predetermined pattern so as to be distributed substantially uniformly over the entire stacked body. It is better to adopt a configuration (corresponding to claim 13). The column part is produced by printing. For this reason, a plurality of pillar parts can be arranged in a predetermined pattern in a short time.

  According to the present invention, the detection accuracy of the capacitance is high, the compression set hardly remains after the load is removed, the spring constant in the compression direction of the dielectric layer can be easily controlled, and the expansion and contraction in the surface direction is hindered. It is possible to provide a capacitance type pressure-sensitive sensor that is difficult to manufacture and a method for manufacturing the same.

It is a disassembled perspective view of the capacitive pressure sensor of the first embodiment. It is a permeation | transmission top view of the same capacitance type pressure sensitive sensor. It is the III-III direction sectional drawing of FIG. It is an up-down direction sectional view of the same capacitive pressure sensor when a load is input from the outside. The schematic diagram of the 1st step of the laminated body preparation process of the manufacturing method of the same capacitive pressure sensor is shown. The schematic diagram of the 2nd step of the same process is shown. The schematic diagram of the 3rd step of the same process is shown. It is a schematic diagram of the conjugate | zygote preparation process of the manufacturing method of the same capacitive pressure sensor. It is a schematic diagram of the dielectric layer arrangement | positioning process of the manufacturing method of the same capacitive pressure sensor. It is an upper surface penetration figure of the capacity type pressure sensitive sensor of a second embodiment. It is a top view of the positive electrode part of the same capacitive pressure sensor. It is a top view of the negative electrode part of the same capacitive pressure sensor. It is XIII-XIII direction sectional drawing of FIG. It is a partial enlarged top view of the negative electrode part and dielectric layer of the same capacitive pressure sensor. It is an up-down direction sectional view when the load is inputted from the outside of the capacitance type pressure sensitive sensor of a third embodiment. It is an up-down direction sectional view when a load is inputted from the outside of a capacitance type pressure sensitive sensor of a fourth embodiment. It is a schematic diagram of the conjugate | zygote preparation process of the manufacturing method of the same capacitive pressure sensor. (A) is an up-down direction sectional view of the capacitive pressure sensor according to the fifth embodiment when a load is input from the outside. (B) is a schematic top view of a capacitance change distribution when a load is input from the outside of the capacitance-type pressure-sensitive sensor. (A) is the arrangement pattern of the pillar part of Example 1-1. (B) is the arrangement pattern of the pillar part of Example 1-2. It is a graph which shows the relationship between the surface pressure of Example 1, and the variation | change_quantity of the electrostatic capacitance per pressure-sensitive part. It is a graph which shows the relationship between the surface pressure of Example 2, and the variation | change_quantity of the electrostatic capacitance per pressure-sensitive part.

  Hereinafter, embodiments of the capacitive pressure-sensitive sensor and the manufacturing method thereof according to the present invention will be described.

<First embodiment>
[Configuration of Capacitive Pressure Sensor]
First, the configuration of the capacitive pressure sensor of this embodiment will be described. FIG. 1 is an exploded perspective view of the capacitive pressure sensor according to the present embodiment. FIG. 2 is a transparent top view of the same capacitive pressure sensor. FIG. 3 shows a cross-sectional view in the III-III direction of FIG.

  As shown in FIGS. 1 to 3, the capacitive pressure sensor 1 of the present embodiment includes a positive electrode layer 20, a negative electrode layer 21, a dielectric layer 22, a positive electrode base layer 23, and a negative electrode. A side base layer 24, a positive electrode side insulating layer 25, a negative electrode side insulating layer 26, a positive electrode side wiring 27, and a negative electrode side wiring 28 are provided. The positive electrode side insulating layer 25 and the negative electrode side insulating layer 26 are included in the insulating layer of the present invention.

  The positive electrode side base layer 23 is made of urethane rubber and has a rectangular flat plate shape. The positive electrode side wiring 27 is formed including polyurethane and silver particles. The positive electrode side wiring 27 has a linear shape. The positive electrode side wiring 27 is printed on the lower surface of the positive electrode side base layer 23.

  The positive electrode side electrode layer 20 is formed including acrylic rubber and conductive carbon black. The positive electrode layer 20 has a rectangular thin film shape. The positive electrode side electrode layer 20 is printed on the lower surface of the positive electrode side base layer 23 so as to partially overlap the positive electrode side wiring 27. On the lower surface of the positive electrode side electrode layer 20, a positive electrode side facing surface 200 is disposed.

  The positive electrode side insulating layer 25 is formed including acrylic rubber. The positive electrode side insulating layer 25 has a rectangular thin film shape. The positive electrode side insulating layer 25 is printed on the lower surface of the positive electrode side wiring 27, the positive electrode side facing surface 200 of the positive electrode side electrode layer 20, and the lower surface of the positive electrode side base layer 23.

  The materials and configurations of the negative electrode side base layer 24, the negative electrode side wiring 28, the negative electrode side electrode layer 21, and the negative electrode side insulating layer 26 are the same as those of the positive electrode side base layer 23, the positive electrode side wiring 27, the positive electrode side electrode layer 20, and the positive electrode side insulating layer 25. The material and configuration are the same.

  The negative electrode side wiring 28 is printed on the upper surface of the negative electrode side base layer 24. The negative electrode side electrode layer 21 is printed on the upper surface of the negative electrode side base layer 24 so as to partially overlap the negative electrode side wiring 28. The negative electrode side insulating layer 26 is printed on the upper surface of the negative electrode side wiring 28, the negative electrode side facing surface 210 of the negative electrode side electrode layer 21, and the upper surface of the negative electrode side base layer 24.

  The dielectric layer 22 includes a pressure sensitive part 220. The pressure-sensitive portion 220 is disposed in a portion where the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 overlap in the vertical direction (front and back direction). The pressure sensitive part 220 includes a large number of column parts 221 and a space part 222. The column part 221 is formed including acrylic rubber. The column part 221 has a cylindrical shape. The column portion 221 is printed on the upper surface of the negative electrode side insulating layer 26. The multiple column portions 221 form a plurality of rows extending in the front right-left rear direction and a plurality of rows extending in the left front-right rear direction. That is, the large number of column portions 221 are arranged in a substantially orthogonal lattice shape. The large number of column portions 221 are arranged so as to be distributed substantially uniformly over the entire dielectric layer 22. The space part 222 is interposed between the many column parts 221. For this reason, the many column portions 221 are scattered independently. The area of the upper surface of the pressure-sensitive portion 220 is 100%, and the area occupied by the column portion 221 on the upper surface of the pressure-sensitive portion 220 is about 11%.

[Movement of capacitive pressure sensor]
Next, the movement of the capacitive pressure sensor 1 of the present embodiment will be described. The positive electrode side wiring 27 and the negative electrode side wiring 28 are connected to an electric circuit (not shown). A predetermined voltage is applied between the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21.

  FIG. 4 is a vertical cross-sectional view of the capacitive pressure sensor according to the present embodiment when a load is input from the outside. As shown in FIG. 4, when a load F1 is input in a direction from the upper side to the lower side, the positive electrode side base layer 23 sinks downward. In addition, a large number of column portions 221 are compressed from above. Moreover, the column part 221 expands radially outward in a barrel shape.

  When the positive electrode side base layer 23 sinks, the gap between the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 becomes narrow. That is, as shown in the above formula (1), the inter-electrode distance d is shortened. For this reason, the capacitance C increases. From the change in the capacitance C, the magnitude of the load F1 is calculated by a calculation unit (not shown).

[Manufacturing Method of Capacitive Pressure Sensor]
Next, a manufacturing method of the capacitive pressure sensor 1 of the present embodiment will be described. The manufacturing method of the capacitive pressure sensor 1 of the present embodiment includes a paint preparation process, a laminate manufacturing process, a joined body manufacturing process, and a dielectric layer arranging process.

(Paint adjustment process)
In the paint preparation step, a wiring paint, an electrode layer paint, a column part paint, and an insulating layer paint are prepared. The electrode layer paint is prepared by the following procedure. First, 100 parts by mass of a polymer (acrylic rubber, trade name: Nipol (registered trademark) AR51, manufactured by Nippon Zeon Co., Ltd.), a vulcanization aid (stearic acid, trade name: Lunac (registered trademark) S30, manufactured by Kao Corporation) 00 parts by mass, vulcanization accelerator (zinc dimethyldithiocarbamate, trade name: Noxeller (registered trademark) PZ, manufactured by Ouchi Shinsei Chemical Co., Ltd.) 2.50 parts by mass, vulcanization accelerator (ferric dimethyldithiocarbamate, (Product name: Noxeller TTFE, manufactured by Ouchi Shinsei Kagaku Kogyo Co., Ltd.) 0.50 parts by weight are weighed and rubber-kneaded using a roll. Then, a rubber compound is prepared. Subsequently, the prepared rubber compound is immersed in 1500 parts by mass of an organic solvent (methyl ethyl ketone, Sankyo Chemical Co., Ltd.), the organic solvent is stirred, and a solution in which the rubber compound is uniformly dissolved in the organic solvent is obtained. Then, 22.86 parts by mass of conductive carbon black (Ketjen Black, trade name: EC300J, manufactured by Lion Corporation) is added to the solution. Then, a MEK (methyl ethyl ketone) solution having a solid content of about 7.8% by mass is obtained. Then, the MEK solution is milled to improve the dispersibility of the conductive carbon black in the MEK solution. Specifically, the MEK solution is put into a dyno mill rotating at 3200 rpm, and the MEK solution is circulated about 40 times. Thereafter, 686.7 parts by mass of a printing solvent (diethylene glycol monobutyl ether acetate, manufactured by Sankyo Chemical Co., Ltd.) is added to the milled MEK solution. Then, the MEK solution to which the printing solvent is added is transferred to a container having a wide mouth in order to widen the area in contact with the atmosphere. Then, the MEK solution is allowed to stand for about one day with occasional stirring to sufficiently evaporate MEK having a low boiling point. Thus, an electrode layer coating material is prepared. The boiling point of the printing solvent is 200 ° C. or higher. For this reason, the volatilization of the printing solvent is negligible.

  The insulating layer paint and the column paint are prepared by the following procedure. First, 100 parts by mass of a polymer (acrylic rubber, trade name: Nipol AR51, manufactured by Nippon Zeon), vulcanization aid (stearic acid, trade name: Lunac S30, manufactured by Kao Corporation), 1.00 parts by weight, vulcanization accelerator (Zinc dimethyldithiocarbamate, trade name: Noxeller PZ, manufactured by Ouchi Shinsei Chemical Co., Ltd.) 2.50 parts by mass, vulcanization accelerator (ferric dimethyldithiocarbamate, trade name: Noxeller TTFE, Ouchi Shinsei Chemical Co., Ltd.) (Manufactured) Weigh 0.50 parts by mass and knead rubber using a roll. Then, a rubber compound is prepared. Subsequently, the prepared rubber compound is immersed in 300 parts by mass of a printing solvent (ethylene glycol monobutyl ether acetate, manufactured by Daicel Chemical Industries, Ltd.), and stirred to make it uniform. In this manner, the insulating layer paint and the column part paint are prepared.

  The wiring paint is prepared by the following procedure. First, 333 parts by mass of polymer (polyurethane dissolved in MEK / toluene / isopropyl alcohol, trade name: NIPPOLAN (registered trademark) 5230, manufactured by Nippon Polyurethane Industry Co., Ltd.) (the solid content of the polymer is 30% by mass, so 333 mass of polymer) Part corresponds to 100 parts by mass of polyurethane), 10 μm flaky silver particles (trade name: FA-D-4, manufactured by DOWA Electronics) 400 parts by mass, 1 μm spherical silver particles (trade names: AG2-1C, DOWA) 400 parts by mass of Electronics Co., Ltd.) and 150 parts by mass of a printing solvent (butyl carbitol, Sankyo Chemical Co., Ltd.) are weighed and stirred to homogenize. Then, the solution after stirring is transferred to a container having a wide mouth in order to widen the area in contact with the atmosphere. Then, the solution is allowed to stand for about a day with occasional stirring to sufficiently evaporate MEK, toluene and isopropyl alcohol having a low boiling point. In this way, a wiring paint is prepared.

(Laminate production process)
In the laminate manufacturing process, the wiring paint, electrode layer paint, and insulating layer paint prepared in the paint preparation process are laminated on the upper surface of the negative electrode side base layer 24 by printing. In FIG. 5, the schematic diagram of the 1st step of the laminated body preparation process of the manufacturing method of the capacitive pressure-sensitive sensor of this embodiment is shown. FIG. 6 shows a schematic diagram of the second stage of the process. In FIG. 7, the schematic diagram of the 3rd step of the same process is shown.

  As shown in FIG. 5, a screen printer 9 is used for printing the wiring paint, electrode layer paint, and insulating layer paint. The screen printing machine 9 includes a table 90, a frame 91, a screen mask 92, and a squeegee 93. On the table 90, the negative electrode side base layer 24 is placed. The screen mask 92 is disposed above the table 90. The screen mask 92 is stretched around a frame-shaped frame 91. A hole 920 is formed in the screen mask 92 corresponding to the position of the negative electrode side wiring 28. On the upper surface of the screen mask 92, wiring paint 28a is stacked. The squeegee 93 is disposed above the screen mask 92.

  In this step, first, as shown in FIGS. 5 and 6, the squeegee 93, the frame 91, and the screen mask 92 are lowered. Then, the lower surface of the screen mask 92 is brought into contact with the upper surface of the negative electrode side base layer 24. In addition, the squeegee 93 is pressed against the upper surface of the screen mask 92. Subsequently, as shown in FIG. 6, the squeegee 93 is moved in the horizontal direction. By moving the squeegee 93, the wiring paint 28 a is pushed into the hole 920. The pressed wiring coating material 28 a is transferred to a predetermined position on the upper surface of the negative electrode side base layer 24. In this way, as shown in FIG. 7, the negative electrode side wiring 28 is formed on the upper surface of the negative electrode side base layer 24. Thereafter, the negative electrode side wiring 28 is heated and vulcanized.

  Next, the electrode layer paint is printed on the upper surfaces of the negative electrode side base layer 24 and the negative electrode side wiring 28. The negative electrode side electrode layer 21 is formed on the upper surfaces of the negative electrode side base layer 24 and the negative electrode side wiring 28 by printing. Thereafter, the negative electrode layer 21 is heated and vulcanized.

  Subsequently, the insulating layer paint is printed on the upper surfaces of the negative electrode side base layer 24, the negative electrode side wiring 28, and the negative electrode side electrode layer 21. A negative electrode side insulating layer 26 is formed on the upper surfaces of the negative electrode side base layer 24, the negative electrode side wiring 28, and the negative electrode side electrode layer 21 by printing. Thereafter, the negative electrode side insulating layer 26 is heated and vulcanized.

  In this step, in this way, a negative electrode-side laminate in which the negative electrode-side base layer 24, the negative electrode-side wiring 28, the negative electrode-side electrode layer 21, and the negative electrode-side insulating layer 26 are laminated is formed. And the positive electrode side laminated body by which the positive electrode side base layer 23, the positive electrode side wiring 27, the positive electrode side electrode layer 20, and the positive electrode side insulating layer 25 were laminated | stacked by the procedure similar to the formation method of the negative electrode side laminated body.

(Joint fabrication process)
In the joined body production step, the columnar paint prepared in the paint preparation step is laminated on the upper surface of the negative electrode side laminate. In FIG. 8, the schematic diagram of the conjugate | zygote preparation process of the manufacturing method of the capacitance-type pressure-sensitive sensor of this embodiment is shown.

  As shown in FIG. 8, a screen printing machine 9 is used for printing the columnar paint, as in the laminate manufacturing process. The positions of the holes 920 of the screen mask 92 correspond to the positions of the pillar portions 221 shown in FIG. In this step, the column paint 221 a is pushed into the hole 920 by moving the squeegee 93. The pushed columnar paint 221 a is transferred to a predetermined position on the upper surface of the negative electrode laminate 30. A column portion 221 having a predetermined length is formed on the upper surface of the negative electrode laminate 30 by applying the column portion coating material 221 a a plurality of times. Thereafter, the column portion 221 is heated and vulcanized. In this way, the joined body 31 composed of the negative electrode side laminate 30 and the column portion 221 is formed.

(Dielectric layer placement process)
In the dielectric layer arranging step, the bonded body 31 formed in the bonded body manufacturing step and the positive electrode side stacked body formed in the stacked body stacking step are bonded. In FIG. 9, the schematic diagram of the dielectric layer arrangement | positioning process of the manufacturing method of the capacitive pressure-sensitive sensor of this embodiment is shown.

  In this step, as shown in FIG. 9, the top end surface of the column portion 221 of the bonded body 31 is bonded to the lower surface of the positive electrode side insulating layer 25 of the positive electrode side stacked body 32. By the joining, as shown in FIG. 3, the capacitive pressure sensitive sensor 1 of the present embodiment is completed.

[Function and effect]
Next, the operational effects of the capacitive pressure sensor 1 and the manufacturing method thereof according to the present embodiment will be described. According to the capacitive pressure sensor 1 of the present embodiment, the positive electrode layer 20 and the negative electrode layer 21 overlap each other when viewed from above (front side) or below (back side). The pressure sensitive part 220 of the dielectric layer 22 is disposed in the overlapping part. The pressure sensitive part 220 has a column part 221 and a space part 222. The column part 221 is made of non-foamed material. For this reason, even after the load F1 input from the outside is removed, the compression set hardly remains in the column portion 221.

  Further, according to the capacitive pressure sensor 1 of the present embodiment, the pressure-sensitive part 220 includes the column part 221 and the space part 222. For this reason, as shown in the above equation (1), the dielectric constant ε of the pressure-sensitive portion 220 is increased as compared with the case where the pressure-sensitive portion 220 is only the space portion 222, that is, the air layer. Therefore, the absolute value of the capacitance C increases. That is, the detection accuracy of the capacitance C is increased.

  In addition, according to the capacitive pressure sensor 1 of this embodiment, the spring constant in the compression direction is small as compared with the case where the pressure-sensitive portion 220 is only the column portion 221, that is, the non-foamed body. For this reason, the amount of compressive strain of the pressure-sensitive portion 220 with respect to the load F1 increases. When the amount of compressive strain is large, the amount of change in the interelectrode distance d increases as shown in the above equation (1). For this reason, the amount of change in the capacitance C increases.

  Further, according to the capacitive pressure sensor 1 of the present embodiment, the size, shape, and arrangement of the column part 221 in the pressure-sensitive part 220, the occupied area of the column part 221 in the pressure-sensitive part 220, and the like are adjusted. Thus, the spring constant of the pressure sensitive part 220 can be freely adjusted.

  By reducing the spring constant of the pressure sensitive part 220, it is possible to detect a small load close to a load that can be detected only when the pressure sensitive part 220 is only an air layer. By increasing the spring constant of the pressure-sensitive portion 220, it is possible to detect a large load close to a load that can be detected only when the pressure-sensitive portion 220 is only a non-foamed body. That is, by adjusting the spring constant of the pressure-sensitive part 220, the measurement range of the load F1 can be shifted.

  Further, according to the capacitive pressure sensor 1 of the present embodiment, the positive electrode layer 20 is fixed to the positive electrode base layer 23. In addition, the negative electrode layer 21 is fixed to the negative electrode base layer 24. For this reason, the arrangement of the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 is not easily displaced by the load F1 input from the outside. Further, when manufacturing the capacitive pressure sensitive sensor 1, the alignment of the positive electrode layer 20 and the negative electrode layer 21 is simple. That is, the pressure sensitive part 220 can be arranged at a desired position.

  In addition, according to the capacitive pressure sensor 1 of the present embodiment, the column portion 221 is made of an elastomer. For this reason, the spring constant of the compression direction of the pillar part 221 is small compared with the case where the pillar part 221 is resin. Therefore, when the load F1 is input from the outside, the column portion 221 and the space portion 222 are compressed together. Therefore, the amount of change in capacitance increases.

  Moreover, according to the capacitive pressure sensor 1 of the present embodiment, the area of the upper surface of the pressure-sensitive part 220 is 100%, and the area occupied by the column part 221 on the upper surface of the pressure-sensitive part 220 is about 11%. For this reason, as shown in FIG. 4, even if many pillar parts 221 are compressed by the load F1, adjacent pillar parts 221 do not interfere in radial direction.

  In addition, according to the capacitive pressure sensor 1 of the present embodiment, the many column portions 221 are arranged in a substantially orthogonal grid so as to be distributed substantially uniformly over the entire dielectric layer 22. Yes. For this reason, it can suppress that the detection sensitivity of the load F1 varies over the whole dielectric layer 22.

  Moreover, the positive electrode side insulating layer 25 and the negative electrode side insulating layer 26 are arrange | positioned at the capacitive pressure-sensitive sensor 1 of this embodiment. For this reason, even if the dielectric layer 22 is greatly compressed, it is possible to prevent the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 from being short-circuited.

  Moreover, when the column part 221 is prismatic, the stress distribution when a load is applied from the outside tends to be non-uniform. In this regard, according to the capacitive pressure sensor 1 of the present embodiment, the column portion 221 has a cylindrical shape. For this reason, the stress distribution when a load is applied from the outside is unlikely to be uneven. Therefore, the design of the shape, dimensions, number of arrangement, and arrangement pattern of the column portions 221 is simplified.

  Further, according to the method of manufacturing the capacitive pressure sensor 1 of the present embodiment, the positive electrode side wiring 27, the positive electrode side electrode layer 20, the positive electrode side insulating layer 25, the negative electrode side wiring 28, and the negative electrode side electrode layer are screen-printed. 21, a negative electrode side insulating layer 26, and a column part 221 are formed. In the laminate manufacturing process, the positive electrode side wiring 27, the positive electrode side electrode layer 20, the positive electrode side insulating layer 25, the negative electrode side wiring 28, the negative electrode side electrode layer 21, and the negative electrode side insulating layer 26 are reliably and simply formed in a predetermined pattern. Can be arranged. In the joined body manufacturing step, a large number of column portions 221 can be reliably and easily arranged in a predetermined pattern.

  Further, according to the method for manufacturing the capacitive pressure sensor 1 of the present embodiment, as shown in FIG. 8, in the joined body manufacturing process, the column portion 221 is adjusted by adjusting the printing thickness of the column portion paint 221 a. The length is adjusted. For this reason, the length of the column part 221 can be adjusted easily. In addition, the length, shape, diameter, and the like of the many column portions 221 can be made uniform.

  By adjusting the length of the column portion 221, the inter-electrode distance d of the above-described formula (1) can be adjusted. That is, the absolute value of the output capacitance C can be adjusted. For example, when the length of the column part 221 is shortened, the inter-electrode distance d is shortened. For this reason, the absolute value of the capacitance C increases. Therefore, the detection accuracy of the capacitance C is increased. Further, for example, when the length of the column portion 221 is increased, the inter-electrode distance d is increased. For this reason, when the load F1 is input from the outside, it can suppress that the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 short-circuit.

<Second embodiment>
The difference between the capacitive pressure sensor of this embodiment and its manufacturing method and the capacitive pressure sensor of the first embodiment and its manufacturing method is that a large number of pressure sensitive parts are arranged, It is a point that can measure a two-dimensional surface pressure distribution.

[Configuration of Capacitive Pressure Sensor]
First, the configuration of the capacitive pressure sensor of this embodiment will be described. FIG. 10 is a top transparent view of the capacitive pressure sensor of this embodiment. In FIG. 10, the negative electrode portion is indicated by a thin line. In addition, the pressure-sensitive part is shown with hatching. Moreover, about the site | part corresponding to FIGS. 1-3, it shows with the same code | symbol. FIG. 11 shows a top view of the positive electrode portion of the same capacitive pressure sensor. FIG. 12 shows a top view of the negative electrode portion of the same capacitive pressure sensor. In FIG. 12, the negative electrode side insulating layer is omitted. FIG. 13 shows a cross-sectional view in the XIII-XIII direction of FIG. In FIG. 13, the thickness in the vertical direction is emphasized. As shown in FIGS. 10 to 13, the capacitive pressure-sensitive sensor 1 according to the present embodiment includes a positive electrode part 40, a negative electrode part 41, and a dielectric layer 22.

  The positive electrode part 40 includes a positive electrode side base layer 23, a positive electrode side insulating layer 25, positive electrode side electrode layers 01X to 16X, positive electrode side wirings 01x to 16x, and a positive electrode side wiring connector 50. The positive electrode side base layer 23 is made of urethane rubber and has a flat plate shape. A total of 16 positive electrode layers 01 </ b> X to 16 </ b> X are disposed on the lower surface of the positive electrode base layer 23. The positive electrode layers 01 </ b> X to 16 </ b> X are printed on the lower surface of the positive electrode base layer 23. The positive electrode layers 01X to 16X are each formed to include acrylic rubber and conductive carbon black. Each of the positive electrode layers 01X to 16X has a strip shape. The positive electrode layers 01X to 16X each extend in the X direction (left-right direction). The positive electrode layers 01X to 16X are arranged in the Y direction (front-rear direction) so as to be substantially parallel to each other with a predetermined interval. On the lower surfaces of the positive electrode side electrode layers 01X to 16X, positive electrode side facing surfaces 01X1 to 16X1 are disposed.

  The positive electrode side wiring connector 50 is disposed at the left rear corner of the positive electrode side base layer 23. The positive electrode side wiring connector 50 is connected to an electric circuit (not shown). A total of 16 positive-side wirings 01x to 16x are arranged on the lower surface of the positive-side base layer 23. The positive electrode side wirings 01 x to 16 x are printed on the lower surface of the positive electrode side base layer 23. The positive electrode side wirings 01x to 16x are each formed of polyurethane and silver particles. Each of the positive electrode side wirings 01x to 16x has a linear shape. The positive electrode side wirings 01x to 16x connect the positive electrode side electrode layers 01X to 16X and the positive electrode side wiring connector 50, respectively.

  The positive electrode side insulating layer 25 is formed including acrylic rubber. The positive electrode side insulating layer 25 has a thin film shape. The positive electrode side insulating layer 25 is printed on the lower surface of the positive electrode side wirings 01x to 16x, the positive electrode side facing surfaces 01X1 to 16X1 of the positive electrode side electrode layers 01X to 16X, and the lower surface of the positive electrode side base layer 23.

  The negative electrode portion 41 includes a negative electrode side base layer 24, a negative electrode side insulating layer 26, negative electrode side electrode layers 01Y to 16Y, negative electrode side wirings 01y to 16y, and a negative electrode side wiring connector 51. The negative electrode side base layer 24, the negative electrode side insulating layer 26, the negative electrode side electrode layers 01Y to 16Y, the negative electrode side wirings 01y to 16y, and the material and configuration of the negative electrode side wiring connector 51 are the positive electrode side base layer 23, the positive electrode side insulating layer 25, The materials and configurations of the positive electrode layers 01X to 16X, the positive electrode wirings 01x to 16x, and the positive electrode wiring connector 50 are the same. As shown in FIG. 13, the stacking order of the layers constituting the negative electrode part 41 is vertically symmetrical with the stacking order of the layers constituting the positive electrode part 40. As shown in FIG. 10, the negative electrode portion 41 rotates about 90 ° clockwise with respect to the positive electrode portion 40 with the center O1 of the positive electrode side electrode layers 01X to 16X and the negative electrode side electrode layers 01Y to 16Y as the rotation center. Are arranged. For this reason, the positive electrode side electrode layers 01X to 16X and the negative electrode side electrode layers 01Y to 16Y are substantially orthogonal to each other.

  The dielectric layer 22 is interposed between the positive electrode part 40 and the negative electrode part 41. The dielectric layer 22 includes pressure sensitive portions A0101 to A1616. In the code “AOOΔΔ” of the pressure-sensitive portion, the upper two digits “OO” correspond to the upper two digits of the positive electrode layers 01X to 16X. The lower two digits “ΔΔ” correspond to the upper two digits of the negative electrode layers 01Y to 16Y.

  As shown by hatching in FIG. 10, the pressure-sensitive portions A0101 to A1616 are disposed at portions where the positive electrode side electrode layers 01X to 16X and the negative electrode side electrode layers 01Y to 16Y intersect in the vertical direction (front and back direction). A total of 256 (= 16 × 16) pressure-sensitive parts A0101 to A1616 are arranged. The pressure sensitive parts A0101 to A1616 are arranged at substantially equal intervals over substantially the entire dielectric layer 22.

  Each of the pressure sensitive parts A0101 to A1616 includes a plurality of column parts 221 and a space part 222. FIG. 14 shows a partially enlarged top view of the negative electrode portion and the dielectric layer. In FIG. 14, the negative electrode side insulating layer 26 is omitted. As shown in FIGS. 13 and 14, the column portion 221 is formed to include acrylic rubber. The column part 221 has a cylindrical shape. The column portion 221 is printed on the upper surface of the negative electrode side insulating layer 26. The multiple column portions 221 form a plurality of rows extending in the front right-left rear direction and a plurality of rows extending in the left front-right rear direction. That is, the large number of column portions 221 are arranged in a substantially orthogonal lattice shape. The large number of column portions 221 are arranged so as to be distributed substantially uniformly over the entire dielectric layer 22. The space part 222 is interposed between the many column parts 221. For this reason, the many column portions 221 are scattered independently. The area of the upper surface of each pressure-sensitive part A0101 to A1616 is 100%, and the area occupied by the column part 221 on the upper surface of each pressure-sensitive part A0101 to A1616 is about 11%.

[Movement of capacitive pressure sensor]
Next, the movement of the capacitive pressure sensor 1 of the present embodiment will be described. A predetermined voltage is sequentially applied to the pressure sensitive units A0101 to A1616 as if scanning. If a load is input to the right rear corner of the capacitive pressure-sensitive sensor 1, as shown in FIG. 10, the distance between the positive electrode layer 01X and the negative electrode layer 16Y becomes narrow. That is, as shown in the above formula (1), the inter-electrode distance d is shortened. For this reason, the electrostatic capacitance C of the pressure sensitive part A0116 increases. From the change in the capacitance C, the magnitude of the load is calculated by a calculation unit (not shown). When a load is input to the other part of the capacitive pressure-sensitive sensor 1, the magnitude of the load is calculated in the same manner.

[Manufacturing Method of Capacitive Pressure Sensor]
The manufacturing method of the capacitive pressure sensor 1 of the present embodiment is the same as the manufacturing method of the capacitive pressure sensor of the first embodiment. That is, the manufacturing method of the capacitive pressure-sensitive sensor 1 of the present embodiment includes a paint preparation process, a laminate manufacturing process, a bonded body manufacturing process, and a dielectric layer arranging process. I will omit the explanation here.

[Function and effect]
Next, the operational effects of the capacitive pressure sensor 1 and the manufacturing method thereof according to the present embodiment will be described. The capacitive pressure-sensitive sensor 1 and the manufacturing method thereof according to the present embodiment have the same operational effects as the capacitive pressure-sensitive sensor according to the first embodiment and the manufacturing method thereof with respect to parts having the same configuration.

  Further, according to the capacitive pressure-sensitive sensor 1 of the present embodiment, a large number of column portions 221 are arranged so as to be distributed substantially uniformly over the entire dielectric layer 22. In addition, a large number of the column portions 221 are arranged independently of each other. For this reason, when a load is locally applied to an arbitrary pressure-sensitive part (for example, A0116), the column part 221 of the pressure-sensitive part A0116 is easily deformed. On the other hand, the pillar portions 221 of the pressure sensitive portions A0115, A0216, A0215 around the pressure sensitive portion A0116 are not easily deformed. Therefore, the input load tends to concentrate. Therefore, the pressure sensitive part A0116 to which the load is input can be clearly specified. That is, the load resolution is increased.

<Third embodiment>
The difference between the capacitive pressure sensor of the present embodiment and the manufacturing method thereof, and the capacitive pressure sensor of the first embodiment and the manufacturing method thereof is that the column portion is made of resin. . Therefore, only the differences will be described here.

  FIG. 15 is a cross-sectional view in the vertical direction when a load is input from the outside of the capacitive pressure sensor of this embodiment. In addition, about the site | part corresponding to FIG. 4, it shows with the same code | symbol. As shown in FIG. 15, the column portion 221 is made of an ultraviolet curable urethane acrylate. In the joined body manufacturing step in the first embodiment, instead of heating and vulcanizing the column portion 221, it is cured by irradiating with ultraviolet rays. For this reason, even if the load F1 is added, the column part 221 does not compressively deform. On the other hand, the positive electrode side base layer 23 and the negative electrode side base layer 24 are made of urethane rubber. For this reason, the positive electrode side base layer 23 and the negative electrode side base layer 24 have a smaller elastic modulus than the column part 221. Therefore, when the load F1 is applied, the positive electrode side base layer 23 and the negative electrode side base layer 24 are compressed and deformed.

  When the load F <b> 1 is applied, portions of the positive electrode side base layer 23 and the negative electrode side base layer 24 that are supported by the column portion 221 are compressively deformed. For this reason, the column portion 221 is relatively difficult to be inserted into the positive electrode side base layer 23 and the negative electrode side base layer 24. Therefore, as a result, the distance between the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 is reduced. That is, as shown in the above formula (1), the inter-electrode distance d is shortened. For this reason, the capacitance C increases. From the change in the capacitance C, the magnitude of the load F1 is calculated by a calculation unit (not shown).

  The capacitive pressure-sensitive sensor 1 and the manufacturing method thereof according to the present embodiment have the same operational effects as the capacitive pressure-sensitive sensor according to the first embodiment and the manufacturing method thereof with respect to parts having the same configuration.

  Further, according to the capacitive pressure sensor 1 of the present embodiment, the column portion 221 is made of resin. For this reason, the load F1 input from the outside is a component (compression component) in the front and back direction (vertical direction) of the capacitive pressure sensor 1 and the surface direction (horizontal direction) of the capacitive pressure sensor 1. Even when the component (shear component) is included, the overlapping area S is unlikely to change as shown in the above-described equation (1). Therefore, the compression component can be detected preferentially in the load F1 input from the outside.

<Fourth embodiment>
The difference between the capacitive pressure sensor of the present embodiment and the manufacturing method thereof and the capacitive pressure sensor of the first embodiment and the manufacturing method thereof is that when a load is input from the outside, The positive electrode side base layer and the negative electrode side base layer are compressively deformed. Moreover, the column part is printed by the dispenser device. Further, the material of the column part, the positive electrode side base layer, and the negative electrode side base layer is different. Therefore, only the differences will be described here.

[Movement of capacitive pressure sensor]
First, the movement of the capacitive pressure sensor 1 of the present embodiment will be described. FIG. 16 is a vertical cross-sectional view of the capacitive pressure sensor according to the present embodiment when a load is input from the outside. In addition, about the site | part corresponding to FIG. 4, it shows with the same code | symbol. As shown in FIG. 16, when the load F <b> 1 is input, portions of the positive electrode side base layer 23 and the negative electrode side base layer 24 that are supported by the column part 221 are compressed and deformed. For this reason, the column portion 221 is relatively difficult to be inserted into the positive electrode side base layer 23 and the negative electrode side base layer 24. When the load F1 is input, the column portion 221 contracts in the axial direction and expands outward in the radial direction.

  Thus, since the positive electrode side base layer 23, the negative electrode side base layer 24, and the column part 221 shrink | contract in the up-down direction, the distance between the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 becomes narrow. That is, as shown in the above formula (1), the inter-electrode distance d is shortened. For this reason, the capacitance C increases. From the change in the capacitance C, the magnitude of the load F1 is calculated by a calculation unit (not shown).

[Manufacturing Method of Capacitive Pressure Sensor]
Next, a manufacturing method of the capacitive pressure sensor 1 of the present embodiment will be described. The manufacturing method of the capacitive pressure sensor 1 of the present embodiment includes a paint preparation process, a laminate manufacturing process, a joined body manufacturing process, and a dielectric layer arranging process.

(Paint adjustment process)
In the paint preparation step, a wiring paint, an electrode layer paint, a column part paint, and an insulating layer paint are prepared. Among these, adjustment of wiring paint, electrode layer paint, and insulating layer paint is performed in the same manner as in the first embodiment.

  The column paint is prepared by the following procedure. First, 100 parts by mass of a polymer (acrylonitrile-butadiene rubber, trade name: Nipol DN101, manufactured by Nippon Zeon), vulcanization aid (stearic acid, trade name: Lunac S30, manufactured by Kao Corporation), 1.00 parts by weight, vulcanization Auxiliaries (Zinc oxide (ZnO) trade name: 2 types of zinc oxide, manufactured by Sakai Chemical Industry Co., Ltd.) 5.00 parts by mass, vulcanizing agent (dispersible sulfur, trade name: Sulfax, manufactured by Tsurumi Chemical Co., Ltd.) 80 parts by mass, vulcanization accelerator (tetramethylthiuram disulfide, trade name: Sunseller TT, manufactured by Sanshin Chemical Industry Co., Ltd.) 1.50 parts by mass, vulcanization accelerator (N-cyclohexyl-2-benzothiazolylsulfur Fenamide, trade name: Noxeller CZ, manufactured by Ouchi Shinsei Chemical Co., Ltd.) 1 part by weight is weighed and rubber kneaded using a roll. Then, a rubber compound is prepared. Subsequently, the prepared rubber compound is immersed in 255 parts by mass of a printing solvent (ethylene glycol monobutyl ether acetate, manufactured by Daicel Chemical Industries), and is stirred and uniformized. In this way, a column paint is prepared. In addition, the viscosity of the column part paint is 230 Pa · s at room temperature.

(Laminate production process)
In the laminated body production process, the wiring paint, electrode layer paint, and insulating layer paint prepared in the paint preparation process are laminated on the upper surfaces of the positive electrode side base layer 23 and the negative electrode side base layer 24 by a screen printer. And a positive electrode side laminated body and a negative electrode side laminated body are formed.

  In addition, the positive electrode side base layer 23 and the negative electrode side base layer 24 are produced as follows. First, the rubber compound for the column paint is formed into a sheet shape. Next, the sheet-like rubber compound is press vulcanized at 150 ° C. for 30 minutes. Thus, the positive electrode side base layer 23 and the negative electrode side base layer 24 are produced.

(Joint fabrication process)
In the joined body manufacturing step, the columnar coating material prepared in the coating material preparation step is applied to the upper surface of the negative electrode side laminate. In FIG. 17, the schematic diagram of the conjugate | zygote preparation process of the manufacturing method of the capacitance-type pressure-sensitive sensor of this embodiment is shown. In addition, about the site | part corresponding to FIG. 8, it shows with the same code | symbol.

  As shown in FIG. 17, a dispenser device 8 is used for printing the column paint. The dispenser device 8 includes a syringe 80 and a nozzle 81. The syringe 80 is movable in the front-rear and left-right directions. The syringe 80 is filled with a columnar paint 221a. The nozzle 81 is attached to the lower wall of the syringe 80. Air is supplied to the syringe 80 via a pipe (not shown). The column paint 221a is dropped from the nozzle 81 by the air pressure.

  In this step, the columnar paint 221a is dropped while moving the syringe 80, thereby drawing a dotted line on the upper surface of the negative electrode side laminate. And a pillar part is formed. Then, the column part is vulcanized by heating the negative electrode side laminate after forming the column part at 150 ° C. for 30 minutes. In this manner, a joined body composed of the negative electrode side laminate and the column portion is formed.

(Dielectric layer placement process)
In the dielectric layer arranging step, the joined body formed in the joined body manufacturing step and the positive electrode side laminated body formed in the laminated body laminating step are joined. By the joining, as shown in FIG. 16, the capacitive pressure sensor 1 of the present embodiment is completed.

[Function and effect]
The capacitive pressure-sensitive sensor 1 and the manufacturing method thereof according to the present embodiment have the same operational effects as the capacitive pressure-sensitive sensor according to the first embodiment and the manufacturing method thereof with respect to parts having the same configuration.

  Further, according to the capacitive pressure sensor 1 of the present embodiment, the column portion 221, the positive electrode side base layer 23, and the negative electrode side base layer 24 are compressively deformed by the load F <b> 1. For this reason, the detection sensitivity of the load F1 increases.

  Further, according to the method for manufacturing the capacitive pressure sensor 1 of the present embodiment, the column part 221 is formed using the dispenser device 8. For this reason, the column part 221 with a long axial direction can be easily formed by only applying the column part paint 221a once without applying it repeatedly like a screen printing machine.

  Further, by adjusting the discharge amount of the column part paint 221a from the syringe 80, the axial length of the column part 221 can be easily adjusted. The discharge amount of the column part paint 221a can be adjusted by adjusting the discharge temperature, discharge pressure, discharge time, moving speed of the syringe 80, and the like.

<Fifth embodiment>
The difference between the capacitive pressure sensor of the present embodiment and the manufacturing method thereof and the capacitive pressure sensor of the fourth embodiment and the manufacturing method thereof is the difference between the upper side of the positive electrode side base layer and the negative electrode side base layer. A load transmission layer made of foamed EPDM (ethylene-propylene-diene rubber) is disposed below. Therefore, only the differences will be described here.

  FIG. 18A shows a vertical cross-sectional view of the capacitive pressure sensor according to this embodiment when a load is input from the outside. In addition, about the site | part corresponding to FIG. 16, it shows with the same code | symbol. FIG. 18B shows a schematic top view of a capacitance change distribution when a load is input from the outside of the capacitance type pressure sensitive sensor. FIG. 18A schematically illustrates only four column portions 221, but actually, a large number of column portions 221 are arranged in a predetermined pattern below the weight 7. ing.

  As shown in FIG. 18A, flexible foamed EPDM load transmission layers 29 a and 29 b are disposed above the positive electrode side base layer 23 and below the negative electrode side base layer 24. When the weight 7 is placed on the upper surface of the load transmission layer 29a, the portions of the load transmission layers 29a and 29b supported by the column portion 221 are greatly compressed and deformed. For this reason, portions of the load transmission layers 29 a and 29 b that are not supported by the column portion 221 bulge out to the space portion 222. That is, the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 largely bulge into the space portion 222.

  As shown in FIG. 18B, when the load transmission layers 29 a and 29 b are arranged, the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 can bulge into the space 222 greatly. For this reason, a region E3 where the capacitance change is large appears on the entire lower surface of the weight 7.

  Incidentally, when both the load transmission layers 29 a and 29 b are not arranged, the positive electrode side electrode layer 20 and the negative electrode side electrode layer 21 are unlikely to bulge into the space portion 222. For this reason, a region E <b> 1 with a large capacitance change appears in a thin frame shape along the outer edge of the lower surface of the weight 7.

  In addition, when only one of the load transmission layers 29 a and 29 b is disposed, only the electrode layer on the side where the base layer is disposed can bulge into the space 222 greatly. For this reason, a region E <b> 2 where the capacitance change is large appears in a thick frame shape along the outer edge of the lower surface of the weight 7.

  The capacitive pressure-sensitive sensor 1 and the manufacturing method thereof according to the present embodiment have the same operational effects as the capacitive pressure-sensitive sensor according to the fourth embodiment and the manufacturing method thereof with respect to parts having the same configuration.

  Further, according to the capacitive pressure sensor 1 of the present embodiment, due to the load of the weight 7, the portions of the load transmission layers 29 a and 29 b that are not supported by the column portion 221 bulge out greatly into the space portion 222. . For this reason, the load detection sensitivity increases.

  Moreover, according to the capacitive pressure sensor 1 of the present embodiment, the region E3 where the capacitance change is large appears on the entire lower surface of the weight 7. For this reason, it is possible to suppress variation in the capacitance change distribution, that is, variation in load detection sensitivity.

<Others>
The embodiments of the capacitive pressure sensor 1 and the manufacturing method thereof according to the present invention have been described above. However, the embodiment is not particularly limited to the above embodiment. Various modifications and improvements that can be made by those skilled in the art are also possible.

  For example, in the said embodiment, the positive electrode side electrode layers 20 and 01X-16X were arrange | positioned upwards, and the negative electrode side electrode layers 21 and 01Y-16Y were arrange | positioned below, respectively. However, the arrangement of the positive electrode layers 20, 01X to 16X and the negative electrode layers 21, 01Y to 16Y may be upside down. Moreover, you may arrange | position the positive electrode side electrode layers 20 and 01X-16X, and the negative electrode side electrode layers 21 and 01Y-16Y so that it may oppose in a horizontal direction.

  Moreover, in the said embodiment, although the two insulating layers of the positive electrode side insulating layer 25 and the negative electrode side insulating layer 26 were arrange | positioned, you may arrange | position only any one. Moreover, if there is no possibility that the positive electrode side electrode layers 20, 01X to 16X and the negative electrode side electrode layers 21, 01Y to 16Y are short-circuited, the insulating layer may not be arranged. Further, the shape, dimensions, number of arrangement, and arrangement pattern of the column portions 221 are not particularly limited.

  Moreover, in the said embodiment, as shown in FIG. 8, the length of the column part 221 was adjusted by applying the column part coating material 221a repeatedly. However, the length of the column portion 221 may be adjusted by adjusting the thickness of the screen mask 92, that is, the total length of the hole 920.

  Further, the number of arranged positive electrode layers 01X to 16X and the negative electrode layers 01Y to 16Y and the crossing angle of the capacitive pressure sensor 1 of the second embodiment are not particularly limited. Moreover, the space | interval of adjacent positive electrode side electrode layer 01X-16X and the space | interval of negative electrode side electrode layer 01Y-16Y are not specifically limited, either. Moreover, you may print antioxidant so that the positive electrode side wiring 01x-16x and the negative electrode side wiring 01y-16y may be covered. This can suppress the oxidation of silver in the wiring. Further, the use of the capacitive pressure sensor 1 is not particularly limited. For example, it may be used as a seat detection sensor for a vehicle seat, a touch sensor, a user position detection sensor in a hot carpet, or the like. The capacitive pressure sensor 1 of the present embodiment is formed to include an elastomer and is particularly flexible. For this reason, even if the capacitive pressure sensor 1 is disposed relatively close to the user's body, the user feels less uncomfortable. Therefore, it is particularly suitable for detecting a load (for example, weight) from a human.

  Moreover, the printing method in the manufacturing method of the capacitive pressure sensor 1 is not particularly limited. In addition to screen printing, inkjet printing, flexographic printing, gravure printing, pad printing, lithography, or the like may be used.

  Moreover, in 1st embodiment and 2nd embodiment, the elastomer which comprises the column part 221 can be suitably selected from rubber | gum and a thermoplastic elastomer. The elastomer is not particularly limited. For example, from the viewpoint of increasing the capacitance, those having a high relative dielectric constant are preferable. For example, it is preferable that the relative dielectric constant at room temperature is 3 or more, and further 5 or more. For example, an elastomer having a polar functional group such as an ester group, a carboxyl group, a hydroxyl group, a halogen group, an amide group, a sulfone group, a urethane group, or a nitrile group, or an elastomer added with a polar low molecular weight compound having these polar functional groups Is preferably used. The elastomer may or may not be cross-linked. Moreover, what is necessary is just to adjust a detection sensitivity or a detection range according to a use by adjusting the Young's modulus of an elastomer. That is, the dielectric layer 22 having various Young's moduli can be selected according to the magnitude of the load from the outside.

  Examples of suitable elastomers include silicone rubber, acrylonitrile-butadiene copolymer rubber, acrylic rubber, epichlorohydrin rubber, chlorosulfonated polyethylene, chlorinated polyethylene, and urethane rubber.

  Moreover, in 3rd embodiment, resin which comprises the pillar part 221 is not specifically limited. For example, it is good also considering the photocurable resin used for a braille board etc. as a material.

  The length of the column part 221 is not particularly limited. For example, the detection sensitivity can be increased by increasing the capacitance C proportional to the reciprocal of the distance d between the electrodes as shown in the viewpoint of reducing the thickness of the capacitance-type pressure-sensitive sensor 1 and the above equation (1). From the viewpoint of improving the thickness, it is preferably 1 μm or more and 3000 μm or less. 50 μm or more and 500 μm or less is more preferable.

  Moreover, the elastomer which comprises the positive electrode side electrode layers 20 and 01X-16X and the negative electrode side electrode layers 21 and 01Y-16Y may be the same as the elastomer used for the column part 221, or may differ. In the case where the positive electrode side electrode layers 20, 01X to 16X, the negative electrode side electrode layers 21, 01Y to 16Y, and the column portion 221 are made of the same elastomer, the positive electrode side electrode layers 20, 01X to 16X against deformation of the column portion 221, The followability of the negative electrode layer 21, 01Y to 16Y is improved.

  Moreover, as an elastomer suitable for the positive electrode side electrode layers 20, 01X to 16X and the negative electrode side electrode layers 21, 01Y to 16Y, silicone rubber, ethylene-propylene copolymer rubber, natural rubber, styrene-butadiene copolymer rubber, acrylonitrile- Examples include butadiene copolymer rubber, acrylic rubber, epichlorohydrin rubber, chlorosulfonated polyethylene, chlorinated polyethylene, and urethane rubber.

  In the positive electrode side electrode layers 20, 01X to 16X and the negative electrode side electrode layers 21, 01Y to 16Y, the shape of the conductive filler mixed in the elastomer is not particularly limited. For example, the aspect ratio (the ratio of the long side to the short side) of the conductive filler is preferably 1 or more. For example, when a needle-like conductive filler having a relatively large aspect ratio is used, a three-dimensional conductive network can be easily formed, and high conductivity can be realized with a small amount. In addition, it is possible to suppress a change in conductivity when the positive electrode side electrode layers 20, 01X to 16X and the negative electrode side electrode layers 21, 01Y to 16Y expand and contract.

  Moreover, when selecting a conductive filler, it is good to consider an average particle diameter, compatibility with an elastomer, etc. For example, when a spherical conductive filler is employed, the average particle diameter (primary particles) of the conductive filler is preferably 0.01 μm or more and 0.5 μm or less. When the thickness is less than 0.01 μm, the cohesiveness is high, and it is difficult to uniformly disperse the electrode paint. Preferably it is 0.03 micrometer or more. On the other hand, when it exceeds 0.5 μm, it becomes difficult to form aggregates (secondary particles). Preferably it is 0.1 micrometer or less. The critical volume fraction (φc) in the percolation curve can be adjusted within a desired range by appropriately adjusting the combination of the conductive filler and the elastomer, the average particle diameter of the conductive filler, and the like.

  Moreover, in order to express desired electroconductivity, it is preferable that the electroconductive filler is mix | blended in the ratio more than the critical volume fraction ((phi) c) in a percolation curve. On the other hand, when the filling rate of the conductive filler exceeds 30 vol%, mixing with the elastomer becomes difficult, and molding processability is deteriorated. In addition, the stretchability of the positive electrode layer 20, 01X to 16X and the negative electrode layer 21, 01Y to 16Y is lowered. For this reason, it is preferable that it is 30 vol% or less. Further, from the viewpoint of securing the stretchability of the positive electrode side electrode layers 20, 01X to 16X and the negative electrode side electrode layers 21, 01Y to 16Y, a relatively small amount of conductive filler can be blended to express high conductivity. preferable. Therefore, it is preferable that the filling rate of the conductive filler is 25 vol% or less when the volume of the positive electrode layer 20, 01X to 16X and the negative electrode layer 21, 01Y to 16Y is 100 vol%. It is more preferable that it is 15 vol% or less.

  The thicknesses of the positive electrode side electrode layers 20, 01X to 16X and the negative electrode side electrode layers 21, 01Y to 16Y are not particularly limited. From the viewpoint of reducing the thickness of the capacitive pressure-sensitive sensor 1 in consideration of the followability with respect to the column part 221, it is preferably 1 μm or more and 100 μm or less. Moreover, in order to improve the followability with respect to the deformation | transformation of the column part 221, it is preferable that the Young's modulus of the positive electrode side electrode layers 20 and 01X-16X and the negative electrode side electrode layers 21 and 01Y-16Y shall be 0.1 Mpa or more and 10 Mpa or less. Similarly, the elongation at break in the tensile test (JIS K6251) is preferably 200% or more.

  Further, the electric resistance of the positive electrode side electrode layers 20, 01X to 16X and the negative electrode side electrode layers 21, 01Y to 16Y is preferably 100 kΩ or less, more preferably 10 kΩ or less in the thickness direction and the surface direction. is there.

  Moreover, in addition to the said elastomer and a conductive filler, various additives may be mix | blended with the positive electrode side electrode layers 20 and 01X-16X and the negative electrode side electrode layers 21 and 01Y-16Y. Examples of the additive include a crosslinking agent, a vulcanization accelerator, a vulcanization aid, an antiaging agent, a plasticizer, a softening agent, and a colorant.

  The elastomer constituting the positive electrode side wirings 01x to 16x and the negative electrode side wirings 01y to 16y may be the same as the elastomer used for the column part 221, the positive electrode side electrode layers 20, 01X to 16X, and the negative electrode side electrode layers 21, 01Y to 16Y. , May be different. For example, silicone rubber, ethylene-propylene copolymer rubber, natural rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, acrylic rubber, epichlorohydrin rubber, chlorosulfonated polyethylene, chlorinated polyethylene, urethane rubber, etc. Is preferred.

  Moreover, in the positive electrode side wirings 01x to 16x and the negative electrode side wirings 01y to 16y, the kind of the conductive particles blended in the elastomer is not particularly limited as long as it has high conductivity. For example, metal powder such as silver, copper, gold, or nickel may be employed. Moreover, in order to express desired conductivity, the filling rate of the conductive particles in the elastomer is 20 vol% or more when the volume of the positive electrode side wirings 01x to 16x or the negative electrode side wirings 01y to 16y is 100 vol%. Is preferred. Moreover, in order to suppress the fall of the elasticity of the positive electrode side wiring 01x-16x and the negative electrode side wiring 01y-16y, it is preferable that the filling rate of the electroconductive particle in an elastomer is 50 vol% or less.

  Examples of materials for forming the positive electrode side insulating layer 25 and the negative electrode side insulating layer 26 include acrylic rubber, urethane rubber, silicone rubber, ethylene propylene copolymer rubber, natural rubber, styrene-butadiene rubber, acrylonitrile butadiene rubber, and epichlorohydrin. Examples thereof include rubber, chlorosulfonated polyethylene, and chlorinated polyethylene rubber.

  Moreover, the material which comprises the positive electrode side insulating layer 25 and the negative electrode side insulating layer 26 may be the same as the elastomer used for the column part 221, or may differ. When the positive electrode side insulating layer 25, the negative electrode side insulating layer 26, and the column portion 221 are made of the same elastomer, the followability of the positive electrode side insulating layer 25 and the negative electrode side insulating layer 26 with respect to deformation of the column portion 221 is improved.

  In the fifth embodiment, the load transmission layers 29a and 29b are made of foamed EPDM, but may be made of other flexible elastomer foam. For example, it may be made of foamed silicone rubber, foamed urethane rubber, or foamed chloroprene rubber. Further, the load transmission layers 29a and 29b are not limited to elastomer foams, but may be any material that can be elastically deformed.

  The 25% compressive stress of the load transfer layers 29a and 29b is preferably 1 MPa or less. The reason is that the load can be effectively transmitted from the load transmission layers 29 a and 29 b to the positive electrode layer 20 and the negative electrode layer 21. Further, at least one of the positive electrode side base layer 23 and the negative electrode side base layer 24 may be made of an elastically deformable material such as an elastomer foam, like the load transmission layers 29a and 29b.

  Using the capacitive pressure-sensitive sensor 1 of the fifth embodiment shown in FIG. 18, the change in the capacitance with respect to the load when the arrangement pattern of the column portions 221 was changed was measured. FIG. 19A shows an arrangement pattern of the pillar portions of Example 1-1. FIG. 19B shows an arrangement pattern of the pillar portions of Example 1-2. In Examples 1-1 and 1-2, the column portion 221 was formed using a dispenser device (trade name: SHOTMASTER 500) manufactured by Musashi Engineering.

  As shown to Fig.19 (a), the column part 221 of Example 1-1 is arrange | positioned densely. The diameter D1 of the column part 221 of Example 1-1 is 3 mm. Further, the interval D2 between the adjacent column portions 221 is 2 mm. Moreover, the axial direction height of the column part 221 is 0.22-0.30 mm. Further, assuming that the surface area of the pressure-sensitive portion is 100%, the area occupied by the column portion 221 on the surface is 28.3%.

  As shown in FIG. 19B, the column portions 221 of Example 1-2 are arranged sparsely. The diameter D1 of the column part 221 of Example 1-2 is 3 mm. Further, the interval D2 between the adjacent column portions 221 is 7 mm. Moreover, the axial direction height of the column part 221 is 0.25-0.32 mm. Further, assuming that the surface area of the pressure-sensitive portion is 100%, the area occupied by the column portion 221 on the surface is 14.1%.

The load application area is 324 cm 2 (= 18 cm × 18 cm). Moreover, the electrode size of one pressure-sensitive part (part shown by hatching in FIG. 10) is 1.96 cm 2 (= 1.4 cm × 1.4 cm). The total number of pressure-sensitive parts is 256 (= 16 × 16).

  FIG. 20 shows the relationship between the surface pressure and the amount of change in capacitance per pressure-sensitive part. The amount of change in capacitance per pressure-sensitive part is defined as C1 for the capacitance of any pressure-sensitive part when a load is applied, C0 for the capacitance of the pressure-sensitive part when no load is applied, The total number of N pressure-sensitive portions of the capacitance variation ΔC (= C1-C0) is divided by N, where N is the number of pressure-sensitive portions. That is, it is an average value of the amount of change in capacitance.

  From FIG. 20, it can be seen that the amount of change in capacitance is more likely to increase in Example 1-2 as the surface pressure increases than in Example 1-1. That is, it can be seen that Example 1-2 in which the arrangement pattern of the column portions 221 is sparse has higher load detection sensitivity than Example 1-1 in which the arrangement pattern of the column portions 221 is dense. Thus, the load detection sensitivity can be adjusted by changing the arrangement pattern of the column portions 221.

  Using the capacitance-type pressure-sensitive sensor 1 of the fifth embodiment shown in FIG. 18, the change in capacitance with respect to the load when the load transmission layers 29 a and 29 b made of foamed EPDM were added or removed was measured. Example 2-1 is the capacitive pressure-sensitive sensor 1 of the fifth embodiment. Example 2-2 excludes the load transmission layer 29a from the capacitive pressure sensor 1 of the fifth embodiment. In Example 2-3, the load transmission layer 29b is excluded from the capacitive pressure sensor 1 of the fifth embodiment. Example 2-4 excludes the load transmission layers 29a and 29b from the capacitive pressure sensor 1 of the fifth embodiment.

  As shown in FIG. 19B, the diameter D1 of the column portion 221 is 2 mm in both Examples 2-1 to 2-4. Moreover, the space | interval D2 between the adjacent pillar parts 221 is 3.333 mm. Moreover, the axial direction height of the column part 221 is about 0.2 mm. Further, assuming that the surface area of the pressure-sensitive portion is 100%, the area occupied by the column portion 221 on the surface is 22.1%.

The load application area is 324 cm 2 (= 18 cm × 18 cm). Moreover, the electrode size of one pressure-sensitive part (part shown by hatching in FIG. 10) is 1.96 cm 2 (= 1.4 cm × 1.4 cm). The total number of pressure-sensitive parts is 256 (= 16 × 16).

  FIG. 21 shows the relationship between the surface pressure and the amount of change in capacitance per pressure-sensitive part. From FIG. 21, it can be seen that the amount of change in capacitance tends to increase as the surface pressure increases in the order of Example 2-1, Example 2-2, Example 2-3, and Example 2-4. . That is, Example 2-1 has the highest load detection sensitivity, the next highest is Example 2-2, the next highest is Example 2-3, and then It turns out that it is Example 2-4 that is high. Thus, by adding or removing the positive electrode side base layer 23 and the negative electrode side base layer 24, the load detection sensitivity can be adjusted.

1: Capacitive pressure sensor, 7: weight, 8: dispenser device, 9: screen printer.
20: Positive electrode layer, 21: Negative electrode layer, 22: Dielectric layer, 23: Positive electrode base layer, 24: Negative electrode base layer, 25: Positive electrode insulating layer, 26: Negative electrode insulating layer, 27: Positive electrode wiring , 28: negative electrode side wiring, 28a: wiring paint, 29a: load transmission layer, 29b: load transmission layer, 30: negative electrode side laminate, 31: joined body, 32: positive electrode side laminate, 40: positive electrode part, 41: Negative electrode portion, 50: positive side wiring connector, 51: negative side wiring connector, 80: syringe, 81: nozzle, 90: table, 91: frame, 92: screen mask, 93: squeegee.
200: positive side facing surface, 210: negative side facing surface, 220: pressure sensitive part, 221: pillar part, 221a: pillar part paint, 222: space part, 920: hole.
01X to 16X: Positive electrode side electrode layer, 01Y to 16Y: Negative electrode side electrode layer, 01x to 16x: Positive electrode side wiring, 01y to 16y: Negative electrode side wiring, 01X1 to 16X1: Positive electrode side facing surface, A0101 to A1616: Pressure sensitive part .
F1: Load, O1: Center.

Claims (13)

  1. The positive electrode side electrode layer, the negative electrode side electrode layer, and the positive electrode side electrode layer and the negative electrode side electrode layer that are interposed between the positive electrode side electrode layer and the negative electrode side electrode layer overlap each other in the front-back direction. And a dielectric layer having a pressure-sensitive portion to be formed, and the capacitance changes based on a change in the distance between the positive electrode layer and the negative electrode layer due to an externally input load. A capacitance type pressure sensitive sensor capable of detecting a change in the load,
    The pressure-sensitive part is made of an elastomer or a resin, and has a non-foamed column part and a space part, and is a capacitance-type pressure-sensitive sensor.
  2.   The capacitance-type pressure-sensitive pressure sensor according to claim 1, further comprising: an elastomeric positive electrode side base layer on which the positive electrode side electrode layer is disposed; and an elastomer negative electrode side base layer on which the negative electrode side electrode layer is disposed. Sensor.
  3. With the dielectric layer as a center, the direction toward both sides of the stacking direction is outward, the opposite direction is inward,
    Furthermore, it has the load transmission layer which is arrange | positioned in at least one among the outer side of the said positive electrode side base layer, and the outer side of the said negative electrode side base layer, and has a compressive elasticity modulus smaller than this positive electrode side base layer and this negative electrode side base layer. The capacitance-type pressure-sensitive sensor described.
  4.   The capacitance type according to any one of claims 1 to 3, wherein an area of the surface of the pressure-sensitive portion is 100%, and an area occupied by the pillar portion on the surface is 0.5% or more and 51% or less. Pressure sensitive sensor.
  5.   The capacitive pressure sensor according to claim 4, wherein the occupied area is 45% or less.
  6.   The capacitance type pressure sensitive sensor according to any one of claims 1 to 5, wherein a plurality of the column parts are arranged independently of each other.
  7.   The capacitive pressure-sensitive sensor according to claim 6, wherein the plurality of pillar portions are arranged in a predetermined pattern so as to be distributed substantially uniformly over the entire dielectric layer.
  8. The positive electrode side electrode layer has a positive electrode side facing surface facing the negative electrode side electrode layer through the dielectric layer;
    The negative electrode side electrode layer has a negative electrode side facing surface facing the positive electrode side electrode layer through the dielectric layer,
    The capacitive pressure-sensitive sensor according to any one of claims 1 to 7, further comprising an insulating layer that covers at least one of the positive-side facing surface and the negative-side facing surface.
  9. Laminate production process for producing a laminate having the base layer, the wiring, and the electrode layer by printing the wiring paint and the electrode layer paint in random order on the elastomer base layer;
    By printing a pillar coating on the laminate so as to partially overlap the electrode layer in the front and back direction, the laminate and the pillar made of elastomer or resin and made of non-foamed material are formed. A bonded body manufacturing step of manufacturing a bonded body having,
    A dielectric layer disposing step of disposing a dielectric layer having the pillar portion and the space portion between a pair of the electrode layers by joining another laminate to the tip of the pillar portion of the joined body;
    A method for manufacturing a capacitance-type pressure-sensitive sensor.
  10.   The method for manufacturing a capacitive pressure-sensitive sensor according to claim 9, wherein, in the joined body manufacturing step, the length of the column part is adjusted by adjusting a printing thickness of the column part paint.
  11.   10. The laminate having the base layer, the wiring, the electrode layer, and the insulating layer is further manufactured by printing an insulating layer coating so as to cover the electrode layer in the laminate manufacturing step. The manufacturing method of the capacitive pressure-sensitive sensor according to claim 10.
  12.   The method for manufacturing a capacitive pressure-sensitive sensor according to any one of claims 9 to 11, wherein a plurality of the column portions are independently arranged in the joined body manufacturing step.
  13.   The capacitance-type pressure-sensitive sensor according to claim 12, wherein, in the joined body manufacturing step, the plurality of pillar portions are arranged in a predetermined pattern so as to be distributed substantially uniformly over the entire laminated body. Manufacturing method.
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EP2802851B1 (en) * 2012-01-12 2020-08-19 Stichting voor de Technische Wetenschappen Six-axis force-torque sensor
CN104067099A (en) * 2012-03-26 2014-09-24 东海橡塑工业株式会社 Capacitive sensor
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JP2014119306A (en) * 2012-12-14 2014-06-30 Denso Corp Load detection cell, method of manufacturing load detection cell, and passenger detection sensor
WO2015093030A1 (en) * 2013-12-18 2015-06-25 信越ポリマー株式会社 Detection sensor and detection sensor fabrication method
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CN103994844A (en) * 2014-05-21 2014-08-20 东南大学 Pressure sensitive element based on thermoplastic elastomers and surface load distribution measurement method
JP2016045118A (en) * 2014-08-25 2016-04-04 株式会社細田 Electrical capacitance weight sensor and breath/body-motion sensor using the electrical capacitance weight sensor
CN106153219A (en) * 2015-04-15 2016-11-23 北京纳米能源与系统研究所 A kind of strain gauge, preparation method and electronic skin
CN106153219B (en) * 2015-04-15 2019-01-22 北京纳米能源与系统研究所 A kind of strain gauge, preparation method and electronic skin

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