JP2010214743A - Liquid discharge head, head cartridge, and image forming apparatus - Google Patents

Liquid discharge head, head cartridge, and image forming apparatus Download PDF

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JP2010214743A
JP2010214743A JP2009063709A JP2009063709A JP2010214743A JP 2010214743 A JP2010214743 A JP 2010214743A JP 2009063709 A JP2009063709 A JP 2009063709A JP 2009063709 A JP2009063709 A JP 2009063709A JP 2010214743 A JP2010214743 A JP 2010214743A
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liquid
liquid chamber
discharge head
frame member
liquid discharge
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JP5387953B2 (en
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Kiyoaki Fukuyama
清明 福山
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Ricoh Co Ltd
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Ricoh Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a high density and highly reliable liquid discharge head capable of stably discharging despite the environmental change, a head cartridge, and an image forming apparatus. <P>SOLUTION: The liquid discharge head has a liquid chamber unit constituted by connecting a nozzle substrate having nozzles for discharging liquid, a liquid chamber for storing the liquid in communication with the respective nozzles including flowing channels, and a diaphragm formed at least a part of the wall of the liquid chamber, a drive means for generating pressure for pressurizing the liquid in the liquid chamber, a frame member supporting the liquid chamber unit and having a common liquid chamber, and a heating means for heating the liquid discharged by the frame member. Further, the frame member in the liquid discharge head is formed of a plurality of kinds of members having different thermal conductivities, a site having the heating means of the frame member is formed of a high thermal conductive member, and a site formed of a low thermal conductive member is arranged in the drive means side of the high thermal conductive member. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は液体吐出ヘッド、インクカートリッジ及び画像形成装置に関し、詳細には圧電素子などの駆動手段により振動板を変位させてノズルから液体を吐出させる液体吐出ヘッドに関する。   The present invention relates to a liquid discharge head, an ink cartridge, and an image forming apparatus, and more particularly, to a liquid discharge head that discharges liquid from a nozzle by displacing a diaphragm by a driving unit such as a piezoelectric element.

プリンタ、ファクシミリ、複写装置、プロッタ等の画像形成装置として使用するインクジェット記録装置は、液滴を吐出するノズルと、このノズルが連通する圧力室、加圧液室、液室、インク室、流路等の吐出室と、この吐出室内の液体を加圧するエネルギーを発生するアクチュエータ手段とを備えて、アクチュエータ手段を駆動することで吐出室内の液体を加圧してノズルから液滴を吐出させるものであり、記録の必要なときにのみ液滴を吐出するインク・オン・デマンド方式のものが主流である。   An ink jet recording apparatus used as an image forming apparatus such as a printer, a facsimile machine, a copying apparatus, or a plotter has a nozzle that discharges droplets, a pressure chamber, a pressurized liquid chamber, a liquid chamber, an ink chamber, and a flow path that communicate with the nozzle. And the like, and an actuator means for generating energy to pressurize the liquid in the discharge chamber, and the actuator means is driven to pressurize the liquid in the discharge chamber and discharge droplets from the nozzles. Ink-on-demand systems, which eject droplets only when recording is necessary, are the mainstream.

ところで、記録速度の高速化、記録密度の高密度化の要求から、複数のノズルを有するマルチノズルヘッドを使用し、さらに要求する液滴のサイズを益々小さくする傾向にある。そのために液室をより小さくする傾向にある。ノズルピッチを細かくするために幅方向が短くなるだけでなく、液室の長さ方向も短くする必要がある。これは、液室の圧力共振周波数を高くすることで、小さい滴を吐出させるためである。   By the way, due to the demand for higher recording speed and higher recording density, a multi-nozzle head having a plurality of nozzles is used, and the required droplet size tends to be further reduced. Therefore, the liquid chamber tends to be made smaller. In order to make the nozzle pitch fine, it is necessary not only to shorten the width direction but also to shorten the length direction of the liquid chamber. This is because small droplets are ejected by increasing the pressure resonance frequency of the liquid chamber.

また、一方で特許文献1に記載のように、液体を吐出するために熱エネルギーを発生する電気熱変換体が設けられた支持体に、温度を検出する温度検出素子を設けて液体の粘度制御のために熱を加えて当該熱を管理する記録ヘッドが提案されている。更に、特許文献2には、隔壁の基材は通電して発熱する電気/熱交換材料で形成されて、この隔壁に通電して隔壁からの発熱で個別液室内のインク液を加温するインクジェットヘッドが提案されている。   On the other hand, as described in Patent Document 1, a temperature detection element for detecting temperature is provided on a support provided with an electrothermal converter that generates thermal energy for discharging liquid, thereby controlling the viscosity of the liquid. For this reason, recording heads that apply heat and manage the heat have been proposed. Further, Patent Document 2 discloses an inkjet in which the base material of the partition is formed of an electric / heat exchange material that generates heat when energized, and the ink liquid in the individual liquid chamber is heated by energizing the partition and generating heat from the partition. A head has been proposed.

しかしながら、前述のような高密度で小型のヘッドにおいて、このような粘度制御を行う場合、加熱源を配置するスペースが問題となる。具体的には、駆動手段等は電気制御部を有し熱を嫌うため、できるだけ加熱源から離す事が好ましいが、液室を高密度化にすることでフレームと駆動手段との距離も近づき、駆動手段等の電気制御部に不具合をもたらす。   However, in such a high-density and small-sized head as described above, when such viscosity control is performed, the space for arranging the heating source becomes a problem. Specifically, since the drive means has an electric control part and dislikes heat, it is preferable to keep it away from the heating source as much as possible, but by increasing the density of the liquid chamber, the distance between the frame and the drive means also approaches, This causes problems in the electric control unit such as the driving means.

本発明はこれらの問題点を解決するためのものであり、環境変化によらず安定した吐出ができる高密度で高信頼性を有する液体吐出ヘッド、ヘッドカートリッジ及び画像形成装置を提供することを目的とする。   SUMMARY An advantage of some aspects of the invention is to provide a high-density, high-reliability liquid discharge head, a head cartridge, and an image forming apparatus that can stably discharge regardless of environmental changes. And

前記問題点を解決するために、本発明の液体吐出ヘッドは、液体を吐出するノズルを有したノズル基板と、流路を含む各ノズルが連通する液体を蓄える液室と、液室の少なくとも一部の壁面を形成する振動板とが接合された液室ユニットと、液室内の液体を加圧する圧力を発生させるための駆動手段と、液室ユニットを支持し、共通液室を有するフレーム部材と、フレーム部材に吐出させる液体を加熱させる加熱手段とを有している。そして、本発明の液体吐出ヘッドにおけるフレーム部材は熱伝導率が異なる複数種類の部材から形成され、フレーム部材の加熱手段を備えた部位を高熱伝導部材で形成し、高熱伝導部材の駆動手段側に低熱伝導部材で形成された部位を設けたことに特徴がある。また、高熱伝導部材の外周部を低熱伝導部材で形成する。よって、駆動手段に近いフレームの外周部に低熱伝導部材を使用し、内側に加熱手段で加熱できる高熱伝導部材を使用することで液体の粘度は制御でき、かつヘッドの周りに熱が放熱されにくくなり、加熱手段による熱によって生じる駆動手段の電気回路部の故障がなくなり、高品質で高信頼性な液体吐出ヘッドを提供できる。   In order to solve the above problems, a liquid discharge head according to the present invention includes a nozzle substrate having a nozzle for discharging a liquid, a liquid chamber for storing a liquid communicated with each nozzle including a flow path, and at least one of the liquid chambers. A liquid chamber unit joined to a diaphragm forming a wall surface of the unit, a driving means for generating pressure for pressurizing the liquid in the liquid chamber, a frame member that supports the liquid chamber unit and has a common liquid chamber, And heating means for heating the liquid discharged to the frame member. The frame member in the liquid discharge head according to the present invention is formed of a plurality of types of members having different thermal conductivities, and the portion provided with the heating means of the frame member is formed of the high heat conductive member, and on the drive means side of the high heat conductive member. It is characterized in that a portion formed of a low heat conductive member is provided. Moreover, the outer peripheral part of a high heat conductive member is formed with a low heat conductive member. Therefore, by using a low heat conduction member on the outer periphery of the frame near the drive means and using a high heat conduction member that can be heated by the heating means on the inside, the viscosity of the liquid can be controlled and heat is not easily dissipated around the head. Thus, the failure of the electric circuit portion of the driving means caused by the heat from the heating means is eliminated, and a high quality and highly reliable liquid discharge head can be provided.

また、共通液室から液室ユニットの液室へ液体を供給するフレーム部材側の流路が流体抵抗部となることにより、個別液室側で生じた圧力波が共通液室に伝播することがなく、高品質な吐出が可能となると共に、液室基板に流体抵抗を設ける必要が無くなり、ヘッドの小型化や複雑な液室構造を設ける必要が無くなり、液室自体の剛性も高くなる。   Further, the flow path on the frame member side that supplies the liquid from the common liquid chamber to the liquid chamber of the liquid chamber unit serves as a fluid resistance portion, so that the pressure wave generated on the individual liquid chamber side can propagate to the common liquid chamber. In addition, high-quality discharge is possible, and it is not necessary to provide fluid resistance on the liquid chamber substrate, and it is not necessary to reduce the size of the head or to provide a complicated liquid chamber structure, so that the rigidity of the liquid chamber itself is increased.

更に、共通液室から液室ユニットの液室へ液体を供給するフレーム部材側の流路にフィルタを設けることにより、流路内に異物を持ち込むことが無く、ノズル詰まり等の問題が無くなり、高品質で高寿命の液体吐出ヘッドが提供できる。   Furthermore, by providing a filter in the flow path on the frame member side that supplies liquid from the common liquid chamber to the liquid chamber of the liquid chamber unit, foreign matters are not brought into the flow path, and problems such as nozzle clogging are eliminated. High quality and long life liquid discharge head can be provided.

また、共通液室から液室ユニットの液室へ液体を供給するフレーム部材にダンパを設けることにより、共通液室内で生じる圧力波や液体供給による液体の慣性を吸収することが可能となる。   Further, by providing a damper on the frame member that supplies the liquid from the common liquid chamber to the liquid chamber of the liquid chamber unit, it is possible to absorb the pressure wave generated in the common liquid chamber and the inertia of the liquid due to the liquid supply.

更に、フレーム部材が流路ユニットより高剛性部材で形成されている。機械加工により液室が形成された液室基板は、変形が生じていて均一な接合をすることが困難であるが、液室ユニットと接合されるフレーム部材を高剛性部材にすることで流路ユニットの変形を矯正することができ、均一な接合が可能となる。また、高剛性部材により液室ユニットを支持するので駆動手段が液室に与えるエネルギーの損失を防ぐことができるために吐出効率が良く、高品質で高信頼性を実現できる高密度な液体吐出ヘッドを提供できる。   Further, the frame member is formed of a member having higher rigidity than the flow path unit. The liquid chamber substrate in which the liquid chamber is formed by machining is deformed and it is difficult to perform uniform bonding, but the flow path can be obtained by making the frame member bonded to the liquid chamber unit a highly rigid member. The deformation of the unit can be corrected, and uniform bonding is possible. In addition, since the liquid chamber unit is supported by a high-rigidity member, the loss of energy given to the liquid chamber by the drive means can be prevented, so the discharge efficiency is high, and the high-density liquid discharge head that can realize high quality and high reliability. Can provide.

また、液室基板を形成する機械加工がプレス加工であることにより、低コストで高密度かつ高精度な液室が形成できる。   In addition, since the machining for forming the liquid chamber substrate is press processing, a liquid chamber with high density and high accuracy can be formed at low cost.

更に、別の発明としてのヘッドカートリッジは、上記の液体吐出ヘッドを搭載したことに特徴がある。よって、高密度化、高品質化、高画質化と低コスト化を満たすことができるインクカートリッジを提供できる。   Furthermore, a head cartridge as another invention is characterized in that the above-described liquid discharge head is mounted. Therefore, it is possible to provide an ink cartridge that can satisfy high density, high quality, high image quality, and low cost.

また、別の発明としての画像形成装置は、上記の液体吐出ヘッドを搭載したことに特徴がある。よって、高密度化、高品質化、高画質化と低コスト化を満たすことができる画像形成装置を提供できる。   An image forming apparatus as another invention is characterized in that the above-described liquid discharge head is mounted. Therefore, an image forming apparatus that can satisfy high density, high quality, high image quality, and low cost can be provided.

本発明の液体吐出ヘッドによれば、駆動手段に近いフレームの外周部に低熱伝導部材を使用し、内側に加熱手段で加熱できる高熱伝導部材を使用することで液体の粘度は制御でき、かつヘッドの周りに熱が放熱されにくくなり、加熱手段の熱によって生じる駆動手段の電気回路部の故障がなくなり、高品質で高信頼性な液体吐出ヘッドを提供できる。   According to the liquid discharge head of the present invention, the viscosity of the liquid can be controlled by using a low heat conductive member on the outer peripheral portion of the frame close to the driving means and using a high heat conductive member that can be heated by the heating means on the inner side. It is difficult for heat to be dissipated around the motor, and the failure of the electric circuit portion of the driving means caused by the heat of the heating means is eliminated, and a high-quality and highly reliable liquid discharge head can be provided.

本発明の一実施の形態に係る液体吐出ヘッドの構成を示す断面図である。FIG. 2 is a cross-sectional view illustrating a configuration of a liquid discharge head according to an embodiment of the present invention. 本発明の一実施の形態に係る液体吐出ヘッドの構成を示す断面図である。FIG. 2 is a cross-sectional view illustrating a configuration of a liquid discharge head according to an embodiment of the present invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 液室の高密度化構造を示す断面図である。It is sectional drawing which shows the high-density structure of a liquid chamber. Ni電鋳の2層振動板の電鋳工程を示す断面図である。It is sectional drawing which shows the electroforming process of the 2-layer diaphragm of Ni electroforming. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。It is sectional drawing which shows another structure of the liquid discharge head which concerns on one embodiment of this invention. 本発明の一実施の形態に係る画像形成装置の全体構成を示す側面図である。1 is a side view showing an overall configuration of an image forming apparatus according to an embodiment of the present invention. 本発明の一実施の形態に係る画像形成装置の要部構成を示す平面図である。1 is a plan view showing a main configuration of an image forming apparatus according to an embodiment of the present invention.

10,70;液室基板、11;液室、12;液体抵抗部、
13;共通液室、20;ノズル板、21;ノズル、30;振動板、
31;ダイアフラム部、32;凸部、33;肉厚部、
34;液体供給口、40;積層圧電素子、41;電極積層部、
42;駆動部、43;支持部材、50;ベース基板、60;フレーム、
80;ヒータ、81;高熱伝導率部材、82;低熱伝導率部材、
83;電気制御部、84;流体抵抗部、85;フィルタ、
86;ダンパ、87;低熱伝導性接着剤、100;画像形成装置。
10, 70; liquid chamber substrate, 11; liquid chamber, 12; liquid resistance portion,
13; Common liquid chamber, 20; Nozzle plate, 21; Nozzle, 30;
31; Diaphragm part, 32; Convex part, 33; Thick part,
34; liquid supply port, 40; laminated piezoelectric element, 41; electrode laminated portion,
42; drive unit, 43; support member, 50; base substrate, 60; frame,
80; heater; 81; high thermal conductivity member; 82; low thermal conductivity member;
83; Electric control unit, 84; Fluid resistance unit, 85; Filter,
86; damper, 87; low thermal conductive adhesive, 100; image forming apparatus.

図1〜図3は本発明の一実施の形態を表わす液体吐出ヘッドの構成を示す断面図である。図1は液室長軸方向、つまりノズル配列方向と交差する方向に沿った断面図である。図2、3は液室短軸方向、つまりノズル配列方向に沿った断面図である。なお、吐出する液体はインクでなくても良い。また、接合面に関して、ここでは平面であることを中心に説明するが部材表面に複数の凹凸があっても良い。   1 to 3 are cross-sectional views showing the configuration of a liquid discharge head according to an embodiment of the present invention. FIG. 1 is a cross-sectional view along the longitudinal direction of the liquid chamber, that is, the direction intersecting the nozzle arrangement direction. 2 and 3 are cross-sectional views along the minor axis direction of the liquid chamber, that is, along the nozzle arrangement direction. Note that the liquid to be ejected may not be ink. In addition, although the description will be made centering on the flat surface here, the surface of the member may have a plurality of irregularities.

図1、2に示す液体吐出ヘッドは、液室11や流体抵抗部12を形成する液室基板10と、この液室基板10の上面に接合した液滴を吐出するノズル21を形成するノズル板20と、液室基板10の下面に接合し、ダイアフラム部31を有す振動板30と、この振動板30と接合され、液室11内の圧力を変化させる圧力変化手段である積層圧電素子40と、積層圧電素子40を固定するベース基板50とを備えている。また、本実施の形態の液体吐出ヘッドによれば、フレーム部材が2種以上の熱伝導率が違う部材から形成され、また液体の粘度を制御するためにヒータ80を設け、更には共通液室13の溜まっている液体を加熱保温するために共通液室を形成している部材が熱伝導性の高い高熱伝導率部材81を使用している。また、駆動手段に近いフレーム部材の外周部は低熱伝導率部材82で形成されている。なお、各部材は接着層で接合されているが、図1、2では接着層は他部材に比べると厚さが薄いために図示していない。また、振動板30には図3に示すような凸部32と厚肉部33を設ける構成も考えられる。   The liquid discharge head shown in FIGS. 1 and 2 includes a liquid chamber substrate 10 that forms the liquid chamber 11 and the fluid resistance portion 12, and a nozzle plate that forms nozzles 21 that discharge droplets bonded to the upper surface of the liquid chamber substrate 10. 20, a diaphragm 30 bonded to the lower surface of the liquid chamber substrate 10 and having a diaphragm portion 31, and a laminated piezoelectric element 40 which is bonded to the diaphragm 30 and is a pressure changing means for changing the pressure in the liquid chamber 11. And a base substrate 50 for fixing the laminated piezoelectric element 40. Further, according to the liquid discharge head of the present embodiment, the frame member is formed of two or more members having different thermal conductivities, the heater 80 is provided to control the viscosity of the liquid, and the common liquid chamber is further provided. The member forming the common liquid chamber uses the high thermal conductivity member 81 having high thermal conductivity in order to heat and retain the liquid in which 13 is accumulated. Further, the outer peripheral portion of the frame member close to the driving means is formed of a low thermal conductivity member 82. Each member is bonded with an adhesive layer, but the adhesive layer is not shown in FIGS. 1 and 2 because it is thinner than other members. Moreover, the structure which provides the convex part 32 and the thick part 33 as shown in FIG.

液体吐出ヘッドにおける積層圧電素子40は、図1の(b)及び当該図1の(b)の破線部分の拡大図である図1の(c)に示すように、圧電材料層と電極層とを交互に積層した電極積層部41を有し、積層圧電素子40の圧電方向としてd33方向の変位を用いて液室11内の液体を加圧する構成としている。また、図2、3に示したような、積層圧電素子40はハーフカットのダイシング加工により櫛歯上に分割され、1つ毎に圧電素子の駆動部42と非駆動部である支持部材43として使用する。この構造をバイピッチ構造と呼ぶ。支持部材43により流路ユニットを支えているので、液室11の圧力上昇によって液室基板10が持ち上がることを防ぎ、いわゆる相互干渉を抑えることに非常に有効である。   The laminated piezoelectric element 40 in the liquid discharge head includes a piezoelectric material layer, an electrode layer, and a piezoelectric material layer, as shown in FIG. 1B and an enlarged view of a broken line portion in FIG. Are laminated, and the liquid in the liquid chamber 11 is pressurized using displacement in the d33 direction as the piezoelectric direction of the laminated piezoelectric element 40. Also, as shown in FIGS. 2 and 3, the laminated piezoelectric element 40 is divided on the comb teeth by half-cut dicing, and each of them is used as a driving part 42 and a supporting member 43 that is a non-driving part of the piezoelectric element. use. This structure is called a bi-pitch structure. Since the flow path unit is supported by the support member 43, the liquid chamber substrate 10 is prevented from being lifted by a rise in the pressure of the liquid chamber 11, and is very effective in suppressing so-called mutual interference.

なお、液室11をより高密度化させた構造を示す本発明の別の一実施の形態を表わす図4からわかるように、積層圧電素子40の駆動部42をノズルピッチと同じ間隔として、支持部材43を形成しない構造(ノ−マルピッチ構造)でも良い。また、液室基板10の材料はSi、Ni、42アロイ、SUS304や別のSUS材であっても良い。液室基板10の液体に接する面には、窒化チタン膜あるいはポリイミドなどの有機樹脂膜からなる耐液性薄膜を成膜しても良い。このような耐液性薄膜を形成することで、液室基板10の材料が液体に対して溶出しにくく、また濡れ性も向上するため気泡の滞留が生じにくくなり、安定した滴吐出が可能になる。なお、ここでは「層」や「膜」は、実質的な平らな全ての構造物を含む意味に用いる。   As can be seen from FIG. 4 showing another embodiment of the present invention showing a structure in which the liquid chambers 11 are densified, the driving portion 42 of the laminated piezoelectric element 40 is supported at the same interval as the nozzle pitch. A structure in which the member 43 is not formed (normal pitch structure) may be used. The material of the liquid chamber substrate 10 may be Si, Ni, 42 alloy, SUS304, or another SUS material. A liquid-resistant thin film made of an organic resin film such as a titanium nitride film or polyimide may be formed on the surface of the liquid chamber substrate 10 in contact with the liquid. By forming such a liquid-resistant thin film, the material of the liquid chamber substrate 10 is less likely to elute from the liquid, and the wettability is improved, so that bubbles are less likely to stay and stable droplet ejection is possible. Become. Here, “layer” and “film” are used to mean all substantially flat structures.

また、図1、図2に示す液体吐出ヘッドでは、液室基板10の厚さが40μm〜600μm(液室基板10を積層することにより液室を形成することも考えられる)、液室11の長手方向の長さは400μm〜1600μm、液室11の幅は120〜139μmとした。流路隔壁の幅は振動板30との接合面で約15〜50μm(液室ピッチが150dpiのため)である。   1 and 2, the liquid chamber substrate 10 has a thickness of 40 μm to 600 μm (a liquid chamber may be formed by stacking the liquid chamber substrates 10). The length in the longitudinal direction was 400 μm to 1600 μm, and the width of the liquid chamber 11 was 120 to 139 μm. The width of the flow path partition is about 15 to 50 μm (because the liquid chamber pitch is 150 dpi) at the joint surface with the diaphragm 30.

更に、図4に示す液体吐出ヘッドの液室基板10の厚さが100μm〜600μm(液室基板10を積層することにより液室を形成することも考えられる)、液室11の長手方向の長さは400μm〜1600μm、液室11の幅は50〜70μmとした構造であっても良い(液室ピッチが300dpiのため)。また、ノズル板20は金属材料、例えば電鋳工法によるNiメッキ膜等で形成したもので、液滴を飛翔させるための微細な吐出口であるノズル21を多数形成している。このノズル21の内部形状(内側形状)は、ホーン形状(略円柱形状又は略円錘台形状でも良い)に形成している。更に、このノズル21の径は液滴出口側の直径で約15〜35μmである。ここでのノズル21の直径は18〜26μmとした。また、各列のノズルピッチは、150dpi/300dpiである。ノズル板20の材料として樹脂材を用いることもある。   Further, the liquid chamber substrate 10 of the liquid discharge head shown in FIG. 4 has a thickness of 100 μm to 600 μm (a liquid chamber may be formed by stacking the liquid chamber substrates 10), and the length of the liquid chamber 11 in the longitudinal direction. The thickness may be 400 μm to 1600 μm, and the width of the liquid chamber 11 may be 50 to 70 μm (because the liquid chamber pitch is 300 dpi). The nozzle plate 20 is formed of a metal material, for example, an Ni plating film formed by an electroforming method, and has a number of nozzles 21 that are fine discharge ports for causing droplets to fly. The internal shape (inner shape) of the nozzle 21 is formed in a horn shape (may be a substantially cylindrical shape or a substantially frustum shape). Further, the diameter of the nozzle 21 is about 15 to 35 μm on the droplet outlet side. The diameter of the nozzle 21 here was 18 to 26 μm. Further, the nozzle pitch of each row is 150 dpi / 300 dpi. A resin material may be used as the material of the nozzle plate 20.

また、ノズル板20の液体吐出面(ノズル表面側)には、図示しない撥水性の表面処理を施した撥水処理層が設けられている。PTFE−Ni共析メッキやフッ素樹脂の電着塗装、蒸発性のあるフッ素樹脂(例えばフッ化ピッチなど)を蒸着コートしたもの、シリコン系樹脂・フッ素系樹脂の溶剤塗布後の焼き付け等、液体物性に応じて選定した撥水処理膜を設けて、液体の滴形状、飛翔特性を安定化し、高品位の画像品質を得られるようにしている。   Further, a water repellent treatment layer (not shown) subjected to a water repellent surface treatment is provided on the liquid ejection surface (nozzle surface side) of the nozzle plate 20. Liquid physical properties such as PTFE-Ni eutectoid plating, electrodeposition coating of fluororesin, vapor-deposited fluororesin (for example, fluoride pitch), baking after solvent coating of silicon resin / fluorine resin, etc. A water repellent treatment film selected according to the above is provided to stabilize the liquid droplet shape and flight characteristics so that high-quality image quality can be obtained.

図1に示すように、外部から液体を供給するための液体供給口34と、共通液室13となる彫り込みが形成するフレーム60は2種以上の熱伝導率が違う部材から形成され、また液体の粘度を制御するためにヒータ80を設け、更には共通液室13の溜まっている液体を加熱保温するために共通液室を形成している部材が熱伝導性の高い高熱伝導率部材81を使用している。また、駆動手段に近い側のフレーム60は低熱伝導率部材82で形成されている。   As shown in FIG. 1, the liquid supply port 34 for supplying liquid from the outside and the frame 60 formed by the engraving that becomes the common liquid chamber 13 are formed of two or more kinds of members having different thermal conductivities. The heater 80 is provided to control the viscosity of the liquid, and the member forming the common liquid chamber in order to heat and keep the liquid stored in the common liquid chamber 13 is replaced with the high thermal conductivity member 81 having high thermal conductivity. I use it. The frame 60 on the side close to the driving means is formed of a low thermal conductivity member 82.

このような構成を有する液体吐出ヘッドにおいては、記録信号に応じて積層圧電素子40に駆動波形(10〜50Vのパルス電圧)を印加することによって、積層圧電素子40に積層方向の変位が生起し、振動板30を介して液室11が加圧されて圧力が上昇し、ノズル21から液滴が吐出される。その後、液滴吐出の終了に伴い、液室11内の液体圧力が低減し、液体の流れの慣性と駆動パルスの放電過程によって液室11内に負圧が発生して液体充填行程へ移行する。このとき、液体タンクから供給された液体は共通液室13に流入し、共通液室13から液体流入口34を経て流体抵抗部12を通り、液室11内に充填される。流体抵抗部12は、吐出後の残留圧力振動の減衰に効果が有る反面、表面張力による再充填(リフィル)に対して抵抗になる。流体抵抗部を適宜に選択することで、残留圧力の減衰とリフィル時間のバランスが取れ、次の液滴吐出動作に移行するまでの時間(駆動周期)を短くできる。   In the liquid ejection head having such a configuration, a displacement in the stacking direction occurs in the multilayer piezoelectric element 40 by applying a driving waveform (pulse voltage of 10 to 50 V) to the multilayer piezoelectric element 40 according to the recording signal. The liquid chamber 11 is pressurized through the vibration plate 30 to increase the pressure, and droplets are ejected from the nozzle 21. Thereafter, the liquid pressure in the liquid chamber 11 is reduced with the end of droplet discharge, and a negative pressure is generated in the liquid chamber 11 due to the inertia of the liquid flow and the discharge process of the driving pulse, and the liquid filling process is started. . At this time, the liquid supplied from the liquid tank flows into the common liquid chamber 13, passes from the common liquid chamber 13 through the liquid inflow port 34, passes through the fluid resistance portion 12, and is filled into the liquid chamber 11. The fluid resistance portion 12 is effective in damping the residual pressure vibration after ejection, but becomes resistant to refilling (refill) due to surface tension. By appropriately selecting the fluid resistance portion, it is possible to balance the attenuation of the residual pressure and the refill time, and to shorten the time (drive period) until shifting to the next droplet discharge operation.

ここで、図3の構成における凸部32と厚肉部分33の形状として、凸部32の周りは薄肉部31で囲まれ、その周りを厚肉部分33で囲んでいる構成がある。形成方法として、電鋳工法によるNiメッキ膜を2層重ねる方法がある。また、この電鋳工法によりリブ(突起物)を形成しても良い。   Here, as the shape of the convex portion 32 and the thick portion 33 in the configuration of FIG. 3, there is a configuration in which the periphery of the convex portion 32 is surrounded by the thin portion 31 and the periphery is surrounded by the thick portion 33. As a forming method, there is a method of stacking two Ni plating films by an electroforming method. Moreover, you may form a rib (projection) by this electroforming method.

次に、Ni電鋳の2層振動板の電鋳工程について図5を参照して説明する。同図の(a)に示すように電鋳支持基板71に薄肉部を形成する第一層72を形成し、同図の(b)に示すように厚肉部間に相当する部分が窓となるレジストパターン73を形成して例えばニッケル電鋳を行うことで、同図の(c)に示すように、第一層72上にニッケルが析出され堆積してニッケル層74が形成され、更に電鋳を継続することで、同図の(d)に示すように、窓から突出するまでニッケル層74が成長すると、エッジ効果によりレジストパターン73の表面方向にも肥大してオーバハング部74aが生じる。このプロセスを継続していくと、同図の(e)に示すようにニッケル層74は厚み方向と平面方向にさらに伸長し、所定の成長の段階で電鋳を終了した後、レジストパターン73を除去することで、同図の(f)に示すように、凹部75により囲まれた断面鋲型のアイランド状の厚肉部を備えた振動板が得られる。   Next, the electroforming process of the Ni electroformed two-layer diaphragm will be described with reference to FIG. A first layer 72 for forming a thin portion is formed on the electroformed support substrate 71 as shown in (a) of the figure, and a portion corresponding to the gap between the thick portions as shown in (b) of FIG. By forming a resist pattern 73 and performing nickel electroforming, for example, nickel is deposited and deposited on the first layer 72 to form a nickel layer 74 as shown in FIG. By continuing the casting, as shown in (d) of the figure, when the nickel layer 74 grows until it protrudes from the window, the edge effect enlarges also in the surface direction of the resist pattern 73 and an overhang portion 74a is generated. If this process is continued, the nickel layer 74 further extends in the thickness direction and the planar direction as shown in FIG. 5E, and after the electroforming is completed at a predetermined growth stage, the resist pattern 73 is formed. By removing the diaphragm, as shown in (f) of the figure, a diaphragm having an island-shaped thick portion with a bowl-shaped cross section surrounded by the recess 75 is obtained.

また、図1で示された、薄肉部31の部材が樹脂層で、凸部32と厚肉部分33の部材を金属層とした構成も考えられる。これにより、薄肉部31の剛性が、Niで形成した振動板と比べて低くなることで圧電素子の変位効率を阻害することもなくなる。金属部材として、本実施の形態では、Ni、42アロイ、ステンレスが考えられる。また、SiOやTi等の金属膜を表面に形成することにより液体の透湿を懸念することがなくなる。また、液室基板10が金属である場合、樹脂層と金属との接合は金属同士より接合強度が増す。 Further, a configuration in which the member of the thin portion 31 shown in FIG. 1 is a resin layer and the members of the convex portion 32 and the thick portion 33 are metal layers is also conceivable. As a result, the rigidity of the thin-walled portion 31 is lower than that of the diaphragm formed of Ni, so that the displacement efficiency of the piezoelectric element is not hindered. As the metal member, Ni, 42 alloy, and stainless steel are conceivable in the present embodiment. Further, by forming a metal film such as SiO 2 or Ti on the surface, there is no concern about moisture permeation of the liquid. When the liquid chamber substrate 10 is a metal, the bonding strength between the resin layer and the metal is higher than that between the metals.

更に、樹脂層が、圧延フィルムであっても良い。これにより厚みが薄くなってもピンホールなどの欠陥がほとんど皆無で、信頼性が高い製品を提供することができる。   Furthermore, the resin layer may be a rolled film. As a result, even if the thickness is reduced, it is possible to provide a highly reliable product with almost no defects such as pinholes.

なお、振動板30と駆動部42の接合領域に接着剤に対して親和性を示す処理を行うことも考えられる。また、親和性を示す処理として水酸基やSiO薄膜層を形成することが考えられる。SiO薄膜層の形成には、比較的熱のかからない、すなわち振動板30の部材に熱的影響の発生しない範囲の温度で成膜可能な方法で形成する。具体的には、スパッタリング、イオンビーム蒸着、イオンプレーティング、CVD(化学蒸着法)、P−CVD(プラズマ蒸着法)などが適しているといえる。Siのスパッタリング後スパッタ膜にO処理をしてSiO膜を生成している。SiO薄膜層の膜厚は密着力が確保できる範囲で必要最小限の厚さとするのが工程時間、材料費から見て有利である。SiO膜の厚さを10〜2000Åの範囲で使用している。また、撥水処理に関して、メッキ被膜、あるいは撥水剤コーティングなどの周知の方法で撥水膜を形成している。撥水処理方法としてスピンコータ、ロールコータ、スクリーン印刷、スプレーコータなどの方法が使用可能であり、それ以外にも真空蒸着で成膜する方法も使用されている。この方法を使用すると撥水膜の密着性が向上する。薄肉部の厚さは、2〜10μmである。また、液室短手方向の薄肉部領域の長さを10〜70μmとしている。 In addition, it is also conceivable to perform a process that shows affinity for the adhesive in the bonding region between the diaphragm 30 and the drive unit 42. Further, it is conceivable to form a hydroxyl group or a SiO 2 thin film layer as a treatment showing affinity. The SiO 2 thin film layer is formed by a method that can be formed at a temperature that is relatively not heated, that is, a temperature that does not cause thermal influence on the members of the diaphragm 30. Specifically, it can be said that sputtering, ion beam vapor deposition, ion plating, CVD (chemical vapor deposition), P-CVD (plasma vapor deposition) and the like are suitable. After sputtering of Si, the sputtered film is subjected to O 2 treatment to generate a SiO 2 film. From the viewpoint of process time and material cost, it is advantageous to set the thickness of the SiO 2 thin film layer to the minimum necessary thickness within a range in which adhesion can be secured. The thickness of the SiO 2 film is used in the range of 10 to 2000 mm. As for the water repellent treatment, a water repellent film is formed by a known method such as plating film or water repellent coating. As a water repellent treatment method, a spin coater, a roll coater, a screen printing, a spray coater, or the like can be used. In addition, a method of forming a film by vacuum deposition is also used. When this method is used, the adhesion of the water-repellent film is improved. The thickness of the thin portion is 2 to 10 μm. Moreover, the length of the thin part area | region of a liquid chamber short side direction is 10-70 micrometers.

また、樹脂層としてポリフェニレンサルフアイド(PPS)樹脂を用いているが、延伸可能な他の高分子材料、例えば、ポリイミド(PI)樹脂、ポリエーテルイミド(PEI)樹脂、ボリアミドイミド(PAI)樹脂、ポリバラバン酸(PPA)樹脂、ボリサルホン(PSF)樹脂、ポリエーテルサルホン(PES)樹脂、ポリエーテルケトン(PEK)樹脂、ポリエーテルエーテルケトン(PEEK)樹脂、ポリオレフィン(APO)樹脂、ポリエチレンナフタレート(PEN)樹脂、アラミド樹脂、ポリプロピレン樹脂、塩化ビニリデン樹脂、ポリカーネート樹脂等を用いることもできる。   In addition, polyphenylene sulfide (PPS) resin is used as the resin layer, but other stretchable polymer materials such as polyimide (PI) resin, polyetherimide (PEI) resin, polyamidoimide (PAI) resin, polybaraban Acid (PPA) resin, Borisulphone (PSF) resin, Polyethersulfone (PES) resin, Polyetherketone (PEK) resin, Polyetheretherketone (PEEK) resin, Polyolefin (APO) resin, Polyethylene naphthalate (PEN) Resins, aramid resins, polypropylene resins, vinylidene chloride resins, polycarbonate resins and the like can also be used.

図6は本発明の別の一実施の形態に係る液体吐出ヘッドの別の構成を示す断面図である。本実施の形態の液体吐出ヘッドによれば、フレーム60の部材が2種以上の熱伝導率が違う部材から形成され、また液体の粘度を制御するためにヒータ80を設け、更には共通液室13の溜まっている液体を加熱保温するために共通液室を形成している部材が熱伝導性の高い高熱伝導率部材81を使用している。また、駆動手段に近いフレーム60の外周部は低熱伝導率部材82で形成されている。また、図7に示すように、ヒータ80と低熱伝導部材82が接していても良い。更に、図8に示すように、フレーム60の外周部が全て低熱伝導部材82で覆われていることで電気制御部83を接合してヘッドの高密度化を可能とすることもできる。また、図9に示すように、共通液室13から液体供給口34までの流路部分が流体抵抗部84の役割を果たしていても良い。更に、共通液室前に流体抵抗があると個別液室側で生じた圧力波が共通液室に伝播することがなく、共通液室内の液体の不規則な残留圧力波による画像乱れを防止することができる。また、図10に示すように、共通液室13から液体供給口34までの流路部分にフィルタ85を設置しても良い。このフィルタ85により流路内には異物が入らず、ノズル詰まりになることを防ぐことができる。また、フィルタ85の素材として、ステンレスやNiの金属材や樹脂材が使用されている。更に、図11に示すようにフレーム60の部材の中に圧力を緩和させるダンパ86を形成し、このダンパ86により共通液室内で生じる圧力波や液体供給による液体の慣性を吸収することが可能となる。ダンパの素材として、ステンレスやNiの金属材や樹脂材の薄膜が使用される。樹脂部材に金属膜を形成していても良い。また、フレーム60の部材が流路ユニットよりも高剛性部材であれば流路ユニットの反りや変形を矯正することが可能となる。この構成により信頼性が高く、小型の液体吐出ヘッドを提供できる。図6〜図11においても、図示していないが接着剤によって各部材間は接合されている。   FIG. 6 is a cross-sectional view showing another configuration of a liquid discharge head according to another embodiment of the present invention. According to the liquid discharge head of the present embodiment, the members of the frame 60 are formed of two or more members having different thermal conductivities, the heater 80 is provided to control the viscosity of the liquid, and the common liquid chamber The member forming the common liquid chamber uses the high thermal conductivity member 81 having high thermal conductivity in order to heat and retain the liquid in which 13 is accumulated. Further, the outer peripheral portion of the frame 60 close to the driving means is formed by a low thermal conductivity member 82. Moreover, as shown in FIG. 7, the heater 80 and the low heat conductive member 82 may contact | connect. Further, as shown in FIG. 8, the entire outer peripheral portion of the frame 60 is covered with the low thermal conductive member 82, so that the electric control portion 83 can be joined to increase the density of the head. Further, as shown in FIG. 9, a flow path portion from the common liquid chamber 13 to the liquid supply port 34 may serve as a fluid resistance portion 84. Furthermore, if there is a fluid resistance in front of the common liquid chamber, the pressure wave generated on the individual liquid chamber side will not propagate to the common liquid chamber, and image disturbance due to irregular residual pressure waves of the liquid in the common liquid chamber will be prevented. be able to. Further, as shown in FIG. 10, a filter 85 may be installed in a flow path portion from the common liquid chamber 13 to the liquid supply port 34. This filter 85 prevents foreign matter from entering the flow path and prevents nozzle clogging. Further, as the material for the filter 85, a metal material or resin material such as stainless steel or Ni is used. Furthermore, as shown in FIG. 11, a damper 86 for reducing pressure is formed in the member of the frame 60, and the damper 86 can absorb pressure waves generated in the common liquid chamber and liquid inertia due to liquid supply. Become. As the material of the damper, a metal material of stainless steel or Ni or a thin film of resin material is used. A metal film may be formed on the resin member. Further, if the member of the frame 60 is a member having higher rigidity than the flow path unit, it is possible to correct the warpage and deformation of the flow path unit. With this configuration, a highly reliable and small liquid discharge head can be provided. 6 to 11, the members are joined to each other by an adhesive although not shown.

本実施の形態のフレーム60の部材は、高伝熱性部材81を例えばステンレス、Ni、42アロイ、Siなどの金属部材、低伝熱部材82を例えばエポキシ樹脂、PPS、PES、LCPなど樹脂部材を用いることが考えられる。また、樹脂部材に添加剤を使用した部材も考えられる。   As for the members of the frame 60 of the present embodiment, the high heat transfer member 81 is a metal member such as stainless steel, Ni, 42 alloy and Si, and the low heat transfer member 82 is a resin member such as epoxy resin, PPS, PES and LCP. It is possible to use it. Moreover, the member which uses the additive for the resin member is also considered.

また、本実施の形態で示されている駆動手段としての積層圧電素子40の圧電方向がd33方向だけでなく、図12及び図13で示すように、積層圧電素子40の圧電方向がd31方向でも本発明の効果に悪影響を及ぼすことがない。d31方向の駆動手段としての積層圧電素子40とフレーム60の接合に関して、熱伝達が生じないように低熱伝導性接着剤87を使用して接合することや低熱伝導部材82をベースの部材として使用することが考えられる。   Further, not only the piezoelectric direction of the laminated piezoelectric element 40 as the driving means shown in the present embodiment is the d33 direction, but also the piezoelectric direction of the laminated piezoelectric element 40 is the d31 direction as shown in FIGS. The effect of the present invention is not adversely affected. Regarding the joining of the laminated piezoelectric element 40 as the driving means in the d31 direction and the frame 60, the joining is performed by using the low thermal conductive adhesive 87 so that heat transfer does not occur, or the low thermal conductive member 82 is used as a base member. It is possible.

本発明で用いることができるインクジェットヘッドは、インク流路から吐出口にかけての形状が直線的であるエッジシュータ方式であっても良いし、インク流路の向きと吐出口の向きが異なるサイドシュータ方式であっても良い。   The ink jet head that can be used in the present invention may be an edge shooter type in which the shape from the ink flow path to the discharge port is linear, or a side shooter type in which the direction of the ink flow path and the direction of the discharge port are different. It may be.

次に、本発明に係る液体吐出ヘッド或いは液滴吐出装置を備えた本発明に係る画像形成装置の一例について図14及び図15を参照して説明する。なお、図14は本発明に係る画像形成装置の全体構成を示す側面図であり、図15は本発明に係る画像形成装置の要部構成を示す平面図である。   Next, an example of the image forming apparatus according to the present invention provided with the liquid ejection head or the droplet ejection apparatus according to the present invention will be described with reference to FIGS. FIG. 14 is a side view showing the overall configuration of the image forming apparatus according to the present invention, and FIG. 15 is a plan view showing the main configuration of the image forming apparatus according to the present invention.

本発明の画像形成装置100は、図示しない左右の側板に横架したガイド部材であるガイドロッド101とガイドレール102とでキャリッジ103を主走査方向に摺動自在に保持し、主走査モータ104でタイミングベルト105を介して図15で矢示方向(主走査方向)に移動走査する。このキャリッジ103には、例えばイエロー(Y)、シアン(C)、マゼンタ(M)、ブラック(Bk)の各色の液滴を吐出する4個の液体吐出ヘッドからなる記録ヘッド106を複数の液体吐出口を主走査方向と交叉する方向に配列し、液滴吐出方向を下方に向けて装着している。なお、記録ヘッド106を構成する液体吐出ヘッドとしては、圧電素子などの圧電アクチュエータを用いたものを使用している。   An image forming apparatus 100 according to the present invention holds a carriage 103 slidably in a main scanning direction by a guide rod 101 and a guide rail 102 that are horizontally mounted on left and right side plates (not shown). It moves and scans in the direction indicated by the arrow (main scanning direction) in FIG. For example, a recording head 106 including four liquid discharge heads for discharging liquid droplets of each color of yellow (Y), cyan (C), magenta (M), and black (Bk) is disposed on the carriage 103. The outlets are arranged in a direction crossing the main scanning direction, and are mounted with the droplet discharge direction facing downward. As the liquid discharge head constituting the recording head 106, a liquid ejection head using a piezoelectric actuator such as a piezoelectric element is used.

また、キャリッジ103には、記録ヘッド106に各色の液体を供給するための各色のサブタンク107を搭載している。このサブタンク107には図示しない液体供給チューブを介してメインタンクである本発明のインクカートリッジから液体が補充供給される。この実施の形態では、サブタンク107と記録ヘッド106で液滴吐出装置を構成しているが、記録ヘッド106を本発明に係る液体吐出ヘッドで構成し、別途にサブタンク107を設ける構成とすることもできるし、あるいはサブタンクを用いないで本発明のインクカートリッジを搭載する構成とすることもできる。   Also, the carriage 103 is equipped with a sub-tank 107 for each color for supplying each color liquid to the recording head 106. The sub tank 107 is replenished with liquid from the ink cartridge of the present invention, which is the main tank, via a liquid supply tube (not shown). In this embodiment, the sub-tank 107 and the recording head 106 constitute a liquid droplet ejection device. However, the recording head 106 may be composed of the liquid ejection head according to the present invention, and the sub-tank 107 may be provided separately. Alternatively, the ink cartridge of the present invention can be mounted without using a sub tank.

一方、給紙カセット108などの用紙積載部(圧板)109上に積載した用紙110を給紙するための給紙部として、用紙積載部109から用紙110を1枚ずつ分離給送する半月コロである給紙ローラ111及び当該給紙ローラ111に対向し、摩擦係数の大きな材質からなる分離パッド112を備え、この分離パッド112は給紙ローラ111側に付勢されている。   On the other hand, as a paper feeding unit for feeding the paper 110 stacked on the paper stacking unit (pressure plate) 109 such as the paper feeding cassette 108, a half-moon roller that separates and feeds the paper 110 one by one from the paper stacking unit 109. A sheet feeding roller 111 and a separation pad 112 made of a material having a large friction coefficient are provided opposite to the sheet feeding roller 111, and the separation pad 112 is urged toward the sheet feeding roller 111 side.

そして、このような給紙部から給紙された用紙110を記録ヘッド106の下方側で搬送するための搬送部として、用紙110を静電吸着して搬送するための搬送ベルト113と、給紙部からガイド114を介して送られる用紙110を搬送ベルト113との間で挟んで搬送するためのカウンタローラ115と、略鉛直上方に送られる用紙110を略90°方向転換させて搬送ベルト113上に倣わせるための搬送ガイド116と、押さえ部材117で搬送ベルト113側に付勢された先端加圧コロ118とを備えている。また、搬送ベルト113の表面を帯電させるための帯電手段である帯電ローラ119を備えている。   Then, as a transport unit for transporting the paper 110 fed from such a paper feed unit below the recording head 106, a transport belt 113 for transporting the paper 110 by electrostatic adsorption, and a paper feed The counter roller 115 for transporting the paper 110 sent from the section via the guide 114 between the transport belt 113 and the paper 110 sent substantially vertically upward is changed by about 90 ° to be on the transport belt 113. A conveyance guide 116 for following the above and a tip pressure roller 118 urged toward the conveyance belt 113 by a pressing member 117. In addition, a charging roller 119 that is a charging unit for charging the surface of the conveyance belt 113 is provided.

ここで、搬送ベルト113は、無端状ベルトであり、搬送ローラ120とテンションローラ121との間に掛け渡されて、副走査モ−タ122からタイミングベルト123及びタイミングローラ124を介して搬送ローラ120が回転されることで、図14のベルト搬送方向(副走査方向)に周回するように構成している。なお、搬送ベルト113の裏面側には記録ヘッド106による画像形成領域に対応してガイド部材125を配置している。   Here, the conveyance belt 113 is an endless belt, is stretched between the conveyance roller 120 and the tension roller 121, and is conveyed from the sub-scanning motor 122 via the timing belt 123 and the timing roller 124. Is rotated to rotate in the belt conveyance direction (sub-scanning direction) in FIG. A guide member 125 is disposed on the back side of the conveyor belt 113 in correspondence with the image forming area formed by the recording head 106.

また、図14に示すように、搬送ローラ120の軸には、スリット円板125を取り付け、このスリット円板125のスリットを検知するための図20のセンサ126を設けて、これらのスリット円板125及びセンサ126によってエンコーダ127を構成している。更に、帯電ローラ119は、搬送ベルト113の表層に接触し、搬送ベルト113の回動に従動して回転するように配置され、加圧力として軸の両端に各2.5Nをかけている。また、キャリッジ103の前方側には、図15に示すように、スリットを形成したエンコーダスケール128を設け、キャリッジ103の前面側にはエンコーダスケール128のスリットを検出する透過型フォトセンサからなるエンコーダセンサ129を設け、これらによって、キャリッジ103の主走査方向位置(ホーム位置に対する位置)を検知するためのエンコーダ130を構成している。   Further, as shown in FIG. 14, a slit disk 125 is attached to the shaft of the conveying roller 120, and the sensor 126 of FIG. 20 for detecting the slit of the slit disk 125 is provided. The encoder 127 is constituted by the sensor 125 and the sensor 126. Further, the charging roller 119 is arranged so as to come into contact with the surface layer of the conveyor belt 113 and rotate following the rotation of the conveyor belt 113, and 2.5N is applied to both ends of the shaft as a pressing force. Further, as shown in FIG. 15, an encoder scale 128 having slits is provided on the front side of the carriage 103, and an encoder sensor comprising a transmissive photosensor that detects the slits of the encoder scale 128 on the front side of the carriage 103. The encoder 130 for detecting the position of the carriage 103 in the main scanning direction (position with respect to the home position) is configured.

更に、記録ヘッド106で記録された用紙110を排紙するための排紙部として、搬送ベルト113から用紙110を分離するための分離部と、排紙ローラ131及び排紙コロ132と、排紙される用紙110をストックする排紙トレイ133とを備えている。   Further, as a paper discharge unit for discharging the paper 110 recorded by the recording head 106, a separation unit for separating the paper 110 from the conveying belt 113, a paper discharge roller 131 and a paper discharge roller 132, and paper discharge A paper discharge tray 133 for stocking the paper 110 to be stored.

また、背部には両面給紙ユニット134が着脱自在に装着されている。この両面給紙ユニット134は搬送ベルト113の逆方向回転で戻される用紙110を取り込んで反転させて再度カウンタローラ115と搬送ベルト113との間に給紙する。   A double-sided paper feeding unit 134 is detachably attached to the back. The double-sided paper feeding unit 134 takes in the paper 110 returned by the reverse rotation of the transport belt 113, reverses it, and feeds it again between the counter roller 115 and the transport belt 113.

このような構成を有する本発明の画像形成装置100においては、給紙部から用紙110が1枚ずつ分離給紙され、略鉛直上方に給紙された用紙110はガイド114で案内され、搬送ベルト113とカウンタローラ115との間に挟まれて搬送され、更に先端を搬送ガイド116で案内されて先端加圧コロ118で搬送ベルト113に押し付けられ、略90°搬送方向を転換される。このとき、図示しない制御回路によって高圧電源から帯電ローラ119に対してプラス出力とマイナス出力とが交互に繰り返すように、つまり交番する電圧が印加され、搬送ベルト113が交番する帯電電圧パターン、すなわち周回方向である副走査方向に、プラスとマイナスが所定の幅で帯状に交互に帯電されたものとなる。このプラス、マイナス交互に帯電した搬送ベルト113上に用紙110が給送されると、用紙110が搬送ベルト113に静電力で吸着され、搬送ベルト113の周回移動によって用紙110が副走査方向に搬送される。   In the image forming apparatus 100 of the present invention having such a configuration, the sheets 110 are separated and fed one by one from the sheet feeding unit, and the sheet 110 fed substantially vertically upward is guided by the guide 114 and is conveyed by the conveyance belt. 113 and the counter roller 115 are sandwiched and conveyed. Further, the leading end is guided by the conveying guide 116 and pressed against the conveying belt 113 by the leading end pressure roller 118, and the conveying direction is changed by approximately 90 °. At this time, a positive output and a negative output are alternately repeated from the high voltage power source to the charging roller 119 by a control circuit (not shown), that is, an alternating voltage is applied, and a charging voltage pattern in which the conveying belt 113 alternates, that is, a loop In the sub-scanning direction, which is the direction, plus and minus are alternately charged in a band shape with a predetermined width. When the sheet 110 is fed onto the conveyance belt 113 charged with this plus and minus alternately, the sheet 110 is attracted to the conveyance belt 113 by electrostatic force, and the sheet 110 is conveyed in the sub-scanning direction by the circular movement of the conveyance belt 113. Is done.

そこで、キャリッジ103を移動させながら画像信号に応じて記録ヘッド106を駆動することにより、停止している用紙110に液滴を吐出して1行分を記録し、用紙110を所定量搬送後、次の行の記録を行う。記録終了信号又は用紙110の後端が記録領域に到達した信号を受けることにより、記録動作を終了して、用紙110を排紙トレイ133に排紙する。   Therefore, by driving the recording head 106 according to the image signal while moving the carriage 103, droplets are ejected onto the stopped sheet 110 to record one line, and after the sheet 110 is conveyed by a predetermined amount, Record the next line. Upon receiving a recording end signal or a signal that the trailing edge of the paper 110 reaches the recording area, the recording operation is finished, and the paper 110 is discharged onto the paper discharge tray 133.

また、両面印刷の場合には、表面(最初に印刷する面)の記録が終了したときに、搬送ベルト113を逆回転させることで、記録済みの用紙110を両面給紙ユニット134内に送り込み、用紙110を反転させて(裏面が印刷面となる状態にして)再度カウンタローラ115と搬送ベルト113との間に給紙し、タイミング制御を行って、前述したと同様に搬送ベル113上に搬送して裏面に記録を行った後、排紙トレイ133に排紙する。   In the case of double-sided printing, when recording on the front surface (surface to be printed first) is completed, the recording belt 110 is fed into the double-sided paper feeding unit 134 by rotating the conveyor belt 113 in the reverse direction. The paper 110 is reversed (with the back surface being the printing surface), and is fed again between the counter roller 115 and the conveyor belt 113. The timing is controlled, and the sheet 110 is conveyed onto the conveyor bell 113 as described above. Then, after recording on the back surface, the paper is discharged onto the paper discharge tray 133.

なお、本発明に係る画像形成装置は、プリンタ、ファクシミリ装置、複写装置、これらの複合機などにも適用することができる。また、インク以外の液体、例えばDNA試料やレジスト、パターン材料などを吐出する液体吐出ヘッドや液滴吐出装置、或いはこれらを備える画像形成装置にも適用することができる。   Note that the image forming apparatus according to the present invention can also be applied to a printer, a facsimile machine, a copying machine, a multi-function machine thereof, and the like. Further, the present invention can also be applied to a liquid discharge head or a droplet discharge device that discharges a liquid other than ink, such as a DNA sample, a resist, or a pattern material, or an image forming apparatus that includes these.

また、本発明は上記実施の形態に限定されるものではなく、特許請求の範囲内の記載であれば多種の変形や置換可能であることは言うまでもない。   Further, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications and substitutions are possible as long as the description is within the scope of the claims.

特許第2,831,778号公報Japanese Patent No. 2,831,778 特開2005−254666号公報JP 2005-254666 A

Claims (9)

液体を吐出するノズルを有したノズル基板と、流路を含む各ノズルが連通する液体を蓄える液室と、前記液室の少なくとも一部の壁面を形成する振動板とが接合された液室ユニットと、前記液室内の液体を加圧する圧力を発生させるための駆動手段と、前記液室ユニットを支持し、共通液室を有するフレーム部材と、前記フレーム部材に吐出させる液体を加熱させる加熱手段とを有する液体吐出ヘッドにおいて、
前記フレーム部材は熱伝導率が異なる複数種類の部材から形成され、
前記フレーム部材の前記加熱手段を備えた部位を高熱伝導部材で形成し、前記高熱伝導部材の前記駆動手段側に低熱伝導部材で形成された部位を設けたことを特徴とする液体吐出ヘッド。
A liquid chamber unit in which a nozzle substrate having a nozzle for discharging a liquid, a liquid chamber for storing a liquid communicating with each nozzle including a flow path, and a diaphragm forming at least a part of a wall surface of the liquid chamber are joined. Driving means for generating pressure to pressurize the liquid in the liquid chamber, a frame member that supports the liquid chamber unit and has a common liquid chamber, and heating means for heating the liquid discharged to the frame member In a liquid discharge head having
The frame member is formed from a plurality of types of members having different thermal conductivities,
A liquid ejection head, wherein a portion of the frame member provided with the heating means is formed of a high heat conductive member, and a portion formed of a low heat conductive member is provided on the driving means side of the high heat conductive member.
前記高熱伝導部材の外周部を低熱伝導部材で形成することを特徴とする請求項1記載の液体吐出ヘッド。   The liquid discharge head according to claim 1, wherein an outer peripheral portion of the high heat conductive member is formed of a low heat conductive member. 前記共通液室から前記液室ユニットの液室へ液体を供給するフレーム部材側の流路が流体抵抗部となることを特徴とする請求項1又は2に記載の液体吐出ヘッド。   3. The liquid discharge head according to claim 1, wherein a flow path on a frame member side for supplying a liquid from the common liquid chamber to the liquid chamber of the liquid chamber unit serves as a fluid resistance portion. 前記共通液室から前記液室ユニットの液室へ液体を供給するフレーム部材側の流路にフィルタを設けることを特徴とする請求項1〜3のいずれか1項に記載の液体吐出ヘッド。   The liquid discharge head according to claim 1, wherein a filter is provided in a flow path on a frame member side that supplies liquid from the common liquid chamber to the liquid chamber of the liquid chamber unit. 前記共通液室から前記液室ユニットの液室へ液体を供給する前記フレーム部材にダンパを設けることを特徴とする請求項1〜4のいずれか1項に記載の液体吐出ヘッド。   5. The liquid discharge head according to claim 1, wherein a damper is provided on the frame member that supplies liquid from the common liquid chamber to the liquid chamber of the liquid chamber unit. 前記フレーム部材が前記流路ユニットより高剛性部材で形成されていることを特徴とする請求項1〜5のいずれか1項に記載の液体吐出ヘッド。   The liquid ejection head according to claim 1, wherein the frame member is formed of a member having higher rigidity than the flow path unit. 前記液室基板を形成する機械加工がプレス加工であることを特徴とする請求項1〜6のいずれか1項に記載の液体吐出ヘッド。   The liquid discharge head according to claim 1, wherein the machining for forming the liquid chamber substrate is press working. 請求項1〜7のいずれか1項に記載の液体吐出ヘッドを搭載したことを特徴とするヘッドカートリッジ。   A head cartridge comprising the liquid discharge head according to claim 1. 請求項1〜7のいずれかに記載の液体吐出ヘッドを搭載したことを特徴とする画像形成装置。   An image forming apparatus comprising the liquid discharge head according to claim 1.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11673388B2 (en) 2020-06-29 2023-06-13 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US11865850B2 (en) 2021-03-01 2024-01-09 Seiko Epson Corporation Liquid ejecting apparatus and liquid ejecting head

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JPH05220952A (en) * 1992-02-14 1993-08-31 Seiko Epson Corp Ink jet printing head
JP2005028872A (en) * 2003-06-20 2005-02-03 Ricoh Printing Systems Ltd Ink-jet head and droplet ejection device using it
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JP2008068503A (en) * 2006-09-13 2008-03-27 Ricoh Co Ltd Liquid discharge head and image forming apparatus
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11673388B2 (en) 2020-06-29 2023-06-13 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US11865850B2 (en) 2021-03-01 2024-01-09 Seiko Epson Corporation Liquid ejecting apparatus and liquid ejecting head

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