JP2010157704A - ゲート・スタック、ゲート・スペーサ及びコンタクト・ビアを用いる垂直型金属−絶縁体−金属(mim)キャパシタ - Google Patents
ゲート・スタック、ゲート・スペーサ及びコンタクト・ビアを用いる垂直型金属−絶縁体−金属(mim)キャパシタ Download PDFInfo
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- 125000006850 spacer group Chemical group 0.000 title claims abstract description 85
- 239000003990 capacitor Substances 0.000 title abstract description 73
- 229910052751 metal Inorganic materials 0.000 title abstract description 64
- 239000002184 metal Substances 0.000 title abstract description 64
- 239000004065 semiconductor Substances 0.000 claims abstract description 146
- 238000000034 method Methods 0.000 claims abstract description 65
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- 238000002955 isolation Methods 0.000 claims abstract description 36
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- 230000015572 biosynthetic process Effects 0.000 description 6
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- 229920005591 polysilicon Polymers 0.000 description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 101150096414 MIM2 gene Proteins 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001339 C alloy Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- AXQKVSDUCKWEKE-UHFFFAOYSA-N [C].[Ge].[Si] Chemical compound [C].[Ge].[Si] AXQKVSDUCKWEKE-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229940104869 fluorosilicate Drugs 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910021483 silicon-carbon alloy Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- -1 tantalum metals Chemical class 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
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- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
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Abstract
【解決手段】 垂直型金属−絶縁体−金属キャパシタを含む半導体構造体、及び垂直型金属−絶縁体−金属キャパシタを含む半導体構造体の製造方法がそれぞれ、半導体基板の上に配置された分離領域の上に配置され形成されたダミー金属酸化物半導体電界効果トランジスタからの構造コンポーネントを用いる。ダミー金属酸化物電界効果トランジスタは、分離領域を含む半導体基板の上に配置された金属酸化物半導体電界効果トランジスタと同時に形成することができる。金属−絶縁体−金属キャパシタは、キャパシタ・プレートとしてゲートを用い、ゲート誘電体として均一な厚さのゲート・スペーサを用い、別のキャパシタ・プレートとしてコンタクト・ビアを用いる。容量の増大のために、均一な厚さのゲート・スペーサは、導体層を含むことができる。容量の増大のために、単一のコンタクト・ビアを用いる鏡像となる金属−絶縁体−金属キャパシタ構造体を用いることもできる。
【選択図】 図6
Description
12:分離領域
14:ゲート誘電体
16:ゲート
18:第1のスペーサ
18a:第1のサブ層
18b:第2のサブ層
20、20’:第2のスペーサ
22:ソース及びドレイン領域
24、24’’、24’’:ライナ層
26、26’、26’’:層間誘電体
28、28’、28’’、28’’’:コンタクト・ビア
30:マスク
A、A’、A’’:開口部
Claims (18)
- 半導体基板の上に配置された誘電体分離領域と、
前記誘電体分離領域上に配置されたゲート誘電体と、
前記ゲート誘電体上に配置されたゲートと、
前記ゲートの側壁に横方向に接近して配置された均一な厚さのスペーサと、
前記均一な厚さのスペーサの側壁と横方向に接近して配置されたコンタクト・ビアと、
を備える半導体構造体。 - 前記均一な厚さのスペーサは前記分離領域と接触する、請求項1に記載の半導体構造体。
- 前記コンタクト・ビアは前記分離領域と接触する、請求項1に記載の半導体構造体。
- 前記ゲート誘電体は前記分離領域上だけに配置され、
前記ゲートは前記ゲート誘電体上に整合された状態で配置される、
請求項1に記載の半導体構造体。 - 前記均一な厚さのスペーサは、前記ゲートの前記側壁に横方向に隣接して配置され、
前記コンタクト・ビアは、前記均一な厚さのスペーサの前記側壁に横方向に隣接して配置される、
請求項1に記載の半導体構造体。 - 前記均一な厚さのスペーサは誘電体材料からなる、請求項1に記載の半導体構造体。
- 前記均一な厚さのスペーサは、前記ゲートのより近くに配置された誘電体材料のサブ層と、前記ゲートからさらに遠くに配置された導体材料のサブ層とを含む、請求項1に記載の半導体構造体。
- 前記誘電体材料のサブ層は、2ナノメートルから50ナノメートルまでの厚さを有する、請求項7に記載の半導体構造体。
- 前記導体材料のサブ層は、5ナノメートルから100ナノメートルまでの厚さを有する、請求項7に記載の半導体構造体。
- 同じく前記コンタクト・ビアに横方向に接近して配置され、かつ、前記均一な厚さのスペーサから分離された付加的な均一な厚さのスペーサと、
前記付加的な均一な厚さのスペーサに横方向に接近して配置され、かつ、前記コンタクト・ビアから分離された付加的なゲートと、
をさらに備える、請求項1に記載の半導体構造体。 - 半導体構造体を製造する方法であって、
半導体基板の上に配置された誘電体分離領域を含む半導体構造体を準備することと、
前記分離領域上にダミー電界効果トランジスタを形成することであって、前記ダミー電界効果トランジスタは、
前記誘電体分離領域上に形成されたゲート誘電体と、
前記ゲート誘電体上に形成されたゲートと、
前記ゲートの側壁に横方向に接近して形成された均一な厚さのスペーサと、
前記均一な厚さのスペーサ上に形成されたスペーサ形状のスペーサと、
を含む、形成することと、
前記均一な厚さのスペーサからスペーサ形状のスペーサの部分を完全に除去することと、
前記均一な厚さのスペーサの露出された部分上にコンタクト・ビアを形成することと、
を含む前記方法。 - 前記ダミー電界効果トランジスタを形成することにおいて、前記均一な厚さのスペーサが前記分離領域と接触する、請求項11に記載の方法。
- 前記コンタクト・ビアを形成することにおいて、前記コンタクト・ビアが前記分離領域と接触する、請求項11に記載の方法。
- 前記ダミー電界効果トランジスタを形成することにおいて、
前記ゲート誘電体が前記分離領域上だけに配置され、
前記ゲートが前記ゲート誘電体上に整合された状態で配置される、
請求項11に記載の方法。 - 前記ダミー電界効果トランジスタを形成することにおいて、前記均一な厚さのスペーサが前記ゲートの側壁に横方向に隣接して配置され、
前記コンタクト・ビアを形成することにおいて、前記コンタクト・ビアが前記均一な厚さのスペーサの側壁に横方向に隣接して配置される、
請求項11に記載の方法。 - 前記ダミー電界効果トランジスタを形成することにおいて、前記均一な厚さのスペーサが誘電体材料からなる、請求項11に記載の方法。
- 前記ダミー電界効果トランジスタを形成することにおいて、前記均一な厚さのスペーサが、前記ゲートのより近くに形成された誘電体材料のサブ層と、前記ゲートからさらに遠くに形成された導体材料のサブ層とを含む、請求項11に記載の方法。
- 前記分離領域上に前記ダミー電界効果トランジスタを形成することは、前記分離領域上に付加的なダミー電界効果トランジスタを形成し、
前記除去することは、前記ダミー電界効果トランジスタ及び前記付加的なダミー電界効果トランジスタ内の前記均一な厚さのスペーサから前記スペーサ形状のスペーサの部分を完全に除去し、
前記コンタクト・ビアを形成することは、前記ダミー電界効果トランジスタ及び前記付加的なダミー電界効果トランジスタの各々における前記均一な厚さのスペーサの露出された部分上に前記コンタクト・ビアを形成する、
請求項11に記載の方法。
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US12/344,697 US8017997B2 (en) | 2008-12-29 | 2008-12-29 | Vertical metal-insulator-metal (MIM) capacitor using gate stack, gate spacer and contact via |
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KR (1) | KR20100080315A (ja) |
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CN105074916A (zh) * | 2013-03-05 | 2015-11-18 | 高通股份有限公司 | 具有增强电容的金属-氧化物-金属(mom)电容器 |
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US20100163949A1 (en) | 2010-07-01 |
KR20100080315A (ko) | 2010-07-08 |
US8017997B2 (en) | 2011-09-13 |
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