JP2010135722A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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Abstract
【解決手段】GaAsFET12及び、このFET12に接続される入出力整合回路14−1、14−2を有する半導体装置であって、入出力整合回路14−1、14−2にそれぞれ接続されるワイヤ接続部24、及び外部回路にそれぞれ接続される入出力用リード18−1、18−2がそれぞれ接続されるリード接続部25からなるライン16−1、16−2は、ワイヤ接続部24のライン幅が、リード接続部25のライン幅より広く形成されている。
【選択図】図1
Description
図1は、本発明の実施形態に係る半導体装置を示す上面図である。また、図2Aは、図1の破線A−A´に沿った構造断面図であり、図2Bは、図1の破線B−B´に沿った構造断面図である。ただし、図1においては、一部を省略して図示している。
図5は、図1におけるCの部分の拡大図である。本実施形態の第1の実施形態と異なる点は、第1の誘電体ブロック22−1の上に保護パターンを形成する点である。
Claims (11)
- ベース基板と、
前記ベース基板上に設けられた半導体チップと、
前記ベース基板上に設けられた誘電体基板と、
前記誘電体基板上に設けられ、前記半導体チップと導体線によって接続された回路パターンと、
前記ベース基板上に設けられた誘電体ブロックと、
前記誘電体ブロック上に設けられ、前記回路パターンと接続する接続部の幅が外部装置とリード線を介して接続する接続部の幅より広い導波路と、
を備える半導体装置。 - 前記ワイヤ接続部は、櫛形状であることを特徴とする請求項1に記載の半導体装置。
- 前記ワイヤ接続部は、テーパ構造であることを特徴とする請求項1に記載の半導体装置。
- 前記回路パターンと前記接続部とはワイヤにより接続されることを特徴とする請求項1に記載の半導体装置。
- 前記ワイヤは金により形成されることを特徴とする請求項4に記載の半導体装置。
- 前記回路パターンと前記接続部とは金属箔により接続されることを特徴とする請求項1に記載の半導体装置。
- 前記回路パターンは、整合回路であることを特徴とする請求項1に記載の半導体装置。
- 前記誘電体ブロックは、金属メッキ層の前記誘電体ブロック側面からのはみ出しを載せるための保護パターンをさらに備え、
前記保護パターンは、
導体によって形成され、前記導波路に接しないように、前記導波路に沿って、前記金属メッキ層に接続して設けられ、前記誘電体ブロックの金属メッキ層の長さ以上の長さを有し、前記金属メッキ層のはみ出し幅より広い幅を有することを特徴とする請求項1に記載の半導体装置。 - 前記保護パターンは、前記金属メッキ層のはみ出しを阻止する防護壁を備え、
前記防護壁は、
前記導波路に接しないように前記導波路に沿って設けられ、前記金属メッキ層の長さ以上の長さを有し、前記金属メッキ層のはみ出しを阻止するに十分な高さを有することを特徴とする請求項8に記載の半導体装置。 - 前記保護パターンが、金属メッキ層が設けられる面に接する辺との間に間隔をとって設けられることを特徴とする請求項8に記載の半導体装置。
- 前記保護パターンが、前記導波路と等間隔を保って設けられることを特徴とする請求項8に記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009070852A JP2010135722A (ja) | 2008-11-05 | 2009-03-23 | 半導体装置 |
EP10250242A EP2234157A3 (en) | 2009-03-23 | 2010-02-12 | Semiconductor device |
US12/710,824 US20100237486A1 (en) | 2008-11-05 | 2010-02-23 | Semiconductor device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008284354 | 2008-11-05 | ||
JP2009070852A JP2010135722A (ja) | 2008-11-05 | 2009-03-23 | 半導体装置 |
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JP2010135722A true JP2010135722A (ja) | 2010-06-17 |
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US (2) | US8102036B2 (ja) |
EP (1) | EP2184778A1 (ja) |
JP (1) | JP2010135722A (ja) |
Cited By (6)
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JP2012182306A (ja) * | 2011-03-01 | 2012-09-20 | Toshiba Corp | Mmic用パッケージ |
JP2013105977A (ja) * | 2011-11-16 | 2013-05-30 | Toshiba Corp | 高周波半導体装置 |
JP2013105978A (ja) * | 2011-11-16 | 2013-05-30 | Toshiba Corp | 高周波半導体装置 |
JP2013153097A (ja) * | 2012-01-26 | 2013-08-08 | Toshiba Corp | 広帯域増幅器 |
JP2013235913A (ja) * | 2012-05-08 | 2013-11-21 | Toshiba Corp | 高周波半導体用パッケージ |
KR20190082956A (ko) | 2016-12-29 | 2019-07-10 | 미쓰비시덴키 가부시키가이샤 | 반도체 장치 |
Families Citing this family (6)
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JP2010135722A (ja) * | 2008-11-05 | 2010-06-17 | Toshiba Corp | 半導体装置 |
EP2234157A3 (en) * | 2009-03-23 | 2011-06-22 | Kabushiki Kaisha Toshiba | Semiconductor device |
US8471382B2 (en) * | 2010-11-18 | 2013-06-25 | Kabushiki Kaisha Toshiba | Package and high frequency terminal structure for the same |
GB201105912D0 (en) * | 2011-04-07 | 2011-05-18 | Diamond Microwave Devices Ltd | Improved matching techniques for power transistors |
JP6273247B2 (ja) * | 2015-12-03 | 2018-01-31 | 株式会社東芝 | 高周波半導体増幅器 |
JP6866789B2 (ja) * | 2017-07-11 | 2021-04-28 | 富士通株式会社 | 電子デバイス、及び、電子デバイスの製造方法 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6444102A (en) * | 1987-08-11 | 1989-02-16 | Mitsubishi Electric Corp | Power distributer |
JPH0366205A (ja) * | 1989-08-04 | 1991-03-20 | Matsushita Electric Ind Co Ltd | 高周波トランジスタの整合回路 |
JPH03297201A (ja) * | 1990-04-16 | 1991-12-27 | Mitsubishi Electric Corp | 高周波半導体装置 |
JPH05136607A (ja) * | 1991-11-15 | 1993-06-01 | Toshiba Corp | 電力増幅用マイクロ波トランジスタ |
JPH10223674A (ja) * | 1997-02-12 | 1998-08-21 | Toshiba Corp | 半導体の入出力接続構造 |
JPH10242716A (ja) * | 1997-02-27 | 1998-09-11 | Kyocera Corp | 高周波用入出力端子ならびにそれを用いた高周波用半導体素子収納用パッケージ |
JP2002335136A (ja) * | 2001-05-11 | 2002-11-22 | Matsushita Electric Ind Co Ltd | 高周波半導体装置 |
JP2004200242A (ja) * | 2002-12-16 | 2004-07-15 | Kyocera Corp | 半導体素子収納用パッケージ |
JP2006203112A (ja) * | 2005-01-24 | 2006-08-03 | Tateyama Kagaku Kogyo Kk | 電子素子用基板とその製造方法 |
JP2007081125A (ja) * | 2005-09-14 | 2007-03-29 | Toshiba Corp | 高周波用パッケージ |
JP2007189062A (ja) * | 2006-01-13 | 2007-07-26 | Mitsubishi Electric Corp | Hpaパッケージ |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2538617B1 (fr) * | 1982-12-28 | 1986-02-28 | Thomson Csf | Boitier d'encapsulation pour semiconducteur de puissance, a isolement entree-sortie ameliore |
JPS6189651A (ja) | 1984-10-08 | 1986-05-07 | Fujitsu Ltd | 半導体装置 |
US5023993A (en) | 1988-09-30 | 1991-06-18 | Grumman Aerospace Corporation | Method for manufacturing a high-performance package for monolithic microwave integrated circuits |
DK174111B1 (da) | 1998-01-26 | 2002-06-24 | Giga As | Elektrisk forbindelseselement samt fremgangsmåde til fremstilling af et sådant |
US6441697B1 (en) * | 1999-01-27 | 2002-08-27 | Kyocera America, Inc. | Ultra-low-loss feedthrough for microwave circuit package |
FI106414B (fi) * | 1999-02-02 | 2001-01-31 | Nokia Networks Oy | Laajakaistainen impedanssisovitin |
JP2003115732A (ja) | 2001-10-03 | 2003-04-18 | Hitachi Ltd | 半導体装置 |
US6950565B2 (en) * | 2002-10-07 | 2005-09-27 | Agere Systems Inc | Submount for high speed electronic devices |
JP4255801B2 (ja) * | 2003-10-17 | 2009-04-15 | 三菱電機株式会社 | 電力合成形高出力fet |
JP3944193B2 (ja) * | 2004-02-09 | 2007-07-11 | 太陽誘電株式会社 | バランおよびバランスフィルタおよび無線通信機器 |
KR100885396B1 (ko) | 2007-05-21 | 2009-02-24 | 주식회사 바이오스페이스 | 생체 임피던스 측정 장치 |
DE102008043156A1 (de) * | 2008-10-24 | 2010-05-06 | Kuka Roboter Gmbh | Halterungsvorrichtung, medizinischer Roboter und Verfahren zum Einstellen des Tool Center Points eines medizinischen Roboters |
JP2010135722A (ja) * | 2008-11-05 | 2010-06-17 | Toshiba Corp | 半導体装置 |
-
2009
- 2009-03-23 JP JP2009070852A patent/JP2010135722A/ja active Pending
- 2009-07-29 US US12/511,492 patent/US8102036B2/en active Active
- 2009-07-29 EP EP09251900A patent/EP2184778A1/en not_active Withdrawn
-
2010
- 2010-02-23 US US12/710,824 patent/US20100237486A1/en not_active Abandoned
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6444102A (en) * | 1987-08-11 | 1989-02-16 | Mitsubishi Electric Corp | Power distributer |
JPH0366205A (ja) * | 1989-08-04 | 1991-03-20 | Matsushita Electric Ind Co Ltd | 高周波トランジスタの整合回路 |
JPH03297201A (ja) * | 1990-04-16 | 1991-12-27 | Mitsubishi Electric Corp | 高周波半導体装置 |
JPH05136607A (ja) * | 1991-11-15 | 1993-06-01 | Toshiba Corp | 電力増幅用マイクロ波トランジスタ |
JPH10223674A (ja) * | 1997-02-12 | 1998-08-21 | Toshiba Corp | 半導体の入出力接続構造 |
JPH10242716A (ja) * | 1997-02-27 | 1998-09-11 | Kyocera Corp | 高周波用入出力端子ならびにそれを用いた高周波用半導体素子収納用パッケージ |
JP2002335136A (ja) * | 2001-05-11 | 2002-11-22 | Matsushita Electric Ind Co Ltd | 高周波半導体装置 |
JP2004200242A (ja) * | 2002-12-16 | 2004-07-15 | Kyocera Corp | 半導体素子収納用パッケージ |
JP2006203112A (ja) * | 2005-01-24 | 2006-08-03 | Tateyama Kagaku Kogyo Kk | 電子素子用基板とその製造方法 |
JP2007081125A (ja) * | 2005-09-14 | 2007-03-29 | Toshiba Corp | 高周波用パッケージ |
JP2007189062A (ja) * | 2006-01-13 | 2007-07-26 | Mitsubishi Electric Corp | Hpaパッケージ |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012182306A (ja) * | 2011-03-01 | 2012-09-20 | Toshiba Corp | Mmic用パッケージ |
JP2013105977A (ja) * | 2011-11-16 | 2013-05-30 | Toshiba Corp | 高周波半導体装置 |
JP2013105978A (ja) * | 2011-11-16 | 2013-05-30 | Toshiba Corp | 高周波半導体装置 |
JP2013153097A (ja) * | 2012-01-26 | 2013-08-08 | Toshiba Corp | 広帯域増幅器 |
JP2013235913A (ja) * | 2012-05-08 | 2013-11-21 | Toshiba Corp | 高周波半導体用パッケージ |
KR20190082956A (ko) | 2016-12-29 | 2019-07-10 | 미쓰비시덴키 가부시키가이샤 | 반도체 장치 |
DE112016007562T5 (de) | 2016-12-29 | 2019-10-02 | Mitsubishi Electric Corporation | Halbleitervorrichtung |
KR102242617B1 (ko) | 2016-12-29 | 2021-04-20 | 미쓰비시덴키 가부시키가이샤 | 반도체 장치 |
US11121099B2 (en) | 2016-12-29 | 2021-09-14 | Mitsubishi Electric Corporation | Semiconductor device |
DE112016007562B4 (de) | 2016-12-29 | 2023-06-29 | Mitsubishi Electric Corporation | Halbleitervorrichtung |
Also Published As
Publication number | Publication date |
---|---|
EP2184778A1 (en) | 2010-05-12 |
US20100109165A1 (en) | 2010-05-06 |
US8102036B2 (en) | 2012-01-24 |
US20100237486A1 (en) | 2010-09-23 |
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