JP2010062145A - インターコネクト用バリア皮膜、関連装置及び形成方法 - Google Patents
インターコネクト用バリア皮膜、関連装置及び形成方法 Download PDFInfo
- Publication number
- JP2010062145A JP2010062145A JP2009197542A JP2009197542A JP2010062145A JP 2010062145 A JP2010062145 A JP 2010062145A JP 2009197542 A JP2009197542 A JP 2009197542A JP 2009197542 A JP2009197542 A JP 2009197542A JP 2010062145 A JP2010062145 A JP 2010062145A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- strontium
- cathode
- barrier layer
- barrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004888 barrier function Effects 0.000 title claims abstract description 87
- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000000576 coating method Methods 0.000 title claims abstract description 19
- 239000011248 coating agent Substances 0.000 title claims abstract description 17
- 239000000446 fuel Substances 0.000 claims abstract description 55
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 45
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims abstract description 43
- 239000011651 chromium Substances 0.000 claims abstract description 37
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 30
- 239000007787 solid Substances 0.000 claims abstract description 29
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 28
- NVKTUNLPFJHLCG-UHFFFAOYSA-N strontium chromate Chemical compound [Sr+2].[O-][Cr]([O-])(=O)=O NVKTUNLPFJHLCG-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000000203 mixture Substances 0.000 claims abstract description 23
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 19
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 16
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 229910052742 iron Inorganic materials 0.000 claims abstract description 9
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 6
- 239000010941 cobalt Substances 0.000 claims abstract description 6
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000007650 screen-printing Methods 0.000 claims abstract description 4
- 238000010345 tape casting Methods 0.000 claims abstract description 4
- 238000007751 thermal spraying Methods 0.000 claims abstract description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 3
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims abstract description 3
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 43
- 239000003792 electrolyte Substances 0.000 claims description 20
- 229910052596 spinel Inorganic materials 0.000 claims description 13
- 239000011029 spinel Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 229910052746 lanthanum Inorganic materials 0.000 claims description 9
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 229910000859 α-Fe Inorganic materials 0.000 claims description 8
- 229910052963 cobaltite Inorganic materials 0.000 claims description 4
- 229910002299 SrCo0.8Fe0.2O3−δ Inorganic materials 0.000 claims description 3
- 238000005328 electron beam physical vapour deposition Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- BQENXCOZCUHKRE-UHFFFAOYSA-N [La+3].[La+3].[O-][Mn]([O-])=O.[O-][Mn]([O-])=O.[O-][Mn]([O-])=O Chemical compound [La+3].[La+3].[O-][Mn]([O-])=O.[O-][Mn]([O-])=O.[O-][Mn]([O-])=O BQENXCOZCUHKRE-UHFFFAOYSA-N 0.000 claims description 2
- 229910021525 ceramic electrolyte Inorganic materials 0.000 abstract description 13
- 239000010410 layer Substances 0.000 description 220
- 239000011572 manganese Substances 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 9
- 229910000423 chromium oxide Inorganic materials 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 238000004453 electron probe microanalysis Methods 0.000 description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- UFZOPKFMKMAWLU-UHFFFAOYSA-N ethoxy(methyl)phosphinic acid Chemical compound CCOP(C)(O)=O UFZOPKFMKMAWLU-UHFFFAOYSA-N 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000005012 migration Effects 0.000 description 5
- 238000013508 migration Methods 0.000 description 5
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- 238000003490 calendering Methods 0.000 description 4
- 239000011195 cermet Substances 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- 238000000724 energy-dispersive X-ray spectrum Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910002075 lanthanum strontium manganite Inorganic materials 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 4
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 4
- 229910000416 bismuth oxide Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 150000002910 rare earth metals Chemical class 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 2
- 229910017108 Fe—Fe Inorganic materials 0.000 description 2
- 241000968352 Scandia <hydrozoan> Species 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 2
- 229940088601 alpha-terpineol Drugs 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000010406 cathode material Substances 0.000 description 2
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- HJGMWXTVGKLUAQ-UHFFFAOYSA-N oxygen(2-);scandium(3+) Chemical compound [O-2].[O-2].[O-2].[Sc+3].[Sc+3] HJGMWXTVGKLUAQ-UHFFFAOYSA-N 0.000 description 2
- 238000007750 plasma spraying Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910002514 Co–Co Inorganic materials 0.000 description 1
- 241000588731 Hafnia Species 0.000 description 1
- 229910017563 LaCrO Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- -1 SrFeCo 0.5 O x Inorganic materials 0.000 description 1
- QBYHSJRFOXINMH-UHFFFAOYSA-N [Co].[Sr].[La] Chemical compound [Co].[Sr].[La] QBYHSJRFOXINMH-UHFFFAOYSA-N 0.000 description 1
- FVROQKXVYSIMQV-UHFFFAOYSA-N [Sr+2].[La+3].[O-][Mn]([O-])=O Chemical compound [Sr+2].[La+3].[O-][Mn]([O-])=O FVROQKXVYSIMQV-UHFFFAOYSA-N 0.000 description 1
- PACGUUNWTMTWCF-UHFFFAOYSA-N [Sr].[La] Chemical compound [Sr].[La] PACGUUNWTMTWCF-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- DTDCCPMQHXRFFI-UHFFFAOYSA-N dioxido(dioxo)chromium lanthanum(3+) Chemical compound [La+3].[La+3].[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O DTDCCPMQHXRFFI-UHFFFAOYSA-N 0.000 description 1
- HBAGRTDVSXKKDO-UHFFFAOYSA-N dioxido(dioxo)manganese lanthanum(3+) Chemical compound [La+3].[La+3].[O-][Mn]([O-])(=O)=O.[O-][Mn]([O-])(=O)=O.[O-][Mn]([O-])(=O)=O HBAGRTDVSXKKDO-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000002001 electrolyte material Substances 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 238000001652 electrophoretic deposition Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010285 flame spraying Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000010416 ion conductor Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000004706 metal oxides Chemical group 0.000 description 1
- 229910002119 nickel–yttria stabilized zirconia Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052566 spinel group Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001427 strontium ion Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000010290 vacuum plasma spraying Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
- C23C24/082—Coating starting from inorganic powder by application of heat or pressure and heat without intermediate formation of a liquid in the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
- C23C18/1216—Metal oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1254—Sol or sol-gel processing
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D13/00—Electrophoretic coating characterised by the process
- C25D13/02—Electrophoretic coating characterised by the process with inorganic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0204—Non-porous and characterised by the material
- H01M8/0206—Metals or alloys
- H01M8/0208—Alloys
- H01M8/021—Alloys based on iron
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0204—Non-porous and characterised by the material
- H01M8/0223—Composites
- H01M8/0228—Composites in the form of layered or coated products
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0258—Collectors; Separators, e.g. bipolar separators; Interconnectors characterised by the configuration of channels, e.g. by the flow field of the reactant or coolant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0267—Collectors; Separators, e.g. bipolar separators; Interconnectors having heating or cooling means, e.g. heaters or coolant flow channels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0297—Arrangements for joining electrodes, reservoir layers, heat exchange units or bipolar separators to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M8/1213—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
- H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
- H01M8/2425—High-temperature cells with solid electrolytes
- H01M8/2432—Grouping of unit cells of planar configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M2008/1293—Fuel cells with solid oxide electrolytes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Composite Materials (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Fuel Cell (AREA)
- Inert Electrodes (AREA)
Abstract
【解決手段】ストロンチウム組成物を含むカソード層14を溶射、物理蒸着、化学蒸着、テープキャスチング、スクリーン印刷及びゾルゲルコーテイングから選択される堆積法によりセラミック電解質層18上に形成し、カソード層14とその上に重なるクロム含有インターコネクト構造12との間にコバルト、マンガン、鉄又はこれらの2種以上の組み合わせを含有するバリア層20を形成する工程を含む製造方法によって、バリア層がクロム酸ストロンチウムの形成を実質的に防止する固体酸化物型燃料電池。
【選択図】図1
Description
図1に示す例示の平面形燃料電池10は、インターコネクト(「インターコネクト構造」)12、1対の電極、即ちカソード層14とアノード層16、両電極間に介在するセラミック電解質18を備える。バリア層20がインターコネクト構造とカソード層との間に形成されている。図に示した構成は様々な態様で変更可能であり、例えばアノード層を電解質の上に、カソード層を電解質の下に配置できる。当業者に明らかなように、燃料電池は水平、鉛直配向或いは任意の配向で運転可能である。
カソードボンド層材料は、多数の慣用技術で燃料電池構造に組み込むことができる。材料(ペースト又はスラリー形態)をカソード層の表面に適用するか、カソード表面に対面するカソードインターコネクトの表面に適用することができる。或いはまた、カソードボンド層材料を両表面上に堆積することができる。材料は、塗布、スクリーン印刷、流し塗り、その他の技法で適用できる。場合によってはスプレイ法も用いることができ、例えば慣用のウェットスプレイ法を用いる。ある実施形態では、上述した技法のいずれか又はすべてについて、熱処理を含む後処理工程を行うことができる。当業者にとっては、部分的には、燃料電池や燃料電池スタックを作製するのに用いられる他のプロセスを参考にして、カソードボンド層材料を取り込むもっとも適切な方法が明らかである。
12 インターコネクト構造
14 カソード層
16 アノード層
18 電解質層
20 バリア皮膜
100 セル構造
102 インターコネクト
104 バリア層
110 セル構造
112 アノード層
114 電解質層
116 カソード層
120 プロセス
130 プロセス
132 アノード層
134 電解質層
136 カソード層
140 インターコネクト
Claims (11)
- a)ストロンチウム組成物を含むカソード層(14)を電解質層(18)上に形成し、
b)カソード層(14)とその上に重なるクロム含有インターコネクト構造(12)との間に、クロム酸ストロンチウムの形成を実質的に防止するバリア層(20)を形成する
工程を含む、固体酸化物型燃料電池(10)の製造方法。 - 溶射、物理蒸着、電子ビーム物理蒸着、化学蒸着、テープキャスティング、スクリーン印刷及びゾルゲルコーティングから選択される堆積法によりカソード層(14)を電解質層(18)上に形成する、請求項1記載の方法。
- カソードがストロンチウムを含有する、請求項1記載の方法。
- カソードが、ストロンチウムドープト・ランタンマンガナイト、ストロンチウムドープトPrMnO3、ストロンチウムドープト・ランタンフェライト、ストロンチウムドープト・ランタンコバルタイト、ストロンチウムドープト・ランタンコバルタイトフェライト、ストロンチウムフェライト、SrFe0.5Co0.5Ox、SrCo0.8Fe0.2O3-δ、La0.8Sr0.2Co0.8Ni0.2O3-δ、La0.7Sr0.3Fe0.8Ni0.2O3-δ及びこれらの組合せからなる群から選択される材料を含有する、請求項1記載の方法。
- バリア層(20)がコバルト、マンガン、鉄又はこれらの2以上の元素の組合せを含有する、請求項1記載の方法。
- インターコネクト構造(12)がフェライト系ステンレス鋼材料を含有する、請求項1記載の方法。
- バリア層がスピネル構造を有する材料を含有する、請求項1記載の方法。
- バリア層(20)の厚さが約2μm〜約100μmである、請求項1記載の方法。
- i)バリア層(20)をクロムを含有する材料からなるインターコネクト構造(12)上に形成し、
ii)ストロンチウムを含有するカソード層(14)を、アノード層(16)上に配置された電解質層(18)上に形成し、
iii)バリア皮膜(20)がインターコネクト構造(12)とカソード層(14)の間に位置し、かくしてバリア皮膜(20)がクロム酸ストロンチウムの形成を防止できるように、インターコネクト構造(12)をカソード層(14)に取付ける、
工程を含む、固体酸化物型燃料電池(10)の製造方法。 - ボンド層をバリア皮膜上かつバリア皮膜とカソード層との間の位置に形成する、請求項9記載の方法。
- 請求項10記載の方法で製造される固体酸化物型燃料電池。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/199,937 US8163434B2 (en) | 2008-08-28 | 2008-08-28 | Barrier coatings for interconnects; related devices, and methods of forming |
US12/199,937 | 2008-08-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010062145A true JP2010062145A (ja) | 2010-03-18 |
JP5607903B2 JP5607903B2 (ja) | 2014-10-15 |
Family
ID=41725933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009197542A Expired - Fee Related JP5607903B2 (ja) | 2008-08-28 | 2009-08-28 | インターコネクト用バリア皮膜、関連装置及び形成方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8163434B2 (ja) |
JP (1) | JP5607903B2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014021446A1 (ja) * | 2012-08-03 | 2014-02-06 | 株式会社村田製作所 | 燃料電池 |
JP2015502014A (ja) * | 2011-11-17 | 2015-01-19 | ブルーム エネルギー コーポレイション | ジルコニア系電解質に耐食性を付与する多層コーティング |
JP2016195101A (ja) * | 2015-03-31 | 2016-11-17 | 大阪瓦斯株式会社 | 燃料電池用部材およびその製造方法 |
CN107275656A (zh) * | 2017-06-08 | 2017-10-20 | 江苏科技大学 | 固体氧化物燃料电池用尖晶石/金属连接体复合材料及其制备方法 |
JP2018508955A (ja) * | 2015-02-10 | 2018-03-29 | シーリーズ インテレクチュアル プロパティ カンパニー リミティド | 低温固体酸化物燃料電池のための相互接続 |
JP2021044178A (ja) * | 2019-09-12 | 2021-03-18 | 森村Sofcテクノロジー株式会社 | 電気化学反応セルスタック |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8182965B2 (en) * | 2008-09-30 | 2012-05-22 | Battelle Memorial Institute | Optimized cell configurations for stable LSCF-based solid oxide fuel cells |
CN102234802B (zh) * | 2010-04-21 | 2012-12-05 | 中国科学院金属研究所 | 一种镁合金表面多层高耐蚀-耐磨复合防护层的制备方法 |
CN102234803B (zh) * | 2010-05-07 | 2012-10-03 | 中国科学院金属研究所 | 镁合金等离子氧化陶瓷膜表面复合涂层制备方法 |
US9843053B2 (en) * | 2010-09-09 | 2017-12-12 | Audi Ag | Fuel cell coating |
FR2964664B1 (fr) * | 2010-09-13 | 2013-09-13 | Commissariat Energie Atomique | Encre aqueuse pour la realisation d'electrodes de cellule electrochimique haute temperature |
CN102005579B (zh) * | 2010-10-14 | 2013-04-03 | 华北电力大学 | 一种制备固体氧化物燃料电池lsm阴极的方法 |
US9281527B2 (en) | 2011-06-15 | 2016-03-08 | Lg Fuel Cell Systems Inc. | Fuel cell system with interconnect |
US9525181B2 (en) | 2011-06-15 | 2016-12-20 | Lg Fuel Cell Systems Inc. | Fuel cell system with interconnect |
US9105880B2 (en) | 2011-06-15 | 2015-08-11 | Lg Fuel Cell Systems Inc. | Fuel cell system with interconnect |
US9147888B2 (en) | 2011-06-15 | 2015-09-29 | Lg Fuel Cell Systems Inc. | Fuel cell system with interconnect |
US9531013B2 (en) | 2011-06-15 | 2016-12-27 | Lg Fuel Cell Systems Inc. | Fuel cell system with interconnect |
US8974981B2 (en) * | 2011-06-15 | 2015-03-10 | Lg Fuel Cell Systems Inc. | Fuel cell system with interconnect |
KR101219757B1 (ko) * | 2011-10-17 | 2013-01-09 | 한국과학기술연구원 | 고체 산화물 연료전지의 연료극 제조방법 |
FR2993100B1 (fr) * | 2012-07-05 | 2014-07-04 | Commissariat Energie Atomique | Procede de fabrication d’elements de contact dans un dispositif electrochimique tel que sofc ou eht |
US10340543B2 (en) | 2012-08-21 | 2019-07-02 | Bloom Energy Corporation | Systems and methods for suppressing chromium poisoning in fuel cells |
US10446855B2 (en) * | 2013-03-15 | 2019-10-15 | Lg Fuel Cell Systems Inc. | Fuel cell system including multilayer interconnect |
WO2014143957A1 (en) | 2013-03-15 | 2014-09-18 | Lg Fuel Cell Systems, Inc. | Fuel cell system configured to capture chromium |
US9583771B2 (en) | 2013-05-16 | 2017-02-28 | Bloom Energy Coporation | Corrosion resistant barrier layer for a solid oxide fuel cell stack and method of making thereof |
WO2015080889A1 (en) | 2013-11-27 | 2015-06-04 | Bloom Energy Corporation | Fuel cell interconnect with reduced voltage degradation over time |
US9993874B2 (en) | 2014-02-25 | 2018-06-12 | Bloom Energy Corporation | Composition and processing of metallic interconnects for SOFC stacks |
US9923211B2 (en) | 2014-04-24 | 2018-03-20 | Bloom Energy Corporation | Fuel cell interconnect with reduced voltage degradation over time |
CN107078309A (zh) | 2014-07-21 | 2017-08-18 | Lg燃料电池系统股份有限公司 | 用于燃料电池电极的组合物 |
US10115974B2 (en) | 2015-10-28 | 2018-10-30 | Lg Fuel Cell Systems Inc. | Composition of a nickelate composite cathode for a fuel cell |
KR102371046B1 (ko) * | 2016-07-15 | 2022-03-07 | 현대자동차주식회사 | 연료전지용 엔드셀 히터 |
CN106702462A (zh) * | 2017-01-25 | 2017-05-24 | 厦门大学 | 铁酸镧纳米颗粒修饰的二氧化钛纳米管阵列的制备方法 |
US10763533B1 (en) | 2017-03-30 | 2020-09-01 | Bloom Energy Corporation | Solid oxide fuel cell interconnect having a magnesium containing corrosion barrier layer and method of making thereof |
KR102207387B1 (ko) | 2017-09-04 | 2021-01-25 | 주식회사 엘지화학 | 고체산화물 연료전지 |
KR20220034179A (ko) * | 2019-07-17 | 2022-03-17 | 할도르 토프쉐 에이/에스 | 고체 산화물 전지 스택 용도를 위한 페라이트 강 인터커넥트의 크롬 업그레이드를 위한 방법 |
US20220349082A1 (en) * | 2019-08-12 | 2022-11-03 | Hewlett-Packard Development Company, L.P. | Coated Metal Alloy Substrate and Process for Production Thereof |
CN111009675B (zh) * | 2019-12-23 | 2023-03-24 | 潮州三环(集团)股份有限公司 | 一种固体氧化物燃料电池及其制备方法 |
CN113871630A (zh) * | 2021-09-29 | 2021-12-31 | 黑龙江大学 | 一种层状结构高电催化性能铁基固体氧化物燃料电池阴极材料及其制备方法和应用 |
CN115241471A (zh) * | 2022-08-23 | 2022-10-25 | 江苏科技大学 | 一种固体氧化物燃料电池阴极材料及其制法与应用 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11501764A (ja) * | 1995-03-15 | 1999-02-09 | セラミック・フューエル・セルズ・リミテッド | 燃料電池インタコネクタデバイス |
JPH11509361A (ja) * | 1995-07-21 | 1999-08-17 | シーメンス アクチエンゲゼルシヤフト | 高温燃料電池、高温燃料電池スタック及び高温燃料電池の製造方法 |
JP2001196077A (ja) * | 2000-01-13 | 2001-07-19 | Tokyo Gas Co Ltd | 固体電解質型燃料電池のセパレータ |
JP2004186119A (ja) * | 2002-12-06 | 2004-07-02 | Mitsubishi Heavy Ind Ltd | 電極の形成方法 |
JP2007317610A (ja) * | 2006-05-29 | 2007-12-06 | Kyocera Corp | セルスタック及び燃料電池 |
JP2008077913A (ja) * | 2006-09-20 | 2008-04-03 | Sumitomo Precision Prod Co Ltd | 燃料電池用インターコネクタ及びセルスタック |
WO2009131180A1 (ja) * | 2008-04-24 | 2009-10-29 | 大阪瓦斯株式会社 | 固体酸化物形燃料電池用セル |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6054231A (en) * | 1998-07-24 | 2000-04-25 | Gas Research Institute | Solid oxide fuel cell interconnector |
US6677070B2 (en) * | 2001-04-19 | 2004-01-13 | Hewlett-Packard Development Company, L.P. | Hybrid thin film/thick film solid oxide fuel cell and method of manufacturing the same |
US7595127B2 (en) * | 2001-06-29 | 2009-09-29 | Nextech Materials, Ltd. | Nano-composite electrodes and method of making the same |
US6893762B2 (en) * | 2002-01-16 | 2005-05-17 | Alberta Research Council, Inc. | Metal-supported tubular micro-fuel cell |
US6946213B2 (en) * | 2003-04-28 | 2005-09-20 | Nextech Materials, Ltd. | Perovskite electrodes and method of making the same |
US7365007B2 (en) * | 2004-06-30 | 2008-04-29 | Intel Corporation | Interconnects with direct metalization and conductive polymer |
US8182943B2 (en) | 2005-12-19 | 2012-05-22 | Polyplus Battery Company | Composite solid electrolyte for protection of active metal anodes |
-
2008
- 2008-08-28 US US12/199,937 patent/US8163434B2/en active Active
-
2009
- 2009-08-28 JP JP2009197542A patent/JP5607903B2/ja not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11501764A (ja) * | 1995-03-15 | 1999-02-09 | セラミック・フューエル・セルズ・リミテッド | 燃料電池インタコネクタデバイス |
JPH11509361A (ja) * | 1995-07-21 | 1999-08-17 | シーメンス アクチエンゲゼルシヤフト | 高温燃料電池、高温燃料電池スタック及び高温燃料電池の製造方法 |
JP2001196077A (ja) * | 2000-01-13 | 2001-07-19 | Tokyo Gas Co Ltd | 固体電解質型燃料電池のセパレータ |
JP2004186119A (ja) * | 2002-12-06 | 2004-07-02 | Mitsubishi Heavy Ind Ltd | 電極の形成方法 |
JP2007317610A (ja) * | 2006-05-29 | 2007-12-06 | Kyocera Corp | セルスタック及び燃料電池 |
JP2008077913A (ja) * | 2006-09-20 | 2008-04-03 | Sumitomo Precision Prod Co Ltd | 燃料電池用インターコネクタ及びセルスタック |
WO2009131180A1 (ja) * | 2008-04-24 | 2009-10-29 | 大阪瓦斯株式会社 | 固体酸化物形燃料電池用セル |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015502014A (ja) * | 2011-11-17 | 2015-01-19 | ブルーム エネルギー コーポレイション | ジルコニア系電解質に耐食性を付与する多層コーティング |
US10784521B2 (en) | 2011-11-17 | 2020-09-22 | Bloom Energy Corporation | Multi-layered coating providing corrosion resistance to zirconia based electrolytes |
WO2014021446A1 (ja) * | 2012-08-03 | 2014-02-06 | 株式会社村田製作所 | 燃料電池 |
JP5888420B2 (ja) * | 2012-08-03 | 2016-03-22 | 株式会社村田製作所 | 燃料電池 |
US10069163B2 (en) | 2012-08-03 | 2018-09-04 | Murata Manufacturing Co., Ltd. | Fuel cell |
JP2018508955A (ja) * | 2015-02-10 | 2018-03-29 | シーリーズ インテレクチュアル プロパティ カンパニー リミティド | 低温固体酸化物燃料電池のための相互接続 |
JP2016195101A (ja) * | 2015-03-31 | 2016-11-17 | 大阪瓦斯株式会社 | 燃料電池用部材およびその製造方法 |
CN107275656A (zh) * | 2017-06-08 | 2017-10-20 | 江苏科技大学 | 固体氧化物燃料电池用尖晶石/金属连接体复合材料及其制备方法 |
JP2021044178A (ja) * | 2019-09-12 | 2021-03-18 | 森村Sofcテクノロジー株式会社 | 電気化学反応セルスタック |
JP7236966B2 (ja) | 2019-09-12 | 2023-03-10 | 森村Sofcテクノロジー株式会社 | 電気化学反応セルスタック |
Also Published As
Publication number | Publication date |
---|---|
JP5607903B2 (ja) | 2014-10-15 |
US8163434B2 (en) | 2012-04-24 |
US20100055533A1 (en) | 2010-03-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5607903B2 (ja) | インターコネクト用バリア皮膜、関連装置及び形成方法 | |
KR101553270B1 (ko) | 고체 산화물형 연료 전지용 셀 | |
JP5260052B2 (ja) | 固体酸化物型燃料電池 | |
US10020527B2 (en) | Electrochemical element, solid oxide fuel cell, and methods for producing the same | |
JP5208518B2 (ja) | 可逆式固体酸化物型燃料電池を製造する方法 | |
EP2393148B1 (en) | Heat-resistant alloy, alloy member for fuel cell, fuel cell stack device, fuel cell module, and fuel cell device | |
JP5044628B2 (ja) | コーティング体 | |
DK2676318T3 (en) | A layered structure as well as its use for forming a ceramic layered structure between an interconnector and a cathode by a high temperature fuel cell. | |
US20110269047A1 (en) | Metal-supported, segmented-in-series high temperature electrochemical device | |
CA2516226A1 (en) | Porous electrode, solid oxide fuel cell, and method of producing the same | |
JP5809159B2 (ja) | 燃料電池用のアッセンブリー及びそれの製造法 | |
CN110088954B (zh) | 固体氧化物电池堆中互联和电池之间的改进的接触 | |
US20220145480A1 (en) | Methods to improve the durability of metal-supported solid oxide electrochemical devices | |
JP2018067509A (ja) | 燃料電池 | |
JP5778711B2 (ja) | セル間接続部材の製造方法およびセル間接続部材および固体酸化物形燃料電池用セル | |
US20080131750A1 (en) | Ceramic electrolyte structure and method of forming; and related articles | |
JP5215443B2 (ja) | 固体酸化物形燃料電池 | |
JP5550223B2 (ja) | セラミック電解質の処理方法および関連製品 | |
JP6358921B2 (ja) | 固体酸化物形燃料電池用セルの製造方法、及び、セル間接続部材接合方法 | |
JP6910172B2 (ja) | セル間接続部材の製造方法 | |
JP2009266582A (ja) | 固体酸化物形燃料電池用セル | |
JP6906310B2 (ja) | 固体酸化物形燃料電池用セルの製造方法 | |
JPH06103988A (ja) | 固体電解質型燃料電池 | |
JP6948791B2 (ja) | セル間接続部材の製造方法、および固体酸化物形燃料電池用セルの製造方法 | |
JP2005251611A (ja) | 固体酸化物形燃料電池用セル及び固体酸化物形燃料電池 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120822 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130626 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130702 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130926 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131203 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140226 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140805 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140829 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5607903 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |