JP2010046588A - Coating device and nozzle guard - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology that effectively suppresses the generation of defects in coating when the protective member of nozzles is provided. <P>SOLUTION: The protective member 60 is disposed at a position at a spacing distance D1 apart from a front end 412 in a slit nozzle 41. The protective member 60 is fixed to the slit nozzle 41 through a connection member 61. The protective member 60, connection member 61, and slit nozzle 41 are integrally connectable with a bolt member 62, and the connection member 61 is detachable by detaching the bolt member 62. In addition, the clearance D1 is adjustable by changing the length in the X direction of the connection member 61, the value of the clearance D1 is set in accordance with a coating speed. Thus, the coating device may effectively suppress the liquid level of a resist RG formed between a delivery port 411 and a substrate 90 from being disturbed by a stream passing through an interspace S1 by a portion provided by the clearance D1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a technique for applying a processing liquid to a substrate, and more particularly to a technique for a nozzle guard that protects a discharge port of a nozzle.

  Conventionally, a slit-like discharge port provided at the tip of a slit nozzle is brought close to the surface of the substrate, and the processing liquid is discharged from the discharge port while the nozzle is moved in parallel with respect to the substrate. 2. Description of the Related Art A coating apparatus that applies a treatment liquid to a surface is known.

  In the coating apparatus, the gap between the discharge port and the substrate surface is a minimum gap of several tens of μm to several hundreds of μm. Therefore, if there are foreign objects on the front surface or the back surface of the substrate, various problems may occur. For example, the slit nozzle may be damaged by contact between the foreign matter on the surface of the substrate and the tip of the slit nozzle.

  Therefore, a technique has been proposed in which a nozzle guard is provided on the front end surface in the moving direction of the slit nozzle, and foreign matter is removed or detected by the nozzle guard (for example, Patent Document 1). Specifically, Patent Document 1 discloses a technique for fixing a protective member (plate-shaped member) to a slit nozzle, detecting vibration caused by interference between the protective member and a foreign object, and stopping the movement of the nozzle. Yes.

JP 2000-24571 A

  Here, the conventional nozzle guard will be specifically described with reference to FIG.

  FIG. 6 is a side view showing the slit nozzle 141 and the nozzle guard 106 during the conventional resist coating process. The slit nozzle 141 shown in FIG. 6 has a slit-like discharge port 1410 extending along the X direction at the lower end, and discharges the resist solution RG from the discharge port 1410. Further, the nozzle guard 106 includes a protective member 160 that is a main body.

  As shown in FIG. 6, the discharge port 1410 is brought close to the surface of the substrate 190 supported by the stage 103, the slit nozzle 141 is moved in the (+ Y) direction, and a processing liquid (here, a resist) is moved from the discharge port 1410. The coating process is performed by discharging the liquid RG). Further, the protection member 160 is attached to the front end surface 1412 side of the slit nozzle 141.

  In the conventional configuration, when the slit nozzle 141 is moved in the (+ Y) direction during the coating process, the atmosphere flows toward the discharge port 1410 through the gap between the protective member 160 and the substrate 190. Although this inflowing atmosphere is mainly discharged from both the (+ X) side and the (−X) side of the slit nozzle 411, variations in the atmosphere flow (convection) in each part along the X direction occur. Therefore, there is a possibility that the liquid level of the resist liquid RG formed between the discharge port 1410 and the substrate 190 may be disturbed. That is, with the conventional configuration, it is difficult to perform uniform coating processing, and there is a possibility that coating defects such as coating unevenness may occur.

  In addition, since the convection of the atmosphere changes depending on the flatness and mounting accuracy of the lower end surface of the protective member 160, it is difficult to eliminate the disturbance of the liquid surface of the resist solution RG.

  In addition, in order to shorten the tact time of the substrate manufacturing, an increase in the moving speed (coating speed) of the slit nozzle 141 during the coating process is required. However, the above-described liquid surface disturbance becomes more significant as the speed increases. The coating speed could not be increased easily.

  This invention is made | formed in view of the said subject, and when providing the protection member of a nozzle, it aims at providing the technique which suppresses generation | occurrence | production of a coating defect effectively.

  In order to solve the above-mentioned problem, the invention of claim 1 is a coating apparatus for applying a treatment liquid to the main surface of a substrate supported by a supporting means, the nozzle having a discharge port at the tip, and the nozzle Supply means for supplying the processing liquid to the substrate, movement means for moving the nozzle relatively parallel to the main surface of the substrate, and relative movement direction of the nozzle relatively moved by the movement means as a reference. A nozzle guard provided on the front end side of the nozzle when the front end and the rear end are defined, and the nozzle guard is provided with a predetermined separation distance from the front end of the nozzle; and It is detachable with respect to the nozzle and the protection member, and includes a connection member that connects the nozzle and the protection member with the predetermined separation distance therebetween.

  The invention of claim 2 is the coating apparatus according to the invention of claim 1, wherein the predetermined separation distance is set according to a relative moving speed of the nozzle with respect to the substrate by the moving means. Features.

  The invention of claim 3 is the coating apparatus according to the invention of claim 1 or 2, wherein the connection member includes a separation space between the substrate and the connection member, and the separation space of the connection member. It has the opening part which connects the upper space on the opposite side to, It is characterized by the above-mentioned.

  The invention according to claim 4 is the coating apparatus according to any one of claims 1 to 3, wherein a height position of a tip portion of the protective member facing the substrate is the height with respect to the substrate. It is between the height position of the discharge port and the height position of the surface of the substrate.

  The invention of claim 5 is the coating apparatus according to any one of claims 1 to 4, wherein the discharge port is a slit-like discharge port extending along a predetermined direction, and the protection member is And extending along the predetermined direction.

  According to a sixth aspect of the present invention, in the nozzle that moves relatively parallel to the main surface of the substrate supported by the supporting means by the moving means, the relative movement direction of the nozzle that moves relatively by the moving means is used as a reference. A nozzle guard provided on the front end side in the movement direction of the nozzle when the front end and the rear end of the nozzle are defined, and a protection member provided at a predetermined distance from the front end of the nozzle; The connecting member is detachable from the nozzle and the protection member, and includes a connection member that connects the nozzle and the protection member with the predetermined separation distance therebetween.

  According to the first to sixth aspects of the invention, by providing a detachable connecting member at the front end of the nozzle, the protective member and the nozzle outlet are protected with a predetermined separation distance. The member can be fixed to the nozzle. Therefore, when the treatment liquid is applied, the liquid surface of the treatment liquid formed at the nozzle outlet can be prevented from being disturbed by the atmosphere that passes between the protective member and the substrate by the amount of the separation distance. The occurrence of coating defects such as coating unevenness can be effectively suppressed.

  According to the second aspect of the present invention, by setting the predetermined separation distance according to the moving speed of the nozzle, the liquid level of the processing liquid formed at the discharge port during the processing liquid coating process is stabilized. Can be

  According to the invention described in claim 3, by providing the opening that communicates the separation space and the upper space, the substrate flows by the atmosphere that flows into the separation space through the opening when the nozzle moves. The flow of the atmosphere flowing into the separation space from the gap between the protective member and the protective member can be suppressed. Accordingly, it is possible to stabilize the liquid level of the treatment liquid during the treatment liquid coating process.

  According to the fourth aspect of the present invention, the protective member collides with the foreign matter or the substrate before the discharge port interferes with the foreign matter or the substrate when the foreign matter exists on the substrate or the substrate is raised. . Therefore, the discharge port can be prevented from interfering with foreign matters on the substrate, the bulge of the substrate, and the like, so that the discharge port can be prevented from being damaged.

  According to the fifth aspect of the present invention, since the protective member extends along the same direction as the slit-shaped discharge port, the slit-shaped discharge port can be protected by the nozzle guard.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.

<1. First Embodiment>
<1.1. Configuration and Function>
FIG. 1 is a perspective view showing a coating apparatus 100 according to the first embodiment of the present invention. FIG. 2 is a perspective view showing the slit nozzle 41 and the nozzle guard 6. FIG. 3 is a side view showing the slit nozzle 41 and the nozzle guard 6 during the resist coating process. In FIG. 1, the nozzle guard 6 is not shown.

  1, 2 and 3, for convenience of illustration and explanation, the Z-axis direction is defined as the vertical direction, and the XY plane is defined as the horizontal plane, but these are defined for convenience in order to grasp the positional relationship. Thus, each direction described below is not limited. The same applies to the following drawings.

  As shown in FIG. 1, a coating apparatus 100 is roughly divided into a main body 2 and a control system 7, and a rectangular glass substrate for manufacturing a screen panel of a liquid crystal display device is a substrate to be processed (hereinafter simply referred to as “substrate”). 90 ”). Accordingly, the coating apparatus 100 is configured as a substrate processing apparatus that applies the resist solution RG to the surface of the substrate 90 in a process of selectively etching an electrode layer or the like formed on the surface of the substrate 90. Therefore, in the present embodiment, the resist liquid RG is discharged from the slit nozzle 41.

  In addition, the coating device 100 can be modified and used as a device for coating a predetermined treatment liquid on not only a glass substrate for a liquid crystal display device but also various substrates for a flat panel display.

[Main unit 2]
The main body 2 includes a stage 3 that functions as a holding table for mounting and holding the substrate 90 and also functions as a base for each attached mechanism. The stage 3 is made of an integral stone having a rectangular parallelepiped shape, and the upper surface and side surfaces of the surface (holding surface 30) are processed into flat surfaces.

  A large number of vacuum suction ports or vacuum suction grooves (not shown) extending along the holding surface 30 are dispersed in the substrate holding region 300 which is a rectangular region provided in the center of the upper surface of the stage 3. The substrate 90 is formed and held in a predetermined horizontal position by adsorbing the substrate 90 while the substrate 90 is processed in the coating apparatus 100.

  A pair of running rails 31a extending substantially horizontally along the Y direction is fixed to both ends of the holding surface 30 across the substrate holding region 300. The traveling rail 31 a guides the movement of the bridging structure 4 together with the support blocks 31 b fixed at both ends of the bridging structure 4 (the moving direction is defined in a predetermined direction), and the bridging structure 4 is moved to the substrate holding region 300. A linear guide supported upward is configured.

  Above the stage 3, a bridging structure 4 is provided that extends substantially horizontally from both sides of the stage 3. The cross-linking structure 4 is mainly configured by a nozzle support portion 40 having a U-shaped cross section (see FIG. 3) using carbon fiber resin as an aggregate, and elevating mechanisms 42 and 43 that support both ends thereof.

  A slit nozzle 41 is attached to the nozzle support portion 40. The slit nozzle 41 extending along the X direction is connected to a resist supply unit 410 including a pipe for supplying a processing liquid (here, resist liquid RG) to the slit nozzle 41 and a resist pump. A slit-like discharge port 411 extending along the X direction is provided at the lower end of the slit nozzle 41 on the (−Z) side. By discharging from 411, the resist solution RG is discharged to a predetermined region (resist application region) on the surface of the substrate 90.

  Here, the resist application region is a region of the surface of the substrate 90 where the resist solution RG is to be applied, and usually a region having a predetermined width along the edge is excluded from the entire area of the substrate 90. It is an area.

  The elevating mechanisms 42 and 43 are separated on both sides of the slit nozzle 41 and are connected to the slit nozzle 41 by the nozzle support portion 40. The elevating mechanisms 42 and 43 each have a ball screw and a servo motor, and the servo motor transmits a rotational driving force to the ball screw, so that the slit nozzle 41 is moved up and down along the vertical direction.

  Each of the servo motors of the lifting mechanisms 42 and 43 is provided with a rotary encoder. The rotary encoder detects the rotation angle of the ball screw (or servo motor) and transmits it to the control system 7 described later. In the control system 7, the vertical position of the slit nozzle 41 is calculated based on the detection result by the rotary encoder.

  A pair of AC coreless linear motors (hereinafter simply abbreviated as “linear motors”) 50 and 51, which are individually arranged along the edges on both sides of the stage 3, are fixed to both ends of the bridging structure 4. Established.

  The linear motor 50 includes a stator (stator) 50a and a mover 50b, and generates a driving force for moving the bridging structure 4 in the X-axis direction by electromagnetic interaction between the stator 50a and the mover 50b. It is a motor. Further, the moving amount and moving direction of the linear motor 50 can be controlled by a control signal from the control system 7. The linear motor 51 has substantially the same function and configuration.

  Each of the linear encoders 52 and 53 includes a scale unit and a detector (not shown), detects the relative positional relationship between the scale unit and the detector, and transmits it to the control system 7. Each detector is fixed to both ends of the bridge structure 4, and the linear encoders 52 and 53 detect the position of the bridge structure 4.

[Nozzle guard 6]
As shown in FIG. 2, the nozzle guard 6 is fixedly provided on the side surface (front end surface 412) on the front end side of the slit nozzle 41 in the application direction (+ Y direction in FIG. 1). The nozzle guard 6 mainly includes a protection member 60 and a connection member 61.

  The protection member 60 is a plate-like member extending along the X direction, and the length in the longitudinal direction is approximately the same as the length of the slit nozzle 41 in the X direction. The protection member 60 is made of a highly rigid material (for example, stainless steel) and is provided on the (+ Y) side of the slit nozzle 41 with a predetermined separation distance D1 from the front end surface 412 via the connection member 61 ( (See FIG. 3).

  Further, as shown in FIG. 3, the protective member 60 has a flat-processed lower end surface 600, and a slit nozzle so that the lower end surface 600 and the holding surface 30 are substantially parallel during resist coating. 41 is fixed.

  The vertical height position (vertical position) of the lower end surface 600 with respect to the holding surface 30 is closer to the holding surface 30 than the vertical position of the lower end of the slit nozzle 41 (here, the discharge port 411) during resist application. It is a position to do. In addition, the vertical position of the lower end surface 600 is a position that does not come into contact with the main surface of the substrate 90 that is normally placed on the holding surface 30 (the surface of the substrate 90 facing the discharge port 411) during resist application. The

  The connecting member 61 has a substantially rectangular parallelepiped shape extending along the X direction. One (−Y side) surface is the front end surface 412 of the slit nozzle 41 and the other (+ Y side) surface is the protective member 60. And a connecting member (bolt member 62). In the present embodiment, by disposing the connection member 61 at the above-described position, the separation distance D <b> 1 is provided between the slit nozzle 41 and the protection member 60. Therefore, the connection member 61 has a function as a spacer.

  As shown in FIGS. 2 and 3, in the present embodiment, the slit nozzle 41, the protection member 60, and the connection member 61 are coupled to each other by a bolt member 62 that penetrates the protection member 60 and the connection member 61. Therefore, the connection member 61 is detachable from the slit nozzle 41 and the protection member 60 by removing the bolt member 62. For this reason, a plurality of types of connecting members 61 having different sizes in the Y direction are prepared in advance, and the operator can change the separating distance D1 as appropriate by exchanging the connecting members 61 as necessary.

  Note that the value of the separation distance D1 is set according to the moving speed of the slit nozzle 41 in the coating direction. Specifically, as the moving speed (coating speed) of the slit nozzle 41 during the resist coating process increases, The separation distance D1 is also set to a larger value.

  Specifically, when the coating speed is 50 mm / sec, for example, the separation distance D1 is 3 mm or more. When the application speed is 100 mm / sec, the separation distance D1 is 4 mm or more. The separation distance D1 is 5 mm or more. However, these are merely examples, and the value of the separation distance D1 is not limited to these, and can be appropriately changed as necessary.

  A vibration detection sensor 63 is provided on the side surface (rear end surface 413) on the rear end side in the application direction of the slit nozzle 41. The vibration detection sensor 63 has a function of detecting the acceleration of the slit nozzle 41.

  For example, when the resist is applied as shown in FIG. 3, the slit nozzle is used when a foreign substance exists on the substrate 90 and the foreign substance collides with the protective member 60 or when the foreign substance is caught in the lower end surface 600 of the protective member 60. 41 vibrates in a predetermined direction. The vibration detection sensor 63 detects this vibration and outputs a detection signal to the control system 7 described later. In the coating apparatus 100, when this detection signal is output, the discharge of the resist solution RG is stopped, the slit nozzle 41 is raised by the elevating mechanisms 42, 43, and the slit nozzle 41 is moved to the standby position by the linear motors 50, 51. Let

  Moreover, in this Embodiment, although the protection member 60 shall consist of one plate-shaped member, you may comprise by a some member, for example.

  As described above, in the present embodiment, the protective member 60 is disposed on the front side of the slit nozzle 41 in the application direction, so that foreign matter (not shown) is present on the substrate 90. When the 41 is moved in the application direction, the foreign material can be removed by the protective member 60. Therefore, damage to the slit nozzle 41 (particularly the discharge port 411) due to interference (contact) with a foreign substance (not shown) on the substrate 90 can be effectively suppressed.

  In addition, when the substrate 90 is placed in a state where foreign matter is placed on the substrate holding region 300 (see FIG. 1), a raised portion may be generated on the substrate 90 at the position of the foreign matter. Even in such a case, the damage of the slit nozzle 41 can be effectively suppressed because the protective member 60 collides before the slit nozzle 41 collides with the raised portion during resist application.

  Further, by disposing the protective member 60 at a separation distance D1 from the slit nozzle 41, a separation space S1 (the connection member 61 and the substrate 90) corresponding to the separation distance D1 is formed between the slit nozzle 41 and the surface of the substrate 90. Space) can be provided. Therefore, compared with the case where the protective member 60 is directly fixed to the slit nozzle 41 as in the prior art, the air flow entering below the lower end surface 600 when the slit nozzle 41 is moved in the application direction by the distance D1. 3 (shown by a thick arrow in FIG. 3), the momentum can be weakened before reaching the discharge port 411, so that the liquid level of the resist solution RG formed near the discharge port 411 is effectively disturbed. Can be suppressed.

  In addition, since the liquid level of the resist solution RG formed between the discharge port 411 and the substrate 90 can be stabilized by setting the size of the separation distance D1 according to the coating speed, poor coating due to uneven coating or the like. Can be effectively suppressed.

  Further, by making the connecting member 61 that defines the separation distance D1 detachable from the slit nozzle 41 and the protection member 60 by the bolt member 62 (detachment mechanism), the separation distance D1 can be easily changed. Therefore, since the separation distance D1 suitable for the coating speed can be selected, it is possible to effectively suppress the occurrence of coating defects such as coating unevenness.

[Control system 7]
Referring back to FIG. 1 again, the control system 7 includes an arithmetic unit 70 that processes various data according to a program and a storage unit 71 that stores programs and various data. Further, on the front surface of the control system 7, an operation unit 72 for an operator to input necessary instructions to the coating apparatus 100 and a display unit 73 for displaying various data are provided.

  The control system 7 is connected to each mechanism attached to the main body 2 by a cable (not shown), and based on signals from the operation unit 72 and various sensors, each of the lifting mechanisms 42 and 43, the linear motors 50 and 51, and the like. Control the configuration.

  The storage unit 71 may be a RAM that temporarily stores data, a read-only ROM, a magnetic disk device, or the like, but a storage medium such as a portable magneto-optical disk or a memory card, and reading them. It may be a device or the like.

  The operation unit 72 includes buttons and switches (including a keyboard and a mouse). However, the operation unit 72 may have a function of the display unit 73 like a touch panel display. The display unit 73 corresponds to a liquid crystal display, various lamps, or the like.

<1.2. Explanation of operation>
Next, the operation of the coating apparatus 100 will be described. In the coating apparatus 100, the substrate 90 is carried in by an operator or a transport mechanism (not shown), and the resist coating process is started. The instruction for starting this processing may be input by operating the operation unit 82 by the operator when the conveyance of the substrate 90 is completed.

  Before starting the resist coating process, the operator connects the connecting member 61 between the slit nozzle 41 and the protective member 60 so that the separation distance D1 becomes an appropriate value according to the coating speed when the coating process is actually performed. Connect between them.

  When a transport mechanism (not shown) carries the substrate 90 above the stage 3, the coating apparatus 100 sucks and holds the substrate 90 on the holding surface 30.

  When the suction holding of the substrate 90 is completed, the coating apparatus 100 performs initial calibration in order to control the distance between the slit nozzle 41 and the substrate 90 during the coating process. For this initial calibration, the technique disclosed in JP-A-2006-102684 can be applied.

  Specifically, using a linear gauge (not shown), the tip of the slit nozzle 41 (discharge port 411) is adjusted to the height position of the holding surface 30, for example, and the origin of the slit nozzle 41 is determined. . Then, the control system 7 determines whether or not the slit nozzle 41 at the time of coating processing is at an appropriate height position (position where a predetermined gap is provided between the substrate 90 and the slit nozzle 41) from the origin position of the servo motor. The rotation amount is calculated, and the calculation result is stored in the storage unit 71. Based on this calculation result, the distance between the slit nozzle 41 and the substrate 90 during the coating process is controlled. This initial calibration may be performed before the substrate 90 is carried onto the stage 3 or before being sucked and held.

  When the initial calibration for the slit nozzle 41 is completed, the linear motors 50 and 51 move the bridging structure 4 in the X-axis direction and move the slit nozzle 41 to the discharge start position. Here, the discharge start position is a position where the slit nozzle 41 substantially follows the (−X) side of the resist coating region.

  When the slit nozzle 41 moves to the discharge start position, the coating apparatus 100 performs a coating process. Specifically, first, the bridge structure 4 is moved in the (−X) direction by driving the linear motors 50 and 51, and the resist solution RG is sent to the slit nozzle 41 by a resist pump (not shown). The nozzle 41 discharges the resist solution RG to the application region. Thereby, a layer (film) of the resist solution RG is formed in the resist coating region of the substrate 90. When the slit nozzle 41 moves to the end of application in the resist application area, the movement of the cross-linking structure 4 and the supply of the resist solution RG are stopped, and the application process is ended.

  During this coating process, the control system 7 constantly monitors the detection result of the rotary encoder, so that the elevating mechanisms 42 and 43 are adjusted so that the gap between the substrate 90 and the slit nozzle 41 becomes an appropriate value. Control.

  Further, the nozzle guard 6 fixed to the slit nozzle 41 moves together with the slit nozzle 41 while the coating process by the slit nozzle 41 is performed. Therefore, for example, when a foreign substance exists on the substrate 90, it is removed by the protective member 60. In addition, the coating apparatus 100 appropriately stops the operation of the resist coating process by detecting a vibration exceeding a predetermined threshold generated when the protective member 60 and the foreign object collide with the vibration detection sensor 63.

  When the coating process is completed, the stage 3 stops the adsorption of the substrate 90, raises the lift pins, and lifts the substrate 90 from the holding surface 30. Then, a transport mechanism (not shown) receives the substrate 90 held by the lift pins, and unloads the substrate 90 toward the next processing apparatus.

  Next, the coating apparatus 100 determines whether there is another substrate 90 to be processed continuously. If there is a substrate 90 to be processed, the coating apparatus 100 repeatedly executes the above-described processing. On the other hand, when there is no other substrate 90 to be processed, the coating apparatus 100 ends each operation. The above is the description of the operation of the coating apparatus 100 during the resist coating process.

<2. Second Embodiment>
In the first embodiment, it has been described that the separation distance D1 is provided between the slit nozzle 41 and the protection member 60 by providing the rectangular parallelepiped connection member 61 extending along the X-axis direction. However, the mechanism for providing the separation distance D1 is not limited to this.

  FIG. 4 is a perspective view showing the slit nozzle 41 and the nozzle guard 6a in the second embodiment. FIG. 5 is a side view showing the slit nozzle 41 and the nozzle guard 6a during the resist coating process. In FIG. 5, the connecting member 61a is indicated by a broken line for convenience of explanation. Moreover, in the following description, about the structure similar to 1st Embodiment, the same code | symbol is attached | subjected suitably and description is abbreviate | omitted.

  As shown in FIG. 4, the nozzle guard 6 a in the present embodiment is configured by a plurality (five in FIG. 4) of separation members 610, and a connection member in which an opening 611 is formed between the separation members 610. 61a.

  As shown in FIG. 5, the separation member 610 is a member that connects the front end surface 412 of the slit nozzle 41 and the protection member 60 with a predetermined separation distance D <b> 2 between the slit nozzle 41 and the protection member 60. . With the plurality of separation members 610, the protection member 60 is disposed at a predetermined position on the (+ Y) side with respect to the front end surface 412.

  The opening 611 is an opening formed by the facing surfaces of two adjacent spacing members 610, the front end surface 412 of the slit nozzle 41, and the facing surface of the protection member 60 facing the front end surface 412. In the present embodiment, the separation space S2 formed between the connection member 61a and the substrate 90 placed on the holding surface 30 is opposite to the substrate 90 of the connection member 61a (that is, the separation space S2). Since the upper space S3 on the opposite side is in communication with the opening 611, the atmosphere in these spaces can freely come and go.

  As in the first embodiment, the vertical position of the lower end surface 600 of the protective member 60 is lower than the vertical position of the lower end (here, the discharge port 411) of the slit nozzle 41 during the resist coating process ( The substrate 90 side) and above the vertical position of the surface of the substrate 90 normally held by the holding surface 30 (on the slit nozzle 41 side).

  As shown in FIGS. 4 and 5, the slit nozzle 41, the protection member 60, and the separation member 610 are connected to each other by a bolt member 62 that penetrates the protection member 60 and the separation member 610. Therefore, as in the case of the connection member 61 in the first embodiment, the separation member 610 is detachable from the slit nozzle 41 and the protection member 60 by removing the bolt member 62. Therefore, a plurality of types of separation members 610 having different sizes in the Y direction are prepared in advance, and the separation distance D2 can be appropriately changed by the operator replacing the separation member 610 as necessary.

  In the present embodiment, as described above, the plurality of separation members 610 constituting the connection member 61a are arranged at a predetermined interval so as to provide the opening 611. Therefore, when the slit nozzle 41 is moved along the application direction, the atmosphere enters from the lower side of the lower end surface 600 of the protective member 60 to the (−Y) side as shown by a thick arrow in FIG. The atmosphere colliding with the front end surface 412 of the nozzle 41 enters the lower part through the opening 611 (indicated by a thick arrow in FIG. 5). That is, the momentum of the airflow passing through the lower end surface 600 is weakened by the airflow of the atmosphere entering the separation space S2 from the upper space S3. Therefore, since the liquid level of the resist liquid RG formed in the vicinity of the discharge port 411 can be effectively suppressed, the occurrence of defective coating can be effectively suppressed.

  Note that, similarly to the separation distance D1 in the first embodiment, the value of the separation distance D2 is set according to the coating speed (the moving speed of the slit nozzle 41 during the resist coating process). However, in the present embodiment, since the above-described opening 611 is provided, the separation distance D2 can be shorter than the separation distance D1 in the first embodiment even at the same application speed.

  Specifically, when the coating speed is, for example, 50 mm / sec, the separation distance D2 is 1 mm or more. When the coating speed is 100 mm / sec, the separation distance D2 is 2 mm or more. The separation distance D2 is 3 mm or more. However, these are merely examples, and the value of the separation distance D2 is not limited to these, and can be appropriately changed as necessary.

<3. Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

  For example, in the above embodiment, the vibration detection sensor 63 is fixed to the rear end surface 413 of the slit nozzle 41, but the installation position is not limited to this. For example, the vibration detection sensor 63 may be fixed to the protection member 60 or the connection members 61 and 61a.

  Moreover, in the said embodiment, although the slit nozzle 41, the protection member 60, and the connection members 61 and 61a are mutually connected with the volt | bolt member 62, the attachment / detachment mechanism which makes the connection member 61 detachable is restricted to this. For example, a connecting member (such as a screw) for separately connecting the connecting members 61 and 61a and the slit nozzle 41 and the connecting members 61 and 61a and the protective member 60 is provided, or the connecting members 61 and 61a are provided. It may be realized by forming a detachable adhesive surface coated with an adhesive on the surface facing the slit nozzle 41 or the protective member 60.

  In the above embodiment, the distances D1 and D2 are adjusted by adjusting the size in the Y direction of the connecting members 61 and 61a sandwiched between the protective member 60 and the slit nozzle 41. The adjusting mechanism for D1 and D2 is not limited to these. For example, although not shown, the slit nozzle 41 and the protection member 60 are connected by one or more connection screws that penetrate the protection member 60, and the separation distances D1 and D2 are adjusted by pushing and pulling the connection screws. You may comprise. In this case, the connection screw is a connection member.

  In the above embodiment, the protective member 60 is described as being formed of a highly rigid material such as stainless steel. However, the present invention is not limited to this, and for example, the longitudinal direction of the protective member 60 (here, the X direction). ) And the sensitivity of the vibration detection sensor 63 may select the material.

  Further, in the second embodiment, the connection member 61a is composed of a plurality of separation members 610, and the openings 611 are provided by dispersively arranging the separation members 610 at predetermined intervals, thereby providing a separation space. S2 communicates with the upper space S3. However, the communication mode is not limited to this. For example, by providing a through-hole penetrating vertically in the connection member 61 of the first embodiment, a space above the connection member 61 is provided. The space (corresponding to the upper space S3) and the lower space (corresponding to the separation space S2) may be connected.

  Moreover, you may comprise so that the separation distances D1 and D2 may be adjusted by making the connection mechanism which connects the slit nozzle 41 and the protection member 60 into the structure which can be expanded-contracted. In this case, for example, the slit nozzle 41 and the protection member 60 may be connected by an arm having a joint, and the protection member 60 may be moved back and forth by bending the arm at the joint portion. Alternatively, the protection member 60 may be moved back and forth by connecting with a plurality of members having a slide mechanism and sliding the plurality of members together.

  In the above embodiment, the resist coating process is performed by horizontally moving the slit nozzle 41 with respect to the substrate 90 held on the support surface 30. However, the coating method is not limited to this, for example, by fixing the nozzle 41 at a fixed position and by providing a moving mechanism on the stage 3 to move the substrate 90 in the (−Y) direction, A resist coating process may be executed.

  When the substrate 90 is moved, the relative movement direction of the slit nozzle 41 with respect to the substrate 90 is the (+ Y) direction (that is, the direction opposite to the movement direction of the substrate 90). Therefore, since the (+ Y) side of the slit nozzle 41 is the front end, the nozzle guards 6 and 6a may be provided on the front end side.

  When performing the coating process by moving the substrate 90, the flow of the atmosphere toward the discharge port 411 between the lower end surface 600 of the guard member 60 and the substrate 90 even if the slit nozzle 41 is fixed. (Airflow) is generated. Therefore, in order to prevent the airflow from disturbing the liquid level of the resist liquid RG at the discharge port 411, it is effective to provide the separation distances D1 and D2. In this case, the separation distances D1 and D2 are desirably set according to the moving speed of the substrate 90 (in other words, the moving speed (relative moving speed) of the slit nozzle 41 with respect to the substrate 90).

  Furthermore, each structure demonstrated in the said embodiment and each modification can be suitably combined unless it mutually contradicts.

It is a perspective view which shows the coating device in 1st Embodiment which concerns on this invention. It is a perspective view which shows a slit nozzle and a nozzle guard. It is a side view which shows the slit nozzle and nozzle guard at the time of a resist application | coating process. It is a perspective view which shows the slit nozzle and nozzle guard in 2nd Embodiment. It is a side view which shows the slit nozzle and nozzle guard at the time of a resist application | coating process. It is a side view which shows the slit nozzle and nozzle guard at the time of the conventional resist application | coating process.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Coating apparatus 2 Main body 3 Stage 30 Holding surface 4 Bridging structure 41 Slit nozzle 410 Resist supply part 411 Discharge port 412 Front end surface 42,43 Lifting mechanism 50,51 Linear motor 50a Stator 50b Moving element 52,53 Linear encoder 6,6a Nozzle guard 60 Protection member 600 Lower end surface 61, 61a Connection member 610 Separation member 611 Opening portion 62 Bolt member 90 Substrate D1, D2 Separation distance RG Resist liquid S1, S2 Separation space S3 Upper space

Claims (6)

A coating apparatus for applying a treatment liquid to a main surface of a substrate supported by a support means,
A nozzle having a discharge port at the tip;
Supply means for supplying a treatment liquid to the nozzle;
Moving means for relatively moving the nozzle substantially parallel to the main surface of the substrate;
A nozzle guard provided on the front end side of the nozzle when the front end and the rear end of the nozzle are defined on the basis of the relative movement direction of the nozzle relatively moved by the moving means;
With
The nozzle guard is
A protective member provided at a predetermined distance from the front end of the nozzle;
A connection member that is detachable with respect to the nozzle and the protection member, and that connects the nozzle and the protection member with the predetermined separation distance therebetween,
A coating apparatus comprising: The coating apparatus according to claim 1,
The predetermined separation distance is set according to a relative moving speed of the nozzle with respect to the substrate by the moving unit. The coating apparatus according to claim 1 or 2,
The connecting member is
An application apparatus comprising: an opening that communicates a space between the substrate and the connection member and an upper space on the opposite side of the connection member from the space. The coating apparatus according to any one of claims 1 to 3,
The height position of the tip portion of the protective member facing the substrate is between the height position of the discharge port with respect to the substrate and the height position of the surface of the substrate. apparatus. The coating apparatus according to any one of claims 1 to 4,
The discharge port is a slit-like discharge port extending along a predetermined direction,
The coating apparatus, wherein the protection member extends along the predetermined direction. In a nozzle that moves relatively parallel to the main surface of the substrate supported by the supporting means by the moving means, the front end and the rear end of the nozzle based on the relative moving direction of the nozzle that moves relatively by the moving means A nozzle guard provided on the front end side in the movement direction of the nozzle,
A protective member provided at a predetermined distance from the front end of the nozzle;
A connection member that is detachable with respect to the nozzle and the protection member, and that connects the nozzle and the protection member with the predetermined separation distance therebetween,
A nozzle guard characterized by comprising:

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