JP2010000503A - Pure water production apparatus and method of controlling pure water production apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pure water production apparatus in which a temperature control of suppressing energy used upon the heating and cooling of water to be treated is performed, and to provide a method of controlling the pure water production apparatus. <P>SOLUTION: The pure water production apparatus 1 includes: a heating part 20 for heating the water to be treated; a deaeration part 40 for deaerating the water to be treated after the passage of the heating part 20; a cooling part 60 for cooling the water to be treated after the passage of a deaeration part 40; and a subsystem part 70 for performing secondary treatment of the water to be treated after the passage of the cooling part 60. The pure water production apparatus 1 further includes a temperature control part 90 which, when a temperature of the water to be treated detected by a first temperature detecting part 21 is (a), a temperature of the water to be treated detected by a second temperature detecting part 41 is (b), a temperature of the water to be treated detected by a third temperature detecting part 61 is (c), and a temperature of the water to be treated detected by a fourth temperature detecting part 71 is (d), controls the extent of heating of the heating part 20 and the extent of cooling of the cooling part 60 and adjusts (a) and (c) so that (b) becomes higher than (d). <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a pure water production apparatus and a control method for the pure water production apparatus.

Conventionally, a high-purity water production apparatus (hereinafter referred to as a pure water production apparatus) characterized in that nitrogen gas is supplied to raw water to perform a deaeration process (hereinafter referred to as deaeration) is known (for example, Patent Document 1).

JP 2003-21151 A

By the way, in the pure water production apparatus as described above, raw water such as city water or primary treated water,
In the process where the water to be treated, which is the water to be subjected to some purification treatment, is being treated, the pretreatment is efficiently performed in the pretreatment for heating and deaeration due to heat conduction from the pump during pump conveyance. Changes in the temperature of the water to be treated occur due to heating to obtain a temperature that can be performed, cooling after deaeration, and the like.
Since the above-mentioned Patent Document 1 hardly mentions the temperature control with respect to the temperature change of the water to be treated, the pure water producing apparatus is subjected to the purification treatment with respect to the temperature of the water to be treated at the time of deaeration. The temperature of the water to be treated at the point of use, such as a factory where the treated water is used, may be higher.

In this case, the to-be-treated water purified by the pure water production apparatus has an allowable solubility at the point of use of an inert gas such as nitrogen gas used in deaeration, which is lower than that during deaeration. This phenomenon is due to the relationship between temperature and gas solubility.
As a result, the water to be treated that has been purified by the above pure water production apparatus is bubbled at the point of use because the amount of inert gas such as nitrogen gas that exceeds the allowable solubility at the point of use is bubbled. There is a risk that an appearance defect such as a stain may occur in an object to be processed that has been subjected to a process such as cleaning using pure water that has been processed water.

Further, it is considered that the pure water production apparatus does not perform temperature control that adjusts the temperature change of the water to be treated to suppress the energy used in the heating and cooling.
For this reason, in the pure water production apparatus, there is a possibility that the energy used for the heating and cooling is used in excess of the originally required amount.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

Application Example 1 A pure water production apparatus according to this application example includes a heating unit that heats the water to be treated, a deaeration unit that degass the water to be treated after passing through the heating unit, and the deaeration unit. A deionized unit comprising a cooling unit that cools the water to be treated after passing through a sub-system unit that secondary-treats the water to be treated after passing through the cooling unit, And the cooling unit, a second temperature detection unit for detecting the temperature of the water to be treated after passing through the deaeration unit, the subsystem unit and the subsystem unit after passing through A second temperature detection unit provided between the use point where the water to be treated is used and a fourth temperature detection unit for detecting a temperature of the water to be treated after passing through the subsystem unit. The temperature of the treated water detected by the section is b, and the treated water detected by the fourth temperature detecting section When the temperature is d, the degree of heating of the heating unit is controlled so that b is higher than d, and the temperature of the water to be treated which is b in the second temperature detection unit is A temperature control unit that controls the degree of cooling of the cooling unit is provided so as to be d in the fourth temperature detection unit.

According to this, when the pure water manufacturing apparatus sets the temperature of the to-be-processed water detected by the 2nd temperature detection part to b, and sets the temperature of the to-be-processed water detected by the 4th temperature detection part to d In addition, the degree of heating of the heating unit is controlled so that b is higher than d, and the temperature of the water to be treated which is b in the second temperature detection unit becomes d in the fourth temperature detection unit. In addition, a temperature control unit for controlling the degree of cooling of the cooling unit is provided.

Therefore, in the pure water production apparatus, the temperature control unit sets b to be higher than d, and the temperature of the water to be treated which is b in the second temperature detection unit becomes d in the fourth temperature detection unit. As described above, the allowable solubility of the inert gas of the water to be treated at the use point is
It does not decrease compared with the time of deaeration in the deaeration part.
Thus, in the pure water production apparatus, for example, an inert gas such as nitrogen gas dissolved in the water to be treated at the time of deaeration in the deaeration unit does not form bubbles at the use point.
As a result, the deionized water production apparatus, at the point of use, for example, to an object to be treated that has been subjected to a treatment such as cleaning using pure water (hereinafter, also simply referred to as pure water) that has been purified. It is possible to avoid the occurrence of defects in appearance such as spots.

[Application Example 2] The pure water producing apparatus according to the application example is provided between the heating unit and the deaeration unit, and detects a temperature of the water to be treated after passing through the heating unit. A temperature detection unit; and a third temperature detection unit that is provided between the cooling unit and the subsystem unit and detects the temperature of the water to be treated after passing through the cooling unit. When the temperature of the water to be treated detected by the temperature detector is a and the temperature of the water to be treated detected by the third temperature detector is c, the temperature controller is Is adjusted so that the temperature of the water to be treated is b in the second temperature detection unit, and the temperature of the water to be treated is b in the fourth temperature detection unit. It is preferable to adjust the c by controlling the cooling unit so as to be d.

According to this, in the pure water production apparatus, the temperature control unit adjusts a by controlling the heating unit so that b is higher than d, and b is processed by the second temperature detection unit. The cooling unit is controlled to adjust c so that the water temperature becomes d at the fourth temperature detection unit.
From this, the pure water manufacturing apparatus can perform temperature control of to-be-processed water reliably.

Application Example 3 In the pure water manufacturing apparatus according to the application example described above, it is preferable that the b adds the temperature variation due to the temperature variation of the b to the d.

According to this, in the pure water production apparatus, b added to d the temperature variation due to the temperature variation of b, so that the water to be treated was heated by the heating unit and the water to be treated was cooled by the cooling unit. It is controlled efficiently.
Therefore, the pure water production apparatus can avoid the energy used for heating and cooling being used in excess of the originally required amount.

Application Example 4 In the pure water manufacturing apparatus according to the application example described above, it is preferable that b is added to d in the range of 0 ° C. to 0.3 ° C. in Celsius degree.

According to this, in the pure water production apparatus, b added a temperature in the range of 0 ° C. to 0.3 ° C. in degrees Celsius to d, and therefore the temperature difference between b and d was larger than this. In comparison, heating of the treated water by the heating unit and cooling of the treated water by the cooling unit are controlled more efficiently.
Therefore, the pure water manufacturing apparatus can reduce the energy used in heating and cooling as compared with the case where the temperature difference between b and d is larger than the above.

[Application Example 5] In the pure water production apparatus according to the application example described above, between the heating unit and the deaeration unit,
It is preferable that a filtration unit for filtering the water to be treated is provided.

According to this, since the pure water manufacturing apparatus is provided with the filtration part which filters the to-be-treated water between the heating part and the deaeration part, the to-be-treated water before deaeration is filtered by the filtration part. can do.
As a result, since the impurities contained in the water to be treated are removed and the purity of the water to be treated is improved, the pure water production apparatus can perform the deaeration by the deaeration part efficiently and reliably.

Application Example 6 In the pure water production apparatus according to the application example, it is preferable that the degassing unit degass the water to be treated with nitrogen gas.

According to this, since the deaeration unit performs deaeration of the water to be treated with nitrogen gas, the deaeration unit can always deaerate without using costs by using nitrogen gas that is inexpensive and easily available. It can be performed.

Application Example 7 In the pure water production apparatus according to the application example, the deaeration unit is VI in the periodic table of elements.
The treated water is preferably degassed with a Group II inert gas.

According to this, since the degassing unit performs degassing of the water to be treated with the group VIII inert gas in the periodic table of elements, for example, nitrogen can be removed depending on the characteristics of the group VIII inert gas. Compared with gas, degassing can be performed more stably in terms of quality.

Application Example 8 A method for controlling a pure water production apparatus according to this application example includes a heating unit that heats the water to be treated, a deaeration unit that degass the water to be treated after passing through the heating unit, A method for controlling a pure water production apparatus comprising: a cooling unit that cools the water to be treated after passing through a deaeration unit; and a subsystem unit that performs secondary treatment on the water to be treated after passing through the cooling unit. The pure water production apparatus is provided between the deaeration unit and the cooling unit, and detects a temperature of the treated water after passing through the deaeration unit; A fourth temperature is provided between the subsystem unit and a use point where the treated water after passing through the subsystem unit is used, and detects the temperature of the treated water after passing through the subsystem unit. A detection unit, and a temperature control unit that controls the temperature of the water to be treated. In the second temperature detection unit, When the known temperature of the treated water is b and the temperature of the treated water detected by the fourth temperature detector is d, the temperature control unit causes the b to be higher than the d. As described above, the degree of heating of the heating unit is controlled, and the temperature of the water to be treated that is b in the second temperature detection unit is d in the fourth temperature detection unit. The degree of cooling of the cooling unit is controlled.

According to this, the control method of a pure water manufacturing apparatus sets the temperature of the to-be-processed water detected by the 2nd temperature detection part by the temperature control part to b, and the to-be-processed detected by the 4th temperature detection part Water temperature d
, The degree of heating of the heating unit is controlled so that b is higher than d, and the temperature of the water to be treated which was b in the second temperature detection unit is d in the fourth temperature detection unit The degree of cooling of the cooling unit is controlled so that

Therefore, the method for controlling the pure water production apparatus is such that b is higher than d, and the temperature of the water to be treated which is b in the second temperature detection unit becomes d in the fourth temperature detection unit. Since it is controlled, as described above, the inert gas dissolved at the time of deaeration in the deaeration part is not bubbled at the use point.
Thereby, the control method of a pure water manufacturing apparatus can avoid the appearance defect, such as a stain, from occurring on an object to be processed that has been treated with pure water at a use point.

Application Example 9 The method for controlling a pure water production apparatus according to the application example described above is such that the pure water production apparatus is provided between the heating unit and the deaeration unit, and the covered water after passing through the heating unit. A first temperature detection unit that detects the temperature of the treated water, and a third temperature that is provided between the cooling unit and the subsystem unit and detects the temperature of the treated water after passing through the cooling unit. A detector, and when the temperature of the water to be treated detected by the first temperature detector is a and the temperature of the water to be treated detected by the third temperature detector is c In addition, the temperature controller controls the b to the d.
The temperature of the water to be treated which is b in the second temperature detection unit becomes d in the fourth temperature detection unit by controlling the heating unit so as to be higher and adjusting the a. Thus, it is preferable to adjust the c by controlling the cooling unit.

According to this, in the control method of the pure water production apparatus, the temperature control unit adjusts a by controlling the heating unit so that b is higher than d, and the second temperature detection unit sets b. C is adjusted by controlling the cooling unit so that the temperature of the treated water becomes d in the fourth temperature detection unit.
For this reason, the method for controlling the pure water production apparatus can reliably control the temperature of the water to be treated.

Application Example 10 In the method for controlling a pure water manufacturing apparatus according to the application example, the b is the d.
It is preferable to add a temperature variation due to the temperature variation of b.

According to this, in the control method of the pure water production apparatus, b adds the temperature variation due to the temperature variation of b to d, so the water to be treated by the heating unit and the water to be treated by the cooling unit Cooling can be controlled efficiently.
Therefore, the method for controlling the pure water production apparatus can avoid that the energy used for heating and cooling is used excessively than the amount originally required.

Application Example 11 In the method for controlling a pure water production apparatus according to the application example, the b is changed to the d.
It is preferable to add a temperature in the range of 0 ° C. to 0.3 ° C. in Celsius degree.

According to this, as for the control method of a pure water manufacturing apparatus, b is set to d, and Celsius degree is 0 degreeC-0.3.
Since the temperature in the range of ° C. was added, compared with the case where the temperature difference between b and d is larger than this,
Heating of the water to be treated by the heating unit and cooling of the water to be treated by the cooling unit can be controlled more efficiently.
Therefore, the method for controlling the pure water production apparatus can reduce the energy used for heating and cooling compared to the case where the temperature difference between b and d is larger than the above.

The schematic diagram which shows schematic structure of the pure water manufacturing apparatus of this embodiment. The figure which shows an example of the temperature control of the to-be-processed water in a pure water manufacturing apparatus. The figure which shows an example of the temperature data in the 2nd temperature detection part of to-be-processed water.

Hereinafter, embodiments of a pure water production apparatus and a control method for the pure water production apparatus will be described with reference to the drawings.

(Embodiment)
Drawing 1 is a mimetic diagram showing a schematic structure of a pure water manufacturing device of this embodiment.
As shown in FIG. 1, the pure water production apparatus 1 is water subjected to some purification treatment such as raw water such as river water, ground water, city water, or primary treated water from which certain impurities have been removed by pretreatment. A water storage tank 10 for storing the water to be treated, a heating unit 20 for heating the water to be treated conveyed from the water storage tank 10, and a deaeration unit 40 for degassing the water to be treated after passing through the heating unit 20 The cooling unit 60 that cools the water to be treated after passing through the deaeration unit 40 and the subsystem unit 70 that secondary-treats the water to be treated after passing through the cooling unit 60 are provided.

In addition, the pure water production apparatus 1 includes a filtering unit 30 that filters the water to be treated after passing through the heating unit 20 at a stage preceding the deaeration unit 40, and the water to be treated after passing through the deaeration unit 40 in the cooling unit 60. And a sub-tank 50 that temporarily stores in the previous stage.
And the pure water manufacturing apparatus 1 is provided between the heating part 20 and the deaeration part 40, the 1st temperature detection part 21 which detects the temperature of the to-be-processed water after passing the heating part 20, and deaeration 2nd temperature detection part 41 which is provided between the part 40 and the cooling part 60, and detects the temperature of the to-be-processed water after passing the deaeration part 40
And a third temperature detection unit 61 that is provided between the cooling unit 60 and the subsystem unit 70 and detects the temperature of the water to be treated after passing through the cooling unit 60, the subsystem unit 70, and the subsystem unit 70. Subsystem section 7 is provided between use point 80 where treated water after passing through
And a fourth temperature detector 71 that detects the temperature of the water to be treated after passing 0.
In addition, the pure water production apparatus 1 includes a temperature control unit 90 that controls the degree of heating of the heating unit 20 and the degree of cooling of the cooling unit 60 based on the temperature of the water to be treated detected by each temperature detection unit. I have.

As shown in FIG. 1, the water to be treated is transported from the water storage tank 10 in the direction of the solid line arrow, and is heated by the heating unit 2.
0, the filtration unit 30, the deaeration unit 40, the sub tank 50, the cooling unit 60, the purification process by passing through the subsystem unit 70, in a state where the predetermined purity, for example, the specific resistance has reached 18MΩ · cm or more, It is supplied as pure water to one or a plurality of cleaning treatment facilities in a manufacturing factory for semiconductors, liquid crystal display panels, precision microfabricated parts, etc., which are the use points 80.
A plurality of pumps (not shown) are used for transporting the water to be treated, and the water to be treated having a predetermined flow rate is transported in a stable state. At this time, the water to be treated is heated by heat conduction from the pump and the temperature rises.
The pure water (purified water to be treated) used at the use point 80 is discharged as waste water, and the unused pure water at the use point 80 is returned to the sub tank 50 as return water.

In the heating unit 20, the water to be treated is heated by a heater using steam, thereby facilitating the filtration in the filtration unit 30, and the use point 80 at the use point 80 after passing through the deaeration unit 40 in the subsequent stage. The temperature of the water to be treated is increased so that the required temperature for pure water at point 80 is reached.
In the filtration part 30, impurities, such as microorganisms and a foreign material contained in to-be-processed water, are removed by filtering to-be-processed water using a reverse osmosis membrane (RO membrane: It is also called Reverse Osmosis Membrane).
In addition, in the front | former stage of the filtration part 30, the pressure more than an osmotic pressure is applied to the to-be-processed water with the pump so that the to-be-processed water using a reverse osmosis membrane may be filtered efficiently.

In the deaeration unit 40, nitrogen gas, helium gas, which is a group VIII inert gas in the periodic table, and argon gas are used to replace dissolved oxygen contained in the water to be treated by partial pressure. Gas components such as dissolved oxygen contained in the water to be treated are degassed.
In the cooling unit 60, the heating and heating unit 20 to the filtering unit 30 and the deaeration unit 40 in the heating unit 20 are used.
The water to be treated, which has been heated by filtration, degassing, heat conduction from a pump, etc. when it is conveyed to the cooling unit 60 via the sub tank 50, is cooled by a cooler using cold water. Thus, the temperature of the water to be treated is lowered at the use point 80 so as to reach the required temperature for the pure water at the use point 80 after passing through the subsystem unit 70 and the like at the subsequent stage.

In the subsystem unit 70, an ultraviolet ray irradiation device that decomposes organic matter by irradiating the water to be treated with an ultraviolet ray, a filtration device that filters the water to be treated after the ultraviolet ray irradiation to remove impurities such as microorganisms and foreign matters, and the like. Water is secondarily treated.
The treated water secondarily treated by the subsystem unit 70 is transported to the use point 80 by a pump as pure water.

In each of the first to fourth temperature detectors 21, 41, 61, 71, the temperature of the treated water passing therethrough is detected by a thermometer, and the detected temperature data of the treated water includes a microcomputer. It is transmitted to the temperature controller 90. In addition, the temperature detection of the to-be-processed water is performed constantly or at any time based on an instruction from the temperature control unit 90 or the like.

The temperature control unit 90 controls the degree of heating of the heating unit 20 and the degree of cooling of the cooling unit 60 based on the temperature data of the water to be treated detected by each temperature detection unit.
Specifically, the temperature controller 90 is configured so that the temperature of the water to be treated detected by the second temperature detector 41 is higher than the temperature of the water to be treated detected by the fourth temperature detector 71. The degree of heating of the heating unit 20 and the degree of cooling of the cooling unit 60 are controlled, the temperature of the water to be treated detected by the first temperature detection unit 21, and the processing target detected by the third temperature detection unit 61 Change the temperature of the water.

Here, the control operation of the temperature control unit 90 as a control method of the pure water production apparatus 1 will be described.

Here, the temperature of the water to be treated detected by the first temperature detector 21 is a, the temperature of the water to be treated detected by the second temperature detector 41 is b, and the third temperature detector 61. The temperature of the water to be treated detected in step c is c, and the temperature of the water to be treated detected by the fourth temperature detector 71 is d.
The temperature control unit 90 adjusts a by controlling the degree of heating by adjusting the steam amount, steam pressure, steam temperature, etc. of the heater of the heating unit 20 so that b is higher than d, and the second Temperature detector 4
The degree of cooling is controlled by adjusting the amount of chilled water, the chilled water pressure, the chilled water temperature, etc. of the cooler of the cooling unit 60 so that the temperature of the treated water that is b in 1 becomes d in the fourth temperature detection unit 71. And adjust c.

Here, in order to prevent bubbles at a use point 80 described later, the temperature b is preferably set to a temperature not lower than the temperature d. The temperature b is affected by the above-described variation in overheating from the conveying pump, variation in heat radiation from the piping, and variation due to control errors in the control system. Therefore, it is important to set the temperature b to a temperature that does not fall below the temperature d in consideration of the temperature variation caused by the cause.
Note that the set temperature b may be equal to the temperature d as long as the variation is negligible.

Here, the control operation of the temperature control unit 90 will be described with reference to the drawings.
FIG. 2 is a diagram illustrating an example of temperature control of water to be treated in the pure water production apparatus according to the present embodiment.
In FIG. 2, a solid line E represents a temperature transition from the water storage tank 10 to the fourth temperature detection unit 71 in the pure water production apparatus 1 in FIG. 1 when the temperature control by the temperature control unit 90 is performed. A broken line G represents a temperature transition from the water storage tank 10 to the fourth temperature detection unit 71 in the pure water production apparatus 1 in FIG. 1 when the temperature control by the temperature control unit 90 is not performed.
Moreover, the horizontal axis of FIG. 2 shows the temperature detection point of to-be-processed water, and the vertical axis | shaft of FIG. 2 shows the temperature of to-be-processed water.

Here, for convenience, the unit of temperature is Celsius degree (degrees Celsius), but the unit of temperature can be converted from a numerical value to Fahrenheit degree (Fahrenheit degree), Kelvin, or the like.
Here, the temperature of the water to be treated in the water storage tank 10 is 23.5 ° C., and the required temperature for the pure water (the water to be treated after purification) at the use point 80 is 25.0 ° C. Further, it is assumed that there is no change in the temperature of the water to be treated from the fourth temperature detection unit 71 to the use point 80.

As shown in FIG. 2, when temperature control is performed by the temperature control unit 90 (hereinafter, also simply referred to as temperature control), water to be treated detected by the fourth temperature detection unit 71. The temperature d ° C. (hereinafter also simply referred to as temperature d ° C.) is 25.0 ° C., and the temperature b ° C. (hereinafter also simply referred to as temperature b ° C.) detected by the second temperature detector 41 is 25. The degree of heating of the heating unit 20 and the degree of cooling of the cooling unit 60 are controlled by the temperature control unit 90 so as to be higher than 0.0 ° C.

At this time, the temperature controller 90 adds the temperature variation T1 of the water to be treated due to the temperature variation to the target value of the temperature d ° C. of 25.0 ° C. so that the temperature b ° C. is substantially equal. The temperature a ° C. of the water to be treated detected by the first temperature detection unit 21 by controlling the degree of heating of the heating unit 20
(Hereinafter, also simply referred to as temperature a ° C.).
Then, the temperature control unit 90 finally sets the cooling unit 60 so that the temperature d ° C. becomes 25.0 ° C.
The temperature c of the water to be treated detected by the third temperature detector 61 (hereinafter also simply referred to as temperature c ° C.) is adjusted by controlling the degree of cooling.

At this time, the temperature control unit 90 is configured so that the temperature of the water to be treated is from the first temperature detection unit 21 to the second temperature detection unit 41 and from the third temperature detection unit 61 to the fourth temperature detection unit 71. The degree of heating of the heating unit 20 and the degree of cooling of the cooling unit 60 are controlled by reflecting the amount heated by the heat conduction from the pump accompanying the conveyance.
In addition, said temperature rise part is derived | led-out based on the temperature data of the to-be-processed water detected in advance by each temperature detection part.

Here, the temperature variation T1 of the water to be treated due to temperature variation (hereinafter simply referred to as temperature variation T1) will be described with reference to the drawings.
FIG. 3 is a diagram illustrating an example of temperature data in the second temperature detection unit of the water to be treated.

As shown in FIG. 3, the standard deviation indicating the degree of variation in the four temperature data of the water to be treated detected by the second temperature detector 41 is 0.10 ° C.
Therefore, assuming that the variation in the temperature data of the treated water is a normal distribution, if the temperature variation T1 is 0.3 ° C., which is three times the standard deviation, The temperature variation T1 is within 0.3 ° C.
As a result, in the pure water production apparatus 1, the temperature b.degree. C. is substantially equal to the temperature (25.3.degree. C.) obtained by adding 0.3.degree. C. as the temperature variation T1 to 25.0.degree. C. which is the target value of the temperature d.degree. By having the same temperature, the temperature b ° C. is higher than the temperature d ° C. even if there is a temperature variation.

Returning to FIG. 2, the temperature control unit 90 may control the degree of heating of the heating unit 20 so that the temperature b ° C. becomes 25.3 ° C. based on these things. Alternatively, the temperature control unit 90 is heated by heat conduction from a pump accompanying the conveyance from the first temperature detection unit 21 to the second temperature detection unit 41 (hereinafter referred to as a preceding temperature increase) (1 Temperature a ° C is 24.3 ° C.
The degree of heating of the heating unit 20 may be controlled so that
As a result, the temperature b ° C. becomes 25.3 ° C. in which the temperature rise of the previous stage (1.0 ° C.) is added to the temperature a ° C. (24.3 ° C.). Temperature variation T1 (0.3
° C) is equal to the temperature added (25.3 ° C).

Then, the temperature control unit 90 may control the degree of cooling of the cooling unit 60 so that the temperature d ° C. becomes 25.0 ° C. Alternatively, the temperature control unit 90 is heated by heat conduction from the pump accompanying the conveyance from the third temperature detection unit 61 to the fourth temperature detection unit 71 (hereinafter referred to as a subsequent temperature increase) (0 .6 ° C.) and the cooling unit 60 so that the temperature c ° C. becomes 24.4 ° C.
The degree of cooling may be controlled.
As a result, the temperature d ° C. becomes 25.0 ° C. by adding the subsequent temperature increase (0.6 ° C.) to the temperature c ° C. (24.4 ° C.), and the required temperature for the pure water at the use point 80 (
25.0 ° C.).

On the other hand, when the temperature control by the temperature control unit 90 is not performed as in the prior art (hereinafter, also simply referred to as the case where the temperature is not controlled), the temperature of the treated water is ignored at the first temperature. Until the temperature a ′ ° C. of the water to be treated detected by the detection unit 21 (hereinafter also simply referred to as temperature a ′ ° C.) reaches 25.0 ° C., which is the required temperature for pure water at the use point 80, the heating unit 20 Heated by.
As a result, the temperature b ′ ° C. (hereinafter also simply referred to as temperature b ′ ° C.) of the water to be treated detected by the second temperature detector 41 is increased to the temperature a ′ ° C. (25.0 ° C.). By adding the minute (1.0 ° C.), the temperature becomes 26.0 ° C.

Then, the temperature of the water to be treated is ignored, and the temperature c ′ ° C. of the water to be treated detected by the third temperature detector 61 (hereinafter also simply referred to as the temperature c ′ ° C.) is the use point 80. Is cooled by 1.0 ° C. by the cooling unit 60 until it reaches 25.0 ° C., which is the required temperature for pure water.
As a result, the temperature d ′ ° C. (hereinafter, also simply referred to as temperature d ′ ° C.) of the water to be treated detected by the fourth temperature detector 71 is increased to the temperature c ′ ° C. (25.0 ° C.). By adding the minute (0.6 ° C.), the temperature becomes 25.6 ° C., and the required temperature (25.0 ° C.) for pure water at the use point 80 cannot be satisfied as it is.

In order to avoid this situation, when the temperature is not controlled, an appropriate value of the temperature c ′ ° C. is found by trial and error, and the temperature c ′ ° C. is controlled as shown by the broken line H of the two-dot chain line in FIG. The cooling by the cooling unit 60 is continued until the temperature is 24.4 ° C., which is the same as the temperature c ° C. (solid line).
As a result of the temperature c ′ ° C. being 24.4 ° C., the temperature d ′ ° C. is 25.0 ° C., and the required temperature for pure water at the use point 80 (25.0 ° C.) can be satisfied.

From these facts, when temperature is controlled (solid line), when temperature is not controlled (solid line)
Compared with the broken line), since the amount of steam used is small, for example, by the temperature difference T2 (0.7 ° C.) between the temperature a ′ ° C. and the temperature a ° C., the degree of heating by the heating unit 20 is suppressed. be able to.
Further, when the temperature is controlled, the temperature b ′ ° C. is compared with the case where the temperature is not controlled.
Since the amount of cold water used is small, for example, by the temperature difference T3 (0.7 ° C.) between the temperature b and the temperature b ° C., the degree of cooling by the cooling unit 60 can be suppressed.

As a result, when the temperature is controlled, the energy used for heating and cooling is
Compared to the case where the temperature is not controlled, a small amount is required, so that an energy saving effect can be achieved.

By the way, when temperature control is not carried out, the upstream temperature increase and the downstream temperature increase are ignored.
For this reason, when the temperature is not controlled, the temperature b ′ ° C. may be lower than the temperature d ′ ° C. if the amount of the subsequent-stage temperature increase is larger than the previous-stage temperature increase of the water to be treated.

Thereby, when the temperature is not controlled, the allowable solubility at the use point 80 of the inert gas such as nitrogen gas, helium gas, and argon gas dissolved in the water to be treated is reduced when the deaeration unit 40 is deaerated. .
As a result, if the temperature is not controlled, the inert gas that exceeds the allowable solubility at the use point 80 and dissolves in the water to be treated is bubbled at the use point 80, so that pure water (purified) In some cases, for example, stains and other defects in appearance may occur in an object to be processed such as cleaning using water to be processed.

On the other hand, when temperature control is performed, as described above, the temperature b ° C. is higher than the temperature d ° C. even if there is a variation in control in the temperature control unit 90.
As a result, when the temperature is controlled, the allowable solubility of the inert gas in the water to be treated does not decrease at the use point 80 as compared with that in the degassing of the degassing unit 40, so that it dissolves in the water to be treated. But inert gas does not bubble.
Therefore, when temperature control is performed, it is possible to avoid occurrence of defects in appearance such as stains on the object to be processed that has been subjected to processing such as cleaning at the use point 80 using pure water.

In addition, the temperature of the to-be-processed water used for said description is an example, and is not limited to said value. The temperature of the water to be treated is appropriately set according to the configuration of the pure water production apparatus 1, the required temperature from the use point 80, and the like. Further, the temperature variation T1 is not limited to 0.3 ° C., and may exceed 0.3 ° C., for example, may be 0.4 ° C. to 0.9 ° C. in accordance with the actual state of variation, For example, it may be 0.2 ° C., 0.1 ° C. or lower.

However, the pure water production apparatus 1 increases the degree of heating and cooling of the water to be treated and increases the energy used as the temperature variation T1 increases. It is necessary to determine T1.

In the pure water production apparatus 1, the first temperature detection unit 21 is preferably provided near the heating unit 20, and the second temperature detection unit 41 is provided near the deaeration unit 40. preferable. The third temperature detector 61 is preferably provided near the cooling unit 60, and the fourth temperature detector 71 is preferably provided near the use point 80.

As described above, the pure water production apparatus 1 according to the present embodiment uses the temperature of the water to be treated detected by the first temperature detection unit 21 as a ° C., and the treatment target detected by the second temperature detection unit 41. The temperature of the water is b ° C., the temperature of the water to be treated detected by the third temperature detector 61 is c ° C., and the fourth temperature detector 7
When the temperature of the water to be treated detected in 1 is d ° C., the temperature of the water to be treated which is b ° C. in the second temperature detector 41 is set to be higher than d ° C. 4, the degree of heating of the heating unit 20 and the degree of cooling of the cooling unit 60 are controlled so as to be d ° C.
A temperature controller 90 for adjusting the temperature is provided.

Therefore, in the pure water production apparatus 1, the temperature control unit 90 causes the temperature of the water to be treated to be 4 ° C. so that b ° C. is higher than d ° C. and the second temperature detection unit 41 is b ° C. Detection unit 71
Therefore, the inert gas such as nitrogen gas, helium gas, and argon gas dissolved in the water to be treated at the time of deaeration in the deaeration unit 40 is used at a use point 80. No bubbles.
As a result, the pure water production apparatus 1 can avoid occurrence of defects in appearance, such as stains, on the object to be processed that has been subjected to processing such as cleaning at the use point 80 using pure water.

Moreover, the pure water manufacturing apparatus 1 has the temperature bC of the to-be-processed water detected by the 2nd temperature detection part 41,
Since the temperature of the water to be treated detected by the fourth temperature detection unit 71 is substantially equal to the temperature d1 of the temperature variation due to the temperature variation, the heating and cooling unit 60 of the water to be treated is heated by the heating unit 20. The water to be treated is cooled at a level close to the necessary minimum, and the temperature is controlled efficiently.
Therefore, the pure water production apparatus 1 can avoid the excessive use of the energy used for heating and cooling from the originally required amount, and thus has an energy saving effect.

Moreover, the pure water manufacturing apparatus 1 has the temperature bC of the to-be-processed water detected by the 2nd temperature detection part 41,
This is a temperature obtained by adding 0.3 ° C. to the temperature d ° C. of the water to be treated detected by the fourth temperature detector 71.
As a result, the deionized water production apparatus 1 has the temperature b.degree. C. of the water to be treated detected by the second temperature detector 41.
And the temperature difference with the temperature dC of the to-be-processed water detected by the 4th temperature detection part 71 is larger than 0.3 degreeC, The heating and cooling part of the to-be-processed water by the heating part 20 Cooling of the water to be treated by 60 is controlled more efficiently.
Accordingly, the pure water production apparatus 1 is configured to treat the temperature b of the water to be treated detected by the second temperature detection unit 41.
The energy used for heating and cooling is compared with the case where the temperature difference between the ° C and the temperature d ° C of the water to be treated detected by the fourth temperature detector 71 is greater than 0.3 ° C. , Can be reduced.

Moreover, since the pure water manufacturing apparatus 1 is provided with the filtration part 30 which filters a to-be-processed water between the heating part 20 and the deaeration part 40, the filtration part 30 in the deaeration part 40 is provided. The treated water before deaeration can be filtered.
As a result, the pure water producing apparatus 1 removes impurities such as microorganisms and foreign matters contained in the water to be treated, and improves the purity of the water to be treated. It can be done reliably.

Moreover, since the deaeration part 40 deaerates to-be-processed water with nitrogen gas, the pure water manufacturing apparatus 1 performs deaeration regularly at low cost by using cheap and easy-to-obtain nitrogen gas. be able to.

Moreover, since the deaeration part 40 deaerates to-be-processed water with helium gas, argon gas, etc. which are group VIII inert gas in an element periodic table, the pure water manufacturing apparatus 1 has helium gas,
Due to characteristics such as argon gas, for example, degassing more stable in quality can be performed as compared with nitrogen gas.

Moreover, the control method of the pure water manufacturing apparatus 1 sets the temperature of the to-be-processed water detected by the 1st temperature detection part 21 to a degreeC, and sets the temperature of the to-be-processed water detected by the 2nd temperature detection part 41. When the temperature of the water to be treated detected by the third temperature detector 61 is c ° C. and the temperature of the water to be treated detected by the fourth temperature detector 71 is d ° C. The temperature of the water to be treated which was b ° C. in the second temperature detection unit 41 becomes d ° C. in the fourth temperature detection unit 71 so that the temperature becomes higher than d ° C.
The degree of heating of the heating unit 20 and the degree of cooling of the cooling unit 60 are controlled by the temperature control unit 90,
Adjust a ° C and c ° C.

Therefore, the control method of the pure water production apparatus 1 is such that b ° C. is higher than d ° C. and the second
Since the temperature of the water to be treated which was b ° C. in the temperature detection unit 41 is reliably controlled to be d ° C. in the fourth temperature detection unit 71, at the time of deaeration in the deaeration unit 40, For example, an inert gas such as nitrogen gas, helium gas, or argon gas dissolved in the water to be treated is not bubbled at the use point 80.
As a result, the control method of the pure water production apparatus 1 indicates that, at the use point 80, an appearance defect such as a stain occurs on a workpiece that has been subjected to a treatment such as cleaning with pure water. Can be avoided.

Moreover, the control method of the pure water production | generation apparatus 1 detects the temperature variation T1 by the temperature b of the to-be-processed water detected by the 2nd temperature detection part 41 by the 4th temperature detection part 71 by the temperature dispersion | variation. Since it is substantially equal to the temperature added to the temperature d ° C of the treated water, the heating of the treated water by the heating unit 20 and the cooling of the treated water by the cooling unit 60 can be efficiently controlled.
Therefore, the control method of the pure water production apparatus 1 can avoid that the energy used for heating and cooling is used in excess of the originally required amount.

Moreover, the control method of the pure water manufacturing apparatus 1 is the temperature dC of the to-be-processed water detected by the 4th temperature detection part 71 by the temperature bC of the to-be-processed water detected by the 2nd temperature detection part 41. It is the temperature which added 0.3 degreeC to.
From this, the control method of the pure water production apparatus 1 includes the temperature b ° C. of the water to be treated detected by the second temperature detector 41 and the temperature of the water to be treated detected by the fourth temperature detector 71. Compared with the case where the temperature difference from d ° C is larger than 0.3 ° C, the heating and cooling unit 60 of the water to be treated by the heating unit 20 is performed.
The cooling of the water to be treated can be controlled more efficiently.
Therefore, the method for controlling the pure water production apparatus 1 includes the temperature b ° C. of the water to be treated detected by the second temperature detector 41 and the temperature d ° C. of the water to be treated detected by the fourth temperature detector 71. Temperature difference with
Compared to the case of greater than 0.3 ° C., the energy used for heating and cooling can be reduced.

DESCRIPTION OF SYMBOLS 1 ... Pure water manufacturing apparatus, 10 ... Water storage tank, 20 ... Heating part, 21 ... 1st temperature detection part, 30 ... Filtration part, 40 ... Deaeration part, 41 ... 2nd temperature detection part, 50 ... Sub tank, 60 ... Cooling section, 61
... third temperature detection unit, 70 ... subsystem unit, 71 ... fourth temperature detection unit, 80 ... use point.

Claims (11)

A heating unit that heats the water to be treated, a deaeration unit that degass the water to be treated after passing through the heating unit, a cooling unit that cools the water to be treated after passing through the deaeration unit, and A pure water producing apparatus comprising a subsystem unit for secondary treatment of the water to be treated after passing through a cooling unit,
A second temperature detection unit that is provided between the deaeration unit and the cooling unit and detects the temperature of the water to be treated after passing through the deaeration unit;
Provided between the subsystem unit and a use point where the treated water after passing through the subsystem unit is used, and detecting a temperature of the treated water after passing through the subsystem unit. A temperature detection unit,
The temperature of the water to be treated detected by the second temperature detector is b,
When the temperature of the water to be treated detected by the fourth temperature detector is d,
The degree of heating of the heating unit is controlled so that b is higher than d, and the second
And a temperature control unit that controls the degree of cooling of the cooling unit so that the temperature of the treated water that is b in the temperature detection unit is d in the fourth temperature detection unit. Pure water production equipment. In the pure water manufacturing apparatus according to claim 1, provided between the heating unit and the deaeration unit,
A first temperature detection unit for detecting the temperature of the water to be treated after passing through the heating unit;
A third temperature detection unit that is provided between the cooling unit and the subsystem unit and detects a temperature of the water to be treated after passing through the cooling unit;
The temperature of the treated water detected by the first temperature detector is a,
When the temperature of the treated water detected by the third temperature detection unit is c,
The temperature control unit controls the heating unit so that b is higher than d, and the a
And the c is adjusted by controlling the cooling unit so that the temperature of the water to be treated which is b in the second temperature detection unit becomes d in the fourth temperature detection unit. The pure water manufacturing apparatus characterized by the above-mentioned. 3. The pure water producing apparatus according to claim 1, wherein the b is obtained by adding a temperature variation due to the temperature variation of the b to the b. 3. The pure water producing apparatus according to claim 1, wherein the b is obtained by adding a temperature in the range of 0 ° C. to 0.3 ° C. in terms of Celsius to the d. The pure water manufacturing apparatus according to any one of claims 1 to 4, wherein a filtration unit that filters the water to be treated is provided between the heating unit and the deaeration unit. Pure water production equipment. The pure water manufacturing apparatus as described in any one of Claims 1-5 WHEREIN: The said deaeration part performs the deaeration of the said to-be-processed water by nitrogen gas, The pure water manufacturing apparatus characterized by the above-mentioned. In the pure water manufacturing apparatus according to any one of claims 1 to 5, the deaeration part deaerates the to-be-treated water with a group VIII inert gas in the periodic table of elements. Pure water production equipment. A heating unit that heats the water to be treated, a deaeration unit that degass the water to be treated after passing through the heating unit, a cooling unit that cools the water to be treated after passing through the deaeration unit, and A method for controlling a pure water production apparatus comprising a subsystem unit for secondary treatment of the water to be treated after passing through a cooling unit,
A second temperature detection unit that is provided between the deaeration unit and the cooling unit, and that detects the temperature of the water to be treated after passing through the deaeration unit;
Provided between the subsystem unit and a use point where the treated water after passing through the subsystem unit is used, and detecting a temperature of the treated water after passing through the subsystem unit. A temperature detector;
A temperature control unit for controlling the temperature of the water to be treated,
The temperature of the water to be treated detected by the second temperature detector is b,
When the temperature of the water to be treated detected by the fourth temperature detector is d,
The temperature control unit controls the degree of heating of the heating unit such that b is higher than the d, and the temperature of the water to be treated which is b in the second temperature detection unit is the first 4. The method for controlling a pure water producing apparatus, wherein the degree of cooling of the cooling unit is controlled so as to be d in the temperature detecting unit 4. The method for controlling a pure water production apparatus according to claim 8, wherein the pure water production apparatus is provided between the heating unit and the deaeration unit, and the temperature of the water to be treated after passing through the heating unit. A first temperature detection unit for detecting
A third temperature detection unit that is provided between the cooling unit and the subsystem unit and detects a temperature of the water to be treated after passing through the cooling unit;
The temperature of the treated water detected by the first temperature detector is a,
When the temperature of the treated water detected by the third temperature detection unit is c,
The temperature control unit controls the heating unit to adjust the a so that the b is higher than the d, and the temperature of the water to be treated which is b in the second temperature detection unit is The fourth
The method for controlling a pure water producing apparatus is characterized by adjusting the c by controlling the cooling unit so that the temperature detection unit becomes d. 10. The method for controlling a pure water production apparatus according to claim 8, wherein b is obtained by adding a temperature variation due to temperature variation of b to b. The method for controlling a pure water production apparatus according to claim 8 or 9, wherein the b is obtained by adding a temperature in the range of 0 ° C to 0.3 ° C in Celsius degree to the d. Control method of the device.

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