JP2009240410A - Stylet array and method for manufacturing the array - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stylet which can be efficiently punctured and reduce the breakage of a needle. <P>SOLUTION: The stylet array is used for a method of puncturing the skin using the stylet arrays 101 and 110 provided with the stylets 102 and 104 of a micron order as a method of efficiently absorbing a medicine into the body, and includes a substrate 103, the stylets formed in a stylet area 120 on a first surface of the substrate, and a punctured object storage part 130 formed in an area surrounding the stylet area. A method for manufacturing the stylet array is also disclosed. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a needle-like body array including needle-like bodies that are fine structures.

  The percutaneous absorption method, which is a method of infiltrating a drug from the skin and administering the drug into the body, is used as a method that can be easily administered without causing pain to the human body. There are drugs that are difficult to administer by transdermal absorption. As a method for efficiently absorbing these drugs into the body, attention has been focused on a method of perforating the skin using a needle-like array having micron-order needles and administering the drug directly into the skin. According to this method, it is possible to simply administer a drug subcutaneously without using a special device for dosing (Patent Document 1).

  The shape of the fine needle-like body used at this time is required to have a sufficient fineness and tip angle for piercing the skin and a sufficient length for allowing the drug solution to penetrate subcutaneously, The diameter of the acicular body is several μm to several hundred μm, and the length penetrates through the stratum corneum, which is the outermost layer of the skin, and does not reach the nerve layer, specifically about several tens μm to several hundred μm. It is considered desirable.

  More specifically, it is required to penetrate the stratum corneum that is the outermost skin layer. The thickness of the stratum corneum varies slightly depending on the part of the human body, but is about 20 μm on average. Under the stratum corneum, there is an epidermis having a thickness of about 200 μm to 350 μm, and further below that there is a dermis layer in which capillaries are stretched. For this reason, in order to penetrate the stratum corneum and permeate the chemical, a needle-like body of at least 20 μm or more is required. Further, when producing a needle-like body for the purpose of blood collection, a needle-like body having a height of at least 350 μm or more is required due to the above-described skin structure.

  In addition, the material constituting the acicular array must be a material that does not adversely affect the human body even if a damaged acicular body remains in the body. In addition, biocompatible resins such as maltose, polylactic acid, and dextran are considered promising (Patent Document 2).

  In order to manufacture such a fine structure at a low cost and in large quantities, a transfer molding method represented by an injection molding method, an imprinting method, a casting method or the like is effective, but molding is performed in any method. In order to achieve this, it is necessary to have a prototype in which the desired shape is inverted, and the aspect ratio (height or depth ratio to the width of the structure) is high as in the needle array, and the tip is sharpened. In order to form the necessary structure, the manufacturing process becomes very complicated.

  For example, as a method for manufacturing an acicular array, a manufacturing method has been proposed in which an original plate of an acicular array is prepared by X-ray lithography, a replica plate is formed from the original plate, and transfer processing is performed (Patent Document 3). .

In addition, a manufacturing method has been proposed in which an original plate of a needle-like body array is manufactured by machining, a replica plate is made from the original plate, and transfer processing is performed (Patent Document 4).
US Pat. No. 6,183,434 Japanese Patent Laid-Open No. 2005-21677 JP 2005-246595 A JP-T-2006-513811

  When a puncture target is punctured by manufacturing and / or using a minute structure such as an acicular array, it is conceivable that the puncture situation changes depending on the properties of the object (for example, stretchability).

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a needle-like array that can be punctured efficiently and that can reduce needle breakage.

The present invention for solving the above problems
(1) A needle-like body comprising a base body, a needle-like body formed in a needle-like body region on the first surface of the base body, and a puncture target storage portion formed in a region surrounding the needle-like body region array;
(2) The acicular body array according to (1), wherein a surface corresponding to the puncture target storage portion on the first surface is lower than a surface corresponding to the acicular base portion;
(3) The needle array according to (1) or (2), which is made of a biocompatible material;
(4) A method for manufacturing the needle-shaped body array according to any one of (1) to (3),
A step of forming an etching mask having a thickness distribution on the substrate in accordance with the target needle pattern,
Forming an acicular body by performing anisotropic etching on the substrate from the side on which the etching mask is formed;
Providing a puncture target storage portion in a region surrounding the region where the needle-like body is formed;
(5) A method for producing the needle-shaped body array according to any one of (1) to (3),
A step of forming an etching mask having a thickness distribution on the substrate in accordance with the target needle pattern,
Forming an acicular body by performing anisotropic etching on the substrate from the side on which the etching mask is formed;
A step of obtaining a needle-like body array by providing a puncture target storage portion in a region surrounding the region where the needle-like body is formed, and using the obtained needle-like body array as a mother die, and producing a duplicate plate from the mother die Process,
Performing transfer processing molding using the duplicate plate;
A method comprising:
It is.

  According to the present invention, there is provided an acicular body array that can be punctured efficiently and reduces the breakage of needles.

  An explanation will be given with reference to FIG. 1 showing an example of an acicular array according to the present invention. Please refer to FIG. Fig.1 (a) is the top view seen from the 1st surface of the said acicular body array, FIG.1 (b) is sectional drawing cut | disconnected along line II. The needle-like body array 1 includes a needle-like body 4 formed in the needle-like body region 3 on the first surface of the substrate 2, and a puncture target storage unit 5 formed in a region surrounding the needle-like body region 3. It comprises. The puncture target storage unit 5 on the first surface passes through the centers of the plurality of needle-like bodies 4 included in one row of the group of needle-like bodies 4 arranged in the needle-like body region 3 including the needle-like bodies 4. It is formed outside the region surrounded by the side parallel to the straight line and the side parallel to the straight line passing through the centers of the plurality of needle-like bodies 4 included in one row. As shown in FIG. 1 (b), the surface corresponding to the puncture target accommodating portion 5 on the first surface is lower than the surface corresponding to the base portion of the needle-like body 4 in the needle-like body region 3.

  By providing the puncture target storage unit 5 on the first surface of the needle array 1, the puncture target approaches or contacts the puncture target storage unit 5. Thereby, the needle-like body 4 is punctured closer to the base than in the case where the needle-like body 4 is continuously arranged on the first surface without forming the puncture target storage portion 5. Is possible. In addition, by forming the puncture target storage unit 5, the needle-like body 4 existing near the outer periphery of the group of needle-like bodies 4 provided in the needle-like body region 3 has a horizontal tensile stress on the puncture target. Therefore, more effective puncture is possible even in the needle-like bodies 4 near the outer periphery of the needle-like body 4 group.

  In the present invention, the puncture target accommodating portion refers to a region having a small roughness that does not have a needle-like structure and occupies a region that is larger than the interval between two needle-like members. In the needle-like body array 1 shown in FIG. 1, the puncture target storage portion 5 is formed at a position lower than the base portion of the needle-like body 4, but has the same height as the base portion. Also good. In that case, what is necessary is just to arrange | position at a distance longer than the shortest distance of the area | region pinched | interposed into the two acicular bodies 4 contained in the acicular body area | region 3. FIG. However, in the present invention, it is preferable that the puncture target storage portion 5 is formed at a position lower than the base portion of the needle-like body 4. In addition, the number and shape of the puncture target storage portions 5 included in one needle array 1 are not particularly limited. That is, as shown in FIG. 1A, it is composed of four sides each parallel to two straight lines that are formed by the needles 4 included in the rows and columns of the group of needles 4 arranged in a matrix. A region other than the rectangular needle-shaped body region 3 may be used as the puncture target storage unit 5, and the needle-shaped body region 3 including the needle-shaped body 4 is configured as a circle or an ellipse. It is good. When the puncture target storage unit 5 is formed at a position lower than the base of the needle-like body 4, the end of the first surface, that is, the surface adjacent to the first surface and the first surface A flat portion having the same height as the base portion of the needle-like body 4 may be formed in the vicinity of the boundary with the surface, and the puncture target storage portion 5 existing between two adjacent needle-like body regions 3 may be formed. A flat portion having the same height as the base portion of the needle-like body 4 may be formed therein. For example, the puncture target storage unit 5 may be a donut shape so as to surround the needle-shaped body region 3, and is formed at random on an arbitrary region of the first surface of the needle-shaped body array 1. Also good. Further, the number of needle-like bodies 4 included in one needle-like body region 3 may be the same over the entire surface of the needle-like body array 1 or may be different. Moreover, the area of all the acicular body area | regions 3 comprised by the acicular body array 1 may be the same, or may differ.

  The material for the needle-like body array is not particularly limited as long as it has sufficient mechanical properties to hold the needle-like body. For example, metals such as stainless steel, silicon, Mg-based compounds and Ti-based compounds, for example, inorganic materials such as quartz and ceramics, biocompatible materials such as medical silicone resins, such as polylactic acid, polyglycolic acid, poly Biodegradable materials with biocompatibility such as lactic acid glycolic acid copolymer, polycitric acid, polymalic acid, polyamino acid, maltose, dextran, and other organic materials such as other biocompatible and biodegradable polymers And so on.

  However, the needle array of the present invention is preferably made of a biocompatible material. By using a biocompatible material, it is possible to reduce the influence on the living body even if the needle-like body array is damaged when it is applied to living body skin and a part of the needle array is left in the living body. Examples of materials having biocompatibility include biocompatibility and biodegradability such as inorganic compounds such as Mg compounds and Ti compounds, polyglycolic acid, polycitric acid, polymalic acid, polyamino acid, maltose, and dextran. And organic polymers having the same.

  Moreover, the needle-shaped object array of the present invention may form a through hole in the needle-shaped object or in the vicinity of the needle-shaped object. By providing the through-hole, it can be suitably used for a device configured to collect and / or supply body fluid and / or drug solution through the through-hole.

  In addition, the shape, dimensions, constituent materials, and the like of the acicular array of the present invention are not particularly limited, and may be appropriately designed according to the use / specification. For example, when a needle-like body is used for the purpose of transdermal administration, it is desirable that the diameter is several μm to several hundred μm and the length is about several tens μm to several hundred μm.

  The effect of the acicular array according to the present invention is shown using FIG. FIG. 2 (a) shows a conventional needle array 101, and FIG. 2 (b) shows a needle array 110 according to the present invention. In the conventional acicular body array 101, the acicular bodies 102 are continuously formed on the substrate 103. When the object 104 is punctured with the conventional needle-shaped object array 101, a portion having a shallow depth of puncture is generated at the center of the needle-shaped object array 101. That is, when a needle-like body exists continuously over a wide range as in a conventional needle-like body array, the needle-like body has an effect like a column, and the puncture target 104 is held near the tip of the needle-like body 102. There is a risk of doing. If the needle-like body 102 of the conventional needle-like body array 101 has a large pitch, it may be possible to puncture relatively well. It can be considered that the density of the needle-like bodies 102 is reduced, the needles 102 cannot withstand the stress in the lateral direction, and are damaged. Furthermore, it is conceivable to increase the height of the needle-like body 102 and puncture efficiently, but the puncture depth changes depending on how the force is applied during puncture, and breakage occurs during puncture due to an increase in aspect ratio. There is a possibility that it becomes easy to do.

  On the other hand, the needle-shaped object array 110 according to the present invention includes a plurality of needle-shaped object regions 120, and includes a puncture object storage unit 130 in a region surrounding the needle-shaped object regions 120. . According to such a configuration, since the puncture target 150 is stored in the puncture target storage unit 130, it is possible to more effectively puncture the needle-shaped object 140 into the puncture target 150, and the needle-shaped object array 110 can be punctured. It is possible to obtain a good puncture depth for all the needle-like bodies 140 existing on the entire surface. In addition, since a horizontal tensile stress acts on the puncture target 150 with respect to the needle-like body 140 existing around the needle-like body region 120, puncture becomes easier. In addition, by selectively disposing the needle-like bodies 140 instead of continuously, it is possible to reduce the breakage of the needle-like bodies 140 such as bending or bending without spreading the entire puncture region. . According to the acicular array 110 according to the present invention, particularly when puncturing a stretchable object (for example, living skin), the end of the acicular array 110 is relatively good due to the stretchability of the target. In contrast to the puncture, it is difficult to generate a tensile or compressive stress on the object in the center, and even if it is difficult to puncture, the entire needle-like body 140 provided in the needle-like body array 110 is good. It is possible to obtain a puncture.

  The needle-shaped array may be directly manufactured by a method known per se, for example, precision machining or the like, and is manufactured by transfer molding using a mold or a duplicate plate by a method known per se. Also good. Any such manufacturing method is within the scope of the present invention. Hereinafter, the manufacturing method of the said acicular body array is demonstrated.

  A needle-shaped body manufacturing method suitable for manufacturing the needle-shaped body array of the present invention will be described with reference to FIG. The method for manufacturing an acicular array according to the present invention includes a step of forming an etching mask having a thickness distribution on a substrate, a step of performing anisotropic etching on the substrate from the side on which the etching mask is formed, and a base portion Providing a puncture target storage section on the puncture target.

<Process for forming etching mask with thickness distribution>
First, an etching mask having a thickness distribution is formed.

  An etching mask 202 is formed on the substrate 201 (FIG. 3A). The etching mask 202 preferably has a thickness distribution like the etching mask 203 shown in FIG. That is, the height is changed in the thickness direction, the thickness in the vicinity of the edge of the etching mask 203 is made thinner than the thickness in the etching mask 203, and the etching mask is directed from the vicinity of the edge of the etching mask 203 toward the inside. It is preferable to continuously change the thickness of 203 (FIG. 3B). Thus, as the etching described later proceeds, the mask is gradually removed from the edge of the etching mask 203, and the etching selectivity between the substrate 201 and the etching mask 203 (the etching rate of the substrate 201 with respect to the etching rate of the etching mask 203). It is possible to manufacture a needle-like body having a taper angle corresponding to the ratio of

  The etching mask 202 or 203 may be formed on the first surface of the substrate 201 in accordance with the arrangement of the needles to be formed on the first surface of the substrate 201. Therefore, when a plurality of needle-like bodies are to be formed, a plurality of etching masks 202 or 203 may be formed in an array. By forming a plurality of etching masks 202 or 203 in an array, it is possible to manufacture a needle-like array in which a plurality of needle-like bodies are arranged in an array. At this time, if the pattern layout of the etching mask 202 or 203 is changed, the interval and the number of needles can be controlled. For example, in order to form the needle-like body array 1 shown in FIG. 1, an etching mask 202 or 203 arranged at a narrow pitch so as to correspond to the needle-like body 4 included in the needle-like body region 3, A plurality may be arranged. Therefore, the formation pattern of the etching mask 202 or 203 may be formed in accordance with the target needle pattern.

  By changing the pattern diameter of the etching mask 202 or 203, the diameter of the needle-shaped body to be manufactured can be controlled.

  The substrate 201 for forming the etching mask 202 or 203 is preferably a material having processing characteristics suitable for an etching process described later. For example, a silicon substrate, a sapphire substrate, a quartz substrate, or the like may be used.

  As a mask material for the etching mask 202 or 203, it is only necessary that the etching rate of the etching mask 202 or 203 is smaller than the etching rate of the substrate 201 in the step of closely contacting the substrate 201 and performing etching described later. For example, examples of the material of the etching mask may be an oxide film of the substrate, a nitride film of the substrate, and a metal material.

  As a method for forming the etching mask 202 or 203 on the substrate 201, a known patterning method may be used as appropriate. For example, as a patterning method, a method such as a method by exposure and development (this is a method in which a pattern portion can be controlled by a photomask to be used), a droplet discharge method (a method in which droplets are discharged only to a pattern portion), etc. It may be used.

  As a method of giving the etching mask 202 a thickness distribution, for example, the mask material is reflowed, the exposure amount of the mask material is controlled using a gray scale mask, and the droplet dropping amount of the mask material is adjusted using an inkjet apparatus. Or the like.

<Step of performing anisotropic etching on the substrate from the side on which the etching mask is formed>
Next, etching is performed on the entire substrate 201 from the side on which the etching mask 202 or 203 is formed (FIG. 2C), and the acicular body 204 is manufactured (FIG. 2D).

  The etching method may be an anisotropic etching method in which the etching rate of the substrate 201 and the etching mask 202 or 203 are different, and a known method can be used as appropriate. For example, dry etching using a dry etching apparatus using a discharge method such as RIE, magnetron RIE, ECR, ICP, NLD, microwave, and helicon wave may be performed.

  At this time, the tip angle of the needle-like body 204 can be controlled by the etching selectivity of the substrate 201 with respect to the etching mask 202 or 203. When the etching selectivity is high, the tip angle of the needle-like body 204 is sharp and the height tends to be high. When the etching selectivity is low, the tip angle tends to be wide and the height tends to be low. The etching selectivity can be controlled not only by selecting materials for the substrate 201 and the etching mask 202 or 203 but also by various conditions during etching (for example, pressure and process gas flow rate).

Further, the etching mask 202 or 203 is gradually removed, and finally the etching mask 202 or 203 converges to a minute range and then completely removed to form the needle-like body 204. Therefore, the etching mask It is possible to manufacture the needle-like body 204 having a sharp tip shape without causing contamination due to dropping off 202 or 203. (Fig. 2 (d))
Alternatively, the etching may be stopped while the etching mask 202 or 203 remains (FIG. 2C), and the etching mask 202 or 203 may be peeled off. At this time, it becomes possible to manufacture the needle-like body 204 that has the effect of reducing the chipping of the tip portion at the time of piercing while leaving the flat shape only at the tip portion.

  Here, a method using an etching mask is shown, but the production of the needle-like array of the present invention is not limited to this, and may be produced using other fine processing techniques. Here, examples of the fine processing technique include a fine cutting technique using an end mill and a processing technique using a laser beam.

<Process for forming a puncture target storage portion on a substrate>
Next, the puncture target storage unit 205 is formed on the substrate 201.

  In the region surrounding the needle-like body region 205 including the needle-like body 204 of the substrate 201, a surface lower than the base portion of the needle-like body 204 is formed to provide a recess, thereby forming the puncture target storage portion 206. A needle array 209 is obtained (FIG. 3E). Here, as a method of forming the puncture target storage unit 206, a known processing technique can be used. Examples of such a processing technique include a fine cutting technique using an end mill, a processing technique using a laser beam, and the like.

  In the above-described method, an example of the method of forming the puncture target storage portion 206 after forming the etching mask 202 or 203 on the substrate 201 and forming the needle-like body 204 by etching is shown. However, in the method of forming the needle-like body array in the present invention, the puncture target storage portion 206 may be formed before the needle-like body 204 is formed.

  For example, an example of such a method is shown in FIG. A recess 302 is formed on the substrate 301 by a known processing technique. Examples of the processing technique may be a micro-processing technique such as etching, a micro-cutting technique using an end mill, and a processing technique using a laser beam.

  Next, an etching mask 303 is formed in the recess 302. As described above, the etching mask 303 may be the etching mask 304 having a thickness portion distribution (FIG. 4C). The etching mask 304 may be formed by the method described above.

  Next, the entire substrate 301 is etched from the side on which the etching mask 303 or 304 is formed (FIG. 4D). As a preferable example of the etching method, the above-described method may be used. As shown in FIG. 4D, the etching may be terminated with the etching mask left, and a needle-like body 305 may be formed with a flat shape remaining only at the tip portion. Etching may be performed up to the completely removed state to form the needle-like body 306 shown in FIG.

  When the needle-like array 309 is formed in this way, since the needle-like body 306 is formed at the location where the concave machining has been performed, the puncture target storage portion 307 is formed at the same height as the base of the needle-like body 306, A flat portion 308 is formed outside the puncture target storage portion 307 (FIG. 4E).

  In addition, the method for manufacturing the needle-shaped body array according to the present invention includes a step of using the needle-shaped body array manufactured as described above as a mother mold and producing a duplicate plate from the mother mold, and transfer processing molding using the duplicate plate. And a step of performing. By producing a replica plate having a high mechanical strength that is integrally formed, a large number of needle-like arrays can be manufactured using the same replica plate. Therefore, it is possible to reduce the production cost and increase the productivity. In addition, since the transfer material can be selected without considering the processing characteristics for microfabrication, in particular, a needle-like body made of a biocompatible material can be suitably manufactured.

  Hereinafter, specifically, as an example, using FIG. 5, the needle-like array 209 manufactured by the manufacturing method shown in FIG. 3 described above is used as a mother mold, a template layer 401 is formed, and a replica plate 402 is formed based on the template layer 401. The transfer processing molding of the needle-shaped body array comprising forming will be described.

<Needle transfer processing molding>
First, a template layer 401 for forming the replica plate 402 is formed in contact with the surface on which the needle-like bodies 204 of the needle-like body array 209 are formed (FIG. 5A).

  Next, the acicular array 209 and the template layer 401 are separated to obtain a duplicated plate 402 (FIG. 5B).

  As a method of separating the needle-like body array 209 and the template layer 401, separation by a physical peeling force or a selective etching method may be used.

  Next, the replica plate 402 is filled with the needle-shaped body material 403 (FIG. 5C). Here, the needle-shaped body material 403 is not particularly limited, but is preferably a material that is less irritating to the living body. Moreover, it is preferable to have flexibility so that the surface can be uniformly pressed against the curved surface. An example of the material of the acicular body material 403 may be any of the materials of the acicular body array as described above. In particular, for example, it is preferable to use medical silicone resin, maltose, dextran, or the like as the acicular material 403.

  After the needle-shaped body material 403 is cured, it is released from the replica plate 402 to obtain a transfer-shaped needle-shaped body array 404 (FIG. 5D).

<Processing of the puncture target storage unit>
In addition, the method for manufacturing the needle-shaped object array according to the present invention uses the needle-shaped object array 208 having the needle-shaped object 204 on the base 207 obtained in FIG. A storage part may be formed.

  See FIG. The original plate 208 is filled with the replica plate material, and after the transfer molding, the replica plate 501 is formed by curing and releasing (FIG. 6B). Thereafter, the ejector pins 503 are inserted into the region corresponding to the puncture target storage unit 505 with respect to the duplicate plate 501 and filled with the needle-shaped object array material 502 (FIG. 6C). Here, before inserting the ejector pin 503, the duplicate plate 501 corresponding to the region where the ejector pin 503 is inserted may be scraped.

  After the acicular body material 502 is cured, the mold is released to obtain an acicular array 504 (FIG. 6D).

  As described above, an ejector pin can be used at the time of transfer. By using an ejector pin, it is possible to perform mold release for lubrication. In addition, by using the ejector pins in this way, it is possible to form the puncture target storage portion when transferring the needle-like body array from the duplicate plate. Further, by adjusting the shape and initial position of the ejector pin, it is desirable in the step of transferring and molding the needle-shaped body array from the duplicate plate without forming the puncture target storage portion at the stage of forming the original plate (or mold). It is possible to provide the puncture target storage portion in the needle-shaped body array with the area and / or depth (or height).

<Example 1>
A method for manufacturing an example of an acicular array according to the present invention will be described with reference to FIGS. The acicular body array manufactured here includes a plurality of acicular body regions 3 including a plurality of acicular bodies 4 on a base as shown in FIG. 1, and is further formed in a region surrounding the acicular body region 3. This is a needle-like body array 1 having a puncture target storage unit 5.

  First, a silicon wafer (thickness: 525 μm, 42 mm × 42 mm) was prepared as a substrate.

  Please refer to FIG. Next, a general-purpose thick film photoresist (manufactured by Clariant, trade name: AZ PLP) as an etching mask was coated on the silicon wafer 601 with a film thickness of 13 μm using a spray coating method. By using a photolithography method as a unit, circular dot patterns having a diameter of 80 μm arranged in a 3 × 3 array at intervals of 200 μm were formed into a 3 × 3 lattice at intervals of 1.2 mm.

The etching mask was heated in a clean oven at 150 ° C. for 30 minutes for reflow. The resist shape after reflow had a thickness distribution, and the thickest part of the resist at the center was 20 μm. (Fig. 6 (a))
The surface of the substrate 601 where the etching mask 602 was formed was etched until the etching mask was completely removed by performing ICP (Inductively Coupled Plasma) etching using a fluorine-based gas. At this time, as a result of measuring the etching rate of the etching mask 602 and the silicon substrate 601, the etching selectivity between the silicon substrate 601 and the etching mask 602 was about 11.

Next, the substrate 604 after the entire surface etching was observed with a scanning electron microscope. It was confirmed that a conical needle-like body 603 having a base portion diameter of about 100 μm, a height of about 220 μm, and a tip angle of about 25 ° was formed. (Fig. 6 (b))
Next, using a dicing apparatus, recesses 606 having a width of 600 μm and a depth of 100 μm are formed on both sides of the three needle-like body regions 605 included in one row of the nine needle-like body regions 605 previously formed in an array. The recesses 606 adjacent to each other were formed so as to have a distance of 1.2 mm. Four more recesses 606 were made so as to be perpendicular to the four recesses 606 so that the adjacent recesses 606 had a spacing of 1.2 mm. Thereby, the recessed part 606 formed by dicing was arrange | positioned in parts other than the acicular body area | region 605. FIG. Therefore, each of the needle-like body regions 605 is a convex portion of 600 μm in length and width, and a total of nine needle-like body regions 605 that are the convex portions are provided with 3 × 3 needle-like bodies. The needle-like object array 608 having such a structure was a 42 mm × 42 mm needle-like object array including a total of 81 needle-like objects 603 and a puncture target storage unit 607 (FIG. 7C).

<Example 2>
Hereinafter, a method for producing a needle-like body by transfer processing will be described.

  Using the acicular body array 608 manufactured in Example 1 as an original plate, a nickel layer having a film thickness of 300 nm is formed on the surface having the acicular body by vapor deposition, and the nickel layer is used as a seed layer for plating. Thus, 1 mm of nickel was formed.

  Next, a silicon substrate was dissolved using a potassium hydroxide aqueous solution having a concentration of 25 wt% and a liquid temperature of 90 ° C. to produce a replica plate made of nickel.

  Using this duplicated plate, maltose and dextran were used as the needle-shaped array material, and transferred and molded by the imprint method. Thereafter, it was confirmed that an acicular array having the same shape as the original plate was formed.

  The needle-like body of the present invention can be applied not only to medical treatment but also to various fields that require fine needle-like structures. For example, it is also useful as a needle-like body used for MEMS devices, drug discovery, cosmetics, and the like. is there.

The figure which shows typically the acicular body array according to this invention. Sectional drawing which shows the example of a needle-shaped body array according to a prior art example and this invention typically. Sectional drawing which shows the example of the manufacturing method of the acicular body array according to this invention. Sectional drawing which shows the example of the manufacturing method of the acicular body array according to this invention. Sectional drawing which shows the transfer process shaping | molding process in the manufacturing method of the acicular body array according to this invention. Sectional drawing which shows the transfer process shaping | molding process in the manufacturing method of the acicular body array according to this invention. The figure which shows the example of the manufacturing method of the acicular body array according to this invention.

Explanation of symbols

1, 101, 110, 208, 209, 309, 404, 504, 608 Needle array 2, 103, 207 Base 3, 120, 205 Needle region 104, 150 Puncture target 201, 301, 601, 604 Substrate 302 , 606 Recess 202, 303 Etching mask 203, 304, 602 Etching mask (after deformation)
4, 102, 140, 204, 305, 306, 603 Needle-like body 5, 130, 206, 307, 505, 607 Puncture target storage part 308 Flat part 401 Mold layer 402, 501 Replica plate 403, 502 Needle-like body array material 503 Ejector pin

Claims (5)

  A needle-like object array comprising: a base; a needle-like body formed in a needle-like body region on the first surface of the base; and a puncture target storage portion formed in a region surrounding the needle-like body region.   2. The needle-shaped object array according to claim 1, wherein a surface corresponding to the puncture target storage portion on the first surface is lower than a surface corresponding to a base of the needle-shaped object in the needle-shaped region. .   The needle array according to claim 1 or 2, wherein the needle array is made of a biocompatible material. A method for manufacturing the acicular array according to any one of claims 1 to 3,
A step of forming an etching mask having a thickness distribution on the substrate in accordance with the target needle pattern,
Forming an acicular body by performing anisotropic etching on the substrate from the side on which the etching mask is formed;
Providing a puncture target accommodation portion in a region surrounding the region where the needle-like body is formed. A method for producing the acicular array according to any one of claims 1 to 3,
A step of forming an etching mask having a thickness distribution on the substrate in accordance with the target needle pattern,
Forming an acicular body by performing anisotropic etching on the substrate from the side on which the etching mask is formed;
A step of obtaining a needle-like body array by providing a puncture target storage portion in a region surrounding the region where the needle-like body is formed, and using the obtained needle-like body array as a mother die, and producing a duplicate plate from the mother die Process,
Performing transfer processing molding using the duplicate plate;
A method comprising:

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