JP2009227304A - Mask transfer container having deposition-conductive effect - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mask transfer container having a deposition-conductive effect. <P>SOLUTION: The mask transfer container structure is capable of preventing generation of static electricity when mask transfer containers are deposited, and includes a bottom base 10 and a shell body 2. The shell body 2 selectively places a cover on the bottom base 10 to form a storage space for placing a mask 50. A passage for conducting the static electricity is formed between the bottom base 10, the shell body 2, and the mask 50. A handle 24 to be communicated with the passage is provided on an upper surface of the shell body. The bottom base 10 has at least one conductive structure and a touch-conductive unit 40. The conductive structure has conductive pillars 32 and 35 which are connected to the passage and projected downward. The touch-conductive unit 40 is brought into contact with the handle 24 of the lower transfer container when the transfer containers are deposited adjacent to each other. The static electricity between the adjacent transfer container and the mask 50 can be conducted via the touch-conductive unit 40 and a conductive unit 30 to reduce breakage of the mask pattern. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an electrostatic removal technique for a mask transfer container, and specifically refers to a transfer container that prevents the generation and residual of static electricity, and efficiently derives the static electricity of the transfer container and the mask. The present invention relates to an electrostatic removal technique for a mask transfer container that reduces costs.

  The core chip needs to be further miniaturized and improved in performance due to the continuous development of electronic products with characteristics such as light and thin, high frequency, high performance, etc. Therefore, the wire diameter of the integrated circuit on the chip has been reduced, There is a need to be able to accommodate more integrated circuits and units. Therefore, the wire diameter of existing integrated circuits has evolved from an early 0.25 μm process to 90-45 nm, and the wafer size has evolved from 8 inches to 12 inches. The damage that occurs when defective products occur is surprising. It should be. During the semiconductor manufacturing process, the effects of various different causes on the environment include various fine particles, harmful substances released by moisture or solvent, etc., and factors such as heating, deposition, electrostatic or chemical changes during the manufacturing process are present. In order to deal directly with the yield of the manufacturing process by adhering to the surface of the mask or wafer, and to deal with this problem, manufacturers have made improvements to the aforementioned problems and factors in order to avoid unexpected cleaning or process failures. There is a need to reduce repetition and further reduce wafer production costs.

  However, under the influence of the miniaturization of the integrated circuit, the conventional process performed in a simple dust-free chamber gradually becomes unsatisfactory, and further high cleanliness is required. Therefore, in this industry, US Pat. No. 4,532,970 ( Developed wafer and mask sealed transfer systems such as US Pat. No. 4,534,389 (Patent Document 1) and US Pat. No. 4,534,389 (Patent Document 2). It can be ensured that particulates, moisture or harmful substances in the room environment do not enter the environment near the mask or wafer.

  However, regardless of mask circle fabrication, sputtering, photolithography, etching, mask cleaning, etc. during the semiconductor manufacturing process, all of them require the use of many solvents and chemicals. Hazardous substances such as fine particles are naturally generated inside the mounting system, and static electricity is generated due to different causes such as laser irradiation or heat reception during the mask manufacturing process. After the mask is placed in the transfer container, these harmful substances are generated. The fine particles of the substance are adsorbed to the mask surface quickly and in large quantities due to the influence of static electricity, destroying the mask surface pattern, causing a phenomenon of exposure failure, greatly affecting the yield of the wafer, and thus contaminating the mask pattern. Cleaning operation is necessary, and when the dirt reaches a certain level, it is necessary to recreate the mask pattern. , Equipment, an increase in the cost of time and materials, increase the operating costs of semiconductor manufacturers.

Therefore, a transfer container that protects and transfers the mask must have an electrostatic removal design, and a transfer container made of existing plastics has an anti-static material added to the material at the time of injection. Achieving the purpose of electrostatic, anti-static composite materials usually have conductive and anti-electrostatic functions by mixing additives with conductive performance in the plastic base, and these typical additions The agent has carbon black, metal fiber, nanometer conductive metal powder, etc. (polyurethane-polyaniline, conductive carbon black, etc.), but such a method has a very high material cost and a transfer container manufacturing cost. Not only increases, but also continually releases harmful substances such as sulfur and ammonia, and the mask surface crystal is taken as an example, and its chemical formula is (NH ₄ ) ₂ SO ₄ , and this crystal is different from the above Ammonia (NH ₄ ⁺ ) and sulfate ions (SO ₄ ²⁻ ) are released due to the cause and combined with a high-energy light source and environmental moisture, etc. After the mask is cleaned and stored for a certain period of time, it is in the photolithography process If the exposure is attempted by irradiating with ultraviolet rays, a crystal phenomenon occurs.

Accordingly, electrostatic deriving structures for use in various mask transfer containers have been developed in the market. For example, the “antistatic device for mask carrying case” disclosed in Taiwan Patent No. M252140 (Patent Document 3) is based on And having a plurality of localization parts on the periphery of the base, and providing a plurality of localization members corresponding to each localization part, including an anti-electrostatic material for static electricity on the internal metal mask and the photomask. It leads to the base and leads to the metal flat base where the transfer container is placed through the latch structure, but such a structural design is not only complicated, but also the conductive effect is not good and the static electricity is derived smoothly Unusable phenomena often occur. Further, when the transfer container for the mask is transported, in order to save the space for transporting the carriage, the amount of the mask transported is increased. Generally, the transfer container is deposited one by one. Since the conductive structure combined with the transfer containers adjacent to each other is not provided, the static electricity of the transfer container on the upper layer cannot be derived, and the transfer containers adjacent to each other cannot be connected to each other by the swinging of the transport. The transfer container whose upper layer is not in contact with the metal platform generates a capacitor effect and increases the electrostatic reaction. Fine particles adhere to the internal mask due to static electricity, increasing the time and cost of mask cleaning or pattern re-formation.
U.S. Pat.No. 4,532,970 U.S. Pat.No. 4,534,389 Taiwan Exclusive Notification M252140 Specification

Therefore, the present invention has been made in view of the above-described problems, and in consideration of the problems faced by the existing mask transfer container, the demand for deriving the static electricity at the time of deposition of the transfer container is studied in detail. Develop a transfer container with conductive action, efficiently solve the inconvenience and difficulty when removing the electrostatic charge of the transfer container, and allow the transfer containers stacked on each other to efficiently derive the static electricity This is an issue.
SUMMARY OF THE INVENTION An object of the present invention is to provide a transfer container having a conductive conductive action for deriving the static electricity of mask transfer containers stacked on top and bottom and preventing the capacitor effect from occurring in an upper transfer container. And
It is another object of the present invention to provide a mask loading container having a deposited conductive action that maintains the reliability of conduction and prevents the problem of poor conduction.

Based on this, the present invention specifically realizes the above effects and objects based on the following technical means.
The mask transfer container having a deposited conductive action according to the invention of claim 1 is a base that can be used for housing the mask and on which the mask can be placed, and has a metal plate on the top surface of the base. A base formed by forming a conductive path between the metal plate and the mask;
A shell that can be selectively covered or separated corresponding to the base, and a metal internal lining that contacts the metal plate is provided in the shell, and a metal internal lining and a conductive passage are formed on the upper surface of the shell. A shell for providing
A conductive unit provided on the base, wherein the conductive unit is capable of forming a conductive path between the base metal plate and the external conductor; and
A touching unit provided on a handle side of an adjacent transfer container to which a lower layer corresponding to the bottom is adjacent, the touching unit having a conductive block, and the conductive block is adjacent to the bottom metal plate and the lower layer. And at least one conductive unit that forms a conductive path between the handle side of the loading container.

A second aspect of the present invention is the mask transfer container having the deposited conductive action according to the first aspect, wherein the base is provided with a mounting table on the metal plate-like surface that corresponds to each other and is arranged in parallel. Further, the bottom base upper surface is provided with a locking member for attaching a mask corresponding to one end of the two mounting bases.
According to a third aspect of the present invention, in the mask transfer container having the deposited conductive action according to the first aspect, the conductive unit forms a receiving groove base on the bottom base, and the conductive unit includes the first conductive column and the second conductive column. A metal elastic member having a column, having a contact step through which the first conductive column can penetrate the bottom surface of the receiving groove base, contacting with an external conductor, and generating an restoring force outwardly from the upper end of the first conductive column; The two conductive columns are provided at the upper end of the elastic member, and the second conductive columns are configured to be able to keep contact with the bottom surface of the metal piece.

According to a fourth aspect of the present invention, in the mask transfer container having the deposited conductive action according to the first aspect, a positioning groove corresponding to a handle is formed on the bottom surface of the bottom base, and the handle of the lower transfer container is used as the upper layer transfer container. It can be fitted into the stereotaxic groove, the tactile unit is provided on both sides of the stereotaxic groove, and the conductive block can contact both sides of the handle.
According to a fifth aspect of the present invention, in the mask transfer container having a deposited conductive action according to the first aspect, one or a plurality of convex ring teeth are formed on an outer edge of the conductive block of the touching unit to improve a fixing effect. It is characterized by.
According to a sixth aspect of the present invention, in the mask transfer container having a deposited conductive action according to the first aspect, the contact unit forms a through-hole corresponding to the conductive block on the metal plate of the base, and a compression screw plug is provided. It is used, and after passing through the through hole from above the metal plate, it is fixed on the conductive block.

The mask transfer container having the deposited conductive action of the present invention has at least the following effects.
1. The mask transfer container of the present invention utilizes the design of the touching unit and the conductive structure so that the transfer containers that are deposited on each other can smoothly derive the static electricity in order, and the transfer container does not derive the static electricity. This prevents the capacitor effect from occurring, further enhances the electrostatic removal effect, smoothly derives the static electricity inside the transfer container and the mask, and the anti-static material within the transfer container material. Therefore, the manufacturing cost of the transfer container can be reduced.
2. The mask transfer container having the deposited conductive action of the present invention reduces the adhesion of fine particles or harmful substances to the mask surface through the design of the conductive unit, and the fine particles or harmful substances are transferred to the inner wall of the transfer container or It is possible to avoid adhesion on the mask, improve the cleanliness of the environment, and cause the adhesion and atomization of fine particles on the mask surface, crystals, etc., and not only improve the yield of wafer fabrication, but also repeat the process and The time and expense of repeated cleaning can be reduced, and the operation cost can be reduced.
3. The conductive unit of the mask transfer container having the deposition conductive action can generate recovery force, so that the fluency of the conductive path can be secured, and the reliability of electrostatic derivation is ensured without causing the phenomenon of the passage rupture. can do.

A preferred embodiment of a mask transfer container having a deposited conductive action according to the present invention will be described with reference to the drawings.
As shown in FIGS. 1 to 3, a mask transfer container having a deposited conductive action according to an embodiment of the present invention relates to a transfer container that accommodates a mask, and includes a base 10, a shell 2, and at least one conductive unit. 30 and at least one tactile unit 40, in which the shell 2 can be selectively covered latch or separated corresponding to the base 10, and the shell 2 covers the base 10. In some cases, an accommodation space for allowing the mask 50 to stand between the two is formed, and the conductive unit 30 can form a conductive path mechanism for conducting the mask 50 in the transfer container and the external conductor, and is adjacent to the touching unit 40 vertically. Conductive passages are formed in conduction with the transfer container to be deposited.

  As can be seen from FIGS. 2, 3, and 4 in detail, a positioning groove 11 for covering and latching a plurality of shells 2 is formed on the periphery of the base 10, and a metal plate 15 is provided on the upper surface of the base 10, and The base 10 fixes two mutually parallel mounting bases 17 above the metal plate 15, and a locking member 18 is provided between the base 10 and one end of the two mounting bases 17 above the metal plate 15, The base 10 forms a “U” -shaped support that supports the mask using the two mounting tables 17 and the locking member 18, and the metal piece 15 receives the mounting table 17 and the locking member 18. The storage area 13 is formed in the center of the bottom surface of the bottom base 10 so that the storage area 13 can be fitted to the upper and lower adjacent transfer containers.

1, 2, or 4 The shell 2 is composed of a plastic outer shell 20, an upper wing piece 22, and a metal inner lining 25, and the localization groove 11 of the base 10 is formed on the inner bottom edge of the outer shell 20. The outer shell 20 of the shell 2 can be selectively fitted to or separated from the bottom body 10 using the latch member 21, and the upper wing piece 22 includes a fixing screw. 23 is penetrated through the outer shell 20 and fixed to the metal inner lining 25, and the upper wing piece 22 is formed of a conductive material, and a handle 24 is formed at the center of the upper edge of the upper wing piece 22 to The transfer container is held and moved, and the handle 24 appropriately corresponds to the storage area 13 on the bottom surface of the base 10. Further, the metal inner lining 25 of the shell 2 has a metal screw 27 for fixing the screw 23 corresponding to the upper wing piece 22, and when the shell 2 is covered on the base 10, the metal The inner lining 25 has a bottom edge that suitably contacts the metal piece 15 of the base 10, and a plurality of conductive pressure control members 26 that can press and lock the mask 50 are provided on the inner edge of the metal inner lining 25. The mask 50 is positioned on the mounting table 17 and the locking member 18 of the bottom base 10.

  The conductive unit 30 is provided on the base 10, and each conductive unit 30 forms an accommodation groove base 31 having a “U” -shaped cross section on the base 10, and at least one recovery in the accommodation groove base 31. A conductive column capable of generating a force is provided, and an embodiment of the present invention has two conductive columns as examples, and the two conductive columns are defined as a first conductive column 32 and a second conductive column 35, respectively, The first conductive column 32 has a contact step 33 that can penetrate the bottom surface of the receiving groove base 31, and is provided with a metal elastic member 34 that can contact the conductor of the work table and generate an outward recovery force at the upper end of the first conductive column 32. The second conductive pillar 35 is provided at the upper end of the elastic member 34, and the first and second conductive pillars 32 and 35 are separated from each other by the action of the elastic member 34, and the second conductive pillar 35 is mounted on the bottom. 10 is brought into contact with the bottom surface of the metal piece 15, and the transfer container and the mask 50 are placed on the mounting table 1. 7. The conductor of the external work table and the conductive path mechanism can be formed via the first and second conductive columns 32 and 35 of the conductive unit 30 and the elastic member 34 via the locking member 18 and the metal piece 15. Like that.

  The tactile unit 40 is provided on both sides of the storage area 13 of the base 10, and each tactile unit 40 forms a fixed column 41 on both sides corresponding to the storage area 13 of the base 10, and conducts in the fixed column 41. The block 42 is embedded, and one or a plurality of convex ring teeth 420 are formed on the outer edge of the conductive block 42. The convex ring teeth 420 can also select a helical pattern tooth or the like, improving the fixing effect, Each conductive block 42 forms a flat contact surface 421 corresponding to the periphery of the handle 24 of the transfer container adjacent to each other, increasing the area (see FIG. 5) where the conductive block 42 and the handle 24 are in contact, The touching unit 40 forms a through hole 44 corresponding to the conductive block 42 on the metal plate 15 of the base 10, and penetrates from above the metal plate 15 through the through hole 44 using the compression screw plug 45. Fixed on the conductive block 42 , It handles 24 of the shell 2 of the transfer vessel, a metal inner lining 25, the metal strip 15, to form a conductive path between the compression screw plug 45 and the conductive block 42.

  In this way, when the transfer container is deposited adjacent to each other in the vertical direction, static electricity can be derived through the touching unit 40, and at the same time, the static electricity on the transfer container and the mask 50 is transferred to the conductive unit 30. The transfer container deposited conductive structure can be derived from the above and has a reliable conductive effect.

  Through the above design, in the present invention, as shown in FIGS. 3, 4, and 5, the mask 50 is placed on the mounting table 17 and the locking member 18 of the bottom 10 of the transfer container during actual use and operation. When the shell 2 covers the bottom base 10, the conductive base 17 and the metal internal lining pressure control member 26 are in contact with the mask 50 and the metal internal lining 25 is connected to the conductive unit 30 through a design in which the metal piece 15 is in contact with each other, and the first conductive column 32 and the second conductive column 35 of the conductive unit 30 act by the outward recovery force of the elastic member 34. By receiving, the second conductive column 35 can come into contact with the metal piece 15 and the first conductive column 32 can come into contact with the conductor when the transfer container is placed on the workbench to form a completed conductive path mechanism. Smooth discharge of static electricity on the loading container and the mask 50 It can be.

  When the transfer containers are to be deposited one layer at a time, as shown in FIGS. 5, 6, and 7, the upper transfer container is transferred to the lower transfer container by the storage area 13 of the base 10. Corresponding to the handle 24 of the shell 2, the handle 24 can be fitted in the storage region 13, the upper layer transfer capacity is deposited, and the blade 22 on the shell 2 of the lower transfer container is deposited. When the transfer containers stacked on each other are limited to the upper surface, the conductive block 42 of the upper transfer container touching unit 40 does not contact the handle 24 of the lower transfer container shell 2. The conductive block 42, the handle 24, the fixing screw 23, the metal inner lining 25, and the conductive path between the metal piece 15 and the compression screw plug 45 guide the static electricity onto the lower transfer container. The electrostatic unit 30 is used to conduct static electricity on the conductor of the workbench to achieve static elimination. To avoid the occurrence of the capacitor effect.

  Therefore, the mask transfer container of the present invention does not require the addition of an anti-electrostatic material in the material, can reduce the manufacturing cost of the transfer container, and at the same time, fine particles or harmful substances adhere to the mask surface such as the mask 50. , Avoiding the adhesion of fine particles or harmful substances to the inner wall or mask of the transfer container, improving the cleanliness of the environment, improving the yield of wafer fabrication, and repeating the process and cleaning Reduce operating time and expenses, and reduce operating costs efficiently.

  Furthermore, the first and second conductive columns 32 and 35 are connected to the metal piece 15 and the external conductor by the outwardly supported characteristics of the elastic member 34 received by the first conductive column 32 and the second conductive column 35 of the conductive unit 30. Can be maintained, the fluidity of the conductive passage can be ensured, the phenomenon of passage breakage does not occur, and the reliability of electrostatic discharge is ensured.

As described above, the mask transfer container having a deposited conductive action utilizes the design of the touching unit and the conductive structure, and the transfer containers that are deposited on each other can smoothly derive the static electricity in order, Avoiding the generation of the capacitor effect due to the fact that static electricity is not derived, further enhancing the effect of removing static electricity, smoothly deriving the static electricity inside the transfer container and the mask, and within the material of the transfer container There is no need to add an anti-electrostatic material to the substrate, and the manufacturing cost of the transfer container can be reduced.
In addition, the mask transfer container having the deposited conductive action reduces the adhesion of fine particles or harmful substances to the mask surface through the design of the conductive unit, and the fine particles or harmful substances are deposited on the inner wall of the transfer container or the mask. Adhesion can be avoided, the cleanliness of the environment can be improved, and the adhesion and atomization of fine particles on the mask surface, crystallization, etc., not only improve the yield of wafer fabrication, but also repeat and repeat the process. Time and expense can be reduced and operating costs can be reduced.
Furthermore, since the conductive unit of the mask transfer container having the deposited conductive action can generate a restoring force, the fluency of the conductive path can be secured, and the reliability of the electrostatic derivation is ensured without causing the phenomenon of the passage rupture. can do.
Needless to say, the present invention is not limited to the above-described embodiment as long as the features of the present invention are not impaired.

It is three-dimensional decomposition explanatory drawing of the transfer container of this invention. It is local three-dimensional decomposition explanatory drawing of the transfer container of this invention. It is a top view explanatory drawing of the base of the transfer container of this invention. It is local composition cross-sectional explanatory drawing of the transfer container of this invention. It is a three-dimensional external view explanatory drawing of the transfer container of this invention, The upper layer adjacent transfer container and the state before deposition are demonstrated. It is an external view explanatory drawing after deposition of the transfer container of this invention. It is side surface explanatory drawing after deposition of the transfer container of this invention, and the aspect to which an adjacent transfer container guides an electrostatic current is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Base 11 Stereotaxic groove 13 Accommodating area 15 Metal piece 17 Mounting base 18 Locking member 2 Shell body 20 Outer shell 21 Latch member 22 Upper wing piece 23 Fixing screw 24 Handle 25 Metal internal lining 26 Pressure control member 27 Metal screw column 30 Conductivity Unit 31 Housing groove base 32 First conductive column 33 Contact stage 34 Elastic member 35 Second conductive column 40 Touching unit 41 Fixed column 42 Conductive block 420 Convex ring tooth 421 Flat contact surface 44 Through hole 45 Compression screw cap 50 Mask

Claims (6)

Used to house the mask,
A base on which a mask can be placed, having a metal plate on the top surface of the base, and forming a conductive path between the metal plate and the mask;
A shell that can be selectively covered or separated corresponding to the base, and a metal internal lining that contacts the metal plate is provided in the shell, and a metal internal lining and a conductive passage are formed on the upper surface of the shell. A shell for providing
A conductive unit provided on the base, wherein the conductive unit is capable of forming a conductive path between the base metal plate and the external conductor; and
A touching unit provided on a handle side of an adjacent transfer container to which a lower layer corresponding to the bottom is adjacent, the touching unit having a conductive block, and the conductive block is adjacent to the bottom metal plate and the lower layer. A mask transfer container having a deposited conductive action, comprising: at least one conductive unit that forms a conductive path between the handle side of the mounting container.   The base is provided with two mounting tables corresponding to the metal plate-like surface and arranged parallel to each other, and the top surface of the base corresponds to one end of the two mounting tables, and a locking member for attaching a mask The mask transfer container having a deposited conductive action according to claim 1, wherein:   The conductive unit forms a receiving groove base on the base, the conductive unit has a first conductive column and a second conductive column, and the first conductive column has a contact step that can penetrate the bottom surface of the receiving groove base; A metal elastic member that is in contact with the outer conductor and the upper end of the first conductive column can generate an outward recovery force is provided, the second conductive column is provided at the upper end of the elastic member, and the second conductive column is in contact with the bottom surface of the metal piece. 2. The mask transfer container having a deposited conductive action according to claim 1, wherein the mask transfer container is capable of being held.   A positioning groove corresponding to a handle is formed on the bottom surface of the bottom base, the handle of the lower layer transfer container can be fitted into the positioning groove of the upper layer transfer container, the touching unit is provided on both sides of the positioning groove, and the conductive block 2. The mask transfer container having a deposited conductive action according to claim 1, wherein the mask can contact both sides of the handle.   2. The mask transfer container having a deposited conductive action according to claim 1, wherein one or a plurality of convex ring teeth are formed on an outer edge of the conductive block of the touching unit to improve a fixing effect.   The contact unit is formed with a through hole corresponding to a conductive block on a metal plate on the bottom, and is fixed on the conductive block after passing through the through hole from above the metal plate using a compression screw plug. A mask transfer container having a deposited conductive action according to claim 1.

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