JP2009196006A - Working waste fluid processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a waste fluid processing device enabling the easy replacement of the filter of a waste fluid filtering means for filtering working waste fluid to produce fresh water. <P>SOLUTION: This working waste fluid processing device includes: a waste fluid storage tank, the waste fluid filtering means; a fresh water storage tank; a pure water generating means; a pure water temperature control means; a control means; an operation panel; and a device housing. The device housing includes a bottom wall, an upper wall, a left sidewall, a right sidewall, a rear wall, and a front opening. The device housing includes a bottom wall, an upper wall, a left sidewall, a right sidewall, a rear wall, and a front opening. The waste fluid filtering means is disposed on the front opening side, and withdrawable through the front opening. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a processing waste liquid processing apparatus that is attached to a processing apparatus such as a cutting apparatus that cuts a workpiece such as a semiconductor wafer and processes a waste liquid of a processing liquid supplied during processing.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. Then, the semiconductor wafer is cut along the streets to divide the region in which the device is formed to manufacture individual semiconductor devices. In addition, optical device wafers with gallium nitride compound semiconductors laminated on the surface of a sapphire substrate are also divided into individual optical devices such as light emitting diodes and laser diodes by cutting along the streets, and are widely used in electrical equipment. ing.

  Cutting along the streets of the above-described semiconductor wafer, optical device wafer or the like is usually performed by a cutting device called a dicer. This cutting apparatus includes a chuck table for holding a workpiece such as a semiconductor wafer, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and supplying processing water to the cutting blade. A cutting water supply means for cooling the cutting blade by supplying the cutting water to the cutting blade that rotates, and supplying the cutting water to the cutting portion of the workpiece by the cutting blade. Carry out cutting work.

As described above, cutting waste generated by cutting silicon or a gallium nitride compound semiconductor is mixed in the machining fluid supplied at the time of cutting. Since the processing waste liquid mixed with the cutting waste made of this semiconductor material contaminates the environment, it is reused or discarded after the cutting waste is removed using the waste liquid treatment device. (For example, refer to Patent Document 1.)
Japanese Patent Laid-Open No. 2004-230527

The waste liquid treatment apparatus includes a waste liquid storage tank that stores the processing waste liquid generated by the processing liquid supplied during the processing of the processing apparatus, a pump that feeds the processing waste liquid stored in the waste liquid storage tank, A filter for filtering the processing waste liquid fed by the pump into fresh water, a waste liquid filtering means comprising a fresh water receiving pan that supports the filter, and a fresh water storage tank for storing fresh water purified by the waste liquid filtering means; A pure water feed pump for feeding the fresh water stored in the fresh water storage tank; a pure water generating means including an ion exchange means for purifying the fresh water fed by the fresh water feed pump into pure water; Pure water temperature adjusting means for adjusting the pure water purified by the water generating means to a predetermined temperature, control means for controlling each of the constituent means, and input means for inputting processing information and the like to the control means. And comprising a control panel comprising a display means for displaying the operating state or the like by the fine control means, each of these configuration means is disposed within the apparatus housing.
However, it is necessary to replace the filter of the waste liquid filtering means for filtering the processing waste liquid to obtain fresh water when the processing waste or the like accumulates and the filter function is lost. Therefore, it is desirable that the filter can be easily replaced.

  The present invention has been made in view of the above-mentioned facts, and a main technical problem thereof is to provide a waste liquid treatment apparatus that can easily replace a filter of waste liquid filtering means for filtering processing waste liquid and purifying it into fresh water. It is in.

In order to solve the above main technical problem, according to the present invention, the processing liquid supplied at the time of processing by the processing apparatus is stored in the waste liquid storage tank that stores the processing waste liquid generated by the processing, and the waste liquid storage tank. Waste liquid feed pump that feeds the processed waste liquid, a filter that filters the process waste liquid fed by the waste liquid feed pump to purify it into fresh water, and a fresh water receiving pan that detachably supports the filter A fresh water storage tank for storing fresh water purified by the waste liquid filtration means, a fresh water feed pump for feeding fresh water stored in the fresh water storage tank, and a fresh water feed pump. Pure water generating means including ion exchange means for purifying clean water into pure water, pure water temperature adjusting means for adjusting pure water purified by the pure water generating means to a predetermined temperature, and each of the above-mentioned constituent means An operation panel including control means for controlling, input means for inputting processing information to the control means, and display means for displaying an operation status or the like by the control means, and an apparatus housing for housing the constituent means. In the processing waste liquid treatment equipment provided,
The device housing includes a bottom wall, an upper wall, a left side wall, a right side wall, a rear wall, and a front side opening,
The waste liquid filtering means is arranged on the front opening side and configured to be drawable through the front opening.
A processing waste liquid treatment apparatus is provided.

Guide rails extending in the front-rear direction are disposed on the inner surfaces of the left and right side walls of the apparatus housing, and a fresh water receiving pan of the waste liquid filtering means is placed on the guide rails so that it can be pulled out.
The fresh water storage tank is disposed below the waste liquid filtering means, the fresh water receiving pan of the waste liquid filtering means and the fresh water storage tank are connected by a flexible hose, and a flexible hose is provided on the rear wall side of the waste liquid filtering means. It is desirable that a hose support plate is provided that prevents the flexible hose from being bent downward by its own weight and maintains the flexible hose so that the fresh water receiving pan side is always positioned at a high position.

  In the processing waste liquid treatment apparatus according to the present invention, the waste liquid filtering means is arranged on the front opening side of the apparatus housing and is configured to be drawable through the front opening, so that the waste liquid filtration means can be obtained by pulling out the waste liquid filtering means through the front opening. It becomes easy to replace the filter supported detachably on the fresh water receiving pan constituting the means.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a processing waste liquid treatment apparatus configured according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows components of a processing waste liquid treatment apparatus constructed according to the present invention in accordance with the flow of processing waste liquid.
The processing waste liquid processing apparatus in the illustrated embodiment includes a waste liquid tank 2 that stores processing waste liquid, and a waste liquid feed pump 3 that supplies the processing waste liquid stored in the waste liquid tank 2. The waste liquid tank 2 is connected by a pipe 20 to a processing waste liquid sending means provided in a processing device such as a cutting device (not shown). Therefore, the processing waste liquid sent from the processing waste liquid sending means provided in the processing apparatus such as a cutting apparatus (not shown) is introduced into the waste liquid tank 2 through the pipe 20. A waste liquid feed pump 3 that feeds processing waste liquid is disposed on the upper wall of the waste liquid tank 2.

  The processing waste liquid fed by the waste liquid feed pump 3 is sent to the waste liquid filtering means 4 through a pipe 30 made of a flexible hose. The waste liquid filtering means 4 includes a fresh water receiving pan 41 and a first filter 42 a and a second filter 42 b disposed on the fresh water receiving pan 41. The first filter 42 a and the second filter 42 b are detachably disposed on the fresh water receiving pan 41. Note that an electromagnetic on-off valve 43a and an electromagnetic on-off valve 43b are disposed in the pipe 30 connecting the waste liquid feed pump 3 to the first filter 42a and the second filter 42b. When the electromagnetic on-off valve 43a is energized (ON) and opened, the processing waste liquid fed by the waste liquid feed pump 3 is introduced into the first filter 42a, and when the electromagnetic on-off valve 43b is energized (ON) and opened. The processing waste liquid fed by the waste liquid feed pump 3 is introduced into the second filter 42b. The processing waste liquid introduced into the first filter 42a and the second filter 42b is filtered by the first filter 42a and the second filter 42b, and the cutting waste mixed in the processing waste liquid is captured and purified into fresh water. It flows out into the fresh water receiving pan 41. The fresh water receiving pan 41 is connected to the fresh water storage tank 5 by a pipe 44 made of a flexible hose. Therefore, the fresh water flowing out to the fresh water receiving pan 41 is sent to the fresh water storage tank 5 through the pipe 44 made of a flexible hose and stored. Is done.

  The pipe 30 is provided with pressure detecting means 31 for detecting the pressure of the processing waste liquid supplied to the first filter 42a and the second filter 42b of the waste liquid filtering means 4, and this pressure detecting means 31. Sends a detection signal to the control means described later. For example, when the electromagnetic on / off valve 43a is energized (ON) and the processing waste liquid is filtered by the first filter 42a, if the detection signal from the pressure detecting means 31 reaches a predetermined pressure value or more, The control means which will be described later judges that the processing waste has accumulated on the first filter 42a and has lost its function as a filter, and deenergizes (OFF) the electromagnetic on / off valve 43b and energizes (ON) the electromagnetic on / off valve 43b. ) And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 1st filter 42a to the 2nd filter 42b. Thus, based on the message displayed on the display means, the operator can sense that the first filter 42a has reached the end of its life and replace the filter. If the detection signal from the pressure detecting means 31 reaches a predetermined pressure value or more in a state where the electromagnetic on-off valve 43b is energized (ON) and the processing waste liquid is filtered by the second filter 42b, The control means which will be described later judges that the processing waste has accumulated on the second filter 42b and has lost its function as a filter, and deenergizes (OFF) the electromagnetic on-off valve 43b and energizes the electromagnetic on-off valve 43a (ON ) And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 2nd filter 42b to the 1st filter 42a.

  The fresh water sent from the waste liquid filtering means 4 through the pipe 44 made of a flexible hose and stored in the fresh water storage tank 5 is fed by the fresh water feed pump 50 and is supplied with pure water through the pipe 51 made of the flexible hose. 6 is sent. The pure water generating means 6 in the illustrated embodiment includes a support base 61, a partition plate 611 erected on the support base 61, and an ultraviolet irradiation means 62 disposed on the rear side of the partition plate 611 in the support base 61. The first ion exchanging means 63a and the second ion exchanging means 63b provided with an ion exchange resin arranged on the front side of the partition plate 611 in the support base 61, and the rear side of the partition plate 611 in the support base 61. A precision filter 64 is provided. The first ion exchange means 63a, the second ion exchange means 63b, and the precision filter 64 are detachably disposed on the support base 61. The fresh water fed by the fresh water feed pump 50 and sent through the pipe 51 made of a flexible hose is introduced into the ultraviolet irradiation means 62 where it is sterilized by being irradiated with ultraviolet rays (UV). The fresh water sterilized by the ultraviolet irradiation means 62 is introduced into the first ion exchange means 63a or the second ion exchange means 63b via the pipe 65. The pipe 65 is provided with an electromagnetic on-off valve 66a and an electromagnetic on-off valve 66b. When the electromagnetic on-off valve 66a is energized (ON) and opened, the sterilized fresh water is introduced into the first ion exchange means 63a, and when the electromagnetic on-off valve 66b is energized (ON) and opened, the sterilized fresh water is introduced. Is introduced into the second ion exchange means 63b. The fresh water introduced into the first ion exchange means 63a or the second ion exchange means 63b is purified to pure water by exchanging ions. The purified water purified by ion exchange in this way is mixed with fine substances such as resin waste of ion exchange resin constituting the first ion exchange means 63a and the second ion exchange means 63b. There may be. For this reason, in the illustrated embodiment, the pure water purified by the ion exchange of the fresh water by the first ion exchange means 63a and the second ion exchange means 63b is supplied to the precision filter 64 through the pipe 67 as described above. The fine filter 64 is used to capture fine substances such as resin waste of ion exchange resin mixed in pure water.

  The pipe 67 is provided with a pressure detection means 68 for detecting the pressure of pure water fed from the first ion exchange means 63a and the second ion exchange means 63b to the precision filter 64, The pressure detection means 68 sends a detection signal to the control means described later. For example, if the detection signal from the pressure detection means 68 reaches a predetermined pressure value or more, the control means described later determines that a fine substance such as resin waste has accumulated on the precision filter 64 and the filter function has been lost. And it displays on the display means provided in the operation panel mentioned later. Thus, based on the message displayed on the display means, the operator can sense that the precision filter 64 has reached the end of its life and replace the filter.

  The pipe 67 is provided with a specific resistance meter 69 for detecting the specific resistance of pure water supplied to the precision filter 64 from the first ion exchange means 63a or the second ion exchange means 63b. The specific resistance meter 69 sends a detection signal to the control means described later. In a state where the electromagnetic switching valve 66a is energized (ON) and fresh water is purified to pure water by the first ion exchange means 63a, the control means to be described later has a detection signal from the resistivity meter 69 of a predetermined value. If it has reached (for example, 10 MΩ · cm) or less, the control means described later determines that the pure water purification capacity by the first ion exchange means 63a has declined, and deenergizes (OFF) the electromagnetic on-off valve 66a, The electromagnetic on-off valve 66b is energized (ON). And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 1st ion exchange means 63a to the 2nd ion exchange means 63b. Thus, based on the message displayed on the display means, the operator can sense that the first ion exchange means 63a has reached the end of its life, and can exchange the ion exchange resin of the first ion exchange means 63a. In addition, when the electromagnetic on-off valve 66b is energized (ON) and the purified water is purified to pure water by the second ion exchange means 63b, the detection signal from the resistivity meter 69 is a predetermined value (for example, 10 MΩ · cm) or less, the control means to be described later determines that the pure water purifying capacity of the second ion exchange means 63b has declined, and deenergizes (OFF) the electromagnetic on-off valve 66b to turn off the electromagnetic on-off valve 66a. Energize (ON). And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 2nd ion exchange means 63b to the 1st ion exchange means 63a.

  The pure water purified by the pure water generating means 6 is sent to the pure water temperature adjusting means 7 through a pipe 60 made of a flexible hose. The pure water sent to the pure water temperature adjusting means 7 is adjusted to a predetermined temperature (for example, 23 ° C.) and circulated through the piping 70 to a working fluid supply means equipped in a processing device such as a cutting device (not shown). It is done.

  The waste liquid tank 2, the waste liquid filtering means 4, the pure water generating means 6, the pure water temperature adjusting means 7, the respective pipes and the like described above are disposed in the apparatus housing 10 shown in FIGS. FIG. 2 is a perspective view of the apparatus housing 10, and FIG. 3 is a perspective view of the walls constituting the apparatus housing 10, which will be described later, and the waste liquid tank 2, waste liquid filtering means 4, The state where the production | generation means 6, the pure water temperature adjustment means 7, each piping, etc. are arrange | positioned is shown. The apparatus housing 10 in the illustrated embodiment includes a frame 110 that forms a rectangular parallelepiped storage chamber, a bottom wall 121, an upper wall 122, a left wall 123, a right wall 124, and a rear wall 125 that are attached to the frame 110. And an opening / closing door 126 that is mounted on the front side of the frame body 110 and opens and closes the front opening 101 formed on the front side of the frame body 110.

  On the bottom wall 121 of the apparatus housing 10 thus configured, the waste liquid tank 2, the fresh water storage tank 5 and the pure water generating means 6 are disposed. The waste liquid tank 2 is disposed on the rear wall 125 side of the bottom wall 121 of the apparatus housing 10, the fresh water storage tank 5 is disposed in the center of the bottom wall 121 adjacent to the waste liquid tank 2, and the pure water generating means 6 is a fresh water storage unit. Adjacent to the tank 5, the bottom wall 121 is disposed on the front opening 101 side (opening / closing door 126 side).

  In the illustrated embodiment, the pure water generating means 6 is arranged so as to be drawn out through the front opening 101 of the apparatus housing 10. That is, a pair of guide rails 130, 130 arranged opposite to each other and extending in the front-rear direction in parallel with the upper surface of the bottom wall 121 are arranged at the lower end portions of the left side wall 123 and the right side wall 124 that constitute the apparatus housing 10. It is installed. By placing the support 61 of the pure water generating means 6 on the pair of guide rails 130, 130, the pure water generating means 6 passes through the front opening 101 of the apparatus housing 10 along the pair of guide rails 130, 130. It is supported so that it can be pulled out. Therefore, as shown in FIG. 4, the pure water generating means 6 is arranged on the support 61 constituting the pure water generating means 6 by pulling out the pure water generating means 6 along the pair of guide rails 130 and 130 through the front opening 101 of the apparatus housing 10. In addition, the first ion exchange means 63a and the second ion exchange means 63b and the precision filter 64 can be easily exchanged.

  In the processing waste liquid treatment apparatus in the illustrated embodiment, the waste liquid filtering means 4 is disposed so as to be able to be drawn out through the front opening 101 of the apparatus housing 10 above the pure water generating means 6 and the fresh water storage tank 5 in the apparatus housing 10. ing. That is, the inner surface of the left side wall 123 and the right side wall 124 constituting the device housing 10 is disposed opposite to each other and is parallel to the upper surface of the bottom wall 121 (parallel to the pair of guide rails 130 and 130). A pair of guide rails 140, 140 extending in the direction are disposed. By placing the fresh water receiving pan 41 of the waste liquid filtering means 4 on the pair of guide rails 140, 140, the waste liquid filtering means 4 is pulled out through the front opening 101 of the apparatus housing 10 along the pair of guide rails 140, 140. Supported as possible. In order to facilitate the operation of pulling out the waste liquid filtering means 4, a handle 411 protruding downward is provided at the front end of the fresh water receiving pan 41 constituting the waste liquid filtering means 4. Accordingly, as shown in FIG. 5, the waste liquid filtering means 4 is pulled out through the front opening 101 of the apparatus housing 10 along the pair of guide rails 140 and 140, so that it can be attached to and detached from the fresh water receiving pan 41 constituting the waste liquid filtering means 4. Exchange of the arranged first filter 42a and second filter 42b can be easily performed. Since the waste liquid filtering means 4 is arranged in such a manner that it can be drawn out, the pipe connecting the fresh water receiving pan 41 of the waste liquid filtering means 4 and the fresh water storage tank 5 is connected by a pipe 44 made of a flexible hose. .

  As described above, in connection with the connection between the fresh water receiving pan 41 of the waste liquid filtering means 4 and the fresh water storage tank 5 by the pipe 44 made of a flexible hose, the rear wall 125 side of the waste liquid filtering means 4 in the apparatus housing 10 is connected. Is provided with a hose support plate 150 for supporting a pipe 44 made of a flexible hose. The hose support plate 150 is configured to be inclined so as to increase toward the rear wall 125 side and to increase toward the right wall 124 side, and the pipe 44 made of a flexible hose is caused by its own weight. The pipe 44 made of a flexible hose is prevented from being bent downward so that the fresh water receiving pan 41 side is always positioned at a high position. Therefore, the fresh water that has flowed out into the fresh water receiving pan 41 can flow into the fresh water storage tank 5 through the piping 44 made of a flexible hose by its own weight.

  In the processing waste liquid treatment apparatus in the illustrated embodiment, the pure water temperature adjusting means 7 is disposed above the hose support plate 150 in the apparatus housing 10. That is, the pure water temperature adjusting means 7 is placed on a support member (not shown) mounted on the left side wall 123 and the right side wall 124 constituting the apparatus housing 10 and fixed by appropriate fixing means.

  The processing waste liquid treatment apparatus in the illustrated embodiment includes a control means 8 for controlling the operation of each of the above-described constituent means, and an operation panel 9 for inputting processing information such as waste liquid treatment start information to the control means 8. The control means 8 and the operation panel 9 are integrally configured in the illustrated embodiment. The control means 8 and the operation panel 9 configured as described above are arranged above the waste liquid filtering means 4 in the apparatus housing 10. That is, the control means 8, the control means 8 and the operation panel 9 are placed on a support member (not shown) mounted on the left side wall 123 and the right side wall 124 constituting the apparatus housing 10 and fixed by appropriate fixing means. The At this time, the operation panel 9 is positioned on the front side of the device housing 10 (the side disposed on the opening / closing door 126 side). The operation panel 9 is provided with an input unit 91 for inputting processing information and the like, a display unit 92 for displaying processing information by the control unit 8 and the like.

  The processing waste liquid treatment apparatus in the illustrated embodiment is configured as described above, and when the operator inputs waste liquid treatment start information from the operation panel 9, the control means 8 controls each of the above-mentioned construction means to discharge the waste liquid as described above. Perform processing tasks. When the waste liquid treatment operation described above is executed, the control means 8 deenergizes (OFF) the electromagnetic on-off valve 43a of the waste liquid filtering means 4 and energizes (ON) the electromagnetic on-off valve 43b as described above. If the electromagnetic on-off valve 43b is deenergized (OFF) and the electromagnetic on-off valve 43a is energized (ON), the first filter 42a to the second filter 42b or the second filter 42b to the first The fact that the filter 42a has been switched is displayed on the display means 92 of the operation panel 9. Thus, based on the message displayed on the display means 92, the operator senses that the first filter 42a or the second filter 42b has reached the end of its life, opens the open / close door 126 of the apparatus housing 10, and filters the waste liquid. The means 4 is pulled out through the front opening 101 of the device housing 10 along a pair of guide rails 140, 140. At this time, the operator holds and pulls the handle 411 provided on the fresh water receiving pan 41 constituting the waste liquid filtering means 4. Then, the operator replaces the first filter 42a or the second filter 42b according to the message displayed on the display means 92.

  Further, the control means 8 determines that the function of the precision filter 64 has been lost if the detection signal from the pressure detection means 68 reaches a predetermined pressure value or more during execution of the above-described waste liquid treatment work. Are displayed on the display means 92 of the operation panel 9. Based on the message displayed on the display means in this manner, the operator senses that the precision filter 64 has reached the end of its life, opens the door 126 of the apparatus housing 10, and moves the pure water generating means 6 to the pair of guide rails 130. , 130 through the front opening 101 of the device housing 10. At this time, the operator holds and pulls the handle 612 provided on the partition plate 611 standing on the support base 61 constituting the pure water generating means 6. Then, the operator replaces the precision filter 64 according to the message displayed on the display means 92.

  Furthermore, when the waste liquid treatment operation described above is being performed, the control means 8 detects that the detection signal from the resistivity meter 69 has reached a predetermined value (for example, 10 MΩ · cm) or less, and the electromagnetic open / close valve of the pure water generation means 6. If the electromagnetic on-off valve 66b is energized (ON) by de-energizing 66a or the electromagnetic on-off valve 66a is energized (ON) by de-energizing (OFF) the electromagnetic on-off valve 66b, The display means 92 of the operation panel 9 displays that the switch from the first ion exchange means 63a to the second ion exchange means 63b or the second ion exchange means 63b to the first ion exchange means 63a. Thus, based on the message displayed on the display means 92, the operator senses that the first ion exchange means 63a or the second ion exchange means 63b has reached the end of its life, and opens the door 126 of the apparatus housing 10. The pure water generating means 6 is pulled out through the front opening 101 of the apparatus housing 10 along the pair of guide rails 130 and 130. At this time, the operator grasps and pulls the handle 612 provided on the partition plate 611 erected on the support base 61 constituting the pure water generating means 6 as described above. Then, the operator replaces the ion exchange resin of the first ion exchange means 63a or the second ion exchange means 63b in accordance with the message displayed on the display means 92.

  The processing waste liquid treatment apparatus in the illustrated embodiment is configured as described above, and the waste liquid tank 2, the fresh water storage tank 5, and the pure water generating means 6 are disposed on the bottom wall 121 of the apparatus housing 10 to generate pure water. The waste liquid filtering means 4 is disposed above the means 6, the pure water temperature adjusting means 7 is disposed above the hose support plate 150 (above the waste liquid tank 2), and the control means 8 and the pure water temperature adjusting means 7 are disposed above the pure water temperature adjusting means 7. Since the operation panel 9 is arranged, the entire apparatus can be made compact without impairing the operability by the operator, and a clean room with a high maintenance cost can be used effectively. Further, the pure water generating means 6 is arranged on the front opening 101 side of the apparatus housing 10 and is configured so as to be able to be drawn through the front opening 101, so that the first ion exchange means 63a and the second ion exchange means 63b The precision filter 64 can be easily replaced. Furthermore, since the waste liquid filtering means 4 is also configured to be drawn out through the front opening 101 of the apparatus housing 10, the first filter 42a and the second filter 42b can be easily replaced.

Explanatory drawing which shows the component of the processing waste liquid processing apparatus comprised according to this invention in this invention according to the flow of processing waste liquid. The perspective view of the apparatus housing which arrange | positions the component of the processing waste liquid processing apparatus shown in FIG. FIG. 3 is a perspective view illustrating a state in which constituent walls of a processing waste liquid treatment apparatus are disposed in the apparatus housing through the walls constituting the apparatus housing illustrated in FIG. 2. The perspective view which shows the state which pulled out the pure water production | generation means which comprises the process waste liquid processing apparatus shown in FIG. 3 through the front side opening of an apparatus housing. The perspective view which shows the state which pulled out the waste liquid filtration means which comprises the process waste liquid processing apparatus shown in FIG. 3 through the front side opening of the apparatus housing.

Explanation of symbols

2: Waste liquid tank 3: Waste liquid feed pump 31: Pressure detection means 4: Waste liquid filtration means 41: Fresh water receiving pan 42a: First filter 42b: Second filters 43a, 43b: Electromagnetic switching valve 5: Fresh water storage tank 50 : Fresh water feed pump 6: pure water generating means 61: support base 62: ultraviolet irradiation means 63a: first ion exchange means 63b: second ion exchange means 64: precision filters 66a, 66b: electromagnetic on-off valve 68: pressure Detection means 69: Specific resistance meter 7: Pure water temperature adjustment means 8: Control means 9: Operation panel 91: Input means 92: Display means 10: Device housing 126: Opening / closing lid

Claims (3)

A waste liquid storage tank for storing a processing waste liquid generated by processing with a processing liquid supplied during processing of the processing apparatus, a waste liquid feed pump for supplying the processing waste liquid stored in the waste liquid storage tank, and the waste liquid A filter for purifying processed waste liquid fed by a feed pump to be purified into fresh water, a waste liquid filtering means having a fresh water receiving pan that detachably supports the filter, and storing fresh water purified by the waste liquid filtering means Pure water generation comprising a fresh water storage tank, a fresh water feed pump for feeding fresh water stored in the fresh water storage tank, and an ion exchange means for purifying the fresh water fed by the fresh water feed pump into pure water Means, pure water temperature adjusting means for adjusting the pure water purified by the pure water generating means to a predetermined temperature, control means for controlling the respective constituent means, and processing information is input to the control means. A control panel having a display means for displaying the operating state or the like by the input means and control means, in the processing waste liquid treatment apparatus comprising a housing for accommodating the respective configuration means,
The device housing includes a bottom wall, an upper wall, a left side wall, a right side wall, a rear wall, and a front side opening,
The waste liquid filtering means is arranged on the front opening side and configured to be drawable through the front opening.
A processing waste liquid treatment apparatus characterized by that.   Guide rails extending in the front-rear direction are disposed on the inner surfaces of the left and right side walls of the apparatus housing, and the fresh water receiving pan of the waste liquid filtering means is placed on the guide rail so as to be drawable. The processing waste liquid processing apparatus according to claim 1.   The fresh water storage tank is disposed below the waste liquid filtering means, the fresh water receiving pan of the waste liquid filtering means and the fresh water storage tank are connected by a flexible hose, and on the rear wall side of the waste liquid filtering means 3. A hose support plate is provided for preventing the flexible hose from being bent downward by its own weight and maintaining the flexible hose so that the fresh water receiving pan side is always positioned at a high position. Processing waste liquid treatment equipment.

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