JP2009180681A - Foreign substance inspecting apparatus - Google Patents

Foreign substance inspecting apparatus Download PDF

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Publication number
JP2009180681A
JP2009180681A JP2008021794A JP2008021794A JP2009180681A JP 2009180681 A JP2009180681 A JP 2009180681A JP 2008021794 A JP2008021794 A JP 2008021794A JP 2008021794 A JP2008021794 A JP 2008021794A JP 2009180681 A JP2009180681 A JP 2009180681A
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opening
ray
irradiation
shielding
shape
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JP2008021794A
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JP5114636B2 (en
Inventor
Sumimitsu Saito
寿満 斉藤
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System Square Inc
株式会社 システムスクエア
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a foreign substance inspecting apparatus which is excellent in safety and practicality, by which the amount of leakage of X rays is lessened as much as possible, and the amount of measurement mistake is also lessened. <P>SOLUTION: The foreign substance inspecting apparatus has a shield box 5 having an X-ray irradiation section 3 which irradiates an object to be inspected 1 with X rays 2 from above, such that an irradiation cross-section shape is widened toward the end in a direction perpendicular to the conveying direction of the object to be inspected 1, and having an X-ray detecting section 4 which is disposed so as to face the X-ray irradiation section 3 and detects the X rays 2 passing through the object to be inspected 1, wherein a carry-in aperture 6 for carrying the object to be inspected 1 which is conveyed by a conveying mechanism 8, into the shield box 5 is disposed on one side of the shield box 5, and a carry-out aperture 7 for carrying the object to be inspected 1 out of the shield box 5 is disposed on the opposite side of the shield box 5. The whole of the carry-in aperture 6 of the shield box 5 is configured to have an aperture cross-section shape being widened toward the end and approximately coinciding with or being slightly wider than a portion of the irradiation cross-section shape of the X rays 2 which is widened toward the end and positioned on a height position corresponding to the carry-in aperture 6. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a foreign matter inspection apparatus.

  Conventionally, for example, as disclosed in Patent Document 1, an X-ray inspection unit is provided in a shielding box, and the X-ray inspection unit irradiates the inspection object with X-rays and transmits transmitted X-rays transmitted through the inspection object. There is a foreign substance inspection device that detects and inspects foreign matters.

  By the way, in such a foreign substance inspection apparatus, warmth is provided in the opening so that X-rays do not leak, or an operator is not inadvertently approached the opening by notifying that X-rays are being irradiated. For this reason, an alarm lamp that is lit in red is attached to the outer surface of the apparatus so that the optical axis thereof is substantially horizontal, thereby improving the safety of the operator.

JP 2005-308413 A

  However, the opening shape of the opening portion of the conventional foreign matter inspection apparatus is generally rectangular, and the irradiation cross section in the direction perpendicular to the direction of conveyance of the inspection object from above by the X-ray irradiation unit. It does not coincide with the cross-sectional shape of the X-ray irradiated so that the shape becomes a divergent shape.

  Therefore, when the opening is enlarged so as to cover the X-ray irradiation area, a part of the object to be inspected is located in an area that is not irradiated with X-ray and cannot be inspected (an area outside the X-ray irradiation area). Measurement error may occur, and the opening becomes uselessly wide so that X-rays are more likely to leak, while the opening is within the X-ray irradiation area. If it is made smaller, the X-ray irradiation range cannot be fully utilized, which is inconvenient.

  The alarm lamp is easy to recognize when the device is desired from a certain distance, but is difficult to recognize from an operator who performs cleaning or the like near the device, and there is a demand for improvement.

  The present invention has been made in view of the current situation as described above, and X-ray leakage is reduced as much as possible, measurement errors are reduced, and whether X-rays are irradiated or not is operated near the apparatus. It is an object of the present invention to provide a foreign matter inspection apparatus excellent in safety and practicality that can be easily recognized even by a worker who performs.

  The gist of the present invention will be described with reference to the accompanying drawings.

  An X-ray irradiation unit 3 that irradiates the inspection object 1 conveyed by the conveyance mechanism 8 with X-rays 2 from above so that the irradiation cross-sectional shape in the direction orthogonal to the conveyance direction of the inspection object 1 is divergent; On the one side of the side surface of the shielding box 5 provided with the X-ray detection unit 4 that detects the X-ray 2 that is provided in an opposed state to the X-ray irradiation unit 3 and passes through the inspection object 1, the transport mechanism An opening 6 for carrying in the inspection object 1 conveyed by 8 into the shielding box 5 is provided, and the inspection object 1 is placed on the opposite side of the side surface of the shielding box 5. 5 is a foreign matter inspection apparatus provided with an unloading opening 7 for unloading from the X-ray 2. The entire unloading opening 6 of the shielding box 5 is spread at the end corresponding to the height of the X-ray 2 Set to an opening cross-sectional shape that is approximately the same as a part of the irradiation cross-section or is slightly wider. Or the upper part of the carrying-in opening 6 of the shielding box 5 substantially coincides with a part of the divergent irradiation cross section of the X-ray 2 at the height position corresponding to the upper part, or is slightly wider. And the remaining portion excluding the upper portion of the loading opening 6 is equal to or smaller than the width of the end-expanded irradiation cross section of the X-ray 2 at the corresponding height position and the transport mechanism 8. The present invention relates to a foreign matter inspection apparatus having an opening cross-sectional shape having an opening width equal to or larger than the width of the transport surface.

  Further, the whole opening 7 of the shielding box 5 substantially coincides with a part of the divergent irradiation cross section of the X-ray 2 at the height position corresponding to this, or the slightly divergent opening. The cross-sectional shape is set, or the upper part of the carrying-out opening 7 of the shielding box 5 substantially coincides with a part of the divergent irradiation cross-section of the X-ray 2 at the height position corresponding thereto, or Set to a slightly wider divergent opening cross-sectional shape, and the remaining portion excluding the upper portion of the carrying-out opening 7 is equal to or less than the width of the divergent irradiation cross-section of the X-ray 2 at a corresponding height position and The foreign matter inspection apparatus according to claim 1, wherein an opening cross-sectional shape having an opening width equal to or greater than a width of the transfer surface of the transfer mechanism 8 is set.

  Further, a warming-like shielding member 9 for preventing leakage of the X-ray 2 from the carrying-in opening 6 or the carrying-out opening 7 of the shielding box 5 has a part of the outer surface thereof for carrying in. Provided in the shielding box 5 so as to be exposed from the opening 6 or the carrying-out opening 7, and when the X-ray 2 is irradiated from the X-ray irradiation unit 3, the carrying-in opening 6 or the carrying-out The light is applied to the outer surface of the shielding member 9 exposed from the opening 7 for use or the upper surface of the transport mechanism 8 to illuminate a predetermined range on the outer surface of the shield member 9 or the upper surface of the transport mechanism 8. A warning illumination unit 11 is provided to warn of the possibility of leakage of the X-ray 2 from the carry-in opening 6 or the carry-out opening 7 by making the portion discolored and conspicuous. In any one of Claims 1 and 2, Those of the foreign substance inspection apparatus of the mounting.

  Further, the side surface of the shielding member 5 on which the carrying-in opening 6 or the carrying-out opening 7 is provided so that the light can be irradiated over a wide range from the outer surface of the shielding member 9 to the upper surface of the transport mechanism 8. 4. The foreign matter inspection apparatus according to claim 3, wherein the warning illumination section is provided inside or outside.

  In addition, the warning illumination unit 11 includes a plurality of light emitting elements 12 at intervals where the respective irradiation ranges on the upper surface of the transport mechanism 8 of the respective light emitting elements 12 slightly overlap each other or a slight gap between the irradiation ranges. 5. The foreign matter inspection apparatus according to claim 3, wherein the foreign matter inspection apparatus is configured to be arranged in parallel in the width direction with an interval of

  6. The foreign matter inspection apparatus according to claim 5, wherein the light emitting element is a red light emitting diode.

  Since the present invention is configured as described above, X-ray leakage is reduced as much as possible, measurement errors are reduced, and even an operator working near the apparatus determines whether or not X-rays are irradiated. It becomes a foreign matter inspection device with excellent safety and practicality that can be easily recognized.

  Embodiments of the present invention that are considered suitable (how to carry out the invention) will be briefly described with reference to the drawings, illustrating the operation of the present invention.

  The inspection object 1 is carried into the shielding box 5 from the carrying-in opening 6 by the transport mechanism 8, and the transmitted X-ray 2 transmitted through the inspection object 1 is irradiated with the X-ray 2 from the X-ray irradiation unit 3. After being inspected by the X-ray detection unit 4 to determine whether or not foreign matter is mixed in, the X-ray detection unit 4 carries it out from the carrying-out opening 7.

  At this time, in the present invention, the upper part or the whole of the loading opening 6 substantially coincides with a part of the irradiation cross section of the X-ray 2 at the corresponding height position (or slightly wider than a part of the irradiation cross section). Since the opening cross-sectional shape is widened, the opening shape of the carrying-in opening 6 can be made as narrow as possible while effectively using substantially the entire irradiation region of the X-ray 2. .

  Accordingly, the amount of leakage of the X-ray 2 from the carrying-in opening 6 can be reduced, and the inspection object 1 does not enter the area outside the irradiation area of the X-ray 2 (from the irradiation area of the X-ray 2). Since the inspected object 1 having a size and shape that enters the detached area cannot pass through the loading opening 6), measurement errors are extremely unlikely to occur.

  That is, since the lower end of the conventional rectangular opening is set to be approximately the same width as the width of the conveying surface of the conveying mechanism of the X-ray divergent irradiation section, the upper side is closer to the X-ray 2 irradiation region. According to the present invention, the upper side of the loading opening 6 surely has an opening cross-sectional shape that substantially matches the irradiation cross-sectional shape of the X-ray 2, and the X-ray 2 The X-ray irradiation area can be effectively used while preventing leakage as much as possible.

  Further, the remaining width of the carry-in opening 6 except the upper portion is set to have an opening width that is equal to or smaller than the width of the divergent irradiation cross section of the X-ray 2 at the corresponding height position and larger than the width of the conveyance surface of the conveyance mechanism 8. Even when the opening cross-sectional shape is set, the X-ray 2 irradiation region can be used effectively because it has an opening width at least equal to the width of the transfer surface of the transfer mechanism 8, and the width of the X-ray 2 divergent irradiation cross-section. Since the opening width is as follows, the leakage of the X-ray 2 can be prevented as much as possible.

  Moreover, when not only the opening 6 for carrying in but the opening 7 for carrying out are comprised similarly, the leakage of the X-ray 2 can be reduced further.

  Further, for example, a warming-shaped shielding member 9 for preventing leakage of the X-ray 2 from the carrying-in opening 6 or the carrying-out opening 7 of the shielding box 5 has a part of the outer surface thereof. It is provided in the shielding box 5 so as to be exposed from the carrying-in opening 6 or the carrying-out opening 7, and when the X-ray 2 is irradiated from the X-ray irradiation unit 3, the carrying-in opening 6 or Light is applied to the outer surface of the shielding member 9 exposed from the carry-out opening 7 or the upper surface of the transport mechanism 8 to illuminate a predetermined range on the outer surface of the shielding member 9 or the upper surface of the transport mechanism 8. A warning illumination unit 11 is provided to warn of the possibility of leakage of the X-ray 2 from the carry-in opening 6 or the carry-out opening 7 by making the illumination part discolored and conspicuous. If X-ray 2 is irradiated from X-ray irradiation unit 3, In this case, the outer surface of the shielding member 9 is irradiated with light from the warning illumination unit 11 to the outer surface of the shielding member 9 exposed from the loading opening 6 or the unloading opening 7 or the upper surface of the transport mechanism 8. Alternatively, a predetermined range on the upper surface of the transport mechanism 8 is illuminated, and the illuminated portion is changed to a color different from the ground color (for example, red), so that it is noticeable, and the possibility of leakage of the X-ray 2 is warned.

  In general, since the shielding member 9 and the transport mechanism 8 are made of a resin member such as rubber, the light emitted from the warning illumination unit 11 is diffused at a wide angle, for example, a metal shielding box. 5 can be recognized from a wide angle compared to the case of irradiating 5 or attaching to the outer surface of the shielding box 5 so that its optical axis is substantially horizontal. Coupled with the fact that the predetermined range of the upper surface of the mechanism 8 is discolored, the discoloration that gives a warning naturally enters the field of view without any particular consciousness from the distance or near field. It becomes possible to recognize whether or not the line 2 is being irradiated.

  In particular, the vicinity of the carrying-in opening 6 and the carrying-out opening 7 needs to be frequently cleaned, so the degree of attention is high and the warning effect is extremely high from this point.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, the X-ray 2 is irradiated to the inspection object 1 conveyed by the conveyance mechanism 8 from above so that the irradiation cross-sectional shape in the direction orthogonal to the conveyance direction of the inspection object 1 becomes a divergent shape. One side surface of a shielding box 5 provided with an irradiation unit 3 and an X-ray detection unit 4 provided in an opposed state to the X-ray irradiation unit 3 and detecting the X-ray 2 transmitted through the inspection object 1 In addition, an opening 6 for carrying in the inspection object 1 conveyed by the conveyance mechanism 8 into the shielding box 5 is provided, and the inspection object 1 is provided on the opposite side of the side surface of the shielding box 5. Is provided with an unloading opening 7 for unloading the X-ray 2 from the unloading opening 6 or the unloading opening 7 of the shielding box 5. A part of the outer surface of the shielding member 9 is the carrying-in opening 6 or the carrying-out opening 7. A foreign matter inspection device provided on the carrying-in opening 6 side and the carrying-out opening 7 side of the shielding box 5 so as to be exposed from the shielding box 5, respectively. And all of the unloading opening 7 are set to a divergent opening cross-sectional shape that substantially coincides with a part of the divergent irradiation cross-section of the X-ray 2 at a height position corresponding thereto, and the X-ray irradiation unit 3 The X-ray 2 is irradiated with light, and light is applied to the outer surface of the shielding member 9 and the upper surface of the transport mechanism 8 exposed from the carry-in opening 6 or the carry-out opening 7. By illuminating a wide range of the outer surface of the shielding member 9 and the upper surface of the transport mechanism 8 and changing the illumination part to a color different from the ground color to make it stand out, the loading opening 6 and the unloading opening 7 The warning illumination unit 11 for warning the possibility of leakage of the X-ray 2 It is provided.

  Each part will be specifically described.

  In this embodiment, as shown in FIG. 1, a transport mechanism 8 (a belt conveyor for linear transport) is provided on the shielding box 5 supported by the legs 10. Specifically, the shielding box 5 is composed of a main body part 13 and an overhanging part 14 projecting left and right from the main body part 13, and a loading opening 6 and an unloading part are respectively provided on the side surfaces of the overhanging part 14. The opening 7 is provided in a left-right opposed state. The leg 10 has a structure in which a pair of laterally U-shaped plates 15 are connected by a rod 16, and the upper surface of the laterally U-shaped plate 15 and the shielding box 5 are formed as a shielding box 5. A transport mechanism 8 is provided between the lower opening. In the figure, reference numeral 17 denotes a belt conveyor of another apparatus arranged in parallel with the present embodiment.

  The overhanging portion 14 includes a side plate portion 18 in which the loading opening 6 (the unloading opening portion 7) is formed, a front plate portion 19 connected to the front side of the side plate portion 18, and a rear side of the side plate portion 18. The rear plate portion (not shown) connected to the upper plate portion 20 and the upper plate portion 20 connected to the upper side of the side plate portion 18 are configured.

  The front plate portion 21 provided with the touch panel monitor 22 and the ON / OFF switch 23 of the main body portion 13 of the shielding box 5 is configured to be openable and closable. The front plate portion 21 includes all of the front plate portion 19 and part of the side plate portion 18 and the upper plate portion 20.

  In the present embodiment, the carrying-in opening 6 and the carrying-out opening 7 are substantially the same as the carrying surface (the upper surface of the belt 24) of the carrying mechanism 8 formed in the side plate 18, as shown in FIG. A trapezoidal space portion extending from the upper side to the lower side surrounded by a downward concave portion composed of parallel upper side portions 25 and left and right inclined side portions 26 and 27 and a horizontal extension line of the conveyance surface of the conveyance mechanism 8. I mean.

  As shown in FIG. 3, an X-ray irradiation unit 3 for irradiating X-rays 2 in a state facing the belt 24 is provided inside the shielding box 5 and directly above the transport mechanism 8. X-ray detection comprising a line sensor (detecting X-ray 2 up to substantially the same width as the belt width) on the back surface (on the conveyance side) of the belt 24 at the substantially central position of the conveyance mechanism 8 corresponding to the section 3 Part 4 is provided. In the figure, reference numeral 28 denotes a roller around which the belt 24 is suspended. The transmitted X-rays detected by the X-ray detection unit 4 of the inspection object 1 that has passed between the X-ray irradiation unit 3 and the X-ray detection unit 4 are appropriately analyzed by a computer incorporated in the shielding box 5. The result is displayed on the touch panel monitor 22.

  As shown in FIG. 4, the X-ray irradiation unit 3 irradiates the X-ray 2 so that the irradiation cross-sectional shape in the direction orthogonal to the transport direction of the transport mechanism 8 (inspection object 1) becomes a divergent shape. All of the carrying-in opening 6 and the carrying-out opening 7 of the shielding box 5 are configured to correspond to the height position X (the same horizontal height position from the carrying surface of the carrying mechanism 8). It is set to a divergent opening cross-sectional shape that substantially coincides with a part of the divergent irradiation cross section of the line 2.

  Specifically, the X-ray irradiating unit 3 is configured so that the X-ray 2 is below the irradiation port (slit) of the X-ray irradiating unit 3 in the cross-sectional view in the direction orthogonal to the conveying direction of the conveying mechanism 8 (the It is configured to be irradiated so as to gradually widen toward the transport surface). And all of the said carrying-in opening 6 and the said carrying-out opening 7 are the irradiation cross-sectional shape of the said divergent X-ray 2 of the height position corresponding to this carrying-in opening 6 and the carrying-out opening 7. The shape of the downward concave part of the side plate part (the length of the upper side part 25 and the lengths and inclination angles of the right and left inclined side parts 26 and 27) is set so as to be a shape that substantially matches the trapezoidal shape that is partly cut. Has been.

  In the present embodiment, the irradiation width of the X-ray 2 on the transport surface of the transport mechanism 8 is configured to be substantially the same as the transport surface width.

  In this embodiment, the carry-in opening 6 and the carry-out opening 7 are configured as described above, but the width of the transport surface of the transport mechanism 8 is the irradiation width of the X-ray 2 on the transport surface. If it is narrower than the above, the upper part of the carrying-in opening 6 and the carrying-out opening 7 of the shielding box 5 is one end of the X-ray 2 radiating section of the X-ray 2 at the corresponding height position. The width of the X-ray 2 radiating cross section of the X-ray 2 at the height position corresponding to the remaining portion other than the upper portion of the carrying-in opening 6 is set to be equal to the width of the cross-sectional shape. In addition, an opening cross-sectional shape having an opening width equal to or larger than the width of the transfer surface of the transfer mechanism 8 may be set. Specifically, the opening cross-sectional shape of the remaining portion of the carry-in opening 6 may be a rectangular shape having substantially the same width as the width of the transport surface of the transport mechanism 8. In this case as well, X-ray leakage can be reduced as much as possible as in the present embodiment, and measurement errors can be greatly reduced.

  Further, as shown in FIG. 5, the shielding member 9 is provided inside the shielding box 5 at a predetermined interval along the carrying direction of the carrying mechanism 8 on the loading opening 6 side and the carrying opening 7 side. Three are provided. As the shielding member 9, a member made up of a plurality of strips is employed.

  Specifically, of the shielding member 9, only the outer surface of the shielding member 9 located closest to the loading opening 6 side and the unloading opening 7 side is externally provided from the loading opening 6 or the unloading opening 7, respectively. It is configured to be exposed.

  The warning illumination unit 11 has an outer periphery of the carrying-in opening 6 (or the carrying-out opening 7) so that the light can be irradiated over a wide range from the outer surface of the shielding member 9 to the upper surface of the transport mechanism 8. Provided in position. More specifically, the carrying-in opening 6 (or the carrying-out opening 7) is provided so as to irradiate the light over a wide range from the outer surface of the shielding member 9 to the upper surface of the transport mechanism 8. It is preferable to provide the warning illumination section 11 inside or outside the side surface 5.

  More specifically, the upper side portion 25 or the left and right inclined side portions 26 that form the downward recesses of the side plate portion 18 capable of irradiating light to both the outer surface of the shielding member 9 and the transport surface of the transport mechanism 8. 27 is preferably provided. At this time, in order to irradiate the upper side of the outer surface of the shielding member 9 as much as possible, the upper side 25 is provided so that the irradiation direction (optical axis) is vertically downward, or the inclined sides 26 and 27 ( It is good to provide in the position near the upper end side of both or any one) so that the irradiation direction may be horizontal or diagonally downward. Further, the warning illumination unit 11 is provided so as not to protrude into the loading opening 6 (or the unloading opening 7) so as not to interfere with the inspection object 1. In the present embodiment, the warning illumination unit 11 provided on the carry-in opening 6 side is described, but the same applies to the carry-out opening 7 side (the warning illumination unit on the carry-out opening 7 side). 11 is omitted.)

  In this embodiment, as shown in FIGS. 5 and 6, the side plate portion 18 is formed as an inner side surface 29 (surface facing the shielding member 9) of the upper side portion 25 that forms the downward concave portion of the side plate portion 18. It is provided between the opening member and the shielding member 9 whose outer surface is exposed. Specifically, a holding body 30 that holds a plurality of light emitting elements 12 (red light emitting diodes) constituting the warning illumination section 11 on the inner side surface 29 of the upper side section 25 so that the irradiation direction is vertically downward. Provided. The holding body 30 is attached to an attachment member 31 having an L shape in cross section, and is provided by fixing the attachment member 31 to the side plate portion 18 with a set screw 32. The light emitting elements 12 are provided on the holding body 30 so that the respective irradiation ranges a on the upper surface of the transport mechanism 8 of the light emitting elements 12 are arranged in parallel in the width direction at slightly overlapping intervals. In addition, you may arrange in parallel in the width direction by the space | interval which has a slight clearance gap between the mutual irradiation ranges a. Therefore, it is possible to irradiate light closer to the shielding member 9, and since the light emitting element 12 is not exposed to the outside, it is not obstructive and the appearance is clean.

  In the present embodiment, the warning illumination unit 11 is provided on the inner side surface 29 of the upper side 25, but may be provided on the outer side surface. Further, the warning illumination unit 11 is composed of a plurality of red light emitting diodes. For example, even with other light emitting elements, the outer surface of the shielding member 9 and the transport surface of the transport mechanism 8 are changed from the state before irradiation. Other configurations may be adopted as long as they are conspicuous. Further, considering the contact between the shielding member 9 and the object 1 to be inspected, all of the carrying-in opening 6 and the carrying-out opening 7 have the X-ray 2 divergent irradiation cross section at the height position corresponding thereto. It may be set to an opening cross-sectional shape having a slightly wider end-like shape than this end-expanding-like irradiation cross section similar to a part. Specifically, the width may be set to be about several mm to 2 cm.

  Since the present embodiment is configured as described above, the inspection object 1 is carried into the shielding box 5 through the carrying-in opening 6 while pushing up the shielding member 9 by the conveyance mechanism 8, and the X-ray irradiation unit 3 performs X-rays. 2, the transmitted X-ray 2 transmitted through the inspection object 1 is detected by the X-ray detection unit 4 to inspect whether foreign matter is mixed in, and then carried out while pushing up the shielding member 9. It is carried out from the shielding box 5 through the opening 7 for use.

  At this time, all of the carrying-in opening 6 and the carrying-out opening 7 are set to have a divergent opening cross-sectional shape that substantially coincides with a part of the irradiation cross-section of the X-ray 2 at a height position corresponding thereto. In addition, it becomes possible to make the opening shapes of the loading opening 6 and the unloading opening 7 as narrow as possible while effectively using substantially the entire irradiation region of the X-ray 2.

  Accordingly, the leakage amount of the X-ray 2 from the carrying-in opening 6 and the carrying-out opening 7 can be reduced as much as possible, and the inspection object 1 does not enter the area outside the X-ray 2 irradiation area. Therefore, measurement errors are extremely difficult to occur.

  When the X-ray 2 is irradiated from the X-ray irradiation unit 3, the outer surface of the shielding member 9 exposed from the loading opening 6 and the unloading opening 7 by the warning illumination unit 11 and the transport mechanism 8. The upper surface of the LED is illuminated in red, and the operator will be in the field of view with the red color that naturally alerts the user, regardless of whether he or she is far away or in the near field. Can be recognized. In particular, the vicinity of the carrying-in opening 6 and the carrying-out opening 7 needs to be frequently cleaned, so the degree of attention is high and the warning effect is extremely high from this point.

  Moreover, since all of the opening 6 for carrying in and the opening 7 for carrying out are made into the opening cross-sectional shape of the divergent form substantially corresponding to a part of irradiation cross section of the X-ray 2 of the height position corresponding to this, it is for warning. The illumination unit 11 can easily illuminate most of the outer surface of the shielding member 9 exposed from the carry-in opening 6 or the carry-out opening 7 in red, further enhancing the warning effect. That is, when a light emitting diode that emits light in a conical shape is adopted as the warning illumination unit 11, the cross section of the irradiation cross section by the light emitting diode is a loading opening in a cross-sectional view perpendicular to the transport direction of the transport mechanism 8. Similarly to the opening cross-sectional shapes of the portion 6 and the unloading opening 7, the shape of the shielding member 9 that is exposed from the unloading opening 6 or the unloading opening 7 can be efficiently reduced with a smaller number. A wide range of the outer surface can be irradiated.

  Therefore, this embodiment reduces X-ray leakage as much as possible and reduces measurement errors, and it is extremely easy for an operator working near the apparatus to determine whether or not X-rays are being irradiated. It will be a foreign matter inspection device with excellent safety and practicality.

  The present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

It is a schematic explanatory perspective view of a present Example. It is a schematic explanatory side view of a present Example. It is a schematic explanatory perspective view of the principal part of a present Example. It is a schematic explanatory side view of the principal part of a present Example. It is a schematic explanatory front view of the principal part of a present Example. It is an expansion outline explanatory perspective view of the principal part of a present Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection object 2 X-ray 3 X-ray irradiation part 4 X-ray detection part 5 Shielding box 6 Loading opening 7 Unloading opening 8 Conveying mechanism 9 Shielding member
11 Warning light
12 Light emitting element

Claims (6)

  1.   An X-ray irradiator that irradiates X-rays on the object to be inspected conveyed by the conveying mechanism from above so that the irradiation cross-sectional shape in the direction perpendicular to the direction of conveyance of the object to be inspected is divergent, and And the inspection object conveyed by the conveyance mechanism on one side of a shielding box provided with an X-ray detection unit for detecting X-rays transmitted through the inspection object. A foreign matter inspection apparatus comprising a carrying-in opening for carrying into the shielding box, and a carrying-out opening for carrying out the inspection object from the shielding box on the opposite side of the side of the shielding box. The entire opening for carrying in the shielding box is set to a part of the X-ray divergent irradiation cross section substantially corresponding to the height position corresponding to this, or a slightly wide divergent opening cross-sectional shape. Or for carrying in the shielding box The upper part of the mouth is set to a part of the X-ray divergent irradiation cross section substantially corresponding to the height position corresponding to this or a slightly wider divergent opening cross-sectional shape. The remaining part excluding the upper part is set to an opening cross-sectional shape having an opening width equal to or smaller than the width of the X-ray divergent irradiation cross section at the height position corresponding to the upper part and the width of the conveying surface of the conveying mechanism. Characteristic foreign substance inspection device.
  2.   The whole of the carrying-out opening of the shielding box is set to a part of the X-ray divergent irradiation cross section substantially corresponding to the height position corresponding thereto, or a slightly wide divergent opening cross-sectional shape. Or the upper end of the carrying-out opening of the shielding box substantially coincides with a part of the end-expanded irradiation section of the X-ray at the corresponding height position, or a slightly wider end-expanded opening section. The remaining portion excluding the upper portion of the carrying-out opening is set to a shape that is equal to or smaller than the width of the X-ray divergent irradiation cross section of the X-ray and the width of the conveying surface of the conveying mechanism. The foreign matter inspection apparatus according to claim 1, wherein the foreign matter inspection apparatus is set to have an opening cross-sectional shape having an opening width.
  3.   A warming-shaped shielding member for preventing leakage of the X-ray from the carrying-in opening or the carrying-out opening of the shielding box, and a part of the outer surface of the shielding box is the carrying-in opening or the carrying-out opening. An outer surface of the shielding member that is exposed from the carrying-in opening or the carrying-out opening when the X-ray is irradiated from the X-ray irradiating unit. Light is applied to the upper surface of the transport mechanism to illuminate a predetermined range on the outer surface of the shielding member or the upper surface of the transport mechanism, and the illumination part is changed to a color different from the ground color to make it stand out, so The foreign matter inspection apparatus according to claim 1, further comprising a warning illumination unit that warns of the possibility of leakage of the X-ray from the opening or the carrying-out opening.
  4.   The warning is provided on the inner side or the outer side of the side surface of the shielding member provided with the carrying-in opening or the carrying-out opening so that the light can be irradiated over a wide range from the outer surface of the shielding member to the upper surface of the transport mechanism. The foreign matter inspection apparatus according to claim 3, further comprising an illumination unit.
  5.   The warning illumination unit has a plurality of light emitting elements arranged in the width direction at intervals where the irradiation ranges of the respective light emitting elements are slightly overlapped on the upper surface of the transport mechanism or at intervals having a slight gap between the irradiation ranges. The foreign matter inspection device according to claim 3, wherein the foreign matter inspection device is arranged in parallel with each other.
  6.   6. The foreign matter inspection apparatus according to claim 5, wherein the light emitting element is a red light emitting diode.
JP2008021794A 2008-01-31 2008-01-31 Foreign matter inspection device Active JP5114636B2 (en)

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JP2008021794A JP5114636B2 (en) 2008-01-31 2008-01-31 Foreign matter inspection device

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010085224A (en) * 2008-09-30 2010-04-15 Anritsu Sanki System Co Ltd X-ray inspecting device
JP2011102717A (en) * 2009-11-10 2011-05-26 Ishida Co Ltd X-ray inspection apparatus
JP2011140391A (en) * 2010-01-08 2011-07-21 Hitachi Building Systems Co Ltd Handrail inspection device for passenger conveyor
CN102253060A (en) * 2010-04-13 2011-11-23 株式会社日立建筑系统 Deterioration diagnosis device for moving handrail of passenger conveyor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071588A (en) * 2000-09-04 2002-03-08 Ishida Co Ltd X-ray foreign-matter inspection device
JP2003042974A (en) * 2001-07-26 2003-02-13 Anritsu Corp X-ray device for detecting foreign matter
JP2003121386A (en) * 2001-10-12 2003-04-23 Shimadzu Corp X-ray foreign-matter inspection device
JP2006343187A (en) * 2005-06-08 2006-12-21 Yamato Scale Co Ltd V-shaped curtain device for shielding x rays of x-ray foreign matter inspection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071588A (en) * 2000-09-04 2002-03-08 Ishida Co Ltd X-ray foreign-matter inspection device
JP2003042974A (en) * 2001-07-26 2003-02-13 Anritsu Corp X-ray device for detecting foreign matter
JP2003121386A (en) * 2001-10-12 2003-04-23 Shimadzu Corp X-ray foreign-matter inspection device
JP2006343187A (en) * 2005-06-08 2006-12-21 Yamato Scale Co Ltd V-shaped curtain device for shielding x rays of x-ray foreign matter inspection device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010085224A (en) * 2008-09-30 2010-04-15 Anritsu Sanki System Co Ltd X-ray inspecting device
JP2011102717A (en) * 2009-11-10 2011-05-26 Ishida Co Ltd X-ray inspection apparatus
JP2011140391A (en) * 2010-01-08 2011-07-21 Hitachi Building Systems Co Ltd Handrail inspection device for passenger conveyor
CN102183531A (en) * 2010-01-08 2011-09-14 株式会社日立建筑系统 Handrail inspection device for passenger conveyor
CN102253060A (en) * 2010-04-13 2011-11-23 株式会社日立建筑系统 Deterioration diagnosis device for moving handrail of passenger conveyor

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