JP2009087703A - Heating element for induction heating device, and package for divided heating element - Google Patents

Heating element for induction heating device, and package for divided heating element Download PDF

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JP2009087703A
JP2009087703A JP2007255353A JP2007255353A JP2009087703A JP 2009087703 A JP2009087703 A JP 2009087703A JP 2007255353 A JP2007255353 A JP 2007255353A JP 2007255353 A JP2007255353 A JP 2007255353A JP 2009087703 A JP2009087703 A JP 2009087703A
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heating element
induction heating
conductor
heating
induction
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Naoki Uchida
直喜 内田
Kazuhiro Ozaki
一博 尾崎
Koichi Nanba
浩一 難波
Tatsuya Suzuki
達也 鈴木
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Mitsui Engineering and Shipbuilding Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a heating element for an induction heating device that performs a function as a heating element while fixing the disposed form of a divided heating element. <P>SOLUTION: The heating element 34 is arranged between an induction heating coil 24 disposed in parallel with the principal plane of an object 40 to be heated and the object 40, and is formed by a plurality of conductors 26 formed in a frame shape while following the disposed form of the induction heating coil 24, and a heat resistant member to fix the disposed form of a plurality of the conductors 26 while filling up gaps between the plurality of conductors 26 each other. The heating element 34 preferably covers both sides of the conductor 26 by an insulating material. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、誘導加熱装置の発熱体、および分割発熱体用パッケージに係り、特にウェハを平置き状態にして加熱する枚葉型の誘導加熱装置に好適な発熱体、および導電性の発熱体が分割されている場合に好適なパッケージに関する。   The present invention relates to a heating element for an induction heating device and a package for a divided heating element, and more particularly, a heating element suitable for a single-wafer type induction heating device that heats a wafer in a flat state, and a conductive heating element. The present invention relates to a package suitable when divided.

従来、半導体の製造工程に用いられる誘導加熱装置は、図５に示すようなものであった。すなわち、誘導加熱コイル２と被加熱物３との間に、グラファイト（黒鉛板）などの発熱体４を配置し、誘導加熱により発熱体４を加熱することで、その輻射熱や熱伝導を利用して被加熱物３を加熱するというものである（例えば特許文献１）。   Conventionally, an induction heating apparatus used in a semiconductor manufacturing process is as shown in FIG. That is, a heating element 4 such as graphite (graphite plate) is disposed between the induction heating coil 2 and the object 3 to be heated, and the heating element 4 is heated by induction heating, thereby utilizing the radiant heat and heat conduction. The object to be heated 3 is heated (for example, Patent Document 1).

このような構成の誘導加熱装置１によれば理論上、高精度な均熱加熱が可能となり、急速昇降温も可能となると考えられる。しかし、図５に示すような構成の誘導加熱装置１では、誘導加熱コイル２の中心と発熱体４の中心とを一致させる際、芯出し等ができないため、高精度な位置合わせを行う事が困難であり、発熱体４の温度分布が、発熱体４の中心を基準とした真円にならないことがある。この場合、発熱体４により加熱される被加熱物３にも温度分布のバラツキが生ずることとなってしまう。   According to the induction heating apparatus 1 having such a configuration, it is theoretically possible to perform soaking with high accuracy and rapid temperature rise / fall. However, in the induction heating apparatus 1 configured as shown in FIG. 5, when the center of the induction heating coil 2 and the center of the heating element 4 are aligned, centering or the like cannot be performed, so that highly accurate alignment can be performed. It is difficult, and the temperature distribution of the heating element 4 may not be a perfect circle with the center of the heating element 4 as a reference. In this case, variations in temperature distribution also occur in the article to be heated 3 heated by the heating element 4.

これに対し、特許文献２には、発熱体を分割することで、発熱体と誘導加熱コイルとの配置ズレの影響による温度分布のバラツキを抑える事が記載されている。
特開２００６−２７８１５０号公報 特開２００５−１１８６８号公報 On the other hand, Patent Document 2 describes that the temperature distribution variation due to the influence of the displacement of the heating element and the induction heating coil is suppressed by dividing the heating element.
JP 2006-278150 A Japanese Patent Laid-Open No. 2005-11868

発熱体として、特許文献２に開示されているようなものを利用することによれば、円板状の発熱体のように、温度分布の中心が、加熱対象とするウェハの中心から大きくズレるという事は無くなると考えられる。   According to the use of the heating element disclosed in Patent Document 2, the center of the temperature distribution is greatly deviated from the center of the wafer to be heated, like a disk-like heating element. Things are thought to disappear.

しかし、特許文献２に開示されているような構成の発熱体は、配置形態の維持が困難であるため、その現実的使用は困難であった。
そこで、本発明では、分割された発熱体の配置形態を固定しつつ、分割された発熱体としての機能を発揮させる事を可能とする誘導加熱装置用発熱体、および分割発熱体用パッケージを提供することを目的とする。 However, the heating element configured as disclosed in Patent Document 2 is difficult to maintain in an arrangement form, and thus is difficult to use practically.
Accordingly, the present invention provides a heating element for an induction heating device and a package for a divided heating element that can function as a divided heating element while fixing the arrangement form of the divided heating elements. The purpose is to do.

上記目的を達成するための本発明に係る誘導加熱装置用発熱体は、被加熱物の主面と平行に配置された誘導加熱コイルと、前記被加熱物との間に配置される発熱体であって、前記誘導加熱コイルの配置形態に倣いつつ枠型に形成した複数の導電体と、前記複数の導電体同士の間隙を埋めつつ前記複数の導電体の配置形態を固定する耐熱性部材とより形成されることを特徴とする。   In order to achieve the above object, a heating element for an induction heating device according to the present invention is a heating element arranged between an induction heating coil arranged in parallel with the main surface of the object to be heated and the object to be heated. A plurality of conductors formed in a frame shape following the arrangement form of the induction heating coil, and a heat-resistant member that fixes the arrangement form of the plurality of conductors while filling the gaps between the plurality of conductors. It is characterized by being formed.

また、上記のような特徴を有する誘導加熱装置用発熱体では、前記耐熱性部材により前記導電体の表裏面を覆うようにすることが望ましい。このような構成とすることによれば、発熱体を加熱した際に導電体から発生するパーティクルやコンタミネーションが、真空チャンバ等、反応炉内に飛散する事が無くなる。   Moreover, in the heating element for induction heating devices having the above-described features, it is desirable that the heat-resistant member covers the front and back surfaces of the conductor. According to such a configuration, particles and contamination generated from the conductor when the heating element is heated is not scattered in a reaction furnace such as a vacuum chamber.

また、上記のような特徴を有する誘導加熱装置用発熱体において、前記誘導加熱コイルは、中心から外側に向けて段階的に半径を大きく設定した円形のコイル部を有する複数のコイルにより構成され、前記導電体は、前記誘導加熱コイルにより定められる加熱ゾーン毎の範囲に合わせて形成されたリング型とすると良い。このような構成とすることによれば、各リング型の導電体は、投入電流が調整可能な誘導加熱コイルのゾーン単位、すなわち加熱ゾーン単位で分割されていることとなる。このため、誘導加熱コイルに対する投入電力の制御により、加熱ゾーン毎に導電体を高精度に制御することができる。   Moreover, in the heating element for an induction heating device having the above-described characteristics, the induction heating coil is configured by a plurality of coils having a circular coil portion whose radius is set to increase stepwise from the center toward the outside. The conductor is preferably a ring type formed in accordance with a range for each heating zone defined by the induction heating coil. According to such a configuration, each ring-type conductor is divided in units of zones of the induction heating coil whose input current can be adjusted, that is, in units of heating zones. For this reason, a conductor can be controlled with high precision for every heating zone by control of input electric power to an induction heating coil.

また、上記のような特徴を有する誘導加熱装置用発熱体において、前記耐熱性部材は、平板状の基板に対して前記導電体の形状に倣った形状、深さの溝を設けたベースと、前記導電体を前記溝に収容した後に前記溝を封止するリッドとより構成することが望ましい。このような構成とすることにより、導電体の形態を問う事無くベースの溝形状と同様な形状の導電体を得ることができるようになる。   Further, in the heating element for an induction heating device having the above-described characteristics, the heat-resistant member has a base provided with a groove having a shape and a depth following the shape of the conductor on a flat substrate, It is desirable that the conductor is constituted by a lid for sealing the groove after the conductor is accommodated in the groove. By adopting such a configuration, it becomes possible to obtain a conductor having a shape similar to the groove shape of the base without regard to the form of the conductor.

さらに、上記のような特徴を有する誘導加熱装置用発熱体では、前記耐熱性部材は石英としたことを特徴とし、前記導電体は黒鉛シートとすると共に、前記ベースと前記リッドとの接合は直接接合により成すことが望ましい。このような構成とする事で、黒鉛シートを加熱した際にベースとリッドとの接合部が剥離する虞が無い。また、黒鉛シートは圧縮復元性があるため、加熱時の膨張をパッケージの剛性で抑えることができ、黒鉛シートの膨張に伴ってベースやリッドが破損する虞が無い。さらに、黒鉛シートは、ベースやリッドと密着させる事が可能なため、接触熱抵抗を低減することができる。   Furthermore, in the heating element for induction heating apparatus having the above-described characteristics, the heat-resistant member is made of quartz, the conductor is a graphite sheet, and the base and the lid are directly joined. It is desirable to do it by joining. By setting it as such a structure, when a graphite sheet is heated, there exists no possibility that the junction part of a base and a lid may peel. In addition, since the graphite sheet has a compression recovery property, expansion during heating can be suppressed by the rigidity of the package, and there is no possibility that the base and the lid are damaged as the graphite sheet expands. Furthermore, since the graphite sheet can be brought into close contact with the base and the lid, the contact thermal resistance can be reduced.

また、上記目的を達成するための本発明に係る分割発熱体用パッケージは、導電性発熱体を埋め込み可能に形成された複数のリング状溝を有し、全体を石英により構成されたベースと、前記ベースに対してリッドとして接合される石英板とから成ることを特徴とする。   Further, a package for a divided heating element according to the present invention for achieving the above object has a plurality of ring-shaped grooves formed so as to be capable of embedding a conductive heating element, and a base made entirely of quartz, It consists of a quartz plate joined as a lid to the base.

上記のような特徴を有する誘導加熱装置用発熱体によれば、分割された発熱体の配置形態を固定しつつ、分割された発熱体としての機能を発揮させる事が可能となる。
また、上記のような構成のパッケージを用いれば、上記のような効果を奏することのできる発熱体を構成することが可能となる。 According to the heating element for an induction heating device having the above-described characteristics, it is possible to exhibit the function as the divided heating element while fixing the arrangement form of the divided heating elements.
Moreover, if the package having the above-described configuration is used, it is possible to configure a heating element that can achieve the above-described effects.

以下、本発明の誘導加熱装置用発熱体、および分割発熱体用パッケージに係る実施の形態について、図面を参照しつつ詳細に説明する。
まず、図１を参照して、第１の実施形態に係る発熱体の構成と共に、これを適用する誘導加熱装置の構成について説明する。 Hereinafter, embodiments of the heating element for induction heating devices and the package for divided heating elements of the present invention will be described in detail with reference to the drawings.
First, with reference to FIG. 1, the structure of the induction heating apparatus which applies this to the structure of the heat generating body which concerns on 1st Embodiment is demonstrated.

誘導加熱装置１０は、誘導加熱コイル２４、電源部１２、発熱体３４とを有し、発熱体３４の上面に載置した被加熱物４０を加熱することを基本とする。
前記誘導加熱コイル２４は、本実施形態の場合、例えば図２に示すように、同心円状に複数配置した外形Ｃ字型のコイルや、各ゾーン毎に電力調整を可能とした渦巻き型コイル（不図示）などであれば良い。複数配置された誘導加熱コイル２４は、図１に示すように、詳細を後述する発熱体３４や被加熱物４０の主面と平行になるよう、隣接して配置されるコイル同士が平面上に位置するように配置される。 The induction heating apparatus 10 includes an induction heating coil 24, a power supply unit 12, and a heating element 34, and basically heats an object to be heated 40 placed on the upper surface of the heating element 34.
In the case of the present embodiment, the induction heating coil 24 is, for example, as shown in FIG. 2, a plurality of concentric outer shape C-shaped coils, or spiral coils (not used) that can adjust power for each zone. (Shown) or the like. As shown in FIG. 1, the plurality of induction heating coils 24 arranged adjacent to each other are arranged on a plane so as to be parallel to the main surface of the heating element 34 and the object to be heated 40 described in detail later. It is arranged to be located.

前記電源部１２としては、例えば、コンバータ１４、チョッパ１６、およびインバータ１８を基本として構成される。
前記コンバータ１４には、例えば、三相交流電源２０が接続されている。コンバータ１４は、三相交流電源２０を介して電源部１２に入力される三相交流電流を直流に変換して、後段に接続されるチョッパ１６へと出力する純変換部である。 The power supply unit 12 is configured based on, for example, a converter 14, a chopper 16, and an inverter 18.
For example, a three-phase AC power supply 20 is connected to the converter 14. The converter 14 is a pure conversion unit that converts a three-phase alternating current input to the power supply unit 12 via the three-phase alternating current power supply 20 into a direct current and outputs the direct current to the chopper 16 connected to the subsequent stage.

前記チョッパ１６は、コンバータ１４から出力される電流の通流率を変化させ、インバータ１８に入力電流の電圧を変化させる電圧調整部である。
前記インバータ１８は、チョッパ１６により電圧調整された直流電流を、交流電流へと変換して誘導加熱コイル２４へ供給する逆変換部である。なお、本実施形態で例に挙げる誘導加熱装置１０のインバータ１８は、誘導加熱コイル２４と共振コンデンサ２２とを直列に配置した直列共振型のインバータとする。また、複数の誘導加熱コイル２４にはそれぞれ、個別にインバータ１８、およびチョッパ１６が接続されている。なお、インバータ１８から誘導加熱コイル２４への出力電流の制御は、図示しない駆動制御部からの入力信号に基づいて行うものとする。 The chopper 16 is a voltage adjusting unit that changes the conduction ratio of the current output from the converter 14 and causes the inverter 18 to change the voltage of the input current.
The inverter 18 is an inverse conversion unit that converts the direct current adjusted in voltage by the chopper 16 into an alternating current and supplies the alternating current to the induction heating coil 24. In addition, the inverter 18 of the induction heating apparatus 10 exemplified in this embodiment is a series resonance type inverter in which an induction heating coil 24 and a resonance capacitor 22 are arranged in series. Moreover, the inverter 18 and the chopper 16 are individually connected to the plurality of induction heating coils 24. In addition, control of the output current from the inverter 18 to the induction heating coil 24 shall be performed based on the input signal from the drive control part which is not shown in figure.

前記発熱体３４は、本実施形態の場合、誘導加熱コイル２４により加熱されて発熱源となる芯材の導電体２６と、前記導電体２６を被覆する耐熱性部材により構成されるパッケージ３２とより成る。導電体２６としては、例えば黒鉛（graphite）製品のようなもの、すなわち高抵抗で熱伝導率、耐熱性の高い部材を選択することが望ましい。本実施形態では、導電体２６として、黒鉛シートを採用することとした。   In the case of the present embodiment, the heating element 34 includes a core conductor 26 that is heated by the induction heating coil 24 and serves as a heat source, and a package 32 that includes a heat-resistant member that covers the conductor 26. Become. As the conductor 26, it is desirable to select a member such as a graphite product, that is, a member having high resistance, thermal conductivity, and high heat resistance. In the present embodiment, a graphite sheet is adopted as the conductor 26.

黒鉛シートは、耐熱性、熱伝導率が優れていながら、柔軟性、圧縮復元性等、他の黒鉛製品には無い特徴を有しており、隣接部材との密着性を良好に保つことができ、パッケージ部材との接触熱抵抗を改善することができるからである。また、圧縮復元性を有することより、詳細を後述するパッケージ３２中に収容した場合であっても、加熱時の膨張によりパッケージ３２を破壊する虞が無い。
なお、本実施形態に係る導電体２６は、図２に示すように、同心円上に配置される直径（半径）の異なる複数のリング状黒鉛シート群によってその体を成す。 Graphite sheets have excellent heat resistance and thermal conductivity, but have characteristics not found in other graphite products, such as flexibility and compression recovery, and can maintain good adhesion to adjacent members. This is because the contact thermal resistance with the package member can be improved. Moreover, since it has compression decompression | restoration property, even when it is a case where it accommodates in the package 32 mentioned later for details, there is no possibility of destroying the package 32 by the expansion | swelling at the time of a heating.
In addition, as shown in FIG. 2, the conductor 26 according to the present embodiment is constituted by a plurality of ring-shaped graphite sheet groups having different diameters (radius) arranged on concentric circles.

パッケージ３２は、耐熱性部材、好適には、透光性を有する耐熱性絶縁体により構成されたベース２８と、同一部材により構成されたリッド（蓋体）３０とより成る。ベース２８とリッド３０とを同一部材とすることにより、両者の線膨張率が等しくなる。よって、加熱、あるいは冷却時における膨縮差により、両者間に剥離やクラックが生ずる虞が無くなる。   The package 32 includes a heat-resistant member, preferably a base 28 made of a heat-resistant insulating material having translucency, and a lid (cover) 30 made of the same member. By using the base 28 and the lid 30 as the same member, the linear expansion coefficient of both becomes equal. Therefore, there is no possibility of peeling or cracking between the two due to expansion / contraction difference during heating or cooling.

ここで、前記ベース２８は、例えば円板状に形成された石英から成り、その一主面には上述したリング状黒鉛シートを収容（嵌め込む）するための溝２９（２９ａ〜２９ｄ）を形成する。溝２９の形成は、切削、研削、エッチング等の他、溶融させた石英を型に流し込むモールディング等の手法によるものでも良い。年輪状に複数形成する円形の溝２９は、その全てがベース２８の中心を基点とする同心円となるようにする。   Here, the base 28 is made of, for example, quartz formed in a disk shape, and grooves 29 (29a to 29d) for accommodating (fitting) the ring-shaped graphite sheet described above are formed on one main surface thereof. To do. The groove 29 may be formed by a technique such as molding in which molten quartz is poured into a mold in addition to cutting, grinding, etching, and the like. A plurality of circular grooves 29 formed in an annual ring shape are all concentric circles starting from the center of the base 28.

前記リッド３０は、前記ベース２８と同径の円板であれば良く、前記ベース２８に形成された溝２９の開口部を封止する役割を担う。
本実施形態に係る発熱体３４は、ベース２８に形成した溝２９に導電体２６であるリング状黒鉛シートを収容し、リング状黒鉛シートを収容した溝２９を覆うようにリッド３０を被せ、両者を接合することで構成される。ここで、ベース２８とリッド３０との接合方法としては、種々選択の余地はあるが例えば、直接接合による方法を挙げることができる。直接接合は接合強度が高いため、導電体２６が誘導加熱された際や、冷却時に生ずる歪みにより、ベース２８とリッド３０との間に剥離が生ずるといった不具合が生じ難い。 The lid 30 may be a disk having the same diameter as the base 28 and serves to seal the opening of the groove 29 formed in the base 28.
The heating element 34 according to the present embodiment accommodates a ring-shaped graphite sheet as the conductor 26 in a groove 29 formed in the base 28, and covers the lid 30 so as to cover the groove 29 accommodating the ring-shaped graphite sheet. It is comprised by joining. Here, as a method for joining the base 28 and the lid 30, there is room for various selections, and for example, a method by direct joining can be mentioned. Since direct bonding has high bonding strength, it is difficult to cause a problem that peeling occurs between the base 28 and the lid 30 due to distortion generated when the conductor 26 is induction-heated or cooled.

なお直接接合は、ベース２８とリッド３０の両者の接合面を平坦化し、真空チャンバ内で加熱、および加圧する事により達成される。また上述したように、黒鉛シートは、圧縮復元性を有するポーラスな構造体であるため、誘導加熱により加熱された場合であっても、パッケージ３２部材としてのベース２８とリッド３０を破壊する程に膨張する事が無い。
前記被加熱物４０としては、例えば半導体ウェハを挙げることができる。 The direct bonding is achieved by flattening the bonding surfaces of both the base 28 and the lid 30 and heating and pressurizing in a vacuum chamber. In addition, as described above, the graphite sheet is a porous structure having compression / restoration properties, so that even when heated by induction heating, the base 28 and the lid 30 as the package 32 members are destroyed. There is no expansion.
An example of the object to be heated 40 is a semiconductor wafer.

上記のような発熱体３４を備えた誘導加熱装置１０を用いて被加熱物４０を加熱することによれば、各誘導加熱コイル２４による加熱ゾーン毎に導電体２６が分割されていることとなる。このため、発熱体３４における渦電流の発生領域は、分割された導電体２６の配置形状に沿って強制的に定められることとなる。また、導電体２６として設けるリング状黒鉛シートは、熱伝導性に優れており、リングの幅は円板状のグラファイトに比べて狭いため、加熱ゾーンとして対応する誘導加熱コイル２４の中心が、リング状黒鉛シートの中心に対して多少ズレていた場合であっても、加熱効率や温度分布に影響が出る事は無い。   When the object to be heated 40 is heated using the induction heating device 10 including the heating element 34 as described above, the conductor 26 is divided for each heating zone by each induction heating coil 24. . For this reason, the eddy current generation region in the heating element 34 is forcibly determined along the arrangement shape of the divided conductors 26. In addition, the ring-shaped graphite sheet provided as the conductor 26 is excellent in thermal conductivity, and the width of the ring is narrower than that of the disk-shaped graphite. Therefore, the center of the induction heating coil 24 corresponding to the heating zone is the ring. Even if it is slightly shifted from the center of the graphite sheet, the heating efficiency and temperature distribution are not affected.

このため、発熱体３４中の温度分布に偏りが生ずることが無く、被加熱物４０と発熱体３４との中心を合わせることにより、被加熱物４０を均等加熱することが可能となる。   For this reason, the temperature distribution in the heating element 34 is not biased, and the heating object 40 can be heated evenly by aligning the centers of the heating object 40 and the heating element 34.

また、本実施形態に係る発熱体３４は、導電体２６としてのリング状黒鉛シートを石英でパッケージングしているため、黒鉛シート（グラファイト）を加熱した際に飛散するパーティクルやコンタミネーション等が真空チャンバ内に生ずることが無い。このため、発熱体３４を真空チャンバ内に配置した上で被加熱物４０の加熱を行うことができ、発熱体３４と被加熱物４０とを近接させることが可能となる。つまり、被加熱物４０の加熱効率を向上させることができるのである。   Further, in the heating element 34 according to the present embodiment, since the ring-shaped graphite sheet as the conductor 26 is packaged with quartz, particles, contamination, etc. scattered when the graphite sheet (graphite) is heated are vacuumed. It does not occur in the chamber. For this reason, the heating object 40 can be heated after the heating element 34 is disposed in the vacuum chamber, and the heating element 34 and the heating object 40 can be brought close to each other. That is, the heating efficiency of the article to be heated 40 can be improved.

さらに、導電体２６としての黒鉛シートと被加熱物４０との間には、薄肉（例えば０．５〜１．５ｍｍ程度）の石英層が介在されることとなるため、被加熱物４０は、リング状黒鉛シートからの放射熱の他、石英層を介して伝達される熱（熱伝達）によっても加熱されることとなり、被加熱物４０の加熱効率が向上する。   Furthermore, since a thin quartz layer (for example, about 0.5 to 1.5 mm) is interposed between the graphite sheet as the conductor 26 and the object 40 to be heated, In addition to the radiant heat from the ring-shaped graphite sheet, it is also heated by heat (heat transfer) transmitted through the quartz layer, and the heating efficiency of the article to be heated 40 is improved.

上記実施形態では、導電体２６としてリング状黒鉛シートを採用する旨記載した。しかしながら、本発明の発熱体を構成する上では、導電体２６を粉体黒鉛とし、これを溝に充填することでリング状の体を成すようにしても良い。石英により構成されたパッケージ３２のベース２８に、リング状の溝２９が形成されているため、ここに収容する導電体２６の形態については粉体、固体、液体等、それ自体の形態に影響される事なく形状維持を図ることができ、同様な効果を発揮することができるからである。   In the above embodiment, it has been described that a ring-shaped graphite sheet is adopted as the conductor 26. However, in configuring the heating element of the present invention, the conductor 26 may be powdered graphite, and this may be filled into a groove to form a ring-shaped body. Since the ring-shaped groove 29 is formed in the base 28 of the package 32 made of quartz, the form of the conductor 26 accommodated therein is affected by the form of the powder, solid, liquid, etc. itself. This is because the shape can be maintained without any problems and the same effect can be exhibited.

次に、本発明の誘導加熱装置用発熱体に係る第２の実施形態について図３を参照して説明する。なお、図３において図３（Ａ）は発熱体の断面図であり、図３（Ｂ）は発熱体の平面図である。   Next, a second embodiment according to the heating element for induction heating apparatus of the present invention will be described with reference to FIG. 3A is a cross-sectional view of the heating element, and FIG. 3B is a plan view of the heating element.

本実施形態に係る発熱体３４ａは、上記第１の実施形態に係る発熱体３４と異なり、導電体２６の上下を覆う石英層が無い。つまり、リング状に形成した導電体２６同士の隙間に、リング状、あるいは円板状の石英をスペーサ３１として配置することにより構成されるものである。   Unlike the heating element 34 according to the first embodiment, the heating element 34 a according to the present embodiment does not have a quartz layer that covers the top and bottom of the conductor 26. In other words, the ring-shaped or disk-shaped quartz is arranged as the spacer 31 in the gap between the conductors 26 formed in a ring shape.

発熱体３４ａをこのような構成とした場合であっても、導電体２６の配置形態を保つ事が可能となる。ただし、上記のような構成の発熱体３４ａでは、導電体２６の上下面を覆う石英層が無いことにより、加熱時におけるパーティクルやコンタミネーションの飛散が危惧される。よって、本実施形態に係る発熱体３４ａを使用する際は、図４に示すように被加熱物４０を加熱する真空チャンバ５０と、誘導加熱コイル２４および発熱体３４ａを備えた加熱ユニット６０石英板等により分別する構成を採る誘導加熱装置１０ａを採用することが望ましい。   Even when the heating element 34a has such a configuration, the arrangement of the conductors 26 can be maintained. However, in the heating element 34a configured as described above, since there is no quartz layer covering the upper and lower surfaces of the conductor 26, there is a risk of scattering of particles and contamination during heating. Therefore, when using the heating element 34a according to the present embodiment, as shown in FIG. 4, a vacuum chamber 50 for heating the article 40 to be heated, and a heating unit 60 quartz plate including the induction heating coil 24 and the heating element 34a. It is desirable to employ the induction heating device 10a that adopts a configuration that separates the materials by means of the above.

誘導加熱装置に対する発熱体の配置構成を示す図である。It is a figure which shows the arrangement configuration of the heat generating body with respect to the induction heating apparatus. 発熱体の構成を示す分解斜視図である。It is a disassembled perspective view which shows the structure of a heat generating body. 本発明に係る誘導加熱装置用発熱体に係る第２の実施形態を示す図である。It is a figure which shows 2nd Embodiment which concerns on the heat generating body for induction heating apparatuses which concerns on this invention. 第２の実施形態に係る発熱体を採用する誘導加熱装置の例を示す図である。It is a figure which shows the example of the induction heating apparatus which employ | adopts the heat generating body which concerns on 2nd Embodiment. 従来の誘導加熱装置と発熱体の構成を示す図である。It is a figure which shows the structure of the conventional induction heating apparatus and a heat generating body.

符号の説明Explanation of symbols

１０………誘導加熱装置、１２………電源部、１４………コンバータ、１６………チョッパ、１８………インバータ、２０………三相交流電源、２２………共振コンデンサ、２４………誘導加熱コイル、２６………導電体、２８………ベース、２９………溝、３０………リッド、３２………パッケージ、３４………発熱体、４０………被加熱物。   DESCRIPTION OF SYMBOLS 10 ......... Induction heating apparatus, 12 ......... Power supply part, 14 ......... Converter, 16 ......... Chopper, 18 ......... Inverter, 20 ......... Three-phase AC power supply, 22 ......... Resonance capacitor, 24 ……… Induction heating coil, 26 ……… Conductor, 28 ……… Base, 29 ……… Groove, 30 ……… Lid, 32 ……… Package, 34 ……… Heat, 40 ……… Heated product.

Claims (6)

被加熱物の主面と平行に配置された誘導加熱コイルと、前記被加熱物との間に配置される発熱体であって、
前記誘導加熱コイルの配置形態に倣いつつ枠型に形成した複数の導電体と、
前記複数の導電体同士の間隙を埋めつつ前記複数の導電体の配置形態を固定する耐熱性部材とより形成されることを特徴とする誘導加熱装置用発熱体。 An induction heating coil disposed in parallel with the main surface of the object to be heated, and a heating element disposed between the object to be heated,
A plurality of conductors formed in a frame shape while following the arrangement form of the induction heating coil,
A heating element for an induction heating device, characterized in that the heating element is formed of a heat-resistant member that fixes an arrangement form of the plurality of conductors while filling gaps between the plurality of conductors. 前記耐熱性部材により前記導電体の表裏面を覆ったことを特徴とする請求項１に記載の誘導加熱装置用発熱体。   The heating element for an induction heating device according to claim 1, wherein front and back surfaces of the conductor are covered with the heat resistant member. 前記誘導加熱コイルは、中心から外側に向けて段階的に半径を大きく設定した円形のコイル部を有する複数のコイルにより構成され、
前記導電体は、前記誘導加熱コイルにより定められる加熱ゾーン毎の範囲に合わせて形成されたリング型としたことを特徴とする請求項１または２に記載の誘導加熱装置用発熱体。 The induction heating coil is constituted by a plurality of coils having a circular coil portion having a radius set in a stepwise manner from the center toward the outside,
The heating element for an induction heating apparatus according to claim 1 or 2, wherein the conductor is a ring type formed in accordance with a range for each heating zone defined by the induction heating coil. 前記耐熱性部材は、平板状の基板に対して前記導電体の形状に倣った形状、深さの溝を設けたベースと、
前記導電体を前記溝に収容した後に前記溝を封止するリッドとより構成されることを特徴とする請求項３に記載の誘導加熱装置用発熱体。 The heat-resistant member has a shape that follows the shape of the conductor on a flat substrate, a base provided with a groove having a depth, and
The heating element for an induction heating apparatus according to claim 3, wherein the heating element is constituted by a lid that seals the groove after the conductor is accommodated in the groove. 前記耐熱性部材は石英としたことを特徴とし、
前記導電体は黒鉛シートとすると共に、
前記ベースと前記リッドとの接合は直接接合により成すことを特徴とする請求項４に記載の誘導加熱装置用発熱体。 The heat-resistant member is made of quartz,
The conductor is a graphite sheet,
The heating element for an induction heating apparatus according to claim 4, wherein the base and the lid are joined by direct joining. 導電性発熱体を埋め込み可能に形成された複数のリング状溝を有し、全体を石英により構成されたベースと、
前記ベースに対してリッドとして接合される石英板とから成ることを特徴とする分割発熱体用パッケージ。 A base having a plurality of ring-shaped grooves formed so as to be capable of embedding a conductive heating element, and made entirely of quartz;
A package for a divided heating element, comprising a quartz plate bonded as a lid to the base.
JP2007255353A 2007-09-28 2007-09-28 Heating element for induction heating device, and package for divided heating element Pending JP2009087703A (en)

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