JP2009071393A - Ultrasonic probe, acoustic matching material for ultrasonic probe and manufacturing method thereof - Google Patents

Ultrasonic probe, acoustic matching material for ultrasonic probe and manufacturing method thereof Download PDF

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JP2009071393A
JP2009071393A JP2007234851A JP2007234851A JP2009071393A JP 2009071393 A JP2009071393 A JP 2009071393A JP 2007234851 A JP2007234851 A JP 2007234851A JP 2007234851 A JP2007234851 A JP 2007234851A JP 2009071393 A JP2009071393 A JP 2009071393A
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acoustic matching
material
powder
acoustic
base material
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Shigenori Yuya
重徳 祐谷
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Fujifilm Corp
富士フイルム株式会社
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Abstract

An acoustic matching material capable of stably realizing a desired acoustic impedance with high reproducibility without destabilizing the cross-linking and curing reaction of an elastomer or a resin as a base material.
The acoustic matching material is an acoustic matching material provided on a front surface of at least one transducer for transmitting and / or receiving ultrasonic waves in an ultrasonic probe, and includes a mother material including an elastomer or a resin. A composite powder dispersed and filled in the base material, the composite powder including a powder of a material having an acoustic impedance larger than that of the base material, and a coating covering the surface of the powder, Including oxides of elements of Group 13 to Group 15 excluding carbon (C), nitrogen (N), and phosphorus (P).
[Selection] Figure 3A

Description

  The present invention relates to an ultrasonic probe used for transmitting and receiving ultrasonic waves in an ultrasonic diagnostic apparatus, and further relates to an acoustic matching material used for matching acoustic impedance in an ultrasonic probe and a method for manufacturing the same. .

  The ultrasonic diagnostic apparatus transmits an ultrasonic wave to a subject such as a human body or a structure using an ultrasonic probe, and receives an ultrasonic echo reflected from the subject, thereby detecting an ultrasonic detection signal. Display an image based on. Thereby, the inspection of the internal organs and blood vessels and the nondestructive inspection inside the structure are performed.

  In an ultrasonic probe, as an ultrasonic transducer for transmitting and / or receiving ultrasonic waves, a piezoelectric ceramic represented by PZT (Pb (lead) zirconate titanate) is generally used. A vibrator (piezoelectric vibrator) in which electrodes are formed on both ends of a piezoelectric material such as a polymer piezoelectric material represented by PVDF (polyvinyliden difluoride) is used.

  When a voltage is applied to the electrodes of such a vibrator, the piezoelectric body expands and contracts due to the piezoelectric effect, and elastic waves are generated. Furthermore, an ultrasonic beam can be formed in a desired direction by arranging a plurality of transducers in a one-dimensional or two-dimensional manner and driving with a plurality of drive signals given a predetermined delay. On the other hand, the vibrator expands and contracts by receiving propagating ultrasonic waves and generates an electrical signal. This electrical signal is used as an ultrasonic detection signal.

  An ultrasound diagnostic apparatus transmits an ultrasonic wave to a subject, receives an ultrasonic echo reflected from the subject, and displays an image based on the detection signal, thereby examining an internal organ or blood vessel. Is going. However, there is a large difference between the acoustic impedance of the transducer and the acoustic impedance of the subject (human body, etc.), and at the interface where there is such a difference in acoustic impedance, ultrasonic waves are reflected and propagation loss occurs. End up.

The acoustic impedance is a material-specific constant as represented by the formula (1) or the formula (2). Generally, MRayl (mega rail) is used as a unit, and 1 MRayl = 1 × 10 6. kg · m −2 · s −1 .
Z = ρ · v (1)
Z = (ρ · K) 1/2 (2)
Here, ρ represents the density of the acoustic medium, v represents the speed of sound in the acoustic medium, and K represents the bulk modulus of the acoustic medium.

The acoustic impedance of the transducer and Z 1, when the acoustic impedance of the medium adjacent to the vibrator and Z 2, the vertical reflectance of ultrasonic waves at the interface between the transducer and the medium is given by the following equation (3).
I R / I 0 = | Z 2 −Z 1 | / (Z 2 + Z 1 ) (3)
Here, I 0 represents the sound pressure of the ultrasonic wave incident on the surface, I R represents the sound pressure of the ultrasonic wave reflected by the interface.

Further, the vertical transmittance of the ultrasonic wave at the interface between the vibrator and the medium is given by the following equation (4).
I T / I 0 = 2 · Z 2 / (Z 2 + Z 1 ) (4)
Here, I T represents the sound pressure of ultrasonic waves transmitted through the interface.

  When the piezoelectric vibrator is brought into direct contact with the human body, most ultrasonic waves are reflected at the contact interface due to the difference in acoustic impedance between them. For example, when a piezoelectric ceramic is used as a vibrator, a general piezoelectric ceramic has an acoustic impedance of about 34 MRayl and a human body has an acoustic impedance of about 1.5 MRayl. Therefore, at the contact interface between the piezoelectric vibrator and the human body. The vertical reflectance of the ultrasonic wave is about 0.92, and it can be seen that the ultrasonic wave does not propagate as much as 10%.

  In order to solve this problem, an acoustic matching layer is inserted between the transducer and the subject to achieve acoustic impedance matching. Furthermore, the propagation efficiency of ultrasonic waves is improved by making the acoustic matching layer have a multilayer structure. According to the transmission line theory, when two acoustic matching layers are provided, the thickness of each layer is 1/4 of the wavelength of the ultrasonic wave, the acoustic impedance of the layer on the transducer side is 8.92 MRayl, and the subject It is said that the acoustic impedance of the side layer should be 2.34 MRayl (Ultrasonic Handbook Editing Committee, “Ultrasonic Handbook”, Maruzen, September 1999).

  As the material of the acoustic matching layer (acoustic matching material), an elastomer (elastic polymer compound) such as rubber, or a resin such as epoxy resin is used. Since it is small, the acoustic impedance will be as small as around 2 MRayl. Therefore, an acoustic impedance is increased by dispersing a powder of an inorganic material having a high specific gravity in an elastomer or a resin to form a composite.

Examples of the high specific gravity inorganic material include tungsten (W; density 19,200 kg / m 3 ), tantalum (Ta; density 16,700 kg / m 3 ), gold (Au; density 19,300 kg / m 3 ), platinum (Pt Density 21,100 kg / m 3 ), iridium (Ir; density 22,700 kg / m 3 ), tungsten carbide (WC; density 15,600 kg / m 3 ), tantalum carbide (TaC; density 14,500 kg / m) 3 ), tungsten silicide (WSi 2 ) or the like is used.

  However, since these materials are transition metals or compounds of transition metals, the cross-linking curing reaction of the elastomer or resin proceeds locally on the surface of the powder due to the catalytic effect of the transition metal element, and the powder It is difficult to obtain a backing material having uniform acoustic characteristics due to poor dispersion and generation of voids.

  In addition, the density of the elastomer or resin and the density of the inorganic material having a high specific gravity are different from each other by a factor of 2 or more, and even if the powder is homogeneously mixed before the elastomer or resin is cured, The powder settles and the powder packing density in the composite material varies.

  As a related technique, Patent Document 1 discloses an ultrasonic probe having an acoustic matching layer that is highly sensitive by reducing propagation loss and can be easily manufactured and reduced in cost by reducing man-hours. ing. For this ultrasonic probe, a first acoustic matching layer containing a resin and a second acoustic matching layer in which a metal powder or its oxide powder is mixed into the resin are integrally used. It is characterized by. The first and second acoustic matching layers are separated by a precipitation method or a centrifugal separation method.

However, the sedimentation of the metal powder or its oxide powder (hereinafter referred to as “powder”) varies depending not only on the density difference between the resin and the powder but also on the diameter, shape, and surface condition of the powder. It is difficult to stably separate the second acoustic matching layer to achieve a desired acoustic impedance. Further, when a transition metal or a compound thereof is used in the second acoustic matching layer, the cross-linking and curing reaction of the resin becomes unstable due to the catalytic effect of the transition metal element.
JP-A-11-113908 (first and third pages, FIG. 1)

  Therefore, in view of the above points, the present invention provides an acoustic matching material capable of stably realizing desired acoustic impedance with good reproducibility without destabilizing the cross-linking curing reaction of an elastomer or a resin as a base material. The purpose is to provide. Furthermore, an object of the present invention is to provide an ultrasonic probe using such an acoustic matching material.

In order to solve the above problems, an acoustic matching material according to one aspect of the present invention is an acoustic matching material provided on the front surface of at least one transducer for transmitting and / or receiving ultrasonic waves in an ultrasonic probe. And comprising a base material containing an elastomer or a resin and a composite powder dispersed and filled in the base material, wherein the composite powder comprises a powder of a material having an acoustic impedance larger than that of the base material, and a surface of the powder. And a film containing an oxide of an element belonging to Groups 13 to 15 excluding carbon (C), nitrogen (N), and phosphorus (P).
An ultrasonic probe according to one aspect of the present invention includes a backing material, at least one transducer formed on the main surface of the backing material, and the acoustic matching material according to the present invention. .

  Furthermore, the acoustic matching material manufacturing method according to one aspect of the present invention manufactures an acoustic matching material provided on the front surface of at least one transducer for transmitting and / or receiving ultrasonic waves in an ultrasonic probe. A method of preparing a base material containing an elastomer or a resin, and an alkoxide of an element belonging to Groups 13 to 15 excluding carbon (C), nitrogen (N), and phosphorus (P) in anhydrous alcohol A step of preparing a solution by dissolving in a solution, a step of preparing a mixed solution by adding a powder of a material having an acoustic impedance larger than that of the base material to the solution and stirring, By adding and hydrolyzing the alkoxide in the mixed solution, and heating the mixed solution to evaporate the alcohol and water, the surface of the powder is free of carbon (C), nitrogen (N), and phosphorus (P). Family 13 A step of preparing a composite powder to form a film containing an oxide of Group 15 elements, as well as distributed filling the composite powder in the base material, comprising a step of curing by curing agent matrix.

  According to the present invention, the composite powder in which the surface of the powder of the material having an acoustic impedance larger than that of the base material is coated with an oxide film is dispersed and filled in the base material, thereby cross-linking the elastomer or the resin serving as the base material. A desired acoustic impedance can be stably realized with good reproducibility without destabilizing the curing reaction.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The same constituent elements are denoted by the same reference numerals, and the description thereof is omitted.
FIG. 1 is a perspective view schematically showing the internal structure of an ultrasonic probe according to an embodiment of the present invention. FIG. 2 is a diagram illustrating the internal structure of the ultrasonic probe shown in FIG. It is sectional drawing when cut | disconnecting in a parallel surface. Here, a convex one-dimensional array probe used in an ultrasonic endoscope will be described as an example. However, the present invention is applicable to a probe having a single transducer, or another type of one-dimensional or two-dimensional array probe. Can be applied.

  As shown in FIGS. 1 and 2, this ultrasonic probe includes a backing material 1 having a convex shape on the upper surface, and a plurality of ultrasonic transducers (piezoelectric elements) arranged one-dimensionally on the backing material 1. (Vibrator) 2, resin 3 filled between the piezoelectric vibrators 2, and one or a plurality of acoustic matching layers (two acoustic waves in FIGS. 1 and 2) provided on the piezoelectric vibrator 2. Matching layers 4a and 4b), an acoustic lens 5 provided on the acoustic matching layer as required, two flexible wiring boards (FPC) 6 fixed to both side surfaces and the bottom surface of the backing material 1, The insulating material 7 is formed on the side surfaces of the backing material 1, the piezoelectric vibrator 2, and the acoustic matching layers 4a and 4b via the FPC 6, and the electric wiring 8 and the connector 9 are connected to the FPC 6.

  In FIG. 1, in order to show the arrangement of the piezoelectric vibrators 2, the acoustic matching layers 4a and 4b and the acoustic lens 5 are cut out. In the present embodiment, a plurality of piezoelectric vibrators 2 arranged in the X-axis direction form a one-dimensional vibrator array. Here, the thickness of the backing material 1 (Z-axis direction) is 3 mm, the thickness of the piezoelectric vibrator 2 (Z-axis direction) is 250 μm, and the width of the piezoelectric vibrator 2 (X-axis direction) is 100 μm. is there.

  As shown in FIG. 2, the piezoelectric vibrator 2 includes an individual electrode 2a formed on the backing material 1, a piezoelectric body 2b formed on the individual electrode 2a, and a common electrode 2c formed on the piezoelectric body 2b. Including. Usually, the common electrode 2c is commonly connected to a ground potential (GND). The individual electrodes 2 a of the plurality of piezoelectric vibrators 2 are connected to the electrical wiring 8 through printed wiring formed on the two FPCs 6 fixed to both side surfaces and the bottom surface of the backing material 1.

In general, when providing n acoustic matching layers, it is desirable to optimize the acoustic impedance of each layer as follows, with the thickness of each layer being 1/4 of the wavelength of the ultrasonic wave. That is, if the acoustic impedance of the vibrator is Z 0 , the acoustic impedance of the i-th acoustic matching layer is Z i (i = 1, 2,..., N), and the acoustic impedance of the subject is Z n + 1. The acoustic impedance of each layer is defined by the following equation (5).
ln (Z i + 1 / Z i ) = b i · ln (Z n + 1 / Z 0 ) (5)
Where b i = n C i / 2 n = n! / {(Ni)!・ I!・ 2 n }

  For example, the acoustic impedance of the piezoelectric vibrator is 34 MRayl, and the acoustic impedance of the human body as the subject is 1.5 MRayl. Under the conditions, when two acoustic matching layers are provided, it is suitable that the acoustic impedance of the first layer is 8.92 MRayl and the acoustic impedance of the second layer is 2.34 MRayl. When three acoustic matching layers are provided, the first layer has an acoustic impedance of 14.79 MRayl, the second layer has an acoustic impedance of 4.25 MRayl, and the third layer has an acoustic impedance of 1.85 MRayl. Is suitable.

  Below, the material (acoustic matching material) of the acoustic matching layer which concerns on one Embodiment of this invention is demonstrated. When a plurality of acoustic matching layers are provided on the ultrasonic probe, the acoustic matching material according to the present embodiment is at least the acoustic matching layer on the piezoelectric vibrator side (in FIG. 1 and FIG. 2, the acoustic matching layer 4a). ).

  FIG. 3A is a diagram schematically illustrating the structure of an acoustic matching material according to an embodiment of the present invention. As shown in FIG. 3A, in the present embodiment, a coating is formed on the surface of a high specific gravity powder 11 having an acoustic impedance larger than that of the base material 10 in an elastomer (elastic polymer compound) or resin base material 10 having a small acoustic impedance. An acoustic matching material having a desired acoustic impedance is manufactured by dispersing and filling the composite powder 13 on which 12 is formed.

  Furthermore, the density of the composite powder 13 can be changed by adjusting the coating thickness (attachment amount) of the coating 12. Therefore, even if the volume filling rate of the composite powder 13 is the same, the average density of the acoustic matching material that is a composite of the base material 10 and the composite powder 13 can be changed, and the acoustic impedance of the acoustic matching material is desired. The value can be controlled. In addition, if the volume filling density (volume fraction) of the composite powder 13 is appropriately selected, the composite powder 13 is unlikely to settle during the cross-linking and curing reaction of the elastomer or resin used as the base material 10, so that the homogeneous and stable acoustic matching is achieved. A material is obtained.

  As the base material 10, for example, isoprene rubber, chloroprene rubber, styrene rubber, silicone rubber or the like is used as the elastomer, and epoxy resin, urethane resin, ABS resin or the like is used as the resin.

As a material of the high specific gravity powder 11, an inorganic material containing a transition metal element, that is, a transition metal or a transition metal compound (oxide or the like) is used. Specifically, tungsten (W; density 19,200 kg / m 3 ), tantalum (Ta; density 16,700 kg / m 3 ), gold (Au; density 19,300 kg / m 3 ), platinum (Pt; density 21 , 100 kg / m 3 ), iridium (Ir; density 22,700 kg / m 3 ), tungsten carbide (WC; density 15,600 kg / m 3 ), tantalum carbide (TaC; density 14,500 kg / m 3 ), Tungsten silicide (WSi 2 ) or the like can be used. Among these, since noble metals are expensive, tungsten or tantalum powders or compound powders thereof are generally used.

The material of the coating 12 is carbon (C), which is a nonmetallic element among the elements of Groups 13 to 15 according to the notation of the International Union of Pure and Applied Chemistry (IUPAC). Oxides other than nitrogen (N) and phosphorus (P) can be used. Specifically, aluminum (Al), gallium (Ga), indium (In), tin (Sn), thallium (Tl), lead (Pb), bismuth (Bi), which are metal elements, and a half Boron (B), silicon (Si), germanium (Ge), arsenic (As), and antimony (Sb) oxides which are metal elements can be used. Among these, silicon oxide (SiO 2 ) and aluminum oxide (Al 2 O 3 ) are particularly suitable.

  In the acoustic matching material according to the present embodiment shown in FIG. 3A, since the coating 12 covers the surface of the high specific gravity powder 11, the high specific gravity powder 11 does not directly contact the base material 10, and the groups 13 to 15 Since the group element does not have a catalytic effect on the crosslinking or curing reaction of the elastomer or the resin, the crosslinking or curing reaction of the elastomer or the resin is not unstable due to the catalytic effect of the transition metal element.

  FIG. 3B is a diagram schematically illustrating the structure of a conventional acoustic matching material. As shown in FIG. 3B, in a conventional acoustic matching material, a high specific gravity powder 14 is dispersed and filled in an elastomer or resin base material 10. Accordingly, since the high specific gravity powder 14 is in direct contact with the base material 10, the cross-linking and curing reaction of the elastomer or resin becomes unstable due to the catalytic effect of the transition metal element, and it is difficult to obtain an acoustic matching material having uniform acoustic characteristics. is there.

Next, the manufacturing method of the acoustic matching material which concerns on one Embodiment of this invention is demonstrated. In the following embodiments, an epoxy resin is used as a base material, zirconium oxide (ZiO 2 ) is used as a material of high specific gravity powder, and silicon oxide produced from an alkoxide of silicon (Si) or aluminum (Al) as a film material Although the case where (SiO 2 ) or aluminum oxide (Al 2 O 3 ) is used and ethanol is used as the alcohol will be described, other materials can be used in the present invention.

(1) Production of composite powder In order to produce the acoustic matching material according to the present embodiment, it is necessary to form a film on the surface of the high specific gravity powder. First, using a beaker, silicon or aluminum alkoxide is dissolved in 200 g of absolute ethanol to prepare a solution. Furthermore, 10 g of zirconium oxide powder having an average particle diameter of 1 μm is added to the solution to prepare a mixed solution, and the mixed solution is stirred and suspended while maintaining the temperature at about 60 ° C.

As the silicon alkoxide, tetraethoxysilane (TEOS: Si (OCH 2 CH 3 ) 4 ) is used, but tetramethoxysilane, tetrapropoxysilane, tetrabutoxysilane, or the like can also be used. . Moreover, as an alkoxide of aluminum, triisopropoxy aluminum (Al-i-Pr: Al (OCH (CH 3 ) 2 ) 3 ) is used, but in addition, trimethoxy aluminum, triethoxy aluminum, or Tributoxyaluminum or the like can be used.

Next, 100 g of ethanol containing water having a weight concentration of 10 wt% is dropped into the mixed solution stirred and suspended in the beaker to decompose (hydrolyze) the alkoxide in the mixed solution, thereby A film containing silicon oxide (SiO 2 ) or aluminum oxide (Al 2 O 3 ) is formed on the surface of the powder. If the weight concentration of water in the water-containing ethanol to be dropped is high, the ratio of spontaneous nucleation of alkoxide decomposition products becomes high, which makes it difficult to form a film by aging. On the other hand, if the weight concentration of water in the hydrated ethanol to be dropped is low, the hydrolysis reaction may take a long time or unreacted substances may remain. Therefore, the weight concentration of water in the hydrated ethanol to be dropped is preferably 50 wt% or less, more preferably 5 wt% to 20 wt%.

  In order to promote the hydrolysis reaction, the mixed solution during the dropwise addition of hydrous ethanol is heated to a temperature of about 60 ° C., or hydrochloric acid or the like is added to the added hydrous ethanol to make the mixed solution weakly acidic at a pH of about pH 2 to pH 4. Is better. In order to complete the hydrolysis reaction, it is preferable to carry out dry distillation for several hours while maintaining heating after the dropwise addition of hydrous ethanol. Thereafter, the liquid mixture is kept at a temperature of 100 ° C. to evaporate the liquid components, and the dried powder is kept at a temperature of 300 ° C. for 2 hours. Thereby, a dense film can be formed.

FIG. 4 is a diagram showing the characteristics of the acoustic matching material of the example of the present invention and the comparative example. In Example 1, 1.0 g of TEOS is used as the alkoxide, and the density of the obtained composite powder is 5.05 × 10 3 kg / m 3 . In Example 2, 60.0 g of TEOS was used as the alkoxide, and the density of the obtained composite powder was 2.40 × 10 3 kg / m 3 . In Example 3, 9.0 g of Al-i-Pr was used as the alkoxide, and the density of the obtained composite powder was 5.06 × 10 3 kg / m 3 . In the comparative example, alkoxide is not used, and the density of the zirconium oxide powder is 5.50 × 10 3 kg / m 3 .

(2) Production of acoustic matching material An acoustic matching material is produced by blending and mixing the produced composite powder, an epoxy resin, and a curing agent, and curing the epoxy resin. Here, the mixed material may be defoamed before the epoxy resin is cured. Further, when the epoxy resin is cured, it is preferably cured while being pressurized at a pressure of about 1 MPa in order to avoid mixing of bubbles.

  If the volume fraction of the composite powder in the acoustic matching material is about 50% to 70%, the composite powder is unlikely to settle during the cross-linking and curing reaction of the elastomer or resin as the base material. If the content is about 60%, the composite powder hardly precipitates. Therefore, when producing the acoustic matching materials of the example and the comparative example, the weights of the composite powders (zirconium oxide in the comparative example) in the acoustic matching materials are about 60%. The fraction was set.

Since the density of the epoxy resin is 1.10 × 10 3 kg / m 3 , when the density of the composite powder is ρ (kg / m 3 ), the relationship between the volume fraction Dv and the weight fraction Dm of the composite powder is Is represented by the following equation (6).
Dv = (Dm / ρ) / {Dm / ρ + (1-Dm) /1.10×10 3 } (6)

  As shown in FIG. 4, in Examples 1 and 3, the weight fraction of the composite powder in the acoustic matching material is set to 90 wt%, and in Example 2, the weight fraction of the composite powder in the acoustic matching material is 80 wt%. In the comparative example, the weight fraction of the zirconium oxide powder in the acoustic matching material was set to 90 wt%.

(3) Evaluation of acoustic matching material The acoustic matching materials of the example and the comparative example were processed so as to be a cube having one side of 10 mm, and 10 samples were prepared. Based on the density ρ obtained by the Archimedes method and the sound velocity v obtained from the reflection time of the ultrasonic wave, the acoustic impedance was calculated using the equation (1), and the average value and the variation were obtained.

  In the acoustic matching materials of Examples 1 to 3, the density and sound speed were stable, and a uniform acoustic impedance within ± 1% was obtained. In particular, the acoustic matching materials of Examples 1 and 3 are suitable for use in the acoustic matching layer on the transducer side of the two acoustic matching layers, and the acoustic matching material of Example 2 is composed of three layers. Suitable for use in an intermediate acoustic matching layer of acoustic matching layers. When a higher acoustic impedance is required, tungsten or tungsten carbide may be used instead of zirconium oxide as the material for the high specific gravity powder.

  On the other hand, in the acoustic matching material of the comparative example, when the normal curing agent concentration was used, the curing reaction rapidly progressed immediately after the addition of the powder to the epoxy resin, and mixing of bubbles was observed. Samples were prepared in the same procedure except that the curing agent was 1/5 of the example. In the comparative example, the density measurement results varied, and the variation of the acoustic impedance was as large as ± 6% reflecting this. When a cross section of the sample was observed, bubbles of 20 μm to 100 μm were observed in the epoxy resin.

  The present invention can be used in an ultrasonic probe used for transmitting and receiving ultrasonic waves in an ultrasonic diagnostic apparatus.

1 is a perspective view schematically showing an internal structure of an ultrasonic probe according to an embodiment of the present invention. It is sectional drawing when the internal structure of the ultrasonic probe shown in FIG. 1 is cut | disconnected by the surface parallel to a YZ plane. It is a figure which shows typically the structure of the acoustic matching material which concerns on one Embodiment of this invention. It is a figure which shows typically the structure of the conventional acoustic matching material. It is a figure which shows the characteristic of the acoustic matching material of the Example and comparative example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Backing material 2 Piezoelectric vibrator 3 Resin 4a, 4b Acoustic matching layer 5 Acoustic lens 6 FPC
7 Insulating resin 8 Electrical wiring 9 Connector 10 Base material 11, 14 High specific gravity powder 12 Film 13 Composite powder

Claims (6)

  1. An acoustic matching material provided on the front surface of at least one transducer for transmitting and / or receiving ultrasonic waves in an ultrasonic probe,
    A base material containing an elastomer or resin;
    A composite powder dispersed and filled in the base material, the powder comprising a material having an acoustic impedance larger than that of the base material, and a coating covering the surface of the powder, wherein the coating is carbon (C) , The composite powder comprising oxides of elements of Group 13 to Group 15 excluding nitrogen (N) and phosphorus (P);
    An acoustic matching material comprising:
  2.   The acoustic matching material according to claim 1, wherein the powder is an inorganic material containing a transition metal element.
  3. The acoustic matching material according to claim 1, wherein the film contains silicon oxide (SiO 2 ) or aluminum oxide (Al 2 O 3 ).
  4.   The acoustic matching material according to claim 1, wherein a volume fraction of the composite powder in the acoustic matching material is approximately 50% to 70%.
  5. Backing material,
    At least one vibrator formed on the main surface of the backing material;
    The acoustic matching material according to any one of claims 1 to 4,
    An ultrasonic probe comprising:
  6. A method of manufacturing an acoustic matching material provided on a front surface of at least one transducer for transmitting and / or receiving ultrasonic waves in an ultrasonic probe, comprising:
    Preparing a base material containing an elastomer or resin;
    In anhydrous alcohol, alkoxides of elements of Group 13 to Group 15 excluding carbon (C), nitrogen (N), and phosphorus (P), and powder of material having an acoustic impedance larger than that of the base material are added. And preparing a mixed solution by stirring,
    By adding alcohol and water to the mixed solution to hydrolyze the alkoxide in the mixed solution, and heating the mixed solution to evaporate the alcohol and water, carbon (C), Forming a film containing oxides of elements of Group 13 to Group 15 excluding nitrogen (N) and phosphorus (P) to produce a composite powder;
    Dispersing and filling the composite powder in the base material, and curing the base material with a curing agent;
    A method for producing an acoustic matching material comprising:
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WO2011111572A1 (en) 2010-03-09 2011-09-15 Canon Kabushiki Kaisha Photoacoustic matching material and human tissue simulation material
JP2012000219A (en) * 2010-06-16 2012-01-05 Konica Minolta Medical & Graphic Inc Backing material for ultrasonic probe, ultrasonic probe using the same, and ultrasonic medical image diagnostic apparatus
JP2012191429A (en) * 2011-03-10 2012-10-04 Mitsubishi Electric Corp Aerial ultrasonic sensor
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