JP2009063392A - Inertial force sensor - Google Patents

Inertial force sensor Download PDF

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JP2009063392A
JP2009063392A JP2007230960A JP2007230960A JP2009063392A JP 2009063392 A JP2009063392 A JP 2009063392A JP 2007230960 A JP2007230960 A JP 2007230960A JP 2007230960 A JP2007230960 A JP 2007230960A JP 2009063392 A JP2009063392 A JP 2009063392A
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counter electrode
axis
counter
weight
disposed
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Jiro Terada
二郎 寺田
Ichiro Sato
佐藤  一郎
Takashi Imanaka
崇 今中
Takami Ishida
貴巳 石田
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Panasonic Corp
パナソニック株式会社
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Priority to JP2007230960A priority Critical patent/JP2009063392A/en
Priority claimed from PCT/JP2008/000911 external-priority patent/WO2008129865A1/en
Publication of JP2009063392A publication Critical patent/JP2009063392A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inertial force sensor with improved detection accuracy. <P>SOLUTION: The inertial force sensor is provided with a detection element 1 having an acceleration detecting section and an angular speed detecting section. The detection element 1 has two orthogonal arms, as first and second arms 8, 10 which are coupled in a substantially orthogonal direction; one end of two first arms 8 is supported by a support section 12; the other end of two first arms 8 is coupled to a first fixing section 4; a spindle 3 is coupled to a tip of the second arm 10; the first fixing section 4 is coupled to a second fixing section 6 by a fixing arm 7; the first arm 8 is disposed in the X-axis direction; a first elastic section 9 is provided in the first fixing section 4 so as to be deformed elastically only in the X-axis direction; the fixing arm, as a second coupling section, is disposed in the Y-axis direction; and a second elastic section 11 is provided in the second fixing section 6 that elastically deforms only in the Y-axis direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、航空機、自動車、ロボット、船舶、車両等の移動体の姿勢制御やナビゲーション等、各種電子機器に用いるセンサに関するものである。   The present invention relates to sensors used in various electronic devices such as attitude control and navigation of moving bodies such as aircraft, automobiles, robots, ships, and vehicles.
以下、従来の慣性力センサの一つである加速度センサについて説明する。   Hereinafter, an acceleration sensor which is one of conventional inertial force sensors will be described.
図11は従来の加速度センサの検出素子の平面図、図12は同検出素子のA−A断面図、図13は同検出素子のB−B断面図である。   FIG. 11 is a plan view of a detection element of a conventional acceleration sensor, FIG. 12 is a cross-sectional view taken along line AA of the detection element, and FIG. 13 is a cross-sectional view taken along line BB of the detection element.
図11〜図13において、従来の加速度センサは、加速度を検出する検出素子51と、この検出素子51から出力される加速度信号を演算処理して加速度を検出する処理回路(図示せず)を備えている。この検出素子51は、錘部52を支持した支持部54と、可撓部56を介して支持部54と連結された固定部59とを有しており、この固定部59によって検出素子51が実装基板に実装されている。   11 to 13, the conventional acceleration sensor includes a detection element 51 that detects acceleration, and a processing circuit (not shown) that detects acceleration by performing arithmetic processing on an acceleration signal output from the detection element 51. ing. The detection element 51 includes a support portion 54 that supports the weight portion 52 and a fixing portion 59 that is connected to the support portion 54 via a flexible portion 56. It is mounted on the mounting board.
また、可撓部56はアーム形状であって、この可撓部56は支持部54を中心にして十字状に配置し、一対の可撓部56と支持部54とを同一直線上に配置するようにしている。   The flexible portion 56 has an arm shape, and the flexible portion 56 is arranged in a cross shape with the support portion 54 as the center, and the pair of flexible portions 56 and the support portion 54 are arranged on the same straight line. I am doing so.
可撓部56には歪抵抗素子58を設けており、錘部52の可動に起因して撓む可撓部56の状態変化に基づき、歪抵抗素子58の抵抗値変化を加速度信号として出力している。   A strain resistance element 58 is provided in the flexible portion 56, and a change in resistance value of the strain resistance element 58 is output as an acceleration signal based on a change in the state of the flexible portion 56 that is bent due to the movement of the weight portion 52. ing.
次に、加速度の検出について説明する。   Next, detection of acceleration will be described.
互いに直交するX軸、Y軸、Z軸において、X軸方向とY軸方向に十字状のアームからなる可撓部56を配置した場合、図14に示すように、例えば、X軸方向に加速度が生じると、錘部52が加速度の生じた軸方向に移動しようとするために、X軸方向に配置した2つの可撓部56の内、一方の可撓部56にはZ軸の正の方向に撓みが発生し、他方の可撓部56にはZ軸の負の方向に撓みが発生する(支持部54を中心にして、錘部52がZ軸方向に回転しようとして撓みが発生する)。そうすると、2つの可撓部56に設けた2つの歪抵抗素子58も、可撓部56の撓みに応じてZ軸の正負の方向に撓むので、歪抵抗素子58の抵抗値が変化する。この抵抗値変化を加速度信号として出力して加速度を検出するものである。   When the flexible portion 56 formed of a cross-shaped arm is arranged in the X-axis direction and the Y-axis direction on the X-axis, Y-axis, and Z-axis that are orthogonal to each other, for example, as shown in FIG. Occurs, one of the two flexible portions 56 arranged in the X-axis direction has a positive Z-axis in order to move the weight portion 52 in the axial direction in which the acceleration occurs. Bending occurs in the direction, and bending occurs in the negative direction of the Z-axis in the other flexible portion 56 (the bending portion 52 is bent as the weight portion 52 tries to rotate in the Z-axis direction around the support portion 54). ). Then, the two strain resistance elements 58 provided in the two flexible portions 56 also bend in the positive and negative directions of the Z axis according to the flexure of the flexible portion 56, so that the resistance value of the strain resistance element 58 changes. This resistance value change is output as an acceleration signal to detect acceleration.
このような加速度センサを検出したい検出軸に対応させて、車両等の移動体の姿勢制御装置やナビゲーション装置等に用いている。   Such an acceleration sensor is used in a posture control device, a navigation device, or the like of a moving body such as a vehicle corresponding to a detection axis to be detected.
なお、この出願の発明に関連する先行技術文献情報としては、例えば、特許文献1が知られている。
特開平10−48243号公報
As prior art document information related to the invention of this application, for example, Patent Document 1 is known.
Japanese Patent Laid-Open No. 10-48243
上記構成では、アーム形状の可撓部56を、支持部54を中心にして、十字状に配置しているので、加速度が生じた軸方向に配置している可撓部56によって、錘部52の移動が規制される。X軸方向に配置した2つの可撓部56の内、一方の可撓部56にはZ軸の正の方向に撓みが発生し、他方の可撓部56にはZ軸の負の方向に撓みが発生する。   In the above configuration, since the arm-shaped flexible portion 56 is arranged in a cross shape with the support portion 54 as the center, the weight portion 52 is formed by the flexible portion 56 arranged in the axial direction in which acceleration occurs. Movement is restricted. Of the two flexible portions 56 arranged in the X-axis direction, one of the flexible portions 56 is bent in the positive direction of the Z-axis, and the other flexible portion 56 is bent in the negative direction of the Z-axis. Deflection occurs.
このとき、図14において、X軸方向へ加速度が生じた場合、錘部52がX軸方向に移動しようとするが、X軸方向に配置した可撓部56によって、錘部52の移動が規制される。この規制によって、錘部52は支持部54を中心にしてZ軸方向に回転しようとするので、可撓部56に撓みが生じるが、この撓み量は小さい。これは、錘部52にかかる直線方向への力が、回転方向への力に変換されることに起因すると考えられる。   At this time, in FIG. 14, when acceleration occurs in the X-axis direction, the weight portion 52 tries to move in the X-axis direction, but the movement of the weight portion 52 is restricted by the flexible portion 56 arranged in the X-axis direction. Is done. Due to this restriction, the weight portion 52 tries to rotate in the Z-axis direction around the support portion 54, so that the flexible portion 56 bends, but the amount of this bend is small. This is considered due to the fact that the force in the linear direction applied to the weight portion 52 is converted into the force in the rotational direction.
したがって、可撓部56に配置した歪抵抗素子58の抵抗値変化も小さくなり、検出感度が小さいという問題点を有していた。   Therefore, the resistance value change of the strain resistance element 58 arranged in the flexible portion 56 is also reduced, and there is a problem that the detection sensitivity is low.
本発明は上記問題点を解決するもので、検出感度を大きくした慣性力センサを提供することを目的としている。   The present invention solves the above-described problems, and an object thereof is to provide an inertial force sensor with increased detection sensitivity.
上記目的を達成するために本発明は、特に、検出素子は、第1連結部を介して錘部を連結した第1固定部と、第2連結部を介して前記第1固定部を連結した第2固定部と、前記錘部と対向させた対向基板と、前記錘部と前記対向基板の各々の対向面に配置した対向電極部とを有し、前記加速度検出部では、前記対向電極部の静電容量の変化量を検出して加速度を検出しており、互いに直交するX軸、Y軸、Z軸において、前記第1連結部をX軸方向に配置するとともに前記第1連結部または前記第1固定部にX軸方向のみに弾性変形する第1弾性部を設け、前記第2連結部をY軸方向に配置するとともに前記第2連結部または前記第2固定部にY軸方向のみに弾性変形する第2弾性部を設け、前記錘部または前記対向基板のいずれか一方に配置した前記対向電極は、X軸上に配置したX対向電極とY軸上に配置したY対向電極とを有し、前記X対向電極は、その一部が他方に配置した前記対向電極と対向しないようにX軸方向にずらして配置するとともに、前記Y対向電極は、その一部が他方に配置した前記対向電極と対向しないようにY軸方向にずらして配置した構成である。   In order to achieve the above object, in the present invention, in particular, the detection element connects the first fixed part connected to the weight part via the first connection part and the first fixed part via the second connection part. A second fixed portion; a counter substrate opposed to the weight portion; and a counter electrode portion disposed on each of the counter surfaces of the weight portion and the counter substrate. In the acceleration detection portion, the counter electrode portion The acceleration is detected by detecting the amount of change in the electrostatic capacity, and the X-axis direction, the Y-axis, and the Z-axis that are orthogonal to each other are arranged in the X-axis direction and the first connection portion or The first fixed portion is provided with a first elastic portion that is elastically deformed only in the X-axis direction, the second connecting portion is arranged in the Y-axis direction, and the second connecting portion or the second fixed portion is only in the Y-axis direction. Is provided with a second elastic portion that is elastically deformed and arranged on either the weight portion or the counter substrate. The counter electrode has an X counter electrode disposed on the X axis and a Y counter electrode disposed on the Y axis, and the X counter electrode does not partially face the counter electrode disposed on the other side. Thus, the Y counter electrode is arranged so as to be shifted in the Y axis direction so that a part of the Y counter electrode is not opposed to the counter electrode arranged on the other side.
上記構成により、互いに直交するX軸、Y軸、Z軸において、X軸方向に加速度が生じると第1弾性部がX軸方向に変位し、Y軸方向に加速度が生じると第2弾性部がY軸方向に変位する。すなわち、加速度の生じた直線方向への力が回転方向への力に変換されることもなく、第1弾性部または第2弾性部は、加速度の生じた方向と同方向にのみ変位するので変位しやすく、対向電極部の静電容量の変化量を容易に大きくして、検出感度を向上できる。   With the above configuration, in the X axis, Y axis, and Z axis orthogonal to each other, when acceleration occurs in the X axis direction, the first elastic portion is displaced in the X axis direction, and when acceleration occurs in the Y axis direction, the second elastic portion is Displacement in the Y-axis direction. That is, the force in the linear direction in which the acceleration is generated is not converted into the force in the rotation direction, and the first elastic portion or the second elastic portion is displaced only in the same direction as the direction in which the acceleration is generated. The detection sensitivity can be improved by easily increasing the amount of change in the capacitance of the counter electrode.
特に、X軸方向とY軸方向の加速度を検出するにあたって、X軸方向の加速度は第1弾性部がX軸方向にのみ変位することにより検出され、Y軸方向の加速度は第2弾性部がY軸方向にのみ変位することにより検出され、各々、一方の加速度の影響を受けることなく独立して加速度を検出することができ、検出感度を向上できる。   In particular, when detecting the acceleration in the X-axis direction and the Y-axis direction, the acceleration in the X-axis direction is detected when the first elastic portion is displaced only in the X-axis direction, and the acceleration in the Y-axis direction is detected by the second elastic portion. It is detected by displacing only in the Y-axis direction, and the acceleration can be detected independently without being affected by one of the accelerations, and the detection sensitivity can be improved.
さらに、錘部または対向基板のいずれか一方に配置した対向電極は、X軸上に配置したX対向電極とY軸上に配置したY対向電極とを有し、錘部と対向基板の各々の対向面に互いに配置したX対向電極は互いにX軸方向にずれており、X対向電極は、その一部が他方に配置した対向電極と対向しないようにX軸方向にずらして配置するとともに、Y対向電極は、その一部が他方に配置した対向電極と対向しないようにY軸方向にずらして配置しているので、加速度が発生した際に、その加速度がX軸またはY軸の正の方向に発生したのか、負の方向に発生したのかを判別できる。   Furthermore, the counter electrode disposed on either the weight portion or the counter substrate has an X counter electrode disposed on the X axis and a Y counter electrode disposed on the Y axis, and each of the weight portion and the counter substrate is provided. The X counter electrodes arranged on the opposite surfaces are shifted from each other in the X axis direction, and the X counter electrode is arranged so as to be shifted in the X axis direction so that part of the X counter electrode does not face the counter electrode arranged on the other side. The counter electrode is shifted in the Y-axis direction so that a part of the counter electrode does not face the counter electrode disposed on the other side. Therefore, when acceleration occurs, the acceleration is positive in the X-axis or Y-axis direction. It can be determined whether it occurred in the negative direction or in the negative direction.
これは、発生する加速度が正または負の方向によって、静止時の対向電極の静電容量が大きくなるか、小さくなるかいずれかの状態となるので、判別が可能となる。仮に、対向電極がずれていない場合は、正または負のいずれの方向に加速度が発生しても、静止時の対向電極の静電容量に比べて小さくなるので判別ができない。   This can be determined because the capacitance of the counter electrode at rest is either increased or decreased depending on whether the generated acceleration is positive or negative. If the counter electrode is not displaced, even if acceleration occurs in either the positive or negative direction, it cannot be determined because it is smaller than the capacitance of the counter electrode at rest.
さらに、第1対向電極部は、錘部の表面側と対向させた第1対向基板と錘部の各々の対向面に第1対向電極を配置し、第2対向電極部は、錘部の裏面側と対向させた第2対向基板と錘部の各々の対向面に第2対向電極を配置して形成しているので、例えば、Z軸方向へ錘部が変位したとしても、第1対向電極の対向距離が広がれば、第2対向電極の対向距離が縮まり、第1対向電極の対向距離が縮めば、第2対向電極の対向距離が広がる。   Further, the first counter electrode portion is arranged with a first counter electrode on each of the counter surfaces of the first counter substrate and the weight portion facing the surface side of the weight portion, and the second counter electrode portion is a back surface of the weight portion. For example, even if the weight portion is displaced in the Z-axis direction, the first counter electrode is formed because the second counter electrode is formed on the opposing surfaces of the second counter substrate and the weight portion facing the side. If the opposing distance of the second counter electrode increases, the opposing distance of the second counter electrode decreases. If the opposing distance of the first counter electrode decreases, the opposing distance of the second counter electrode increases.
すなわち、第1対向電極の対向距離および第2対向電極の対向距離の総対向距離が変わらないので、振動等によって、Z軸方向へ錘部が変位したとしても、第1、第2対向電極の全体の静電容量の変化量が変化することがなく、X軸またはY軸の加速度の検出精度を劣化させずに検出精度を向上できる。   That is, since the total opposing distance of the opposing distance of the first opposing electrode and the opposing distance of the second opposing electrode does not change, even if the weight portion is displaced in the Z-axis direction due to vibration or the like, the first and second opposing electrodes The amount of change in the overall capacitance does not change, and the detection accuracy can be improved without degrading the detection accuracy of the X-axis or Y-axis acceleration.
(実施の形態1)
図1は本発明の第1の実施の形態における複合センサの検出素子の分解斜視図、図2は同検出素子の上面側からの透視平面図、図3は同検出素子の下面側からの透視平面図、図4は図1のA−A断面図、図5は図1のB−B断面図である。
(Embodiment 1)
1 is an exploded perspective view of the detection element of the composite sensor according to the first embodiment of the present invention, FIG. 2 is a perspective plan view from the upper surface side of the detection element, and FIG. 3 is a perspective view from the lower surface side of the detection element. 4 is a cross-sectional view taken along the line AA in FIG. 1, and FIG. 5 is a cross-sectional view taken along the line BB in FIG.
図1において、本発明の第1の実施の形態における複合センサは、加速度検出部と角速度検出部を有する検出素子1を備えている。   In FIG. 1, the composite sensor according to the first embodiment of the present invention includes a detection element 1 having an acceleration detection unit and an angular velocity detection unit.
この検出素子1は、第1連結部を介して錘部3を連結した第1固定部4と、錘部3と対向させた第1対向基板5と、第2連結部を介して前記第1固定部4を連結した第2固定部6とを有する。   The detection element 1 includes a first fixed portion 4 that connects the weight portion 3 via the first connecting portion, a first counter substrate 5 that faces the weight portion 3, and the first connecting portion via the second connecting portion. And a second fixing portion 6 to which the fixing portion 4 is connected.
具体的には、この検出素子1は、第1アーム8を第2アーム10に略直交方向に連結した2つの直交アームを有し、2つの第1アーム8の一端を支持部12にて支持し、2つの第1アーム8の他端を枠体形状の第1固定部4に連結し、錘部3を枠体形状の第1固定部4の内方に配置している。第2アーム10は、第2アーム10自身と対向するまでU字状に折曲し、折曲した第2アーム10の先端部に錘部3を連結している。第1固定部4は固定アーム7にて第2固定部6と連結し、第1固定部4を第2固定部6の内方に配置している。第1アーム8と支持部12とを略同一直線上に配置し、第1アーム8および第2アーム10を検出素子1の中心に対して対称配置している。第1アーム8が錘部3を連結する第1連結部に相当し、固定アーム7が第2連結部に相当する。   Specifically, the detection element 1 has two orthogonal arms in which the first arm 8 is connected to the second arm 10 in a substantially orthogonal direction, and one end of the two first arms 8 is supported by the support portion 12. The other ends of the two first arms 8 are connected to the frame-shaped first fixing portion 4, and the weight portion 3 is arranged inside the frame-shaped first fixing portion 4. The second arm 10 is bent in a U shape until it faces the second arm 10 itself, and the weight 3 is connected to the tip of the bent second arm 10. The first fixing portion 4 is connected to the second fixing portion 6 by a fixing arm 7, and the first fixing portion 4 is disposed inside the second fixing portion 6. The first arm 8 and the support portion 12 are arranged on substantially the same straight line, and the first arm 8 and the second arm 10 are arranged symmetrically with respect to the center of the detection element 1. The first arm 8 corresponds to a first connecting part that connects the weight part 3, and the fixed arm 7 corresponds to a second connecting part.
互いに直交するX軸、Y軸、Z軸において、第1連結部である第1アーム8をX軸方向に配置するとともに第1固定部4にはX軸方向のみに弾性変形する第1弾性部9を設け、第2連結部である固定アーム7をY軸方向に配置するとともに第2固定部6にはY軸方向のみに弾性変形する第2弾性部11を設け、第2固定部6にて実装基板に実装している。   A first elastic portion in which the first arm 8 as the first connecting portion is arranged in the X-axis direction and the first fixed portion 4 is elastically deformed only in the X-axis direction in the X axis, the Y axis, and the Z axis orthogonal to each other. 9, the fixed arm 7 as the second connecting portion is arranged in the Y-axis direction, and the second fixing portion 6 is provided with a second elastic portion 11 that is elastically deformed only in the Y-axis direction. Mounted on the mounting board.
この第1弾性部9は、第1アーム8と直交する第1固定部4の一部に、Y軸方向にスリット13を形成して設けており、第2弾性部11は、第2アーム10と直交する第2固定部6の一部に、X軸方向にスリット13を形成して設けている。   The first elastic portion 9 is formed by forming a slit 13 in a part of the first fixing portion 4 orthogonal to the first arm 8 in the Y-axis direction, and the second elastic portion 11 includes the second arm 10. A slit 13 is formed in a part of the second fixing portion 6 orthogonal to the X axis direction.
また、錘部3の表面側に第1対向基板5を対向させるとともに、錘部3と第1対向基板5の各々の対向面に、第1対向電極部として、第1対向電極〜第4対向電極14、16、18、20を配置しており、錘部3の裏面側に第2対向基板15を対向させるとともに、錘部3と第2対向基板15の各々の対向面に、第2対向電極部として、第5対向電極〜第8対向電極17、19、21、23を配置している。   In addition, the first counter substrate 5 is opposed to the surface side of the weight portion 3, and the first counter electrode to the fourth counter electrode are provided as first counter electrode portions on the respective facing surfaces of the weight portion 3 and the first counter substrate 5. The electrodes 14, 16, 18, and 20 are disposed, the second counter substrate 15 is opposed to the back surface side of the weight portion 3, and the second counter substrate 15 is opposed to each of the counter surfaces of the weight portion 3 and the second counter substrate 15. As the electrode portion, the fifth counter electrode to the eighth counter electrode 17, 19, 21, 23 are arranged.
これら第1対向電極〜第4対向電極14、16、18、20、第5対向電極〜第8対向電極17、19、21、23の各々の位置関係は、図2、図3に示すとおりである。   The positional relationship of each of the first counter electrode to the fourth counter electrode 14, 16, 18, 20, and the fifth counter electrode to the eighth counter electrode 17, 19, 21, 23 is as shown in FIGS. is there.
第1対向基板5の対向面に配置した第1対向電極〜第4対向電極14、16、18、20と、第2対向基板15の対向面に配置した第5対向電極〜第8対向電極17、19、21、23は、X軸上に配置したX対向電極とY軸上に配置したY対向電極とを有する。   The first counter electrode to the fourth counter electrodes 14, 16, 18, 20 disposed on the counter surface of the first counter substrate 5, and the fifth counter electrode to the eighth counter electrode 17 disposed on the counter surface of the second counter substrate 15. , 19, 21 and 23 have an X counter electrode disposed on the X axis and a Y counter electrode disposed on the Y axis.
第1対向電極〜第4対向電極14、16、18、20は、各々、X軸上に配置した第1X対向電極14X、第2X対向電極16X、第3X対向電極18X、第4X対向電極20Xと、Y軸上に配置した第1Y対向電極14Y、第2Y対向電極16Y、第3Y対向電極18Y、第4Y対向電極20Yとを有し、第5対向電極〜第8対向電極17、19、21、23は、各々、X軸上に配置した第5X対向電極17X、第6X対向電極19X、第7X対向電極21X、第8X対向電極23Xと、Y軸上に配置した第5Y対向電極17Y、第6Y対向電極19Y、第7Y対向電極21Y、第8Y対向電極23Yとを有する。   The first to fourth counter electrodes 14, 16, 18, and 20 are respectively a first X counter electrode 14X, a second X counter electrode 16X, a third X counter electrode 18X, and a fourth X counter electrode 20X disposed on the X axis. , The first Y counter electrode 14Y, the second Y counter electrode 16Y, the third Y counter electrode 18Y, and the fourth Y counter electrode 20Y arranged on the Y axis, and the fifth counter electrode to the eighth counter electrode 17, 19, 21, 23, a fifth X counter electrode 17X, a sixth X counter electrode 19X, a seventh X counter electrode 21X, and an eighth X counter electrode 23X arranged on the X axis, and a fifth Y counter electrode 17Y and a sixth Y arranged on the Y axis, respectively. It has a counter electrode 19Y, a seventh Y counter electrode 21Y, and an eighth Y counter electrode 23Y.
そして、錘部3の対向面に配置した第1対向電極〜第4対向電極14、16、18、20に対して、第1対向基板5の対向面に配置した第1X対向電極14X、第2X対向電極16X、第3X対向電極18X、第4X対向電極20Xは、互いにX軸方向にずれており、Y軸上に配置した第1Y対向電極14Y、第2Y対向電極16Y、第3Y対向電極18Y、第4Y対向電極20Yは、互いにY軸方向にずれている。   And with respect to the 1st counter electrode-the 4th counter electrode 14, 16, 18, 20 arrange | positioned at the opposing surface of the weight part 3, the 1st X counter electrode 14X arrange | positioned at the opposing surface of the 1st counter substrate 5, 2X The counter electrode 16X, the third X counter electrode 18X, and the fourth X counter electrode 20X are shifted from each other in the X-axis direction, and the first Y counter electrode 14Y, the second Y counter electrode 16Y, the third Y counter electrode 18Y, which are arranged on the Y axis, The fourth Y counter electrodes 20Y are displaced from each other in the Y-axis direction.
また、錘部3の対向面に配置した第5対向電極〜第8対向電極17、19、21、23に対して、第2対向基板15の対向面に配置した第5X対向電極17X、第6X対向電極19X、第7X対向電極21X、第8X対向電極23Xは、互いにX軸方向にずれており、Y軸上に配置した第5Y対向電極17Y、第6Y対向電極19Y、第7Y対向電極21Y、第8Y対向電極23Yは、互いにY軸方向にずれている。   Further, with respect to the fifth to eighth counter electrodes 17, 19, 21, and 23 disposed on the facing surface of the weight portion 3, the fifth X counter electrodes 17 </ b> X and 6 </ b> X disposed on the facing surface of the second counter substrate 15. The counter electrode 19X, the seventh X counter electrode 21X, and the eighth X counter electrode 23X are shifted from each other in the X-axis direction, and the fifth Y counter electrode 17Y, the sixth Y counter electrode 19Y, the seventh Y counter electrode 21Y, The eighth Y counter electrodes 23Y are displaced from each other in the Y-axis direction.
さらに、互いに対向する一方の2つの第2アーム10には錘部3を駆動振動させる駆動電極22およびその駆動を検知する検知電極24を配置するとともに、互いに対向する他方の2つの第2アーム10には、第2アーム10の歪を感知する第1感知電極26、第2感知電極28を配置している。これらの電極の内、少なくとも、駆動電極22、検知電極24、第1感知電極26、第2感知電極28は、圧電層を介在させた上部電極と下部電極とからなる。   Further, a drive electrode 22 for driving and vibrating the weight portion 3 and a detection electrode 24 for detecting the drive are arranged on one of the two second arms 10 facing each other, and the other two second arms 10 facing each other. The first sensing electrode 26 and the second sensing electrode 28 for sensing the distortion of the second arm 10 are arranged. Among these electrodes, at least the drive electrode 22, the detection electrode 24, the first sensing electrode 26, and the second sensing electrode 28 are composed of an upper electrode and a lower electrode with a piezoelectric layer interposed therebetween.
そして、これら第1対向電極〜第4対向電極14、16、18、20、第5対向電極〜第8対向電極17、19、21、23、駆動電極22、検知電極24、第1、第2感知電極26、28からは信号線(図示せず)が固定アーム7まで引き出され、この信号線の端部にてワイヤーボンディング等を介して実装基板の配線パターンに電気的に接続される。   And these 1st counter electrode-4th counter electrode 14, 16, 18, 20, 5th counter electrode-8th counter electrode 17, 19, 21, 23, drive electrode 22, detection electrode 24, 1st, 2nd A signal line (not shown) is drawn from the sensing electrodes 26 and 28 to the fixed arm 7 and is electrically connected to the wiring pattern of the mounting substrate through wire bonding or the like at the end of the signal line.
次に、角速度検出部および加速度検出部について説明する。   Next, the angular velocity detection unit and the acceleration detection unit will be described.
まず、角速度検出部について説明する。図6に示すように、互いに直交したX軸、Y軸、Z軸において、検出素子1の第1アーム8をX軸方向に配置して、第2アーム10をY軸方向に配置した場合、駆動電極22に共振周波数の交流電圧を印加すると、駆動電極22を配置した第2アーム10を起点に第2アーム10が駆動振動し、それに伴って錘部3も第2アーム10の対向方向(実線の矢印と点線の矢印で記した駆動振動方向)に駆動振動する。また、4つの第2アーム10および4つの錘部3の全てが同調して第2アーム10の対向方向(駆動振動方向)に駆動振動する。この検出素子1における駆動振動方向はX軸方向となる。   First, the angular velocity detection unit will be described. As shown in FIG. 6, when the first arm 8 of the detection element 1 is arranged in the X-axis direction and the second arm 10 is arranged in the Y-axis direction on the X axis, Y axis, and Z axis orthogonal to each other, When an AC voltage having a resonance frequency is applied to the drive electrode 22, the second arm 10 is driven to vibrate starting from the second arm 10 on which the drive electrode 22 is disposed, and accordingly, the weight 3 is also opposed to the second arm 10 ( Drive vibration in the direction of drive vibration indicated by solid line arrows and dotted line arrows. All of the four second arms 10 and the four weight portions 3 are synchronously driven and vibrated in a direction opposite to the second arm 10 (drive vibration direction). The driving vibration direction in the detection element 1 is the X-axis direction.
このとき、例えば、Z軸の左回りに角速度が生じた場合は、錘部3の駆動振動と同調して、錘部3に対して駆動振動方向と直交した方向(実線の矢印と点線の矢印で記したコリオリ方向(Y軸方向))にコリオリ力が発生するので、第2アーム10にZ軸の左回りの角速度に起因した歪を発生させることができる。すなわち、コリオリ力に起因して撓むこの第2アーム10の状態変化(第2アーム10に発生した歪)によって、第1、第2感知電極26、28から電圧が出力され、この出力電圧に基づき角速度が検出される。   At this time, for example, when an angular velocity is generated in the counterclockwise direction of the Z axis, a direction (solid line arrow and dotted line arrow) perpendicular to the drive vibration direction with respect to the weight part 3 is synchronized with the drive vibration of the weight part 3. Since the Coriolis force is generated in the Coriolis direction (Y-axis direction) described above, distortion caused by the counterclockwise angular velocity of the Z-axis can be generated in the second arm 10. That is, a voltage is output from the first and second sensing electrodes 26 and 28 due to a change in the state of the second arm 10 that is bent due to the Coriolis force (a strain generated in the second arm 10). Based on this, the angular velocity is detected.
次に、加速度検出部について説明する。   Next, the acceleration detection unit will be described.
まず、X軸方向の加速度について説明する。図1〜図3、図7に示すように、互いに直交するX軸、Y軸、Z軸において、第1対向基板5、第2対向基板15をXY平面に配置した場合、加速度が発生していなければ、錘部3の対向面に配置した第1対向電極14に対して、第1対向基板5の対向面に配置した第1X対向電極14Xの対向端部(X1)と、第2X対向電極16Xの対向端部(X2)は互いに少しずれた位置にあり、錘部3の対向面に配置した第5対向電極17に対して、第2対向基板15の対向面に配置した第5X対向電極17Xの対向端部(X1)と、第6X対向電極19Xの対向端部(X2)も互いに少しずれた位置にある。図示していないが、第3X対向電極18Xの対向端部と第4X対向電極20の対向端部も互いに少しずれた位置にあり、第7X対向電極21Xの対向端部と第8X対向電極23Xの対向端部も少しずれた位置にある。   First, acceleration in the X-axis direction will be described. As shown in FIGS. 1 to 3 and 7, acceleration is generated when the first counter substrate 5 and the second counter substrate 15 are arranged on the XY plane in the X axis, the Y axis, and the Z axis orthogonal to each other. Otherwise, with respect to the first counter electrode 14 disposed on the counter surface of the weight portion 3, the counter end (X1) of the first X counter electrode 14X disposed on the counter surface of the first counter substrate 5 and the second X counter electrode The counter end portion (X2) of 16X is slightly shifted from each other, and the fifth X counter electrode disposed on the counter surface of the second counter substrate 15 with respect to the fifth counter electrode 17 disposed on the counter surface of the weight portion 3. The opposing end portion (X1) of 17X and the opposing end portion (X2) of the sixth X opposing electrode 19X are also slightly shifted from each other. Although not shown, the opposing end of the third X opposing electrode 18X and the opposing end of the fourth X opposing electrode 20 are also slightly shifted from each other, and the opposing end of the seventh X opposing electrode 21X and the eighth X opposing electrode 23X The opposite end is also slightly displaced.
さらに、錘部3のX軸方向の移動時に、第1X対向電極14Xの静電容量変化量と、第2X対向電極16Xの静電容量変化量とを異なるように配置するとともに、第3X対向電極18Xの静電容量変化量と、第4X対向電極20Xの静電容量変化量とを異なるように配置し、第5X対向電極17Xの静電容量変化量と、第6X対向電極19Xの静電容量変化量とを異なるように配置するとともに、第7X対向電極21Xの静電容量変化量と、第8X対向電極23Xの静電容量変化量とを異なるように配置している。   Further, when the weight 3 moves in the X-axis direction, the capacitance change amount of the first X counter electrode 14X and the capacitance change amount of the second X counter electrode 16X are arranged differently, and the third X counter electrode The capacitance change amount of 18X and the capacitance change amount of the fourth X counter electrode 20X are arranged differently, and the capacitance change amount of the fifth X counter electrode 17X and the capacitance of the sixth X counter electrode 19X are arranged. The amount of change is different from that of the seventh X counter electrode 21X, and the amount of change in capacitance of the eighth X counter electrode 23X is different.
このとき、例えば、X軸方向に加速度が生じた場合、図1、図8に示すように、第1弾性部9がX軸方向に変位し、加速度の生じた直線方向への力が回転方向への力に変換されることもなく、第1弾性部9は、加速度の生じたX軸方向と同方向にのみ変位する。この結果、第1X対向電極14Xの対向端部(X1)と、第2X対向電極16Xの対向端部(X2)は互いに(W)だけ位置がずれ、第5X対向電極17Xの対向端部(X1)と、第6X対向電極19Xの対向端部(X2)も互いに(W)だけ位置がずれる。図示していない、第3X対向電極18Xの対向端部と第4X対向電極20Xの対向端部、第7X対向電極21Xの対向端部と第8X対向電極23Xの対向端部も互いに(W)だけ位置がずれる。   At this time, for example, when acceleration occurs in the X-axis direction, as shown in FIGS. 1 and 8, the first elastic portion 9 is displaced in the X-axis direction, and the force in the linear direction in which the acceleration occurs is the rotational direction. The first elastic part 9 is displaced only in the same direction as the X-axis direction in which the acceleration occurs without being converted into a force. As a result, the opposing end (X1) of the first X opposing electrode 14X and the opposing end (X2) of the second X opposing electrode 16X are displaced from each other by (W), and the opposing end (X1) of the fifth X opposing electrode 17X ) And the opposite end portion (X2) of the sixth X counter electrode 19X are also shifted from each other by (W). The counter end of the third X counter electrode 18X and the counter end of the fourth X counter electrode 20X, the counter end of the seventh X counter electrode 21X, and the counter end of the eighth X counter electrode 23X, which are not shown, are also only (W). The position shifts.
具体的な検出処理は次の通りである。   The specific detection process is as follows.
X軸方向の加速度は、第1X対向電極14Xと第3X対向電極18Xと第5X対向電極17Xと第7X対向電極21Xの合成静電容量と、第2X対向電極16Xと第4X対向電極20Xと第6X対向電極19Xと第8X対向電極23Xの合成静電容量との差動変化量から検出している。   The acceleration in the X-axis direction is the combined capacitance of the first X counter electrode 14X, the third X counter electrode 18X, the fifth X counter electrode 17X, and the seventh X counter electrode 21X, the second X counter electrode 16X, the fourth X counter electrode 20X, It is detected from the differential change amount between the combined capacitance of the 6X counter electrode 19X and the eighth X counter electrode 23X.
次に、Y軸方向の加速度について説明する。図1、図9に示すように、互いに直交するX軸、Y軸、Z軸において、第1対向基板5をXY平面に配置した場合、加速度が発生していなければ、錘部3の対向面に配置した第1対向電極14に対して、第1対向基板5の対向面に配置した第1Y対向電極14Yの対向端部(Y1)と、第3Y対向電極18Yの対向端部(Y2)は互いに少しずれた位置にあり、錘部3の対向面に配置した第5対向電極17に対して、第2対向基板15の対向面に配置した第5Y対向電極17Yの対向端部(Y1)と、第7Y対向電極21Yの対向端部(Y2)も互いに少しずれた位置にある。図示していないが、第2Y対向電極16Yの対向端部と第4Y対向電極20Yの対向端部も互いに少しずれた位置にあり、第6Y対向電極19Yの対向端部と第8Y対向電極23Yの対向端部も互いに少しずれた位置にある。   Next, the acceleration in the Y-axis direction will be described. As shown in FIGS. 1 and 9, when the first counter substrate 5 is arranged on the XY plane in the X axis, the Y axis, and the Z axis orthogonal to each other, if the acceleration is not generated, the counter surface of the weight portion 3 The opposing end (Y1) of the first Y opposing electrode 14Y arranged on the opposing surface of the first opposing substrate 5 and the opposing end (Y2) of the third Y opposing electrode 18Y with respect to the first opposing electrode 14 arranged in FIG. The fifth counter electrode 17 disposed on the counter surface of the second counter substrate 15 is opposed to the fifth counter electrode 17 disposed on the counter surface of the weight portion 3 at a position slightly shifted from each other. The opposing end (Y2) of the seventh Y counter electrode 21Y is also slightly shifted from each other. Although not shown, the opposing end of the second Y opposing electrode 16Y and the opposing end of the fourth Y opposing electrode 20Y are also slightly shifted from each other, and the opposing end of the sixth Y opposing electrode 19Y and the eighth Y opposing electrode 23Y Opposing ends are also slightly displaced from each other.
さらに、錘部3のY軸方向の移動時に、第1Y対向電極14Yの静電容量変化量と、第3Y対向電極18Yの静電容量変化量とを異なるように配置するとともに、第2Y対向電極16Yの静電容量変化量と、第4Y対向電極20Yの静電容量変化量とを異なるようにし、第5Y対向電極17Yの静電容量変化量と、第7Y対向電極21Yの静電容量変化量とを異なるように配置するとともに、第6Y対向電極19Yの静電容量変化量と、第8Y対向電極23Yの静電容量変化量とを異なるように配置している。   Further, when the weight portion 3 moves in the Y-axis direction, the capacitance change amount of the first Y counter electrode 14Y and the capacitance change amount of the third Y counter electrode 18Y are arranged differently, and the second Y counter electrode The capacitance change amount of 16Y and the capacitance change amount of the fourth Y counter electrode 20Y are made different from each other so that the capacitance change amount of the fifth Y counter electrode 17Y and the capacitance change amount of the seventh Y counter electrode 21Y are different. Are different from each other, and the capacitance change amount of the sixth Y counter electrode 19Y is different from the capacitance change amount of the eighth Y counter electrode 23Y.
このとき、例えば、Y軸方向に加速度が生じた場合、図1、図10に示すように、第2弾性部11がY軸方向に変位し、加速度の生じた直線方向への力が回転方向への力に変換されることもなく、第2弾性部11は、加速度の生じたY軸方向と同方向にのみ変位する。この結果、第1Y対向電極14Yの対向端部(Y1)と、第3Y対向電極18Yの対向端部(Y2)は互いに(W)だけ位置がずれ、第5Y対向電極17Yの対向端部(Y1)と、第7Y対向電極21Yの対向端部(Y2)も互いに(W)だけ位置がずれる。図示していない、第2Y対向電極16Yの対向端部と第4Y対向電極20Yの対向端部、第6Y対向電極19Yの対向端部と第8Y対向電極23のY対向端部も互いに(W)だけ位置がずれる。   At this time, for example, when acceleration occurs in the Y-axis direction, the second elastic portion 11 is displaced in the Y-axis direction as shown in FIGS. 1 and 10, and the force in the linear direction in which the acceleration occurs is the rotational direction. The second elastic part 11 is displaced only in the same direction as the Y-axis direction in which the acceleration occurs without being converted into a force. As a result, the opposing end (Y1) of the first Y opposing electrode 14Y and the opposing end (Y2) of the third Y opposing electrode 18Y are displaced from each other by (W), and the opposing end (Y1) of the fifth Y opposing electrode 17Y ) And the opposite end (Y2) of the seventh Y counter electrode 21Y are also shifted from each other by (W). The opposing end of the second Y opposing electrode 16Y and the opposing end of the fourth Y opposing electrode 20Y, the opposing end of the sixth Y opposing electrode 19Y, and the Y opposing end of the eighth Y opposing electrode 23, not shown, are also (W). Only the position shifts.
具体的な検出処理は次の通りである。   The specific detection process is as follows.
Y軸方向の加速度は、第1Y対向電極14Yと第2Y対向電極16Yと第5Y対向電極17Yと第6Y対向電極19Yの合成静電容量と、第3Y対向電極18Yと第4Y対向電極20Yと第7Y対向電極21Yと第8Y対向電極23Yの合成静電容量との差動変化量から検出している。   The acceleration in the Y-axis direction includes the combined capacitance of the first Y counter electrode 14Y, the second Y counter electrode 16Y, the fifth Y counter electrode 17Y, and the sixth Y counter electrode 19Y, the third Y counter electrode 18Y, the fourth Y counter electrode 20Y, It is detected from the amount of differential change between the combined capacitance of the 7Y counter electrode 21Y and the eighth Y counter electrode 23Y.
すなわち、X軸方向またはY軸方向への加速度によって、各々の電極間の静電容量が変化するので、この静電容量の変化に基づいてX軸方向またはY軸方向の加速度を検出するものである。   That is, the capacitance between the electrodes changes due to the acceleration in the X-axis direction or the Y-axis direction, and the acceleration in the X-axis direction or the Y-axis direction is detected based on the change in the capacitance. is there.
上記構成により、加速度検出部によって、錘部3と第1対向基板5の各々の対向面に配置した第1対向電極〜第4対向電極14、16、18、20、錘部3と第2対向基板15の各々の対向面に配置した第5対向電極〜第8対向電極17、19、21、23の静電容量変化を検出して加速度を検出し、角速度検出部によって、コリオリ力に起因して撓む可撓部の状態変化を第1、第2感知電極26、28で検出し、一つの検出素子1で加速度と角速度を検出できるので、実装面積を低減して小型化を図れる。   With the above configuration, the acceleration detection unit causes the first counter electrode to the fourth counter electrodes 14, 16, 18, 20, the weight unit 3 and the second counter electrode disposed on the opposing surfaces of the weight unit 3 and the first counter substrate 5. The acceleration is detected by detecting the capacitance change of the fifth counter electrode to the eighth counter electrode 17, 19, 21, and 23 arranged on the respective opposing surfaces of the substrate 15, and the angular velocity detector causes the Coriolis force. Since the first and second sensing electrodes 26 and 28 can detect the change in the state of the flexible part that bends and can detect the acceleration and the angular velocity with one detection element 1, the mounting area can be reduced and the size can be reduced.
また、互いに直交するX軸、Y軸、Z軸において、X軸方向に加速度が生じると第1弾性部9がX軸方向に変位し、Y軸方向に加速度が生じると第2弾性部11がY軸方向に変位する。すなわち、加速度の生じた直線方向への力が回転方向への力に変換されることもなく、第1弾性部9または第2弾性部11は、加速度の生じた方向と同方向にのみ変位するので変位しやすく、第1対向電極〜第4対向電極14、16、18、20よりなる第1対向電極部の静電容量の変化量と、第5対向電極〜第8対向電極17、19、21、23よりなる第2対向電極部の静電容量の変化量を容易に大きくして、検出感度を向上できる。   In addition, in the X axis, the Y axis, and the Z axis that are orthogonal to each other, when acceleration occurs in the X axis direction, the first elastic portion 9 is displaced in the X axis direction, and when acceleration occurs in the Y axis direction, the second elastic portion 11 is Displacement in the Y-axis direction. That is, the force in the linear direction in which the acceleration is generated is not converted into the force in the rotational direction, and the first elastic portion 9 or the second elastic portion 11 is displaced only in the same direction as the direction in which the acceleration is generated. Therefore, it is easy to displace, and the amount of change in the electrostatic capacity of the first counter electrode portion composed of the first counter electrode to the fourth counter electrodes 14, 16, 18, 20 and the fifth counter electrode to the eighth counter electrodes 17, 19, The amount of change in capacitance of the second counter electrode portion 21 and 23 can be easily increased to improve detection sensitivity.
特に、X軸方向とY軸方向の加速度を検出するにあたって、X軸方向の加速度は第1弾性部9がX軸方向にのみ変位することにより検出され、Y軸方向の加速度は第2弾性部11がY軸方向にのみ変位することにより検出され、各々、一方の加速度の影響を受けることなく独立して加速度を検出することができ、検出感度を向上できる。   In particular, when detecting the acceleration in the X-axis direction and the Y-axis direction, the acceleration in the X-axis direction is detected when the first elastic portion 9 is displaced only in the X-axis direction, and the acceleration in the Y-axis direction is detected as the second elastic portion. 11 is detected by displacement only in the Y-axis direction, and the acceleration can be detected independently without being influenced by one of the accelerations, and the detection sensitivity can be improved.
さらに、第1対向基板5に配置した第1〜第4対向電極14、16、18、20は、X軸上に配置した第1〜第4X対向電極14X、16X、18X、20Xと、Y軸上に配置した第1〜第4Y対向電極14Y、16Y、18Y、20Yとを有し、第1〜第4X対向電極14X、16X、18X、20Xは、その一部が錘部3の表面に配置した第1〜第4対向電極14、16、18、20と対向しないようにX軸方向にずらして配置するとともに、第1Y対向電極14Yは、その一部が錘部3の表面に配置した第1対向電極14と対向しないようにY軸方向にずらして配置しているので、加速度が発生した際に、その加速度がX軸またはY軸の正の方向に発生したのか、負の方向に発生したのかを判別できる。   Furthermore, the 1st-4th counter electrodes 14, 16, 18, and 20 arrange | positioned at the 1st counter substrate 5 are the 1st-4th X counter electrodes 14X, 16X, 18X, and 20X arrange | positioned on the X-axis, and a Y-axis. The first to fourth Y counter electrodes 14Y, 16Y, 18Y, and 20Y are disposed on the top, and a part of the first to fourth X counter electrodes 14X, 16X, 18X, and 20X are disposed on the surface of the weight portion 3. The first Y counter electrode 14Y is arranged on the surface of the weight part 3 while being shifted in the X-axis direction so as not to face the first to fourth counter electrodes 14, 16, 18, 20 1 Since it is arranged in the Y-axis direction so as not to face the counter electrode 14, when acceleration is generated, the acceleration is generated in the positive direction of the X-axis or Y-axis or in the negative direction Can be determined.
これは、発生する加速度が正または負の方向によって、X対向電極またはY対向電極の静電容量が静止時に比べて大きくなるか、小さくなるかいずれかの状態となるので、判別が可能となる。例えば、図8によれば、矢印の方向(X軸の負の方向)に錘部3が移動した場合、第1X対向電極14Xは加速度に応じて静電容量が連続的に減少し、第2X対向電極16Xは加速度に応じて静電容量が連続的に増大するので、各々の差動静電容量を検出すれば、X軸方向の負の方向へ移動したことがわかる。第5対向電極〜第8対向電極17、19、21、23、およびY軸方向についても同様に移動方向を区別できる。   This can be discriminated because the capacitance of the X counter electrode or the Y counter electrode becomes larger or smaller than that in a stationary state depending on the positive or negative direction of the generated acceleration. . For example, according to FIG. 8, when the weight part 3 moves in the direction of the arrow (the negative direction of the X axis), the capacitance of the first X counter electrode 14X decreases continuously according to the acceleration, and the second X Since the capacitance of the counter electrode 16X continuously increases according to the acceleration, it can be understood that the counter electrode 16X has moved in the negative direction of the X-axis direction when each differential capacitance is detected. Similarly, the moving direction can be distinguished for the fifth counter electrode to the eighth counter electrode 17, 19, 21, 23 and the Y-axis direction.
仮に、X対向電極およびY対向電極がずれていない場合は、正または負のいずれの方向に加速度が発生しても、静止時の対向電極の静電容量に比べて小さくなるので判別ができない。   If the X counter electrode and the Y counter electrode are not deviated, even if acceleration occurs in either the positive or negative direction, it cannot be determined because it is smaller than the capacitance of the counter electrode at rest.
第2対向基板15に配置した第5〜第8対向電極17、19、21、23も、X軸上に配置した第5〜第8X対向電極17X、19X、21X、23Xと、Y軸上に配置した第5〜第8Y対向電極17Y、19Y、21Y、23Yとを有し、第5〜第8X対向電極17X、19X、21X、23Xは、その一部が錘部3の表面に配置した第5〜第8対向電極17、19、21、23と対向しないようにX軸方向にずらして配置するとともに、第5〜第8Y対向電極17Y、19Y、21Y、23Yは、その一部が錘部3の表面に配置した第5〜第8対向電極17、19、21、23と対向しないようにY軸方向にずらして配置しているので、加速度が発生した際に、その加速度がX軸またはY軸の正の方向に発生したのか、負の方向に発生したのかを判別できる。   The fifth to eighth counter electrodes 17, 19, 21, and 23 disposed on the second counter substrate 15 are also disposed on the Y axis with the fifth to eighth X counter electrodes 17X, 19X, 21X, and 23X disposed on the X axis. The fifth to eighth Y counter electrodes 17Y, 19Y, 21Y, and 23Y are arranged, and the fifth to eighth X counter electrodes 17X, 19X, 21X, and 23X are partially arranged on the surface of the weight portion 3. The fifth to eighth counter electrodes 17, 19, 21, and 23 are shifted in the X-axis direction so as not to face each other, and the fifth to eighth Y counter electrodes 17 Y, 19 Y, 21 Y, and 23 Y are partially weighted. 3 is arranged so as not to face the fifth to eighth counter electrodes 17, 19, 21, and 23 arranged on the surface of 3, so that when acceleration occurs, the acceleration is X-axis or Occurred in the positive direction of the Y axis or in the negative direction Or it can be determined that the.
第1〜第4対向電極14、16、18、20よりなる第1対向電極部と、第5〜第8対向電極17、19、21、23よりなる第2対向電極部を設けているので、感度を向上することができる。特に、Z軸方向へ錘部3が変位したとしても、第1対向電極部の第1〜第4対向電極14、16、18、20における対向距離が広がれば、第2対向電極部の第5〜第8対向電極17、19、21、23における対向距離が縮まり、第1対向電極部の第1〜第4対向電極14、16、18、20における対向距離が縮まれば、第2対向電極部の第5〜第8対向電極17、19、21、23における対向距離が広がる。   Since the 1st counter electrode part which consists of the 1st-4th counter electrode 14, 16, 18, 20 and the 2nd counter electrode part which consists of the 5th-8th counter electrode 17, 19, 21, and 23 are provided, Sensitivity can be improved. In particular, even if the weight portion 3 is displaced in the Z-axis direction, if the opposing distance of the first counter electrode portion to the first counter electrode 14, 16, 18, 20 increases, If the opposing distance in the eighth counter electrodes 17, 19, 21, and 23 is reduced and the opposing distance in the first to fourth counter electrodes 14, 16, 18, and 20 of the first counter electrode part is reduced, the second counter electrode This increases the facing distance of the fifth to eighth counter electrodes 17, 19, 21, and 23.
すなわち、第1対向電極部における対向距離および第2対向電極部における対向距離を合わせた総対向距離が変わらないので、振動等によってZ軸方向へ錘部3が変位したとしても、第1、第2対向電極部の全体の静電容量の変化量が変化することがなく、X軸またはY軸の加速度の検出精度を劣化させずに検出精度を向上できる。   That is, since the total opposing distance including the opposing distance in the first counter electrode part and the opposing distance in the second counter electrode part does not change, even if the weight part 3 is displaced in the Z-axis direction due to vibration or the like, 2 The amount of change in the overall capacitance of the counter electrode portion does not change, and the detection accuracy can be improved without degrading the detection accuracy of the X-axis or Y-axis acceleration.
なお、第1固定部に第1弾性部9を設ける替わりに、第1連結部にX軸方向のみに弾性変形する第1弾性部9を設けたり、第2固定部に第2弾性部11を設ける替わりに、第2連結部にY軸方向のみに弾性変形する第2弾性部11を設けたりしてもよい。また、駆動電極、検知電極、感知電極については、上記実施の形態以外にも任意に設定可能である。   Instead of providing the first elastic portion 9 in the first fixing portion, the first elastic portion 9 that is elastically deformed only in the X-axis direction is provided in the first connecting portion, or the second elastic portion 11 is provided in the second fixing portion. Instead of providing, the second connecting portion may be provided with the second elastic portion 11 that is elastically deformed only in the Y-axis direction. Further, the drive electrode, the detection electrode, and the detection electrode can be arbitrarily set in addition to the above embodiment.
本発明に係る慣性力センサは、検出感度を向上できるので、各種電子機器に適用できるものである。   Since the inertial force sensor according to the present invention can improve the detection sensitivity, it can be applied to various electronic devices.
本発明の第1の実施の形態における複合センサの検出素子の分解斜視図The disassembled perspective view of the detection element of the composite sensor in the 1st Embodiment of this invention 同検出素子の上面側からの透視平面図A perspective plan view from the upper surface side of the detection element 同検出素子の下面側からの透視平面図A perspective plan view from the lower surface side of the detection element 図1のA−A断面図AA sectional view of FIG. 図1のB−B断面図BB sectional view of FIG. 角速度検出時における同検出素子の動作状態図Operation state diagram of the detection element during angular velocity detection 対向基板配置時のA−A断面図AA cross-sectional view when the counter substrate is placed X軸方向の加速度検出時における同検出素子の動作状態図Operation state diagram of the detection element when detecting acceleration in the X-axis direction 対向基板配置時のB−B断面図BB cross section when counter substrate is placed Y軸方向の加速度検出時における同検出素子の動作状態図Operation state diagram of the detection element when detecting acceleration in the Y-axis direction 従来の検出素子の平面図Plan view of conventional detector 図11のA−A断面図AA sectional view of FIG. 図11のB−B断面図BB sectional view of FIG. 同検出素子の動作状態図Operation state diagram of the detector
符号の説明Explanation of symbols
1 検出素子
3 錘部
4 第1固定部
5 第1対向基板
6 第2固定部
7 固定アーム
8 第1アーム
9 第1弾性部
10 第2アーム
11 第2弾性部
12 支持部
13 スリット
14 第1対向電極
14X 第1X対向電極
14Y 第1Y対向電極
15 第2対向基板
16 第2対向電極
16X 第2X対向電極
16Y 第2Y対向電極
17 第5対向電極
17X 第5X対向電極
17Y 第5Y対向電極
18 第3対向電極
18X 第3X対向電極
18Y 第3Y対向電極
19 第6対向電極
19X 第6X対向電極
19Y 第6Y対向電極
20 第4対向電極
20X 第4X対向電極
20Y 第4Y対向電極
21 第7対向電極
21X 第7X対向電極
21Y 第7Y対向電極
22 駆動電極
23 第8対向電極
23X 第8X対向電極
23Y 第8Y対向電極
24 検知電極
26 第1感知電極
28 第2感知電極
DESCRIPTION OF SYMBOLS 1 Detection element 3 Weight part 4 1st fixing | fixed part 5 1st counter substrate 6 2nd fixing | fixed part 7 Fixed arm 8 1st arm 9 1st elastic part 10 2nd arm 11 2nd elastic part 12 Supporting part 13 Slit 14 1st Counter electrode 14X 1X counter electrode 14Y 1Y counter electrode 15 2nd counter substrate 16 2nd counter electrode 16X 2X counter electrode 16Y 2Y counter electrode 17 5th counter electrode 17X 5X counter electrode 17Y 5Y counter electrode 18 3rd Counter electrode 18X 3X counter electrode 18Y 3Y counter electrode 19 6th counter electrode 19X 6X counter electrode 19Y 6Y counter electrode 20 4th counter electrode 20X 4X counter electrode 20Y 4Y counter electrode 21 7th counter electrode 21X 7X Counter electrode 21Y 7th Y counter electrode 22 Drive electrode 23 8th counter electrode 23X 8X counter electrode 23Y 8Y counter electrode 24 sensing electrode 26 first sensing electrode 28 second sensing electrode

Claims (9)

  1. 加速度検出部を有する検出素子を備え、
    前記検出素子は、第1連結部を介して錘部を連結した第1固定部と、第2連結部を介して前記第1固定部を連結した第2固定部と、前記錘部と対向させた対向基板と、前記錘部と前記対向基板の各々の対向面に対向電極を配置した対向電極部とを有し、前記加速度検出部では、前記対向電極部の静電容量の変化量を検出して加速度を検出し、互いに直交するX軸、Y軸、Z軸において、
    前記第1連結部をX軸方向に配置するとともに前記第1連結部または前記第1固定部にX軸方向のみに弾性変形する第1弾性部を設け、前記第2連結部をY軸方向に配置するとともに前記第2連結部または前記第2固定部にY軸方向のみに弾性変形する第2弾性部を設け、
    前記錘部または前記対向基板のいずれか一方に配置した前記対向電極は、X軸上に配置したX対向電極とY軸上に配置したY対向電極とを有し、
    前記X対向電極は、その一部が他方に配置した前記対向電極と対向しないようにX軸方向にずらして配置するとともに、前記Y対向電極は、その一部が他方に配置した前記対向電極と対向しないようにY軸方向にずらして配置した慣性力センサ。
    A detection element having an acceleration detection unit;
    The detection element is opposed to the weight part, a first fixing part that connects the weight part via a first connection part, a second fixing part that connects the first fixing part via a second connection part, and the like. And the counter electrode portion in which counter electrodes are arranged on the opposing surfaces of the counterweight portion and the counter substrate, and the acceleration detector detects the amount of change in capacitance of the counter electrode portion. In the X axis, Y axis, and Z axis that are orthogonal to each other,
    The first connecting portion is arranged in the X-axis direction, and the first connecting portion or the first fixed portion is provided with a first elastic portion that is elastically deformed only in the X-axis direction, and the second connecting portion is set in the Y-axis direction. A second elastic portion that is disposed and elastically deformed only in the Y-axis direction at the second connecting portion or the second fixed portion;
    The counter electrode disposed on either the weight portion or the counter substrate has an X counter electrode disposed on the X axis and a Y counter electrode disposed on the Y axis,
    The X counter electrode is shifted in the X-axis direction so that a portion thereof does not face the counter electrode disposed on the other side, and the Y counter electrode is disposed with the counter electrode disposed on the other side. An inertial force sensor that is shifted in the Y-axis direction so as not to face each other.
  2. 前記対向基板は、前記錘部の表面と対向する第1対向基板と、前記錘部の裏面と対向する第2対向基板とを有し、前記対向電極部は、前記錘部と前記第1対向基板の各々の対向面に第1対向電極を配置した第1対向電極部と、前記錘部と前記第2対向基板の各々の対向面に第2対向電極を配置した第2対向電極部を有し、
    前記錘部または前記対向基板のいずれか一方に配置した前記第1対向電極は、X軸上に配置した第1X対向電極とY軸上に配置した第1Y対向電極とを有し、
    前記第1X対向電極は、その一部が他方に配置した前記第1対向電極と対向しないようにX軸方向にずらして配置するとともに、前記第1Y対向電極は、その一部が他方に配置した前記第1対向電極と対向しないようにY軸方向にずらして配置しており、
    前記錘部または前記対向基板のいずれか一方に配置した前記第2対向電極は、X軸上に配置した第2X対向電極とY軸上に配置した第2Y対向電極とを有し、
    前記第2X対向電極は、その一部が他方に配置した前記第2対向電極と対向しないようにX軸方向にずらして配置するとともに、前記第2Y対向電極は、その一部が他方に配置した前記第2対向電極と対向しないようにY軸方向にずらして配置する請求項1記載の慣性力センサ。
    The counter substrate includes a first counter substrate facing the surface of the weight portion and a second counter substrate facing the back surface of the weight portion, and the counter electrode portion is opposed to the weight portion and the first counter substrate. A first counter electrode portion having a first counter electrode disposed on each counter surface of the substrate; and a second counter electrode portion having a second counter electrode disposed on each counter surface of the weight portion and the second counter substrate. And
    The first counter electrode disposed on either the weight portion or the counter substrate includes a first X counter electrode disposed on the X axis and a first Y counter electrode disposed on the Y axis,
    The first X counter electrode is shifted in the X-axis direction so that a part thereof does not face the first counter electrode disposed on the other side, and a part of the first Y counter electrode is disposed on the other side. The Y-axis direction is shifted so as not to face the first counter electrode,
    The second counter electrode disposed on either the weight portion or the counter substrate includes a second X counter electrode disposed on the X axis and a second Y counter electrode disposed on the Y axis.
    The second X counter electrode is arranged in the X-axis direction so that a part thereof does not face the second counter electrode arranged on the other side, and a part of the second Y counter electrode is arranged on the other side. The inertial force sensor according to claim 1, wherein the inertial force sensor is shifted in the Y-axis direction so as not to face the second counter electrode.
  3. X軸方向の加速度は、第1X対向電極と第2X対向電極の合成静電容量の変化量から検出し、Y軸方向の加速度は、第1Y対向電極と第2Y対向電極の合成静電容量の変化量から検出する請求項2記載の慣性力センサ。 The acceleration in the X-axis direction is detected from the amount of change in the combined capacitance of the first X counter electrode and the second X counter electrode, and the acceleration in the Y-axis direction is the combined capacitance of the first Y counter electrode and the second Y counter electrode. The inertial force sensor according to claim 2, which is detected from a change amount.
  4. Z軸方向の加速度は、第1X対向電極または第1Y対向電極または第2X対向電極または第2Y対向電極のいずれかの静電容量または少なくとも2つの合成静電容量の変化量から検出する請求項2記載の慣性力センサ。 The acceleration in the Z-axis direction is detected from the capacitance of any of the first X counter electrode, the first Y counter electrode, the second X counter electrode, or the second Y counter electrode, or the amount of change in at least two combined capacitances. The inertial force sensor described.
  5. 前記対向電極部を複数有し、前記錘部のX軸方向の移動時に、一方の前記X対向電極の静電容量の変化量と、他方の前記X対向電極の静電容量の変化量とが異なるように配置し、前記錘部のY軸方向の移動時に、一方の前記第1Y対向電極の静電容量の変化量と、他方の前記第1Y対向電極の静電容量の変化量とが異なるように配置した請求項1記載の慣性力センサ。 There are a plurality of the counter electrode portions, and when the weight portion moves in the X-axis direction, the amount of change in capacitance of one X counter electrode and the amount of change in capacitance of the other X counter electrode are: When the weight portions are moved in the Y-axis direction, the amount of change in capacitance of one of the first Y counter electrodes is different from the amount of change in capacitance of the other first Y counter electrode. The inertial force sensor according to claim 1 arranged as described above.
  6. 前記錘部を複数有し、各々の錘部に前記対向電極部を配置した請求項5記載の慣性力センサ。 The inertial force sensor according to claim 5, wherein a plurality of the weight portions are provided, and the counter electrode portion is arranged on each weight portion.
  7. 前記第1弾性部はY軸方向にスリットを設けて形成し、前記第2弾性部はX軸方向にスリットを設けて形成した請求項1記載の慣性力センサ。 2. The inertial force sensor according to claim 1, wherein the first elastic part is formed with a slit in the Y-axis direction, and the second elastic part is formed with a slit in the X-axis direction.
  8. 前記第1固定部を枠体部とし、2つの第1連結部を介して前記錘部を連結するとともに前記錘部を前記第1固定部の内方に配置した請求項1記載の慣性力センサ。 2. The inertial force sensor according to claim 1, wherein the first fixing portion is a frame body portion, the weight portion is connected via two first connecting portions, and the weight portion is disposed inward of the first fixing portion. .
  9. 前記検出素子に角速度検出部を設け、
    前記検出素子は、第1アームを第2アームに直交方向に連結して形成した2つの直交アームと、2つの前記第1アームを支持した支持部とを有し、前記第1アームを前記第1連結部とするとともに前記第2アームの先端部に前記錘部を連結しており、前記角速度検出部では、前記錘部を駆動振動させ、コリオリ力に起因した前記検出素子の状態変化を検出して角速度を検出する請求項1記載の慣性力センサ。
    An angular velocity detection unit is provided in the detection element,
    The detection element includes two orthogonal arms formed by connecting the first arm to the second arm in the orthogonal direction, and a support portion supporting the two first arms, and the first arm is the first arm. The connecting portion is connected to the tip of the second arm and the weight portion is connected to the angular velocity detecting portion, and the weight portion is driven to vibrate to detect a change in the state of the detecting element caused by the Coriolis force. The inertial force sensor according to claim 1, wherein the angular velocity is detected.
JP2007230960A 2007-09-06 2007-09-06 Inertial force sensor Pending JP2009063392A (en)

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JP2007230960A JP2009063392A (en) 2007-09-06 2007-09-06 Inertial force sensor
PCT/JP2008/000911 WO2008129865A1 (en) 2007-04-13 2008-04-09 Inertia force sensor
US12/593,752 US20100126270A1 (en) 2007-04-13 2008-04-09 Inertia force sensor

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010107012A1 (en) 2009-03-16 2010-09-23 株式会社エヌ・ティ・ティ・ドコモ Radio base station apparatus, mobile terminal apparatus and wireless access method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010107012A1 (en) 2009-03-16 2010-09-23 株式会社エヌ・ティ・ティ・ドコモ Radio base station apparatus, mobile terminal apparatus and wireless access method

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