JP2009053068A5 - - Google Patents

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Publication number
JP2009053068A5
JP2009053068A5 JP2007220592A JP2007220592A JP2009053068A5 JP 2009053068 A5 JP2009053068 A5 JP 2009053068A5 JP 2007220592 A JP2007220592 A JP 2007220592A JP 2007220592 A JP2007220592 A JP 2007220592A JP 2009053068 A5 JP2009053068 A5 JP 2009053068A5
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JP
Japan
Prior art keywords
thermoelectric
gas sensor
film
sensor according
ceramic substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007220592A
Other languages
English (en)
Japanese (ja)
Other versions
JP5008503B2 (ja
JP2009053068A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007220592A priority Critical patent/JP5008503B2/ja
Priority claimed from JP2007220592A external-priority patent/JP5008503B2/ja
Publication of JP2009053068A publication Critical patent/JP2009053068A/ja
Publication of JP2009053068A5 publication Critical patent/JP2009053068A5/ja
Application granted granted Critical
Publication of JP5008503B2 publication Critical patent/JP5008503B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007220592A 2007-08-28 2007-08-28 ガスセンサ Expired - Fee Related JP5008503B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007220592A JP5008503B2 (ja) 2007-08-28 2007-08-28 ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007220592A JP5008503B2 (ja) 2007-08-28 2007-08-28 ガスセンサ

Publications (3)

Publication Number Publication Date
JP2009053068A JP2009053068A (ja) 2009-03-12
JP2009053068A5 true JP2009053068A5 (https=) 2010-06-17
JP5008503B2 JP5008503B2 (ja) 2012-08-22

Family

ID=40504267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007220592A Expired - Fee Related JP5008503B2 (ja) 2007-08-28 2007-08-28 ガスセンサ

Country Status (1)

Country Link
JP (1) JP5008503B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009133636A (ja) * 2007-11-28 2009-06-18 Tdk Corp 水素ガスセンサ
DE102014215421A1 (de) * 2014-08-05 2016-02-11 Robert Bosch Gmbh Mikromechanische Gassensorvorrichtung und entsprechendes Herstellungsverfahren

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102143A (ja) * 1981-12-14 1983-06-17 Mitsuteru Kimura 橋架構造昇温体
JP3085749B2 (ja) * 1991-09-13 2000-09-11 株式会社リコー ガスセンサ
JP2005098844A (ja) * 2003-09-25 2005-04-14 Tdk Corp ガスセンサ及びその製造方法
JP4576582B2 (ja) * 2004-03-17 2010-11-10 独立行政法人産業技術総合研究所 マイクロ素子化された熱電式ガスセンサ
JP2006201100A (ja) * 2005-01-24 2006-08-03 Matsushita Electric Ind Co Ltd 水素ガス検知センサ
JP2007171118A (ja) * 2005-12-26 2007-07-05 Yamaha Motor Co Ltd ガスセンサおよびそれを備えた自動車両

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