JP2009043640A - Electric connection unit, and electrical connection device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide: an electric connection unit arranged between a wiring board and a probe board facing each other, the connection unit preventing noise from the outside from being mixed in an electric signal passing through a connection pin for a signal; and an electrical connection device using the same. <P>SOLUTION: The electric connection unit 10 includes: a holder 40 formed into a plate-like shape with a conductive material, and having a plurality of through-holes 42 penetrating it in its thickness direction; and conductive connection pins 44 being conductive connection pins 44 arranged in the respective through-holes 42, and each having an upper end brought into contact with a first electrical connection terminal 22c arranged on the undersurface of the wiring board 22, and a lower end connected to a second electrical connection terminal 26a arranged on the upper surface of the probe board 26. The plurality of through-holes 42 are divided into at least first and second groups; the connection pins 44 arranged in the respective through-holes 42 in the first group are electrically connected to the pin holder 40; and the connection pins 44 arranged in the respective through-holes 42 in the second group are electrically insulated from the pin holder 40. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an electrical connector that is disposed between a wiring board and a probe board facing each other and connects an electrical connection terminal provided on the wiring board and an electrical connection terminal provided on the probe board, and this The present invention relates to an electrical connection device using

  An electrical performance test, that is, an inspection of a circuit board such as a semiconductor integrated circuit (referred to as “inspected object” in the present invention) is performed using an electrical connection device such as a probe card provided in the tester. .

  As one of this type of electrical connection device, an electrical connector is arranged between a wiring board and a probe board facing each other, and an electrical connection terminal provided on the wiring board and an electrical provided on the probe board. There is one in which an electrical connection terminal is connected by an electrical connector (Patent Document 1).

  In this electrical connection device, the electrical connector is formed with a plurality of through holes penetrating in the thickness direction in the insulating substrate, and pogo pins are arranged as connection pins in the respective through holes, and the connection terminals of the wiring board and the probe The connection terminals of the substrate are connected in a one-to-one manner by connection pins. The probe board includes a plurality of contacts corresponding to the connection pins and being pressed against the electrical connection terminals of the device under test.

  The conventional electrical connection device supplies electric power, signals, etc. to the object to be inspected through the connection pins and the contact while each contact provided on the probe board is pressed against the connection terminal of the object to be inspected. The inspection is performed by taking the signal from the object to be inspected into the tester through the contact and the connection pin. At the time of inspection, the connection pins and the contacts are all divided into at least three types for grounding, power supply, and signal.

WO 2006-126279 A1

  However, since the connection pin has a large length dimension, external noise is likely to be mixed into a signal passing through the connection pin. In particular, since a weak electric signal from the object to be inspected passes through the signal connection pin, if noise is mixed in such a weak electric signal, the object to be inspected cannot be accurately inspected.

  An object of the present invention is to suppress external noise from being mixed into an electric signal passing through a signal connection pin.

  An electrical connector according to the present invention is disposed between a wiring board and a probe board facing each other, and a plurality of first electrical connection terminals provided on a lower surface of the wiring board and an upper surface of the probe board. Are used for connection to a plurality of second electrical connection terminals provided in the.

  Such an electrical connector is a pin holder made of a conductive material in the shape of a plate and has a plurality of through holes penetrating the pin holder in the thickness direction thereof, and a conductive material disposed in each through hole. And a conductive connection pin having an upper end portion that is in contact with the first electrical connection terminal and a lower end portion that is connected to the second electrical connection terminal.

  In the electrical connector, the plurality of through holes are divided into at least first and second groups each including a plurality of through holes, and the connection pins arranged in the through holes of the first group. Are electrically connected to the pin holder, and the connection pins arranged in the through holes of the second group are electrically insulated from the pin holder.

  Each through hole of the second group may have an electrical insulating layer on its inner peripheral surface.

  Each connection pin includes a tubular member, a first pin member disposed at one end portion of the tubular member so as to be movable in a longitudinal direction of the tubular member, and the first pin member disposed in the tubular member. A compression coil spring that urges one pin member in a direction in which a tip portion protrudes from one end portion of the tubular member, and each connection disposed in the through hole of the second group The pin can further include a film or a protrusion made of an electrically insulating material on the outer peripheral surface of the cylindrical member.

  Each connection pin can further include a second pin member disposed at the other end portion of the cylindrical member so as to be movable in the longitudinal direction of the cylindrical member, and the compression coil spring further includes: You may make it urge | bias the said 2nd pin member in the direction which the front-end | tip part protrudes from the other end part of the said cylindrical member between the 1st and 2nd pin members.

  The pin holder may have an electrically insulating layer on at least a surface excluding the inner surface of each through hole of the first group.

  Another electrical connector according to the present invention is a pin holder made of a conductive material in a plate shape, each of which has a plurality of bottomed recesses that open the pin holder to the lower side thereof, and each of the pin holders includes the pin holder. A pin holder having a plurality of through holes penetrating in the thickness direction thereof, a conductive first connection pin disposed in each recess, and a portion in contact with the pin holder and the second electrical connection A first connection pin having a lower end connected to the terminal, a conductive second connection pin disposed in each through hole, the upper end contacting the first electrical connection terminal, and the first And a second connection pin having a lower end connected to the two electrical connection terminals.

  In another electrical connector, each first connection pin is electrically connected to the pin holder, and each second connection pin is electrically insulated from the pin holder.

  In another electrical connector, each through hole may have an electrical insulation layer on its inner peripheral surface, and the pin holder may have an electrical insulation layer on at least the inner surface of the recess.

  In another electrical connector, the pin holder may have a region where the electrical insulating layer does not exist on the upper surface, or may be exposed in that region.

  The electrical connection device according to the present invention is used for connection between a tester and an electrical connection terminal of an object to be inspected to be subjected to electrical inspection by the tester.

  Such an electrical connection device includes: a wiring board on which a plurality of wiring circuits connected to the tester are formed and having a plurality of first electrical connection terminals connected to the wiring circuit on a lower surface; and the wiring board A flat probe substrate having an upper surface opposed to the lower surface and a plurality of second electrical connection terminals opposed to the first electrical connection terminal on the upper surface; and a lower surface of the probe substrate A plurality of contacts that are provided and electrically connected to the second electrical connection terminals, the tips being able to abut on the connection terminals of the device under test, and the wiring board And an electrical connector for connecting the first electrical connection terminal to the contact corresponding to the first electrical connection terminal. Is any one of claims 1 to 10. Those described in.

  The electrical connection device further includes a support member disposed on the wiring board, and a thermal deformation suppression member disposed on the support member to suppress thermal deformation of the support member, the support member And a thermal deformation suppressing member having a thermal expansion coefficient larger than the thermal expansion coefficient.

  In the electrical connection device according to the present invention, in the case where the electrical connector is the one according to claim 10, the wiring board is an auxiliary electrical device that is in contact with a region of the pin holder where the electrical insulation layer does not exist. Connection.

  In the electrical connector according to the present invention, since the plate-like pin holder is made of a conductive material, it can be maintained at the ground potential in a state where it is assembled to the electrical connection device.

  Thereby, the connection pin electrically connected to the pin holder is maintained at the ground potential. However, since the connection pins electrically disconnected from the pin holder are disconnected from the ground potential, they can be used as connection pins other than those for grounding such as for power supply and signals.

  For this reason, the connection pin electrically disconnected from the pin holder is shielded from the outside by at least the pin holder. As a result, according to the present invention, mixing of noise from the outside into the electrical signal passing through the signal connection pin is suppressed and prevented.

  When each through hole of the second group has an electrically insulating layer on the inner peripheral surface thereof, the contact pins arranged in those through holes are prevented from coming into contact with the pin holder.

  Each connection pin is disposed within the tubular member, a first pin member disposed at one end of the tubular member so as to be movable in the longitudinal direction of the tubular member, and a first pin member disposed within the tubular member. A compression coil spring that urges the pin member in a direction in which the tip end protrudes from one end of the cylindrical member, and each connection pin disposed in the through hole of the second group further includes electrical insulation. When the film or protrusion made of material is provided on the outer peripheral surface of the cylindrical member, the contact pins used for signals are prevented from coming into contact with the pin holder.

  When the pin holder has an electrical insulating layer on at least the inner surface of each through-hole of the first group, the pin holder can be electrically connected to the upper and lower wiring boards and the probe board in an assembled state with the electrical connection device. Contact with the general connection terminal is prevented.

  When the pin holder has an exposed region where no electrical insulating layer is present on the upper surface, and the wiring board has an auxiliary electrical connection portion in contact with the exposed region of the pin holder, the first grounding provided on the wiring substrate is provided. The number of electrical connection terminals can be reduced.

  [Explanation of terms]

  In the present invention, the vertical direction refers to the vertical direction in FIG. However, the vertical direction in the present invention differs depending on the posture of the object to be inspected at the time of inspection with respect to the tester. Therefore, the vertical direction as used in the present invention may be determined to be one of the vertical direction, the opposite direction, the horizontal direction, and the inclined direction inclined with respect to the horizontal plane, depending on the actual inspection apparatus. Good.

  [Embodiment 1 of Electrical Connection Device]

  Referring to FIGS. 1 to 7, the electrical connection device 10 is arranged in a tester (not shown) having an integrated circuit as a device under test 12. The device under test 12 may be at least one integrated circuit cut from the wafer, or may be at least one integrated circuit in the uncut wafer. The inspected body 12 has a plurality of electrical connection terminals such as electrode pads on the upper surface regardless of the form.

  As shown in FIG. 1, the connection device 10 includes a flat plate-like support member 20 having a flat lower surface 20 a, a circular flat plate-like wiring substrate 22 held on the lower surface 20 a of the support member 20, and a lower surface of the wiring substrate 22. A flat electrical connector 24 disposed at 22a, a probe board 26 disposed on a lower surface 24a of the electrical connector 24, a base ring 28 formed with a rectangular central opening 28a for receiving the electrical connector 24, and And a fixing ring 30 that clamps the edge of the probe substrate 26 in cooperation with the edge of the central opening 28a of the base ring 28.

  The members 20 to 30 are firmly assembled by a plurality of bolts, as will be described later.

  As shown in FIGS. 1 to 5, the support member 20 is made of a metal material such as a stainless steel plate in a frame shape, and the lower surface 20a (see FIG. 1) is used as the upper surface 22b (see FIG. 1) of the wiring board 22. It is arranged on the upper surface 22b of the wiring board 22 in a state of being in contact with the wiring board 22.

  As shown in FIG. 2, the support member 20 includes an inner annular portion 20b, an outer annular portion 20c, a plurality of connecting portions 20d that connect both the annular portions 20b and 20c, and an outer portion from the outer annular portion 20c. An extending portion 20e extending to the inner annular portion 20b, and a central frame portion 20f that continues integrally with the inner annular portion 20b. In the illustrated example, a thermal deformation suppression member 32 that suppresses thermal deformation of the support member 20 is disposed on the upper side of the support member 20.

  The thermal deformation suppressing member 32 is manufactured in an annular shape from a material having a thermal expansion coefficient larger than that of the support member 20. The thermal deformation suppressing member 32 has substantially the same size as the outer return portion 20 c so as to cover the upper surface of the outer annular portion 20 c of the support member 20, and the outer annular portion is formed by a plurality of screw members 34. It is assembled on the upper surface of 20c.

  In the illustrated example, the wiring substrate 22 is manufactured in a disk shape from an electrically insulating resin such as a polyimide resin. A large number of connectors 36 connected to the electric circuit of the tester are arranged in an annular arrangement on the annular peripheral edge of the upper surface 22b (see FIG. 1) of the wiring board 22 as shown in FIG. Each connector 36 has a plurality of terminals (not shown).

  A number of electrical connection terminals 22c (see FIG. 7) corresponding to the respective terminals of the connector 36 are arranged in a rectangular matrix at the center of the lower surface 22a (see FIG. 1) of the wiring board 22. As shown in FIG. 2, the connection terminal 22c to be connected to the terminal of the connector 36 is switched at the center of the upper surface 22b (see FIG. 1) of the wiring board 22 according to the inspection contents, or the wiring board 22 in an emergency. A large number of relays 38 for interrupting the wiring circuit (not shown) are arranged.

  The wiring circuit of the wiring board 22 is formed in the wiring board 22. The terminal of the connector 36 and the connection terminal 22c can be appropriately connected to each other via the wiring circuit of the wiring board 22 and the relay 38. In the example shown in FIG. 2, the connector 36 is positioned outside the outer annular portion 22c of the support member 20, and the relay 38 is positioned inside the inner annular portion 20b.

  As shown in FIGS. 6 and 7, the electrical connector 24 is formed in a rectangular shape having a size capable of receiving the central opening 28 a of the base ring 28 by a conductive material such as stainless steel, aluminum and its alloys, copper and its alloys. The plate-like pin holder 40 is formed, and the conductive connection pins 44 are provided so as not to fall off in each of a large number of through holes 42 formed in the pin holder 40 so as to penetrate the pin holder 40 in the thickness direction.

  Each through hole 42 has a one-to-one correspondence with the connection terminal 22c of the wiring board 22 and has a circular cross-sectional shape.

  The plurality of through holes 42 are divided into at least first and second groups each including a plurality of through holes 42. The through holes 42 of the first group can be a plurality of holes on the outer peripheral edge of the pin holder 40, but may be a plurality of other holes. The connection pins 44 are also divided into at least first and second groups each including connection pins 44 disposed in corresponding through holes 42.

  The pin holder 40 has an electrical insulating layer 46 on the entire remaining surface including at least the inner surface of each through hole 42 belonging to the second group and including at least the inner surface of each through hole 42 belonging to the first group. In the illustrated example, the electrical insulating layer 46 is provided on the entire surface (upper and lower surfaces, outer peripheral surface, and second group through hole 42) excluding the inner surface of each through hole 42 belonging to the second group.

  The electrical insulating layer 46 can be made of an aluminum, and the pin holder 40 is made of a hard alumite treatment, and the pin holder 40 is made of a conductive metal material. Such a pin holder 40 can be formed as an electrical insulation film formed by coating an electrical insulation material such as a fluororesin.

  Such an electrical insulation layer 46 can be formed by forming an electrical insulation film on the surface of the pin holder 40 and then removing the film on the inner surface of each through hole 42 belonging to at least the second group, and at least It can be made by forming an electrical insulating film on the remaining surface of the pin holder 40 after performing a process in which a film is not formed on the inner surface of each through hole 42 belonging to the second group.

  As shown in FIG. 7, each connection pin 44 includes a cylindrical member 44a, a first pin member 44b disposed at one end of the cylindrical member 44a so as to be movable in the longitudinal direction of the cylindrical member 44a, A second pin member 44c disposed at the other end of the cylindrical member 44a so as to be movable in the longitudinal direction of the cylindrical member 44a, and the first and second pin members 44b and 44c in the cylindrical member 44a. The first and second pin members 44b and 44c are arranged in the direction in which the tip ends protrude from one end and the other end of the cylindrical member 44a (that is, the first and second pin members 44b and 44c). And a compression coil spring 44d that urges in a direction away from each other.

  The cylindrical member 44a, the first and second pin members 44b and 44c, and the coil spring 44d are all made of a conductive material. Each connection pin 44 is maintained in the pin holder 40 so as not to drop off in the cylindrical member 44a. The first and second pin members 44b and 44c are held by the cylindrical member 44a so as not to drop off.

  As in the pin shown at the right end in FIG. 7, each connection pin 44 arranged in the first group of through holes 42 is in direct contact with and electrically connected to the pin holder 40. On the other hand, like the other pins in FIG. 7, the connection pins 44 arranged in the second group of through holes 42 are electrically separated from the pin holder 40 by the electrical insulating layer 46.

  Therefore, in a state where the pin holder 40 is maintained at the ground potential, each connection pin 44 disposed in the through hole 42 of the second group can be used as a ground connection pin maintained at the ground potential. Some of the connection pins 44 arranged in the group through holes 42 can be used as power supply connection pins connected to the positive or negative terminals of the power supply, and the rest arranged in the second group through holes 42. Each of the connection pins 44 can be used as a signal connection pin for transmitting / receiving a signal to / from the device under test 12.

  Each first pin member 44 b is in contact with a connection terminal 22 c provided on the wiring board 22, and each second pin member 44 c corresponds to each connection terminal 22 c of the wiring board 22 and is connected to the probe board 26. It is in contact with the electrical connection terminal 26a formed on the upper surface. Thereby, each connection pin 44 electrically connects the connection terminal 22c of the wiring board 22 and the connection terminal 26a of the probe board 26 in a one-to-one manner.

  The base ring 28 is attached to the lower surface 22 a of the wiring board 22. The central opening 28 a of the base ring 28 is slightly larger than the electrical connector 24.

  The fixing ring 30 has a central opening 30a at the central portion thereof that allows exposure of a contact 52 to be described later of the probe substrate 26. The lower end portion of the central opening 30a is smaller than the probe substrate 26, but the remaining portion above the lower end portion of the central opening 30a has a size capable of receiving the probe substrate 26.

  The probe substrate 26 has a rectangular shape made of an electrically insulating material such as ceramic or polyimide resin. The connection terminals 26a described above are provided on the upper surface of the probe substrate 26, and the plurality of probe lands 26b (see FIG. 5) to which the contacts 52 are attached are rectangular contact region 26c (see FIG. 4) on the lower surface of the probe substrate 26. Reference). The connection terminal 26a and the probe land 26b are electrically connected in a one-to-one manner by a wiring circuit formed inside the probe substrate 26.

  Each contact 52 is of a cantilever type, with its tip (needle tip) protruding downward, with a technique such as bonding with a conductive adhesive such as solder, welding with a laser, or the like. It is attached to. Accordingly, each contact 52 is electrically connected to the corresponding connection terminal 22c of the wiring board 22 in a one-to-one manner via the wiring circuit of the probe board 26 and the connection pins 44 of the electrical connector 24.

  The probe board 26 as described above can be formed by a ceramic board member (not shown) and a multilayer wiring board formed on the lower surface of the board member. In this case, the connection terminal 26a is provided on the upper surface of the substrate member, and the probe land 26b (see FIG. 5) is provided on the lower surface of the multilayer wiring board.

  The multilayer wiring board is made of an electrically insulating material such as polyimide resin, and can have a plurality of wiring paths corresponding to the set of connection terminals 26a and probe lands 26b. One end of the wiring path is connected to the probe land 26b. In this case, the board member has a connection member that electrically connects the other end of the wiring path of the multilayer wiring board and the connection terminal 26a.

  The electrical connection device 10 is assembled as follows using a large number of screw members.

  As shown in FIG. 5, the thermal deformation suppressing member 32 has an outer annular portion formed of a plurality of male screw members 34 that penetrate through the thermal deformation suppressing member 32 downward from above and are screwed into the outer annular portion 20 c of the support member 20. It is attached to the upper surface of 20c.

  The electrical connector 24 is attached to the outer annular portion 20c by a plurality of male screw members 56 that pass through the electrical connector 24 and the wiring board 22 from below upward and are screwed to the central frame portion 20f of the support member 20. ing.

  Since the tip of the male screw member 56 is screwed into the support member 20, the male screw member 56 has an action of holding the wiring board 22 between the electrical connector 24 and the support member 20.

  The base ring 28 and the fixing ring 30 are mutually connected so as to sandwich the edge of the probe substrate 26 by a plurality of male screw members 58 that pass through the fixing ring 30 from below to be screwed to the base ring 28. Are combined.

  The base ring 28 is attached to the support member 20 by a plurality of male screw members 60 each passing through the inner annular portion 20b of the support member 20 and the wiring board 22 from the upper side to the lower side and screwed to the base ring 28. ing. Each male screw member 60 is inserted into a spacer 62 that penetrates the wiring board 22 in the plate thickness direction.

  One end and the other end of the spacer 62 are in contact with the support member 20 and the base ring 28, respectively, so that the base ring 28 and the fixing ring 30 that sandwich the edge of the probe substrate 26 are attached to the support member 20. A predetermined distance from the lower surface 20a is maintained.

  The electrical connection device 10 is assembled to a tester and used for inspecting the device under test 12. The inspection of the inspection object 12 is performed in a state where the lower end of each contact 52 is pressed by the connection terminal of the inspection object.

  During the inspection, the pin holder 40 is maintained at the ground potential. Thereby, the connection pins 44 arranged in the respective through holes 42 of the first group are maintained at the ground potential because they are provided in the respective through holes 42 of the first group and are in direct contact with the pin holder 40. The

  Therefore, the pin holder 40 can be used as a wiring for connecting the connection pin 44 arranged in each through hole 42 of the first group to the ground, and as a result, a wiring for connecting the ground connection pin to the ground can be used. There is no need to form a new one.

  However, the connection pins 44 arranged in the respective through holes 42 of the second group are electrically separated from the pin holder 40 by the electrical insulating layer 46 formed in the respective through holes 42 of the second group, and are thus grounded. Since it is separated from the electric potential, it can be used as a connection pin other than the earth, such as a power source and a signal.

  For this reason, the connection pin 44 electrically disconnected from the pin holder 40 is electrically shielded from the outside by at least the pin holder 40. As a result, external noise is suppressed and prevented from entering the electrical signal that passes through the signal connection pin 44 during the inspection.

  When assembled in the electrical connection device 10, the first connection pins 44b are pressed against the corresponding connection terminals 22c of the wiring board 22 by the spring force of the compression coil springs 44d of the electrical connector 24, and the second The connection pins 44c are pressed against the corresponding connection terminals 26a of the probe board 26.

  As a result, one end and the other end of each connection pin 44 are pressed against the connection terminals 22c and 26a of the wiring board 22 and the probe board 26, respectively, and reliably contact the connection terminals. As a result, the electrical connection state between each first connection pin 44b and the connection terminal 22c is stabilized, and the electrical connection state between the second connection pin 44c and the connection terminal 26a is stabilized.

  The contacts 52 provided on each probe land 26 b are electrically connected to the corresponding connection terminals 22 c of the wiring board 22. As a result, when the tip of the contact 52 comes into contact with the connection terminal of the device under test 12, the connection terminal is connected to the tester via the corresponding connector 36, and the device under test 12 inspects the electric circuit by the tester. I can receive it.

  When a conductive path is formed on the probe board 26 or a multilayer wiring board is formed on the board member, the flat board member made of ceramic is deformed like a wave-like bend by the heat and external force of the manufacturing process. May occur. In addition, the board member itself may be bent and deformed before the formation of the conductive path and the multilayer wiring board.

  The deformation of the probe substrate 26 due to such deformation of the substrate member is maintained even in a free state where no external force is applied to the probe substrate 26.

  In the illustrated embodiment, the probe substrate 26 has such a deformation, so that the tips of all the contacts 52 are aligned on the same plane in a free state in which the deformation is maintained. , Pre-arranged. This plane is preferably parallel to the imaginary plane of the flat substrate member obtained when the substrate member is not deformed.

  The probe substrate 26 having the contact 52 with the tips aligned in this way is supported by the support member 20 via a plurality of male screw members 64 while maintaining the deformation. Each male screw member 64 penetrates the support member 20 and the wiring board 22 from the upper side to the lower side, and the tip portion reaches the inside of the electrical connector 24.

  As shown in FIG. 5, for support by the male screw member 64, an anchor member 66 having a female screw hole for receiving the tip of each male screw member 64 is formed on the upper surface of the probe board 26 (particularly, the board member) by an adhesive. It is fixed. Each anchor member 66 is made of an electrically insulating material and projects into the electrical connector 24 from below.

  The top surfaces of the anchor members 66 are aligned so as to coincide with the same plane parallel to the virtual plane in the free state of the probe substrate 26 in which the bending deformation is maintained. Therefore, the height dimension of each anchor member 66 from the probe substrate 26 differs depending on the height position of the portion of the probe substrate 26 where the anchor member 66 is provided.

  A through hole 70 (see FIG. 6) through which the male screw member 56 passes and a through hole 72 (see FIG. 6) that receives the spacer member 68 and the anchor member 66 are formed in the wiring board 22 and the electrical connector 24 in the thickness direction. It is formed through. Each male screw member 64 is disposed in a state where its head portion is positioned on the support member 20 side and penetrates the spacer member 68, and is screwed into a corresponding anchor member 66 at its distal end portion.

  Each spacer member 68 has a height dimension equal to each other. Each lower end of the spacer member 68 is in contact with the top surface of the corresponding anchor member 66, and each upper end of the spacer member 68 is in contact with the lower surface 20a of the support member 20 serving as an attachment reference surface.

  Therefore, by tightening the male screw member 64 from above the support member 20, the spacer action of the anchor member 66 in which the tip of the male screw member 64 is screwed and the spacer member 68 disposed on each anchor member 66, The probe board 26 is reliably supported by the support member 20 in the state where the bending deformation is held so that the virtual plane at the tip of the contact 52 is parallel to the mounting reference surface 20a of the support member 20.

  Therefore, the tips of the respective contacts 52 of the probe board 26 are assembled to the electrical connection device 10 in a state where the tips are aligned on a plane parallel to the virtual plane, and therefore are aligned on the same plane. As a result, the tip of the contact 52 can be evenly pressed against the corresponding connection terminal of the object to be inspected, so that the electrical inspection of the electric circuit of the object to be inspected can be performed appropriately and easily.

  In the electrical connection device 10, the support member 20 functions to reinforce the wiring board 22 held on the lower surface 20 a, but in an inspection under a high temperature environment, thermal deformation accompanying the temperature rise and electrical connection Due to the weight of the vessel 24, the probe substrate 26, etc., the central part tends to be deformed in a convex shape downward.

  However, in the electrical connection device 10, the thermal deformation suppression member 32 having a thermal expansion coefficient larger than that of the support member 20 is supported by the plurality of male screw members 34 so that the lower surface 32 a (see FIG. 5) of the thermal deformation suppression member 32 is supported by the support member. 20 is fixed to the support member 20 in a state of being in contact with the upper surface of the outer annular portion 20c.

  Therefore, in a high temperature environment, the thermal deformation suppression member 32 tends to extend larger than the support member 20, but the lower surface 32 a of the thermal deformation suppression member 32 has a smaller thermal expansion coefficient than the thermal deformation suppression member 32. The extension is restrained by.

  Accordingly, since the upper surface 32b (see FIG. 5) serving as the free surface of the thermal deformation suppressing member 32 tends to extend larger than the lower surface 32a subjected to restraint, the central portion of the free surface is entirely supported by the stress difference. It shows a tendency to bulge in a convex shape so as to move away from the object. The acting force due to this stress difference acts as a force that suppresses downward convex deformation at the central portion of the support member 20.

  As a result, by providing the thermal deformation suppressing member 32, the downward deflection due to the thermal expansion deformation of the support member 20 in a high temperature environment is suppressed, and the deformation of the probe substrate 26 due to the deflection of the support member 20 is suppressed. Can be suppressed.

  When each through hole 42 of the second group has the electrical insulating layer 46 on the inner peripheral surface as in the above embodiment, it is ensured that the connection pins 44 arranged in these through holes come into contact with the pin holder 40. It is suppressed.

  In addition, when the pin holder 40 has the electrical insulating layer 46 on at least the inner surface of each through hole 42 of the first group, the pin holder 40 is mounted on the upper and lower sides of the pin holder 40 when the pin holder 40 is assembled to the electrical connection device 10. Contact with the electrical connection terminals 22c and 26a of the wiring board 22 and the probe board 26 is prevented. However, the electrical insulating layer 46 may be provided at least on the inner surface of the through hole 42 of the second group.

  [Embodiment 2 of Electrical Connection Device]

  8 and 9, in the electrical connector 24, the pin holder 40 has a plurality of bottomed recesses that open downward instead of the through holes in which the connection pins 44 that are electrically connected to the pin holder 40 are arranged. The connection pins 44 for grounding are disposed in the respective recesses 80, and a plurality of regions 82 on which the bare metal without the electrical insulating layer 46 is exposed are provided on the upper surface. Exposed.

  In each recess 80, the electrical insulating layer 46 is not formed. In the illustrated example, each recess 80 and region 82 are formed at the outermost peripheral edge. The length of the connection pin 44 disposed in each recess 80 is smaller than that of the signal connection pin 44 and is in direct contact with the pin holder 40.

  Lands 84 are formed at locations corresponding to the respective regions 82 on the lower surface of the wiring board 22. On the lower surface of each land 84, a plurality of protrusions 86 that are pressed against the corresponding regions 82 are formed. Lands 84 and protrusions 86 act as auxiliary electrical connections that are maintained at ground potential.

  As described above, when the pin holder 40 has the region 82 where the bare metal is exposed on the upper surface and the wiring board 22 has the auxiliary electrical connection portions 84 and 86 in contact with the exposed region 82 of the pin holder 40, the wiring The number of electrical connection terminals for grounding provided on the substrate 22 can be reduced.

  [Other Examples of Connection Pins]

  As shown in FIG. 10 (A), the entire outer peripheral surface of the cylindrical member 44d of each connection pin 44 may be covered with a film 44e made of an electrically insulating material, or as shown in FIG. 10 (B). A plurality of strip-like films 44f made of an electrically insulating material extending in the circumferential direction at intervals in the vertical direction may be provided on the outer peripheral surface of 44 cylindrical members 44d, and each connection as shown in FIG. 10 (C). A plurality of protrusions 44g made of an electrically insulating material may be provided on the outer peripheral surface of the cylindrical member 44d of the pin 44.

  As described above, each connection pin 44 includes the cylindrical member 44a, the first and second pin members 44b and 44c, and the compression coil spring 44d, and is disposed in the through hole 42 of the second group. If each of the connected connection pins 44 further includes films 44e, 44f or protrusions 44g made of an electrically insulating material on the outer peripheral surface of the cylindrical member 44a, the connection pins 44 used for signals come into contact with the pin holder 40. This is surely suppressed.

  As described above, instead of using the connection pin 44 provided with the cylindrical member 44a, the first and second pin members 44b and 44c, and the compression coil spring 44d, the connection pin using a single pin member, Any one of the first and second pin members 44b and 44c may be omitted, and other connection pins such as a connection pin using a bottomed cylindrical member 44a having a bottom may be used instead.

  In the case of a connection pin for grounding, a connection pin 44 shown in FIGS. 10B and 10C may be used. In that case, the belt-like film 44f and the protrusion 44g are made conductive.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is a disassembled perspective view which shows one Example of the electrical connection apparatus which concerns on this invention. It is a top view of the electrical connection apparatus shown in FIG. It is a front view of the electrical connection apparatus shown in FIG. It is a bottom view of the electrical connection apparatus shown in FIG. FIG. 5 is an enlarged sectional view taken along line 5-5 in FIG. It is a bottom view which shows the 1st Example of the electrical connector which concerns on this invention. It is an expanded sectional view of the electrical connector shown in FIG. It is a top view which shows a part of 2nd Example of the electrical connector which concerns on this invention. It is an expanded sectional view similar to FIG. 5 of the electrical connector shown in FIG. (A), (B) and (C) are figures which show the other Example of a connection pin.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Electrical connection apparatus 12 Test object 20 Support member 22 Wiring board 22a The lower surface of a wiring board 22b The upper surface of a wiring board 22c The connection terminal of a wiring board 24 Electrical connector 26 Probe board 26a Connection terminal of a probe board 26b Probe land 28 Base ring 30 fixing ring 32 thermal deformation suppressing member 34, 56, 58, 60, 64 screw member 38 relay 40 pin holder 42 through hole 44 connection pin 44a cylindrical member 44b first pin member 44c second pin member 44d compression coil spring 44e 44f Membrane 44g Projection 46 Electrical insulation layer 52 Contact 62, 68 Spacer member 66 Anchor member 70, 72 Through hole for male screw member 80 Recess 82 Exposed area 84 Land (auxiliary electrical connection)
86 Protrusion (auxiliary electrical connection)

Claims (12)

A plurality of first electrical connection terminals provided on the lower surface of the wiring board and a plurality of second electrical terminals provided on the upper surface of the probe board are disposed between the wiring board and the probe board facing each other. An electrical connector for connecting an electrical connection terminal,
A pin holder made of a conductive material in the form of a plate, the pin holder having a plurality of through holes penetrating through the pin holder in the thickness direction thereof, and a conductive connection pin disposed in each through hole, A conductive connection pin having an upper end portion that is in contact with a first electrical connection terminal and a lower end portion that is connected to the second electrical connection terminal;
The plurality of through holes are divided into at least first and second groups each including a plurality of through holes,
A connection pin disposed in each through hole of the first group is electrically connected to the pin holder,
An electrical connector, wherein a connection pin disposed in each through hole of the second group is electrically insulated from the pin holder.   The electrical connector according to claim 1, wherein each through hole of the second group has an electrical insulating layer on an inner peripheral surface thereof.   Each connection pin includes a tubular member, a first pin member disposed at one end portion of the tubular member so as to be movable in a longitudinal direction of the tubular member, and the first pin member disposed in the tubular member. A compression coil spring that urges one pin member in a direction in which a tip portion projects from one end of the cylindrical member, and each connection pin disposed in the through hole of the second group further includes: The electrical connector according to claim 1, wherein a film or a protrusion made of an electrically insulating material is provided on an outer peripheral surface of the cylindrical member.   Each connection pin further includes a second pin member disposed at the other end of the cylindrical member so as to be movable in the longitudinal direction of the cylindrical member, and the compression coil spring further includes the first and the second pin members. The electrical connector according to claim 3, wherein the second pin member is urged between the second pin members in a direction in which a distal end portion protrudes from the other end portion of the cylindrical member.   2. The electrical connector according to claim 1, wherein the pin holder has an electrically insulating layer on at least a surface excluding an inner surface of each through hole of the first group. A plurality of first electrical connection terminals provided on the lower surface of the wiring board and a plurality of second electrical terminals provided on the upper surface of the probe board are disposed between the wiring board and the probe board facing each other. An electrical connector for connecting an electrical connection terminal,
A pin holder made of a conductive material in the form of a plate, each having a plurality of bottomed recesses that open the pin holder to the lower side thereof, and a plurality of penetrations each penetrating the pin holder in the thickness direction thereof A pin holder having a hole, and a first conductive connection pin disposed in each recess, the first contact pin having a portion in contact with the pin holder and a lower end connected to the second electrical connection terminal And a conductive second connection pin disposed in each through hole, the upper end contacting the first electrical connection terminal and the lower end connected to the second electrical connection terminal A second connection pin having a portion,
Each first connection pin is electrically connected to the pin holder,
An electrical connector, wherein each second connection pin is electrically insulated from the pin holder.   The electrical connector according to claim 6, wherein each through hole has an electrical insulating layer on an inner peripheral surface thereof.   The electrical connector according to claim 6, wherein the pin holder has an electrical insulating layer on at least a surface excluding the inner surface of the recess.   The electrical connector according to claim 8, wherein the pin holder has a region where the electrical insulating layer does not exist on an upper surface, and is exposed in the region. An electrical connection device for connecting a tester and an electrical connection terminal of an object to be inspected for electrical inspection by the tester,
A plurality of wiring circuits connected to the tester are formed, and a wiring board having a plurality of first electrical connection terminals connected to the wiring circuit in a one-to-one manner on the lower surface, and on the lower surface of the wiring board A flat probe board having a plurality of second electrical connection terminals opposed to the first electrical connection terminal and having a plurality of second electrical connection terminals opposed to the first electrical connection terminal, provided on the lower surface of the probe board, and the A plurality of contacts that are electrically connected to a second electrical connection terminal and capable of abutting a tip on the connection terminal of the device under test; the wiring board; and the probe board. And an electrical connector for connecting the first electrical connection terminal to the contact corresponding to the first electrical connection terminal,
The said electrical connector is an electrical connection apparatus which is a thing of any one of Claim 1 to 9.   Further, a support member disposed on the wiring board, and a thermal deformation suppression member disposed on the support member to suppress thermal deformation of the support member, the thermal expansion coefficient of the support member being The electrical connection device according to claim 10, further comprising a thermal deformation suppressing member having a large thermal expansion coefficient.   11. The electrical connector according to claim 9, wherein the wiring board has an auxiliary electrical connection portion that is in contact with a region of the pin holder where the electrical insulation layer does not exist. Electrical connection device.

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