JP2009023777A - Sheet for suction fixing - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet for suction fixing with the air permeability improved while excellent surface flatness is well maintained. <P>SOLUTION: The sheet 50 for suction fixing is equipped with a porous layer 21 having a sucking surface 21a whereto a sucking action is applied from a suction unit, a plurality of holes TH formed in the porous layer 21 through a mechanical or a chemical boring process so that openings are located in the suction surface 21a, and a working surface 23b positioned opposite the sucking surface 21a about the plurality of holes TH and contacting the component to be sucked and fixed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sheet used for adsorbing and fixing parts.

  One of the methods for transporting plate-shaped or sheet-shaped components such as display glass substrates, ceramic green sheets, and semiconductor wafers is suction conveyance. As shown in FIG. 8, the apparatus for performing the suction conveyance includes, for example, a suction unit 10 having a vacuuming function and a suction fixing sheet 11 attached to the suction unit 10. The component 12 is fixed and supported on the suction unit 10 via the suction fixing sheet 11.

As the above-mentioned adsorption fixing sheet, a porous sheet having air permeability is used because of the demand for expression of adsorption force. Another important characteristic required for the adsorbing and fixing sheet is surface smoothness. It is preferable that the surface of the adsorption fixing sheet has a high surface smoothness because it is difficult to damage the parts to be adsorbed. As a sheet for adsorbing and fixing excellent in air permeability and surface smoothness, a porous sheet made of a sintered body of ultrahigh molecular weight polyethylene powder having an average molecular weight of 500,000 or more is known (Patent Documents 1 to 3).
Japanese Patent Publication No. 5-66855 Japanese Patent Laid-Open No. 9-174694 JP 2006-26981 A

  In recent years, the area of glass substrates for displays, the diameter of semiconductor wafers, and the thickness of ceramic green sheets have been reduced. Along with the increase in the size of the object to be attracted, a transport error due to insufficient attracting force is likely to occur. As the thickness of the ceramic green sheet progresses, the green sheet itself becomes breathable, and the suction force necessary for suction conveyance may rather increase. Under such circumstances, an adsorption fixing sheet having improved air permeability necessary for adsorption without reducing surface smoothness is desired.

  An object of this invention is to provide the sheet | seat for adsorption fixing by which air permeability was improved, maintaining the outstanding surface smoothness.

That is, the present invention
A porous layer having a suction surface to be subjected to a suction action from the suction unit;
A plurality of holes provided in the porous layer by mechanical or chemical drilling so that the openings are located on the suction surface;
A work surface located on the opposite side of the suction surface across the plurality of holes and contacting the parts to be suction fixed;
An adsorption fixing sheet is provided.

In another aspect, the present invention provides:
A body layer having a suction surface to be subjected to a suction action from the suction unit;
A plurality of through holes provided in the main body layer by mechanical or chemical drilling so that one opening is located on the suction surface and penetrates the main body layer in the thickness direction;
A breathable bonding layer laminated on the main body layer so as to close the other opening of the plurality of through holes;
A work surface that is located on the opposite side of the suction surface across the plurality of through-holes and that is in contact with the component to be sucked and fixed;
An adsorption fixing sheet is provided.

  According to the former of the adsorbing and fixing sheet of the present invention, a plurality of holes are provided in the porous layer by mechanical or chemical drilling. The micropores provided in the porous layer are usually irregular pores and do not exhibit selectivity in the direction of ventilation. On the other hand, according to the holes formed by mechanical or chemical perforation, selectivity is generated in the aeration direction of the porous layer when the suction surface receives a suction action. And the sheet | seat for adsorption fixing provided with such a porous layer exhibits strong adsorption power with respect to components. Moreover, even if an opening is formed on the surface of the adsorption fixing sheet by performing the perforating process, the surface smoothness is not impaired.

  In the latter of the adsorption fixing sheet of the present invention, a plurality of through holes are provided in the main body layer. Therefore, the main body layer may be porous or non-porous. According to the through-hole formed by mechanical or chemical perforation, selectivity is generated in the aeration direction of the main body layer when the suction surface receives a suction action. And the adsorption | suction fixing sheet | seat provided with such a main body layer exhibits strong adsorption power with respect to components. In addition, since the breathable bonding layer is provided so as to close the other opening of the through hole provided in the main body layer, it is possible to prevent the opening from being exposed to the work surface.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

(First embodiment)
FIG. 1 is a schematic cross-sectional view of a suction fixing sheet according to the first embodiment. The adsorption fixing sheet 20 includes a porous layer 21 and a plurality of holes TH provided in the porous layer 21. The plurality of holes TH are constituted by through-holes TH that penetrate the porous layer 21 in the thickness direction.

  Such a suction fixing sheet 21 is used by being mounted on, for example, the suction unit 10 of the transport apparatus shown in FIG. The upper surface 21a of the porous layer 21 is a suction surface 21a that should receive a suction action from the suction unit 10 of the transport device. The lower surface 21b of the porous layer 21 is a work surface 21b that is located on the opposite side of the suction surface 21a with the plurality of through holes TH interposed therebetween and that is in contact with a component to be sucked and fixed.

  The porous layer 21 can be composed of a porous sheet. As the porous sheet, those made of a polymer material such as polyethylene, polypropylene, ultrahigh molecular weight polyethylene, fluororesin (for example, polytetrafluoroethylene), polystyrene, polyamide, and polyester are suitable. In particular, a porous sheet made of a sintered body of ultrahigh molecular weight polyethylene powder is preferably used as the porous layer 21. Hereinafter, in this specification, ultra high molecular weight polyethylene is abbreviated as “UHMWPE (Ultra High Molecular Weight Poly-ethylene)”.

  The sintered body of UHMWPE powder is obtained by, for example, UHMWPE powder (average particle size of 30 to 200 μm) filled in a mold, as described in Japanese Patent Publication No. 5-66885 and Japanese Patent Application Laid-Open No. 2006-26981. It is obtained by sintering at a temperature in the vicinity of the melting point. The obtained sintered body is usually block-shaped. If the block-like sintered body is formed into a sheet by cutting, a porous sheet that can be used as the porous layer 21 can be obtained. The porous sheet may contain additives such as a surfactant and a conductive polymer in order to prevent charging.

  A porous sheet made of a sintered body of UHMWPE powder retains the excellent characteristics of UHMWPE such as chemical resistance, wear resistance, and releasability. Moreover, by making it porous, characteristics such as air permeability, cushioning properties, and slidability are also obtained. According to the manufacturing method described above, a porous sheet having a porosity of 20 to 50% is obtained. A suitable porosity of the porous sheet used as the porous layer 21 is, for example, 30 to 40%. The porosity can be measured by, for example, a mercury porosimeter method. Furthermore, according to the manufacturing method described above, the block-shaped sintered body can be continuously formed into a porous sheet, which is advantageous in terms of production cost.

  UHMWPE refers to polyethylene having an average molecular weight of 500,000 or more. The average molecular weight of UHMWPE is usually in the range of 2 to 10 million. The average molecular weight can be measured by, for example, a method defined in ASTM D4020 (viscosity method).

The thickness D ₁ of the porous layer 21 may be adjusted depending on the suction force required, for example, it may be in the range of 0.1Mm～2.0Mm. Moreover, it is preferable that the surface smoothness of the porous layer 21 is high, and it is good in particular that the surface roughness (Ra) of the work surface 21b is in the range of 0.5 to 1.0 μm. In addition, surface roughness (Ra) means the arithmetic mean roughness prescribed | regulated to JISB0601 (2001).

  Next, the plurality of through holes TH provided in the porous layer 21 will be described. The through hole TH can be formed in the porous layer 21 by drilling so that the opening is located on the upper surface 21a (suction surface) of the porous layer 21. The drilling method for forming the through hole TH may be mechanical or chemical. Examples of mechanical processing methods include punching, drilling, and laser processing. Examples of chemical processing methods include etching using lithography technology.

  The shape of the through hole TH is not particularly limited, and the opening shape may be circular or polygonal. What is necessary is just to adjust the diameter (opening diameter) of the through-hole TH with circular opening shape according to the required adsorption | suction force, for example, it can be set as the range of 0.5-1.0 mm. When the opening shape is a polygon, the diameter of a circle having the same area as the polygon may be considered. The arrangement of the through holes TH is not particularly limited, and may be an arrangement in which line segments connecting the centers of the openings appearing on the suction surface 21a form a lattice. Preferably, it is formed at equal intervals in the vertical and horizontal directions. Moreover, the center space | interval of two adjacent through-holes TH and TH, ie, the pitch of the through-hole TH, is good in the range of 1.0-4.0 mm, for example. Further, in the present embodiment, the thickness direction of the suction fixing sheet 20 and the axial direction of the through hole TH coincide with each other, but this is not essential. The axis of the through hole TH may be inclined with respect to the thickness direction of the suction fixing sheet 20. That is, the through hole TH may be an oblique hole.

  By providing the through-hole TH, the air permeability in the thickness direction of the suction fixing sheet 20 is greatly improved, so that a strong suction force is exhibited. The micropores provided in the porous layer 21 are dense and irregular, have no selectivity in the direction of gas flow, and have high ventilation resistance. On the other hand, when the through hole TH is provided, gas easily passes in the direction in which the hole is formed. That is, selectivity occurs in the gas flow direction.

  As shown in FIG. 6, air also flows into the through hole TH from the porous portion around the through hole TH. Therefore, at the moment of suction, the suction force of the portion where the through hole TH is provided becomes strong, but the entire work surface 21b exhibits a substantially uniform suction force when the parts are sucked onto the work surface 21b. Therefore, it is possible to perform stable adsorption fixation. On the other hand, when only a through-hole is provided in a non-porous resin sheet, only the portion with the through-hole exerts an adsorption force, so the variation in the adsorption force in the in-plane direction is large and stable adsorption fixation is possible. It becomes difficult to realize.

(Second Embodiment)
FIG. 2 is a schematic cross-sectional view of the suction fixing sheet according to the second embodiment. The adsorption fixing sheet 30 includes a porous layer 21 and a plurality of holes BH provided in the porous layer 21. In the present embodiment, the plurality of holes BH are constituted by bottomed holes BH that do not penetrate the porous layer 21.

The bottomed hole BH is excellent in that an opening is not formed on the work surface 21b, although improvement in air permeability as much as the through hole TH (FIG. 1) cannot be expected. Since there is no opening in the work surface 21b, the suction force is easily applied uniformly to the component to be sucked in the in-plane direction, and more stable suction fixing can be performed. Porous layer depth D ₂ of the bottomed hole BH about the thickness direction of the 21 may be adjusted depending suction force required, for example, of 1/4 to 1 thickness D ₁ of the porous layer 21 A range of / 2 is preferable.

(Third embodiment)
FIG. 3 is a schematic cross-sectional view of the suction fixing sheet according to the third embodiment. The adsorption fixing sheet 40 includes a porous layer 21, a plurality of holes BH provided in the porous layer 21, and a particle layer 23. The plurality of holes BH are constituted by bottomed holes BH. The particle layer 23 is a breathable layer that is mainly composed of plastic fine particles and is directly laminated on the main surface of the porous layer 21 opposite to the suction surface 21a. The surface 23b of the particle layer 23 constitutes a work surface 23b that comes into contact with a component to be adsorbed and fixed.

  The porous sheet that can be used as the porous layer 21 can be manufactured by the above-described method of forming a UHMWPE sintered body into a sheet by cutting. In this case, since the surface roughness (Ra) of the porous sheet depends on the accuracy of the cutting process, a satisfactory surface roughness may not be obtained. Therefore, in order to improve the surface smoothness, the particle layer 23 can be provided as in the present embodiment. Such a particle layer 23 includes, for example, UHMWPE fine particles as plastic fine particles.

The thickness D ₃ of the particle layer 23 may be adjusted according to the required adsorption force, and can be, for example, in the range of 1/20 to 1/10 of the thickness D ₁ of the porous layer 21. For example, it can be set as the range of 100-200 micrometers. The surface roughness (Ra) of the particle layer 23 can be made smaller than the surface roughness (Ra) of the porous layer 21. Specifically, the surface roughness (Ra) of the work surface 23b in the particle layer 23 is preferably less than 0.5 μm, for example, in the range of 0.2 to 0.3 μm. If the surface roughness (Ra) of the work surface 23b is sufficiently small, it is preferable that the unevenness of the work surface 23b is not stamped even on a flexible component such as a ceramic green sheet. In addition, the attractive force also becomes easier to work.

  The particle layer 23 preferably has air permeability in both the thickness direction and the in-plane direction. Such a particle layer 23 can be formed by the following method. First, as a raw material liquid for forming the particle layer 23, a dispersion liquid in which UHMWPE fine particles are dispersed in a solvent is prepared. The UHMWPE fine particles preferably have an average particle size (50% particle size by laser diffraction particle size meter) in the range of 30 to 100 μm. Next, the dispersion is directly applied to the lower surface 21b of the porous layer 21 to form a coating film containing UHMWPE fine particles. A known coating method such as spray coating, curtain coating, spin coating, or dip coating may be adopted as a method for applying the dispersion liquid to the porous layer 21. Finally, by drying the coating film at a temperature near the melting point of UHMWPE (for example, 130 to 160 ° C.), it is possible to form the particle layer 23 with sufficient air permeability required for adsorption and fixation. Note that such a particle layer 23 may also have a porous structure.

  In order to further improve the surface smoothness, first, the dispersion is applied to a substrate having excellent surface smoothness to form a coating film containing UHMWPE fine particles. Examples of the substrate having excellent surface smoothness include a polyethylene terephthalate film and a polyimide film. Next, a porous sheet as the porous layer 21 is overlaid on the coating film formed on the substrate. It is preferable to form holes BH in the porous sheet in advance. Next, the laminated body which consists of a base material, the coating film containing UHMWPE microparticles | fine-particles, and a porous sheet is heated at the temperature of melting | fusing point vicinity of UHMWPE. By heating, the solvent is removed from the coating film, and the UHMWPE fine particles are bound in a network form, whereby the particle layer 23 is formed. Finally, the base material is peeled from the particle layer 23, whereby the adsorption fixing sheet 40 including the porous layer 21 provided with the holes BH and the particle layer 23 is obtained. A specific method for forming the particle layer 23 is also disclosed in Japanese Patent Application Laid-Open No. 2006-26981.

  Note that “consisting mainly of plastic fine particles” means that other components such as binders and additives required to form a layer of plastic fine particles, air permeability, surface smoothness, sliding It is the meaning that it may be included to such an extent that various characteristics, such as property, are not impaired.

(Fourth embodiment)
FIG. 4 is a schematic cross-sectional view of the suction fixing sheet according to the fourth embodiment. The adsorption fixing sheet 50 includes a porous layer 21, a plurality of holes TH provided in the porous layer 21, a particle layer 23, and a bonding layer 25. The plurality of holes TH are constituted by through-holes TH that penetrate the porous layer 21 in the thickness direction. The particle layer 23 is a breathable layer located on the opposite side of the porous layer 21 from the suction surface 21a. The bonding layer 25 is a breathable layer that is positioned between the porous layer 21 and the particle layer 23 and bonds the porous layer 21 and the particle layer 23 together.

  When the through hole TH is provided in the porous layer 21, there is a possibility that a part of the particle layer 23 is bent and enters the through hole TH, and the work surface 23b is uneven. If the bonding layer 25 is interposed between the porous layer 21 and the particle layer 23 as in the present embodiment, the particle layer 23 can be prevented from entering the through hole TH. In addition, the bonding layer 25 may be a layer (diffusion layer) for diffusing an adsorption force locally increased by the through hole TH in the in-plane direction.

  The material of the bonding layer 25 is not particularly limited as long as it has air permeability. For example, a nonwoven fabric or a porous sheet can be used as the bonding layer 25. Examples of the porous sheet include a porous sheet made of a sintered body of UHMWPE fine particles and a porous sheet made of a fluororesin. When a porous sheet made of a sintered body of UHMWPE fine particles is used as the bonding layer 25, the adsorption fixing sheet 50 of the present embodiment is substantially the same as the adsorption fixing sheet 40 described in the third embodiment. . However, this embodiment is advantageous in that the formation of the bottomed hole BH can be avoided. It is difficult to form the bottomed hole BH by a method with good productivity such as punching. Therefore, if the procedure of firstly forming the through hole BH in the porous layer 21 and secondly closing one opening of the through hole BH with the bonding layer 25, the bottomed hole BH is not formed. It will end. As a result, it is possible to minimize a decrease in productivity due to drilling.

  The bonding layer 25 may be made of a material having air permeability in both the thickness direction and the in-plane direction. Then, the suction force received from the suction unit 10 (see FIG. 8) is transmitted to the particle layer 23 in the form of being dispersed in the in-plane direction. When the bonding layer 25 has such an action, the in-plane direction of the adsorption force on the work surface 23b can be made uniform by the bonding layer 25, which contributes to more stable adsorption fixation. A porous sheet or a non-woven fabric satisfies such conditions and is therefore suitable as a material for the bonding layer 25. Furthermore, the bonding layer 25 may be a breathable pressure-sensitive adhesive layer made of a hot-melt pressure-sensitive adhesive. Such an adhesive layer can be formed by a method such as a spray method.

The thickness D ₄ of the bonding layer 25 may be adjusted according to the required adsorption force, and can be, for example, in the range of 1/20 to 1/10 of the thickness D ₁ of the porous layer 21. For example, it can be set as the range of 100-200 micrometers. The bonding layer 25 that can be formed of a nonwoven fabric or a porous sheet can be easily bonded to the porous layer 21 provided with the through-hole BH by, for example, thermal lamination. As long as good air permeability is not impaired, the porous layer 21 and the bonding layer 25 may be bonded together using an adhesive. The particle layer 23 can be formed by the method described in the third embodiment, that is, a method of directly applying a dispersion of UHMWPE fine particles, or a method using a base material such as a PET film.

  Further, the porous layer 21 is constituted by a first porous sheet made of a sintered body of UHMWPE fine particles, and the bonding layer 25 is also made of a second porous sheet made of a sintered body of UHMWPE fine particles. When 23 is mainly composed of UHMWPE fine particles, the layers can be firmly bonded to each other. The bonding layer 25 is not required to be as smooth as the particle layer 23, and only needs to have air permeability. Therefore, the bonding layer 25 is composed of a porous layer 21 or a sintered body of particles having a larger average particle diameter than the porous layer 23. It may be.

  According to the adsorption fixing sheet 50 shown in FIG. 4, the particle layer 23 and the bonding layer 25 have air permeability in both the in-plane direction and the thickness direction. The adsorption force of 23b is made uniform. If so, even if a non-porous main body layer 27 is employed instead of the porous layer 21, the adsorption force of the work surface 23b is sufficiently uniform in the in-plane direction. Such a non-porous main body layer 27 can be constituted by a resin sheet. In some cases, the main body layer 27 may be made of a metal sheet. However, in consideration of the requirement for characteristics such as cushioning and chemical resistance, it is recommended to use a resin sheet for the main body layer 27.

  As shown in FIG. 7, in the adsorption fixing sheet 50, when the porous layer 21 is relatively thick, air leakage from the side surface 21p of the porous layer 21 is likely to occur. On the other hand, when the non-porous main body layer 27 is employed instead of the porous layer 21, such air leakage does not occur, and the adsorption power can be easily improved. Of course, when the porous layer 21 is thin, the influence of air leakage from the side surface 21p is small and does not hinder the improvement of the adsorption power.

(Fifth embodiment)
FIG. 5 is a schematic cross-sectional view of the suction fixing sheet according to the fifth embodiment. The adsorption fixing sheet 60 includes a main body layer 27, a plurality of holes TH provided in the main body layer 27, and a bonding layer 25. The plurality of holes TH are constituted by through holes TH that penetrate the main body layer 27 in the thickness direction. The bonding layer 25 is a breathable layer laminated on the main body layer 27 so as to close the opening of the through hole TH on the side opposite to the suction surface 21a. The work surface 25 b that comes into contact with the component to be sucked and fixed is constituted by the surface of the bonding layer 25.

  As described in the fourth embodiment, the main body layer 27 can be composed of a non-porous resin sheet, and the bonding layer 25 can be composed of a porous sheet made of a sintered body of UHMWPE fine particles. That is, the suction fixing sheet 60 of the present embodiment is obtained by omitting the particle layer 23 from the suction fixing sheet 50 (see FIG. 4) of the fourth embodiment. According to the suction fixing sheet 60 of the present embodiment, the surface smoothness as that of the suction fixing sheet 50 of the fourth embodiment cannot be obtained, but the suction force of the work surface 25b and the effect of preventing air leakage from the side surface are as follows. You can expect equivalent performance. Moreover, since the particle layer 23 is omitted, a reduction in production cost can be expected.

Example 1
The adsorption fixing sheet 20 shown in FIG. 1 was produced as follows. A through-hole was formed in a porous sheet made of a sintered body of UHMWPE powder (Sunmap (registered trademark) HP-5320 thickness 1.9 mm, manufactured by Nitto Denko Corporation) using a φ1.5 mm drill. The pitch of the through holes was 2.5 mm, and the arrangement was a lattice.

(Example 2)
The adsorption fixing sheet 30 shown in FIG. 2 was produced as follows. A bottomed hole was formed in the same porous sheet as in Example 1 using a φ1.5 mm drill. The depth of the bottomed holes was 1.5 mm, the pitch was 2.5 mm, and the arrangement was a grid.

(Example 3)
The adsorption fixing sheet 50 shown in FIG. 4 was produced as follows. First, a through hole was formed in a non-porous sheet made of polyamide resin (MC901 thickness 2.0 mm manufactured by Nippon Polypenco Co., Ltd.) with a φ1.0 mm drill. The pitch of the through holes was 1.5 mm, and the arrangement was a grid. Next, a porous sheet (Sunmap (registered trademark) HP-5320, manufactured by Nitto Denko Corporation) having a thickness of 0 is formed on one main surface of the non-porous sheet in which the through holes are formed so as to block the opening of the through holes. 0.5 mm) was bonded together by heat lamination. Next, by the method described in the third embodiment, UHMWPE fine particles (Miperon XM-220 (registered trademark) average molecular weight 2 million manufactured by Mitsui Chemicals, Inc., melting point 136 ° C., average particle size 25 to 55 μm, particle shape: spherical) are obtained. A main particle layer was formed on the bonding layer.

(Comparative Example 1)
The porous sheet (Sunmap (registered trademark) HP5320 thickness 1.9 mm, manufactured by Nitto Denko Corporation) used in Example 1 was prepared as the adsorption fixing sheet of Comparative Example 1.

(Comparative Example 2)
Through holes were formed in a non-porous sheet made of polyamide resin (MC901 thickness 2.0 mm, manufactured by Nippon Polypenco Co., Ltd.) using a φ1.0 mm drill, and prepared as an adsorption fixing sheet of Comparative Example 2. The pitch of the through holes was 1.5 mm, and the arrangement was a lattice.

(Air permeability)
The air permeability of the adsorption and fixing sheets of Examples and Comparative Examples was measured according to JIS L1096 (1999) using a Fragile tester (manufactured by TOYOSEIKI). The results are shown in Table 1.

  As shown in Table 1, the adsorbing and fixing sheets of Example 1 and Comparative Example 2 provided with through holes showed high air permeability. However, since the suction fixing sheet of Comparative Example 2 is simply a through-hole provided in a non-porous sheet, the entire work surface does not exhibit the suction force, and its utility value is low.

  The adsorption fixing sheets of Example 2 and Example 3 both exhibited a permeability of about twice that of the adsorption fixing sheet of Comparative Example 1 (Sunmap alone). A non-porous resin sheet is used for the adsorption and fixing sheet of Example 3, but the air permeability was higher than that of Comparative Example 1 because the bonding layer and the particle layer had sufficient air permeability.

  The suction fixing sheet of Example 1 has a great utility value for applications in which an opening may be formed on the work surface. On the other hand, the suction fixing sheet of Example 2 and Example 3 has a great utility value for applications where there is a problem if an opening is formed on the work surface.

  The adsorption fixing sheet of the present invention can be suitably used in an apparatus for conveying components such as a ceramic green sheet, a glass substrate for display, and a semiconductor wafer. Furthermore, the suction fixing sheet of the present invention can be applied to a processing apparatus such as a polishing apparatus, a dicing apparatus, and an exposure apparatus.

1 is a schematic cross-sectional view of a suction fixing sheet according to a first embodiment of the present invention. Cross-sectional schematic diagram of the suction fixing sheet according to the second embodiment Cross-sectional schematic diagram of the suction fixing sheet according to the third embodiment Cross-sectional schematic diagram of the suction fixing sheet according to the fourth embodiment Cross-sectional schematic diagram of the suction fixing sheet according to the fifth embodiment Explanatory drawing of the action by the holes provided in the porous layer Illustration of the action of the porous layer Schematic diagram of suction transfer device

Explanation of symbols

10 Suction unit 20, 30, 40, 50, 60 Adsorption fixing sheet 21 Porous layer 21a Upper surface (suction surface)
23 Particle layer 21b, 23b Lower surface (work surface)
25 Bonding layer 27 Body layer TH Through hole BH Bottomed hole

Claims (12)

A porous layer having a suction surface to be subjected to a suction action from the suction unit;
A plurality of holes provided in the porous layer by mechanical or chemical drilling so that the openings are located on the suction surface;
A work surface located on the opposite side of the suction surface across the plurality of holes and in contact with a component to be suction fixed;
Adhesive fixing sheet.   The adsorption fixing sheet according to claim 1, wherein the plurality of holes are constituted by through holes penetrating the porous layer in a thickness direction.   The adsorption fixing sheet according to claim 1, wherein the plurality of holes are constituted by bottomed holes that do not penetrate the porous layer. It is composed mainly of plastic fine particles, and further comprises a breathable particle layer directly laminated on the main surface opposite to the suction surface of the porous layer,
The adsorption / fixing sheet according to claim 3, wherein the work surface is constituted by a surface of the particle layer. It is mainly composed of plastic fine particles, and further comprises a gas-permeable particle layer located on the opposite side of the suction surface of the porous layer,
The adsorption / fixing sheet according to claim 1, wherein the work surface is constituted by a surface of the particle layer. The plurality of holes are constituted by through-holes penetrating the porous layer,
An air-permeable particle layer composed mainly of plastic fine particles and located on the opposite side of the suction surface of the porous layer;
A breathable bonding layer that is located between the porous layer and the particle layer and bonds the porous layer and the particle layer;
The adsorption fixing sheet according to claim 1, wherein the work surface is constituted by a surface of the particle layer.   The adsorption / fixing sheet according to claim 6, wherein the bonding layer is made of a material having air permeability in both a thickness direction and an in-plane direction. The porous layer is constituted by a porous sheet made of a sintered body of ultrahigh molecular weight polyethylene powder,
The sheet for adsorption fixation according to any one of claims 4 to 7, wherein the particle layer includes ultra high molecular weight polyethylene fine particles as the plastic fine particles. A body layer having a suction surface to be subjected to a suction action from the suction unit;
A plurality of through-holes provided in the main body layer by mechanical or chemical drilling so that one opening is located on the suction surface and penetrates the main body layer in the thickness direction;
A breathable bonding layer laminated on the main body layer so as to close the other opening of the plurality of through holes;
A work surface that is located on the opposite side of the suction surface across the plurality of through-holes and that is in contact with a component to be sucked and fixed;
Adhesive fixing sheet. It is mainly composed of plastic fine particles, and further comprises a breathable particle layer located on the side opposite to the suction surface of the main body layer,
The body layer and the particle layer are bonded by the bonding layer,
The adsorption and fixing sheet according to claim 9, wherein the work surface is constituted by a surface of the particle layer. The main body layer is constituted by a non-porous resin sheet,
The adsorption and fixing sheet according to claim 10, wherein the particle layer includes ultra high molecular weight polyethylene fine particles as the plastic fine particles. The adsorption fixing sheet according to any one of claims 9 to 11, wherein the bonding layer is made of a material having air permeability in both a thickness direction and an in-plane direction.