JP2009015344A - Organic electroluminescent device and manufacturing method thereof - Google Patents

Organic electroluminescent device and manufacturing method thereof Download PDF

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JP2009015344A
JP2009015344A JP2008236459A JP2008236459A JP2009015344A JP 2009015344 A JP2009015344 A JP 2009015344A JP 2008236459 A JP2008236459 A JP 2008236459A JP 2008236459 A JP2008236459 A JP 2008236459A JP 2009015344 A JP2009015344 A JP 2009015344A
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plurality
electrodes
organic electroluminescent
driving
switching
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JP2008236459A
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JP4897759B2 (en
Inventor
Gee-Sung Chae
Ock-Hee Kim
Jae-Yong Park
オク−ヒ キム
ジ−スン チェ
ジェ−ヨン パク
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Lg Display Co Ltd
エルジー ディスプレイ カンパニー リミテッド
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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/28Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
    • H01L27/32Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
    • H01L27/3241Matrix-type displays
    • H01L27/3244Active matrix displays
    • H01L27/3276Wiring lines
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • G09G3/32Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/28Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
    • H01L27/32Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
    • H01L27/3241Matrix-type displays
    • H01L27/3244Active matrix displays
    • H01L27/3251Double substrate, i.e. with OLED and TFT on different substrates
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/04Structural and physical details of display devices
    • G09G2300/0439Pixel structures
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/08Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/08Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/0809Several active elements per pixel in active matrix panels
    • G09G2300/0842Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor

Abstract

An organic electroluminescent device according to the present invention simultaneously connects the power line to adjacent pixels.
The present invention relates to an organic electroluminescent device, and more particularly to a configuration of an organic electroluminescent device for improving an aperture ratio and a manufacturing method therefor. The organic electroluminescent device according to the present invention is configured such that the positions of the driving elements formed in adjacent pixels are close to each other so that signals are simultaneously received by one power supply wiring. In this way, the number of power supply wirings can be reduced to ½ compared to the conventional case, so that the aperture ratio and luminance of the organic electroluminescent element can be improved and wiring defects can be prevented.
[Selection] Figure 5

Description

  The present invention relates to an organic electroluminescent device, and more particularly to a configuration of an organic electroluminescent device for improving an aperture ratio and a manufacturing method thereof.

  In general, an organic electroluminescent device is formed by injecting electrons and holes into an emission layer from an electron injection electrode (cathode) and a hole injection electrode (anode), respectively. It is an element that emits light when excitons to which holes are coupled fall from the excited state to the ground state.

  Unlike the conventional thin film liquid crystal display device (LCD), this principle does not require a separate light source, so that the volume and weight of the device can be reduced.

  In addition, the organic electroluminescent element exhibits high-quality panel characteristics (low power, high brightness, high reaction speed, low weight). OLED is recognized as a powerful next-generation display that can be used in most consumer electronics applications such as mobile communication terminals, CNS, PDA, Camcorder, and Palm PC. Yes.

  In addition, since the manufacturing process is simple, the production cost can be reduced more than the existing LCD.

  The method of driving such an organic electroluminescent element can be divided into a passive matrix type and an active matrix type.

  The passive matrix organic electroluminescence device has a simple structure and a simple manufacturing method, but has a high power consumption and a difficulty in increasing the area of the display device, and the aperture ratio decreases as the number of wirings increases. There are disadvantages.

  On the other hand, the active matrix organic electroluminescent device has an advantage that it can provide high luminous efficiency and high image quality.

  FIG. 1 is a drawing schematically showing a configuration of an organic electroluminescent element according to related art.

  As shown in the drawing, the organic electroluminescent device 10 includes a thin film transistor T array unit 14 on a transparent first substrate 12, and a first electrode 16, an organic light emitting layer 18, and a second electrode 20 on the thin film transistor array unit 14. Is configured.

  At this time, the light emitting layer 18 expresses red (R), green (G), and blue (B) colors. Therefore, in a general method, red, green, and blue are used for each pixel P in a general method. A separate organic substance that emits light is used by patterning.

  The first substrate 12 is bonded to the second substrate 28 to which the moisture absorbent 22 is attached through the sealant 26, whereby the encapsulated organic electroluminescent device 10 is completed.

  At this time, the moisture absorbent 22 is for removing moisture and oxygen penetrating into the capsule, and a part of the second substrate 28 is etched, and the etched part is filled with the moisture absorbent 22. And fix with tape 25.

  Hereinafter, an array unit corresponding to one pixel of the organic electroluminescent element will be schematically described with reference to FIG.

  FIG. 2 is a plan view schematically showing a thin film transistor array part included in an organic electroluminescence device according to the related art.

Generally, active matrix thin-film transistor array unit, the switching element T S and the driving element T D and the storage capacitor C ST is formed for each of a plurality of pixels defined in the substrate 12, the depending on the characteristics of the operation switching element T S or driving element T D can will be composed of each of one or more thin film transistor combination.

  At this time, the substrate 12 uses a transparent insulating substrate, and examples of the material thereof include glass and plastic.

  As shown in the figure, a gate wiring 32 configured in one direction with a predetermined distance from each other is formed on the substrate 12, and a data wiring 34 intersecting the gate wiring 32 and the insulating film therebetween.

  At the same time, power supply lines 35 are formed in one direction at positions separated in parallel to the data lines 34.

Wherein each thin film transistor including a gate electrode 36, 38 and the active layer 40 and the source electrode 46 and drain electrode 50, 52 is used as the switching element T S and the driving element T D.

In the configuration described above, the gate electrode 36 of the switching element T S is coupled to the gate wiring 32, the source electrode 46 is connected to the data line 34.

The drain electrode 50 of the switching element T S includes a gate electrode 38 of the driving element T D is connected through a first contact hole 54.

The source electrode 48 of the driving element T D is connected to the power supply line 36 through a second contact hole 56.

Further, the drain electrode 52 of the driving element T D is configured to contact the first electrode 16 configured in the pixel portion P.

At this time, the power supply wiring 35 and the first electrode 16, which is a polycrystalline silicon layer below the power supply wiring 35, overlap with an insulating film to form a storage capacitor CST .

  Hereinafter, a cross-sectional configuration of the organic electroluminescent device including the thin film transistor array configured as described above with reference to FIG. 3 will be described.

  3 is a cross-sectional view of the organic electroluminescent device cut along III-III in FIG. (It is a drawing showing only a cross section of the driving element and the light emitting portion.)

As shown, the organic electroluminescent device includes a gate electrode 38, and the thin film transistor T D is a drive device including an active layer 42 and the source electrode 56 and drain electrode 52 is formed, insulated on the top of the drive element T D a first electrode 16 in contact with the drain electrode 52 of the driving element T D across the membrane 57, the light-emitting layer 18 that emits light of a color specified on the first electrode 16, the upper portion of the light-emitting layer 18 A second electrode 20 is configured. The light emitting layer 18, the first electrode 16 and the second electrode 20 constitute an organic electroluminescent diode DEL .

Wherein the driving element T D is constituted by the storage capacitor C ST in parallel, the source electrode 56 is constructed in contact with the second capacitor electrode (source wiring) 35 of the storage capacitor C ST, the lower portion of the second capacitor electrode 35 The first capacitor electrode 15 is formed.

The driving element T D and the storage capacitor C ST and the organic light emitting layer 18 and the second electrode 20 on the entire surface of the substrate made of the is configured.

  The overall configuration of the organic electroluminescent device configured as described above can be understood with reference to FIG.

  FIG. 4 is an equivalent circuit diagram of an organic electroluminescence device according to the related art.

  As shown in the figure, the data wiring 34 and the power supply wiring 35 that are spaced apart and parallel to each other are formed on the entire surface of the substrate 12, and the data wiring 34 that intersects the data wiring 34 and the power supply wiring 35 perpendicularly. Is a gate wiring 32 that defines the pixel region P.

Switching element T S and the driving element T D and the capacitor C ST is composed of the above-described configuration in the pixel region P.

  In the configuration described above, the configuration of the power supply wiring 35 has a disadvantage that the area of the light emitting portion is reduced. If the area of the light emitting portion is reduced, the current density required to show the same luminance is increased, and the life of the organic electroluminescent device is greatly affected.

  In addition, when the light is emitted from the back surface, a minimum of three or more wires cause a decrease in the aperture ratio and require a larger amount of current to obtain sufficient luminance, which may be a more serious problem.

  Then, as the number of wirings increases, the possibility that the line defect will increase increases, which acts as a factor that lowers the yield.

  The present invention has been proposed for the purpose of solving the above-described problems, and the organic electroluminescent device according to the present invention simultaneously connects the power wiring to adjacent pixels.

  Such a configuration can reduce the number of the power supply lines to ½, so that the aperture ratio is improved compared to the conventional case and the current level does not need to be increased, thereby extending the life of the element. Can do.

  In addition, since the wiring is reduced, the probability of occurrence of a line defect can be reduced.

  In order to achieve the above-mentioned object, an organic electroluminescent device according to the present invention comprises: a substrate; a plurality of gate wirings on the substrate; and a plurality of gates on the substrate intersecting with the gate wirings. A plurality of switching elements and driving elements formed on the substrate and connected to each other; and at least two driving elements formed on the substrate in parallel with the plurality of data lines. Power supply wiring that is electrically connected to the power supply.

  Furthermore, an organic electroluminescent device according to the present invention includes: a first substrate; a second substrate facing and spaced apart from the first substrate; a plurality of gate wirings formed on an inner surface of the first substrate; A plurality of data lines formed on an inner surface of the first substrate and intersecting with the plurality of gate lines; a plurality of switching elements formed on the first substrate and connected to each other; A power supply line electrically connected to at least two of the plurality of drive elements in parallel with the plurality of data lines; a plurality of connection electrodes connected to the plurality of drive elements; A plurality of first electrodes formed on an inner surface of the second substrate; an organic electroluminescent layer formed on the plurality of first electrodes; and formed on the organic electroluminescent layer; Each one of the plurality of connecting electrodes and A plurality of second electrodes in contact are included.

  Furthermore, the method of manufacturing an organic electroluminescent device according to the present invention includes forming a plurality of switching active layers, a plurality of driving active layers, and a plurality of active patterns including polysilicon on a first substrate; Forming a plurality of switching active layers, a plurality of driving active layers and a plurality of active patterns on a plurality of active patterns; and a plurality of layers extending on the plurality of switching active layers on the first insulating films. Forming a plurality of driving gate electrodes extending on the plurality of driving active layers on the first insulating film; and a plurality of switching active layers, a plurality of switching active layers, The driving active layer and a plurality of active patterns are doped with impurities to switch the plurality of switching active layers. Forming a switching source region and a switching drain region in each of the active layers, and forming a driving source region and a driving drain region in each of the plurality of driving active layers; Forming a second insulating film on the driving gate electrodes; forming a power wiring on the second insulating film; forming a third insulating film on the power wiring; Forming a plurality of switching source electrodes in contact with the switching source region on the insulating film; forming a plurality of switching drain electrodes in contact with the switching drain region on the third insulating film; Forming a plurality of driving source electrodes in contact with the driving source region on the third insulating film; and on the third insulating film. Of which at least two contacts with the serial driving drain region includes forming a plurality of driving drain electrode connected to the power supply wiring.

  The organic electroluminescent device according to the present invention can obtain a result that the number of power supply lines is reduced to ½ compared to the existing one by forming one power supply line for pixels adjacent to each other.

  Therefore, not only the aperture ratio is greatly improved, but also the line yield can be prevented and the material cost can be saved, thereby improving the production yield.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

--First Example--
The present invention is characterized in that the power supply wiring is configured such that the source electrodes of the driving elements formed in adjacent pixels are simultaneously connected to one power supply wiring.

  FIG. 5 is an equivalent circuit diagram of the organic electroluminescent device according to the present invention.

  As shown in the drawing, a power supply wiring 112 and a data wiring 111 that are spaced apart from each other by a predetermined distance are formed, and a gate wiring 101 that defines a pixel region P that intersects with the data wiring 111 is formed.

Switching element T S and the driving element T D and the storage capacitor C ST and organic light emitting diode D EL is configured to place in the configuration described in FIG. 2, which is connected to the data line 111 in the pixel region P.

In the configuration described above, the power supply wiring 112 is configured to be connected simultaneously with the adjacent driving elements T D1 and T D2 configured in the pixel regions P adjacent to each other in parallel.

  In such a configuration, the number of the power supply wirings 112 can be reduced to ½ to further ensure the aperture ratio, and the material cost can be reduced to improve the productivity.

  Hereinafter, the configuration of the thin film transistor array part of the organic electroluminescence device according to the present invention having the equivalent circuit configuration as described above with reference to FIG. 6 will be described in detail.

  FIG. 6 is a plan view schematically showing a part of a thin film transistor array part included in the organic electroluminescent device according to the present invention.

  As shown in the figure, a gate line 101 is formed in one direction on the substrate 100, and first and second data lines 111 and 111 'and a power line 112 intersecting the gate line 101 perpendicularly are formed. The first and second data lines 111 and 111 'and the power line 112 are spaced apart from each other in parallel.

Regions where the gate wiring 101 and the first and second data wirings 111 and 111 'intersect are referred to as first and second pixel regions P1 and P2, respectively. The pixel regions P1 and P2 include first and second switching elements T S1 , T S2 , first and second driving elements T D1 , T D2 and first and second storage capacitors C ST1 , C ST2 are configured.

The first and second storage capacitors C ST1 and C ST2 commonly use the power line 112 as the first capacitor electrode, and use the first and second active patterns 105 and 105 ′ below the second capacitor electrode as the second capacitor electrode.

The first switching element T S1 includes a switching active layer 103, a switching gate electrode 107, a switching source electrode 117, and a switching drain electrode 119. The first driving element T D1 includes a driving active layer 103, a driving gate electrode 108, and a driving gate electrode 108. A source electrode 116 and a drive drain electrode 118 are included. The switching drain electrode 119 is configured to be in electrical contact with the driving gate electrode 108.

The switching source electrode 117 is connected to the data line 111 to receive a video signal, and the driving drain electrode 118 is connected to the first electrode 122 of the organic light emitting diode (not shown). The source electrode 116 is connected to the power supply wiring 112. The configurations of the second switching element T S2 and the second driving element T D2 are the same as the configurations of the first switching element T S1 and the first driving element T D1 , respectively.

In the above-described configuration, the power line 112 is configured to be simultaneously connected to the adjacent first and second driving source electrodes 116 and 116 ′ configured in the adjacent first and second pixels P 1 and P 2. Accordingly, the first and second driving elements T D1 and T D2 are disposed in the first and second pixel regions P1 and P2 so as to be symmetric with respect to the power supply wiring 112. Further, adjacent first and second active patterns 105 and 105 'made of polycrystalline silicon are extended from the first and second switching active layers 103 and 103' in the adjacent first and second pixel regions P1 and P2, respectively.

  Such a configuration has an advantage of reducing the number of the power supply wires 112 to ½ and improving the aperture ratio as compared with the prior art and preventing a line defect. In particular, since the aperture ratio of the back-light-emitting organic electroluminescent element is generally limited, the improvement of the aperture ratio is more effective in the back-light-emitting organic electroluminescent element.

  Hereinafter, a cross-sectional structure and a manufacturing method of the organic electroluminescent device according to the present invention will be described with reference to FIGS. 7A to 7E. (This will be described with reference to the cross-sections of the driving elements configured in adjacent pixels and the light emitting units connected thereto.)

  7A to 7E are cross-sectional views taken along line VII-VII in FIG.

  As shown in FIG. 7A, a buffer layer (first insulating layer: 102) made of an insulating material is formed on the substrate 100.

  The substrate 100 on which the buffer layer 102 is formed defines adjacent first and second pixel regions P1 and P2 and adjacent first and second capacitor regions C1 and C2. Each pixel region P1, P2 includes a switching region (not shown) and a drive region D.

  Next, a first switching active layer (not shown) made of polycrystalline silicon, a first driving active layer 104 and a first active pattern 105 are placed on the switching region, and on the buffer layer 102 in the driving region D and the first capacitor region C1. Each form. Similarly, a second switching active layer (not shown) made of polycrystalline silicon, a second driving active layer 104 ′ and a second active pattern 105 ′ are switched to the switching region, and the buffer region 102 in the driving region D and the second capacitor region C 2. Each is formed on the top. The first and second active patterns 105 and 105 'of the adjacent first and second capacitor regions C1 and C2 are extended from the first and second switching active layers of the switching regions of the adjacent first and second pixel regions P1 and P2. .

  Subsequently, an insulating material is deposited on the entire surface of the substrate 100 on which the active pattern is formed to form a gate insulating film 106 as a second insulating film, and then the first and second switching active layers (not shown). First and second switching gate electrodes (not shown) and first and second driving gate electrodes 108 and 108 'are formed on the second insulating film 106 on the first and second driving active layers 104 and 104', respectively.

The gate insulating layer 106 is formed by depositing one selected from an inorganic insulating material group including silicon nitride (SiNx) and silicon oxide (SiO 2 ), and the first and second switching gate electrodes (not shown). 1) and the first and second drive gate electrodes 108 and 108 'are conductive metal groups including aluminum (Al), aluminum alloy, copper (Cu), tungsten (W), tantalum (Ta), and molybdenum (Mo). Form with one selected from among them.

  The gate insulating layer 106 may be left as it is after being deposited, and is etched into the same shape as the first and second switching gate electrodes (not shown) and the first and second driving gate electrodes 108 and 108 '. You can also.

  Next, the first and second switching active layers, the first and second driving active layers 104 and 104 ', and the first and second active patterns 105 and 105' are doped. Since the first driving gate electrode 108 is used as a doping mask during impurity doping, the first driving active layer 104 after doping is divided into a first driving channel region 104a, a first driving source electrode 104b, and a first driving drain electrode 104c. Become so. Similarly, after the doping, the second driving active layer 104 ′ is divided into a second driving channel region 104a ′, a second driving source electrode 104b ′, and a second driving drain electrode 104c ′. Although not shown in FIG. 7A, the first and second switching active layers are also divided into first and second driving channel regions, first and second driving source electrodes, and first and second driving drain electrodes, respectively.

Next, an interlayer insulating film (third insulating film) selected from an inorganic insulating material group including silicon nitride (SiNx) and silicon oxide (SiO 2 ) on the entire surface of the substrate 100 on which the gate electrode 108 is formed. : 110).

  A power supply line 112 configured in one direction is continuously formed between the first and second pixel regions P1 and P2 adjacent to each other in the upper region of the interlayer insulating film 110.

  The power supply wiring 112 is selected from the conductive metal group including aluminum (Al), aluminum alloy, copper (Cu), tungsten (W), tantalum (Ta), and molybdenum (Mo) as described above. Form with one.

  As shown in FIG. 7B, a fourth insulating film 113 is formed on the entire surface of the substrate 100 on which the power line 112 is formed and patterned to form first and second switching source contact holes (not shown), first and second Two switching drain contact holes (not shown), first and second driving source contact holes 114a and 114a ', first and second driving drain contact holes 114b and 114b', and first and second power source contact holes 115 and 115 'are formed. To do. The first driving source contact hole 114a and the first driving drain contact hole 114b expose the first driving source region 104b and the first driving drain region 104c, respectively. Similarly, the first switching source contact hole and the first switching drain contact hole are The first switching source region and the first switching drain region are exposed. The first and second power contact holes 115 and 115 ′ exposing the power wiring 112 are disposed in the driving regions D of the adjacent first and second pixel regions P1 and P2, respectively.

  Next, as shown in FIG. 7C, the aluminum (Al), aluminum alloy, copper (Cu), tungsten (W), and tantalum (Ta) as described above are formed on the entire surface of the substrate 100 on which the fourth insulating film 113 is formed. ) And molybdenum (Mo) conductive metal is deposited and patterned to form first and second switching source electrodes (not shown), first and second switching drain electrodes (not shown), first and second. Driving source electrodes 116 and 116 'and first and second driving drain electrodes 118 and 118' are formed. The first driving source electrode 116 and the first driving drain electrode 118 are connected to the first driving source region 104b and the first driving drain region 104c, respectively. Although not shown in FIG. 7C, similarly, the first switching source electrode and the first switching drain electrode are connected to the first switching source region and the first switching drain region, respectively.

  At this time, the first and second driving source electrodes 116 and 116 'are connected to the same power line 112 through the first and second power contact holes 115 and 115', respectively.

In such a configuration, the same signal is applied to the first and second driving elements T D1 and T D2 configured in the first and second pixel regions P1 and P2 adjacent to each other using one power supply wiring 112. It is a configuration that can. The first and second driving elements T D1 and T D2 can be disposed symmetrically with respect to the power line 112, and the first and second driving gate electrodes 108 and 108 ′ are first and second switching drain electrodes (not shown). ) Respectively.

  Next, as shown in FIG. 7D, a fifth insulating layer 120 is formed on the entire surface of the substrate 100 on which the source and drain electrodes 116 and 118 are formed, and patterned to form the first and second driving drain electrodes 118. , 118 'is advanced.

  Subsequently, first and second lower electrodes 122 and 122 ′ are formed on the fifth insulating layer 120. The first and second lower electrodes 122 and 122 'are connected to first and second driving drain electrodes 118 and 118', respectively. The first and second lower electrodes 122 and 122 'extend to the first and second pixel regions P1 and P2, respectively. The first and second lower electrodes 122 and 122 'form an anode, which is a hole injection electrode, and mainly have a work function such as ITO (indium-tin-oxide) or IZO (indium-zinc-oxide). A transparent material having a high (work function) is included.

  As shown in FIG. 7E, a sixth insulating layer 124 is formed on the entire surface of the substrate 100 on which the first and second lower electrodes 122 and 122 'are formed, and then patterned to form the first and second lower electrodes 122, The process of exposing 122 'is advanced.

  Continuously, first and second light emitting layers 126 and 126 ′ having a single layer or multiple layers are formed on the first and second lower electrodes 122 and 122 ′, respectively.

  Next, in order to proceed with a process of forming an upper electrode 128 serving as a cathode as an electron injection electrode on the entire surface of the substrate on the first and second light emitting layers 126 and 126 ′, the upper electrode 128 includes calcium (Ca), It is formed of one selected from a metal group including aluminum (Al) and magnesium (Mg).

  The organic electroluminescent device according to the present invention can be manufactured through the processes as described above.

  The second embodiment is a modification of the present invention, and proposes an organic electroluminescent device in which the thin film transistor array portion and the light emitting portion are separately formed and bonded together.

--- Second Example-
The second embodiment of the present invention is characterized in that an organic electroluminescent device is manufactured by separately forming a thin film transistor array portion and a light emitting portion formed as in the first embodiment and bonding them together. .

  FIG. 8 is a cross-sectional view schematically illustrating a configuration of an organic electroluminescent device according to a second embodiment of the present invention.

  The drawing illustrated in FIG. 8 illustrates a light emitting unit corresponding to a part of the organic electroluminescent element.

  As shown in the drawing, the first substrate 100 on which the thin film transistor T array portion according to the present invention described in the first embodiment is formed, the first electrode 202 as the hole injection electrode, the light emitting layer 208, and the second as the electron injection electrode. An organic electroluminescent device is manufactured by bonding the second substrate 200 on which the electrode 210 is formed through a sealant 300.

  At this time, the connection pattern 140 connected to the thin film transistor T comes into contact with the second electrode 210 during the process of bonding the first substrate 100 and the second substrate 200 together.

  In the above-described configuration, the thin film transistor array portion is the same as the above-described steps of FIGS.

  The difference from the process of the first embodiment is that the process of forming the connection pattern 140 in contact with the drain electrode of the driving element is advanced after the source and drain electrodes, which are the processes of FIG. 7C, are formed. is there.

  Hereinafter, a process of forming the light emitting unit according to the second embodiment of the present invention will be described with reference to FIGS. 9A to 9C.

  9A to 9C are views illustrating a configuration of an organic electroluminescent device according to a second embodiment of the present invention.

  As shown in FIG. 9A, the first electrode 202 is formed on the transparent insulating substrate 200.

  The first electrode 202 constitutes a cathode which is an electrode for injecting holes into an organic light emitting layer (not shown), and includes aluminum (Al), calcium (Ca) and magnesium (Mg). It can be formed of one selected from the above or a double metal layer of lithium fluorine / aluminum (LiF / Al).

  Next, as shown in FIG. 9B, red (R), green (G), and blue (B) light is emitted on the first electrode 202 so as to correspond to the pixel regions P. An organic light emitting layer 204 is formed.

  At this time, the organic light emitting layer 204 may be formed of a single layer or multiple layers. When the organic film is formed of multiple layers, a hole transport layer 204 b and an electron are formed on the main light emitting layer 204 a. The transport layer (Electron Transporting Layer: ETL) 204c is further configured.

  Next, as shown in FIG. 9C, a process of forming a second electrode 206 having an anode function of injecting holes into the light emitting layer 204 is performed.

  The second electrode 206 is disposed corresponding to each pixel region P and is configured to be independent of each other.

  The material forming the second electrode 206 may be a transparent material having a high work function such as ITO or IZO.

  The organic light emitting device according to the second embodiment of the present invention can be manufactured by attaching the light emitting part formed as described above and the thin film transistor array part in which the connection electrode has been previously formed.

It is sectional drawing which showed schematically the organic electroluminescent element of related technology. It is the top view which showed the organic electroluminescent element of related technology roughly. It is sectional drawing cut | disconnected along III-III of FIG. 6 is a diagram illustrating an equivalent circuit of an organic electroluminescence device according to related art. 1 is an equivalent circuit of an organic electroluminescent device according to the present invention. 1 is a plan view showing an organic electroluminescent device according to the present invention. FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6 illustrating a method for manufacturing an organic electroluminescent device according to the present invention. FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6 illustrating a method for manufacturing an organic electroluminescent device according to the present invention. FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6 illustrating a method for manufacturing an organic electroluminescent device according to the present invention. FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6 illustrating a method for manufacturing an organic electroluminescent device according to the present invention. FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6 illustrating a method for manufacturing an organic electroluminescent device according to the present invention. FIG. 6 is a cross-sectional view of an organic electroluminescent device according to another embodiment of the present invention. FIG. 6 is a process cross-sectional view illustrating a manufacturing process of an organic light emitting diode according to another embodiment of the present invention. FIG. 6 is a process cross-sectional view illustrating a manufacturing process of an organic light emitting diode according to another embodiment of the present invention. FIG. 6 is a process cross-sectional view illustrating a manufacturing process of an organic light emitting diode according to another embodiment of the present invention.

Explanation of symbols

101: Gate wiring 111: Data wiring 112: Power supply wiring

Claims (29)

  1. An organic electroluminescent device,
    A substrate;
    A plurality of gate wirings on the substrate;
    A plurality of data lines on the substrate, each intersecting the plurality of gate lines;
    A plurality of switching elements and driving elements formed on the substrate and connected to each other, each of the plurality of switching elements being one active layer, a gate insulating layer on the active layer, and the gate insulating layer; An upper switching gate electrode;
    A power line formed on the substrate and parallel to the plurality of data lines,
    The power supply wiring is electrically connected to a plurality of active patterns extending from at least two of the plurality of active layers under the power supply wiring and to at least two of the plurality of driving elements. The plurality of active patterns overlap with the power supply wiring,
    The plurality of active patterns and the power supply wiring are used as a first capacitor electrode and a second capacitor electrode, respectively, thereby forming an organic electroluminescence device forming one storage capacitor.
  2.   2. The organic electroluminescent device according to claim 1, wherein each of the plurality of driving elements includes a thin film transistor including a gate electrode, an active layer, a source electrode, and a drain electrode.
  3.   The organic electroluminescence device according to claim 2, wherein the power line is connected to the source electrodes of at least two of the plurality of driving devices.
  4. The organic electroluminescent device according to claim 2,
    A plurality of first drive electrodes each connected to one of the plurality of drive elements;
    An organic electroluminescent layer located on the plurality of first drive electrodes;
    A plurality of second electrodes located on the organic electroluminescent layer;
    An organic electroluminescent device further comprising:
  5.   The organic electroluminescent device of claim 4, wherein the plurality of first electrodes are connected to drain electrodes of the plurality of driving devices.
  6.   Each of the plurality of first electrodes is an anode for injecting holes into the organic electroluminescent layer, and each of the plurality of second electrodes is a cathode for injecting electrons into the organic electroluminescent layer. The organic electroluminescent element according to claim 4.
  7.   The organic electroluminescent device of claim 6, wherein each of the plurality of first electrodes includes at least one of indium-tin-oxide and indium-zinc-oxide.
  8.   3. The organic electroluminescence device according to claim 2, wherein each of the plurality of second electrodes includes at least one of aluminum (Al), calcium (Ca), and magnesium (Mg).
  9.   The organic electroluminescence device according to claim 4, wherein the plurality of switching devices are connected to the plurality of gate wires and data wires.
  10.   The organic electroluminescent device of claim 9, wherein the plurality of driving elements are connected to the plurality of switching elements.
  11.   The organic electroluminescent device of claim 1, further comprising a plurality of active patterns extending from at least two of the plurality of switching devices.
  12.   The organic electroluminescence device according to claim 11, wherein the power wiring is overlapped with the plurality of active patterns.
  13.   The organic electroluminescence device according to claim 1, wherein at least two of the plurality of driving devices are arranged symmetrically with respect to the power supply wiring.
  14. An organic electroluminescent device,
    A first substrate;
    A second substrate facing and spaced apart from the first substrate;
    A plurality of gate wirings formed on the inner surface of the first substrate;
    A plurality of data lines formed on an inner surface of the first substrate, each intersecting the plurality of gate lines;
    A plurality of switching elements and driving elements formed on the first substrate and connected to each other, each of the plurality of switching elements including an active layer and a gate insulating layer on the active layer; A switching gate electrode on the gate insulating layer;
    A power supply line disposed in parallel to the plurality of data lines on the first substrate and electrically connected to at least two of the plurality of drive elements;
    A plurality of connection electrodes connected to the plurality of driving elements;
    A plurality of first electrodes formed on an inner surface of the second substrate;
    An organic electroluminescent layer formed on the plurality of first electrodes;
    A plurality of second electrodes formed on the organic electroluminescent layer, each in contact with one of the plurality of connection electrodes;
    The power supply wiring is electrically connected to a plurality of active patterns extending from at least two of the plurality of active layers located under the power supply wiring, and the plurality of active patterns are connected to the power supply wiring. Are duplicates,
    The active pattern and the power supply wiring are used as a first capacitor electrode and a second capacitor electrode, respectively, thereby forming an organic electroluminescence device forming one storage capacitor.
  15.   15. The organic electroluminescent device according to claim 14, wherein each of the plurality of driving elements includes a thin film transistor including a gate electrode, an active layer, a source electrode, and a drain electrode.
  16.   The organic electroluminescent device of claim 15, wherein the power line is connected to the source electrodes of at least two of the plurality of driving elements.
  17.   The organic electroluminescence device of claim 15, wherein the plurality of connection electrodes are connected to drain electrodes of the plurality of driving devices.
  18.   Each of the plurality of first electrodes is a cathode for injecting electrons into the organic electroluminescent layer, and each of the plurality of second electrodes is an anode for injecting holes into the organic electroluminescent layer. The organic electroluminescent element according to claim 14.
  19.   The organic electroluminescence device according to claim 18, wherein each of the plurality of first electrodes includes at least one of aluminum (Al), calcium (Ca), and magnesium (Mg).
  20.   The organic electroluminescent device of claim 18, wherein each of the plurality of second electrodes includes at least one of indium-tin-oxide and indium-zinc-oxide.
  21.   The organic electroluminescent device of claim 14, wherein the plurality of switching devices are connected to the plurality of gate lines and data lines.
  22.   The organic electroluminescent device of claim 14, further comprising a plurality of active patterns extending from at least two of the plurality of switching devices.
  23.   The organic electroluminescent device according to claim 22, wherein the power supply line is overlapped with the plurality of active patterns.
  24.   The organic electroluminescence device according to claim 14, wherein at least two of the plurality of driving devices are arranged symmetrically with respect to the power supply wiring.
  25. An organic electroluminescent device manufacturing method comprising:
    Forming a plurality of switching active layers comprising polysilicon, a plurality of driving active layers and a plurality of active patterns on a first substrate;
    Forming a first insulating layer on the plurality of switching active layers, the plurality of driving active layers, and the plurality of active patterns;
    Forming a plurality of switching gate electrodes extending on the plurality of switching active layers on the first insulating film;
    Forming a plurality of driving gate electrodes extending on the plurality of driving active layers on the first insulating film;
    The plurality of switching active layers, the plurality of driving active layers, and the plurality of active patterns are doped with impurities to form a switching source region and a switching drain region in each of the plurality of switching active layers. Forming a drive source region and a drive drain region in each of the drive active layers;
    Forming a second insulating layer on the plurality of switching gate electrodes and the plurality of driving gate electrodes;
    Forming a power wiring on the second insulating film;
    Forming a third insulating film on the power line;
    Forming a plurality of switching source electrodes in contact with the switching source region on the third insulating layer;
    Forming a plurality of switching drain electrodes in contact with the switching drain region on the third insulating layer;
    Forming a plurality of driving source electrodes in contact with the driving source region on the third insulating layer;
    Forming a plurality of driving drain electrodes on the third insulating layer in contact with the driving drain region and at least two of which are connected to the power line; Method.
  26. Forming a plurality of switching source electrodes, a plurality of switching drain electrodes, a plurality of driving source electrodes and a fourth insulating film on the plurality of driving drain electrodes;
    Forming a plurality of first electrodes in contact with the plurality of driving drain electrodes on the fourth insulating layer;
    Forming an organic electroluminescent layer on the plurality of first electrodes;
    The method according to claim 25, further comprising forming a plurality of second electrodes on the organic electroluminescent layer.
  27.   26. The method of claim 25, wherein each of the plurality of active patterns extends from the plurality of driving active layers.
  28.   26. The method of claim 25, wherein the power line overlaps at least two of the plurality of active patterns.
  29. Forming a plurality of switching source electrodes, a plurality of switching drain electrodes, a plurality of driving source electrodes and a fourth insulating film on the plurality of driving drain electrodes;
    Forming a plurality of connection electrodes in contact with the plurality of driving drain electrodes on the fourth insulating layer;
    Forming a plurality of first electrodes on the second substrate;
    Forming an organic electroluminescent layer on the plurality of first electrodes;
    Forming a plurality of second electrodes on the organic electroluminescent layer;
    The method as claimed in claim 25, further comprising bonding the first and second substrates so that the plurality of connection electrodes and the plurality of second electrodes are in contact with each other. Method.
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