JP2009012948A - 搬送システム、搬送方法および搬送車 - Google Patents
搬送システム、搬送方法および搬送車 Download PDFInfo
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41815—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
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- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31002—Computer controlled agv conveys workpieces between buffer and cell
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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Abstract
【解決手段】無人搬送車1と処理装置2との間で荷物を移載する搬送システムであって、無人搬送車1は、搭載している荷物を処理装置2に差し出す、又は、処理装置2から荷物を取り出すことによって荷物を移載する移載機構部31と、処理装置2に対して移載許可を要求する移載要求信号を発し、当該要求に対する許可を示す移載許可信号を取得する搬送車通信部33と、搬送車通信部33が移載許可信号を取得する前に、移載機構部31が処理装置2に侵入しない範囲で移載動作を行うように、移載機構部31を制御する搬送車制御部15とを備える。
【選択図】図4
Description
2 処理装置
3、10 光通信
4 ウェハカセット
5 光データ通信装置
6 搬送車コントローラ
7 端末装置
8 LAN
9 搬送用レール
11 スカラーアーム
12 シャッター
13 昇降部
14 旋回テーブル
15 搬送車制御部
21 処理装置ステーション
31 移載機構部
33 搬送車通信部
34 載置部
35 装置制御部
36 装置通信部
37 プロセス部
111 第1アーム
112 第2アーム
113 ハンド
114 物品支持テーブル
141 距離センサ
211 ターゲット
Claims (6)
- 搬送車と装置との間で荷物を移載する搬送システムであって、
前記搬送車及び前記装置の一方は、
搭載している荷物を前記搬送車及び前記装置の他方である相手側に差し出す、又は、相手側から荷物を取り出すことによって荷物を移載する移載機構部と、
前記相手側に対して移載許可を要求する移載要求信号を発し、当該要求に対する許可を示す移載許可信号を取得する通信手段と、
前記通信手段が前記移載許可信号を取得する前に、前記移載機構部が前記相手側に侵入しない範囲で移載動作を行うように、前記移載機構部を制御する制御手段と
を備えることを特徴とする搬送システム。 - 前記移載機構部は、搭載している荷物を覆うシャッターを備え、
前記制御手段は、前記相手側に侵入しない範囲での移載動作として、前記シャッターを開かせる制御をする
ことを特徴とする請求項1記載の搬送システム。 - 前記通信手段はさらに、前記相手側に対して移載の終了許可を要求する終了要求信号を発し、当該要求に対する許可を示す終了許可信号を取得し、
前記制御手段はさらに、前記移載機構部が前記相手側から退出したときに、前記通信手段が前記終了要求信号を発するように、前記通信手段を制御する
ことを特徴とする請求項1記載の搬送システム。 - 搬送車と装置との間で荷物を移載する搬送方法であって、
前記搬送車と前記装置との間で、一方の装置から他方の装置に対して、移載許可を要求し、前記他方の装置から前記一方の装置に対して、当該要求に対する許可を提示する通信を行う通信ステップと、
前記一方の装置が、搭載している荷物を、前記他方の装置に差し出す、又は、前記一方の装置が前記他方の装置から荷物を取り出すことによって荷物を移載する移載ステップとを含み、
前記移載ステップは、前記通信ステップにおいて前記許可が提示される前に、開始される
ことを特徴とする搬送方法。 - 前記移載ステップでは、前記通信ステップにおいて前記許可が提示される前に、前記一方の装置が前記他方の装置に侵入するまでの移載動作が行われる
ことを特徴とする請求項4記載の搬送方法。 - 相手装置との間で荷物を移載する搬送車であって、
搭載している荷物を前記相手装置に差し出す、又は、相手装置から荷物を取り出すことによって荷物を移載する移載機構部と、
前記相手装置に対して移載許可を要求する移載要求信号を発し、当該要求に対する許可を示す移載許可信号を前記相手装置から取得する通信手段と、
前記通信手段が前記移載許可信号を取得する前に、前記移載機構部が前記相手装置に侵入しない範囲で移載動作を行うように、前記移載機構部を制御する制御手段と
を備えることを特徴とする搬送車。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007177713A JP4321631B2 (ja) | 2007-07-05 | 2007-07-05 | 搬送システム、搬送方法および搬送車 |
TW097103341A TW200902404A (en) | 2007-07-05 | 2008-01-29 | Transportation system, transportation method and transportation cart |
KR1020080014424A KR101202268B1 (ko) | 2007-07-05 | 2008-02-18 | 반송 시스템, 반송 방법 및 반송차 |
CNA2008101268286A CN101337353A (zh) | 2007-07-05 | 2008-06-24 | 搬送系统、搬送方法以及搬送车 |
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JP2007177713A JP4321631B2 (ja) | 2007-07-05 | 2007-07-05 | 搬送システム、搬送方法および搬送車 |
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JP2009012948A true JP2009012948A (ja) | 2009-01-22 |
JP4321631B2 JP4321631B2 (ja) | 2009-08-26 |
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JP (1) | JP4321631B2 (ja) |
KR (1) | KR101202268B1 (ja) |
CN (1) | CN101337353A (ja) |
TW (1) | TW200902404A (ja) |
Cited By (9)
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JP2012153469A (ja) * | 2011-01-25 | 2012-08-16 | Murata Machinery Ltd | 搬送車システム |
CN108838732A (zh) * | 2018-09-06 | 2018-11-20 | 珠海格力智能装备有限公司 | 上下料处理方法及装置 |
JP2019055472A (ja) * | 2017-09-22 | 2019-04-11 | 株式会社デンソーウェーブ | 移動ロボット |
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JP2019062614A (ja) * | 2017-09-25 | 2019-04-18 | キヤノン株式会社 | 搬送システム及び加工システム |
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JP2000293232A (ja) * | 1999-04-02 | 2000-10-20 | Hitachi Kiden Kogyo Ltd | 自動搬送システム |
JP2000299363A (ja) * | 1999-04-12 | 2000-10-24 | Murata Mach Ltd | 光データ伝送システム |
JP2001341640A (ja) * | 2000-06-05 | 2001-12-11 | Murata Mach Ltd | 無人搬送車システム |
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-
2007
- 2007-07-05 JP JP2007177713A patent/JP4321631B2/ja active Active
-
2008
- 2008-01-29 TW TW097103341A patent/TW200902404A/zh unknown
- 2008-02-18 KR KR1020080014424A patent/KR101202268B1/ko not_active IP Right Cessation
- 2008-06-24 CN CNA2008101268286A patent/CN101337353A/zh active Pending
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JP7410183B2 (ja) | 2020-01-14 | 2024-01-09 | 株式会社Fuji | 物品搬送システム |
RU203830U1 (ru) * | 2020-06-22 | 2021-04-22 | Общество с ограниченной ответственностью Научно-производственная организация "Рубикон-Инновация" (ООО НПО "Рубикон-Инновация") | Передвижной манипулятор |
JP7537399B2 (ja) | 2021-09-13 | 2024-08-21 | 株式会社ダイフク | 物品移載装置 |
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KR20090004426A (ko) | 2009-01-12 |
KR101202268B1 (ko) | 2012-11-19 |
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JP4321631B2 (ja) | 2009-08-26 |
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