JP2008311424A - Hermetically-sealed terminal and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a hermetically-sealed terminal which can be favorably received in a receiving portion of a housing and can be manufactured while preventing the deformation of a cylindrical member, and to provide a manufacturing method of the hermetically-sealed terminal. <P>SOLUTION: The manufacturing method of the hermetically-sealed terminal comprises steps of forming a thin portion 4a by thinly processing the thickness of one end in the axial direction of a metal cylindrical member 4, and filling the inside of the cylindrical member 4 with an insulating filler member 10 and electrically conductive leads 12 extending through the filler member 10. The hermetically-sealed terminal 100 is obtained which comprises the metal cylindrical member 4 having a thick portion 4c and the thin portion 4a, the insulating filler member 10 with which the inside of the metal cylindrical member 4 is filled, and the electrically conductive leads 12 extending through the filler member 10 in the axial direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a hermetic seal terminal.

  A functional element that converts a physical quantity such as pressure, load, acceleration, or angular velocity into an electrical signal is often mounted on a hermetic seal terminal. The hermetic seal terminal includes a metal tubular member, an insulating filling member filled inside the tubular member, and a conductive lead extending through the filling member in the axial direction. . The functional element is mounted on one surface of the filling member and is electrically connected to the lead through, for example, wire bonding. For example, the hermetic seal terminal is accommodated in the accommodating portion of the housing. An electrical signal from the functional element is taken out of the housing through a lead. This type of hermetic seal terminal is disclosed in Patent Document 1.

JP 2001-41838 A

  In order to manufacture this kind of hermetic seal terminal, the tubular member is stretched in the axial direction and adjusted to a predetermined outer diameter, and then the stretched tubular member is divided into a plurality of desired members. A cylindrical member is produced. Next, the inside of the cylindrical member is filled with an insulating filling member and leads extending through the filling member to manufacture a hermetic seal terminal.

  In the stage before the filling member is filled inside the tubular member, the strength of the tubular member tends to be weak. In order to prevent the tubular member from being deformed during the manufacturing process, it is desirable to increase the strength by increasing the outer diameter of the tubular member and / or increasing the thickness of the tubular member. However, as described above, since the hermetic seal terminal is often used while being accommodated in the housing, the outer diameter of the cylindrical member must be designed in accordance with the inner diameter of the housing accommodating portion. Accordingly, the outer diameter of the cylindrical member is limited by the inner diameter of the housing accommodating portion, and the outer diameter of the cylindrical member cannot be increased. For this reason, in the conventional manufacturing method, the deformation of the tubular member is prevented by increasing the thickness of the tubular member.

However, when the thickness of the cylindrical member is increased, the area of the surface of the filling member filled inside the cylindrical member is reduced, and as a result, the area of the mounting surface for mounting the functional element is also reduced. When it is desired to reduce the size of the housing itself, the inner diameter of the housing accommodating portion and the outer diameter of the cylindrical member are also reduced. As a result, there is a situation in which a sufficient area for mounting the functional element cannot be secured. .
It is an object of the present invention to provide a hermetic seal terminal that can be satisfactorily accommodated in a housing portion of a housing and that can be manufactured while preventing deformation of a cylindrical member, and a method for manufacturing the hermetic seal terminal. It is said.

The technology disclosed in this specification is characterized in that the thickness of one end in the axial direction of the cylindrical member is processed to be thin, and a thin portion is provided at one end in the axial direction. The thin portion may be formed by cutting the inner wall surface of the cylindrical member, or may be formed by cutting the outer wall surface of the cylindrical member.
When the thin wall portion is formed by cutting the inner wall surface of the cylindrical member, a wide area can be secured inside the cylindrical member. For this reason, even when the outer diameter dimension of the cylindrical member is limited in accordance with the inner diameter dimension of the housing accommodating portion, a large area for mounting the functional element inside the cylindrical member can be secured. Further, since the thin portion is provided only at one end in the axial direction of the cylindrical member, the overall strength of the cylindrical member is maintained high (in addition, as long as the overall strength of the cylindrical member is maintained high, the axial direction Other thin portions may be provided in a portion other than the one end). For this reason, it can prevent that a cylindrical member deform | transforms during a manufacturing process.
When the thin wall portion is formed by cutting the outer wall surface of the cylindrical member, a local region having an outer diameter dimension corresponding to the inner diameter dimension of the housing housing portion can be formed at one end of the cylindrical member. For this reason, the hermetic seal terminal can be satisfactorily accommodated in the accommodating portion of the housing. Further, since the thin portion is provided only at one end in the axial direction of the cylindrical member, the overall strength of the cylindrical member is maintained high (in addition, as long as the overall strength of the cylindrical member is maintained high, the axial direction Other thin portions may be provided in a portion other than the one end). For this reason, it can prevent that a cylindrical member deform | transforms during a manufacturing process.
That is, both the technology for forming the thin-walled portion by cutting the inner wall surface of the cylindrical member and the technology for forming the thin-walled portion by cutting the outer wall surface of the cylindrical member can be satisfactorily accommodated in the housing accommodating portion. It is possible to provide a hermetic seal terminal that can be manufactured while preventing deformation of the cylindrical member.

A method of manufacturing a hermetic seal terminal for mounting a functional element disclosed in the present specification includes a step of forming a thin portion by processing a thickness of one end in the axial direction of a metallic cylindrical member. . The manufacturing method disclosed in the present specification further includes a step of filling the inside of the cylindrical member with an insulating filling member and a conductive lead extending through the filling member.
Since the thin portion is provided only at one axial end of the tubular member, the overall strength of the tubular member is maintained high. It is possible to prevent the tubular member from being deformed during the process of filling the tubular member with the filling member and the lead.

In the manufacturing method disclosed in the present specification, prior to the step of forming the thin-walled portion, a step of extending the cylindrical member in the axial direction to adjust to a predetermined outer diameter, and a plurality of the extended cylindrical members It is preferable that the method further includes a step of dividing into pieces.
In the technique disclosed in this specification, a thin portion is formed at one end of the cylindrical member in a later step. Therefore, in the step of extending the cylindrical member in the axial direction, the outer diameter of the cylindrical member is increased and It is possible to increase the thickness of the cylindrical member. As a result, the stretching process can be carried out while maintaining the strength of the tubular member, so that the deformation of the tubular member can be prevented.

A hermetic seal terminal for mounting a functional element disclosed in the present specification includes a metal cylindrical member having a thick part and a thin part, and an insulating filling member filled inside the cylindrical member, And a conductive lead extending in the axial direction through the filling member. The thin portion is provided at one end of the cylindrical member in the axial direction. The filling member has a mounting surface for mounting the functional element, and the mounting surface is disposed on the one end side in the axial direction.
The hermetic seal terminal can be satisfactorily accommodated in the housing accommodating portion, and has a form that can be manufactured while preventing deformation of the cylindrical member.

In the hermetic seal terminal disclosed in the present specification, the inner wall surface of the cylindrical member exists between the inner wall surface of the thick wall portion and the inner wall surface of the thin wall portion, and the inner wall surface of the thick wall portion and the inner wall surface of the thin wall portion. It is preferable that an intermediate surface non-parallel to both the wall surfaces is formed. In this case, the filling member is preferably in contact with the intermediate surface.
According to the above hermetic seal terminal, it is possible to prevent the filling member from coming off from the inside of the cylindrical member. The filling member can be stably held inside the cylindrical member.

In the hermetic seal terminal disclosed in the present specification, it is preferable that the thickness of the thin portion is thin at the one end in the axial direction and thick at the other end in the axial direction. In this case, it is preferable that the inner wall surface of the thin wall portion is inclined along the axial direction, and the filling member is in contact with the inner wall surface of the thin wall portion.
Even in the above-described hermetic seal terminal, the filling member can be prevented from coming off from the inside of the cylindrical member.

In the hermetic seal terminal disclosed in this specification, the filling member is preferably in contact with the top surface of the one end of the cylindrical member.
According to the above hermetic seal terminal, it is possible to secure a larger area of the filling member on which the functional element can be mounted.

In the hermetic seal terminal disclosed in the present specification, it is preferable that the lead has a portion that bends in a direction in which the distance from the inner wall surface of the cylindrical member increases.
According to said hermetic seal terminal, it can suppress that a lead and the inner wall face of a cylindrical member contact. It is possible to prevent the lead from being short-circuited.

In the hermetic seal terminal disclosed in this specification, the outer diameter of the cylindrical member may be constant in the axial direction.
The hermetic seal terminal described above represents a form in which a thin portion is formed by shaving the inner wall surface of the cylindrical member.

In the hermetic seal terminal disclosed in this specification, a screw may be provided on the outer peripheral surface of the thick portion.
When a screw is provided on the inner wall surface of the housing portion in which the hermetic seal terminal is housed, the hermetic seal terminal can be easily fixed to the housing portion of the housing.

  According to the technology disclosed in the present specification, it is possible to provide a hermetic seal terminal that can be satisfactorily accommodated in the accommodating portion of the housing and can be manufactured while preventing deformation of the cylindrical member. Moreover, the method of manufacturing the hermetic seal terminal can also be provided.

The main features of the examples are listed.
(Characteristic 1) The filling member is filled only in the thin part of the cylindrical member.
(Characteristic 2) The cylindrical member is filled with a glass filling member.
(Characteristic 3) The filling member is in contact with the entire top surface of the thin portion of the cylindrical member.

(First embodiment)
FIG. 1 schematically shows a longitudinal sectional view of the hermetic seal terminal 100. FIG. 2 shows an external view of the hermetic seal terminal 100 observed in the direction of arrow A in FIG.
The hermetic seal terminal 100 includes a metallic cylindrical member 4, an insulating filling member 10 filled inside the tubular member 4, and a conductive material extending in the axial direction through the filling member 10. A lead 12 is provided. The filling member 10 has a mounting surface 13 for mounting a pressure detection element (not shown). The functional element is electrically connected to the lead 12 via wire bonding.
The cylindrical member 4 has a cylindrical shape, and its material is Kovar. In place of Kovar, 42 alloy, 52 alloy, iron, SUS, or the like can also be used. The tubular member 4 has a thick part 4c and a thin part 4a. The inner diameter of the cylindrical member 4 changes between the thick part 4c and the thin part 4a. That is, an intermediate surface 4b that exists between the inner wall surface of the thick portion 4c and the inner wall surface of the thin portion 4a is formed on the inner wall surface of the cylindrical member 4. The intermediate surface 4b is not parallel to both the inner wall surface of the thick portion 4c and the inner wall surface of the thin portion 4a. In the present embodiment, the inner diameter of the cylindrical member 4 changes discontinuously between the thick portion 4c and the thin portion 4a, and the intermediate surface 4b is formed. The intermediate surface 4b is orthogonal to both the inner wall surface of the thick portion 4c and the inner wall surface of the thin portion 4a.
The outer diameter of the cylindrical member 4 is constant in the axial direction. Here, “the outer diameter is constant in the axial direction” means a state where an intermediate surface between the thick portion and the thin portion is not formed on the outer wall surface. For example, as shown in FIG. 3, even if the screw 2 is formed on the outer peripheral surface 6 of the cylindrical member 4, the height of the crest of the screw 2 (or the depth of the groove) with respect to the thickness of the thick portion 4a. The surface formed by the screw 2 should not be interpreted as an intermediate surface between the thick part and the thin part. Even if the screw 2 is provided on the outer peripheral surface 6, it can be evaluated that the outer diameter of the cylindrical member 4 is constant in the axial direction.

Glass (borosilicate glass) is used for the filling member 10. The filling member 10 has a mounting surface 13 for mounting a functional element at one end in the axial direction, and the mounting surface 13 is disposed on the thin portion 4 a side of the cylindrical member 4. The filling member 10 is in contact with the entire area of the top surface 8 at one end of the cylindrical member 4. The filling member 10 is filled only in the thin part 4a of the cylindrical member 4, and is in contact with the intermediate surface 4b between the thick part 4c and the thin part 4a.
As described above, in the hermetic seal terminal 100, the filling member 10 is in contact with the entire top surface 8 of the tubular member 4. Compared with the case where the filling member 10 is not in contact with the top surface 8 (in FIG. 2, the mounting surface 13 is formed only inside the thin portion 4 a), the mounting surface 13 existing on the top surface 8. A large surface area of the mounting surface 13 can be secured by the amount of the surface area. Even when the outer diameter of the cylindrical member 4 is limited, a large area can be secured for mounting the functional element.
The filling member 10 is in contact with the intermediate surface 4b between the inner wall surface of the thick portion 4c of the cylindrical member 4 and the inner wall surface of the thin portion 4a. Even if a force in the direction of arrow A is applied to the filling member 10, the filling member 10 can be prevented from coming off the tubular member 4. When the thin portion 4 a is provided at one end of the cylindrical member 4, the effects of increasing the surface area of the mounting surface 13 and preventing the filling member 10 from coming off can be obtained at the same time. As described above, in the present embodiment, the inner diameter of the cylindrical member 4 changes discontinuously between the thick portion 4c and the thin portion 4a, and the intermediate surface 4b is formed. Even if the intermediate surface 4b is formed by continuously changing the inner diameter of the cylindrical member 4 between the thick portion 4c and the thin portion 4a, the intermediate surface 4b is connected to the inner wall surface of the thick portion 4c. The filling member 10 can be prevented from coming off from the tubular member 4 as long as it is not parallel to both the inner wall surfaces of the thin portion 4a.
The filling member 10 may fill a part of the thick part 4c of the cylindrical member 4, but if only the thin part 4a is filled, the amount of the filling member 10 used can be reduced, and the hermetic seal terminal 100 is used. The manufacturing cost can be reduced. In addition, the strength of the thin portion 4a is improved by filling the thin portion 4a with the filling member 10.

In general, a functional element such as a pressure detection element is often mounted between a pair of leads 12. For this reason, if the distance between the pair of leads 12 is increased in order to increase the area on which the functional element is mounted, the distance between the leads 12 and the cylindrical member 4 may be shortened, resulting in an electrical short circuit. . When the lead 12 has a portion 12a that bends in the direction in which the distance from the inner wall surface 14 of the tubular member 4 increases as in the present embodiment, the lead 12 and the inner wall surface 14 of the tubular member 4 are provided. Can be prevented from contacting.
It should be noted that the portion where the lead 12 is covered with the insulating filling member 10 is less likely to be electrically short-circuited. Therefore, in order to prevent a short circuit, it is important to secure a sufficient distance between the lead 12 and the tubular member 4 in a portion where the lead 12 protrudes outside the filling member 10. If the bent portion 12a is located in the insulating filling member 10 as in this embodiment, the distance between the lead 12 and the tubular member 4 in the portion where the lead 12 protrudes outside the filling member 10. Can be secured sufficiently.
Further, when the bent portion 12a is disposed inside the thin portion 4a, it is possible to satisfactorily prevent the lead 12 and the inner wall surface 14 of the tubular member 4 from contacting each other even if the thick portion 4c is formed.

(Method for manufacturing hermetic seal terminal 100)
A method for manufacturing the hermetic seal terminal 100 will be described with reference to FIGS.
First, as shown in FIG. 4, the thick cylindrical member 3 is extended in the direction of arrow B to be adjusted to a predetermined outer diameter. Symbol 4 in the figure indicates a portion extended to a predetermined outer diameter, and the outer diameter is equal to the outer diameter of the cylindrical member 4 (see FIG. 1). Next, the cylindrical member 4 is divided into a plurality of pieces.
FIG. 5 is a cross-sectional view taken along the line VV in FIG. The cylindrical member 4 has a cylindrical shape, and the thickness of the cylindrical member 4 is equal to the thickness of the thick portion 4c (see FIG. 1) of the cylindrical member 4.
FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG. The thickness of the cylindrical member 4 is constant in the axial direction.

  Next, as shown in FIG. 7, the thickness of one end of the cylindrical member 4 in the axial direction is thinned to form the thin portion 4a. In this embodiment, the thin wall portion 4a is formed by cutting the inner wall surface of the cylindrical member 4. The part other than the thin part 4a of the cylindrical member 4 becomes the thick part 4c. An intermediate surface 4b is formed between the inner wall surface of the thick portion 4c and the inner wall surface of the thin portion 4a.

Next, the inside of the cylindrical member 4 is filled with the insulating filling member 10 and the lead 12 extending through the filling member 10.
First, as shown in FIG. 8, the tubular member 4 is disposed on the jig 40. The jig 40 includes a substrate 34 and a fixing member 38, and a recess 36 is formed in the substrate 34.
The cylindrical member 4 is disposed so that the top surface 8 of the thin portion 4a and the surface of the substrate 34 are in contact with each other. Further, the fixing member 38 is disposed so as to contact the outer peripheral surface 6 of the cylindrical member 4. As a result, the cylindrical member 4 is prohibited from moving in a direction orthogonal to the axial direction.
Next, the lead 12 that passes through the tubular member 4 in the axial direction is disposed at a position away from the inner wall surface 14 of the tubular member 4. One end of the lead 12 is accommodated in the recess 36.
Next, molten glass is poured into the inside of the cylindrical member 4. In this embodiment, the molten glass is filled until it comes into contact with the intermediate surface 4b between the inner wall surface of the thick wall portion 4c and the inner wall surface of the thin wall portion 4a. Note that the molten glass may be filled until it exceeds the intermediate surface 4b. At this time, when it is desired to form the filling member 10 also on the top surface 8 of the thin portion 4a, the cylindrical member 4 is moved in the axial direction while maintaining the state in which the fixing member 38 and the outer peripheral surface 6 are in contact with each other. When a gap is formed between the top surface 8 of 4a and the substrate 34, the molten glass can flow into the gap. The filling member 10 can also be formed on the top surface 8 of the thin portion 4a. In order to move the cylindrical member 4 in the axial direction, pressure may be applied to the molten glass. When pressure is applied to the molten glass, a gap is formed between the top surface 8 of the thin portion 4a and the substrate 34, and the molten glass flows into the gap. In addition, since the fixing member 38 and the outer peripheral surface 6 are in contact with each other, the molten glass is not formed in contact with the outer side of the outer peripheral surface 6 of the cylindrical member 4. After the filling member 10 is cured, the tubular member 4 is removed from the jig 40. The hermetic seal terminal 100 can be manufactured by the above process.

In the manufacturing method of the present embodiment, as shown in FIG. 7, since the thin portion 4a is formed at one end of the cylindrical member 4 in a later step, in the step of extending the cylindrical member 3 in the axial direction, the cylindrical member It can implement in the state which enlarged the thickness of 4 part. Even when the cylindrical member 4 of FIG. 6 is formed by cutting from a cylindrical member, the cylindrical member 4 can be formed with the thickness of the cylindrical member 4 increased in the cutting step. As a result, since the stretching process or the cutting process can be performed while the cylindrical member 4 has a high strength, deformation of the cylindrical member 4 can be prevented, and the dimensional accuracy of the cylindrical member can be increased. it can.
In the first embodiment, the example in which the filling member 10 is in contact with the top surface 8 of the tubular member 4 has been described. The filling member 10 is not necessarily in contact with the top surface 8 of the cylindrical member 4. What is important is that the cylindrical member 4 has a thick portion 4c and a thin portion 4a. In order to simplify the connection conditions between the hermetic seal terminal 100 and other components and the manufacture of the hermetic seal terminal 100, the filling member 10 may be filled only into the cylindrical member 4.

(Second embodiment)
FIG. 9 shows a longitudinal sectional view of a pressure sensor 600 using the hermetic seal terminal 100. The pressure sensor 600 includes a hermetic seal terminal 100, a first housing 24, a second housing 44, and a connector 54.
A pressure detection element 32 is mounted on the mounting surface 13 of the hermetic seal terminal 100. The pressure detection element 32 is electrically connected to one end of the lead 12 via the wire 26. A wire 46 is connected to the other end of the lead 12, and the lead 12 and the circuit chip 48 are electrically connected by the wire 46.
The outer peripheral surface 6 (see FIG. 1) of the cylindrical member 4 and the inner wall surface of the first housing 24 are fixed by soldering. The first housing 24 includes a diaphragm 30. When pressure is applied to the diaphragm 30, force is applied to the pressure detection element 32 via the transmission member 28. The force applied to the pressure detection element 32 is processed by the circuit chip 48.
The first housing 24 is fitted into the second housing 44, and the top surface 58 of the second housing 44 and the first housing 24 are fixed by soldering. A screw 42 is formed on a part of the outer peripheral surface of the second housing 44.
A hollow nut 50 is also formed on a part of the outer periphery of the second housing 44. A connector 54 is fitted in the nut 50, and a substrate 52 is fitted in the connector 54. Three pins 56 are connected to the substrate 52. The circuit chip 48 is disposed on the substrate 52.
The pressure sensor 600 is used to detect the pressure of the hydraulic line of various hydraulic mechanism devices. The screw 42 is fixed to a screw hole formed in the pipe of the hydraulic line, and a signal of pressure in the hydraulic mechanism device can be transmitted from the pin 56 to the outside.

  As the pressure sensor 600 is further reduced in size, the first housing 24 must also be reduced in size. In that case, the space for accommodating the hermetic seal terminal 100 is also reduced. As described above, since the hermetic seal terminal 100 is provided with the thin portion 4a only at one end in the axial direction of the tubular member 4, the strength of the tubular member 4 is ensured and the pressure detecting element 32 is mounted. A large area can be secured. The form of the hermetic seal terminal 100 is a useful technique for coping with downsizing, and can contribute to downsizing of the pressure sensor 600.

(Third embodiment)
The hermetic seal terminal 200 will be described with reference to FIG. The hermetic seal terminal 200 is a modification of the hermetic seal terminal 100, and the description of the same configuration as the hermetic seal terminal 100 is omitted by attaching the same reference numerals to the last two digits.
The hermetic seal terminal 200 is characterized in that the thickness of the thin portion 204a of the cylindrical member 204 is thin at one end (on the top surface 208 side) in the axial direction and thick at the other end in the axial direction. The inner wall of the thin portion 204a is inclined along the axial direction, and an inclined surface 216 is formed. The filling member 210 is in contact with the inner wall (the inclined surface 216) of the thin portion 204a. The presence of the inclined surface 216 can prevent the filling member 210 from coming off the cylindrical member 204 even in the hermetic terminal 200.

(Fourth embodiment)
The hermetic seal terminal 300 will be described with reference to FIG. The hermetic seal terminal 300 is a modification of the hermetic seal terminal 100, and the same configuration as the hermetic seal terminal 100 is denoted by the same reference numerals in the last two digits, and the description thereof is omitted.
The hermetic seal terminal 300 is characterized in that the inner wall of the tubular member 304 is an inclined surface 316 that is continuously inclined along the axial direction from one end to the other end in the axial direction. In the hermetic seal terminal 300 of this embodiment, no clear boundary is observed between the inner wall surface of the thick portion 304c and the inner wall surface of the thin portion 304a. However, one end in the axial direction of the cylindrical member 304 is formed thinner than the remaining portion, and if one end of the cylindrical member 304 is grasped as a whole, the one end side in the axial direction of the cylindrical member 304 is the thin portion 304a. The other end side in the axial direction of 304 can be considered as the thick portion 304c. The presence of the inclined surface 316 can prevent the filling member 310 from coming off the cylindrical member 304 even in the hermetic seal terminal 300.

(5th Example)
The hermetic seal terminal 400 will be described with reference to FIG. The hermetic seal terminal 400 is a modification of the hermetic seal terminal 100, and the same configuration as the hermetic seal terminal 100 is denoted by the same reference numerals in the last two digits, and the description thereof is omitted.
The hermetic seal terminal 400 is characterized in that the inner wall of the tubular member 404 includes an inclined surface (intermediate surface) 416 between the inner wall surface of the thick portion 404c and the inner wall surface of the thin portion 404a. In the inclined surface 416, the inner diameter of the cylindrical member 404 is continuously changing. The presence of the inclined surface 416 can prevent the filling member 410 from coming off the cylindrical member 404 even in the hermetic seal terminal 400.

(Sixth embodiment)
The hermetic seal terminal 500 will be described with reference to FIG. The hermetic seal terminal 500 is a modification of the hermetic seal terminal 100, and the same configuration as the hermetic seal terminal 100 is denoted by the same reference numeral in the last two digits and the description thereof is omitted.
In the hermetic seal terminal 500, the inner wall surface 514 of the cylindrical member 504 is constant in the axial direction, and the intermediate surface 504b is formed between the outer wall surface of the thick portion 504c and the outer wall surface of the thin portion 504a. It is a feature. In the hermetic terminal 500 of the present embodiment, the thin portion 504a of the cylindrical member 504 is accommodated in the accommodating portion of the housing. That is, the hermetic seal terminal 500 is characterized by including a local region (thin wall portion 504a) having an outer diameter dimension corresponding to the inner diameter dimension of the housing accommodating portion.
According to the form of the hermetic seal terminal 500, in the step of extending and forming the cylindrical member 504, the outer diameter of the cylindrical member 504 is increased (the outer diameter of the thick portion 504c) and the thickness of the cylindrical member 504 is increased. The one end of the cylindrical member 504 is processed thinly in accordance with the housing portion of the housing later. For this reason, according to the form of the hermetic seal terminal 500, it is possible to prevent the tubular member 504 from being deformed in the stretch forming step. An inclined surface may be formed in the thin portion 504a of the hermetic seal terminal 500. The filling member 510 can be prevented from coming off the cylindrical member 504.

Specific examples of the present invention have been described above in detail, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples illustrated above.
In the said Example, the filling member is filled only in the thin part of the cylindrical member. However, the thick member of the cylindrical member may be filled with the filling member. In this case, the strength of the thick part of the cylindrical member can be improved.
In the first embodiment, the filling member is formed in contact with the entire top surface of the thin portion of the cylindrical member, but the filling member may be formed on a part of the top surface of the thin portion of the cylindrical member. . Even in this case, a large surface area of the mounting surface can be ensured by the surface integration of the mounting surface existing on the top surface of the thin portion. Moreover, it can also prevent reliably that a filling member contacts the outer wall surface of a cylindrical member.
In the second embodiment, the hermetic seal terminal of any of the third to sixth embodiments can be used instead of the hermetic seal terminal of the first embodiment.
In addition, the technical elements described in the present specification or drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in the present specification or the drawings can achieve a plurality of objects at the same time, and has technical utility by achieving one of the objects.

The longitudinal cross-sectional view of the hermetic seal terminal of 1st Example is shown. The external view which observed the hermetic seal terminal of 1st Example in the arrow A direction of FIG. 1 is shown. The longitudinal cross-sectional view of the hermetic seal terminal of 1st Example is shown. The longitudinal cross-sectional view of the hermetic seal terminal of 3rd Example is shown. The manufacturing process of the hermetic seal terminal of 1st Example is shown. The manufacturing process of the hermetic seal terminal of 1st Example is shown. The manufacturing process of the hermetic seal terminal of 1st Example is shown. The manufacturing process of the hermetic seal terminal of 1st Example is shown. The manufacturing process of the hermetic seal terminal of 1st Example is shown. The longitudinal cross-sectional view of the pressure sensor of 2nd Example is shown. The longitudinal cross-sectional view of the hermetic seal terminal of 3rd Example is shown. The longitudinal cross-sectional view of the hermetic seal terminal of 4th Example is shown. The longitudinal cross-sectional view of the hermetic seal terminal of 5th Example is shown. The longitudinal cross-sectional view of the hermetic seal terminal of 6th Example is shown.

Explanation of symbols

4, 204, 304, 404, 504: Cylindrical members 4a, 204a, 304a, 404a, 504a: Thin portions 4c, 204c, 304c, 404c, 504c of the cylindrical members: Thick portions 10, 210 of the cylindrical members, 310, 410, 510: Filling members 12, 212, 312, 412, 512: Leads 100, 200, 300, 400, 500: Hermetic seal terminal 600: Pressure sensor

Claims (9)

A method of manufacturing a hermetic seal terminal for mounting a functional element,
Processing the thickness of one end in the axial direction of the cylindrical member made of metal to form a thin portion; and
And a step of filling the inside of the tubular member with an insulating filling member and a conductive lead extending through the filling member. Prior to the process of forming the thin part,
Extending the cylindrical member in the axial direction and adjusting it to a predetermined outer diameter;
The manufacturing method according to claim 1, further comprising a step of dividing the stretched tubular member into a plurality of parts. A hermetic seal terminal for mounting functional elements,
A metal tubular member having a thick part and a thin part;
An insulating filling member filled inside the tubular member;
A conductive lead extending in the axial direction through the filling member, and
The thin portion is provided at one end of the cylindrical member in the axial direction,
The filling member has a mounting surface for mounting the functional element,
The mounting surface is a hermetic seal terminal arranged on the one end side in the axial direction. An intermediate surface is formed on the inner wall surface of the cylindrical member between the inner wall surface of the thick wall portion and the inner wall surface of the thin wall portion and non-parallel to both the inner wall surface of the thick wall portion and the inner wall surface of the thin wall portion. And
The hermetic seal terminal according to claim 3, wherein the filling member is in contact with an intermediate surface thereof. The thickness of the thin portion is formed thin at the one end in the axial direction and thick at the other end in the axial direction,
The inner wall surface of the thin wall portion is inclined along the axial direction,
The hermetic seal terminal according to claim 3 or 4, wherein the filling member is in contact with the inner wall surface of the thin portion.   The hermetic seal terminal according to any one of claims 3 to 5, wherein the filling member is also in contact with the top surface of the one end of the cylindrical member.   The hermetic seal terminal according to any one of claims 3 to 6, wherein the lead has a portion bent in a direction in which the distance from the inner wall surface of the cylindrical member increases.   The hermetic seal terminal according to any one of claims 3 to 7, wherein an outer diameter of the cylindrical member is constant in an axial direction.   The hermetic seal terminal according to any one of claims 3 to 8, wherein a screw is provided on an outer peripheral surface of the thick portion.

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