JP2008242291A - Washing method for display panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a washing method for a display panel capable of suppressing drying irregularity on wiring lines and terminals. <P>SOLUTION: The washing method for the display panel is for washing a projection region 51 of a liquid crystal panel 100 which has a first substrate 20 and a second substrate 10 superposed one over the other with a seal material 30 interposed and has a terminal group 27 in the projection region 51 where the first substrate 20 projects from the second substrate 10, the washing method including the stages of: washing the terminal group 27 with steam; dripping liquid on the terminal group 27 to form a liquid film 80 containing droplets of steam sticking on the terminal group 27 during the steam washing; and moving the liquid film 80 to an end of the projection region 51 in contact with a surface of the first substrate 20 by blowing air to the liquid film 80 to discharge the liquid film 80 from the end. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a display panel cleaning method, and more particularly to a display panel cleaning method for cleaning and drying a terminal group of a display panel.

  The liquid crystal display panel includes a pair of substrates made of glass or the like and a liquid crystal sandwiched between the substrates. Here, electrode patterns for driving the liquid crystal are formed on the surfaces of the substrates facing each other. In addition, of the pair of substrates, one substrate is formed to have a larger planar dimension than the other substrate, and is disposed so as to protrude. A plurality of terminals that are electrically connected to the electrodes formed on both substrates are formed in the protruding region. Electronic components such as an FPC or a driver IC are mounted on these terminals. The driver IC outputs various control signals, scanning voltage, display voltage, and the like necessary for image display based on a display signal input from the outside, and drives the liquid crystal display panel.

  When an electronic component is mounted on a terminal of a liquid crystal display panel, if unnecessary liquid crystal material or foreign matter remains on the liquid crystal display panel on the terminal of the liquid crystal display panel, a connection failure such as a semiconductor element or a short circuit between wirings, etc. May cause malfunction. For this reason, before mounting electronic components on the terminals of the liquid crystal display panel, cleaning is performed to remove liquid crystal material, dust, and the like attached to the liquid crystal display panel. As such a cleaning method, for example, steam cleaning can be used. In the steam cleaning, high temperature steam is sprayed from the nozzle toward the terminal to remove foreign substances such as human secretions attached to the terminal (see Patent Document 1).

In this way, after the terminal is cleaned with steam, the terminal is naturally dried. In the steam cleaning, high temperature steam is blown so that the protruding region is hot. For this reason, due to the heat of the protruding region, the water droplets adhering during the steam cleaning are quickly evaporated and naturally dried. However, if drying is performed quickly, a large number of drying unevenness occurs on the terminal. This is because when the water droplet evaporates, foreign matter such as dust in the water droplet reattaches to the terminal area, leaving a trace of the water droplet. If such drying unevenness is present on wirings / terminals formed of ITO or the like, poor connection occurs or ITO corrodes (electrolytic corrosion), and the display characteristics deteriorate.
JP 2006-128442 A

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a display panel cleaning method capable of suppressing drying unevenness on wirings and terminals.

  A method for cleaning a display panel according to the present invention exposes a first substrate, a terminal portion formed on one side of the first substrate, a terminal group formed on the terminal portion, and the terminal portion. A display panel cleaning method comprising: a second substrate bonded to the first substrate via a sealing material, the step of performing steam cleaning on the terminal group; and immediately after the steam cleaning. A step of dropping a liquid onto the terminal group, forming a liquid film including the dropped liquid and a vapor droplet adhering to the terminal group by the vapor cleaning; and spraying a gas on the liquid film Thus, the liquid film is moved toward the end portion of the terminal portion in a state where the liquid film is in contact with the surface of the first substrate, and the liquid film is discharged from the end portion. Thereby, the drying nonuniformity on wiring and a terminal can be suppressed.

  Further, in the above-described display panel cleaning method, in the step of discharging the liquid film, it is preferable that the spray pressure of the gas to be sprayed is 0.05 kPa to 0.8 kPa. Thereby, a liquid film can be moved, without dividing a liquid film.

  In the display panel cleaning method, in the step of forming the liquid film, the liquid to be dropped is preferably water. Thereby, before removing a liquid film, it can suppress that a liquid film evaporates.

According to the present invention, drying unevenness on the wiring / terminal can be suppressed.

Embodiment.
First, the display device will be described. Here, as an example, a liquid crystal display device will be described with reference to FIG. FIG. 1 is a schematic cross-sectional view showing the configuration of the liquid crystal display device 300. FIG. 2 is a schematic plan view showing the configuration of the liquid crystal display panel 100 used in the liquid crystal display device 300. In this embodiment, an STN passive matrix liquid crystal display panel is described as an example of the liquid crystal display panel 100.

  As shown in FIG. 1, the liquid crystal display device 300 includes a liquid crystal display panel 100 as a display panel and a backlight unit 200. The liquid crystal display panel 100 displays an image based on an input display signal. The backlight unit 200 is disposed on the non-viewing side of the liquid crystal display panel 100 and emits light from the back side of the liquid crystal display panel 100.

  As shown in FIGS. 1 and 2, the liquid crystal display panel 100 includes a first substrate 20, a second substrate 10, a sealing material 30, a liquid crystal 31, a spacer 32, a first electrode 21, an alignment film 33, a second electrode 11, A polarizing plate 34 is provided. As shown in FIG. 1, the liquid crystal display panel 100 includes a liquid crystal 31 in a space between a first substrate 20, a second substrate 10 disposed opposite to the first substrate 20, and a sealing material 30 that bonds the two substrates. It has the structure which enclosed. A distance between the two substrates is maintained by a spacer 32 so as to have a predetermined interval. As the 1st board | substrate 20 and the 2nd board | substrate 10, insulating board | substrates, such as glass, polycarbonate, an acrylic resin, etc. with a light transmittance, are used, for example.

  Further, out of the first substrate 20 and the second substrate 10 constituting the liquid crystal display panel 100, the first substrate 20 is formed to have a larger planar dimension than the second substrate 10. Accordingly, the first substrate 20 is disposed so as to protrude from the second substrate 10. A terminal portion (hereinafter referred to as a protruding region 51) where the first substrate 20 of the liquid crystal display panel 100 protrudes from the second substrate 10 and is exposed is displayed on the electrodes formed on the first substrate 20 and the second substrate 10. Terminal groups 27 such as wiring for transmitting signals and the like, IC connection terminals (not shown) connected to the driver IC 40, and external connection terminals 28 connected to the FPC 26 are formed.

  As shown in FIG. 2, the second substrate 10 is formed with a plurality of second electrodes 11 formed in the vertical direction and second routing wires 12 connected to the respective second electrodes 11. As the 2nd electrode 11 and the 2nd routing wiring 12, it forms from transparent conductive thin films, such as ITO (Indium Tin Oxide), for example. The second lead wiring 12 extends from the lower end of the display area 50, and the second transfer pad 13 is formed at the end. The second transfer pad 13 is connected to a first transfer pad 23 formed on the first substrate 20 described later.

  On the other hand, on the first substrate 20, a plurality of first electrodes 21 formed in the horizontal direction and first routing wirings 22 connected to the respective first electrodes 21 are formed. The first routing wiring 22 extends from the right or left end of the display area 50 to the lower side of the first substrate 20. Note that the first routing wiring 22 in the protruding region 51 is referred to as an external connection wiring 25. An IC connection terminal (not shown) for connecting to the driver IC 40 is formed at the end of the external connection wiring 25. For example, the first electrode 21 is formed of a transparent conductive thin film such as ITO. Further, the first routing wiring 22 has a laminated structure of a transparent conductive film such as ITO and a low resistance metal film made of Al in order to reduce wiring resistance as much as possible. A pixel 35 is a portion where the second electrode 11 formed in the vertical direction and the first electrode 21 formed in the horizontal direction intersect. The display area 50 includes a plurality of pixels 35 arranged in a matrix.

  The first substrate 20 is formed with a first transfer pad 23 for connection to the second transfer pad 13 of the second substrate 10. The first transfer pad 23 is formed to face the second transfer pad 13 when the second substrate 10 and the first substrate 20 are disposed to face each other. An auxiliary wiring 24 is formed so as to extend from the first transfer pad 23 to the lower side of the first substrate 20. As the auxiliary wiring 24, the same transparent conductive film such as ITO as the second routing wiring 12 can be used.

  An IC connection terminal (not shown) for connecting to the driver IC 40 is formed at the end of the auxiliary wiring 24. The driver IC 40 is connected to the IC connection terminal formed at the end of the auxiliary wiring 24 via an ultraviolet curable or thermosetting anisotropic conductive adhesive (not shown). The driver IC 40 is directly provided on the first substrate 20 by a COG (Chip On Glass) method.

  The liquid crystal display panel 100 is driven by a driver IC 40 that outputs various control signals, scanning voltages, display voltages, and the like necessary for image display based on display signals input from the outside. A flexible substrate (FPC: Flexible Printed Circuit) on which the driver IC 40 is mounted may be connected to the liquid crystal display panel 100.

  A plurality of external connection wires 25 are formed in the protruding region 51. An IC connection terminal (not shown) is formed at one end of the external connection wiring 25. The driver IC 40 is connected to the IC connection terminal via the anisotropic conductive adhesive described above. Further, the external connection terminal 28 is formed in the protruding region 51. The external connection terminal 28 is formed of a transparent conductive film such as ITO. As shown in FIG. 2, the driver IC 40 and the FPC 26 are connected to the external connection terminal 28 via an anisotropic conductive adhesive (not shown). That is, the FPC 26 is bonded to one side of the first substrate 20 where the driver IC 40 is provided. As described above, various terminals or wirings such as the external connection wiring 25, the IC connection terminal, and the external connection terminal 28 are formed in the protruding region 51. Hereinafter, these wirings or terminals formed in the protruding region 51 are referred to as a terminal group 27.

  The FPC 26 is mounted with a control circuit (not shown). The control circuit includes a controller that supplies a display signal and various control signals to the driver IC 40, a power supply circuit that supplies a power supply voltage, a reference voltage, and the like. Therefore, a control circuit or the like is connected to the first substrate 20 via the FPC 26. Display signals and various control signals output from the control circuit and the like are input to the driver IC 40 via the external connection terminal 28 and the IC connection terminal. The driver IC 40 supplies a voltage to each electrode in the display area at a predetermined timing based on the input display signal and control signal.

  As shown in FIG. 1, in the second substrate 10, an alignment film 33 is formed on each of the electrodes and wirings described above. On the other hand, a color filter (not shown), the first electrode 21 and the alignment film 33 are sequentially stacked on the surface of the first substrate 20 facing the second substrate 10. A polarizing plate 34 is attached to each of the outer surfaces of the second substrate 10 and the first substrate 20.

  A backlight unit 200 is provided on the back surface of the liquid crystal display panel 100. The liquid crystal display panel 100 is irradiated with light from the non-viewing side of the liquid crystal display panel 100. As the backlight unit 200, for example, a unit having a general configuration including a light source, a light guide plate, a reflection sheet, a diffusion sheet, a prism sheet, a reflection polarizing sheet, and the like can be used.

  Here, the operation of the liquid crystal display device 300 will be described. A display voltage is supplied to each second electrode 11 from the driver IC 40. On the other hand, a scanning voltage is supplied to each first electrode 21 from the driver IC 40. In accordance with the potential difference between the second electrode 11 and the first electrode 21, the arrangement of liquid crystals between the second electrode 11 and the first electrode 21 constituting each pixel changes. Thereby, the transmittance | permeability of the light from the backlight unit 200 changes and it can display.

  Next, an example of a cleaning apparatus for carrying out the cleaning method of the present invention will be described with reference to FIG. FIG. 3 is a schematic diagram showing the configuration of the cleaning processing apparatus. The cleaning processing apparatus according to the present embodiment can clean and dry the terminal group 27 of the liquid crystal display panel 100 described above.

  The cleaning processing apparatus includes a cleaning tank 70, a steam cleaning nozzle 74, a dripping nozzle 75, and a gas injection nozzle 76. The washing tank 70 has a carry-in port 71 and a carry-out port 72, and the liquid crystal display panel 100, which is the object to be washed, can be carried in and out in the direction of the arrow in FIG. Further, the cleaning tank 70 has an exhaust port 73 and can discharge excess cleaning liquid and the like. The steam cleaning nozzle 74 sprays high-temperature steam (for example, water vapor) onto the terminal group 27 to remove foreign matters such as dust, unnecessary liquid crystal, and human secretions. That is, steam cleaning can be performed by the steam cleaning nozzle 74. The dripping nozzle 75 drops liquid onto the liquid droplets before the vapor droplets adhering to the liquid crystal display panel 100 by vapor cleaning evaporate. As a result, the droplets attached to the terminal group 27 by the steam cleaning and the liquid dropped from the dropping nozzle 75 are integrated, and a liquid film, a liquid droplet, or a mixed film of a liquid film and a liquid droplet (hereinafter referred to as a liquid film). Formed). The amount of liquid dropped from the dropping nozzle 75 is such that a liquid film having a certain size can be formed and the liquid does not spill from the protruding region 51.

  The gas injection nozzle 76 injects a light wind. That is, the gas injection nozzle 76 is set to have a low gas injection pressure. A gas such as dry air is jetted from the gas jet nozzle 76 to move the liquid film toward the end of the protruding region 51. Then, the liquid film is discharged from the end of the protruding region 51. Thereby, the droplets adhering to the terminal group 27 by the steam cleaning are also discharged in a state integrated with the liquid film, and the protruding region 51 can be dried. Each nozzle is held by a holding mechanism (not shown). And each nozzle is arrange | positioned in order of the vapor | steam washing nozzle 74, the dripping nozzle 75, and the gas-injection nozzle 76 from the front side of the advancing direction of a nozzle relative to the liquid crystal display panel 100, for example at predetermined intervals. It is held in the state. Each nozzle is moved at a predetermined timing and speed by a holding mechanism. The traveling directions of all the nozzles are substantially the same, and each nozzle is moved from one end of the protruding region 51 toward the other end along the edge of the second substrate 10 on the protruding region 51 side. Thereby, the cleaning by the vapor cleaning nozzle 74, the formation of the liquid film by the dropping nozzle 75, and the discharge of the liquid film by the gas injection nozzle 76 can be sequentially performed.

  Moreover, it is preferable that the liquid dripped by the dripping nozzle 75 is a liquid with low volatility. Thereby, before the dropped liquid evaporates, the liquid film can be moved by the gas injection nozzle 76 and removed from the other end. Of course, the nozzle may be moved as described above, or the liquid crystal display panel 100 may be moved. The cleaning processing apparatus is configured as described above. By cleaning and drying with such a cleaning processing apparatus, it is possible to reduce the remaining of the droplets on the terminal group 27 and to suppress drying unevenness. Moreover, since the gas injection pressure is set to a low pressure, the amount of gas used can be reduced, and environmentally friendly process design can be performed.

  Next, a method for cleaning the display panel according to this embodiment will be described with reference to FIG. Here, as an example, an application example to the liquid crystal display panel 100 will be described. FIG. 4 is a flowchart showing the steps of the cleaning method of the liquid crystal display panel 100 and the steps before and after that.

  First, as shown in FIG. 2, a transparent conductive film such as ITO is formed on the substrates 10 and 20, and the transparent conductive film is patterned. Thereby, the first electrode 21 and the like are formed on the first substrate 20, and the second electrode 11 and the like are formed on the second substrate 10 (step S1).

  Then, the electrode formation surface of the first substrate 20 and the electrode formation surface of the second substrate 10 are arranged to face each other and are bonded together by the sealing material 30. Here, the 1st board | substrate 20 and the 2nd board | substrate 10 are adhere | attached through the sealing material 30 so that the protrusion area | region 51 formed in the one side side on the 1st board | substrate 20 may be exposed. Thereafter, liquid crystal 31 is sealed between the substrates to form a liquid crystal cell. And the polarizing plate 34 is affixed on the outer surface of a liquid crystal cell, and the liquid crystal display panel 100 is formed (step S2).

  In the liquid crystal display panel 100, as shown in FIG. 2, the first substrate 20 protrudes from the second substrate 10, and various terminals and wirings (terminal group 27) are formed in the protruding region 51. Before the electronic components such as the driver IC 40 and the FPC 26 are mounted on the terminal group 27, the terminal group 27 is cleaned (step S3). This is because, if unnecessary liquid crystal material or foreign matter remains in the liquid crystal display panel 100, a malfunction may occur due to poor connection of semiconductor elements, short circuit between wirings, or the like. Here, the process from step S3 to the subsequent step S5 is performed by the cleaning processing apparatus shown in FIG. As the cleaning method in step S3, wet cleaning can be used. In the present embodiment, the terminal group 27 is cleaned by steam cleaning.

  Such cleaning is performed on the terminal group 27 of the liquid crystal display panel 100 to which the polarizing plate 34 or the like is attached. The polarizing plate 34 has poor durability under high temperature and high humidity. For this reason, the polarizing plate 34 is deteriorated under a high temperature and high humidity environment, and the polarization performance is drastically lowered. Therefore, when using the above-described cleaning method, it is necessary to shield an area other than the terminal group 27 with a shielding plate to prevent moisture from entering. And in the state which has arrange | positioned the shielding board, high temperature vapor | steam (for example, water vapor | steam) is injected with respect to the terminal group 27 from the vapor | steam washing nozzle 74. FIG. As a result, liquid crystal material, dust, human secretions, and the like attached to the terminal group 27 of the liquid crystal display panel 100 are removed.

  Next, a liquid such as pure water or ultrapure water is dropped from the dropping nozzle 75 onto the terminal group 27 immediately after performing the steam cleaning (step S4). In this way, a liquid is dropped onto the terminal group 27, and a liquid film including the dropped liquid and vapor droplets attached to the terminal group 27 by vapor cleaning is formed. This suppresses evaporation of vapor droplets adhering to the terminal group 27 due to vapor cleaning. The liquid film here has a certain size, for example, a size that covers at least one terminal in the terminal group 27, and does not spill from the protruding region 51 as shown in FIG. 5. FIG. 5 is a schematic side view showing a state in which the liquid film 80 is formed on the terminal group 27. The liquid film 80 is formed by surface tension. The surface tension is a force (per unit length) acting in the opposite direction to the expansion of the liquid film 80 and is caused by an intermolecular force. The surface tension varies depending on the type of liquid to be dropped and the temperature, and the amount and speed of dropping are set according to each condition. In addition, since the contact angle (wetting property) varies depending on the material of the first substrate 20 and the terminal group 27 and the liquid to be dropped, it is preferable to drop the liquid in consideration of these.

  Here, water (pure water) having low volatility is dropped. For example, when a highly volatile liquid such as alcohol is added dropwise, it volatilizes immediately and a residue is formed, which is not preferable. This step may be performed after step S3 for performing the steam cleaning is completed for all the protruding regions 51. However, it is preferable to sequentially drop the liquid from the location of the terminal where the steam cleaning is performed in step S3. The liquid dropped from the dropping nozzle 75 is preferably selected from a substance having good affinity with the cleaning liquid jetted from the steam cleaning nozzle 74 as vapor. Thereby, when the liquid film is removed in the subsequent step (step S5), the vapor droplets attached to the terminal group 27 by the vapor cleaning can be removed in a state of being integrated with the liquid film 80.

  Next, the liquid film 80 in the terminal group 27 region is discharged (step S5). Here, a gas of a slight wind is ejected to the liquid film 80 by the gas ejection nozzle 76. As a result, the liquid film 80 is moved from one end to the other end of the protruding region 51 in a state where the liquid film 80 is integrated while being in contact with the surface of the first substrate 20. Then, the liquid film 80 containing vapor droplets attached to the terminal group 27 is discharged from the other end by vapor cleaning. Here, the gas is injected at an injection pressure that maintains a balance with the interfacial tension (including surface tension) at the interface of each phase (solid phase, vapor phase, and liquid phase). Specifically, the injection pressure is preferably about 0.05 kPa to 0.8 kPa. If the spray pressure is too weak, the liquid film 80 on the terminal group 27 cannot be moved. On the contrary, if the injection pressure is too strong, the liquid film 80 is split on the terminal group 27. And it will remain scattered on the terminal group 27 and a residue will be generated.

  In the present embodiment, as shown in FIG. 6, the liquid film 80 is moved from one end to the other end in the long side direction of the protruding region 51. FIG. 6 is a schematic perspective view illustrating a method for drying the terminal group 27. Here, the terminal group 27 is simplified. Thus, by moving the gas injection nozzle 76 from one end to the other end of the protruding region 51, that is, in the direction of the hollow arrow in FIG. 6, the liquid film 80 also moves in the hollow arrow direction. As a result, the liquid film 80 is discharged from one end of the protruding region 51 and dried sequentially, so that substantially the entire surface of the protruding region 51 can be dried.

  Here, as the gas injected from the gas injection nozzle 76, air, dry air, other gases, or the like can be used, and a clean gas with few floating foreign matters is preferable. In the present embodiment, normal temperature dry air is used as the gas injected from the gas injection nozzle 76.

  Note that the surface of the protruding region 51 of the first substrate 20 includes a portion where the terminal group 27 such as ITO is formed and a portion where the terminal group 27 is not formed and glass or the like is exposed, The contact angle of the liquid to be dropped varies depending on each location. That is, the degree of expansion of the liquid is different. However, such a difference in contact angle with respect to each member hardly affects the movement of the liquid film 80. Further, as shown in FIG. 7, the protrusion region 51 has irregularities due to the terminal group 27. FIG. 7 is a schematic cross-sectional view showing a method for drying the terminal group 27. Here, as in the present embodiment, when the liquid film 80 is moved slowly at a low pressure (preferred speed for moving the liquid film 80 is 1 mm / sec to 10 mm / sec), almost no liquid residue is generated due to unevenness. Absent. That is, as shown in FIG. 7, the liquid film 80 can be moved even if there are irregularities due to the terminal group 27, and the liquid film 80 is sent out integrally without being divided. In addition, since the liquid film 80 is moved slowly, the liquid film 80 can be brought into contact with substantially the entire surface of the protruding region 51 even if there are irregularities. Thereby, it can suppress that a droplet remains on the protrusion area | region 51. FIG. That is, the liquid film 80 moves while being in contact with the surface of the first substrate 20.

  As described above, the cleaning apparatus shown in FIG. 3 can be used from step S3 to step S5. Here, step S3 to step S5 will be described with reference to FIG. FIG. 8 is a schematic perspective view showing how the terminal group 27 is cleaned and dried. As shown in FIG. 8, the steam cleaning nozzle 74, the dropping nozzle 75, and the gas injection nozzle 76 are arranged at a predetermined interval from the nozzle traveling direction side. In FIG. 8, the hollow arrow direction is the nozzle traveling direction. Then, immediately after the steam cleaning is performed by the steam cleaning nozzle 74, the liquid is sequentially dropped by the dropping nozzle 75 from the steam cleaned portion. When the liquid film 80 having a certain size is formed by dropping the liquid, the liquid film 80 is moved in the direction of the hollow arrow by the gas injection nozzle 76. First, if these nozzles are in the order of cleaning, dripping, discharging, and drying with respect to their respective locations, the timing for moving them can be changed as appropriate. For example, first, the vapor cleaning nozzle 74 and the dropping nozzle 75 may be moved in parallel to form the liquid film 80 on the entire protruding region 51, and then the gas injection nozzle 76 may be moved for drying.

  Further, all the nozzles may be moved in parallel. In this case, if the formed liquid film 80 can absorb the droplets of the vapor before the vapor of the vapor cleaning vapor evaporates, after the liquid film 80 having a desired size is formed, the droplets from the dropping nozzle 75 are formed. The amount of liquid may be limited. Thereby, processing time can be shortened and workability | operativity can be improved. Furthermore, the amount of liquid dropped can be reduced, and the cost can be reduced.

  Next, the driver IC 40 and the FPC 26 are mounted on the dried terminal group 27 (step S6). Thereafter, the liquid crystal display device 300 is manufactured by arranging the backlight unit 200 and the like.

  By the method for cleaning the liquid crystal display panel 100 as described above, dry residue can be reduced, and uneven drying of the terminal group 27 can be suppressed. Thereby, corrosion (electric corrosion) of the terminal group 27 formed of ITO or the like can be suppressed, and the display characteristics of the liquid crystal display device 300 are improved.

Example.
High temperature steam was sprayed onto the terminal group 27 of the liquid crystal display panel 100 to perform steam cleaning. Then, immediately after the steam cleaning and before the water droplets of the vapor attached to the terminal group 27 evaporate, pure water at room temperature was dropped to form a liquid film 80 (water film). Then, dry air at normal temperature (same as the ambient temperature) was jetted from the gas jet nozzle 76. The jet pressure here was 0.05 kPa breeze air. The liquid film 80 of water was moved from one end of the projecting region 51 to the other end by the light air, and the water liquid film 80 was removed from the other end. Then, when the residue on the terminal group 27 was observed with the microscope, there was almost no residue.

Comparative example.
High temperature steam was sprayed onto the terminal group 27 of the liquid crystal display panel 100 to perform steam cleaning. The steam droplets adhering to the terminal group 27 were blown off at a stretch by high-pressure air and dried. When the residue on the terminal group 27 was observed with the microscope, many residues were generated from the Example.

  The above-described cleaning processing apparatus and display panel cleaning method can be used not only for liquid crystal display panels but also for other display panels such as organic EL display panels.

It is a cross-sectional schematic diagram which shows the structure of the liquid crystal display device concerning embodiment. It is a plane schematic diagram which shows the structure of the liquid crystal display panel concerning embodiment. It is the schematic which shows the structure of the washing | cleaning processing apparatus concerning embodiment. It is a flowchart figure which shows the process of the washing | cleaning method of the liquid crystal display panel concerning embodiment, and the process before and behind that. It is a side surface schematic diagram which shows the state in which the liquid film was formed in the terminal group concerning embodiment. It is a perspective schematic diagram which shows the drying method of the terminal group concerning embodiment. It is a cross-sectional schematic diagram which shows the drying method of the terminal group concerning embodiment. It is a perspective schematic diagram which shows the mode of washing | cleaning and drying of the terminal group concerning embodiment.

Explanation of symbols

10 second substrate, 11 second electrode, 12 second routing wiring,
13 Second transfer pad, 20 First substrate, 21 First electrode,
22 first routing wiring, 23 first transfer pad, 24 auxiliary wiring,
25 external connection wiring, 26 FPC, 27 terminal group, 28 external connection terminal,
30 sealing material, 31 liquid crystal, 32 spacer, 33 alignment film, 34 polarizing plate,
35 pixels, 40 driver ICs, 50 display areas, 51 protruding areas,
70 cleaning tank, 71 carry-in port, 72 carry-out port, 73 exhaust port,
74 steam cleaning nozzle, 75 drip nozzle, 76 gas injection nozzle,
78 Panel holding device, 80 liquid film, 100 liquid crystal display panel,
200 backlight unit, 300 liquid crystal display device

Claims (3)

A first substrate, a terminal portion formed on one side of the first substrate, a terminal group formed on the terminal portion, and a sealing material on the first substrate so as to expose the terminal portion. A display panel having a second substrate bonded thereto,
Steam cleaning the terminal group;
Immediately after the vapor cleaning, dropping a liquid onto the terminal group, and forming a liquid film including the dropped liquid and vapor droplets attached to the terminal group by the vapor cleaning;
A step of ejecting the liquid film from the end by moving the liquid film toward the end of the terminal portion in a state of being in contact with the surface of the first substrate by spraying gas onto the liquid film; A method for cleaning a display panel.   The method for cleaning a display panel according to claim 1, wherein, in the step of discharging the liquid film, an injection pressure of a gas to be sprayed is 0.05 kPa to 0.8 kPa.   The method for cleaning a display panel according to claim 1, wherein in the step of forming the liquid film, the dropped liquid is water.

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