JP2008238050A - Movable exhaust gas treating apparatus and exhaust gas treatment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To discharge an exhaust gas evaporated from an oil content removing liquid or the like to the atmosphere after reducing a harmful component in the exhaust gas to a concentration without adversely affecting a human body and cleaning the exhaust gas. <P>SOLUTION: The treating apparatus (12) for a harmful-component-containing exhaust gas is disclosed which comprises: an exhaust gas generation tank (13) for generating the exhaust gas containing the harmful component; a conduit (14) for forcibly feeding the exhaust gas from the exhaust gas generation tank (13); an active carbon tank (15) connected to the conduit (14) and filled with active carbon for absorbing the harmful component in the exhaust gas forcibly fed from the exhaust gas generation tank (13); and an exhaust means (16) for exhausting the exhaust gas whose harmful component is absorbed by the active carbon to the atmosphere. The movable exhaust gas treating apparatus provided with a moving means (17) for making the treating apparatus (12) movable, and the treating method of the harmful-component-containing exhaust gas are also disclosed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention was used for exhaust gas containing harmful components from cleaning agents used for cleaning oil components in cycle piping such as refrigeration cycles, cleaning agents used for cleaning oil components such as electronic components, or rinsing after cleaning. The present invention relates to a treatment apparatus and a treatment method for harmful component-containing exhaust gas such as harmful component-containing exhaust gas from a rinse agent. More specifically, the present invention relates to a harmful component-containing exhaust gas treatment apparatus including a generation tank for harmful component-containing exhaust gas and an activated carbon tank filled with activated carbon for adsorbing the harmful component in the exhaust gas. It is an object of the present invention to provide a mobile exhaust gas treatment apparatus that can be easily moved to a desired location and attached.

  In conventional oil cleaning, fluorine-based cleaning agents are the mainstream, and fluorine-based cleaning agents are often used for pipe cleaning and electronic parts cleaning, but they are harmful to the human body. There are not a lot of things.

  Roughly classified as a cleaning method, after cleaning parts by immersing parts such as electronic parts in a place filled with cleaning liquid in the tank in the cleaning device, the cleaned parts were pulled up from the cleaning liquid and provided in the tank. A method of evaporating the cleaning liquid adhering to the parts by heating the parts with a heater or the like, and the parts cleaned after the parts are immersed in the cleaning liquid in the cleaning tank of the cleaning device for cleaning. Parts that have been lifted and further rinsed by rinsing parts that have been washed in a rinse liquid different from the cleaning liquid in the rinse tank, and then rinsed with a heater or the like provided in the rinse tank Cleaning and drying method (pattern A) of components such as electronic components, such as a method of evaporating rinse liquid adhering to the components by heating When cleaning a cycle pipe such as a refrigeration cycle, the cleaning agent is circulated by pumping the cleaning agent into the pipe with a pump, and then the used cleaning agent is taken out from the pipe after cleaning the pipe. Then, a cleaning method (pattern B) in the cycle piping is used, in which the cleaning agent remaining in the piping, particularly in the piping, is recovered by the high-pressure air flow pressed into the piping and stored in the recovered cleaning liquid tank. .

  In any of these cleaning operations, when the inside of the tank such as the cleaning liquid tank is sealed and the internal pressure increases due to temperature rise or high-pressure air, the cleaning liquid vapor in the tank is decreased. It is necessary to exhaust the air to the atmosphere after reducing the concentration of the cleaning gas, especially for cleaning agents that affect the human body, by installing a local exhaust device etc. The work space, which is a closed space, was exhausted to the atmosphere outside the work space without exhausting harmful components in the cleaning liquid.

  As an example of the cleaning in the conventional refrigeration cycle piping related to the above pattern B, FIG. 1 describes an apparatus comprising a work (refrigeration cycle) (1), a cleaning device (2), and a factory waste duct (3). Yes. In the cleaning operation of the refrigeration cycle (work), a fluorine-based cleaning agent is used and pumped by the pump (5) to remove the adhered oil inside the piping and heat exchanger, etc., and is introduced after cleaning. When the residual cleaning agent in the piping is pumped to the cleaning liquid tank (4) by high-pressure air (6), it is necessary to release the gasified cleaning agent in order to maintain the internal pressure of the cleaning liquid tank (4) within a predetermined range. However, in the case of a cleaning agent that affects the human body, the gasified cleaning agent cannot be discharged into a sealed small work space, and suction and discharge by the exhaust equipment such as the factory waste duct (3) is not possible. It was necessary to go to the atmosphere (7) outside the workplace at the same time.

  As described above, the conventional method has a disadvantage that a large facility such as a local exhaust device must be specially provided, and is released in a sealed work space without a local exhaust device. There was a risk that the worker sucked a large amount of the cleaning agent gas and adversely affected the human body.

  In addition, as a method for removing malodorous components, in [Patent Document 1], in order to efficiently remove malodorous components contained in gas generated from an aeration tank or the like installed in a sewage treatment plant, An apparatus for deodorizing a gas containing a malodorous component, the apparatus being filled with a biological deodorizing carrier, the biological deodorizing carrier comprising a specific bulk containing activated carbon fibers and thermoplastic synthetic fibers. A fiber converging body having a density and a porosity, which is provided with a deodorizing tower filled with a biological deodorizing carrier, and a deodorizing apparatus provided at the upper stage of the aeration tank side wall or at the upper stage of the passage section between the aeration tanks Proposed. However, such devices have the disadvantage that they are large and cannot be moved.

  [Patent Document 2] is a deodorization apparatus that efficiently removes odor components without increasing the scale of the apparatus, and removes excess dust contained in the exhaust gas containing odors from the garbage treatment apparatus. A short-wavelength ultraviolet ray emitted from an ozone generator consisting of an ultraviolet lamp acts on oxygen in the exhaust to generate ozone and activates the photocatalytic filter to provide exhaust. A large amount of OH radicals are generated from the moisture in the inside and the ozone, and the OH radicals decompose the ozone to generate OH radicals. As a result, OH radicals are generated in a chain reaction inside the deodorizing vessel. There has been proposed a deodorizing apparatus in which odor components in exhaust gas are strongly oxidized and deodorized and discharged by a large amount of OH radicals. However, an ultraviolet lamp in such an apparatus cannot purify harmful components in a cleaning agent or the like as in the present application.

  Furthermore, in [Patent Document 3], as a deodorizing apparatus that can efficiently deodorize and obtain satisfactory characteristics, the odorous substance contained in the exhaust gas from the odor generating part (processing part of the garbage processing machine) is stored in the storage part. It has been proposed to decompose and remove odorous substances by dissolving them in the liquid to be electrolyzed. However, the electrolysis in such an apparatus cannot purify harmful components in the cleaning agent as in the present application.

Japanese Patent Laid-Open No. 2006-247440 Japanese Patent Laid-Open No. 2002-143638 Japanese Patent Laid-Open No. 2003-154231

  This invention pays attention to the point of adsorption of activated carbon, and by installing the activated carbon purification device in the exhaust gas containing harmful components such as cleaning solvent from the pressurization tank in the cleaning device main body to the atmosphere, We aim to release harmful substances in the atmosphere after purifying them with a concentration that does not affect the human body.

  The present invention relates to a toxic agent-containing exhaust gas from a cleaning agent used for cleaning in a cycle pipe such as a refrigeration cycle, a cleaning agent used for cleaning electronic components, etc., or a rinsing agent used for rinsing after the cleaning A device for treating harmful component-containing exhaust gas, etc. from a hazardous component-containing exhaust gas treatment device comprising a generation tank for harmful component-containing exhaust gas and an activated carbon tank filled with activated carbon for adsorbing harmful components in the exhaust gas Therefore, the present invention provides a mobile exhaust gas treatment apparatus that can be easily moved and attached to a desired place, and a method for treating harmful component-containing exhaust gas for treating such harmful component-containing exhaust gas.

  According to a first aspect of the present invention, according to claim 1, an exhaust gas generation tank (13) for generating exhaust gas containing harmful components, a conduit (14) connected to the exhaust gas generation tank (13), and a conduit ( 14) is connected, and the activated carbon tank (15) filled with activated carbon for adsorbing the harmful components in the exhaust gas pumped from the exhaust gas generation tank (13) via the conduit (14), and the activated carbon contains harmful components. A toxic component-containing exhaust gas treatment device (12) including an exhaust means (16) for exhausting the exhaust gas subjected to the adsorption treatment to the atmosphere, and a moving means (12) for making the treatment device (12) movable 17) is a mobile exhaust gas treatment device.

  According to a second aspect of the present invention, according to claim 2, a conduit (14) for connecting to an exhaust gas generation tank (13) for generating exhaust gas containing harmful components, and a conduit ( 14) an activated carbon tank (15) filled with activated carbon for adsorbing the harmful components in the exhaust gas pumped through the exhaust gas, and an exhaust means for exhausting the exhaust gas having the harmful components adsorbed by the activated carbon to the atmosphere ( 16) is a mobile exhaust gas processing apparatus including a moving means for enabling movement of the processing apparatus (18).

  According to claim 10 of the third aspect of the present invention, there is provided an exhaust gas generation step for generating exhaust gas containing harmful components in the exhaust gas generation tank (13), and an exhaust gas pressure feed for pumping the exhaust gas from the exhaust gas generation tank (13). An adsorption process for adsorbing harmful components by an activated carbon tank (15) filled with activated carbon for adsorbing harmful components in the pumped exhaust gas, and an exhaust process for exhausting the exhaust gas subjected to the adsorption treatment to the atmosphere. A harmful component-containing exhaust gas treatment method including an exhaust gas generation tank (13) and an activated carbon tank (15) is moved and installed at a desired location to generate exhaust gas. This is a method for treating exhaust gas containing harmful components, which treats exhaust gas containing harmful components from the tank (13).

  According to these first to third aspects of the present invention, a small-scale harmful component-containing exhaust gas treatment device can be provided, and the exhaust gas treatment device does not require an expensive large-sized exhaust duct facility and has a simple mechanism. It is small and inexpensive. The hazardous component-containing exhaust gas treatment device can be easily moved and installed at a desired location, the activated carbon tank itself can be moved, and the activated carbon tank is attached to the hazardous component-containing exhaust gas generation tank. It is also movable as a unit.

  In other words, a deodorizing tank, which is an activated carbon tank for adsorption treatment of harmful component-containing exhaust gas, is attached to the exhaust part of the harmful component-containing exhaust gas generation device (apparatus), and the harmful component-containing exhaust gas discharged from the exhaust gas generation device is attached. By purifying by passing (contacting) the activated carbon tank, the safety of the working environment can be maintained even if the purified exhaust gas is released to the atmosphere in the working environment. In addition, since the deodorizing tank (activated carbon tank) is built in the generation device of the harmful component-containing exhaust gas, large facilities such as an exhaust duct and an exhaust duct are unnecessary, so that the size can be reduced and the operability is excellent. And since the exhaust gas is pumped from the exhaust gas generation tank to the activated carbon tank using the high pressure on the exhaust gas generation tank side, no power such as a fan for that purpose is required, so energy saving can be realized.

  As a preferable aspect in the first and second aspects of the present invention, according to claim 3, there is a mobile exhaust gas treatment apparatus in which the harmful component is a gas of a fluorinated solvent. Since such a fluorinated solvent can be frequently used as a cleaning agent or a rinsing agent, the mobile exhaust gas treatment apparatus of the present invention has an increased chance of being advantageously used, which is preferable.

  Furthermore, as a preferable aspect in the first and second aspects of the present invention, according to claim 4, there is a mobile exhaust gas treatment device in which the activated carbon tank is a replaceable activated carbon cartridge. According to such an aspect, replacement | exchange becomes easy by putting activated carbon in the bag with air permeability.

  Furthermore, as a preferred aspect of the first and second aspects of the present invention, according to claim 5, there is provided a mobile exhaust gas treatment device further comprising a time meter for detecting the operation time of the treatment device (12). It is done. According to this aspect, it becomes easy to evaluate the degree of adsorption in the activated carbon tank (15) and predict the replacement time of the activated carbon.

  As a more preferable aspect in this aspect, according to claim 6, the exhaust gas characteristic detecting means for detecting the characteristic of the exhaust gas in the middle of the conduit (14), the detection result by the exhaust gas characteristic detecting means, and the processing detected by the time meter There is a mobile exhaust gas treatment device further provided with means for calculating an integrated adsorption amount of harmful components on activated carbon from the operation time of the device (12). According to this aspect, it becomes easy to evaluate the degree of adsorption in the activated carbon tank (15) more finely and more accurately predict the replacement time of the activated carbon.

  Furthermore, as a preferable aspect in the first and second aspects of the present invention, according to claim 7, the exhaust gas generation tank (13) uses a cleaning liquid containing a fluorinated solvent to circulate the inside of the cycle pipe (19). The cleaning liquid remaining in the cycle pipe after cleaning is stored under pressure by the cleaning liquid pumped from the cycle pipe, and the exhaust gas containing the gas of the fluorinated solvent is sent to the activated carbon tank (15) through the conduit (14). There is a mobile exhaust gas treatment device that reduces the pressure in the exhaust gas generation tank (13) by pumping. According to this aspect, exhaust gas can be safely purified by releasing the internal pressure in stages.

  Furthermore, as a preferable aspect in the first and second aspects of the present invention, according to claim 8, the exhaust gas generation tank is provided with a fluorine-based solvent for substantially removing dirt adhered to the object to be cleaned (40). A cleaning liquid reservoir (43) for storing the cleaning liquid, a means (44) for lifting the object to be cleaned after immersing the object to be cleaned in the cleaning liquid, and a means for heating the object to be cleaned. (47), the exhaust gas containing the fluorine-based solvent gas is generated by heating and evaporating the cleaning liquid adhering to the pulled object to be cleaned by the heating means. Is mentioned. According to this aspect, it becomes easy to treat the exhaust gas from the cleaning device for the object to be cleaned.

  Furthermore, as a preferable aspect in the first and second aspects of the present invention, according to claim 9, the exhaust gas generation tank is cleaned with a fluorinated solvent after the dirt adhering to the cleaned object is cleaned with a cleaning agent. It includes means for heating the cleaning object, and the fluorine-based solvent adhering to the rinsed object to be cleaned is heated and evaporated by the heating means to generate exhaust gas containing a fluorine-based solvent gas. And a mobile exhaust gas treatment device. According to this aspect, it becomes easy to process the exhaust gas from the cleaning / rinsing apparatus for the object to be cleaned.

  As a preferable aspect in the third aspect of the present invention, according to claim 11, there is an exhaust gas treatment method in which a harmful component is a gas of a fluorinated solvent, and according to claim 12, an activated carbon tank. There is an exhaust gas treatment method in which (13) is a replaceable activated carbon cartridge. Furthermore, as a preferable aspect in the second aspect of the present invention, according to claim 13, there is provided an exhaust gas processing method which further includes detecting the operation time of the processing device (12) by a time meter. 14, the step of detecting the characteristics of the exhaust gas while the exhaust gas is being received by pumping by the detecting means, and the detection result by the detecting means and the operation time of the processing device (12) detected by the time meter, activated carbon of harmful components An exhaust gas treatment method that further includes a step of calculating the integrated adsorption amount by the calculation means.

  According to these aspects, the same effects as those of the mobile exhaust gas treatment apparatus according to the first aspect of the present invention can be obtained.

  Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings as necessary. In addition, the code | symbol in the parenthesis attached | subjected to each said means is an example which shows the correspondence of the specific means described in the aspect mentioned later.

  FIG. 2 schematically shows an apparatus for treating exhaust gas containing harmful components from a cleaning agent used for cleaning the inside of a cycle pipe, which is a preferred embodiment of the mobile exhaust gas treatment apparatus of the present invention. That is, FIG. 2 shows an apparatus for treating harmful component-containing exhaust gas in which the cleaning agent is adsorbed and purified by activated carbon so that exhaust can be performed without using a large exhaust system.

  In more detail, in FIG. 2, a device comprising a work (refrigeration cycle) (11) and a harmful component-containing exhaust gas treatment device (12) attached thereto via connecting means 24, 25 is described. In cleaning work of the refrigeration cycle (work), a fluorine-based solvent harmful to the human body is pumped and circulated with a pump (20), and the oil and the like adhering to the inside of the piping, heat exchanger, etc. (19) is removed. After that, the cleaning liquid remaining in the piping or the like is pumped to the cleaning liquid tank (13), which is an exhaust gas generation tank, by the high pressure air (21) introduced from the high pressure air source, and the cleaning liquid (26) of the oil-containing fluorine-based solvent is added. It is stored in the cleaning liquid tank (13) under pressure, and the exhaust gas containing the vapor of the fluorinated solvent in the cleaning liquid tank (13) is pumped to the activated carbon tank (15) through the conduit (14) and filled into the activated carbon tank (15). Activated carbon The exhaust gas, which is obtained by adsorbing and removing the fluorine-based solvent vapor and is harmless to the human body after the purification treatment, is discharged from the exhaust port (16) as the exhaust means to the atmosphere (23) in the work place. What is made is described. In the apparatus shown in FIG. 2, the toxic component-containing exhaust gas treatment device (12) before being attached to the work (refrigeration cycle) (11) via the connecting means 24, 25 is moved by a moving means as desired. A caster (17) is also described. In addition, a drain discharge valve is provided in the cleaning liquid tank (13), which is an exhaust gas generation tank, for discharging residual cleaning liquid that has not evaporated.

  Thus, in the apparatus shown in FIG. 2, the cleaning liquid remaining in the cycle pipe after cleaning the inside of the cycle pipe (19) using the cleaning liquid containing the fluorine-based solvent is pumped from the cycle pipe. The stored cleaning liquid is stored under pressure in the exhaust gas generation tank (13), and the exhaust gas containing a fluorine-based solvent gas is pumped to the activated carbon tank (15) through the conduit (14) without using any other air supply means. By doing this, the internal force of the exhaust gas generation tank (13) is reduced to a predetermined range, and the fluorinated solvent can be evaporated from the cleaning liquid stored in the exhaust gas generation tank (13).

  FIG. 2 shows, as one aspect of the mobile exhaust gas treatment apparatus of the present invention, a piping / heat exchanger in which a fluorinated solvent harmful to the human body is pumped and circulated by a pump in a refrigeration cycle (work) cleaning operation. A conduit connected to a cleaning liquid tank (13), which is an exhaust gas generation tank, removes the cleaning liquid remaining in the piping or the like by high-pressure air introduced from a high-pressure air source after the oil and the like adhering to the inside is removed. 14), an activated carbon tank (15) in which exhaust gas containing the vapor of the oil-containing fluorine-based solvent is pumped from the cleaning liquid tank (13) via the conduit (14), and activated carbon filled in the activated carbon tank (15) An exhaust gas treatment apparatus provided with an exhaust port (16) as exhaust means for exhaust gas made of air harmless to a purified human body obtained by adsorbing and removing vapors of a system solvent for moving the exhaust gas Cass of Moving means (not shown) moving type exhaust gas treatment apparatus provided with the over such are also described. From such a mobile exhaust gas treatment device, exhaust gas composed of air that is harmless to the human body that has been subjected to purification treatment is released to the atmosphere (23) in the workplace.

  The moving means used in the mobile exhaust gas treatment apparatus of the present invention may be any means as long as the exhaust gas treatment apparatus can be easily moved. Examples thereof include casters and air tires, and casters with stoppers. Practically preferred.

  Also, FIG. 3 schematically shows an apparatus for treating an exhaust gas containing harmful components from a cleaning agent used for cleaning in the cycle pipe, similar to FIG. In this case, after cleaning, the cleaning liquid remaining in the piping (33) of the refrigeration cycle is pumped with air from the high-pressure air supply unit (35), and the residual cleaning liquid is supplied to the cleaning liquid tank (32) which is an exhaust gas generation tank. In order to purge the internal pressure of the cleaning gas collected and then stored in the cleaning liquid tank (32), the exhaust gas containing harmful components is passed through the activated carbon in the deodorizing device (31), which is an activated carbon tank, and contacted and purified. The treated exhaust gas is released to the atmosphere (36) in the workplace.

  FIG. 4 schematically shows an apparatus for treating exhaust gas containing harmful components from a cleaning liquid used for cleaning electronic parts and the like, which is another preferred embodiment of the mobile exhaust gas processing apparatus of the present invention. That is, FIG. 4 shows a cleaning liquid storage part (43) for storing a cleaning liquid containing a fluorine-based solvent for removing dirt adhering to the object to be cleaned (40), and a target after being immersed and cleaned in the cleaning liquid. A means (44) for pulling up the cleaning object from the cleaning liquid and a heater (47) for heating the object to be cleaned are heated and heated by the heater to evaporate the cleaning liquid adhering to the object to be cleaned. In order to purge the internal pressure of the exhaust gas generation tank (42) for generating exhaust gas containing solvent gas and the exhaust gas generation tank (42) heated and evaporated by the heater to become high pressure, the exhaust gas generation tank is connected via a conduit (49). An exhaust gas treatment apparatus including an activated carbon tank (41) for adsorbing and purifying exhaust gas pumped from (42) is described. As a result, the exhaust gas that has been purified and made harmless to the human body is discharged from the opening of the activated carbon tank (41) to the atmosphere (50) at the work site. In the figure, an arrow (45) schematically shows that exhaust gas is generated by evaporation of the cleaning liquid, and the moving means of the apparatus is omitted.

  As another preferred embodiment of the mobile exhaust gas treatment apparatus of the present invention, the object to be cleaned rinsed with a fluorinated solvent is washed in the same manner as described above after the dirt adhering to the object to be cleaned is cleaned with a cleaning agent. An exhaust gas generation tank including a heater for heating and generating exhaust gas containing a fluorine-based solvent gas by heating and evaporating the fluorine-based solvent adhering to the rinsed object to be cleaned by the heater, and the same as described above Although there is a mobile exhaust gas treatment device equipped with an activated carbon tank, the details are similar to those described above, and the description thereof is omitted.

  FIG. 5 shows a preferred example of an activated carbon tank used in the mobile exhaust gas treatment apparatus of the present invention. That is, the activated carbon tank of FIG. 5 is provided with “inlet” and “exit” of exhaust gas in the tank, activated carbon is used as an adsorbent, and the upper part of the tank has a lid so that the activated carbon can be replaced. The activated carbon is placed in a breathable bag in consideration of the maintenance of the activated carbon inside the tank, and a drain is provided with a cleaning liquid reservoir at the bottom of the tank. As the activated carbon tank used in the mobile exhaust gas treatment apparatus of the present invention, a cartridge type is preferable, and the shape of the tank includes a cylindrical shape having a cross section of a circle or a quadrangle. To a cylindrical shape is preferable.

  The time meter for detecting the operation time of the treatment device (12) used in the preferred embodiment of the mobile exhaust gas treatment device or the harmful component-containing exhaust gas treatment method of the present invention is the adsorption amount of the activated carbon tank (15). Anything that can be used for grasping and predicting the replacement time of activated carbon may be used, and specifically, a timer or the like may be used. For example, in FIG. 2, such a time meter can detect the accumulated operation time of the pump 20 used when cleaning the inside of the cycle pipe (19) as detection of the operation time of the processing device (12). It may be something like this.

  More specific usage modes of the hour meter include exhaust gas characteristics detecting means for detecting characteristics of exhaust gas in the middle of the conduit (14), for example, flow rate, pressure, concentration of harmful components, etc., and detection results by the exhaust gas characteristics detecting means, There is a mobile exhaust gas treatment device provided with means for calculating an integrated adsorption amount of harmful components to activated carbon from the operation time of the treatment device (12) detected by the hour meter.

  As the activated carbon tank used in the present invention, a cartridge type is preferable, and the shape of the tank includes a cylindrical shape having a circular or square cross section. preferable.

  The activated carbon used in the present invention is not particularly limited, but preferred examples include Kuraray Coal manufactured by Kuraray Chemical Co., Ltd. The activated carbon is preferably crushed, granulated, rod-shaped (columnar), etc., particularly rod-shaped (columnar) from the viewpoint of maintenance, and its particle size is preferably 4 to 8 mesh. 4-6 mesh is particularly preferable in terms of rate.

  As a harmful component in the present invention, a compound that is harmful to the human body and that is preferable for the working environment of a worker or the like that is used for refrigeration cycle processing, cleaning of electronic parts, etc. and that performs the work, and that is required to be purified. Specifically, gas such as a fluorinated solvent is exemplified, and among them, a fluorinated solvent is exemplified as one that is used more frequently and requires purification.

  Examples of the fluorine-based solvent include hydrofluorocarbons (HFCs) and hydrofluoroethers (HFEs). Among them, AE-3000 manufactured by Asahi Glass Co., Ltd. can be cited as one that requires further purification.

As hydrofluorocarbons (HFCs), those containing 3 to 8 carbon atoms, hydrogen and fluorine are preferred. Examples of hydrofluorocarbon (HFC) _{such, CH 2 FCH 2 FCHF 2,} CH 2 FCF 2 CFH 2 , etc. _{C 3 H n F 8n: CHF} 2 (CF 2) 2 CF 2 H, CF 3 CF 2 CH 2 C ₄ H _n F _10n such as CH ₂ F and octafluorocyclobutane: C ₅ H _n F _12n such as CF ₃ CHFCHFCF ₂ CF ₃ , CH ₃ CHFCH ₂ CF ₂ CF ₃ , CF ₃ CH ₂ CF ₂ CH ₂ CF ₃ : CHF ₂ (CF ₂ ) ₄ CF ₂ H, CF ₃ CF ₂ CH ₂ CH ₂ CF ₂ CF ₃ , CH ₃ CH ₂ CH ₂ CF ₂ CF ₂ CF ₃ etc. C ₆ H _n F _14n : CH ₃ CH ₂ CH ₂ CHFCF ₂ CF ₂ CF ₃ , CH ₃ CHFCH ₂ CF ₂ CHFCF ₂ CF ₃ , CH ₃ (CF ₂ ) ₅ CH ₃ etc. C ₇ H _n F _16n : CH ₃ CH ₂ CH ₂ CH ₂ CF ₂ CF _{2 Examples} include C ₈ H _n F _18n such as CF ₂ CF ₃ and CH ₃ (CF ₂ ) ₆ CH ₃ . Among them, preferred is CF ₃ CFHCCFCF ₂ CF ₃ having a linear or branched molecular chain, and octafluorocyclobutane is also preferred.

Hydrofluoroethers (HFEs) refer to fluorinated ethers in which some of the hydrogen atoms in the ethers are replaced with fluorine atoms and do not contain chlorine atoms. Examples of such hydrofluoroethers (HFE) include CF ₃ CF ₂ CF ₂ CF ₂ OCH ₃ , CF ₃ CF ₂ CF ₂ CF ₂ OCH ₂ CH ₃ , CF ₃ CF ₂ CF ₂ OCCFHCF ₃ , 1,1,1,2,3,3-hexafluoro-2-heptafluoropropoxy-3- (1,2,2,2-tetrafluoroethoxy) -propane.

  In the mobile exhaust gas treatment apparatus or the exhaust gas treatment method containing harmful components of the present invention, the operating conditions of the exhaust gas generation tank (13) are not particularly limited as long as they are within a range where predetermined exhaust gas treatment can be performed, Preferably, the temperature is 10 to 28 ° C, and particularly preferably 20 to 25 ° C. The pressure in the exhaust gas generation tank (13) can be appropriately determined depending on the generated exhaust gas, temperature, and the like. Further, the operating condition of the activated carbon tank (15) is not particularly limited as long as it is within a range in which a predetermined exhaust gas adsorption treatment can be performed, but the temperature is preferably 10 to 28 ° C, and particularly preferably the temperature. It is 20-25 degreeC. The pressure in the activated carbon tank (15) can be determined as appropriate so that the exhaust gas flows smoothly in relation to the pressure in the exhaust gas generation tank (13), but is normally atmospheric pressure in the exhaust means (16).

  As described above, the mobile exhaust gas treatment device of the present invention can be attached to the exhaust part of various facilities, and by changing the type of activated carbon, it is possible to purify odors other than cleaning agents. Since a certain deodorizing device part does not require power, it is less expensive and less power-consuming than a deodorizing device that is electrically decomposed, and the deodorizing device part mechanism is simple, and the manufacturing cost is low. Even in a device in which the internal pressure of the exhaust gas generator does not increase, it can be used by attaching a blower or a fan before and after the deodorizing device.

  Furthermore, the mobile exhaust gas treatment device of the invention does not require any power, and the main body is compact, so it can be mounted on various facilities and does not require a special local exhaust device, so it can be moved. Therefore, it is possible to use activated carbon as a catalyst, purify odor components, and exhaust to the atmosphere.

  The present invention is not limited in any way by specific aspects such as the above-described or illustrated embodiments.

It is the schematic diagram which showed the example of the washing | cleaning in the conventional refrigeration cycle piping. It is the schematic diagram which illustrated the harmful | toxic component containing waste gas processing apparatus from the washing | cleaning liquid used for washing | cleaning in cycle piping in this invention. It is the schematic diagram which illustrated the processing apparatus of the harmful | toxic component containing waste gas from the cleaning agent used for the washing | cleaning in cycle piping in this invention. It is the schematic diagram which illustrated the processing apparatus of the hazardous | toxic component containing waste gas from the washing | cleaning liquid used for washing | cleaning of electronic components etc. in this invention. It is the figure which illustrated the activated carbon tank used in this invention.

Explanation of symbols

1 Workpiece (refrigeration cycle)
2 Cleaning device 3 Factory exhaust duct 4 Cleaning fluid tank 11 Workpiece (refrigeration cycle)
12 Exhaust gas treatment device 13 Exhaust gas generation tank (cleaning liquid tank)
14 Conduit 15 Activated carbon tank 16 Exhaust port 17 Moving means (Caster)
19 Piping and heat exchanger 31 Activated carbon tank (deodorization equipment)
32 Exhaust gas generation tank (cleaning liquid tank)
33 Piping etc. 41 Activated carbon tank 42 Exhaust gas generation tank 43 Cleaning liquid storage part 44 Lifting means 47 Heating means

Claims (14)

An exhaust gas generation tank (13) for generating exhaust gas containing harmful components,
A conduit (14) connected to the exhaust gas generation tank (13),
It is connected to the exhaust gas generation tank (13) through the conduit (14), and adsorbs the harmful components in the exhaust gas pumped from the exhaust gas generation tank (13) through the conduit (14). Activated carbon tank (15) filled with activated carbon for exhaust, and exhaust means (16) for exhausting the exhaust gas having the harmful components adsorbed by the activated carbon to the atmosphere
A toxic component-containing exhaust gas treatment apparatus (12) comprising: a mobile exhaust gas treatment apparatus comprising a moving means (17) for making the treatment apparatus (12) movable. A conduit (14) for connecting to an exhaust gas generation tank (13) for generating exhaust gas containing harmful components,
An activated carbon tank (15) filled with activated carbon for adsorbing the harmful components in the exhaust gas pumped from the exhaust gas generation tank (13) through the conduit (14), and the harmful components are adsorbed by the activated carbon. Exhaust means (16) for exhausting the treated exhaust gas to the atmosphere
A toxic component-containing exhaust gas treatment apparatus (18) provided with a mobile exhaust gas treatment apparatus comprising a moving means for making the treatment apparatus (18) movable.   The mobile exhaust gas treatment apparatus according to claim 1 or 2, wherein the harmful component is a gas of a fluorinated solvent.   The mobile exhaust gas treatment apparatus according to any one of claims 1 to 3, wherein the activated carbon tank is a replaceable activated carbon cartridge.   The mobile exhaust gas treatment device according to any one of claims 1 to 4, further comprising a time meter for detecting an operation time of the treatment device (12).   From the exhaust gas characteristic detection means for detecting the characteristic of the exhaust gas in the middle of the conduit (14), the detection result by the exhaust gas characteristic detection means, and the operation time of the processing device (12) detected by the time meter, the harmful component The mobile exhaust gas treatment device according to claim 5, further comprising means for calculating an integrated adsorption amount of the activated carbon on the activated carbon.   After the exhaust gas generation tank (13) cleans the inside of the cycle pipe (19) using the cleaning liquid containing the fluorinated solvent, the cleaning liquid remaining in the cycle pipe is pumped from the cycle pipe. The cleaning liquid is stored under pressure, and the exhaust gas containing the fluorinated solvent gas is pumped to the activated carbon tank (15) through the conduit (14), whereby the pressure in the exhaust gas generation tank (13) is stored. The mobile exhaust gas treatment device according to any one of claims 3 to 6, wherein the exhaust gas treatment device according to any one of claims 3 to 6 is reduced.   The exhaust gas generation tank stores a cleaning liquid storage part (43) for storing a cleaning liquid containing a fluorine-based solvent for substantially removing dirt adhered to the object to be cleaned (40), and the object to be cleaned in the cleaning liquid. A means (44) for lifting the object to be cleaned after immersion and cleaning from the cleaning liquid; and a means (47) for heating the object to be cleaned that has been pulled up, and the means attached to the object to be cleaned that has been lifted The mobile exhaust gas treatment apparatus according to any one of claims 3 to 6, wherein exhaust gas containing gas of the fluorinated solvent is generated by heating and evaporating the cleaning liquid by the heating means.   The exhaust gas generation tank includes means for heating the object to be cleaned rinsed with a fluorine-based solvent after cleaning the dirt adhering to the object to be cleaned with a cleaning agent, and the fluorine-based material adhering to the rinsed object to be cleaned The mobile exhaust gas treatment apparatus according to any one of claims 3 to 6, wherein the exhaust gas containing the gas of the fluorinated solvent is generated by heating and evaporating the solvent by the heating means. An exhaust gas generation step for generating exhaust gas containing harmful components in the exhaust gas generation tank (13);
An exhaust gas pumping step of pumping the exhaust gas from the exhaust gas generation tank (13);
An adsorption step of adsorbing the harmful component by an activated carbon tank (15) filled with activated carbon for adsorbing the harmful component in the exhaust gas sent under pressure, and an exhaust step of exhausting the adsorption-treated exhaust gas to the atmosphere A harmful component-containing exhaust gas treatment device (12) including the exhaust gas generation tank (13) and the activated carbon tank (15) is moved and installed at a desired location. A method for treating exhaust gas containing harmful components, wherein the exhaust gas containing harmful components from the exhaust gas generation tank (13) is treated.   The exhaust gas treatment method according to claim 10, wherein the harmful component is a fluorine-based solvent gas.   The exhaust gas treatment method according to claim 10 or 11, wherein the activated carbon tank (13) is a replaceable activated carbon cartridge.   The exhaust gas treatment method according to any one of claims 10 to 12, further comprising detecting an operation time of the treatment device (12) by a time meter.   A step of detecting characteristics of the exhaust gas in the middle of the pumping of the exhaust gas, and a detection result of the detection means and an operation time of the processing device (12) detected by the time meter, The exhaust gas treatment method according to claim 13, further comprising a step of calculating an integrated adsorption amount by the calculation means.

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