JP2008226859A - Method of manufacturing organic electroluminescent device and organic electroluminescent device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL device, the organic EL device and electronic equipment, capable of providing a sufficient light emitting characteristic and the light emitting service life, and capable of restraining generation of a non-light emitting area. <P>SOLUTION: This manufacturing method of the organic electroluminescent device having a plurality of first electrodes, a light emitting function layer arranged in response to a forming position of the first electrode, and a second electrode for covering the light emitting function layer on a base board 20, includes a shock absorbing layer forming process of covering the second electrode and forming a shock absorbing layer 210, and a process of forming a gas barrier layer 30 covering the shock absorbing layer 210, and is characterized in that the shock absorbing layer forming process includes an applying process of applying an applying material having a monomer/oligomer material and a hardening agent without using a solvent in a vacuum atmosphere, and a thermosetting process of forming the shock absorbing layer by hardening the applying material. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a method for manufacturing an organic electroluminescence device and an organic electroluminescence device.

In recent years, an organic electroluminescence device (hereinafter referred to as an organic EL device) having a light emitting functional layer is known. Such an organic EL device generally has a configuration in which an organic light emitting layer is provided between an inorganic anode and an inorganic cathode. Furthermore, in order to improve the hole injection property and the electron injection property, an organic hole injection layer is disposed between the inorganic anode and the organic light emitting layer, or an electron injection layer is disposed between the organic light emitting layer and the inorganic cathode. A proposed configuration has been proposed.

Here, an electron injection layer having material characteristics that easily emit electrons easily reacts with moisture present in the atmosphere, and reacts with water to reduce the electron injection effect, forming a portion that does not emit light called dark spots. As a result, the lifetime of the light emitting element is shortened. Therefore, in the field of such an organic EL device, improvement in durability against moisture, oxygen, and the like is a problem.
In order to solve such a problem, a method of sealing moisture or the like by attaching a glass or metal lid to a substrate of a display device has been generally employed. However, as the display becomes larger and thinner / lighter, it is necessary to switch from a hollow structure to a solid structure in order to maintain panel strength that can withstand external stress. In addition, it has been proposed to use a top emission structure that emits light from the opposite side of the circuit board in order to sufficiently secure the area of the TFT and wiring circuit as the size increases. In order to achieve these requirements, the sealing structure must be transparent, lightweight, and have a thin structure with excellent strength resistance, and a structure that provides moisture-proof performance even when the desiccant is removed. Is required.

Therefore, in recent years, in order to cope with an increase in size and thickness of a display device, a thin film of silicon nitride, silicon oxide, ceramics, etc. that is transparent and has excellent gas barrier properties on a light emitting element is formed by a high-density plasma deposition method ( For example, ion plating, ECR plasma sputtering, ECR plasma C
A technique called thin film sealing for forming a film by VD, surface wave plasma CVD, ICP-CVD, or the like is used (for example, Patent Documents 1 to 4). By forming a gas barrier layer using such a technique, it is possible to form a thin film while completely blocking moisture.

By the way, these gas barrier layers are high density and very hard inorganic films in order to provide moisture barrier properties. For this reason, if there are uneven portions or steep steps on the surface of the thin film, external stress is concentrated, and there is a risk that cracks, peeling, or the like may occur. Therefore, in order to suppress cracks and peeling due to such stress, it was necessary to improve the adhesion with the gas barrier layer and to place a buffer layer in contact with the gas barrier layer to realize flattening. . As such a buffer layer, a material having flatness and flexibility and a property of absorbing stress is preferable, and an organic polymer material is preferable.

JP-A-9-185994 Japanese Patent Laid-Open No. 2001-284041 JP 2000-223264 A JP 2003-17244 A

However, even if the present inventors adopt the technique described in the above patent document,
It was confirmed that even when the buffer layer was disposed, sufficient light emission characteristics and light emission lifetime could not be obtained, and a non-light emitting region was generated. In particular, in order to ensure the flatness of the buffer layer, it is not possible to press and spread it by applying a load while touching the substrate like a bonding adhesive. A coating process is required, which is extremely important for improving the quality of the gas barrier layer.
The present invention has been made in view of the above-described circumstances, and provides an organic EL device manufacturing method, an organic EL device, and an electronic apparatus that can obtain sufficient light emission characteristics and light emission lifetime and can suppress the occurrence of a non-light emitting region. The purpose is to do.

The inventors of the present invention have conceived the present invention by paying attention to a coating formation method of the buffer layer.
More specifically, as a method for coating and forming the buffer layer, it is common to create a liquid material in which a solvent is mixed with an organic material such as acrylic and then apply and form the liquid material. As a result, the high-viscosity organic material is reduced in viscosity, and by applying and forming the liquid material, uneven portions such as banks are buried, and the surface of the buffer layer is formed flat and uniform. Then, by forming a gas barrier layer on the upper side of such a buffer layer, the thin film is formed flat and uniformly.
However, the present inventors have found that in such a buffer layer coating and forming method, the solvent remains in the buffer layer under low temperature process conditions in which each organic functional layer represented by the light emitting functional layer does not deteriorate. I found it. Furthermore, the present inventors have confirmed that the solvent cannot be completely removed from the buffer layer even if the solvent is removed by sufficient drying treatment after the buffer layer is formed. And it discovered that the solvent which remained in the buffer layer penetrate | invaded into a light emission functional layer, and the fall of the light emission characteristic of a light emission functional layer, shortening of a light emission lifetime, and generation | occurrence | production of a non-light emission area | region were invited. .

In addition, the present inventors have examined the case where an organic material is applied and formed without using a solvent, but a high-viscosity organic material is not only more difficult to flatten the surface than a low-viscosity one. It was confirmed that when the intrusion of the air that is sometimes involved or a high-viscosity organic material is embedded in an uneven portion such as a partition wall, bubbles are likely to be mixed in the vicinity of the interface when the uneven portion is covered. It was also confirmed that when the bubbles escape from the surface of the organic material, a crater-like application missing portion formed at the time of bubble destruction was formed, and the shape remained. Therefore, in high viscosity organic materials,
It is difficult to planarize and a buffer layer having a surface of a coating omission part is formed, and the gas barrier layer becomes uneven according to this, and it is difficult to form the gas barrier layer flatly and uniformly. I found it. In this case, the gas barrier layer has a problem that concentration of external stress, cracks, peeling, and the like are likely to occur.
In addition, the present inventors also have a risk that the bubble gas component remaining in the buffer layer may enter the light emitting functional layer, and the light emitting functional layer may have reduced light emitting characteristics, shortened light emitting life, non-light emitting region, etc. It has been found that the occurrence of

In addition, the present inventors show that depending on the combination of the material constituting the buffer layer and the material constituting the electron injection layer, the low-viscosity material may be eluted, causing dark spots in the electron injection layer. I found it.
Therefore, the present inventors have arrived at the present invention having the following means based on the above.

That is, in the method for manufacturing an organic EL device of the present invention, a plurality of first electrodes, a light emitting functional layer disposed corresponding to a position where the first electrode is formed, and a first covering the light emitting functional layer. A buffer layer forming step of covering the second electrode and forming a buffer layer; and a step of forming a gas barrier layer covering the buffer layer. The layer forming step includes a coating step of coating a coating material having a monomer / oligomer material and a curing agent in a vacuum atmosphere without using a solvent, and a thermosetting step of curing the coating material to form the buffer layer. It is characterized by including.

If it does in this way, the monomer / oligomer material and hardener which were apply | coated by the application | coating process can be hardened by a thermosetting process, and a buffer layer can be formed.
Here, since the coating process is performed in a vacuum atmosphere, the coating process is performed in an atmosphere from which moisture and oxygen are removed, and it is possible to suppress the penetration of moisture and oxygen into the buffer layer. it can. Moreover, since the said application | coating process is performed without using a solvent, a solvent does not remain in a buffer layer. Therefore, almost no moisture or oxygen remains in the buffer layer, and there are no solvent molecules, so that the emission characteristics deteriorate due to the penetration of these into the light emitting functional layer and the light emission lifetime is short. Generation of non-light emitting regions and the like can be suppressed.
In the thermosetting step, the monomer / oligomer material is cured by a curing agent, so that the monomer or oligomer is cross-linked and a buffer layer made of a high molecular organic material (polymer) can be formed. Moreover, as a thermosetting process, the thermosetting method by heat processing is preferable. In this way, not only can the coating material be cured to form the buffer layer, but also the peripheral portion of the buffer layer can be melted (softened) by heat to form an inclined portion at the side edge of the buffer layer. . Thereby, since the gas barrier layer formed above the buffer layer is gently formed following the shape of the buffer layer, the gas barrier property can be improved.
Further, the total thickness of the gas barrier layer and the buffer layer laminated by such a manufacturing method is as follows:
It can be made thinner than before. Therefore, in the organic EL device of the present invention, a thin film sealing structure can be realized without increasing the film thickness.
In the present invention, as the light emitting functional layer, either a low molecular system or a high molecular system can be adopted.

Further, in the method for manufacturing the organic EL device of the present invention, a step of forming a partition having a plurality of openings corresponding to the formation position of the first electrode, and the light emitting functional layer in each of the plurality of openings. And forming a second electrode that covers the partition and the light emitting functional layer, and the buffer layer forming step forms the buffer layer so as to cover the second electrode and the partition. It is characterized by.
According to the present invention, since the partition wall having the opening is formed, it is possible to form a polymer light emitting functional layer in the opening by a wet film forming method such as a droplet discharge method. Therefore, a polymer light emitting functional layer can be applied and formed only in the opening. Therefore, not only the above effects can be obtained, but also the light emitting functional layer can be formed by a wet film forming method.

Moreover, in the manufacturing method of the organic EL device of the present invention, in the buffer layer forming step, the coating step uses a screen printing method. The screen printing method includes a step of dropping the coating material onto the substrate through a mask, and the substrate and the coating unit while pressing the coating material against the substrate by a coating unit. Relative movement is performed, and a step of forming a coating film made of the coating material on the substrate and a step of peeling the mask from the coating film are sequentially performed.

In this way, the screen printing method is performed in a vacuum atmosphere as described above, and the coating material can be applied and formed on the substrate by this method. Accordingly, it is possible to suppress damage to the light emitting functional layer as much as possible by taking in atmospheric oxygen and moisture involved during coating, and to prevent moisture from being adsorbed onto the substrate surface before coating.
In addition, by using a screen printing method, it is possible to ensure a stable film thickness and to flatten the buffer layer by removing bubbles, and further, by using a screen mesh and a mask made of an emulsion, a predetermined thickness can be obtained. The accuracy and flexibility of the patterning shape can be further increased.
Further, since the surface of the buffer layer is planarized, the gas barrier layer formed thereabove has a uniform film quality, and a uniform gas barrier layer having no defects can be formed.

Further, in the method for manufacturing an organic EL device according to the present invention, the step of peeling the mask from the coating film includes peeling the mask from the coating film while tilting the mask with respect to the substrate. It is said.
If it does in this way, in the contact interface of a coating film and a mask, it can be made to peel gradually, without concentrating force to one point, moving on a line from one side to the other. In contrast,
When the substrate and the mask are peeled off while keeping the mask substantially inclining without tilting the mask, the repulsive force of the mask itself generated when the mask is peeled is concentrated on one point of the central electrode (cathode) having a low adhesion force, The electrode is peeled off.
Therefore, as described above, peeling with the mask tilted with respect to the substrate prevents the electrode from peeling, and by tilting and peeling to make the mask peeling speed constant, a uniform coating film can be formed. Forming and planarizing the surface of the buffer layer formed after the thermosetting step can be realized.

In addition, the mask is preferably made of a flexible plate made by weaving a resin or metal fiber called a screen mesh. In this case, the contact surface where the mask contacts the coating film and the exposure of the coating film In the vicinity of the boundary with the surface, the mask can be peeled while being curved. By this, the force at the time of peeling the mask on the substrate is dispersed, and the peeling angle with the coating film is kept small, so that it can be kept small without rupturing the bubbles. And the same effects as described above can be obtained.

Moreover, in the manufacturing method of the organic electroluminescent apparatus of this invention, the said buffer layer formation process has a defoaming process between the said application | coating process and the said thermosetting process, and the said defoaming process is more than the said application | coating process. It is characterized by being performed in an inert gas atmosphere at a high pressure.
Here, the above coating process is performed in a vacuum atmosphere, when transferring the coating material while pressing the mask with the coating means, when the mask is detached from the substrate immediately after the stirring or movement of the coating means, There are cases where bubbles in a vacuum state are mixed in the coating material. Therefore, by performing the defoaming process in an inert gas atmosphere at a higher pressure than the coating process, pressure is applied to the buffer layer (coating film before curing) by the external pressure of the inert gas atmosphere, and the bubbles in the vacuum state contract. And can be made extremely small. In addition, almost no gas is present inside the bubbles that are contracted and become extremely small, and the light emitting functional layer is not affected. Since the bubbles are extremely small in the buffer layer, the surface of the buffer layer has flatness. Further, crater-like uneven portions formed by the destruction of bubbles are not formed on the surface of the buffer layer.

Moreover, in the manufacturing method of the organic EL device of the present invention, the buffer layer forming step is characterized in that a peripheral portion of a planar pattern of the buffer layer is formed in a wave shape.
If it does in this way, compared with the case where a peripheral part is linear, the peripheral length of the plane pattern of a buffer layer will become long. As a result, it is possible to improve the adhesion with the upper layer film (gas barrier layer) of the buffer layer, and to disperse the stress of the buffer layer at the periphery. And the film | membrane intensity | strength of a buffer layer can be improved and high reliability can be acquired. Since such a wave shape can be defined as desired by the mask shape of the screen printing method, the wave shape can be easily formed without increasing the number of steps for forming the wave shape.

Further, according to the present inventors, as a result of comparison between the case where the peripheral portion of the planar pattern of the buffer layer is linear and the case where it is wave-shaped, dark spots and non-light emitting portions are generated in the case of the linear shape. On the other hand, in the case of the wave shape, it was confirmed that the entire surface light emission can be realized without generating dark spots or non-light emitting portions.

Moreover, in the manufacturing method of the organic EL device of the present invention, in the buffer layer forming step, the coating material includes an epoxy monomer / oligomer material having a molecular weight of 3000 or less, and the coating material is applied by the thermosetting step. The buffer layer is formed by curing with an ester bond.
Here, as described above, since the present invention forms a buffer layer without a solvent, it is necessary to coat and form the monomer / oligomer material in a low viscosity state. A material that can easily form a polymer film by a thermosetting process even with a low molecular weight monomer is employed. As such a material, an epoxy-based material is suitable.
In addition, comparing epoxy materials with acrylic materials that have been used as materials for buffer layers, acrylic materials have the disadvantage that they tend to shrink when cured from monomers / oligomers to polymers. Was. On the other hand, the epoxy-based material has an advantage that a film can be easily formed from a monomer / oligomer which is a low-molecular material while suppressing shrinkage of the film.
In addition, it is preferable to employ an acid anhydride as the curing agent. When the epoxy monomer / oligomer is cured using the acid anhydride, a three-dimensional and dense ester bond is formed, and the hardness is high and the heat resistance is high. It is possible to form a buffer layer made of a polymer organic material having excellent properties, water resistance, and electrical insulation, and to withstand a high-density plasma process that forms a gas barrier layer made of an inorganic material. A high gas barrier layer can be formed. In addition, by curing using acid anhydrides in this way, ester bonds with high polarity are formed at high density, so that adhesion to a gas barrier layer, which is a heterogeneous material, can be improved.

Moreover, in the manufacturing method of the organic electroluminescent apparatus of this invention, the room temperature viscosity of the said coating material is 50.
It is characterized by being in the range of 0 to 20000 mPa · s.
Here, in the screen printing method, if a material whose viscosity is too low or a material diluted with a solvent is applied, bleeding or penetration between the mask and the substrate occurs, and it is difficult to maintain the shape. In addition, the material having an excessively high viscosity is difficult to flatten due to the uneven shape of the mask and bubbles remaining on the surface. Therefore, when the screen printing method is applied, it is preferable that the coating material has a certain range of viscosity in order to maintain a suitable shape and flatten the surface.
As a result of experiments, the present inventors have confirmed that when the viscosity is 500 mPa · s or less, the material protrudes to the emulsion part, it is difficult to maintain the shape of the buffer layer, and a sufficient film thickness cannot be obtained. In addition, when the pressure is 20000 mPa · s or more, large bubbles remaining in the buffer layer are difficult to return, and the film thickness becomes thicker than necessary, and the low-angle state of the side edge cannot be secured. It was confirmed. For example, if the pressure is increased after coating formation in a vacuum, bubbles are extremely small when the coating material is low viscosity, but large bubbles tend to remain when the coating material is high viscosity, The bubbles are not reduced in size and the shape thereof is maintained, and the bubbles in the film do not disappear and residual marks are generated. Further, when the viscosity is increased, the film thickness is increased more than necessary, and the angle of the side surface end portion becomes large and steep.
Therefore, by setting the room temperature viscosity of the coating material in the range of 500 to 20000 mPa · s, the above problems can be solved, the shape of the buffer layer can be maintained, the surface can be flattened, the bubbles can be made extremely small, and the side edges can be reduced. Angularization can be realized.

Moreover, in the manufacturing method of the organic EL device of the present invention, the room temperature viscosity of the coating material is 10
It is characterized by being in the range of 00 to 10000 mPa · s.
According to the knowledge of the present inventors, the range of the room temperature viscosity of the coating material is 500 to 20000 mPa.
-It confirmed that said effect could be further accelerated | stimulated in the case of 1000-10000 mPa * s rather than the case where it is s.
Specifically, when the indoor viscosity exceeds 10,000 mPa · s, a problem has been found that bubbles in the buffer layer remain. In the case where 1000 mPa · s is not satisfied,
In the screen printing process, bubbles were repelled and craters were easily generated, and a problem was found that a uniform film was not obtained. Moreover, it was confirmed that a dark spot will arise notably.
Therefore, by setting the room temperature viscosity of the coating material in the range of 1000 to 10000 mPa · s,
It is possible to reliably realize the shape retention of the buffer layer, the flattening of the surface, the microminiaturization of the bubbles, and the reduction of the angle of the side edge, and the generation of dark spots can be suppressed.

Moreover, in the manufacturing method of the organic electroluminescent apparatus of this invention, the film thickness of the said buffer layer is 3-10 micrometers.
It is the range of m.
By setting the thickness of the buffer layer within this range, the buffer layer shape can be maintained, the surface can be flattened, the bubbles can be made extremely small, and the side edges can be lowered at a low angle. Can be suppressed.

The organic EL device manufacturing method of the present invention includes a step of forming an organic adhesion layer having a larger amount of oxygen atoms than the buffer layer between the buffer layer and the gas barrier layer. .
This organic adhesion layer is formed as a thin film on the outermost surface of the buffer layer, and may be formed by oxidizing the surface of the buffer layer by plasma treatment or the like. By forming the organic adhesion layer in this way, the cleaning effect and surface energy on the surface of the buffer layer are increased, so that the adhesion between the buffer layer and the gas barrier layer can be improved. Therefore, peeling of the gas barrier layer can be suppressed and the durability of the organic EL device can be improved.

Moreover, in the manufacturing method of the organic EL device of the present invention, the angle of the side surface end of the buffer layer is
It is characterized by being formed at 30 ° or less.
Here, when the angle of the side surface end portion is steep, not only is it difficult to cover the gas barrier layer with respect to the buffer layer, but also stress applied to the side surface end portion due to temperature expansion and contraction of the buffer layer increases.
The present inventors set the angle to 30 ° or less, so that when the gas barrier layer is formed on the upper layer side of the buffer layer, the gas barrier layer can be formed with a uniform film thickness, and the stress applied to the side edge portion It was confirmed that the gas barrier layer can be prevented from being broken by being dispersed. This
The gas barrier property with respect to the side edge part of a buffer layer can be acquired reliably.
In order to set the angle of the side surface end portion to 30 ° or less, it is preferable to set the viscosity to a predetermined value and perform heat treatment at a temperature higher than the temperature at the time of application as the curing step. In this way, the periphery of the buffer layer is melted (softened) by heat, and 30 ° is formed on the side surface end of the buffer layer.
The inclined portion can be formed. Thereby, since the gas barrier layer formed above the buffer layer is gently formed following the shape of the buffer layer, the gas barrier property can be improved.

In addition, the method for manufacturing an organic EL device according to the present invention includes a step of forming an electrode protective layer between the second electrode and the buffer layer.
The electrode protection layer not only protects the electrode from the buffer layer application process, but also forms a surface with high surface energy without depending on the electrode material, so that the flatness and defoaming at the time of buffer layer application formation are achieved. And the adhesion to the buffer layer is also obtained.

In the method for manufacturing an organic EL device according to the present invention, the electrode protective layer is a silicon oxynitride film, and the buffer layer includes an epoxy compound and a silane coupling agent.
In the low molecular weight organic EL device, the present inventors may elute the low-viscosity material of the buffer layer component before curing, depending on the combination of the material constituting the buffer layer and the material constituting the electron injection layer. It has been found that this causes dark spots in the injection layer. As a result of intensive studies, the present inventors have found a combination of a buffer layer material and an electron injection layer material that does not generate dark spots. That is, by using a silicon oxynitride film as the electrode protection layer and a material containing an epoxy compound and a silane coupling agent as the buffer layer, the generation of dark spots in the electron injection layer can be prevented.

Moreover, in the manufacturing method of the organic EL device of the present invention, the film thickness of the gas barrier layer is 30.
It is characterized by being in the range of 0 to 700 nm.
According to the present inventors, it has been confirmed that sufficient gas barrier properties cannot be obtained when the thickness of the gas barrier layer is smaller than 300 nm. In the case of larger than 700 nm,
It was confirmed that internal stress accumulated in the gas barrier layer itself caused cracks. Therefore, by defining the thickness of the gas barrier layer as in the present invention, both gas barrier properties and crack resistance can be obtained.

The organic EL device manufacturing method of the present invention includes a bonding step of bonding the formation surface of the gas barrier layer of the substrate and a protective substrate facing the formation surface, the bonding step The protective substrate and the substrate are bonded together with an adhesive layer interposed therebetween.
Here, the adhesive layer is a layer film for bonding the protective substrate and the substrate. Further, since the thin film sealing structure is realized by the gas barrier layer and the buffer layer as described above, it is not necessary to increase the thickness of the adhesive layer.
According to the present invention, a protective substrate is bonded to prevent damage to the gas barrier layer, buffer layer, and light emitting functional layer, and achieve pressure resistance, wear resistance, external light antireflection, gas barrier properties, ultraviolet blocking properties, etc. it can.

In the method for manufacturing an organic EL device of the present invention, the protective substrate is a color filter substrate on which a plurality of colored layers are formed.
Here, each of the colored layers of a plurality of colors is made of, for example, R (red), G (green), and B (blue), and is disposed to face the light emitting functional layer.
Further, the distance between the colored layer and the light emitting functional layer is required to be as short as possible so that the emitted light of the light emitting functional layer is emitted only to the opposing colored layer. This is because when the distance is long, there is a high possibility that the light emitted from the light emitting functional layer is emitted to the adjacent colored layer. In order to suppress this, it is preferable to shorten the distance. .
In the present invention, since the thin film sealing structure is realized by the gas barrier layer and the buffer layer, the distance between the light emitting functional layer and the colored layer is short. Therefore, the emitted light of the light emitting functional layer is emitted only to the opposing colored layer, and the leakage of the emitted light to the adjacent colored layer can be suppressed.

Here, as the organic light emitting layer included in the light emitting functional layer, a white organic light emitting layer that generates white light emission or an organic light emitting layer of each color that generates light of multiple colors of RGB is employed.
In the case of adopting a white organic light emitting layer, by irradiating a colored layer of multiple colors with white light,
White light can be color-coded for each RGB. Further, in a mask vapor deposition step for forming a low molecular weight white organic light emitting layer, a droplet discharge step for forming a high molecular weight white organic light emitting layer, etc., 1
Since only a single type of white organic light-emitting layer needs to be formed in one step, the manufacturing process becomes easier as compared with the case where the organic light-emitting layer for each RGB is formed and separated.
When each color organic light emitting layer is employed, color correction can be performed by irradiating the colored layers of the same color with each color light of RGB.

In addition, the organic EL device of the present invention includes a plurality of first electrodes, a light emitting functional layer disposed corresponding to a position where the first electrode is formed, and a second electrode covering the light emitting functional layer. A buffer layer formed so as to cover the second electrode, and a gas barrier layer covering the buffer layer, and using the manufacturing method described above, It is characterized by being manufactured.

If it does in this way, the monomer / oligomer material and hardener which were apply | coated by the application | coating process can be hardened by a thermosetting process, and a buffer layer can be formed.
Here, since the coating process is performed in a vacuum atmosphere, the coating process is performed in an atmosphere from which moisture and oxygen are removed, and it is possible to suppress the penetration of moisture and oxygen into the buffer layer. it can. Moreover, since the said application | coating process is performed without using a solvent, a solvent does not remain in a buffer layer. Therefore, almost no moisture or oxygen remains in the buffer layer, and there are no solvent molecules, so that the emission characteristics deteriorate due to the penetration of these into the light emitting functional layer and the light emission lifetime is short. Generation of non-light emitting regions and the like can be suppressed.
In the thermosetting step, the monomer / oligomer material is cured by a curing agent, so that the monomer or oligomer is cross-linked and a buffer layer made of a high molecular organic material (polymer) can be formed. Moreover, as a thermosetting process, the thermosetting method by heat processing is preferable. In this way, not only can the coating material be cured to form the buffer layer, but also the peripheral portion of the buffer layer can be melted (softened) by heat to form an inclined portion at the side edge of the buffer layer. . Thereby, since the gas barrier layer formed above the buffer layer is gently formed following the shape of the buffer layer, the gas barrier property can be improved.
Moreover, the layer thickness of the gas barrier layer and the buffer layer formed by lamination by such a manufacturing method is as follows:
It can be made thinner than before. Therefore, in the organic EL device of the present invention, a thin film sealing structure can be realized without increasing the film thickness.
In the present invention, as the light emitting functional layer, either a low molecular system or a high molecular system can be adopted.

In the organic EL device of the present invention, the peripheral edge portion of the planar pattern of the buffer layer is formed in a wave shape.
If it does in this way, compared with the case where a peripheral part is linear, the peripheral length of the plane pattern of a buffer layer will become long. Thereby, the adhesive force with the lower layer film (for example, a 2nd electrode or an electrode protective layer) of a buffer layer can be improved, and the stress of the buffer layer in a peripheral part can be disperse | distributed. And the film | membrane intensity | strength of a buffer layer can be improved and high reliability can be acquired. Such a wave shape can be defined as desired by the mask shape of the screen printing method,
It can be formed easily without increasing the number of steps for forming the wave shape.

In addition, an electronic device according to the present invention is characterized by including the organic electroluminescence device described above.
Examples of such electronic devices include mobile phones, mobile information terminals, watches, word processors, information processing devices such as personal computers, printers, and the like. Further, a television having a large display screen, a large monitor, and the like can be exemplified. Thus, by employing the electro-optical device of the present invention for the display unit of an electronic device, an electronic device including a display unit with a long life and good display characteristics can be provided. Moreover, you may apply to light sources, such as a printer.

Hereinafter, embodiments of a method for manufacturing an organic EL device, an organic EL device, and an electronic device according to the present invention will be described with reference to the drawings.
In the following description, each scale and each layer film constituting the organic EL device 1 are made different in scale so that they can be recognized.

(First embodiment of organic EL device)
FIG. 1 is a diagram showing a wiring structure of an organic EL device 1 according to the first embodiment of the present invention.
The organic EL device 1 is a thin film transistor (Thin Film Transistor) as a switching element.
This is an active matrix type organic EL device using an abbreviated TFT hereinafter).
As shown in FIG. 1, the organic EL device 1 includes a plurality of scanning lines 101, a plurality of signal lines 102 extending in a direction perpendicular to each scanning line 101, and a plurality of signal lines 102 extending in parallel with each signal line 102. The power source line 103 is wired, and a pixel region X is provided in the vicinity of each intersection of the scanning line 101 and the signal line 102.
A data line driving circuit 100 including a shift register, a level shifter, a video line, and an analog switch is connected to the signal line 102. Further, a scanning line driving circuit 80 including a shift register and a level shifter is connected to the scanning line 101.

Further, in each pixel region X, a switching TFT 112 to which a scanning signal is supplied to the gate electrode via the scanning line 101 and a signal line 1 via the switching TFT 112 are provided.
A holding capacitor 113 for holding the pixel signal supplied from 02, a driving TFT 123 to which the pixel signal held by the holding capacitor 113 is supplied to the gate electrode, and the driving TFT 1
A pixel electrode (first electrode) 23 into which a drive current flows from the power supply line 103 when electrically connected to the power supply line 103 via the signal line 23, and between the pixel electrode 23 and the cathode (second electrode) 50. A sandwiched light emitting function layer 110 is provided. Pixel electrode 23, cathode 50, and light emitting functional layer 11
A light emitting element is constituted by 0.

According to the organic EL device 1, the scanning line 101 is driven to switch the switching TFT 112.
Is turned on, the potential of the signal line 102 at that time is held in the storage capacitor 113, and the on / off state of the driving TFT 123 is determined according to the state of the storage capacitor 113. And
A current flows from the power supply line 103 to the pixel electrode 23 through the channel of the driving TFT 123,
Further, a current flows to the cathode 50 through the light emitting functional layer 110 (or the organic light emitting layer 60). The light emitting functional layer 110 emits light according to the amount of current flowing through it.

Next, a specific configuration of the organic EL device 1 will be described with reference to FIGS.
Here, FIG. 2 is a schematic diagram showing a configuration of the organic EL device. 3 is a cross-sectional view taken along AB of FIG.
FIG. 4 is a cross-sectional view of the organic EL device showing the configuration in the direction, and FIG. 4 is a cross-sectional view of the organic EL device showing the configuration in the CD direction of FIG. 5 and 7 are enlarged cross-sectional views showing the main part of FIG. FIG. 6 is an enlarged plan view showing a main part of FIG.

As shown in FIG. 2, the organic EL device 1 is a pixel electrode in which a substrate 20 having electrical insulation and pixel electrodes connected to switching TFTs (not shown) are arranged in a matrix on the substrate 20. An area (not shown), a power line (not shown) arranged around the pixel electrode area and connected to each pixel electrode, and a pixel portion 3 having a substantially rectangular shape in plan view located at least on the pixel electrode area (In the dashed-dotted line frame in FIG. 2).
In the present invention, the substrate 20 and a switching TFT and various circuits formed on the substrate 20 as will be described later, and an interlayer insulating film are referred to as a substrate (reference numerals in FIGS. 3 and 4). 200).

The pixel unit 3 includes an actual light emitting region 4 (inside the two-dot chain line frame in FIG. 2) in the central portion, and a dummy region 5 (region between the one-dot chain line and the two-dot chain line) arranged around the actual light emitting region 4. It is divided into.
In the actual light emitting region 4, light emitting regions R, G, and B each having a pixel electrode are arranged in a matrix so as to be separated from each other in the AB direction and the CD direction.
Further, scanning line drive circuits 80 and 80 are arranged on both sides of the actual light emitting region 4 in FIG. These scanning line drive circuits 80 and 80 are arranged below the dummy region 5.

Further, an inspection circuit 90 is disposed above the actual light emitting region 4 in FIG. This inspection circuit 9
Reference numeral 0 is a circuit for inspecting the operating state of the organic EL device 1 and includes, for example, inspection information output means (not shown) for outputting the inspection result to the outside, and a display device (organic E
L apparatus) quality and defects can be inspected. The inspection circuit 90 is also disposed below the dummy area 5.

The scanning line driving circuit 80 and the inspection circuit 90 are applied with a driving voltage from a predetermined power supply unit via the driving voltage conducting unit 310 (see FIG. 3) and the driving voltage conducting unit 340 (see FIG. 4). Composed. The drive control signals and drive voltages to the scanning line drive circuit 80 and the inspection circuit 90 are supplied from a predetermined main driver that controls the operation of the organic EL device 1 and the drive control signal conduction unit 320 (see FIG. 3) and Transmission and application are performed via the drive voltage conduction unit 350 (see FIG. 4). The drive control signal in this case is the scanning line drive circuit 8.
0 and a command signal from a main driver or the like related to control when the inspection circuit 90 outputs a signal.

In addition, as shown in FIGS. 3 and 4, the organic EL device 1 is formed with a large number of light emitting elements each including the pixel electrode 23, the light emitting functional layer 110, and the cathode 50 on the substrate 200, and further covers these to provide a buffer layer. 210, the organic adhesion layer 220, the gas barrier layer 30 and the like are formed. Pixel electrode 23
Is provided for each light emitting element, and the cathode 50 is provided in common for a plurality of light emitting elements.
By individually driving 3, the light emitting elements emit light.
The light emitting functional layer 110 is typically an organic light emitting layer (organic electroluminescence layer) 60, and is a carrier injection layer or carrier such as a hole injection layer, a hole transport layer, an electron injection layer, or an electron transport layer. It may be provided with a transport layer, and further provided with a hole blocking layer (hole blocking layer) and an electron blocking layer (electron blocking layer).

In the case of a so-called top emission type organic EL device, the substrate 20 constituting the base body 200 is configured to extract emitted light from the gas barrier layer 30 side that is the opposite side of the substrate 20, so that either a transparent substrate or an opaque substrate is used. Can also be used. Examples of opaque substrates include ceramics such as alumina, metal sheets such as stainless steel that have been subjected to insulation treatment such as surface oxidation, thermosetting resins and thermoplastic resins, and films thereof (plastic films). It is done.

In the case of a so-called bottom emission type organic EL device, since the emitted light is extracted from the substrate 20 side, a transparent or semi-transparent substrate 20 is employed. For example, glass, quartz, resin (plastic, plastic film) and the like can be mentioned, and a glass substrate is particularly preferably used. In the present embodiment, a top emission type in which emitted light is extracted from the gas barrier layer 30 side, and therefore, the above-described opaque substrate, such as an opaque plastic film, is used as the substrate 20.

A circuit unit 11 including a driving TFT 123 for driving the pixel electrode 23 and the like is formed on the substrate 20, and a large number of light emitting elements are provided thereon. As shown in FIG. 7, the light emitting element includes a pixel electrode 23 functioning as an anode, and injecting / injecting holes from the pixel electrode 23.
A hole transport layer 70 to be transported, an organic light emitting layer 60 including an organic EL material which is one of electro-optical materials, and a cathode 50 are formed in this order.
Based on such a configuration, the light emitting element emits light in the organic light emitting layer 60 by combining holes injected from the hole transport layer 70 and electrons from the cathode 50.
In the present embodiment, the hole transport layer 70 has a function of attracting the light emitting function of the organic light emitting layer 60, and thus functions as a part of the light emitting functional layer 110.

Since the pixel electrode 23 is a top emission type in this embodiment, it does not need to be transparent, and is therefore formed of a suitable conductive material.
As a material for forming the hole transport layer 70, for example, a polythiophene derivative, a polypyrrole derivative, or a doped body thereof is used. Specifically, 3,4-polyethylenediosithiophene / polystyrene sulfonic acid (PEDOT / PSS) dispersion, that is, 3,4-polyethylenediosithiophene is dispersed in polystyrene sulfonic acid as a dispersion medium. The hole transport layer 70 can be formed using a dispersion liquid in which is dispersed in water.

As a material for forming the organic light emitting layer 60, a known light emitting material capable of emitting fluorescence or phosphorescence can be used. Specifically, (poly) fluorene derivatives (P
F), (poly) paraphenylene vinylene derivatives (PPV), polyphenylene derivatives (PP
), Polyparaphenylene derivatives (PPP), polyvinylcarbazole (PVK), polythiophene derivatives, polysilanes such as polymethylphenylsilane (PMPS), and the like are preferably used.
In addition, these polymer materials include polymer materials such as perylene dyes, coumarin dyes, rhodamine dyes, rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, Nile red, coumarin 6, and quinacridone. It can also be used by doping a low molecular weight material such as.
In addition, it replaces with the polymeric material mentioned above, a conventionally well-known low molecular material can also be used.
Moreover, you may form an electron injection layer on such an organic light emitting layer 60 as needed.
Here, since the electron injection layer has a function of attracting the light emitting function of the organic light emitting layer 60, it functions as a part of the light emitting functional layer 110.

In the present embodiment, the hole transport layer 70 and the organic light emitting layer 60 are composed of the lyophilic control layer 25 and the organic barrier layer (which are formed in a lattice shape on the substrate 200 as shown in FIGS. (Partition wall) 221
And the hole transport layer 70 and the organic light emitting layer 60 surrounded by and surrounded by
Becomes an element layer constituting a single light emitting element.
In the organic partition wall layer 221, the angle θ of each wall surface of the opening 221a with respect to the surface of the substrate 200 is 110 degrees or more and 170 degrees or less (see FIG. 7). The reason for this angle is to facilitate the arrangement of the organic light emitting layer 60 in the opening 221a when the organic light emitting layer 60 is formed by a wet process.

As shown in FIGS. 3 to 7, the cathode 50 has a larger area than the total area of the real light emitting region 4 and the dummy region 5 and is formed so as to cover each of the organic light emitting layer 60 and the organic partition layer. The base 2 in a state where the upper surface of 221 and the wall surface forming the outer portion of the organic partition wall layer 221 are covered.
It is formed on 00. The cathode 50 has an organic partition layer 2 as shown in FIG.
21 is connected to the cathode wiring formed on the outer peripheral portion of the base body 200 outside the base 21. A flexible substrate is connected to the cathode wiring, whereby the cathode 50 is connected to a driving IC (driving circuit) (not shown) on the flexible substrate via the cathode wiring.

As a material for forming the cathode 50, since this embodiment is a top emission type, it needs to be light transmissive, and therefore, a transparent conductive material is used. ITO (Indium Tin Oxide) is suitable as the transparent conductive material, but other than this, for example, an indium oxide / zinc oxide amorphous transparent conductive film (Indium Zinc Oxide)
: IZO / I.Z.O) (registered trademark) or the like can be used. In the present embodiment, ITO is used.

The cathode 50 is preferably made of a material having a large electron injection effect. For example, calcium, magnesium, sodium, lithium metal, or a metal compound thereof. Examples of the metal compound include metal fluorides such as calcium fluoride, metal oxides such as lithium oxide, and organometallic complexes such as acetylacetonato calcium. Also, with these materials alone,
Since the electric resistance is large and does not function as an electrode, it may be used in combination with a laminate of a metal layer such as aluminum, gold, silver, or copper, or a metal oxide conductive layer such as ITO or tin oxide. In addition,
In the present embodiment, a laminated body of lithium fluoride, a magnesium-silver alloy, and ITO is used by adjusting the film thickness to obtain transparency.

A cathode protective layer (electrode protective layer) 55 is formed on the upper layer portion of the cathode 50. The cathode protective layer 55 prevents the cathode from being damaged when the screen mesh used for buffer layer formation comes into contact,
In addition, by covering the cathode surface and increasing the surface energy of the outermost surface, it can be provided for the purpose of flatness, defoaming, adhesion, and low angle of the side edges when applying buffer layer materials. is there. The cathode protective layer 55 is a highly insulating layer mainly composed of a highly transparent inorganic oxide, and increases the surface energy of the outermost surface by a material having a high surface energy or by oxygen plasma treatment after formation. Are preferred. As the film thickness of the cathode protective layer 55, the organic partition layer 221 is used.
Because it is formed on the surface with unevenness due to the film, it does not break or peel off due to the thermal expansion and contraction of the organic partition wall layer 221 and promotes peeling of the organic light emitting layer 60 and the cathode 50 by the compression (tensile) stress of the film itself. In order to avoid this, it is preferable to have a thin film thickness of 10 to 200 nm compared to the gas barrier layer. Examples of the material of the cathode protective layer 55 include those formed of silicon oxide such as silicon oxide and silicon oxynitride, and inorganic oxide such as metal oxide such as titanium oxide.
The cathode protective layer 55 is formed up to the insulating layer 284 on the outer periphery of the base body 200.

A buffer layer 210 is provided on the upper layer portion of the cathode protective layer 55 in a range wider than the organic partition layer 221 and covering the cathode 50. The buffer layer 210 is disposed so as to fill the convex and concave portions of the cathode 50 formed in a concave and convex shape due to the influence of the shape of the organic partition wall layer 221, and the upper surface thereof is formed substantially flat. Such a buffer layer 210 is formed by an application process and a thermosetting process as described later.
Such a buffer layer 210 has a function of relieving the warp generated from the base 200 side and the stress generated by volume expansion, and preventing peeling from the unstable organic partition layer 221 and the cathode 50 which are easily thermally expanded and contracted. In addition, since the upper surface of the buffer layer 210 is substantially flattened, the gas barrier layer 30 made of a hard film formed on the buffer layer 210 is also flattened, so that there is no portion where stress is concentrated. 30 occurrences of cracks, delamination and defects are prevented.

Next, a specific material (coating material) of the buffer layer 210 will be described.
The raw material main component before curing must be an organic compound material that is excellent in fluidity and does not have a solvent component, and is an organic compound material that is a raw material of the polymer skeleton, and is preferably an epoxy group. An epoxy monomer / oligomer having a molecular weight of 3000 or less having a molecular weight (definition of monomer: molecular weight 1000 or less, definition of oligomer: molecular weight 1000 to 3000). For example, bisphenol A type epoxy oligomer, bisphenol F type epoxy oligomer, phenol novolac type epoxy oligomer, polyethylene glycol diglycidyl ether, alkyl glycidyl ether, 3,4-epoxycyclohexenylmethyl-3 ′
, 4′-epoxycyclohexenecarboxylate, ε-caprolactone-modified 3,4-epoxycyclohexylmethyl 3 ′, 4′-epoxycyclohexanecarboxylate, and the like are used alone or in combination.

In addition, the curing agent that reacts with the epoxy monomer / oligomer is excellent in electrical insulation and adhesion, and forms a cured film having high hardness, toughness and excellent heat resistance, excellent transparency, and variation in curing. The addition polymerization type with less is preferred. For example, 3-methyl-1,2,3
6-tetrahydrophthalic anhydride, methyl-3,6-endomethylene-1,2,3,6-tetrahydrophthalic anhydride, 1,2,4,5-benzenetetracarboxylic dianhydride, 3,3
Acid anhydride curing agents such as', 4,4'-benzophenone tetracarboxylic dianhydride are preferred. Furthermore, it becomes easy to cure at low temperature by adding an alcohol having a large molecular weight and not easily volatilizing such as 1,6-hexanediol as a reaction accelerator for promoting the reaction (ring opening) of the acid anhydride. These curings are performed by heating in the range of 60 to 100 ° C., and the cured film becomes a polymer having an ester bond.
Also, aliphatic amines such as diethylenetriamine and triethylenetetraamine, aromatic amines such as diaminodiphenylmethane and diaminodiphenylsulfone, and photopolymerization initiators can be added as auxiliary curing agents to make it easier to cure at lower temperatures. Also good.
Furthermore, a silane coupling agent that improves adhesion to the cathode 50 and the gas barrier layer 30,
Water additives such as isocyanate compounds, leveling agents that lower the surface energy of coating materials such as fluorine compounds and improve wettability, and additives such as fine particles that prevent shrinkage during curing are added in a trace amount to 1% or less. Also good.
The viscosity of the material for forming the buffer layer 210 is 500 to 2 at room temperature (25 ° C.).
The viscosity range is preferably 0000 mPa · s. In the present embodiment, the viscosity is 3000.
The viscosity is set to mPa · s.

Here, with reference to FIG. 5, the structure of the side surface end portion of the buffer layer 210 will be described.
FIG. 5 is an enlarged view showing a side end portion of the buffer layer 210 in FIG. 3. As shown in FIG. 5, the buffer layer 210 is formed on the cathode protective layer 55, and the side surface end portion is in contact with the surface of the cathode protective layer 55 at a contact angle α. Here, the contact angle α is 30 ° or less, and more preferably about 5 ° to 20 °. This contact angle α is achieved by a softening step by a heating process after coating, adjusting the viscosity of the buffer layer material itself, adding a planarizing agent, etc., and increasing the surface energy of the cathode protective layer. By forming the buffer layer 210 in this manner, the organic adhesion layer 220 and the gas barrier layer 30 formed on the upper layer of the buffer layer 210 are formed following the shape of the buffer layer 210, and the organic partition wall layer 221 is thermally expanded and contracted. Even when the volume is changed by the above, the stress applied to the gas barrier layer at the end of the side surface can be dispersed to prevent destruction. Further, when the contact angle α is a steep angle, for example, about 80 °, the thickness of the gas barrier layer 30 formed on the ridge portion becomes thinner than other portions, but the contact angle α Therefore, the gas barrier layer 30 is formed on the buffer layer 210 with a uniform film thickness.

Further, an organic adhesion layer 220 is formed on the upper layer portion of the buffer layer 210.
The organic adhesion layer 220 is a thin film having high surface energy (polarity) formed by subjecting the surface of the buffer layer 210 to oxidation treatment. As the composition of the organic adhesion layer 220, the oxygen atom content is larger than that of the buffer layer 210. The film thickness of the organic adhesion layer 220 is preferably a thin film and is preferably 10 nm or less. For these, it is preferable to form a thin film on the outermost surface of the buffer layer 210 by oxygen plasma treatment or the like in a reduced pressure atmosphere immediately before the formation of the gas barrier layer. By forming such an organic adhesion layer 220, the surface of the buffer layer 210 is cleaned and the adhesion at the interface between the buffer layer 210 and the gas barrier layer 30 is improved.

Further, the gas barrier layer 30 is formed on the upper layer portion of the organic adhesion layer 220.
The gas barrier layer 30 is formed on the organic adhesion layer 220 without contacting the insulating layer 284. The gas barrier layer 30 is used to prevent oxygen and moisture from entering the buffer layer 210 and the cathode 50 and the organic light emitting layer 60 inside the buffer layer 210, thereby allowing oxygen and moisture to enter the cathode 50 and the organic light emitting layer 60. Intrusion is prevented and deterioration of light emission is suppressed.
The gas barrier layer 30 is made of, for example, an inorganic compound having excellent water resistance and heat resistance, and is preferably formed of a silicon compound, that is, silicon nitride, silicon oxynitride, silicon oxide, or the like. Thereby, the gas barrier layer 30 is formed as a transparent thin film. Furthermore, it is necessary to form a dense and defect-free film to block off gas such as water vapor, and preferably a plasma CVD method or an ECR plasma sputtering method which is a high-density plasma film forming method capable of forming a dense film at a low temperature, It forms using an ion plating method. By forming the gas barrier layer 30 from a silicon compound in this way, the gas barrier layer 30 becomes a dense layer having no defects that is excellent in water resistance and heat resistance, and has a better barrier property against oxygen and moisture. Gas barrier layer 3
0 preferably has a film quality with a film density of 2.3 to 3.0 g / cm ³ .
The gas barrier layer 30 may be made of a material other than a silicon compound, and may be made of, for example, alumina, tantalum oxide, titanium oxide, or other ceramics.
The film thickness of the gas barrier layer 30 is set in the range of 300 to 700 nm. In this embodiment, it is particularly 400 nm. When the thickness of the gas barrier layer is smaller than 300 nm, sufficient gas barrier properties cannot be obtained, and when it is larger than 700 nm, internal stress accumulates in the gas barrier layer 30 and causes cracks. Therefore, by defining the film thickness within the above range, a gas barrier layer that achieves both gas barrier properties and crack resistance is obtained. Moreover, gas barrier property and crack resistance can be improved especially by setting it as the film thickness of 400-600 nm.

Further, a protective layer 204 that covers the gas barrier layer 30 is provided on the upper layer portion of the gas barrier layer 30. The protective layer 204 is for protecting the buffer layer 210 and the gas barrier layer 30 and is composed of an adhesive layer 205 and a surface protective substrate (protective substrate) 206 provided on the gas barrier layer 30 side.
The adhesive layer 205 is formed of an adhesive made of a material that is softer than the surface protective substrate 206 and has a low glass transition point. The adhesive layer 205 fixes the surface protection substrate 206 on the gas barrier layer 30. The materials include epoxy resin, acrylic resin,
Transparent resin materials such as urethane resin, silicon resin, and polyolefin resin are preferable, and transparent and inexpensive acrylic resins are preferably used. Further, the adhesive layer 205 may be formed in advance on the surface protection substrate 206, and may be bonded on the gas barrier layer 30 by pressure bonding. The adhesive layer 205 is preferably a transparent resin material. Further, it may be formed of a two-component mixed material in which a curing agent is added for curing at a low temperature.
In addition, it is preferable to add a silane coupling agent or alkoxysilane to such an adhesive layer 205, so that the adhesion between the formed adhesive layer 205 and the gas barrier layer 30 is better. Therefore, the buffer function against mechanical shock is increased.
In particular, when the gas barrier layer 30 is formed of a silicon compound, the adhesion with the gas barrier layer 30 can be improved by a silane coupling agent or alkoxysilane. Therefore, the gas barrier property of the gas barrier layer 30 can be improved. Can be increased.

The surface protective substrate 206 is provided on the adhesive layer 205 and constitutes the surface side of the protective layer 204, and prevents damage, pressure resistance and wear resistance, external light antireflection, gas barrier properties, and ultraviolet blocking properties. A layer having at least one of the functions. As the material of the surface protection substrate 206, glass or transparent plastic (polyethylene terephthalate, polyethylene naphthalate, acrylic resin, polycarbonate, polyolefin, polyimide, etc.) is employed. In addition, the surface protective substrate 206 includes an ultraviolet blocking / absorbing layer, an antireflection layer, a heat dissipation layer,
An optical structure such as a lens or a mirror may be provided. In addition, as other materials,
A DLC (diamond-like carbon) layer may be employed.
In the organic EL device of this example, it is necessary to make both the surface protection substrate 206 and the adhesive layer 205 translucent when the top emission type is used, but this is necessary when the bottom emission type is used. There is no.

In the organic EL device 1 configured as described above, the total thickness of the gas barrier layer 30 and the buffer layer 210 is thinner than the conventional one. Specifically, as shown in FIG. 5, the interval T from the surface of the insulating layer 284 to the surface protective substrate 206 can be set to about 15 μm. Therefore, in the organic EL device 1 of the present embodiment, a thin film sealing structure can be realized without increasing the film thickness.

Next, the planar structure of the organic EL device 1 will be described with reference to FIG.
FIG. 6 is an enlarged plan view of the main part of FIG. 2, but shows only the cathode 50, the buffer layer 210, and the gas barrier layer 30. In addition, the other structure of the organic EL apparatus 1 shall be formed as shown in FIGS. 1-5 and FIG.

As shown in FIG. 6, the organic EL device 1 includes a cathode forming region 50AR composed of the cathode 50 and a buffer layer forming region (buffer layer planar pattern) 21 composed of the buffer layer 210 on the substrate 20.
0AR and a gas barrier layer forming region 30AR composed of the gas barrier layer 30 are sequentially overlapped. Further, the buffer layer forming region 210A is larger than the area of the cathode forming region 50AR.
The area of R is large, and the gas barrier layer forming region 30 is larger than the area of the buffer layer forming region 210AR.
The area of AR is large (50AR <210AR <30AR). Thus, the cathode peripheral edge portion 50E is covered with the buffer layer 210, and the buffer layer peripheral edge portion (peripheral edge portion) 210E is covered with the gas barrier layer 30. Therefore, the gas barrier layer peripheral portion 30E is located at the outermost periphery among the peripheral portions 50E, 210E, and 30E.

Here, in the vertical direction of the paper surface (hereinafter referred to as the Y direction) and the horizontal direction of the paper surface (hereinafter referred to as the X direction) in FIG. . Moreover, the cathode peripheral part 50E and the gas barrier layer peripheral part 30E are formed linearly.
Between the peripheral portions 50E and 30E, the buffer layer peripheral portion 210E has a waveform pitch p of about 0. 0.
The swing width t1 is about 0.01 to 0.1 mm. Note that the deflection width t1 is not necessarily uniform, and may be within this range.

Further, the position where the buffer layer peripheral portion 210E is closest to the gas barrier layer peripheral portion 30E side is defined as W2.
In this case, the width t2 between the symbol W2 and the gas barrier layer peripheral portion 30E is about 0.2 to 2 mm.
It is formed with a degree.
Further, when the position where the buffer layer peripheral portion 210E is closest to the cathode peripheral portion 50E side is W3, the width t3 between the reference sign W3 and the cathode peripheral portion 50E is about 0.1 to 1 mm. .
Accordingly, the sum of the minimum values of the deflection width t1 and the widths t2 and t3 is a value smaller than 0.4 mm. Therefore, the sealing structure for the cathode 50 by the buffer layer 210 and the gas barrier layer 30 can be formed with a sealing width of 0.4 mm or less.

Next, the circuit unit 11 formed below the light emitting element will be described with reference to FIG. The circuit unit 11 is formed on the substrate 20 and constitutes the base body 200. That is, a base protective layer 281 mainly composed of SiO ₂ is formed on the surface of the substrate 20, and a silicon layer 241 is formed thereon. On the surface of the silicon layer 241, SiO
₂ and / or a gate insulating layer 282 mainly composed of SiN is formed.

In the silicon layer 241, a region overlapping with the gate electrode 242 with the gate insulating layer 282 interposed therebetween is a channel region 241a. The gate electrode 242 is a part of the scanning line 101 (not shown). On the other hand, a first interlayer insulating layer 283 mainly composed of SiO ₂ is formed on the surface of the gate insulating layer 282 that covers the silicon layer 241 and on which the gate electrode 242 is formed.

In the silicon layer 241, a low concentration source region 241b and a high concentration source region 241S are provided on the source side of the channel region 241a, while the channel region 241a is provided.
A low-concentration drain region 241c and a high-concentration drain region 241D are provided on the drain side of the semiconductor layer to form a so-called LDD (Light Doped Drain) structure. Among these, the high-concentration source region 241S is connected to the source electrode 243 through a contact hole 243a that opens over the gate insulating layer 282 and the first interlayer insulating layer 283. The source electrode 243 is configured as a part of the above-described power supply line 103 (see FIG. 1, extending in the direction perpendicular to the paper surface at the position of the source electrode 243 in FIG. 7). On the other hand, the high concentration drain region 241D
Is connected to a drain electrode 244 formed of the same layer as the source electrode 243 through a contact hole 244a that is opened through the gate insulating layer 282 and the first interlayer insulating layer 283.

The upper layer of the first interlayer insulating layer 283 on which the source electrode 243 and the drain electrode 244 are formed is covered with a second interlayer insulating layer 284 mainly composed of, for example, an acrylic resin component. The second interlayer insulating layer 284 is made of a material other than an acrylic insulating film, for example, SiN, S
iO ₂ or the like can also be used. A pixel electrode 23 made of ITO is formed on the surface of the second interlayer insulating layer 284 and is connected to the drain electrode 244 through a contact hole 23 a provided in the second interlayer insulating layer 284. That is, the pixel electrode 23
Is connected to the high concentration drain region 241D of the silicon layer 241 through the drain electrode 244.

TFTs (driver circuit TFTs) included in the scanning line driving circuit 80 and the inspection circuit 90
That is, for example, among these drive circuits, the N-channel type or P-channel type TFT constituting the inverter included in the shift register has the same structure as the drive TFT 123 except that it is not connected to the pixel electrode 23. It is said.

On the surface of the second interlayer insulating layer 284 on which the pixel electrode 23 is formed, the pixel electrode 23, the lyophilic control layer 25 and the organic partition layer 221 described above are provided. The lyophilic control layer 25 is mainly composed of a lyophilic material such as SiO ₂ , and the organic partition layer 221 is made of acrylic or polyimide. Then, on the pixel electrode 23, the hole transport layer 70 and the organic light emitting layer are formed inside the opening 25 a provided in the lyophilic control layer 25 and the opening 221 a surrounded by the organic partition wall layer 221. 60 are stacked in this order. In addition, “lyophilic” of the lyophilic control layer 25 in this embodiment means that the lyophilic property is higher than at least materials such as acrylic and polyimide constituting the organic partition layer 221. .
The layers up to the second interlayer insulating layer 284 on the substrate 20 described above constitute the circuit unit 11.

Here, in the organic EL device 1 of the present embodiment, each organic light emitting layer 60 is formed so that the light emission wavelength bands correspond to the three primary colors of light in order to perform color display. For example, the organic light emitting layer 6
0, the red organic light-emitting layer 60R corresponding to red in the emission wavelength band, the green organic light-emitting layer 60G corresponding to green, and the blue organic EL layer 60B corresponding to blue in the corresponding light-emitting regions R, G, and B, respectively. And one pixel for performing color display is configured with the light emitting regions R, G, and B. Further, a BM (black matrix) (not shown) in which metallic chromium is formed by sputtering or the like is formed between the organic partition layer 221 and the lyophilic control layer 25 at the boundary between the light emitting regions of the respective colors.

(Method for manufacturing organic EL device)
Next, an example of the manufacturing method of the organic EL device 1 according to the present embodiment will be described with reference to FIGS. Each of the cross-sectional views shown in FIGS. 8 and 9 corresponds to the cross-sectional view taken along the line AB in FIG. Each cross-sectional view shown in FIG. 10 and FIG. 11 is a diagram for explaining in detail the process of forming the buffer layer 210, the organic adhesion layer 220, and the gas barrier layer 30.
In the present embodiment, the organic EL device 1 is a top emission type, and the step of forming the circuit unit 11 on the surface of the substrate 20 is not different from the prior art, so the description thereof is omitted.

First, as shown in FIG. 8A, a transparent conductive film to be the pixel electrode 23 is formed so as to cover the entire surface of the substrate 20 on which the circuit portion 11 is formed, and this transparent conductive film is further patterned. As a result, the pixel electrode 23 that is electrically connected to the drain electrode 244 through the contact hole 23a of the second interlayer insulating layer 284 is formed. At the same time, a dummy pattern 26 made of the same material as the pixel electrode 23 is also formed in the dummy region.
3 and 4, the pixel electrode 23 and the dummy pattern 26 are collectively referred to as the pixel electrode 23. The dummy pattern 26 is configured not to be connected to the lower metal wiring via the second interlayer insulating layer 284. That is, the dummy pattern 26 is arranged in an island shape and has substantially the same shape as the shape of the pixel electrode 23 formed in the light emitting region. Of course, the structure may be different from the shape of the pixel electrode 23 formed in the light emitting region. In this case, the dummy pattern 26 includes at least the one located above the drive voltage conducting portion 310 (340).

Next, as shown in FIG. 8B, a lyophilic control layer 25, which is an insulating layer, is formed on the pixel electrode 23, the dummy pattern 26, and the second interlayer insulating film. In the pixel electrode 23, the lyophilic control layer 25 is formed so as to partially open, and holes can be transferred from the pixel electrode 23 in the opening 25a (see also FIG. 3). On the contrary, in the dummy pattern 26 in which the opening 25a is not provided, the insulating layer (lyophilic control layer) 25 serves as a hole movement shielding layer and does not cause hole movement. Subsequently, in the lyophilic control layer 25, a BM (black matrix) (not shown) is formed in a concave portion formed between two different pixel electrodes 23. Specifically, the concave portion of the lyophilic control layer 25 is formed by sputtering using metallic chromium.

Then, as shown in FIG. 8C, an organic partition layer 221 is formed so as to cover a predetermined position of the lyophilic control layer 25, specifically, the BM described above (step of forming a partition). As a specific method for forming the organic partition layer, for example, an organic layer is formed by applying a resist such as an acrylic resin or a polyimide resin dissolved in a solvent by various coating methods such as a spin coating method or a dip coating method. . The constituent material of the organic layer may be any material as long as it does not dissolve in the ink solvent described later and is easily patterned by etching or the like.

Furthermore, the organic layer is patterned using photolithography technology and etching technology,
By forming the opening 221a in the organic layer, the organic partition layer 221 having a wall surface in the opening 221a is formed. Here, the wall surface forming the opening 221 is formed such that the angle θ with respect to the surface of the base body 200 is 110 degrees or more and 170 degrees or less.
In this case, the organic partition wall layer 221 includes at least the one located above the drive control signal conducting unit 320.

Next, a region showing lyophilicity and a region showing liquid repellency are formed on the surface of the organic partition layer 221. In the present embodiment, each region is formed by plasma processing. Specifically, in the plasma treatment, the upper surface of the organic partition wall layer 221, the wall surface of the opening 221a, the electrode surface 23c of the pixel electrode 23, and the upper surface of the lyophilic control layer 25 are made lyophilic. The ink making step includes an ink repellent step, an ink repellent step for making the upper surface of the organic partition wall layer 211 and the wall surface of the opening 221a liquid repellent, and a cooling step.

That is, the substrate 200 is heated to a predetermined temperature, for example, about 70 to 80 ° C., and then a plasma treatment (O ₂ plasma treatment) using oxygen as a reactive gas in an atmospheric atmosphere is performed as an ink-philic process. Next, as an ink repellent process, plasma treatment using CF ₄ as a reactive gas (CF ₄ plasma treatment) is performed in an air atmosphere, and then the substrate heated for the plasma treatment is cooled to room temperature. In addition, lyophilicity and liquid repellency are imparted to predetermined locations.

In this CF ₄ plasma treatment, the electrode surface 23c of the pixel electrode 23 and the lyophilic control layer 25 are somewhat affected, but the structure of the ITO that is the material of the pixel electrode 23 and the lyophilic control layer 25. Since materials such as SiO ₂ and TiO ₂ have poor affinity for fluorine, the hydroxyl group imparted in the ink-philic process is not replaced with the fluorine group, and the lyophilic property is maintained.

Next, the hole transport layer 70 is formed by a hole transport layer forming step (step of forming a light emitting functional layer). In this hole transport layer forming step, for example, a droplet discharge method such as an inkjet method,
A hole transport layer material is applied onto the electrode surface 23 c by spin coating or the like, and then a drying process and a heat treatment are performed to form the hole transport layer 70 on the electrode 23. When the hole transport layer material is selectively applied by, for example, an ink jet method, first, the hole transport layer material is filled in the ink jet head (not shown), and the discharge nozzle of the ink jet head is placed in the lyophilic control layer 25. A droplet with a controlled liquid amount per droplet is ejected from the ejection nozzle onto the electrode surface 23c while the ink jet head and the substrate 200 are relatively moved so as to face the electrode surface 23c positioned in the formed opening 25a. To do. Next, the discharged droplets are dried, and the hole transport layer 70 is formed by evaporating the dispersion medium and solvent contained in the hole transport layer material.

Here, the droplets ejected from the ejection nozzle spread on the electrode surface 23c that has been subjected to the lyophilic treatment, and are filled in the opening 25a of the lyophilic control layer 25. On the other hand, droplets are repelled and do not adhere to the upper surface of the organic barrier layer 221 that has been subjected to ink repellent treatment. Therefore, even if the droplet is deviated from the predetermined discharge position and discharged onto the upper surface of the organic partition layer 221, the upper surface is not wetted by the droplet, and the repelled droplet is opened in the lyophilic control layer 25. Roll into part 25a.
In addition, after this hole transport layer formation process, in order to prevent the oxidation of the hole transport layer 70 and the organic light emitting layer 60, it is preferable to carry out in inert gas atmospheres, such as nitrogen atmosphere and argon atmosphere.

Next, the organic light emitting layer 60 is formed by the light emitting layer forming step (step of forming the light emitting functional layer 110). In this light emitting layer forming step, the light emitting layer forming material is discharged onto the hole transport layer 70 by, for example, an ink jet method, and then dried and heat-treated, whereby the inside of the opening 221a formed in the organic partition wall layer 221 is formed. Then, the organic light emitting layer 60 is formed. In this light emitting layer forming step, a nonpolar solvent that is insoluble in the hole transporting layer 70 is used as a solvent used for the light emitting layer forming material in order to prevent re-dissolution of the hole transporting layer 70.
In this light emitting layer forming step, for example, a blue (B) light emitting layer forming material is selectively applied to a blue light emitting region by an ink jet method and dried, and then green (G),
Red (R) is also selectively applied to the light emitting region and dried.
Further, if necessary, an electron injection layer may be formed on the organic light emitting layer 60 as described above.

Next, as shown in FIG. 9A, the cathode 50 is formed by the cathode layer forming step (step of forming the second electrode). In this cathode layer forming step, for example, ITO is formed by a physical film forming method such as an ion plating method to form the cathode 50. At this time, the cathode 50 is
In addition to covering the upper surfaces of the organic light emitting layer 60 and the organic partition wall layer 221, the wall surface forming the outer portion of the organic partition wall layer 221 is also formed so as to cover it.
Next, as shown in FIGS. 9B and 9C, the cathode protective layer 55, the buffer layer 210, and the organic adhesion layer 22.
0 and the gas barrier layer 30 are sequentially formed.

Here, a method of forming the buffer layer 210, the organic adhesion layer 220, and the gas barrier layer 30 will be described in detail with reference to FIGS.
10 and 11, the description will be made assuming that the circuit portion 11, the light emitting functional layer 110, and the cathode 50 are formed on the substrate 20.

First, as shown in FIG. 10A, a cathode protective layer 55 is formed on the cathode 50. As a method for forming the cathode protective layer 55, for example, a high-density plasma film forming method such as a plasma CVD method, an ECR sputtering method, or an ion plating method is employed. Further, the cathode protective layer 55 completely covers the organic barrier layer 221 and the cathode 50, so that the insulating layer 284 on the outer periphery of the base body 200 is used.
Form up to the top. The cathode protective layer 55 is formed in a vacuum atmosphere, and its pressure is 0.
. It is set to about 1 to 10 Pa. Further, by increasing the surface energy of the outermost surface of the cathode protective layer 55 by oxygen plasma treatment or the like, it becomes easy to reduce the flatness of the buffer layer and the side edge portion thereafter.
By forming the cathode 50 and the cathode protective layer 55 in this way, the structure shown in the cross section of FIG. 9A is formed.

Next, after inverting the substrate 20 as shown in FIG. 10B, FIG. 10C to FIG. 10E and FIG.
And as shown to FIG. 11B, the screen printing method (application | coating process) under a vacuum atmosphere is performed, and the buffer layer 210 is formed (buffer layer formation process).
As a material for applying the buffer layer 210, an application material in which a curing agent and a reaction accelerator are mixed with an epoxy monomer / oligomer material as described above is employed. These materials are used after being mixed before coating, and the viscosity after mixing is 500 to 2000 at room temperature (25 ° C.).
The viscosity range is preferably 0 mPa · s. When the viscosity is lower than this, dripping from the screen mesh M and protrusion to the emulsion layer Ma occur, resulting in poor film thickness stability and patternability. In addition, when the viscosity is higher than this, since the flatness becomes worse, the mesh mark remains, and the bubbles entrained when the mesh is detached grows greatly, so that crater-like coating omission is likely to occur, and after the defoaming step But bubbles are likely to remain.

Furthermore, as the viscosity of the coating material, as a preferable condition, the above 500 to 20000 mP
It is preferable that it is the range of 1000-10000 mPa * s among the range of a * s. By making the viscosity lower than 10000 mPa · s, it is possible to further suppress residual bubbles. Moreover, by making it higher than 1000 mPa · s, it is difficult for bubbles to blow in the screen printing process, and craters are hardly generated. This makes it possible to obtain a uniform film. In addition, as will be described later, the occurrence of dark spots can be reliably suppressed. Therefore,
By setting the room temperature viscosity of the coating material as described above, maintaining the shape of the buffer layer, flattening the surface,
It is possible to surely realize the miniaturization of the bubbles and the low angle of the side end portion, and to suppress the generation of dark spots.

Further, the thickness of the buffer layer 210 needs to be thicker than the height of the organic partition wall layer 211 so as to realize flattening and relaxation of stress caused by unevenness, and is preferably about 3 to 10 μm, for example. These viscosity and film thickness controls also affect the formation of the contact angle α and are important for achieving 30 ° or less. Although there is preferably no stress, a slight tensile stress may occur.
The film density is preferably a porous film having a relatively low density in order to reduce stress as much as possible, and is preferably 0.8 to 1.8 g / cm ³ .

Next, the screen printing method will be described.
The screen printing method is a method capable of coating and forming in a reduced-pressure vacuum atmosphere, and is a method that excels at a coating solution having a relatively medium to high viscosity. In particular, the screen printing method has an advantage that the coating control is simple by the pressure movement of the squeegee (coating means) S, and the film thickness uniformity and the patterning property are excellent using the screen mesh (mask) M.

First, as shown in FIG. 10C, the screen mesh M is disposed on the cathode protective layer 55.
Here, a liquid-repellent emulsion layer Ma is formed on the non-coated portion of the screen mesh M so as to cover a portion that is not coated.
Further, the planar shape of the screen mesh M is such that a mold for forming the buffer layer peripheral portion 210E of FIG. 6 into a wave shape is formed.

Next, the screen mesh M is disposed on the substrate 20 in a non-contact state as shown in FIG. 10D while maintaining a reduced-pressure vacuum atmosphere in the range of 10 to 1000 Pa. Thereafter, the coating material 210a of the buffer layer 210 before curing is applied (dropped) to one end of the screen mesh M (on the emulsion layer Ma) by a dispenser nozzle or the like (the coating material is placed on the substrate through a mask). Dropping step).

Next, the substrate is brought into contact with the screen mesh, and the coating material 210a is moved toward the other end of the screen mesh M while pressing the coating material 210a against the substrate 20 with the squeegee S (relative movement between the substrate and the coating means). Thereby, the coating material is instantly transferred onto the cathode protective layer 55 according to the pattern of the screen mesh M, and the coating film 210b is applied and formed (step of forming the coating film). Such a screen printing method is performed in a vacuum atmosphere. Moreover, after forming the cathode protective layer 55, it is performed in a vacuum atmosphere without returning to the atmospheric pressure atmosphere.

Next, as shown in FIG. 10E, the screen mesh M is peeled from the coating film 210b on the substrate 20 (step of peeling the mask from the coating film). Here, when the screen mesh M is peeled from the coating film 210 b, the screen mesh M is peeled while being inclined with respect to the substrate 20. By doing so, the force applied to the substrate generated when the screen mesh is peeled is dispersed on the line, so that the electrode (cathode) having a weak adhesion force is prevented from being peeled off, and the uniform coating film 2
10b is formed. As a result, the surface of the buffer layer 210 formed after the thermosetting process can be planarized.
The screen mesh M may be a flexible plate. In this case, the screen mesh M can be peeled off while being curved in the vicinity of the boundary between the contact surface where the screen mesh M contacts the coating film 210b and the exposed surface of the coating film 210b. Accordingly, the peeling speed between the mask and the coating film can be stabilized and peeled while keeping the peeling angle of the screen mesh as small as possible.
As described above, by performing the processing shown in FIGS. 10C to 10E, the coating material coating step for the buffer layer 210 is completed.

Next, as shown in FIG. 11A, a defoaming step is performed in a nitrogen gas atmosphere (inert gas atmosphere).
Here, the nitrogen gas atmosphere is formed by enclosing nitrogen gas in a sealed space (for example, in a vacuum chamber) held in a vacuum atmosphere after performing the screen printing method in the previous vacuum atmosphere. Means atmosphere. Thereby, the coating film 210b does not absorb moisture due to the intake of moisture in the atmosphere. In addition, the nitrogen gas atmosphere pressure in this process is
The pressure is higher than the screen printing method. In this embodiment, the nitrogen gas atmosphere is set to a pressure of 50000 to 110000 Pa. If it does in this way, a difference will arise between the pressure in the bubble mixed in coating film 210b in the case of a screen printing method, and the pressure of nitrogen gas atmosphere, and a bubble is minimized.

Next, as shown in FIG. 11B, a thermosetting process is performed.
The said hardening process is performed by performing the heat processing of 60-100 degreeC to the buffer layer 210b under the same nitrogen gas (or dry air) atmospheric pressure as a defoaming process. By performing such a curing process, the epoxy monomer / oligomer material contained in the buffer layer 210b before curing reacts with the curing agent and the reaction accelerator, and the epoxy monomer / oligomer is three-dimensionally cross-linked. Resin 210 is formed. Further, by performing the heat treatment, not only such a curing phenomenon occurs, but also the shape of the side end portion of the buffer layer 210 is melted (softened). By performing such heat treatment, the side surface end portion has a contact angle α (see FIG. 5).

Next, as illustrated in FIG. 11C, the substrate 20 is inverted, and the organic adhesion layer 220 is formed on the surface of the buffer layer 210. Specifically, by exposing the surface of the buffer layer 210 to a reduced-pressure plasma atmosphere generated by mixing an oxygen gas and an inert gas such as argon, an oxide layer in which the surface of the buffer layer 210 is oxidized is formed. The
As specific film forming conditions, a high-density plasma generator is used, oxygen gas: argon gas = 1: 4 is mixed, and the degree of vacuum is 0.6 Pa and the exposure time is 30 seconds.
By forming such an oxide layer, the surface of the buffer layer 210 is also cleaned.
By thus forming the buffer layer 210 and the organic adhesion layer 220, the structure shown in the cross section of FIG. 9B is formed.

Next, as shown in FIG. 11D, the gas barrier layer 30 is formed on the surface of the organic adhesion layer 220.
The film thickness of the gas barrier layer 30 is set in the range of 300 to 700 nm as described above, and is 400 nm in the present embodiment. The gas barrier layer 30 is a silicon compound formed by a low-pressure high-density plasma film forming method or the like in an atmosphere of 0.1 to 10 Pa, and a transparent thin film mainly made of silicon oxide, silicon oxynitride, or silicon nitride is preferable. . The film density is preferably 2.3 / cm ³ or more so as to completely block water vapor of small molecules.

As a specific method for forming the gas barrier layer 30, the gas barrier layer 30 is preferably formed using a plasma CVD method, an ion plating method, or an ECR plasma sputtering method, which is a high-density plasma film forming method capable of forming a dense film at a low temperature. These methods are selected in a timely manner in consideration of mass productivity,
In view of the uniformity of plasma over a large area, it is preferable to employ an ion plating method.
Further, the formation process by the high-density plasma film formation method is performed by repeating the film formation process with 100 nm as a film formation unit and the cooling process. For example, in the case where a film thickness of 400 nm is formed in a lump, the radiation heat of plasma generated in the film forming apparatus is applied and accumulated, which causes deterioration of the light emitting functional layer. On the other hand, by cooling after 100 nm film formation, cooling after 100 nm film formation, and then 100 nm film formation in the order of film formation process and cooling process, deterioration of the light emitting functional layer due to heat is suppressed. In addition, the gas barrier layer 30 can be formed.

Thus, the gas barrier layer 3 is formed by forming the sub-barrier layer 30 made of a silicon compound.
0 becomes a dense layer having no defect and has a better barrier property against oxygen and moisture. The gas barrier layer 30 preferably has a film quality of a film density of 2.3 to 3.0 g / cm ³ . As described above, the structure shown in the cross section of FIG. 9C is formed by forming the gas barrier layer 30.

Next, as shown in FIG. 11E, the adhesive layer 205 and the surface protection substrate 20 are formed on the gas barrier layer 30.
6 is provided. The adhesive layer 205 is applied substantially uniformly on the gas barrier layer 30 by a dispenser, a slit coat method, or the like, and the surface protection substrate 206 is bonded thereon.
When the protective layer 204 is provided on the gas barrier layer 30 in this manner, the surface protective substrate 206 has functions such as pressure resistance, wear resistance, antireflection, gas barrier property, and ultraviolet blocking property. The organic light emitting layer 60, the cathode 50, and also the gas barrier layer can be protected by the surface protective substrate 206, and thus the life of the light emitting element can be extended.
In addition, since the adhesive layer 205 exhibits a buffering function against mechanical impact, when mechanical impact is applied from the outside, the mechanical impact on the gas barrier layer 30 and the light emitting element inside thereof is reduced,
It is possible to prevent functional deterioration of the light emitting element due to this mechanical impact.
As described above, the organic EL device 1 is formed.

In the above-described embodiment, the top emission type organic EL device 1 has been described as an example. However, the present invention is not limited to this, and the bottom emission type also emits emitted light on both sides. Applicable to types.

Further, in the case of a bottom emission type or a type that emits emitted light on both sides, the switching TFT 112 and the driving TFT 123 formed on the base 200 are not directly under the light emitting element, but the lyophilic control layer 25 and It is preferable to form it immediately below the organic partition layer 221 to increase the aperture ratio.
Further, in the organic EL device 1, the first electrode in the present invention functions as an anode and the second electrode functions as a cathode. However, by inverting these, the first electrode functions as a cathode and the second electrode functions as an anode. You may comprise. However, in that case, it is necessary to replace the formation positions of the organic light emitting layer 60 and the hole transport layer 70.

As described above, in the organic EL device 1 according to this embodiment, the step of forming the buffer layer 210 is performed by using a coating material having an epoxy monomer / oligomer material and a curing agent without using a solvent in a vacuum atmosphere. The coating process applied to the surface and the coating material is cured to provide the buffer layer 2
Therefore, the buffer layer 210 can be formed by curing the epoxy-based monomer / oligomer material and the curing agent by the thermal curing process.
Here, since the coating process is performed in a vacuum atmosphere, the coating process is performed in an atmosphere from which moisture and oxygen are removed, and it is possible to suppress the penetration of moisture and oxygen into the buffer layer 210. it can. Further, since the coating process is performed without using a solvent, the solvent does not remain in the buffer layer 210. Accordingly, almost no moisture or oxygen remains in the buffer layer 210, and no solvent molecules are present, so that the emission characteristics deteriorate due to the penetration of these into the organic light emitting layer 60 and the cathode 50. The emission lifetime can be shortened and the occurrence of a non-emission region can be suppressed. In particular, it is preferably applied to an organic EL device having an organic light emitting layer 60 made of a polymer material. In an organic EL device having an organic light emitting layer 60 made of a low molecular material, the organic light emitting layer 60 generally has an electron transport property of LUMO level of 3.0 eV to 3.5 eV such as tris (8-quinolinolato) aluminum. The cathode is made of a material having a work function of about 3.5 eV such as magnesium. On the other hand, the LUMO level of the polymer light-emitting material used in the organic EL device having the organic light-emitting layer 60 made of a polymer material is lower by about 1.0 eV than the low-molecular light-emitting material having the same emission color. Therefore, in the polymer light emitting material, it is necessary to use a material having a relatively low work function, that is, a high reactivity, as the cathode as compared with the case of the low molecular light emitting material. By applying the present invention, the reliability of the light-emitting element can be improved because solvent molecules do not react with the cathode even when a highly reactive cathode is used.
In the thermosetting step, the monomer / oligomer material is cured by a curing agent, so that the monomer or oligomer is cross-linked, and the buffer layer 21 made of a polymer organic material (polymer).
0 can be formed.
Further, in the thermosetting process, the buffer layer 210b before curing is subjected to heat treatment, so that not only the coating material is cured to form the buffer layer 210 but also the peripheral portion of the buffer layer 210 is melted (softened) by heat. And an inclined portion can be formed at the side end portion of the buffer layer 210. Thereby, since the gas barrier layer 30 formed above the buffer layer 210 is gently formed following the shape of the buffer layer 210, the gas barrier property can be improved.
Further, the total thickness of the gas barrier layer 30 and the buffer layer 210 that are laminated by such a manufacturing method can be made thinner than the conventional one. Therefore, in the organic EL device of the present invention, a thin film sealing structure can be realized without increasing the film thickness.

In this embodiment, an epoxy-based material is employed as the monomer / oligomer material, and the molecular weight thereof is 3000 or less. Accordingly, the buffer layer 210 can be formed by being cured by an ester bond in a thermosetting process.
Further, by adopting the epoxy material in this way, a polymer film having high water resistance can be easily formed from a low molecular weight monomer by a low temperature curing step. Therefore, it is not necessary to form a buffer layer by applying a liquid material diluted with an organic solvent to reduce the viscosity as in the prior art, and the influence of the residual solvent can be eliminated. In addition, in an epoxy material, a monomer / oligomer material can be applied and formed in a low viscosity state. On the other hand, acrylic materials that have been used as the material of the buffer layer 210 until now need to be used as a raw material in a polymer state because they are harmful and dangerous in the monomer state, have high water absorption, and have a very large shrinkage during curing. It was difficult to achieve a desired viscosity without using an organic solvent. On the other hand, an epoxy-based material can be adjusted to a low-viscosity monomer / oligomer material while suppressing film shrinkage, and a film can be easily formed.

Moreover, it is preferable to employ an acid anhydride material as the curing agent, and low temperature curing is possible by combining a reaction accelerator of alcohols, and an epoxy monomer / oligomer can be formed using the acid anhydride. When cured, high-density ester bonds are formed, and the buffer layer 210 made of a polymer organic material having high surface energy adhesion, heat resistance, and water resistance can be formed.

Further, since the coating process uses a screen printing method in a vacuum atmosphere, the coating material can be formed on the cathode protective layer 55 with high accuracy by screen mesh.
Thereby, even in a narrow frame structure with a narrow sealing width, it is possible to suppress damage to the organic light emitting layer 60 and the cathode 50 due to intrusion of oxygen and moisture from the side surface.
Further, since the surface of the buffer layer 210 is planarized, the gas barrier layer 30 formed thereabove has a uniform film quality, and a uniform gas barrier layer 30 having no defects can be formed.

In the screen printing method, the coating film 210b is tilted while the screen mesh M is inclined.
Therefore, a uniform coating film 210b can be formed without damaging the cathode 50. In addition, the surface of the buffer layer 210 formed after thermosetting can be planarized.

In addition, since it has a defoaming step performed in an inert gas atmosphere at a higher pressure than the coating step, it is possible to apply pressure to the buffer layer 210 without performing contact load by the external pressure of the inert gas atmosphere. it can. Thereby, the bubble of a vacuum state can be made very minute. In addition, almost no gas is present inside the bubbles that have been pressed and become extremely fine,
The organic light emitting layer 60 and the cathode 50 are not affected. Since the bubbles are extremely small in the buffer layer 210, the surface of the buffer layer 210 has flatness.
In addition, a crater-like coating omission part that is generated by the bursting of bubbles is not formed on the surface of the buffer layer 210.

Further, since the peripheral portion 210E of the buffer layer 210 formed by the screen printing method is formed in a wave shape, the peripheral length of the buffer layer forming region 210AR is made longer than in the case of a straight shape. Can do. As a result, the adhesion with the gas barrier layer 30 that is the upper layer film of the buffer layer 210 can be improved, and the buffer layer 2 at the buffer layer peripheral portion 210E.
Ten stresses can be dispersed. And the film | membrane intensity | strength of the buffer layer 210 can be improved and high reliability can be acquired. Since such a wave shape can be defined as desired by the mask shape of the screen printing method, it can be easily formed without increasing the number of steps for forming the wave shape.

Moreover, since the room temperature viscosity of a coating material is the range of 500-20000 mPa * s, a screen printing method can be performed easily. Therefore, the shape retention of the buffer layer 210 can be easily realized, the surface of the buffer layer 210 can be easily flattened, and the bubbles can be miniaturized.

In particular, by setting the room temperature viscosity of the coating material in the range of 1000 to 10000 mPa · s, the buffer layer shape can be maintained, the surface can be flattened, the bubbles can be made extremely small, and the side edges can be lowered at a low angle. And generation of dark spots can be suppressed. Here, the film thickness of the buffer layer 210 is 3
Since the thickness is set to 10 μm, the same effect can be obtained.

Moreover, since the organic adhesion layer 220 having a higher surface energy and a larger amount of oxygen atoms than the buffer layer 210 is formed between the buffer layer 210 and the gas barrier layer 30, a cleaning effect on the surface of the buffer layer 210 is obtained. Adhesion between the buffer layer 210 and the gas barrier layer 30 can be improved. Therefore, peeling of the gas barrier layer 30 can be suppressed and the durability of the organic EL device 1 can be improved.

Moreover, since the angle of the side surface end portion of the buffer layer 210 is 30 ° or less, the buffer layer 21
When the gas barrier layer 30 is formed on the upper layer side of 0, the gas barrier layer 30 can be formed with a uniform film thickness. Thereby, the gas barrier property with respect to the buffer layer 210 can be obtained reliably.
In order to set the angle of the side end portion to 30 ° or less, it is performed by performing a heat treatment as the curing step. As a result, the periphery of the buffer layer 210 is melted (softened) by heat.
Thus, an inclined portion of 30 ° or less can be formed at the side end portion of the buffer layer 210. As a result, the gas barrier layer 30 formed above the buffer layer 210 is gently formed following the shape of the buffer layer 210, so that the gas barrier property of the side surface is not destroyed even by thermal expansion and contraction of the buffer layer. Can be improved.

In addition, since the electrode protective layer 55 is formed between the cathode 50 and the buffer layer 210, the electrode protective layer 55 having high hardness and surface energy prevents the cathode from contacting the screen mesh of the buffer layer process to be formed later. By protecting 50 and improving the wettability of the material, it is possible to reduce the flatness and the contact angle of the side edge and to improve the adhesion to the buffer layer.

(Second Embodiment of Organic EL Device)
Next, an organic EL device according to a second embodiment of the present invention will be described.
In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.
FIG. 12 is a schematic cross-sectional view showing a cross-sectional structure of the organic EL device of the present embodiment. In FIG. 12, only each pixel area of RGB is shown, but actually, a plurality of pixel areas are formed on the entire surface of the real light emitting area 4 in the organic EL device as shown in FIGS. To do.

This embodiment is different from the first embodiment in that the white organic light emitting layer 60W that emits white light is used as the organic light emitting layer, and that the color filter substrate is used as the surface protection substrate.
As shown in FIG. 12, the organic EL device 1 </ b> A of the present embodiment includes a white organic light emitting layer 60 </ b> W that emits white light as the light emitting functional layer 110. Also, as in the first embodiment, R
Since it is not necessary to separately form GB, it may be formed on each pixel electrode 23 so as to straddle the organic partition layer 221.
The color filter substrate 207 is obtained by forming a red coloring layer 208R, a green coloring layer 208G, a blue coloring layer 208B, and a black matrix 209 on a substrate body 207A. Further, since the colored layers 208R, 208G, 208B and the black matrix 209 are formed so as to face each other toward the substrate 2, they are in contact with and fixed to the adhesive layer 205. The material of the substrate body 207A is the surface protection substrate 20 of the first embodiment.
The same as 6 is adopted.
In addition, each of the colored layers 208R, 208G, and 208B is disposed to face the white organic light emitting layer 60W on the pixel electrode 23, and the emitted light of the white organic light emitting layer 60W is emitted from the colored layer 20.
By transmitting each of 8R, 208G, and 208B, red light, green light, and blue light are emitted to the viewer side. Therefore, in the organic EL device 1A of the present embodiment, color display is performed by the color filter substrate 207 using the light emitted from the white organic light emitting layer 60W and having the colored layers 208 of a plurality of colors.

Further, the distance between the colored layers 208R, 208G, and 208B and the white organic light emitting layer 60W is required to be as short as possible so that the emitted light of the white organic light emitting layer 60W is emitted only to the opposed colored layers. This is because when the distance is long, there is a high possibility that the emitted light of the white organic light emitting layer 60W is emitted to the adjacent colored layer, and in order to suppress this, the distance should be shortened. Is preferred.

In this embodiment, a thin film sealing structure is realized by the gas barrier layer 30 and the buffer layer 210. In FIG. 12, the color filter substrate 207 extends from the surface of the insulating layer 284.
The interval T is up to about 15 μm. Therefore, the white organic light emitting layer 60W and the colored layer 2
The distances from 08R, 208G, and 208B are short. Thereby, the emitted light of the white organic light emitting layer 60 </ b> W is emitted only to the opposed colored layers, and the emitted light can be prevented from leaking to the adjacent colored layers. Thereby, color mixing can be suppressed.

Moreover, in this embodiment, since the monochromatic white organic light emitting layer 60W is used, it is not necessary to separately form organic light emitting layers for each RGB. Specifically, in a mask vapor deposition step for forming a low molecular weight white organic light emitting layer, a droplet discharge step for forming a high molecular weight white organic light emitting layer, etc.
Since only a single type of white organic light-emitting layer needs to be formed in one step, the manufacturing process becomes easier as compared with the case where the organic light-emitting layer for each RGB is formed and separated.

In the present embodiment, the white organic light emitting layer 60W is replaced with the colored layers 208R, 208G, 208B.
However, instead of the white organic light emitting layer 60W, the RGB organic light emitting layers 60R, 60G, and 60B similar to those of the first embodiment may be employed. In this case, the same colored layer and the organic light emitting layer are arranged to face each other. In this configuration,
Color correction of the emitted light of each color organic light emitting layer can be performed by the colored layers 208R, 208G, 208B.

(Third embodiment of organic EL device)
Next, an organic EL device according to a third embodiment of the invention will be described.
In the present embodiment, the same components as those in the first and second embodiments are denoted by the same reference numerals and description thereof is omitted.
FIG. 13 is a schematic cross-sectional view showing a cross-sectional structure of the organic EL device of this embodiment. In FIG. 13, only the RGB pixel regions are shown, but actually, a plurality of pixel regions are formed on the entire surface of the actual light emitting region 4 in the organic EL device as shown in FIGS. To do.

The present embodiment is different from the first and second embodiments in that the low-molecular light emitting functional layer 300 is employed. In addition, the organic EL device 1B of the present embodiment includes the color filter substrate 20
7 is irradiated with white light from a low molecular weight white light emitting element. Therefore, color display is performed by the colored layers 208R, 208G, and 208B.

Next, the structure of the low molecular weight light emitting functional layer sandwiched between the pixel electrode 23 and the cathode 50 will be described. In each of the pixels RGB, the configuration of the low molecular weight light emitting functional layer is the same.
As shown in FIG. 13, the low molecular light emitting functional layer 300 includes a multimer hole injection layer 301, a hole transport layer 302, an organic light emitting layer 303, and an electron injection layer 304 from the pixel electrode 23 toward the cathode 50.
The electron injection buffer layer 305 is sequentially stacked.
Here, the multimer hole injection layer 301 contains triarylamine (ATP), and the hole transport layer 302 is made of TPD (triphenyldiamine).
The organic light emitting layer 303 is configured to include a blue organic light emitting layer including a styrylamine light emitting layer (host) and an anthracene dopant, and a styrylamine light emitting layer (host) and a rubrene dopant. And a yellow organic light emitting layer.
The electron injection layer 304 is an aluminum quinolinol (Alq3) layer, and the electron injection buffer layer 305 is LiF (lithium fluoride).
The cathode 50 is formed by stacking an alloy such as MgAg and ITO.

The material of each of the organic layers 301 to 305 and LiF are sequentially formed by a vacuum evaporation method using a heating boat (crucible). As for the formation of the cathode 50, a vacuum deposition method is adopted for metal materials, and a high-density plasma film formation method such as an ECR sputtering method, an ion plating method, a counter target sputtering method, etc. for oxide materials such as ITO. Is adopted.
In such an organic EL device 1B, if the pixel electrode 23 is patterned for each color,
It is not necessary to separately form the low molecular light emitting functional layer 300 and the cathode, and it is not necessary to perform mask vapor deposition that requires high accuracy.

Next, the layer film formed above the cathode 50 will be described.
An electrode protective layer 55 is formed above the cathode 50. The electrode protective layer 55 is made of EC.
It is formed by a high density plasma film forming method such as an R sputtering method or an ion plating method. The material is preferably a silicon compound such as silicon oxynitride in consideration of transparency, adhesion and water resistance.
Further, if the adhesion is improved by oxygen plasma treatment before the formation, the adhesion with the electrode is improved, and the light emission unevenness is reduced. Another object is to prevent penetration of the organic buffer layer before curing, and the film thickness is preferably 100 nm or more.

In addition, an organic buffer layer 210 is formed above the electrode protective layer 55. As a raw material main component before curing of the organic buffer layer 210, it is necessary to be an organic compound material that is excellent in fluidity and does not have a volatile component such as a solvent in order to be applied and formed under reduced pressure, preferably, An epoxy monomer / oligomer having an epoxy group and a molecular weight of 3000 or less (definition of monomer: molecular weight 1000 or less, definition of oligomer: molecular weight 1000 to 3000). For example, bisphenol A type epoxy oligomer, bisphenol F type epoxy oligomer, phenol novolac type epoxy oligomer, 3,4-epoxycyclohexenylmethyl-
3 ′, 4′-epoxycyclohexenecarboxylate, ε-caprolactone modified 3,4-
Epoxycyclohexylmethyl 3 ′, 4′-epoxycyclohexanecarbochelate and the like can be used alone or in combination.

Further, as the curing agent that reacts with the epoxy monomer / oligomer, those that form a cured film having excellent electrical insulation, toughness, and excellent heat resistance are preferable, and addition polymerization types having excellent transparency and little variation in curing are preferable. . For example, 3-methyl-1,2,3,6-tetrahydrophthalic anhydride, methyl-3,6-endomethylene-1,2,3,6-tetrahydrophthalic anhydride, 1,2,4,5-benzene Acid anhydride curing agents such as tetracarboxylic dianhydride and 3,3 ′, 4,4′-benzophenone tetracarboxylic dianhydride are preferred. These cures are 6
Performed by heating in the range of 0 to 100 ° C., the cured film becomes a polymer having an ester bond that is excellent in adhesion to silicon oxynitride.

Further, by adding a relatively high molecular weight material such as an aromatic amine, alcohol, aminophenol or the like as a curing accelerator for promoting acid anhydride ring-opening, curing at a low temperature and in a short time becomes possible.
The viscosity of each raw material is preferably 1000 to 10,000 mPa · s (room temperature). The reason is that the organic light-emitting layer penetrates immediately after coating and does not generate a non-light-emitting region called a dark spot, and the film thickness is 3 to 10 μm or less. By suppressing the film thickness to this thickness, the color filter substrate 207 can be brought closer to the organic light emitting layer 303, so that a light emitting region can be widened without leaking light to an adjacent colored layer. Moreover, the viscosity of the buffer layer material containing these raw materials must also be 1000 mPa · s or more (room temperature). These materials are cured by heating in the range of 60 to 100 ° C. As a problem at this point, the viscosity temporarily decreases until the reaction is started immediately after heating. At this time, the material constituting the organic buffer layer 210 passes through the electrode protective layer 55 and the cathode 50 and reaches Alq3, thereby generating a dark spot. Therefore, it is more preferable to leave it at a low temperature until the curing proceeds to some extent and raise the temperature to a certain degree when the viscosity is increased to a certain degree to complete the curing. In addition, a cation-releasing type photopolymerization initiator may be added and partially cured at a low illuminance of 10 mW / cm 2 or less to prevent the viscosity from being lowered before heating. However, since many photopolymerization initiators are colored, they are limited to bottom emission applications.
In order not to generate dark spots, the main component (for example, 70% by weight or more) of the buffer layer material is preferably 1000 mPa · s or more. The reason is that if a large amount of low-viscosity components are mixed, the organic light-emitting layer penetrates into the organic light-emitting layer before being cured by heating during curing to generate dark spots.

In the present embodiment, the buffer layer 210 contains a silane coupling agent that improves adhesion to the cathode 50 and the gas barrier layer 30.
In particular, in the case of the low-molecular organic light emitting layer 303, a silane coupling agent is mixed in the material of the buffer layer 210, or a layer made of a silane coupling agent is added, and a cathode protective layer is further added. . Further, since the layer of the silane coupling agent alone has a problem that the film strength is fragile, the buffer layer 210 supplements the film strength by the buffer layer 210, and the buffer layer prevents the penetration of the cathode protective layer 55 into the pinhole by the silane coupling agent. It is preferable to mix a silane coupling agent with 210 material.
Since the silane coupling agent is covalently bonded to SiO ₂ , SiON, and SiN, the adhesion to the cathode protective layer, the gas barrier layer, the glass substrate, and the like is improved (it also reacts with a metal such as aluminum). Epoxysilane is preferred as the silane coupling agent. Epoxysilane is preferable because it reacts with the curing agent component (acid anhydride curing agent) of the buffer layer raw material.
The composition of the main agent / curing agent / curing accelerator is preferably 40 to 45/40 to 45/10 to 20 (common to low-molecular / polymer light-emitting devices). In this way, the uncured component is 1
0 to 20% (If the unreacted epoxy group in the buffer layer material is 100%, the residual ratio of unreacted epoxy group after curing: can be compared with the difference in the FTIR epoxy group absorption peak intensity), and the light emitted by the uncured component Deterioration due to penetration into the functional layer can be prevented (when 20% or less is called complete curing).

Further, the curing agent group (acid anhydride, amine) remains as the material composition, and the uncured ratio is around 10% (when the dicarboxylic anhydride group in the raw material is 100%, the unreacted after curing) Acid anhydride group residual ratio). It is preferable to leave this degree in the completed film because the shrinkage during curing is small and the stress can be relaxed, so that damage to the organic EL element can be prevented in advance.

In particular, since a raw material having a low viscosity dissolves the material of the low molecular light emitting element (for example, there is a possibility of dissolving Alq3), it is preferable to use a high viscosity raw material for the low molecular light emitting element. On the other hand, this is not the case with polymer light emitting devices. It can be improved by increasing the molecular weight of each raw material to increase the viscosity. The range of preferable viscosity (or molecular weight) in the case of a low molecular light emitting device is in the range of 3000 mPa · s to 8000 mPa · s (at room temperature), and the film thickness (around 5 μm) at the time of screen printing and the flatness of the coated surface are Can be compatible.
In addition to the silane coupling agent, water absorbing agents such as isocyanate compounds and additives such as fine particles that prevent shrinkage during curing may be mixed in the buffer layer 210.

A gas barrier layer 30 is formed above the organic buffer layer 210. As a method for forming the gas barrier layer 30, a high-density plasma film forming method such as an ECR sputtering method or an ion plating method is employed. The material is preferably a silicon compound such as silicon oxynitride in consideration of transparency, gas barrier properties and water resistance. Further, if the adhesion is improved by oxygen plasma treatment before formation, the reliability is improved. The film thickness is preferably 300 nm or more because the surface and side surface coating of the organic buffer layer is insufficient when the film thickness is 200 nm or less.

As described above, according to the organic EL device 1B of the present embodiment, the electrode protective layer 55 is a silicon oxynitride film, and the buffer layer 210 includes an epoxy compound and a silane coupling agent. Generation of dark spots in the injection layer 304 can be prevented.

Hereinafter, the present invention will be described more specifically with reference to examples.
In this example, (1) experiment on the number of dark spots generated, (2) experiment on dark spot generation time, (3) experiment on cathode alteration time, (4) shape of buffer layer periphery and presence / absence of non-light emitting region (5) the viscosity of the buffer layer coating material and the film thickness of the buffer layer;
Experiments on the number of initial dark spots, (6) Experiments to confirm the thickness of the gas barrier layer and the presence of dark spots, and (7) Confirm the presence of dark spots when a silane coupling agent is used as the buffer layer material The seven experimental results will be described.

(1) Experiment on the number of dark spots generated Table 1 shows the experimental results of measuring the number of dark spots generated.
The evaluation method is a light emitting panel in which a light emitting functional layer 110, a cathode 50, an electrode protective layer 55, a buffer layer 210, a gas barrier layer 30, and a protective layer (polyimide film with an adhesive layer) 204 are sequentially laminated on a substrate 200. 60 ° C. when forming the following three processes:
The number of dark spots generated after 90 hours of RH 600 hours was observed.

In Table 1, each of (A) to (C)
(A) "Vacuum application + Nitrogen substitution defoaming + Nitrogen substitution 60 ° C curing"
A buffer layer is applied and formed by screen printing in a 50 Pa vacuum atmosphere, and the buffer layer is subjected to defoaming treatment for 3 minutes in an atmosphere of about 100,000 Pa by nitrogen gas injection.
When cured at 0 ° C. (corresponding to the production method of the above embodiment).
(B) “Atmospheric coating + curing at 60 ° C.”
When a buffer layer is applied and formed by screen printing in an air atmosphere, and the buffer layer is cured at 60 ° C. without defoaming in an atmospheric pressure atmosphere.
(C) “Atmospheric coating + vacuum degassing + nitrogen substitution 60 ° C. curing”
A buffer layer is applied and formed by screen printing in an air atmosphere, and the buffer layer is defoamed for 3 minutes in a 100 Pa reduced pressure atmosphere, and further pressurized to about 100,000 Pa by nitrogen gas injection to cure at 60 ° C. if you did this.
Means.

In each of (A) to (C), a cathode protective layer made of a silicon oxynitride film (SiON) is formed, an epoxy resin is formed with a thickness of 10 μm as a buffer layer, and a silicon oxynitride film (SiON)
A gas barrier layer made of is formed at 200 nm. Further, the number of bubbles in the buffer layer before the experiment is 0, 100 or more, and 5 to 20 for each of (A) to (C).
In this experiment, all of (A) to (C) are formed by forming a solventless epoxy monomer in a 40 × 40 mm region by screen printing and heating and curing at 60 ° C.

As shown in the experimental results of Table 1, it was confirmed that when the buffer layer was formed by the method (A), there were no dark spots. Further, 100 or more dark spots were confirmed in the method (B), and 2 to 3 dark spots were confirmed in the method (C).
As a result, it was clarified that by forming the buffer layer under reduced pressure and vacuum, it is possible to eliminate bubbles in the subsequent defoaming step without absorbing moisture in the coating step, thereby reducing dark spots.

(2) Experiment on Dark Spot Generation Time Table 2 shows the experimental results of measuring the time taken until dark spot generation.
The evaluation targets are (D) to (G). In Table 2, each of (A) to (C)
(D) When a solventless epoxy monomer, an acid anhydride-based curing agent, and a reaction accelerator are mixed to form a coating and cured to form a buffer layer (corresponding to the production method of the above embodiment).
(E) A buffer layer is formed from a material obtained by mixing an acrylic polymer material and XDl (low boiling point solvent: ethyl acetate).
(F) A buffer layer is formed from a material obtained by mixing an acrylic polymer material and XDl (high boiling point solvent: butyl acetate).
(G) When there is no buffer layer.
Means.

In each of (D) to (G), a cathode protective layer made of a silicon oxynitride film (SiON) is formed, a gas barrier layer made of a silicon oxynitride film (SiON) is 200 nm, and an adhesive layer is provided as a protective layer A polyimide film is formed.
In (D), an epoxy resin is applied as a buffer layer to a thickness of 10 μm by a 50 Pa vacuum screen printing method. Further, in (D), since the buffer layer is formed without a solvent, the reduced-pressure drying step is omitted, and after pressurizing and defoaming with nitrogen to about 100,000 Pa, curing is performed at 60 ° C.
In (E) and (F), an acrylic resin is formed as a buffer layer with a thickness of 10 μm by the atmospheric pressure slit coating method. Furthermore, in (E) and (F), after performing a solvent drying step in a reduced-pressure atmosphere at room temperature (100 Pa, 30 minutes), after nitrogen purging, about 1000
Cured at 60 ° C. at 00 Pa.
In (G), the cathode protective layer and the buffer layer are not formed, and the drying step is not performed. Only the gas barrier layer and the protective layer (polyimide film with an adhesive layer) are formed.
In addition, XDI in (E) and (F) means xylylene diisocyanate.

As shown in the experimental results of Table 2, it was confirmed that when the buffer layer was formed by the method (D), it took 700 hours or more until dark spots were generated. In addition, although the method (E) uses a low-boiling solvent, the amount of residual solvent is small, but until dark spots are generated, 400 to 500
It was confirmed that it takes time. Since the method (F) has a high boiling point solvent, the amount of residual solvent is large, and it has been confirmed that 100 to 200 hours are required until dark spots are generated. It was confirmed that the method (G) required 10 hours until dark spots were generated.
As a result, it has been clarified that since the solvent component is not contained in the buffer layer material, the remaining solvent component does not affect the light emitting element, so that high reliability can be obtained. In the method (D), since it is not necessary to remove the solvent component, the liquid viscosity is stable even under a vacuum, the film thickness is stabilized, and the drying process is not necessary, so that the process time can be shortened.

(3) Experiment on Cathode Alteration Time Table 3 shows the experimental results of measuring the time until the alteration of the cathode 50 made of a laminate of calcium and aluminum formed on the light emitting functional layer 110 is started.
The evaluation target is
(H) When there is an organic adhesion layer,
(I) When there is no organic adhesion layer, it is two.
In each of (H) and (I), a cathode protective layer made of a silicon oxynitride film (SiON) is formed to a thickness of 100 nm, and an epoxy buffer layer material is applied and formed as a buffer layer by a vacuum screen printing method. After defoaming process by nitrogen purge, cured at 60 ° C., silicon oxynitride film (Si
ON) is formed at 200 nm, and a polyimide film with an adhesive layer is formed as a protective layer. In (H), the buffer layer is subjected to reduced pressure oxygen plasma treatment, and in (I), the buffer layer is not subjected to reduced pressure oxygen plasma treatment.

As shown in the experimental results in Table 3, it was confirmed that when the organic adhesion layer was formed by the method (H), it took 120 hours or more for the cathode to be altered because of the improved adhesion to the gas barrier layer. It was. In addition, it was confirmed that the method (I) requires less than 30 hours for the cathode to be altered because the adhesion to the gas barrier layer was not obtained.
This improves the adhesion between the gas barrier layer and the buffer layer by forming an organic adhesion layer,
In particular, since the gas barrier layer does not peel off under high temperature conditions, high reliability can be obtained.

(4) Experiment for confirming the shape of the buffer layer periphery and the presence or absence of the non-light-emitting region Table 4 shows the case where the shape of the buffer layer periphery (see FIG. 6) is a wave shape (with undulation), and a straight line shape (
It is an experimental result in which the presence or absence of a non-light emitting region was confirmed by comparing with the case of no undulation.
As an evaluation method, aging for 100 hours (continuous operation of the organic EL device) was performed at 110 ° C. and 85% RH.
In Table 4, (J) and (K) are
(J) When the buffer layer periphery is “with undulation (wave shape)” (K) When the buffer layer periphery is “without undulation (straight)”.
As the same conditions, the electrode protective layer made of SiON is set to 100 nm, the buffer layer made of epoxy is set to 5 μm, and the gas barrier layer 30 made of SiON is set to 400 nm.

As shown in the experimental results of Table 4, when the buffer layer peripheral portion is linear, a non-light emitting region is generated in the peripheral portion, whereas when the buffer layer peripheral portion is corrugated, the entire surface is formed. As a result, lights up. This is because the peripheral edge of the buffer layer is formed into a wave shape, thereby improving the adhesion of the side surface portion of the gas barrier layer formed thereon and improving the moisture resistance. The reason is that the gas barrier layer is not peeled off or cracked when the buffer layer expands in the lateral direction due to heat or the like by increasing the mixed region where the gas barrier layer, the buffer layer and the substrate are in contact with each other.

(5) Experiment on the viscosity of the buffer layer coating material, the thickness of the buffer layer, and the number of initial dark spots generated Table 5 shows the experimental results on the viscosity of the buffer layer coating material, the thickness of the buffer layer, and the number of initial dark spots generated It is.
In the evaluation method, the number of dark spots generated at the beginning of the operation of the organic EL device was examined.
In Table 5, (L) to (R) are
(L) When the viscosity of the buffer layer coating material is 10000 mPa · s and the film thickness is 9 μm (M)
When the viscosity of the buffer layer coating material is 5000 mPa · s and the film thickness is 5 μm (N) When the viscosity of the buffer layer coating material is 1000 mPa · s and the film thickness is 3 μm (O) The viscosity of the buffer layer coating material is 500 mPa When the film thickness is 3 μm (P) When the viscosity of the buffer layer coating material is 500 mPa · s, When the film thickness is 2 μm (Q) The viscosity of the buffer layer coating material is 5000 mPa · s, and the film thickness is 5 μm And when there is no electrode protective layer (R) The case where a buffer layer coating material is not formed and the electrode protective layer is 2000 nm is meant.
In addition, as the same conditions, except for (Q) and (R), the electrode protective layer is 100 nm,
Except for R), the thickness of the gas barrier layer 30 is set to 400 nm.

As shown in the experimental results in Table 5, in (R), the electrode was peeled off and no light was emitted. In (R), generation of 50 or more initial dark spots was confirmed. In (P), generation of 20 to 40 initial dark spots was confirmed. In (O), generation of 10 to 20 initial dark spots was confirmed. In (L) to (N), generation of two or less initial dark spots was confirmed.
Thus, it was confirmed that by setting the viscosity of the buffer layer to 1000 to 10,000 mPa · s, there is an effect of suppressing the initial dark spot while suppressing the film thickness of the buffer layer to 10 μm or less. Further, by suppressing the film thickness of the buffer layer, the color filter substrate can be brought closer to the organic light emitting layer with a gap of 15 μm or less, so that the aperture ratio of the pixel can be further increased.

(6) Experiment for confirming gas barrier layer thickness and presence / absence of dark spots Table 6 shows experimental results for confirming the thickness of gas barrier layers and the presence / absence of dark spots.
As an evaluation method, aging (continuous operation of the organic EL device) was performed for 600 hours at 60 ° C. and 90% RH.
In Table 6, (S) to (V) are
(S) When the gas barrier layer is 200 nm (T) When the gas barrier layer is 400 nm (U) When the gas barrier layer is 600 nm (V) When the gas barrier layer is 800 nm.
As the same conditions, the electrode protective layer made of SiON is set to 100 nm, and the buffer layer made of epoxy is set to 5 μm.

As shown in the experimental results of Table 6, when the thickness of the gas barrier layer is 200 nm, the peripheral portion does not emit light (generation of dark spots), whereas the thickness of the gas barrier layer is 400 nm and 600 nm. The result was that the entire surface was lit. The film thickness of the gas barrier layer is effective for reliability evaluation. When the gas barrier layer is 200 nm or less, the unevenness of the surface remaining during screen printing of the organic buffer layer and the coverage of the side surface are reduced, and moisture permeation occurs, resulting in dark spots. The film thickness of the gas barrier layer needs to be 700 nm or more.
If it exceeds 1 μm, the stress of the gas barrier layer increases, and cracks and the like are generated. Therefore, it is preferable to set the film thickness of the gas barrier layer to 400 to 600 nm because a gas barrier layer having both gas barrier properties and crack resistance can be realized.

(7) Experiment for confirming presence / absence of dark spot when silane coupling agent is used as buffer layer material Table 7 confirms presence / absence of dark spot when silane coupling agent is used as buffer layer material It is an experimental result.
In Table 7, (W) to (Y)
(W) When the cathode protective layer is not formed, and the buffer layer contains an epoxy and a silane coupling agent (X) A cathode protective layer made of SiON is formed to 100 nm, and the buffer layer contains an epoxy and a silane coupling agent. In case of containing (Y) It means that the cathode protective layer made of SiON is formed to 100 nm and the buffer layer contains epoxy.

Table 8 shows materials constituting the buffer layer used in (W) to (Y) of Table 7, the blending ratio, and the room temperature viscosity.
This experiment was performed in a polymer organic EL device (first and second embodiments) and a low molecular organic EL device (third embodiment).

As shown in the experimental results of FIG. 7, in any of the cases (W), (X), and (Y), the generation of dark spots was not confirmed in the polymer organic EL device. Further, in the low molecular weight organic EL device, generation of dark spots was confirmed in the cases of (W) and (Y), and generation of dark spots was not confirmed in the case of (X).
In this way, in the low molecular organic EL device, when the cathode protective layer of SiON and the buffer layer made of epoxy and silane coupling agent are combined, the silane coupling agent is combined with the cathode protective layer to form the cathode protective layer. It is conceivable that dark spots are suppressed by filling the holes.

(Electronics)
Next, the electronic apparatus of the present invention will be described.
The electronic apparatus has the above-described organic EL device (organic EL device) 1 as a display unit, and specifically, the one shown in FIG.
FIG. 14A is a perspective view showing an example of a mobile phone. In FIG. 14A, a mobile phone 1000 includes a display unit 1001 using the organic EL device 1 described above.
FIG. 14B is a perspective view showing an example of a wristwatch type electronic device. In FIG. 14B, a timepiece 1100 includes a display unit 1101 using the organic EL device 1 described above.
FIG. 14C is a perspective view illustrating an example of a portable information processing apparatus such as a word processor or a personal computer. In FIG. 14C, the information processing apparatus 1200 includes an input unit 12 such as a keyboard.
01, a display unit 1202 using the organic EL device 1 described above, and an information processing device body (housing) 12
03.
Each of the electronic devices shown in FIGS. 14A to 14C includes the above-described organic EL device (organic EL device).
Since the display units 1001, 1101, and 1202 having the (device) 1 are provided, the life of the light emitting element of the organic EL device constituting the display unit is extended.

The figure which shows the wiring structure of the organic electroluminescent apparatus which concerns on 1st Embodiment of this invention. The schematic diagram which shows the structure of the organic electroluminescent apparatus which concerns on 1st Embodiment of this invention. Sectional drawing which follows the AB line | wire of FIG. Sectional drawing which follows the CD line | wire of FIG. The cross-sectional enlarged view which shows the principal part of FIG. The plane enlarged view which shows the principal part of FIG. The cross-sectional enlarged view which shows the principal part of FIG. The figure which shows the manufacturing method of the organic electroluminescent apparatus concerning 1st Embodiment of this invention in order of a process. The figure which shows the manufacturing method of the organic electroluminescent apparatus concerning 1st Embodiment of this invention in order of a process. The figure for demonstrating the formation method of a buffer layer, an organic adhesion layer, and a gas barrier layer. The figure for demonstrating the formation method of a buffer layer, an organic adhesion layer, and a gas barrier layer. The schematic cross section which shows the structure of the organic electroluminescent apparatus which concerns on 2nd Embodiment of this invention. The schematic cross section which shows the structure of the organic electroluminescent apparatus which concerns on 3rd Embodiment of this invention. FIG. 9 illustrates an electronic device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,1A, 1B ... Organic EL apparatus, 20 ... Board | substrate (base | substrate), 23 ... Pixel electrode (1st electrode),
30 ... Gas barrier layer, 50 ... Cathode (second electrode), 55 ... Cathode protective layer (electrode protective layer), 60
... organic light emitting layer (light emitting functional layer), 70 ... hole transport layer (light emitting functional layer), 110 ... light emitting functional layer,
DESCRIPTION OF SYMBOLS 200 ... Base | substrate, 205 ... Adhesive layer, 206 ... Surface protective substrate (protective substrate), 207 ... Color filter substrate, 208R ... Red colored layer (colored layer), 208G ... Green colored layer (colored layer), 20
8B ... Blue colored layer (colored layer), 210a ... buffer layer, 210b ... coated film, 210E ... buffer layer peripheral portion (peripheral portion), 210AR ... buffer layer forming region (planar pattern of buffer layer), 220 ... organic adhesion layer 221... Organic partition layer (partition), 221 a... Opening, 300.
2 ... hole transport layer (light emitting functional layer), 303 ... organic light emitting layer (light emitting functional layer), 304 ... electron injection layer (light emitting functional layer), 305 ... electron injection buffer layer (light emitting functional layer), 1000 ... mobile phone (Electronic device), 1100 ... Clock (electronic device), 1200 ... Information processing device (electronic device), 1
001, 1101, 1202... Display unit (organic EL device), M... Screen mesh (mask), S.

Claims (17)

A method for manufacturing an organic electroluminescent device, comprising: a plurality of first electrodes; a light emitting functional layer disposed in correspondence with a position where the first electrode is formed; and a second electrode covering the light emitting functional layer. In
A buffer layer forming step of covering the second electrode and forming a buffer layer; and a step of forming a gas barrier layer covering the buffer layer;
The buffer layer forming step includes
A coating step of coating a coating material having a monomer / oligomer material and a curing agent without using a solvent in a vacuum atmosphere;
A thermosetting step of curing the coating material to form the buffer layer,
A method for producing an organic electroluminescence device. Forming a partition having a plurality of openings corresponding to the formation position of the first electrode;
Forming the light emitting functional layer in each of the plurality of openings;
Forming a second electrode that covers the partition and the light emitting functional layer;
Including
The buffer layer forming step includes forming the buffer layer so as to cover the second electrode and the partition;
The manufacturing method of the organic electroluminescent apparatus of Claim 1 characterized by these. In the buffer layer forming step,
3. The coating process uses a screen printing method.
The manufacturing method of the organic electroluminescent apparatus as described in any one of. The screen printing method is:
Dropping the coating material onto the substrate with a mask interposed therebetween;
Forming a coating film made of the coating material on the substrate by relatively moving the substrate and the coating unit while pressing the coating material against the substrate by a coating unit;
Peeling the mask from the coating film;
In order,
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-3 characterized by these. The step of peeling the mask from the coating film includes:
Peeling the mask from the coating film while tilting the mask with respect to the substrate;
The manufacturing method of the organic electroluminescent apparatus of Claim 4 characterized by these. The buffer layer forming step has an antifoaming step between the coating step and the thermosetting step,
The defoaming step is performed in an inert gas atmosphere at a higher pressure than the coating step;
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-4 characterized by these. The buffer layer forming step includes
Forming a peripheral portion of the planar pattern of the buffer layer into a wave shape;
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-6 characterized by these. In the buffer layer forming step,
The coating material includes an epoxy monomer / oligomer material having a molecular weight of 3000 or less, and the buffer material is formed by curing the coating material by an ester bond in the thermosetting process. The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 7. The room temperature viscosity of the coating material is in the range of 500 to 20000 mPa · s,
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-8 characterized by these. The room temperature viscosity of the coating material is in the range of 1000 to 10,000 mPa · s,
The method for manufacturing an organic electroluminescence device according to claim 1, wherein: Including a step of forming an organic adhesion layer having a larger amount of oxygen atoms than the buffer layer between the buffer layer and the gas barrier layer;
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-10 characterized by these. The angle of the side edge of the buffer layer is 30 ° or less,
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-11 characterized by these. Including a step of forming an electrode protective layer between the second electrode and the buffer layer;
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-12 characterized by these. The electrode protective layer is a silicon oxynitride film,
The buffer layer includes an epoxy compound and a silane coupling agent;
The method for manufacturing an organic electroluminescence device according to claim 1, wherein: The film thickness of the gas barrier layer is in the range of 300 to 700 nm,
The manufacturing method of the organic electroluminescent apparatus as described in any one of Claims 1-14 characterized by these. An organic electroluminescence device comprising: a plurality of first electrodes; a light emitting functional layer disposed in correspondence with a position where the first electrode is formed; and a second electrode covering the light emitting functional layer. ,
A buffer layer formed so as to cover the second electrode, and a gas barrier layer covering the buffer layer,
It was manufactured using the manufacturing method according to any one of claims 1 to 15.
An organic electroluminescence device characterized by the above. The peripheral edge of the planar pattern of the buffer layer is formed in a wave shape,
The organic electroluminescence device according to claim 16.

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