JP2008216042A - Calibration support device, calibration support method, program, and record medium - Google Patents

Calibration support device, calibration support method, program, and record medium Download PDF

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JP2008216042A
JP2008216042A JP2007053985A JP2007053985A JP2008216042A JP 2008216042 A JP2008216042 A JP 2008216042A JP 2007053985 A JP2007053985 A JP 2007053985A JP 2007053985 A JP2007053985 A JP 2007053985A JP 2008216042 A JP2008216042 A JP 2008216042A
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value
calibration
target
distribution
limit
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JP5082506B2 (en
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Toru Fujii
Shiro Sugihara
史郎 杉原
徹 藤井
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Omron Corp
オムロン株式会社
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Abstract

In a conventional calibration support apparatus, there is a problem that defective costs and calibration costs cannot be reduced.
A receiving unit that receives a measurement value acquired by a calibration target, and a tolerance range information storage that can store tolerance range information that is information indicating a tolerance range that is a value range in which the measurement value of the calibration target is normal. According to the determination result of the distribution position determination unit 14 and the distribution position determination unit 14 that determines the distribution position of the measurement value received by the reception unit 11 with respect to the normal value range indicated by the allowable range information, A calculation unit 15 that calculates at least one of an optimal correction limit or an optimal inspection interval for the calibration target 1 and an output unit 17 that outputs information indicating the calculation result calculated by the calculation unit 15 are provided.
[Selection] Figure 1

Description

  The present invention relates to a calibration support apparatus that supports calibration of a configuration object such as a measurement system.

  In the manufacturing site of electronic parts and the like, in order to guarantee the product quality to the customer, the quality of the product or intermediate product is measured using a measuring instrument or the like in a plurality of processes. In production lines, etc., set an allowable range that is the normal range of measured values for the measured values of measuring instruments, etc., and dispose of or reprocess out-of-range products and intermediate products. ing.

  In such a manufacturing site, if a measurement error occurs in a measuring instrument or the like, it may affect misjudgment or an adjustment value of a production parameter, leading to an increase in defect cost and an increase in risk of defect outflow.

  For this reason, in order to suppress measurement errors, it is necessary to appropriately calibrate measuring instruments and the like.

  As a method for supporting the calibration of such measuring instruments, a method for determining the optimum inspection interval and the optimum maintenance limit based on a loss function that takes into account the tradeoff between the loss caused by misjudgment and the loss caused by calibration is conventionally known. (For example, refer nonpatent literature 1).

  Further, as a method for supporting the conventional calibration, there has been a method for determining the optimum inspection interval and the optimum maintenance limit that minimize the equipment maintenance cost in consideration of the time change of the parameter used for the above loss function.

Further, as a system that supports conventional calibration, there is a system that detects a drift amount between a true value and a measured value and corrects the drift amount to be zero.
JP 2004-14596 A (first page, FIG. 1 etc.) JP-A-2005-43121 (first page, FIG. 1 etc.) Taichi Genichi, "Proofreading Manual", Japanese Standards Association, January 1992, p. 43-51

However, the conventional calibration method and calibration support system have the following problems.

  For example, in the manufacture of electronic components, there are complex relationships between measured values and factors that affect the measured values, and a plurality of measured values are often measured by a plurality of measuring instruments. In addition, since there is a trade-off relationship between multiple measured values, it is difficult to align the center of the measured value distribution with the center of the allowable range of measured values for each measuring instrument, so-called standard center. . In such a manufacturing site, the timing for calibrating the measuring instrument, etc., using the optimum inspection interval and the optimum correction limit calculated by applying the loss function as shown in Non-Patent Document 1 as described above, etc. Even if managed, the defect cost may not be minimized because the distribution of measured values is not considered in the loss function.

  Specifically, if the center of the tolerance range of a measuring instrument and the center of the distribution of measured values are deviated, even if the measurement performance is the same, the possibility of exceeding the tolerance range is exceeded. As a result, the defect cost and the risk of defect outflow may increase.

  In this way, when the distribution position of measured values is deviated from the center of the allowable range of measured values, small errors such as measuring instruments will have a large effect on yield, increasing the cost of defects such as losses due to defective products. There was a problem of doing it.

  On the other hand, the main cause of measurement error is a change in the measurement environment over time. For example, when performing contact measurement like voltage measurement, the measurement jig may be worn out and contact pressure may not be ensured gradually, or a film may be formed on the contact part and the resistance value may change, resulting in an increase in measurement error. .

  As described above, when the cause of the error is a change with time, the variation of the error is often monotonous. For example, the measured value decreases with respect to the true value as the contact pressure decreases, or the measured value decreases with respect to the true value as the resistance value increases.

  Here, in the calibration of a conventional measuring instrument or the like, as shown in Non-Patent Document 1 above, the center of the calculated optimum correction limit is set to a true value, and the measured value indicates the optimum correction limit. When the measurement value is out of the range, correction, that is, calibration is performed so that the deviation amount of the measurement value becomes 0, that is, a true value.

  However, when the deviation between the true value and the measured value monotonously decreases and increases monotonously in this way, the deviation amount of the measured value is 0, that is, the true value using the optimum correction limit as shown in Non-Patent Document 1 above. If the correction is performed so that the correction is performed, that is, the calibration is performed, the range of the actual optimal correction limit becomes a range from the 0 point to the upper limit or the lower limit of the optimal correction limit, that is, half of the optimal correction limit. Therefore, in such a case, half of the range of the optimum correction limit is wasted, the frequency of calibration is increased, and the calibration cycle is shortened. As a result, there is a problem that the calibration cost, which is the cost required for calibration, increases.

  A calibration support apparatus according to the present invention is a calibration support apparatus that supports calibration of a calibration target, and includes a reception unit that receives a measurement value acquired by the calibration target, and a range of values in which the measurement value of the calibration target is normal. A distribution for determining a distribution position of a measurement value received by the receiving unit with respect to a normal value range indicated by the allowable range information storage unit in which the allowable range information that is information indicating a certain allowable range can be stored. Information indicating a calculation result calculated by the calculation unit, a calculation unit that calculates at least one of an optimal correction limit or an optimal inspection interval for the calibration object according to a determination result of the position determination unit, the distribution position determination unit Is a calibration support apparatus that includes an output unit that outputs.

  With this configuration, if the measured value exceeding the allowable range is likely to occur, the standard for performing calibration will be strict, and if the measured value exceeding the allowable range is difficult to occur, the standard for performing calibration will be loosened. While reducing judgment errors, the frequency of calibration can be reduced, and both the defect cost and the calibration cost can be reduced.

  Further, in the calibration support apparatus of the present invention, in the calibration support apparatus, the calculation unit acquires a tolerance of the measurement value according to the distribution position of the measurement value determined by the distribution position determination unit, and the tolerance Is a calibration support apparatus that calculates at least one of the optimum correction limit and the optimum inspection interval.

  With this configuration, by changing the tolerance according to the distribution position of the measurement value, it is possible to change the reference for performing calibration, and it is possible to reduce both the defect cost and the calibration cost.

  In the calibration support apparatus according to the present invention, in the calibration support apparatus, the distribution position determination unit may determine whether the position of the representative value, which is a value representative of the measurement value, is an upper limit value or a lower limit value of the allowable range. When the distribution position determination unit determines that the representative value is closer to the upper limit value of the allowable range, the calculation unit determines whether the upper limit value of the allowable range and the representative value are The calibration support apparatus calculates at least one of the optimum correction limit and the optimum inspection interval by using the interval value.

  With this configuration, by changing the tolerance according to the distribution position of the measurement value, it is possible to change the standard for performing calibration and reduce both the defect cost and the calibration cost.

  Further, in the calibration support apparatus of the present invention, in the calibration support apparatus, the distribution position determination unit uses the value of the interval between the upper limit value of the allowable range and the representative value as the tolerance of the measurement value. It is a calibration support device that calculates at least one of a correction limit and an optimal inspection interval.

  With this configuration, by changing the tolerance according to the distribution position of the measurement value, it is possible to change the reference for performing calibration, and it is possible to reduce both the defect cost and the calibration cost.

  In the calibration support apparatus according to the present invention, in the calibration support apparatus, the distribution position determination unit may determine whether the position of the representative value, which is a value representative of the measurement value, is an upper limit value or a lower limit value of the allowable range. When the distribution position determination unit determines that the representative value is closer to the lower limit value of the allowable range, the calculation unit determines whether the lower limit value of the allowable range and the representative value are The calibration support apparatus calculates at least one of the optimum correction limit and the optimum inspection interval by using the interval value.

  With this configuration, by changing the tolerance according to the distribution position of the measurement value, it is possible to change the reference for performing calibration, and it is possible to reduce both the defect cost and the calibration cost.

  Further, in the calibration support apparatus according to the present invention, in the calibration support apparatus, the distribution position determination unit uses a value of an interval between the representative value and the lower limit value of the allowable range as a tolerance of a measurement value, It is a calibration support device that calculates at least one of an optimal correction limit and an optimal inspection interval.

  With this configuration, by changing the tolerance according to the distribution position of the measurement value, it is possible to change the reference for performing calibration, and it is possible to reduce both the defect cost and the calibration cost.

  The calibration support apparatus of the present invention is a calibration support apparatus that supports calibration of a calibration target, and includes a reception unit that receives a measurement value acquired by the calibration target, and a true value that can store a true value of the test target. A storage unit, a change trend determination unit that determines a trend of change in the measurement value received by the reception unit, the true value is acquired, and a calibration target value is determined according to a determination result of the change trend determination unit. A calibration support apparatus including a target value determining unit to be determined and a target value output unit for outputting the target value determined by the target value determining unit.

  With this configuration, the allowable range of the substantial deviation error between the true value and the measured value can be made wider than when the deviation range is corrected to be zero, and the deviation range is corrected to be zero. The calibration interval can be made longer than that, and the calibration cost can be reduced.

  Further, in the calibration support apparatus according to the present invention, in the calibration support apparatus, the change tendency determination unit determines whether the measurement value is monotonically increasing and whether the measurement value is monotonously decreasing, The target value determination unit determines the target value to be smaller than a true value when the change trend determination unit determines that the measurement value is monotonically increasing, and the change trend determination unit determines the measurement value Is a calibration support apparatus that determines that the target value is larger than a true value when it is determined that the target value decreases monotonously.

  With this configuration, the calibration cost can be reduced as compared with the case where the deviation range is corrected to be zero.

  In the calibration support apparatus of the present invention, in the calibration support apparatus, the target value determination unit acquires information indicating an optimum correction limit for the calibration target, and the change tendency determination unit monotonically increases the measurement value. When determining that the target value is smaller than the true value by half of the optimum correction limit, the change tendency determining unit determines that the measured value is monotonously decreasing. In this case, the calibration support apparatus determines the target value to be a value larger than the true value by half of the optimum correction limit.

  With this configuration, the allowable range of the substantial deviation error between the true value and the measured value can be the entire range of the optimum correction limit, the calibration interval can be lengthened, and the calibration cost can be reduced.

  According to the calibration support apparatus and the like according to the present invention, the defect cost can be reduced.

  Further, according to the calibration support apparatus and the like according to the present invention, the calibration cost can be reduced.

  Hereinafter, embodiments of the calibration support apparatus and the like will be described with reference to the drawings. In addition, since the component which attached | subjected the same code | symbol in embodiment performs the same operation | movement, description may be abbreviate | omitted again.

(Embodiment)
FIG. 1 is a block diagram of the calibration support apparatus according to the present embodiment.

  The calibration support apparatus 1 includes a reception unit 11, a measurement value storage unit 12, an allowable range information storage unit 13, a distribution position determination unit 14, a calculation unit 15, a calculation information storage unit 16, an output unit 17, a true value storage unit 18, A change tendency determination unit 19, a target value determination unit 20, and a target value output unit 21 are provided.

  FIG. 2 is a conceptual diagram showing an outline of the configuration of a production system provided with a calibration support apparatus in the present embodiment.

  The production system includes a production line 100 and a calibration support apparatus 1. The production line 100 includes production facilities 101 to 103 and a calibration target 200. Here, the production facility is described as an example, but facilities other than the production facility may be used.

  Each production facility 101-103 may be any production facility as long as it is a production facility used for manufacturing products and the like. For example, production equipment such as electronic parts may be used. Each production facility 101 may be the same production facility or a different production facility.

  The calibration target 200 is an apparatus or system that is a calibration target. Specifically, the calibration target 200 is a measurement system used for measuring or inspecting characteristic values of products and intermediate products manufactured on the production line 100. The measurement system includes, for example, a measurement device, an inspection device, and the like, and outputs a measurement value. The measuring instrument is a device that measures characteristics of products and intermediate products, for example, voltage characteristics, temperature characteristics, contact intervals, and the like. Specifically, the measuring instrument is a voltage measuring instrument, a laser displacement meter, or the like. The inspector measures the characteristics of the product and the intermediate product, determines the pass / fail of the characteristics of the product and the intermediate product, and determines the defective product. The measurement system may further include a device for supplying a drive current, heat, or the like to an inspection target, for example, a product or an intermediate product, at the time of inspection. Moreover, the measurement system may be comprised only with the measuring device or the test device. Here, the case where there is one calibration target 200 in the production line 100 is described, but there may be a plurality of calibration targets 200, and the calibration line 200 may be provided at any position on the production line 100. The calibration target 200 outputs a measurement value. Measurement values measured by the calibration target 200, particularly measured values at an optimum inspection interval described later, may be displayed on a display or the like, or transmitted to the calibration support apparatus 1 via a network, a communication line, wiring, or the like. May be. The measurement value may be transmitted whenever necessary, or may be transmitted for each of the plurality of measurement values after accumulating the plurality of measurement values by temporary storage or the like. Note that the measurement value may be stored in a removable recording medium. When a plurality of calibration targets 200 are provided, measurement information from each calibration target 200 may be output to the calibration support apparatus 1 so as to be separable.

  Note that the calibration described in the present embodiment is a calibration performed on the calibration target 200. Specifically, the measurement value output from the calibration target 200 is a value that satisfies a preset standard. For example, the measured value of the calibration object 200 is corrected. For example, by adjusting a measurement value output from the calibration target 200 such as a measurement system, or by adjusting a drive current or heat given to a product or an intermediate product when the calibration target 200 such as a measurement system performs an inspection. The measured value is calibrated.

  The receiving unit 11 receives a measurement value acquired by the calibration target 200. Specifically, the measurement value is a measurement value measured at different times for the same measurement item obtained from one calibration object 200. Further, the reception unit 11 may receive information indicating the date and time when the measurement value is measured. For example, the reception unit 11 may receive the measurement value by receiving the measurement value transmitted from the calibration target 200 via a network, a communication line, a wiring, or the like. Further, the measurement value stored in the removable recording medium may be read and the measurement value may be received. Moreover, you may receive via input devices, such as a keyboard. The measurement value received by the reception unit 11 is normally accumulated in the measurement value storage unit 12. In addition, information indicating the date and time when the measurement value received by the reception unit 11 is also accumulated in the measurement value storage unit 12. In addition, the measured value described here does not need to be an actually measured value as long as it is a value for which a substantially measured value can be understood. For example, a value obtained by correcting the actual measurement value, a so-called bias error obtained by subtracting the true value of the measurement value from the actual measurement value, or the like may be considered as the measurement value. This also applies to other configurations. The reception described here is, for example, reception of an input signal transmitted from another device or the like, reading of information from a recording medium or the like. The receiving unit can be realized by a receiving device, a device driver of the receiving device, a driver of a reading device that reads information from a recording medium, a driver of an input device, or the like.

  The measurement value storage unit 12 can store the measurement values received by the reception unit 11. Further, information indicating the date and time when the measurement value is acquired may be stored in association with the measurement value. The storage described here is a concept including long-term storage and temporary storage such as temporary storage. The measured value storage unit 12 may be a non-volatile recording medium or a volatile recording medium.

  The allowable range information storage unit 13 may store allowable range information that is information indicating an allowable range that is a value range in which the measurement value output from the calibration target 200 is normal. The permissible range information may be information that can specify the permissible range, and may be, for example, a combination of the upper limit value and the lower limit value of the permissible range of the measurement value, the center of the permissible limit of the measurement value, A combination with a tolerance value for the center value may be used. For example, if the measured value is the value of the product weight, the allowable range information may be an upper limit value and a lower limit value of the range for determining that the product weight is normal. Note that the measurement values described here do not have to be actually measured values as described above. For example, a so-called bias error may be used. It does not matter how the allowable range information is stored in the allowable range information storage unit 13. For example, it may be stored at the time of factory shipment, or allowable range information received via a receiving unit such as the receiving unit 11 may be stored. The allowable range information storage unit 13 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium.

  The distribution position determination unit 14 determines the distribution position of the measurement value received by the reception unit 11 with respect to the normal value range indicated by the allowable range information. An example of the process for determining the distribution position will be described below. First, the distribution position determination unit 14 obtains a representative value representing the measurement value from the measurement value stored in the measurement value storage unit 12. The representative value is a value representing one or more measurement values, and specifically, an average value, median value, mode value, or the like of one or more measurement values. Here, the one or more measurement values used for determining the distribution position are usually the latest predetermined period or a predetermined number of measurement values. For example, it may be the latest measured value for one lot or the like, the latest 20 measured values, or all of the period from the time when the previous calibration target 200 was calibrated to the present. It may be a measured value. As the measured value, it is preferable to use a measured value that includes the latest value, but since the statistical process is performed to obtain the representative value, the latest value may not necessarily be used depending on the accuracy required. Good. Then, the distribution position determination unit 14 reads out the allowable range information stored in the allowable range information storage unit 13, and the position of the representative value of the obtained measurement value is stored in the allowable range information storage unit 13. It is determined whether the upper limit value or lower limit value of the allowable range indicated by the range information is close. For example, the distance value between the representative value and the upper limit value of the allowable range, and the distance value between the representative value and the lower limit value of the allowable range are calculated. If it is larger than the distance value between the representative value and the lower limit value of the allowable range, it is determined that the distribution is at a position close to the lower limit value. Further, if the distance value between the representative value and the upper limit value of the allowable range is smaller than the distance value between the representative value and the lower limit value of the allowable range, it is determined that the distribution is near the upper limit value. Further, an average value of the upper limit value and the lower limit value of the allowable range is obtained, and if the representative value is larger than the average value, it is determined that the distribution is at a position close to the upper limit value of the allowable range. If the representative value is smaller than the average value, it is determined that the distribution is at a position close to the lower limit value of the allowable range. When the representative value is located at the center of the allowable range, the measured value may be set to be determined to be distributed at a position close to either the lower limit value or the upper limit value of the allowable range. . Further, it may be determined that the distribution position of the measurement value is at the center of the allowable range. Here, the distribution position determination unit 14 outputs the determination result to the calculation unit 15. Further, as will be described in a specific example, which will be described later, the distribution position determination unit 14 detects the timing for calibrating the calibration target 200 by monitoring the measurement value using the optimum correction limit. good. The distribution position determination unit 14 can be usually realized by an MPU, a memory, or the like. The processing procedure of the distribution position determination unit 14 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The calculation unit 15 calculates at least one of the optimal correction limit and the optimal inspection interval for the calibration target 200 according to the determination result of the distribution position determination unit 14. Specifically, the calculation unit 15 dynamically acquires the tolerance of the measurement value according to the distribution position of the measurement value determined by the distribution position determination unit 14, and uses the tolerance to determine the optimum correction limit or At least one of the optimum inspection intervals is calculated. For example, when the distribution position determination unit 14 determines that the representative value is close to the upper limit value of the allowable range, the calculation unit 15 uses the value of the interval between the upper limit value of the allowable range and the representative value to determine the optimum correction limit. Alternatively, at least one of the optimum inspection intervals is calculated. Specifically, at least one of the optimum correction limit and the optimum inspection interval is calculated using the value of the interval between the upper limit value and the representative value of the allowable range as the tolerance of the measured value. In addition, when the distribution position determination unit 14 determines that the representative value is close to the lower limit value of the allowable range, the calculation unit 15 uses the value of the interval between the lower limit value of the allowable range and the representative value to determine the optimum correction limit. Alternatively, at least one of the optimum inspection intervals is calculated. Specifically, at least one of the optimum correction limit and the optimum inspection interval is calculated using the interval value between the representative value and the lower limit value of the tolerance range as the tolerance of the measured value. Parameters and the like used for calculation by the calculation unit 15 are stored in advance in a calculation information storage unit 16 to be described later, and are appropriately read and used at the time of calculation. Note that the measurement values described here do not have to be actually measured values as described above. For example, a so-called bias error may be used. The process in which the calculation unit 15 calculates at least one of the optimum correction limit and the optimum inspection interval will be described later. Note that the tolerance of the measurement value described here is a tolerance used in the process in which the calculation unit 15 calculates at least one of the optimum correction limit and the optimum inspection interval. This tolerance is usually the difference between the reference value and the limit value of the measurement value, and the center value of the upper limit value and the lower limit value of the tolerance range is used as the reference value. However, here, a tolerance according to the determination result of the distribution position determination unit 14 as described above is used. Note that the optimal correction limit is that the correction of the calibration target 200, that is, the calibration when the error of the measured value exceeds the limit indicated by the optimal correction limit, is optimal in consideration of cost and the like. It is the limit of the error of the measured value. The optimum inspection interval is an interval considered to be optimum in consideration of cost and the like when inspecting whether the characteristics of the product or the intermediate product are within an allowable range. Since the minimum correction limit and the optimum inspection interval are known techniques, detailed description thereof will be omitted. The calculation unit 15 can usually be realized by an MPU, a memory, or the like. The processing procedure of the calculation unit 15 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The calculation information storage unit 16 stores parameters and the like other than the tolerance of the measurement value used when the calculation unit 15 calculates at least one of the optimum correction limit and the optimum inspection interval. The parameters used for the calculation will be described later. The calculation information storage unit 16 may store parameters and the like in advance at the time of shipment from the factory, or may appropriately accumulate parameters received by a receiving unit such as the receiving unit 11. Further, when it is necessary to update the accumulated parameter according to the calculation result of the calculation unit 15, the parameter may be appropriately overwritten and rewritten with the value calculated by the calculation unit 15. The calculation information storage unit 16 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium.

  The output unit 17 outputs information indicating the calculation result calculated by the calculation unit 15. The calculation result is information indicating a final correction limit, information indicating an optimal inspection interval, and the like. The output described here is a concept including display on a display, printing on paper by a printer, transmission to an external device, and the like. For example, when the calibration target 200 is an apparatus that can automatically set the optimal inspection interval, the output unit 17 outputs the information on the optimal inspection interval calculated by the calculation unit 15 to the calibration target 200. Thus, the calibration object 200 that has received the information may change the inspection interval using the received information on the optimum inspection interval. Further, when the output unit 17 displays information indicating the calculation result on a display or the like, it may be displayed in any display form, for example, information indicating a final correction limit, information indicating an optimal inspection interval, or the like. May be displayed as a numerical value or a graph or the like. The output unit 17 may or may not include an output device such as a display or a printer. The output unit 17 can be realized by output device driver software, or output device driver software and an output device.

  The true value storage unit 18 may store a true value for the inspection target. The inspection target is a product or an intermediate product manufactured on the manufacturing line 100 that is an inspection target by the calibration target 200. The true value is the true value of the inspection object, in other words, the measurement object regarding the characteristics measured by the calibration object 200. However, since it is actually impossible to know the true value of the object to be measured, here, instead of the true value, a value that can be regarded as a true value, a so-called regarded true value is also considered as a true value. For example, in the present embodiment, a standard product or intermediate product is prepared in advance, and a value obtained by measuring the product or intermediate product with a high-precision measuring instrument is used as a true value. Also good. The true value may be stored in advance at the time of factory shipment or the like, the true value received by the receiving unit such as the receiving unit 11 may be accumulated, and how the true value is accumulated in the true value storing unit 18. It doesn't matter. The true value storage unit 18 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium. It may be a non-volatile recording medium or a volatile recording medium.

  The change tendency determination unit 19 determines a tendency of change in the measurement value received by the reception unit 11. Specifically, the tendency of the change in the measured value is that whether or not two or more measured values received by the receiving unit 11 along the time series are monotonically increasing with respect to the true value and monotonically decreasing. Whether or not. For example, the change tendency determination unit 19 differentiates two or more measurement values received by the reception unit 11 with respect to time, and if the differentiated value is positive, the measurement value monotonically increases with respect to the true value. to decide. If the differentiated value is negative, it is determined that the measured value is monotonously decreasing. Alternatively, two or more measurement values received by the reception unit 11 are compared in order with the measurement value measured immediately before. When the measurement value is always equal to or more than the measurement value immediately before, it is determined that the increase is monotonous and always the measurement immediately before. If the value is less than or equal to the value, it is determined as a monotonic decrease. The measurement values for which the change tendency determination unit 19 determines the change tendency are usually the latest predetermined period or a predetermined number of measurement values. For example, it may be the latest measured value for one lot or the like, the latest 20 measured values, or all of the period from the time when the previous calibration target 200 was calibrated to the present. It may be a measured value. In addition, although it is preferable to use the measured value containing the newest value as a measured value, if the change tendency can be estimated and judged, it is not necessary to use the newest value. In addition, even if the measured value is not completely monotonically increasing or decreasing, it can be regarded as almost monotonically increasing or monotonically decreasing due to statistical processing, etc. For example, it may be determined that it is monotonously increasing or monotonically decreasing. Here, the change tendency determination unit 19 outputs the determination result to the target value determination unit 20. The change tendency determination unit 19 can be usually realized by an MPU, a memory, or the like. The processing procedure of the change tendency determination unit 19 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The target value determination unit 20 acquires the true value stored in the true value storage unit 18, and uses the true value to determine a calibration target value according to the determination result of the change tendency determination unit 19. Specifically, when the change tendency determination unit 19 determines that the measurement value is monotonically increasing, the target value is determined to be smaller than the true value. The range of values, the ratio, etc. of how small the value is set in advance. Here, the target value determination unit 20 acquires information indicating the optimum correction limit for the calibration target 200 from the outside via the calculation unit 15, a reception unit such as the reception unit 11, and the like, and the change tendency determination unit 19 When it is determined that the measured value is monotonically increasing, it is preferable to determine the target value to be a value smaller than the true value by half of the optimum correction limit. In addition, the target value determination unit 20 preferably determines the target value to be a value larger than the true value when the change tendency determination unit 19 determines that the measured value is monotonously decreasing. The range of values, the ratio, etc. of how much value is set in advance. Here, when the target value determination unit 20 acquires information indicating the optimum correction limit for the calibration target 200 as described above, and the change tendency determination unit 19 determines that the measured value is monotonically decreasing, the target value is determined. The value is preferably determined to be larger than the true value by half the optimum correction limit. When the determination result of the change tendency determination unit 19 is neither monotonous increase nor monotonous decrease, the calibration target value may be determined to be a true value, for example. Note that the calibration target value may be expressed by a difference from the true value with reference to the true value. The target value determining unit 20 can be usually realized by an MPU, a memory, or the like. The processing procedure of the target value determination unit 20 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The target value output unit 21 outputs the target value determined by the target value determination unit 20. The output described here is a concept including display on a display, printing on paper by a printer, transmission to an external device, and the like. For example, when the calibration target 200 is an apparatus that can automatically calibrate so that the measurement value becomes the target value, the target value output unit 21 calibrates the target value determined by the target value determination unit 20. By outputting to the target 200, the calibration target 200 that has received this may be calibrated using the received target value. Further, when the target value output unit 21 displays the target value on a display or the like, it may be displayed in any display form. For example, the target value may be displayed as a numerical value or a graph or the like. You may display. The target value output unit 21 may be considered as including or not including an output device such as a display or a printer. The target value output unit 21 can be realized by driver software of an output device or driver software of an output device and an output device.

  Hereinafter, the process which calculates the optimal correction limit and the optimal inspection interval which the calculation part 15 performs is demonstrated.

  As shown in Non-Patent Document 1 described above, the optimum inspection interval and the optimum correction limit are obtained by calculating “loss = calibration cost + cost due to bias error” as a loss function, and an inspection interval for minimizing this loss. It is calculated by obtaining the correction limit. Specifically, the optimal inspection interval n and the optimal correction limit D are

A: Average loss when the limit is exceeded (yen / piece)
B: Expenses required for checking the measuring instrument (calibration target) (yen)
C: Expenses required to correct the measuring instrument (calibration target) (yen)
u 0 : Current average correction interval D 0 : Current correction limit Δ: Expressed by tolerance.

FIG. 3 is a graph schematically showing the relationship between the allowable range and the measured value, where the horizontal axis represents the measured value and the vertical axis represents the number of samples. Here, S L and S U are a lower limit value and an upper limit value of a permissible range for determining that a measurement value is normal, designated in advance. The lower limit value and the upper limit value of the allowable range are values obtained from the allowable range information stored in the allowable range information storage unit. The center of the allowable limit of the measured value is (S L + S U ) / 2. The distance from the center of the allowable limit to the upper limit value or the lower limit value of the allowable range, that is, the absolute value of the difference is the allowable difference Δ. In the past, this tolerance Δ was used as the tolerance Δ in Equation 1. This tolerance is shown in FIG. 3A as Δ 0 for convenience.

  Here, as shown in FIG. 3A, when the measurement value is distributed in the center of the allowable range, even if the deviation error E shown in the drawing occurs in the calibration target 200, the measurement value is Since it is within the allowable range, the product is determined to be normal and does not affect the yield of the product.

  However, as shown in FIG. 3B, when the measured value is distributed out of the center of the allowable range, if the same deviation error E occurs in the calibration target 200, the measured value deviates from the allowable range. It can happen that the product is judged abnormal. As a result, the yield decreases and the defect cost increases.

  Therefore, in order to suppress an increase in the defect cost due to the distribution position of the measurement value, whether or not the distribution of the measurement value is deviated from the center of the allowable range is determined based on the optimal inspection interval and the optimal correction shown in Equation 1. It is necessary to reflect the limit in the formula for obtaining the limit.

  For this reason, in the present embodiment, as described below, in Formula 1 above, by giving a tolerance Δ that designates an allowable range according to the distribution position of the measurement value, it depends on the distribution position of the measurement value. The optimum inspection interval and the optimum correction limit that can suppress the increase in the defect cost are calculated.

First, in the calculation unit 15 of the calibration support apparatus 1, the lower limit value S L ′ of the allowable range for managing measurement performance and the positional relationship between the distribution of the measured value and the lower limit value S L and the upper limit value S U of the allowable range and The upper limit value S U ′ is calculated. Specifically, the average value of the measurement values of the calibration target 200 received by the receiving unit 11 is obtained. As the measurement values, the latest measurement values for one lot of products may be used, or all the measurement values from the previous calibration date may be used. Next, the lower limit value S L and the upper limit value S of the allowable range indicated by the allowable range information stored in the allowable range information storage unit 13 from the representative value of the obtained measurement values, here the average value X bar as an example. The interval value up to U is obtained by the following equation. However, here, since it is an interval, the absolute value of the value is assumed.

Further, the calculation unit 15 compares the magnitude relationship between the values of the intervals calculated by Expression 2, and allows an allowable range (S L ′, S U ′) for managing the measurement performance as shown in FIG. ) Is calculated.

Specifically, when “interval to lower limit value” <“interval to upper limit value”, the distribution of measured values is shifted to the lower limit value S L side of the allowable range. An upper limit value and a lower limit value (S L ', S U ') of the allowable range are expressed by the following equations.

Therefore, the tolerance Δ in this case is
Ask for.

On the other hand, when “interval to the lower limit value” ≧ “distance to the upper limit value”, this indicates that the distribution of measured values is shifted to the upper limit value SU side of the allowable range, and the allowable range for managing measurement performance The upper limit value and lower limit value (S L ', S U ') are represented by the following equations.

Therefore, the tolerance Δ in this case is
Ask for.

  Therefore, the calculation unit 15 of the calibration support apparatus 1 according to the present embodiment uses the allowable range information in the allowable range information storage unit 13 according to the distribution position determination result of the distribution position determination unit 14 as described above. A tolerance Δ is formed, and using this tolerance Δ, the optimum inspection interval and / or the optimum correction limit is calculated by the above-described equation 1. That is,

Thus, the optimum inspection interval n and the optimum correction limit D are calculated. Also,

Thus, the optimum inspection interval n and the optimum correction limit D are calculated.

It should be noted that values such as A, B, C, u 0 , and D 0 in Equation 1 are stored in the calculation information storage unit 16 and are appropriately read at the time of calculation. Further, the information stored in the calculation information storage unit 16 is appropriately updated as necessary based on the result calculated by the calculation unit 15.

  In the above, when “interval to lower limit value” = “interval to upper limit value”,

In this case, since (S U −X bar ) = (X bar −S L ),

The tolerance Δ may be obtained as follows.

  Next, operation | movement of the calibration assistance apparatus 1 is demonstrated using the flowchart of FIG. Here, it is assumed that i = 1 first calibration has already been performed on the calibration target 200 first. In addition, it is assumed that the optimal inspection interval n (i) and the optimal correction limit D (i) calculated using the allowable range information of the measurement value are set in advance. These pieces of information are accumulated in advance, for example, in the calculation information storage unit 16 or the like. Here, a case where inspection data including the j-th measurement value is received via an input device such as a keyboard or from the calibration target 200 via a network or the like will be described.

  (Step S401) The calibration support apparatus 1 assigns 1 to the counter i.

  (Step S402) The calibration support apparatus 1 substitutes 1 for the counter j.

  (Step S403) The reception unit 11 determines whether or not the j-th measurement value, which is the j-th inspection data, has been received. If accepted, the received measurement value is accumulated in the measurement value storage unit 12, and the process proceeds to step S404. If not accepted, the process returns to step S403. The received measurement value may be displayed on a display or the like using the output unit 17 or the like. Note that the j-th measurement value may be one measurement value measured at the timing when the reception unit 11 receives the measurement value, or each of a plurality of inspection objects near the timing when the reception unit 11 receives the measurement value. It may be a representative value of a plurality of measured values, such as an average value.

  (Step S404) The distribution position determination unit 14 calculates a bias error Y (i, j) of the j-th inspection of the i-th calibration using the j-th measurement value. The bias error is calculated by (jth measured value−true value).

(Step S405) The distribution position determination unit 14 determines that the bias error Y (i, j) calculated in Step S404 is the upper limit value D U (i) of the optimum correction limit D (i) calculated at the i-th calibration. ) Or greater. The upper limit value D U (i) of the optimal correction limit D (i) is D U (i) = D (i) / 2. If not, the process proceeds to step S406. If larger, the process proceeds to step S407.

(Step S406) The distribution position determination unit 14 determines whether the bias error calculated in step S404 is smaller than the lower limit value D L (i) of the optimal correction limit D (i) calculated at the i-th calibration. Determine whether. The lower limit value D L (i) of the optimum correction limit D (i) is D L (i) = − D (i) / 2. If smaller, the process proceeds to step S407, and if not smaller, the process proceeds to step S423.

(Step S407) The distribution position determination unit 14 calculates a representative value of the measurement values received after the i-th calibration with respect to the calibration target 200, here, as an example, an average value X bar (i).

(Step S408) The distribution position determination unit 14 acquires the allowable range information from the allowable range information storage unit 13, and acquires the upper limit value S U and the lower limit value S L of the allowable range.

(Step S409) The distribution position determination unit 14 determines that the interval between the upper limit value S U of the allowable range and the average value X bar (i) that is a representative value of the measured value is the average of the lower limit value S L of the allowable range and the measured value. It is determined whether or not the interval with the value X bar (i) is greater. If so, the process proceeds to step S410. If not, the process proceeds to step S411.

(Step S410) The calculation unit 15 calculates a tolerance Δ (i) = X bar (i) −S L after the i-th calibration. Then, the process proceeds to step S412.

(Step S411) The calculation unit 15 calculates the tolerance Δ (i) = S U −X bar (i) after the i-th calibration. Then, the process proceeds to step S412.

  (Step S412) The calculation unit 15 calculates the optimal correction limit D (i + 1) after the i + 1th calibration. The calculated value of the optimum correction limit D (i + 1) is accumulated in the calculation information storage unit 16. Note that this process is ignored when the optimum correction limit D (i + 1) is not calculated.

  (Step S413) The calculation unit 15 calculates the optimal inspection interval n (i + 1) after the i + 1th calibration. The calculated optimal inspection interval n (i + 1) is stored in the calculation information storage unit 16. Note that this process is ignored when the optimal inspection interval n (i + 1) is not calculated.

  (Step S414) The output unit 17 outputs the optimum correction limit n (i + 1) and the optimum inspection interval n (i + 1) calculated by the calculation unit 15. For example, the optimum correction limit n (i + 1) and the optimum inspection interval n (i + 1) are displayed on the display using a graph or the like. Only one of them may be displayed.

  (Step S415) The change tendency determination unit 19 reads from the measurement value storage unit 12 the first to jth measurement values received after the i-th calibration.

  (Step S416) The change tendency determination unit 19 determines whether or not the i-th calibrated measurement value is monotonically increasing. For example, the bias error Y (i, k) (where k is an integer from 1 to j) is obtained for each of j measurement values measured at the optimal inspection interval n (i) determined by the i-th calibration. Then, all inclinations between the deviation errors Y (i, k) adjacent to each other in the checked order are obtained. When all the slopes are 0 or more, it is determined that the increase is monotonous. When it is not determined that the increase is monotonous, the process proceeds to step S417. If it is determined that the increase is monotonous, the process proceeds to step S420.

  (Step S417) The change tendency determination unit 19 determines whether or not the i-th calibrated measurement value is monotonously decreasing. For example, the bias error Y (i, k) (where k is an integer from 1 to j) is obtained for each of j measurement values measured at the optimal inspection interval n (i) determined by the i-th calibration. Then, all inclinations between the deviation errors Y (i, k) adjacent to each other in the checked order are obtained. And when all the inclinations are 0 or less, it is judged as monotonous decrease. If it is not determined to be monotonic decrease, the process proceeds to step S418. If it is determined to be monotonic decrease, the process proceeds to step S421.

  (Step S418) The target value determining unit 20 determines that the bias error Y (i, j) = 0, that is, correcting the j-th measured value to a true value is a calibration target value.

  (Step S419) The target value output unit 21 outputs a target value for calibration. Specifically, an instruction to calibrate the calibration target 200 is output, for example, displayed, so that the measured value becomes the target value determined in step S418, step S420, step S421 described later, or the like. Then, the process proceeds to step S422.

  (Step S420) The target value determination unit 20 sets the bias error Y (i, j) = − D (i + 1) / 2, that is, the j-th measurement value becomes “true value−D (i + 1) / 2”. The correction target value is determined to be corrected. Then, the process proceeds to step S419.

  (Step S421) The target value determination unit 20 corrects the bias error Y (i, j) = D (i + 1) / 2, that is, the j-th measurement value to be “true value + D (i + 1) / 2”. This is determined as the calibration target value. Then, the process proceeds to step S419.

  (Step S422) The calibration support apparatus 1 increments the counter i by 1. Then, the process returns to step S402.

  (Step S423) The calibration support apparatus 1 increments the counter j by 1. Then, the process returns to step S403.

  In the flowchart of FIG. 4, the accepting unit 11 may read and accept a measurement value from the calibration target 200 or the like at every optimum inspection interval.

In the flowchart of FIG. 4, the distance to the lower limit used in step S409 is represented by X bar (i) −S L , and the distance to the upper limit is represented by X bar (i) −S U. . X bar (i) is an average value of measured values after the i-th calibration.

Further, the interval between the upper limit value S U of the allowable range and the average value X bar (i) that is a representative value of the measured value is the interval between the lower limit value S L of the allowable range and the average value X bar (i) of the measured value. If it is larger, the tolerance Δ (i) after the i-th calibration is

It is. At this time, the (i + 1) -th optimal correction limit D (i + 1) calculated in step S412 and the (i + 1) -th optimal inspection interval n (i + 1) calculated in step S413 are

A (i): Average loss (yen / piece) when the tolerance limit after the i-th calibration is exceeded
B (i): Expenses required for checking the i-th calibrated measuring instrument (calibration target) (yen)
C (i): Expense required for correcting the i-th calibrated measuring instrument (calibration target) (yen)
u (i): average correction interval after i-th calibration D (i): i-th optimum correction limit

It is represented by The average correction interval is a period from the last correction time to the current correction time. That is, u (i) is a period from the time when the i-th calibration is performed to when the i + 1-th calibration is performed.

Further, the interval between the upper limit value S U of the allowable range and the average value X bar (i) that is a representative value of the measured value is the interval between the lower limit value S L of the allowable range and the average value X bar (i) of the measured value. If it is not larger, the tolerance Δ (i) after the i-th calibration is

It is. At this time, the (i + 1) -th optimal correction limit D (i + 1) calculated in step S412 and the (i + 1) -th optimal inspection interval n (i + 1) calculated in step S413 are

It is represented by

  In the flowchart of FIG. 4, the process ends when the power is turned off or the process ends.

  Hereinafter, a specific operation of the calibration support apparatus according to the present embodiment will be described. A conceptual diagram of the calibration support apparatus is shown in FIG.

Here, in the calibration support apparatus 1, the upper limit value SU and the lower limit value SL of the allowable range are stored in the allowable range information storage unit 13 as information indicating the preset allowable range of the measurement value. And Here, it is assumed that the i-th calibration target 200 has already been calibrated. Furthermore, it is assumed that the optimal inspection interval n (i) and the optimal correction limit D (i) calculated using the above-described allowable range information are accumulated in the calculation information storage unit 16 and the like.

  First, using the calibration target 200 that has been calibrated in advance, the inspection target is measured at each preset optimal inspection interval, and the measurement value is acquired. In the inspection, measurement is performed using a product or intermediate product whose self-evident value is obvious. Then, inspection data including the measurement value and information indicating the inspection date and time when the measurement value is acquired is input to the calibration support apparatus 1 via an input device such as a keyboard. The reception unit 11 receives inspection data input from an input device such as a keyboard. The inspection data may be automatically acquired from the calibration target 200 via a LAN or the like. Then, for example, the calculation unit 15 or the like subtracts the true value stored in the true value storage unit 18 from the measurement value included in the measurement information to calculate the bias error, and the calculation result It is displayed on a graph as shown in FIG.

  FIG. 5 is a graph for monitoring the calibration time output from the output unit 17, the horizontal axis indicates the date and time of inspection, and the vertical axis indicates the bias error, that is, the measured value−true value. . In this graph, the optimal inspection interval acquired during calibration is represented as an auxiliary line perpendicular to the horizontal axis with the calibration date as the base point, and the optimal correction limit acquired during calibration is controlled vertically to the vertical axis. Displayed as a reference line. In the graph shown in FIG. 5, the central value of the optimum correction limit is set to a true value. That is, the central value of the optimum correction limit is set to zero. Thereby, for example, the upper limit value of the optimal correction limit D (i) after the i-th calibration is D (i) / 2, and the lower limit value is −D (i) / 2.

  When measurement information is input as described above, a plot point of bias error corresponding to the measurement value is drawn on a graph as shown in FIG. As will be described here, the true value may be registered in advance in the calibration support apparatus 1, and the bias error may be calculated and plotted by inputting the measured value. When the bias error calculated by subtracting the true value from the measured value is output as the measured value, the receiving unit 11 may directly plot the measured value.

  The distribution position determination unit 14 monitors the bias error, and when the bias error plotted according to the inspection data exceeds the current optimum correction limit, it determines to recalculate the optimum correction limit. For example, in FIG. 5, when the inspection date is “3/17”, the deviation error obtained from the measured value exceeds D (i) / 2, which is the upper limit value of the optimum correction limit D (i). Therefore, it is determined to calculate the optimum correction limit D (i + 1).

Then, the distribution position determination unit 14 calculates the average value X bar of the measurement values received after the previous calibration. The distribution position determination unit 14 determines the distribution position of the measurement value using the average value and the allowable range information stored in the allowable range information storage unit 13.

Then, the calculation unit 15 calculates the optimum correction limit D (i + 1) and the optimum inspection interval n (i + 1) according to the distribution position judgment result of the distribution position judgment unit 14. For example, as shown in FIG. 6A, when the average value X bar of the measured values is smaller than the center value of the allowable range, the optimum correction limit D (i + 1) and the optimum inspection interval are obtained by the above-described equations 8 and 9. n (i + 1) is calculated. Further, as shown in FIG. 6B, when the average value X bar of the measured values is equal to or larger than the center value of the allowable range, the optimum correction limit D (i + 1) and the optimum inspection interval are obtained according to the above-described equations 11 and 12. n (i + 1) is calculated.

  Then, the management unit line indicating the optimum correction limit D (i + 1) newly calculated by the calculation unit 15 and the auxiliary line indicating the optimum inspection interval n (i + 1) are displayed on the output unit 17 as shown in FIG. To display.

  On the other hand, when the change tendency determination unit 19 of the calibration support apparatus 1 detects that the bias error calculated from the measured value exceeds the optimum correction limit, the change tendency judgment unit 19 measures the current optimum inspection interval n (i). The bias error Y (i, j) (where j = 1, 2, 3...) Is called to obtain the slope of each section. At this time, when the slopes of the respective sections are all equal to or greater than 0, it is determined that the change in the bias error, that is, the change in the measured value is monotonically increasing. Then, the target value determination unit 20 sets the bias error value to −D (i + 1) / 2, which is the lower limit value of the optimum correction limit D (i + 1) newly calculated by the calculation unit, for the i + 1th time. Determine the target value for calibration. Further, when the slopes of the respective sections are all 0 or less, it is determined that the change in the bias error, that is, the change in the measured value is monotonically increasing. Then, the target value determination unit 20 sets the bias error value to D (i + 1) / 2, which is the upper limit value of the optimum correction limit D (i + 1) newly calculated by the calculation unit. The target value is determined. In other cases, the target value determination unit 20 determines that the value of the bias error is 0 as the target value for the i + 1th calibration.

  For example, in the graph shown in FIG. 7, since the measured value after the i-th calibration monotonically increases, the value of the bias error is calculated as the lower limit of the optimum correction limit D (i + 1) newly calculated by the calculation unit. It is determined that the value is −D (i + 1) / 2, that is, the measured value is −D (i + 1) / 2 with respect to the true value as a target value at the time of the i + 1th calibration.

  Then, the target value output unit 21 outputs, for example, “Please correct the measured value to be −D (i + 1) / 2 with respect to the true value” as shown in FIG. Display on the display.

  Based on such a display, the calibration target 200 is calibrated by the user. Thereafter, the same processing is repeated.

  Here, for example, as shown in FIG. 8, when the deviation error, which is the difference between the measured value and the true value, monotonically increases or monotonously decreases, when the range of the optimum correction limit is exceeded, FIG. When the bias error is corrected to 0 by calibration as shown in FIG. 8A and FIG. 8B, the substantial correction limit range becomes half of the optimum correction limit range. For this reason, the calibration cycle M1 is short and the frequency of calibration is increased. As a result, the calibration cost increases.

  On the other hand, when the bias error, which is the difference between the measured value and the true value, increases monotonously, as shown in FIG. 8C, if the bias error is corrected to the lower limit value of the optimum correction limit as shown in FIG. Since the correction limit is in the same range as the optimal correction limit, the calibration cycle M2 is longer, the frequency of calibration is reduced, and the calibration cycle is longer than when the bias error is corrected to 0 as described above. Thus, the calibration cost can be reduced.

  Similarly, when the bias error, which is the difference between the measured value and the true value, monotonously decreases, as shown in FIG. 8D, if the bias error is corrected to the upper limit value of the optimum correction limit by calibration, a substantial correction is made. Since the limit is in the same range as the optimum correction limit, the calibration cycle M2 is longer, the frequency of calibration is reduced, and the calibration cycle is longer than when correcting the bias error to 0 as described above. The calibration cost can be reduced.

  As described above, according to the present embodiment, the optimum correction limit or the optimum inspection interval is calculated according to the distribution position of the measurement value. It can be optimized to reduce the defect cost and to reduce the calibration cost.

  In addition, according to the present embodiment, the calibration target value is output according to the distribution tendency of the measurement value, so that the calibration cycle is lengthened according to the distribution tendency of the measurement value. This can be done and the calibration cost can be reduced.

  In the above embodiment, the target value determination unit 20 determines the target value using the optimum correction limit calculated by the calculation unit 15 according to the distribution position of the measurement value. However, in the present invention, The configuration of the calculation unit 15 or the like for calculating the optimum correction limit according to the distribution position of the measurement value is omitted, and the preset optimum correction limit and the measurement value distribution as in the conventional case are not considered. The target value determination unit 20 may determine the target value for calibration using the optimum correction limit calculated in (1).

  In the above embodiment, the configuration for determining the target value of the configuration according to the change tendency of the measurement value is omitted, and the optimal correction limit and the optimal inspection interval calculated by the calculation unit 15 according to the distribution position of the measurement value are omitted. A calibration support apparatus for acquiring the above may be configured.

  In the above embodiment, each process (each function) may be realized by centralized processing by a single device (system), or by distributed processing by a plurality of devices. May be.

  In the above embodiment, each component may be configured by dedicated hardware, or a component that can be realized by software may be realized by executing a program. For example, each component can be realized by a program execution unit such as a CPU reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.

  The software that realizes the calibration support apparatus in the above embodiment is the following program. In other words, this program is a program for causing a computer to execute processing for supporting calibration of a calibration target, and includes a reception step for receiving a measurement value acquired by the calibration target and stored tolerance range information. And determining the distribution position of the measurement value received in the reception step with respect to the normal value range indicated by the allowable range information, which is information indicating the allowable range that is the normal value range of the measurement value to be calibrated. A distribution position determination step, a calculation step for calculating at least one of an optimal correction limit or an optimal inspection interval for the calibration object according to a determination result by the distribution position determination step, and a calculation result calculated by the calculation step. This is a program for executing an output step for outputting the indicated information.

  Further, the program is a program for causing a computer to execute a process for supporting calibration of a calibration target, a reception step for receiving a measurement value acquired by the calibration target, and the measurement value received by the reception step A change trend judgment step for judging the tendency of the change, and a stored true value, the true value for the inspection object is acquired, and the calibration target value is set according to the judgment result of the change trend judgment step. A program for executing a target value determining step to be determined and a target value output step for outputting the target value determined by the target value determining step.

  In the above program, in a transmission step for transmitting information, a reception step for receiving information, etc., processing performed by hardware, for example, processing performed by a modem or an interface card in the transmission step (only performed by hardware). Not included) is not included.

  Further, this program may be executed by being downloaded from a server or the like, and a program recorded on a predetermined recording medium (for example, an optical disk such as a CD-ROM, a magnetic disk, a semiconductor memory, or the like) is read out. May be executed by

  Further, the computer that executes this program may be singular or plural. That is, centralized processing may be performed, or distributed processing may be performed.

  In the above embodiment, it goes without saying that two or more communication means (such as an information transmission unit) existing in one apparatus may be physically realized by one medium.

  The present invention is not limited to the above-described embodiments, and various modifications are possible, and it goes without saying that these are also included in the scope of the present invention.

  In the above-described embodiment, the case where the calibration support apparatus is a stand-alone has been described. However, the calibration support apparatus may be a stand-alone apparatus or a server apparatus in a server / client system. In the latter case, the output unit or the reception unit receives an input or outputs a screen via a communication line.

  As described above, the calibration support device according to the present invention is suitable as a device that supports calibration of a calibration target, and in particular, a calibration support device that outputs an optimum correction limit, an optimum inspection interval, a calibration target value, and the like. Useful as such.

Block diagram of calibration support apparatus in embodiment Conceptual diagram of the calibration support device The figure which shows typically the relationship between an allowable range and a measured value for demonstrating the calibration assistance apparatus Flow chart for explaining the operation of the calibration support apparatus The figure which shows the example of a display of the same calibration assistance apparatus The figure which shows the example of a display of the same calibration assistance apparatus The figure which shows the example of a display of the same calibration assistance apparatus Diagram for explaining the calibration support device

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Calibration assistance apparatus 11 Reception part 12 Measurement value storage part 13 Permissible range information storage part 14 Distribution position judgment part 15 Calculation part 17 Output part 18 True value storage part 19 Change tendency judgment part 20 Target value determination part 21 Target value output part 200 Calibration target

Claims (15)

  1. A calibration support device that supports calibration of a calibration target,
    A reception unit for receiving a measurement value acquired by the calibration target;
    With respect to a range of normal values indicated by the allowable range information and an allowable range information storage unit that can store allowable range information that is information indicating an allowable range that is a range of values in which the measurement value of the calibration target is normal, A distribution position determination unit that determines a distribution position of a measurement value received by the reception unit;
    In accordance with the determination result of the distribution position determination unit, a calculation unit that calculates at least one of an optimal correction limit or an optimal inspection interval for the calibration target;
    A calibration support apparatus comprising: an output unit that outputs information indicating a calculation result calculated by the calculation unit.
  2. The calculation unit acquires a tolerance of the measurement value according to the distribution position of the measurement value determined by the distribution position determination unit, and calculates at least one of an optimum correction limit or an optimum inspection interval using the tolerance. The calibration support apparatus according to claim 1.
  3. The distribution position determination unit determines whether the position of the representative value, which is a value representing the measurement value, is closer to the upper limit value or the lower limit value of the allowable range,
    The calculation unit includes:
    When the distribution position determination unit determines that the representative value is closer to the upper limit value of the allowable range, an optimal correction limit or a value of an interval between the upper limit value of the allowable range and the representative value is used. The calibration support apparatus according to claim 1, wherein at least one of the optimum inspection intervals is calculated.
  4. The distribution position determination unit calculates at least one of an optimal correction limit and an optimal inspection interval by using an interval value between the upper limit value of the allowable range and the representative value as a tolerance of a measured value. Calibration support device.
  5. The distribution position determination unit determines whether the position of the representative value, which is a value representing the measurement value, is closer to the upper limit value or the lower limit value of the allowable range,
    The calculation unit includes:
    When the distribution position determination unit determines that the representative value is closer to the lower limit value of the allowable range, an optimal correction limit or a value of an interval between the lower limit value of the allowable range and the representative value is used. 5. The calibration support apparatus according to claim 1, wherein at least one of the optimum inspection intervals is calculated.
  6. 6. The distribution position determination unit calculates at least one of an optimum correction limit and an optimum inspection interval by using an interval value between the representative value and the lower limit value of the tolerance range as a tolerance of a measured value. The calibration support apparatus described.
  7. A calibration support device that supports calibration of a calibration target,
    A reception unit for receiving a measurement value acquired by the calibration target;
    A true value storage unit in which a true value for the inspection object can be stored;
    A change tendency determination unit that determines a tendency of change in the measurement value received by the reception unit;
    A target value determination unit that acquires the true value and determines a calibration target value according to a determination result of the change tendency determination unit;
    A calibration support apparatus comprising: a target value output unit that outputs a target value determined by the target value determination unit.
  8. The change tendency determination unit determines whether or not the measurement value is monotonously increasing, and whether or not the measurement value is monotonously decreasing,
    The target value determination unit determines the target value to be smaller than a true value when the change tendency determination unit determines that the measurement value is monotonously increasing, and the change tendency determination unit measures The calibration support apparatus according to claim 7, wherein when it is determined that the value is monotonously decreasing, the target value is determined to be a value larger than a true value.
  9. The target value determination unit obtains information indicating an optimal correction limit for the calibration target, and when the change tendency determination unit determines that the measurement value is monotonically increasing, the target value is set to a true value. If the change tendency determination unit determines that the measured value is monotonically decreasing, the target value is set to the optimal correction value that is less than the true value. 9. The calibration support apparatus according to claim 8, wherein the calibration support apparatus is determined to be a value that is larger by a half of the limit.
  10. A calibration support method for supporting calibration of a calibration target,
    An accepting step of accepting a measurement value acquired by the calibration object;
    In the accepting step with respect to the range of normal values stored by the permissible range information, which is information indicating a permissible range that is a range of values in which the measurement value to be calibrated is a normal range. A distribution position determination step for determining the distribution position of the received measurement value;
    A calculation step of calculating at least one of an optimum correction limit or an optimum inspection interval for the calibration object in accordance with a determination result by the distribution position determination step;
    A calibration support method comprising: an output step of outputting information indicating a calculation result calculated by the calculation step.
  11. A calibration support method for supporting calibration of a calibration target,
    An accepting step of accepting a measurement value acquired by the calibration object;
    A change tendency determination step for determining a change trend of the measurement value received by the reception step;
    A stored true value, obtaining a true value for an inspection object, and determining a calibration target value according to a determination result by the change tendency determination step;
    A calibration support method comprising: a target value output step of outputting the target value determined in the target value determination step.
  12. On the computer,
    A program for executing processing to support calibration of a calibration target,
    An accepting step of accepting a measurement value acquired by the calibration object;
    In the accepting step with respect to the range of normal values stored by the permissible range information, which is information indicating a permissible range that is a range of values in which the measurement value to be calibrated is a normal range. A distribution position determination step for determining the distribution position of the received measurement value;
    A calculation step of calculating at least one of an optimum correction limit or an optimum inspection interval for the calibration object in accordance with a determination result by the distribution position determination step;
    A program for executing an output step of outputting information indicating a calculation result calculated by the calculation step.
  13. On the computer,
    A program for executing processing to support calibration of a calibration target,
    An accepting step of accepting a measurement value acquired by the calibration object;
    A change tendency determination step for determining a change trend of the measurement value received by the reception step;
    A stored true value, obtaining a true value for an inspection object, and determining a calibration target value according to a determination result by the change tendency determination step;
    A program for executing a target value output step for outputting the target value determined in the target value determination step.
  14. A recording medium on which a program for causing a computer to execute processing for executing processing for supporting calibration of a calibration target is recorded,
    On the computer,
    An accepting step of accepting a measurement value acquired by the calibration object;
    In the accepting step with respect to the range of normal values stored by the permissible range information, which is information indicating a permissible range that is a range of values in which the measurement value to be calibrated is a normal range. A distribution position determination step for determining the distribution position of the received measurement value;
    A calculation step of calculating at least one of an optimum correction limit or an optimum inspection interval for the calibration object in accordance with a determination result by the distribution position determination step;
    A recording medium on which a program for executing the output step of outputting information indicating the calculation result calculated by the calculation step is recorded.
  15. A recording medium on which a program for causing a computer to execute processing for executing processing for supporting calibration of a calibration target is recorded,
    On the computer,
    A program for executing processing to support calibration of a calibration target,
    An accepting step of accepting a measurement value acquired by the calibration object;
    A change tendency determination step for determining a change trend of the measurement value received by the reception step;
    A stored true value, obtaining a true value for an inspection object, and determining a calibration target value according to a determination result by the change tendency determination step;
    A recording medium on which a program for executing a target value output step for outputting the target value determined in the target value determination step is recorded.
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