JP2008209238A - Scanning probe microscope - Google Patents

Scanning probe microscope Download PDF

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Publication number
JP2008209238A
JP2008209238A JP2007046118A JP2007046118A JP2008209238A JP 2008209238 A JP2008209238 A JP 2008209238A JP 2007046118 A JP2007046118 A JP 2007046118A JP 2007046118 A JP2007046118 A JP 2007046118A JP 2008209238 A JP2008209238 A JP 2008209238A
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Japan
Prior art keywords
temperature
measurement
scanning probe
probe microscope
sample
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Pending
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JP2007046118A
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Japanese (ja)
Inventor
Manabu Edamura
Takenori Hiroki
Yoshihito Inanobe
Yuichi Kunitomo
Satohiko Watanabe
裕一 国友
武則 広木
学 枝村
聡彦 渡邉
慶仁 稲野辺
Original Assignee
Hitachi Kenki Fine Tech Co Ltd
日立建機ファインテック株式会社
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Priority to JP2007046118A priority Critical patent/JP2008209238A/en
Publication of JP2008209238A publication Critical patent/JP2008209238A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of highly accurately measuring by selecting the optimum measuring environment according to a measuring condition. <P>SOLUTION: In this scanning probe microscope equipped with a measuring part comprising a sample stand 3 for supporting a sample 8, a support 2 for installing the sample stand 3 thereon, a probe for sensing a physical action generated between itself and the sample surface, a slight movement driving mechanism 12 for allowing the probe to scan on a plane approximately in parallel with the sample surface, and a slight movement driving mechanism 11 for driving the probe approximately in the vertical direction to the sample surface; a casing for covering the measuring part; and a temperature adjusting mechanism 18, temperature control by the temperature adjusting mechanism 18 is changed according to the measuring condition. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a scanning probe microscope that measures the surface shape or surface state of a sample surface while scanning the probe surface with the sample surface. In particular, the sample surface shape is measured by an atomic force between the probe and the sample. Relates to an atomic force microscope.

In recent years, scanning probe microscopes such as an atomic force microscope and a scanning tunneling microscope are known as apparatuses for observing the surface shape of a sample. The measurement object of these scanning probe microscopes is on the order of nanometers and is easily affected by temperature fluctuations and noise. For example, when the internal temperature of the apparatus fluctuates, members constituting the apparatus undergo thermal expansion and contraction, which affects measurement data (this phenomenon is called temperature drift). As a device that reduces temperature drift, the temperature of the measurement mechanism or its surroundings is detected by a temperature sensor, and the measurement mechanism is heated and cooled based on the detected temperature data to adjust the temperature of the measurement mechanism By doing so, a probe microscope that can achieve thermal stability and reduce temperature drift of data is known (see Patent Document 1).
JP 2004-286696 A

  However, when the device of Patent Document 1 described above is applied, even if a temperature control device capable of highly accurate temperature control is used, some temperature fluctuations remain as temperature control hunting. At this time, when there is no particularly large disturbance, the temperature fluctuates with a constant period and a constant amplitude, which may affect the measurement data. In addition, there is a problem that when temperature-controlled air is supplied at the time of measuring surface roughness of 1 nanometer or less, there is a problem that it is affected by the wind, and temperature control is always the optimal measurement environment. That's not true.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a scanning probe microscope that enables highly accurate measurement by selecting an optimum measurement environment according to measurement conditions. is there.

  A scanning probe microscope according to the present invention includes a sample stage for supporting a sample, a support for installing the sample stage, a probe for sensing a physical action generated between the sample surface and the probe. A measurement unit comprising a fine movement driving mechanism for scanning in a plane substantially parallel to the surface of the sample, and a fine movement driving mechanism for driving the probe in a substantially vertical direction with respect to the surface of the sample; In the scanning probe microscope provided with a casing that covers the part and a temperature adjustment mechanism, temperature control of the temperature adjustment mechanism is changed according to measurement conditions.

  According to the present invention, it is possible to select a measurement environment by installing an air conditioner and changing a temperature control pattern according to measurement conditions, thereby reducing temperature drift and improving measurement accuracy.

  DESCRIPTION OF EMBODIMENTS Preferred embodiments (examples) of the present invention will be described below with reference to the accompanying drawings.

  An embodiment of a scanning probe microscope apparatus according to the present invention will be described with reference to FIGS. The scanning probe microscope shown in FIG. 1 is an atomic force microscope (hereinafter referred to as “AFM”), and a driving mechanism for a sample stage 3 is provided on a surface plate 2 placed on a vibration isolation stage 1. . The drive mechanism includes an X-axis coarse movement mechanism 4, a Y-axis coarse movement mechanism 5, and a Z-axis coarse movement mechanism 6. The sample stage 3 is driven by the X-axis coarse movement mechanism 4 and the Y-axis coarse movement mechanism 5 so that the cantilever 7 comes to a predetermined position of the sample 8.

The AFM measuring head 9 is supported by a support member 10 at the top of the sample. The measuring head 9 includes a cantilever 7, a Z-axis fine movement actuator 11, an XY-axis fine movement actuator 12, a semiconductor laser 13, and a position-detectable optical sensor 14.

The atomic force microscope detects the force acting between the probe at the tip of the cantilever 7 and the surface of the sample 8, and drives the Z-axis fine movement actuator 11 and the X-axis coarse movement mechanism 4 and the Y-axis while driving the Z-axis fine movement actuator 11 so that this force is constant. XY scanning is performed by the coarse movement mechanism 5 or the XY axis fine movement actuator 12.

The command signal of the Z-axis fine movement actuator 11 at this time or the measured value of the Z-axis displacement amount of the cantilever 7 is used for imaging as measurement data. The entire measuring apparatus is covered with a casing 15 having a soundproofing and heat insulating effect, and the influence of disturbance can be reduced. A filter unit 16 is installed in the upper part of the housing 15 as a dust-proof measure, and an air conditioner 18 is connected via the supply side duct 17 and the filter unit 16.

The air conditioner 18 supplies the temperature-controlled air based on the measurement result of the temperature sensor 20 as a downflow into the housing 15 through the supply-side duct 17 to prevent the dust inside the housing 15 from being rolled up. Realize a stable temperature environment. The temperature sensor 20 used for temperature control may be installed inside the housing 15 or may be installed in the apparatus air introduction part (above the filter unit 16). At this time, the introduced air may be circulated using an exhaust side duct 19 as shown in FIG. 1, or may be open as shown in FIG.

  Next, FIG. 3 shows the relationship between the temperature fluctuation period and the temperature drift amount (the influence of the thermal expansion / contraction of the member due to the temperature change appearing in the AFM measurement image) when the temperature fluctuates at a constant period / amplitude. Generally, the shorter the fluctuation period, the smaller the temperature drift amount. This is because the shorter the fluctuation period, the less the temperature of the parts constituting the AFM follows the ambient temperature. That is, even if the fluctuation range is large, if the fluctuation period is small, the temperature of the component is relatively constant, and the influence on the measurement is small. Therefore, as shown in FIG. 4, when the measurement time is relatively long, the amount of temperature drift can be reduced by shortening the fluctuation period with respect to the measurement time.

On the other hand, when the measurement time is relatively short as shown in FIG. 5, it may be advantageous to make the fluctuation period longer than the measurement time. In FIG. 5, when temperature control is performed with the same fluctuation cycle as shown in FIG. 4, the peak from the temperature drop to the rise exactly coincides with the measurement time, and the influence of temperature drift increases, but as shown in the figure If the fluctuation period is long, the temperature of the component increases during the measurement following the temperature of the air, but the amount of temperature drift decreases because the measurement time is short.

In addition, there are various measurement objects of the atomic force microscope. For example, when measuring a step of 1 nanometer or less, such as the surface roughness of a semiconductor wafer, it is easily affected by disturbances such as sound and vibration. For this reason, when an air conditioner as shown in FIG. 1 is used, the probe vibrates under the influence of wind, and it is difficult to capture the surface shape. Therefore, it is better to stop the airflow by stopping the air conditioner and to stop the downflow by the filter unit 16 if possible. In addition, since the measurement time at this time is comparatively short, it is hard to receive the influence of temperature.

Further, when the measurement area is large and the measurement time is relatively long, the temperature drift can be reduced by shortening the temperature fluctuation period, so that the temperature of the constituent members of the measurement device is less likely to follow the temperature fluctuation of the air.

It can be seen that the optimum temperature control pattern varies depending on the object to be measured and the measurement time. Therefore, it is effective to optimize the measurement environment by selecting an optimal control parameter from the measurement time expected to be measured before measurement. Therefore, in the present embodiment, as shown in FIG. 6, the measurement time is calculated from user input information such as the measurement mode, the measurement area, and the number of measurement points, and the AFM control device performs air conditioning before measurement based on the measurement mode and measurement time. The control parameters of the device can be set automatically. Measurement modes include a fine mode that scans with a fine XY stage to measure the surface roughness of a minute area, a step-in mode that mainly measures high step shapes while moving the probe up and down, and a scan with a coarse XY stage for comparison. There is a wide mode that performs a wide range of measurements, but the temperature control parameter is determined based on information such as the measurement time. An example is shown in FIG.

For example, when in fine mode, it measures relatively small steps such as surface roughness in a short time, so it is relatively insensitive to temperature drift. Therefore, prioritize turning off air conditioning and reducing the effect of wind during measurement. Improve measurement accuracy. In step-in mode, if the measurement time is short, the temperature fluctuation period is lengthened to reduce the temperature drift. In addition, when the measurement time is long, if the temperature fluctuation cycle is controlled to be short, the constituent members of the measuring device are less likely to follow the temperature fluctuation of the air, so that thermal expansion / contraction is less likely to occur, and temperature drift can be reduced. In the wide mode, since the measurement area is large and the measurement time is long, it is effective to similarly control the temperature cycle to be short.

In addition to FIG. 6, by selecting the type of measurement object (surface roughness, pattern shape, etc.) as shown in FIG. 8, the optimum air conditioner adapted to the measurement object before measurement as in the above-described embodiment These control parameters may be set automatically. Alternatively, as shown in FIG. 9, the operator may determine the optimal control parameter of the air conditioner from the measurement conditions, and set the optimal control parameter of the air conditioner.

  The scanning probe microscope of the present embodiment described above has the following operational effects.

  In addition to installing an air conditioner, select the optimum temperature control pattern according to the measurement conditions and type of measurement object, and control the air conditioner and temperature fluctuation cycle to reduce temperature drift and improve measurement accuracy Can do.

Specifically, the air conditioner is stopped when measuring a minute step of 1 nanometer or less, the effect of wind is reduced, and when the step is measured or the measurement area is large, the thermal expansion / contraction is controlled by controlling the temperature fluctuation cycle. Therefore, temperature drift can be reduced and measurement accuracy can be improved.

Also, when measuring a step with a relatively short measurement time, the temperature fluctuation period is lengthened to reduce the temperature fluctuation width, and for a measurement with a relatively long measurement time, the temperature fluctuation period is shortened so that the component temperature of the measuring device is Since it is difficult to follow the temperature fluctuation, the temperature drift can be reduced and the measurement accuracy can be improved.

  In this embodiment, the air conditioner is installed on the side of the apparatus main body, but may be installed on the upper part of the main body as shown in FIG. With such a configuration, the installation area can be reduced.

  Furthermore, the present invention is not limited to the configurations in the above-described embodiments as long as the characteristic functions of the present invention are not impaired.

  The present invention is used for optimal temperature control in an air conditioner such as a scanning probe microscope, and is used for improving measurement accuracy.

It is a figure which shows the scanning probe microscope which concerns on one Embodiment of this invention. It is a figure which shows other embodiment of the scanning probe microscope of this invention. It is a figure which shows the relationship between the temperature fluctuation period of air, and a temperature drift amount. It is a figure which shows the relationship between measurement time and the temperature fluctuation of air. It is a figure which shows the relationship between measurement time and the temperature fluctuation of air. It is a temperature control block diagram concerning one embodiment of the present invention. It is a table | surface (example) for temperature control parameter determination. It is a figure which concerns on other embodiment of the temperature control block of this invention. It is a figure which concerns on other embodiment of the temperature control block of this invention. It is a figure which concerns on other embodiment of the scanning probe microscope of this invention.

Explanation of symbols

1: Vibration isolation table 2: Surface plate (support)
3: Sample stage 4: Y-axis coarse movement mechanism 5: X-axis coarse movement mechanism 6: Z coarse movement mechanism 7: Cantilever (probe)
8: Sample 9: Measuring head 10: Support member 11: Z-axis fine movement mechanism 12: XY-axis fine movement mechanism 13: Semiconductor laser 14: Position detectable optical sensor 15: Housing 16: Filter unit 17: Supply side duct 18: Air conditioning Equipment (temperature adjustment mechanism)
19: Exhaust side duct 20: Temperature sensor

Claims (7)

  1. A sample stage for supporting the sample, a support for installing the sample stage, a probe for sensing a physical action occurring between the sample surface, and the probe substantially parallel to the surface of the sample A fine movement drive mechanism for scanning in a plane, and a measurement section comprising a fine movement drive mechanism for driving the probe in a substantially vertical direction with respect to the surface of the sample, a housing covering the measurement portion, and the housing In a scanning probe microscope equipped with a temperature adjustment mechanism for adjusting the internal temperature,
    A scanning probe microscope, wherein temperature control of the temperature adjusting mechanism is changed according to measurement conditions.
  2.   The scanning probe microscope according to claim 1, wherein the temperature control of the temperature adjustment mechanism is switched according to a measurement mode and a measurement time as the measurement condition.
  3.   2. The scanning probe microscope according to claim 1, wherein the temperature control of the temperature adjusting mechanism is switched by selecting a type of measurement object as the measurement condition.
  4.   2. The scanning probe microscope according to claim 1, wherein a temperature control condition of the temperature adjusting mechanism is directly inputted.
  5.   5. The scanning probe microscope according to claim 1, wherein the temperature adjustment mechanism controls at least one of a temperature fluctuation period and an air conditioner. 6.
  6.   6. The scanning probe microscope according to claim 5, wherein the air conditioner of the temperature adjusting mechanism is stopped when measuring a minute step of 1 nanometer or less, and the temperature adjusting mechanism is used for measuring a step or a wide area with a large measurement area. A scanning probe microscope characterized by switching control of the temperature fluctuation period of the probe.
  7.   6. The scanning probe microscope according to claim 5, wherein a temperature fluctuation period of the temperature adjusting mechanism is controlled to be long when measuring a step having a relatively short measurement time, and the temperature is measured in step measurement and wide area measurement having a relatively long measuring time. A scanning probe microscope characterized in that the temperature fluctuation period of the adjusting mechanism is controlled to be short.
JP2007046118A 2007-02-26 2007-02-26 Scanning probe microscope Pending JP2008209238A (en)

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JP2007046118A JP2008209238A (en) 2007-02-26 2007-02-26 Scanning probe microscope

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Application Number Priority Date Filing Date Title
JP2007046118A JP2008209238A (en) 2007-02-26 2007-02-26 Scanning probe microscope

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011116389A2 (en) 2010-03-19 2011-09-22 Bruker Nano, Inc. Low drift scanning probe microscope
CN103728468A (en) * 2013-12-30 2014-04-16 浙江大学 Method for restraining influence of temperature drifts when scanning probe microscope scans large image

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011116389A2 (en) 2010-03-19 2011-09-22 Bruker Nano, Inc. Low drift scanning probe microscope
EP2548033A2 (en) * 2010-03-19 2013-01-23 Bruker Nano, Inc. Low drift scanning probe microscope
EP2548033A4 (en) * 2010-03-19 2014-12-31 Bruker Nano Inc Low drift scanning probe microscope
US9116168B2 (en) 2010-03-19 2015-08-25 Bruker Nano, Inc. Low drift scanning probe microscope
CN103728468A (en) * 2013-12-30 2014-04-16 浙江大学 Method for restraining influence of temperature drifts when scanning probe microscope scans large image
CN103728468B (en) * 2013-12-30 2015-10-21 浙江大学 A kind of method suppressing scanning probe microscopy to scan large Tu Shiwen drift impact

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