JP2008205408A - Light-emitting device - Google Patents
Light-emitting device Download PDFInfo
- Publication number
- JP2008205408A JP2008205408A JP2007043044A JP2007043044A JP2008205408A JP 2008205408 A JP2008205408 A JP 2008205408A JP 2007043044 A JP2007043044 A JP 2007043044A JP 2007043044 A JP2007043044 A JP 2007043044A JP 2008205408 A JP2008205408 A JP 2008205408A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light emitting
- lead frame
- emitting
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003780 insertion Methods 0.000 claims description 16
- 238000004513 sizing Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 16
- 229920005989 resin Polymers 0.000 description 11
- 239000011347 resin Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 7
- 238000005286 illumination Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000017525 heat dissipation Effects 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- TWXTWZIUMCFMSG-UHFFFAOYSA-N nitride(3-) Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [N-3] TWXTWZIUMCFMSG-UHFFFAOYSA-N 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 229910052747 lanthanoid Inorganic materials 0.000 description 4
- 150000002602 lanthanoids Chemical class 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N phosphorus Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='138' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#FF60B7' >P</text>
<path d='M 168.364,150 L 168.356,149.828 L 168.334,149.657 L 168.297,149.489 L 168.246,149.325 L 168.181,149.166 L 168.103,149.012 L 168.011,148.867 L 167.908,148.729 L 167.793,148.601 L 167.667,148.483 L 167.532,148.377 L 167.388,148.282 L 167.237,148.201 L 167.079,148.132 L 166.916,148.078 L 166.749,148.037 L 166.578,148.012 L 166.407,148 L 166.235,148.004 L 166.064,148.023 L 165.895,148.056 L 165.729,148.103 L 165.569,148.165 L 165.414,148.24 L 165.266,148.328 L 165.126,148.429 L 164.996,148.541 L 164.875,148.664 L 164.766,148.797 L 164.669,148.939 L 164.584,149.088 L 164.512,149.245 L 164.454,149.407 L 164.41,149.573 L 164.38,149.743 L 164.365,149.914 L 164.365,150.086 L 164.38,150.257 L 164.41,150.427 L 164.454,150.593 L 164.512,150.755 L 164.584,150.912 L 164.669,151.061 L 164.766,151.203 L 164.875,151.336 L 164.996,151.459 L 165.126,151.571 L 165.266,151.672 L 165.414,151.76 L 165.569,151.835 L 165.729,151.897 L 165.895,151.944 L 166.064,151.977 L 166.235,151.996 L 166.407,152 L 166.578,151.988 L 166.749,151.963 L 166.916,151.922 L 167.079,151.868 L 167.237,151.799 L 167.388,151.718 L 167.532,151.623 L 167.667,151.517 L 167.793,151.399 L 167.908,151.271 L 168.011,151.133 L 168.103,150.988 L 168.181,150.834 L 168.246,150.675 L 168.297,150.511 L 168.334,150.343 L 168.356,150.172 L 168.364,150 L 166.364,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 168.364,168.455 L 168.356,168.283 L 168.334,168.112 L 168.297,167.944 L 168.246,167.779 L 168.181,167.62 L 168.103,167.467 L 168.011,167.321 L 167.908,167.184 L 167.793,167.056 L 167.667,166.938 L 167.532,166.831 L 167.388,166.737 L 167.237,166.655 L 167.079,166.587 L 166.916,166.532 L 166.749,166.492 L 166.578,166.466 L 166.407,166.455 L 166.235,166.459 L 166.064,166.477 L 165.895,166.51 L 165.729,166.558 L 165.569,166.619 L 165.414,166.695 L 165.266,166.783 L 165.126,166.883 L 164.996,166.995 L 164.875,167.118 L 164.766,167.251 L 164.669,167.393 L 164.584,167.543 L 164.512,167.699 L 164.454,167.861 L 164.41,168.028 L 164.38,168.197 L 164.365,168.369 L 164.365,168.541 L 164.38,168.712 L 164.41,168.882 L 164.454,169.048 L 164.512,169.21 L 164.584,169.366 L 164.669,169.516 L 164.766,169.658 L 164.875,169.791 L 164.996,169.914 L 165.126,170.026 L 165.266,170.126 L 165.414,170.215 L 165.569,170.29 L 165.729,170.351 L 165.895,170.399 L 166.064,170.432 L 166.235,170.45 L 166.407,170.454 L 166.578,170.443 L 166.749,170.417 L 166.916,170.377 L 167.079,170.322 L 167.237,170.254 L 167.388,170.172 L 167.532,170.078 L 167.667,169.971 L 167.793,169.853 L 167.908,169.725 L 168.011,169.588 L 168.103,169.442 L 168.181,169.289 L 168.246,169.13 L 168.297,168.965 L 168.334,168.797 L 168.356,168.626 L 168.364,168.455 L 166.364,168.455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 168.364,131.545 L 168.356,131.374 L 168.334,131.203 L 168.297,131.035 L 168.246,130.87 L 168.181,130.711 L 168.103,130.558 L 168.011,130.412 L 167.908,130.275 L 167.793,130.147 L 167.667,130.029 L 167.532,129.922 L 167.388,129.828 L 167.237,129.746 L 167.079,129.678 L 166.916,129.623 L 166.749,129.583 L 166.578,129.557 L 166.407,129.546 L 166.235,129.55 L 166.064,129.568 L 165.895,129.601 L 165.729,129.649 L 165.569,129.71 L 165.414,129.785 L 165.266,129.874 L 165.126,129.974 L 164.996,130.086 L 164.875,130.209 L 164.766,130.342 L 164.669,130.484 L 164.584,130.634 L 164.512,130.79 L 164.454,130.952 L 164.41,131.118 L 164.38,131.288 L 164.365,131.459 L 164.365,131.631 L 164.38,131.803 L 164.41,131.972 L 164.454,132.139 L 164.512,132.301 L 164.584,132.457 L 164.669,132.607 L 164.766,132.749 L 164.875,132.882 L 164.996,133.005 L 165.126,133.117 L 165.266,133.217 L 165.414,133.305 L 165.569,133.381 L 165.729,133.442 L 165.895,133.49 L 166.064,133.523 L 166.235,133.541 L 166.407,133.545 L 166.578,133.534 L 166.749,133.508 L 166.916,133.468 L 167.079,133.413 L 167.237,133.345 L 167.388,133.263 L 167.532,133.169 L 167.667,133.062 L 167.793,132.944 L 167.908,132.816 L 168.011,132.679 L 168.103,132.533 L 168.181,132.38 L 168.246,132.221 L 168.297,132.056 L 168.334,131.888 L 168.356,131.717 L 168.364,131.545 L 166.364,131.545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 168.364,150 L 168.356,149.828 L 168.334,149.657 L 168.297,149.489 L 168.246,149.325 L 168.181,149.166 L 168.103,149.012 L 168.011,148.867 L 167.908,148.729 L 167.793,148.601 L 167.667,148.483 L 167.532,148.377 L 167.388,148.282 L 167.237,148.201 L 167.079,148.132 L 166.916,148.078 L 166.749,148.037 L 166.578,148.012 L 166.407,148 L 166.235,148.004 L 166.064,148.023 L 165.895,148.056 L 165.729,148.103 L 165.569,148.165 L 165.414,148.24 L 165.266,148.328 L 165.126,148.429 L 164.996,148.541 L 164.875,148.664 L 164.766,148.797 L 164.669,148.939 L 164.584,149.088 L 164.512,149.245 L 164.454,149.407 L 164.41,149.573 L 164.38,149.743 L 164.365,149.914 L 164.365,150.086 L 164.38,150.257 L 164.41,150.427 L 164.454,150.593 L 164.512,150.755 L 164.584,150.912 L 164.669,151.061 L 164.766,151.203 L 164.875,151.336 L 164.996,151.459 L 165.126,151.571 L 165.266,151.672 L 165.414,151.76 L 165.569,151.835 L 165.729,151.897 L 165.895,151.944 L 166.064,151.977 L 166.235,151.996 L 166.407,152 L 166.578,151.988 L 166.749,151.963 L 166.916,151.922 L 167.079,151.868 L 167.237,151.799 L 167.388,151.718 L 167.532,151.623 L 167.667,151.517 L 167.793,151.399 L 167.908,151.271 L 168.011,151.133 L 168.103,150.988 L 168.181,150.834 L 168.246,150.675 L 168.297,150.511 L 168.334,150.343 L 168.356,150.172 L 168.364,150 L 166.364,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='35.0455' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#FF60B7' >P</text>
<path d='M 53.5909,42 L 53.5866,41.9004 L 53.5738,41.8015 L 53.5525,41.704 L 53.5229,41.6088 L 53.4852,41.5164 L 53.4398,41.4277 L 53.3868,41.3431 L 53.3268,41.2635 L 53.2602,41.1893 L 53.1874,41.1211 L 53.1091,41.0594 L 53.0257,41.0046 L 52.9379,40.9572 L 52.8464,40.9176 L 52.7518,40.886 L 52.6549,40.8626 L 52.5563,40.8476 L 52.4568,40.8412 L 52.357,40.8433 L 52.2579,40.854 L 52.16,40.8732 L 52.0642,40.9008 L 51.971,40.9364 L 51.8813,40.98 L 51.7957,41.0311 L 51.7147,41.0894 L 51.6391,41.1544 L 51.5693,41.2257 L 51.506,41.3027 L 51.4494,41.3848 L 51.4002,41.4716 L 51.3586,41.5622 L 51.3249,41.6561 L 51.2995,41.7525 L 51.2824,41.8508 L 51.2738,41.9501 L 51.2738,42.0499 L 51.2824,42.1492 L 51.2995,42.2475 L 51.3249,42.3439 L 51.3586,42.4378 L 51.4002,42.5284 L 51.4494,42.6152 L 51.506,42.6973 L 51.5693,42.7743 L 51.6391,42.8456 L 51.7147,42.9106 L 51.7957,42.9689 L 51.8813,43.02 L 51.971,43.0636 L 52.0642,43.0992 L 52.16,43.1268 L 52.2579,43.146 L 52.357,43.1567 L 52.4568,43.1588 L 52.5563,43.1524 L 52.6549,43.1374 L 52.7518,43.114 L 52.8464,43.0824 L 52.9379,43.0428 L 53.0257,42.9954 L 53.1091,42.9406 L 53.1874,42.8789 L 53.2602,42.8107 L 53.3268,42.7365 L 53.3868,42.6569 L 53.4398,42.5723 L 53.4852,42.4836 L 53.5229,42.3912 L 53.5525,42.296 L 53.5738,42.1985 L 53.5866,42.0996 L 53.5909,42 L 52.4318,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 53.5909,46.6364 L 53.5866,46.5367 L 53.5738,46.4378 L 53.5525,46.3404 L 53.5229,46.2451 L 53.4852,46.1528 L 53.4398,46.064 L 53.3868,45.9795 L 53.3268,45.8998 L 53.2602,45.8256 L 53.1874,45.7574 L 53.1091,45.6957 L 53.0257,45.641 L 52.9379,45.5936 L 52.8464,45.554 L 52.7518,45.5223 L 52.6549,45.4989 L 52.5563,45.484 L 52.4568,45.4775 L 52.357,45.4797 L 52.2579,45.4904 L 52.16,45.5096 L 52.0642,45.5371 L 51.971,45.5728 L 51.8813,45.6163 L 51.7957,45.6675 L 51.7147,45.7257 L 51.6391,45.7907 L 51.5693,45.862 L 51.506,45.939 L 51.4494,46.0212 L 51.4002,46.1079 L 51.3586,46.1986 L 51.3249,46.2924 L 51.2995,46.3889 L 51.2824,46.4871 L 51.2738,46.5865 L 51.2738,46.6862 L 51.2824,46.7856 L 51.2995,46.8839 L 51.3249,46.9803 L 51.3586,47.0742 L 51.4002,47.1648 L 51.4494,47.2515 L 51.506,47.3337 L 51.5693,47.4107 L 51.6391,47.482 L 51.7147,47.547 L 51.7957,47.6053 L 51.8813,47.6564 L 51.971,47.6999 L 52.0642,47.7356 L 52.16,47.7631 L 52.2579,47.7823 L 52.357,47.793 L 52.4568,47.7952 L 52.5563,47.7888 L 52.6549,47.7738 L 52.7518,47.7504 L 52.8464,47.7188 L 52.9379,47.6791 L 53.0257,47.6317 L 53.1091,47.577 L 53.1874,47.5153 L 53.2602,47.4471 L 53.3268,47.3729 L 53.3868,47.2932 L 53.4398,47.2087 L 53.4852,47.1199 L 53.5229,47.0276 L 53.5525,46.9323 L 53.5738,46.8349 L 53.5866,46.736 L 53.5909,46.6364 L 52.4318,46.6364 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 53.5909,37.3636 L 53.5866,37.264 L 53.5738,37.1651 L 53.5525,37.0677 L 53.5229,36.9724 L 53.4852,36.8801 L 53.4398,36.7913 L 53.3868,36.7068 L 53.3268,36.6271 L 53.2602,36.5529 L 53.1874,36.4847 L 53.1091,36.423 L 53.0257,36.3683 L 52.9379,36.3209 L 52.8464,36.2812 L 52.7518,36.2496 L 52.6549,36.2262 L 52.5563,36.2112 L 52.4568,36.2048 L 52.357,36.207 L 52.2579,36.2177 L 52.16,36.2369 L 52.0642,36.2644 L 51.971,36.3001 L 51.8813,36.3436 L 51.7957,36.3947 L 51.7147,36.453 L 51.6391,36.518 L 51.5693,36.5893 L 51.506,36.6663 L 51.4494,36.7485 L 51.4002,36.8352 L 51.3586,36.9258 L 51.3249,37.0197 L 51.2995,37.1161 L 51.2824,37.2144 L 51.2738,37.3138 L 51.2738,37.4135 L 51.2824,37.5129 L 51.2995,37.6111 L 51.3249,37.7076 L 51.3586,37.8014 L 51.4002,37.8921 L 51.4494,37.9788 L 51.506,38.061 L 51.5693,38.138 L 51.6391,38.2093 L 51.7147,38.2743 L 51.7957,38.3325 L 51.8813,38.3837 L 51.971,38.4272 L 52.0642,38.4629 L 52.16,38.4904 L 52.2579,38.5096 L 52.357,38.5203 L 52.4568,38.5225 L 52.5563,38.516 L 52.6549,38.5011 L 52.7518,38.4777 L 52.8464,38.446 L 52.9379,38.4064 L 53.0257,38.359 L 53.1091,38.3043 L 53.1874,38.2426 L 53.2602,38.1744 L 53.3268,38.1002 L 53.3868,38.0205 L 53.4398,37.936 L 53.4852,37.8472 L 53.5229,37.7549 L 53.5525,37.6596 L 53.5738,37.5622 L 53.5866,37.4633 L 53.5909,37.3636 L 52.4318,37.3636 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 53.5909,42 L 53.5866,41.9004 L 53.5738,41.8015 L 53.5525,41.704 L 53.5229,41.6088 L 53.4852,41.5164 L 53.4398,41.4277 L 53.3868,41.3431 L 53.3268,41.2635 L 53.2602,41.1893 L 53.1874,41.1211 L 53.1091,41.0594 L 53.0257,41.0046 L 52.9379,40.9572 L 52.8464,40.9176 L 52.7518,40.886 L 52.6549,40.8626 L 52.5563,40.8476 L 52.4568,40.8412 L 52.357,40.8433 L 52.2579,40.854 L 52.16,40.8732 L 52.0642,40.9008 L 51.971,40.9364 L 51.8813,40.98 L 51.7957,41.0311 L 51.7147,41.0894 L 51.6391,41.1544 L 51.5693,41.2257 L 51.506,41.3027 L 51.4494,41.3848 L 51.4002,41.4716 L 51.3586,41.5622 L 51.3249,41.6561 L 51.2995,41.7525 L 51.2824,41.8508 L 51.2738,41.9501 L 51.2738,42.0499 L 51.2824,42.1492 L 51.2995,42.2475 L 51.3249,42.3439 L 51.3586,42.4378 L 51.4002,42.5284 L 51.4494,42.6152 L 51.506,42.6973 L 51.5693,42.7743 L 51.6391,42.8456 L 51.7147,42.9106 L 51.7957,42.9689 L 51.8813,43.02 L 51.971,43.0636 L 52.0642,43.0992 L 52.16,43.1268 L 52.2579,43.146 L 52.357,43.1567 L 52.4568,43.1588 L 52.5563,43.1524 L 52.6549,43.1374 L 52.7518,43.114 L 52.8464,43.0824 L 52.9379,43.0428 L 53.0257,42.9954 L 53.1091,42.9406 L 53.1874,42.8789 L 53.2602,42.8107 L 53.3268,42.7365 L 53.3868,42.6569 L 53.4398,42.5723 L 53.4852,42.4836 L 53.5229,42.3912 L 53.5525,42.296 L 53.5738,42.1985 L 53.5866,42.0996 L 53.5909,42 L 52.4318,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nODVweCcgaGVpZ2h0PSc4NXB4JyB2aWV3Qm94PScwIDAgODUgODUnPgo8IS0tIEVORCBPRiBIRUFERVIgLS0+CjxyZWN0IHN0eWxlPSdvcGFjaXR5OjEuMDtmaWxsOiNGRkZGRkY7c3Ryb2tlOm5vbmUnIHdpZHRoPSc4NScgaGVpZ2h0PSc4NScgeD0nMCcgeT0nMCc+IDwvcmVjdD4KPHRleHQgeD0nMzUuMDQ1NScgeT0nNTMuNTkwOScgY2xhc3M9J2F0b20tMCcgc3R5bGU9J2ZvbnQtc2l6ZToyM3B4O2ZvbnQtc3R5bGU6bm9ybWFsO2ZvbnQtd2VpZ2h0Om5vcm1hbDtmaWxsLW9wYWNpdHk6MTtzdHJva2U6bm9uZTtmb250LWZhbWlseTpzYW5zLXNlcmlmO3RleHQtYW5jaG9yOnN0YXJ0O2ZpbGw6IzNCNDE0MycgPkM8L3RleHQ+Cjx0ZXh0IHg9JzUxLjA0MDknIHk9JzUzLjU5MDknIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6MjNweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiMzQjQxNDMnID51PC90ZXh0Pgo8L3N2Zz4K [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 230000001681 protective Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='138' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >A</text>
<text x='165.6' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >l</text>
<path d='M 178.898,150 L 178.891,149.828 L 178.869,149.657 L 178.832,149.489 L 178.781,149.325 L 178.716,149.166 L 178.637,149.012 L 178.546,148.867 L 178.443,148.729 L 178.328,148.601 L 178.202,148.483 L 178.067,148.377 L 177.923,148.282 L 177.771,148.201 L 177.614,148.132 L 177.45,148.078 L 177.283,148.037 L 177.113,148.012 L 176.941,148 L 176.769,148.004 L 176.598,148.023 L 176.429,148.056 L 176.264,148.103 L 176.103,148.165 L 175.948,148.24 L 175.801,148.328 L 175.661,148.429 L 175.53,148.541 L 175.41,148.664 L 175.301,148.797 L 175.203,148.939 L 175.118,149.088 L 175.046,149.245 L 174.988,149.407 L 174.944,149.573 L 174.915,149.743 L 174.9,149.914 L 174.9,150.086 L 174.915,150.257 L 174.944,150.427 L 174.988,150.593 L 175.046,150.755 L 175.118,150.912 L 175.203,151.061 L 175.301,151.203 L 175.41,151.336 L 175.53,151.459 L 175.661,151.571 L 175.801,151.672 L 175.948,151.76 L 176.103,151.835 L 176.264,151.897 L 176.429,151.944 L 176.598,151.977 L 176.769,151.996 L 176.941,152 L 177.113,151.988 L 177.283,151.963 L 177.45,151.922 L 177.614,151.868 L 177.771,151.799 L 177.923,151.718 L 178.067,151.623 L 178.202,151.517 L 178.328,151.399 L 178.443,151.271 L 178.546,151.133 L 178.637,150.988 L 178.716,150.834 L 178.781,150.675 L 178.832,150.511 L 178.869,150.343 L 178.891,150.172 L 178.898,150 L 176.898,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,168.455 L 178.891,168.283 L 178.869,168.112 L 178.832,167.944 L 178.781,167.779 L 178.716,167.62 L 178.637,167.467 L 178.546,167.321 L 178.443,167.184 L 178.328,167.056 L 178.202,166.938 L 178.067,166.831 L 177.923,166.737 L 177.771,166.655 L 177.614,166.587 L 177.45,166.532 L 177.283,166.492 L 177.113,166.466 L 176.941,166.455 L 176.769,166.459 L 176.598,166.477 L 176.429,166.51 L 176.264,166.558 L 176.103,166.619 L 175.948,166.695 L 175.801,166.783 L 175.661,166.883 L 175.53,166.995 L 175.41,167.118 L 175.301,167.251 L 175.203,167.393 L 175.118,167.543 L 175.046,167.699 L 174.988,167.861 L 174.944,168.028 L 174.915,168.197 L 174.9,168.369 L 174.9,168.541 L 174.915,168.712 L 174.944,168.882 L 174.988,169.048 L 175.046,169.21 L 175.118,169.366 L 175.203,169.516 L 175.301,169.658 L 175.41,169.791 L 175.53,169.914 L 175.661,170.026 L 175.801,170.126 L 175.948,170.215 L 176.103,170.29 L 176.264,170.351 L 176.429,170.399 L 176.598,170.432 L 176.769,170.45 L 176.941,170.454 L 177.113,170.443 L 177.283,170.417 L 177.45,170.377 L 177.614,170.322 L 177.771,170.254 L 177.923,170.172 L 178.067,170.078 L 178.202,169.971 L 178.328,169.853 L 178.443,169.725 L 178.546,169.588 L 178.637,169.442 L 178.716,169.289 L 178.781,169.13 L 178.832,168.965 L 178.869,168.797 L 178.891,168.626 L 178.898,168.455 L 176.898,168.455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,131.545 L 178.891,131.374 L 178.869,131.203 L 178.832,131.035 L 178.781,130.87 L 178.716,130.711 L 178.637,130.558 L 178.546,130.412 L 178.443,130.275 L 178.328,130.147 L 178.202,130.029 L 178.067,129.922 L 177.923,129.828 L 177.771,129.746 L 177.614,129.678 L 177.45,129.623 L 177.283,129.583 L 177.113,129.557 L 176.941,129.546 L 176.769,129.55 L 176.598,129.568 L 176.429,129.601 L 176.264,129.649 L 176.103,129.71 L 175.948,129.785 L 175.801,129.874 L 175.661,129.974 L 175.53,130.086 L 175.41,130.209 L 175.301,130.342 L 175.203,130.484 L 175.118,130.634 L 175.046,130.79 L 174.988,130.952 L 174.944,131.118 L 174.915,131.288 L 174.9,131.459 L 174.9,131.631 L 174.915,131.803 L 174.944,131.972 L 174.988,132.139 L 175.046,132.301 L 175.118,132.457 L 175.203,132.607 L 175.301,132.749 L 175.41,132.882 L 175.53,133.005 L 175.661,133.117 L 175.801,133.217 L 175.948,133.305 L 176.103,133.381 L 176.264,133.442 L 176.429,133.49 L 176.598,133.523 L 176.769,133.541 L 176.941,133.545 L 177.113,133.534 L 177.283,133.508 L 177.45,133.468 L 177.614,133.413 L 177.771,133.345 L 177.923,133.263 L 178.067,133.169 L 178.202,133.062 L 178.328,132.944 L 178.443,132.816 L 178.546,132.679 L 178.637,132.533 L 178.716,132.38 L 178.781,132.221 L 178.832,132.056 L 178.869,131.888 L 178.891,131.717 L 178.898,131.545 L 176.898,131.545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,150 L 178.891,149.828 L 178.869,149.657 L 178.832,149.489 L 178.781,149.325 L 178.716,149.166 L 178.637,149.012 L 178.546,148.867 L 178.443,148.729 L 178.328,148.601 L 178.202,148.483 L 178.067,148.377 L 177.923,148.282 L 177.771,148.201 L 177.614,148.132 L 177.45,148.078 L 177.283,148.037 L 177.113,148.012 L 176.941,148 L 176.769,148.004 L 176.598,148.023 L 176.429,148.056 L 176.264,148.103 L 176.103,148.165 L 175.948,148.24 L 175.801,148.328 L 175.661,148.429 L 175.53,148.541 L 175.41,148.664 L 175.301,148.797 L 175.203,148.939 L 175.118,149.088 L 175.046,149.245 L 174.988,149.407 L 174.944,149.573 L 174.915,149.743 L 174.9,149.914 L 174.9,150.086 L 174.915,150.257 L 174.944,150.427 L 174.988,150.593 L 175.046,150.755 L 175.118,150.912 L 175.203,151.061 L 175.301,151.203 L 175.41,151.336 L 175.53,151.459 L 175.661,151.571 L 175.801,151.672 L 175.948,151.76 L 176.103,151.835 L 176.264,151.897 L 176.429,151.944 L 176.598,151.977 L 176.769,151.996 L 176.941,152 L 177.113,151.988 L 177.283,151.963 L 177.45,151.922 L 177.614,151.868 L 177.771,151.799 L 177.923,151.718 L 178.067,151.623 L 178.202,151.517 L 178.328,151.399 L 178.443,151.271 L 178.546,151.133 L 178.637,150.988 L 178.716,150.834 L 178.781,150.675 L 178.832,150.511 L 178.869,150.343 L 178.891,150.172 L 178.898,150 L 176.898,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='35.0455' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >A</text>
<text x='51.0409' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >l</text>
<path d='M 60.3067,42 L 60.3024,41.9004 L 60.2896,41.8015 L 60.2683,41.704 L 60.2387,41.6088 L 60.201,41.5164 L 60.1555,41.4277 L 60.1026,41.3431 L 60.0426,41.2635 L 59.976,41.1893 L 59.9032,41.1211 L 59.8248,41.0594 L 59.7415,41.0046 L 59.6537,40.9572 L 59.5622,40.9176 L 59.4676,40.886 L 59.3707,40.8626 L 59.2721,40.8476 L 59.1725,40.8412 L 59.0728,40.8433 L 58.9737,40.854 L 58.8758,40.8732 L 58.7799,40.9008 L 58.6868,40.9364 L 58.5971,40.98 L 58.5114,41.0311 L 58.4305,41.0894 L 58.3549,41.1544 L 58.2851,41.2257 L 58.2217,41.3027 L 58.1652,41.3848 L 58.116,41.4716 L 58.0744,41.5622 L 58.0407,41.6561 L 58.0152,41.7525 L 57.9982,41.8508 L 57.9896,41.9501 L 57.9896,42.0499 L 57.9982,42.1492 L 58.0152,42.2475 L 58.0407,42.3439 L 58.0744,42.4378 L 58.116,42.5284 L 58.1652,42.6152 L 58.2217,42.6973 L 58.2851,42.7743 L 58.3549,42.8456 L 58.4305,42.9106 L 58.5114,42.9689 L 58.5971,43.02 L 58.6868,43.0636 L 58.7799,43.0992 L 58.8758,43.1268 L 58.9737,43.146 L 59.0728,43.1567 L 59.1725,43.1588 L 59.2721,43.1524 L 59.3707,43.1374 L 59.4676,43.114 L 59.5622,43.0824 L 59.6537,43.0428 L 59.7415,42.9954 L 59.8248,42.9406 L 59.9032,42.8789 L 59.976,42.8107 L 60.0426,42.7365 L 60.1026,42.6569 L 60.1555,42.5723 L 60.201,42.4836 L 60.2387,42.3912 L 60.2683,42.296 L 60.2896,42.1985 L 60.3024,42.0996 L 60.3067,42 L 59.1476,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,46.6364 L 60.3024,46.5367 L 60.2896,46.4378 L 60.2683,46.3404 L 60.2387,46.2451 L 60.201,46.1528 L 60.1555,46.064 L 60.1026,45.9795 L 60.0426,45.8998 L 59.976,45.8256 L 59.9032,45.7574 L 59.8248,45.6957 L 59.7415,45.641 L 59.6537,45.5936 L 59.5622,45.554 L 59.4676,45.5223 L 59.3707,45.4989 L 59.2721,45.484 L 59.1725,45.4775 L 59.0728,45.4797 L 58.9737,45.4904 L 58.8758,45.5096 L 58.7799,45.5371 L 58.6868,45.5728 L 58.5971,45.6163 L 58.5114,45.6675 L 58.4305,45.7257 L 58.3549,45.7907 L 58.2851,45.862 L 58.2217,45.939 L 58.1652,46.0212 L 58.116,46.1079 L 58.0744,46.1986 L 58.0407,46.2924 L 58.0152,46.3889 L 57.9982,46.4871 L 57.9896,46.5865 L 57.9896,46.6862 L 57.9982,46.7856 L 58.0152,46.8839 L 58.0407,46.9803 L 58.0744,47.0742 L 58.116,47.1648 L 58.1652,47.2515 L 58.2217,47.3337 L 58.2851,47.4107 L 58.3549,47.482 L 58.4305,47.547 L 58.5114,47.6053 L 58.5971,47.6564 L 58.6868,47.6999 L 58.7799,47.7356 L 58.8758,47.7631 L 58.9737,47.7823 L 59.0728,47.793 L 59.1725,47.7952 L 59.2721,47.7888 L 59.3707,47.7738 L 59.4676,47.7504 L 59.5622,47.7188 L 59.6537,47.6791 L 59.7415,47.6317 L 59.8248,47.577 L 59.9032,47.5153 L 59.976,47.4471 L 60.0426,47.3729 L 60.1026,47.2932 L 60.1555,47.2087 L 60.201,47.1199 L 60.2387,47.0276 L 60.2683,46.9323 L 60.2896,46.8349 L 60.3024,46.736 L 60.3067,46.6364 L 59.1476,46.6364 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,37.3636 L 60.3024,37.264 L 60.2896,37.1651 L 60.2683,37.0677 L 60.2387,36.9724 L 60.201,36.8801 L 60.1555,36.7913 L 60.1026,36.7068 L 60.0426,36.6271 L 59.976,36.5529 L 59.9032,36.4847 L 59.8248,36.423 L 59.7415,36.3683 L 59.6537,36.3209 L 59.5622,36.2812 L 59.4676,36.2496 L 59.3707,36.2262 L 59.2721,36.2112 L 59.1725,36.2048 L 59.0728,36.207 L 58.9737,36.2177 L 58.8758,36.2369 L 58.7799,36.2644 L 58.6868,36.3001 L 58.5971,36.3436 L 58.5114,36.3947 L 58.4305,36.453 L 58.3549,36.518 L 58.2851,36.5893 L 58.2217,36.6663 L 58.1652,36.7485 L 58.116,36.8352 L 58.0744,36.9258 L 58.0407,37.0197 L 58.0152,37.1161 L 57.9982,37.2144 L 57.9896,37.3138 L 57.9896,37.4135 L 57.9982,37.5129 L 58.0152,37.6111 L 58.0407,37.7076 L 58.0744,37.8014 L 58.116,37.8921 L 58.1652,37.9788 L 58.2217,38.061 L 58.2851,38.138 L 58.3549,38.2093 L 58.4305,38.2743 L 58.5114,38.3325 L 58.5971,38.3837 L 58.6868,38.4272 L 58.7799,38.4629 L 58.8758,38.4904 L 58.9737,38.5096 L 59.0728,38.5203 L 59.1725,38.5225 L 59.2721,38.516 L 59.3707,38.5011 L 59.4676,38.4777 L 59.5622,38.446 L 59.6537,38.4064 L 59.7415,38.359 L 59.8248,38.3043 L 59.9032,38.2426 L 59.976,38.1744 L 60.0426,38.1002 L 60.1026,38.0205 L 60.1555,37.936 L 60.201,37.8472 L 60.2387,37.7549 L 60.2683,37.6596 L 60.2896,37.5622 L 60.3024,37.4633 L 60.3067,37.3636 L 59.1476,37.3636 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,42 L 60.3024,41.9004 L 60.2896,41.8015 L 60.2683,41.704 L 60.2387,41.6088 L 60.201,41.5164 L 60.1555,41.4277 L 60.1026,41.3431 L 60.0426,41.2635 L 59.976,41.1893 L 59.9032,41.1211 L 59.8248,41.0594 L 59.7415,41.0046 L 59.6537,40.9572 L 59.5622,40.9176 L 59.4676,40.886 L 59.3707,40.8626 L 59.2721,40.8476 L 59.1725,40.8412 L 59.0728,40.8433 L 58.9737,40.854 L 58.8758,40.8732 L 58.7799,40.9008 L 58.6868,40.9364 L 58.5971,40.98 L 58.5114,41.0311 L 58.4305,41.0894 L 58.3549,41.1544 L 58.2851,41.2257 L 58.2217,41.3027 L 58.1652,41.3848 L 58.116,41.4716 L 58.0744,41.5622 L 58.0407,41.6561 L 58.0152,41.7525 L 57.9982,41.8508 L 57.9896,41.9501 L 57.9896,42.0499 L 57.9982,42.1492 L 58.0152,42.2475 L 58.0407,42.3439 L 58.0744,42.4378 L 58.116,42.5284 L 58.1652,42.6152 L 58.2217,42.6973 L 58.2851,42.7743 L 58.3549,42.8456 L 58.4305,42.9106 L 58.5114,42.9689 L 58.5971,43.02 L 58.6868,43.0636 L 58.7799,43.0992 L 58.8758,43.1268 L 58.9737,43.146 L 59.0728,43.1567 L 59.1725,43.1588 L 59.2721,43.1524 L 59.3707,43.1374 L 59.4676,43.114 L 59.5622,43.0824 L 59.6537,43.0428 L 59.7415,42.9954 L 59.8248,42.9406 L 59.9032,42.8789 L 59.976,42.8107 L 60.0426,42.7365 L 60.1026,42.6569 L 60.1555,42.5723 L 60.201,42.4836 L 60.2387,42.3912 L 60.2683,42.296 L 60.2896,42.1985 L 60.3024,42.0996 L 60.3067,42 L 59.1476,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000875 corresponding Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- -1 rare earth aluminates Chemical class 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910015363 Au—Sn Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N Silicon nitride Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<path class='bond-0' d='M 156.49,164.382 L 158.429,149.903' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0' d='M 158.429,149.903 L 160.368,135.425' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6' d='M 188.192,205.887 L 206.67,208.362' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6' d='M 206.67,208.362 L 225.149,210.837' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7' d='M 114.985,196.084 L 92.5031,193.073' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7' d='M 92.5031,193.073 L 70.0216,190.062' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1' d='M 110.02,84.2186 L 101.091,83.0229' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1' d='M 101.091,83.0229 L 92.1627,81.8272' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8' d='M 194.815,95.5742 L 217.196,98.5714' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8' d='M 217.196,98.5714 L 239.576,101.569' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9' d='M 194.815,95.5742 L 217.196,98.5714' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9' d='M 217.196,98.5714 L 239.576,101.569' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2' d='M 51.0034,121.719 L 49.0509,136.298' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2' d='M 49.0509,136.298 L 47.0985,150.878' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10' d='M 93.371,101.842 L 159.453,146.739' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10' d='M 159.453,146.739 L 225.535,191.635' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3' d='M 73.3526,175.718 L 155.31,147.598' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3' d='M 155.31,147.598 L 237.267,119.478' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11' d='M 73.3526,175.718 L 155.31,147.598' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11' d='M 155.31,147.598 L 237.267,119.478' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4' d='M 269.485,150.977 L 267.533,165.557' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4' d='M 267.533,165.557 L 265.581,180.136' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5' d='M 265.731,179.011 L 267.67,164.533' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5' d='M 267.67,164.533 L 269.609,150.054' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='139.588' y='220.986' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='134.624' y='111.744' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='162.224' y='111.744' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='44.9766' y='97.1151' class='atom-2' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='10.7532' y='206.356' class='atom-3' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='38.3532' y='206.356' class='atom-3' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='263.459' y='126.374' class='atom-4' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='248.829' y='235.615' class='atom-5' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='276.429' y='235.615' class='atom-5' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='263.459' y='126.374' class='atom-6' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<path d='M 268.111,113.722 L 268.111,99.0261 L 282.806,99.0261 L 282.806,113.722 L 268.111,113.722' style='fill:none;stroke:#FF0000;stroke-width:2px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<path class='bond-0' d='M 43.5455,51.4078 L 44.8128,41.9446' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0' d='M 44.8128,41.9446 L 46.0801,32.4814' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6' d='M 47.3496,56.3882 L 58.0244,57.8178' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6' d='M 58.0244,57.8178 L 68.6992,59.2474' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7' d='M 38.5651,55.2118 L 26.6777,53.6199' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-7' d='M 26.6777,53.6199 L 14.7903,52.028' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1' d='M 36.6504,24.3936 L 28.8684,23.3514' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1' d='M 28.8684,23.3514 L 21.0864,22.3093' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8' d='M 48.9451,26.0401 L 60.8019,27.6279' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8' d='M 60.8019,27.6279 L 72.6588,29.2158' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9' d='M 48.9451,26.0401 L 60.8019,27.6279' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9' d='M 60.8019,27.6279 L 72.6588,29.2158' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2' d='M 16.0419,28.5715 L 14.7705,38.0653' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2' d='M 14.7705,38.0653 L 13.4991,47.559' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10' d='M 22.2829,25.3761 L 45.0482,40.8431' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10' d='M 45.0482,40.8431 L 67.8134,56.31' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3' d='M 15.8371,50.7833 L 43.7935,41.1912' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3' d='M 43.7935,41.1912 L 71.7498,31.5992' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11' d='M 15.8371,50.7833 L 43.7935,41.1912' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11' d='M 43.7935,41.1912 L 71.7498,31.5992' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4' d='M 76.0887,36.6129 L 74.8173,46.1066' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4' d='M 74.8173,46.1066 L 73.5459,55.6004' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5' d='M 73.5689,55.4285 L 74.8362,45.9653' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5' d='M 74.8362,45.9653 L 76.1035,36.5021' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='39.3223' y='61.8583' class='atom-0' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='37.4077' y='31.8349' class='atom-1' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='45.7681' y='31.8349' class='atom-1' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='13.3196' y='27.8143' class='atom-2' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='3.36364' y='57.8377' class='atom-3' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='11.7241' y='57.8377' class='atom-3' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='73.3664' y='35.8556' class='atom-4' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='69.3457' y='65.879' class='atom-5' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='77.7062' y='65.879' class='atom-5' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='73.3664' y='35.8556' class='atom-6' style='font-size:12px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<path d='M 74.982,31.8167 L 74.982,27.7779 L 79.0208,27.7779 L 79.0208,31.8167 L 74.982,31.8167' style='fill:none;stroke:#FF0000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- SMYKVLBUSSNXMV-UHFFFAOYSA-J aluminum;tetrahydroxide Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [OH-].[OH-].[OH-].[OH-].[Al+3] SMYKVLBUSSNXMV-UHFFFAOYSA-J 0.000 description 1
- 229910052586 apatite Inorganic materials 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N borate Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N silicate Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48257—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
Abstract
Description
図1Aは、実施の形態1における発光装置100を示す正面図(透過図)であり、図1Bは図1Aの発光装置100の斜視図である。本実施の形態において、発光装置の基体101は樹脂からなり、側面と底面を有し上面を開口部とする凹部105を有している。凹部105の底面には、導電部材としてリードフレーム102、103が露出するように設けられている。このリードフレームは一部が基体101に内包されるとともに、基体の側面から突出するように延在している。これにより、基体101に配置された発光素子104a、104b、104cなどの導体配線として機能する。発光素子は、樹脂や金属ペーストなどのダイボンド部材(図示せず)によって、リードフレーム102、103上に固定される。そして、導電性ワイヤ(以下、単にワイヤを称する場合もある)により発光素子のp電極及びn電極と、リードフレーム102、103とを電気的に接続している。また、これらを被覆するように、凹部105の内部には、樹脂などの封止部材が充填されている。また、基体101には、貫通孔106が設けられており、この部分に導光体を嵌合させるなどの位置合わせをすることができる。 <Embodiment>
1A is a front view (transmission diagram) showing light-emitting device 100 according to Embodiment 1, and FIG. 1B is a perspective view of light-emitting device 100 of FIG. 1A. In this embodiment mode, the base 101 of the light emitting device is made of resin, and has a recess 105 having a side surface and a bottom surface and an upper surface as an opening. Lead frames 102 and 103 are provided on the bottom surface of the recess 105 as conductive members so as to be exposed. A part of the lead frame is included in the base 101 and extends so as to protrude from the side surface of the base. Thereby, it functions as a conductor wiring of the light emitting elements 104a, 104b, 104c and the like arranged on the base 101. The light emitting element is fixed on the lead frames 102 and 103 by a die bond member (not shown) such as resin or metal paste. The p- and n-electrodes of the light-emitting element and the lead frames 102 and 103 are electrically connected by a conductive wire (hereinafter sometimes referred to simply as a wire). Moreover, the inside of the recessed part 105 is filled with sealing members, such as resin, so that these may be coat | covered. Further, the base body 101 is provided with a through hole 106, and alignment such as fitting of a light guide to this portion can be performed.
共通リードフレームは、複数の発光素子と電気的に接続されるとともに外部接続端子として機能するものであり、後述する個別リードフレーム(挿入用接続端子部)とは異なる基体の側面のみから突出するように配置される。そして、図1Aに示す発光装置に示すように、基体101の右側側面のみから共通リードフレーム103の一部が突出しており、この突出する領域に表面実装用端子部103aを有するものである。ここで、表面実装用端子部とは、例えば回路基板等に発光装置を実装する際に、その回路基板の表面にはんだなどの接着部材を用いて実装することが可能な形態の部材である。形状としては、表面実装が可能な程度の面積があればよく、所望に応じて任意に設計することができる。例えば、図1A、図1Bに示すように平板状のものが基体101の右側側面から略垂直方向に突出するようにすることができる。このように、基体101の裏面とは異なる位置(同一面上にない位置)に表面実装用端子部103aを設けることで、リードフレームの加工が容易であり、正面側(発光面側)に導光体などを設ける際に、位置合わせしやすくすることができる。また、図5に示す発光装置500のように、基体501の側面から突出する共通リードフレーム503の表面実装用端子部503aを、基体501の裏面側に向けて屈曲させ、さらに基体501の裏面と同一面となるように再度屈曲させるような形状としてもよい。このようにすることで、実装時の位置精度を向上させることができる。また、個別リードフレーム502の挿入用端子部502a、502b、502cも、直線状だけに限らず、同一平面で複数の直線を組み合わせたような形状や、折り曲げるなどの変形形状としてもよい。 (Common lead frame)
The common lead frame is electrically connected to a plurality of light emitting elements and functions as an external connection terminal, and protrudes only from the side surface of the base, which is different from an individual lead frame (insertion connection terminal portion) described later. Placed in. As shown in the light emitting device shown in FIG. 1A, a part of the common lead frame 103 protrudes only from the right side surface of the base 101, and a surface mounting terminal portion 103a is provided in the protruding region. Here, the surface mounting terminal portion is a member that can be mounted on the surface of the circuit board using an adhesive member such as solder when the light emitting device is mounted on the circuit board, for example. As the shape, it is sufficient if it has an area that allows surface mounting, and it can be arbitrarily designed as desired. For example, as shown in FIG. 1A and FIG. 1B, a flat plate can protrude from the right side surface of the base 101 in a substantially vertical direction. Thus, by providing the surface mounting terminal portion 103a at a position different from the back surface of the substrate 101 (a position not on the same surface), the lead frame can be easily processed and guided to the front side (light emitting surface side). When providing a light body or the like, alignment can be facilitated. Further, like the light emitting device 500 shown in FIG. 5, the surface mounting terminal portion 503 a of the common lead frame 503 protruding from the side surface of the base 501 is bent toward the back side of the base 501, and further, It is good also as a shape bent again so that it may become the same surface. By doing in this way, the position accuracy at the time of mounting can be improved. Further, the insertion terminal portions 502a, 502b, and 502c of the individual lead frame 502 are not limited to a straight line shape, and may have a shape such as a combination of a plurality of straight lines on the same plane or a deformed shape such as a bend.
個別リードフレームは、複数の発光素子のうちの少なくとも一つと電気的に接続され、外部接続端子として機能するものであり、前述の共通リードフレーム(表面実装用端子部)とは異なる基体の側面から突出するように配置される。そして、図1Aに示す発光装置100に示すように、基体101の下側側面から個別リードフレーム102の一部が突出しており、この突出する領域に挿入用端子部102a〜102cを有するものである。ここで、挿入用端子部とは、例えば回路基板等に発光装置を実装する際に、この回路基板に貫通孔を設け、その貫通孔に挿入することで実装することが可能な形態の部材である。ここでは、青色発光素子104aが載置されているリードフレームの挿入用端子部が102aとなるように、一つの発光素子に対して一つの挿入用端子部を設けるようにしているが、これに限らず、複数の発光素子を載置させることもできる。 (Individual lead frame)
The individual lead frame is electrically connected to at least one of the plurality of light emitting elements and functions as an external connection terminal. From the side surface of the base different from the common lead frame (surface mounting terminal portion) described above It arrange | positions so that it may protrude. As shown in the light emitting device 100 shown in FIG. 1A, a part of the individual lead frame 102 protrudes from the lower side surface of the base 101, and insertion terminal portions 102a to 102c are provided in the protruding region. . Here, the insertion terminal portion is a member that can be mounted by, for example, providing a through hole in the circuit board when the light emitting device is mounted on the circuit board or the like, and inserting into the through hole. is there. Here, one insertion terminal portion is provided for one light emitting element so that the insertion terminal portion of the lead frame on which the blue light emitting element 104a is placed becomes 102a. Not limited to this, a plurality of light emitting elements can be mounted.
基体は発光素子や保護素子などの電子部品を保護するとともに、これら電子部品に外部からの電流を供給するためのリードフレームを内包しているものである。基体の形状は、平面視において四角形又はこれに近い形状を有するものが好ましいが、特にこれに限定されるものではなく、平面視において三角形、四角形、多角形又はこれらに近い形状とすることができる。例えば、図1に示すような、共通リードフレーム103の表面実装用端子部103aが突出している側面の一部を凹ませたような形状としてもよい。表面実装用端子部103aは、表面実装が可能な大きさを確保する必要があるが、そのため、このように基体の形状を変化させて、表面実装用端子部103aが、必要な実装面積を確保しつつ、かつ、基体からの実質的な突出領域を低減させることで、発光装置をより小型化することがえきる。これは、図3、図4に示すように、表面実装端子部303a、403aが異なる面からも突出している場合においても同様であり、突出している部分に対応する基体301、401は、側面を凹ませたような形状にしている。これにより、発光装置を小型化することができる。 (Substrate)
The base body protects electronic parts such as a light emitting element and a protective element, and includes a lead frame for supplying electric current from the outside to these electronic parts. The shape of the substrate is preferably a quadrangle or a shape close to this in plan view, but is not particularly limited to this, and can be a triangle, a quadrangle, a polygon, or a shape close to these in plan view. . For example, as shown in FIG. 1, a part of the side surface from which the surface mounting terminal portion 103a of the common lead frame 103 protrudes may be recessed. The surface mounting terminal portion 103a needs to secure a size that allows surface mounting. Therefore, the surface mounting terminal portion 103a secures a necessary mounting area by changing the shape of the base in this way. However, it is possible to further reduce the size of the light emitting device by reducing the substantial protruding region from the base. This is the same when the surface mount terminal portions 303a and 403a protrude from different surfaces as shown in FIGS. 3 and 4, and the bases 301 and 401 corresponding to the protruding portions have side surfaces. The shape is recessed. Thereby, a light emitting device can be reduced in size.
封止部材は、凹部を有する基体に載置された発光素子や保護素子などを、塵芥、水分や外力などから保護する部材であり、発光素子からの光を透過可能な透光性を有するものが好ましい。具体的な材料としては、シリコーン樹脂、エポキシ樹脂やユリア樹脂を挙げることができる。このような材料に加え、所望に応じて着色剤、光拡散剤、フィラー、色変換部材(蛍光部材)などを含有させることもできる。 (Sealing member)
The sealing member is a member that protects the light emitting element and the protective element mounted on the base body having the recesses from dust, moisture, external force, and the like, and has a light transmitting property capable of transmitting light from the light emitting element. Is preferred. Specific examples of the material include silicone resin, epoxy resin, and urea resin. In addition to such materials, a colorant, a light diffusing agent, a filler, a color conversion member (fluorescent member), and the like can be included as desired.
ダイボンド部材は、基体や導電部材に発光素子や保護素子などを載置させるための接合部材であり、載置する素子の基板によって導電性ダイボンド部材又は縁性ダイボンド部材のいずれかを選択することができる。例えば、絶縁性基板であるサファイア上に窒化物半導体層を積層させた発光素子の場合、ダイボンド部材は絶縁性でも導電性でも用いることができ、SiC基板などの導電性基板を用いる場合は、導電性ダイボンド部材を用いることで導通を図ることができる。絶縁性ダイボンド部材としては、エポキシ樹脂、シリコーン樹脂等を用いることができる。これらの樹脂を用いる場合は、発光素子からの光や熱による劣化を考慮して、発光素子裏面にAl膜などの反射率の高い金属層を設けることができる。この場合、蒸着やスパッタあるいは薄膜を接合させるなどの方法を用いることができる。また、導電性ダイボンド部材としては、銀、金、パラジウムなどの導電性ペーストや、Au−Sn共晶などの半田、低融点金属等のろう材を用いることができる。さらに、これらダイボンド部材のうち、特に透光性のダイボンド部材を用いる場合は、その中に発光素子からの光を吸収して異なる波長の光を発光する蛍光部材を含有させることもできる。 (Die bond member)
The die bond member is a bonding member for mounting a light emitting element, a protection element, or the like on a base body or a conductive member. Either a conductive die bond member or an edge die bond member can be selected depending on the substrate of the mounted element. it can. For example, in the case of a light-emitting element in which a nitride semiconductor layer is stacked on sapphire, which is an insulating substrate, the die bond member can be either insulating or conductive, and when a conductive substrate such as a SiC substrate is used, Conductivity can be achieved by using a conductive die bond member. As the insulating die bond member, an epoxy resin, a silicone resin, or the like can be used. In the case of using these resins, a metal layer having a high reflectance such as an Al film can be provided on the back surface of the light emitting element in consideration of deterioration due to light or heat from the light emitting element. In this case, a method such as vapor deposition, sputtering, or bonding a thin film can be used. In addition, as the conductive die bond member, a conductive paste such as silver, gold, or palladium, solder such as Au—Sn eutectic, or a brazing material such as a low melting point metal can be used. Further, among these die bond members, in particular, when a translucent die bond member is used, a fluorescent member that absorbs light from the light emitting element and emits light of a different wavelength can be contained therein.
発光素子の電極と、基体に設けられる導電部材とを接続する導電性ワイヤは、導電部材とのオーミック性、機械的接続性、電気伝導性及び熱伝導性が良いものが求められる。熱伝導度としては0.01cal/(s)(cm2)(℃/cm)以上が好ましく、より好ましくは0.5cal/(s)(cm2)(℃/cm)以上である。また、作業性などを考慮して導電性ワイヤの直径は、好ましくは、Φ10μm以上、Φ45μm以下である。このような導電性ワイヤとして具体的には、金、銅、白金、アルミニウム等の金属及びそれらの合金を用いた導電性ワイヤが挙げられる。 (Conductive wire)
The conductive wire that connects the electrode of the light emitting element and the conductive member provided on the substrate is required to have good ohmic properties, mechanical connectivity, electrical conductivity, and thermal conductivity with the conductive member. Preferably 0.01cal / (s) (cm 2 ) (℃ / cm) or higher as heat conductivity, and more preferably 0.5cal / (s) (cm 2 ) (℃ / cm) or more. In consideration of workability and the like, the diameter of the conductive wire is preferably Φ10 μm or more and Φ45 μm or less. Specific examples of such conductive wires include conductive wires using metals such as gold, copper, platinum, and aluminum, and alloys thereof.
上記封止部材中に、波長変換部材として発光素子からの光の少なくとも一部を吸収して異なる波長を有する光を発する蛍光部材を含有させることもできる。 (Wavelength conversion member)
In the sealing member, a fluorescent member that emits light having a different wavelength by absorbing at least a part of light from the light emitting element may be contained as a wavelength conversion member.
発光素子は、任意の波長のものを選択することができる。例えば、青色、緑色の発光素子としては、ZnSeや窒化物系半導体(InXAlYGa1−X−YN、0≦X、0≦Y、X+Y≦1)を用いたものを用いることができる。また、赤色の発光素子としては、GaAs、InPなどを用いることができる。さらに、これ以外の材料からなる発光素子を用いることもできる。用いる発光素子の組成や発光色、大きさや、個数などは目的に応じて適宜選択することができる。 (Light emitting element)
A light emitting element having an arbitrary wavelength can be selected. For example, as blue and green light emitting elements, those using ZnSe or a nitride semiconductor (In X Al Y Ga 1- XYN, 0 ≦ X, 0 ≦ Y, X + Y ≦ 1) are used. it can. As the red light emitting element, GaAs, InP, or the like can be used. Furthermore, a light-emitting element made of a material other than this can also be used. The composition, emission color, size, number, and the like of the light emitting element to be used can be appropriately selected according to the purpose.
101、201、301、401、501・・・基体
102、502・・・個別リードフレーム
102a〜c、502a〜c・・・挿入用端子部
103、203、303、403、503・・・共通リードフレーム
103a、303a、403a、503a・・・表面実装用端子部
203b・・・放熱部
403c・・・貫通孔
104a〜c・・・発光素子
105・・・凹部
106、206・・・貫通孔
600・・・発光ユニット
21、発光ユニット基板
21a・・・開口窓
22、リードフレーム
22a、22aa・・・給電するために露出した部分(リード端子部)
22b・・・開口窓内に露出した部分(発光素子搭載・接続部)
22c・・・基板樹脂内に隠れた部分(内部リード部) 100, 200, 300, 400, 500 ... Light-emitting devices 101, 201, 301, 401, 501 ... Base bodies 102, 502 ... Individual lead frames 102a-c, 502a-c ... Terminal portions for insertion 103, 203, 303, 403, 503... Common lead frame 103 a, 303 a, 403 a, 503 a... Surface mount terminal portion 203 b. 105... Recesses 106, 206... Through hole 600... Light emitting unit 21, Light emitting unit substrate 21 a... Open window 22, lead frames 22 a, 22 aa. Part)
22b... Portion exposed in the opening window (light emitting element mounting / connecting portion)
22c: The part hidden in the substrate resin (internal lead part)
Claims (4)
- 凹部を有する基体と、前記凹部の底面に露出されるとともに基体の側面から突出するリードフレームと、前記凹部に載置される複数の発光素子と、を有する発光装置であって、
前記リードフレームは、複数の発光素子と電気的に接続される共通リードフレームと、複数の発光素子のうちの少なくとも一つと電気的に接続され、共通リードと異なる極性の複数の個別リードフレームと、を有し、
前記個別リードフレームは、基体の側面から突出する領域に挿入用端子部を有し、
前記共通リードフレームは、前記個別リードフレームと異なる側面のみから突出するとともに、突出する領域に表面実装用端子部を有することを特徴とする発光装置。 A light-emitting device comprising: a base having a recess; a lead frame that is exposed on a bottom surface of the recess and protrudes from a side surface of the base; and a plurality of light-emitting elements placed on the recess,
The lead frame is electrically connected to at least one of the plurality of light emitting elements electrically connected to the plurality of light emitting elements, and a plurality of individual lead frames having a polarity different from the common lead, Have
The individual lead frame has an insertion terminal portion in a region protruding from the side surface of the base,
The common lead frame protrudes only from a side surface different from the individual lead frame, and has a surface mounting terminal portion in the protruding region. - 前記共通リードフレームは、基体の裏面から露出した放熱部を有する請求項1記載の発光装置。 The light emitting device according to claim 1, wherein the common lead frame has a heat radiating portion exposed from a back surface of the base.
- 前記表面実装用端子部は、前記基体の異なる側面から突出している請求項1または請求項2記載の発光装置。 The light emitting device according to claim 1, wherein the surface mounting terminal portion protrudes from a different side surface of the base.
- 前記表面実装用端子部は、貫通孔を有している請求項1乃至請求項3記載の発光装置。 The light emitting device according to claim 1, wherein the surface mounting terminal portion has a through hole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007043044A JP4924090B2 (en) | 2007-02-23 | 2007-02-23 | Light emitting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007043044A JP4924090B2 (en) | 2007-02-23 | 2007-02-23 | Light emitting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008205408A true JP2008205408A (en) | 2008-09-04 |
JP4924090B2 JP4924090B2 (en) | 2012-04-25 |
Family
ID=39782542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007043044A Active JP4924090B2 (en) | 2007-02-23 | 2007-02-23 | Light emitting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4924090B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017034221A (en) * | 2015-07-31 | 2017-02-09 | 宏齊科技股▲ふん▼有限公司 | Portable light-emitting device without need to use auxiliary power source, and light-emitting diode encapsulation structure therefor |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002111067A (en) * | 2000-09-26 | 2002-04-12 | Toshiba Corp | Led lamp and led lamp assembly |
JP2003332628A (en) * | 2002-05-13 | 2003-11-21 | Nippon Sheet Glass Co Ltd | Light-emitting unit, and lighting device and image reader using the same |
JP2004228387A (en) * | 2003-01-23 | 2004-08-12 | Koha Co Ltd | Light emitting device |
JP2005005740A (en) * | 1999-03-15 | 2005-01-06 | Gentex Corp | Semiconductor radiation emitter package |
JP2005217644A (en) * | 2004-01-28 | 2005-08-11 | Nippon Sheet Glass Co Ltd | Light emitting unit, line lighting device and image reader |
JP2006222454A (en) * | 2006-05-01 | 2006-08-24 | Toshiba Corp | Semiconductor light emitting device and surface-mounted package |
JP2007043165A (en) * | 2005-08-02 | 2007-02-15 | Samsung Electro-Mechanics Co Ltd | Light emitting diode with improved soldering structure, method for assembling light emitting diode to substrate by soldering, and light emitting diode assembly manufactured by the assembling method |
-
2007
- 2007-02-23 JP JP2007043044A patent/JP4924090B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005005740A (en) * | 1999-03-15 | 2005-01-06 | Gentex Corp | Semiconductor radiation emitter package |
JP2002111067A (en) * | 2000-09-26 | 2002-04-12 | Toshiba Corp | Led lamp and led lamp assembly |
JP2003332628A (en) * | 2002-05-13 | 2003-11-21 | Nippon Sheet Glass Co Ltd | Light-emitting unit, and lighting device and image reader using the same |
JP2004228387A (en) * | 2003-01-23 | 2004-08-12 | Koha Co Ltd | Light emitting device |
JP2005217644A (en) * | 2004-01-28 | 2005-08-11 | Nippon Sheet Glass Co Ltd | Light emitting unit, line lighting device and image reader |
JP2007043165A (en) * | 2005-08-02 | 2007-02-15 | Samsung Electro-Mechanics Co Ltd | Light emitting diode with improved soldering structure, method for assembling light emitting diode to substrate by soldering, and light emitting diode assembly manufactured by the assembling method |
JP2006222454A (en) * | 2006-05-01 | 2006-08-24 | Toshiba Corp | Semiconductor light emitting device and surface-mounted package |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017034221A (en) * | 2015-07-31 | 2017-02-09 | 宏齊科技股▲ふん▼有限公司 | Portable light-emitting device without need to use auxiliary power source, and light-emitting diode encapsulation structure therefor |
US10084123B2 (en) | 2015-07-31 | 2018-09-25 | Harvatek Corporation | Portable light-emitting device without pre-stored power sources and LED package structure thereof |
Also Published As
Publication number | Publication date |
---|---|
JP4924090B2 (en) | 2012-04-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102205837B1 (en) | Light emitting device | |
JP6274271B2 (en) | Light emitting device and manufacturing method thereof | |
US20170234491A1 (en) | Package for light emitting device and method for packaging the same | |
US9041013B2 (en) | Light emitting device and lighing system having the same | |
KR101871501B1 (en) | Light emitting device package and lighting system having the same | |
EP2755246B1 (en) | Light emitting diode device | |
KR101356262B1 (en) | Light emitting device | |
US8525213B2 (en) | Light emitting device having multiple cavities and light unit having the same | |
KR101905535B1 (en) | Light emitting device and light apparatus having thereof | |
US10305011B2 (en) | Light emitting apparatus | |
TWI610466B (en) | Light-emitting element mounting substrate and light-emitting device | |
TWI392105B (en) | Power surface mount light emitting die package | |
JP5060172B2 (en) | Semiconductor light emitting device | |
US8519427B2 (en) | Light emitting device and lighting system | |
CN102113139B (en) | Light-emitting device | |
KR100620844B1 (en) | Light-emitting apparatus and illuminating apparatus | |
US8070316B2 (en) | Lighting apparatus with LEDs | |
TW517402B (en) | Light source using light emitting diode and method for producing the same | |
CN101276874B (en) | Semiconductor light-emitting device | |
RU2473152C1 (en) | Semiconductor light-emitting device | |
US9312462B2 (en) | LED module | |
JP5418592B2 (en) | Light emitting device | |
JP5273486B2 (en) | Lighting device | |
JP4651008B2 (en) | Light emitting diode | |
US8680552B2 (en) | Light emitting device package including light emitting diode, and lighting system having the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080523 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20101130 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101214 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110214 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110802 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110926 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120110 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120123 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150217 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4924090 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150217 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |