JP2008107529A - Photosensitive siloxane composition, cured film formed from the same and element with cured film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a photosensitive siloxane composition which can be developed with a dilute alkali developer and can obtain a cured film having high transparency after heat curing. <P>SOLUTION: The photosensitive siloxane composition comprises: (a) a polysiloxane which is a copolymer obtained by hydrolyzing and condensing a compound represented by the formula (1): R<SP>1</SP><SB>x</SB>Si(OR<SP>2</SP>)<SB>4-x</SB>; (b) a quinonediazide compound; and (c) a solvent, wherein at least one of R<SP>1</SP>represents an alkyl group or oxyalkyl group substituted by an oxetanyl group or succinic acid anhydride group, the remaining R<SP>1</SP>is represented by hydrogen, a 1-10C alkyl group, 2-10C alkenyl group or a 6-15C aryl group, a plurality of symbols R<SP>1</SP>may be the same or different; R<SP>2</SP>represents hydrogen, a 1-6C alkyl group, a 1-6C acyl group or a 6-15C aryl group, a plurality of symbols R<SP>2</SP>may be the same or different; and x represents an integer of 1-3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a positive photosensitive siloxane composition for forming a planarization film for a thin film transistor (TFT) substrate such as a liquid crystal display element or an organic EL display element, an interlayer insulating film of a semiconductor element, or a core or cladding material of an optical waveguide. Product, a cured film formed therefrom, and an element having the cured film.

  In recent years, a method for increasing the aperture ratio of a display device is known as a method for realizing higher definition and higher resolution in a liquid crystal display, an organic EL display, and the like (see Patent Document 1). In this method, a planarizing material is applied on a TFT element formed on a substrate and thermally cured to produce a transparent heat-resistant planarizing film on the TFT element, thereby transmitting light more efficiently. .

  As a material for such a planarizing film for a TFT substrate, a material having high heat resistance and high transparency is required, and polysiloxane is known as having both of these characteristics (see Patent Document 2). In addition, it is required to resolve the hole pattern in the electrode part, impart photosensitivity to the material itself for forming the planarization film in order to pattern it into various shapes, and to expose and develop by photolithography. The photosensitivity is preferably a positive type (see Patent Document 3).

On the other hand, the material for forming the flattened film is required to be developed with a dilute alkaline developer from the viewpoint of cost and environment. However, since polysiloxane is inherently water repellent and almost insoluble in water, development with a dilute alkaline developer is difficult (see Patent Document 4).
Japanese Patent No. 2933879 (Claim 1) JP 2006-152083 A (Claim 1) JP 2006-18249 A (Claim 1) JP 58-42682 A (Claim 1)

  The present invention has been made based on the above circumstances, and provides a photosensitive siloxane composition that can be developed with a dilute alkaline developer and can obtain a cured film having high transparency after heat curing. There is. Another object of the present invention is to provide a heat-resistant insulating film, a TFT substrate planarizing film, an interlayer insulating film, or an element material such as a core or a clad material having the above characteristics.

  That is, this invention contains (a) polysiloxane which is a copolymer obtained by hydrolyzing and condensing the compound represented by the following general formula (1), (b) a quinonediazide compound, and (c) a solvent. It is a photosensitive siloxane composition.

(At least one of R ¹ represents an alkyl group or an oxyalkyl group oxetanyl group or succinic anhydride groups substituted, other R ¹ represents hydrogen, an alkyl group having 1 to 10 carbon atoms, from 2 to 10 carbon atoms alkenyl group, represented by any of the aryl group having 6 to 15 carbon atoms, more R ¹ s may be the same or different from each .R ² is hydrogen, an alkyl group having 1 to 6 carbon atoms, 1 to carbon atoms 6 represents an acyl group of 6 or an aryl group of 6 to 15 carbon atoms, and a plurality of R ² may be the same or different, and x represents an integer of 1 to 3).

  According to the composition of the present invention, it is possible to develop with a dilute alkaline developer when forming a pattern, and a cured film having high transparency after heat curing can be obtained.

  The present invention relates to (a) a photosensitivity containing a polysiloxane which is a copolymer obtained by hydrolysis and condensation of a compound represented by the following general formula (1), (b) a quinonediazide compound, and (c) a solvent. Siloxane composition.

R ¹ represents an alkyl group or an oxyalkyl group substituted by an oxetanyl group or a succinic anhydride group, and the plurality of R ¹ may be the same or different. R ² represents any one of hydrogen, an alkyl group having 1 to 6 carbon atoms, an acyl group having 1 to 6 carbon atoms, and an aryl group having 6 to 15 carbon atoms, and a plurality of R ² may be the same or different. . x represents an integer of 1 to 3.

  The (a) polysiloxane used in the present invention is a copolymer obtained by hydrolyzing and condensing the compound represented by the general formula (1).

At least one of R ^{1 in} the general formula (1) represents an alkyl group or an oxyalkyl group substituted by an oxetanyl group or a succinic anhydride group. R ¹ other than an alkyl group or an oxyalkyl group substituted by an oxetanyl group or a succinic anhydride group is hydrogen, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or an alkyl group having 6 to 15 carbon atoms. Represents any of aryl groups. The plurality of R ¹ may be the same or different. Specific examples of R ^{1 in} the general formula (1) include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a t-butyl group, an n-type substituted with an oxetanyl group or succinic anhydride. Examples include hexyl group, n-decyl group, n-butoxy-n-propyl group, isopropoxymethyl group, ethoxyethyl group and the like. In addition, the alkyl group, alkenyl group, and aryl group mentioned in R ¹ other than the alkyl group or oxyalkyl group substituted by the oxetanyl group or succinic anhydride group may have a substituent. The non-substituted product may not be selected and can be selected according to the characteristics of the composition. Specific examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, t-butyl group, n-hexyl group, n-decyl group, trifluoromethyl group, 2,2 , 2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 3-aminopropyl group, 3-mercaptopropyl group, 3-isocyanatopropyl group. Specific examples of the alkenyl group include a vinyl group, a 3-acryloxypropyl group, and a 3-methacryloxypropyl group. Specific examples of the aryl group include phenyl group, tolyl group, p-hydroxyphenyl group, 1- (p-hydroxyphenyl) ethyl group, 2- (p-hydroxyphenyl) ethyl group, 4-hydroxy-5- (p -Hydroxyphenylcarbonyloxy) pentyl group, naphthyl group.

R ^{2 in the} general formula (1) represents any one of hydrogen, an alkyl group having 1 to 6 carbon atoms, an acyl group having 1 to 6 carbon atoms, and an aryl group having 6 to 15 carbon atoms, and a plurality of R ² are the same. But it can be different. Any of the alkyl group, acyl group, and aryl group mentioned in R ² may have a substituent, or may be an unsubstituted form having no substituent, depending on the characteristics of the composition. Can be selected. Specific examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, and an n-butyl group. Specific examples of the acyl group include an acetyl group. Specific examples of the aryl group include a phenyl group.

  X of General formula (1) represents the integer of 1-3. When x = 1, it is a trifunctional silane, when x = 2, it is a bifunctional silane, and when x = 3, it is a monofunctional silane.

  Specific examples of the compound represented by the general formula (1) include 3-ethyl-3- (3-triethoxysilylpropoxymethyl) oxetane, 3-ethyl-3- (3-trimethoxysilylpropoxymethyl) oxetane, 3-ethyl-3- (3-triphenoxysilylpropoxymethyl) oxetane, 3-trimethoxysilylpropyl succinic anhydride, 3-triethoxysilylsilylpropyl succinic anhydride, 3-triphenoxysilylpropyl succinic anhydride Trifunctional silane such as diisopropoxydi (2-oxetanylbutoxypropyl) silane, dimethyldi (3-oxetanylpentyl) silane, di-n-butoxydipropyl succinic anhydride silane, dimethoxydiethyl succinic anhydride silane, etc. Bifunctional silane, ethoxydi (2-oxetanylbu Kishipenchiru) 2-oxetanyl pentyl silane, Metokishitori (2-oxetanylmethoxy pentyl) silane, phenoxy tripropyl succinic anhydride silanes, such as one functional silanes such as methoxy diethyl succinate anhydride methylsilane and the like. In addition, these compounds may be used individually or may be used in combination of 2 or more types.

  When copolymerizing the compound represented by the general formula (1), it is necessary to open the oxetanyl group or the succinic anhydride group to form a diol group or a succinic acid group. Ring opening of the oxetanyl group generates a highly hydrophilic diol group, and ring opening of the succinic anhydride group generates a highly hydrophilic succinic acid group. The resulting polysiloxane is converted into a dilute alkaline developer. The solubility of is improved. In order to sufficiently open the oxetanyl group and succinic anhydride group, the polymerization temperature is preferably 100 ° C. or higher and the reaction is preferably performed for 30 minutes or longer.

  The (a) polysiloxane used in the present invention may be a copolymer obtained by hydrolysis and condensation of the compound represented by the general formula (1), but may be copolymerized with other silane compounds. . A preferable silane compound copolymerized with the compound represented by the general formula (1) includes a compound represented by the general formula (2). The polysiloxane (a) used in the present invention is a mixture of a polysiloxane obtained by hydrolyzing and condensing the compound represented by the general formula (1) and a polysiloxane obtained by hydrolyzing and condensing the compound represented by the general formula (2). May be used.

R ³ represents any one of hydrogen, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, and an aryl group having 6 to 15 carbon atoms, and a plurality of R ³ may be the same or different. . R ⁴ represents any one of hydrogen, an alkyl group having 1 to 6 carbon atoms, an acyl group having 1 to 6 carbon atoms, and an aryl group having 6 to 15 carbon atoms, and the plurality of R ⁴ may be the same or different. . y represents an integer of 0 to 3.

Any of the alkyl group, alkenyl group, and aryl group listed as R ³ in the general formula (2) may have a substituent, or may be an unsubstituted form having no substituent. It can be selected according to the characteristics of the composition. Specific examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, t-butyl group, n-hexyl group, n-decyl group, trifluoromethyl group, 2,2 , 2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 3-aminopropyl group, 3-mercaptopropyl group, 3-isocyanatopropyl group. Specific examples of the alkenyl group include a vinyl group, a 3-acryloxypropyl group, and a 3-methacryloxypropyl group. Specific examples of the aryl group include phenyl group, tolyl group, p-hydroxyphenyl group, 1- (p-hydroxyphenyl) ethyl group, 2- (p-hydroxyphenyl) ethyl group, 4-hydroxy-5- (p -Hydroxyphenylcarbonyloxy) pentyl group, naphthyl group.

Any of the alkyl group, acyl group, and aryl group listed as R ⁴ in the general formula (2) may have a substituent, or may be an unsubstituted form having no substituent. It can be selected according to the characteristics of the composition. Specific examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, and an n-butyl group. Specific examples of the acyl group include an acetyl group. Specific examples of the aryl group include a phenyl group.

  Y in the general formula (2) represents an integer of 0 to 3. A tetrafunctional silane when y = 0, a trifunctional silane when y = 1, a bifunctional silane when y = 2, and a monofunctional silane when y = 3.

  Specific examples of the compound represented by the general formula (2) include tetrafunctional silanes such as tetramethoxysilane, tetraethoxysilane, tetraacetoxysilane, and tetraphenoxysilane, methyltrimethoxysilane, methyltriethoxysilane, and methyltrimethylsilane. Isopropoxysilane, methyltri-n-butoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, ethyltriisopropoxysilane, ethyltrin-butoxysilane, n-propyltrimethoxysilane, n-propyltriethoxysilane, n-butyltri Methoxysilane, n-butyltriethoxysilane, n-hexyltrimethoxysilane, n-hexyltriethoxysilane, decyltrimethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, 3-methacrylo Cypropyltrimethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, phenyltrimethoxysilane, phenyltriethoxysilane, p-hydroxyphenyltrimethoxysilane, 1- (p-hydroxyphenyl) Ethyltrimethoxysilane, 2- (p-hydroxyphenyl) ethyltrimethoxysilane, 4-hydroxy-5- (p-hydroxyphenylcarbonyloxy) pentyltrimethoxysilane, trifluoromethyltrimethoxysilane, trifluoromethyltriethoxysilane 3,3,3-trifluoropropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane Trifunctional silanes such as 3-mercaptopropyltrimethoxysilane, dimethyldimethoxysilane, dimethyldiethoxysilane, dimethyldiacetoxysilane, di-n-butyldimethoxysilane, diphenyldimethoxysilane, and other bifunctional silanes, trimethylmethoxysilane, And monofunctional silanes such as tri-n-butylethoxysilane.

  Of these compounds, trifunctional silanes are preferably used from the viewpoint of crack resistance and hardness of the cured film. These compounds may be used alone or in combination of two or more.

  In addition, in the polysiloxane, the content of the diol group in which the oxetanyl group is opened and the succinic group in which the succinic anhydride group is opened is not particularly limited, but the number of moles of Si atoms contained in the polysiloxane is not limited. In the case of a diol group, 30 mol% or more is preferable, and in the case of a succinic acid group, 10 mol% or more is preferable. When the diol group is less than 30 mol%, or when the succinic acid group is less than 10 mol%, the hydrophilicity of the polysiloxane is not sufficient. For this reason, when patterning is performed with a dilute alkaline developer, the solubility in the developer is lowered, resulting in low sensitivity. In addition, content of a diol group and a succinic acid group is calculated | required as follows.

First, a sample in which 1% by weight of benzene is mixed as a standard substance with polysiloxane is prepared, and elemental analysis and ¹ H-NMR are measured. The number of moles of benzene relative to the number of moles of Si is determined from the elemental analysis value. ¹ H-NMR measurement (solvent used in ¹ H-NMR: CDCl ₃ )
From the diol group-derived peak area (around 2.5 ppm), the succinic acid-derived peak area (around 12.2 ppm), and the benzene-derived peak area (7.34 ppm), the number of moles of diol and succinic acid relative to benzene is determined. From these values, the contents of diol groups and succinic acid groups with respect to the number of moles of Si atoms contained in the polysiloxane are determined through the number of moles of benzene.

  As the (a) polysiloxane of the present invention, a polysiloxane obtained by copolymerizing silica particles may be used. As a method of copolymerizing silica particles, a method of reacting a polysiloxane synthesized from a compound represented by the above general formula (1) and silica particles, or a compound represented by the above general formula (1) and silica. A method of obtaining polysiloxane by reacting particles can be mentioned. In addition, it carries out similarly when combining the compound represented by General formula (1), and the compound represented by General formula (2). Silica particles are incorporated into polysiloxane and chemically bonded to at least a part of polysiloxane (covalently bonded to silica particles), thereby reducing the fluidity of polysiloxane and causing pattern distortion during thermosetting. It is suppressed and the pattern resolution after thermosetting is improved.

  In the method of reacting polysiloxane and silica particles, silica particles are contained as an independent component in the composition, but are incorporated into the polysiloxane by pre-baking or heating during curing.

  The number average particle diameter of the silica particles used is preferably 2 nm to 200 nm, more preferably 5 nm to 70 nm. If the thickness is smaller than 2 nm, the pattern resolution is not sufficiently improved. If the thickness is larger than 200 nm, the cured film is scattered and the transparency is lowered. Here, the number average particle diameter of the silica particles is assumed to be a sphere after the silica particles are dried and calcined and the specific surface area of the obtained particles is measured when using the specific surface area conversion value. The particle diameter is obtained from the specific surface area, and the average particle diameter is obtained as a number average. Although the apparatus to be used is not specifically limited, Asap 2020 (made by Micromeritics) etc. can be used.

  Silica particles can be obtained by a method in which one or more of alkoxysilanes are hydrolyzed and polycondensed in the presence of water, an organic solvent and a base (preferably ammonia). Silica particles dispersed in an organic solvent can be obtained by replacing water, which is an aqueous silica particle dispersion medium, with an organic solvent. For example, the dispersion medium may be replaced by adding an organic solvent to the aqueous silica particles and distilling off the water by means of distillation or the like. Depending on the type of solvent, a lower alcohol may be added and the surface of the silica particles may be partially esterified. From the viewpoint of compatibility with polysiloxane and quinonediazide compound, silica particles dispersed in an organic solvent are preferred.

Specific examples of the silica particles include IPA-ST having a particle diameter of 12 nm using isopropanol as a dispersion medium, MIBK-ST having a particle diameter of 12 nm using methyl isobutyl ketone as a dispersion medium, and IPA-ST having a particle diameter of 45 nm using isopropanol as a dispersion medium. ST-L, IPA-ST-ZL having a particle diameter of 100 nm using isopropanol as a dispersion medium, PGM-ST having a particle diameter of 15 nm using propylene glycol monomethyl ether as a dispersion medium (trade name, manufactured by Nissan Chemical Industries, Ltd.), Oscar 101 having a particle diameter of 12 nm using γ-butyrolactone as a dispersion medium, Oscar 105 having a particle diameter of 60 nm using γ-butyrolactone as a dispersion medium, Oscar 106 having a particle diameter of 120 nm using diacetone alcohol as a dispersion medium, and the dispersion solution being water. Cataloid-S having a particle diameter of 5 to 80 nm (Manufactured by Catalyst Kasei Kogyo Co., Ltd.), Quatron PL-2L-PGME having a particle diameter of 16 nm using propylene glycol monomethyl ether as a dispersion medium, Quatron PL-2L-BL having a particle diameter of 17 nm using γ-butyrolactone as a dispersion medium, diacetone Quartron PL-2L-DAA having a particle diameter of 17 nm using alcohol as a dispersion medium, Quatron PL-2L having a particle diameter of 18 to 20 nm in which the dispersion solution is water, GP-2L (above, trade name, manufactured by Fuso Chemical Industry Co., Ltd.) , Silica (SiO ₂ ) SG-SO100 (trade name, manufactured by Kyoritsu Material Co., Ltd.) having a particle diameter of 100 nm, reolosil (trade name, manufactured by Tokuyama Co., Ltd.) having a particle diameter of 5 to 50 nm, and the like. . These silica particles may be used alone or in combination of two or more.

  Moreover, it is preferable that the surface of the silica particles to be used has a reactive group from the viewpoint of facilitating the bonding between the polysiloxane and the silica particles and increasing the strength of the film. Examples of reactive groups include hydroxyl groups such as silanol, alcohol and phenol, vinyl groups, acrylic groups, ethynyl groups, epoxy groups and amino groups. By reacting silica particles with an alkoxysilane having a reactive group, silica particles having a reactive group on the surface can be obtained. Of course, as long as the effects of the present invention are not impaired, silica particles having a substituent not having a reactive group such as a methyl group or a phenyl group may be used.

  The mixing ratio in the case of using silica particles is not particularly limited, but the number of Si atoms in the silica particles is preferably 1 to 50% with respect to the number of Si atoms in the polysiloxane. When the number of moles of Si atoms in the silica particles is more than 50%, the compatibility between the polysiloxane and the quinonediazide compound is deteriorated, and the transparency of the cured film is lowered.

Note that the Si atom molar ratio of the silica particles to the total number of Si atom moles contained in the polysiloxane can be determined from the integral ratio of the peak derived from the Si—C bond and the peak derived from the Si—O bond in IR. When a large amount of peak overlap is not required, the structure of the monomer other than particles is determined by ¹ H-NMR, ¹³ C-NMR, IR, TOF-MS, etc., and further, the gas generated in the elemental analysis method and the remaining ash It can be determined from the ratio (assuming all SiO ₂ ).

Further, in the polysiloxane, the content of the phenyl group in the polysiloxane is preferably 20 to 70 mol%, more preferably 35 to 55, in terms of achieving both crack resistance and hardness of the film. Mol%. When the phenyl group content is higher than 70 mol%, the hardness decreases, and when the phenyl group content is lower than 20 mol%, crack resistance decreases. The phenyl group content is determined, for example, by measuring the ²⁹ Si-nuclear magnetic resonance spectrum of polysiloxane and determining the ratio of the peak area of Si bonded to the phenyl group and the peak area of Si bonded to no phenyl group. Can do.

  The weight average molecular weight (Mw) of the polysiloxane used in the present invention is not particularly limited, but is preferably 1000 to 100,000, more preferably 2000 to 50,000 in terms of polystyrene measured by GPC (gel permeation chromatography). . When Mw is less than 1000, the coating properties are deteriorated, and when it is more than 100,000, the solubility in a developing solution during pattern formation is deteriorated. The polysiloxane soluble in the alkaline aqueous solution is preferably 2000 to 50000, and the weight average molecular weight of the polysiloxane is preferably 5000 to 100,000. If Mw is less than 5000, the temperature at which pattern sagging occurs due to heat may be lowered.

  When silica particles are used, it is preferable that the silica particles are homogenized with polysiloxane. When the silica particles are homogenized, the hardness of the cured film is improved, and precipitation of silica particles from the pre-baked film is prevented during development. Here, “homogenized” means that the silica component of the silica particles reacts with the polysiloxane of the matrix, and the silica particles are incorporated at a constant density in the polysiloxane. The state can be confirmed by observing the boundary between the silica particles and the polysiloxane with a transmission electron microscope (hereinafter referred to as TEM). In the case of homogenization, the boundary line between silica particles and polysiloxane is not observed by TEM observation. The homogenized system is preferably homogenized from the viewpoint of higher resolution than a system in which the same amount of silica particles is added to polysiloxane.

  The polysiloxane in the present invention is obtained by hydrolyzing and partially condensing the compound represented by the above general formula (1). A general method can be used for hydrolysis and partial condensation. For example, a solvent, water and, if necessary, a catalyst are added to the mixture, and the mixture is heated and stirred. During stirring, hydrolysis by-products (alcohols such as methanol) and condensation by-products (water) may be distilled off by distillation as necessary.

  Although there is no restriction | limiting in particular as a reaction solvent at the time of polysiloxane synthesis | combination, Usually, the thing similar to the (c) solvent mentioned later is used. The amount of the solvent added is preferably 10 to 1000% by weight based on 100% by weight of the total amount of organosilane or organosilane and silica particles. The amount of water used for the hydrolysis reaction is preferably 0.5 to 2 mol with respect to 1 mol of the hydrolyzable group.

  Although there is no restriction | limiting in particular in the catalyst added as needed, An acid catalyst and a base catalyst are used preferably. Specific examples of the acid catalyst include hydrochloric acid, nitric acid, sulfuric acid, hydrofluoric acid, phosphoric acid, acetic acid, trifluoroacetic acid, formic acid, polyvalent carboxylic acid or anhydride thereof, and ion exchange resin. Specific examples of the base catalyst include triethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, diethylamine, triethanolamine, diethanolamine, sodium hydroxide, potassium hydroxide, amino Examples include alkoxysilanes having groups and ion exchange resins. The addition amount of the catalyst is preferably 0.01 to 10% by weight with respect to 100% by weight of the organosilane.

  Further, from the viewpoint of coating properties and storage stability, it is preferable that the polysiloxane solution after hydrolysis and partial condensation does not contain alcohol, water, and catalyst as by-products. These removals may be performed as necessary. The removal method is not particularly limited. Preferably, as a method for removing alcohol or water, a method of diluting a polysiloxane solution with an appropriate hydrophobic solvent and then washing it several times with water can be concentrated using an evaporator. As a method for removing the catalyst, a method of treating with an ion exchange resin alone or in addition to the above water washing can be used.

  The photosensitive siloxane composition of the present invention contains (b) a quinonediazide compound. The photosensitive siloxane composition containing a quinonediazide compound forms a positive type in which the exposed portion is removed with a developer. The addition amount of the quinonediazide compound to be used is not particularly limited, but is preferably 3 to 15% by weight based on (a) polysiloxane. When the addition amount of the quinonediazide compound is less than 3% by weight, the dissolution contrast between the exposed part and the unexposed part is too low, and there is no realistic photosensitivity. Further, in order to obtain a better dissolution contrast, 4% by weight or more is preferable. On the other hand, when the addition amount of the quinonediazide compound is more than 15% by weight, whitening of the coating film due to poor compatibility between the polysiloxane and the quinonediazide compound occurs, or coloring due to decomposition of the quinonediazide compound that occurs during thermal curing is remarkable. Therefore, the colorless transparency of the cured film is lowered.

  The quinonediazide compound to be used is not particularly limited, but is preferably a compound in which naphthoquinonediazidesulfonic acid is ester-bonded to a compound having a phenolic hydroxyl group, and the ortho position and the para position of the phenolic hydroxyl group of the compound are independently hydrogen, Alternatively, a compound that is any of the substituents represented by the general formula (3) is used.

R ^{7 to} R ⁹ each independently represent an alkyl group having 1 to 10 carbon atoms, a carboxyl group, a phenyl group, or a substituted phenyl group. R ⁷ and R ⁸ , R ⁷ and R ⁹ , R ⁸ and R ⁹ may form a ring.

In the substituent represented by the general formula (3), R ^{7 to} R ⁹ each independently represents any of an alkyl group having 1 to 10 carbon atoms, a carboxyl group, a phenyl group, and a substituted phenyl group. The alkyl group may have a substituent or may be an unsubstituted product having no substituent, and can be selected according to the characteristics of the composition. Specific examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, t-butyl group, n-hexyl group, cyclohexyl group, n-heptyl group, n- Examples include an octyl group, a trifluoromethyl group, and a 2-carboxyethyl group. Moreover, a hydroxyl group is mentioned as a substituent substituted by a phenyl group. In addition, R ⁷ and R ⁸ , R ⁷ and R ⁹ , R ⁸ and R ⁹ may form a ring, and specific examples include a cyclopentane ring, a cyclohexane ring, an adamantane ring, and a fluorene ring.

  When the ortho-position and para-position of the phenolic hydroxyl group are other than the above, for example, a methyl group, oxidative decomposition occurs due to thermal curing, a conjugated compound represented by a quinoid structure is formed, and the cured film is colored to be colorless and transparent Decreases. These quinonediazide compounds can be synthesized by a known esterification reaction between a compound having a phenolic hydroxyl group and naphthoquinonediazidesulfonic acid chloride.

  Specific examples of the compound having a phenolic hydroxyl group include the following compounds (trade name, manufactured by Honshu Chemical Industry Co., Ltd.).

  As naphthoquinone diazide sulfonic acid, 4-naphthoquinone diazide sulfonic acid or 5-naphthoquinone diazide sulfonic acid can be used. Since 4-naphthoquinonediazide sulfonic acid ester compound has absorption in the i-line (wavelength 365 nm) region, it is suitable for i-line exposure. Moreover, since 5-naphthoquinone diazide sulfonic acid ester compound has absorption in a wide range of wavelengths, it is suitable for exposure in a wide range of wavelengths. It is preferable to select a 4-naphthoquinone diazide sulfonic acid ester compound or a 5-naphthoquinone diazide sulfonic acid ester compound depending on the wavelength to be exposed. A 4-naphthoquinone diazide sulfonic acid ester compound and a 5-naphthoquinone diazide sulfonic acid ester compound may be mixed and used.

  The molecular weight of the naphthoquinonediazide compound is preferably 300 to 1500, and more preferably 350 to 1200. If the molecular weight of the naphthoquinone diazide compound is more than 1500, pattern formation may not be possible with an addition amount of 4 to 10% by weight. On the other hand, when the molecular weight of the naphthoquinone diazide compound is less than 300, the colorless transparency may be lowered.

  The photosensitive siloxane composition of the present invention contains (c) a solvent. The solvent is not particularly limited, but a compound having an alcoholic hydroxyl group and / or a cyclic compound having a carbonyl group is preferably used. When these solvents are used, the polysiloxane and the quinonediazide compound are uniformly dissolved, and even if the composition is coated and formed, high transparency can be achieved without whitening the film.

  The compound having an alcoholic hydroxyl group is not particularly limited, but is preferably a compound having a boiling point of 110 to 250 ° C. under atmospheric pressure. When the boiling point is higher than 250 ° C., the amount of residual solvent in the film increases, and the film shrinkage at the time of thermosetting increases, and good flatness cannot be obtained. On the other hand, if the boiling point is lower than 110 ° C., the coating properties deteriorate, such as drying at the time of coating is too fast and the film surface becomes rough.

  Specific examples of the compound having an alcoholic hydroxyl group include acetol, 3-hydroxy-3-methyl-2-butanone, 4-hydroxy-3-methyl-2-butanone, 5-hydroxy-2-pentanone, 4-hydroxy- 4-methyl-2-pentanone (diacetone alcohol), ethyl lactate, butyl lactate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono n-propyl ether, propylene glycol mono n-butyl ether, propylene glycol mono t- Examples include butyl ether, 3-methoxy-1-butanol, and 3-methyl-3-methoxy-1-butanol. Among these, a compound further having a carbonyl group is preferable, and diacetone alcohol is particularly preferably used. These compounds having an alcoholic hydroxyl group may be used alone or in combination of two or more.

  The cyclic compound having a carbonyl group is not particularly limited, but is preferably a compound having a boiling point of 150 to 250 ° C. under atmospheric pressure. When the boiling point is higher than 250 ° C., the amount of residual solvent in the film increases, and the film shrinkage at the time of thermosetting increases, and good flatness cannot be obtained. On the other hand, if the boiling point is lower than 150 ° C., the coating properties deteriorate, for example, drying at the time of coating is too fast and the film surface becomes rough.

  Specific examples of the cyclic compound having a carbonyl group include γ-butyrolactone, γ-valerolactone, δ-valerolactone, propylene carbonate, N-methylpyrrolidone, cyclohexanone, and cycloheptanone. Among these, γ-butyrolactone is particularly preferably used. These cyclic compounds having a carbonyl group may be used alone or in combination of two or more.

  The compound having an alcoholic hydroxyl group and the cyclic compound having a carbonyl group may be used singly or in combination. When mixed and used, the weight ratio is not particularly limited, but is preferably a compound having an alcoholic hydroxyl group / a cyclic compound having a carbonyl group = (99-50) / (1-50), more preferably (97-60). ) / (3-40). If the compound having an alcoholic hydroxyl group is more than 99% by weight (the cyclic compound having a carbonyl group is less than 1% by weight), the compatibility between the polysiloxane and the quinonediazide compound is poor, the cured film is whitened, and the transparency is lowered. To do. On the other hand, if the compound having an alcoholic hydroxyl group is less than 50% by weight (the cyclic compound having a carbonyl group is more than 50% by weight), the condensation reaction of unreacted silanol groups in the polysiloxane is likely to occur, and the storage stability is improved. Deteriorate.

  Moreover, unless the effect of this invention is impaired, the photosensitive siloxane composition of this invention may contain another solvent. Other solvents include ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, propylene glycol monomethyl ether acetate, 3-methoxy-1-butyl acetate, 3-methyl-3-methoxy-1- Examples include esters such as butyl acetate, ketones such as methyl isobutyl ketone, diisopropyl ketone, and diisobutyl ketone, and ethers such as diethyl ether, diisopropyl ether, di-n-butyl ether, diphenyl ether, diethylene glycol methyl ethyl ether, and dipropylene glycol dimethyl ether. .

  The amount of the solvent added is preferably in the range of 100 to 1000% by weight with respect to the polysiloxane.

  Furthermore, the photosensitive siloxane composition of the present invention may use a crosslinking accelerator as long as the effects of the present invention are not impaired. Specific examples of the crosslinking accelerator preferably used include SI-60, SI-80, SI-100, SI-110, SI-145, SI-150, SI-60L, SI-80L, SI-100L, SI- 110L, SI-145L, SI-150L, SI-160L, SI-180L (all from Sanshin Chemical Industry Co., Ltd.), 4-hydroxyphenyldimethylsulfonium, benzyl-4-hydroxyphenylmethylsulfonium, 2-methyl Benzyl-4-hydroxyphenylmethylsulfonium, 2-methylbenzyl-4-acetylphenylmethylsulfonium, 2-methylbenzyl-4-benzoyloxyphenylmethylsulfonium, methanesulfonate, trifluoromethanesulfonate, camphorsulfonic acid Salt, p-toluene Sulfonic acid salts. More preferably 4-hydroxyphenyldimethylsulfonium, benzyl-4-hydroxyphenylmethylsulfonium, 2-methylbenzyl-4-hydroxyphenylmethylsulfonium, 2-methylbenzyl-4-acetylphenylmethylsulfonium, 2-methylbenzyl-4- Benzoyloxyphenylmethylsulfonium, these methanesulfonates, trifluoromethanesulfonate, camphorsulfonate, p-toluenesulfonate. These compounds may be used alone or in combination of two or more.

  A preferable addition amount of the crosslinking accelerator is 0.01 to 10 parts by weight, and more preferably 0.01 to 0.5 parts by weight with respect to 100 parts by weight of the siloxane polymer. If the amount is less than 0.01 part by weight, the function as a crosslinking accelerator of the siloxane polymer is not sufficiently exhibited, resulting in a low-hardness film. If the amount is more than 10 parts by weight, the sensitivity is lowered, cracks are generated, and transparency is lowered. .

  Furthermore, the photosensitive siloxane composition of the present invention may contain a sensitizer as long as the effects of the present invention are not impaired. The sensitizer at this time is preferably a sensitizer that is vaporized by heat treatment and / or discolors when irradiated with light even when it remains in the film.

  Specific examples of the sensitizer that is vaporized by the heat treatment and / or faded by light irradiation include coumarins such as 3,3′-carbonylbis (diethylaminocoumarin), anthraquinones such as 9,10-anthraquinone, benzophenone, Aromatic ketones such as 4,4′-dimethoxybenzophenone, acetophenone, 4-methoxyacetophenone, benzaldehyde, biphenyl, 1,4-dimethylnaphthalene, 9-fluorenone, fluorene, phenanthrene, triphenylene, pyrene, anthracene, 9-phenylanthracene, 9-methoxyanthracene, 9,10-diphenylanthracene, 9,10-bis (4-methoxyphenyl) anthracene, 9,10-bis (triphenylsilyl) anthracene, 9,10-dimethoxya Tracene, 9,10-diethoxyanthracene, 9,10-dipropoxyanthracene (DPA, manufactured by Kawasaki Kasei Co., Ltd.), 9,10-dibutoxyanthracene (DBA, manufactured by Kawasaki Kasei Co., Ltd.), 9,10- Examples thereof include condensed aromatics such as dipentaoxyanthracene, 2-t-butyl-9,10-dibutoxyanthracene, and 9,10-bis (trimethylsilylethynyl) anthracene.

  Among these sensitizers, the sensitizer that is vaporized by heat treatment is preferably a sensitizer that sublimates or evaporates a thermal decomposition product by sublimation, evaporation, and thermal decomposition. Moreover, as vaporization temperature of a sensitizer, Preferably it is 130 to 400 degreeC, More preferably, it is 150 to 250 degreeC. When the vaporization temperature of the sensitizer is lower than 130 ° C., the sensitizer is vaporized during the pre-bake and does not exist during the exposure process, so that high sensitivity cannot be achieved. In order to suppress vaporization during prebaking as much as possible, the vaporization temperature of the sensitizer is preferably 150 ° C. or higher. On the other hand, if the vaporization temperature of the sensitizer is higher than 400 ° C., the sensitizer does not vaporize during thermal curing and remains in the cured film, resulting in a decrease in colorless transparency. Moreover, in order to vaporize completely at the time of thermosetting, the vaporization temperature of a sensitizer is preferably 250 ° C. or less.

  On the other hand, the sensitizer that fades when irradiated with light is preferably a sensitizer whose absorption in the visible light region fades when irradiated with light from the viewpoint of transparency. Further, a compound that fades upon irradiation with light is a compound that dimerizes upon irradiation with light. By dimerization by light irradiation, the molecular weight increases and insolubilization results in the effect of improving chemical resistance, improving heat resistance, and reducing the extract from the transparent cured film.

  The sensitizer is preferably an anthracene compound in that it can achieve high sensitivity and dimerizes and fades when irradiated with light, and the anthracene compound in which the 9th and 10th positions are hydrogen is unstable to heat. Therefore, a 9,10-disubstituted anthracene compound is preferable. Furthermore, the 9,10-dialkoxyanthracene compound represented by the general formula (4) is preferable from the viewpoint of improving the solubility of the sensitizer and the reactivity of the photodimerization reaction.

R ^{10 to} R ^{17 in} the general formula (4) are each independently hydrogen, an alkyl group having 1 to 20 carbon atoms, an alkoxy group, an alkenyl group, an aryl group, an acyl group, and the organic groups listed above are other organic groups. An organic group substituted with a group is represented. Specific examples of the alkyl group include a methyl group, an ethyl group, and an n-propyl group. Specific examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, and a pentyloxy group. Specific examples of the alkenyl group include a vinyl group, an acryloxypropyl group, and a methacryloxypropyl group. Specific examples of the aryl group include a phenyl group, a tolyl group, and a naphthyl group. Specific examples of the acyl group include an acetyl group. From the point of vaporization of the compound and reactivity of photodimerization, R ^{10 to} R ¹⁷ are preferably hydrogen or an organic group having 1 to 6 carbon atoms. More preferably, R ¹⁰ , R ¹³ , R ¹⁴ and R ¹⁷ are preferably hydrogen.

R < ¹⁸ >, R < ¹⁹ > of General formula (4) represents the organic group by which the C1-C20 alkoxy group was substituted by the other organic group. Specific examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, and a pentyloxy group, and a propoxy group and a butoxy group are preferable from the viewpoint of the solubility of the compound and a fading reaction due to photodimerization.

  When using a sensitizer, it is preferable to add in 0.001 to 5 weight% with respect to polysiloxane, More preferably, it is 0.005 to 1 weight%. If it is out of this range, the transparency is lowered and the sensitivity is lowered.

  Furthermore, the photosensitive siloxane composition of the present invention may contain a thermally crosslinkable compound. The thermally crosslinkable compound is a compound that crosslinks the polysiloxane at the time of thermosetting, and is a compound that is incorporated into the polysiloxane skeleton by crosslinking. By containing a thermally crosslinkable compound, the crosslinking degree of a cured film becomes high. This improves the solvent resistance of the cured film.

  The heat crosslinkable compound is not particularly limited as long as it is a compound that crosslinks polysiloxane at the time of thermosetting and is incorporated into the polysiloxane skeleton, but preferably a group represented by the general formula (5), an epoxy structure, a group of oxetane structures And compounds having two or more structures selected from: The combination of the above structures is not particularly limited, but the selected structures are preferably the same.

R ²⁰ represents any one of hydrogen and an alkyl group having 1 to 10 carbon atoms. A plurality of R ²⁰ in the compound may be the same or different.

In the compound having two or more groups represented by the general formula (5), R ²⁰ represents either hydrogen or an alkyl group having 1 to 10 carbon atoms. A plurality of R ²⁰ in the compound may be the same or different. Specific examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, t-butyl group, n-hexyl group, and n-decyl group.

  Specific examples of the compound having two or more groups represented by the general formula (5) include the following melamine derivatives and urea derivatives (trade names, manufactured by Sanwa Chemical Co., Ltd.), and phenolic compounds (commodities). Name, manufactured by Honshu Chemical Industry Co., Ltd.).

  Specific examples of compounds having two or more epoxy structures include “Epolite” 40E, “Epolite” 100E, “Epolite” 200E, “Epolite” 400E, “Epolite” 70P, “Epolite” 200P, “Epolite” 400P, “ "Epolite" 1500NP, "Epolite" 80MF, "Epolite" 4000, "Epolite" 3002 (above trade name, manufactured by Kyoeisha Chemical Industry Co., Ltd.), "Denacol" EX-212L, "Denacol" EX-214L, "Denacol" EX -216L, "Denacol" EX-850L, "Denacol" EX-321L (above trade name, manufactured by Nagase ChemteX Corporation), GAN, GOT, EPPN502H, NC3000, NC6000 (above trade name, Nippon Kayaku Co., Ltd.) ), "Epicoat" 828, "D "Coat" 1002, "Epicoat" 1750, "Epicoat" 1007, YX8100-BH30, E1256, E4250, E4275 (above trade name, manufactured by Japan Epoxy Resins Co., Ltd.), "Epicron" EXA-9583, HP4032, "Epicron" N695 , HP7200 (trade name, manufactured by Dainippon Ink & Chemicals, Inc.), “Tepic” S, “Tepic” G, “Tepic” P (trade name, manufactured by Nissan Chemical Industries, Ltd.), “Epototo” YH -434L (trade name, manufactured by Tohto Kasei Co., Ltd.).

  Specific examples of the compound having two or more oxetane structures include OXT-121, OXT-221, OX-SQ-H, OXT-191, PNOX-1009, RSOX (above, trade name, manufactured by Toa Gosei Co., Ltd.), “Ethanacol” OXBP, “Etanacol” OXTP (trade name, manufactured by Ube Industries, Ltd.)

  In addition, said heat crosslinkable compound may be used individually or may be used in combination of 2 or more type.

  The amount of the thermally crosslinkable compound added is not particularly limited, but is preferably in the range of 0.1 to 10% by weight with respect to the polysiloxane. When the addition amount of the thermally crosslinkable compound is less than 0.1% by weight, the effect of the crosslinking is insufficient due to insufficient crosslinking of the polysiloxane. On the other hand, when the addition amount of the heat crosslinkable compound is more than 10% by weight, the colorless transparency of the cured film is lowered or the storage stability of the composition is lowered.

  The photosensitive siloxane composition of this invention can also contain additives, such as a dissolution inhibitor, surfactant, a stabilizer, and an antifoamer, as needed.

  A method for forming a cured film using the photosensitive siloxane composition of the present invention will be described. The photosensitive siloxane composition of the present invention is applied onto a base substrate by a known method such as spinner, dipping, or slit, and prebaked with a heating device such as a hot plate or oven. Pre-baking is performed in the range of 50 to 150 ° C. for 30 seconds to 30 minutes, and the film thickness after pre-baking is preferably 0.1 to 15 μm.

After pre-baking, using a UV-visible exposure machine such as a stepper, mirror projection mask aligner (MPA), parallel light mask aligner (PLA), etc., about 10 to 4000 J / m ² (wavelength 365 nm exposure conversion) through the desired mask Pattern exposure is performed. The photosensitive siloxane composition of the present invention preferably has a sensitivity of 100 to 4000 J / m ² when exposed to PLA. If the sensitivity is lower than 4000 J / m ² , the radiation exposure time at the time of pattern formation becomes longer, resulting in a decrease in productivity, and the amount of radiation exposure increases, resulting in an increase in the amount of reflection from the base substrate and a deterioration in the pattern shape. To do.

  The sensitivity in the patterning exposure by the PLA is determined by the following method, for example. The composition is spin-coated on a silicon wafer at an arbitrary number of revolutions using a spin coater, and prebaked at 115 ° C. for 2 minutes using a hot plate to produce a film having a thickness of 4 μm. The prepared film was exposed to an ultra-high pressure mercury lamp through a gray scale mask for sensitivity measurement using PLA (PLA-501F manufactured by Canon Inc.), and then an automatic developing device (AD-2000 manufactured by Takizawa Sangyo Co., Ltd.). ) Using 2.38 wt% tetramethylammonium hydroxide aqueous solution, 0.4% tetramethylammonium hydroxide aqueous solution, 0.4% potassium hydroxide aqueous solution, 0.04% potassium hydroxide aqueous solution, etc. Develop with paddle for an hour and then rinse with water for 30 seconds. In the formed pattern, an exposure amount for resolving a 10 μm line and space pattern with a one-to-one width is obtained as sensitivity.

  After patterning exposure, the exposed portion is dissolved by development, and a positive pattern can be obtained. As a developing method, it is preferable to immerse in a developer for 5 seconds to 10 minutes by a method such as showering, dipping or paddle. As the developer, a known alkali developer can be used. Specific examples include inorganic alkalis such as alkali metal hydroxides, carbonates, phosphates, silicates and borates, amines such as 2-diethylaminoethanol, monoethanolamine and diethanolamine, tetramethylammonium hydroxide. Examples thereof include an aqueous solution containing one or more quaternary ammonium salts such as side and choline.

  After development, it is preferable to rinse with water, followed by drying and baking in the range of 50 to 150 ° C.

Thereafter, it is preferable to perform bleaching exposure. By performing bleaching exposure, the unreacted quinonediazide compound remaining in the film is photodegraded, and the light transparency of the film is further improved. As a bleaching exposure method, an entire surface is exposed to about 100 to 4000 J / m ² (converted to a wavelength of 365 nm exposure amount) using an ultraviolet-visible exposure machine such as PLA.

  Thereafter, this film is thermally cured at 150 to 450 ° C. for about 1 hour using a heating device such as a hot plate or oven. The resolution is preferably 10 μm or less.

  The photosensitive siloxane composition of the present invention can form a cured film having a transmittance of 95% or more per 3 μm thickness at a wavelength of 400 nm, more preferably 98% or more. When the light transmittance is lower than 95%, when used as a flattening film for a TFT substrate of a liquid crystal display element, a color change occurs when the backlight passes, and a white display becomes yellowish.

The transmittance per film thickness of 3 μm at the wavelength of 400 nm is determined by the following method. The composition is spin-coated on a Tempax glass plate at an arbitrary rotation number using a spin coater, and prebaked at 115 ° C. for 2 minutes using a hot plate. Then, as bleaching exposure, PLA is used to expose the entire surface of the film with an ultra-high pressure mercury lamp at 6000 J / m ² (converted to a wavelength of 365 nm exposure amount), and is cured by heating at 250 ° C. in air for 1 hour using an oven. Is made. The ultraviolet-visible absorption spectrum of the obtained cured film is measured using MultiSpec-1500 manufactured by Shimadzu Corporation, and the transmittance at a wavelength of 400 nm per 3 μm thickness is obtained.

  This cured film is suitably used for a TFT planarizing film in a display element, an interlayer insulating film in a semiconductor element, or a core or cladding material in an optical waveguide.

  Examples of the element of the present invention include a display element, a semiconductor element, and an optical waveguide material. In addition, since the element of the present invention has the above-described cured film of high resolution, high hardness, high transparency, and high heat resistance of the present invention, in particular, a liquid crystal display or an organic EL display element used as a planarizing film for TFT. Is excellent in screen brightness and reliability.

  The present invention will be described below with reference to examples thereof, but the embodiment of the present invention is not limited to these examples. Of the compounds used in the examples and the like, those using abbreviations are shown below.

DAA: diacetone alcohol EDM: diethylene glycol ethyl methyl ether HPE: ethyl 2-hydroxypropionate GBL: γ-butyrolactone MB: 3-methoxybutanol DBA: 9,10-dibutoxyanthracene Synthesis example 1 Synthesis of polysiloxane solution (a) In a 500 mL three-necked flask, 279 g (1.2 mol) of 3-ethyl-3- (3-trimethoxysilylpropoxymethyl) oxetane (manufactured by Toagosei Co., Ltd., product name: TMSOX-D) and 192. 44 g While stirring at room temperature, an aqueous phosphoric acid solution in which 0.25 g of phosphoric acid was dissolved in 86.4 g of water was added over 10 minutes. Thereafter, the flask was immersed in an oil bath at 70 ° C. and stirred for 1 hour, and then the temperature of the oil bath was raised to 115 ° C. over 30 minutes. One hour after the start of temperature increase, the internal temperature of the solution reached 100 ° C., and was then heated and stirred for 30 minutes (the internal temperature was 100 to 110 ° C.). During the reaction, a total of 197 g of methanol and water as by-products were distilled. To the obtained DAA solution of polysiloxane, DAA was added so that the polymer concentration was 43% by weight to obtain a polysiloxane solution (a). The weight average molecular weight (Mw) of the obtained polymer was 5500, and the content of diol groups was 100 mom% relative to the Si atom of the polysiloxane. The weight average molecular weight of the polymer was measured in terms of polystyrene using GPC (gel permeation chromatography) (developing solvent: tetrahydrofuran, developing speed: 0.4 ml / min). The content of the diol group was determined by preparing a sample in which 1% by weight of benzene was mixed as a standard substance with the polysiloxane solution (a), and measuring elemental analysis and ¹ H-NMR. (Solvent used in ¹ H-NMR: CDCl ₃ )

Synthesis Example 2 Synthesis of Polysiloxane Solution (b) 101.13 g (0.55 mol) of phenyltrimethoxysilane, 3-ethyl-3- (3-triethoxysilylpropoxymethyl) oxetane (manufactured by Toagosei Co., Ltd., product) Name: TESOX-D) 115.38 g (0.38 mol), silica particle DAA solvent dispersion Quartron PL-2L-DAA (manufactured by Fuso Chemical Industries, Ltd .: silica particle 27.5% DAA solution) 77.45 g ( A silane atom of 0.35 mol) and DA4.5 (124.5 g) were charged into a 500 mL three-necked flask, and an aqueous phosphoric acid solution prepared by dissolving 0.177 g of phosphoric acid in 53.46 g of water was added over 30 minutes while stirring at room temperature. Thereafter, the flask was immersed in a 40 ° C. oil bath and stirred for 30 minutes, and then the oil bath was heated to 115 ° C. over 30 minutes. One hour after the start of temperature increase, the internal temperature of the solution reached 100 ° C., and was then heated and stirred for 60 minutes (the internal temperature was 100 to 110 ° C.). During the reaction, 89 g of methanol and water as by-products were distilled out. DAA was added so that the obtained polysiloxane DAA solution had a polymer concentration of 43% by weight to obtain a polysiloxane solution (b). The weight average molecular weight (Mw) of the obtained polymer was 5650. The diol group content is 30 mol% with respect to the Si atom of the polysiloxane, the phenyl group content is 42.5 mol% with respect to the Si atom, and the silica particle content is 27.5 mol% in terms of Si atom weight. Met. The content of the phenyl group was measured by measuring the ²⁹ Si-nuclear magnetic resonance spectrum of polysiloxane, and the ratio of the peak area of Si bonded to the phenyl group to the peak area of Si not bonded to the phenyl group.

Synthesis Example 3 Synthesis of Polysiloxane Solution (c) 13.99 g (0.1 mol) of methyltrimethoxysilane, 149.62 g (0.76 mol) of phenyltrimethoxysilane, and 3-trimethoxysilylpropyl succinic anhydride 35 .94 g (0.13 mol), 77.45 g of silica particle DAA solvent dispersion Quartron PL-2L-DAA (manufactured by Fuso Chemical Industry Co., Ltd .: 27.5% DAA solution of silica particles) 35 mol) was charged into a 500 mL three-necked flask, and an aqueous phosphoric acid solution prepared by dissolving 0.181 g of phosphoric acid in 40.05 g of water was added over 30 minutes while stirring at room temperature. Thereafter, the flask was immersed in a 40 ° C. oil bath and stirred for 30 minutes, and then the oil bath was heated to 115 ° C. over 30 minutes. One hour after the start of temperature increase, the internal temperature of the solution reached 100 ° C., and was then heated and stirred for 120 minutes (the internal temperature was 100 to 110 ° C.). During the reaction, 89 g of methanol and water as by-products were distilled out. DAA was added so that the obtained polysiloxane DAA solution had a polymer concentration of 43% by weight to obtain a polysiloxane solution (iii). The weight average molecular weight (Mw) of the obtained polymer was 6200. The succinic acid group content was 10 mol% with respect to Si atoms, the phenyl group content was 55 mol% with respect to Si atoms, and the silica particle content was 27.5 mol% in terms of Si atoms. The content of the succinic anhydride group was determined by preparing a sample in which 1% by weight of benzene as a standard substance was mixed with the polysiloxane solution (c), and measuring elemental analysis and ¹ H-NMR. (Solvent used in ¹ H-NMR: CDCl ₃ )

Synthesis Example 4 Synthesis of Polysiloxane Solution (d) 500 mL of 88.53 g (0.65 mol) of methyltrimethoxysilane, 69.41 g (0.35 mol) of phenyltrimethoxysilane, and 138.87 g of diacetone alcohol (DAA) A phosphoric acid aqueous solution in which 0.158 g of phosphoric acid (0.1 wt% with respect to the charged silane compound) was dissolved in 54 g of water was added over 30 minutes while stirring at room temperature. Thereafter, the flask was immersed in a 40 ° C. oil bath and stirred for 30 minutes, and then the oil bath was heated to 115 ° C. over 30 minutes. One hour after the start of temperature increase, the internal temperature of the solution reached 100 ° C., and was then heated and stirred for 25 minutes (the internal temperature was 100 to 110 ° C.). During the reaction, 96 g of methanol as a by-product, 24 g of water, and DAA were distilled out. DAA was added to the obtained DAA solution of polysiloxane so that the polymer concentration was 40% by weight to obtain a polysiloxane solution (d). The phenyl group content relative to Si atoms was 35 mol%. The weight average molecular weight (Mw) of the obtained polymer was 4000.

Synthesis Example 5 Synthesis of polysiloxane solution (e) 74.23 g (0.55 mol) of methyltrimethoxysilane, 69.41 g (0.35 mol) of phenyltrimethoxysilane, 21.82 g (0 of trifluoropropyltrimethoxysilane) 0.1 mol) and 132.4 g of DAA were charged into a 500 mL three-necked flask, and an aqueous phosphoric acid solution in which 0.319 g of phosphoric acid was dissolved in 52.02 g of water was added over 30 minutes while stirring at room temperature. Thereafter, the flask was immersed in a 40 ° C. oil bath and stirred for 30 minutes, and then the oil bath was heated to 115 ° C. over 30 minutes. One hour after the start of temperature increase, the internal temperature of the solution reached 100 ° C., and was then heated and stirred for 35 minutes (the internal temperature was 100 to 110 ° C.). During the reaction, 71 g of methanol as a by-product, 18 g of water, and DAA were distilled out. DAA was added to the obtained DAA solution of polysiloxane so that the polymer concentration was 40% by weight to obtain a polysiloxane solution (e). The phenyl group content relative to Si atoms was 35 mol%. The weight average molecular weight (Mw) of the obtained polymer was 4300.

Synthesis Example 6 Synthesis of Polysiloxane Solution (f) Methyltrimethoxysilane 23.84 g (0.175 mol), phenyltrimethoxysilane 109.10 g (0.55 mol), silica particle dispersion Quatron PL-2L-DAA ( Fuso Chemical Co., Ltd .: Silica particles 26.4% DAA solution) 62.58 g (0.28 mol in terms of silane atoms) and DAA 209.47 g were charged into a 500 mL three-necked flask and stirred at room temperature with 40. A phosphoric acid aqueous solution in which 0.181 g of phosphoric acid was dissolved in 05 g was added over 30 minutes. Thereafter, the flask was immersed in a 40 ° C. oil bath and stirred for 30 minutes, and then the oil bath was heated to 115 ° C. over 30 minutes. One hour after the start of temperature increase, the internal temperature of the solution reached 100 ° C., and was then heated and stirred for 15 minutes (the internal temperature was 100 to 110 ° C.). During the reaction, 71 g of methanol as a by-product, 18 g of water, and DAA were distilled out. DAA was added so that the obtained polysiloxane DAA solution had a polymer concentration of 40% by weight to obtain a polysiloxane solution (f). The phenyl group content with respect to Si atoms was 55 mol%. The weight average molecular weight (Mw) of the obtained polymer was 3500.

Synthesis Example 7 Synthesis of quinonediazide compound (a) Under a nitrogen stream, 21.23 g (0.05 mol) of TrisP-PA (trade name, manufactured by Honshu Chemical Industry Co., Ltd.) and 37.62 g of 5-naphthoquinonediazidesulfonyl acid chloride 0.14 mol) was dissolved in 450 g of 1,4-dioxane and brought to room temperature. Here, 15.58 g (0.154 mol) of triethylamine mixed with 50 g of 1,4-dioxane was added dropwise so that the temperature inside the system would not be 35 ° C. or higher. It stirred at 30 degreeC after dripping for 2 hours. The triethylamine salt was filtered and the filtrate was poured into water. Thereafter, the deposited precipitate was collected by filtration. This precipitate was dried with a vacuum dryer to obtain a quinonediazide compound (a) having an esterification rate of 93% and having the following structure.

Synthesis Example 8 Synthesis of quinonediazide compound (b) Under a dry nitrogen stream, TrisP-HPA (trade name, manufactured by Honshu Chemical Industry Co., Ltd.) 15.32 g (0.05 mol) and 5-naphthoquinonediazidesulfonyl acid chloride 30.9 g ( 0.115 mol) was dissolved in 450 g of 1,4-dioxane and brought to room temperature. Here, 13.03 g (0.127 mol) of triethylamine mixed with 50 g of 1,4-dioxane was added dropwise so that the temperature in the system would not be 35 ° C. or higher. It stirred at 30 degreeC after dripping for 2 hours. The triethylamine salt was filtered and the filtrate was poured into water. Thereafter, the deposited precipitate was collected by filtration. This precipitate was dried with a vacuum dryer to obtain a quinonediazide compound (b) having the following structure having an esterification rate of 93%.

Synthesis Example 9 Synthesis of acrylic resin solution (a) 5 g of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 g of diethylene glycol ethyl methyl ether (EDM) were charged into a 500 mL three-necked flask. Subsequently, 25 g of styrene, 20 g of methacrylic acid, 45 g of glycidyl methacrylate and 10 g of tricyclo [5.2.1.0 ^2,6 ] decan-8-yl methacrylate were charged and stirred for a while at room temperature, and then the atmosphere in the flask was replaced with nitrogen. Thereafter, the flask was immersed in an oil bath at 70 ° C. and stirred with heating for 5 hours. To the obtained EDM solution of acrylic resin, EDM was further added so that the polymer concentration was 43% by weight to obtain an acrylic resin solution (a). In addition, the weight average molecular weight (Mw) of the obtained polymer was 15000.

Synthesis Example 10 Synthesis of Novolak Resin Solution (a) In a 2 L separable flask equipped with a condenser and a stirrer, 172.8 g (1.6 mol) of m-cresol, 36.6 g of 2.3-dimethylphenol (0. 3 mol), 3.4-dimethylphenol 12.2 g (0.1 mol), 37 wt% aqueous formaldehyde solution 12.6 g (formaldehyde: 1.5 mol), oxalic acid dihydrate 12.6 g (0.1 mol) and After adding 554 g of methyl isobutyl ketone and stirring for 30 minutes, the mixture was allowed to stand for 1 hour. The upper layer separated into two layers was removed by decantation, ethyl 2-hydroxypropionate (HPE) was added, and residual methyl isobutyl ketone and water were removed by concentration under reduced pressure to obtain an HPE solution of novolak resin. HPE was added to the obtained HPE solution of novolak resin so that the polymer concentration was 43% by weight to obtain an HPE solution (a) of novolak resin. In addition, the weight average molecular weight (Mw) of the obtained polymer was 23000.
Moreover, the structure of the compound used in an Example etc. is shown below.

Example 1
Under a yellow light, quinonediazide compound (a) 0.3317 g (9 parts by weight), SP-077 (trade name, manufactured by ADEKA Corporation) 0.074 g (2 parts by weight), “Nicarak” MX-270 (trade name) , Sanwa Chemical Co., Ltd.) 0.074 g (2 parts by weight), 9,10-dibutoxyanthracene (DBA, Kawasaki Kasei Co., Ltd.) 0.0111 g (0.3 parts by weight), DAA / γ-butyrolactone (GBL) / 3-methoxybutanol was dissolved in a mixed solution of 5.5735 g of DAA, 3.172 g of GBL and 1.586 g of MB so that the weight ratio was 70/20/10. It was. Next, 9.2 g of the polysiloxane solution (a) corresponding to 100 parts by weight of the resin solid content, 0.001 g of BYK-333 (produced by Big Chemie Japan Co., Ltd.), which is a silicone surfactant, (Corresponding to a concentration of 50 ppm) and stirred. Subsequently, it filtered with the filter of the hole diameter of 0.45 micrometer, and obtained the photosensitive siloxane composition. The resulting composition is referred to as Composition 1.

After spin-coating the prepared composition 1 on a Tempax glass plate (Asahi Techno Glass plate Co., Ltd.) and a silicon wafer using a spin coater (Mikasa Co., Ltd. 1H-360S) at an arbitrary rotational speed, Prebaking was performed at 115 ° C. for 2 minutes using a hot plate (SCW-636 manufactured by Dainippon Screen Mfg. Co., Ltd.) to prepare a prebaked film having a thickness of 4 μm. Using the gray scale mask for the pre-baked film, using a parallel light mask aligner (hereinafter referred to as PLA) (PLA-501F manufactured by Canon Inc.) and using g-ray + h-line + i-line (light having a wavelength of about 350 nm to 450 nm). The maximum i-line exposure was 20 to 2000 J / m ² . Note that a gray scale mask can be exposed in a batch from 1% (20 J / m ² ) to 100% (2000 J / m ² ) under the mask by exposing 2000 J / m ² from above the mask. It is a mask. Thereafter, ELM-D (manufactured by Mitsubishi Gas Chemical Co., Ltd.), which is a 2.38% tetramethylammonium hydroxide aqueous solution, is converted into pure water using an automatic developing device (AD-2000, manufactured by Takizawa Sangyo Co., Ltd.). Each of the two types of diluted 0.4% tetramethylammonium hydroxide aqueous solution and 0.04% potassium hydroxide aqueous solution was used for shower development for 80 seconds and then rinsed with water for 30 seconds. Thereafter, as bleaching exposure, PLA-501F (manufactured by Canon Inc.) was used to expose the entire surface of the film with an ultrahigh pressure mercury lamp at 6000 J / m ² (wavelength 365 nm exposure conversion). Then, soft-baking is performed for 2 minutes at 90 ° C. using a hot plate (Dainippon Screen Manufacturing Co., Ltd. SCW-636), and then using an oven (Espec Co., Ltd. IHPS-222) at 1 ° C. in air at 220 ° C. Curing was performed for a time to produce a cured film. Let the obtained cured film be a cured film with a pattern.

  The results of development with a 0.4% tetramethylammonium hydroxide aqueous solution are shown in Table 2, and the results of development with a 0.04% potassium hydroxide aqueous solution are shown in Table 3. The evaluation in the table was performed by the following method. The following evaluations (1), (2), (3), and (4) were performed using a silicon wafer as the substrate, and (5) was performed using a Tempax glass plate.

(1) Film thickness measurement Using Dainippon Screen Mfg. Co., Ltd. Lambda Ace STM-602, the thickness of the prebaked film and the cured film was measured at a refractive index of 1.50.

(2) Residual film ratio The residual film ratio is determined by applying the composition onto a silicon wafer, pre-baking on a hot plate at 100 ° C. for 120 seconds, and developing the film after pre-baking. If the exposed part film thickness is (II),
The remaining film ratio (%) = (II) × 100 / (I).

(3) Sensitivity The exposure amount that forms a 10 μm line-and-space pattern in a one-to-one width after exposure and development (hereinafter referred to as the optimum exposure amount) was defined as sensitivity.

(4) Resolution The minimum pattern size obtained after development at the optimum exposure amount was defined as post-development resolution, and the minimum pattern size after curing was defined as post-cure resolution.

(5) Measurement of light transmittance First, only the Tempax glass plate was measured using MultiSpec-1500 (manufactured by Shimadzu Corporation), and the UV-visible absorption spectrum was used as a reference. Next, each prebaked film formed on the Tempax glass as described above was shower-developed with a 0.4% tetramethylammonium hydroxide aqueous solution at 23 ° C. for 60 seconds to obtain PLA (PLA-501F, manufactured by Canon Inc.). Was irradiated with 6000 J / m ^{2 in} terms of i-line. Soft baking was performed on a hot plate at 90 ° C. for 2 minutes, followed by curing in an oven at 220 ° C. for 1 hour to form a cured film on the glass. Using this as a sample, measurement was performed with a single beam using the sample, the light transmittance at a wavelength of 400 nm per 3 μm was obtained, and the transmittance of the cured film was calculated based on the reference.

Example 2
Except that the polysiloxane solution (a) was replaced with the polysiloxane solution (b), 10 parts by weight of the quinonediazide compound (a) was used, and SP-077, “Nicarac” MX-270, and DBA were not used, Example 1 In the same manner, composition 2 was obtained. The evaluation results are shown in Tables 2 and 3.

Example 3
Example 1 except that the polysiloxane solution (a) was replaced with the polysiloxane solution (c), 15 parts by weight of the quinonediazide compound (a) was used, and SP-077, “Nicalac” MX-270, and DBA were not used. It carried out similarly and obtained the composition 3. The evaluation results are shown in Tables 2 and 3.

Example 4
9.2 g of the polysiloxane solution (a), 4.6 g of the polysiloxane solution (b) corresponding to 50 parts by weight of the resin solid content and 4.6 g of the polysiloxane solution (c) corresponding to 50 parts by weight of the resin solid content 10 parts by weight of the quinonediazide compound (a) was used, and SP-077 was changed to 2 parts by weight of benzyl-4-hydroxyphenylmethylsulfonium trifluoromethanesulfonate, and “Nicarac” MX-270, A composition 4 was obtained in the same manner as in Example 1 except that DBA was not used. The evaluation results are shown in Tables 2 and 3.

Example 5
9.2 g of the polysiloxane solution (a) is added to 7.36 g of the polysiloxane solution (a) corresponding to 80 parts by weight of the resin solid content and 1.84 g of the polysiloxane solution (d) corresponding to 20 parts by weight of the resin solid content. In the same manner as in Example 1 except that the quinonediazide compound was changed to 15 parts by weight, and SP-077 was changed to TPS-PFBS (manufactured by Toyo Gosei Co., Ltd.). Obtained. The evaluation results are shown in Tables 2 and 3.

Comparative Example 1
A composition 6 was obtained in the same manner as in Example 1 except that the polysiloxane solution (a) was changed to the polysiloxane solution (d) and the quinonediazide compound was changed to 15 parts by weight. The evaluation results are shown in Tables 2 and 3.

Comparative Example 2
Except that the polysiloxane solution (a) was changed to the polysiloxane solution (e), the amount of the quinonediazide compound (a) was changed to 15 parts by weight, and SP-077, “Nicarac” MX-270, and DBA were not used. In the same manner as in Example 1, a composition 7 was obtained. The evaluation results are shown in Tables 2 and 3.

Comparative Example 3
A composition 8 was obtained in the same manner as in Example 1 except that the polysiloxane solution (a) was changed to the polysiloxane solution (f) and the amount of the quinonediazide compound (a) was changed to 15 parts by weight. The evaluation results are shown in Tables 2 and 3.

Comparative Example 4
Under a yellow light, 2.64 g (30 parts by weight) of the quinonediazide compound (a) and 0.88 g (10 parts by weight) of Epicoat 828 (manufactured by Japan Epoxy Resin Co., Ltd.) were dissolved in 5.94 g of EDM. Acrylic resin solution (a) 20.52 g (resin solid content corresponds to 100 parts by weight), BYK-333 (manufactured by Big Chemie Japan Co., Ltd.) 0.0015 g (corresponding to a concentration of 50 ppm relative to the total amount of the composition) Added and stirred. Subsequently, it filtered with a 0.45 micrometer filter and the obtained composition was set as the composition 9. FIG. The evaluation results are shown in Tables 2 and 3.

Comparative Example 5
Under a yellow light, it was dissolved in 0.965 g (10 parts by weight) of quinonediazide compound (b) and 6.58 g of HPE. Add 22.44 g of novolak resin solution (a) (resin solid content corresponds to 100 parts by weight), 0.0015 g of BYK-333 (produced by Big Chemie Japan Co., Ltd.) (corresponds to a concentration of 50 ppm relative to the total amount of the composition) Stir. Next, filtration was performed with a 0.45 μm filter, and the resulting composition was designated as Composition 10. The evaluation results are shown in Tables 2 and 3.

Claims (5)

(A) Photosensitive siloxane composition containing polysiloxane which is a copolymer obtained by hydrolysis and condensation of a compound represented by the following general formula (1), (b) a quinonediazide compound, and (c) a solvent. .

(At least one of R ¹ represents an alkyl group or an oxyalkyl group oxetanyl group or succinic anhydride groups substituted, other R ¹ represents hydrogen, an alkyl group having 1 to 10 carbon atoms, from 2 to 10 carbon atoms alkenyl group, represented by any of the aryl group having 6 to 15 carbon atoms, more R ¹ s may be the same or different from each .R ² is hydrogen, an alkyl group having 1 to 6 carbon atoms, 1 to carbon atoms 6 represents an acyl group of 6 or an aryl group of 6 to 15 carbon atoms, and a plurality of R ² may be the same or different, and x represents an integer of 1 to 3). The photosensitive resin according to claim 1, wherein the polysiloxane (a) is a copolymer obtained by hydrolysis and condensation of the compound represented by the general formula (1) and the compound represented by the following general formula (2). Siloxane composition.

(R ³ represents any one of hydrogen, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, and an aryl group having 6 to 15 carbon atoms, and a plurality of R ³ may be the same or different. R ⁴ represents any one of hydrogen, an alkyl group having 1 to 6 carbon atoms, an acyl group having 1 to 6 carbon atoms, and an aryl group having 6 to 15 carbon atoms, and a plurality of R ⁴ may be the same or different. Y represents an integer of 0 to 3.) The photosensitive siloxane composition according to claim 1 or 2, wherein (a) the polysiloxane is a copolymer and contains silica particles chemically bonded to at least a part of the polysiloxane. The cured film formed from the photosensitive siloxane composition in any one of Claims 1-3. An element comprising the cured film according to claim 4.