JP2008041870A - Charged particle beam deflector array, aligner using the same, and device manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem wherein the electrode number increases, while keeping the disposition pitch of two-dimensionally disposed electrodes in order to realize a multi-beam charged particle beam contributing to the throughput improvement, by increasing the beam number to enlarge the view angle without deteriorating the resolution, but this thins the control signal transmission lines to electrodes and thus layers need to be multiple, to increase the wiring wire number etc., and it becomes difficult to thin with keeping the transmission characteristics and there is a limit to layer multiplication. <P>SOLUTION: The charged particle beam aligner, having a wide view angle high speed operable deflection electrode array, takes a charged particle beam deflector array, having a plurality of apertures that have a structure of deflection electrodes bonded to each other in a plurality of stages. The aligner comprises wirings from applying control signals to two-dimensionally disposed electrodes so as not to overlap with each the stage, thereby ensuring a wiring structure that holds sufficient characteristics for the transmission, without having to increase the disposition pitch of the electrodes. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a charged particle beam deflector array for controlling deflection of a charged particle beam such as an electron beam or an ion beam, an exposure apparatus using the array, and a device manufacturing method. In particular, the present invention relates to a technique for controlling a charged particle beam at a high speed when performing drawing while controlling irradiation of a plurality of charged particle beams in a charged particle beam exposure apparatus such as an electron beam exposure apparatus or an ion beam exposure apparatus.

An example of a conventional raster scan type single beam load current line exposure apparatus is shown in FIG.
The charged particle beam from the electron source 1 that emits the charged particle beam forms an image of the electron source 1 by the electron lens 2. The electron source image is reduced and projected onto the sample 8 through a reduction electron optical system including the electron lenses 4 and 7. The blanker 3 is an electrostatic deflector located at the position of the image of the electron source 1 formed by the electron lens 2, and deflects the charged particle beam and blocks it with a blanking aperture 5 located on the pupil of the reduction electron optical system. And controls whether to irradiate or shield the charged particle beam. The electrostatic deflector 6 raster-scans the load current line and controls the irradiation of the load current line by the blanker 3 in synchronization with the scan, thereby drawing a specific pattern on the sample 8.

  However, a single beam charged particle beam exposure apparatus has a low throughput. As an apparatus for solving this problem, an exposure apparatus using a plurality of charged particle beams has been proposed. For example, using a plurality of charged particle beams, a specific pattern is drawn in a minute region serving as a plurality of units. A pattern area of a certain size is drawn by combining these minute areas. By doing so, a raster scan type multi-beam charged particle beam exposure apparatus aiming at widening the angle of view and improving the throughput has been proposed (for example, Patent Document 1).

In order to increase the commercial value of the charged particle beam exposure apparatus, it is indispensable to improve the throughput, and in order to target small and medium volume products, further improvement in throughput is desired.
In the charged particle beam exposure apparatus, a specific drawing pattern is exposed by moving the charged particle beam to a specific position and repeating drawing. Further, since the area that can be irradiated at one time is extremely small as compared with a light exposure device, so-called stepper or scanner, it is necessary to repeat the above movement many times. It is also well known that the waiting time until the position is settled due to the movement hinders throughput improvement. Therefore, in order to achieve an improvement in throughput, it is desirable to reduce the waiting time for position setting by widening the drawing range in one electron source 9, that is, the angle of view. As the angle of view increases, the number of times of waiting for position setting can be reduced, which contributes to an improvement in throughput. That is, widening the angle of view leads to an improvement in throughput.

  Increasing the angle of view increases the range of the subfield 32 shown in FIG. For this purpose, it is conceivable to increase the number of charged particle beams divided by the aperture 13 from the electron source 9 shown in FIG. It is necessary to increase the electrostatic lens 14 and the blanker array 15 for controlling the divided charged particle beams by the increased amount.

However, increasing the number of electrodes means increasing the number of wirings 103 to the electrodes. Maintaining transmission characteristics within a limited range while maintaining the distance between the electrode arrays is contradictory to increasing the number of wires. Decreasing the transmission characteristics leads to a delay in the blanking time for drawing. This naturally leads to a deterioration in throughput.
Therefore, in order not to deteriorate the throughput, it is necessary to maintain the transmission characteristics. For this purpose, it is apparent that a design that requires a certain cross-sectional area of the wiring pattern and that the wiring length is not increased is necessary.

  In addition, when the number of electrodes is increased, it is necessary to widen the distance between the electrode arrays in order to maintain the cross-sectional area of the wiring pattern in order to maintain the characteristics of the transmission path. This means that the exposure region 31 that is handled by one charged particle beam in FIG. 3 is expanded. The fact that the range is wide means that the deflection angle becomes large, so that the vicinity of the outer periphery of the single exposure area 31 causes blurring due to the influence of aberration or the like and the deterioration of positional accuracy than the vicinity of the center. I can easily imagine that.

Therefore, it is obvious that there is a limit to expanding the exposure region 31 that is handled by one charged particle beam.
Therefore, it can be seen that increasing the number of electrodes has a limit point at some point.
It is clear that increasing the number and increasing the angle of view without changing the arrangement pitch of the deflection electrodes 100 contributes to improving the throughput of the charged particle beam exposure apparatus without reducing the drawing resolution.

In order to cope with the increase in the number of electrodes, a device using a multilayer wiring device for lead-out wiring from electrodes has been proposed. In this case, a plurality of transmission lines connected from the control signal generation unit by a cable through the multilayer wiring device, the wiring board, and the relay board are configured from the plurality of electrodes. However, high-density wiring and mounting while maintaining high-speed transmission are still difficult, and have been realized by various devices (for example, Patent Document 2).
JP 2003-203836 A JP 2004-282038 A

However, market development is accelerating and further throughput requirements are emerging.
In order to achieve the required throughput, it is conceivable to increase the number of beams, but in order to increase the number of beams, the area of the deflection electrode array 102 becomes large. Will extend.
As the wiring length becomes longer, it is necessary to increase the wiring width in order to maintain high speed. For this purpose, it can be easily imagined that the area of the wiring region must be increased.
It can be solved simply by increasing the number of wiring device layers, but there is a limit to this.
An object of the present invention is to solve the problems in the above-described conventional example. That is, an object is to increase the number of electrodes without reducing the control speed.

  In order to solve the above problems, a charged particle beam deflector array of the present invention includes one or a plurality of deflection electrode array substrates and a plurality of multilayer wiring substrates that sandwich the deflection electrode array substrates from above and below. A plurality of charged particle beam deflector openings and electrodes are two-dimensionally arranged on the deflection electrode array substrate. In the multilayer wiring board, openings are formed at positions corresponding to the plurality of openings, and lead-out wirings for applying control signals to the electrodes are formed.

  According to the present invention, it is possible to expect an increase in the number of electrodes more than twice while maintaining the wiring characteristics such as the control speed without increasing the electrode arrangement pitch on the extension line of the current technology. In other words, the number of electrodes can be increased more than twice without expanding the drawing area per beam. Therefore, the improvement of the throughput, which is a problem of the charged particle beam exposure apparatus, can be expected, and the development to small and medium volume products can be expected.

Next, embodiments of the present invention will be listed.
[Embodiment 1] Means for forming a plurality of charged particle beams arranged at predetermined intervals, individually correcting the shape and arrangement of the charged particle beams, and correcting them to an accurate arrangement, or individually charged particle beams It is a deflector array used as a means for blanking. It is used in a charged particle beam exposure apparatus that irradiates an object (sample) with a charged particle beam corresponding to a pattern to be drawn by irradiating and shielding the plurality of charged particle beams corrected to an accurate arrangement. Charged particle beam deflection using a structure composed of a deflection electrode array of an mxn (m and n are arbitrary positive numbers) array and a multilayer wiring device as a deflector for the array correction or for performing individual blanking Is a container array. A structure in which a control signal wiring for applying a control signal of each electrode is drawn out from an electrode portion of a two-dimensionally arranged deflection electrode array of m × n array by a multilayer wiring device, an upper surface of the m × n array of deflection electrode array, And a structure that is sandwiched from the lower surface is used.
Then, the number of electrodes is easily increased while maintaining the transmission characteristics of the control signal wiring.

[Embodiment 2] An m × n array of deflection electrode arrays is realized by laminating m × n array of two-dimensionally arrayed deflection electrode arrays in multiple stages.
[Embodiment 3] In the electrode array of the two-dimensionally arranged deflection electrode array of each m × n array to be bonded, there is no wiring for applying a control signal at a position corresponding to the other electrode portion to be bonded facing ( Electrode only).
[Embodiment 4] The electrode arrangement with or without wiring for applying the control signal in the m × n arrangement deflection electrode array for each stage to be bonded is arranged in a staggered manner every other or plural. Alternatively, it is arranged for each block or for each block of m ₁ × n ₁ (m ₁ and n ₁ are arbitrary positive numbers and smaller than m and n, respectively). At this time, the electrodes with wiring in the m × n arrangement of the deflection electrode array electrodes are configured so as not to overlap each other for each stage to be bonded.

[Embodiment 5] The electrode arrangement of each of the m × n arrangement of deflection electrode arrays to be bonded is formed by joining opposite electrodes together to improve the deflection sensitivity by increasing the thickness direction or to reduce the amplitude in the applied control signal. Make it voltage.
[Embodiment 6] The electrode array of each of the m × n deflecting electrode arrays to be bonded has no electrode (only a hole) in a portion corresponding to the other electrode portion to be bonded facing each other.
[Embodiment 7] The arrangement of the presence / absence of electrodes in the m × n arrangement of deflection electrode arrays is arranged in a zigzag pattern every other one or more. Alternatively, it is arranged for each block or for each block of m ₁ × n ₁ (m ₁ and n ₁ are arbitrary positive numbers and smaller than m and n, respectively). And it is comprised so that the electrodes with a wiring in the deflection electrode array electrode of a mutual mxn arrangement | sequence which are bonded together may not overlap.

In the deflector array according to the preferred embodiment of the present invention, the shield plate 37 in the structure of the conventional deflector array (FIGS. 12 and 13) is replaced with the multilayer wiring device 35 as in the structure of FIG. It has been replaced with an equivalent one. Thereby, a double wiring area is secured. FIG. 4 will be briefly described. Multilayer wiring devices 50a and 50b are bonded to the deflection electrode array 51 on both the upper and lower sides to construct the multilayer wiring layers 52a and 52b, thereby realizing twice the wiring amount with respect to the structure of FIGS. Will do. FIG. 5 is an enlarged view of one electrode of FIG. Multilayer wiring devices 55a and 55b, which are multilayer wiring boards, are bonded in the vertical direction of a deflection electrode array 56 having a plurality of deflection electrodes 58a and 58b, thereby realizing multilayer wiring layers 57a and 57b corresponding to twice the conventional one.
In the multilayer wiring devices 55a and 55b, which are multilayer wiring boards, openings are formed at positions corresponding to a plurality of openings of the deflection electrode array 56 having a plurality of deflection electrodes 58a and 58b, and a control signal is applied to each electrode. Lead wires are formed for this purpose.
The multilayer wiring device is provided on both the upper surface and the lower surface of the deflection electrode array substrate.

  Similarly, as shown in FIG. 7, the shield plate 37 in the structure of FIG. 12 is prepared by removing the shield plate 37 in FIG. In other words, the number of electrodes of the electrode array 36 can be reduced while utilizing the wiring characteristics equivalent to the conventional one by using two structures in which the deflection electrode array 36 is bonded to the multilayer wiring device 35 and adopting a structure in which they are bonded together. It is realized to increase.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows a schematic configuration of a charged particle beam exposure apparatus according to an embodiment of the present invention.
In FIG. 1, the charged particle beam emitted from the electron source 9 forms an electron source image 11 of the electron source 9 via the beam shaping optical system 10. The charged particle beam from the electron source image 11 becomes a parallel charged particle beam by the collimator lens 12. Parallel charged particle beams pass through an aperture array 13 having a plurality of openings. The aperture array 13 has a plurality of openings and divides one charged particle beam into a plurality of charged particle beams. The plurality of charged particle beams divided by the aperture array 13 form an intermediate image of the electron source image 11 by the electrostatic lens array 14 in which a plurality of electrostatic lenses are formed. A blanker array 15 in which a plurality of blankers that are electrostatic deflectors are formed is disposed on the intermediate image plane.

  Downstream of the intermediate image plane is a reduction optical system 16 composed of two stages of symmetrical magnetic tablet lenses 16 a and 16 b, and a plurality of intermediate images are projected onto the wafer 17. At this time, since the load element wires deflected by the blanker array 15 are blocked by the blanking aperture 24, the wafer 17 is not irradiated. On the other hand, the charged particle beam that is not deflected by the blanker array 15 is not blocked by the blanking aperture 24 and is therefore irradiated on the wafer 17.

In the lower doublet lens 16b, an electrostatic deflector 18 for simultaneously displacing a plurality of charged particle beams to specific positions in the X and Y directions, and a focus coil for simultaneously adjusting the focus of the plurality of charged particle beams 20 is arranged.
The stage 21 carries the wafer 17 and is movable in the XY directions orthogonal to the optical axis. An electrostatic chuck 23 for fixing the wafer 17 and an electron beam shape detector 22 which is a semiconductor detector for measuring the shape of each charged particle beam are arranged on the stage 21.

FIG. 2 shows a system configuration example in the charged particle beam exposure apparatus of FIG.
In FIG. 2, a blanker array control circuit 25 is a circuit that individually controls a plurality of blankers constituting the blanker array 15. The deflector control circuit 26 is a circuit that controls the electrostatic deflector 18. The electron beam shape detection circuit 27 is a circuit that processes a signal from the electron beam shape detector 22. The focus control circuit 28 adjusts the focal length by controlling the focus coil 20 and controls the focal position of the reduction electron optical system 16. The stage drive control circuit 29 is a control circuit that drives and controls the stage 21 in cooperation with a laser interferometer (not shown) that detects the position of the stage. The main control system 30 controls the plurality of control circuits and manages the entire charged particle beam exposure apparatus.

  The main control system 30 commands the deflection control circuit 26 based on the exposure control data. Based on such information, the electrostatic deflector 18 deflects a plurality of charged particle beams. Further, in synchronization with them, the blanker array control circuit 25 is commanded, and control signals are transmitted to the deflection electrodes 46a and 46b (see FIG. 14) of the blanker array 15 based on command values corresponding to the pixels to be exposed on the wafer 17. Apply via 47. The charged particle beam is individually deflected by the applied control signal. The deflected charged particle beams are individually shielded or passed by the blanking aperture 24 and turned on / off. The upper limit of the speed at which the deflection electrodes 46a and 46b are controlled is the speed of the control signal that can be transmitted by the wiring pattern 47, and the processing capability of the apparatus is restricted.

A drawing method in this embodiment is shown in FIG.
Each of the charged particle beams 34 divided into a plurality is subjected to raster scan exposure of the corresponding exposure region 31 of each charged particle beam on the wafer 17. The exposure region 31 of each charged particle beam is set so as to be adjacent in two dimensions, and as a result, a subfield 32 composed of a plurality of exposure regions 31 that are exposed simultaneously is exposed.
After exposing the subfield 32a, the main control system 30 instructs the deflection control circuit 26 to control the main deflector 19 in order to expose the next subfield 32b. Deflection of charged particle beam. Sequentially, the above operation is repeated up to a specific area to perform specific drawing.

An example of a conventional deflection electrode array is shown in FIG. Such a deflection electrode array can be applied to the electrostatic lens array 14 and the blanker array 15 in FIG.
The multi-beam charged particle beam exposure apparatus is called a deflector array 102 in which the deflectors 100 are arranged in an array at a pitch of several μm to several hundred μm, and individually controls irradiation of a plurality of charged particle beams.

Since the wiring 103 for transmitting an electric signal for driving the deflector array 102 is wired to the deflection electrodes 101 arranged at a high density, it has a high-density structure like the electrodes. In particular, since the wiring area between the deflectors 100 is narrow, the density becomes higher.
Wiring is realized by a wiring board in which a deflection electrode control signal wiring layer 38 is formed on a substrate by a semiconductor technology by a multilayer wiring structure.

12 and 13 are cross-sectional structural examples of conventional multilayer wiring. The structure of the SiO ₂ insulator layer 107 and the multilayer wiring 108 is alternately laminated on the Si substrate 106 to form a multilayer wiring having a high wiring width of several μm and a high wiring spacing. FIG. 14 shows an example of wiring in a conventional deflector electrode array, in which wirings 47a and 47b for applying control signals to the deflection electrodes 49a and 49b are arranged. In FIG. 14, the deflection electrode 47a is not shown because it is wired on the inner layer side of the deflection electrode control signal wiring layer 44. Reference numeral 48 denotes an aperture (opening).
Conventionally, the multi-layer wiring devices 35 and 41 have a one-stage structure with respect to one stage of the deflection electrode arrays 36 and 42. Therefore, in order to increase the number of deflection electrode arrays, it is necessary to increase the wiring area or make the wiring thinner.

In this embodiment, the multilayer wiring device has a multi-stage configuration (for example, two stages in FIGS. 4 to 5) such as 50a, 50b and 55a, 55b in FIGS. This corresponds to an increase in the number of deflection electrode arrays.
According to the present embodiment, it is possible to secure a wiring area corresponding to the number of stages without increasing the electrode arrangement pitch of each deflection electrode array. If the wiring area is increased, it is possible to generate without reducing the transmission characteristic of the control signal (without thinning the wiring). Further, since the arrangement pitch of the deflection electrode array is not changed, it is possible to provide a device capable of widening the angle of view while maintaining the drawing accuracy without expanding the drawing region 31 (see FIG. 3) per beam. It becomes. Increasing the number of deflecting electrode arrays means increasing the distance from the center, but in the wiring area that secures that amount, the wiring pattern is expanded to secure the cross-sectional area of the pattern, and transmission characteristics It corresponds to deterioration.

  By applying the deflection electrode array realized by the present embodiment to, for example, the electrostatic lens array 14 or the blanker array 15 in FIG. 1, it contributes to widening the angle of view of the charged particle beam exposure apparatus. If it is possible to widen the angle of view without degrading accuracy, it is possible to contribute to improving the throughput of the exposure apparatus.

[First embodiment]
FIG. 4 shows the configuration of the deflector array according to the first embodiment of the present invention. FIG. 5 is an enlarged view of one deflector portion in the deflector array of FIG. As shown in FIG. 4, this deflector array has a two-stage laminated structure of multilayer wiring devices 50a and 50b which are multilayer wiring boards in the vertical direction. Then, the wirings in the upper and lower wiring boards (50a, 50b) with respect to the electrodes 53a, 53b are arranged one by one (FIG. 6), a plurality of wirings, or an m × n arrangement. Then, by arranging the control signals so as not to be wired at the same position on the same electrode after bonding, the wiring area can be doubled with the current technology. Considering the increase in the number of layers of the multilayer wiring devices 50a and 50b, a considerable increase in the number of electrode wirings can be expected due to a synergistic effect. For this reason, it is possible to increase the limit of the number of electrodes by maintaining the transmission characteristics of the control signal more than twice with the current technology.
Multilayer wiring devices 50a and 50b, which are multilayer wiring boards, are formed with openings at positions corresponding to a plurality of openings of a deflection electrode array having a plurality of deflection electrodes, and lead wires for applying control signals to the electrodes. Is formed.

[Second Embodiment]
Also, as shown in FIG. 7, the structure of the electrode array + multilayer wiring device is stacked in an n-stage structure (two stages in FIG. 7), so that the wiring ratio per electrode in the wiring arrangement at each stage can be increased. It becomes possible to use 1 / n stages. In that case, wiring to all the electrodes becomes possible by adopting a structure in which an electrode without wiring and an electrode portion with wiring at least somewhere in n stages overlap. By using such a multi-stage structure, it is possible to avoid a reduction in the area of the control signal wiring to each electrode due to an increase in the number of electrodes and to maintain transmission characteristics.

[Third embodiment]
In addition, when n stages are stacked as shown in FIG. 8 (FIG. 8 is two stages), an electrode is not provided in the inner electrode portion of the wiring, and an electrode array structure having only openings (holes) is provided. The process for manufacturing the electrode array becomes easier and the yield can be improved.

[Fourth embodiment]
In addition, when n stages are stacked as shown in FIG. 9 (two stages in FIG. 9), the vertical thickness of the electrode per stage is set to 1 / n times so that the vertical direction of the electrode can be increased by only one stage. The manufacturing process becomes much easier than the process of creating a thick electrode structure, and the yield can be improved. Even if the electrode structure of each stage is thinned, the required thickness of the electrodes can be configured by bonding n stages, so that an electrode maintaining deflection sensitivity can be constructed.

[Industrial applicability]
By adopting a deflection electrode array made by implementing these structures in a charged particle beam exposure apparatus, it is expected that the number of charged particle beams will be dramatically increased while maintaining the extension of the current technology. In addition, since the drawing area per beam is not expanded, the angle of view can be easily increased while maintaining the resolution, leading to an improvement in throughput as a charged particle beam drawing apparatus.
Although the semiconductor industry is expected to have a high resolution, it has not been adopted for actual production due to its low throughput. However, it can be expected to be used for small and medium-sized products.

[Example of device manufacturing]
Next, a manufacturing process of a microdevice (a semiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD, a thin film magnetic head, a micromachine, etc.) using the above-described exposure apparatus will be described.
FIG. 15 shows a flow of manufacturing a semiconductor device.
In step 1 (circuit design), a semiconductor device circuit is designed. In step 2 (EB data conversion), exposure control data for the exposure apparatus is created based on the designed circuit pattern.
On the other hand, in step 3 (wafer manufacture), a wafer placed in a vacuum is manufactured using a material such as silicon. Step 4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by lithography using the wafer and the exposure apparatus to which the prepared exposure control data is input.
The next step 5 (assembly) is called a post-process, and is a process for forming a semiconductor chip using a wafer which is a substrate to be exposed produced in step 4. The post-process includes assembly processes such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). In step 6 (inspection), the semiconductor device manufactured in step 5 undergoes inspections such as an operation confirmation test and a durability test. A semiconductor device is completed through these processes, and is shipped in Step 7.

  The wafer process in step 4 includes an oxidation step for oxidizing the surface of the wafer, a CVD step for forming an insulating film on the wafer surface, and an electrode formation step for forming electrodes on the wafer by vapor deposition. Also, an ion implantation step for implanting ions into the wafer, a resist processing step for applying a photosensitive agent to the wafer, and an exposure step for printing and exposing the circuit pattern on the wafer after the resist processing step by the exposure apparatus described above. Further, there are a development step for developing the wafer exposed in the exposure step, an etching step for removing portions other than the resist image developed in the development step, and a resist stripping step for removing the resist that has become unnecessary after the etching. By repeating these steps, multiple circuit patterns are formed on the wafer.

It is a schematic block diagram of the charged particle beam exposure apparatus which concerns on one Example of this invention. It is a system block diagram of the charged particle beam exposure apparatus of FIG. It is a figure explaining an example of the drawing method in a charged particle beam exposure apparatus. It is a schematic diagram which shows the cross-section of the bonding device which concerns on the 1st Example of this invention. It is a schematic diagram which shows the cross-sectional structure for 1 electrode of the device of FIG. It is a schematic diagram which shows the wiring arrangement | sequence of the multistage bonding device which concerns on the Example of this invention. It is a schematic diagram which shows the cross-sectional structure of the bonding device which concerns on the 2nd Example of this invention. It is a schematic diagram which shows the cross-section of the multistage (electrode nesting type) bonding device which concerns on the 3rd Example of this invention. It is a schematic diagram which shows the cross-section of the multistage (thin electrode) bonding device which concerns on the 4th Example of this invention. It is explanatory drawing of the conventional raster scan type charged particle beam exposure apparatus. It is a figure explaining the example of wiring drawing-out of the conventional wiring device. It is a schematic diagram explaining the conventional deflection electrode array cross-section. It is an enlarged view corresponding to one electrode in a schematic diagram of a cross-sectional structure of a conventional deflection electrode array. It is a schematic diagram which shows an example of the conventional deflection electrode array wiring. It is a figure explaining the flow of the manufacturing process of a device.

Explanation of symbols

1: Electron source 2: Beam shaping electron lens 3: Blanker 4: Reduction optical system electron lens 5: Blanking aperture 6: Electrostatic deflector 7: Reduction optical system electron lens 8: Wafer 9: Electron source 10: Beam shaping Optical system 11: Electron source image 12: Collimator lens 13: Aperture array 14: Electrostatic lens array 15: Blanker array 16: Reduction optical system 16a: Target magnetic tablet lens a
16b: Target magnetic tablet / lens b
17: Wafer 18: Electrostatic deflector 19: Main deflector 20: Focus coil 21: Stage 22: Electron beam shape detector 23: Electrostatic chuck 24: Blanking aperture 25: Blanker array control circuit 26: Deflector control circuit 27: Electron beam shape detection circuit 28: Focus control circuit 29: Stage drive control circuit 30: Main control system 31: Exposure area for one charged particle beam 32: Subfield 32a: Subfield 1
32b: Subfield 2
32c: Subfield 3
32d: Subfield 4
33: Pixel 34: Electron beam 35: Multi-layer wiring device 36: Deflection electrode array 37: Shield plate 38: Deflection electrode control signal wiring layer 39: Apertures 40a and 40b: Deflection electrode 41: Multi-layer wiring device 42: Deflection electrode array 43: Shield plate 44: deflection electrode control signal wiring layer 45: aperture 46a, 46b: deflection electrode 47: wiring pattern 48: aperture 49a, 49b: deflection electrode 50a, 50b: multilayer wiring device 51: deflection electrode array 52a, 52b: multilayer wiring Layers 53a, 53b: Deflection electrodes 54: Apertures 55a, 55b: Multilayer wiring devices 56: Deflection electrode arrays 57a, 57b: Multilayer wiring layers 58a, 58b: Deflection electrodes 59: Apertures 60: Bonded wiring devices (upper)
61: Bonded wiring device (bottom)
62, 63: wiring patterns 64a, 64b, 67a, 67b: deflection electrodes without wiring 65a, 65b, 66a, 66b: deflection electrodes with wiring 68a, 68b: multilayer wiring devices 69a, 69b: deflection electrode arrays 70a, 70b: multilayer wiring Layers 71a, 71b, 71c, 71d: deflection electrodes 72: apertures 73a, 73b: multilayer wiring devices 74a, 74b: deflection electrode arrays 75a, 75b: with deflection electrodes 76a, 76b: no deflection electrodes 77: apertures 78a, 78b: multilayers Wiring device 79a, 79b: Thin deflection electrode array 80a, 80b, 80c, 80d: Deflection electrode 81: Aperture 100: Deflector 101: Deflection electrode 102: Deflection electrode array 103: Wiring 105: Deflector electrode control signal extraction pad 106: Si substrate 107: S O ₂ insulator layer 108: multilayer wiring

Claims (10)

A deflection electrode array substrate in which openings and electrodes of a plurality of charged particle beam deflectors are two-dimensionally arranged;
A multilayer wiring board in which openings are formed at positions corresponding to the plurality of openings, and lead-out wirings for applying control signals to the electrodes are formed;
A charged particle beam deflector array formed by superimposing
The charged particle beam deflector array, wherein the multilayer wiring board is provided on both an upper surface and a lower surface of the deflection electrode array substrate.   2. The charged particle beam deflector array according to claim 1, wherein a plurality of at least one of the upper surface side multilayer wiring substrate and the lower surface side multilayer wiring substrate is provided. 3.   3. The charged particle beam deflector array according to claim 1, wherein each of the multilayer wiring boards is formed with the lead-out wiring from the different electrodes.   The lead-out wiring of the single multilayer wiring board constitutes one block or a plurality of staggered electrodes, or one block or a plurality of rows, or one block obtained by dividing the electrode into a plurality of blocks. The charged particle beam deflector array according to claim 3, wherein the charged particle beam deflector array is connected only to an electrode to be operated.   The charged particle beam deflector array according to any one of claims 1 to 4, wherein a plurality of the deflection electrode array substrates are overlapped.   6. The charged particle beam deflector array according to claim 5, wherein electrodes facing each other in a superimposing direction of the plurality of superposed deflection electrode array substrates are connected to each other.   6. The charged particle beam deflector array according to claim 5, wherein the electrodes of the plurality of superposed deflection electrode array substrates are arranged so as not to face each other.   The electrodes of the single deflection electrode array substrate constitute one block or a plurality of staggered openings, or one block or a plurality of rows, or one block obtained by dividing the opening into a plurality of blocks. The charged particle beam deflector array according to claim 7, wherein the charged particle beam deflector array is formed only in the opening.   The charged particle beam deflector array according to any one of claims 1 to 4 is used as at least one of a blanker and an electrostatic lens array, the substrate to be exposed is disposed in a vacuum, and the charged particles are placed on the substrate to be exposed. A charged particle beam exposure apparatus that performs exposure by irradiating a beam.   A device manufacturing method comprising: exposing the substrate to be exposed using the exposure apparatus according to claim 9; and developing the exposed substrate.

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