JP2008012612A - Machining method of double-disc machining device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a double-disc machining device which easily performs position adjustment of a roller with a groove, and can highly accurately machine both sides of a workpiece. <P>SOLUTION: A moving amount G2 or a moving amount G3 of the rollers 62, 63, 64, 65, 66 with grooves is obtained so that a roller constraint surface J formed by the grooves 62A, 63A, 64A, 65A, 66A of a plurality of the rollers 62, 63, 64, 65, 66 with the grooves becomes an approximately parallel to a predetermined surface based on a first distance data from a first predetermined positions F1 to F5 of a first surface 27A of the workpiece 27 to a sensor, and a second distance data from a second predetermined positions M1 to M5 of a second surface of the workpiece 27 to the sensor, and then the both surfaces of the workpiece 27 are machined based on the moving amount G2 or the moving amount G3 after the positions of the plurality of rollers 62, 63, 64, 65, 66 with the grooves are automatically adjusted. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention particularly relates to a processing method of a double-sided processing apparatus that processes both surfaces of a work made of a hard and brittle material such as glass or silicon held by a work holding apparatus.

  As a conventional double-side processing apparatus capable of processing both surfaces of a work held by a work holding apparatus with high accuracy, for example, there is a double-side processing apparatus 200 as shown in FIG.

  FIG. 1 is a schematic configuration diagram of a conventional double-side processing apparatus. In FIG. 1, the X and X directions indicate the movement directions of the grinding spindles 205 and 211, and the Y and Y directions indicate directions orthogonal to the X and X directions, respectively.

  Referring to FIG. 1, a conventional double-sided processing device 200 includes a first processing device 201, a second processing device 202, and a work holding device 203.

  The first processing device 201 is disposed so as to face the surface 215 </ b> A of the workpiece 215 held by the workpiece holding device 203. The first processing apparatus 201 includes a grinding spindle 205, a pedestal 206, and a grindstone 207. The grinding spindle 205 is configured to be movable in the X and X directions and to be rotatable. The pedestal 206 is provided at the end of the grinding spindle 205 located on the workpiece holding device 203 side. The grindstone 207 is attached to the pedestal 206. The grindstone 207 has a grinding operation surface 207A that contacts the surface 215A of the workpiece 215. The grindstone 207 rotates integrally with the grinding spindle 205 when the grinding spindle 205 rotates. The first processing apparatus 201 processes the surface 215A of the workpiece 215 by the grinding operation surface 207A of the rotating grindstone 207.

  The second processing device 202 is disposed so as to face the first processing device 201 with the work 215 interposed therebetween. The second processing device 202 includes a grinding spindle 211, a pedestal 212, and a grindstone 213. The grinding spindle 211 is configured to be movable in the X and X directions and to be rotatable. The base 212 is provided at the end of the grinding spindle 211 located on the workpiece holding device 203 side. The grindstone 213 is attached to the pedestal 212. The grindstone 213 has a grinding operation surface 213A that contacts the surface 215B of the workpiece 215. The grindstone 213 rotates integrally with the grinding spindle 211 when the grinding spindle 211 rotates. The second processing apparatus 202 processes the surface 215B of the workpiece 215 by the grinding operation surface 213A of the rotating grindstone 213.

  The work holding device 203 includes a frame 217, manual roller position adjusting mechanisms 221 to 223, and grooved rollers 225 to 227. The frame 217 has a plurality of screw holes (not shown). The manual roller position adjustment mechanisms 221 to 223 have screw portions 221A to 223A. The screw portions 221A to 223A are fastened to screw holes (not shown) formed in the frame 217. The manual roller position adjustment mechanisms 221 to 223 are for the operator to manually adjust the axial positions of the grooved rollers 225 to 227.

  The grooved roller 225 has a groove 225 </ b> A that comes into contact with the outer periphery of the workpiece 215. The grooved roller 225 is provided in the manual roller position adjusting mechanism 221 in a rotatable state. The grooved roller 226 has a groove 226 </ b> A that comes into contact with the outer peripheral portion of the work 215. The grooved roller 226 is provided in the manual roller position adjusting mechanism 222 in a rotatable state. The grooved roller 227 has a groove 227 </ b> A that comes into contact with the outer peripheral portion of the work 215. The grooved roller 227 is provided in the manual roller position adjusting mechanism 223 in a rotatable state. The workpiece 215 is rotatably held by the grooves 225A to 227A of the grooved rollers 225 to 227.

  The position adjustment of the grooved rollers 225 to 227 in the axial direction is performed by manually rotating the manual roller position adjustment mechanisms 221 to 223 by an operator before the workpiece 215 is processed. At this time, the roller restraint surface A formed by the grooves 225A to 227A of the grooved rollers 225 to 227 and the rotation locus surface B (not shown) formed by the grinding operation surface 207A of the rotating grindstone 207 are substantially parallel. The position of the grooved rollers 225 to 127 in the axial direction is adjusted so that

  Thus, by adjusting the positions of the grooves 225A to 227A of the grooved rollers 225 to 127 so that the roller restraining surface A and the rotation locus surface B are substantially parallel, Both surfaces 215A and 215B of 215 can be processed with high accuracy (specifically, improvement in flatness of both surfaces 215A and 215B of the work 215, suppression of nanotopography, etc.).

Note that whether or not the roller restraint surface A and the rotation locus surface B are substantially parallel is performed by attaching a sensor (not shown) to the base 206 or the grinding spindle 205. The sensor (not shown) is removed from the pedestal 206 or the grinding spindle 205 after adjusting the position of the grooved rollers 225 to 227 (see, for example, Patent Document 1).
JP 2004-98198 A

  However, in the conventional double-sided processing apparatus 200, since the operator manually adjusts the positions of the grooved rollers 225 to 227, the grooved roller 225 is set so that the roller restraint surface A and the rotation locus surface B are substantially parallel. It was very difficult to adjust the position of ˜227. For this reason, there is a problem that both surfaces 215A and 215B of the workpiece 215 cannot be processed with high accuracy.

  Accordingly, the present invention has been made in view of the above points, and can perform the position adjustment of the grooved roller for holding the workpiece easily, and can perform both sides of the workpiece with high accuracy. It aims at providing the processing method of an apparatus.

  According to one aspect of the present invention, a workpiece holding device that rotatably holds the workpiece by grooves formed in a plurality of grooved rollers, and a first arranged to face each other via the workpiece holding device. And a second processing member, and a processing method of a double-side processing apparatus that processes the first surface and the second surface of the workpiece by the first and second processing members, First distance data related to a first distance from the first predetermined position on the first surface to the sensor and / or a second distance from the second predetermined position on the second surface of the workpiece to the sensor. A second distance data acquisition step for acquiring second distance data relating to the distance of the first distance data, and the first distance data and / or the roller constraint surface formed by the grooves of the plurality of grooved rollers to be a predetermined surface. Or the second distance data Accordingly, a movement amount calculating step for obtaining movement amounts in the axial direction of the plurality of grooved rollers, and automatic roller position adjustment for automatically adjusting the axial positions of the plurality of grooved rollers based on the movement amounts. And a processing method for a double-sided processing apparatus.

  According to the present invention, a plurality of grooves are provided on the basis of the first distance data and / or the second distance data so that the roller constraining surface formed by the grooves of the plurality of grooved rollers is a predetermined surface. By determining the amount of movement of the roller in the axial direction and automatically adjusting the position of the plurality of grooved rollers in the axial direction based on this amount of movement, the position of the grooved roller that holds the workpiece can be easily adjusted. it can. Further, by processing the workpiece after automatically adjusting the axial positions of the plurality of grooved rollers so that the roller constraining surface becomes a predetermined surface, both surfaces of the workpiece can be processed with high accuracy.

  The present invention can easily adjust the position of the grooved roller and can process both surfaces of the workpiece with high accuracy.

  Next, embodiments of the present invention will be described with reference to the drawings.

(Embodiment)
FIG. 2 is a schematic configuration diagram of the double-sided processing apparatus according to the embodiment of the present invention. In FIG. 2, the X and X directions indicate the movement directions of the saddles 22 and 32, and the Y and Y directions indicate directions orthogonal to the X and X directions, respectively.

  Referring to FIG. 2, the double-sided processing apparatus 10 according to the first embodiment includes a double-sided processing apparatus main body 11, a movement amount calculation unit 12, and a control unit 13.

  The double-sided processing device main body 11 includes a gantry 15, a first processing device 16, a second processing device 17, a work holding device 18, and a measuring device 19. The gantry 15 includes a plate portion 15A and projecting portions 15B and 15C. The gantry 15 is for supporting the first and second processing devices 16 and 17 and the workpiece holding device 18.

  The first processing device 16 includes a saddle moving device 21, a saddle 22, a grinding spindle 23, a first rotation drive device (not shown), a pedestal 24, and a grindstone 25 that is a first processing member. Have

  The saddle moving device 21 is provided on the protruding portion 15 </ b> B of the gantry 15. The saddle moving device 21 is for moving the saddle 22 in the X and X directions. The saddle 22 is provided on the plate portion 15A of the gantry 15 located between the protruding portion 15B and the work holding device 18. The saddle 22 is connected to the saddle moving device 21. The saddle 22 is supported by the gantry 15 so as to be movable in the X and X directions.

  The grinding spindle 23 is provided on a saddle 22 located on the opposite side to the side to which the saddle moving device 21 is connected. The grinding spindle 23 moves integrally with the saddle 22 when the saddle 22 is moved in the X and X directions by the saddle moving device 21. The first rotation drive device (not shown) is for rotating the grinding spindle 23.

  The pedestal 24 is provided on the grinding spindle 23 located on the workpiece holding device 18 side. The pedestal 24 has an annular protrusion 24A and a screw hole 24B. The screw hole 24 </ b> B is for attaching the measuring device 19 to the base 24. The pedestal 24 rotates integrally with the grinding spindle 23 when the grinding spindle 23 rotates.

  The grindstone 25 has an annular shape and is provided on the protruding portion 24 </ b> A of the pedestal 24. The grindstone 25 rotates integrally with the pedestal 24 when the pedestal 24 is rotated. The grindstone 25 has a grinding operation surface 25A that comes into contact with the first surface 27A of the workpiece 27. The grinding operation surface 25 </ b> A is disposed so as to pass through the center position of the work 27.

  The first processing device 16 configured as described above processes the first surface 27A side of the workpiece 27 by the grinding operation surface 25A of the rotating grindstone 25.

  The second processing device 17 includes a saddle moving device 31, a saddle 32, a grinding spindle 33, a second rotation drive device (not shown), a pedestal 34, and a grindstone 35 as a second processing member. Have

  The saddle moving device 31 is provided on the protruding portion 15 </ b> C of the gantry 15. The saddle moving device 31 is for moving the saddle 32 in the X and X directions. The saddle 32 is provided on the plate portion 15 </ b> A of the gantry 15 positioned between the protruding portion 15 </ b> C and the work holding device 18. The saddle 32 is supported by the gantry 15 so as to be movable in the X and X directions. The saddle 32 is connected to the saddle moving device 31.

  The grinding spindle 33 is provided on the saddle 32 located on the opposite side to the side to which the saddle moving device 31 is connected. The grinding spindle 33 moves integrally with the saddle 32 when the saddle 32 is moved in the X and X directions by the saddle moving device 31. The second rotation drive device (not shown) is for rotating the grinding spindle 33.

  The pedestal 34 is provided on the grinding spindle 33 located on the workpiece holding device 18 side. The pedestal 34 has an annular protrusion 34A. The pedestal 34 rotates integrally with the grinding spindle 33 when the grinding spindle 33 is rotated.

  The grindstone 35 has an annular shape and is provided on the protruding portion 34 </ b> A of the pedestal 34. The grindstone 35 rotates integrally with the pedestal 34 when the pedestal 34 is rotated. The grindstone 35 has a grinding operation surface 35A that comes into contact with the second surface 27B of the workpiece 27. The grinding operation surface 35A is disposed so as to pass through the center position of the work 27.

  The second processing device 17 configured as described above processes the second surface 27B side of the workpiece 27 by the grinding operation surface 35A of the rotating grindstone 35.

  3 is a view of the work holding device shown in FIG.

  Referring to FIG. 3, the work holding device 18 includes a frame 41, automatic roller position adjustment mechanisms 42 to 46, roller support mechanisms 52 to 56, and grooved rollers 62 to 66.

  The frame 41 is provided on the plate portion 15 </ b> A of the gantry 15 located between the first processing device 16 and the second processing device 17 and has a U shape.

  The roller position automatic adjustment mechanisms 42 and 43 are provided on the lower inner wall 41 </ b> A of the frame 41. The roller position automatic adjustment mechanism 44 is provided on the inner wall 41 </ b> B of the frame 41. The roller position automatic adjustment mechanisms 45 and 46 are provided on the upper inner wall 41 </ b> C of the frame 41. The roller position automatic adjustment mechanisms 42 to 46 move the grooved rollers 62 to 66 in the axial direction of the grooved rollers 62 to 66 via the roller support mechanisms 52 to 56, thereby forming the grooves 62 </ b> A of the grooved rollers 62 to 66. This is for automatically adjusting the position of .about.66A (see FIG. 2).

  As described above, by providing the roller position automatic adjustment mechanisms 42 to 46 that automatically adjust the axial positions of the grooves 62A to 66A of the grooved rollers 62 to 66, the operator can move the grooved rollers 62 to 66 in the axial direction. Compared with the case where the position adjustment is performed manually, the positions of the grooves 62A to 66A of the grooved rollers 62 to 66 can be easily adjusted.

  4 is a cross-sectional view of the roller position automatic adjustment mechanism shown in FIG. 3 in the EE line direction, and FIG. 5 is a cross-sectional view of the roller position automatic adjustment mechanism shown in FIG. 4 in the HH line direction.

  A specific configuration of the roller position automatic adjustment mechanism 42 will be described with reference to FIGS. 4 and 5. The roller position automatic adjustment mechanism 42 includes a rotation motor 71, a ball screw 72, a guide base 73, a plurality of ball screw bearings 74, a support body 75, a stage 77, and a rolling guide 78.

  The rotation motor 71 is provided on the frame 41. The rotary motor 71 is electrically connected to the control means 13. The rotation motor 71 is for rotating the ball screw 72 based on a command from the control means 13 to move the support body 75 in the axial direction of the grooved roller 62.

  The ball screw 72 is connected to the rotary motor 71 so that the longitudinal direction thereof is the axial direction of the grooved roller 62. The ball screw 72 passes through a through hole 73B formed in the guide base 73 and is disposed so as to extend to the accommodating portion 73A of the guide base 73.

  The guide base 73 is provided on the frame 41. The guide base 73 has an accommodating portion 73A, a through hole 73B, and a pair of projecting portions 81 and 82. The accommodating portion 73 </ b> A is for accommodating a part of the ball screw 72 and the support body 75. The through hole 73 </ b> B is formed in the guide base 73 portion facing the rotation motor 71. The pair of projecting portions 81 and 82 are arranged so as to face each other via the ball screw 72.

  The plurality of ball screw bearings 74 are provided in the guide base 73 corresponding to the through hole 73B. The plurality of ball screw bearings 74 support the ball screw 72 in a rotatable manner.

  The support body 75 is provided on the ball screw 72 housed in the housing portion 73A. The support body 75 is for disposing the roller support mechanism 52 that supports the grooved roller 62. The support 75 moves in the axial direction of the grooved roller 62 when the ball screw 72 rotates. Thereby, since the roller support mechanism 52 moves in the axial direction of the grooved roller 62, the position of the groove 62A of the grooved roller 62 can be automatically adjusted.

  The stage 77 has a plate portion 84 and projecting portions 85 and 86. The plate portion 84 is fixed on the support body 75. The plate portion 84 is disposed so as to cover the upper surface of the accommodating portion 73A. The protruding portions 85 and 86 are provided on the plate portion 84. The protrusion 85 is disposed so as to face the protrusion 81 of the guide base 73. The protruding portion 86 is disposed so as to face the protruding portion 82 of the guide base 73. The stage 77 is for arranging the roller support mechanism 52.

  The rolling guide 78 includes first guide plates 91 and 92, second guide plates 93 and 94, and a plurality of balls 95 and 96. The first guide plate 91 is provided on the outer wall 81 </ b> A of the protruding portion 81. The first guide plate 91 is formed with a groove that accommodates a part of the plurality of balls 95. The first guide plate 92 is provided on the outer wall 82 </ b> A of the protruding portion 82. The first guide plate 92 is formed with a groove that accommodates a part of the plurality of balls 96.

  The second guide plate 93 is provided on the inner wall 85 </ b> A of the protruding portion 85. The second guide plate 93 is formed with a groove that accommodates a part of the plurality of balls 95. The second guide plate 94 is provided on the inner wall 86 </ b> A of the protrusion 86. The second guide plate 94 is formed with a groove that accommodates a part of the plurality of balls 96.

  The plurality of balls 95 are accommodated in grooves formed in the first and second guide plates 91 and 93. The plurality of balls 96 are accommodated in grooves formed in the first and second guide plates 92 and 94.

  The rolling guide 78 having the above-described configuration is configured such that the plurality of balls 95 and 96 move in the grooves formed in the first and second guide plates 91, 92, 93, 94, and thereby the axial direction of the grooved roller 62. This is a guide for guiding the stage 77.

  The roller position automatic adjustment mechanisms 43 to 46 have the same configuration as the roller position automatic adjustment mechanism 42 described above.

  In addition, the stroke of the actuator of the roller position automatic adjustment mechanisms 42 to 46 including the rotation motor 71 and the ball screw 72 may be about 10 times the machining accuracy of the grooves formed in the first and second guide plates 91 to 94. . The positioning accuracy of the actuator may be about 1/10 of the desired adjustment accuracy.

  Referring to FIG. 4, the roller support mechanism 52 includes a rotary shaft housing member 98, a roller rotary shaft 99, and a plurality of bearings 101. The rotating shaft housing member 98 is provided on the stage 77. The rotating shaft housing member 98 has a through portion 98A for inserting the rotating shaft 99 for rollers. The roller rotation shaft 99 is disposed so as to penetrate the through-hole 98 </ b> A and protrude from the rotation shaft housing member 98. The roller rotation shaft 99 is for disposing the grooved roller 62.

  The plurality of bearings 101 are provided in the rotary shaft housing member 98 that forms the through portion 98A. The plurality of bearings 101 are for rotatably supporting the roller rotation shaft 99.

  The roller support mechanisms 53 to 56 have the same configuration as the roller support mechanism 52 described above. The roller support mechanism 53 is provided in the roller position automatic adjustment mechanism 43, and the roller support mechanism 54 is provided in the roller position automatic adjustment mechanism 44 (see FIG. 3). The roller support mechanism 55 is provided in the roller position automatic adjustment mechanism 45, and the roller support mechanism 56 is provided in the roller position automatic adjustment mechanism 46 (see FIG. 3).

  Referring to FIG. 4, the grooved roller 62 is disposed on a roller rotation shaft 99 provided in the roller support mechanism 52. The grooved roller 62 has a groove 62 </ b> A that contacts the outer peripheral portion of the work 27. The grooved roller 62 is integrated with the roller support mechanism 52 when the roller support mechanism 52 is moved in the axial direction of the grooved roller 62 (the axial direction of the roller rotation shaft 99 provided in the roller support mechanism 52). Move to.

  Next, the grooved rollers 63 to 66 will be described with reference to FIG. The grooved roller 63 is disposed on a roller rotation shaft 99 provided in the roller support mechanism 53. The grooved roller 63 has a groove 63 </ b> A that contacts the outer peripheral portion of the work 27. The grooved roller 63 moves integrally with the roller support mechanism 53 when the roller support mechanism 53 is moved in the axial direction of the grooved roller 63.

  The grooved roller 64 is disposed on a roller rotation shaft 99 provided in the roller support mechanism 54. The grooved roller 64 has a groove 64 </ b> A that comes into contact with the outer peripheral portion of the work 27. The grooved roller 64 moves integrally with the roller support mechanism 54 when the roller support mechanism 54 is moved in the axial direction of the grooved roller 64.

  The grooved roller 65 is disposed on a roller rotation shaft 99 provided in the roller support mechanism 55. The grooved roller 65 has a groove 65 </ b> A that contacts the outer peripheral portion of the work 27. The grooved roller 65 moves integrally with the roller support mechanism 55 when the roller support mechanism 55 moves in the axial direction of the grooved roller 65.

  The grooved roller 66 is disposed on a roller rotation shaft 99 provided in the roller support mechanism 56. The grooved roller 66 has a groove 66 </ b> A that contacts the outer peripheral portion of the work 27. The grooved roller 66 moves integrally with the roller support mechanism 56 when the roller support mechanism 56 moves in the axial direction of the grooved roller 66.

  The grooved rollers 65 and 66 are rotated by a driving device (not shown) when the workpiece 27 is processed. At this time, the grooved rollers 62 to 64 are driven to rotate by the rotational motion of the work 27 rotated by the grooved rollers 65 and 66.

  Referring to FIG. 2, the measurement device 19 includes a support member 103, a screw portion 104, and a sensor 105. The support member 103 is L-shaped. The support member 103 is for arranging the sensor 105. The screw portion 104 is provided at one end of the support member 103. The screw portion 104 is fastened with a screw hole 24 </ b> B formed in the base 24. Thereby, the support member 103 is fixed to the base 24.

  FIG. 6 is a diagram for explaining the positional relationship between the grindstone and the sensor.

  Referring to FIG. 6, the sensor 105 is provided on the support member 103 at a portion facing the grinding operation surface 25A. The sensor 105 has a first distance and / or a second distance from the sensor 105 to the first predetermined position of the first surface 27A of the work 27 and / or the second predetermined position of the second surface 27B of the work 27. The distance is measured to obtain first distance data and / or second distance data. In the present embodiment, the following description will be given by taking as an example the case where both the first distance data and the second distance data are acquired by the sensor 105.

  FIG. 7 is a diagram illustrating an example of a first predetermined position measured by the sensor. In FIG. 7, F <b> 1 to F <b> 5 indicate first predetermined positions (hereinafter referred to as “first predetermined positions F <b> 1 to F <b> 5”) of the first surface 27 </ b> A of the work 27.

  With reference to FIG. 7, the first predetermined positions F1 to F5 of the first surface 27A of the work 27 will be described. The first predetermined positions F1 to F5 can be appropriately set in the first surface 27A of the work 27 in a region facing the grinding operation surface 25A of the grindstone 25. For example, as shown in FIG. 7, the first predetermined position F1 is disposed near the grooved roller 62, the first predetermined position F2 is disposed near the grooved roller 63, and the first predetermined position F3 is defined as The first predetermined position F4 may be disposed in the vicinity of the grooved roller 65, and the first predetermined position F5 may be disposed in the vicinity of the grooved roller 66.

  As described above, the first predetermined positions F1 to F5 are arranged in the vicinity of the grooved rollers 62 to 66, and are acquired when the first distance from the sensor 105 to the first predetermined positions F1 to F5 is measured. A large amount of data relating to the axial positions of the grooved rollers 62 to 66 can be included in the first distance data.

  In FIG. 7, the case where the number of the first predetermined positions (in this case, five) and the number of the grooved rollers 62 to 66 (in this case, five) are given as an example. May be set to be larger than the number of grooved rollers 62-66. The number of the first predetermined positions may be equal to the number of the grooved rollers 62 to 66 or more than the number of the grooved rollers 62 to 66.

  FIG. 8 is a diagram illustrating an example of a second predetermined position measured by the sensor. 8, M1 to M5 indicate second predetermined positions (hereinafter referred to as “second predetermined positions M1 to M5”) of the second surface 27B of the work 27.

  The second predetermined positions M1 to M5 of the second surface 27A of the work 27 will be described with reference to FIG. The second predetermined positions M1 to M5 can be set as appropriate in the second surface 27B of the work 27 in a region facing the grinding operation surface 25A of the grindstone 25. For example, as shown in FIG. 8, the second predetermined position M1 is set near the grooved roller 62, the second predetermined position M2 is arranged near the grooved roller 63, and the second predetermined position M3 is set. The grooved roller 64 may be disposed in the vicinity, the second predetermined position M4 may be disposed in the vicinity of the grooved roller 65, and the second predetermined position M5 may be disposed in the vicinity of the grooved roller 66.

  As described above, the second predetermined positions M1 to M5 are arranged in the vicinity of the grooved rollers 62 to 66, and thus acquired when the first distance from the sensor 105 to the second predetermined positions M1 to M5 is measured. A large amount of data relating to the axial positions of the grooved rollers 62 to 66 can be included in the first distance data.

  When measuring the second distance from the second predetermined positions M1 to M5 to the sensor 105 by the sensor 105, the state of the workpiece 27 shown in FIG. 7 (the grinding operation surface 25A and the first surface of the workpiece 27). 27A, the workpiece 27 is reversed so that the grinding operation surface 25A and the second surface 27B of the workpiece 27 face each other, as shown in FIG.

  FIG. 8 shows an example in which the number of second predetermined positions (in this case, five) is equal to the number of grooved rollers 62 to 66 (in this case, five). May be set to be larger than the number of grooved rollers 62-66. The number of the second predetermined positions may be equal to the number of the grooved rollers 62 to 66 or more than the number of the grooved rollers 62 to 66. The number of second predetermined positions may be equal to the number of first predetermined positions.

Here, when the sensor 105 measures the first and second predetermined positions F1 to F5 and M1 to M5 (the number of the first predetermined positions F1 to F5, the number of the second predetermined positions M1 to M5, and the groove) The roller displacement amount data F _{A and} F _B acquired in advance by the sensor 105 will be described by taking as an example a case where the number of rollers 62 to 66 is equal.

  The sensor 105 rotates from the sensor 105 to the first predetermined positions F1 to F5 in a state where the work rollers 27 to 66 are not displaced in the axial direction (initial state) while the work 27 is rotated by the work holding device 18. The distance is measured and the initial distance data is acquired.

  The sensor 105 has a first predetermined value from the sensor 105 when only the grooved roller 62 is displaced in the axial direction of the grooved roller 62 by a predetermined displacement amount g while the work 27 is rotated by the work holding device 18. The distance to positions F1 to F5 is measured. Subsequently, the distance from the sensor 105 to the first predetermined positions F1 to F5 when only the grooved roller 63 is displaced by a predetermined displacement amount g in the axial direction of the grooved roller 63 is measured. Next, the distance from the sensor 105 to the first predetermined positions F1 to F5 when only the grooved roller 64 is displaced by a predetermined displacement amount g in the axial direction of the grooved roller 64 is measured. Subsequently, the distance from the sensor 105 to the first predetermined positions F1 to F5 when only the grooved roller 65 is displaced by a predetermined displacement amount g in the axial direction of the grooved roller 65 is measured. Next, the distance from the sensor 105 to the first predetermined positions F1 to F5 when only the grooved roller 66 is displaced by a predetermined displacement amount g in the axial direction of the grooved roller 66 is measured.

Roller displacement amount data F _A is data obtained by subtracting the distance data of the initial state from the data relating to the distance when each of the grooved rollers 62 to 66 is displaced separately. Roller displacement amount data F _A in this case is data represented by a matrix of 5 × 5.

Roller displacement amount data F _B inverts the workpiece 27 so that the second surface 27B of the sensor 105 and the workpiece 27 is opposed (the state shown in FIG. 8), then, in the case of acquiring the roller displacement amount data F _A Acquired in a similar manner. Roller displacement amount data F _B in this case is data represented by a matrix of 5 × 5. The roller displacement amount data F _A and F _B acquired by the sensor 105 is transmitted to the movement amount calculation means 12 and stored in the storage unit 12A.

  The predetermined displacement g may be a value sufficiently larger than the measurement accuracy of the sensor 105. The predetermined displacement amount g can be set within a range of 10 μm to 100 μm, for example.

It should be noted that a plurality of the above five measurements may be performed to obtain the roller displacement amount data F _A and F _B based on the averaged data.

In this way, a plurality of the above five measurements are performed to obtain a plurality of roller displacement amount data, and the plurality of roller displacement amount data are averaged to obtain the roller displacement amount data F _A and F _{B. A} measurement error component (for example, a measurement error of the sensor 105) included in the displacement amount data F _A and F _B can be reduced.

In addition, the sensor 105 rotates the work 27 by the work holding device 18 and sets the first distance from the sensor 105 to the first predetermined positions F1 to F5 in a state in which all the grooved rollers 62 to 66 are not displaced. The first distance data d1-1 to d1-5 are sequentially measured, and the second distance from the sensor 105 to the second predetermined positions M1 to M5 is sequentially measured to obtain the second distance data. d2-1 to d2-5 are acquired. The first distance data d1-1 to d1-5 and the second distance data d2-1 to d2-5 are the roller constraining surfaces J (FIG. 5) formed by the grooves 62A to 66A of the plurality of grooved rollers 62 to 66. is data used in obtaining the roller restraining surface shape data J _d corresponding to the shape of the second reference).

  The sensor 105 is electrically connected to the movement amount calculation means 12. The first distance data d1-1 to d1-5 and the second distance data d2-1 to d2-5 acquired by the sensor 105 are transmitted to the movement amount calculation means 12.

In this way, by using the measuring device 19 that is attached to the base 24 and does not include a drive unit that moves the sensor 105 to a predetermined position, the roller displacement amount data F _A and F _B acquired by the sensor 105, the first The motion error components included in the distance data d1-1 to d1-5 and the second distance data d2-1 to d2-5 can be reduced.

Referring to FIG. 2, the movement amount calculation means 12 includes a storage unit 12A, a correction unit 12B, and a calculation unit 12C. The storage unit 12A stores roller displacement amount data F _A and F _B , data T _w regarding a predetermined shape of the work 27, data T _J regarding a predetermined shape of the roller restraining surface J, and the like. The data T _w for a given shape of the workpiece 27, for example, and specifications about the thickness of the workpiece 27 is data on specifications concerning work warpage or nanotopography. Data T _w for a given shape of the workpiece 27 is data by two-sided machining apparatus 10 is used in determining whether to process the workpiece 27.

The data T _J for a given shape of the roller restraint surface J, for example, data relating to the value of specifications by subtracting the minimum value from the maximum value when the sensor 105 a plurality measure the distance to the first surface 27A of the workpiece 27 It is. Data T _J relating to a predetermined shape of the roller restraining surface J is data used when determining whether or not the work 27 is to be processed by the double-side processing apparatus 10.

  The correction unit 12B performs an averaging process and a low-pass filter process on each of the first distance data d1-1 to d1-5 and the second distance data d2-1 to d2-5.

  As a result, the center value data d1-1A to d1-5A in which the vibration of the work 27, the vibration component of the grooved rollers 62 to 66, and the like are reduced are obtained from the first distance data d1-1 to d1-5. The center value data d2-1A to d2-5A in which the vibration of the work 27 and the vibration components of the grooved rollers 62 to 66 are reduced are obtained from the distance data d2-1 to d2-5.

The center value data d1-1A to d1-5A and d2-1A to d2-5A are transmitted from the correction unit 12B to the calculation unit 12C. Center value data d1-1A~d1-5A, d2-1A~d2-5A is used when obtaining the roller restraining surface shape data _{J d.}

Thus, based on the center value data d1-1A to d1-5A and d2-1A to d2-5A from which the vibration of the work 27 and the vibration components of the grooved rollers 62 to 66 are removed, the roller restraint surface shape data. by obtaining the J _d, it is possible to reduce the movement error component concerning motion error component and the grooved rollers 62 to 66 concerning the workpiece 27 that is included in the roller restraining surface shape data J _d.

Further, the correcting unit 12B, after the roller position automatic adjustment mechanisms 42 to 46 adjust the axial positions of the grooved rollers 62 to 66 based on the moving amount G2 (movement amount estimated value) obtained by the calculating unit 12C, It is determined whether or not the workpiece restraint surface J acquired by measurement by the sensor 105 satisfies the data _TJ . If the workpiece restraining surface J is determined not to satisfy the data T _J (if not sufficiently reduce the error component superimposed on the roller restraining surface shape data J _d), the correction unit 12B is the moving amount G2 Is multiplied by the correction coefficient K _C (<1) to correct the movement amount G2 to calculate the movement amount G3 (= G2 · K _C ). The compensation coefficient K _C is a correction factor having a predetermined value.

By adjusting the axial positions of the grooved rollers 62 to 66 on the basis of the movement amount G3 (movement amount estimation value) thus obtained, the shape of the adjusted roller restraint surface J can be obtained from the data _TJ . Can be satisfied.

By the way, in order to acquire the movement amount G3 so that the shape of the roller constraining surface J satisfies the data _TJ , it is necessary to repeatedly perform the measurement by the sensor 105 and the correction by the correction unit 12B. . Therefore, the standard deviation σ ₁ of the repeated measurement accuracy of the first and second distance data d1-1 to d1-5, d2-1 to d2-5 is obtained in advance, and the movement amount G2 is larger than the standard deviation σ _1. If it is considerably large, the correction coefficient K _{CH is set} to 1 (K _CH = 1), and if the movement amount G2 (movement amount estimated value) is not so much larger than the standard deviation σ ₁ of the repeated measurement accuracy, the correction coefficient K _It is preferable to apply variable feedback processing in which _CH (K _CH <1) is varied in accordance with the roller restraint surface shape data J _d and the movement amount G2 is corrected.

As such a variable feedback method, for example, a threshold value T ₁ (= σ ₁ · R) indicating whether or not to correct a value obtained by multiplying the standard deviation σ ₁ of the repeated measurement accuracy by a coefficient R is used, and the roller restraint surface the case where the shape data _{J d} is larger than the threshold value _{T 1 (G2> T 1)} , from the correction coefficient _{K CH} and the _{1 (K} CH = _1), or thresholds _{T 1} movement amount G2 is equal to thresholds _{T 1} Is smaller (G2 ≦ T ₁ ), the correction coefficient K _CH is set to a value smaller than 1 (K _CH <1), the movement amount G2 is corrected, and the movement amount G3 (movement amount estimated value) is obtained. There is a way to do it.

Further, as another method of variable feedback, for example, a value obtained by multiplying a standard deviation σ ₁ of repeated measurement accuracy by a coefficient R (= σ ₁ · R) is a threshold value T ₁ as to whether or not to correct, and a movement amount when G2 is larger than the threshold value _{T 1} (G2> _{T 1),} the correction coefficient _{K CH} and _{1 (K} CH = _1), if the movement amount G2 is smaller than or thresholds _{T 1} equal to thresholds _{T 1} the (G2 ≦ _{T 1),} a value obtained by dividing the movement amount G2 in thresholds _{T 1} as the correction coefficient _{K CH (= G2 / T 1} ), by performing the correction of the movement amount G2, moving amount G3 (Displacement estimation Value).

Thus, by using a value obtained by dividing the movement amount G2 in thresholds _{T 1} as the correction coefficient _{K CH (= G2 / T 1} ), the magnitude of the movement amount G2 (more specifically, the first distance data Correction according to d1-1 to d1-5 and the second distance data d2-1 to d2-5) can be performed.

Further, as another method of variable feedback, for example, a standard deviation σ ₂ of variation in the value of the roller constraining surface shape data J _d is obtained in advance, and a value obtained by multiplying the standard deviation σ ₂ by a coefficient R (= σ ₂ · R) is a threshold value T ₂ indicating whether or not to correct, and when the movement amount G2 is larger than the threshold value T ₂ (G2> T ₂ ), the correction coefficient K _{CH is set} to 1 (K _CH = 1), If the movement amount G2 is smaller than or the threshold _{T 2} equal to the threshold _{T 2} to the _{(G2 ≦ T 2), (} σ 2 -σ 1) / σ 2 a correction coefficient _{Kc (= (σ 2 -σ 1} ) / Σ ₂ ), there is a method in which the movement amount G2 is corrected to obtain the movement amount G3 (movement amount estimated value).

  By correcting the movement amount G2 using the variable feedback process as described above, the error component superimposed on the movement amount G2 (movement amount estimation value) can be sufficiently reduced with a small number of iterations, and the error can be reduced. A movement amount G3 (movement amount estimated value) with sufficiently reduced components can be acquired. Based on the movement amount G3 (movement amount estimation value) thus obtained, the roller position automatic adjustment mechanisms 42 to 46 adjust the axial positions of the grooved rollers 62 to 66, whereby the roller restraint surface J. Can be made substantially parallel to a predetermined plane.

  The predetermined surface is a surface on which both surfaces 27A and 27B of the work 27 can be processed with high accuracy. By adjusting the axial positions of the grooved rollers 62 to 66 so that the predetermined surface and the roller restraining surface J are substantially parallel to each other, both surfaces 27A and 27B of the work 27 can be processed with high accuracy. it can.

  As the predetermined surface, for example, a rotation locus surface H formed by the grinding operation surface 25A when the grindstone 25 rotates can be used. Further, a surface passing through the middle between the grinding operation surface 25A and the grinding operation surface 35A may be a predetermined surface. Furthermore, a surface passing through the middle between the rotation locus surface H and the rotation locus surface I formed by the grinding operation surface 35A when the grindstone 35 rotates may be set as a predetermined surface. In the present embodiment, the following description will be given by taking as an example the case where the rotation locus surface H is used as the predetermined surface.

Instead of the standard deviations σ ₁ and σ ₂ , a variance or a value obtained by subtracting the minimum value from the maximum value when measured a plurality of times may be used. That is, instead of the standard deviations σ ₁ and σ ₂ , evaluation values representing the variation of each data can be used.

  FIG. 9 is a diagram schematically illustrating a state in which the roller restraint surface shape data is decomposed into an inclination component and a waviness component.

As shown in FIG. 9, the roller constraining surface shape data Jd is _divided into an inclination component J _s (an error component resulting from the inclination of the entire workpiece holding device 18) and a waviness component J _w (caused by warping or waviness of the work 27). decomposed into an error component), and the standard deviation sigma _s of repeated measurement error related to the inclination component J _s, seeking and the standard deviation sigma _w of repeated measurement error related to the waviness component J _w, a standard deviation sigma _s and the standard deviation sigma _w it may optionally, be subjected to variable feedback processing either of the above-described relative to the inclined component J _s and the waviness component J _w there is a significant difference between the.

Specifically, for example, a least square approximation line for the roller constraining surface shape data J _d is obtained, the least square approximation line is set as the slope component J _s , and the residual (J _d −J _s ) is set as the swell component J _w . Based on the gradient component J _s , the second movement amount G2 _s (movement amount estimated value) that is the first movement amount and the waviness component J _w The movement amount G2 _w (movement amount estimated value), which is the amount of movement, is obtained. Then, the correction factor K _{w (second} correction coefficient) of the correction coefficient K _{s (first} correction coefficient) and the movement amount G2 _w of the movement amount G2 _s by the correction coefficient of either of the above-described and obtains a movement amount G2 first correction movement amount obtained by multiplying the correction coefficient _{K s} in _{s (= G2 s · K s} ) and the second correction movement amount obtained by multiplying the correction coefficient _{K w} to the movement amount _{G2 w (= G2 w · K} w ) To the corrected movement amount G3 (= G2 _s · K _s + G2 _w · K _w ).

Thus, the movement amount _G2 s by decomposing the roller restraining surface shape data _{J d} in the inclined component _{J s} and the waviness component _{J w,} seeking G2 _w, the correction moving amount _G2 s, the G2 _w by the variable feedback processing Thus, it is possible to perform correction according to the measurement error included in the inclination component J _s and the swell component J _w .

Further, the method of correcting undulation component J _w is the following method. In this case, the amount of movement G2 _w relative to the waviness component _{J w,} for example, if the number of grooved rollers 62 to 66 are five, least squares quartic obtained by matrix operation curve _{J wm} and the difference J between undulation component _{J w m} . This is only a fourth-order least squares curve J _wm is waviness component of the real roller restraint surface J, the difference J _m is the idea regarded as a measurement error.

That is, obtains the difference _{J m} of the undulation component _{J w} and fourth order least squares curve _{J wm} the roller restraining surface shape data _{J d,} obtains the dispersion _{W m,} of the undulation component _{J w} from the dispersion _{W m} error component due to the swell component (workpiece 27 in the dispersion _W of real value obtained by subtracting from the _w roller restraining surface J, an error component due to the position of the groove 62A~66A of the grooved rollers 62 to 66, and the measurement of sensor 105 The estimated variance W _x (= W _w −W _m ) of the error component or the like). At this time, the correction coefficient K _cw of the swell component J _w is K _cw = W _x / W _w .

Thus, if the waviness component J _w is well represented in the fourth-order least squares curve _{J wm, W x ≒ W w} , i.e. since the K _cw ≒ 1, the waviness component of the roller restraint surface J is sufficiently It can be corrected. Also, if the roller restraint surface shape data J _d is small, that is, if the waviness component J _w is not well represented in the fourth-order least squares curve J _wm, since estimated variance W _x is small, K _cw ≒ 0, and the It is possible to reduce unauthorized correction operations caused by measurement error components.

  Based on the movement amount G3 (movement amount estimated value) acquired by such correction, the roller position automatic adjustment mechanisms 42 to 46 adjust the positions of the grooved rollers 62 to 66 in the axial direction. J can be made substantially parallel to the rotation locus plane H.

Note that when the swell component _Jw and the fourth-order least square curve _Jwm are far _apart , the estimated variance W _x <0 may be obtained. In this case, K _cw = 0 and the swell component J _w is corrected. Do not do.

  The movement amount G3 (movement amount estimated value) obtained by any one of the above methods is transmitted to the control means 13.

The calculation unit 12C averages the center value data d1-1A to d1-5A and the center value data d2-1A to d2-5A obtained by the correction unit 12B, and acquires the roller constraint surface shape data Jd. The arithmetic unit 12C is previously acquired roller displacement amount data F _A, by averaging the F _B calculates the roller displacement amount data F _C.

The arithmetic unit 12C includes a roller displacement data F _C, based on the roller restraining surface shape data J _d, so that the rotation trajectory plane H and the roller restraint surface J is substantially parallel, grooved rollers 62 to 66 is obtained by calculation.

  Here, a description will be given of how to obtain the movement amount G1 of the grooved rollers 62 to 66 with respect to the axial direction when the number of the grooved rollers 62 to 66 and the number of the first and second predetermined positions measured by the measuring device 19 are the same. To do.

In this case, as described above, the roller displacement amount data F _A, F _B, so is represented by a matrix of 5 × 5, the roller displacement data F _C is also represented by a matrix of 5 × 5. Thus, the roller displacement data F _C is a square matrix, the roller displacement data F _C exists an inverse matrix. Therefore, the movement amount G1 of this case is calculated by multiplying the roller restraining surface shape data J _d to the inverse matrix of the roller displacement data F _C (below (1) see formula). The movement amount G1 obtained by the calculation unit 12C is transmitted to the control means 13.

G1 = F _C ⁻¹ · J _d (1)
The roller position automatic adjustment mechanisms 42 to 46 adjust the positions of the grooves 62A to 66A in the axial direction of the grooved rollers 62 to 66 on the basis of the movement amount G1 obtained in this way. It can be made substantially parallel to the rotation locus plane H.

  Next, the number of the first and second predetermined positions measured by the measuring device 19 is larger than the number of the grooved rollers 62 to 66, and the number of the first predetermined positions and the number of the second predetermined positions are A method of obtaining the movement amount G2 (movement amount estimated value) with respect to the axial direction of the grooved rollers 62 to 66 in the same case will be described.

In this case, the number of first and second predetermined positions is N _s (> 5), and X _R is a vector corresponding to the number of grooved rollers 62 to 66 (hereinafter referred to as “roller displacement vector X _R ”). Then, the roller displacement data _{F C} becomes 5 × _{N s} matrix. Roller restraining surface shape data J _d is equal to the multiplied by the roller displacement data F _C in roller displacement vector X _R, the following equation (2) is satisfied.

J _d = F _C · X _R (2)
Further, the roller displacement vector X _R, because it has the number of degrees of freedom of the grooved rollers 62 to 66 (in this case five), the roller restraint surface shape data J _d can be expressed by fourth-order polynomial. Therefore, the coefficient vector V of the fourth-order polynomial can be obtained using the least square approximation matrix L as shown in the following equation (3).

V = L · J _d = L · F _C · X _R (3)
From the second term and the third term of the above equation (3), the movement amount G2 (movement amount estimated value) is obtained by the following equation (4). The movement amount G2 (movement amount estimated value) obtained by the calculation unit 12C is transmitted to the control means 13.

G2 = (L · F _C ) ⁻¹ · L · J _d (4)
Thus, by estimating the movement amount G2 (movement amount estimation value) by the least square method, the error component superimposed on the roller restraining surface shape data J _d (e.g., warped shape of the workpiece 27, the rolling guide 78 The influence of motion error, accuracy error of sensor 105, etc.) can be reduced.

In the case of estimating the amount of movement G2 (movement amount estimation value) by the least square method, it first and the number of the second predetermined position measuring device 19 is measured often, superimposed on the roller restraining surface shape data J _d The effect of reducing the error component is great.

  The control means 13 is for performing overall control of the double-sided processing apparatus main body 11. The control unit 13 is connected to the movement amount calculation unit 12 and the rotation motor 71 of the roller position automatic adjustment mechanisms 42 to 46. The control unit 13 transmits the movement amount G (specifically, the movement amount G1 or the movement amount G2 (movement amount estimated value) described above) or the movement amount G3 transmitted from the calculation unit 12C of the movement amount calculation unit 12. (Movement amount estimated value)), the axial positions of the grooved rollers 62 to 66 (specifically, the positions of the grooves 62A to 66A) via the rotation motor 71 of the roller position automatic adjustment mechanisms 42 to 46. ) To control.

  According to the double-sided processing apparatus of the present embodiment, the first distance data d1-1 to d1- concerning the first distance from the sensor 105 to the first predetermined positions F1 to F5 of the first surface 27A of the work 27. 5 and a measuring device 19 that acquires second distance data d2-1 to d2-5 related to a second distance from the sensor 105 to the second predetermined positions M1 to M5 of the second surface 27B of the work 27; The first distance data d1-1 to d1-5 and the first distance data d1-1 are set so that the roller restraint surface J formed by the grooves 62A to 66A of the plurality of grooved rollers 62 to 66 becomes the rotation locus surface H (predetermined surface). Based on the distance data d2-1 to d2-5 of 2, the movement amount calculation means 12 for obtaining the movement amount G of the grooved rollers 62 to 66 in the axial direction, and a plurality of grooved rollers 62 according to the movement amount G B to automatically adjust the axial position of ~ 66 By providing the automatic position adjustment mechanisms 42 to 46, the axial positions of the grooved rollers 62 to 66 can be easily adjusted, and the both surfaces 27A and 27B of the workpiece 27 can be processed with high accuracy. it can.

  In the double-side processing apparatus 10 of the present embodiment, when automatically adjusting the axial position of the grooved rollers 62 to 66, the position of one of the grooved rollers 62 to 66 is fixed, The position of the other four grooved rollers in the axial direction may be adjusted using the position of the grooved roller in the axial direction as a reference. In this case, when the positions of the grindstones 25 and 35 are adjusted by moving the grinding spindles 23 and 33 so that the distance from the work restraint surface J to the grindstone 25 and the distance from the work restraint surface J to the grindstone 35 are substantially equal. Good.

  By adjusting the position of the grooved rollers 62 to 66 in the axial direction by such a method, it is not necessary to adjust the position of all the grooved rollers 62 to 66. The time required for the position adjustment in the direction can be shortened.

  Moreover, in the double-sided processing apparatus 10 of this Embodiment, although demonstrated taking the case where the grindstones 25 and 35 were used as a 1st and 2nd process member as an example, the 1st and 2nd process members are the grindstone 25. , 35. The present embodiment can also be applied to, for example, a double-sided processing apparatus including a polishing cloth (a processing member used when mirroring the both surfaces 27A and 27B of the work 27) instead of the grindstones 25 and 35. Also in this case, the same effect as the double-sided processing apparatus 10 of this Embodiment can be acquired.

  Furthermore, in the double-sided processing apparatus 10 of the present embodiment, the case where the measuring device 19 is provided on the pedestal 24 has been described as an example, but the measuring device 19 may be provided on the grinding spindle 23. Further, the measuring device 19 may be provided on both sides of the work holding device 18. By providing the measuring device 19 on both sides of the work holding device 18, it becomes possible to measure both surfaces 27A and 27B of the work 27 at the same time. Therefore, it takes time to acquire the first distance data and the second distance data. It can be shortened.

  FIG. 10 is a flowchart showing a processing method of the double-sided processing apparatus according to the embodiment of the present invention.

  Referring to FIG. 10, first distance data d1-1 to d1-5 relating to a first distance from sensor 105 to first predetermined positions F1 to F5, and second predetermined positions M1 to M5 from sensor 105. The second distance data d2-1 to d2-5 relating to the second distance up to is acquired, and the movement amount G2 (movement amount estimated value) of the grooved rollers 62 to 66 is estimated by the least square method. As an example, a processing method of the double-sided processing apparatus 10 according to the present embodiment will be described.

  When the process shown in FIG. 10 is started, first, in STEP 121, the work holding device 18 holds the first surface 27A of the work 27 and the sensor 105 so as to face each other, and the work 27 is rotated. The rotation speed of the work 27 can be set to several tens of rpm, for example.

  In STEP 122, the grinding spindle 23 is moved, and the sensor 105 is moved to a position where the sensor 105 can measure the first surface 27A of the workpiece 27.

  Next, in STEP 123, the sensor 105 measures the first distance from the sensor 105 to the first predetermined position F1, and acquires the first distance data d1-1. The acquired first distance data d1-1 is transmitted to the correction unit 12B of the movement amount calculation means 12. As described above, in STEP 123, the first distances from the first predetermined positions F1 to F5 are not measured at the same time, but the first distances from the sensor 105 to the first predetermined positions F1 to F5 are collectively measured. A first distance from one predetermined position to the sensor 105 is measured to obtain one first distance data. Thereafter, the process proceeds to STEP 124.

  Subsequently, in STEP124, when the first distance data d1-1 to d1-5 are transmitted from the sensor 105, the correction unit 12B causes each of the first distance data d1-1 to d1-5 to be transmitted. Are obtained as average value data d1-1A to d1-5A. The central value data d1-1A to d1-5A are transmitted to the calculation unit 12C of the movement amount calculation means 12.

  In this way, by averaging the first distance data d1-1 to d1-5, measurement error components (for example, grooved rollers 62 to 66 included in the first distance data d1-1 to d1-5). Motion error component) due to the vibration of the movement can be reduced.

  Next, in STEP 125, it is determined whether or not the acquisition of the center value data d1-1A to d1-5A related to the first predetermined positions F1 to F5 is completed. If a negative determination is made in STEP 125 (No), the process returns to STEP 123. Further, when an affirmative determination is made in STEP 125 (Yes), the process proceeds to STEP 126.

  In STEP 126, the work 27 is reversed from the state of the work 27 in STEP 121, and the work 27 is set on the work holding device 18 so that the second surface 27B of the work 27 and the sensor 105 face each other. Rotate. The rotation speed of the work 27 can be set to several tens of rpm, for example.

  Next, in STEP 127, the grinding spindle 23 is moved, and the sensor 105 is moved to a position where the sensor 105 can measure the second surface 27B of the workpiece 27.

  In STEP 128, the sensor 105 measures the second distance from the sensor 105 to the second predetermined position M1, and obtains second distance data d2-1. The second distance data d2-1 is transmitted to the correction unit 12B of the movement amount calculation means 12. As described above, in STEP 128, instead of collectively measuring the five second distances from the sensor 105 to the second predetermined positions M1 to M5, one of the second predetermined positions M1 to M5 is measured. The second distance from the predetermined position 2 to the sensor 105 is measured to obtain one second distance data. Thereafter, the process proceeds to STEP 129.

  Subsequently, in STEP 129, when the first distance data d1-1 to d1-5 are transmitted from the sensor 105, the correction unit 12B causes each of the second distance data d2-1 to d2-5 to be transmitted. Are obtained as average value data d2-1A to d2-5A. The center value data d2-1A to d2-5A are transmitted to the calculation unit 12C of the movement amount calculation means 12.

  Thus, by averaging the second distance data d2-1 to d2-5, measurement error components (for example, grooved rollers 62 to 66 included in the second distance data d2-1 to d2-5). Motion error component) due to the vibration of the movement can be reduced.

  Next, in STEP 130, it is determined whether or not the acquisition of the center value data d2-1A to d2-5A related to the second predetermined positions M1 to M5 is completed. If a negative determination is made in STEP 130 (No), the process returns to STEP 128. Further, when an affirmative determination is made in STEP 130 (in the case of Yes), the process proceeds to STEP 131.

Then, in STEP131, the computing section 12C, and a central value data d1-1A~d1-5A the central value data d2-1A~d2-5A are averaged, the roller restraint surface shape data _{J d} is obtained. The roller restraining surface shape data J _d is stored in the storage unit 12A.

Thus, a center value data d1-1A~d1-5A the central value data d2-1A~d2-5A by averaging, by obtaining the roller restraining surface shape data _{J d,} the roller restraint surface shape data _{J d} The error component resulting from the shape of the workpiece 27 (specifically, warpage, waviness, etc.) included in the workpiece can be reduced.

Then, in STEP132, the arithmetic unit 12C, the roller restraint surface shape data _{J d,} the roller displacement data _{F C} amount of axial movement of the grooved rollers 62 to 66 by the least squares method using the data, such as G2 (amount of movement Estimated value) is estimated. This movement amount G2 (movement amount estimated value) is transmitted to the control means 13.

Thus, by estimating the movement amount G2 (movement amount estimation value) by the least square method, the error component superimposed on the roller restraining surface shape data J _d (e.g., warped shape of the workpiece 27, the rolling guide 78 Motion errors, accuracy errors of the sensor 105, etc.) can be reduced.

  Next, in STEP 133, the double-sided processing apparatus main body 11 is warmed up, and the state of the double-sided processing apparatus main body 11 is brought close to the state during workpiece processing. Specifically, the temperature in the double-sided processing apparatus main body 11 (particularly, the region where the workpiece 27 is processed) is brought closer to the temperature at which the workpiece is processed.

  Subsequently, in STEP 134, in the state in which the double-sided processing apparatus main body 11 is warmed up, the roller position automatic adjustment mechanisms 42 to 46 are used in the axial direction of the grooved rollers 62 to 66 based on the movement amount G2 (movement amount estimation value). Adjust the position automatically.

  As described above, by automatically adjusting the axial positions of the grooved rollers 62 to 66, the axial positions of the grooved rollers 62 to 66 can be easily adjusted. Further, by adjusting the position of the grooved rollers 62 to 66 in the axial direction in a state in which the temperature in the double-sided processing apparatus main body 11 is close to the temperature at the time of workpiece processing, the effect of the temperature at the time of processing is adjusted. It can be reflected on the restraint surface J.

Next, in STEP 135, the shape of the roller restraint surface J after the position adjustment of the grooved rollers 62 to 66 is measured. Specifically, the sensor 105 measures the distance from the second predetermined position M1 to M5 of the second surface 27B of the work 27 to the sensor 105, thereby obtaining the shape of the roller restraint surface J. Roller restraining surface shape data _{J h} on the shape of the obtained roller restraining surface J at STEP135 is transmitted to the correction unit 12B of the moving amount calculation means 12.

In STEP 136, the correction unit 12B of the movement amount calculation unit 12 confirms whether or not the shape of the adjusted roller restraint surface J is substantially parallel to the rotation locus surface H (predetermined surface). . Specifically, the roller restraint surface shape data J _h is the shape of the roller restraint surface J of the adjusted depending on whether meets data T _J for a given shape of the roller restraining surface J stored in the storage unit 12A rotates It is determined whether or not it is substantially parallel to the locus surface H (predetermined surface). If the shape of the roller restraint surface shape data J _h meets data T _J, it determined that the shape of the roller restraint surface J of the adjusted is substantially parallel to the rotation trajectory plane H (predetermined surface) (Yes ) Determining the shape of the roller restraint surface shape data J _h is if you do not meet the data T _J, the shape of the roller restraint surface J of the adjusted not substantially parallel to the rotation trajectory plane H (predetermined surface) (No) Is done. If a negative determination is made in STEP 136 (in the case of No), the process proceeds to STEP 137. If the determination is affirmative (Yes), the process proceeds to STEP 139.

  In STEP 137, the correction unit 12B corrects the movement amount G2 (movement amount estimation value) containing a large amount of error components, and acquires the movement amount G3 (movement amount estimation value). Specifically, as described above, the movement amount G3 (movement amount estimation value) is obtained by multiplying the movement amount G2 (movement amount estimation value) by the correction coefficient. The movement amount G3 (movement amount estimated value) acquired in STEP 137 is transmitted to the control means 13.

  In STEP 138, the position of the grooved rollers 62 to 66 in the axial direction is adjusted by the roller position automatic adjustment mechanisms 42 to 46 on the basis of the movement amount G3 (movement amount estimated value), and the process returns to STEP 135.

  In this way, the movement amount G2 (movement amount estimated value) is corrected, the movement amount G3 (movement amount estimation value) is obtained, and the roller position automatic adjustment mechanism 42 is based on the movement amount G3 (movement amount estimation value). The roller restraint surface J formed by the grooves 62A to 66A of the grooved rollers 62 to 66 is adjusted to the rotation locus surface H (predetermined surface) by adjusting the axial positions of the grooved rollers 62 to 66 by. It can be made substantially parallel to.

  In STEP139, the processing of the workpiece 27 by the grindstones 25 and 35 is started. Usually, a plurality of workpieces are set in the double-sided processing apparatus main body 11, and both surfaces 27A and 27B of the workpiece 27 are processed one by one.

  Subsequently, in STEP 140, it is determined whether or not the processing of all the workpieces 27 in which the workpiece is set on the double-sided processing apparatus main body 11 has been completed. If a negative determination is made in STEP 140 (No), the process returns to STEP 139. Moreover, when affirmation determination is carried out (in the case of Yes), all the processes shown in FIG. 10 are complete | finished.

  As described above, the first and second distance data d1-1 to d2 are set so that the roller restraint surface J formed by the grooves 62A to 66A of the grooved rollers 62 to 66 becomes the rotation locus surface H (predetermined surface). Based on d1-5, d2-1 to d2-5, an axial movement amount G of the grooved rollers 62 to 66 is obtained, and based on this movement amount G, grooves 62A to 66A of the grooved rollers 62 to 66 are obtained. The positions of the grooves 62A to 66A of the grooved rollers 62 to 66 can be easily adjusted, and both surfaces 27A and 27B of the work 27 can be processed with high accuracy.

  Further, when the movement amount G2 (movement amount estimation amount) obtained by the least square method includes many error components, the movement amount G2 (movement amount estimation amount) is corrected, and the movement amount G3 ( Movement amount estimation amount) is obtained, and the positions of the grooves 62A to 66A of the grooved rollers 62 to 66 are automatically adjusted based on the movement amount G3 (movement amount estimation amount), whereby the both surfaces 27A and 27B of the workpiece 27 are adjusted. It can be processed with high accuracy.

  In the flowchart shown in FIG. 10, STEP 136 is deleted, STEPs 137 and 138 are provided between STEP 135 and STEP 139, and a movement amount G3 (movement amount estimated value) is provided each time. This movement amount G3 (movement amount) The axial position of the grooved rollers 62 to 66 may be adjusted based on the estimated value.

  FIG. 11 is a diagram illustrating a flowchart for explaining the processing method of the double-sided processing apparatus after replacing the grooved roller.

  When the processing shown in FIG. 11 is started, first, in STEP 152, the same processing as STEP 121 to STEP 130 described in FIG. 10 is performed, and the center value data d1- is obtained by averaging the first distance data d1-1 to d1-5. 1A to d1-5A and center value data d2-1A to d2-5A obtained by averaging the second distance data d2-1 to d2-5 are acquired.

Then, in STEP153, the same procedure as STEP131 described in FIG. 10, to obtain a roller restraint surface shape data _{J d.} Next, in STEP 154, the movement amount G in the axial direction of the grooved rollers 62 to 66 (specifically, the movement amount G1, the movement amount G2, or the movement amount G3) is obtained.

Next, in STEP 155, the axial positions of the grooved rollers 62 to 66 are automatically adjusted based on the movement amount G acquired in STEP 154. Subsequently, in STEP156, the same procedure as STEP135 described in FIG. 10, by measuring the roller restraining surface J after positional adjustment of the axial grooved rollers 62-66, to obtain a roller restraint surface shape data _{J h} .

  Next, in STEP 157, it is determined whether or not the roller restraint surface J is substantially parallel to a predetermined surface. If a negative determination is made (in the case of No), the process returns to STEP 154. If an affirmative determination is made (Yes), the process proceeds to STEP 158. In STEP157, the same process as STEP136 demonstrated in FIG. 10 is performed.

  In STEP158, the double-sided processing apparatus main body 11 is warmed up to bring the state of the double-sided processing apparatus main body 11 closer to the state during workpiece processing. Specifically, the temperature in the double-sided processing apparatus main body 11 (particularly, the region where the workpiece 27 is processed) is brought closer to the temperature at which the workpiece is processed.

  Subsequently, in STEP 159, the shape of the roller restraint surface J after the position adjustment of the grooved rollers 62 to 66 is measured in a state where the double-sided processing apparatus main body 11 is warmed up. In STEP 159, processing similar to STEP 135 described in FIG. 10 is performed.

  Next, in STEP 160, it is determined whether or not the roller restraint surface J is substantially parallel to a predetermined surface. If a negative determination is made (in the case of No), the process returns to STEP 154. If the determination is affirmative (Yes), the process proceeds to STEP 161.

  In STEP 161, processing of the work 27 by the grindstones 25 and 35 is started. Usually, a plurality of workpieces are set in the double-sided processing apparatus main body 11, and both surfaces 27A and 27B of the workpiece 27 are processed one by one.

  Subsequently, in STEP 162, it is determined whether or not the processing of all the workpieces 27 in which the workpiece is set in the double-sided processing apparatus main body 11 has been completed. If a negative determination is made in STEP 162 (in the case of No), the process returns to STEP 161. Moreover, when affirmation determination is carried out (in the case of Yes), all the processes shown in FIG. 11 are complete | finished.

  As described above with reference to FIG. 11, the movement amount G of the grooved rollers 62 to 66 is calculated, the position of the grooved rollers 62 to 66 is adjusted in the axial direction, the roller restriction surface J is measured after the position adjustment, and the roller restriction surface. By repeatedly determining whether or not J has a predetermined shape, the roller constraining surface J can be made substantially parallel to the rotation locus surface H (predetermined surface), and both surfaces 27A and 27B of the workpiece 27 can be obtained. Can be processed with high accuracy.

  According to the processing method of the double-sided processing apparatus of the present embodiment, the roller restraint surface J formed by the grooves 62A to 66A of the grooved rollers 62 to 66 is the rotation locus surface H (predetermined surface). Based on the first and second distance data d1-1 to d1-5, d2-1 to d2-5, the movement amount G in the axial direction of the grooved rollers 62 to 66 is obtained, and based on the movement amount G, By automatically adjusting the positions of the grooves 62A to 66A of the grooved rollers 62 to 66, the positions of the grooves 62A to 66A of the grooved rollers 62 to 66 can be easily adjusted, and the both surfaces 27A and 27B of the workpiece 27 can be adjusted. Can be processed with high accuracy.

  The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to such specific embodiments, and within the scope of the present invention described in the claims, Various modifications and changes are possible.

  In the present embodiment, the first distance data d1-1 to d1-5 from the first predetermined positions F1 to F5 of the first surface 27A of the work 27 to the sensor 105, or the second distance of the work 27. Based on the second distance data d2-1 to d2-5 from the second predetermined positions M1 to M5 of the surface 27B to the sensor 105, the movement amount G is obtained, and on the basis of the movement amount G, the grooved rollers 62 to After adjusting the position 66, both surfaces 27A and 27B of the workpiece 27 may be processed.

Further, if the shape of the workpiece 27 which is processed by means of a double-sided processing device 10 is different from the data T _w for a given shape of the workpiece 27 stored in the storage unit 12A, the roller restraint surface J is rotational locus plane H (predetermined A movement amount G that becomes a surface) is obtained, and the axial positions of the grooved rollers 62 to 66 may be automatically adjusted based on the movement amount G. By processing the workpiece 27 by such a method, it is possible to reduce the frequency of the axial position adjustment of the grooved rollers 62 to 66, so that the productivity of the double-sided processing apparatus 10 can be improved. it can.

  The present invention can be applied to a processing method of a double-sided processing apparatus that includes a work holding device that holds a work and processes both sides of the work.

It is a schematic block diagram of the conventional double-sided processing apparatus. It is a schematic block diagram of the double-sided processing apparatus which concerns on embodiment of this invention. It is the figure which looked at D of the workpiece holding apparatus shown in FIG. It is sectional drawing of the EE line direction of the roller position adjustment mechanism shown in FIG. It is sectional drawing of the HH line direction of the roller position adjustment mechanism shown in FIG. It is a figure for demonstrating the positional relationship of a grindstone and a sensor. It is a figure which shows an example of the 1st predetermined position which a sensor measures. It is a figure which shows an example of the 2nd predetermined position which a sensor measures. It is a figure which shows typically a mode that roller restraint surface shape data was decomposed | disassembled into the inclination component and the wave | undulation component. It is a figure which shows the flowchart of the processing method of the double-sided processing apparatus which concerns on embodiment of this invention. It is a figure which shows the flowchart for demonstrating the processing method of the double-sided processing apparatus after replacement | exchange of a grooved roller.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Double-sided processing apparatus 11 Double-sided processing apparatus main body 12 Movement amount calculation means 12A Memory | storage part 12B Correction | amendment part 12C Calculation part 13 Control means 15 Base 15A, 84 Plate part 15B, 15C, 24A, 34A, 85, 86 Protrusion part 16 1st Processing device 17 Second processing device 18 Work holding device 19 Measuring device 21, 31 Saddle moving device 22, 32 Saddle 23, 33 Grinding spindle 24, 34 Base 24B Screw hole 25, 35 Grinding wheel 25A, 35A Grinding operation surface 27 Work 27A First surface 27B Second surface 41 Frame 41A Lower inner wall 41B Inner wall 41C Upper inner wall 42-46 Roller position automatic adjustment mechanism 52-56 Roller support mechanism 62-66 Grooved rollers 62A-66A Groove 71 Rotating motor 72 Ball screw 73 Guide Base 73A Housing part 73B Through hole 74 Screw screw bearing 75 support 77 stage 78 rolling guide 81, 82, 85, 86 protrusion 81A, 82A outer wall 85A, 86A inner wall 91, 92 first guide plate 93, 94 second guide plate 95, 96 ball 98 rotating shaft Housing member 98A Through-hole 99 Roller shaft 101 Bearing 103 Support member 104 Screw portion 105 Sensor F1 to F5 First predetermined position M1 to M5 Second predetermined position

Claims (12)

A workpiece holding device that rotatably holds the workpiece by grooves formed in a plurality of grooved rollers, and first and second processing members arranged to face each other via the workpiece holding device. Prepared,
A processing method of a double-sided processing apparatus that processes the first surface and the second surface of the workpiece by the first and second processing members,
First distance data relating to a first distance from a first predetermined position on the first surface of the workpiece to a sensor and / or from a second predetermined position on the second surface of the workpiece to the sensor. A distance data acquisition step of acquiring second distance data related to the second distance;
The plurality of grooved rollers based on the first distance data and / or the second distance data so that a roller restraint surface formed by the grooves of the plurality of grooved rollers is a predetermined surface. A movement amount calculating step for obtaining a movement amount in the axial direction of
And a roller position automatic adjustment step of automatically adjusting the axial positions of the plurality of grooved rollers based on the amount of movement. A measuring step of measuring the shape of the workpiece processed by the first and second processing members;
The double-side machining apparatus according to claim 1, wherein when the shape of the workpiece is not a predetermined shape, the axial positions of the plurality of grooved rollers are automatically adjusted based on the amount of movement. Method.   When the number of workpieces processed by the first and second processing members exceeds a predetermined number, the axial positions of the plurality of grooved rollers are automatically adjusted based on the amount of movement. The processing method of the double-sided processing apparatus of Claim 1 or 2 characterized by the above-mentioned.   4. The processing method for a double-sided processing apparatus according to claim 1, wherein each of the first and second predetermined positions includes a plurality of positions. 5.   The processing method of the double-sided processing apparatus according to any one of claims 1 to 4, wherein the first and second predetermined positions are arranged in the vicinity of the plurality of grooved rollers.   The said predetermined surface is substantially parallel to the surface which passes through the intermediate | middle of a said 1st process member and a said 2nd process member, The Claim 1 thru | or 5 characterized by the above-mentioned. Processing method for double-sided processing equipment.   The double-side processing apparatus according to any one of claims 1 to 6, wherein the movement amount is obtained by a least square method based on the first distance data and / or the second distance data. Processing method.   The processing method of the double-sided processing apparatus according to claim 7, wherein the movement amount is corrected by multiplying the movement amount obtained by the least square method by a predetermined correction coefficient.   8. The movement amount is corrected by multiplying the movement amount obtained by the least square method by a correction coefficient corresponding to the first distance data and / or the second distance data. The processing method of the double-sided processing apparatus of description. A least square approximation line is obtained based on the first distance data and / or the second distance data, the least square approximation line is used as an inclination component due to the inclination of the work holding device, and the first distance data and / Or a residual obtained by subtracting the least square approximation line from the second distance data as a swell component due to the shape of the workpiece,
According to the least square method, a first movement amount is obtained based on the slope component, and a second movement amount is obtained based on the swell component,
A correction that is the sum of a first correction movement amount obtained by multiplying the first movement amount by a first correction coefficient and a second correction movement amount obtained by multiplying the second movement amount by a second correction coefficient. 8. The processing method for a double-sided processing apparatus according to claim 7, wherein the axial positions of the plurality of grooved rollers are automatically adjusted based on a movement amount.   The processing method of the double-sided processing apparatus according to claim 10, wherein the first and second correction coefficients are predetermined values. The first correction coefficient is a correction coefficient corresponding to the tilt component,
The processing method of the double-sided processing apparatus according to claim 11, wherein the second correction coefficient is a correction coefficient corresponding to the swell component.

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