JP2007281369A - 半田接続部の形成方法、配線基板の製造方法、および半導体装置の製造方法 - Google Patents
半田接続部の形成方法、配線基板の製造方法、および半導体装置の製造方法 Download PDFInfo
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- JP2007281369A JP2007281369A JP2006108878A JP2006108878A JP2007281369A JP 2007281369 A JP2007281369 A JP 2007281369A JP 2006108878 A JP2006108878 A JP 2006108878A JP 2006108878 A JP2006108878 A JP 2006108878A JP 2007281369 A JP2007281369 A JP 2007281369A
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- Prior art keywords
- solder
- opening
- electrode pad
- solder connection
- mask
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- 229910000679 solder Inorganic materials 0.000 title claims abstract description 162
- 238000000034 method Methods 0.000 title claims abstract description 75
- 239000004065 semiconductor Substances 0.000 title claims description 42
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 10
- 230000004907 flux Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
- B23K3/0607—Solder feeding devices
- B23K3/0623—Solder feeding devices for shaped solder piece feeding, e.g. preforms, bumps, balls, pellets, droplets
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
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- H05K2201/094—Array of pads or lands differing from one another, e.g. in size, pitch or thickness; Using different connections on the pads
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
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- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
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- H05K2203/041—Solder preforms in the shape of solder balls
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- H05K2203/043—Reflowing of solder coated conductors, not during connection of components, e.g. reflowing solder paste
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- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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- Engineering & Computer Science (AREA)
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Geometry (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】第1の電極パッド107に対応する第1の開口部140Aと、第2の電極パッド110に対応する当該第1の開口部と大きさの異なる第2の開口部140Bとを有するベースマスク140上に、前記第1の開口部に対応した開口部を有するとともに前記第2の開口部を覆う第1のマスクを設置して、前記第1の電極パッドに半田ボール109Aを載置する第1の工程と、前記ベースマスク上に、前記第2の開口部に対応した開口部151Bを有するととともに前記第1の開口部を覆う第2のマスク151を設置して、前記第2の電極パッドに半田ボール112Aを設置する第2の工程と、前記半田ボールを溶融する第3の工程と、を有することを特徴とする半田接続部の形成方法。
【選択図】図2H
Description
101 コア基板
102,113 絶縁層
103,114 ソルダーレジスト層
104,106,116,120 ビアプラグ
105,115 パターン配線
107,110,117,122 電極パッド
108,111,118,123 接続層
140 ベースマスク
140A,140B 開口部
150,151 マスク
150A,151B 開口部
150B,151A 保護部
Claims (4)
- 第1の電極パッドと第2の電極パッドにそれぞれ半田接続部を形成する半田接続部の形成方法であって、
前記第1の電極パッドに対応する第1の開口部と、前記第2の電極パッドに対応する当該第1の開口部と大きさの異なる第2の開口部とを有するベースマスク上に、前記第1の開口部に対応した開口部を有するとともに前記第2の開口部を覆う第1のマスクを設置して、前記第1の電極パッドに半田ボールを載置する第1の工程と、
前記ベースマスク上に、前記第2の開口部に対応した開口部を有するととともに前記第1の開口部を覆う第2のマスクを設置して、前記第2の電極パッドに半田ボールを設置する第2の工程と、
前記半田ボールを溶融する第3の工程と、を有することを特徴とする半田接続部の形成方法。 - 前記第1の電極パッドに設置される半田ボールと、前記第2の電極パッドに設置される半田ボールの大きさが異なることを特徴とする請求項1記載の半田接続部の形成方法。
- 請求項1または2記載の半田接続部の形成方法を用いた、配線基板の製造方法。
- 請求項1または2記載の半田接続部の形成方法を用いた、半導体装置の製造方法。
Priority Applications (4)
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JP2006108878A JP2007281369A (ja) | 2006-04-11 | 2006-04-11 | 半田接続部の形成方法、配線基板の製造方法、および半導体装置の製造方法 |
US11/696,473 US7507655B2 (en) | 2006-04-11 | 2007-04-04 | Method of forming solder connection portions, method of forming wiring substrate and method of producing semiconductor device |
KR1020070035096A KR20070101157A (ko) | 2006-04-11 | 2007-04-10 | 솔더 접속부의 형성 방법, 배선 기판의 형성 방법 및반도체 장치의 제조 방법 |
TW096112414A TW200802652A (en) | 2006-04-11 | 2007-04-10 | Method of forming solder connection portions, method of forming wiring substrate and method of producing semiconductor device |
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JP2006108878A JP2007281369A (ja) | 2006-04-11 | 2006-04-11 | 半田接続部の形成方法、配線基板の製造方法、および半導体装置の製造方法 |
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US (1) | US7507655B2 (ja) |
JP (1) | JP2007281369A (ja) |
KR (1) | KR20070101157A (ja) |
TW (1) | TW200802652A (ja) |
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TW200802652A (en) | 2008-01-01 |
US7507655B2 (en) | 2009-03-24 |
KR20070101157A (ko) | 2007-10-16 |
US20070234563A1 (en) | 2007-10-11 |
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