JP2007268378A - Solution coating apparatus - Google Patents

Solution coating apparatus Download PDF

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Publication number
JP2007268378A
JP2007268378A JP2006095622A JP2006095622A JP2007268378A JP 2007268378 A JP2007268378 A JP 2007268378A JP 2006095622 A JP2006095622 A JP 2006095622A JP 2006095622 A JP2006095622 A JP 2006095622A JP 2007268378 A JP2007268378 A JP 2007268378A
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Japan
Prior art keywords
solution
nozzle
screw
tip
head
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JP2006095622A
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Japanese (ja)
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JP2007268378A5 (en
Inventor
Kenji Takahashi
健司 高橋
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Shibaura Mechatronics Corp
芝浦メカトロニクス株式会社
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Priority to JP2006095622A priority Critical patent/JP2007268378A/en
Publication of JP2007268378A publication Critical patent/JP2007268378A/en
Publication of JP2007268378A5 publication Critical patent/JP2007268378A5/ja
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a solution coating apparatus provided with a coating head capable of preventing unwiping from occurring on the tip surface of a nozzle when the tip surface of a nozzle plate is cleaned with a wiping blade.
An application head 16 in which a nozzle plate 22 having a nozzle 31 for discharging a solution and a screw hole 60 provided around the nozzle 31 is fixed to a main body 20 by inserting a screw 21 into the screw hole 60. And the wiping member 35 that wipes off the solution adhering to the tip surface of the nozzle 31, the nozzle plate 22 discharges the solution from the tip surface 22 </ b> A of the nozzle 31 through the opening surface 22 </ b> B of the screw hole 60. What is formed at a position retracted in the direction D.
[Selection] Figure 2

Description

  The present invention relates to a solution coating apparatus that sprays a solution from a nozzle and coats it on a substrate.

  A functional thin film such as an alignment film or a resist is formed on a substrate surface of a liquid crystal display device such as a glass substrate or a semiconductor wafer. In order to form such a functional thin film on the substrate surface, a solution coating apparatus having a coating head for spraying and coating a solution on the substrate surface by an ink jet method may be used.

  Patent Document 1 discloses a solution coating apparatus including such a coating head. The coating head has a rectangular cylindrical main body part and a nozzle plate on the lower surface of the main body part. A plurality of nozzles are formed in a staggered manner along the direction perpendicular to the substrate transport direction on the nozzle plate. The solution is sprayed onto the substrate surface.

Also disclosed is a technique in which a wiping member formed of an elastic material such as blade-like rubber is provided, and the wiping member reciprocates in the horizontal direction to wipe off the solution remaining on the lower surface of the head.
JP2004-223394

  In the coating head of such a solution coating apparatus, a nozzle plate 122 is conventionally fixed to a main body 120 with screws 121 as shown in FIG. Further, as shown in FIG. 4A, an opening surface 122B in which a plurality of screw holes 160 are opened is formed on the peripheral edge on the same plane as the tip surface 122A of the nozzle plate 122 in which the plurality of nozzles 131 are opened. A nozzle 121 is fixed to the main body 120 by inserting a screw 121 into the screw hole 160. The screw hole 160 is a through hole having a counterbore hole 160C, and the head 121A of the screw 121 having a cross hole in the counterbore hole 160C is retracted in the solution discharge direction from the height of the opening surface 122B of the screw hole 160. It is accommodated so as to be in position.

  However, in the above, since the opening surface 122B of the screw hole 160 is formed on the same plane as the front end surface 122A where the nozzle 131 opens, when the front end surface 122A of the nozzle is cleaned by the wiping member 135, A part of the solution wiped off by the wiping member 135 enters and remains in the counterbore 160C of the screw hole 160, and there is a problem that it is difficult to keep the tip surface 122A of the nozzle clean. . In addition, the solution accumulated in the counterbore 160C may fall on the substrate during application of the solution, and the quality of the functional thin film formed on the substrate may be impaired.

  An object of the present invention is to provide a solution provided with an application head that can prevent the occurrence of wiping residue on the front end surface of the nozzle when the front end surface of the nozzle plate is cleaned with a wiping blade, thereby improving the application quality. It is to provide a coating apparatus.

  The invention according to claim 1 is a coating head in which a nozzle plate having a nozzle for discharging a solution and a screw hole provided around the nozzle is inserted into the screw hole and fixed to the main body, and the tip of the nozzle In a solution coating apparatus provided with a wiping member that wipes off the solution adhering to the surface, the nozzle plate is formed by forming the opening surface of the screw hole at a position retracted from the tip surface of the nozzle in the solution discharge direction. .

  According to a second aspect of the present invention, in addition to the first aspect of the present invention, when the nozzle plate is fixed to the main body with a screw, the screw hole has an opening surface with respect to the direction of solution discharge rather than the tip end surface of the nozzle. It is formed so as to be in a retracted position.

  According to the present invention, since the opening surface of the screw hole is formed in the nozzle plate at a position retracted with respect to the discharge direction of the solution from the front end surface where the nozzle opens, when the front end surface of the nozzle is cleaned by the wiping member The solution can be prevented from entering the screw hole. As a result, there is no remaining wiping of the solution and the tip surface of the nozzle can be kept clean, so that the coating quality can be improved.

  FIG. 1 is a schematic view showing a side of a solution coating apparatus, FIG. 2 shows a coating head, (A) is a bottom view, (B) is a side view of the main part in the long side direction of (A), and (C) is FIG. 3A is a side view of the main part in the short side direction of FIG. 3A, and FIG. 3 is a side view in the long side direction of the nozzle plate of another embodiment.

An embodiment of the present invention will be described below with reference to the drawings.
Example 1
A solution coating apparatus 10 shown in FIG. 1 has a base 11, and a pair of rails 12 spaced at a predetermined interval are laid along the longitudinal direction (X-axis direction in the drawing) of the base 11 on the upper surface of the base 11. The A transfer table 13 is movably provided on the rail 12 and is driven by a driving means (not shown). A large number of support pins 14 are provided on the upper surface of the transport table 13, and a glass substrate 15 used for manufacturing a liquid crystal display device, for example, is placed on the support pins 14.

  Above the transport path of the substrate 15 transported by the transport table 13, a plurality of coating heads 16 for spraying and coating a solution for forming a functional thin film such as an alignment film on the surface of the substrate 15, for example, a polyimide solution, by an inkjet method. (Only one coating head 16 is shown in FIG. 1) is disposed along a direction (Y-axis direction in the drawing) orthogonal to the moving direction S of the substrate 15.

  As shown in FIG. 2, the coating head 16 has a rectangular main body 20 and a nozzle plate 22 fixed to the lower end surface of the main body 20 with a plurality of screws 21.

  As shown in FIG. 2, a plurality of nozzles 31 are formed on the nozzle plate 22 at an equal pitch along a direction orthogonal to the moving direction S of the substrate 15, and the plurality of nozzles 31 are 2 in the moving direction S of the substrate 15. The rows are formed parallel to each other. The rear row nozzle 31B is positioned in the middle of the front row nozzle 31A (a half position of the pitch of the front row nozzle 31A) so that the front row nozzle 31A and the rear row nozzle 31B have the same pitch. The front end surface 22A of the nozzle plate 22 through which the plurality of nozzles 31 are open is formed as a flat surface, and the coating head 16 is disposed with the front end surface 22A facing down and the front end surface 22A being parallel to the substrate 15. Is done.

  The ink jet coating head 16 is well known and will not be described in detail. However, a liquid chamber is provided for each nozzle 31, and a volume change occurs in the liquid chamber by a piezoelectric element disposed for each liquid chamber. By doing so, the solution in the liquid chamber can be formed into droplets and sprayed from the nozzle 31.

  As shown in FIG. 1, the solution coating apparatus 10 serves as a wiping member for cleaning the solution adhering to the tip end surface 22 </ b> A of the coating head 16 on one end surface portion of the transport table 13 as described below. A cleaning device 40 is provided that includes an elastic blade 35, a moving device 36 that moves the elastic blade 35 along the tip surface 22 </ b> A of the coating head 16, and a cleaning device 41 for cleaning the solution attached to the elastic blade 35. .

  The elastic blade 35 of the cleaning device 40 is made of an elastic material such as rubber, and is attached to the mounting block 43 fixed on the rotating shaft 42 with respect to the arrangement direction of the nozzles 31 as indicated by a two-dot chain line in FIG. And installed in a state inclined at a predetermined angle. The rotary shaft 42 is attached to a box-shaped cleaning tank 44 having a width corresponding to the length of the general transfer table 13 in the Y-axis direction so as to be rotatable along the Y-axis direction. A plurality of mounting blocks 43 corresponding to the number are mounted.

  On the other hand, on the horizontal portion 50A of the L-shaped bracket 50 attached to the front surface of the transfer table 13, a cleaning tank 44 and an elastic blade 35 supported by the cleaning tank 44 via a rotating shaft 42 are provided. A moving device 36 of the cleaning device 40 that moves along the surface 22A is provided. The moving device 36 includes an elevating cylinder 51 that moves the cleaning tank 44 up and down, and a slide device 52 that moves the elevating cylinder 51 along the transport direction S of the substrate 15. The elevating cylinder 51 includes a cylinder and a piston rod 51B that moves up and down in the cylinder 51A, and a cleaning tank 44 is fixed to the tip of the piston rod 51B.

  The slide device 52 includes a guide rail 53 laid along the moving direction S of the substrate 15 on the horizontal portion 50A of the L-shaped bracket 50, and a slide table 54 that moves along the guide rail 53. 54 is driven by a motor 55. Note that the conveyance table 13 may be moved instead of the guide rail 53 and the slide table 54.

  The cleaning device 41 for the elastic blade 35 includes a cleaning tank 44, a solvent 56 stored in the cleaning tank 44, and the elastic blade 35 attached to the attachment block 43 at a first position on the application head 16 side and below. It consists of an intermittent rotation mechanism (not shown) that stops rotation at the second position on the cleaning tank 44 side. The intermittent rotation mechanism is connected to the rotation shaft 42 and includes a driving means such as a motor for driving the rotation shaft 42, a reduction gear, and the like. The elastic blade 35 is stopped from rotating from the first position to the second position 180 degrees in the clockwise direction by the intermittent rotation mechanism via the rotation shaft 42, and the elastic blade 35 is used as the solvent 56 in the cleaning tank 44. It is immersed and the solution adhering to the elastic blade 35 is washed.

  The solution coating apparatus 10 includes a control device (not shown) that controls the driving means of the transport table 13, the piezoelectric element of the coating head 16, the moving device 36 of the cleaning device 40, the intermittent rotation mechanism of the cleaning device 41, and the like.

The coating apparatus 10 having the above configuration sprays and applies a solution to the upper surface of the substrate 15 as follows.
The driving means of the transfer table 13 is driven to move the transfer table 13 in the transfer direction S of the substrate 15 from the position of FIG. During this movement, in accordance with the timing at which the substrate 15 passes under the coating head 16, a droplet-like solution is ejected and discharged from the plurality of nozzles 31 of each coating head 16 to apply the solution onto the surface of the substrate 15. The solution applied on the substrate 15 spreads on the substrate 15 to form a functional thin film.

  The coating apparatus 10 having the above configuration performs the cleaning of the front end surface 22A of the coating head 16 as follows after spraying and discharging the solution from the plurality of nozzles 31 of each coating head 16 to apply the solution to the substrate 15.

  The conveyance table 13 is moved in the direction opposite to the movement direction S from the application end position of the substrate 15, and the elastic blade 35 is positioned in front of the application head 16 as shown in FIG. 1.

  Next, the lifting / lowering cylinder 51 of the moving device 36 is driven to raise the cleaning tank 44 and the elastic blade 35 supported by the cleaning tank 44 from the original position so that the tip 35A of the elastic blade 35 is the tip surface of the coating head 16. After being positioned at a height position where it can come into contact with 22A, the slide table 54 of the slide device 52 is driven to advance the cleaning tank 44 and the elastic blade 35 in the moving direction S of the substrate 15. Thereby, the tip portion 35A of the elastic blade 35 wipes off the solution adhering to the tip surface 22A of the coating head 16, and cleans the tip surface 22A of the coating head 16.

  Next, the lift cylinder 51 is driven to lower the cleaning tank 44 and the elastic blade 35, and the slide table 54 of the slide device 52 is further driven so that the cleaning tank 44 and the elastic blade 35 are opposite to the moving direction S of the substrate 15. Back in the direction of, return to the original position.

  Next, the intermittent rotation mechanism of the cleaning device 41 is driven to rotate the rotating shaft 42, and the elastic blade 35 is rotated 180 degrees clockwise from the first position on the upper coating head 16 side, so that the lower cleaning tank The elastic blade 35 is immersed in the solvent 56 at the second position on the 44 side. The solvent 56 in the cleaning tank 44 dissolves and cleans the solution adhering to the elastic blade 35.

  Next, the rotary shaft 42 is rotated 180 degrees clockwise from the first position, and the elastic blade 35 is returned to the first position.

  By the way, the nozzle plate 22 of the coating head 16 has a conventional peripheral portion of a tip end surface 22A where a plurality of nozzles 31 for jetting and discharging a solution are open as shown in FIGS. 2 (A), (B), and (C). The region where the screw hole 160 of the nozzle plate 122 is formed is flattened by a counterbore depth of the screw hole 160 with a width that can be taken in, and along each long side of the peripheral edge of the rectangular frame shape that has been shaved. A plurality (five) of screw holes 60 are formed at equal intervals. That is, as shown in FIG. 2B, the nozzle plate 22 has an opening surface 22B of the screw hole 60 at a position retracted by ΔH1 with respect to the solution discharge direction D from the tip surface 22A of the nozzle plate 22. In addition, pins 63 for positioning the nozzle plate 22 with respect to the main body portion 20 are inserted into the respective short sides of the trimmed peripheral edge portion.

  As shown in FIG. 2B, the screw hole 60 is a straight through hole formed in the nozzle plate 22, and a female screw hole 61 corresponding to the screw hole 60 is formed in the main body portion 20. The screw 21 includes a head portion 21A, a shaft portion 21B, and a male screw portion 21C, and a cross hole 21D for tool engagement is formed at the top of the head portion 21A. The screw 21 is inserted into the screw hole 60 of the nozzle plate 22, the male screw portion 21C is screwed to the female screw hole 61 of the main body portion 20, and the nozzle plate 22 is sandwiched between the screw head portion 21A and the main body portion. Fastened to 20. The opening surface 22B of the screw hole 60 forms the seating surface of the screw head 21A. When the nozzle plate 22 is fixed to the main body 20 with the screw 21, the head 21A of the screw 21 is on the opening surface 22B of the screw hole 60. Protrusively.

  Further, the opening surface 22B of the screw hole 60 is such that when the nozzle plate 22 is fixed to the main body 20 with the screw 21, the head 21A of the screw 21 is more than the front end surface 22A of the nozzle 31 as shown in FIG. It is formed at a position that is retracted by ΔH 2 with respect to the solution discharge direction D.

  The elastic blade 35 (indicated by a two-dot chain line in FIG. 2A) is moved along the tip surface 22A of the coating head 16 in the transport direction S of the substrate 15, and the solution adhering to the tip surface 22A is wiped off. The elastic blade 35 attached at an angle causes the solution adhering to the tip surface 22A of the coating head 16 to flow laterally and rearward along the elastic blade 35 to wipe the solution, and the wiped solution is removed from the cleaning tank 44. Let fall. In order to prevent the tip 35A of the elastic blade 35 from being cut or damaged, the four sides and the four corners of the tip surface 22A of the nozzle plate 22 are chamfered in an R shape.

According to the present embodiment, the following operational effects can be obtained.
(a) Since the opening surface 22B of the screw hole 60 is formed in the nozzle plate 22 at a position retreated with respect to the solution discharge direction D from the tip surface 22A where the nozzle 31 opens, the tip surface of the nozzle 31 is formed by the elastic blade 35. It is possible to prevent the solution from entering the screw hole 60 when 22A is cleaned. As a result, there is no remaining wiping of the solution, the tip surface 22A of the nozzle 31 can be kept clean, and the solution remaining on the tip surface 22A falls onto the substrate 15 and the functionality formed on the substrate 15 Since it can prevent impairing the quality of the thin film, the coating quality can be improved.

  (b) When the elastic blade 35 comes into contact with the head 21A of the screw 21 in which the cross hole 21D is formed, the solution scraped off by the elastic blade 35 and attached to the elastic blade 35 is transferred to the head 21A of the screw 21. It will enter the cross hole 21D. If this overlaps, the solution accumulated in the cross hole 21D of the head 21A of the screw 21 may fall by its own weight. When the dropped tip is on the substrate 15, the functional thin film formed on the substrate 15 becomes defective.

  However, according to the present embodiment, the opening surface 22B of the screw hole 60 is such that when the nozzle plate 22 is fixed to the main body portion with the screw 21, the head 21A of the screw 21 discharges the solution more than the tip surface 22A of the nozzle 31. Since it is formed at a position that is a position retracted with respect to the direction D, the elastic blade 35 becomes difficult to contact the head 21A of the screw 21 and the solution can be prevented from collecting in the cross hole 21D of the head 21A of the screw 21. As a result, the occurrence of defects in the functional thin film can be prevented in advance, so that the coating quality can be improved.

(Example 2)
In the first embodiment, in the screw hole 60, the opening surface 22B of the screw hole forms a seating surface of the head portion 21A of the screw 21, and the head portion 21A of the screw 21 protrudes on the opening surface 22B of the screw hole 60. In the second embodiment, as shown in FIG. 3, a screw hole 64 having a counterbore 64A is formed in the opening surface 22B of the screw hole 60 of the first embodiment. By doing in this way, the same operational effects as those of the first embodiment can be obtained.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and even if there is a design change or the like without departing from the gist of the present invention. It is included in the present invention. For example, in the present embodiment, the coating head is of a type that ejects and discharges a solution by an inkjet method, but the coating head may be other than the inkjet method.

  Moreover, although the example which uses an elastic blade as a wiping member was shown, the wiping member may be a wiping cloth which absorbs a solution, for example.

  Note that it is not always necessary that the head of the screw is in a position retracted with respect to the discharge direction of the solution from the tip surface of the nozzle plate. For example, the top of the screw head may be flush with the tip of the nozzle. In this case, the screw having a flat head such as a hexagonal bolt is more elastic than the screw having a cross hole formed in the head as in the above embodiment. Even when they come into contact with each other, it is preferable because the solution scraped off by the elastic blade and attached to the elastic blade is unlikely to collect on the head of the screw.

It is a schematic diagram which shows the side surface of a solution coating device. The coating head is shown, (A) is a bottom view, (B) is a side view of the main part in the long side direction of (A), and (C) is a side view of the main part in the short side direction of (A). It is a side view of the long side direction of the nozzle plate of another Example. The nozzle plate in background art is shown, (A) is a bottom view, (B) is the fragmentary sectional view of the AA line of (A).

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Solution coating apparatus 16 Coating head 20 Main body part 21 Screw 21A Screw head 22 Nozzle plate 22A Nozzle tip face 22B Screw hole opening face 31 Nozzle 35 Elastic blade (wiping member)
60, 64 screw holes

Claims (2)

  1. A nozzle plate having a nozzle for discharging the solution and a screw hole provided around the nozzle, an application head in which a screw is inserted into the screw hole and fixed to the main body,
    A wiping member for wiping off the solution adhering to the tip surface of the nozzle, and a solution coating apparatus comprising:
    The nozzle plate is formed by forming the opening surface of the screw hole at a position retracted with respect to the discharge direction of the solution from the tip surface of the nozzle.
  2.   The opening surface of the screw hole is formed such that when the nozzle plate is fixed to the main body portion with the screw, the head portion of the screw is in a position retracted with respect to the discharge direction of the solution from the tip surface of the nozzle. The solution coating apparatus according to claim 1.
JP2006095622A 2006-03-30 2006-03-30 Solution coating apparatus Pending JP2007268378A (en)

Priority Applications (1)

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JP2006095622A JP2007268378A (en) 2006-03-30 2006-03-30 Solution coating apparatus

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Application Number Priority Date Filing Date Title
JP2006095622A JP2007268378A (en) 2006-03-30 2006-03-30 Solution coating apparatus

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JP2007268378A true JP2007268378A (en) 2007-10-18
JP2007268378A5 JP2007268378A5 (en) 2012-01-19

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008006418A (en) * 2006-06-30 2008-01-17 Toshiba Corp Droplet ejection head and device

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09156116A (en) * 1995-12-11 1997-06-17 Seiko Epson Corp Ink jet type recorder
JPH11105294A (en) * 1997-10-07 1999-04-20 Tokyo Kikai Seisakusho Ltd Ink jet printing nozzle, orifice member therefor and manufacture thereof
JP2001071497A (en) * 1999-09-03 2001-03-21 Canon Inc Liquid-jet head unit and manufacture for the liquid-jet head unit
JP2002019146A (en) * 2000-07-10 2002-01-23 Canon Inc Liquid jet recording head cartridge and liquid jet recorder
JP2002240289A (en) * 2001-02-21 2002-08-28 Fuji Xerox Co Ltd Ink jet recording head, its manufacturing method, and ink jet recorder
JP2005103895A (en) * 2003-09-30 2005-04-21 Konica Minolta Holdings Inc Ink jet recorder
JP2005153183A (en) * 2003-11-20 2005-06-16 Sony Corp Cleaning blade for liquid ejector, cleaning mechanism with cleaning blade, liquid ejection cartridge, and liquid ejector
JP2005169955A (en) * 2003-12-12 2005-06-30 Sony Corp Discharge surface protecting device, liquid discharge cartridge and liquid discharge device
JP2005270743A (en) * 2004-03-23 2005-10-06 Toshiba Corp Ink jet head

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09156116A (en) * 1995-12-11 1997-06-17 Seiko Epson Corp Ink jet type recorder
JPH11105294A (en) * 1997-10-07 1999-04-20 Tokyo Kikai Seisakusho Ltd Ink jet printing nozzle, orifice member therefor and manufacture thereof
JP2001071497A (en) * 1999-09-03 2001-03-21 Canon Inc Liquid-jet head unit and manufacture for the liquid-jet head unit
JP2002019146A (en) * 2000-07-10 2002-01-23 Canon Inc Liquid jet recording head cartridge and liquid jet recorder
JP2002240289A (en) * 2001-02-21 2002-08-28 Fuji Xerox Co Ltd Ink jet recording head, its manufacturing method, and ink jet recorder
JP2005103895A (en) * 2003-09-30 2005-04-21 Konica Minolta Holdings Inc Ink jet recorder
JP2005153183A (en) * 2003-11-20 2005-06-16 Sony Corp Cleaning blade for liquid ejector, cleaning mechanism with cleaning blade, liquid ejection cartridge, and liquid ejector
JP2005169955A (en) * 2003-12-12 2005-06-30 Sony Corp Discharge surface protecting device, liquid discharge cartridge and liquid discharge device
JP2005270743A (en) * 2004-03-23 2005-10-06 Toshiba Corp Ink jet head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008006418A (en) * 2006-06-30 2008-01-17 Toshiba Corp Droplet ejection head and device

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